JP2003218655A - Traveling wave power control method for high frequency power supply and high frequency power supply - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a traveling wave power control method for a high frequency power supply by which suppression of a traveling wave power just after output start of the traveling wave power is relaxed without causing a junction temperature Tj of an amplifier element to exceed an absolute maximum rating temperature Tjmax resulting in destroying the amplifier element. <P>SOLUTION: The traveling wave power control method for a high frequency power supply and the high frequency power supply system are provided which use a power suppression relax threshold value signal Vth1 greater than a power suppression reference threshold value signal Vth0 for a power suppression threshold value signal Vth until a determined relaxation time Etime elapses from start of output of a traveling wave power PF and obtain and output a power control signal Vcont for controlling the outputted traveling power PF to reach a power target value by using: a traveling wave power setting signal Vset; a power suppression signal Vsub which changes depending on a difference between a reflection wave power detection signal value Vpr and a power suppression threshold signal value Vth; and a traveling power detection signal Vpf. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency power supply device for supplying electric power to a plasma processing device for performing plasma etching, for example.

[0002]

2. Description of the Related Art FIG. 2 is a block diagram showing an example of a high frequency power supply device HP and its peripheral devices. The high frequency power supply device HP is a power supply device for supplying high frequency power to the plasma processing device 5 serving as a load via the power transmission line 2, the matching device 3, and the power transmission line 4. In general, this type of high frequency power supply device outputs high frequency power having a frequency of several hundred kHz or more. The matching device 3 has an output impedance Zo (usually set to 50Ω) as seen from the inside of the high frequency power output unit of the high frequency power supply device HP.
And a load-side impedance ZL (power transmission line 2, matching device 3, power transmission line 4, and plasma processing device 5) when the load side is viewed from the high-frequency power output unit of the high-frequency power supply device HP.
Impedance) of the device.
The matching device 3 includes, for example, a variable impedance element such as a variable capacitor and a variable inductor inside, and changes the load side impedance ZL by changing the internal impedance.

The plasma processing apparatus 5 is an apparatus having a work processing section and processing (etching, CVD, etc.) a work such as a wafer and a liquid crystal substrate carried into the work processing section. In order to process a work, the plasma processing apparatus 5 introduces a plasma discharge gas into a work processing part and applies high frequency power (voltage) supplied from the high frequency power supply device HP to the plasma discharge gas. The above plasma discharge gas is discharged (hereinafter referred to as plasma discharge) to change from the non-plasma state to the plasma state. Then, the work is processed using the gas in the plasma state.

The power transmission line 2 and the power transmission line 4 are lines for transmitting power, and for example, a coaxial cable, a waveguide, a copper plate, a coaxial pipe, etc. are used.

Here, the high frequency power supply device HP shown in FIG.
Output impedance Zo and load impedance ZL
And are matched (hereinafter referred to as impedance matching), the high frequency power output from the high frequency power supply device HP is efficiently supplied to the plasma processing device 5 (hereinafter, supplied to the load of the plasma processing device 5 or the like). Power is called load power).

However, since the internal impedance of the plasma processing apparatus 5 changes depending on the state of plasma discharge, the load side impedance ZL viewed from the high frequency power supply HP changes to a high impedance or a low impedance as compared with the time of matching. Then, the output impedance Zo and the load-side impedance ZL do not match, so that part or all of the high-frequency power (hereinafter, traveling wave power) output from the high-frequency power supply HP and directed to the plasma processing apparatus 5 is reflected. Then, the reflected wave power PR is generated from the plasma processing apparatus 5 toward the high frequency power supply HP.

Normally, in order to perform impedance matching by the matching device 3, the state is returned to the matching state, but reflected wave power is generated from the non-matching state to the matching state. Further, when the adjustment of the matching device 3 is not optimal, the non-matching state may continue. In this way, the reflected wave power generated for some reason is the high frequency power supply HP.
Return to inside (reflection input).

FIG. 3 is a block diagram showing the configuration of a prior art constant DC voltage input high frequency power supply device HP1 (hereinafter referred to as high frequency power supply device HP1) using a constant voltage output DC power supply circuit DPS1 described later. The oscillator circuit OSC outputs a predetermined high frequency voltage (high frequency signal) AC1. In addition,
The high frequency signal referred to here is not limited to a sine wave signal, but includes, for example, a rectangular wave signal, a triangular wave signal, and the like. Power adjustment circuit A
DJ is a high frequency voltage AC output from the oscillator circuit OSC
1 and the power control signal Vcont output from the output setting arithmetic circuit CAL described later are input, and the amplitude or duty cycle of the high frequency voltage AC1 output from the oscillation circuit OSC is increased or decreased according to the level of the input power control signal Vcont. The high frequency voltage (high frequency signal) AC2 is output.

Normally, the matching device 3 returns to the matching state for impedance matching, but the reflected wave power is generated during the period from the non-matching state to the matching state. Further, when the adjustment of the matching device 3 is not optimal, the non-matching state may continue. In this way, the reflected wave power generated for some reason is the high frequency power supply HP.
Return to inside.

The power adjusting circuit ADJ is, for example, an amplitude control circuit using a mixer, a dual gate FET, a pin diode attenuator, or a PW using a dedicated IC.
An M control circuit is used. The mixer applies a high-frequency voltage (high-frequency signal) AC1 to a direct-current voltage (power control signal Vcont).
Is an element that produces an output with an amplitude that depends on the DC voltage level. Dual-gate FET has two gates and one side has high-frequency voltage (high-frequency signal) AC
A DC voltage (power control signal Vcont) is input to 1 and the other. This is an element that can adjust the output by changing the gain of the FET depending on the DC voltage level. The pin diode attenuator is a variable attenuator controlled by voltage, and can change the attenuation rate for the high frequency voltage (high frequency signal) AC1 by the input DC voltage level (power control signal Vcont). The PWM control circuit uses the high frequency signal AC
1 (not necessarily a sine wave signal) and a DC voltage (power control signal Vcont) are input, and the duty cycle of the output waveform changes depending on the input DC voltage level.
The output power depends on the duty cycle of the output waveform.

Constant voltage output DC power supply circuit DPS1 (hereinafter,
The DC power supply circuit DPS1) is a power supply source for amplification from small power to large power in a power amplifier circuit AMP1 described later. DC power supply circuit DPS in the case of FIG.
1 outputs a constant voltage output voltage (hereinafter referred to as output voltage DC1) whose output voltage value is constant and whose output current value changes.

The power amplifier circuit AMP1 is a power adjustment circuit A.
The power output from the DJ (which may be expressed as a voltage) is amplified and the traveling wave power PF is output. This power amplifier circuit AMP
For example, an FET (Field Effect Transistor) or a bipolar transistor is used as the amplifying element of No.1. Then, a DC voltage is applied to the drain (collector in the case of a bipolar transistor) of the power amplifier circuit AMP1 using the FET and the high frequency voltage output from the power adjusting circuit ADJ to the gate of the FET (the base in the case of a bipolar transistor). By inputting AC2, it is possible to obtain larger electric power than that of the input section of the power amplifier circuit AMP1. The amplification factor is not constant but depends on the output power.

In FIG. 3, the oscillator circuit OSC, the power adjusting circuit ADJ, the DC power supply circuit DPS1 and the power amplifier circuit AMP1 constitute the power output means POUT for outputting the traveling wave power PF.

The output power setting circuit SET has a magnitude (hereinafter, referred to as the magnitude of the traveling wave power PF output from the power output means POUT).
A traveling wave power value PF), and a traveling wave power setting signal Vset corresponding to this setting value.
Is output. The magnitude of the traveling wave power setting signal Vset is hereinafter referred to as traveling wave power setting signal value Vset.

Traveling wave / reflected wave power detector DET (hereinafter,
The power detector DET) is a traveling wave power value PF output from the power output means POUT and the high frequency power supply device HP.
The magnitude of the reflected wave power PR returning from the outside of 1 (hereinafter referred to as the reflected wave power value PR) is detected, the traveling wave power detection signal Vpf corresponding to the traveling wave power is output, and the reflected wave power is also equivalent to the reflected wave power. A reflected wave power detection signal Vpr is output. For the power detector DET, for example, a directional coupler is used. The traveling wave power PF output from the power detector DET and the reflected wave power PR returning from the outside of the high frequency power supply device HP1 pass through the power detector DET with the same size or are almost attenuated. Pass without.

The reflection protection circuit PRTp with a fixed threshold is
Reflected wave power detection signal V output from power detector DET
Pr is input and a power suppression signal Vsub that changes according to the reflected wave power detection signal Vpr is output. The power suppression signal Vsub is a signal for suppressing the traveling wave power value PF output from the power output means POUT. In addition,
The magnitude of the power suppression signal Vsub is hereinafter referred to as the power suppression signal value Vsub. The power target value is the power value obtained by subtracting the power value corresponding to the power suppression signal value Vsub from the set value of the traveling wave power PF. Further, the magnitude of the signal corresponding to the power target value (hereinafter referred to as the power target value signal Vtp) (hereinafter referred to as the power target value signal value Vtp) is K
It is expressed by the following equation, where 1 is a constant of proportionality. Vtp = K1 × (Vset−Vsub) The circuit configuration of the reflection protection circuit PRTp with the fixed threshold value will be described later with reference to FIG.

The output setting arithmetic circuit CAL receives the traveling wave power setting signal Vset, the power suppression signal Vsub and the traveling wave power detection signal Vpf, and the traveling wave power value PF output from the power output means POUT is the power target value. So that
The power control signal Vcont for controlling the traveling wave power value PF output from the power output means POUT is output. The magnitude of the power control signal Vcont (hereinafter, referred to as the power control signal value Vcont) can be expressed by the following equation using K1 and K2 as proportional constants. Further, each signal value in the following equation is a value represented by an absolute value. Vcont = K2 * (K1 * (Vset-Vsub) -Vpf) = K2 * (Vtp-Vpf) The circuit configuration of the output setting arithmetic circuit CAL will be described later with reference to FIG. In FIG. 3, the reflection protection circuit PRTp with a fixed threshold value and the output setting arithmetic circuit CAL are shown.
And the output power setting circuit SET constitute a power control means PCON for controlling the traveling wave power PF.

The power adjustment circuit ADJ, as described above,
Power control signal V output from the output setting arithmetic circuit CAL
Since the output value of the high frequency voltage AC2 is increased or decreased depending on the level of cont, the output value of the traveling wave power PF is feedback-controlled by the configuration shown in FIG. That is, the traveling wave power value PF output from the power output means POUT is controlled to the power target value by the power control signal Vcont output from the output setting arithmetic circuit CAL.

FIG. 4 is a block diagram showing a configuration of a conventional variable DC voltage input high frequency power supply device HP2 (hereinafter referred to as high frequency power supply device HP2) using a variable voltage output DC power supply circuit DPS2 described later. Oscillator circuit OSC,
Power detector DET, reflection protection circuit PRT with fixed threshold
p, output setting arithmetic circuit CAL, output power setting circuit SET
Is the same as the high frequency power supply device shown in FIG.

The variable voltage output DC power supply circuit DPS2 (hereinafter referred to as DC power supply circuit DPS2) is a power amplifier circuit A.
In MP2, it is a power supply source for amplification from low power to high power. Further, the power control signal Vcont output from the output setting arithmetic circuit CAL is input, and the output voltage DC is changed according to the level of the input power control signal Vcont.
Increases or decreases by 2. The DC power supply circuit DPS2 in the case of FIG. 4 changes the output voltage and the output current unlike the DC power supply circuit DPS1 of FIG.

The power amplifier circuit AMP2 is an oscillator circuit OSC.
High-frequency voltage AC1 output from the computer (may be expressed in electric power)
Is amplified and the traveling wave power PF is output. Further, as the amplification element of the power amplification circuit AMP, for example, an FET or the like is used as in the high frequency power supply device shown in FIG. Therefore, the DC voltage DC2, which is the output of the DC power supply circuit DPS2, is applied to the drain (collector in the case of a bipolar transistor) of the power amplifier circuit AMP2 using the FET, and the gate (base in the case of a bipolar transistor) of the FET is applied. By inputting a predetermined high frequency voltage AC1 output from the oscillator circuit OSC, the power amplifier circuit AM
It is possible to obtain larger power than the input part of P2.

In FIG. 4, the oscillator circuit OSC, the DC power supply circuit DPS2, and the power amplifier circuit AMP2 constitute power output means POUT for outputting the traveling wave power PF. Further, in FIG. 4, a power control means PCON for controlling the traveling wave power PF is configured by the reflection protection circuit PRTp with a fixed threshold value, the output setting arithmetic circuit CAL, and the output power setting circuit SET.

As described above, the DC voltage DC2 output from the DC power supply circuit DPS2 is the output setting arithmetic circuit CAL.
Since the output value is increased / decreased according to the level of the power control signal Vcont output from the above, the output value of the traveling wave power PF is feedback-controlled by the configuration of FIG. That is, the traveling wave power value PF output from the power output means POUT is controlled to the power target value by the power control signal Vcont output from the output setting arithmetic circuit CAL.

(Description of Prior Art Threshold Fixed Reflection Protection Circuit PRTp) Next, the prior art threshold fixed reflection protection circuit PRTp and output setting arithmetic circuit CAL used in FIGS. 3 and 4. Will be further described. FIG. 5 shows a conventional reflection protection circuit PRTp with a fixed threshold.
It is a circuit diagram of. Power suppression reference threshold value setting circuit TH0
Consists of a control voltage source Ec whose voltage (potential with respect to earth) is Ve, a resistor Rt01 and a resistor Rt02 (one of which is connected to earth). The control voltage source E
The power suppression reference threshold signal Vth, which is a voltage signal obtained by dividing the voltage Ve of c by the resistors Rt01 and Rt02.
Outputs 0. In the present application, even such a voltage may be treated as a signal. In addition, the control voltage source E
c is also commonly used in other parts of the high frequency power supply HP1 or HP2.

Vpr (-) indicates that the sign of the reflected wave power detection signal Vpr output from the power detector DET is inverted to form a negative signal (negative potential).
An inverting circuit (not shown) is provided between the power detector DET and the reflection protection circuit PRT in order to invert the sign.

Hereinafter, if a "(-)" is added after a signal or the like, it means that the signal is a negative signal (negative potential). Similarly, if "(+)" is added, it indicates that the signal is a positive signal (positive potential). In addition, illustration and description of an inverting circuit for inverting the sign (potential) may be omitted for description.

The power suppression signal output circuit ADD1 is an inverting type addition amplification circuit (hereinafter referred to as a power suppression signal output circuit), and includes an operational amplifier OPa1 and resistors Ra11 and Ra1.
2, Ra13, Ra14 (one of which is connected to ground)
And diodes Da11 and Da12.

Prior art reflection protection circuit P with fixed threshold.
Since RTp is configured as shown in FIG. 5, the magnitude (absolute value) of the reflected wave power detection signal Vpr (hereinafter, referred to as reflected wave power detection signal value Vpr) is the magnitude of the power suppression reference threshold signal Vth0. When it becomes larger than the absolute value (hereinafter referred to as power suppression reference threshold signal value Vth0), the power suppression signal Vsub (+) obtained by inverting and amplifying the voltage signal of the difference between the two is output. In addition, the reflected wave power detection signal value Vpr (absolute value) is the power suppression reference threshold signal value V
When th0 (absolute value) or less, the power suppression signal value Vsu
b becomes 0 level. Further, in this example, the reflected wave power detection signal Vpr is a negative signal (negative potential) and the power suppression signal Vs.
Although ub is a positive signal (positive potential), the same applies when the sign of the signal is opposite. In addition, the amplification factor is OPa
It may be set according to the input signal value so that the output signal of 1 becomes an appropriate level. The power suppression signal output circuit ADD1 is generally well known, and therefore detailed description thereof will be omitted. Further, description of similar inverting amplifier circuits described below will be omitted.

(Explanation of Output Setting Calculation Circuit CAL) FIG. 6
FIG. 3 is a circuit configuration diagram of an output setting arithmetic circuit CAL. Vs
et (+) is a traveling wave power setting signal output from the output power setting circuit SET. Vsub (-) is a power suppression signal output from the reflection protection circuit PRTp with a fixed threshold value. Note that this signal is a signal obtained by inverting the output signal of the reflection protection circuit PRTp with a fixed threshold value to a negative signal (negative potential) using an inverting circuit (not shown).

ADD2 is an inverting type addition amplifier circuit (hereinafter,
The second operational amplifier OPa2.
And resistors Ra21, Ra22, Ra23, and Ra24 (one of which is connected to ground). ADD3 is an inverting type addition amplification circuit (hereinafter, referred to as a third addition amplification circuit), and includes an operational amplifier OPa3 and resistors Ra31 and Ra3.
2, Ra33, Ra34 (one of which is connected to the ground)
It consists of and. Since the second addition amplification circuit ADD2 is an inverting addition amplification circuit, the traveling wave power setting signal Vset is set.
The voltage signal obtained by adding (+) and the power suppression signal Vsub (-) is inverted and amplified, and the power target value signal Vtp (-) is output. Vpf (+) is a traveling wave power detection signal output from the power detector DET. Third addition amplifier circuit AD
D3 is also an inverting type addition amplification circuit, which inverts and amplifies the voltage signal obtained by adding the traveling wave power detection signal Vpf (+) and the power target value signal Vtp (-) to the power control signal Vcon.
Output t. The second addition amplifier circuit ADD2 and the third addition amplifier circuit ADD2
The amplification factor of the addition amplifier circuit ADD3 may be set in accordance with the input signal value so that the output signal of the operational amplifier has an appropriate level.

Since the output setting arithmetic circuit CAL is constructed as described above, the magnitude of the traveling wave power detection signal Vpf (hereinafter referred to as traveling wave power detection signal value Vpf) is larger than the signal value of the power target value signal Vtp. ) Is small, the output setting arithmetic circuit CAL causes the power control signal Vc to increase the traveling wave power PF output from the power output means POUT.
If the traveling wave power detection signal value Vpf is larger than the signal value of the power target value signal Vtp, the output setting arithmetic circuit CAL reduces the traveling wave power PF output from the power output means POUT. Control signal Vcon
Output t. In this way, since the traveling wave power value PF is controlled by comparing the traveling wave power detection signal Vpf corresponding to the traveling wave power value PF with the traveling power target value signal Vtp corresponding to the electricity target value, the reflected wave power detection is performed. Signal value Vpr (absolute value)
Becomes larger than the power suppression reference threshold signal value Vth0 (absolute value) and the power target value decreases by the power value corresponding to the excess amount, the output value of the traveling wave power PF decreases. , Even if the reflection coefficient is the same, the reflected wave power decreases.

By the way, as described above, the power amplifier circuit A
For MP1 and AMP2, for example, an amplifying element such as FET is used. The absolute maximum rated temperature Tjmax of the junction temperature Tj is defined in this amplification element, and the junction temperature Tj is the absolute maximum rated temperature Tjm.
If it exceeds ax, the element will be destroyed, so it is necessary to design so that the junction temperature Tj does not exceed the absolute maximum rated temperature Tjmax. (Usually, the junction temperature Tj is designed so as not to exceed a temperature Tjmax ′ lower than the absolute maximum rated temperature Tjmax in consideration of safety, but in the following description,
An explanation will be given using the absolute maximum rated temperature Tjmax. )

The junction temperature of the amplification element is expressed by the following equation. That is, the junction temperature is the case temperature Tc of the amplification element and the loss P in the amplification element.
It will depend on d. Tj = Tc + Pd × θ Tj: Junction temperature of amplification element [° C.], Tc: Case temperature of amplification element [° C.], Pd: Loss in amplification element [W], θ: Thermal resistance of amplification element [° C./W ] (Coefficient for converting loss to temperature)

Next, the relationship between loss and heat will be described.
There is always a loss when transmitting power. Power amplifier circuit A
In MP1 and AMP2, a loss occurs when amplifying power. If there is a loss in the power amplifier circuits AMP1 and AMP2,
The power loss occurs in the power amplifier circuit AMP.
1. Raise the temperature of AMP2 itself. Further, when the temperature of the power amplifier circuits AMP1 and AMP2 rises, the case temperature Tc also rises. In addition, as described above, the power amplifier circuit A
Since MP1 and AMP2 output a large amount of power, if there is a loss in the power amplifier circuits AMP1 and AMP2, the amount of heat generated will increase and the element temperature will easily rise. Therefore, normally, a cooling mechanism such as a heat sink is provided to release the generated heat, and the power amplifier circuits AMP1 and AMP2 are released.
Attempts have been made to reduce the degree of temperature rise in.

However, as shown in FIG. 2, when the high frequency power supply device HP is used to supply power to the plasma processing apparatus 5, reflected wave power may be generated. In this case, since the reflected wave power returns to the high frequency power supply HP, not only the loss that occurs when the traveling wave power is output, but also the loss due to the reflected wave power occurs. That is, the degree of temperature rise of the junction temperature Tj is higher when the reflected wave power is generated than when the matching is performed.

In the above-mentioned conventional technique, the power of the reflected wave is detected even if the reflected wave power is generated until the reflected wave power detection signal value Vpr (absolute value) exceeds the power suppression reference threshold signal value Vth0 (absolute value). The target value signal Vtp does not decrease. Therefore, when the reflected wave power corresponding to the power suppression reference threshold signal Vth0 is generated and the state is continuously in a heat saturation state, the junction temperature Tj does not exceed the absolute maximum rated temperature Tjmax. Thus, by setting the value of the power suppression reference threshold signal Vth0, it is possible to protect the amplifier elements used in the power amplifier circuits AMP1 and AMP2.

As described above, the reflected wave power detection signal value Vpr (absolute value) is the power suppression reference threshold signal value Vt.
When it becomes larger than h0 (absolute value), the output value of the traveling wave power PF decreases by an electric power value proportional to the size of the excess. When the state of the load side impedance does not change, the reflection coefficient is the same, so that when the traveling wave power decreases, the reflected wave power also decreases. Therefore, normally, if the power suppression reference threshold signal Vth0 is set as described above,
Even if the reflected wave power that makes the reflected wave power detection signal Vpr larger than the power suppression reference threshold signal Vth0 is generated, the junction temperature Tj is the absolute maximum rated temperature Tjm.
It is possible not to exceed ax.

However, for some reason, a reflected wave power is generated such that the reflected wave power detection signal Vpr larger than the power suppression reference threshold signal Vth0 is detected, and this causes the junction temperature to rise. Tj
When the temperature exceeds the absolute maximum rated temperature Tjmax, it is necessary to reduce the set value of the power suppression reference threshold signal Vth0 to strengthen the protection.

[0039]

(Problems until plasma discharge) When the traveling wave power is output from the high frequency power supply device HP and the supply of the power to the plasma processing device 5 is started,
When the reflection occurs and the reflected wave power is generated, the matching device 3 operates so as to perform impedance matching. However, power is not efficiently supplied because reflection occurs until impedance matching is performed. Then, the load power supplied to the plasma processing apparatus 5 is reduced and plasma discharge is less likely to occur. At this time, the reflected wave power detection signal value Vp
r (absolute value) is the power suppression reference threshold signal value Vth0
When the absolute value is exceeded, the output value of the traveling wave power PF is suppressed, and the load power supplied to the plasma processing apparatus 5 is further reduced. As a result, plasma discharge becomes even less likely to occur.

Therefore, the power suppression reference threshold signal Vth
If the set value of 0 is increased to suppress the suppression of the output value of the traveling wave power PF, the amount of power supplied to the plasma processing apparatus 5 increases and plasma discharge is facilitated, and the above problem is improved. However, if the set value of the power suppression reference threshold signal Vth0 is increased, the junction temperature Tj becomes the absolute maximum rated temperature Tjm when the reflected wave power increases.
This is not possible because the amplification element is likely to be destroyed beyond ax.

