JP2003248032A - Ic-inspecting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection method, capable of continuously and efficiently processing a plurality of lots, even inside an IC handler, and to provide the IC handler realizing the inspection method. <P>SOLUTION: The lots are distinguished for each IC carrier 6, by providing lot information for the IC carrier 6, which moves around in the inside of the IC handler. Since a plurality of ICs 100 are transferred in a unit of the plurality of ICs 100 by mounting the plurality of ICs 100 to the IC carrier 6, processing efficiency is improved. By means of this method, ICs in the following lot are transferred to a measuring part 9 in the handler from an IC supply part 3, while the preceding lot is being measured, before the preceding lot is completely housed in an IC housing part 14. When the measurements of the preceding lot is completed, the measurement of the following lot, which has stood by waiting at the measuring part 9 is started, and as a result of this, the operational efficiency in the IC handler is improved. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an integrated circuit device (I
C) The present invention relates to an IC inspection method executed after manufacturing, and particularly to improvement of processing efficiency inside an IC handler.

[0002]

2. Description of the Related Art When an IC is manufactured, the electrical characteristics of the IC are inspected and marked. The overall contents of these processes are disclosed in, for example, Japanese Patent Application Laid-Open No. 6-120316 (hereinafter referred to as “conventional example 1”) and Japanese Patent Application Laid-Open No. 10-14474.
Publication No. 0 (hereinafter referred to as "conventional example 2"). ).

Of these, the inspection of electrical characteristics and the like are performed in the IC handler. This IC handler is called a test handler in Conventional Example 1 and a test section in Conventional Example 2. In this IC handler, along with the inspection, the non-defective product and the defective product are determined based on the inspection result.

An inspection method in such an IC handler is disclosed, for example, in Japanese Patent Application Laid-Open No. 9-89982 (hereinafter referred to as "conventional example 3").

The structure and operation of the IC handler of the conventional example 3 will be described below with reference to FIG.

From the pre-process of the inspection in the IC handler to I
The IC is transported to the C handler by being transported together with the tray while being mounted on the tray for inter-process transportation as shown in the conventional examples 1 and 2 mentioned above. When the tray on which the IC is mounted arrives at the IC handler, it is set on the supply stocker by, for example, an operator and supplied to the pre-measurement tray supply unit 1. At this time, it is a characteristic of the IC handler of Conventional Example 3 that the number of supply stockers is two, that is, the first and second supply stockers 2A and 2B. That is, these first and second supply stockers 2A
2 and 2B have ICs of different lots, respectively, so that the subsequent processing can be continuously performed between lots.

The tray set on the first supply stocker 2A is conveyed to the upper side by a conveying means (not shown). When the ICs are mounted on the tray and moved up to a predetermined position, the IC transfer device 5 transfers the ICs to the pre-measurement IC buffer 32 one by one while adsorbing them by the vacuum suction section 5b.

When the IC is temporarily held in the pre-measurement IC buffer 32, the vacuum suction section 36 of the IC transfer device 34 sends it to the electrical characteristics inspection in the measuring section 9. The IC that has been inspected by the measuring unit 9 is measured by the vacuum suction unit 38 of the IC transfer device 34 and then measured by the IC buffer 4
Temporarily held at 0.

IC held in IC buffer 40 after measurement
Is further conveyed by the vacuum suction unit 13b of the measuring device 13. This conveyance destination is on the tray stored in the classified storage stocker 15A of the tray supply unit 17 after measurement. There are two types of classification storage stockers 15A shown in the figure. For example, one classification storage stocker 15A is selected based on whether the product is a good product or a defective product, which is the measurement result of the measuring unit 9.

The same processing is performed for the ICs on the tray set in the supply stocker 2B, and the ICs are sorted in the sorting storage stocker 15B.

In the conventional example 3, the trays set in the supply stockers 2A and 2B have all the ICs on the trays adsorbed by the vacuum adsorbing section 5b, and then the tray transfer means 30 causes the trays to be sorted and stored. 15A, 15B
Be transported to the side. At that time, the remaining trays are stored in the empty tray stocker 16.

