JP2003270292A - Component testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent accumulation of differences in position of a component from its normal position while the component is transferred, by correcting the difference in position of the component in an initial stage before a test. <P>SOLUTION: A testing device 1 is provided with nozzle members 24a, 24b for a head 23 of a P and P robot 20 which moves holding a component in such a way as to be detachable and attachable freely, for example, between a tray Tr on which the component before a test is put and a position of delivery P1 of the component, a light 27 and a component recognition camera 26 which moves with these members and photographs the component put on the tray Tr. A control unit 70 is provided with a recognition means which recognizes the posture of the component on the tray Tr on the basis of data on picture images taken by the camera 26, and a correction means which corrects the held position and the held posture of the component by the nozzle members 24a, 24b on the basis of this recognition result so as to be the specified position and the specified posture. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a component testing apparatus for testing electronic components such as IC chips.

[0002]

2. Description of the Related Art In the process of manufacturing semiconductor devices,
Although it is necessary to perform various tests on the finally manufactured electronic components such as IC chips, an apparatus for automatically performing such tests is disclosed in Japanese Patent Laid-Open No. 11-333775. The device is known.

In this apparatus, an IC chip before a test stored in a tray is picked up by a first transfer apparatus having a nozzle member for picking up a component and placed on a first buffer apparatus, and then the first buffer apparatus reaches the vicinity of the test head. After being transported, the first transport device having a nozzle member for picking up the component first
The IC chip on the buffer device is adsorbed and transferred to the test head for testing. At this time, the suction state of the IC chip is confirmed using a camera. Then, if the suction position of the IC chip is deviated, the test is performed after appropriately correcting it.
After the test, after the IC chip is transferred from the test head to the second buffer device by the second transfer device and transferred to the tray mounting part, the IC chip is transferred onto the predetermined tray according to the test result by the first transfer device. Transfer.

[0004]

However, since the IC chip before the test stored in the tray is rotated by 180 °,
If the position / orientation is deviated from the beginning, the IC chip is transported by the first transport device and the first buffer device until it is transferred to the test head by the second transport device. There is a case that the deviation of is accumulated and exceeds the correctable range. If the holding position and the holding posture of the IC chip transferred to the test head deviate largely from the predetermined position and posture, the electrical connection between the IC chip and the socket becomes impossible and the test is hindered. Become.

On the other hand, if the position and orientation of the IC chip after the test is finally deviated from the position stored in the tray, the deviation cannot be confirmed. Therefore, if the deviation is large, it is stored. Also, parts may be damaged or fall out when taking out the tray, or it may interfere with the subsequent work.

The present invention has been made in view of the above circumstances, and first corrects the positional deviation of parts before the test,
Make sure that the deviation does not accumulate during the transfer of parts, and
It is an object of the present invention to provide a component testing device capable of confirming the final positional deviation of a component after a test.

[0007]

The invention according to claim 1 is
A first tray mounting portion for mounting a tray storing components before the test and a second tray mounting a tray for storing components after the test
A tray placing section, and a component moving means for taking out components from the tray of the first tray placing section and supplying them to the test main unit while storing the tested components in the tray of the second tray placing section. And a control means, wherein the component moving means moves the first tray mounting part or the second tray mounting part and the test main body device while detachably holding the part. Holding means to move, and move with this holding means,
An image pickup means for picking up an image of the parts housed in the tray,
The control means includes a recognition means for recognizing the position and orientation of the components housed in the tray based on the image data picked up by the image pickup means.

According to this structure, the holding means of the component moving means moves the component between the first tray mounting portion or the second tray mounting portion and the test main body device while detachably holding the component. The image pickup means moved together with the holding means picks up an image of the component stored in the tray, and the recognition means of the control means recognizes the position and orientation of the component stored in the tray based on the imaged image data. Therefore, even if the position and orientation of the parts stored in the tray before the test are deviated from the beginning, the deviation can be confirmed. Therefore, if this misalignment is corrected at the first stage, the misalignment of the component can be accumulated and corrected before the component is transported by the component transporting means and transferred to the test main body apparatus. It will not exceed the range.
Therefore, the holding posture of the component transferred to the test main body device does not largely deviate from the predetermined posture, and the electrical connection between the component and the test main body device becomes impossible and the test is not hindered. . In addition, even if the position and orientation of the parts after the test are stored in the tray and they are finally displaced, it is possible to check the displacement, so if the displacement is corrected, it can be stored or stored. There will be no damage or dropout of parts when taking out the tray, and no hindrance to the subsequent work.

According to the second aspect of the invention, based on the recognition result of the component stored in the tray of the first tray mounting portion, when the component is taken out from the tray, the component is held by the holding means. If the correction means for correcting the position and the holding posture to be a predetermined position and posture is provided, it becomes possible to automatically correct the deviation, so that labor is not required for that, and work efficiency is improved. Is improved.

If the image pickup means is provided with the light source for illuminating the part to be imaged as in the third aspect of the invention, a bright image is obtained and image recognition is facilitated. At the same time, the recognition accuracy can be improved.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings. In addition, in order to clarify the directionality, the X axis and the Y axis are shown in the figure.

1 and 2 schematically show a component testing apparatus according to the present invention. As shown in these drawings, a component test apparatus 1 (hereinafter, abbreviated as test apparatus 1) includes a handler 2 that plays a mechanical role of transporting a component and holding (fixing) the component during a test, and the handler 2. The test apparatus main body 3 is incorporated.