If plasma discharge does not occur immediately after the start of power output, the matching device 3 performs impedance matching to increase the amount of power supplied to the plasma processing device 5 for plasma discharge. The high frequency power supply HP
Output impedance Zo and load impedance ZL
The difference (hereinafter, referred to as matching impedance deviation) does not continue to decrease, but in some cases, the impedance matching may finally be performed while the matching impedance deviation temporarily increases. for that reason,
Comparing the output of the traveling wave power with a certain state during the matching operation, the matching impedance deviation may be smaller at the start of the output of the traveling wave power in some cases.

In such a state, as compared with the process in which the matching impedance deviation continues to decrease, the process of impedance matching is wasted, so that the time until impedance matching (hereinafter referred to as matching time) becomes longer. . There has been a problem that when the alignment time becomes long, the machining time of the work becomes long.

Further, a permissible time from supplying electric power from the high frequency power supply HP to the matching is set, and if the matching does not occur within the set permissible time, it is considered that the matching operation is abnormal, and the work is processed. The process may be interrupted. In such a case, there is a problem that not only the machining time of the work becomes long, but also the yield of the work deteriorates due to deterioration of the quality of the work, machining failure, and the like.

(Problem after Plasma Discharge) When the matching impedance deviation disappears or becomes small, plasma discharge occurs and the plasma discharge gas changes from the non-plasma state to the plasma state. Then, the processing of the work is started. However, even after plasma discharge, reflection occurs when the plasma becomes unstable. At this time, if the set value of the power suppression reference threshold signal Vth0 is made small, the degree of suppression of the traveling wave power becomes large, so that the power for maintaining the plasma discharge becomes insufficient and the plasma state is changed. It easily becomes a non-plasma state. Even when the plasma state is changed to the non-plasma state in this way, the processing of the work is interrupted, so that not only the processing time of the work becomes long, but also the yield of the work deteriorates due to the quality deterioration of the work and processing defects. Met.

As described above, when the traveling wave power is controlled by the method of the prior art, the above-mentioned various problems occur. Therefore, according to the present invention, the high-frequency power supply capable of relaxing the suppression of the traveling wave power immediately after the start of the output of the traveling wave power without causing the junction temperature Tj of the amplification element to exceed the absolute maximum rated temperature Tjmax and causing the destruction of the amplification element. An object is to provide a device and a method of controlling traveling wave power.

[0046]

According to the invention of claim 1 at the time of filing, as shown in FIG. 10, the traveling wave power value PF amplified and output by the power amplifier circuit is controlled so as to be the power target value. In the traveling wave power control method for a high frequency power supply, the relaxation time (E) determined in advance from the start of outputting the traveling wave power PF is
(time, Etime) elapses, the traveling wave power value PF is controlled so that the junction temperature Tj of the amplification element of the power amplification circuit becomes a power target value that allows the junction temperature Tj to exceed the absolute maximum rated temperature Tjmax. After the relaxation time (Etime, Etime) elapses, a high frequency power source that controls the traveling wave power value PF so that the junction temperature Tj of the amplification element of the power amplification circuit becomes a power target value that is equal to or less than the absolute maximum rated temperature Tjmax. Is a traveling wave power control method.

According to the invention of claim 2 at the time of filing, as shown in FIG. 10, a traveling wave of a high frequency power source is controlled so that the traveling wave power value PF amplified and output by the power amplifier circuit becomes a power target value. In the power control method, when the output of the traveling wave power PF is started, the traveling wave power value PF is set so that the junction temperature Tj of the amplification element of the power amplification circuit becomes a power target value that allows the junction temperature Tj to exceed the absolute maximum rated temperature Tjmax. The junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax, and the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax or less. It is a traveling wave power control method of a high frequency power source for controlling the wave power value PF.

According to the invention of claim 3 at the time of filing, as shown in FIG. 10, the traveling wave power value PF amplified and output by the power amplifier circuit is controlled so that the traveling wave power value PF becomes the power target value. In the power control method, from the start of output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax, the junction temperature Tj of the amplification element of the power amplification circuit.
Control the traveling wave power value PF so that the electric power target value is allowed to exceed the absolute maximum rated temperature Tjmax, and the junction temperature Tj is the absolute maximum rated temperature T.
When it reaches jmax, the junction temperature Tj of the amplification element of the power amplification circuit is set to the absolute maximum rated temperature Tjmax.
The traveling wave power value P so that the power target value becomes
It is a traveling wave power control method of a high frequency power source for controlling F.

The invention of claim 4 at the time of filing is a traveling wave power control method of the high frequency power source of the high frequency power source device HP11 of FIG. 7 or the high frequency power source device HP21 of FIG. 8, which is amplified by a power amplifier circuit and output. In a traveling wave power control method for a high frequency power supply, which controls the traveling wave power value PF to be a power target value, a traveling wave power detection signal Vpf and a high frequency wave that detect the traveling wave power value PF output from the high frequency power supply device HP. The power detection process of outputting the reflected wave power detection signal Vpr that detects the reflected wave power value PR that is reflected and input to the power supply device HP, and the elapse of a predetermined relaxation time Etime from the output start of the traveling wave power PF. Is a signal value corresponding to a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. The suppression relaxation threshold setting process in which the power suppression relaxation threshold signal Vth1 used for this purpose is the power suppression threshold signal Vth, and after the relaxation time Etime elapses, the junction temperature Tj is equal to or lower than the absolute maximum rated temperature Tjmax. Power suppression reference threshold signal Vth used to obtain a signal value corresponding to the power target value
Electric power for suppressing the traveling wave power value PF using the reference threshold value setting process in which 0 is the power suppression threshold signal Vth and the reflected wave power detection signal Vpr and the power suppression threshold signal Vth. A power suppression signal calculation process of calculating the suppression signal Vsub, a traveling wave power setting signal Vset corresponding to the set value of the traveling wave power value PF, and the power suppression signal V
and a power control signal Vco using the power target value signal Vtp and the traveling wave power detection signal Vpf.
power control signal calculation process for calculating nt, and the traveling wave power value PF according to the power control signal Vcont.
Is a traveling-wave power control method for a high-frequency power source that controls so that the power becomes a power target value.

The invention of claim 5 at the time of application is the high frequency power supply device HP12 (8th embodiment) of FIG. 23 or the high frequency power supply device HP22 (9th embodiment) of FIG. 25, which is a power amplifier circuit. In the traveling wave power control method of the high frequency power supply, which controls so that the traveling wave power value PF that is amplified and output becomes the power target value, the traveling wave power value PF output from the high frequency power supply device HP is detected. Reflected wave power value PR that is reflected and input to the detection signal Vpf and the high frequency power supply device HP
Power detection process of outputting the reflected wave power detection signal Vpr, which is detected, and from the start of the output of the traveling wave power PF to the elapse of a predetermined reflection protection relaxation time Etime, the junction of the amplification element of the power amplification circuit. The power suppression threshold signal Vth1 used to obtain a signal value corresponding to the power target value that allows the temperature Tj to exceed the absolute maximum rated temperature Tjmax is set to the power suppression threshold signal V.
and that the junction temperature Tj of the amplification element of the power amplification circuit exceeds the absolute maximum rated temperature Tjmax from the start of the output of the traveling wave power PF to the elapse of a predetermined current protection relaxation time Etime. The suppression relaxation threshold setting process in which the current suppression relaxation threshold signal Vith1 used for obtaining a signal value corresponding to the allowable power target value is used as the current suppression threshold signal Vith, and the reflection protection relaxation time Etime are After the passage of time, the junction temperature Tj is changed to the absolute maximum rated temperature Tjm.
The power suppression reference threshold signal Vth0 used to obtain the signal value corresponding to the power target value to be equal to or less than ax is set as the power suppression threshold signal Vth, and after the current protection relaxation time Etime elapses, the above A reference threshold value setting process in which the current suppression threshold value signal Vith is the current suppression reference threshold value signal Vith0 used to obtain a signal value corresponding to the electric power target value for making the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax; A power suppression signal calculation process for calculating a power suppression signal Vsub for suppressing the traveling wave power value PF using the reflected wave power detection signal Vpr and the power suppression threshold signal Vth; Power source for amplification (DPS
1, DPS2) outputs the current detection signal Vi corresponding to the current value and the current suppression threshold value signal Vith to suppress the traveling wave power value PF.
and a current suppression signal calculation process for calculating ub and a traveling wave power setting signal Vse corresponding to the set value of the traveling wave power value PF.
t, the power suppression signal Vsub, and the current suppression signal Vi
power target value signal Vtpi using the sub and the power target value signal Vtpi, and the power target value signal Vtpi
And the traveling wave power detection signal Vpf using the power control signal V
and a power control signal calculation process for calculating cont,
A traveling wave power control method for a high frequency power source, which controls the traveling wave power value PF to a power target value by the power control signal Vcont.

The invention of claim 6 at the time of application is the traveling wave power control of the high frequency power supply of the high frequency power supply HP13 (10th embodiment) of FIG. 26 or the high frequency power supply HP23 (11th embodiment) of FIG. In the method, instead of calculating the power suppression signal Vsub from the reflected wave power value PR of FIG. 7 or FIG. 8, a power supply source (D
PS1, DPS2) is a traveling wave power control method for a high frequency power source that calculates a current suppression signal Visub from a current detection signal Vi corresponding to a current value output by PS1, DPS2). However, in the traveling wave power control method of the high frequency power source for controlling to the power target value, a power detection process of outputting a traveling wave power detection signal Vpf which detects the traveling wave power value PF output from the high frequency power supply device HP. Equivalent to a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax from the start of output of the traveling wave power PF until a predetermined relaxation time Etime elapses. The current suppression threshold value signal Vith1 used for obtaining the signal value
The process of setting the suppression relaxation threshold value of th and the junction temperature T after the relaxation time Etime has elapsed.
The current suppression reference threshold signal Vith0 used for obtaining a signal value corresponding to the electric power target value for making j equal to or less than the absolute maximum rated temperature Tjmax is the current suppression threshold signal Vith.
And a current detection signal Vi corresponding to the current value output from the power supply sources (DPS1, DPS2) for amplification in the power amplification circuit and the current suppression threshold signal Vith. Using traveling wave power value PF
A current suppression signal calculation process for calculating the current suppression signal Visub for suppressing the power consumption, and a power target value using the traveling wave power setting signal Vset corresponding to the setting value of the traveling wave power value PF and the current suppression signal Visub. Power target value signal calculation process for calculating the signal Vti, and the power target value signal V
ti and the traveling wave power detection signal Vpf to calculate the power control signal Vcont, and the traveling wave power value PF is controlled by the power control signal Vcont to be the power target value. This is a traveling wave power control method for a high frequency power supply.

According to the invention of claim 7 at the time of application, in the process of setting the suppression relaxation threshold value according to claim 4 at the time of application, the junction temperature Tj is the absolute maximum rated temperature Tjmax at the start of output of the traveling wave power PF. Power suppression threshold signal Vth1 used to obtain a signal value corresponding to a power target value that is allowed to exceed
In the process of setting the threshold value for suppression relaxation, the process of setting the reference threshold makes the junction temperature Tj below the absolute maximum rated temperature Tjmax before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. A traveling wave power control method for a high frequency power supply, which is a process of setting a reference threshold value using a power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to a power target value as a power suppression threshold signal Vth.

According to the invention of claim 8 at the time of filing, the process of setting the suppression / relaxation threshold value according to claim 5 at the time of application is such that the junction temperature Tj is the absolute maximum rated temperature Tjmax at the start of output of the traveling wave power PF. The power suppression threshold signal Vth1 and the current suppression relaxation threshold signal Vith1 used to obtain the signal value corresponding to the power target value that is allowed to exceed In the process of setting the threshold value for suppressing relaxation using the signal Vith, the process of setting the reference threshold value sets the junction temperature Tj to the absolute maximum rated temperature Tjmax or less before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. Power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to the power target value
And a method for controlling the traveling wave power of the high frequency power supply in the process of setting a reference threshold value using the current suppression reference threshold signal Vith0 as the power suppression threshold signal Vth and the current suppression threshold signal Vith.

According to the invention of claim 9 at the time of application, in the process of setting the suppression relaxation threshold value according to claim 6 at the time of application, the junction temperature Tj is the absolute maximum rated temperature Tjmax at the start of output of the traveling wave power PF. The current suppression threshold value signal Vith1 used for obtaining the signal value corresponding to the power target value that is allowed to exceed
In the process of setting the threshold value for suppressing relaxation, which is th, the process of setting the reference threshold value is the junction temperature T of the amplification element.
Before j exceeds the absolute maximum rated temperature Tjmax, the current suppression threshold value Vith0 used for obtaining a signal value corresponding to the electric power target value that makes the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax is the current suppression threshold. It is a traveling wave power control method of a high frequency power supply which is a process of setting a reference threshold value using the value signal Vith.

According to the invention of claim 10 at the time of application, the suppression relaxation threshold value setting process of claim 4 at the time of application is such that the junction temperature of the amplifying element of the power amplifier circuit from the start of output of the traveling wave power PF. Tj is the absolute maximum rated temperature Tjmax
Until the junction temperature Tj exceeds the absolute maximum rated temperature Tjmax, the power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to the power target value that allows the junction temperature Tj to exceed the absolute maximum rated temperature Tjmax is defined as the power suppression threshold signal Vth. When the junction temperature Tj reaches the absolute maximum rated temperature Tjmax in the reference threshold setting process, the junction temperature T is set.
High frequency which is a reference threshold setting process in which the power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to a power target value for making j equal to or less than the absolute maximum rated temperature Tjmax is a power suppression threshold signal Vth. It is a traveling wave power control method of a power supply.

According to the invention of claim 11 at the time of filing, the suppression relaxation threshold setting process according to claim 5 at the time of filing is such that the junction temperature of the amplification element of the power amplification circuit is set from the start of output of the traveling wave power PF. Tj is the absolute maximum rated temperature Tjmax
Until the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the power suppression relaxation threshold signal Vth1 and the current suppression relaxation threshold signal Vi used to obtain a signal value corresponding to a power target value that allows the junction temperature Tj to exceed the absolute maximum rated temperature Tjmax.
In the process of setting the threshold voltage for suppressing relaxation, in which th1 is the power control threshold signal Vth and the current control threshold signal Vith, the reference temperature setting process causes the junction temperature Tj to reach the absolute maximum rated temperature Tjmax. When the junction temperature Tj is the absolute maximum rated temperature Tjmax
The power suppression reference threshold signal Vth0 and the current suppression reference threshold signal Vith0 used to obtain the signal value corresponding to the power target value
This is a traveling wave power control method for a high frequency power source, which is a process of setting a reference threshold value using th and a current suppression threshold value signal Vith.

According to the invention of claim 12 at the time of application, the suppression relaxation threshold value setting process according to claim 6 at the time of application is such that the junction temperature of the amplifying element of the power amplifier circuit from the start of output of the traveling wave power PF. Tj is the absolute maximum rated temperature Tjmax
Until the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the current suppression threshold value signal Vith1 is used as the current suppression threshold value signal Vith1 used to obtain a signal value corresponding to a power target value that allows the junction temperature Tj to exceed the absolute maximum rated temperature Tjmax.
When the junction temperature Tj reaches the absolute maximum rated temperature Tjmax in the reference threshold setting process, the electric power target for reducing the junction temperature Tj to the absolute maximum rated temperature Tjmax or less. The current suppression reference threshold value signal Vith0 used for obtaining the signal value corresponding to the value is the current suppression threshold value signal Vi.
It is a traveling wave power control method of a high frequency power source in the process of setting a reference threshold value to be th.

The invention of claim 13 at the time of filing is the same as claim 4 at the time of filing as shown in FIG. 12 (first embodiment of FIG. 11) or FIG. 14 (second embodiment of FIG. 13). The power suppression mitigation threshold signal value Vth1 according to claim 5 at the time of application, claim 7 at the time of application, claim 8 at the time of application, claim 10 at the time of application, or claim 11 at the time of application is a traveling wave. The traveling wave power control method of the high frequency power supply is constant from the start of the output of the power PF to the power suppression reference threshold signal Vth0 being set to the power suppression threshold signal Vth.

The invention of claim 14 at the time of filing is defined by claim 5 at the time of filing or claim 6 at the time of filing or claim 8 at the time of filing or claim 9 at the time of filing or claim 11 at the time of filing or at the time of filing 13. The current suppression relaxation threshold signal value Vit according to claim 12.
h1 changes the current suppression reference threshold signal Vith0 from the start of output of the traveling wave power PF to the current suppression threshold signal Vit.
It is the traveling wave power control method of the high frequency power supply which is constant until the time is set to h.

The invention of claim 15 at the time of application is defined by claim 4 at the time of application, claim 5 at the time of application, claim 7 at the time of application, claim 8 at the time of application, claim 10 at the time of application, or claim at the time of application. The power suppression relaxation threshold signal value Vth according to claim 11.
1 is a traveling wave power control method for a high frequency power supply which is not constant from the start of output of traveling wave power PF to the power suppression reference threshold signal Vth0 being set to the power suppression threshold signal Vth.

The invention of claim 16 at the time of filing is defined by claim 5 at the time of filing or claim 6 at the time of filing or claim 8 at the time of filing or claim 9 at the time of filing or claim 11 at the time of filing or at the time of filing 13. The current suppression relaxation threshold signal value Vit according to claim 12.
h1 changes the current suppression reference threshold signal Vith0 from the start of output of the traveling wave power PF to the current suppression threshold signal Vit.
It is a traveling wave power control method of the high frequency power supply which is not constant until the time is set to h.

The invention of the first modification is shown in FIG. 16 (third part of FIG. 15).
Example), claim 4 at the time of application, claim 5 at the time of application, claim 7 at the time of application, or claim 8 at the time of application
Alternatively, the power suppression mitigation threshold signal value Vth1 according to claim 10 at the time of application or claim 11 at the time of application is the power suppression reference threshold signal Vth from the start of output of the traveling wave power PF.
The traveling wave power control method of the high frequency power supply is continuously reduced until 0 is set as the power suppression threshold signal Vth.

The invention of modification 2 is claim 5 at the time of application, claim 6 at the time of application, claim 8 at the time of application, claim 9 at the time of application, claim 11 at the time of application or claim at the time of application. 12
The current suppression mitigation threshold signal value Vith1 continuously decreases from the start of output of the traveling wave power PF until the current suppression reference threshold signal Vith0 becomes the current suppression threshold signal Vith. And a traveling wave power control method for a high frequency power supply.

The invention of the third modification is shown in FIG.
Example), claim 4 at the time of application, claim 5 at the time of application, claim 7 at the time of application, or claim 8 at the time of application
Alternatively, the power suppression mitigation threshold signal value Vth1 according to claim 10 at the time of application or claim 11 at the time of application is the power suppression reference threshold signal Vth from the start of output of the traveling wave power PF.
The method is a progressive wave power control method for a high frequency power supply that gradually decreases until 0 is set as the power suppression threshold signal Vth.

The invention of modification 4 is claim 5 at the time of application, claim 6 at the time of application, claim 8 at the time of application, claim 9 at the time of application, claim 11 at the time of application or claim at the time of application. 12
The current suppression relaxation threshold signal value Vith1 described in (1) gradually decreases from the start of output of the traveling wave power PF until the current suppression reference threshold signal Vith0 becomes the current suppression threshold signal Vith. And a traveling wave power control method for a high frequency power supply.

The invention of modification 5 is shown in FIG. 12 (first of FIG. 11).
No. 4) or FIG. 14 (second embodiment of FIG. 13), the power suppression relaxation threshold signal value Vth1 according to claim 4 at the time of filing or claim 5 at the time of filing The traveling wave power control method of the high frequency power supply is constant from the start of output of the wave power PF to the elapse of the relaxation time Etime.

In the invention of the modified example 6, the current suppression relaxation threshold signal value Vith1 according to claim 5 at the time of application or claim 6 at the time of application has a relaxation time Eitime from the start of output of the traveling wave power PF. It is a traveling wave power control method for a high frequency power supply that is constant until the time elapses.

In the invention of the modified example 7, the power suppression relaxation threshold signal value Vth1 described in claim 4 at the time of filing or claim 5 at the time of filing is the relaxation time Etime from the start of output of the traveling wave power PF. Until the time elapses, it is a traveling wave power control method for a high frequency power supply which is not constant.

In the invention of the modified example 8, the current suppression relaxation threshold signal value Vith1 according to claim 5 at the time of application or claim 6 at the time of application has a relaxation time Etime from the start of the output of the traveling wave power PF. Until the time elapses, it is a traveling wave power control method for a high frequency power supply which is not constant.

The invention of modification 9 is shown in FIG. 16 (third part of FIG. 15).
Embodiment), the power suppression relaxation threshold signal value Vth according to claim 4 at the time of application or claim 5 at the time of application
1 is the relaxation time Eti from the start of output of the traveling wave power PF.
This is a traveling wave power control method for a high frequency power source that continuously decreases until the time elapses.

In the invention of the tenth modification, the current suppression relaxation threshold signal value Vith1 according to claim 5 at the time of application or claim 6 at the time of application has a relaxation time Etime from the start of output of the traveling wave power PF. It is a traveling wave power control method for a high frequency power supply that continuously decreases until the time elapses.

The invention of modification 11 is, as shown in FIG. 18 (fourth embodiment of FIG. 17), the power suppression relaxation threshold signal according to claim 4 at the time of filing or claim 5 at the time of filing. Value Vt
h1 is the relaxation time Et from the start of output of the traveling wave power PF.
It is a traveling wave power control method of the high frequency power source that gradually decreases until the time "ime" elapses.

According to the twelfth aspect of the invention, the current suppression relaxation threshold signal value Vith1 according to claim 5 at the time of filing or claim 6 at the time of filing has a relaxation time Eitime from the start of output of the traveling wave power PF. It is a traveling wave power control method for a high frequency power supply that gradually decreases until the time elapses.

As shown in FIG. 12 (first embodiment of FIG. 11) or FIG. 14 (second embodiment of FIG. 13), the invention of modification 13 is defined by claim 10 at the time of filing or claim 10 at the time of filing. Claim 11
The power suppression mitigation threshold signal value Vth1 is the absolute maximum rated temperature Tjmax of the junction temperature Tj of the amplification element of the power amplification circuit from the start of output of the traveling wave power PF.
It is a traveling wave power control method of the high frequency power supply which is constant until the time reaches.

The invention of the fourteenth modification is defined in claim 11 at the time of filing.
Alternatively, when the current suppression relaxation threshold signal value Vith1 according to claim 12 at the time of application is from the start of output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. Is a constant traveling-wave power control method for the high-frequency power supply.

The invention of the fifteenth modification is defined in claim 10 at the time of filing.
Alternatively, the power suppression relaxation threshold signal value Vth1 according to claim 11 at the time of application is from the start of output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. Is a traveling wave power control method for a high frequency power supply which is not constant.

The invention of modification 16 is the same as claim 11 at the time of filing.
Alternatively, when the current suppression relaxation threshold signal value Vith1 according to claim 12 at the time of application is from the start of output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. Is a traveling wave power control method for a high frequency power supply which is not constant.

The invention of the modification 17 is, as shown in FIG. 16 (third embodiment of FIG. 15), the power suppression relaxation threshold signal according to claim 10 at the time of filing or claim 11 at the time of filing. The traveling wave power control method of the high-frequency power supply in which the value Vth1 continuously decreases until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax from the start of the traveling wave power PF output. is there.

The invention of the eighteenth modification is defined in claim 11 at the time of filing.
Alternatively, when the current suppression relaxation threshold signal value Vith1 according to claim 12 at the time of application is from the start of output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. Is a progressive wave power control method for a high frequency power source that continuously decreases.

