JP2003250261A - Drive unit and its driving method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drive unit which has a dust-proof function and a cooling function. <P>SOLUTION: In the drive unit, coils 24, 25 are wound, and a magnetic pole 11 which causes to flow a magnetic flux in one of opposite directions of magnetic pole pieces 11b, 11c facing in a first direction and a magnetic pole 12 which causes to flow a magnetic flux in the other of opposite directions of magnetic pole pieces 12b, 12c facing in a first direction are alternately disposed. The drive unit includes a primary side 10 wherein a void 18 penetrating in a disposing direction of the magnetic pole is formed by space between the opposing magnetic pole pieces of each magnetic pole, a secondary side 30 that has magnetism and is disposed in the void 18, and a means to feed a gaseous medium to the void 18. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a driving device and a driving method thereof.

[0002]

2. Description of the Related Art As a conventional driving device, for example, Japanese Patent Laid-Open No.
The linear motor described in 001-28875 is known. This linear motor forms an armature unit in which magnetic flux alternately flows between upper and lower magnetic pole teeth to form an armature unit, and a gap between the upper magnetic pole surface and the lower magnetic pole surface of the armature unit is provided with a mover having a permanent magnet. Is a relative movement.

[0003]

Since the conventional linear motor can reduce the leakage of the magnetic flux passing through the gaps between the magnetic pole teeth of the armature and the magnetic attraction force generated between the armature and the mover, A heavy load is applied to the support mechanism of the mover,
There is no possibility that distortion will occur in the device structure and various adverse effects will occur. However, conventional linear motors are required to maintain and manage the device, save so-called maintenance, and improve the cooling performance of the device. Therefore, when the conventional linear motor is put to practical use as a driven body, for example, as a drive source for a door, a conveying device, or the like, it is desirable to make an improvement so as to satisfy the above requirements.

A typical object of the present invention is to provide a driving device having a dustproof function such as prevention of intrusion of intruding objects into the inside of the apparatus or elimination of intruding objects in the inside of the apparatus and a driving method thereof. . Another representative object of the present invention is to provide a driving device having a cooling function for cooling a heating element and a driving method thereof. Further, another typical object of the present invention is to provide a driving device having both the dustproof function and the cooling function, and a driving method thereof.

[0005]

The basic feature of the present invention is to make the pressure in the air gap on the primary side higher than the pressure in the outside. Therefore, in the present invention, the driving device is provided with the pressurizing means, and the driving device is driven so that the primary side and the secondary side move relative to each other while making the pressure in the gap on the primary side higher than the external pressure.

Specifically, the drive device of the present invention is configured such that the primary side and the secondary side move relative to each other. On the primary side, a winding is wound and a gap is formed in which the facing portions of the magnetic poles are continuous in one direction, or the winding is wound and the pole pieces facing each other in the first direction. Magnetic poles that flow a magnetic flux in one direction opposite to each other and magnetic poles that flow a magnetic flux in another direction opposite to the opposite direction of a magnetic pole piece that opposes the first direction are alternately arranged. A magnetic flux generated by energizing the windings is alternately opposed to the air gap,
In other words, it is made to flow by turns. The secondary side has magnetism and is arranged in an air gap on the primary side, and interlinks with the alternating magnetic flux on the primary side. Due to this interlinking, the primary side and the secondary side move relative to each other.

The pressurizing means includes a gaseous medium in the void on the primary side,
For example, a supply means for supplying air or gas, a storage means for storing a gaseous medium, for example, a cylinder or a tank filled with air or gas, or a generating means for generating a gaseous medium, for example, a primary side or a secondary side. A compression device that compresses air by the operation of the driven body driven by, or an acquisition means that obtains a gaseous medium by the operation of the primary side, for example, is attached to the primary side and opens in the operating direction of the primary side to take in outside air. It has a duct and an introduction means for guiding the gaseous medium supplied from the storage means or the generation means or the acquisition means to the void on the primary side.

At both ends of the magnetic pole arrangement direction on the primary side, there are arranged block-like members which are arranged together with the primary side and which are formed with openings which communicate with the gaps on the primary side and penetrate through in the magnetic pole arrangement direction. There is. In addition, when the primary side is composed of a plurality of phases, that is, the winding is wound and the magnetic pole provided with a magnetic pole piece facing each other and generating a magnetic flux in one direction of the facing direction, When a plurality of unit bodies in which magnetic poles provided with magnetic pole pieces that generate magnetic flux in the other direction are alternately arranged are arranged in the magnetic pole arrangement direction,
The block-shaped member is arranged between the units.

The introducing means is provided in a block-shaped member, and is a communication hole that communicates with the outside of the primary side including the opening of the member. In addition, the block-shaped member,
A communication hole is provided for communicating the primary side void including the opening of the member with the outside, and for discharging the gaseous medium guided to the primary side void including the opening of the member to the outside. The communication holes are provided in at least one of members provided at both ends of the primary side in the magnetic pole array direction or members provided between the unit bodies.

In driving the driving device, the primary side and the secondary side are moved relative to each other while supplying the gaseous medium to the gap on the primary side. At this time, when reciprocating the secondary side with respect to the primary side, while supplying a gaseous medium stored outside, for example, air or gas stored in a cylinder or a tank to the void on the primary side, Alternatively, a gaseous medium generated by the operation of the driven body driven by the secondary side,
For example, the secondary side is reciprocated with respect to the primary side while supplying compressed air from the compression device driven by the operation of the driven body driven by the secondary side to the gap on the primary side. When the primary side is reciprocated with respect to the secondary side, a gaseous medium generated by the operation of the driven body driven by the primary side, for example, a compression device driven by the operation of the driven body driven by the primary side A gaseous medium obtained by supplying compressed air from the primary side to the void, or by driving the primary side,
For example, the primary side is reciprocated with respect to the secondary side while the outside air taken in by a duct attached to the primary side and opened in the operation direction of the primary side is supplied to the gap on the primary side.