[0012]

Generally, electrical inspection of ICs is performed in lot units to prevent contamination. Therefore, in the IC handler of Conventional Example 3, after the measurement of the IC of one lot is completely completed, the conveyance of the IC set in the supply unit as the next lot to the measurement unit must be started. As a result, even if the IC of the next lot is supplied to the supply stocker, the time for the IC of the next lot to be conveyed from the supply unit in the handler to the measurement unit after the measurement of the previous lot is completely completed. Can not be tested electrically. Therefore, in the handler of Conventional Example 3, there is a problem that the operating rate is lowered because the handler is always stopped for a predetermined time between each lot. Actually, the operating rate is improved as disclosed in Conventional Example 3. Can't hope This is the conventional example 3
Then, the portions that can distinguish the ICs by lots are only the first and second supply stockers 2A and 2B and the first and second sorting storage stockers 10A and 10B, and the lots can be distinguished by the portions other than the stockers. This is because it cannot be done.

Further, the movement of ICs in the IC handler is performed one by one by the vacuum suction section of each IC carrier, so that the processing efficiency is poor.

Further, in the prior art example 1 and the like, although the lots are distinguished by the trays for the inter-process transportation, in view of the fact that they are classified by the inspection result inside the IC handler, the inter-process transportation trays are used. The tray as it is IC
It cannot be transported in the handler.

Therefore, it is an object of the present invention to provide an inspection method capable of continuously and efficiently processing a plurality of lots even in the IC handler, and an IC handler embodying the inspection method.

[0016]

The problem in Conventional Example 3 has arisen from the fact that lots cannot be distinguished in the IC conveyance path inside the handler. Therefore, in the present invention,
Lot information is provided to the IC carriers that circulate inside the handler so that the lots can be distinguished for each IC carrier.

Further, although the ICs of Conventional Example 3 are carried by each IC, in the present invention, a plurality of ICs are mounted on the IC carrier. As a result, the transportation is also performed in units of a plurality of ICs, so that the processing efficiency is improved.

By this method, the IC of the next lot is conveyed from the supply unit to the measurement unit inside the handler while the previous lot is being measured before the previous lot is completely stored in the storage unit. When the measurement of the previous lot is completed, the measurement of the next lot, which has been waiting in the measuring unit, is started, so that the operation efficiency in the IC handler can be improved.

Specifically, the present invention provides the following IC inspection method and IC handler.

That is, according to the present invention, as the first IC inspection method, a plurality of ICs are provided inside the IC handler.
Is an IC inspection method for inspecting
An IC carrier that is different from the inter-process carrying tray used for carrying the IC between the front process and / or the back process of the C handler, and uses an IC carrier that circulates only inside the IC handler, and By adding carrier information to the IC carrier, which makes the lots of the ICs mounted on the carrier distinguishable in the IC handler, the I
An IC inspection method is characterized in that the IC carriers in the IC handler are circulated while the lots are distinguished for each C carrier, so that ICs related to a plurality of lots can be continuously inspected. can get.

Further, according to the present invention, as a second IC inspection method, the first IC inspection method,
An IC inspection method is obtained in which a plurality of ICs are mounted on a carrier, and the inside of the IC handler is simultaneously tested for all of the plurality of ICs mounted on one carrier.

Further, according to the present invention, as a third IC inspection method, the first IC inspection method can be used.
There is provided a plurality of ICs mounted on a carrier, and the inspection inside the IC handler is performed by dividing the plurality of ICs mounted on one carrier into a plurality of times, thereby obtaining an IC inspection method. .

Further, according to the present invention, the fourth IC inspection method is the second or third IC inspection method, wherein the I identification is unique identification information in the IC handler.
Storing the carrier information added for each C carrier; transferring a plurality of the ICs from the inter-process transport tray to the IC carrier; and lots relating to lots of the ICs mounted on the IC carrier. Storing information by associating the information with carrier information of an IC carrier on which the IC is mounted, and performing inspection of the plurality of ICs at the same time, and storing inspection results of the ICs for each of the ICs. And a step of classifying the ICs for each lot based on the lot information associated with the carrier information and the inspection result for each IC.