As shown in FIG. 18 (fourth embodiment of FIG. 17), the invention of the modification 19 is the power suppression relaxation threshold signal according to claim 10 at the time of filing or claim 11 at the time of filing. The traveling wave power control method of the high frequency power supply in which the value Vth1 gradually decreases until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax from the start of the traveling wave power PF output. is there.

The invention of the modification 20 is claimed in claim 11 at the time of filing.
Alternatively, when the current suppression relaxation threshold signal value Vith1 according to claim 12 at the time of application is from the start of output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. Is a progressive wave power control method for a high frequency power source that gradually decreases.

The invention of modification 21 is a traveling wave power control method for a high frequency power supply, wherein the relaxation time Etime for reflection protection and the relaxation time Etime for current protection described in claim 5 at the time of filing are the same time.

The invention of modification 22 is a traveling wave power control method for a high frequency power supply, wherein the relaxation time Etime for reflection protection and the relaxation time Etime for current protection described in claim 5 at the time of filing are different.

The invention of claim 17 at the time of filing is, as shown in FIG. 7 or FIG. In the device, a traveling wave power detection signal Vp that detects a traveling wave power value PF output from the high frequency power supply device HP
f and the electric power detector DET that outputs the reflected wave power detection signal Vpr that detects the reflected wave power value PR that is reflected and input to the high frequency power supply device HP, and the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax. Corresponding to a power target value that causes the junction temperature Tj to be equal to or lower than the absolute maximum rated temperature Tjmax by generating a power suppression relaxation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that is allowed to exceed The power suppression reference threshold signal Vth0 used for obtaining the signal value is generated, and the power suppression relaxation threshold signal is generated until the defined relaxation time Etime elapses from the start of output of the traveling wave power PF. Let Vth1 be the power suppression threshold signal Vth, and the relaxation time E determined from the start of output of the traveling wave power PF. After ime has elapsed, the power suppress power suppression reference threshold signal Vth0 threshold signal Vth
And the power control signal Vcont for controlling the output traveling wave power value PF to be the target power value is the traveling wave power setting signal V corresponding to the set value of the traveling wave power value PF.
set and power control means PCON that obtains and outputs the power suppression signal Vsub and the traveling wave power detection signal Vpf that change according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth, and A high-frequency power supply device comprising: a power output unit POUT including the power amplification circuit for inputting a power control signal Vcont to control the traveling wave power value PF to a target power value and outputting the traveling wave power PF. is there.

According to the eighteenth aspect of the invention at the time of filing, as shown in FIG. 23 (eighth embodiment) and FIG. 24 or FIG. 25 (ninth embodiment) and FIG. And a high frequency power supply device for detecting the traveling wave power value PF output from the high frequency power supply device HP in a high frequency power supply device for controlling the traveling wave power value PF output as A power detector DET that outputs a reflected wave power detection signal Vpr that detects a reflected wave power value PR that is reflected and input to the HP, and a current that is output by the power supply sources (DPS1 and DPS2) for amplification in the power amplification circuit. The current detector IDET that outputs the current detection signal Vi corresponding to the value and the power that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. A power suppression relaxation threshold signal Vth1 and a current suppression relaxation threshold signal Vith1 used to obtain a signal value corresponding to the standard value are generated to set the junction temperature Tj to an absolute maximum rated temperature Tjmax or less. The traveling wave power P
Relaxation time Et for reflection protection determined from the start of F output
Until the time elapses, the power suppression relaxation threshold signal V
Let th1 be the power suppression threshold signal Vth, and the power suppression reference threshold signal Vth0 be set as the power suppression threshold after the reflection protection relaxation time Etime determined from the start of output of the traveling wave power PF elapses. In addition to the signal Vth, the current suppression relaxation threshold signal Vith1 is set as the current suppression threshold signal Vith until the predetermined current protection relaxation time Etime elapses from the start of the output of the traveling wave power PF. After the relaxation time Etime for current protection determined from the start of output of the traveling wave power PF elapses, the current suppression reference threshold signal Vith0 is set as the current suppression threshold signal Vith, and the traveling wave power value PF to be output is output.
Of the electric power control signal Vcont for controlling so that the electric power control value becomes the electric power target value, the traveling wave power setting signal Vset corresponding to the setting value of the traveling wave power value PF, the reflected wave power detection signal value Vpr, and the power suppression threshold value. The power suppression signal Vsub that changes according to the difference between the signal value Vth and the current suppression signal Visub that changes according to the difference between the current detection signal value Vi and the current suppression threshold value signal Vith and the traveling wave power detection signal Vpf. Power control means PC for obtaining and outputting by
ON, and power output means POUT including the power amplifier circuit for inputting the power control signal Vcont and controlling the traveling wave power value PF to reach the power target value and outputting the traveling wave power PF. It is a high frequency power supply.

The invention of claim 19 at the time of filing of the invention is based on FIG. 26 (10th embodiment) and FIG. 24 or 27 (11th embodiment).
As shown in FIG. 24 and FIG. 24, the traveling wave power output from the high frequency power supply device HP in the high frequency power supply device that controls the traveling wave power value PF amplified and output by the power amplification circuit to reach the power target value. A traveling wave power detector DETf that outputs a traveling wave power detection signal Vpf that has detected the value PF, and a power supply source (DP) for amplification in the power amplification circuit.
S1, DPS2) current detector IDET that outputs a current detection signal Vi corresponding to the current value output by S1, DPS2), and a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. Current suppression mitigation threshold value signal Vith1 used to obtain a signal value corresponding to the current suppression used to obtain a signal value corresponding to a power target value that makes the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax. A relaxation time Etime determined from the start of output of the traveling wave power PF by generating the reference threshold signal Vith0.
Until elapses, the current suppression relaxation threshold signal Vith
1 as the current suppression threshold signal Vith, and the relaxation time Eitim determined from the start of the output of the traveling wave power PF.
After e has elapsed, the current suppression reference threshold signal Vith
0 as the current suppression threshold value signal Vith, and the traveling wave power corresponding to the set value of the traveling wave power value PF is set as the power control signal Vcont for controlling the output traveling wave power value PF to be the power target value. A power control unit PCON that obtains and outputs the current suppression signal Visub and the traveling wave power detection signal Vpf that change according to the difference between the setting signal Vset and the current detection signal value Vi and the current suppression threshold value signal Vith. A high-frequency power supply device comprising: a power output unit POUT including the power amplification circuit for inputting a power control signal Vcont to control the traveling wave power value PF to a target power value and outputting the traveling wave power PF. is there.

According to the invention of claim 20 at the time of application, as shown in FIG. 7 or 8, the power control means PCON of claim 17 at the time of application is such that the junction temperature Tj of the amplification element of the power amplifier circuit is absolute. A power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that is allowed to exceed the maximum rated temperature Tjmax is generated, and the junction temperature Tj is set to the absolute maximum rated temperature T.
A power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to a power target value that is equal to or lower than jmax is generated, and when the output of the traveling wave power PF is started, the power suppression relaxation threshold signal Vth1 is set to power. Suppression threshold signal Vt
and the power suppression reference threshold signal Vth0 is set as the power suppression threshold signal Vth before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax.
The traveling wave power setting signal Vset corresponding to the set value of the traveling wave power value PF is set as the power control signal Vcont for controlling the output traveling wave power value PF to be the power target value.
And a power suppression signal V that changes according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth
It is a high frequency power supply device which is a power control means PCON which is obtained and output based on sub and traveling wave power detection signal Vpf.

The invention of claim 21 at the time of application is the same as the invention of claim 21 at the time of application as shown in FIG. 23 (eighth embodiment) and FIG. 24 or FIG. 25 (ninth embodiment) and FIG. The power control mitigation threshold value used by the power control means PCON described in 1 above for obtaining a signal value corresponding to a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. A power suppression reference threshold signal Vth0 used to generate a signal Vth1 and a current suppression relaxation threshold signal Vith1 and obtain a signal value corresponding to a power target value that makes the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax. The current suppression reference threshold value signal Vith0 is generated, and the traveling wave power P
When the output of F is started, the power suppression relaxation threshold signal Vth1
Is the power suppression threshold signal Vth, and before the junction temperature Tj of the amplifier element exceeds the absolute maximum rated temperature Tjmax, the power suppression reference threshold signal Vth0 is used as the power suppression threshold signal Vth and the traveling wave Electric power P
When the output of F is started, the current suppression relaxation threshold signal Vith
1 is set as the current suppression threshold value signal Vith, and the junction temperature Tj of the amplification element is the absolute maximum rated temperature Tjma.
Before exceeding x, the current suppression reference threshold signal Vith0
Is a current suppression threshold value signal Vith, and a traveling wave power setting corresponding to the set value of the traveling wave power value PF is set as a power control signal Vcont for controlling the traveling wave power value PF to be output to a power target value. The signal Vset, the reflected wave power detection signal value Vpr, and the power suppression threshold signal value Vth
The power suppression signal Vsub and the current detection signal value Vi and the current suppression threshold signal value Vith that change according to the difference between
The high-frequency power supply device is a power control unit PCON which is obtained and output by the current suppression signal Visub and the traveling wave power detection signal Vpf that change according to the difference between

The invention of claim 22 at the time of filing of the invention is as shown in FIG. 26 (tenth embodiment) and FIG. 24 or FIG. 27 (eleventh embodiment).
24 and FIG. 24, the power control means PCON according to claim 19 at the time of filing has a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. Current suppression relaxation threshold signal Vith1 used to obtain a corresponding signal value
And a current suppression reference threshold value signal Vi used to obtain a signal value corresponding to a power target value that causes the junction temperature Tj to be equal to or lower than the absolute maximum rated temperature Tjmax.
When th0 is generated and the output of the traveling wave power PF is started,
The current suppression threshold value signal Vith1 is set as the current suppression threshold value signal Vith, and the current suppression reference threshold value signal Vith0 is set as the current suppression threshold value before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. The power control signal Vcon for controlling the traveling wave power value PF to be the signal Vith so that the output traveling wave power value PF becomes the power target value.
t is a traveling wave power setting signal Vset corresponding to the set value of the traveling wave power value PF, and a current suppression signal Visub that changes according to the difference between the current detection signal value Vi and the current suppression threshold signal value Vith and the progress signal It is a high frequency power supply device which is a power control means PCON which is obtained and output by the wave power detection signal Vpf.

In the invention of claim 23 at the time of application, as shown in FIG. 7 or 8, the power control means PCON of claim 17 at the time of application is such that the junction temperature Tj of the amplification element of the power amplification circuit is absolute. A power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that is allowed to exceed the maximum rated temperature Tjmax is generated, and the junction temperature Tj is set to the absolute maximum rated temperature T.
By generating a power suppression reference threshold signal Vth0 used for obtaining a signal value corresponding to a power target value that is equal to or lower than jmax, the junction temperature Tj becomes the absolute maximum rated temperature Tjmax from the start of output of the traveling wave power PF. Until that time, the power suppression relaxation threshold signal Vth1 is set to the power suppression threshold signal Vth, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax,
The power suppression reference threshold signal Vth0 is used as the power suppression threshold signal Vth, and the power control signal Vcont for controlling the output traveling wave power value PF to be the power target value.
Is a traveling wave power setting signal Vset corresponding to the setting value of the traveling wave power value PF and the reflected wave power detection signal value Vpr.
And the power suppression threshold signal value Vth and the power suppression signal Vsub and the traveling wave power detection signal Vpf that change according to the difference between them.
It is a high frequency power supply device which is a power control means PCON which is obtained and output by

The invention of claim 24 at the time of filing of the invention is as set forth in claim 18 of the time of filing as shown in FIG. 23 (eighth embodiment) and FIG. 24 or FIG. 25 (ninth embodiment) and FIG. The power control mitigation threshold value used by the power control means PCON described in 1 above for obtaining a signal value corresponding to a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. A power suppression reference threshold signal Vth0 used to generate a signal Vth1 and a current suppression relaxation threshold signal Vith1 and obtain a signal value corresponding to a power target value that makes the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax. The current suppression reference threshold value signal Vith0 is generated, and the traveling wave power P
From the start of the output of F until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax, the power suppression mitigation threshold signal Vth1 is set as the power suppression threshold signal Vth, and the junction temperature Tj is set. Has reached the absolute maximum rated temperature Tjmax, the power suppression reference threshold signal Vth0 is set as the power suppression threshold signal Vth, and the junction of the amplification element of the power amplification circuit from the start of output of the traveling wave power PF. Until the temperature Tj reaches the absolute maximum rated temperature Tjmax, the current suppression relaxation threshold signal Vith1 is set as the current suppression threshold signal Vith, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the current suppression reference The threshold signal Vith0 is changed to the current suppression threshold signal Vit
and the power control signal Vcont for controlling the output traveling wave power value PF to be the power target value is set as the traveling wave power setting signal Vset and the reflected wave power corresponding to the setting value of the traveling wave power value PF. A power suppression signal Vsub that changes according to the difference between the detection signal value Vpr and the power suppression threshold signal value Vth, and a current that changes according to the difference between the current detection signal value Vi and the current suppression threshold signal value Vith. It is a high frequency power supply device which is a power control means PCON which is obtained and output by the suppression signal Visub and the traveling wave power detection signal Vpf.

The invention of claim 25 at the time of filing is as follows: FIG. 26 (tenth embodiment) and FIG. 24 or FIG. 27 (11th embodiment).
24 and FIG. 24, the power control means PCON according to claim 19 at the time of filing has a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. Current suppression relaxation threshold signal Vith1 used to obtain a corresponding signal value
And a current suppression reference threshold value signal Vi used to obtain a signal value corresponding to a power target value that causes the junction temperature Tj to be equal to or lower than the absolute maximum rated temperature Tjmax.
After generating th0, the junction temperature Tj of the amplifying element of the power amplifying circuit from the start of output of the traveling wave power PF.
Until the absolute maximum rated temperature Tjmax is reached, the current suppression relaxation threshold signal Vith1 is set as the current suppression threshold signal Vith, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the current suppression reference threshold is reached. The value signal Vith0 is used as the current suppression threshold value signal Vith, and the power control signal Vcont for controlling the traveling wave power value PF to be output to be the power target value is controlled by the traveling wave power value PF corresponding to the set value. Wave power setting signal Vs
et and the current suppression signal Vi that changes according to the difference between the current detection signal value Vi and the current suppression threshold signal value Vith.
It is a high frequency power supply device which is a power control means PCON which is obtained and output based on sub and traveling wave power detection signal Vpf.

The invention of claim 26 at the time of application is the same as claim 17 at the time of application as shown in the first and second embodiments.
The power control means PCON described in 1 above outputs the traveling wave power setting signal Vset corresponding to the setting value of the traveling wave power value PF to be output.
Output power setting circuit SET for outputting
Output start signal output circuit ST which outputs an output start signal Vst having a predetermined value different from that before the output of traveling wave power PF is started, and the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature. Equivalent to a power target value for generating a power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that is allowed to exceed Tjmax, and making the junction temperature Tj below the absolute maximum rated temperature Tjmax. Power suppression reference threshold signal Vth0 used to obtain a signal value
Is generated, the output start signal Vst is input, and when the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started.
The power suppression relaxation threshold signal Vth1 is set as the power suppression threshold signal Vth from the start of the output of the above until the predetermined relaxation time Etime has elapsed, and the relaxation time Etime has elapsed from the start of the output of the traveling wave power PF. After that, the power suppression reference threshold signal Vth0 is set to the power suppression threshold signal Vt.
h, a reflection protection circuit PRT that outputs a power suppression signal Vsub that changes according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth, the traveling wave power setting signal Vset, and the power. The output setting arithmetic circuit CAL that inputs the suppression signal Vsub and the traveling wave power detection signal Vpf and outputs the power control signal Vcont for controlling the traveling wave power value PF to be output to be the power target value.
It is a high frequency power supply device comprising

The invention of claim 27 at the time of filing of the invention is, as shown in the eighth and ninth embodiments, the invention of claim 18 at the time of filing.
The power control means PCON described in 1 above outputs the traveling wave power setting signal Vset corresponding to the setting value of the traveling wave power value PF to be output.
Output power setting circuit SET for outputting
Output start signal output circuit ST which outputs an output start signal Vst having a predetermined value different from that before the output of traveling wave power PF is started, and the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature. Equivalent to a power target value for generating a power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that is allowed to exceed Tjmax, and making the junction temperature Tj below the absolute maximum rated temperature Tjmax. Power suppression reference threshold signal Vth0 used to obtain a signal value
Is generated, the output start signal Vst is input, and when the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started.
Relaxation time Eti for reflection protection determined from the start of output of
Power suppression relaxation threshold signal Vth
1 is the power suppression threshold signal Vth, and the power suppression reference threshold signal Vth0 is the power suppression threshold signal Vth after the relaxation time Etime for reflection protection has elapsed from the start of output of the traveling wave power PF. The reflection protection circuit PRT that outputs the power suppression signal Vsub that changes according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth, and the junction temperature Tj of the amplification element of the power amplification circuit are absolute. A current suppression relaxation threshold value signal Vith1 used to obtain a signal value corresponding to a power target value that is allowed to exceed the maximum rated temperature Tjmax is generated,
The junction temperature Tj is the absolute maximum rated temperature Tjm.
A current suppression reference threshold value signal Vith0 used for obtaining a signal value corresponding to a power target value to be equal to or lower than ax is generated, and the output start signal Vst is input,
When the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and the current protection relaxation time Etime is determined from the start of the output of the traveling wave power PF.
Current suppression relaxation threshold signal Vith1 until
Is a current suppression threshold signal Vith, and a relaxation time Eitime for current protection from the start of the output of the traveling wave power PF.
After the lapse of time, the current suppression reference threshold value signal Vith0 is set as the current suppression threshold value signal Vith, and the current suppression signal Visub that changes according to the difference between the current detection signal value Vi and the current suppression threshold value signal Vith. The current protection circuit IPRT for outputting the traveling wave power setting signal Vset, the power suppression signal Vsub, the current suppression signal Visub, and the traveling wave power detection signal Vpf are input, and the traveling wave power value PF to be output is the power target value. A high-frequency power supply device including an output setting arithmetic circuit CAL that outputs a power control signal Vcont for controlling so that

The invention of claim 28 at the time of application is, as shown in the tenth embodiment and the eleventh embodiment, the traveling wave power value output by the power control means PCON of claim 19 at the time of application. Traveling wave power setting signal Vs corresponding to the set value of PF
an output power setting circuit SET for outputting et, an output start signal output circuit ST for outputting an output start signal Vst having a predetermined value different from that before starting output of the traveling wave power PF, when the output of the traveling wave power PF is started, The junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax.
Current suppression relaxation threshold value signal Vith used to obtain a signal value corresponding to a power target value that is allowed to exceed
1 and the current suppression reference threshold signal V used to obtain a signal value corresponding to the electric power target value that makes the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax.
ith0 is generated and the output start signal Vs is generated.
When t is input and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and the relaxation time Eiti determined from the start of the output of the traveling wave power PF.
Current suppression relaxation threshold signal Vit until me elapses
h1 is the current suppression threshold signal Vith, the current suppression reference threshold signal Vith0 is the current suppression threshold signal Vith after the relaxation time Etime has elapsed from the output start of the traveling wave power PF, and the current detection is performed. Signal value Vi
Current protection circuit I that outputs a current suppression signal Visub that changes according to the difference between the current suppression threshold signal value Vith
A power control signal for inputting the PRT, the traveling wave power setting signal Vset, the current suppression signal Visub, and the traveling wave power detection signal Vpf to control the traveling wave power value PF to be the target power value. The high frequency power supply device includes an output setting arithmetic circuit CAL that outputs Vcont.

In the invention of the modification 23, as shown in the first embodiment and the second embodiment, the reflection protection circuit PRT described in claim 26 at the time of filing has the junction temperature of the amplification element of the power amplification circuit. A power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that allows Tj to exceed the absolute maximum rated temperature Tjmax is generated, and the junction temperature Tj is set to the absolute maximum rated temperature Tjmax or less. Power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to the power target value
Is generated, the output start signal Vst is input, and when the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started.
When the output starts, the power suppression relaxation threshold signal Vth1 is set to the power suppression threshold signal Vth, and the power suppression reference threshold signal Vth0 is powered before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. As the suppression threshold signal Vth, the reflected wave power detection signal value Vp
Reflection protection circuit PR that outputs a power suppression signal Vsub that changes according to the difference between r and the power suppression threshold signal value Vth
The high frequency power supply device is T.

In the invention of the modification 24, as shown in the eighth embodiment and the ninth embodiment, the reflection protection circuit PRT according to claim 27 at the time of filing has the junction temperature of the amplification element of the power amplification circuit. A power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that allows Tj to exceed the absolute maximum rated temperature Tjmax is generated, and the junction temperature Tj is set to the absolute maximum rated temperature Tjmax or less. Power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to the power target value
Is generated, the output start signal Vst is input, and when the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started.
When the output starts, the power suppression relaxation threshold signal Vth1 is set to the power suppression threshold signal Vth, and the power suppression reference threshold signal Vth0 is powered before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. As the suppression threshold signal Vth, the reflected wave power detection signal value Vp
Reflection protection circuit PR that outputs a power suppression signal Vsub that changes according to the difference between r and the power suppression threshold signal value Vth
T is the current protection circuit IPRT, and the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature T.
Corresponding to a power target value for generating a current suppression relaxation threshold value signal Vith1 used to obtain a signal value corresponding to a power target value that is allowed to exceed jmax, and making the junction temperature Tj below the absolute maximum rated temperature Tjmax. The current suppression reference threshold value signal Vith0 used for obtaining the signal value to be generated is input, the output start signal Vst is input, and the traveling wave power PF is output when the output start signal Vst reaches a predetermined value. When the output of the traveling wave power PF is started, the current suppression threshold voltage signal Vith1 is set as the current suppression threshold signal Vith.
Before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax, the current suppression reference threshold value signal Vith0 is set as the current suppression threshold value signal Vith, and the current detection signal value Vi and the current suppression threshold value signal value Vith.
And a current protection circuit IPRT that outputs a current suppression signal Visub that changes according to the difference between

In the invention of the modification 25, as shown in the 10th and 11th embodiments, the current protection circuit IPRT according to claim 28 at the time of filing has the junction temperature of the amplification element of the power amplification circuit. Tj is the absolute maximum rated temperature Tjma
A current suppression relaxation threshold signal Vit used to obtain a signal value corresponding to a power target value that is allowed to exceed x
h1 is generated to generate a current suppression reference threshold value signal Vith0 used for obtaining a signal value corresponding to a power target value that makes the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax, and the output start signal V is generated.
When st is input and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and when the output of the traveling wave power PF is started, the current suppression relaxation threshold signal V
Let ith1 be the current suppression threshold value signal Vith, and let the junction temperature Tj of the amplification element be the absolute maximum rated temperature T.
Before exceeding jmax, the current suppression reference threshold signal Vit
A high-frequency power supply device that is a current protection circuit IPRT that outputs current control signal Visub that changes according to the difference between the current detection signal value Vi and the current control threshold signal value Vith, where h0 is the current control threshold signal Vith. Is.

In the invention of the modification 26, as shown in the first embodiment and the second embodiment, the reflection protection circuit PRT according to claim 26 at the time of filing has the junction temperature of the amplification element of the power amplification circuit. A power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that allows Tj to exceed the absolute maximum rated temperature Tjmax is generated, and the junction temperature Tj is set to the absolute maximum rated temperature Tjmax or less. Power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to the power target value
Is generated, the output start signal Vst is input, and the output of the traveling wave power PF is started when the output start signal Vst reaches a predetermined value. When the junction temperature Tj of the amplifying element of the circuit reaches the absolute maximum rated temperature Tjmax, the power suppression relaxation threshold signal Vth1 is set as the power suppression threshold signal Vth, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax. Is the power suppression reference threshold signal Vth0, and the power suppression signal V changes according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth.
The high frequency power supply device is a reflection protection circuit PRT that outputs a sub.

