JP2003243164A - Manufacturing method of organic electroluminescent exposure device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic electroluminescent exposure device, with which each segment of R, G, and B can surely be formed without risk of peeling off. <P>SOLUTION: The method comprises a step of coating an R-segment luminous layer 21 with a mask plate on a glass substrate 2 with a transparent conductive film 3 and a positive electrode 4 formed, a step of applying a water-repellent fluorine coating 31 on the whole surface of the glass substrate 2, a step of removing the water-repellent fluorine coating 31 at a part other than the R- segment on the glass substrate 2, a step of coating a G-segment luminous layer 22 by masking the R-segment, a step of removing the water-repellent fluorine coating 31 at a part other than the R and G segments, a step of applying a water-repellent fluorine coating 31 on the whole surface of the glass substrate, a step of coating a B-segment luminous layer 23 by masking the R and G segments and a step of removing the water-repellent fluorine coating 31 at a part other than the R, G and B segments. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an organic electroluminescence exposure device.

2. Description of the Related Art Conventionally, a liquid crystal display has been usually used as a flat panel display, but recently, a self-luminous organic substance produced by vapor-depositing a monomer or coating a polymer in an enclosed environment. An irregular exposure device has been used. Those using a monomer are produced by covering glass with a mask having an appropriate shape and vapor-depositing a monomolecular film. At this time, there is a drawback that the monomer is easily peeled off. Further, recently, a polymer organic EL exposure apparatus utilizing a polymer has been created. in this case,
Since it is a polymer, patterning is impossible, so
It is made by coating glass with a polymer and then mechanically cutting it.

Generally, in a liquid crystal display, R, G, and B segments are sequentially vapor deposited. In the case of a low molecular vapor deposition film or polymer coating, the material used for vapor deposition is Is also vulnerable to water (chemical reaction that destroys the membrane or makes it opaque), due to water vapor in the air,
Since the reaction occurs, it is impossible to carry out the usual operations of vapor-depositing or coating R, G, and B, applying a developing solution thereto, exposing and developing. Therefore, vapor deposition or coating is performed under ultrahigh vacuum or in a dry environment under sealed conditions. At this time,
As usual, it is difficult to sequentially vapor-deposit or apply the R, G, and B segments by changing the mask. Further, in order to use the organic EL exposure device as a display device for moving images and still images, it is necessary to pattern the applied R, G, B (red, green, blue) EL layers, but the most common patterning is An efficient and highly productive method is an exposure process used in the fields of semiconductors and liquid crystals. However, most of the current exposure processes are wet methods. Therefore, wet exposure cannot be applied to an organic EL material that dislikes even water vapor in air. This is a major obstacle to mass production of organic EL display devices. On the other hand, it is conceivable to use a dry exposure process instead of the wet exposure method, but there is a problem that the R, G, and B layers cannot be patterned because the dry exposure process is basically a positive type. 14 to 18 show an example of a conventional method for manufacturing an organic electroluminescence exposure apparatus. First, the ITO electrode film 102 is vapor-deposited on the glass substrate 101 (FIG. 14), and then the organic EL material 111 for forming the R segment portion is applied on the ITO electrode film 102 (FIG. 1).
5). Next, the mask 103 is used to perform exposure by ultraviolet (UV) irradiation to pattern the R segment portion (FIG. 16). As a result, the organic EL material not shielded by the mask is photodecomposed and disappears. Next, the glass substrate 101
Organic EL material 112 for forming G segment part on top
Is applied (FIG. 17). In this state, the organic EL material 112 that irradiates ultraviolet rays (UV) to form the G segment portion
Even if the organic EL material 111 that forms the R segment portion is left, the organic EL material 11
The organic EL material 112 remains on the surface 1 (FIG. 18). Alternatively, when the organic EL material 112 on the organic EL material 111 is irradiated with ultraviolet rays, the organic EL material 111 also disappears or is damaged. As described above, the simple dry process cannot be applied to the patterning of the organic EL material. Further, when the organic EL material 112 is applied and overlapped on the organic EL material 111, the organic EL material 111 does not emit light, which does not make sense as an organic electroluminescence exposure apparatus. It is necessary to devise to prevent this. The present invention was developed in view of the above-mentioned conventional circumstances, and it is possible to reliably form R, G, and B segments without fear of peeling, and to dry the R, G, and B layers by a dry process. It is an object of the present invention to provide a method for manufacturing an organic electroluminescence exposure apparatus which can surely realize patterning.