The test apparatus body 3 has a test head 4 on the upper surface.
A box-shaped device equipped with a component that sets a component in a socket (not shown) provided in the test head 4 and supplies a test current to an input terminal of the component while receiving an output current from an output terminal of the component. Is configured to determine the quality of the component.

The test apparatus main body 3 is constructed so that it can be attached to and detached from the handler 2. Although not shown in the drawing, for example, the test apparatus main body 3 is mounted on a dedicated trolley so as to be predetermined from below the handler 2. The test head 4
Is fixed to the handler 2 in a state of being exposed to a test area Ta described later from an opening formed in the base 2a of the handler 2, and is assembled to the handler 2. It should be noted that the test head 4 and the test apparatus main body 3 do not necessarily have to be integrated, and only the test head 4 is assembled to the handler 2 and the other parts are arranged at positions apart from the handler 2 and It may be electrically connected by an electric cable or the like.

As shown in FIG. 1, the handler 2 is a substantially box-shaped device with its upper part squeezed out to the side, and the parts stored in the tray are taken out and conveyed to the test head 4, and after the test. The parts are configured to be sorted according to the test result. The configuration will be specifically described below.

The handler 2 is roughly divided into a tray Tr.
Is divided into two areas, a tray storage area Sa in which the test heads 4 are stored and a test area Ta in which the test head 4 and the like are arranged.

In the tray storage area Sa, a plurality of tray storage portions are arranged in parallel in the X-axis direction. In this embodiment, the first to third tray storage portions 12 are sequentially arranged from the left side of FIG.
14 are arranged in parallel. Reference numerals 11 and 15 are temporary storage spaces for empty trays. Then, the tray Tr on which the pre-test (uninspected) parts are placed in the first tray storage section 12 is a failed product (Fail) among the parts after the test in the second tray storage section 13.
In the third tray storage portion 14, each of the trays Tr on which the accepted items (Pass) are placed is stored in the third tray storage portion 14. Here, the first tray storage section 12 corresponds to the first tray mounting section, and the second tray storage section 13 and the third tray storage section 14 correspond to the second tray mounting section.

Each tray Tr has a common structure, and although not shown, for example, a plurality of component accommodating recesses (accommodation spaces) are formed on the surface thereof, and IC chips and the like are formed. The components are stored in the respective component storage recesses.

Each of the tray accommodating sections 12 to 14 is configured to accommodate a plurality of trays Tr in a stacked state on a table that can be raised and lowered, and only the uppermost tray Tr is placed on the base 2a. The tray Tr is arranged in an empty state and the other trays Tr are stored in a space under the base. It should be noted that the doors 12b through 12d are provided on the side walls of the handler 2 so that the trays Tr stored in the respective spaces can be taken in and out.
14b is provided.

In the tray storage area Sa, a P & P robot (Pick & Place Robot) 2 as a component moving means is further provided.
0 is provided. FIG. 3 is a diagram showing a specific configuration around the P & P robot, in which (a) is a plan view,
(B) is a front view.

The P & P robot 20 is shown in FIG.
As shown in (b), it has a movable head 23 (conveying head), and by this head 23, parts are taken out from the tray Tr of the first tray accommodating portion 12 and used by shuttle robots 30A and 30B described later. With delivery
The parts after the test are received from the shuttle robots 30A and 30B, and the second tray storage unit 13 or the third tray storage unit 1 is received.
4 to be transferred to the tray Tr, and also between the tray storage portions 12 and the like, and a temporary storage space between them and the empty tray 1
It also has a tray transport function of transporting the tray Tr between 1 and 15.

The P & P robot 20 will be described in more detail. A pair of fixed rails 21 extending in the Y-axis direction are provided on the base 2a, and a head support member 22 is movably mounted on the fixed rails 21. ing. Further, a ball screw shaft 22b that is driven to rotate by a servo motor 22a provided near the fixed rail 21 and extends parallel to the fixed rail 21 is provided on the base 2a, and the ball screw shaft 22b is the support member 22. It is threadedly mounted on the nut member 22c provided on the. Further, the support member 22 is provided with a pair of upper and lower fixed rails 22d extending in the X-axis direction, the head 23 is movably mounted on the fixed rail 22d, and the head 23 is rotatably driven by a servo motor 22e to be fixed to the fixed rail 22d. A ball screw shaft 22f extending in parallel is provided, and the ball screw shaft 22f is provided on the head 23 to provide a nut portion 22.
It is screwed to g. The support member 22 moves in the Y-axis direction in accordance with the rotational driving of the ball screw shafts 22b and 22f by the servo motors 22a and 22e.
By moving in the X-axis direction, the head 23 is planar in a range including the tray storage sections 12 to 14, empty tray temporary storage spaces 11 and 15, and shuttle robots 30A and 30B, which will be described later. Move to (X-
It is configured to be movable on the Y plane).

A plurality of nozzle members are mounted on the head 23. In this embodiment, a pair of nozzle members 24a, 24b (first nozzle 24a, second nozzle 24) for parts are used.
b: holding means) and a tray nozzle member 25 (referred to as a tray nozzle member 25), a total of three nozzle members are mounted. Each nozzle member 24a, 24b and 25
Is connected to a negative pressure generation source via an electromagnetic valve or the like (not shown), and the nozzle members 24a and
A negative pressure for sucking the component is supplied to the tip of 4b, and the component is sucked by the action of the negative pressure. Similarly, when the empty tray Tr is transported, a negative pressure for tray suction is supplied to the tip of the nozzle member 25, and the tray Tr is sucked by the action of the negative pressure.

