JP2003214976A - Liquid leakage sensor - Google Patents
Liquid leakage sensorInfo
- Publication number
- JP2003214976A JP2003214976A JP2002012781A JP2002012781A JP2003214976A JP 2003214976 A JP2003214976 A JP 2003214976A JP 2002012781 A JP2002012781 A JP 2002012781A JP 2002012781 A JP2002012781 A JP 2002012781A JP 2003214976 A JP2003214976 A JP 2003214976A
- Authority
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- Japan
- Prior art keywords
- light
- detection unit
- reflected
- unit
- liquid leakage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Examining Or Testing Airtightness (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は漏液センサ、特にそ
の外れ検知機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a leak sensor, and more particularly to a detachment detecting mechanism therefor.
【0002】[0002]
【従来の技術】工場施設、その他の諸施設において、例
えば送液配管の継手等からの漏液は、例えば災害の原
因、施設等の汚染、液の浪費等となるので、その発生を
早期に検知する必要がある。このため、従来より、例え
ば載置体の底部を所定の屈折率を持つ検知部として用い
た光学式の漏液センサが用いられている。2. Description of the Related Art In factory facilities and other facilities, for example, liquid leakage from joints of liquid supply pipes causes causes of disasters, pollution of facilities, and waste of liquids. Need to detect. Therefore, conventionally, for example, an optical liquid leakage sensor has been used in which the bottom portion of the mounting body is used as a detection portion having a predetermined refractive index.
【0003】前記漏液センサは、図6に示すように所定
屈折率の載置体10と、前記載置体10の内側に配置さ
れた投光部12及び受光部14を備える。前記載置体1
0は、検知部(露出面)16の内外壁面が三角形に形成
され、該三角形の頂点が、例えば送液配管の継手等の下
方の、漏液パン(センサ載置面)18に対向配置され
る。As shown in FIG. 6, the liquid leakage sensor includes a mounting body 10 having a predetermined refractive index, and a light projecting portion 12 and a light receiving portion 14 arranged inside the mounting body 10. Pre-recorded body 1
In No. 0, the inner and outer wall surfaces of the detection unit (exposed surface) 16 are formed in a triangular shape, and the apexes of the triangular shape are arranged so as to face the liquid leakage pan (sensor mounting surface) 18 below the joint of the liquid supply pipe, for example. It
【0004】そして、前記投光部12より載置体内壁面
に照射された光20は、検知部16と外部との境界面で
反射され、該反射光22を受光部14にて検出し、該受
光部14による受光量変化に基づき漏液検知を行う。The light 20 emitted from the light projecting unit 12 to the wall surface inside the mounting body is reflected at the boundary surface between the detecting unit 16 and the outside, and the reflected light 22 is detected by the light receiving unit 14, Liquid leakage is detected based on the change in the amount of light received by the light receiving unit 14.
【0005】すなわち、検知部16に液が付着していな
い非漏液状態では、検知部16の屈折率と外部(空気)
の屈折率との差が大きいので、検知部16と外部との境
界面での反射率が高い。このため、投光部12より検知
部16に照射された光20の大部分は、検知部16と外
部との境界面で反射され、該反射光22が受光部14に
て検出される。That is, in the non-leakage state in which the liquid does not adhere to the detection unit 16, the refractive index of the detection unit 16 and the outside (air)
Since the difference between the refractive index and the refractive index is large, the reflectance at the boundary surface between the detection unit 16 and the outside is high. Therefore, most of the light 20 emitted from the light projecting unit 12 to the detecting unit 16 is reflected by the boundary surface between the detecting unit 16 and the outside, and the reflected light 22 is detected by the light receiving unit 14.
【0006】一方、検知部16に液が付着している漏液
状態では、非漏液状態に比較し検知部16の屈折率と外
部(液)の屈折率の差が小さくなるので、検知部16と
外部との境界面での反射率が低くなる。このため、投光
部12より検知部16に照射された光20の一部は、該
検知部16と外部との境界面で反射されるが、該反射光
に比較し外部への透過(漏れ)光の割合が多くなる。こ
れにより受光部14にて検出される反射光量は、前記非
漏液状態に比較して減少するので、これを漏液状態とし
て検出する。On the other hand, in the leaked state in which the liquid adheres to the detection unit 16, the difference between the refractive index of the detection unit 16 and the refractive index of the outside (liquid) becomes smaller than that in the non-leakage state, so that the detection unit. The reflectance at the interface between 16 and the outside becomes low. Therefore, a part of the light 20 emitted from the light projecting unit 12 to the detection unit 16 is reflected at the boundary surface between the detection unit 16 and the outside, but is transmitted to the outside (leakage) as compared with the reflected light. ) The proportion of light increases. As a result, the amount of reflected light detected by the light receiving unit 14 is reduced as compared with the non-leakage state, and this is detected as the liquid leakage state.
【0007】ところで、漏液センサは、検出後に検知部
16に付着した液を布等で拭き取るメンテナンスを行う
必要がある。検知部16は漏液パン18に対向している
ので、漏液パン18に検知部16を固定してしまうと、
前記検出後のメンテナンスは困難となる。By the way, the liquid leakage sensor needs to be maintained by wiping off the liquid adhering to the detecting portion 16 with a cloth after the detection. Since the detection unit 16 faces the liquid leakage pan 18, if the detection unit 16 is fixed to the liquid leakage pan 18,
Maintenance after the detection becomes difficult.
【0008】そこで、最近は、メンテナンスを容易に行
うための取付具を漏液パンに固定し、前記取付具に対し
検知部16を着脱自在に設けることが考えられる。これ
により監視中は取付具に検知部16を取付け、検出後の
メンテナンス時は検知部16を取付具より取外せるの
で、前記メンテナンス性が向上される。Therefore, it is conceivable that a fitting for facilitating maintenance is fixed to the liquid leakage pan and the detector 16 is detachably provided on the fitting. As a result, the detector 16 can be attached to the fixture during monitoring, and the detector 16 can be removed from the fixture during maintenance after detection, which improves the maintainability.
【0009】[0009]
【発明が解決しようとする課題】しかしながら、取付具
に対し検知部を着脱自在に設けると、メンテナンス性は
優れるものの、監視中に検知部が取付具から外れる可能
性があるので、漏液の監視が適正に行えないことがあ
る。このため、取付具に対し検知部を着脱自在に設ける
タイプでは、検知部の外れ検知を行うことが必要であ
る。従来は、検知部に対し別途、一般的な電気式等の外
れセンサを設けることが考えられる。However, if the detector is detachably provided to the fixture, the detector is likely to come off from the fixture during monitoring although the maintainability is excellent. May not be performed properly. For this reason, in the type in which the detector is detachably attached to the fixture, it is necessary to detect the detachment of the detector. Conventionally, it is conceivable to separately provide a general electric type detachment sensor for the detection unit.