According to the present invention, when the driving device is driven, the primary side and the secondary side are moved relative to each other while supplying the gaseous medium to the primary side void, so that the pressure in the primary side void is outside. The pressure is higher than the pressure, and a flow of wind by the gaseous medium is formed in the void on the primary side. As a result, intruders that have entered the voids on the primary side, such as dust, are discharged to the outside from the both ends of the primary side in the magnetic pole arrangement direction, the communication holes provided in the block-shaped member, the gaps communicating with the outside, and the like. An intruding object, for example, dust, is prevented from entering the void on the primary side. Further, heat is exchanged with the heat generated in the winding, which is transmitted from the winding wound around the magnetic pole to the air gap on the primary side directly or via the magnetic pole, and the winding is cooled. The heat-exchanged gaseous medium is discharged to the outside through the both ends of the primary side in the magnetic pole array direction, the communication holes provided in the block-shaped member, the gap communicating with the outside, and the like. Therefore, according to the present invention, the drive device can have both the dustproof function and the cooling function.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A drive device according to a first embodiment of the present invention will be described with reference to FIGS. In the drive device 100 of this embodiment, the primary side 10 and the secondary side 30 are in relative motion,
Specifically, it is a linear motor in which the secondary side 30 reciprocates with respect to the primary side 10. The drive device 100 of the present embodiment is
For example, it is used as a driving source for a linear tool such as a tip tool of an electric tool, a fluid transfer device, and a valve body such as an intake valve.

Here, since the primary side 10 is stationary with respect to the secondary side 30, it may be called a stator. Since the secondary side 30 is movable with respect to the primary side 10, it may be called a mover.

On the primary side 10 is a magnetic pole 1 forming a magnetic path.
A plurality of 1 and 12 are provided. The magnetic poles 11 and 12 are iron cores in which a plurality of thin plate-shaped magnetic members 13 and 14 formed of a magnetic material such as iron or silicon steel are laminated (since they are iron cores provided in the stator, they are also called stator iron cores. ).
The magnetic poles 11 and 12 have the same size and shape, and are composed of magnetic pole pieces 11a and 12a, magnetic pole pieces 11b and 12b, and magnetic pole pieces 11c and 12c.

The magnetic pole pieces 11a and 12a have a rectangular cross-section in the laminated cross section, and the flat base 1 which is a base member.
It is fitted in 5. The magnetic pole pieces 11b and 12b have a substantially S-shaped laminated cross section.
It is integrally formed on one end side of a. Pole pieces 11c, 1
2c has a substantially hook-shaped laminated cross section, and is integrally formed on the other end side of the magnetic pole pieces 11a and 12a. Here, the laminated cross section means a cross section in the laminating direction of the magnetic member.

The magnetic pole pieces 11b and 12b and the magnetic pole pieces 11c and 1
2c faces up and down. Specifically, the pole piece 1
The tip sides of 1b and 12b are located above and opposed to the tip sides of the magnetic pole pieces 11c and 12c. The facing portions of the magnetic pole pieces 11b and 12b and the magnetic pole pieces 11c and 12c project to the facing side in the vertical direction and are continuous in the stacking direction of the magnetic members to form parallel planes perpendicular to the vertical direction. Here, the up-down direction means a direction orthogonal to the stacking direction of the magnetic members on a plane orthogonal to the reference plane when the plane of the base 15 is the reference plane.

The magnetic members 13 and 14 are formed by punching one or a plurality of stacked iron plates, silicon steel plates or the like by press working, or by cutting by wire cutting. The magnetic members 13 and 14 have the same size and shape, and are composed of magnetic member pieces 13a and 14a, magnetic member pieces 13b and 14b, and magnetic member pieces 13c and 14c. The magnetic member pieces 13a and 14a are portions corresponding to the magnetic pole pieces 11a and 12a. Magnetic member piece 13
b and 14b are portions corresponding to the pole pieces 11b and 12b. The magnetic member pieces 13c and 14c are magnetic pole pieces 11c and 12c.
Is a part corresponding to.

A plurality of magnetic poles 11 and 12 are arranged alternately in the stacking direction of the magnetic members with spacers 16 interposed therebetween. Moreover, they are arranged so that their shapes are turned upside down by 180 degrees about the vertical direction. The spacer 16 is a molded product formed of an insulating material such as epoxy resin, and is a plate-shaped member having the same size and shape as the cross-sectional shape in the magnetic pole array direction when the magnetic poles 11 and 12 are arrayed. Two openings are formed in the spacer 16. The two openings penetrate in the magnetic pole array direction. One of the openings is continuous with the void 18 described later. The other of the openings is continuous with a void 19 described later.

The driving device 100 is driven by receiving three-phase AC power. Here, when a plurality of magnetic poles 11 and 12 arranged via the spacer 16 is defined as a unit body for one phase, three unit bodies for three phases are provided in this embodiment. The units 17u, 17v, 17w are arranged side by side on the same axis in the magnetic pole arrangement direction.

In the following description of the embodiments of the present invention, the same direction as the stacking direction of magnetic members or the magnetic pole arraying direction is defined as the first direction. In the vertical direction, that is, the base 1
When the plane of No. 5 is the reference plane, the same direction as the direction orthogonal to the stacking direction of the magnetic members or the magnetic pole arrangement direction on the plane orthogonal to the reference plane is defined as the second direction. Further, when the plane of the base 15 is used as the reference plane, the same direction as the direction orthogonal to the stacking direction of the magnetic members or the magnetic pole arrangement direction on the plane parallel to the reference plane is defined as the third direction.

The unit bodies 17u, 17v, 17w have a first
Voids 18 and 19 penetrating in the direction are formed. The gap 18 is formed by the gap between the pole pieces 11b and 11c facing each other in the second direction, the gap between the pole pieces 12b and 12c, and the opening of the spacer 16 being continuous in the first direction. The air gap 19 is formed by the air gap between the magnetic pole pieces 11a, 11b and 11c, the air gap between the magnetic pole pieces 12a, 12b and 12c and the opening of the spacer 16 being continuous in the first direction. The void 18 and the void 19 are arranged side by side in the second direction.

The cross-sectional shape of the void 18 in the first direction is such that the length in the third direction is larger than the length in the second direction, and the length in the second direction at the center of the third direction is at both ends in the third direction. Has an H shape smaller than the length in the second direction. That is, void 1
8 has the above-described shape by the protrusion of the facing portions of the magnetic pole pieces 11b and 12b and the magnetic pole pieces 11c and 12c toward the facing side in the second direction. The cross-sectional shape in the first direction of the void 19 in which the central portion in the third direction projects inward in the second direction more than both ends in the third direction has a length in the third direction larger than that in the second direction. It has a rectangular shape.