Nozzle members 24a, 24b for picking up parts
Can move up and down with respect to the head 23 and rotate (rotation around the nozzle axis). The servo motors 24c (up and down 24c1, rotation 24c2), 24d (up and down 24d).
1, 24 d 2) for rotation are configured to be operated by drive mechanisms having drive sources. Then, the head 2 is placed on the tray Tr such as the first tray storage portion 12 or above the table 32 described later of the shuttle robots 30A and 30B.
In the state in which the nozzles 3 are arranged, components are taken in and out from the tray Tr as the nozzle members 24a and 24b move up and down. When the components are stored in the tray Tr, the nozzle members 24a and 24b are rotated in addition to the nozzle elevating operation so that the components can be stored in a predetermined direction with respect to the tray Tr. It is configured.

The tray nozzle member 25 can only be moved up and down with respect to the head 23, and is configured to be operated by a drive mechanism having a servo motor 25a as a drive source. Then, in a state in which the tray Tr that has become empty due to the removal of the components is adsorbed, the empty tray temporary storage space 1 from the first tray storage unit 12 is moved as the head 23 moves.
1 to transfer the tray Tr to the first
It is configured to suck an empty tray Tr stored in the tray storage portion 12 and transfer it to the second or third tray storage portion 13 or 14.

Nozzle member 24 for picking up components of head 23
3A and 3B, a component recognition camera (image pickup means) 26 including a CCD area sensor is provided at a position adjacent to each other in FIG.
An illumination (light source) 27, which is formed in an annular shape so as to surround the optical axis of the camera 26, is arranged coaxially.

The camera 26 is arranged so as to look downward from the head 23 side of the P & P robot 20 in order to check the storage state (deviation (error) from a predetermined position / orientation) of a component in the tray Tr based on image recognition. It is configured to capture an image of the stored state of the component before the test and also after capturing the component after the test in the tray Tr. The illumination 27 is for illuminating a part to be imaged by the camera 26, and is set slightly lower than that of the camera 26 in consideration of its illumination ability. The illumination 27 illuminates two components housed in the tray Tr at the same time, and the camera 26 is configured to simultaneously capture images of the illuminated two components.

By taking an image of a component housed in the tray Tr with the camera 26 in a state of being close to the image, good image data suitable for image recognition can be obtained, and a brighter captured image can be obtained by the illumination 27. Therefore, the image recognition described later becomes easy and the recognition accuracy is improved.

On the other hand, in the test area Ta, as shown in FIG. 1, the test head 4 and the pair of shuttle robots 3 are provided.
0A, 30B (first shuttle robot 30A, second shuttle robot 30B) and a test robot 40 are arranged.

As described above, the test head 4 is arranged so as to be exposed from the opening formed in the base 2a to a substantially central portion of the test area Ta. A plurality of sockets (not shown) for setting components are arranged on the surface of the test head 4, and in the test apparatus 1, the two sockets are arranged in the X-axis direction. .

Each socket is provided with a contact portion (not shown) corresponding to each lead of a component (IC chip or the like). When the component is positioned in each socket,
Each lead of the component is brought into contact with a corresponding contact portion, and an electrical test such as a continuity test or an output characteristic test against an input current is performed on the component.

The shuttle robots 30A and 30B transfer the parts between the tray storage area Sa and the test area Ta, and the P & P robot 20 and the test robot 40.
2 is a device for delivering and receiving components to and from the fixed rails 31 extending in the Y-axis direction as shown in FIG. 2 and a drive mechanism having a servo motor as a drive source and moved along the fixed rails 31. And a table 32.

Then, the parts delivery position P for the P & P robot 20 set in the vicinity of the first tray storage section 12 is set.
1 and the component delivery position P2 for the test robot 40 which is set on the side of the test head 4 while reciprocating the table 32 along the fixed rail 31 to convey the component by the table 32. ing.

In the table 32, an area for mounting the parts before the test and an area for mounting the parts after the test are determined in advance. In this embodiment, as shown in FIG. Of the 32, the tray storage area Sa side (lower side in the same figure) is the first area a1 on which the component after the test is placed, and the opposite side is the second area a on which the component before the test is placed.
It is defined as 2. In each of the areas a1 and a2, a pair of suction pads 33 are arranged at predetermined intervals in the X-axis direction, specifically, the nozzle member 2 of the head 23 of the P & P robot 20.
It is provided at intervals corresponding to 4a and 24b, and is configured to be transported in a state where components are placed on these pads 33 and sucked when the components are transported.

Each shuttle robot 30A, 30B
The delivery of parts between the P & P robot 20 and the test robot 40 is performed as follows, for example.

First, when the parts before the test are transferred from the P & P robot 20 to the respective shuttle robots 30A and 30B, the P & P robot 20 is moved to a predetermined position of the part delivery position P1 as shown in FIG. 5 (a). Nozzle members 24a, 24
b (head 23) is positioned and the nozzle members 24a,
The table 32 so that the second area a2 corresponds to 24b
Is positioned (this position is called the second position),
In this state, as the nozzle members 24a and 24b are moved up and down, the parts are transferred onto the table 32. On the other hand, when transferring the parts after the test from the shuttle robot 30A (30B) to the P & P robot 20, the table is adjusted so that the first area a1 corresponds to the nozzle members 24a and 24b as shown in FIG. 5 (b). 32 is positioned (this position is referred to as a first position), and in this state, components on the table 32 are adsorbed as the nozzle members 24a and 24b move up and down.

