JP2003248033A - Contact head for inspecting electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve highly reliable pressure contact with electrode pads of an electronic component, by machining a contact head for inspecting the electronic component into a single part structure, highly accurately setting the relative location of a second support block to a first support block in the contact head, i.e., the relative locations of pressure contact ends, and soundly and elastically inclining the support blocks for carrying the pressure contact ends. <P>SOLUTION: The contact head for inspecting the electronic components is provided with the first support block 1 arranged above, the second support block 2 arranged below, and a large number of the pressure contact ends 4 arranged at the front end of the second support block 2. The lower surface of the first support block 1 and the upper surface of the second support block 2 are connected to each other by a sprung hinge 12 metal-worked, integrally with both blocks 1 and 2. The second support block 2 is elastically and vertically inclined with the pressure contact ends 4 in side-to-side directions or forward and backward directions via the sprung hinge 12, to obtain appropriate parallel pressure contact with an electrode pad 6 of the electronic component 5. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contact head used for inspecting a display panel such as a liquid crystal display panel, a plasma display panel and an organic EL display panel, or a contact head used for inspecting an IC package, an IC wafer, an IC mounting substrate and the like. In particular, the present invention relates to a tilt adjusting mechanism in these contact heads for inspecting electronic parts.

[0002]

2. Description of the Related Art As shown in FIGS. 1, 2A and 2B, a conventional contact head for inspecting electronic parts is made of rubber or the like between a first supporting block 1 arranged at a higher position and a second supporting block 2 arranged at a lower position. A plurality of elastic sheet members 3 arranged at the front end of the second supporting block 2 by elastically tilting the second supporting block 2 vertically in the left-right direction or the front-back direction while interposing an elastic sheet member The pressure contact end 4 is elastically tilted.

An example in which the elastic sheet material 3 is embedded in the lower surface of the second support block 2 to back up the pressure contact end 4 is also known, as shown by the broken line in FIG.

As shown in FIGS. 2A and 2B, the contact head for inspecting electronic parts has a large number of electrode pads 6 arranged in a single row in the left-right direction at the end of an electronic part 5 such as a display panel.
The inclination α1 in the left-right direction with respect to is corrected while being self-adjusted by the elastic tilt, and pressure contact is made in parallel.

Alternatively, as shown in FIG. 3, when the electrode pads 6 arranged in the left-right direction are arranged in a plurality of rows in the front-rear direction, the inclination α2 in the front-rear direction with respect to the electrode pads 6
Is corrected by self-adjusting by the elastic tilting, and pressure contact is made in parallel. Bump 7 on the contact edge
And the bump 7 obtains the above-mentioned pressure contact.

[0006]

However, the elastic sheet material made of rubber or the like is liable to be elastically deteriorated by repeated use, and the sheet material is easily elastically compressed and deformed at the end portion against the pressure at the time of pressure contact. In addition, there is a drawback that elastic compression deformation is less likely to occur in the portion toward the central portion, and there is a problem that uniform elastic tilting of the pressure contact end following the electrode pad of the electronic component cannot be obtained.

[0007]

According to the present invention, the lower surface of the first support block and the upper surface of the second support block are connected by a spring hinge integrally machined to both blocks, and the second support block connects the spring hinge. It is configured so that it elastically tilts up and down in the left-right direction or the front-back direction, and the pressure contact end arranged at the front end of the second support block elastically tilts in the same direction.

Therefore, the three parts of the first and second support blocks and the spring hinge are processed into a single-piece structure, and the relative position of the second support block with respect to the first support block, that is, the same relative position of the pressure contact end is highly accurate. Set to.

The spring hinge solves the problem of elastic flaws in the elastic sheet material and causes the second support block carrying the pressure contact end to elastically tilt, thereby providing a highly reliable connection with the electrode pad of the electronic component. A pressure contact is obtained.

The spring hinge is a C-shaped leaf spring hinge and is integrally metal-worked with the first and second support blocks.

Alternatively, the spring hinge is an I-shaped plate spring hinge and is integrally metal worked with the first and second support blocks.