Both ends of the primary side 10 in the first direction (unit body 17
Spacers 20 are arranged at the ends of u and 17w opposite to the unit 17v side. The spacer 20 is a molded product formed of an insulating material such as epoxy resin, and is a block-shaped member having the same size and shape as the cross-sectional shape in the first direction when the magnetic poles 11 and 12 are arranged. The spacer 20 is a sandwiching member that sandwiches the primary side 10 from both ends in the first direction by applying a tightening force such as a fixing means such as a bolt / nut to both end faces of the primary side 10 in the first direction.
Spacers 21 are arranged between the units 17u and 17v and between the units 17v and 17w. The spacer 21 is formed in the same manner as the spacer 20, and the unit body 17
It is an interphase insulating member that ensures insulation between u and 17v and between unit bodies 17v and 17w.

An opening 20a is formed in the portion of the spacer 20 facing the space 18. The opening 20a penetrates in the first direction and is continuous with the void 18. Opening 2
The cross-sectional shape of 0a in the first direction has the same size and shape as the cross-sectional shape of the void 18 in the first direction. Spacer 20
An opening 21a is formed in a portion facing the void 19 of FIG. The opening 20b penetrates in the first direction, and the void 1
9 in succession. The cross-sectional shape of the opening 20b in the first direction has the same size and shape as the cross-sectional shape of the void 19 in the first direction.

An opening is also formed in the portion of the spacer 21 facing the voids 18, 19. The opening penetrates in the first direction and is continuous with the corresponding void. The cross-sectional shape of the opening in the first direction has the same size and shape as the cross-sectional shape of the corresponding void in the first direction.

A dustproof cover 22 is provided on the cross section of the spacer 20 in the first direction on the side opposite to the unit bodies 17u, 17w side. The dust-proof cover 22 is a means for stopping dust and the like from entering the void 18 from the outside at both ends of the primary side 10 in the first direction. The dust cover 22 is a molded member formed of a flexible member such as rubber, and is a thin sheet-shaped member having the same physical shape and shape as the cross-sectional shape of the spacer 20 in the first direction.

An opening 22a is formed at a portion of the dust cover 22 facing the opening 20a. The opening 22a penetrates in the first direction and is continuous with the opening 20a. The cross-sectional shape of the opening 22a in the first direction is the opening 20a.
Has the same shape as the cross-sectional shape in the first direction. The cross-sectional area of the opening 22a in the first direction is smaller than the cross-sectional area of the opening 20a in the first direction, and is formed in such a size that it can contact the outer surface of the secondary side 30 described later.

An opening 22b is formed at a portion of the dust cover 22 facing the opening 20b. The opening 22b penetrates in the first direction and is continuous with the opening 20b. The cross-sectional shape of the opening 22b in the first direction is the opening 20b.
Has the same size and shape as the cross-sectional shape in the first direction.

A fixing member 23 is provided on a cross section of the dustproof cover 22 opposite to the spacer 20 in the first direction. The fixing member 23 is a means for fixing the dustproof cover 22 to the cross section of the spacer 20 in the first direction by using a tightening force such as a bolt and a nut for fixing the primary side 10 from both ends in the first direction. The fixing member 23 is a molded product formed of the same member as the spacer 20, and is a plate-shaped member having the same size and shape as the cross-sectional shape of the spacer 20 in the first direction.

An opening 23a is formed in a portion of the fixing member 23 facing the opening 22a. The opening 23a penetrates in the first direction and is continuous with the opening 22a. The cross-sectional shape of the opening 23a in the first direction is the opening 22a.
Has the same shape as the cross-sectional shape in the first direction. The cross-sectional area of the opening 22a in the first direction is larger than the cross-sectional area of the opening 22a in the first direction. The cross-sectional area of the opening 22a in the first direction is the same as the cross-sectional area of the opening 20a in the first direction.

An opening 23b is formed in a portion of the fixing member 23 facing the opening 22b. The opening 23b penetrates in the first direction and is continuous with the opening 22b. The cross-sectional shape of the opening 23b in the first direction is the opening 22b.
Has the same size and shape as the cross-sectional shape in the first direction.

Windings 24 and 25 are attached to the unit bodies 17u and 17w including the spacer 20, the dustproof cover 22, the fixing member 23 and the unit body 17v including the spacer 21. The winding wire 24 is mounted so as to travel back and forth in the first direction between the outer side of the pole pieces 11b and 12c in the third direction and the gap 19. The winding 25 is mounted so as to travel back and forth between the outer sides of the magnetic pole pieces 11b and 12c in the third direction and the gap 19 in the magnetic pole arrangement direction. The windings 24, 25 are formed by winding a plurality of wire members made of a conductive material, for example, copper, and are wound with an insulating member or via the insulating members 17u, 17v, 17w. Is attached to.

In the space 18 including the openings 20a, 22a, 23a and the openings formed in the spacer 21, the secondary side 3 is formed.
0 is placed. The secondary side 30 has openings 20a, 2
The movable member 31 and the permanent magnet 32 are configured to be movable in both directions of the first direction in the space 18 including the openings formed in the spacers 21 and 2a and 23a. The driven body described above is connected to one end of the movable member 31 in the first direction.

The movable member 31 is a molded product formed of a non-magnetic material such as stainless steel or plastic, and is composed of a magnet case 31a and a guide 31b. The cross-sectional shape of the movable member 31 in the first direction is H-shaped, which is the same as the cross-sectional shape of the void 18 in the first direction. The cross-sectional area of the movable member 31 in the first direction is smaller than the cross-sectional area of the void 18 in the first direction. Further, the cross-sectional area of the movable member 31 in the first direction is large enough to make sliding contact with the dustproof cover 22.

The magnet case 31a extends in the first direction, is longer than the length of the primary side 10 in the first direction, and extends from the void 18 including the openings formed in the openings 20a, 22a, 23a and the spacer 21. It projects in both directions of one direction. The magnet case 31a is a plate-shaped member having a rectangular plate surface, and is composed of the magnetic pole pieces 11b and 12b and the magnetic pole piece 11.
The plate surface is opposed to the portion facing c and 12c. A plurality of holding portions that hold the permanent magnets 32 are formed in the magnet case 31a. A plurality of holding portions formed on the magnet case 31a are arranged in the first direction, and the held permanent magnets 32 are used to hold the magnetic pole pieces 11b and 12b and the magnetic pole pieces 11.
It is configured to be exposed on the side facing the c and 12c (both directions in the second direction).

Guides 31b are fixed to both ends of the magnet case 31a in the third direction. Guide 31b
Holds the permanent magnet 32 in the holding portion of the magnet case 31a, and sandwiches both ends of the magnet case 31a in the second direction with the recessed portions. Guide 31b is first
The edge member has a concave cross-sectional shape in the direction, and extends in the first direction along the magnet case 31a. Guide 31b
Are portions arranged at both ends of the void 18 in the third direction, and the thickness in the second direction is larger than the plate thickness in the second direction of the magnet case 31a.

