JP2003212408A - Tensioning device for band-like work, and processing or inspection device for band-like work using tensioning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tensioning device for a band-like work and a processing or inspection device for the band-like work using the tensioning device applying no damage to the band-like work such as a film of an organic compound and preventing disturbance, namely flopping, in conveyance. <P>SOLUTION: The tensioning device for the band-like work comprises a box body with an opened upper part arranged between a pair of guide rollers and formed so as to house a hanging portion of the band-like work, and a negative pressure generating means provided in a bottom of the box body for sucking the hanging portion of the band like work. Side plates of the box body in a width direction of the band-like work are composed of embossed plate materials. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tensioning device for a strip-shaped work, for example, a film of an organic compound, and a processing or inspection device for the strip-shaped work using the tensioning device.

[0002]

2. Description of the Related Art A roll-to-roll system is adopted for exposing a mask pattern on a strip-shaped work, punching a guide hole, mounting an IC chip, etc. in order to provide equipment with high production efficiency.

In such a roll-to-roll system, a roll-shaped strip-shaped work is unwound and is wound on a take-up reel through various processing units or inspection units. Because strict positioning accuracy is required, when continuously transporting the strip-shaped workpiece unwound from the unwinding device to the winding device via the processing unit or inspection unit, the deviation of the transport speed at each place and the strip-shaped work Tensioning devices are arranged before and after the processing unit or the inspection unit in order to apply tension to the work.

Such tensioning devices are already known from various patent documents. For example, in Japanese Patent No. 2836787, a large number of holes are formed in the side plate in the width direction of the film of the box that houses the slackened portion of the film, and suction holes are provided in the bottom, and the suction holes are provided in the suction holes. There is disclosed an apparatus including suction means for sucking air from the outside of the box body so as to flow from the hole of the side plate to the suction hole of the bottom surface.

Further, in Japanese Unexamined Patent Publication No. 6-115780, an empty box body having an upper opening formed so as to be able to accommodate the hanging portion of the film material, and each outer surface of the hanging portion accommodated in the empty box body, A pair of discharge nozzles for discharging air between each inner wall surface of the empty box body, and a negative pressure for sucking air from the bottom suction port of the empty box body to suck the lower end of the hanging portion downward. A device comprising a negative pressure generating means is disclosed.

[0006]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
In the device described in Japanese Patent No. 36787, since an air flow due to a negative pressure is formed between the back surface of the film and the side plate, the film is not scratched, but the wind flowing from the holes causes the film to pass through the film at a right angle. Since it flows to the suction port while being slightly pushed in the direction of, the thin film is disturbed to be conveyed, that is, flapping occurs due to, for example, nonuniformity of holes. As a result, the positioning accuracy in the processing unit or inspection unit is adversely affected.

Further, in the apparatus described in Japanese Patent Laid-Open No. 6-115780, between the outer surface of the hanging portion of the film material housed in the empty box body and the inner wall surfaces of the empty box body, Since air is discharged in the direction orthogonal to the traveling direction,
Disturbance of conveyance, that is, fluttering becomes larger than that in the former known example, which causes meandering.

Further, when a part of the film material adheres to the inner wall surface of the empty box body due to static electricity or the like, the resistance of the discharged air is small in the gap between the film material and the inner wall surface of the empty box body. There is a problem that short-passing is not possible and efficient tension function and smooth transportation effect cannot be obtained.

Moreover, since the air discharged from the blower provided in the lower part of the empty box body is discharged, dust is scattered on the film material, and when fine processing of fine pattern is performed on the film material. Has a lot of damage.

Therefore, it is an object of the present invention to prevent damage to a strip-shaped work, for example, a film of an organic compound,
Another object of the present invention is to provide a tension device for a belt-shaped work that does not disturb transportation, that is, a flap, and a machining or inspection device for a belt-shaped work using the tensioning device.

[0011]

SUMMARY OF THE INVENTION A belt-shaped workpiece tensioning device of the present invention that achieves the above object is an open-top box formed so as to accommodate a hanging portion of a belt-shaped workpiece disposed between a pair of guide rollers. In a tension device for a strip-shaped work, which comprises a body and a negative pressure generating means for sucking the hanging portion of the strip-shaped work arranged at the bottom of the box, a side plate in the width direction of the strip-shaped work of the box is embossed. It is made up of processed plate material.

With this structure, the air passage can be reliably formed between the strip-shaped work and the side plate, so that the strip-shaped work is not brought into close contact with the side plate of the box body, and the meandering is completely eliminated.