【0010】しかしながら、漏液検知用の検知部の載置
スペースは非常に狭いので、その小型化が求められ、ま
た引火性の漏液に対する防爆性が求められる。このた
め、漏液センサでは、検知部に対し別途、前記外れセン
サを設けていたのでは、大型化し、また防爆性を損なう
可能性があるので、前記解決手段として採用するには至
らず、正確な外れ検知が、小型な構成で行える技術の開
発が急務であった。However, since the space for mounting the detector for detecting liquid leakage is very narrow, downsizing is required, and explosion-proof property against flammable liquid leakage is also required. For this reason, in the leak sensor, if the detachment sensor is provided separately for the detection unit, it may increase in size and impair the explosion-proof property. There was an urgent need to develop a technology that can detect large deviations with a small configuration.
【0011】これまで、検知部の載置状態を検知し、異
常な載置状態を防ぐ技術として、例えば特開平9−72
820号公報等に示される技術も存在するが、より確実
な手段を用いて安定した載置異常を検知することが求め
られている。本発明は前記従来技術の課題に鑑みなされ
たものであり、その目的は小型な構成で正確な外れ検知
も行える漏液センサを提供することにある。Up to now, as a technique for detecting the mounting state of the detecting portion and preventing an abnormal mounting state, for example, Japanese Patent Laid-Open No. 9-72 is proposed.
Although the technique disclosed in Japanese Patent Publication No. 820 and the like exists, it is required to detect a stable mounting abnormality by using a more reliable means. The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to provide a liquid leakage sensor having a small configuration and capable of accurately detecting deviation.
【0012】[0012]
【課題を解決するための手段】前記目的を達成するため
に本発明にかかる漏液センサは、検知部と、投光部と、
受光部と、を備え、前記投光部より前記検知部の斜面よ
りなる側壁に照射された光は、該検知部側壁と外部との
境界面で反射され、該反射光を受光部にて検出し、前記
受光部による受光量変化に基づき漏液検知を行い、かつ
該投光部より前記検知部平頭面に照射された光は、該検
知部の正常載置状態で、前記センサ載置面で反射され、
該反射光を受光部にて検出し、該受光部による受光量変
化に基づき該検知部の載置状態検知を行うことを特徴と
する。In order to achieve the above-mentioned object, a liquid leakage sensor according to the present invention comprises a detecting section, a light projecting section,
The light emitted from the light emitting unit to the side wall formed by the slope of the detection unit is reflected by the boundary surface between the side wall of the detection unit and the outside, and the reflected light is detected by the light receiving unit. Then, the liquid leakage is detected based on the change in the amount of light received by the light receiving unit, and the light emitted from the light projecting unit to the flat head surface of the detecting unit is the sensor mounting surface in the normal mounting state of the detecting unit. Is reflected by
It is characterized in that the reflected light is detected by the light receiving unit, and the mounting state of the detection unit is detected based on a change in the amount of light received by the light receiving unit.
【0013】ここで、前記検知部は、外壁面が平頭な錘
状に形成され、正常載置状態で、該平頭面がセンサ載置
面に対し平行に載置される所定屈折率を持つ検知部とす
る。また前記投光部は、前記検知部に光を照射する。前
記受光部は、前記投光部により照射され、該検知部と外
部との境界面で反射された光を受光する。Here, the detection unit has a outer wall formed in a cone shape having a flat head, and in a normal mounting state, the flat head surface is mounted parallel to the sensor mounting surface and has a predetermined refractive index. Part. The light projecting unit irradiates the detection unit with light. The light receiving unit receives the light emitted by the light projecting unit and reflected by the boundary surface between the detection unit and the outside.
【0014】なお、本発明においては、取付具を備え、
前記投光部より前記検知部平頭面に照射された光は、該
検知部の正常な載置状態で、前記取付具の対向反射面で
反射され、該反射光を受光部にて検出し、該受光部によ
る受光量変化に基づき検知部の載置状態検知を行うこと
が好適である。In the present invention, a fixture is provided,
The light emitted from the light emitting unit to the detection unit flat head surface is reflected by the opposing reflection surface of the fixture in the normal mounting state of the detection unit, and the reflected light is detected by the light receiving unit, It is preferable to detect the mounting state of the detection unit based on the change in the amount of light received by the light reception unit.
【0015】ここで、前記取付具は、前記検知部の正常
な載置状態で、該検知部の平頭面と平行に対向配置さ
れ、該検知部平頭面からの透過光を再び該検知部の平頭
面の方向に反射し、該反射光を受光部にて検出させるた
めの対向反射面が設けられ、前記センサ載置面に前記検
知部を着脱自在に載置する。Here, the mounting member is disposed in parallel with the flat head surface of the detection unit in a normal mounting state of the detection unit, and the transmitted light from the flat head surface of the detection unit is again detected by the detection unit. An opposing reflection surface is provided for reflecting the light in the direction of the flat head surface so that the reflected light is detected by the light receiving unit, and the detection unit is detachably mounted on the sensor mounting surface.
【0016】ここにいう受光部による受光量変化に基づ
き検知部の載置状態検知を行うとは、検知部が外れる
と、該検知部平頭面の内側から外側への透過光の大部分
は、取付具の対向反射面で反射されないので、検知部に
戻って受光部にて検出される受光光量の割合が、検知部
の正常載置状態に比較し大幅に減少する。この外れ時の
受光量減少は、漏液検知時の受光量減少とはその量が明
かに異なるので、これを漏液と誤検知することなく、検
知部の外れとして検知することができることをいう。The detection of the mounting state of the detection unit based on the change in the amount of light received by the light reception unit means that when the detection unit is removed, most of the transmitted light from the inside of the flat head surface of the detection unit to the outside is detected. Since the light is not reflected by the opposing reflecting surface of the fixture, the ratio of the amount of received light that returns to the detection unit and is detected by the light receiving unit is significantly reduced compared to the normal mounting state of the detection unit. This decrease in the amount of light received when the liquid comes off is clearly different from the amount of light received when liquid leakage is detected, so it is possible to detect this as a disconnection of the detection unit without erroneously detecting it as liquid leakage. .
【0017】またここにいう所定屈折率を持つ検知部と
は、検知部外壁面に液が付着していない非漏液状態で
は、検知部の屈折率と外部(空気)の屈折率との差が大
きくなるので、検知部と外部との境界面での反射率が高
くなる。一方、検知部外壁面に液が付着している漏液状
態では、検知部の屈折率と外部(液)の屈折率の差が小
さくなるので、検知部と外部との境界面での反射率が低
くなるような屈折率を持つものをいう。The term "detector having a predetermined refractive index" as used herein means the difference between the refractive index of the detector and the refractive index of the outside (air) in a non-leakage state in which liquid does not adhere to the outer wall surface of the detector. Is larger, the reflectance at the boundary surface between the detector and the outside is higher. On the other hand, in the liquid leakage state in which the liquid adheres to the outer wall surface of the detector, the difference between the refractive index of the detector and the refractive index of the outside (liquid) becomes small, so the reflectance at the interface between the detector and the outside is small. Has a refractive index such that
【0018】[0018]
【発明の実施の形態】以下、図面に基づき本発明の好適
な実施形態について説明する。BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described below with reference to the drawings.