According to a first aspect of the present invention, there is provided an organic electroluminescence exposure apparatus manufacturing method, wherein a substrate having a conductive film and electrodes is masked with a mask plate to form an R segment portion. A step of applying a light emitting layer to be formed, a step of applying a water-repellent peeling prevention layer to the entire surface of the substrate, and a step of masking the R segment portion on the substrate to remove the water-repellent peeling prevention layer of the other portion. A step of applying a light emitting layer for masking the R segment portion to form a G segment; a step of masking the R and G segment portions to remove the water-repellent peeling prevention layer on the other portions; A step of applying a water-repellent peeling prevention layer to the entire surface of
A step of applying a light-emitting layer for forming the B segment by masking the R and G segment portions, and a step of masking the R, G, B segment portions and removing the water-repellent peeling prevention layer in the other portions. It is characterized by having. A method of manufacturing an organic electroluminescence exposure apparatus according to a second aspect of the present invention comprises a step of applying a light emitting layer for forming an R segment portion by masking a substrate on which a conductive film and electrodes are formed with a mask plate. , A step of applying a water-repellent fluorine coating on the entire surface of the substrate, a step of masking the R segment portion on the substrate to remove the water-repellent fluorine coating on the other portion by ultraviolet rays, and R
A step of masking the segment portions to apply a light-emitting layer for forming a G segment; a step of masking the R and G segment portions to deteriorate and remove the water-repellent fluorine coating on the other portions by ultraviolet rays; Of water-repellent fluorine coating on the entire surface of the above, a step of masking each R and G segment part to apply a light emitting layer for forming a B segment, and a step of masking each R, G and B segment part with ultraviolet rays And a step of deteriorating and removing the water-repellent fluorine coating on the portion other than the above. According to the inventions of claims 1 and 2 as described above,
By combining the sequential application of the light emitting layer forming each of the R, G, and B segment portions with the formation of the water-repellent fluorine coating as the peeling prevention layer and the removal of the unnecessary portion,
It is possible to surely form the R, G, and B segments on the substrate on which the conductive film and the electrode are formed without fear of peeling.
A method of manufacturing an organic electroluminescence exposure apparatus according to the invention of claim 3 comprises: a step of forming an anode electrode film on the substrate; and a step of applying an organic EL material forming an R segment portion on the anode electrode film, The step of masking the organic EL material forming the R segment portion on the substrate to remove the other portion of the organic EL material, the step of applying a water-repellent film on the entire surface of the substrate, and the R segment portion on the substrate A step of masking the water-repellent film on the organic EL material to be formed to remove the water-repellent film in other portions, and an organic EL element in which the G segment part is formed in the region where the water-repellent film is removed and the anode electrode film is exposed. A material and a water-repellent film, a step of masking the necessary water-repellent film on the G segment part to remove the other G segment part and the water-repellent film, and an anode after the water-repellent film is removed. B in the area where the electrode film is exposed A step of applying an organic EL material and a water-repellent film for forming a segment, and a step of masking the necessary water-repellent film on the G segment and removing the other G segment and the water-repellent film. And a step of forming a cathode electrode film on each of the R, G, and B segment portions. According to a fourth aspect of the present invention, in the method for manufacturing an organic electroluminescence exposure apparatus according to the third aspect, each step of applying the organic EL material forming the R, G, B segment portions is performed on the organic EL material. It is characterized in that it also includes the step of applying the activation film. According to the third and fourth aspects of the invention, the R, G, and B segment portions are formed by a combination of the organic EL material, the coating of the water-repellent film, and the ultraviolet irradiation using the mask in the dry process. It is possible to reliably realize patterning in which the organic EL materials do not overlap each other.