Further, according to the present invention, as a first IC handler for implementing the above IC inspection method, an IC handler for inspecting the IC and performing classification according to the inspection result is provided in front of the IC handler. An IC mounted on a tray for transporting from process to process, including a tray for pre-measurement that stores the tray for transporting between processes, and an inter-process transport tray, to an IC carrier that circulates only inside the IC handler. On the other hand, the first IC transfer means for transferring a plurality of ICs and the IC carrier are again moved to the first predetermined position from the first predetermined position through the second and third predetermined positions in the IC handler. So as to make a circuit, a measuring unit that inspects the electrical characteristics of a plurality of ICs mounted on the IC carrier at the second predetermined position, and the IC carrier. A post-measurement tray storage unit for storing an inter-process transport tray for a post-process transportation to a post-process in a state in which ICs classified according to the inspection result of the measurement unit are mounted, and the third predetermined position. The second IC that is inspected by the measuring unit is transferred to the tray for inter-process transportation to the subsequent process while classifying it based on the inspection result.
IC carrier means and carrier information for each of the IC carriers are stored, and while monitoring the first IC carrier means, the lot information regarding the lot of the IC mounted on the IC carrier is associated with the carrier information. In addition, the inspection result in the measuring unit is stored for each IC, and the second transporting unit performs classification based on the inspection result for each lot based on the carrier information, An IC handler having a control unit for controlling is obtained.

Further, according to the present invention, as the second IC handler, in the first IC handler, the measuring unit is provided in a constant temperature bath, and in the constant temperature bath,
A temperature standby unit for temporarily waiting a plurality of IC carriers in front of the second predetermined position on the patrol route of the IC carriers, which is I of one of the plurality of IC carriers.
Until the IC on the C carrier reaches a predetermined temperature, the IC
It is possible to obtain an IC handler characterized in that it further has a temperature waiting section for waiting the carrier.

Here, the first IC transfer means has a vacuum suction portion capable of simultaneously sucking a plurality of ICs, and the suction of the vacuum suction portion allows the plurality of ICs to be transferred between the steps from the preceding step. It is also possible to transfer from the tray for transportation to the IC carrier existing in the first predetermined position. In addition, the second IC transfer means includes a plurality of I
C has a vacuum suction portion capable of simultaneously sucking, and by the suction by the vacuum suction portion, the control is performed on a tray for inter-process transportation from the IC carrier in the third predetermined position to the subsequent process. It may be possible to change it under the control of the department.

[0027]

DETAILED DESCRIPTION OF THE INVENTION The configuration and operation of an IC handler according to an embodiment of the present invention will be described in detail below with reference to FIGS. In the following, first, a schematic operation in the IC handler will be described with reference to FIGS. 1 and 2, and then detailed control will be described with reference to FIGS. 3 to 6. Each component in the IC handler is indicated by the operation description.

As shown in FIG. 1, the IC handler according to the present embodiment has a pre-measurement tray supply section for accommodating, together with the trays 4, the ICs mounted on the inter-process transport trays 4 transported from the previous process. Have one. More specifically, the pre-measurement tray supply unit 1 accommodates the supply stocker 2, and the tray 4 is set in this supply stocker. The tray 4 set in the supply stocker 2 is conveyed to an IC supply unit 3 located above the supply stocker 3 by a tray conveying device (not shown).

When the tray 4 is conveyed to the IC supply section 3,
By the vacuum suction section 5a of the first IC transfer means 5,
The plurality of ICs 100 existing on the tray 4 are simultaneously transferred onto the IC carrier 6 existing in the loader section 7. IC
Unique identification information is added (ID) to the carrier 6. This ID is called carrier information in this embodiment.

The loader section 7 is located at the starting point of the patrol route of the IC carrier 6 shown in FIG.
The carrier 6 is circulated from the loader unit 7 in the order of a temperature standby unit 8, a measuring unit 9, an EXIT unit 10, an A unloader unit 11, and a B unloader unit 12 by a carrier circulating unit (not shown), and the loader unit 7 is again provided. Come back to.