【0019】図1には本発明の一実施形態にかかる漏液
センサの概略構成が示されており、同図(A)は装置全
体を上方より見た図、同図(B)は載置体を側方より見
た図である。なお、前記従来技術と対応する部分には符
号100を加えて示し説明を省略する。FIG. 1 shows a schematic structure of a liquid leakage sensor according to an embodiment of the present invention. FIG. 1 (A) is a view of the entire apparatus as seen from above, and FIG. It is the figure which looked at the body from the side. It should be noted that the reference numeral 100 is added to the portion corresponding to the above-mentioned prior art to omit the description.
【0020】本実施形態において漏液センサ124は、
載置体110と、取付具126を備える。取付具126
は、漏液パン(センサ載置面)118にねじ128で固
定され、前記載置体110を着脱自在に載置する。前記
取付具126は、対向反射面130が設けられる。In the present embodiment, the leak sensor 124 is
The mounting body 110 and the attachment 126 are provided. Mounting tool 126
Is fixed to the liquid leakage pan (sensor mounting surface) 118 with a screw 128, and the mounting body 110 is removably mounted. The fixture 126 is provided with a counter reflection surface 130.
【0021】前記対向反射面130は、同図に示すよう
な載置体110の正常な載置状態で、前記検知部116
の平頭面132と密着させることにより平行に対向配置
される。前記載置体110の内側は、例えばボール状の
ガラスレンズ等よりなる投光部及び受光部(図示省略)
がそれぞれ設けられる。The counter reflection surface 130 is the detection portion 116 when the mounting body 110 is in a normal mounting state as shown in FIG.
The flat head surfaces 132 are closely contacted with each other so that they are arranged in parallel and opposite to each other. The inside of the mounting body 110 is, for example, a light projecting unit and a light receiving unit (not shown) formed of a ball-shaped glass lens or the like.
Are provided respectively.
【0022】前記投光部には投光側ファイバ134の載
置体側端部が固定接続され、該投光側ファイバ134の
電気系構成部側端部は、漏液パン118より離れた防爆
場所に設置される電気系構成部136の投光側に着脱自
在に接続される。前記受光部には受光側ファイバ138
の載置体側端部が固定接続され、該受光側ファイバ13
8の電気系構成部側端部は、該電気系構成部136の受
光側に着脱自在に接続される。An end portion of the light projecting side fiber 134 on the mounting body side is fixedly connected to the light projecting portion, and an end portion of the light projecting side fiber 134 on the side of the electrical system is located at an explosion proof location apart from the leak pan 118. Is removably connected to the light projecting side of the electrical system component 136 installed in. The light receiving side fiber 138 is provided in the light receiving portion.
Is fixedly connected to the receiving body side end of the receiving side fiber 13
An end portion of the electric system constituting portion 8 on the side of the electric system constituting portion 8 is detachably connected to the light receiving side of the electric system constituting portion 136.
【0023】電気系構成部136は、光源部140と、
光検出部142と、判定回路144を備える。前記光源
部140は光を出射し、該光は投光側ファイバ134、
載置体110の内側の投光部を介して、検知部116の
内壁面に照射される。前記載置体110の内側からの反
射光は、載置体110の内側の受光部、受光側ファイバ
138を介して、光検出部142にて受光され、光検出
部142は受光量情報を判定回路144に出力する。The electrical system component 136 includes a light source 140 and
The light detector 142 and the determination circuit 144 are provided. The light source unit 140 emits light, and the light is emitted from the light projecting side fiber 134,
The inner wall surface of the detection unit 116 is irradiated with light through the light projecting unit inside the mounting body 110. The reflected light from the inside of the mounting body 110 is received by the light detecting unit 142 via the light receiving unit inside the mounting body 110 and the light receiving side fiber 138, and the light detecting unit 142 determines the received light amount information. Output to the circuit 144.
【0024】判定回路144は、漏液判定部146と、
外れ判定部148を備え、光検出部142からの受光光
量情報に基づき、漏液検知及び載置状態検知を行う。す
なわち、漏液判定部146は、漏液判定に必要な情報を
記憶している情報部150を備える。本実施形態では、
該情報部150に、予め非漏液状態及び取付具126に
対し載置体110の正常な載置状態で、光検出部142
による受光量情報と、漏液状態及び取付具126に対し
載置体110の正常な載置状態で、光検出部142によ
る受光量情報を得ている。The determination circuit 144 includes a liquid leakage determination unit 146,
The detachment determination unit 148 is provided, and liquid leakage detection and placement state detection are performed based on the received light amount information from the light detection unit 142. That is, the liquid leakage determination unit 146 includes the information unit 150 that stores information necessary for liquid leakage determination. In this embodiment,
In the information section 150, the light detecting section 142 is set in advance in a non-leakage state and in a normal mounting state of the mounting body 110 with respect to the fixture 126.
The light receiving amount information by the light detecting unit 142 is obtained by the light detecting unit 142 in the liquid leakage state and the normal mounting state of the mounting body 110 with respect to the fixture 126.
【0025】そして、検知部116に漏液が付着してい
ない非漏液状態では、検知部116の屈折率と空気の屈
折率との差が大きいので、検知部116と外部との境界
面での反射率が高い。このため、投光部より検知部11
6に照射された光の大部分は、該検知部116と外部と
の境界面で反射される。該反射光は、載置体110の内
側の受光部で集光され、受光側ファイバ138を介して
電気系構成部136の光検出部142にて検出される。In the non-leakage state in which no liquid leaks to the detection unit 116, the difference between the refractive index of the detection unit 116 and the refractive index of air is large, so that the boundary surface between the detection unit 116 and the outside is large. Has a high reflectance. For this reason, the detection unit 11
Most of the light emitted to 6 is reflected by the boundary surface between the detection unit 116 and the outside. The reflected light is collected by the light receiving section inside the mounting body 110, and is detected by the light detecting section 142 of the electric system constituting section 136 via the light receiving side fiber 138.