Further, when transferring the parts after the test from the test robot 40 to the shuttle robot 30A (30B), as shown in FIG. 5 (c), the test robot 40 is placed at a predetermined position of the part delivery position P2. The nozzle member 60a, which will be described later,
60b (head body 43a, 43b) is positioned,
The table 32 is positioned so that the first area a1 corresponds to each of the nozzle members 60a and 60b (first position), and in this state, parts are placed on the table 32 as the nozzle members 60a and 60b move up and down. . On the other hand, when the parts before the test are transferred from the shuttle robot 30A (30B) to the test robot 40, the table is adjusted so that the second area a2 corresponds to the nozzle members 60a and 60b as shown in FIG. 5D. 32 is positioned (second position), and in this state, as the nozzle members 60a and 60b move up and down, components are sucked from the table 32.

As described above, the test robot 40 uses the shuttle robots 30A and 30B for the tray storage area S.
The component supplied from a to the test area Ta is conveyed (supplied) to the test head 4 and is held (fixed) while being pressed against the test head 4 during the test. After the test, the component is left as it is. It is a device that delivers (discards) the shuttle robots 30A and 30B.

The test robot 40 has a pair of transfer heads 42A, 42B (first transfer) as a component transfer means which moves along an elevated 2b provided on the base 2a so as to straddle the shuttle robots 30A, 30B. Head 42
A, a second carrying head 42B), and a pair of head bodies 43a and 43b (first head body 43a as the first component moving means, respectively) mounted on the carrying heads 42A and 42B, respectively. Second as the second component moving means
The head main body 43b) is configured to supply and discharge components to and from the test head 4. Hereinafter, the carrying head 42 will be described with reference to FIGS. 1, 2 and 6 to 9.
The configurations of A and 42B will be specifically described.

The carrying heads 42A and 42B respectively have
Fixed rail 45 in the X-axis direction arranged on the elevated 2B
Pair of movable frames 46a, 46b movable along
(First movable frame 46a, second movable frame 46b)
have. A servo motor 47 is fixed to the first movable frame 46a of the movable frames 46a and 46b, and a ball screw shaft 48 extending in the X-axis direction is integrally connected to an output shaft of the servo motor 47. , The ball screw shaft 48 is the second movable frame 46b.
It is screwed onto a nut portion 49 provided on the. In addition, a pair of ball screw shafts 51 parallel to the fixed rails 45, which are each driven to rotate by the servomotor 50, are mounted on the base 2.
These ball screw shafts 51 are provided on the nuts 52 provided on the first movable frames 46a of the transport heads 42A and 42B. That is, as the ball screw shaft 51 is driven to rotate by the servo motor 50, the transport heads 42A and 42B move in the X-axis direction along the fixed rails 45, and the servo motor 47 drives the ball screw shaft 48 to rotate. Accordingly, in each of the transport heads 42A and 42B, the second movable frame 46b is configured to be movable in the X-axis direction relative to the first movable frame 46a as shown by the chain double-dashed line in FIG. ing.

A fixed rail 5 extending in the Y-axis direction is provided on each of the movable frames 46a and 46b, as shown in FIGS.
4 are arranged respectively. A head support member 55 is movably supported on each rail 54, and the head main bodies 43a and 43b are respectively attached to the front end portions (the right end portions in FIG. 7) of these head support members 55. . A ball screw shaft 58 parallel to the fixed rail 54 driven by a servo motor 57 is supported on each of the movable frames 46a and 46b via a fixed base 56, and these ball screw shafts 58 are attached to the head support member 55. The nut portions 59 provided are screwed to each other. As a result, as the ball screw shaft 58 is driven to rotate by each servo motor 57, each head main body 43a, 43b is moved to the movable frame 46.
It is configured to move in the Y-axis direction with respect to a and 46b.

Nozzle members 60a and 60b (first nozzle member 60a and second nozzle member 60b) as suction nozzles are provided on the head bodies 43a and 43b, respectively. Each of the nozzle members 60a and 60b is connected to a negative pressure generation source via an electromagnetic valve or the like (not shown), and when the components are conveyed to the test head 4 or the like, the nozzle members 60a and 60b have a tip for attracting components. A negative pressure is supplied, and the component is sucked by the action of the negative pressure.

The nozzle members 60a and 60b can be moved up and down and rotated (rotated around the nozzle axis) with respect to the frame of the head bodies 43a and 43b, and a drive mechanism (not shown) using a servo motor as a drive source. Is configured to be driven by.

Further, on the right side of the head main body 43b in FIG. 7, a socket recognition camera 62 including a CCD area sensor for picking up a reference mark attached to the socket when supplying components to the test head 4 is mounted. Has been done.

In the test area Ta, between the component transfer position P2 of the shuttle robots 30A and 30B and the test head 4, and in the vicinity of the test head 4, a component recognition camera 64A composed of a CCD area sensor, respectively.
64B is provided. These cameras 64A, 64
B checks the suction state (suction error (deviation)) of the parts based on the recognition of the image, and in order to check the movement error of the test robot 40, the two parts sucked by the respective transport heads 42A and 42B are detected. The shuttle robot 30A is configured so that images can be taken simultaneously from the lower side, and as shown in FIG.
(Or 30B), after the component is picked up, the component recognition camera 64A moves as the head bodies 43a and 43b move.
(Or 64B) The component is arranged above so that the component is imaged. The parts delivery position P
2. Component recognition cameras 64A and 64B and test head 4
Are arranged on the same axis parallel to the X-axis, whereby the transport heads 42A and 42B are moved at the shortest distances from the component delivery position P2 to the test head 4, respectively, and the components before the test are performed on the way. Is configured to be imaged.