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a method for manufacturing an organic electroluminescence exposure apparatus according to the present invention will be described in detail below with reference to the drawings. (Embodiment 1) FIG. 1 is a schematic sectional view showing an organic electroluminescence exposure apparatus according to Embodiment 1 of the present invention.
The glass substrate 2, the transparent conductive film (ITO) 3, the anode 4, the light emitting layer 5, the cathode 6, the protective layer 7, and the protective substrate 8 are roughly configured. Next, a method of manufacturing the organic electroluminescence exposure apparatus 1 according to the first embodiment of the present invention will be described with reference to FIG. First, as shown in FIG. 2 (1), a glass substrate 2 on which a transparent conductive film 3 and an anode 4 are formed is prepared, and a mask plate 11 is formed on the glass substrate 2 as shown in FIG. 2 (2). A light emitting layer 21 forming a R segment portion is applied using a mask. The state where the light emitting layer 21 is applied is shown in FIG.
It shows in (3). Next, as shown in FIG. 2 (4), a water-repellent fluorine coating 31 as a peeling prevention layer is applied to the entire surface of the glass substrate 2. Next, as shown in FIG. 2 (5), the R segment portion on the glass substrate 2 is masked by the mask plate 12 and irradiated with ultraviolet rays to deteriorate the water-repellent fluorine coating 31 on the other portions. Remove. FIG. 2 (6) shows a state in which the water-repellent fluorine coating 31 on the other portions is removed by irradiation with ultraviolet rays. Next, FIG.
As shown in (7), the R segment portion is covered with the mask plate 13
Light-emitting layer 2 masked by to form G segment portion
Apply 2. The state when the light emitting layer 22 is applied is shown in FIG.
It shows in (8). Next, as shown in FIG. 2 (9), the R and G segment portions are masked by the mask plate 14 and the water-repellent fluorine coating 31 is applied to the entire surface of the glass substrate 2. The state where the water-repellent fluorine coating 31 is applied is shown in FIG.
0). Next, as shown in FIG. 2 (11), the R segment portion and the G segment portion on the glass substrate 2 are masked by the mask plate 15, irradiated with ultraviolet rays, and the water-repellent fluorine coating 31 on the other portions is irradiated. Is deteriorated and removed. The state where the water-repellent fluorine coating 31 is removed is shown in FIG. Next, as shown in FIG. 2 (13), the R segment and G segment portions are masked by the mask plate 16 to apply a light emitting layer 23 that forms B segments. FIG. 2 (14) shows the state when the light emitting layer 23 is applied.
Shown in. According to the method for manufacturing the organic electroluminescence exposure apparatus according to the first embodiment, the light emitting layers 21, 22, 22 forming the R, G, B segment portions that will constitute the light emitting layer 5 on the glass substrate 2. 23 can be reliably formed without overlapping each other and without fear of peeling. After this, the cathode 6, the protective layer 7, the protective substrate 8
Are sequentially laminated to form the organic electroluminescence exposure apparatus 1. (Second Embodiment) Next, a method of manufacturing an organic electroluminescence exposure apparatus 50 according to a second embodiment of the present invention will be described with reference to FIGS. Second Embodiment
In the manufacturing method (1), first, an anode electrode film (ITO film) 61 is deposited on a substrate (glass substrate) 60 (FIG. 3). Next, the organic EL material 51 forming the R segment portion is applied on the anode electrode film 61 (FIG. 4). Next, the portion of the organic EL material 51 that forms the necessary R segment portion is masked by a mask (photomask) 71 and exposed by ultraviolet (UV) irradiation, and the organic EL material 51 that is not shielded is photodecomposed and disappears. Then, the R segment portion is patterned (FIG. 5).
Further, an activation film is applied to the patterned R segment portion. Next, on the organic EL material 51 and the anode electrode film 61 that form the patterned R segment portion.
After applying a water-repellent film (a minute film having water-repellent property, oil-repellent property, and wettability) 54 on it, it is masked by a mask 71, and ultraviolet rays (UV) are applied.
Water-repellent film 5 that is not shielded from light by exposure (Fig. 6)
The organic EL material 51 and the water-repellent film 54 on the organic EL material 51, which forms the required R segment by photolysis of 4 and disappears, are left, and the anode electrode film 61 is exposed in other parts (FIG. 7). ). Next, an organic EL material 52 for forming a G segment is applied to the exposed portion of the anode electrode film 61, an activation film (not shown) is applied, and a water repellent film 54 is applied thereon (FIG. 8). ). Next, the portion of the organic EL material 52 that forms the necessary G segment portion is masked with a mask (photomask) 72, and exposed by ultraviolet (UV) irradiation, and the organic EL material 52 that is not shielded is photodecomposed and disappears. Then, the G segment portion is patterned so that the anode electrode film 61 is exposed at that portion (FIG. 9).
Next, an organic EL material 53 forming a B segment portion is applied to the exposed portion of the anode electrode film 61, an activation film (not shown) is further applied, and a water repellent film 54 is further applied thereon.
Is applied (FIG. 10). Next, the portion of the organic EL material 53 that forms the necessary B segment portion is masked by a mask (photomask) 73, and exposed by ultraviolet (UV) irradiation, and the organic EL material 53 that is not shielded is photodecomposed and disappears. Then, the G segment portion is patterned so that the anode electrode film 61 is exposed at that portion (FIG. 11). In this way, as shown in FIG. 12, R,
Organic EL materials 51, 5 forming the G and B segment portions
2 and 53 are formed in a patterned state (FIG. 12).
Thereafter, as shown in FIG. 13, the organic EL materials 51, 52,
Cathode electrode film 62 is formed on 53, and further anode electrode film 6
1. By connecting the power supply unit 80 to the cathode electrode film 62, the organic electroluminescence exposure apparatus 50 according to the second embodiment is obtained.