【0026】一方、検知部116に漏液が付着している
漏液状態では、検知部116の屈折率と液の屈折率の差
が小さくなるので、検知部116と外部との境界面での
反射率が低くなる。このため、載置体110の内側の投
光部より検知部116の内壁面に照射された光の一部
は、該検知部116と外部との境界面で反射されるが、
該反射光に比較し透過光の割合が大きくなる。これによ
り光検出部142にて検出される反射光量が、前記非漏
液状態に比較して減少するので、これを漏液判定部14
6により漏液状態として検出する。On the other hand, in the liquid leakage state in which the liquid has adhered to the detection unit 116, the difference between the refractive index of the detection unit 116 and the refractive index of the liquid becomes small, so that at the boundary surface between the detection unit 116 and the outside. The reflectance is low. Therefore, a part of the light emitted from the light projecting section inside the mounting body 110 to the inner wall surface of the detection section 116 is reflected at the boundary surface between the detection section 116 and the outside.
The ratio of transmitted light becomes larger than that of the reflected light. As a result, the amount of reflected light detected by the light detection unit 142 is reduced as compared with the non-leakage state, and this is determined as the liquid leakage determination unit 14.
It is detected as a liquid leakage state by 6.
【0027】また前記外れ判定部148は、載置体11
0の載置状態検知に必要な情報を記憶している情報部1
52を備える。該情報部152に、予め取付具126に
対し載置体110の正常な載置状態で、光検出部142
による受光量情報と、取付具126より載置体110が
外れた状態で、光検出部142による受光量情報を得て
いる。The detachment determination unit 148 is used for the mounting body 11
An information unit 1 that stores information necessary for detecting the mounting state of 0.
52 is provided. In the information section 152, the photodetection section 142 is preliminarily set in the normal mounting state of the mounting body 110 with respect to the fixture 126.
The information on the amount of light received by the photodetector 142 and the information on the amount of light received by the photodetector 142 are obtained with the mount 110 removed from the fixture 126.
【0028】そして、載置体110が取付具126より
外れると、検知部116の平頭面132の内側から外側
への透過光の大部分は、取付具126の対向反射面13
0で反射されないので、載置体110の内側に戻る反射
光量の割合が、正常載置時に比較し大幅に減少する。When the mounting body 110 is disengaged from the fixture 126, most of the transmitted light from the inside of the flat head surface 132 of the detector 116 to the outside is detected by the counter reflection surface 13 of the fixture 126.
Since the light is not reflected at 0, the ratio of the amount of reflected light returning to the inside of the mounting body 110 is significantly reduced as compared with the normal mounting.
【0029】該外れ時の受光量減少は、漏液検知時の受
光量減少とはその量が明かに異なるので、これを漏液状
態と誤検知することなく、外れ判定部148により、載
置体110の外れとして正確に検知される。The decrease in the amount of received light when the liquid is removed is clearly different from the amount of received light when the liquid leakage is detected. Therefore, the detachment determination unit 148 does not erroneously detect this as a liquid leakage state. It is accurately detected as a detachment of the body 110.
【0030】図2(A)には図1に示した載置体110
を上方より見た図、同図(B)には同様の載置体110
を側方より見た図、同図(C)には同様の載置体110
を下方より見た図が示されている。同図に示すように載
置体110は、その本体154が中空状の略円筒状で構
成されている。該本体154の中央の内壁面は、横断面
形状が四角の錘体で形成され、検知部116としての該
錘体の先端が、平頭状に形成されている。FIG. 2A shows the mounting body 110 shown in FIG.
A top view of FIG.
A side view of the same, and FIG.
Is shown from below. As shown in the figure, the mounting body 110 has a main body 154 having a hollow, substantially cylindrical shape. An inner wall surface at the center of the main body 154 is formed by a weight body having a square cross section, and a tip end of the weight body as the detection unit 116 is formed in a flat head shape.
【0031】漏液状態で、該検知部116に液が付着す
るように、該検知部116である平頭面132及び斜面
よりなる側壁133は、本体154の底部より露出して
いる。The side wall 133 composed of the flat head surface 132 and the inclined surface, which is the detection section 116, is exposed from the bottom of the main body 154 so that the liquid adheres to the detection section 116 in the liquid leakage state.
【0032】また載置体110は、本体154の底面
に、外周寄りの同一円周上で等間隔に、例えば三の脚部
158,160,162が、前記検知部116の表出高
と同じ高さで設けられている。これにより検知部116
の平頭面132を取付具の対向反射面にしっかりと当接
させた状態で、載置体110を漏液パン上にて支持する
こととなる。Further, in the mounting body 110, on the bottom surface of the main body 154, the three legs 158, 160 and 162, for example, three leg portions 158, 160 and 162 are arranged at equal intervals on the same circumference near the outer periphery, and are the same as the exposed height of the detection portion 116. It is provided at a height. Accordingly, the detection unit 116
The mounting body 110 is supported on the liquid leakage pan in a state where the flat head surface 132 is firmly abutted on the opposing reflection surface of the fixture.
【0033】また本体154には、例えばファスナの雄
側等よりなる載置体側接続部164が設けられている。
該接続部164を介して前記取付具(図示省略)に対し
載置体110の本体154をワンタッチで着脱自在とし
ている。Further, the main body 154 is provided with a mounting body side connecting portion 164 made of, for example, a male side of a fastener.
The main body 154 of the mounting body 110 can be attached / detached to / from the mounting tool (not shown) via the connecting portion 164.
【0034】また図3(A)には図2に示した載置体1
10を正面より見た図、同図(B)には同様の載置体1
10を背面より見た図が示されている。同図に示すよう
に前記載置体側接続部164には、投光側開口168
と、受光側開口170が設けられる。Further, FIG. 3A shows the mounting body 1 shown in FIG.
10 is a front view of the same, and FIG.
The figure which looked at 10 from the back is shown. As shown in the figure, the light projecting side opening 168 is formed in the mounting body side connecting portion 164.
And a light receiving side opening 170 is provided.
【0035】該投光側開口168より前記投光側ファイ
バの投光側端部(図示省略)が挿入され、載置体本体1
54の内側の投光部(図示省略)に接続されることとな
る。該受光側開口170より前記受光側ファイバの受光
側端部(図示省略)が挿入され、載置体本体154の内
側の受光部(図示省略)に接続されることとなる。The projection side end (not shown) of the projection side fiber is inserted through the projection side opening 168, and the mounting body 1
It will be connected to a light projecting portion (not shown) inside 54. The light receiving side end portion (not shown) of the light receiving side fiber is inserted through the light receiving side opening 170 and connected to the light receiving portion (not shown) inside the mounting body 154.
【0036】図4(A)には図1に示した取付具126
を上方より見た図、同図(B)には同様の取付具126
を側方より見た図が示されている。前記取付具126
は、本体172にねじ穴174が設けられ、該ねじ穴1
74に前記ねじを設けて前記漏液パンに該取付具126
を固定している。FIG. 4A shows the attachment 126 shown in FIG.
A view of the same from above is shown in FIG.
The figure which looked at from the side is shown. The attachment 126
Is provided with a screw hole 174 in the main body 172.
74 is provided with the screw to attach the fitting 126 to the leak pan.