A dustproof cover 2c is mounted on the upper part of the handler 2 as shown in FIG. 1, and the space on the base 2a including the test area Ta and the tray storage area Sa is covered by the cover 2c. Is covered.

FIG. 10 is a block diagram showing the control system of the test apparatus 1. As shown in this figure, the test apparatus 1 is
A well-known CPU 70a that executes a logical operation, and the CPU
A control unit 70 (control means) including a ROM 70b for preliminarily storing various programs for controlling 70a and the like and a RAM 70c for temporarily storing various data during operation of the apparatus is further provided. The operation of taking out parts from the tray Tr by the P & P robot 20
An image recognizing means 70d and a calculating means 70e as recognizing means for controlling the storing operation of the components in the tray Tr.
And the determination means 70f as the correction means and the deviation correction means 7
It is provided with 0 g and counting means 70h.

The image recognition means 70d is used for the component recognition camera 2
The position and orientation of the components housed in the tray Tr are recognized based on the image data picked up by the image pickup device 6, and a known image recognition technique is used for this purpose. For example, the image data is subjected to preprocessing such as normalization and binarization, and then the coordinates of the characteristic points are read. The calculation means 70e calculates the amount of deviation of the coordinates of the characteristic point from the expected position using an appropriate algorithm such as the least square method.

The judgment means 70f is for judging whether or not the calculated deviation amount exceeds an allowable value. For this reason, a predetermined allowable value is stored in advance in the ROM 70b.

The deviation correcting means 70g is composed of the nozzle member 24.
The holding positions and holding postures of the components by a and 24b are corrected so as to be a predetermined position and posture. For this reason, the operation of the head 23 on the XY coordinates and the nozzle member 2 are performed.
The calculated shift amount is corrected by a combination with the rotation operations of 4a and 24b.

The counting means 70 counts the number of components stored in each tray Tr and determines whether or not the counted number has reached a predetermined value.

The control unit 70 has an I / O unit (not shown), and the test apparatus main body 3 and the component recognition cameras 26, 6 are provided.
4A, 64B and the socket recognition camera 62 are electrically connected, and the controllers 71, 72, 73A, 73B of the P & P robot 20, the test robot 40, and the shuttle robots 30A, 30B are electrically connected. An operation unit 75 for inputting / outputting various information to / from the control unit 70, a CRT 76 for notifying various information such as a test situation, etc. are electrically connected to the control unit 70.

The operation of each robot of the handler 2 is controlled by the control unit 70 according to the program stored in the ROM 70b.

The operation of the test apparatus 1 under the control of the control unit 70 will be described below with reference to the timing chart of FIG. 11 and the flowcharts of FIGS. 12 and 13.

The timing chart of FIG. 11 shows the operation from a specific time point (time t0) during the test operation, and each robot 20, 30A, 3 at the time point t0.
The states of 0B and 40 (conveying heads 42A and 42B) are as follows. P & P robot: The head 23 is in a moving state so as to store the parts after the test in the tray Tr. First shuttle robot 30A: A component to be supplied to the first transport head 42A next time is held on the table 32 and is in a standby state at the component delivery position P1. First transport head 42A: The components to be tested next are adsorbed by the head bodies 43a and 43b, and the components are placed (standby) above the component recognition camera 64A. Second shuttle robot 30B: Next, the parts to be supplied to the second transfer head 42B are held on the table 32 and are on standby at the parts delivery position P1. Second transport head 42B: The test head 4 is in a state immediately after the end of the test.

Under the above conditions, first, the second
The table 32 of the shuttle robot 30B moves to the parts delivery position P2 (at time t1), and the second carrying head 42B moves to the parts delivery position P2 of the second shuttle robot 30B to deliver the parts after the test (t3).
Time point).

The second carrying head 4 is placed at the part delivery position P2.
When 2B arrives (at time t7), first, the second transfer head 42B moves to the table 32 of the second shuttle robot 30B.
The parts after the test are transferred onto the table 32, and then the table 32
The next part (the part before the test) placed in advance is the second
It is delivered to the robot body 42B. Specifically, the table 32 of the second shuttle robot 30B is first positioned at the first position (see FIG. 5C) at the component delivery position P2, and as the nozzle members 60a and 60b move up and down, the first area on the table 32 is increased. Parts are transferred to a1 (at time t9). After that, the table 32 is positioned at the second position (see FIG. 5D), and the second position on the table is set.
The parts held in the area a2 are each nozzle member 60.
It is adsorbed as a and 60b are moved up and down (at time t12).

When the delivery of the parts between the second carrying head 42B and the second shuttle robot 30B is completed, each part is placed on the parts recognition camera 64B as the second carrying head 42B moves. At time t18), the suction state is checked based on the imaging of the component, and the process for correcting the displacement of the component is performed. When this process is completed, the test head 4
It will be in a standby state for transportation to.