Further, the lower surface of the first support block and the upper surface of the second support block are connected by a C-shaped leaf spring hinge integrally machined as described above, or a C-shaped leaf spring hinge formed as a separate component, Alternatively, the second support block is connected by a C-shaped wire spring hinge formed of a separate component, and the second support block is connected to the second side in the left-right direction or the front-back direction via the C-shaped spring hinge.
The support block is configured to elastically tilt up and down together with the pressure contact end arranged at the front end.

Alternatively, the lower surface of the first support block and the upper surface of the second support block are connected by an I-shaped leaf spring hinge integrally machined as described above, or an I-shaped leaf spring hinge formed by a separate component. Alternatively, the second support block is connected by an I-shaped wire spring hinge formed of a separate component, and the second support block is provided with a pressure contact end arranged at the front end of the second support block in the left-right direction or the front-back direction via the I-shaped spring hinge. It is configured to elastically tilt up and down.

Therefore, while the three components of the first and second support blocks and the leaf spring hinge are formed as separate parts, the problem of elastic defects in the elastic sheet material is solved and a second support block carrying a pressure contact end is provided. The elastic tilting is carried out soundly so that reliable contact with the electrode pad of the electronic component can be obtained.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A plurality of embodiments of the present invention will be described below with reference to FIGS.

The contact head for inspecting electronic parts comprises a first supporting block 1 made of a metallic rectangular substrate arranged in an upper layer and a second supporting block 2 made of a metallic rectangular substrate arranged in a lower layer.

The first support block 1 is means for mounting and supporting the entire contact head for inspecting electronic parts on a mounting frame 8 called a stage, and the second support block 2 is means for supporting the probe substrate 9 shown in FIG. Is.

The probe substrate 9 has a large number of leads 11 which are in close contact with the surface of an insulating substrate 10 made of an insulating film or an insulating plate and extend in parallel. The leads 11 are arranged along one side of the insulating substrate 10. One end of 11 is the pressure contact end 4. A bump 7 for pressure contact is provided on the pressure contact end 4.

The probe substrate 9 is attached to the second support block 2
The pressure contact end 4 is placed on the front end of the second support block 2 for pressure contact with the electrode pad 6 of the electronic component 5.

The electronic component 5 is a display panel such as a liquid crystal display panel, a plasma display panel, an organic EL display panel, or an IC package, an IC wafer, an IC mounting substrate or the like.

As shown in FIGS. 4 to 9, a spring hinge having a C-shaped leaf spring structure in which the blocks 1 and 2 are integrally metal-worked between the lower surface of the first support block 1 and the upper surface of the second support block 2. Connect at 12. As shown in FIG.
The upper end of the C-shaped leaf spring hinge 12 is connected to the first support block 1 as a base material, and the lower end thereof is connected to the second support block 2 as a base material.

For example, as shown in FIG. 7, one metal block A is subjected to electric discharge machining such as wire cut electric discharge machining or electron beam machining to dissolve away the unnecessary metal portion A ', and the first and second supports are formed. The blocks 1 and 2 and the C-shaped leaf spring hinge 12 are integrally metal-worked. Therefore, the contact head for inspecting electronic components has a single component structure and does not involve a joint structure such as welding or press fitting.

In the contact head for inspecting electronic parts in which the three members 1, 2 and 12 are integrally metal-worked, the relative position of the second support block 2 to the first support block 1, that is, the same relative position of the pressure contact end 4 is high. Determined by accuracy.

As shown in FIGS. 4, 5 and 6, the C-shaped leaf spring hinges 12 are symmetrically arranged, and the convex curved surfaces of the C-shaped leaf spring hinges 12 are oriented so as to face outward in the left and right directions. As a specific example, a pair of C-shaped leaf spring hinges 12 are symmetrically arranged on the front end side between both blocks 1 and 2, and a pair of C-shaped leaf spring hinges 1 are arranged on the rear end side between both blocks 1 and 2.
2 are arranged symmetrically.

The second support block 2 is elastically tilted vertically in the left-right direction and / or the front-back direction while flexing the C-shaped leaf spring hinge 12, and is arranged at the front end of the second support block 2 following this. The pressure contact end 4 elastically tilts vertically in the same direction.

Therefore, the state before the pressure contact of FIG. 8A and the state of FIG.
As shown in the state B after the pressure contact, the contact head for inspecting electronic parts is arranged in the left-right direction with respect to a large number of electrode pads 6 arranged in a single row in the left-right direction at the end of the electronic part 5 such as a display panel. The inclination .alpha.1 and the gap are corrected by self-adjusting by the elastic tilt, and pressure contact is made in parallel with the electrode pad 6.