In the invention of the modification 27, as shown in the eighth embodiment and the ninth embodiment, the reflection protection circuit PRT described in claim 27 at the time of filing has the junction temperature of the amplification element of the power amplification circuit. A power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that allows Tj to exceed the absolute maximum rated temperature Tjmax is generated, and the junction temperature Tj is set to the absolute maximum rated temperature Tjmax or less. Power suppression reference threshold signal Vth0 used to obtain a signal value corresponding to the power target value
Is generated, the output start signal Vst is input, and the output of the traveling wave power PF is started when the output start signal Vst reaches a predetermined value. When the junction temperature Tj of the amplifying element of the circuit reaches the absolute maximum rated temperature Tjmax, the power suppression relaxation threshold signal Vth1 is set as the power suppression threshold signal Vth, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax. Is the power suppression reference threshold signal Vth0, and the power suppression signal V changes according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth.
It is a reflection protection circuit PRT that outputs sub, and the current protection circuit IPRT obtains a signal value corresponding to a power target value that allows the junction temperature Tj of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature Tjmax. The current suppression relaxation threshold signal Vith1 used for the above is generated, and the junction temperature Tj is set to the absolute maximum rated temperature T.
A current suppression reference threshold value signal Vith0 used for obtaining a signal value corresponding to a power target value to be equal to or lower than jmax is generated, and the output start signal Vst is input to set the output start signal Vst to a predetermined value. When the output of the traveling wave power PF is started, the current suppression relaxation threshold signal is output from when the output of the traveling wave power PF is started until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. Vith1 is the current suppression threshold signal Vith, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the current suppression reference threshold signal Vith0 is the current suppression threshold signal Vi.
where th is a current suppression signal V that changes according to the difference between the current detection signal value Vi and the current suppression threshold value signal Vith.
It is a high frequency power supply device that is a current protection circuit IPRT that outputs isub.

As shown in the tenth embodiment and the eleventh embodiment, the invention of the modification 28 is such that the current protection circuit IPRT according to claim 28 at the time of filing has the junction temperature of the amplification element of the power amplification circuit. Tj is the absolute maximum rated temperature Tjma
A current suppression relaxation threshold signal Vit used to obtain a signal value corresponding to a power target value that is allowed to exceed x
h1 is generated to generate a current suppression reference threshold value signal Vith0 used for obtaining a signal value corresponding to a power target value that makes the junction temperature Tj equal to or lower than the absolute maximum rated temperature Tjmax, and the output start signal V is generated.
When st is input and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and the junction temperature Tj of the amplification element of the power amplification circuit is changed from the start of the output of the traveling wave power PF. Absolute maximum rated temperature Tjmax
Until the current suppression threshold value signal Vith1 is set to the current suppression threshold value signal Vith, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the current suppression reference threshold signal signal Vith0 is current suppression threshold value. A current protection circuit IPRT that outputs a current suppression signal Visub that changes according to the difference between the current detection signal value Vi and the current suppression threshold value signal Vith as the value signal Vith.
Is a high frequency power supply device.

As shown in FIG. 12 (first embodiment of FIG. 11) or FIG. 14 (second embodiment of FIG. 13), the invention of modification 29 is such that the power suppression relaxation threshold value described above is used. Signal value V
th1 changes the power suppression reference threshold signal Vth0 from the start of output of the traveling wave power PF to the power suppression threshold signal Vth.
Until then, the high frequency power supply device is constant.

In the invention of the modification 30, the current suppression relaxation threshold signal value Vith1 described above is changed from the current suppression reference threshold signal Vith0 to the current suppression threshold signal Vith from the output start of the traveling wave power PF. Until then, the high frequency power supply device is constant.

In the invention of the modification 31, the power suppression relaxation threshold signal value Vth1 described above has the power suppression reference threshold signal Vth0 changed to the power suppression threshold signal Vth from the start of output of the traveling wave power PF. Until then, it is a high-frequency power supply device that is not constant.

In the invention of the modification 32, the current suppression relaxation threshold signal value Vith1 described above is changed from the current suppression reference threshold signal Vith0 to the current suppression threshold signal Vith from the output start of the traveling wave power PF. Until then, it is a high-frequency power supply device that is not constant.

In the invention of the modification 33, as shown in FIG. 16 (third embodiment of FIG. 15), the above-mentioned power suppression relaxation threshold signal value Vth1 is at the start of output of the traveling wave power PF. From the power suppression reference threshold signal Vth0 to the power suppression threshold signal Vth, the high-frequency power supply device continuously decreases.

According to the thirty-fourth aspect of the invention, the current suppression relaxation threshold signal value Vith1 described above is changed from the current suppression reference threshold signal Vith0 to the current suppression threshold signal Vith from the start of output of the traveling wave power PF. Until then, it is a high-frequency power supply device that continuously decreases.

In the invention of the modification 35, as shown in FIG. 18 (the fourth embodiment of FIG. 17), the above-mentioned power suppression relaxation threshold signal value Vth1 is at the start of output of the traveling wave power PF. From the power suppression reference threshold signal Vth0 to the power suppression threshold signal Vth.

In the invention of the modification 36, the current suppression relaxation threshold signal value Vith1 described above is changed to the current suppression reference threshold signal Vith0 from the start of the output of the traveling wave power PF. Until then, the high-frequency power supply device gradually decreases.

The invention of the modification 37 is, as shown in FIG. 12 (first embodiment of FIG. 11) or FIG. 14 (second embodiment of FIG. 13), the power suppression relaxation threshold value described above. Signal value V
th1 is the relaxation time E from the start of output of the traveling wave power PF.
The high-frequency power supply device is constant until time elapses.

In the invention of the modification 38, the above-mentioned current suppression relaxation threshold signal value Vith1 is constant from the start of output of the traveling wave power PF until the relaxation time Etime elapses. It is a device.

In the invention of the modification 39, the power suppression relaxation threshold signal value Vth1 described above is not constant from the start of output of the traveling wave power PF until the relaxation time Etime elapses. Is.

In the invention of the modification 40, the current suppression relaxation threshold signal value Vith1 described above is not constant from the start of output of the traveling wave power PF until the relaxation time Etime elapses. Is.

In the invention of the modification 41, as shown in FIG. 16 (third embodiment of FIG. 15), the above-described power suppression relaxation threshold signal value Vth1 is at the start of output of the traveling wave power PF. It is a high frequency power supply device that continuously decreases from the time until the relaxation time Etime elapses.

In the invention of the modification 42, the current suppression relaxation threshold signal value Vith1 described above continuously decreases from the start of output of the traveling wave power PF to the elapse of the relaxation time Eitime. It is a high frequency power supply.

In the invention of the modification 43, as shown in FIG. 18 (the fourth embodiment of FIG. 17), when the power suppression relaxation threshold signal value Vth1 described above is output at the start of output of the traveling wave power PF. It is a high frequency power supply device that gradually decreases from the time until the relaxation time Etime elapses.

In the invention of the modification 44, the current suppression relaxation threshold signal value Vith1 described above gradually decreases from the start of output of the traveling wave power PF until the relaxation time Eitime elapses. It is a high frequency power supply.

As shown in FIG. 12 (first embodiment of FIG. 11) or FIG. 14 (second embodiment of FIG. 13), the invention of the modification 45 is the power suppression relaxation threshold value described above. Signal value V
The th1 is a high-frequency power supply device that is constant from the start of output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax.

In the invention of the modification 46, the current suppression relaxation threshold signal value Vith1 described above is such that the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax from the start of the output of the traveling wave power PF. It is a high frequency power supply device that is constant until it reaches.

In the invention of the modified example 47, the above-mentioned power suppression relaxation threshold signal value Vth1 is such that the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax from the start of the output of the traveling wave power PF. It is a high-frequency power supply device that is not constant until it reaches.

In the invention of the modified example 48, the current suppression relaxation threshold signal value Vith1 described above is such that the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax from the start of the output of the traveling wave power PF. It is a high-frequency power supply device that is not constant until it reaches.

In the invention of the modification 49, as shown in FIG. 16 (third embodiment of FIG. 15), the above-described power suppression relaxation threshold signal value Vth1 is at the start of output of the traveling wave power PF. To the junction temperature T of the amplification element of the power amplification circuit
Until j reaches the absolute maximum rated temperature Tjmax,
It is a high frequency power supply device that continuously decreases.

In the invention of the modified example 50, the current suppression relaxation threshold signal value Vith1 described above is such that the junction temperature Tj of the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax from the start of the output of the traveling wave power PF. It is a high-frequency power supply device that continuously decreases until reaching.

In the invention of the modification 51, as shown in FIG. 18 (the fourth embodiment of FIG. 17), the above-mentioned power suppression relaxation threshold signal value Vth1 is at the start of output of the traveling wave power PF. To the junction temperature T of the amplification element of the power amplification circuit
Until j reaches the absolute maximum rated temperature Tjmax,
It is a high frequency power supply device that gradually decreases.

In the invention of the modified example 52, the current suppression relaxation threshold signal value Vith1 described above has the absolute maximum rated temperature Tjmax of the junction temperature Tj of the amplification element of the power amplification circuit from the start of output of the traveling wave power PF. It is a high frequency power supply device that gradually decreases until reaching.

The invention of the modified example 53 is the relaxation time Etime for reflection protection and the relaxation time Eiti for current protection described above.
It is a high frequency power supply device in which me is the same time.

The invention of the modification 54 is the relaxation time Etime for reflection protection and the relaxation time Eiti for current protection described above.
It is a high frequency power supply device in which time is different from me.

In the invention of the modification 55, as shown in the first embodiment and the second embodiment, the reflection protection circuit PRT according to claim 26 at the time of filing or claim 27 at the time of filing the power amplification A power suppression reference threshold signal V used to obtain a signal value corresponding to a power target value that makes the junction temperature Tj of the amplification element of the circuit equal to or lower than the absolute maximum rated temperature Tjmax.
Power suppression reference threshold value setting circuit TH0 that outputs th0
And the junction temperature Tj of the amplification element of the power amplification circuit
And a power suppression mitigation threshold setting circuit TH1 that outputs a power suppression mitigation threshold signal Vth1 used to obtain a signal value corresponding to a power target value that is allowed to exceed the absolute maximum rated temperature Tjmax; The reference threshold signal Vth0 and the power suppression relaxation threshold signal Vth1 are input, the output start signal Vst is input, and when the output start signal Vst reaches a predetermined value, the traveling wave power PF is output. At the start, the power suppression relaxation threshold signal Vth1 is output as the power suppression threshold signal Vth from the start of the output of the traveling wave power PF until a predetermined relaxation time Etime elapses, and the traveling wave power PF is output.
After the relaxation time Etime has elapsed from the start of the output of the power suppression threshold switching circuit CH that outputs the power suppression reference threshold signal Vth0 as the power suppression threshold signal Vth, the reflected wave power detection signal Vpr, A power suppression signal output circuit ADD1 that inputs the power suppression threshold signal Vth and outputs a power suppression signal Vsub that changes according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth. It is a high frequency power supply device comprising

In the invention of the modified example 56, as shown in the first and second embodiments, the power suppression threshold switching circuit CH described in the modified example 55 has the output start signal Vst.
When the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and the relaxation time Eti determined from the start of the output of the traveling wave power PF.
A power timer circuit TM for outputting a power suppression threshold value switching signal Vch having a predetermined value different from the time when the output of the traveling wave power PF is started until the relaxation time Etime elapses when me has elapsed, and the power suppression Reference threshold signal V
th0 and the power suppression relaxation threshold signal Vth1 are input, and the power suppression threshold switching signal Vch is input.
By inputting this power suppression threshold switching signal Vch
Is a predetermined value, the power suppression mitigation threshold signal Vth1 is output as the power suppression threshold signal Vth, and if the power suppression threshold switching signal Vch is not the predetermined value, the power suppression reference threshold signal Vth0 is powered. Suppression threshold signal Vt
A high-frequency power supply device including a power switch circuit SW that outputs as h.

In the invention of the modified example 57, as shown in the third embodiment, the reflection protection circuit PRT according to claim 26 at the time of filing or claim 27 at the time of filing is the junction of the amplification element of the power amplification circuit. Absolute maximum rated temperature Tjma
The power suppression reference threshold value setting circuit TH0 that outputs the power suppression reference threshold value signal Vth0 used to obtain the signal value corresponding to the power target value to be set to x or less and the junction temperature Tj of the amplification element of the power amplification circuit are It is used to obtain a power target value that allows the absolute maximum rated temperature Tjmax to be exceeded, and when the output start signal Vst reaches a predetermined value, the traveling wave power PF is output. A power suppression mitigation threshold setting circuit that outputs a power suppression mitigation threshold signal Vth1 that is a signal larger than the power suppression reference threshold signal Vth0 at the start of output of the PF and whose signal value decreases over time. TH1 and the power suppression relaxation threshold signal Vt from the start of the output of the traveling wave power PF until the defined relaxation time Etime elapses. 1 is output as the power suppression threshold signal Vth, and the power suppression reference threshold signal Vth0 is output as the power suppression threshold signal Vth after the relaxation time Etime has elapsed from the start of output of the traveling wave power PF. A power suppression threshold switching circuit CH is input to the reflected wave power detection signal Vpr and the power suppression threshold signal Vth, and the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth. And a power suppression signal output circuit ADD1 that outputs a power suppression signal Vsub that changes according to the above.

In the invention of the modified example 58, as shown in the fourth embodiment, the reflection protection circuit PRT according to claim 26 at the time of filing or claim 27 at the time of filing is a junction of the amplification element of the power amplification circuit. Absolute maximum rated temperature Tjma
The power suppression reference threshold value setting circuit TH0 that outputs the power suppression reference threshold value signal Vth0 used to obtain the signal value corresponding to the power target value that is less than or equal to x and the junction temperature Tj of the amplification element of the power amplification circuit are absolute. A plurality of power suppression mitigation threshold setting circuits that are used to obtain a power target value that is allowed to exceed the maximum rated temperature Tjmax and that output power suppression mitigation threshold signals Vth1 having different thresholds. TH1 has the same number as the plurality of power suppression mitigation threshold setting circuits TH1, and the signal values of the power suppression mitigation threshold signals Vth1 output from the plurality of power suppression mitigation threshold setting circuits TH1 are in descending order. When they are arranged in such a manner that they correspond to the power suppression relaxation threshold value signals Vth1 arranged in descending order in a one-to-one correspondence, Relaxation time E is defined in each
The time becomes ascending order, and when the output start signal Vst is input to each and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started.
When the relaxation time Etime has elapsed from the start of output of the traveling wave power PF, the traveling wave power PF
Relaxation time Etime from the output start of each
A plurality of power timer circuits TM each outputting a power suppression threshold value switching signal Vch having a predetermined value different from that before the time elapses, and one power timer circuit TM having the same number as the plurality of power timer circuits TM. The power suppression reference threshold signal Vth0 has a plurality of switches corresponding to each other.
And a plurality of power suppression threshold voltage signals Vth1 and a power suppression threshold switching signal Vch respectively output from the plurality of power timer circuits TM, and a power suppression threshold switching signal. When Vch is a predetermined value, the corresponding switch is switched so that power suppression mitigation threshold signal Vth1 is in the cutoff state, and power suppression reference threshold signal Vth0 and power suppression mitigation threshold signal Vth1 not in the cutoff state are set. A power switch circuit SW that outputs a signal having the largest threshold value as a power suppression threshold signal Vth, and the reflected wave power detection signal V
A power suppression signal output that inputs pr and the power suppression threshold signal Vth and outputs a power suppression signal Vsub that changes according to the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth. It is a high frequency power supply device including a circuit ADD1.

The invention of a modification 59 is such that the power suppression signal output circuit ADD1 described in the modification 58 is configured so that when the reflected wave power detection signal value Vpr is larger than the power suppression threshold signal value Vth. When the reflected wave power detection signal value Vpr is less than or equal to the power suppression threshold signal value Vth, the power suppression signal Vsub that changes according to the difference between the detection signal value Vpr and the power suppression threshold signal value Vth is output. It is a high frequency power supply device that is a circuit that outputs a 0-level power suppression signal Vsub.

The invention of the modification 60 is, as shown in the first embodiment, the second embodiment, the eighth embodiment and the ninth embodiment, claim 27 at the time of application or claim 27 at the time of application. The current protection circuit IPRT described in 28 sets the junction temperature Tj of the amplification element of the power amplification circuit to the absolute maximum rated temperature Tjma.
The current suppression reference threshold value setting circuit ITH0 that outputs the current suppression reference threshold value signal Vith0 used to obtain the signal value corresponding to the power target value to be set to x or less and the junction temperature Tj of the amplification element of the power amplification circuit are A current suppression relaxation threshold setting circuit ITH1 that outputs a current suppression relaxation threshold signal Vith1 used to obtain a signal value corresponding to a power target value that is allowed to exceed the absolute maximum rated temperature Tjmax, and the current suppression reference Threshold signal Vi
Th0 and the current suppression relaxation threshold value signal Vith1 are input, and the output start signal Vst is input, and the time when the output start signal Vst reaches a predetermined value is set as the output start time of the traveling wave power PF. The current suppression relaxation threshold value signal Vith1 is output as the current suppression threshold value signal Vith from the start of output of the traveling wave power PF until a predetermined relaxation time Etime elapses.
Current relaxation threshold switching circuit ICH that outputs current suppression reference threshold signal Vith0 as current suppression threshold signal Vith after the relaxation time Etime has elapsed from the start of the output of the current detection signal Vi and current suppression signal Vith. The threshold signal Vith is input to input the current detection signal value V
The high frequency power supply device includes a current suppression signal output circuit IADD1 that outputs a current suppression signal Visub that changes according to the difference between i and the current suppression threshold signal value Vith.

The invention of the modification 61 is, as shown in the first embodiment, the second embodiment, the eighth embodiment and the ninth embodiment, the current suppression threshold value switching circuit described in the modification 60. The ICH inputs the output start signal Vst, and when the output start signal Vst reaches a predetermined value is set as the output start time of the traveling wave power PF, and is determined from the output start time of the traveling wave power PF. When the relaxation time Etime elapses, the relaxation time Eit from the start of output of the traveling wave power PF
Input a current timer circuit ITM that outputs a current suppression threshold value switching signal Vich having a predetermined value different from the time until the time "ime" elapses, and the current suppression reference threshold signal Vith0 and the current suppression relaxation threshold signal Vith1. In addition, the current suppression threshold value switching signal Vich is input, and when the current suppression threshold value switching signal Vich has a predetermined value, the current suppression threshold value signal Vith1 is output as the current suppression threshold value signal Vith. If the current suppression threshold value switching signal Vich is not a predetermined value, the current suppression reference threshold value signal Vith0 is output as the current suppression threshold value signal Vith.

The invention of the modification 62 is, as shown in the third embodiment, the eighth embodiment and the ninth embodiment, the current protection according to claim 27 at the time of filing or claim 28 at the time of filing. A current suppression reference that outputs a current suppression reference threshold value signal Vith0 used by the circuit IPRT to obtain a signal value corresponding to a power target value that makes the junction temperature Tj of the amplification element of the power amplification circuit equal to or lower than the absolute maximum rated temperature Tjmax. The junction temperature Tj of the threshold value setting circuit ITH0 and the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax.
Is used to obtain a power target value that is allowed to exceed, and when the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and the output of the traveling wave power PF is started. Is a signal that is larger than the current suppression reference threshold signal Vith0, and the signal value decreases with the passage of time.
Current suppression relaxation threshold setting circuit ITH1 that outputs h1
Then, the current suppression relaxation threshold value signal Vith1 is output as the current suppression threshold value signal Vith from the start of the output of the traveling wave power PF until the relaxation time Etime is set, and the output of the traveling wave power PF is output. After the relaxation time Etime elapses from the start, the current suppression threshold switching circuit ICH that outputs the current suppression reference threshold signal Vith0 as the current suppression threshold signal Vith, the current detection signal Vi and the current suppression threshold. The value suppression signal Vith is input and changes according to the difference between the current detection value Vi and the current suppression threshold value signal Vith.
It is a high frequency power supply device including a current suppression signal output circuit IADD1 that outputs ub.

The invention of the modification 63 is, as shown in the fourth embodiment, the eighth embodiment and the ninth embodiment, the current protection according to claim 27 at the time of filing or claim 28 at the time of filing. A current suppression reference that outputs a current suppression reference threshold value signal Vith0 that the circuit IPRT uses to obtain a signal value corresponding to a power target value that makes the junction temperature Tj of the amplification element of the power amplification circuit equal to or lower than the absolute maximum rated temperature Tjmax. The junction temperature Tj of the threshold value setting circuit ITH0 and the amplification element of the power amplification circuit is the absolute maximum rated temperature Tjmax.
A plurality of current suppression relaxation threshold setting circuits ITH1 which are used to obtain a power target value that is allowed to exceed, and each of which outputs a current suppression relaxation threshold signal Vith1 having a different threshold; The current suppression relaxation threshold value setting circuit ITH1 has the same number as that of the current suppression relaxation threshold value setting circuits ITH1, and the current suppression relaxation threshold value signals Vith1 output from the plurality of current suppression relaxation threshold value setting circuits ITH1 are arranged in descending order. When they are arranged, they have a one-to-one correspondence with the current suppression relaxation threshold signals Vith1 arranged in descending order, and in that order, the relaxation time Etime set for each is in ascending order, and further, each of them outputs the above-mentioned output. Input start signal Vst and output start signal Vst
When the output of the traveling wave power PF is started, and when the relaxation time Etime elapses at each output of the traveling wave power PF, the output of the traveling wave power PF is started at each time. Relaxation time Ei
A plurality of current timer circuits ITM each outputting a current suppression threshold value switching signal Vich having a predetermined value different from the time before the time elapses, and the current timer circuits ITM in the same number as the plurality of current timer circuits ITM. It has a plurality of switches corresponding to each other, receives the current suppression reference threshold signal Vith0 and a plurality of current suppression relaxation threshold signals Vith1, and outputs them from the plurality of current timer circuits ITM. When the current suppression threshold value switching signal Vich has a predetermined value, the corresponding switch is switched so that the current suppression threshold value switching signal Vith1 is in the cutoff state. , Current suppression reference threshold signal Vi
th0 and a current switch circuit ISW that outputs a signal having the largest threshold value among the current suppression relaxation threshold signal Vith1 that is not in the cutoff state as the current suppression threshold signal Vith, and the current detection signal Vi and the current suppression signal Vis. A high frequency power supply device including a current suppression signal output circuit IADD1 which inputs a threshold value signal Vith and outputs a current suppression signal Visub which changes according to a difference between the current detection value Vi and the current suppression threshold value signal Vith. Is.

The invention of modification 64 is, as shown in the eighth embodiment, a current suppression signal output circuit IA described in modification 63.
When the current detection value Vi is larger than the current suppression threshold signal value Vith, the DD1 outputs the current suppression signal Visub that changes according to the difference between the current detection signal value Vi and the current suppression threshold signal value Vith. It is a high frequency power supply device which is a circuit which outputs and outputs a 0-level current suppression signal Visub when the current detection signal value Vi is equal to or less than the current suppression threshold signal value Vith.

In the invention of the modified example 65, the power suppression threshold switching circuit CH described in the modified example 55 has a power suppression reference threshold signal Vth0 and a power suppression relaxation threshold signal V.
and the output start signal Vst
When the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started. When the output of the traveling wave power PF is started, the power suppression mitigation threshold signal Vth is input.
1 is output as the power suppression threshold signal Vth, and the junction temperature Tj of the amplification element is the absolute maximum rated temperature T.
The power suppression reference threshold signal Vth before exceeding jmax
The high frequency power supply device is a power suppression threshold switching circuit CH that outputs 0 as a power suppression threshold signal Vth.