The IC carrier 6 on which the IC 100 is mounted (inserted) in the loader section 7 is transported to the constant temperature bath 18. In the constant temperature bath 18, a temperature standby unit 8 and a measurement unit 9 are provided.
Further, the EXIT unit 10 is provided, and inspection / measurement can be performed in a high temperature state or a low temperature state. The IC carrier 6 transported to the constant temperature bath 18 is first placed in a standby state in the temperature standby unit 8. In the temperature standby unit 8 in the present embodiment, a plurality of IC carriers 6 can be placed in a standby state.

The temperature of the IC 100 on the IC carrier 6 is
When the temperature reaches a predetermined temperature determined by the inspection standard, each IC carrier 6 is conveyed to the measurement unit 9, and the measurement unit 9 simultaneously inspects a plurality of ICs 100 for electrical characteristics. The quality and grade are judged for each IC. The inspection in the measurement unit 9 may be performed on all of the plurality of ICs 100 mounted on the carrier 6 at the same time, or may be performed at a plurality of times.

The IC carrier 6 on which the IC 100 after the inspection is mounted is circulated again to the loader unit 7 via the EXIT unit 10, the A unloader unit 11, and the B unloader unit 12, On the way, the mounted IC 100 is transferred in the B unloader unit 12.

That is, when the carrier 6 having the IC inspected by the measuring section 9 is conveyed to the B unloader section 12, the inspected IC is transferred by the second IC transfer device 13.
From the IC carrier 6 to the tray 4 in the IC storage unit 14,
It is moved based on the inspection result in the measuring unit 9. More specifically, the second IC transfer device 13 also has a vacuum suction part 13a capable of suctioning a plurality of ICs 100, like the first IC transfer device 5, and by the suction of the vacuum suction part 13a, The IC 100 is transferred. Each tray 4 containing the IC after the measurement is arranged on each classification storage stocker 15 corresponding to the grade of the stored IC,
It is stored in each sorting storage stocker 15 by a tray transfer device (not shown). The tray 4 stored in the classification storage stocker 15 is taken out of the IC handler from the tray storage unit 17 after measurement with the IC mounted.

In the present embodiment, the tray 4 is conveyed from the IC supply section 3 to the IC storage section 14 by a tray conveying means (not shown). Further, the empty tray 4 on which no IC is mounted is accommodated in the empty tray stocker 16 shown in FIG. This point is the same as the conventional example 3.

Hereinafter, also referring to FIGS. 3 to 6, in particular,
The operation of the IC handler according to the present embodiment will be described in more detail, focusing on the control related to the continuous inspection of a plurality of lots.

The IC handler according to this embodiment is shown in FIG.
As shown in FIG. 3, the control unit 19 having the storage unit 20 is provided. The control unit 19 monitors the vacuum suction units 5a and 13a and the measurement unit 9, and controls the classification of the measured ICs. The storage unit 20 holds carrier information of each IC carrier 6 in advance.

An operator supplies a plurality of lots to the stocker 2
First, the ICs of the first lot are supplied from the IC supply unit 3 to the IC carrier 6 inside the handler by the vacuum suction unit 5a of the IC transfer device 5.

At this time, the control unit 19 treats the first lot as a preceding lot, and the storage unit 20 stores the I
The carrier information of the C carrier 6 and the lot information indicating that it is the preceding lot are stored in association with each other. For details, control unit 1
9 operates as shown in FIG. That is, first, lot No. Is acquired (step S401). At this point, it is the first lot as described above. Then
The transfer of the ICs of the first lot from the tray 4 to the IC carrier 6 by the vacuum suction unit 5a is monitored (corresponding to step S402), and the carrier information of the IC carrier 6 and the lot information indicating that it is the preceding lot are displayed. The data is associated and stored in the storage unit 20 (step S403). The operations of steps S402 and S403 are repeated for all ICs in the preceding lot (that is, the first lot) at the present time (step S404). Note that the determination in step S404 is specifically made based on whether or not the ICs of the first lot adsorbed by the vacuum adsorption unit 5a have run out. When it is determined in step S404 that all ICs have been transferred to the preceding lot, the second lot is set as a succeeding lot and the same process is repeated. That is, the ICs of the second lot in the supply stocker 2 are supplied to the IC carrier 6 inside the handler by the vacuum suction section 5a of the IC transfer device 5, and accordingly, the carrier information of the IC carrier 6 and the subsequent lots. Is associated with the lot information.