Alternatively, when the electrode pads 6 arranged in the left-right direction as shown in FIG. 3 are juxtaposed in a plurality of rows in the front-rear direction, the inclination α2 in the front-rear direction with respect to the electrode pad 6 and the gap are supported by the second support. Block 2 is the above-mentioned integrated metal processed C
While flexing the leaf spring hinge 12, the plate spring hinge 12 is elastically tilted up and down in the front-rear direction, that is, the tilt and gap are corrected while self-adjusting, and pressure contact is made in parallel.

As shown in FIGS. 4, 5 and 9, the contact head for inspecting electronic parts has mounting bolts 14 mounted on the mounting frame 8 with mounting holes 13 provided on the rear end side of the first support block 1. Etc. and fix it. As shown in FIG. 8, a plurality of contact heads for inspecting electronic parts are arranged side by side on the mounting frame 8.

The front support bolt 15 is screwed and inserted from the upper surface to the lower surface at the center of the rear end of the first support block 1, and the tip of the front support bolt 15 is provided with a ball 16 provided at the front end. 2 Abut on the upper surface of the central portion of the rear end of the support block 2.

Further, the headed bolt 17 is slowly inserted from the upper surface side to the lower surface side of the central portion of the rear end of the first support block 1, and the screw shaft tip of the headed bolt 17 is placed on the upper surface side of the second support block 2. To the lower surface side, and the head portion 18 of the headed bolt 17 is seated on the inner bottom surface of the recess opening to the upper surface side of the first support block 1.

Therefore, as shown in FIG. 9A, the front support bolt 15 is rotated in one direction to be screwed to cause the C-shaped leaf spring hinge 12 to compress and elastically deform in the left-right direction, and the rear of the second support block 2 While displacing the end downward,
The front end of the block 2 is displaced upward. That is, the front rising slope state is formed. At this time, the headed bolt 17 is set in a retracted state so as not to interfere with the tilt adjustment by the front contact bolt 15, and after the tilt adjustment, the head 18 is seated by being screwed.

Further, as shown in FIG. 9B, the headed bolt 17 is rotated in one direction to be screwed to cause the C-shaped leaf spring hinge 12 to compress and elastically deform in the front-rear direction.
The rear end of the support block 2 is displaced upward, and the front end of the block 2 is displaced downward. That is, the front downward slope state is formed. At this time, the abutment bolt 15 is screwed back so as not to interfere with the inclination adjustment by the headed bolt 17, and after the inclination adjustment, the tip is abutted by screwing.

A headed bolt 1 is attached to the mounting frame 8.
7 and the operating hole 1 at a position facing the upper end of the head bolt 15
9 is provided, and while the electronic component inspection contact head is attached to the attachment frame 8, both bolts 15 and 17 are rotated by a tool through the operation hole 19.

In addition to the above example, the tilt adjustment can be performed in the front-rear direction by screwing or retreating a single bolt. The tilt adjustment by the tilt adjusting bolt is mainly for the inspection of adjacent electronic parts. Used for pre-alignment between contact heads.

Next, an embodiment in which the spring hinge 12 is an I-shaped leaf spring hinge 12 will be described with reference to FIGS. 10 to 13.

As shown in FIGS. 10 to 13, the first
The lower surface of the support block 1 and the upper surface of the second support block 2 are connected to the blocks 1 and 2 by a spring hinge 12 having an I-shaped leaf spring structure integrally machined. As shown in FIG. 11B, the upper end of the I-shaped leaf spring hinge 12 is connected to the first support block 1 as a base material, and the lower end thereof is connected to the second support block 2 as a base material.

For example, as shown in FIG. 11B, in the same manner as described with reference to FIG. 7, one metal block A is subjected to electric discharge machining such as wire cut electric discharge machining or electron beam machining to remove the unnecessary metal portion A '. The first and second support blocks 1 and 2 and the I-shaped leaf spring hinge 12 are integrally metal-worked. Therefore, the contact head for inspecting electronic components has a single component structure and does not involve a joint structure such as welding or press fitting.