Is fixed.
【0037】この取付具126は対向反射面130を備
え、該対向反射面130は対向反射面として機能する円
板部130aと、該円板部130aと取付具126の本
体172を接続する板状のアーム部130b等よりな
る。この円板部130aは光の反射率を高める表面処理
等がなされている。The fitting 126 includes a counter reflection surface 130, and the counter reflection surface 130 is a plate portion for connecting the disc portion 130a functioning as a counter reflection surface and the disc portion 130a and the main body 172 of the fitting 126. Arm portion 130b and the like. The disk portion 130a is surface-treated to increase the light reflectance.
【0038】また、前記取付具126は、例えば前記フ
ァスナの雌側等よりなる取付具側接続部176が設けら
れている。該取付具側接続部176に対し前記載置体側
接続部(図示省略)をワンタッチで着脱自在とすること
により、取付具126に対する載置体の取付け、及び取
外しが簡単となる。Further, the fitting 126 is provided with a fitting-side connecting portion 176 made of, for example, the female side of the fastener. The mounting body side connecting portion (not shown) can be attached / detached to / from the mounting tool side connecting portion 176 with one touch, so that the mounting body can be easily attached to and detached from the mounting tool 126.
【0039】本実施形態にかかる漏液センサ126は概
略以上のように構成され、以下にその作用について説明
する。The liquid leakage sensor 126 according to this embodiment is constructed as described above, and its operation will be described below.
【0040】まず使用者は載置体の検知部を布等で綺麗
にして、漏液パンに固定されている取付具に載置体を取
りつけ、漏液監視を開始させる。図5には本実施形態に
かかる漏液センサの検出原理が示されており、同図
(A)は載置体の正常な載置状態、同図(B)は載置体
が取付具より外れた状態である。First, the user cleans the detecting portion of the mounting body with a cloth or the like, attaches the mounting body to the fixture fixed to the liquid leakage pan, and starts liquid leakage monitoring. 5A and 5B show the detection principle of the leak sensor according to the present embodiment. FIG. 5A shows a normal mounting state of the mounting body, and FIG. It is in a detached state.
【0041】同図(A)に示すように取付具126に対
し載置体の正常な載置状態で、検知部116の平頭面1
32を、取付具126の対向反射面130に対し密着さ
せることにより平行に対向配置している。このため、投
光部112より検知部116の内壁面に照射された光1
20は、該検知部116の斜面よりなる側壁133と外
部との境界面、及び取付具126の対向反射面130で
反射され、該反射光122が受光部114にて検出され
る。As shown in FIG. 3A, the flat head surface 1 of the detection unit 116 is in the normal mounting state of the mounting body with respect to the fixture 126.
The 32 is closely contacted with the opposing reflection surface 130 of the fixture 126 so as to be opposed to each other in parallel. Therefore, the light 1 emitted from the light projecting unit 112 to the inner wall surface of the detection unit 116
20 is reflected by the boundary surface between the side wall 133 formed by the inclined surface of the detection unit 116 and the outside, and the opposing reflection surface 130 of the fixture 126, and the reflected light 122 is detected by the light receiving unit 114.
【0042】ここで、検知部116に漏液が付着してい
ない非漏液状態では、検知部116の屈折率と空気の屈
折率との差が大きいので、検知部116と外部との境界
面での反射率が高い。このため、投光部112より検知
部116の斜面よりなる側壁133に照射された光12
0の大部分は、該検知部側壁133と外部との境界面で
反射され、該反射光122が受光部にて検出される。Here, in the non-leakage state in which no liquid leaks to the detection unit 116, the difference between the refractive index of the detection unit 116 and the refractive index of air is large, so that the boundary surface between the detection unit 116 and the outside is large. Has a high reflectance. For this reason, the light 12 emitted from the light projecting unit 112 to the side wall 133 formed by the slope of the detection unit 116.
Most of 0 is reflected by the boundary surface between the detection part side wall 133 and the outside, and the reflected light 122 is detected by the light receiving part.
【0043】一方、検知部116に漏液が付着している
漏液状態では、検知部116の屈折率と液の屈折率の差
が小さくなるので、該検知部側壁133と外部との境界
面での反射率が低くなる。このため、投光部112より
該検知部116の斜面よりなる側壁133に照射された
光120の一部は、該検知部116と外部との境界面で
反射されるが、該反射光122に比較し透過光の割合が
大きくなる。これにより受光部114にて集光される反
射光量は、前記非漏液状態に比較して減少するので、こ
れを前記判定回路により漏液状態として検出することが
できる。On the other hand, in the liquid leakage state in which the liquid is attached to the detection unit 116, the difference between the refractive index of the detection unit 116 and the refractive index of the liquid becomes small, so that the boundary surface between the detection unit side wall 133 and the outside. The reflectivity at is low. Therefore, a part of the light 120 emitted from the light projecting unit 112 to the side wall 133 formed by the slope of the detection unit 116 is reflected by the boundary surface between the detection unit 116 and the outside, but is reflected by the reflected light 122. The ratio of transmitted light becomes large in comparison. As a result, the amount of reflected light collected by the light receiving unit 114 is reduced as compared with the non-leakage state, so that the determination circuit can detect this as a leaking state.
【0044】しかも、検知部116を平頭な錘体で形成
することにより、つまり斜面よりなる側壁133を用い
ているので、光120の入射光路と、反射光122の反
射光路を横方向にずらしている。この結果、本実施形態
は、側壁133を斜面で構成しないものに比較し、投光
部112と受光部114の配置の自由度が高まる。また
受光部114にて入射光120の影響を低減しつつ反射
光122を集光することができるので、漏液検知を正確
に行える。Moreover, since the detecting portion 116 is formed of a flat-headed weight body, that is, since the side wall 133 having a slope is used, the incident light path of the light 120 and the reflected light path of the reflected light 122 are laterally offset. There is. As a result, in the present embodiment, the degree of freedom in arranging the light projecting section 112 and the light receiving section 114 is increased, as compared with the case where the side wall 133 is not formed of a slope. Further, since the reflected light 122 can be condensed while the influence of the incident light 120 is reduced by the light receiving section 114, the liquid leakage can be accurately detected.
【0045】ここで、通常、センサ載置面である漏液パ
ンの明暗、色彩等は、漏液パン毎、使用環境、時間等に
よって異なることが多く、光学式のセンサは高感度であ
る反面、受光部114にて集光される光量変動の影響を
受け易い。そこで、本実施形態では、取付具126に対
向反射面130を設け、該対向反射面130に対し載置
体の検知部116の平頭面132を当接させることによ
り平行に載置している。Here, usually, the brightness, color, etc. of the leaking pan, which is the sensor mounting surface, are often different depending on each leaking pan, use environment, time, etc., while the optical sensor has high sensitivity. The light receiving section 114 is easily affected by fluctuations in the amount of light collected. In view of this, in the present embodiment, the fitting 126 is provided with the opposing reflection surface 130, and the flat head surface 132 of the detection unit 116 of the placement body is brought into contact with the opposing reflection surface 130 to place them in parallel.