On the other hand, as described above, the second carrying head 42
When B moves to the component delivery position P2, the first carrying head 42A moves to the test head 4 to test the next component at the same timing (at time t3). Then, when the first carrying head 42A reaches the test head 4 (at time t5), the nozzle members 60a and 60b descend, and along with this descending, the components adsorbed on the nozzle members 60a and 60b are adsorbed on the test head 4. The respective sockets are positioned while being simultaneously pressed against the respective sockets, and thereby the test of the parts is started (at time t8).

Although not shown in detail in the same timing chart, the component recognition camera 64A captures an image of the component before positioning the component in the socket, and the position error (deviation) of the first transport head 42A is based on the captured image. Is required. Then, the correction amount of the component is obtained based on this error, and the position of the suction component of each head main body 43a, 43b is corrected by drive-controlling the first carrying head 42A based on this correction amount.

To correct the position of each part, first, the servo motor 5
After the operation of 0 moves the entire first transport head 42A in the X-axis direction, the operation of the servo motor 47 moves only the second movable frame 46b in the X-axis direction. Accordingly, the nozzle members 60a, 60 of the head bodies 43a, 43b are
The position of each of the components attracted to b is corrected in the X-axis direction. Then, the head motors 43a and 43b are moved in the Y-axis direction by the operation of the servo motor 57, and the positions of the respective components are corrected in the Y-axis direction. By rotating around the nozzle axis, the position of each component is corrected in the rotation direction. As a result, the head bodies 43a and 43b
The positions of the components adsorbed on are corrected in the X-axis direction, the Y-axis direction, and the rotation direction, respectively. Note that, for convenience of description, the position correction of each component is divided into the X-axis direction, the Y-axis direction, and the rotation direction and described in chronological order here. However, in reality, the correction of each direction is performed in parallel. Thus, the position correction of each component is promptly performed.

Thereafter, the first carrying head 42A is placed at the target position on the test head 4, and the first carrying head 42A is positioned with respect to the socket based on the imaging of the reference mark by the socket recognition camera 62. As the nozzle members 60a and 60b descend, the parts are set in the socket.

When the test of the parts positioned on the test head 4 is completed (at t20), each nozzle member 60
The parts are removed from the sockets as a and 60b rise (at time t23), and the parts after the test are transferred to the part delivery position P2 with the first shuttle robot 30A as the first transfer head 42A moves. (At time t25). Then, similarly to the component delivery operation between the second transport head 42B and the second shuttle robot 30B described above, the component delivery is performed between the first transport head 42A and the first shuttle robot 30A.

The second carrying head 42B moves to the test head 4 at the same timing as the movement of the first carrying head 42A to the parts delivery position P2 (at time t24), and each head of the second carrying head 42B. The next component sucked by the main bodies 43a and 43b is positioned while being pressed against the test head 4 (at time t26).

On the other hand, for the P & P robot 20 and the shuttle robots 30A and 30B, the test robot 4
The operation is controlled as follows so that the parts can be continuously transferred to and from the transport heads 42A and 42B of 0.

First, in the second shuttle robot 30B, the table 32 is moved to the component delivery position P2 so as to receive the tested components at the same time (at time t7) when the second carrying head 42B reaches the component delivery position P2. To do.
Then, as described above, the parts after the test are delivered from the second carrying head 42B to the table 32 with the table 32 placed in the first position (see FIG. 5C) (at time t9). The table 32 is placed in the second position (see FIG. 5D) (at time t10), and the pre-test component is delivered from the table 32 to the second transport head 42B (at time t12).

After that, the table 32 is moved to the parts delivery position P.
1 (at time t14), first the second position (Fig. 5)
(See (b)) with the table 32 arranged,
The next part (part before the test) is delivered from the P robot 20 to the table 32 (at time t16). Next, the table 32 is placed at the first position (see FIG. 5A) (at time t17), and in this state, the P & P is performed from the table 32.
The parts after the test are delivered to the robot 20 (at time t19), and then the parts delivery position P until the next delivery of parts.
In 1 the stand-by state is set. Although this is the operation control of the second shuttle robot 30B, the operation control of the first shuttle robot 30A is similarly performed in relation to the first transport head 42A.

On the other hand, the operation of the P & P robot 20 is controlled so that the parts that have been tested are stored in the tray Tr according to the test result.

Specifically, first, each nozzle member 24a, 2
The head 23 is arranged on the second tray storage portion 13 or the third tray storage portion 14 (at time t2) to store the component on one side of the components sucked by the 4b, and for example, when the first nozzle member 24a is moved up and down. Accordingly, the components are stored in the tray Tr (time point t4). Next, after the head 23 is placed on the second tray storage portion 13 or the like or the third tray storage portion 14 to store the component on the other side (at time t6), the component is moved as the second nozzle member 24b moves up and down. Stored in tray Tr (t
8).

When the storage of the components after the test in the tray Tr is completed, the head 23 is arranged above the first tray storage portion 12 (at time t11), and a new component is taken out from the tray Tr (at time t13). .

Then, the head 23 is arranged at the part delivery position P1 of the second shuttle robot 30B, and the new part is delivered to the second shuttle robot 30B as described above (at time t16), and the part after the test is performed. Is transferred from the second shuttle robot 30B to the P & P robot 20 (at time t19).

When the delivery of the component to the second shuttle robot 30B is completed, the component is transferred to the tray Tr.
The operation of the head 23 and the like is controlled to be stored in (at time t22).