In the contact head for inspecting electronic parts in which the above three members 1, 2 and 12 are integrally metal-worked, the relative position of the second support block 2 to the first support block 1, that is, the relative position of the pressure contact end 4 is high. Determined by accuracy.

As a concrete example, the I-shaped leaf spring hinge 12 is arranged on the center line in the front-rear direction of the first and second support blocks 1 and 2 as shown in FIGS. Orient the board so that it faces in the left-right direction. As a more specific example, as shown in FIGS. 11A and 11C, a pair of I's are provided on the center line on the front end side and the rear end side between the blocks 1 and 2.
A leaf spring hinge 12 is arranged.

The second support block 2 flexibly bends the I-shaped leaf spring hinge 12 and elastically tilts vertically in the left-right direction, and following this, the pressure contact end 4 arranged at the front end of the second support block 2. Elastically tilts up and down in the same direction.

Therefore, the state before pressure contact of FIG. 8A and the state of FIG.
As shown in the state B after the pressure contact, the contact head for inspecting electronic parts is arranged in the left-right direction with respect to a large number of electrode pads 6 arranged in a single row in the left-right direction at the end of the electronic part 5 such as a display panel. The inclination .alpha.1 and the gap are corrected by self-adjusting by the elastic tilt, and pressure contact is made in parallel with the electrode pad 6.

Alternatively, as shown in FIG. 12, a single I-shaped leaf spring hinge 12 is provided on the center line of the front end side between the first and second support blocks 1 and 2 so that the second support block 2 can be moved vertically. Make the structure capable of elastic tilting.

That is, when the electrode pads 6 arranged in the left-right direction as shown in FIG. 3 are arranged in a plurality of rows in the front-rear direction, the inclination α2 in the front-rear direction with respect to the electrode pad 6 and the gap are supported by the second support. Block 2 is the above-mentioned integrated metal processing I
While flexing the leaf spring hinge 12, the plate spring hinge 12 is elastically tilted up and down in the front-rear direction, that is, the tilt and gap are corrected while self-adjusting, and pressure contact is made in parallel.

Further, as shown in FIGS. 13A and 13B, a leading bolt 15 is screwed through the central portion of the rear end of the first support block 1 from the upper surface to the lower surface, and the tip of the leading bolt 15 is fitted to the tip. The balls 16 provided are brought into contact with the upper surface of the central portion of the rear end of the second support block 2.

Further, the headed bolt 17 is slowly inserted from the upper surface side to the lower surface side of the central portion of the rear end of the first support block 1, and the screw shaft tip of the headed bolt 17 is placed on the upper surface side of the second support block 2. To the lower surface side, and the head portion 18 of the headed bolt 17 is seated on the inner bottom surface of the recess opening to the upper surface side of the first support block 1.

Therefore, as shown in FIG. 13A, the front support bolt 15 is rotated in one direction so as to be screwed to cause the I-shaped leaf spring hinge 12 to compress and elastically deform in the left-right direction, and the rear of the second support block 2 The end is displaced downward and the front end of the block 2 is displaced upward. That is, the front rising slope state is formed. At this time, the headed bolt 17 is set in a retracted state so as not to interfere with the tilt adjustment by the front contact bolt 15, and after the tilt adjustment, the head 18 is seated by being screwed.

As shown in FIG. 13B, the headed bolt 17
Is rotated in one direction to move the rear end of the second support block 2 upward while compressing and elastically deforming the I-shaped leaf spring hinge 12 in the front-back direction, and lowering the front end of the block 2 downward. Shift to. That is, the front downward slope state is formed. At this time, the abutment bolt 15 is screwed back so as not to interfere with the inclination adjustment by the headed bolt 17, and after the inclination adjustment, the tip is abutted by screwing.

When the second support block 2 is tilted in the front-back direction as shown in FIG. 13, a single I-shaped leaf spring hinge 12 is provided on the center line of the front end side between the first and second support blocks 1 and 2. The second support block 2 has a structure capable of elastic tilting in the front-rear direction, and the C-shaped leaf spring hinge 12 is symmetrically provided on the rear end side between the first and second support blocks 1 and 2 to form a convex curved surface thereof. Are orientated in the left-right outward direction or the left-right inward direction, and the C-shaped leaf spring hinge 12 cooperates with the I-shaped leaf spring hinge 12 so that the second support block 2 can be elastically tilted in the front-rear direction. You can

Next, an embodiment in which the first and second support blocks 1 and 2 are connected by the I-shaped plate spring hinge 12 in which the spring hinge 12 is formed as a separate component will be described with reference to FIG.