【0046】この結果、本実施形態では、取付具126
の対向反射面130が同一種であれば、検知部116の
内側から外側への透過光は、載置体110の正常な載置
状態で、常に同一の対向反射面で反射されることとなる
ので、該同一環境での反射光を受光部114にて集光す
ることができる。したがって、本実施形態は、非漏液状
態で受光部114にて得られる反射光122の全量を一
定にすることができるので、より正確な検知を行える。
また検知後は取付具126より載置体110を簡単に取
外せるので、検知部116に付着している液を布で拭き
取る等のメンテナンスが容易に行える。As a result, in this embodiment, the fixture 126
If the opposite reflection surfaces 130 of the same type are the same, the transmitted light from the inside to the outside of the detection unit 116 is always reflected by the same opposite reflection surface in the normal mounting state of the mounting body 110. Therefore, the reflected light in the same environment can be condensed by the light receiving unit 114. Therefore, in the present embodiment, the total amount of the reflected light 122 obtained by the light receiving unit 114 in the non-leakage state can be made constant, and more accurate detection can be performed.
Further, after the detection, the mounting body 110 can be easily removed from the mounting tool 126, so that maintenance such as wiping the liquid adhering to the detection unit 116 with a cloth can be easily performed.
【0047】ところで、前記漏液センサは、メンテナン
ス性に優れるが、監視中に載置体が取付具から外れる可
能性がある。外れると、漏液の監視がきちんと行えない
ことがあるので、載置体の外れ検知を行うことが必要で
ある。By the way, although the liquid leakage sensor is excellent in maintainability, there is a possibility that the mounting body may come off from the mounting tool during monitoring. If it comes off, it may not be possible to properly monitor the leakage, so it is necessary to detect the removal of the mounting body.
【0048】そこで、本発明は、載置体に対し別途、外
れセンサを設けるのではなく、一の検知部を用いて、前
記漏液検知に加えて、外れ検知も行えるようにしてい
る。このために本実施形態では、露出される検知部11
6の外壁面を平頭な錘状に形成している。そして、載置
体110の正常な載置状態で、該検知部116の平頭面
132を、取付具126の対向反射部130に対し密着
させることにより平行に載置している。Therefore, according to the present invention, instead of separately providing a detachment sensor on the mounting body, one detector is used to detect detachment in addition to the liquid leakage detection. Therefore, in the present embodiment, the exposed detection unit 11
The outer wall surface of No. 6 is formed in the shape of a flat weight. Then, in a normal mounting state of the mounting body 110, the flat head surface 132 of the detection section 116 is closely attached to the counter reflection section 130 of the mounting tool 126 to be mounted in parallel.
【0049】この結果、本実施形態では、同図(A)に
示すように載置体110の正常載置状態で、載置体検知
部116の平頭面132の内側壁に照射された光120
の大部分は、取付具126の対向反射部130で反射さ
れ、該反射光122が受光部114にて集光される。As a result, in the present embodiment, as shown in FIG. 9A, the light 120 radiated on the inner wall of the flat head surface 132 of the mounting body detection unit 116 in the normal mounting state of the mounting body 110.
Most of the reflected light 122 is reflected by the facing reflection portion 130 of the fixture 126, and the reflected light 122 is collected by the light receiving portion 114.
【0050】一方、同図(B)に示すように載置体11
0が取付具126から外れている状態で、載置体検知部
116の平頭面132は、取付具126の対向反射面1
30より離れている。すると、前記投光部112より載
置体内側の検知部116の平頭面132に照射された光
120の大部分は、該検知部116の平頭面132の内
側より外側へ透過する。該透過光の大部分は、取付具1
26の対向反射面130で反射されて再び載置体110
の内側に戻らないので、受光部にて検出されることは殆
どない。前記透過光の中に取付具126の対向反射面1
30で反射されるものがあっても、再び載置体の内側に
戻って受光部にて検出されることは殆どない。On the other hand, as shown in FIG.
With 0 removed from the mounting tool 126, the flat head surface 132 of the mounting body detection unit 116 faces the reflecting surface 1 of the mounting tool 126.
More than 30. Then, most of the light 120 emitted to the flat head surface 132 of the detection unit 116 inside the mounting body from the light projecting unit 112 is transmitted to the outside from the inside of the flat head surface 132 of the detection unit 116. Most of the transmitted light is the fixture 1
The mounting body 110 is reflected again by the counter reflecting surface 130 of 26 and is placed again.
Since it does not return to the inside of, it is hardly detected by the light receiving part. The counter reflection surface 1 of the fixture 126 in the transmitted light
Even if something is reflected by 30, it hardly returns to the inside of the mounting body and is detected by the light receiving unit.
【0051】このため、本実施形態では、載置体110
が取付具126より外れると、載置体110の内側に戻
り受光部にて集光される反射光量の割合が、載置体11
0の正常載置状態に比較し大幅に低減する。また前記外
れ時の受光量減少は、漏液検知時の受光量の減少とはそ
の量が明かに異なるので、漏液状態と誤検知することな
く、載置体の外れとして検知することができる。Therefore, in this embodiment, the mounting body 110 is used.
When is removed from the mounting tool 126, the ratio of the amount of reflected light that returns to the inside of the mounting body 110 and is condensed by the light receiving unit is
Significantly reduced compared to the normal mounting state of 0. Further, since the decrease in the amount of received light when the liquid is removed is clearly different from the amount of received light when the liquid is detected, it can be detected as the removal of the mounting body without erroneously detecting the liquid leakage state. .
【0052】すなわち、本実施形態では、検知部116
を平頭な錘体で形成している。つまり検知部の先端に平
頭面132を形成することにより、一般的な検知部とし
て三角形の頂点を漏液パンに対し対向配置したものに比
較し、外れ検知に用いる検知部位の面積を大きくするこ
とができる。これにより正常載置状態と外れ状態の光量
減少量を、前記三角形の頂点を用いたものに比較し、大
きくできる。このため、外れ状態では、検知部116に
液が付着している漏液状態に比較し、より大量の光が外
部に漏れるので、再び載置体の内側に戻って受光部にて
検出されることは殆どない。これにより、検知部に液が
付着している漏液状態と、外れ状態を正確に区別するこ
とができるので、漏液検知及び載置状態検知が正確に行
える。That is, in the present embodiment, the detection section 116.