The permanent magnet 32 is made of cobalt, neodymium,
It is formed from a rare earth material such as boron. The permanent magnet 32 is formed in a plate shape so that the plate surface has a rectangular shape. The permanent magnet 32 has a magnet case 3 such that the polarities (N pole, S pole) alternate in the first direction.
1a. As a result, the permanent magnet 32 is
The magnet case 3 is exposed in both directions of the second direction and has alternating polarities (N pole, S pole) in the first direction.
A plurality are arranged in 1a. A non-magnetic member that is a part of the magnet case 31a is interposed between the permanent magnets 32 that are adjacent to each other in the first direction.

A communication hole 20d is formed in a central portion of the spacer 20 in the third direction and in a portion facing the upper side of the magnet case 31a in the second direction. Third of the spacer 20
Communication holes 20c, 20e, 20f, 20g are formed at both end portions in the direction, and the facing portion of the guide 31b with the upper side in the second direction and the facing portion of the guide 31b with the third direction. Communication holes 20c, 20d, 20e, 20f, 20g
Communicates the void 18 including the opening 20a with the outside.

A gaseous medium feeding means 26 connected to the gaseous medium feeding means is connected to the communication hole 20c.
The communication hole 20 c allows the opening of the gaseous medium supplied from the gaseous medium supply means via the gaseous medium supply means 26.
It is a gaseous medium introduction means introduced into the void 18 containing 0a. The communication holes 20d, 20e, 20f, 20g are gaseous medium discharging means for discharging the gaseous medium introduced into the void 18 including the opening 20a to the outside.

As the gaseous medium, air enclosed in an air cylinder or an air tank which is a gaseous medium supply means and a gaseous medium storage means is supplied. The gaseous medium feeding means 26 is composed of a flexible member, for example, a hose 26a which is a tubular member formed of rubber or plastic, and a connecting member 26b which connects the hose 26a and the communication hole 20c.

Next, the operation of the driving device 100 of this embodiment will be described. When an exciting current flows through the windings 24 and 25, the magnetic pole pieces 11b and 12c are N poles and the magnetic pole pieces 11c and 12 are
b becomes an S pole, a magnetic field is formed, and a magnetic flux is generated in the magnetic poles 11 and 12. The magnetic flux generated in the magnetic pole 11 is generated by the magnetic pole piece 1.
1c to the magnetic pole piece 11b through the magnetic pole piece 11a, and the air gap between the magnetic pole piece 11b and the magnetic pole piece 11c forms a magnetic pole piece 11b.
Flows from the magnetic pole piece 11c through the S pole and N pole of the permanent magnet 32. That is, the magnetic flux is one direction in the second direction (from top to bottom)
Flows toward.

On the other hand, the magnetic flux generated in the magnetic pole 12 flows from the magnetic pole piece 12b to the magnetic pole piece 12c via the magnetic pole piece 12a,
The air gap between the pole piece 12b and the pole piece 12c is defined by the pole piece 12
The current flows from c to the pole piece 12b through the S pole and N pole of the permanent magnet 32. That is, the magnetic flux flows in the second direction in the other direction (from bottom to top). In this embodiment, since the magnetic poles 11 and 12 are alternately arranged in the first direction, the gap 18 is formed in the second direction.
The flow directions of the magnetic fluxes flowing in the opposite directions are alternately opposite.

According to this embodiment, since the magnetic flux flows as described above, the length of the magnetic path of the magnetic circuit through which the effective magnetic flux flows becomes shorter, the magnetic resistance becomes smaller, the effective magnetic flux increases, and the leakage magnetic flux increases. Less.

A magnetic flux is generated from the permanent magnet 32 on the secondary side 30. An attractive force is generated in the air gap 18 by the interaction between the magnetic flux generated on the primary side 10 and the magnetic flux generated on the secondary side 30. The secondary side 30 is retained in the gap 18 by the component of the suction force in the second direction, and the component of the suction force in the first direction serves as a driving force to relatively move in the gap 18 in both directions in the first direction. To do.

According to this embodiment, the distance from the pole piece facing one side of the secondary side 30 in the second direction to the secondary side 30,
The distance from the magnetic pole piece facing the other side of the secondary side 30 in the second direction to the secondary side 30 is equal. For this reason, the magnitude of the attractive force acting between the secondary side 30 and the magnetic pole piece facing the one side of the secondary side 30 in the second direction, and the magnitude of the attraction force that opposes the other side of the secondary side 30 in the second direction. The attraction forces acting between the pole pieces and the secondary side 30 are equal in magnitude, and the directions in which the attraction forces act are opposite. As a result, the overall attractive force between the primary side 10 and the secondary side 30 can be offset to zero, and the attractive force between the magnetic pole pieces and the secondary side 30 facing each other in the second direction can be reduced. be able to.

When the secondary side 30 moves relative to the primary side 10, the hose 26a is removed from the air cylinder or air tank.
Air is supplied through the. The supplied air is the communication hole 2
0c is introduced into the void 18 (including an opening continuous with the void 18; simply referred to as the void 18 in the following description) to pressurize the void 18. Due to this pressurization, the pressure inside the void 18 becomes higher than the pressure outside, and the primary side 10
A gap formed in, for example, openings at both ends of the air gap 18 in the first direction, the magnetic pole 12 sandwiching the magnetic pole 11 from both sides in the first direction.
During this period, it is possible to prevent intrusion of intruding substances into the space 18, such as dust that tries to enter the space 18 from between the magnetic poles 11 that sandwich the magnetic pole 12 from both sides in the first direction, and dust that adheres to the secondary side 30. it can.

Further, the dustproof cover 2 which comes into contact with the secondary side 30
By 2, it is possible to prevent the invasion of invading substances such as dust trying to enter the void 18 from the openings at both ends of the void 18 in the first direction and dust adhering to the secondary side 30, The intrusion prevention effect can be further improved.

Further, an air flow is generated in the void 18 by the air introduced into the void 18. By this air flow, void 1
Dust or other intruding material that has entered the inside 8 from the inside of the void 18 to the outside is formed in the gap on the primary side 10, for example, the communication hole 20c,
20e, 20f, 20g, openings at both ends of the air gap 18 in the first direction, and magnetic poles 12 sandwiching the magnetic pole 11 from both sides in the first direction.
, The magnetic pole 12 can be discharged through the magnetic poles 11 sandwiching the magnetic pole 12 from both sides in the first direction.