The invention of modification 66 is such that when the power suppression threshold value switching circuit CH described in modification 65 receives the output start signal Vst and the output start signal Vst reaches a predetermined value. At the start of output of traveling wave power PF,
A power timer circuit TM that outputs a power suppression threshold switching signal Vch of a predetermined value different from the time when the output of the traveling wave power PF is started before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. The power suppression reference threshold signal Vth0 and the power suppression relaxation threshold signal Vth1 are input, and the power suppression threshold switching signal Vch is input, and the power suppression threshold switching signal Vch is a predetermined value. In this case, the power suppression threshold voltage Vth1 is output as the power suppression threshold signal Vth, and if the power suppression threshold switching signal Vch is not the predetermined value, the power suppression reference threshold signal Vth0 is power suppressed. The high frequency power supply device includes a power switch circuit SW that outputs a value signal Vth.

In the invention of the modified example 67, the power suppression threshold switching circuit CH described in the modified example 57 causes the power suppression relaxation threshold signal Vth1 when the output of the traveling wave power PF is started.
Is output as a power suppression threshold signal Vth, and the junction temperature Tj of the amplification element is the absolute maximum rated temperature Tj.
The power suppression reference threshold signal Vth0 before exceeding max.
Is a power-suppression-threshold switching circuit CH that outputs a power-suppression-threshold threshold signal Vth.

In the invention of the modified example 68, the plurality of power timer circuits TM described in the modified example 58 are the same in number as the plurality of power suppression mitigation threshold value setting circuits TH1, and the plurality of power suppression mitigations are the same. When the power suppression mitigation threshold signals Vth1 output from the threshold value setting circuit TH1 are arranged so that the signal values are in descending order, the power suppression mitigation threshold signals Vth1 are arranged in descending order, and the power suppression mitigation threshold signals Vth1 are in a one-to-one correspondence. The corresponding relaxation time Eti is defined in the order.
The me is in ascending order, and when the output start signal Vst is input to each and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and the junction temperature Tj of the amplification element is set. Before the temperature exceeds the absolute maximum rated temperature Tjmax, a power suppression threshold value switching signal V having a predetermined value different from that at the time of starting the output of the traveling wave power PF.
It is a high frequency power supply device which is a plurality of power timer circuits TM which respectively output ch.

In the invention of the modified example 69, the current suppression threshold value switching circuit ICH described in the modified example 60 inputs the current suppression reference threshold value signal Vith0 and the current suppression relaxation threshold value signal Vith1, and When the output start signal Vst is input and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and when the output of the traveling wave power PF is started, the current suppression relaxation threshold signal is output. A current that outputs Vith1 as the current suppression threshold signal Vith and outputs the current suppression reference threshold signal Vith0 as the current suppression threshold signal Vith before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. It is a high frequency power supply device which is a suppression threshold switching circuit ICH.

The invention of the modification 70 is such that when the current suppression threshold value switching circuit ICH described in the modification 61 receives the output start signal Vst and the output start signal Vst reaches a predetermined value. When the output of the traveling wave power PF is started, and before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax, a current suppression threshold value switching signal Vich having a predetermined value different from that when the output of the traveling wave power PF is started. A current timer circuit ITM for outputting
The current suppression reference threshold signal Vith0 and the current suppression relaxation threshold signal Vith1 are input, and the current suppression threshold switching signal Vich is input so that the current suppression threshold switching signal Vich is a predetermined value. In this case, the current suppression threshold voltage signal Vith1 is output as the current suppression threshold signal Vith, and if the current suppression threshold switching signal Vich is not a predetermined value, the current suppression reference threshold signal Vith0 is current suppression threshold. Value signal Vith
And a current switch circuit ISW for outputting as a high frequency power supply device.

In the invention of the modified example 71, the current suppression threshold switching circuit ICH described in the modified example 62 causes the current suppression threshold voltage Vit to start when the output of the traveling wave power PF is started.
h1 is output as the current suppression threshold value signal Vith, and the current suppression reference threshold value signal V is output before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax.
The high frequency power supply device is a current suppression threshold value switching circuit ICH which outputs ith0 as a current suppression threshold value signal Vith.

In the invention of the modification 72, the plurality of current timer circuits ITM described in the modification 63 are the same in number as the plurality of current suppression relaxation threshold setting circuits ITH1 and the plurality of current suppression relaxations are performed. When the current suppression relaxation threshold value signals Vith1 output from the threshold value setting circuit ITH1 are arranged in descending order, the current suppression relaxation threshold signals Vith1 and the current suppression relaxation threshold signals Vith1 are arranged in descending order. Correspondingly, in that order, the relaxation time Etime set for each becomes the ascending order, and further, each inputs the output start signal Vst and outputs the output start signal Vst.
The output of the traveling wave power PF starts when st reaches a predetermined value, and the traveling wave power P before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax.
The high-frequency power supply device is a plurality of current timer circuits ITM, each of which outputs a current suppression threshold value switching signal Vich having a predetermined value different from that at the time when the output of F is started.

In the invention of the modified example 73, the power suppression threshold switching circuit CH described in the modified example 55 includes the power suppression reference threshold signal Vth0 and the power suppression relaxation threshold signal V.
and the output start signal Vst
When the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started.
From the start of the output of F until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax, the power suppression relaxation threshold signal Vth1 is output as the power suppression threshold signal Vth, and the junction temperature is increased. The high frequency power supply device is the power suppression threshold switching circuit CH that outputs the power suppression reference threshold signal Vth0 as the power suppression threshold signal Vth when Tj reaches the absolute maximum rated temperature Tjmax.

The invention of the modification 74 is such that when the power suppression threshold value switching circuit CH described in the modification 73 inputs the output start signal Vst and the output start signal Vst reaches a predetermined value. At the start of output of traveling wave power PF,
The junction temperature Tj is the absolute maximum rated temperature Tjm.
When ax is reached, a power suppression threshold value switching signal Vch having a predetermined value different from the time when the output of the traveling wave power PF is started until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. The power timer circuit TM for output, the power suppression reference threshold signal Vth0 and the power suppression relaxation threshold signal Vth1 are input, and the power suppression threshold switching signal V is input.
ch to input this power suppression threshold switching signal V
When ch is a predetermined value, the power suppression relaxation threshold signal Vth
1 is output as the power suppression threshold signal Vth, and the power suppression threshold switching signal Vch is not a predetermined value, the power suppression reference threshold signal Vth0 is output as the power suppression threshold signal Vth. It is a high frequency power supply device composed of SW.

In the invention of the modified example 75, the power suppression threshold switching circuit CH described in the modified example 57 has the traveling wave power PF.
From the start of the output until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax, the power suppression relaxation threshold signal Vth1 is output as the power suppression threshold signal Vth, and the junction temperature Tj is output. Is a power suppression threshold switching circuit CH that outputs the power suppression reference threshold signal Vth0 as the power suppression threshold signal Vth when the absolute maximum rated temperature Tjmax is reached.

In the invention of the modified example 76, the plurality of power timer circuits TM described in the modified example 58 are the same in number as the plurality of power suppression mitigation threshold value setting circuits TH1, and the plurality of power suppression mitigation modes are the same. When the power suppression mitigation threshold signals Vth1 output from the threshold value setting circuit TH1 are arranged so that the signal values are in descending order, the power suppression mitigation threshold signals Vth1 are arranged in descending order, and the power suppression mitigation threshold signals Vth1 are in a one-to-one correspondence. The corresponding relaxation time Eti is defined in the order.
When the me is in an ascending order and the output start signal Vst is input to each of them and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started, and the junction temperature Tj is the absolute maximum. Rated temperature Tjmax
When the output power reaches the absolute maximum rated temperature Tjmax from the start of the output of the traveling wave power PF until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax. It is a high-frequency power supply device that is a plurality of power timer circuits TM for output.

In the invention of the modified example 77, the current suppression threshold value switching circuit ICH described in the modified example 60 inputs the current suppression reference threshold value signal Vith0 and the current suppression relaxation threshold value signal Vith1, and When the output start signal Vst is input and the output start signal Vst reaches a predetermined value, the output of the traveling wave power PF is started. Junction temperature Tj is the absolute maximum rated temperature Tjma
The current suppression relaxation threshold signal Vith1 until x is reached.
Is output as the current suppression threshold value signal Vith, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the current suppression threshold value Vith0 is output as the current suppression threshold value signal Vith. It is a high frequency power supply device which is a value switching circuit ICH.

In the invention of the modified example 78, when the current suppression threshold value switching circuit ICH described in the modified example 61 inputs the output start signal Vst and the output start signal Vst reaches a predetermined value, When the output of the traveling wave power PF is started, the junction temperature Tj is the absolute maximum rated temperature T.
When jmax is reached, the junction temperature T of the amplification element of the power amplification circuit has elapsed from the start of output of the traveling wave power PF.
A current timer circuit ITM that outputs a current suppression threshold value switching signal Vich having a predetermined value different from when j reaches the absolute maximum rated temperature Tjmax, and the current suppression reference threshold value signal Vith0 and the current suppression relaxation threshold value. Signal Vi
th1 and the current suppression threshold switching signal Vich are input, and when the current suppression threshold switching signal Vich is a predetermined value, the current suppression relaxation threshold signal Vith1 is input as the current suppression threshold. Signal Vith
As the current suppression threshold switching signal Vich
Is not a predetermined value, the current suppression reference threshold signal Vith
The high frequency power supply device includes a current switch circuit ISW that outputs 0 as a current suppression threshold value signal Vith.

In the invention of the modified example 79, the current suppressing threshold value switching circuit ICH described in the modified example 62 has the traveling wave power P
From the start of the output of F until the junction temperature Tj of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature Tjmax, the current suppression relaxation threshold signal Vith1 is output as the current suppression threshold signal Vith, and the junction temperature is increased. The high frequency power supply device is the current suppression threshold value switching circuit ICH that outputs the current suppression reference threshold value signal Vith0 as the current suppression threshold value signal Vith when Tj reaches the absolute maximum rated temperature Tjmax.

In the invention of the modification 80, the plurality of current timer circuits ITM described in the modification 63 are the same in number as the plurality of current suppression relaxation threshold setting circuits ITH1 and the plurality of current suppression relaxations are performed. When the current suppression relaxation threshold value signals Vith1 output from the threshold value setting circuit ITH1 are arranged in descending order, the current suppression relaxation threshold signals Vith1 and the current suppression relaxation threshold signals Vith1 are arranged in descending order. Correspondingly, in that order, the relaxation time Etime set for each becomes the ascending order, and further, each inputs the output start signal Vst and outputs the output start signal Vst.
When st reaches a predetermined value, the output of the traveling wave power PF is started, and when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax, the amplification element of the power amplifier circuit from the start of the output of the traveling wave power PF. Current junction threshold value switching signal Vich having a predetermined value different from when the junction temperature Tj reaches the absolute maximum rated temperature Tjmax.
Is a high-frequency power supply device which is a plurality of current timer circuits ITM for outputting respectively.

[0154]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram best representing the features of the invention according to the present application. Since FIG. 1 is the same as FIG. 9 described later, the description will be described later with reference to FIG. 9.

FIG. 7 shows a constant voltage output DC power supply circuit DPS1.
Reflection protection type high frequency power supply device HP1 adopting the present invention
1 is a block diagram showing a configuration of a high frequency power supply device HP11 (hereinafter, referred to as a high frequency power supply device HP11), and corresponds to a block diagram showing a configuration of a conventional high frequency power supply device HP1 shown in FIG. Figure 8
4 is a block diagram showing a configuration of a reflection protection type high frequency power supply device HP21 (hereinafter, referred to as a high frequency power supply device HP21) of the present invention which employs a variable voltage output DC power supply circuit DPS1, and is a conventional high frequency power supply shown in FIG. It corresponds to the block diagram showing the configuration of the device HP2. The block diagrams showing the configurations of the high frequency power supply devices HP11 and HP21 shown in FIGS. 7 and 8 are the same as the block diagrams showing the configurations of the conventional high frequency power supply devices HP1 and HP2 shown in FIGS. 3 and 4, respectively. A signal output circuit ST is added. Note that in FIGS. 7 and 8, the description of the same parts as those in FIGS. 3 and 4 is omitted.

The output start signal output circuit ST detects when the power output means POUT starts to output the traveling wave power, and outputs an output start signal of a predetermined value different from that before the output of the traveling wave power is started at this time. To do. The output start signal V
Hereinafter, the magnitude of st will be referred to as the output start signal value Vst.
The output start signal Vst is, for example, a Low level signal when the traveling wave power is not output, and a High level signal when the traveling wave power is output. 7 and 8, the threshold value switching reflection protection circuit PRT (hereinafter referred to as reflection protection circuit PRT), the output setting arithmetic circuit CAL, and the output power setting circuit SE applied to the present invention.
Traveling wave power P by T and the output start signal output circuit ST
Power control means PCON for controlling F is configured.

FIG. 9 is a circuit diagram showing an example of the reflection protection circuit PRT of the present invention. This reflection protection circuit PRT is
The power suppression reference threshold value setting circuit TH0, the power suppression relaxation threshold value setting circuit TH1, the power suppression threshold value switching circuit CH, and the power suppression signal output circuit ADD1. The power suppression signal output circuit ADD1 is the same as the conventional technique. Further, the power suppression reference threshold value setting circuit TH0
Is a circuit for outputting the power suppression reference threshold signal Vth0, which is the same as the conventional technique. The power suppression relaxation threshold setting circuit TH1 is a power suppression reference threshold setting circuit TH.
The circuit configuration is similar to that of 0, and includes a control voltage source Ec having a voltage (potential with respect to the ground) of Ve, a resistor Rt01, and a resistor Rt02 (one of which is connected to the ground).
Then, the voltage Ve of the control voltage source Ec is divided by the resistors Rt11 and Rt12 to output a power suppression relaxation threshold signal Vth1. It should be noted that the magnitude of power suppression mitigation threshold signal Vth1 (hereinafter referred to as power suppression mitigation threshold signal value Vth1) is set to be larger than power suppression reference threshold signal value Vth0 (Vth0.
<Vth1), each resistance value of the power suppression relaxation threshold value setting circuit TH1 is set.

In the example of FIG. 9, there is one power suppression relaxation threshold setting circuit and one power suppression relaxation threshold signal, but the invention is not limited to this. For example, as shown in a third embodiment described later, the circuit may be configured so that the power suppression relaxation threshold signal changes with time, or as shown in a fourth embodiment described later. The circuit may be configured such that the power suppression mitigation threshold signal has multiple values.

The power suppression reference threshold signal and the power suppression mitigation threshold signal are collectively referred to as the power suppression threshold signal Vth, and the magnitude of the power suppression threshold signal Vth (hereinafter referred to as power suppression A circuit that sets a threshold signal value Vth) and outputs the power suppression threshold signal Vth is generically referred to as a power threshold setting circuit TH. In the reflection protection circuit PRT, the power threshold setting signal TH is generated by the power threshold setting circuit TH.

The power suppression threshold value switching circuit CH is composed of a power timer circuit TM and a power switch circuit SW. The power timer circuit TM inputs the output start signal Vst and sets the time when the output start signal reaches a predetermined value as the output start time of the traveling wave power, and the power timer circuit TM starts from the output start time of the traveling wave power. When a predetermined time (hereinafter referred to as relaxation time Etime) determined by the circuit constant of Eq.
It is a circuit that outputs a power suppression threshold value switching signal Vch having a predetermined value that is different from the time before the elapse of time. In addition,
The magnitude of the power suppression threshold switching signal Vch is hereinafter referred to as the power suppression threshold switching signal value Vch.

Power switch circuit SW includes power suppression reference threshold signal Vth0 and power suppression relaxation threshold signal Vt.
h1 and the power suppression threshold switching signal Vch as described above, and when the power suppression threshold switching signal Vch has a predetermined value, the power suppression relaxation threshold signal Vth1 is power suppressed. Threshold signal Vth
And the power suppression threshold switching signal Vch is not a predetermined value, the power suppression reference threshold signal Vth0 is output as the power suppression threshold signal Vth. That is, the power suppression threshold switching circuit CH is
Relaxation time Eti determined from the start of output of traveling wave power
Power suppression relaxation threshold signal Vth
1 is output as the power suppression threshold signal Vth, and the power suppression reference threshold signal Vth0 is output as the power suppression threshold signal Vth after the relaxation time Etime has elapsed from the start of output of the traveling wave power.

The power suppression signal output circuit ADD1 inputs the reflected wave power detection signal Vpr and the power suppression threshold signal Vth, and calculates the difference between the reflected wave power detection signal value Vpr and the power suppression threshold signal value Vth. The power suppression signal Vsub that changes in accordance with is output. As described above, the larger the power suppression threshold signal Vth is, the more the suppression of traveling wave power is alleviated. Here, the power suppression reference threshold signal Vth0
Since it is the power suppression relaxation threshold signal Vth1, the degree of suppression of the traveling wave power is smaller than that in the case of the conventional technique until the relaxation time Etime elapses. Therefore, when the reflection is generated, the plasma processing apparatus 5 is more effective than the conventional technology.
Can supply a large load power. As a result, plasma discharge is more likely to occur than when the relaxation time Etime elapses after the output of the traveling wave power is started, as compared with the related art.

As can be seen from the above description, the power suppression reference threshold signal Vth0 is the traveling wave power value PF.
Is a signal indicating the upper limit reference of the reflected wave power detection signal Vpr. The power suppression relaxation threshold signal Vth1 is a signal larger than the power suppression reference threshold signal Vth0 that indicates the upper limit of the reflected wave power detection signal Vpr that does not need to suppress the traveling wave power value PF. further,
The current suppression reference threshold value signal Vith0, which will be described later, is a signal indicating the upper limit reference of the current detection signal Vi that does not need to suppress the traveling wave power value PF. Similarly, a current suppression relaxation threshold signal Vith1 described later is a signal larger than the current suppression reference threshold signal Vith0 indicating the upper limit of the current detection signal Vi that does not require suppression of the row wave power value PF.

FIG. 10 is a comparison diagram of temperature rise curves from the start of traveling wave power output at the junction temperature Tj in the case of using the prior art and the present invention under the same conditions.
Although the degree of temperature rise of the junction temperature Tj varies depending on the condition at that time, as shown in FIG. 10, in the conventional technique, the junction temperature Tj does not reach the maximum temperature immediately after the start of the power output, but rather rises gradually. Reach maximum temperature. Therefore, when the junction temperature Tj is low, that is, only immediately after starting the output of the traveling wave power, there is a temperature margin until the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. Even if the loss increases by increasing the set value of Vth and suppressing the suppression of the traveling wave power, the destruction of the amplification element can be prevented.

Therefore, as described above, the power suppression reference threshold value setting circuit TH0 is provided separately from the power suppression reference threshold value setting circuit TH1 so that the power suppression reference threshold value is set immediately after the output of the traveling wave power is started. The relaxation time Etim is used by using the power suppression threshold value signal Vth larger than the signal Vth0.
Even if the power suppression reference threshold signal Vth0 is used after e has elapsed, the junction temperature Tj of the amplification element does not exceed the absolute maximum rated temperature Tjmax as shown by the temperature rise curve of the present invention in FIG. You can As a result, immediately after starting the output of the traveling wave power, it becomes possible to output the traveling wave power larger than that in the conventional technique, so that plasma discharge is more likely to occur than in the conventional technique.

If the power suppression threshold signal Vth larger than the power suppression reference threshold signal Vth0 is used without switching to the power suppression reference threshold signal Vth0 even after the relaxation time Etime has elapsed, As shown in FIG. 10, since the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax, the power suppression reference threshold signal Vth0 is set before the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. Need to switch.

As can be seen from the above description, if the power suppression relaxation threshold signal Vth1 and the current suppression relaxation threshold signal Vith1 described later are continuously used, the junction temperature Tj of the amplification element of the power amplification circuit will increase. It is allowed to exceed the absolute maximum rated temperature Tjmax. Therefore, "to allow the junction temperature Tj to exceed the absolute maximum rated temperature Tjmax" described in the claims means the power suppression relaxation threshold signal Vth1 and the current suppression relaxation threshold signal Vith1 described later. In the present invention, the electric power suppression reference threshold signal Vth0 or the current suppression reference threshold signal Vith0 described later is switched before the junction temperature Tj exceeds the absolute maximum rated temperature Tjmax. When used, it does not mean that the junction temperature Tj of the amplification element exceeds the absolute maximum rated temperature Tjmax. From the above description, when the power suppression reference threshold signal value Vth0 and the power suppression relaxation threshold signal value Vth1 are compared, Vth0 <Vth1 is satisfied, and the current suppression reference threshold signal value Vith0 described later is obtained. When the current suppression relaxation threshold signal value Vith1 is compared with
It can be seen that 0 <Vith1.

Further, the power suppression signal Vsub is obtained using the power suppression threshold signal Vth, and this power suppression signal Vs is obtained.
Using ub, a power target value signal value that is a signal value corresponding to the power target value is obtained. That is, the power suppression threshold value signal Vth is used to obtain the power target value signal value that is the signal value corresponding to the power target value. Similarly, the current suppression threshold value signal Vith is used to obtain a power target value signal value that is a signal value corresponding to the power target value.

The relaxation time Etime and the power suppression threshold value signal Vth are determined by the high frequency power supply device HP11 or HP.
The value may be set to an optimum value according to the usage environment of 21. Further, in the power threshold setting circuit TH, the power threshold is set by two resistors, but at least one may be a variable resistor. Hereinafter, detailed description will be given using specific examples.

[0170]

(First Embodiment) The present invention is a high-frequency power supply device, the block diagram of which is shown in FIG. 7 or FIG. The "reflection protection circuit PRT" shown in FIG. 7 or 8 is the above-described FIG. Further, FIG. 11 is a circuit configuration diagram of the "power suppression threshold value switching circuit CH" shown in FIG.
Example of FIG. 11 is a circuit configuration diagram showing a first embodiment of the power suppression threshold value switching circuit CH shown in FIG. FIG. 12 is a time chart when the power suppression threshold switching circuit CH shown in FIG. 11 is used.
The first embodiment will be described with reference to FIGS. 11 and 12. The power timer circuit TM of FIG. 11 is composed of a resistor, a capacitor, a transistor, a comparator, etc., as shown in the figure. The power switch circuit SW is composed of a diode and a FET.

When the traveling wave power is not output, since the output start signal Vst is at the Low level, the transistor Tr1 is turned off and the comparator input voltage V1 input to the comparator CO1 is the voltage Ve of the control voltage source Ec. Maintained at. On the other hand, the comparison voltage V2 is a voltage (V1> V2) obtained by dividing the voltage Ve of the control voltage source Ec.
Therefore, the comparator output voltage V3 output from the comparator becomes High level. Therefore, the field effect transistor FET1 is turned on. Then Vth1>
Since it is Vth0, the two diodes Ds0 and Ds
By 1, Vth = Vth1 (see FIG. 12D). Thus, the power suppression reference threshold signal Vth0
If a diode is connected to the output side of the power suppression relaxation threshold signal Vth1 and these diodes are connected in parallel, the signal with the largest magnitude among the signals output from the diode is power suppressed. Threshold signal Vt
It is output as h. The field effect transistor FE
T1 corresponds to a switch in the power switch circuit SW, and when the field effect transistor FET1 is OFF, the power suppression mitigation threshold signal Vth1 is cut off and O
When N, the power suppression relaxation threshold signal Vth1 is transmitted to the diode side.