According to the present invention described above, R, G,
B: Sequential application of the light-emitting layer forming each segment portion,
By combining the formation of a water-repellent fluorine coating which is a peeling prevention layer and the removal of unnecessary portions, R, G and B segments are surely formed on a substrate having a conductive film and electrodes formed thereon without fear of peeling. It is possible to provide a method for manufacturing an organic electroluminescence exposure apparatus capable of performing the above. Further, according to the present invention, the organic EL materials forming the R, G, and B segment portions are overlapped with each other by the dry process and by the combination of the application of the organic EL material, the water-repellent film, and the ultraviolet irradiation using the mask. It is possible to provide a method for manufacturing an organic electroluminescence exposure apparatus, which can surely realize patterning without any trouble.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing an organic electroluminescence exposure apparatus according to a first embodiment of the present invention.

FIG. 2 is a process diagram showing a manufacturing process of the organic electroluminescence exposure apparatus according to the first embodiment of the present invention.

FIG. 3 is a process diagram showing a manufacturing process (coating with an anode electrode film) of an organic electroluminescence exposure apparatus according to a second embodiment of the present invention.

FIG. 4 is a process diagram showing a manufacturing process (organic EL material) of the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 5: Manufacturing process of organic electroluminescence exposure apparatus according to Embodiment 2 of the present invention (patterning by exposure)
FIG.

FIG. 6 is a process diagram showing a manufacturing process (water-repellent film exposure) of the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 7 is a process diagram showing a manufacturing process (end of R segment EL material pattern) of the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 8 is a process diagram showing a manufacturing process (application of an EL material for G segment) of the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 9 is a process diagram showing a manufacturing process (G segment EL material exposure) of the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 10 is a process diagram showing a manufacturing process (application of an EL material for a B segment) of the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 11 is a process diagram showing a manufacturing process (B segment EL material exposure) of the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 12 is a cross-sectional view showing a completed state of patterning of an EL material in the organic electroluminescence exposure apparatus according to the second embodiment of the present invention.

FIG. 13 is a schematic sectional view showing an organic electroluminescence exposure apparatus according to a second embodiment of the present invention.

FIG. 14 is a process drawing showing a manufacturing process (coating of an anode electrode film) of a conventional organic electroluminescence exposure apparatus.