Thus, thereafter, as shown in FIG.
While moving the first transport head 42A (second transport head 42B) between the component delivery position P2 and the test head 4, transports two components to the test head 4 and positions them to perform a test. In parallel with the second transfer head 4
2B (or the first transfer head 42A) and the second shuttle robot 30B (or the first shuttle robot 30A) while passing parts (that is, passing the part after the test and the next part), The operations of the shuttle robots 30A, 30B and the P & P robot 20 are controlled so that the parts are continuously transferred to and from the first transfer head 42A and the second transfer head 42B.

By the way, in the test apparatus 1 of this embodiment,
When the P & P robot 20 takes out the parts from the tray Tr and when the parts are stored in the tray Tr, the recognition based on the image pickup by the camera 26 and the corresponding processing are performed.

That is, in the operation of taking out a new component (component before the test), as shown in the flowchart of FIG. 12, the support member 22 is moved in the Y-axis direction by driving the servo motor 22a, and the servo motor 22e is driven. The head 23 is moved in the X-axis direction on the support member 22 by driving, and the head 23 is stopped so that the position of the component recognition camera 26 is directly above the pre-test component stored in the tray Tr (step S1). . The component illuminated by the illumination 27 at that position is imaged by the camera 26 (step S2).

Next, the image recognition means 70d performs the image processing on the image data of the imaged parts.
(Step S3), the calculating means 70e, based on the image recognition result, the movement amount of the head 23 (the shift amount ΔX in the X-axis direction,
Amount of deviation ΔY in Y-axis direction and nozzle members 24a, 24b
A deviation amount such as the rotation amount (deviation amount Δθ of the rotation angle θ around the nozzle axis) is calculated (step S4). Then, by driving the servo motors 24c and 24d, the nozzle members 24a and 24b are respectively lowered to suck the components stored in the tray Tr, and the nozzle members 24a and 24b are raised in the suction state (step S5).

Then, the judging means 70f judges whether or not the rotation correction is necessary (step S6). That is, when the rotation amount Δθ of the nozzle member has been calculated in step S4, it is determined whether this Δθ exceeds the allowable value. Here, if it is determined that Δθ exceeds the allowable value (YES in step S6), the deviation correction unit 70g
Drives the servo motors 24c and 24d to rotate the nozzle members 24a and 24b about the nozzle axis by Δθ (step S7), and further drives the servo motors 22a and 22e in the rotated state. Head 2
3 is moved to the component delivery position P1 and the components are delivered to the shuttle robot 30A (step S8). On the other hand, if it is determined that Δθ does not exceed the allowable value,
(NO in step S6), skip step S7,
Immediately execute step S8.

Further, in the storing operation of the components after the test in the tray Tr, as shown in FIG.
By driving 22e, the head 23 of the P & P robot 20 moves and stops on the tray Tr. At that position, the servo motors 24c and 24d are driven to lower the nozzle members 24a and 24b, thereby reducing the tray. Tr
The parts are stored in (step S11). Then, the counting means 70h determines whether or not the tray Tr is full of components (step S12). And the tray Tr
If it is determined that the tray Tr is not full (NO in step S12), the process returns to the front of step S11, but if it is determined that the tray Tr is full (YES in step S12),
The component recognition camera 26 is stopped so that the position of the component recognition camera 26 is directly above the component after the test stored in the tray Tr (step S1).
3) Then, the component illuminated by the illumination 27 at that position is imaged by the camera 26 (step S14).

Next, the image recognition means 70d performs the image processing on the image data of the imaged parts.
(Step S15), the calculating means 70e moves the head 23 based on the image recognition result (deviation amount ΔX in the X-axis direction).
And the deviation amount ΔY in the Y-axis direction and the nozzle members 24a, 2
4b rotation amount (deviation amount Δ of rotation angle θ around the nozzle axis
A deviation amount such as θ) is calculated (step S16). Then, the determination means 70f determines whether or not there is an erroneous storage (step S17). For example, when it is determined that the deviation amount exceeds the allowable value (NO in step S17), a predetermined error display is displayed on the CRT 76 (step S18). on the other hand,
When it is determined that the deviation amount does not exceed the allowable value (YES in step S17), step S18 is skipped and the process ends.

As described above, in the test apparatus 1, the nozzle members 24a and 24b of the P & P robot 20 allow the robots 20, 30, and 40 to move between the tray Tr storing the components before the test and the test head 4. Using,
Parts are moved while being detachably held.
Nozzle members 24a, 2 of the head 23 of the & P robot 20
The component recognition camera 26 that moves together with 4b captures an image of the component stored in the tray Tr. Then, the image recognition means 70d and the calculation means 70e of the control unit 70 recognize the position and orientation of the components housed in the tray Tr based on the image data picked up by the camera 26, and the determination means 70f and the correction means 70g. As a result, the holding positions and holding postures of the components by the nozzle members 24a and 24b are corrected based on the recognition result so that the holding postures and the holding postures of the components are set to the predetermined postures. Even if there is a deviation, the deviation is automatically corrected in the first stage. Therefore, until the component is conveyed by the shuttle robot 30A and the test robot 40 and transferred to the test head 4, the component deviation will not be accumulated and exceed the correctable range. As a result, the test head 4 at the test position
The position and orientation of the component to be transferred to and from the position will not largely deviate from the predetermined position and orientation, and the electrical connection between the component and the socket will not be possible and the test will not be hindered.