Next, when the traveling wave power is output, the output start signal Vst becomes High level, the transistor Tr1 is turned on, and the capacitor Cm11 starts discharging through the resistor Rm11. And the capacitor Cm
As the discharge of 11 progresses, the comparator input voltage V1 becomes
It becomes smaller as shown in 2 (b). The comparator input voltage V1 is the resistor Rm11 and the capacitor Cm1.
It becomes smaller according to the characteristics determined by the time constant of 1.

When the discharge of the capacitor Cm11 further progresses and the comparator input voltage V1 becomes smaller than the comparison voltage V2 (V1 <V2), the comparator output voltage V3.
Changes to the Low level, the field effect transistor FET1 is turned off. As described above, when the field effect transistor FET1 is OFF, the power suppression relaxation threshold signal Vth1 is in the cutoff state, and thus Vth = Vth0. In the case of the first embodiment, the relaxation time Etime is the time from the output of the traveling wave power until the comparator input voltage V1 becomes smaller than the comparison voltage V2. As described above, by using the time constant circuit using the resistor and the capacitor as shown in FIG.
As shown in FIG. 12B, the comparator input voltage V1 starts to decrease from the time when the output start signal Vst changes to a predetermined value as shown in FIG. 2A, and the comparator input voltage V1 becomes lower than the comparison voltage V2. Becomes smaller (V1 <V
2) and, as shown in FIG. 12C, the comparator output voltage V3 changes, so that as shown in FIG.
The power suppression threshold signal Vth can be switched from the power suppression mitigation threshold signal Vth1 to the power suppression reference threshold signal Vth0.

(Second Embodiment) FIG. 13 is a block diagram of FIG.
10 is a circuit configuration diagram showing a second embodiment of the power suppression threshold value switching circuit CH shown in FIG. 9, similar to the power suppression threshold value switching circuit CH of the first embodiment shown in FIG. FIG. 14 shows a power suppression threshold switching circuit C shown in FIG.
It is a time chart when H is used. This FIG.
A second embodiment will be described with reference to FIGS. Figure 1
The power timer circuit TM of 3 is a commercially available timer IC (for example, model NE555 or the like), a control voltage source Ec, and a resistor Rm.
4 and a capacitor Cm4 (one of which is connected to ground). The timer IC is an IC in which the level of the switching signal Vch output from the output terminal Out changes when a set timer time elapses from when a high level signal is input to the trigger terminal Trg. Resistance value of external resistor Rm4 or capacitor C
The timer time can be changed by changing the capacitance value of m4. The set timer time is the relaxation time Etime described above. Further, the output start signal Vst becomes a trigger signal.

An analog switch (for example, model AD7512DI or the like) can be used for the power switch circuit SW. This analog switch has a switching signal Vc.
The switch is switched depending on the level of h. In the example shown in FIGS. 13 and 14, the switching signal Vch is High.
The switch is switched so as to output Vth1 when it is at the level, and the switch is switched so as to output Vth0 when the switching signal Vch is at the low level.

When the traveling wave power is not output, the output start signal Vst is at Low level and the switching signal Vch is at High level. As a result, since the switch is switched to the Vth1 side, Vth = Vt
It becomes h1.

Next, when the traveling wave power is output, the output start signal Vst becomes High level.
Starts to work. Note that the switching signal Vch remains High until the relaxation time Etime (timer time) elapses.
The h level remains Vth = Vth1.

The relaxation time Eti progresses as the operation of the timer IC progresses.
When me (timer time) has elapsed, the switching signal Vch
Changes to the low level, the power switch circuit S
The switch in W switches to the Vth0 side and Vth = V
It becomes th1. As described above, by using the circuit using the timer IC as shown in FIG.
Since the switching signal Vch changes when the relaxation time elapses as shown in FIG. 14B from the time when the output start signal Vst changes to a predetermined value as shown in (a),
As shown in FIG. 14C, the power suppression threshold signal Vt
It is possible to switch h from the power suppression relaxation threshold signal Vth1 to the power suppression reference threshold signal Vth0.

(Third Embodiment) FIG. 15 is a block diagram of FIG.
9 and the power suppression threshold value switching circuit CH of the first embodiment shown in FIG. 1 and the second embodiment shown in FIG.
7 is a circuit configuration diagram showing a third embodiment of the power suppression threshold value switching circuit CH shown in FIG. FIG. 16 is a time chart when the circuit shown in FIG. 15 is used. This Figure 1
A third embodiment will be described with reference to FIGS. In the embodiment shown in FIG. 15, when the switch in the power switch circuit SW is switched to the control voltage source Ec side, the voltage Ve of the control voltage source Ec is divided by the resistor Rm51 and the resistor Rm52. The pressed voltage signal Vth1 is used as the power suppression relaxation threshold signal. Further, the voltage signal Vth0 obtained by dividing the voltage Ve of the control voltage source Ec by the resistors Rm53 and Rm54 is used as the power suppression reference threshold signal. Further, the resistor Rm5 is set so that Vth1> Vth0.
The resistance value of 1 to Rm54 is determined. The power switch circuit SW switches to the side of the control voltage source Ec when the signal level of the output start signal Vst is at the Low level, and becomes High.
When the level is reached, it switches to the other side (not connected).

As shown in FIG. 16, the output start signal Vst is at the Low level until the traveling wave power output is started. Therefore, since the power switch circuit SW is switched to the control voltage source Ec side, the capacitor Cm5 is charged. Is charged. Also, since Vth1> Vth0, 2
Vth1 becomes V due to the two diodes Ds0 and Ds1.
It is output as th.

Next, when the output of the traveling wave power is started, the output start signal Vst becomes High level, so that the power switch circuit SW is switched to the other side (not connected side). Then, the electric charge charged in the capacitor Cm5 is discharged through the resistor Rm52, so that the value of the power suppression relaxation threshold signal Vth1 becomes smaller as the discharging progresses (see FIG. 16B). And Vth
When 1 <Vth0, two diodes Ds0 and Ds0
Due to s1, Vth0 is output as Vth. In the case of FIG. 15, a control voltage source Ec, a resistor Rm51, a resistor Rm52, a capacitor Cm5, and a power switch circuit S.
A power suppression relaxation threshold setting circuit and a power timer circuit TM are configured with W. As described above, by using the power suppression relaxation threshold setting circuit that outputs the power suppression relaxation threshold signal whose signal value decreases with the passage of time, as shown in FIG. From the time when the signal Vst changes to a predetermined value, FIG.
As shown in, the power suppression mitigation threshold signal Vth1 begins to decrease, and the power suppression mitigation threshold signal Vth1 becomes smaller than the power suppression reference threshold signal Vth0 (Vt
h1 <Vth0) and power suppression reference threshold signal Vth0
Is output as the power suppression threshold signal Vth,
The power suppression threshold signal Vth can be switched from the power suppression mitigation threshold signal Vth1 to the power suppression reference threshold signal Vth0. The third embodiment differs from the above-described first and second embodiments in that the power suppression relaxation threshold setting circuit TH1 and the power timer circuit T are provided.
Since the power switch circuit SW is incorporated in M, it is slightly different from the power suppression threshold value switching circuit CH shown in FIG.

(Fourth Embodiment) FIG. 17 is a block diagram of FIG.
Similarly to the power suppression threshold value switching circuit CH of the first embodiment shown in FIG. 1, the second embodiment shown in FIG. 13 and the third embodiment shown in FIG. 15, the power shown in FIG. It is a circuit block diagram which shows the 4th Example of the suppression threshold value switching circuit CH. FIG. 18 is a time chart when the circuit shown in FIG. 17 is used. A fourth embodiment will be described with reference to FIGS. 17 and 18. The circuit shown in FIG. 17 is a modification of the first embodiment shown in FIG. 11, and three types of power timer circuits TM1, TM2 and TM3 having different circuit constants inside the power timer circuit TM of FIG. And the first to third power suppression relaxation threshold signals are used.

As shown in FIG. 17, three types of power timer circuit TM1, power timer circuit TM2 and power timer circuit TM3 are connected in parallel, and are respectively connected to the power timer circuit TM of FIG. Similarly, the first to third relaxation times Etime are determined using a time constant circuit using a resistor and a capacitor. Note that Etime1 is the first relaxation time, Etime2 is the second relaxation time, and Et is
ime3 is the third relaxation time, Vth11 is the first power suppression relaxation threshold signal, Vth12 is the second power suppression relaxation threshold signal, and Vth13 is the third power suppression relaxation threshold signal.

The first relaxation time Etime1 <second
Relaxation time Etime2 <third relaxation time Etime3
So that the time constant of each circuit is Rm11 × Cm11
<Rm21 × Cm21 <Rm31 × Cm31. Note that the above equation is Rm1 for convenience.
1, Rm21 and Rm31 are resistance values, and Cm11, Cm
m21 and Cm31 are the capacitance values of the capacitors.
In addition, the first to third power suppression mitigation threshold signals are set so that Vth11>Vth12>Vth13> Vth0. Note that Vth0, Vth1, Vth
Although a circuit example for setting 2 and Vth3 is not shown in FIG. 17, it is the same as TH0 and TH1 in FIG.

Next, the operation of this embodiment will be described. In addition,
As described above, since the fourth embodiment of FIG. 17 is a modification of the first embodiment shown in FIG. 11, the description of the same parts will be omitted. When the traveling wave power is not output, the output start signal Vst is at the Low level,
The transistors Tr1 to Tr3 are turned off, and the output signals of the comparators Co1 to Co3 become High level. Therefore, as in FIG. 11, the field effect transistor FE is
T1 to FET3 are turned on. Therefore, from FET1 to V
Although th11 is output, FET2 outputs Vth12, and FET3 outputs Vth13, as described above, Vth11>Vth12>Vth13> Vth.
Since it is 0, Vth11 is output as the power suppression threshold signal Vth by the four diodes Ds0 to Ds3.

Next, when the traveling wave power is output, the output start signal Vst becomes High level, so that the transistors Tr1 to Tr3 are turned on. Next, in the power timer circuit TM1, the FET1 is turned off when the first relaxation time Etime1 has elapsed. In addition, the power timer circuit T
M2 is, when the second relaxation time Etime2 has elapsed,
FET2 turns off. Also, the power timer circuit TM3
Is FE when the third relaxation time Etime3 has elapsed
T3 turns off. As described above, the first relaxation time E
Since time1 <second relaxation time Etime2 <third relaxation time Etime3, the first relaxation time Etim is satisfied.
When the FET1 is turned off after e1 elapses, Vth12 becomes the largest signal, so that the four diodes Ds0 to Ds3 cause Vth12 to be the power suppression threshold signal V.
It is output as th. Also, the second relaxation time Etim
When the FET2 is turned off after e2 elapses, Vth13 becomes the largest signal, so that the four diodes Ds0 to Ds3 cause Vth13 to be the power suppression threshold signal V.
It is output as th. Also, the third relaxation time Etim
When the FET3 is turned off after e3 has elapsed, Vth0 becomes the largest signal, so that the four diodes Ds0 to Ds3 cause Vth0 to be the power suppression threshold signal Vth.
Is output as.

As described above, by using the circuit as shown in FIG. 17, the output start signal Vst changes from a predetermined value to the predetermined value shown in FIG.
As shown in (b), the first relaxation time Etime1, the second relaxation time Etime2, and the third relaxation time Etim.
Since the power suppression threshold signal Vth switches each time e3 elapses, the power suppression threshold signal Vth can be switched in four stages. In the embodiment of FIG. 17, V
In the fourth embodiment in which th is switched to four stages, the number of stages in which the power suppression threshold signal Vth changes can be freely set depending on the number of power threshold setting circuits TH and power suppression threshold signal Vth connected in parallel. Can be specified. Also,
The relaxation time Etime can be freely determined by the time constant of the resistance value and the capacitance value of the capacitor.

(Fifth Embodiment) A reflection protection circuit P constituting the high frequency power supply device HP11 or HP21 of FIGS. 7 and 8.
It is also possible to add the function of the present invention by configuring all the functions of the RT with a microcomputer and software. FIG. 19 is a configuration diagram when the reflection protection circuit PRT is configured by a microcomputer and software.
As shown in FIG. 19, when all the functions of the reflection protection circuit PRT are composed of a microcomputer and software, the signals to be handled need to be digital signals. Therefore, when the reflected wave power detection signal Vpr is an analog signal, it may be used in a microcomputer after A / D converting the analog signal into a digital signal. When the power suppression signal Vsub output from the reflection protection circuit PRT is output as an analog signal, the digital signal may be D / A converted into an analog signal.

FIG. 20 is a first flow chart when the reflection protection circuit PRT is composed of a microcomputer and software. The flowchart shown in FIG. 20 shows an execution procedure when the first embodiment shown in FIG. 11 and the second embodiment shown in FIG. 13 are adopted as the power suppression threshold switching circuit CH, Hereinafter, this is referred to as the fifth embodiment. The fifth embodiment will be described below with reference to FIG.

Step 1 shows a state before starting the output of traveling wave power, that is, a standby state. In step 2, the timer and the power suppression signal Vsub used later are set to 0.
This is the step of initializing to. Note that timer indicates the time from the start of output of the traveling wave power. Also, Vs
ub indicates a power suppression signal. Step 3 is a step of determining whether or not the output of the traveling wave power is started. If the output of the traveling wave power is not started in step 3, step 3 for determining whether the output of the traveling wave power is started is repeated again. If the traveling wave power has started to be output in step 3, the process proceeds to step 4.

Step 4 is a step of judging whether or not the reflected wave power detection signal Vpr input to the microcomputer is larger than the power suppression / relaxation threshold value signal Vth1. The reflected wave power detection signal Vpr is a signal that is taken into the microcomputer at any time, and the power suppression / relaxation threshold signal Vth1 is a signal whose value is set in advance. If Vpr> Vth1 is not satisfied in step 4, the traveling wave power is not suppressed, so that the power suppression signal Vsub = 0 is set in step 5, and the process proceeds to step 7. If Vpr> Vth1 is satisfied in step 4,
Since the traveling wave power is suppressed, the process proceeds to step 6. Step 6 is a step of calculating the power suppression signal Vsub using the reflected wave power detection signal Vpr and the power suppression mitigation threshold value signal Vth1, and like the first embodiment, the reflected wave power detection signal value Vpr. And power suppression relaxation threshold signal value V
The value that changes according to the difference from th1 is the power suppression signal Vsu.
b. In the case of FIG. 20, for example, with K3 as a proportional constant, Vsub may be calculated using a linear function such as Vsub = K3 × (Vpr−Vth1).
The function used is not limited to a linear function, and an exponential function or the like may be used.

Step 7 is a step of judging whether or not the timer, which indicates the time after the output of the traveling wave power is started, is longer than the relaxation time Etime. The relaxation time Etime is a signal whose value is set in advance. The relaxation time Etime may be set to an appropriate value according to the processing time of software. For example, the relaxation time Etime for actually suppressing the traveling wave power may be divided by the loop time required for the timer value to increase by 1 (increment) in step 8 described later.
In step 7, if timer> relaxation time Etime is not satisfied, in step 8, timer = timer +
After setting to 1, the process returns to step 4. After that, in step 7,
Steps 4 to 7 are repeated until timer> relaxation time Etime is satisfied. In step 7, tim
If er> relaxation time Etime is satisfied, the process proceeds to step 9. After step 9, the power suppression threshold signal Vth switches from the power suppression mitigation threshold signal Vth1 to the power suppression reference threshold signal Vth0. The power suppression reference threshold signal Vth0 is a signal whose value is set in advance.

Step 9 is a step of determining whether or not the reflected wave power detection signal Vpr input to the microcomputer is larger than the power suppression reference threshold signal Vth0. The reflected wave power detection signal Vpr is a signal that is taken into the microcomputer at any time, and the power suppression reference threshold signal Vth0 is a signal whose value is set in advance. If Vpr> Vth0 is not satisfied in step 9, the traveling wave power is not suppressed. Therefore, in step 9, the power suppression signal Vsub = 0 is set, and then the process returns to step 9. In step 9, the reflected wave power detection signal Vpr> Vt
If h0 is satisfied, the traveling wave power is suppressed, and the process proceeds to step 11.

At step 11, the reflected wave power detection signal Vp
This is a step of calculating the power suppression signal Vsub using r and the power suppression reference threshold signal Vth0, and is similar to step 6.

As shown in step 12, when the traveling wave power output stop command is issued in steps 2 to 11, the traveling wave power output is stopped and the process returns to the standby state of step 1.

As described above, until the relaxation time Etime elapses after the traveling wave power output is started, the traveling wave power is suppressed using the power suppression relaxation threshold value signal Vth1.
After the relaxation time Etime has elapsed from the start of traveling wave power output, traveling wave power can be suppressed using the power suppression reference threshold signal Vth0.

(Sixth Embodiment) FIG. 21 is a second flow chart when the reflection protection circuit PRT is composed of a microcomputer and software as in FIG. The flowchart shown in FIG. 21 shows an execution procedure when the third embodiment shown in FIG. 15 is adopted as the power suppression threshold value switching circuit CH, which will be hereinafter referred to as a sixth embodiment. Here, the power suppression threshold switching circuit CH
A supplementary explanation will be given of the first embodiment with reference to FIG.
As shown in (d), and in the second embodiment, FIG.
As shown in (c), when the power suppression threshold signal Vth has passed the relaxation time Etime from the start of traveling wave power output, the power suppression relaxation threshold signal Vth1 is gradually changed to the power suppression reference threshold signal Vth0. Changes to. On the other hand, in the third embodiment, the power suppression mitigation threshold signal Vth1 does not change stepwise as shown in FIG. As shown in 16 (b), the power suppression reference threshold value Vth1 starts to decrease with the lapse of time from the start of output of the traveling wave power, and the power suppression reference threshold value has elapsed when the relaxation time Etime has elapsed. It continuously changes to become the signal Vth0.

The sixth embodiment will be described below with reference to FIG. Note that FIG. 21 is a flowchart in which step A of FIG. 21 is added between step 3 and step 4 of FIG. Therefore, steps 1 to 3 are the same as those in FIG.
Also, since Steps 4 to 12 are the same as Steps 4 to 12 in FIG. 20, description thereof will be omitted. Therefore, the description will focus on step A.

Step A is a step for continuously reducing the power suppression relaxation threshold signal Vth1. The power suppression relaxation threshold signals Vth1 and time up to that point are used.
A new power suppression relaxation threshold signal Vth1 using r and
Is a step for calculating. Specifically, FIG. 16B
As shown in, the new power suppression relaxation threshold signal Vth1 may be calculated by a function that results in an exponential curve, or a new power suppression relaxation threshold signal may be calculated by a linear function that decreases linearly. The signal Vth1 may be calculated. In addition, if the power suppression relaxation threshold signal Vth1 is set so as not to increase more than the current power suppression relaxation threshold signal Vth1, the new power suppression relaxation threshold signal Vth1 may be calculated by an equation having another characteristic.

By doing so, the power suppression mitigation threshold signal Vth1 is continuously decreased, and when the relaxation time Etime has elapsed from the start of traveling wave power output, the power suppression mitigation threshold signal Vth1 is suppressed. It is possible to switch to the reference threshold signal Vth0.

(Seventh Embodiment) FIG. 22 is a third flow chart in the case where the reflection protection circuit PRT is composed of a microcomputer and software as in FIGS. 20 and 21. The flowchart shown in FIG. 22 shows an execution procedure when the fourth embodiment shown in FIG. 17 is adopted as the power suppression threshold value switching circuit CH.
This is a seventh embodiment. Here, a supplementary description will be given of the power suppression threshold value switching circuit CH. In the first embodiment, as shown in FIG. 12 (d), in the second embodiment, as shown in FIG. 14 (c), Power suppression threshold signal Vth
When the relaxation time Etime has elapsed from the start of the traveling wave power output, the power suppression relaxation threshold signal Vth1 gradually changes to the power suppression reference threshold signal Vth0. On the other hand, in the fourth embodiment, as shown in FIG. 18B, when the power suppression threshold signal Vth has passed the first relaxation time Etime1 from the start of traveling wave power output, the first relaxation time Etime1 has passed.
Second power suppression relaxation threshold signal Vth11 changes to the second power suppression relaxation threshold signal Vth12, and the second power suppression relaxation threshold is reached when the second relaxation time Etime2 has elapsed from the start of traveling wave power output. The third power suppression mitigation threshold signal Vth1 changes from the value signal Vth12 to the third power suppression mitigation threshold signal Vth13, and when the third relaxation time Etime3 has elapsed from the start of traveling wave power output.
3 to the power suppression reference threshold signal Vth0.
That is, the power suppression threshold signal Vth changes in a plurality of steps.

The seventh embodiment will be described below with reference to FIG. Note that FIG. 22 is a flowchart in which steps B to G of FIG. 22 are added while the process proceeds from step 7 to step 9 of FIG. Therefore, steps 1 to 8 are the same as those in FIG. Also, steps 9 to 12
20 is the same as steps 9 to 12 in FIG. Therefore, steps B to G will be mainly described.

Step 4 to Step 8 and Step B
Through step G, the power suppression threshold signal Vth is changed in multiple steps. Among these, steps 4 to 8 are a group of steps having a role of stepwise changing the power suppression threshold signal Vth, and each step is as described in FIG.
If steps 4 to 8 are regarded as one block (hereinafter, divided block) and the divided blocks are connected in series at the bottom of the flowchart according to the number of stages to be divided,
The power suppression threshold signal Vth can be changed in a plurality of steps. For example, when setting the first to third relaxation times Etime as shown in FIG. 18B, three divided blocks may be connected in series below the flowchart. However, the relaxation time Etime needs to be set to a value suitable for each divided block.

Step B in FIG. 22 shows a second-stage divided block to an N-1th-stage divided block (when there are N divided blocks in total). Note that details are omitted due to space limitations. If the total number of divided blocks is two, this step B is unnecessary.

Steps C to G show the divided block in the Nth stage. When the processing of the Nth divided block is completed, the power suppression threshold signal switches from the Nth power suppression relaxation threshold signal Vth1N to the power suppression reference threshold signal Vth0. The Nth power suppression relaxation threshold signal Vth1N is a signal whose value is set in advance.

Next, the time of step 8 and step G
r will be described. The same applies to the timer used in step B in which details are omitted. time
r is initialized to 0 in step 2 and then incremented by 1 in step 8. Then, in step 7, if it becomes longer than the first relaxation time Etime1, the process proceeds to the next divided block, but at this time, timer is not initialized to 0. The same applies to the subsequent divided blocks. for that reason,
Since the timer indicates the time from the start of the traveling wave power output, the relaxation time Et is used by using this timer.
You can control the time. As a result, the power suppression threshold signal Vth can be changed in multiple steps.

(Eighth Embodiment) The reflection protection circuit PRT for alleviating the temperature rise of the amplification element when the reflected wave power becomes larger than the power threshold value has been described above. The invention can also be applied to other applications for preventing overtemperature of an amplification element. 23 is a block diagram showing the configuration of the high frequency power supply device HP11 shown in FIG. 7, in which a current detector IDET and a current protection circuit IPRT are added to the reflection and current protection high frequency power supply device HP12.
It is a block diagram which shows the structure of a high frequency power supply device HP12. Hereinafter, a block diagram showing the configuration of the high frequency power supply device HP12 of FIG. 23 will be referred to as an eighth embodiment.

In FIG. 23, the power control means PCON for controlling the traveling wave power PF by the reflection protection circuit PRT, the output setting arithmetic circuit CAL, the output power setting circuit SET, the output start signal output circuit ST, and the current protection circuit IPRT. It is configured. The eighth embodiment will be described with reference to FIG. In addition, about the same part as FIG. 3 and FIG. 7,
The description is omitted.