Further, the windings 24 and 25 can be cooled by the air flow generated in the space 18. Ie winding 2
When the heat is generated in the magnetic poles 4 and 25, the generated heat is transferred to the magnetic poles 11 and 12, and a part of the heat is radiated from the magnetic poles 11 and 12 to the outside and a part of the magnetic poles 11 and 12 is discharged into the air gap 18. Therefore, when the air flow is generated in the void 18, the heat generated by the windings 24, 25 released in the void 18 can be released to the outside, and the windings 24, 25 can be cooled. Further, the airflow is generated between the magnetic poles 12 that sandwich the magnetic pole 11 from both sides in the first direction,
The magnetic pole 12 flows into the windings 24 and 25 through a gap such as between the magnetic poles 11 sandwiching the magnetic pole 12 from both sides in the first direction. This allows
Since the heat radiation emitted from the outer surfaces of the windings 24 and 25 can be released to the outside, the windings 24 and 25 can be directly cooled.

In addition, air is evacuated through the communication hole 20d.
8 is guided to the inside of the air gap 8. At this time, the air guided to the inside of the space 18 is magnet case 31a facing the communication hole 20d.
Sprayed against. As a result, the permanent magnet 32 held in the magnet case 31a can be cooled.

According to the present embodiment described above, it is possible to prevent the intrusion of dust or other intruding material into the void 18, and the dust or other intruding material that has entered the void 18 is discharged from the void 18 to the outside. It is possible to provide a drive device having a dustproof function that can be discharged to the inside. Therefore, according to the present embodiment, it is possible to reduce the number of times of maintenance and management such as periodical disassembly and cleaning of the drive unit, so-called maintenance, and labor saving of the drive unit.

Further, according to this embodiment, the windings 24, 25
Further, it is possible to provide a drive device having a cooling function capable of cooling the permanent magnet 32. Therefore, according to this embodiment, the cooling performance of the drive device can be improved.

In the present embodiment, air has been described as an example of the gaseous medium, but it may be gas enclosed in a gas cylinder or a gas tank which is a gaseous medium supply means and a gaseous medium storage means. . It is preferable that the gas has a cooling effect and does not adversely affect the human body or the environment.

In this embodiment, an air cylinder or an air tank has been described as an example of the gaseous medium supply means, but a gaseous medium for generating a gaseous medium by the operation of the driven body driven by the secondary side 30 is used. A medium generating means such as a compression device for compressing air or gas may be used.

Further, in the present embodiment, the hose 26a has been described as an example of the tubular member of the gaseous medium feeding means 26, but a metal or plastic pipe or the like may be used.

In the present embodiment, the case where the movable member 31 is longer than the length of the primary side 10 in the first direction has been described as an example, but the movable member 31 is shorter than the length of the primary side 10 in the first direction. In some cases.

In the present embodiment, the case where the gaseous medium feeding means 26 is connected to the communication hole 20d has been described as an example, but it may be connected to any of the communication holes 20c, 20e, 20f and 20g. .

In the present embodiment, the case where the gaseous medium is taken into the space 18 through the spacers 20 arranged at both ends of the primary side 10 in the first direction has been described as an example.
The gaseous medium may be taken into the void 18 via the spacers 21 arranged between the unit bodies 17u and 17v and between the unit bodies 17v and 17w.

Further, as a place for taking the gaseous medium into the void 18, a gap formed on the primary side 10 or the like may be used. For example, between the magnetic poles 12 that sandwich the magnetic pole 11 from both sides in the first direction, and between the magnetic poles 1 that sandwich the magnetic pole 12 from both sides in the first direction.
The gaseous medium can be taken into the void 18 through the gap formed between the two. It should be noted that epoxy resin or the like is injected into a gap formed between the magnetic poles 12 sandwiching the magnetic pole 11 from both sides in the first direction, a gap formed between the magnetic poles 11 sandwiching the magnetic pole 12 from both sides in the first direction, or the entire primary side 10 is epoxy resin. There is a case to mold with. In such a case, when the epoxy resin is injected or the epoxy resin is molded, the tubular member is embedded so that the outside and the void 18 are communicated with each other, so that the gaseous medium is taken into the void 18. be able to.

A drive device according to a second embodiment of the present invention will be described with reference to FIGS. 7 and 8. Drive device 20 of the present embodiment
Reference numeral 0 is a linear motor in which the primary side 10 and the secondary side 30 move relative to each other, specifically, the primary side 10 reciprocates with respect to the secondary side 30. The drive device 200 according to the present embodiment is used as a drive source for a linearly driven object such as an elevator door or a table of a transfer device.

Since the primary side 10 is movable with respect to the secondary side 30, it may be called a mover. Since the secondary side 30 is stationary with respect to the primary side 10, it is sometimes called a stator. Therefore, the movable member 31 is called the fixed member 31. Further, in the present embodiment, the base is omitted because the primary side 10 is movable. In the description of this embodiment, only parts different from the previous example will be described.

In the drive unit 200 of this embodiment, the duct 27 is connected to the communication holes 20c and 20e of the spacer 20 as the gaseous medium supply means. The duct 27 has the primary side 10
Is a gaseous medium acquisition means for obtaining outside air by driving
The outer tubular shape is an elbow-shaped metal or plastic cylindrical member.

The diameter of the tip portion of the duct 27 gradually widens toward the tip. That is, the tip portion of the duct 27 is formed so as to widen toward the end. The opening direction of the duct 25 is different. Ie spacer 2
At 0, one side of the duct 27 is open to one side in the first direction, and the other side of the duct 27 is open to the other side in the first direction.

In the present embodiment thus constructed, the attraction force generated by the interaction between the magnetic flux generated on the primary side 10 and the magnetic flux generated on the secondary side 30 causes the primary side 10
Moves relative to the secondary side 30 in both the first direction. Due to this relative movement, the duct 27 takes in outside air. The outside air taken in is introduced into the void 18 through the communication holes 20c and 20e, pressurizes the void 18, and prevents invading substances such as dust from entering the void 18, as in the previous example.

Further, the outside air introduced into the void 18 generates an air flow in the void 18, which prevents intrusion of intruding substances such as dust into the void 18, as in the previous example. In addition, the void 18
Due to the air flow generated inside, the windings 24, 2 are
5 and the permanent magnet 32 are cooled.

According to the present embodiment, as in the previous example, it is possible to provide the drive device having the dustproof function and the cooling function, so that the maintenance of the drive device can be saved and the cooling performance can be improved. .

