JP2003282862A5 - - Google Patents

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Publication number
JP2003282862A5
JP2003282862A5 JP2002080146A JP2002080146A JP2003282862A5 JP 2003282862 A5 JP2003282862 A5 JP 2003282862A5 JP 2002080146 A JP2002080146 A JP 2002080146A JP 2002080146 A JP2002080146 A JP 2002080146A JP 2003282862 A5 JP2003282862 A5 JP 2003282862A5
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JP
Japan
Prior art keywords
nitride semiconductor
semiconductor layer
layer
semiconductor device
nitride
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Application number
JP2002080146A
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English (en)
Japanese (ja)
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JP4229625B2 (ja
JP2003282862A (ja
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Priority to JP2002080146A priority Critical patent/JP4229625B2/ja
Priority claimed from JP2002080146A external-priority patent/JP4229625B2/ja
Publication of JP2003282862A publication Critical patent/JP2003282862A/ja
Publication of JP2003282862A5 publication Critical patent/JP2003282862A5/ja
Application granted granted Critical
Publication of JP4229625B2 publication Critical patent/JP4229625B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002080146A 2002-03-22 2002-03-22 窒化物半導体層とそれを含む窒化物半導体素子 Expired - Lifetime JP4229625B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002080146A JP4229625B2 (ja) 2002-03-22 2002-03-22 窒化物半導体層とそれを含む窒化物半導体素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002080146A JP4229625B2 (ja) 2002-03-22 2002-03-22 窒化物半導体層とそれを含む窒化物半導体素子

Publications (3)

Publication Number Publication Date
JP2003282862A JP2003282862A (ja) 2003-10-03
JP2003282862A5 true JP2003282862A5 (zh) 2005-05-19
JP4229625B2 JP4229625B2 (ja) 2009-02-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002080146A Expired - Lifetime JP4229625B2 (ja) 2002-03-22 2002-03-22 窒化物半導体層とそれを含む窒化物半導体素子

Country Status (1)

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JP (1) JP4229625B2 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005122232A1 (en) * 2004-06-11 2005-12-22 Ammono Sp. Z O.O. High electron mobility transistor (hemt) made of layers of group xiii element nitrides and manufacturing method thereof.
US8927959B2 (en) 2010-06-18 2015-01-06 Sensor Electronic Technology, Inc. Deep ultraviolet light emitting diode
US9806226B2 (en) 2010-06-18 2017-10-31 Sensor Electronic Technology, Inc. Deep ultraviolet light emitting diode
US8907322B2 (en) * 2010-06-18 2014-12-09 Sensor Electronic Technology, Inc. Deep ultraviolet light emitting diode
CN107615602B (zh) * 2015-06-08 2020-05-01 松下知识产权经营株式会社 发光元件
JPWO2022208868A1 (zh) * 2021-04-02 2022-10-06

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