The DC power supply circuit DPS1 has been described with reference to FIG. The current detector IDET is a DC power supply circuit D
The output current value output from PS1 is detected and a current detection signal Vi is output. The output voltage DC1 of the DC power supply circuit DPS1 is input to the power amplification circuit AMP1 with the same magnitude or almost no attenuation. Here, the larger the current value input to the power amplification circuit AMP1, the larger the loss in the power amplification circuit AMP1 and the higher the temperature rise of the amplification element. Therefore, it is desirable to perform the same protection as that when the reflected wave power is generated.

FIG. 24 is a circuit diagram showing an example of the current protection circuit IPRT. This current protection circuit IPRT is shown in FIG.
This is the same as the reflection protection circuit PRT shown in FIG. 3, and includes a current suppression reference threshold value setting circuit ITH0, a current suppression relaxation threshold value setting circuit ITH1, and a current suppression threshold value switching circuit I.
It is composed of CH and a current suppression signal output circuit IADD1.

Further, the current suppression threshold value switching circuit IC
H receives the output start signal Vst and sets the time when the output start signal Vst reaches a predetermined value as the output start time of the traveling wave power PF, and the relaxation time Eitime determined from the output start time of the traveling wave power PF. When the time elapses, a current timer circuit ITM that outputs a current suppression threshold value switching signal Vich having a predetermined value different from the time when the output of the traveling wave power PF is started until the relaxation time Etime elapses, and a current suppression reference. The threshold value signal Vith0 and the current suppression relaxation threshold value signal Vith1 are input, and the current suppression threshold value switching signal Vich is input, and when the current suppression threshold value switching signal Vich is a predetermined value, the current suppression relaxation value is set. The threshold signal Vith1 is set to the current suppression threshold signal Vi.
is output as th and the current suppression threshold value switching signal Vi is output.
If ch is not a predetermined value, current suppression reference threshold signal Vi
and a current switch circuit ISW for outputting th0 as a current suppression threshold value signal Vith. The magnitude of the current suppression threshold value switching signal Vich is hereinafter referred to as a current suppression threshold value switching signal value Vich.

Then, the current detection signal Vi of the output current of the DC power supply circuit DPS1 is input and the input current detection signal V
When the magnitude of i (hereinafter referred to as the current detection signal value Vi) becomes larger than the magnitude of the current suppression threshold signal Vith (hereinafter referred to as the current suppression threshold signal value Vith), the current suppression signal Visub Is output. The magnitude of the current suppression relaxation threshold signal Vith1 (hereinafter referred to as the current suppression relaxation threshold signal value Vith1) and the magnitude of the current suppression reference threshold signal Vith0 (hereinafter referred to as the current suppression reference threshold signal value Vith0) and Vith1
> Vith0. The levels of the current suppression reference threshold signal Vith0 and the like may be set appropriately according to the current detection signal value Vi and the like.

Current protection circuit for IPRT (for current protection)
The relaxation time Etime is the reflection protection circuit PRT described above.
The relaxation time Etime for reflection protection is the same as the relaxation time Etime of the reflection protection circuit PRT, but may be the same or different time.

The current protection circuit IPRT shown in FIG.
Is the same as the reflection protection circuit PRT in FIG. 9, and thus detailed description will be omitted. Further, the circuits and flowcharts of the first to seventh embodiments described so far can be applied to specific circuit configurations and the like. Therefore, description of these specific circuit configurations and the like will be omitted.

In the case of FIG. 23, the magnitudes of the power suppression signal value Vsub and the current suppression signal value Visub (hereinafter referred to as the current suppression signal value Visub) are calculated from the set value of the traveling wave power PF.
The electric power value obtained by subtracting the electric power value corresponding to Further, the magnitude of the signal corresponding to the power target value (hereinafter referred to as the power target value signal Vtpi) (hereinafter referred to as the power target value signal value Vtpi) is expressed by the following equation with K1 as a proportional constant. Vtpi = K1 × (Vset-Vsub-Visub)

In the case of FIG. 23, the output setting arithmetic circuit C
In AL, the traveling wave power setting signal Vset, the power suppression signal Vsub, the current suppression signal Visub, and the traveling wave power detection signal Vpf are input, and the traveling wave power value PF output from the power output means POUT becomes the power target value. As described above, the power control signal Vcont for controlling the traveling wave power value PF output from the power output means POUT is output. In addition,
The magnitude of the power control signal Vcont (hereinafter referred to as the power control signal value Vcont) can be expressed by the following equation with K1 and K2 as proportional constants. Further, each signal value in the following equation is a value represented by an absolute value. Vcont = K2 * (K1 * (Vset-Vsub-Visub) -Vpf) = K2 * (Vtpi-Vpf)

As shown in FIG. 23, the high frequency power supply HP
By changing the configuration of 12, the traveling wave power output from the high frequency power supply device when the current detection signal value Vi indicating the output current value of the DC power supply circuit DPS1 becomes larger than the current suppression threshold signal value Vith. The current suppression signal Visub for suppressing is output. If the traveling wave power is suppressed, the current value output from the DC power supply circuit DPS1 becomes small, so that the temperature rise of the amplification element due to the output current of the DC power supply circuit DPS1 can be mitigated.

(Ninth Embodiment) FIG. 25 is a block diagram showing the structure of the high frequency power supply device HP21 shown in FIG. 8, in which a current detector IDET and a current protection circuit IPRT are added to the reflection and current protection of the present invention. Type high frequency power supply HP22
It is a block diagram which shows the structure of (it is hereafter called high frequency power supply HP22). Note that in FIG. 25, the reflection protection circuit PRT, the output setting arithmetic circuit CAL, the output power setting circuit SET, the output start signal output circuit ST, and the current protection circuit IP.
A power control unit PCON for controlling the traveling wave power PF is configured by RT. As this FIG. 25 shows,
The current detector IDET and the current protection circuit IPRT described in the eighth embodiment can also be applied to the high frequency power supply device HP22 shown in FIG. As shown in FIG. 25, the high frequency power supply HP
By changing the configuration of 22, the output voltage value output from the DC power supply circuit DPS2 when the current detection signal value Vi indicating the output current value of the DC power supply circuit DPS2 becomes larger than the current suppression threshold signal value Vith. The current suppression signal Visub for suppressing DC2 is output. If the output voltage value DC2 output from the DC power supply circuit DPS2 is suppressed, the current value output from the DC power supply circuit DPS2 also decreases, so that the temperature rise of the amplification element due to the output current of the DC power supply circuit DPS2 can be mitigated. it can. In the ninth embodiment, a circuit similar to that of the eighth embodiment is added to the block diagram of FIG. 8, and detailed description thereof will be omitted.

(Tenth and Eleventh Embodiments) FIG.
The current protection type high frequency power supply device HP13 (hereinafter referred to as the high frequency power supply device HP) in which the reflection protection circuit PRT is removed from the block diagram showing the configuration of the high frequency power supply device HP12 shown in FIG.
13) is a block diagram of FIG. 27 is a block diagram of a current protection type high frequency power supply device HP23 (hereinafter referred to as high frequency power supply device HP23) in which the reflection protection circuit PRT is removed from the block diagram showing the configuration of the high frequency power supply device HP13 shown in FIG. Therefore, the traveling wave power detector DETf only needs to be able to output the traveling wave power detection signal Vpf. 26 and 27, the power setting arithmetic circuit CAL, the output power setting circuit SET, the output start signal output circuit ST, and the current protection circuit IPRT constitute the power control means PCON for controlling the traveling wave power PF. There is.

In the tenth embodiment, as shown in FIG.
The configuration is shown in which the temperature rise of the amplification element is alleviated by using the current protection circuit IPRT described in the eighth embodiment without using the reflection protection circuit PRT. In the eleventh embodiment, as shown in FIG. 27, the reflection protection circuit PRT is not used,
The configuration is shown in which the temperature rise of the amplification element is alleviated by using the current protection circuit IPRT described in the ninth embodiment. In this way, even without using the reflection protection circuit PRT, the temperature rise of the amplification element can be alleviated. 26 and 27 are the same as the parts described so far, the description thereof will be omitted.

In the case of FIGS. 26 and 27, the electric power value obtained by subtracting the electric power value corresponding to the current suppression signal value Visub from the set value of the traveling wave electric power PF becomes the electric power target value. Further, a signal corresponding to the power target value (hereinafter, power target value signal Vti
(Hereinafter referred to as power target value signal value Vti) is expressed by the following equation with K1 as a proportional constant. Vti = K1 * (Vset-Visub) The magnitude of the power target value signal Vti is hereinafter referred to as the power target value signal value Vti.

26 and 27, the output setting arithmetic circuit CAL receives the traveling wave power setting signal Vset, the current suppression signal Visub and the traveling wave power detection signal Vpf and outputs them from the power output means POUT. The electric power output means POU so that the traveling wave electric power value PF becomes the electric power target value.
The power control signal Vcont for controlling the traveling wave power value PF output from T is output. The power control signal V
The magnitude of cont (hereinafter referred to as the power control signal value Vcont) can be expressed by the following equation with K1 and K2 as proportional constants. Further, each signal value in the following equation is a value represented by an absolute value. Vcont = K2 * (K1 * (Vset-Visub) -Vpf) = K2 * (Vti-Vpf)

The current detection signal value Vi indicating the output current value of the DC power supply circuit DPS1 or DPS2 as described in the eighth to eleventh embodiments is the current suppression threshold signal value V.
When it becomes larger than ith, the current suppression signal Visu
The control method for outputting b and using the current suppression signal Visub to alleviate the temperature rise of the amplification element is not limited to the high frequency power supply device of the present invention, but requires a large transient output in an inverter, a motor driver, or the like. It can also be applied to over temperature protection of power semiconductors used in applications.

[0224]

As in the present invention, the power suppression relaxation threshold signal Vth1 is set as the power suppression threshold signal Vth from the start of the output of the traveling wave power PF until the relaxation time Etime elapses. After the relaxation time Etime has elapsed from the start of the output of the
Let th0 be the power suppression threshold signal Vth, and use the above-described reflected wave power detection signal value Vpr and power suppression threshold signal value V.
Even if the traveling wave power is suppressed by using the power suppression signal Vsub that changes according to the difference from th, the junction temperature Tj of the amplification element is the absolute maximum rating as shown by the temperature rise curve of the present invention in FIG. It is possible not to exceed the temperature Tjmax.

Therefore, the relaxation time Et from the start of output
Until the time elapses, it is possible to reduce the degree of suppression of the traveling wave power performed when reflection occurs, and thus it is possible to supply a larger load power to the plasma processing apparatus 5 than in the conventional technique.
Therefore, plasma discharge is more likely to occur than in the conventional technique. As a result, even under the condition that plasma discharge does not occur immediately after the start of output of traveling wave power in the past, the use of the present invention facilitates plasma discharge immediately after start of output of traveling wave power. Therefore, it is possible to reduce the processing time of the work. In addition, it is possible to prevent the quality of the work from being deteriorated and prevent defective machining. Further, it is possible to improve the yield due to work quality deterioration, processing defects, and the like.

Furthermore, if plasma discharge is not performed immediately after the output of traveling wave power is started, the impedance matching process may be wasted and the matching time may become longer as described above. However, when the present invention is used, the plasma discharge is likely to occur immediately after the output of the traveling wave power is started, so that the matching time can be shortened.

As described above, the high frequency power supply HP
When a permissible time from supply of electric power to the matching is set and the matching is not performed within the set allowable time, it is considered that the matching operation is abnormal and the machining process of the work may be interrupted. In the present invention, since the load power becomes larger than the conventional one during the relaxation time, the impedance matching can be performed within the allowable time even under the process condition where the impedance matching cannot be performed within the allowable time in the conventional technique. Can be expected. Further, in this case, the machining process of the work is not interrupted, and thus the machining time of the work can be shortened even in such a case. Further, it is possible to improve the yield due to work quality deterioration, processing defects, and the like.

Further, as described above, even after plasma discharge, reflection occurs when the plasma becomes unstable. In such a case, the conventional technology lacks the power for maintaining the plasma discharge immediately after the plasma discharge,
The plasma state is easily changed to the non-plasma state. However, if the suppression degree of the traveling wave power is reduced until the plasma discharge becomes stable by using the present invention, it becomes difficult to change from the plasma state to the non-plasma state. If the plasma discharge can be maintained to prevent the plasma state from changing to the non-plasma state, the machining of the work is not interrupted. Therefore, in such a case, the machining time of the work can be shortened. further,
It is possible to improve the yield due to work quality deterioration, processing defects, etc.

Further, according to the present invention, the current suppression relaxation threshold signal Vith1 is set as the current suppression threshold signal Vith from the start of the output of the traveling wave power PF until the relaxation time Etime elapses, and the output of the traveling wave power PF is output. After the relaxation time Etime elapses from the start, the current suppression reference threshold value signal Vith0 is set as the current suppression threshold value signal Vith, and the current detection threshold value signal Vith is changed according to the difference between the current detection signal value Vi and the current suppression threshold value signal value Vith. Changing current suppression signal Vi
Even if the traveling wave power is suppressed by using the sub, the junction temperature Tj of the amplification element can be prevented from exceeding the absolute maximum rated temperature Tjmax as shown by the temperature rise curve of the present invention in FIG. In addition, the traveling wave power is suppressed using the power suppression signal Vsub, or the current suppression signal Visub is used.
It is possible not only to suppress the traveling wave power by using, but also to suppress the traveling wave power by combining the two. It is needless to say that the same effects as the above-described effects can be obtained even with these configurations.

Further, in the present invention, the relaxation time (Eit
(ime, Etime) and the power suppression relaxation threshold signal Vth1 and the current suppression relaxation threshold signal Vith1 can be freely determined, so that optimum control can be performed according to the conditions used.

[Brief description of drawings]

FIG. 1 is a diagram best representing the features of the invention according to the present application.

FIG. 2 is a block diagram showing an example of a high frequency power supply device HP and its peripheral devices.

FIG. 3 is a block diagram showing a configuration of a conventional high-frequency power supply device HP1.

FIG. 4 is a block diagram showing a configuration of a conventional high frequency power supply device HP2.

FIG. 5 is a circuit diagram of a reflection protection circuit PRTp having a fixed threshold value according to a conventional technique.

FIG. 6 is a circuit configuration diagram of an output setting arithmetic circuit CAL.

FIG. 7 shows a high frequency power supply device HP11 according to the present invention.
3 is a block diagram showing the configuration of FIG.

FIG. 8 is a high frequency power supply device HP21 of the present invention.
3 is a block diagram showing the configuration of FIG.

FIG. 9 is a circuit diagram showing an example of a reflection protection circuit PRT of the present invention.

FIG. 10 is a comparison diagram of temperature rise curves from the start of traveling wave power output at the junction temperature Tj in the case of using the conventional technique and the present invention under the same conditions.

11 is a circuit configuration diagram showing a first embodiment of the power suppression threshold value switching circuit CH shown in FIG.

FIG. 12 is a time chart when the power suppression threshold switching circuit CH shown in FIG. 11 is used.

13 is a circuit configuration diagram showing a second embodiment of the power suppression threshold value switching circuit CH shown in FIG.

FIG. 14 is a time chart when the power suppression threshold value switching circuit CH shown in FIG. 13 is used.

15 is a circuit configuration diagram showing a third embodiment of the power suppression threshold value switching circuit CH shown in FIG.

FIG. 16 is a time chart when the circuit shown in FIG. 15 is used.

FIG. 17 is a circuit configuration diagram showing a fourth embodiment of the power suppression threshold value switching circuit CH shown in FIG. 9.

FIG. 18 is a time chart when the circuit shown in FIG. 17 is used.

FIG. 19 is a configuration diagram when the reflection protection circuit PRT is configured by a microcomputer and software.

FIG. 20 is a first flowchart in the case where the reflection protection circuit PRT is composed of a microcomputer and software.

FIG. 21 is a second flowchart in the case where the reflection protection circuit PRT is composed of a microcomputer and software.

FIG. 22 is a third flowchart in the case where the reflection protection circuit PRT is composed of a microcomputer and software.

23 is a high-frequency power supply device H shown in FIG.
It is a block diagram which shows the structure of the high frequency power supply device HP12 of this invention which added the current detector IDET and the current protection circuit IPRT to the block diagram which shows the structure of P11.

FIG. 24 is a circuit diagram showing an example of a current protection circuit IPRT.

FIG. 25 is a high frequency power supply device H shown in FIG.
It is a block diagram which shows the structure of the high frequency power supply device HP22 of this invention which added the current detector IDET and the current protection circuit IPRT to the block diagram which shows the structure of P21.

FIG. 26 is a block diagram showing the configuration of the high frequency power supply device HP12 shown in FIG.
It is a block diagram of high frequency power supply HP13 which removed T.

27 is a block diagram showing the configuration of the high frequency power supply device HP22 shown in FIG. 25, showing a reflection protection circuit PR.
It is a block diagram of high frequency power supply HP23 which removed T.

[Explanation of symbols]

HP High Frequency Power Supply Device HP1 (Conventional DC Voltage Input Type) High Frequency Power Supply Device (FIG. 3) HP2 (Conventional Variable DC Voltage Input Type) High Frequency Power Device (FIG. 4) HP11 (Constant DC Voltage Input Device of the Present Invention) Reflection protection type high frequency power supply device (Fig. 7) HP21 (variable DC voltage input / reflection protection type of the present invention) high frequency power supply device (Fig. 8) HP12 (constant DC voltage input / reflection and current protection type of the present invention) high frequency power supply Device (FIG. 23) HP22 (variable DC voltage input / reflection and current protection type of the present invention) high frequency power supply device (FIG. 25) HP13 (constant DC voltage input / current protection type of the present invention) high frequency power supply device (FIG. 26) HP23 (Variable DC voltage input / current protection type of the present invention) high frequency power supply device (FIG. 27) 2 power transmission line 3 matching device 4 power transmission line 5 plasma processing device Zo output impedance Z L load side impedance AC1 high frequency voltage / high frequency signal AC2 high frequency voltage / high frequency signal ADD1 power suppression signal output circuit CAL output setting arithmetic circuit CH power suppression threshold switching circuit DC1 output voltage / output voltage value DC2 output voltage / output voltage value DET (Traveling wave / reflected wave) power detector DETf traveling wave power detector DPS1 (constant voltage output) DC power supply circuit DPS2 (variable voltage output) DC power supply circuit Etime relaxation time / current protection relaxation time Etime relaxation time / reflection protection Relaxation time IADD1 Current suppression signal output circuit ICH Current suppression threshold switching circuit IDET Current detector IPRT Current protection circuit ISW Current switch circuit ITH0 Current suppression reference threshold setting circuit ITH1 Current suppression relaxation threshold setting circuit ITM Current Timer circuit PCON power Control means PF Traveling wave power / traveling wave power value POUT Power output means PR Reflected wave power / reflected wave power value PRT Reflection protection circuit PRTp (of the present invention) for switching threshold (reflection of prior art) Reflection of fixed threshold Protection circuit SET Output power setting circuit ST Output start signal output circuit SW Power switching circuit TH0 Power suppression reference threshold setting circuit TH1 Power suppression relaxation threshold setting circuit TM Power timer circuit Vch Power suppression threshold switching signal / Power Suppression Threshold Switching Signal Value Vcont Power Control Signal / Power Control Signal Value Vi Current Detection Signal / Current Detection Signal Value Vich Current Suppression Threshold Switching Signal / Current Suppression Threshold Switching Signal Value Visub Current Suppression Signal / Current Suppression Signal value Vith current suppression threshold signal / current suppression threshold signal value Vith0 current suppression reference threshold Signal / current suppression reference threshold signal value Vith1 Current suppression relaxation threshold signal / current suppression relaxation threshold signal value Vpf Traveling wave power detection signal / traveling wave power detection signal value Vpr Reflected wave power detection signal / reflected wave power Detection signal value Vset Traveling wave power setting signal / traveling wave power setting signal value Vst Output start signal / Output start signal Vsub Power suppression signal / Power suppression signal value Vth Power suppression threshold signal / Power suppression threshold signal value Vth0 Power Suppression reference threshold signal / power suppression reference threshold signal value Vth1 Power suppression relaxation threshold signal / power suppression relaxation threshold signal value Vti (for current protection) power target value signal / (for current protection) power target Value signal value Vtp (for reflection protection) power target value signal / (for reflection protection) power target value signal value Vtpi (for reflection / current protection) power target value signal /
Power target value (for reflection / current protection) Signal value

Continued front page    F term (reference) 5J091 AA01 AA41 CA02 CA57 FA01                       HA09 HA19 HA25 HA29 HA38                       KA00 KA01 KA28 KA32 KA34                       KA47 MA11 MA21 SA00 TA01                       TA06 TA07                 5J100 JA01 LA00 LA10 LA11 LA12                       QA02 SA00                 5J500 AA01 AA41 AC02 AC57 AF01                       AH09 AH19 AH25 AH29 AH38                       AK00 AK01 AK28 AK32 AK34                       AK47 AM11 AM21 AS00 AT01                       AT06 AT07

Claims (28)