In the present embodiment, as the gaseous medium supply means, the gaseous medium acquisition means for obtaining the outside air by driving the primary side 10 has been described as an example, but the air cylinder or the air tank or the gas cylinder or the gas tank described in the previous example is described. May be used. Further, as the gaseous medium supply means, a gaseous medium generation means for generating a gaseous medium by the operation of the driven body driven by the primary side 10, for example, a compression device for compressing air or gas may be used.

In the present embodiment, the case where the duct 27 is connected to the communication holes 20c and 20e has been described as an example.
It may be connected to any of the communication holes 20d, 20f, 20g.

In the present embodiment, the case where the gaseous medium is taken into the space 18 via the spacers 20 arranged at both ends of the primary side 10 in the first direction has been described as an example.
The gaseous medium may be taken into the void 18 via the spacers 21 arranged between the unit bodies 17u and 17v and between the unit bodies 17v and 17w.

Further, as a place for taking the gaseous medium into the void 18, a gap formed on the primary side 10 or the like may be used. For example, the gaseous medium is emptied from a gap formed between the magnetic poles 12 sandwiching the magnetic pole 11 from both sides in the magnetic pole arrangement direction and between the magnetic poles 11 sandwiching the magnetic pole 12 from both sides in the magnetic pole arrangement direction.
8 can be incorporated. It should be noted that epoxy resin or the like is injected into a gap formed between the magnetic poles 12 sandwiching the magnetic pole 11 from both sides in the magnetic pole arrangement direction, or a gap formed between the magnetic poles 11 sandwiching the magnetic pole 12 from both sides in the magnetic pole arrangement direction, or the entire primary side 10 is epoxy resin. There is a case to mold with. In such a case, at the time of injecting the epoxy resin or molding with the epoxy resin, by embedding a tubular member or the like to make the outside communicate with the void 18,
A gaseous medium can be entrapped within the void 18.

[0071]

According to the present invention described above, since it is possible to provide a drive unit having both a dustproof function and a cooling function, maintenance / management of the drive unit, so-called labor saving of maintenance and improvement of cooling performance can be achieved. Can be planned.

[Brief description of drawings]

FIG. 1 is a perspective view showing an external configuration of a drive device that is a first embodiment of the present invention.

FIG. 2 is an enlarged perspective view in which a part of FIG. 1 is enlarged.

3 is a sectional view taken along the line III-III of FIG.

FIG. 4 is a sectional view taken along the line IV-IV in FIG.

FIG. 5 is a diagram showing the flow of magnetic flux in the magnetic poles of the first embodiment of the present invention.

FIG. 6 is a plan view showing a configuration of a magnetic member forming a magnetic pole according to the first embodiment of the present invention.

FIG. 7 is a perspective view showing an external configuration of a drive device that is a second embodiment of the present invention.

8 is a sectional view taken along the line VIII-VIII in FIG.

[Explanation of symbols]

10 ... Primary side, 11, 12 ... Magnetic pole, 13, 14 ... Magnetic member, 15 ... Base, 16, 20, 21 ... Spacer, 17
u, 17v, 17w ... Unit body, 18, 19 ... Void, 22
... Dustproof cover, 23 ... Fixing member, 24, 25 ... Winding,
26 ... Gaseous medium feeding means, 27 ... Duct, 30 ... Secondary side, 31 ... Movable member, 32 ... Permanent magnet, 100, 200
… Drive.

Continued front page    (72) Inventor Koji Maki             7-1-1, Omika-cho, Hitachi-shi, Ibaraki Prefecture             Inside the Hitachi Research Laboratory, Hitachi Ltd. (72) Inventor Yasuo Morooka             7-1-1, Omika-cho, Hitachi-shi, Ibaraki Prefecture             Inside the Hitachi Research Laboratory, Hitachi Ltd. (72) Inventor Isamu Numata             Hitachi 9-2, Aise-cho, Hitachi City, Ibaraki Prefecture             Equipment Engineering Co., Ltd. (72) Inventor Hisao Tadokoro             Hitachi 9-2, Aise-cho, Hitachi City, Ibaraki Prefecture             Equipment Engineering Co., Ltd. (72) Inventor Kenro Morimoto             4-6 Kanda Surugadai, Chiyoda-ku, Tokyo             Within Hitachi, Ltd. (72) Inventor Yasuchi Mito             4-6 Kanda Surugadai, Chiyoda-ku, Tokyo             Within Hitachi, Ltd. (72) Inventor Hiroshi Ueno             Hitachi 9-2, Aise-cho, Hitachi City, Ibaraki Prefecture             Equipment Engineering Co., Ltd. (72) Inventor Hideki Shimane             Hitachi 9-2, Aise-cho, Hitachi City, Ibaraki Prefecture             Equipment Engineering Co., Ltd. F term (reference) 5H609 BB08 BB18 PP02 PP09 QQ02                       QQ03 QQ16 QQ18 RR27 RR31                       RR46                 5H641 BB06 BB14 GG02 GG04 GG08                       HH03 JA02 JB04 JB08

Claims (39)

