JP2003232352A5 - - Google Patents

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Publication number
JP2003232352A5
JP2003232352A5 JP2002029011A JP2002029011A JP2003232352A5 JP 2003232352 A5 JP2003232352 A5 JP 2003232352A5 JP 2002029011 A JP2002029011 A JP 2002029011A JP 2002029011 A JP2002029011 A JP 2002029011A JP 2003232352 A5 JP2003232352 A5 JP 2003232352A5
Authority
JP
Japan
Prior art keywords
air pad
orifice
outlet
sectional area
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002029011A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003232352A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002029011A priority Critical patent/JP2003232352A/ja
Priority claimed from JP2002029011A external-priority patent/JP2003232352A/ja
Publication of JP2003232352A publication Critical patent/JP2003232352A/ja
Publication of JP2003232352A5 publication Critical patent/JP2003232352A5/ja
Pending legal-status Critical Current

Links

JP2002029011A 2002-02-06 2002-02-06 エアパッド、このエアパッドを用いたステージ装置及びこのステージ装置を備える露光装置 Pending JP2003232352A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002029011A JP2003232352A (ja) 2002-02-06 2002-02-06 エアパッド、このエアパッドを用いたステージ装置及びこのステージ装置を備える露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002029011A JP2003232352A (ja) 2002-02-06 2002-02-06 エアパッド、このエアパッドを用いたステージ装置及びこのステージ装置を備える露光装置

Publications (2)

Publication Number Publication Date
JP2003232352A JP2003232352A (ja) 2003-08-22
JP2003232352A5 true JP2003232352A5 (enExample) 2005-08-11

Family

ID=27773543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002029011A Pending JP2003232352A (ja) 2002-02-06 2002-02-06 エアパッド、このエアパッドを用いたステージ装置及びこのステージ装置を備える露光装置

Country Status (1)

Country Link
JP (1) JP2003232352A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005027206A1 (ja) * 2003-09-11 2006-11-24 株式会社ニコン 定盤、ステージ装置及び露光装置
WO2006043434A1 (ja) * 2004-10-18 2006-04-27 Nikon Corporation 軸受装置及びステージ装置並びに露光装置
JPWO2008093617A1 (ja) * 2007-01-30 2010-05-20 株式会社安川電機 ステージ装置および露光装置
JP2009014097A (ja) * 2007-07-04 2009-01-22 Ntn Corp 静圧軸受パッド
JP5082929B2 (ja) * 2008-02-29 2012-11-28 株式会社ニコン 流体軸受、ステージ装置、露光装置、及びデバイス製造方法
CN101769336B (zh) * 2009-01-05 2013-02-13 鸿富锦精密工业（深圳）有限公司 空气导轨
CN110939655B (zh) * 2019-12-06 2025-07-25 天津航天机电设备研究所 V型节流式重载静压气浮轴承
WO2024090442A1 (ja) * 2022-10-26 2024-05-02 京セラ株式会社 静圧気体軸受装置

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