[Claims] 1. A traveling-wave power control method for a high-frequency power source, wherein a traveling-wave power value amplified and output by a power amplifier circuit is controlled so as to reach a power target value. Until the relaxation time elapses, the traveling wave power value is controlled so that the junction temperature of the amplification element of the power amplification circuit becomes a power target value that allows the absolute maximum rated temperature to be exceeded, and the relaxation time elapses. After that, the traveling wave power control method of the high frequency power source, which controls the traveling wave power value so that the junction temperature of the amplification element of the power amplification circuit becomes a power target value that makes the absolute maximum rated temperature or less. 2. A traveling-wave power control method for a high-frequency power source, wherein the traveling-wave power value amplified and output by a power amplifier circuit is controlled so as to reach a power target value. The traveling wave power value is controlled so that the junction temperature of the amplification element of the circuit is a power target value that allows the junction temperature to exceed the absolute maximum rated temperature, and the junction temperature of the amplification element is controlled before the junction temperature exceeds the absolute maximum rated temperature. A traveling-wave power control method for a high-frequency power source, wherein the traveling-wave power value is controlled so as to reach a power target value that makes a junction temperature of an amplification element of a power amplification circuit equal to or lower than an absolute maximum rated temperature. 3. A traveling-wave power control method for a high-frequency power source, wherein the traveling-wave power value amplified and output by a power amplification circuit is controlled to reach a power target value. Until the junction temperature of the amplification element of the circuit reaches the absolute maximum rated temperature, the traveling wave power value is adjusted so that the junction temperature of the amplification element of the power amplification circuit becomes a power target value that allows the junction temperature to exceed the absolute maximum rated temperature. When the junction temperature reaches the absolute maximum rated temperature, the high frequency that controls the traveling wave power value to a power target value that controls the junction temperature of the amplification element of the power amplification circuit to be equal to or less than the absolute maximum rated temperature. Traveling wave power control method for power supply. 4. A traveling wave power value output from a high frequency power supply device in a traveling wave power control method for a high frequency power source, wherein a traveling wave power value amplified and output by a power amplifier circuit is controlled to a power target value. Of the traveling wave power detection signal and the reflected wave power detection signal detecting the reflected wave power value reflected and input to the high frequency power supply device, and a predetermined relaxation from the start of the traveling wave power output. Until time passes, the power suppression mitigation threshold signal used to obtain a signal value corresponding to a power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature is power suppressed. It corresponds to the suppression relaxation threshold value setting process as a threshold signal and a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature after the relaxation time elapses. Using a reference threshold value setting process of the power suppression reference threshold signal used as a power suppression threshold signal to determine the signal value, and the reflected wave power detection signal and the power suppression threshold signal A power suppression signal calculation process for calculating a power suppression signal for suppressing the traveling wave power value, and a power target value using the traveling wave power setting signal corresponding to the setting value of the traveling wave power value and the power suppression signal A power target value signal calculation process for calculating a signal, and a power control signal calculation process for calculating a power control signal using the power target value signal and a traveling wave power detection signal, the traveling wave according to the power control signal. A traveling-wave power control method for a high-frequency power source, which controls a power value to reach a power target value. 5. A traveling-wave power control method for a high-frequency power source, wherein the traveling-wave power value amplified and output by a power amplification circuit is controlled to reach a power target value. A power detection step of outputting a traveling wave power detection signal and a reflected wave power detection signal that detects a reflected wave power value reflected and input to the high frequency power supply device, and a predetermined reflection from the start of output of the traveling wave power. A power suppression relaxation threshold signal used for obtaining a signal value corresponding to a power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature until the protection relaxation time elapses. With the power suppression threshold signal, from the start of output of the traveling wave power until the predetermined relaxation time for current protection elapses of the amplification element of the power amplification circuit. A suppression relaxation threshold setting process using the current suppression threshold signal as a current suppression threshold signal used to obtain a signal value corresponding to a power target value that allows the junction temperature to exceed the absolute maximum rated temperature. , After the relaxation time for reflection protection elapses, a power suppression threshold value signal used to obtain a signal value corresponding to a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature. In addition, after the relaxation time for current protection elapses, the current suppression reference threshold signal used for obtaining a signal value corresponding to a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature is current suppressed. A traveling wave power value is suppressed by using a reference threshold value setting process for setting a threshold value signal and the reflected wave power detection signal and the power suppression threshold value signal. A power suppression signal calculation process for calculating a power suppression signal for use in the power amplification circuit, and a current detection signal corresponding to a current value output from a power supply source for amplification in the power amplification circuit and the current suppression threshold signal. A current suppression signal calculation process for calculating a current suppression signal for suppressing the traveling wave power value, a traveling wave power setting signal corresponding to the set value of the traveling wave power value, the power suppression signal, and the current suppression signal. A power target value signal calculation step for calculating a power target value signal using the power target value signal, and a power control signal calculation step for calculating a power control signal using the power target value signal and the traveling wave power detection signal. A traveling-wave power control method for a high-frequency power source, which controls the traveling-wave power value to a power target value by a signal. 6. A traveling-wave power control method for a high-frequency power supply, wherein the traveling-wave power value amplified and output by a power amplifier circuit is controlled to reach a power target value. The power detection process of outputting the traveling wave power detection signal, and the junction temperature of the amplification element of the power amplification circuit is the absolute maximum rated temperature from the start of the output of the traveling wave power until a predetermined relaxation time elapses. A suppression relaxation threshold setting process using a current suppression relaxation threshold signal as a current suppression threshold signal, which is used to obtain a signal value corresponding to a power target value that is allowed to exceed
After the relaxation time has elapsed, the current suppression reference threshold signal used as a reference value for determining the signal value corresponding to the electric power target value for making the junction temperature equal to or lower than the absolute maximum rated temperature is used as the current suppression threshold signal. A threshold value setting step and a current detection signal corresponding to a current value output by a power supply source for amplification in the power amplification circuit and the current suppression threshold value signal for suppressing the traveling wave power value. A current suppression signal calculation process for calculating a current suppression signal, and a power target value signal calculation for calculating a power target value signal using the traveling wave power setting signal corresponding to the set value of the traveling wave power value and the current suppression signal And a power control signal calculation step of calculating a power control signal using the power target value signal and the traveling wave power detection signal, wherein the traveling wave power value is changed by the power control signal. Forward power control method of the high frequency power source be controlled to be force target value. 7. The suppression relaxation threshold setting process according to claim 4, wherein a signal value corresponding to a power target value that allows the junction temperature to exceed an absolute maximum rated temperature at the start of output of traveling wave power. Is a suppression relaxation threshold setting process in which the power suppression relaxation threshold signal used to obtain the power suppression threshold signal is a power suppression threshold threshold signal, and the reference threshold setting process is such that the junction temperature of the amplification element is the absolute maximum rated temperature. Reference threshold value setting process using a power suppression threshold signal as a power suppression threshold signal used to obtain a signal value corresponding to a power target value that makes the junction temperature less than or equal to the absolute maximum rated temperature before exceeding A traveling wave power control method for a high frequency power supply. 8. The suppression relaxation threshold setting process according to claim 5, wherein a signal value corresponding to a power target value that allows the junction temperature to exceed an absolute maximum rated temperature at the start of output of traveling wave power. Is a process of setting a power suppression threshold value signal and a current power suppression threshold signal used as a power suppression threshold signal and a current power suppression threshold signal. The setting process is
A power suppression reference threshold signal and a current suppression reference used to obtain a signal value corresponding to a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature before the junction temperature of the amplification element exceeds the absolute maximum rated temperature. A traveling-wave power control method for a high-frequency power source, which is a reference threshold setting process using a threshold signal as a power suppression threshold signal and a current suppression threshold signal. 9. The signal value corresponding to a power target value that allows the junction temperature to exceed an absolute maximum rated temperature at the start of output of traveling wave power in the suppression relaxation threshold setting process according to claim 6. Is a suppression relaxation threshold setting process in which the current suppression relaxation threshold signal used to obtain the current suppression threshold signal is a reference suppression threshold setting process, in which the junction temperature of the amplification element is an absolute maximum rated temperature. Reference threshold setting process using a current suppression threshold signal as a current suppression threshold signal used to obtain a signal value corresponding to a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature before exceeding A traveling wave power control method for a high frequency power supply. 10. The process of setting the suppression relaxation threshold value according to claim 4, wherein the junction temperature from the start of output of traveling wave power until the junction temperature of an amplification element of the power amplification circuit reaches an absolute maximum rated temperature. Is a suppression relaxation threshold setting process in which the power suppression threshold signal is a power suppression relaxation threshold signal used to obtain a signal value corresponding to the power target value that is allowed to exceed the absolute maximum rated temperature, In the reference threshold setting process, when the junction temperature reaches the absolute maximum rated temperature, the power suppression reference threshold used to obtain the signal value corresponding to the power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature. A traveling wave power control method for a high frequency power supply, which is a process of setting a reference threshold value using a value signal as a power suppression threshold signal. 11. The step of setting the suppression relaxation threshold according to claim 5, wherein the junction temperature of the amplifying element of the power amplification circuit reaches the absolute maximum rated temperature from the start of output of traveling wave power. The power suppression threshold signal and the current suppression relaxation threshold signal used to obtain the signal value corresponding to the power target value that is allowed to exceed the absolute maximum rated temperature. In the process of setting the threshold value for suppression and mitigation as a threshold signal, the reference threshold value setting process, when the junction temperature reaches the absolute maximum rated temperature, the electric power target value that makes the junction temperature below the absolute maximum rated temperature. Power suppression reference threshold signal and current suppression reference threshold signal used to obtain a signal value corresponding to A traveling-wave power control method for a high-frequency power source, which is a process of setting a reference threshold value as a threshold signal. 12. The step of setting the suppression relaxation threshold according to claim 6, wherein the junction temperature of the amplifying element of the power amplification circuit reaches the absolute maximum rated temperature from the start of output of traveling wave power. Is a suppression relaxation threshold setting process in which the current suppression threshold signal is a current suppression relaxation threshold signal used to obtain a signal value corresponding to the power target value that is allowed to exceed the absolute maximum rated temperature, In the reference threshold setting process, when the junction temperature reaches the absolute maximum rated temperature, the current suppression reference threshold used to obtain the signal value corresponding to the electric power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature. A traveling wave power control method for a high frequency power supply, which is a process of setting a reference threshold value using a value signal as a current suppression threshold signal. 13. The power suppression mitigation threshold signal value according to claim 4, claim 5, claim 7, claim 8, claim 10, or claim 11, when the output of traveling wave power starts. A traveling-wave power control method for a high-frequency power supply, which is constant until the suppression reference threshold signal becomes the power suppression threshold signal. 14. The current suppression relaxation threshold signal value according to claim 5, claim 6, claim 8, claim 9, claim 11, or claim 12, from the start of output of traveling wave power to the current. A traveling-wave power control method for a high-frequency power source, which is constant until the suppression reference threshold signal becomes a current suppression threshold signal. 15. The power suppression mitigation threshold signal value according to claim 4, claim 5, claim 7, claim 8, claim 10, or claim 11, the power from the start of output of traveling wave power. A traveling-wave power control method for a high-frequency power supply, which is not constant until the suppression reference threshold signal becomes the power suppression threshold signal. 16. The current suppression relaxation threshold signal value according to claim 5, claim 6 or claim 8, claim 9 or claim 11 or claim 12, when the output of traveling wave power starts. A traveling-wave power control method for a high-frequency power supply, which is not constant until the suppression reference threshold signal becomes the current suppression threshold signal. 17. In a high frequency power supply device for controlling the traveling wave power value amplified and output by a power amplifier circuit so as to reach a power target value, the traveling wave power value output from the high frequency power supply device is detected. A power detector that outputs a reflected wave power detection signal that detects the reflected wave power value that is reflected and input to the power detection signal and the high frequency power supply device, and that the junction temperature of the amplification element of the power amplification circuit exceeds the absolute maximum rated temperature. Used to generate a power suppression relaxation threshold signal used to obtain a signal value corresponding to an allowable power target value, and to obtain a signal value corresponding to a power target value that makes the junction temperature below the absolute maximum rated temperature. The power suppression reference threshold signal is generated, and the power suppression relaxation threshold is maintained until a predetermined relaxation time elapses from the start of output of the traveling wave power. The value signal is used as the power suppression threshold signal, and after the relaxation time that has been set since the start of the output of the traveling wave power has elapsed, the power suppression reference threshold signal is used as the power suppression threshold signal and the progress is output. The power control signal for controlling the wave power value to be the power target value, the traveling wave power setting signal corresponding to the setting value of the traveling wave power value, the reflected wave power detection signal value, and the power suppression threshold signal A power control unit that obtains and outputs the power suppression signal and the traveling wave power detection signal that change according to the difference with the value, and controls the traveling wave power value by inputting the power control signal to reach the power target value. And a power output unit including the power amplifier circuit that outputs traveling wave power. 18. In a high frequency power supply device for controlling a traveling wave power value amplified and output by a power amplification circuit to be a power target value, a traveling wave power value detected from the high frequency power supply device is detected. A power detector that outputs a reflected wave power detection signal that detects the reflected wave power value that is reflected and input to the power detection signal and the high frequency power supply device, and the current value that the power supply source for amplification in the power amplification circuit outputs. The current detector that outputs the corresponding current detection signal and the power suppression mitigation used to obtain the signal value that corresponds to the power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature. A threshold value signal and a current suppression relaxation threshold signal are generated, and a signal value corresponding to a power target value for making the junction temperature below the absolute maximum rated temperature is obtained. Generating a power suppression reference threshold signal and a current suppression reference threshold signal used for the power suppression relaxation until the specified reflection protection relaxation time elapses from the start of the traveling wave power output. The threshold signal is the power suppression threshold signal, and after the relaxation time for reflection protection determined from the start of the output of the traveling wave power has elapsed, the power suppression reference threshold signal is the power suppression threshold signal. At the same time, from the start of the output of the traveling wave power until the predetermined relaxation time for current protection elapses, the current suppression relaxation threshold signal is the current suppression threshold signal, and when the output of the traveling wave power is started. After the relaxation time for current protection specified by, the current suppression reference threshold signal is used as the current suppression threshold signal, and the power for controlling the output traveling wave power value to reach the power target value. Control signal The traveling wave power setting signal corresponding to the setting value of the traveling wave power value and the power suppression signal and the current detection signal value that change according to the difference between the reflected wave power detection signal value and the power suppression threshold signal value A power control unit that obtains and outputs the current suppression signal and the traveling wave power detection signal that change according to the difference from the current suppression threshold signal value, and the traveling wave power value is the power target value when the power control signal is input. And a power output unit including the power amplifier circuit that outputs traveling wave power by controlling the power supply circuit to be a high frequency power supply device. 19. In a high frequency power supply device for controlling such that the traveling wave power value amplified and output by a power amplifier circuit becomes a power target value, the traveling wave power value output from the high frequency power supply device is detected. A traveling wave power detector that outputs a power detection signal, a current detector that outputs a current detection signal corresponding to a current value output by a power supply source for amplification in the power amplification circuit, and an amplification element of the power amplification circuit The power that generates the current suppression relaxation threshold signal used to obtain the signal value corresponding to the power target value that allowed the junction temperature of the absolute maximum rated temperature to exceed the absolute maximum rated temperature. A relaxation time determined from the start of output of the traveling wave power by generating a current suppression reference threshold signal used for obtaining a signal value corresponding to a target value. Until the lapse of time, the current suppression relaxation threshold signal is the current suppression threshold signal, and after the relaxation time defined from the start of output of the traveling wave power, the current suppression reference threshold signal is changed to A traveling wave power setting signal corresponding to the set value of the traveling wave power value and the current detection are used as a current suppression threshold signal, and a power control signal for controlling the output traveling wave power value to be the power target value. A power control unit that obtains and outputs the current suppression signal and the traveling wave power detection signal that change according to the difference between the signal value and the current suppression threshold signal value, and the traveling wave power value when the power control signal is input. A high-frequency power supply device comprising: a power output unit including the power amplification circuit that outputs traveling wave power by controlling the power to a target power value. 20. The power control means according to claim 17,
Generates a power suppression mitigation threshold signal used to obtain a signal value corresponding to a power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature, and the junction temperature is set to the absolute maximum. A power suppression reference threshold signal used to obtain a signal value corresponding to a power target value to be equal to or lower than the rated temperature is generated, and the power suppression relaxation threshold signal is power suppressed at the start of output of traveling wave power. As a threshold signal, the power suppression reference threshold signal is used as the power suppression threshold signal before the junction temperature of the amplification element exceeds the absolute maximum rated temperature, and the traveling wave power value to be output becomes the power target value. A power control signal for controlling the traveling wave power setting signal corresponding to the setting value of the traveling wave power value, the reflected wave power detection signal value, and the power suppression threshold signal High-frequency power supply device is a power control unit that determines and outputs the power suppression signal and the forward power detection signal which changes according to the difference between. 21. The power control means according to claim 18,
Generates a power suppression relaxation threshold signal and a current suppression relaxation threshold signal used to obtain a signal value corresponding to a power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature. Then, by generating a power suppression reference threshold signal and a current suppression reference threshold signal used for obtaining a signal value corresponding to a power target value for making the junction temperature equal to or lower than the absolute maximum rated temperature, the traveling wave power At the start of output, the power suppression threshold signal is set to the power suppression threshold signal, and the power suppression reference threshold signal is set to the power suppression threshold value before the junction temperature of the amplification element exceeds the absolute maximum rated temperature. In addition to the signal, at the start of output of traveling wave power, the current suppression relaxation threshold signal is set as the current suppression threshold signal, and the junction temperature of the amplification element is set. Before but more than the absolute maximum rated temperature,
The current suppression reference threshold signal is used as the current suppression threshold signal, and the power control signal for controlling the traveling wave power value to be output to be the power target value is a progress corresponding to the set value of the traveling wave power value. Wave power setting signal and a power suppression signal that changes according to the difference between the reflected wave power detection signal value and the power suppression threshold signal value, and according to the difference between the current detection signal value and the current suppression threshold signal value High-frequency power supply device which is a power control means for obtaining and outputting the current suppression signal and the traveling wave power detection signal which change according to the above. 22. The power control means according to claim 19,
Generates a current suppression relaxation threshold signal used to obtain a signal value corresponding to the power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature, and the junction temperature is set to the absolute maximum. Generate the current suppression reference threshold signal used to obtain the signal value corresponding to the power target value to make it the rated temperature or less, and suppress the current suppression relaxation threshold signal when the traveling wave power output starts. As a threshold signal, before the junction temperature of the amplification element exceeds the absolute maximum rated temperature, the current suppression reference threshold signal is used as the current suppression threshold signal so that the traveling wave power value to be output becomes the power target value. A power control signal for controlling the traveling wave power setting signal corresponding to the setting value of the traveling wave power value and the current detection signal value and the current suppression threshold signal value High-frequency power supply device is a power control unit that determines and outputs the current suppression signal and the traveling wave power detection signal which varies depending on. 23. The power control means according to claim 17,
Generates a power suppression mitigation threshold signal used to obtain a signal value corresponding to a power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature, and the junction temperature is set to the absolute maximum. Generate a power suppression reference threshold signal that is used to obtain a signal value corresponding to the power target value that is less than or equal to the rated temperature, until the junction temperature reaches the absolute maximum rated temperature from the start of traveling wave power output. , The power suppression relaxation threshold signal is used as a power suppression threshold signal, and when the junction temperature reaches an absolute maximum rated temperature, the power suppression reference threshold signal is used as a power suppression threshold signal and output A power control signal for controlling the traveling wave power value to reach the target power value is a traveling wave power setting signal corresponding to the setting value of the traveling wave power value. And the reflected wave power detected signal value and the high frequency power supply device is a power control unit that determines and outputs the power suppression signal and the forward power detection signal which changes according to the difference between the power suppression threshold signal value. 24. The power control means according to claim 18,
Generates a power suppression relaxation threshold signal and a current suppression relaxation threshold signal used to obtain a signal value corresponding to a power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature. Then, by generating a power suppression reference threshold signal and a current suppression reference threshold signal used for obtaining a signal value corresponding to a power target value for making the junction temperature equal to or lower than the absolute maximum rated temperature, the traveling wave power From the start of output until the junction temperature of the amplification element of the power amplification circuit reaches the absolute maximum rated temperature, the power suppression relaxation threshold signal is used as the power suppression threshold signal, and the junction temperature reaches the absolute maximum rated temperature. The power suppression reference threshold signal is set as the power suppression threshold signal, and the power is increased from the start of the traveling wave power output. Until the junction temperature of the amplifying element of the circuit reaches the absolute maximum rated temperature, the current suppression relaxation threshold signal is used as the current suppression threshold signal, and when the junction temperature reaches the absolute maximum rated temperature, the current suppression reference A traveling wave power setting corresponding to the set value of the traveling wave power value is set as a power control signal for controlling the traveling wave power value to be a power target value by using the threshold signal as a current suppression threshold signal. A signal and a power suppression signal that changes according to the difference between the reflected wave power detection signal value and the power suppression threshold signal value, and a power suppression signal that changes according to the difference between the current detection signal value and the current suppression threshold signal value A high frequency power supply device, which is a power control means for obtaining and outputting the current suppression signal and the traveling wave power detection signal. 25. The power control means according to claim 19,
Generates a current suppression relaxation threshold signal used to obtain a signal value corresponding to the power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature, and the junction temperature is set to the absolute maximum. By generating a current suppression reference threshold signal used to obtain a signal value corresponding to a power target value to be equal to or lower than the rated temperature, the junction temperature of the amplification element of the power amplification circuit is absolute from the start of output of traveling wave power. The current suppression threshold signal is used as the current suppression threshold signal until the maximum rated temperature is reached, and the current suppression reference threshold signal is used as the current suppression threshold when the junction temperature reaches the absolute maximum rated temperature. Value signal, and the power control signal for controlling the output traveling wave power value to reach the power target value corresponds to the setting value of the traveling wave power value. High-frequency power supply device, which is a power control means for obtaining and outputting the traveling wave power setting signal and the current suppression signal and traveling wave power detection signal that change according to the difference between the current detection signal value and the current suppression threshold signal value. . 26. The power control means according to claim 17,
An output power setting circuit that outputs a traveling wave power setting signal corresponding to the setting value of the traveling wave power value to be output, and an output of a predetermined value that is different from when the traveling wave power is output Output suppression signal output circuit that outputs a signal and the power suppression mitigation threshold used to obtain the signal value corresponding to the power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature A signal is generated, and a power suppression reference threshold signal used to obtain a signal value corresponding to a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature is generated, and the output start signal is input. The time when the output start signal reaches a predetermined value is the start time of the output of the traveling wave power, and the predetermined relaxation time elapses from the start of the output of the traveling wave power. The power suppression mitigation threshold signal is used as the power suppression threshold signal, and the power suppression reference threshold signal is used as the power suppression threshold signal after the relaxation time has elapsed from the start of output of the traveling wave power, and the reflection A reflection protection circuit that outputs a power suppression signal that changes according to the difference between the wave power detection signal value and the power suppression threshold signal value; and the traveling wave power setting signal, the power suppression signal, and the traveling wave power detection signal. A high-frequency power supply device comprising: an output setting arithmetic circuit that outputs a power control signal for controlling the input and output traveling wave power value to be a power target value. 27. The power control means according to claim 18,
An output power setting circuit that outputs a traveling wave power setting signal corresponding to the setting value of the traveling wave power value to be output, and an output of a predetermined value that is different from when the traveling wave power is output Output suppression signal output circuit that outputs a signal and the power suppression mitigation threshold used to obtain the signal value corresponding to the power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature A signal is generated, and a power suppression reference threshold signal used to obtain a signal value corresponding to a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature is generated, and the output start signal is input. When the output start signal reaches a predetermined value, the output of the traveling wave power is started, and the relaxation time for reflection protection determined from the start of the output of the traveling wave power elapses. Until the power suppression mitigation threshold signal is used as the power suppression threshold signal, and the power suppression reference threshold signal is power suppressed after the relaxation time for reflection protection elapses from the start of output of the traveling wave power. The value of the reflection protection circuit that outputs a power suppression signal that changes according to the difference between the reflected wave power detection signal value and the power suppression threshold signal value, and the absolute maximum junction temperature of the amplification element of the power amplification circuit. A signal corresponding to a power target value that generates a current suppression relaxation threshold signal used to obtain a signal value corresponding to a power target value that is allowed to exceed the rated temperature, and makes the junction temperature equal to or lower than the absolute maximum rated temperature. The current suppression reference threshold signal used to obtain the value is generated, and the output start signal is input, and when the output start signal reaches a predetermined value, the traveling wave signal is output. When the output of the traveling wave power is started, the current suppression relaxation threshold signal is used as the current suppression threshold signal until the predetermined current protection relaxation time elapses from the start of the output of the traveling wave power, and the output of the traveling wave power is output. After the relaxation time for current protection elapses from the start, the current suppression reference threshold signal is used as the current suppression threshold signal, and changes according to the difference between the current detection signal value and the current suppression threshold signal value. A current protection circuit that outputs a current suppression signal, and the traveling wave power setting signal, the power suppression signal, the current suppression signal, and the traveling wave power detection signal are input, and the traveling wave power value to be output becomes the power target value. High-frequency power supply device comprising an output setting arithmetic circuit that outputs a power control signal for control. 28. The power control means according to claim 19,
An output power setting circuit that outputs a traveling wave power setting signal corresponding to the setting value of the traveling wave power value to be output, and an output of a predetermined value that is different from when the traveling wave power is output Output suppression signal output circuit that outputs a signal and the current suppression mitigation threshold used to obtain the signal value corresponding to the power target value that allows the junction temperature of the amplification element of the power amplification circuit to exceed the absolute maximum rated temperature A signal is generated to generate a current suppression reference threshold signal used to obtain a signal value corresponding to a power target value that makes the junction temperature equal to or lower than the absolute maximum rated temperature, and the output start signal is input, The time when the output start signal reaches a predetermined value is the start time of the output of the traveling wave power, and the predetermined relaxation time elapses from the start time of the output of the traveling wave power. A current suppression threshold signal is a current suppression threshold signal, and a current suppression reference threshold signal is a current suppression threshold signal after a relaxation time has elapsed from the start of output of the traveling wave power, and the current A current protection circuit that outputs a current suppression signal that changes according to the difference between the detection signal value and the current suppression threshold signal value, and the traveling wave power setting signal, the current suppression signal, and the traveling wave power detection signal are input. And an output setting arithmetic circuit for outputting a power control signal for controlling the output traveling wave power value to reach the power target value.