The ICs of the first lot, together with the IC carriers 6 on which they are mounted, are moved from the temperature standby unit 8 to the measuring unit 9 and subjected to electrical inspection. Information of the inspection result here (goodness / badness of IC, grade, etc .: hereinafter also referred to as “measurement result information”) is stored in the storage unit 20 for each individual IC. At this time, if all the IC carriers 6 loaded with the ICs of the first lot have been transported to the temperature standby unit 8, the IC carriers 6 loaded with the ICs of the second lot are continuously
It is conveyed from the loader unit 7 to the temperature control unit 8. Further, the IC carrier 6 in which the IC of the first lot is mounted on the measuring unit 9
If there is not, the IC carrier 6 on which the second lot of ICs are mounted is transported to the measuring unit 9. However, at this point in time, the second lot is recognized by the control unit 19 as a subsequent lot, and therefore, even if the second lot is transported to the measuring unit 9, the electrical inspection is not performed and the second lot is placed in a standby state.

More specifically, the inspection process is performed as shown in FIG. That is, first, the lot to be measured is specified (step S501). In the present embodiment, by default, only the preceding lot is controlled to be the target of the electrical inspection. At this point, since the first lot is the preceding lot, the first lot is the target of the electrical inspection.

The control unit acquires carrier information from the IC carrier 6 that has reached the measuring unit 9 (step S502),
It is determined whether or not the IC carrier is the IC carrier 6 on which the IC of the preceding lot is mounted (step S50).
3). When it is determined that the IC carrier 6 has the IC of the preceding lot mounted, as a result of the determination, the measuring unit 9 performs the inspection / measurement (step S504), and the control unit 19 causes the measurement result information to be obtained. Is acquired (step S505) and stored in the storage unit 20 in association with each IC (step S506).

As a result of the determination in step S503, when it is determined that the IC carrier existing in the measuring unit 9 has the IC of the succeeding lot, as will be described later, the correlation with the carrier information is changed from the succeeding lot to the preceding lot. It is put in a standby state until it is updated, and after the update, measurement (step S504) and the like are performed.

The IC carrier 6 carrying the IC of the first lot, which has been electrically inspected by the measuring section 9, is the B unloader section 1.
When it reaches 2, the IC 100 is transferred from the IC carrier 6 to the tray 4 existing in the IC storage section 14 by the vacuum suction section 13a.
Is transferred. At the time of this movement, each IC 100 is controlled by the control unit 1.
By the control of 9, the sorting storage stocker 15 according to the measurement result of the measuring unit 9 is sorted and stored.

More specifically, first, lots to be classified are specified (step S601). In this embodiment, the IC to be classified is the I of the preceding lot.
Only C.

Next, the control unit 19 determines whether or not the IC of the preceding lot exists (step S60).
2). When the IC of the preceding lot exists, the control unit 19
Acquires the measurement result for each IC (step S603), and controls the vacuum suction unit 13a so that the tray 4 of the sorting storage stocker 15 is sorted based on the measurement result (step S603). Step S604).

This classification is performed for all the ICs on the carrier, and the control unit 19 determines that all the ICs on the IC carrier 6 have been classified (moved) (step S60).
5) The association between the carrier information of the IC carrier 6 and the lot information indicating that it is a preceding lot is canceled. That is,
The storage unit 20 deletes the lot information stored in association with the carrier information (step S606). The IC carrier 6 from which the lot information is deleted is conveyed to the loader unit 7.

When all the ICs of the preceding lot (that is, the first lot) at the present time are moved to the tray 4 of the IC storage unit 14, the preceding lot at the present time does not exist. Therefore, the control unit 19 re-recognizes the second lot, which has been recognized as the subsequent lot up to this point, as the preceding lot. That is, the lot information associated with the carrier information of the IC carrier 6 mounting the IC of the second lot is
Updating from the subsequent lot to the preceding lot (step S6)
07).