Is formed of a flat weight. That is, by forming the flat-faced surface 132 at the tip of the detection part, the area of the detection part used for the deviation detection can be increased as compared with a general detection part in which triangular vertices are arranged to face the liquid leakage pan. You can As a result, the light amount reduction amount in the normal placement state and the out-of-position state can be increased as compared with the one using the apex of the triangle. Therefore, in the detached state, a larger amount of light leaks to the outside as compared with the liquid leakage state in which the liquid adheres to the detection unit 116, and thus returns to the inside of the mounting body and is detected by the light receiving unit. There are few things. With this, it is possible to accurately distinguish the liquid leakage state in which the liquid is attached to the detection unit and the detached state, so that the liquid leakage detection and the mounting state detection can be accurately performed.
【0053】また本実施形態は、一の検知部を用いて漏
液検知及び載置状態検知を行うので、漏液検知機構と外
れ検知機構を別個に設けたものに比較し、載置体の小型
化が図れるので、載置体の載置場所の自由度を損なうの
を防ぐことができる。しかも本実施形態は、外れ検知も
光学式で行うので、防爆性を損なうことを防ぐことがで
きる。Further, in the present embodiment, since the liquid leakage detection and the mounting state detection are carried out by using the one detection unit, compared with the structure in which the liquid leakage detection mechanism and the detachment detection mechanism are separately provided, Since the size can be reduced, it is possible to prevent the freedom of the placement place of the placement body from being impaired. Moreover, in the present embodiment, since the detachment detection is also performed optically, it is possible to prevent the explosion-proof property from being impaired.
【0054】以上説明したように本実施形態にかかる漏
液センサによれば、載置体110の検知部116を平頭
な錘状に形成し、該検知部平頭面132を取付具126
の対向反射面130上に載置することとしたので、従来
極めて困難であった漏液センサの載置体110の外れ検
知を、防爆性を考慮しつつ、小型な構成で正確に行うこ
とができる。しかも、本実施形態は、前記対向反射面1
30が設けられた取付具126を介して載置体110を
漏液パン118に載置することとしたので、該取付具1
26を用いないものに比較し、前記検知をより正確に行
うことができる。As described above, according to the liquid leakage sensor of the present embodiment, the detecting portion 116 of the mounting body 110 is formed in the shape of a flat head and the detecting portion flat head surface 132 is attached to the fitting 126.
Since it is mounted on the opposite reflection surface 130 of the above, it is possible to accurately detect the detachment of the mounting body 110 of the liquid leakage sensor, which has been extremely difficult in the past, with a small configuration while considering the explosion-proof property. it can. Moreover, in this embodiment, the counter reflection surface 1 is
Since the mounting body 110 is mounted on the leak pan 118 via the mounting tool 126 provided with the mounting tool 30,
The detection can be performed more accurately as compared with the case where 26 is not used.
【0055】本発明の漏液センサは、前記構成に限られ
るものではなく、発明の要旨の範囲で種々の変形が可能
である。例えば前記構成では、載置体検知部を取付具の
対向反射面に対向配置した例について説明したが、本発
明の漏液センサは、前記構成に限定されるものではな
く、センサ載置面の明暗、色彩等の環境が常に同じ、セ
ンサが該環境に対して影響を受け難いものであれば、前
記漏液パン等のセンサ載置面に対し載置体を直接載置す
ることができる。しかしながら、通常、センサ載置面の
明暗、色彩等は環境、時間等によって異なることが多
く、また光学式の漏液センサは高感度である反面、受光
部にて検出される反射光量変動の影響を受け易いので、
該影響を低減し、より正確な検知を行うためには、載置
体検知部を取付具の対向反射面に対向配置することが、
特に好ましい。The leak sensor of the present invention is not limited to the above-mentioned structure, but various modifications can be made within the scope of the gist of the invention. For example, in the above-described configuration, an example in which the mounting body detection unit is arranged so as to face the opposing reflection surface of the fixture has been described, but the liquid leakage sensor of the present invention is not limited to the above configuration, and the sensor mounting surface If the environment such as brightness and color is always the same and the sensor is not easily affected by the environment, the mounting body can be directly mounted on the sensor mounting surface such as the leak pan. However, the brightness, color, etc. of the sensor mounting surface often differ depending on the environment, time, etc. While the optical leak sensor has high sensitivity, it is affected by fluctuations in the amount of reflected light detected at the light receiving part. Because it is easy to receive
In order to reduce the influence and perform more accurate detection, it is necessary to dispose the mounting body detection unit so as to face the opposite reflection surface of the fixture.
Particularly preferred.
【0056】また前記構成では、検知部の平頭面を取付
具の対向反射面に当接させた例について説明したが、そ
のほか、検知部の平頭面が取付具の対向反射面に対し平
行に載置されるのであれば、間隙を設けて載置してもよ
いが、前記環境の影響を受け難くするためには、検知部
の平頭面を取付具の対向反射面に当接させることが、特
に好ましい。Further, in the above-mentioned configuration, the example in which the flat head surface of the detecting portion is brought into contact with the opposing reflecting surface of the mounting tool has been described. In addition, the flat head surface of the detecting portion is mounted parallel to the opposing reflecting surface of the mounting tool. If it is placed, it may be placed with a gap, but in order to make it difficult to be affected by the environment, it is possible to bring the flat head surface of the detection unit into contact with the opposing reflection surface of the fixture, Particularly preferred.
【0057】さらに前記構成では、検知部に一の平頭な
錐体を設けた例について説明したが、本発明の漏液セン
サは、前記構成に限定されるものではなく、二以上の平
頭な錐体を設けることができる。ただし、二以上の平頭
な錐体も、取付具の対向反射面に対向配置させること
が、前記環境の影響を受け難くするためには、特に好ま
しい。Further, in the above-mentioned configuration, an example in which the detection unit is provided with one flat-headed cone is described, but the liquid leakage sensor of the present invention is not limited to the above-described configuration, and two or more flat-headed cones are used. A body can be provided. However, it is particularly preferable to dispose two or more flat-headed cones so as to face the opposite reflection surface of the fixture in order to make it difficult to be affected by the environment.