As shown in FIGS. 14A and 14B, the lower surface of the first support block 1 and the upper surface of the second support block 2 are connected by a metal I-shaped leaf spring hinge 12 which is a separate component.

The I-shaped leaf spring hinge 12 is a flat spring formed of spring steel or the like, and the upper end thereof is press-fitted or welded to the first support block 1 or joined by an adhesive or the like, and the lower end thereof is the second support block. Press-fitting, welding, or an adhesive material is used alone or in combination with 2, and the plate surface is oriented in the left-right direction. Therefore, vertical elastic tilting of the second support block 2 in the left-right direction is induced via the I-shaped leaf spring hinge 12.

The embodiment shown in FIG. 14 is shown in FIGS.
The I-shaped leaf spring hinge 12 for integral metal working shown in FIG. 3 is constituted by the above-mentioned separate parts, and the description regarding the arrangement and the like is the same for the embodiment shown in FIG. 14 except for the configuration for integral metal working. Is.

Further, as shown in FIG. 14A, the I-shaped leaf spring hinge 12 constituted by the above-mentioned separate parts is arranged on the center line of the front end side between the first and second support blocks 1 and 2, and the rear end side of the same is arranged. The tip bolt 15 described based on FIG. 13 on the center line
And a headed bolt 17 are provided, and an operation as described with reference to FIG. 13 is performed to adjust the tilt in the front-rear direction.

The tip bolt 15 and the headed bolt 17 constitute a tilt adjusting bolt. For example, both bolts 15,
As shown in FIG. 14A without using 17 together, an inclination adjusting bolt 17 ′ is provided on the center line on the rear end side of the first and second support blocks 1 and 2, and the forward or backward direction of the tilt adjusting bolt 17 ′ is set by the screwing or screwing. Adjust the tilt. This is the same in FIGS. 9 and 13.

Next, a C-shaped plate spring hinge 12 or a C-shaped wire spring hinge 12 in which the spring hinge 12 is formed as a separate component.
An embodiment in which the first and second support blocks 1 and 2 are connected will be described with reference to FIGS. 15A, 15B and 15C.

As shown in FIGS. 15A, 15B and 15C, a C-shaped wire spring hinge 12 formed by bending a metal wire made of spring steel into a C shape is formed as a separate component, and the lower surface of the first support block 1 is formed. And the upper surface of the second support block 2 are connected by the C-shaped wire spring hinge 12.

As shown in FIG. 15C, the upper end of the C-shaped wire spring hinge 12 is press-fitted or welded to or bonded to the first support block 1 alone or in combination, and the lower end thereof is connected to the second support block 2. Press-fitting, welding, or an adhesive or the like is used alone or in combination, and the convex curved surfaces thereof are oriented in the left-right outer direction or the left-right inner direction. Therefore, the elastic tilting of the second support block 2 in the left-right direction is caused via the C-shaped wire spring hinge 12.

In the embodiment shown in FIG. 15, the C-shaped leaf spring hinge 12 for integral metal working shown in FIGS. 4 to 9 is constituted by the above-mentioned separate parts. The description regarding the above can be applied to the embodiment shown in FIG.

That is, the C-shaped wire spring hinge 12 is shown in FIG.
As shown in B, they are arranged symmetrically, and are oriented so that the convex curved surfaces of the C-shaped wire spring hinge 12 are directed to the left and right outside direction or the left and right inside direction. As a specific example, both the blocks 1 and 2
The pair of C-shaped wire spring hinges 12 are symmetrically arranged on the front end side between them, and the pair of C-shaped wire spring hinges 12 are symmetrically arranged on the rear end side between the blocks 1 and 2.

The second support block 2 is elastically tilted vertically in the left-right direction and / or the front-back direction while flexing the C-shaped wire spring hinge 12, and is arranged at the front end of the second support block 2 following this. The pressure contact end 4 elastically tilts in the same direction.