FIG. 15 is a process diagram showing a manufacturing process (organic EL material coating) of a conventional organic electroluminescence exposure apparatus.

FIG. 16 is a process drawing showing a manufacturing process (patterning by exposure) of a conventional organic electroluminescence exposure apparatus.

FIG. 17 is a process diagram showing a manufacturing process (application of an organic EL material of a second color) of a conventional organic electroluminescence exposure apparatus.

FIG. 18 is a cross-sectional view showing an overlap of organic EL materials in a manufacturing process of a conventional organic electroluminescence exposure apparatus.

[Explanation of symbols]

1 Organic electroluminescence exposure equipment 2 glass substrates 3 Transparent conductive film 4 anode 5 Light emitting layer 6 cathode 7 protective layer 8 protective substrate 11 mask plate 12 Mask plate 13 Mask plate 14 Mask plate 15 Mask plate 16 mask plate 17 Mask plate 21 Light-emitting layer 22 Light-emitting layer 23 Light-emitting layer 31 Water repellent fluorine coating 50 Organic electroluminescence exposure apparatus 51 Organic EL material 52 Organic EL material 53 Organic EL material 54 Water repellent film 60 substrates 61 Anode electrode film 62 Cathode electrode film 80 power supply

Claims (4)

[Claims] 1. A step of applying a light emitting layer for forming an R segment portion by masking a substrate having a conductive film and electrodes with a mask plate, and applying a water-repellent peeling prevention layer on the entire surface of the substrate. A step of masking the R segment portion on the substrate to remove the water-repellent peeling prevention layer on the other portion, and a step of masking the R segment portion to apply a light emitting layer for forming a G segment, A step of masking the R and G segment portions to remove the water-repellent peeling prevention layer on the other portions, a step of applying a water-repellent peeling prevention layer on the entire surface of the substrate, and a masking of the R and G segment portions And applying a light-emitting layer to form the B segment, and masking the R, G, and B segment portions to remove the water-repellent peeling prevention layer at the other portions. Organic EL Manufacturing method of Toro luminescence exposure apparatus. 2. A step of applying a light emitting layer for forming an R segment portion by masking a substrate having a conductive film and electrodes with a mask plate, and a step of applying a water-repellent fluorine coating on the entire surface of the substrate. A step of masking the R segment portion on the substrate to deteriorate and removing the water-repellent fluorine coating of the other portion by ultraviolet rays, and a step of masking the R segment portion and applying a light emitting layer for forming the G segment. , R and G segment parts are masked to remove the water-repellent fluorine coating on the other parts by ultraviolet rays, and the step of applying water-repellent fluorine coating to the entire surface of the substrate, R and G segment parts And a light emitting layer for forming B segment is masked, and R, G, B segment portions are masked and UV repellency is applied to the other portions. A method of manufacturing an organic electroluminescence exposure apparatus comprising: a step of deteriorating and removing a fluorine coating. 3. A step of forming an anode electrode film on a substrate, a step of applying an organic EL material forming an R segment portion on the anode electrode film, and an organic EL material forming an R segment portion on the substrate. A step of masking to remove the other part of the organic EL material, a step of applying a water-repellent film on the entire surface of the substrate, and a step of masking the water-repellent film on the organic EL material forming the R segment part on the substrate. And a step of removing the water repellent film on the other part, and a step of applying an organic EL material and a water repellent film for forming a G segment on the region where the water repellent film is removed and the anode electrode film is exposed. A step of masking the water repellent film on the G segment part to remove the G segment part and the water repellent film in the other parts, and forming a B segment part in the region where the water repellent film is removed and the anode electrode film is exposed. A step of applying an organic EL material and a water repellent film , A step of masking the required water repellent film on the G segment part to remove the other G segment part and the water repellent film, and forming a cathode electrode film on the R, G, B segment parts A method of manufacturing an organic electroluminescence exposure apparatus, comprising: 4. The step of applying the organic EL material for forming the R, G, B segment portions also includes the step of applying an activation film on the organic EL material. Manufacturing method of organic electroluminescence exposure apparatus of.