By the update of the lot information, the electrical inspection is started for the IC of the second lot which has been kept on standby in the measuring section 9.

These operations are continuously performed when there is a third lot following the second lot, and continuously when there are further subsequent lots. Done.

That is, in the IC supply unit 3, when the second lot of ICs sucked by the vacuum suction unit 5a disappears,
The control unit 19 recognizes that all the second lots have been mounted on the IC carrier 6 in the IC handler.

Then, the ICs of the third lot in the supply stocker 2 are transferred by the vacuum suction section 5a of the IC transfer device 5 to each other.
It is supplied to the IC carrier 6 inside the IC handler. Particularly, in the present embodiment, the movement of the third lot is performed after all ICs of the first lot have been classified. That is, since it is performed after recognizing the second lot as the preceding lot, the control unit 19 recognizes the third lot as the succeeding lot, and the carrier information of the IC carrier 6 on which the IC of the third lot is mounted. Associate with. The IC carrier 6 equipped with the IC of the third lot is
Similar to the above-mentioned operation, the ICs are conveyed to the temperature standby unit 8 or the measurement unit 9, but it is recognized that the ICs of the succeeding lots are mounted until the classification work is performed on all the ICs of the second lot. Therefore, the temperature standby unit 8 or the measurement unit 9 is placed in a standby state, and no electrical inspection is performed.

When all the ICs of the second lot are classified, the preceding lot does not exist at this point, so the control section 19 regards the third lot as the preceding lot and the lot information and carrier information. Update the association of. As a result, the measurement of the IC of the third lot, which has been placed in the standby state in the temperature standby unit 8 or the measurement unit 9, is started.

Thus, in this embodiment, a plurality of lots are continuously measured.

[0055]

As described above, according to the present invention,
By adding lot information to the IC carrier circulating in the IC handler, when a plurality of lots are continuously measured, the next lot is supplied into the IC handler before the measurement of the previous lot is completed. be able to. In particular, compared with the IC handler of Conventional Example 3, the IC of the next lot is sent to the measuring unit 9 inside the IC handler during the measurement of the previous lot, so that the IC in the handler of this IC is transported. The required time and the time required for the temperature in the constant temperature bath 18 to fall within the standard are shortened, and the operating rate is improved. Further, since a plurality of ICs are mounted on the IC carrier, and the electrical inspection is performed on the plurality of ICs at the same time, the inspection efficiency is improved.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a configuration of an IC handler according to an embodiment of the present invention.

FIG. 2 is a diagram showing a traveling route of an IC carrier which is circulated by a traveling means of an IC handler according to an embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a control unit included in the IC handler according to the embodiment of the present invention and a relation between the control unit and each unit shown in FIG.

FIG. 4 I from the tray for inter-process transfer to the IC carrier
It is a figure for demonstrating the process accompanying the movement of C.

FIG. 5 is a diagram for explaining processing related to measurement in a measuring unit.

FIG. 6 is a diagram for explaining a process related to movement accompanied by classification from an IC carrier to a tray for inter-process transportation.

FIG. 7 is a diagram showing a configuration of an IC handler of Conventional Example 3.

[Explanation of symbols]

1 Pre-measurement tray supply section 2 supply stocker 3 IC supply section 4 trays 5 IC carrier 5a Vacuum suction part 6 IC carrier 7 Loader section 8 Temperature standby part 9 Measuring section 10 EXIT department 11 A unloader section 12 B unloader section 13 IC carrier 13a Vacuum suction part 14 IC storage 15-class storage stocker 16 Empty tray stocker 17 After measurement tray storage 18 constant temperature bath 100 IC

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Tadashi Kainuma             1st 32-1 Asahimachi Nerima-ku, Tokyo Stock market             Company Advantest F-term (reference) 2G003 AA07 AD02 AF02 AF06 AG11                       AG14 AH00 AH01 AH04

Claims (8)