Therefore, the state before pressure contact of FIG. 8A and the state of FIG.
As shown in the state B after the pressure contact, the contact head for inspecting electronic parts is arranged in the left-right direction with respect to a large number of electrode pads 6 arranged in a single row in the left-right direction at the end of the electronic part 5 such as a display panel. The inclination α1 and the gap are corrected by the elastic tilting through the C-shaped wire spring hinge 12 while self-adjusting, and pressure contact is made in parallel with the electrode pad 6.

Alternatively, when the electrode pads 6 arranged in the left-right direction as shown in FIG. 3 are juxtaposed in a plurality of rows in the front-rear direction, the inclination α2 in the front-rear direction with respect to the electrode pad 6 and the gap are used to support the second support. The block 2 elastically tilts in the front-rear direction while bending the C-shaped wire spring hinge 12 which is a separate component, that is, corrects the tilt and the gap while self-adjusting, and makes parallel pressure contact.

As shown in FIG. 9, the first and second support blocks 1 and 2 are connected to each other through the C-shaped wire spring hinge 12 formed of the above-mentioned separate parts, and on the center line on the rear end side thereof. It is possible to adjust the inclination in the front-rear direction by providing the head bolt 15 and the headed bolt 17 and performing the operation as described with reference to FIG.

Therefore, the first and second support blocks 1 and 2 are
And the leaf spring hinge 12 or the wire spring hinge 12 are formed as separate parts, the problem of elastic defects of the elastic sheet material 3 in the conventional example is solved, and the second support block 2 carrying the pressure contact end 4 is sounded. By elastically tilting, highly reliable contact with the electrode pad of the electronic component can be obtained.

Next, as shown in FIG. 16, a contact end support block 20 is integrally extended forward from the front end of the second support block 2, and the contact end support block 20 and the main body of the first support block 1 are integrated. The spaces are connected by a thin leaf spring hinge 21 which is integrally metal-processed. The three members 20, 1 and 21 have an integral joint structure without welding or screwing.

The contact end support block 20 tilts up and down in the front-rear direction while bending the leaf spring hinge 21, and the contact end support block 20 and the main body of the second support block 2 are the C-shaped leaf spring hinges 12 or. It tilts vertically in the left-right direction or the front-back direction via the I-shaped leaf spring hinge 12.

The second support block 2 in each of the embodiments shown in FIGS. 4 to 16 is composed of a single metallic substrate, and the probe substrate 9 shown in FIG. 17 is provided on the lower surface of the metallic substrate.
Or the second support block 2 is formed by integrally superposing a plurality of metal substrates 2a and 2b as shown in the figure, and the spring hinge 12 is provided between the upper metal substrate 2a and the first support block 1. Then, the probe substrate 9 shown in FIG. 17 is attached to the lower surface of the lower metal substrate 2b.

[Brief description of drawings]

FIG. 1 is a side view of a conventional contact head for electronic component inspection.

FIG. 2A is a front view showing a state of the contact head for inspecting an electronic component before pressure contact with an electronic component, and B is a front view showing a state after the pressure contact.

FIG. 3 is a cross-sectional view illustrating a contact state of an electronic component inspection contact head with an electronic component in which electrode pads are arranged in the front-rear direction.

FIG. 4 is a perspective view showing a state in which the electronic component inspection contact head according to the first embodiment of the present invention is attached to an attachment frame and is in pressure contact with an electronic component.

FIG. 5 is a perspective view of the electronic component inspection contact head.

FIG. 6A is a front view of the contact head for electronic component inspection,
B is the same side view, C is the sectional view on the AA line in FIG.

FIG. 7 is an enlarged sectional view showing an integrated metal working structure of the C-shaped leaf spring hinge in the first embodiment.

FIG. 8A is a front view showing a state before pressure contact in which the contact heads for inspecting electronic parts are arranged side by side on a mounting frame, and B is a front view showing a state after the pressure contact.

9A and 9B are cross-sectional views showing an example in which a tilt adjusting bolt is provided on the contact head for inspecting electronic parts according to the first embodiment, where A is a front rising adjustment state and B is a front falling adjustment state. FIG.

FIG. 10 is a perspective view showing a state in which a contact head for inspecting an electronic component according to a second embodiment of the present invention is mounted on a mounting frame and is in pressure contact with an electronic component.