【0058】[0058]
【発明の効果】以上説明したように本発明にかかる漏液
センサによれば、検知部の外壁面が平頭な錘状に形成さ
れ、正常載置状態で、該平頭面がセンサ載置面に対し平
行に載置される検知部を備え、投光部より検知部の内壁
面に照射された光は、前記載置体の正常載置状態で、該
センサ載置面で反射され、該反射光を受光部にて検出
し、該受光部による受光量変化に基づき、漏液検知及び
載置状態検知を行うこととしたので、従来極めて困難で
あった漏液検知と外れ検知を、小型な構成で及び正確に
行える。また本発明において、前記検知部の正常な載置
状態で、該検知部の平頭面と平行に対向配置され、該検
知部平頭面からの透過光を再び該検知部の平頭面の方向
に反射し該反射光を受光部にて検出させるための対向反
射面が設けられ、前記センサ載置面に前記検知部を着脱
自在に載置する取付具を備えることにより、前記検知を
より正確に行える。As described above, according to the liquid leakage sensor of the present invention, the outer wall surface of the detection portion is formed in a flat-headed weight shape, and the flat-headed surface serves as the sensor mounting surface in a normal mounting state. The light emitted from the light projecting unit to the inner wall surface of the detecting unit is provided in parallel with the detecting unit, and the light is reflected by the sensor mounting surface in the normal mounting state of the mounting body. Light is detected by the light receiving unit, and liquid leakage detection and placement state detection are performed based on the change in the amount of light received by the light receiving unit. Can be configured and accurate. Further, in the present invention, in the normal mounting state of the detection unit, the detection unit is arranged parallel to and facing the flat head surface of the detection unit, and the transmitted light from the flat surface of the detection unit is reflected again in the direction of the flat head surface of the detection unit. The counter reflection surface for detecting the reflected light at the light receiving unit is provided, and the detection can be performed more accurately by providing the sensor mounting surface with an attachment for detachably mounting the detection unit. .
【図1】本発明の一実施形態にかかる漏液センサ及び取
付具の概略構成の説明図である。FIG. 1 is an explanatory diagram of a schematic configuration of a liquid leakage sensor and a fixture according to an embodiment of the present invention.
【図2】同図(A)は本発明の一実施形態にかかる漏液
センサの載置体を上方より見た図、同図(B)は同様の
載置体を側方より見た図、同図(C)は同様の載置体を
下方より見た図である。FIG. 2 (A) is a view of a mounting body of a liquid leakage sensor according to an embodiment of the present invention viewed from above, and FIG. 2 (B) is a view of a similar mounting body viewed from a side. FIG. 3C is a view of a similar mounting body viewed from below.
【図3】同図(A)は本発明の一実施形態にかかる漏液
センサの載置体を正面より見た図、同図(B)は同様の
載置体を背面より見た図である。FIG. 3A is a front view of a mounting body of a liquid leakage sensor according to an embodiment of the present invention, and FIG. 3B is a rear view of the same mounting body. is there.
【図4】同図(A)は本発明の一実施形態にかかる取付
具を上方より見た図、同図(B)は同様の取付具を側方
より見た図である。FIG. 4A is a view of a fixture according to an embodiment of the present invention as seen from above, and FIG. 4B is a view of a similar fixture as seen from a side.
【図5】本発明の一実施形態にかかる漏液センサの検出
原理の説明図であり、同図(A)は載置体の正常な載置
状態、同図(B)は同様の載置体の外れ状態の説明図で
ある。5A and 5B are explanatory diagrams of the detection principle of the liquid leakage sensor according to the embodiment of the present invention. FIG. 5A is a normal mounting state of the mounting body, and FIG. 5B is the same mounting state. It is explanatory drawing of a detached state of a body.
【図6】一般的な漏液センサの検出原理の説明図であ
る。FIG. 6 is an explanatory diagram of a detection principle of a general liquid leakage sensor.
110 載置体 112 投光部 114 受光部 116 検知部 118 漏液パン(センサ載置面) 126 取付具 130 対向反射面 132 検知部平頭面 133 検知部側壁 110 Placement 112 Projector 114 Light receiving part 116 detector 118 Leak pan (Sensor mounting surface) 126 Fixture 130 Opposite reflection surface 132 Detection unit Flat head 133 Side wall of detection unit
Claims (2)
置状態で、該平頭面がセンサ載置面に対し平行に載置さ
れる所定屈折率を持つ検知部と、 前記検知部に光を照射する投光部と、 前記投光部により照射され、該検知部と外部との境界面
で反射された光を受光する受光部と、 を備え、前記投光部より前記検知部の斜面よりなる側壁
に照射された光は、該検知部側壁と外部との境界面で反
射され、該反射光を受光部にて検出し、前記受光部によ
る受光量変化に基づき漏液検知を行い、かつ該投光部よ
り前記検知部平頭面に照射された光は、該検知部の正常
載置状態で、前記センサ載置面で反射され、該反射光を
受光部にて検出し、該受光部による受光量変化に基づき
該検知部の載置状態検知を行うことを特徴とする漏液セ
ンサ。1. A detector having a predetermined refractive index, the outer wall of which is formed in the shape of a cone having a flat head, and in a normal mounting state, the flat head surface is mounted parallel to the sensor mounting surface, and the detector. And a light receiving unit for receiving the light emitted by the light projecting unit and reflected by the boundary surface between the detecting unit and the outside. The light radiated to the side wall formed by the inclined surface is reflected by the boundary surface between the side wall of the detection unit and the outside, the reflected light is detected by the light receiving unit, and the liquid leakage is detected based on the change in the amount of light received by the light receiving unit. The light radiated to the detection unit flat head surface from the light projecting unit is reflected in the sensor mounting surface in the normal mounting state of the detection unit, and the reflected light is detected by the light receiving unit, A liquid leakage sensor, which detects a mounting state of the detector based on a change in the amount of light received by the light receiver.
行に対向配置され、該検知部平頭面からの透過光を再び
該検知部の平頭面の方向に反射し、該反射光を受光部に
て検出させるための対向反射面が設けられ、前記センサ
載置面に前記検知部を着脱自在に載置する取付具を備
え、 前記投光部より前記検知部平頭面に照射された光は、前
記取付具に対し検知部の正常な載置状態で、前記取付具
の対向反射面で反射され、該反射光を受光部にて検出
し、該受光部による受光量変化に基づき該検知部の載置
状態検知を行うことを特徴とする漏液センサ。2. The liquid leakage sensor according to claim 1, wherein the detection unit is placed in a normal state and is disposed so as to face the flat head surface of the detection unit in parallel, and the transmitted light from the flat surface of the detection unit is again detected. An attachment tool is provided, which is provided with an opposing reflecting surface that reflects in the direction of the flat head surface of the detection unit and allows the light receiving unit to detect the reflected light, and detachably mounts the detection unit on the sensor mounting surface. The light emitted from the light projecting unit to the flat head surface of the detection unit is reflected by the opposing reflection surface of the fixture in a normal mounting state of the detection unit with respect to the fixture, and receives the reflected light. A liquid leakage sensor, characterized in that the mounting state of the detector is detected based on a change in the amount of light received by the light receiver.
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JP2002012781A JP3809378B2 (en) | 2002-01-22 | 2002-01-22 | Leak sensor |
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Cited By (1)
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---|---|---|---|---|
JP2011044735A (en) * | 2004-07-12 | 2011-03-03 | Nikon Corp | Exposure equipment and device manufacturing method |
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JP2011044735A (en) * | 2004-07-12 | 2011-03-03 | Nikon Corp | Exposure equipment and device manufacturing method |
JP2012009897A (en) * | 2004-07-12 | 2012-01-12 | Nikon Corp | Exposure device and device manufacturing method |
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