On the other hand, after the test, the components are moved while being detachably held between the test head 4 and the tray Tr for storing the component after the test by using the robots 20, 30 and 40. The components stored in the tray Tr are imaged by the component recognition camera 26 that moves together with the nozzle members 24a and 24b of the head 23 of the P & P robot 20. Then, the image recognition means 7 of the control unit 70
0d and the calculating means 70e recognize the position and orientation of the components stored in the tray Tr based on the image data captured by the camera 26, and the positions and orientations of the components stored in the tray Tr are finally deviated. Even in the case, it is possible to confirm the deviation, so if the deviation is corrected, parts may be damaged or fall out during storage or when the tray is taken out, and it may interfere with subsequent work. Things will disappear.

In the above embodiment, the parts after the test are only checked for being stored in the tray Tr. However, if the stored state exceeds the allowable range,
Similar to the parts before the test, the nozzle members 24a and 24b may be sucked to correct the state and return to the original position. By doing so, as in the case of the parts before the test, the manpower for the correction is completely eliminated,
Work efficiency can be improved.

[0083]

As described above, according to the first aspect of the invention, even if the position and orientation of the parts stored in the tray before the test are deviated from the beginning, the deviation is confirmed. It becomes possible. Therefore, if this misalignment is corrected at the first stage, the misalignment of the component can be accumulated and corrected before the component is transported by the component transporting means and transferred to the test main body apparatus. It will not exceed the range. Therefore, the holding posture of the component transferred to the test main body device does not largely deviate from the predetermined posture, and the electrical connection between the component and the test main body device becomes impossible and the test is not hindered. . In addition, even if the position and orientation of the parts after the test are stored in the tray and they are finally displaced, it is possible to check the displacement, so if the displacement is corrected, it can be stored or stored. There will be no damage or dropout of parts when taking out the tray, and no hindrance to the subsequent work.

According to the second aspect of the present invention, since it is possible to automatically correct the deviation, no labor is required for that purpose, and the working efficiency can be improved.

According to the third aspect of the present invention, a bright picked-up image can be obtained, image recognition can be facilitated, and the recognition accuracy can be improved.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing a component testing apparatus according to the present invention.

FIG. 2 is a plan view showing a component testing device.

FIG. 3 is a diagram showing a specific configuration around a P & P robot, in which (a) is a plan view and (b) is a front view.

FIG. 4 is a schematic plan view showing the configuration of the table of the shuttle robot.

5 is a view from the arrow B in FIG. 2 showing the position of the table at the component transfer position of the shuttle robot ((a),
(C) shows the table in the first position,
(B) and (d) show the state where the table is arranged in the second position).

FIG. 6 is a plan view showing a specific configuration of a test robot.

FIG. 7C of FIG. 6 showing a specific configuration of the test robot.
FIG.

FIG. 8D of FIG. 7 showing a specific configuration of the test robot.
It is a -D sectional view.

FIG. 9 is a schematic diagram showing a configuration of a test area.

FIG. 10 is a block diagram showing a control system of the component testing apparatus.

11 is a timing chart showing the operation of the component testing apparatus based on the control of the control system shown in FIG.

FIG. 12 is a flowchart showing the operation of the P & P robot when handling the parts stored in the tray before the test.

FIG. 13 is a flowchart showing the operation of the P & P robot when handling the parts stored in the tray after the test.

[Explanation of symbols]

1 Parts test equipment 2 handler 3 Test equipment body 4 test head 12 1st tray storing section (1st tray placing section) 13 Second tray storage section (second tray mounting section) 14 Third tray storage section (second tray mounting section) 20 P & P robot (Parts moving means) 23 heads 24a, 24b Nozzle member (holding means) 26 Parts recognition camera (imaging means) 27 Lighting (light source) 30A 1st shuttle robot 30B 2nd shuttle robot 40 test robot 70 Control unit 70d Image recognition means (recognition means) 70e Calculation means (recognition means) 70f Judgment means (correction means) 70 g deviation correction means (correction means) 70h counting means Sa tray storage area Ta test area P1, P2 parts delivery position Tr tray

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Keika Muramatsu             Yamaha Motor, 2500 Shinkai, Iwata, Shizuoka Prefecture             Within the corporation (72) Inventor Akira Kishida             Yamaha Motor, 2500 Shinkai, Iwata, Shizuoka Prefecture             Within the corporation F-term (reference) 2G003 AG01 AG11 AG12 AG16 AH01                       AH05 AH07

Claims (3)

[Claims] 1. A first tray mounting part for mounting a tray storing components before testing, and a second tray mounting part for mounting a tray storing components after testing. A component testing apparatus including component moving means for taking out components from the tray of the tray mounting portion and supplying them to the test main body device, and storing the tested components in the tray of the second tray mounting portion, and a control means. Then, the component moving means is a holding means that moves while holding the component in a detachable manner between the first tray placing section or the second tray placing section and the test main body apparatus, and a holding means that moves together with this holding means. And an image pickup means for picking up an image of the parts stored in the tray, and the control means has a recognition means for recognizing the position and orientation of the parts stored in the tray based on the image data picked up by the image pickup means. Parts testing equipment characterized by. 2. A holding position and a holding posture of the component by the holding means when the component is taken out from the tray based on the recognition result of the component stored in the tray of the first tray mounting portion is a predetermined position. The component testing apparatus according to claim 1, further comprising a correction unit that corrects the posture. 3. The image pickup means comprises a light source for illuminating a component to be imaged.
Alternatively, the component testing device according to item 2.