11A is a front view of the contact head for inspecting electronic components, B is a side view of the same, and C is a sectional view taken along line BB in FIG.

FIG. 12 is a side view showing an arrangement example of spring hinges according to the second embodiment.

13A and 13B are cross-sectional views showing an example in which a tilt adjusting bolt is provided in the contact head for inspecting electronic parts according to the second embodiment, where A is a front rising adjustment state and B is a front falling adjustment state. FIG.

FIG. 14A is a cross-sectional view in the front-rear direction of a contact head for inspecting electronic components according to a third embodiment of the present invention, and B is a cross-sectional view in the left-right direction.

FIG. 15A is a perspective view of a contact head for inspecting electronic parts according to a fourth embodiment of the present invention, B is a transverse cross-sectional view of the same, and C is an enlarged cross-sectional view showing a connecting structure of a wire spring hinge.

FIG. 16 is a side view showing an example in which the second support block is provided with a spring hinge for self-adjusting the vertical inclination in the first to fourth embodiments.

FIG. 17 is a bottom view of the probe substrate used in each of the above embodiments.

[Explanation of symbols]

1 ... 1st support block, 2 ... 2nd support block, 2a ...
Upper metal substrate, 2b ... Lower metal substrate, 4 ... Pressure contact end,
5 ... Electronic component, 6 ... Electrode pad, 7 ... Bump, 8 ... Mounting frame, 9 ... Probe substrate, 10 ... Insulating substrate, 1
1 ... Lead, 12 ... Spring hinge, 13 ... Mounting hole, 1
4 ... Mounting bolt, 15 ... Tip bolt, 16 ... Ball, 17 ... Headed bolt, 17 '... Tilt adjusting bolt, 18
... Head of headed bolt, 19 ... Operation hole, 20 ... Contact end support block, 21 ... Leaf spring hinge, A ... One metal block, A '... Unnecessary metal part

Continued front page    (72) Inventor Toshio Kunimasu             Kanagawa Prefecture Ebina City Shimoimazumi 810 A Building 4             Floor Twin Co., Ltd. Tech (72) Inventor Takeji Shiokawa             Kanagawa Prefecture Ebina City Shimoimazumi 810 A Building 4             Floor Twin Co., Ltd. Tech F term (reference) 2G011 AA15 AA21 AB08 AC14 AD00                       AE01 AF06 AF07                 2G036 BA33 BB12 CA00                 2G132 AA00 AF00 AF06 AL00                 4M106 AA01 AA02 BA01 DD01

Claims (6)

[Claims] 1. A first supporting block arranged at a higher level and a second supporting block arranged at a lower level, a pressure contact end arranged at a front end of the second supporting block, and a lower surface of the first supporting block and a first supporting block. A structure in which the upper surfaces of the two support blocks are connected to the blocks by a spring hinge integrally machined, and the second support block elastically tilts up and down together with the pressure contact end in the left-right direction or the front-rear direction via the spring hinge. A contact head for inspecting electronic parts, which is characterized in that 2. The contact head for inspecting electronic components according to claim 1, wherein the spring hinge is a C-shaped leaf spring hinge. 3. The contact head for inspecting electronic components according to claim 1, wherein the spring hinge is an I-shaped leaf spring hinge. 4. A first supporting block arranged at a higher level and a second supporting block arranged at a lower level, a pressure contact end arranged at a front end of the second supporting block, and a lower surface of the first supporting block and a first supporting block. The upper surfaces of the two support blocks are connected by a C-shaped spring hinge, and the second support block is elastically tilted up and down together with the pressure contact end in the left-right direction or the front-rear direction via the C-shaped spring hinge. A contact head for inspecting electronic parts. 5. The contact head for inspecting electronic parts according to claim 4, wherein the C-shaped spring hinge is made of a wire material. 6. A first supporting block arranged at a higher level and a second supporting block arranged at a lower level, a pressure contact end arranged at a front end of the second supporting block, and a lower surface of the first supporting block and a first supporting block. The upper surfaces of the two support blocks are connected by an I-shaped spring hinge, and the second support block is elastically tilted up and down together with the pressure contact end in the left-right direction or the front-rear direction via the I-shaped spring hinge. A contact head for inspecting electronic parts.