[Claims] 1. A plurality of ICs inside an IC handler
An IC inspection method for inspecting, wherein, in the inside of the IC handler, as a means for mounting the IC, inter-process transportation used for transportation of the IC between a front process and / or a rear process of the IC handler. An IC carrier that is different from the tray for use and that circulates only inside the IC handler is used, and for the IC carrier, the lot of the IC mounted on the carrier is stored in the IC handler. In the IC handler, the lot information can be distinguished for each IC carrier by adding the carrier information that can be distinguished in the IC handler.
An IC characterized in that it is possible to continuously inspect ICs related to a plurality of lots by circulating C carriers.
Inspection method. 2. The IC inspection method according to claim 1, wherein
An IC inspection method, wherein a plurality of ICs are mounted on the IC carrier, and the inspection inside the IC handler is simultaneously performed on all of the plurality of ICs mounted on the one carrier. 3. The IC inspection method according to claim 1, wherein
An IC inspection method, wherein a plurality of ICs are mounted on the IC carrier, and the inspection inside the IC handler is performed by dividing the plurality of ICs mounted on one carrier into a plurality of times. 4. The IC inspection method according to claim 2, wherein the carrier information added to each IC carrier as unique identification information in the IC handler is stored, and the inter-process transportation is performed. A plurality of ICs are transferred from the tray for storage to the IC carrier, and lot information regarding a lot of the ICs mounted on the IC carrier is associated with carrier information of an IC carrier on which the ICs are mounted, and stored. And simultaneously inspecting the plurality of ICs,
Storing the inspection result of each IC for each lot, and the IC for each lot based on the lot information associated with the carrier information and the inspection result for each IC.
The method for inspecting IC, comprising: 5. An IC handler for inspecting ICs and classifying according to the inspection result, wherein ICs mounted on a tray for inter-process transportation from the preceding process of the IC handler are used for inter-process transportation. A pre-measurement tray accommodating section for accommodating each tray, a first IC transfer means for transferring a plurality of ICs from an inter-process transport tray to an IC carrier circulating only in the IC handler, and the IC carrier. , The first in the IC handler
And a plurality of units mounted on the IC carrier at the second predetermined position so as to make a round so as to reach the first predetermined position again via the second and third predetermined positions from ICs classified according to the inspection result of the measurement unit, and the measurement unit that inspects the electric characteristics of the IC and the tray for the inter-process transportation to the subsequent process of the IC handler.
And a post-measurement tray storage section for storing the mounted ICs, and ICs inspected by the measurement section at the third predetermined position, while classifying based on inspection results, inter-process transportation to the post-process. Second I to be transferred onto the tray
C carrier means, carrier information is stored for each of the IC carriers, and lot information regarding an IC lot mounted on the IC carrier is stored in association with the carrier information while monitoring the first IC carrier means. In addition, the inspection result of the measuring unit is stored for each IC, and
In the transportation means of, for each lot based on the carrier information, so as to perform classification based on the inspection result,
An IC including a control unit for controlling
handler. 6. The IC handler according to claim 5, wherein the measuring unit is provided in a thermostatic chamber, and the measuring unit is provided in the thermostatic chamber before the second predetermined position on the traveling route of the IC carrier. And a temperature waiting unit for temporarily holding a plurality of IC carriers, the temperature waiting unit waiting for the IC carriers on one of the plurality of IC carriers to reach a predetermined temperature. An IC handler further comprising: 7. The IC handler according to claim 5, wherein the first IC transfer means has a vacuum suction portion capable of simultaneously suctioning a plurality of ICs, and the suction by the vacuum suction portion allows the first IC transfer means to suck the ICs simultaneously. An IC handler, wherein a plurality of ICs are transferred from a tray for inter-process transportation from a previous process to the IC carrier existing in the first predetermined position. 8. The IC handler according to claim 5, wherein the second IC transfer means has a vacuum suction section capable of simultaneously sucking a plurality of ICs, and the second IC transporting section holds the vacuum suction section by suction by the vacuum suction section. 3. The IC, which is transferred from the IC carrier existing at a predetermined position of 3 to a tray for carrying between steps to the subsequent step under the control of the control section.
handler.