[Claims] 1. A primary side, around which a winding is wound and which has an air gap in which opposing portions of magnetic poles are continuous in one direction,
While having magnetism, a secondary side arranged in the void,
A driving device, comprising: a pressurizing unit for increasing the pressure in the gap higher than the external pressure. 2. A magnetic pole, which is wound and has a magnetic flux flowing in one direction opposite to a pole piece facing in the first direction, and a magnetic flux flowing in another direction opposite to the pole piece facing in the first direction. Magnetic poles that flow through are alternately arranged, and a primary side in which a gap is formed between the opposite pole pieces of each of the magnetic poles that penetrates in the magnetic pole arrangement direction; and a secondary side that has magnetism and is arranged in the gap. And a pressurizing unit for increasing the pressure in the gap higher than the external pressure. 3. The drive device according to claim 1, wherein the pressurizing means is a supply means for supplying a gaseous medium to the void. 4. A primary side, around which a winding is wound and which has an air gap formed by facing portions of magnetic poles extending in one direction.
While having magnetism, a secondary side arranged in the void,
A drive unit for supplying a gaseous medium to the gap. 5. A magnetic pole which is wound and has a magnetic flux flowing in one direction of a magnetic pole piece facing the first direction, and a magnetic flux flowing in another direction of the magnetic pole piece facing the first direction. Magnetic poles that flow through are alternately arranged, and a primary side in which a gap is formed between the opposite pole pieces of each of the magnetic poles that penetrates in the magnetic pole arrangement direction; and a secondary side that has magnetism and is arranged in the gap. A drive unit for supplying a gaseous medium to the space. 6. The drive device according to claim 3, wherein the supply means guides the storage means for storing the gaseous medium and the gaseous medium supplied from the storage means to the gap. A driving device comprising: an introducing unit. 7. The driving device according to claim 3, wherein the supply unit generates the gaseous medium, and the gaseous medium supplied from the generating unit enters the gap. A drive device comprising: an introducing means for guiding. 8. The drive device according to claim 3, wherein the supply unit obtains the gaseous medium by the operation of the primary side, and the gaseous state supplied from the obtaining unit. A driving device comprising: an introducing unit that guides the medium into the space. 9. A magnetic pole, which is wound and has a magnetic flux flowing in one direction of a facing direction of a magnetic pole piece facing in a first direction, and a magnetic flux in another direction of a facing direction of a magnetic pole piece facing in the first direction. Magnetic poles which flow through the magnetic poles are alternately arranged, and a primary side in which a gap penetrating in the magnetic pole arrangement direction is formed between the magnetic pole pieces facing each other, and an opening which is continuous with the gap and penetrates in the magnetic pole arrangement direction. And a member arranged with the primary side, having a magnetism, a secondary side arranged in the void including the opening, and a supply means for supplying a gaseous medium, Is characterized in that it has a communication hole that communicates the void including the opening with the outside and guides the gaseous medium supplied from the supply means to the void including the opening. Drive. 10. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in a direction opposite to a pole piece facing in the first direction,
Magnetic poles that flow magnetic flux in the other direction opposite to the facing magnetic pole pieces are alternately arranged, and a primary side in which a gap penetrating in the magnetic pole arrangement direction is formed between the facing magnetic pole pieces of each magnetic pole. A member having an opening that is continuous with the air gap and penetrates in the magnetic pole arrangement direction and that is arranged with the primary side; and a secondary side that is magnetic and that is arranged in the air gap that includes the opening. And a supply means for supplying a gaseous medium, wherein the member communicates the void including the opening with the outside, and the gaseous medium supplied from the supply means includes the opening. It has a communication hole leading to the void, a communication hole communicating the void including the opening and the outside, and discharging the gaseous medium guided to the void including the opening to the outside. Drive device characterized by 11. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction in which the magnetic pole pieces facing in the first direction face each other.
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. A member having magnetism, a secondary side having magnetism and arranged in the space including the opening, and a supply means for supplying a gaseous medium, and at least one of the members has the opening. And a communication hole that communicates the void including the above with the outside and guides the gaseous medium supplied from the supply means to the void including the opening. 12. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in a direction opposite to a pole piece facing the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. The magnetic pole array on the primary side of the member, which has magnetic properties, a secondary side which is magnetic, and which is arranged in the gap including the opening, and a supply means for supplying a gaseous medium The members arranged at both ends in the direction have communication holes that communicate the void including the opening and the outside with each other, and guide the gaseous medium supplied from the supply means to the void including the opening. It is characterized by Drive. 13. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in a direction opposite to a pole piece facing the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. A member having magnetism, a secondary side having magnetism and arranged in the space including the opening, and a supply means for supplying a gaseous medium, and at least one of the members has the opening. And a communication hole for communicating the gaseous medium supplied from the supply means to the space including the opening, and the space including the opening for communication with the outside. Together with the opening Driving apparatus characterized by comprising and a communication hole for discharging the gaseous medium guided to the gap, including the outside. 14. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction of a facing direction of a pole piece facing the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. The magnetic pole array on the primary side of the member, which has magnetic properties, a secondary side which is magnetic, and which is arranged in the gap including the opening, and a supply means for supplying a gaseous medium Members arranged at both ends in the direction communicate with the void including the opening and the outside, and a communication hole that guides the gaseous medium supplied from the supply unit to the void including the opening, The sky including the opening And communicated with an external drive device, characterized in Naruto and a communication hole for discharging the gaseous medium guided to the gap containing the opening to the outside. 15. The drive unit according to claim 9, wherein the supply unit is a storage unit that stores the gaseous medium. 16. The drive device according to claim 9, wherein the supply means is a generation means for generating the gaseous medium. 17. The drive unit according to claim 9, wherein the supply unit is an acquisition unit that obtains the gaseous medium by the operation of the primary side. 18. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction of the facing magnetic pole piece facing the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. And a member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, the secondary side being relative to the primary side. The members arranged at both ends in the magnetic pole array direction on the primary side of the member communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium It has a communicating hole leading to the space comprising the supply means, the driving device, characterized in that the storage means for storing the gaseous medium. 19. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction of a facing direction of a pole piece facing in the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. And a member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, the secondary side being relative to the primary side. The members arranged at both ends in the magnetic pole array direction on the primary side of the member communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium It has a communicating hole leading to the space comprising the supply means, the driving device, characterized in that the generating means for generating the gaseous medium. 20. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction of the facing magnetic pole piece facing in the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. A member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, and the primary side with respect to the secondary side. The members arranged at both ends in the magnetic pole array direction on the primary side of the member communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium It has a communicating hole leading to the space comprising the supply means, the driving device, characterized in that the generating means for generating the gaseous medium. 21. A magnetic pole, which is wound and has a magnetic flux flowing in one direction of a facing direction of a pole piece facing in the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. A member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, and the primary side with respect to the secondary side. The members arranged at both ends in the magnetic pole array direction on the primary side of the member communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium It has a communicating hole leading to the space comprising the supply means, the driving apparatus characterized by the operation of the primary side is obtaining means for obtaining said gaseous medium. 22. A magnetic pole, around which a winding is wound, and which causes a magnetic flux to flow in one direction in which the magnetic pole pieces facing in the first direction face each other.
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. And a member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, the secondary side being relative to the primary side. The members arranged at both ends in the magnetic pole array direction on the primary side of the member communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium A communication hole that leads to the void, and a communication hole that communicates the void including the opening with the outside and that discharges the gaseous medium guided into the void including the opening to the outside. The drive device is characterized in that the supply means is a storage means for storing the gaseous medium. 23. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction of a facing direction of a magnetic pole piece facing the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. And a member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, the secondary side being relative to the primary side. The members arranged at both ends in the magnetic pole array direction on the primary side of the member communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium A communication hole that leads to the void, and a communication hole that communicates the void including the opening with the outside and that discharges the gaseous medium guided into the void including the opening to the outside. The drive device is characterized in that the supply means is or a generation means for generating the gaseous medium. 24. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction of a facing direction of a pole piece facing in a first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. A member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, and the primary side with respect to the secondary side. The members arranged at both ends of the primary side in the magnetic pole arrangement direction communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium A communication hole that leads to the void, and a communication hole that communicates the void including the opening with the outside and that discharges the gaseous medium guided into the void including the opening to the outside. The drive device is characterized in that the supply means is or a generation means for generating the gaseous medium. 25. A magnetic pole, around which a winding is wound and which causes a magnetic flux to flow in one direction of the facing magnetic pole piece facing in the first direction,
A unit body in which magnetic poles that flow magnetic flux in the other direction opposite to the opposing magnetic pole pieces in the first direction are alternately arranged, and a gap that penetrates in the magnetic pole arrangement direction is formed between the opposing magnetic pole pieces of each magnetic pole. A primary side formed by arranging a plurality of magnetic poles in the magnetic pole arrangement direction and an opening continuous with the gap and penetrating in the magnetic pole arrangement direction, and arranged between both ends of the magnetic pole arrangement direction on the primary side and the unit body. A member having magnetism, a secondary side disposed in the void including the opening, and a supply means for supplying a gaseous medium, and the primary side with respect to the secondary side. The members arranged at both ends in the magnetic pole array direction on the primary side of the member communicate with the void including the opening and the outside, and the gas supplied from the supply means. The shape of the medium A communication hole that leads to the void, and a communication hole that communicates the void including the opening with the outside and that discharges the gaseous medium guided into the void including the opening to the outside. The drive device is characterized in that the supply means is an acquisition means for obtaining the gaseous medium by the operation of the primary side. 26. The drive device according to claim 18 or 22, wherein the storage means is a cylinder or a tank filled with gas or air. 27. The drive device according to claim 19 or 23, wherein the generating means is a compression device that compresses air by the operation of a driven body driven by the secondary side. apparatus. 28. The drive device according to claim 20 or 24, wherein the generating means is a compression device that compresses air by an operation of a driven body driven by the primary side. . 29. The drive device according to claim 21 or 25, wherein the acquisition means is a duct that is attached to the primary side and opens in the operation direction of the primary side to take in outside air. Drive device. 30. The magnetic flux generated by energizing the windings wound around the magnetic poles is made to flow alternately in a gap penetrating in the arrangement direction of the magnetic poles forming the primary side, and the magnetic gap is provided. In the secondary side arranged in, in moving the primary side and the secondary side relative, while the pressure in the void is higher than the external pressure, the primary side and the secondary side. A driving method of a driving device, characterized in that: 31. A magnetic flux generated by energizing a winding wound around the magnetic pole is alternately made to flow in a gap formed continuously in the arrangement direction of the magnetic poles constituting the primary side to have magnetism. And interlinking with the secondary side arranged in the void, in relative movement of the primary side and the secondary side, while supplying a gaseous medium to the void with the primary side and the secondary side. A driving method of a driving device, characterized in that: 32. A magnetic flux generated by energizing a winding wound around the magnetic pole is alternately made to flow in a gap formed continuously in the arrangement direction of the magnetic poles constituting the primary side to have magnetism. And interlinking with the secondary side disposed in the void, and in reciprocating the secondary side with respect to the primary side, while supplying a gaseous medium stored outside to the void, the primary A method of driving a drive device, comprising reciprocating the secondary side with respect to a side. 33. The magnetic flux generated by energizing the windings wound around the magnetic poles is alternately made to flow in a gap formed continuously in the direction of arrangement of the magnetic poles constituting the primary side to have magnetism. And interlinking with the secondary side arranged in the void, and in reciprocating the secondary side with respect to the primary side, while supplying air or gas stored in a cylinder or tank to the void. A driving method of a driving device, comprising reciprocating the secondary side with respect to the primary side. 34. The magnetic flux generated by energizing the windings wound around the magnetic poles is alternately made to flow in a gap formed continuously in the arrangement direction of the magnetic poles constituting the primary side to have magnetism. And a gas state generated by the operation of the driven body driven by the secondary side in interlinking with the secondary side disposed in the gap and reciprocating the secondary side with respect to the primary side. A driving method of a driving device, characterized in that the secondary side is reciprocated with respect to the primary side while supplying a medium to the gap. 35. The magnetic flux generated by energizing the windings wound around the magnetic poles is alternately made to flow in a gap formed continuously in the arrangement direction of the magnetic poles constituting the primary side to have magnetism. And a compression device driven by the operation of a driven body driven by the secondary side when interlinking with the secondary side disposed in the gap and reciprocating the secondary side with respect to the primary side. A method for driving a driving device, comprising: reciprocating the secondary side with respect to the primary side while supplying compressed air from the space to the gap. 36. The magnetic flux generated by energizing the windings wound around the magnetic poles is alternately made to flow in a gap formed continuously in the arrangement direction of the magnetic poles constituting the primary side to have magnetism. And a gaseous medium generated by the operation of the driven body driven by the primary side in interlinking with the secondary side disposed in the gap and reciprocating the primary side with respect to the secondary side. Is supplied to the gap, and the primary side is reciprocally moved with respect to the secondary side. 37. The magnetic flux generated by energizing the windings wound around the magnetic poles is alternately made to flow in a gap formed continuously in the direction of arrangement of the magnetic poles constituting the primary side to have magnetism. A compression device that is driven by the operation of the driven body driven by the primary side in interlinking with the secondary side disposed in the gap and reciprocating the primary side with respect to the secondary side. 2. The method for driving a drive device, wherein the primary side is reciprocated with respect to the secondary side while supplying the compressed air to the gap. 38. The magnetic flux generated by energizing the windings wound around the magnetic poles is caused to flow alternately in a gap formed continuously in the direction of arrangement of the magnetic poles constituting the primary side so as to have magnetism. And interlinking with the secondary side disposed in the void, and in causing the primary side to reciprocate with respect to the secondary side, the gaseous medium obtained by driving the primary side is supplied to the void. While driving the primary side reciprocally with respect to the secondary side, a driving method of a driving device. 39. The magnetic flux generated by energizing the windings wound around the magnetic poles is alternately made to flow in a gap formed continuously in the direction of arrangement of the magnetic poles constituting the primary side to have magnetism. And in the secondary side arranged in the gap, in the reciprocating movement of the primary side with respect to the secondary side, in the duct attached to the primary side and opened in the operating direction of the primary side. A driving method of a driving device, characterized in that the primary side is reciprocally moved with respect to the secondary side while supplying the taken-in outside air to the gap.