The side plate in the width direction of the band-shaped work of the box body may be formed of an embossed metal plate, or the embossed metal plate may be attached to the side plate forming the box body. The embossing is preferably hemispherical in order to reduce the running resistance of the strip work.

Further, a strip-shaped workpiece machining or inspection apparatus according to the present invention includes a strip-shaped workpiece unwinding device, a machining or inspection unit, a grip feed device, and a strip-shaped workpiece winding device along the conveyance direction of the strip-shaped workpiece. In addition to being provided in this order, the band-shaped workpiece tensioning device of the present invention is arranged between the unwinding device and the processing or inspection unit, and between the grip feed device and the winding device, respectively.
It is extremely effective since it does not have the problem of dust generation as in the conventional example and can be processed or inspected in a dust-free state.

The processing unit is an apparatus for punching guide holes, resin coating, exposing mask patterns, printing circuit patterns, mounting IC chips, and the like.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.

As shown in FIG. 1, the tension device for a strip-shaped work of the present invention comprises a box body 1 which is arranged between a pair of guide rollers 2 and 2'and which accommodates a hanging portion of the strip-shaped work 3 and which is open above. The box body 1 includes a porous plate 4 at the bottom of the box body 1, and negative pressure generating means (not shown) connected through a suction pipe 5.
The side plates 6 and 6'in the width direction of the strip-shaped work 3 are embossed as shown in FIG. The embossing is preferably hemispherical as shown in the enlarged view of FIG.

The negative pressure generating means may be directly arranged below the perforated plate 4 without using the suction pipe 5.
Further, although not shown, in FIG. 1, the side plates 6, 6 '
At least two position detection sensors are provided on either one of them to control the position of the lower end of the hanging portion of the strip-shaped work within a certain range.

Next, an apparatus for processing or inspecting a strip-shaped work according to the present invention will be described with reference to FIG. INDUSTRIAL APPLICABILITY The present invention relates to a punching device for a guide hole of a strip-shaped work, a resin coating device for the strip-shaped work, an exposure device for a mask pattern on the strip-shaped work, a printing device for the strip-shaped work, an IC chip mounting device, or the like, or inspection. Although applicable to the apparatus, as an example, an apparatus for exposing a mask pattern on a strip-shaped work will be described.

The exposure apparatus comprises an unwinding device 11, a tensioning device 10 for the strip-shaped work 3 along the conveyance direction of the strip-shaped work 3.
An exposure unit 12, a grip feed device 13, a tension device 10, and a winding device 14 are provided.

Suction pipe 5 connected to the bottom of the tensioning device 10.
Is connected to a suction blower 7 which is a negative pressure generating means.

The exposure unit 12 is the exposure unit 15
A mask 16, a suction stage 17 for fixing the belt-shaped work 3 at a predetermined position during exposure, a pair of lift rollers 18,
18 '.

The grip feed device 13 comprises a fixed grip 19 and a movable grip 20, and the movable grip 20 is moved left and right by a feed screw 22 connected to a drive motor 21.

In the above-mentioned belt-shaped workpiece exposure apparatus, the belt-shaped workpiece is conveyed and exposed as follows.

The strip-shaped work 3 drawn out from the unwinding device 11
The exposure unit 12 performs a predetermined exposure process via the tensioning device 10, and the grip feed device 13 and the tensioning device 1
After 0, it is wound by the winding device 14.

When a predetermined exposure process is performed, the suction of the suction stage 17 is stopped, and the lift rollers 18 and 1
8'is lifted to open the fixed grip 19 and close the movable grip 20 to divide the work 3 into a predetermined distance.
To transport.

As a result of such conveyance, when the lower limit position of the hanging portion of the strip-shaped work 3 is detected by the lower limit sensor 26 in the tensioning device 10 provided between the grip feed device 13 and the winding device 14, the winding device 14 is driven. However, when the upper limit sensor 25 detects it, the drive of the winding device 14 is stopped.

On the other hand, in the tensioning device provided between the unwinding device 11 and the exposure unit 12, when the lower end of the hanging portion of the strip-shaped work 3 is detected by the upper limit sensor 23, the unwinding device 11
Is driven, and when the lower limit sensor 24 detects it, the driving is stopped.

Then, the next exposure area is the exposure unit 1
When it reaches 2, the elevating rollers 18 and 18 'are lowered and the suction stage 17 is actuated to fix the exposure region of the strip-shaped work 3. Next, the mask 16 is driven in XYZθ to align the mask 16 and the band-shaped work 3. Then, a predetermined exposure process is performed. Hereinafter, this work will be repeated.

The unwinding device 11 is constantly applied with a rotating force in the direction opposite to the conveying direction so that the belt-shaped work 3 is not conveyed by inertia.

[0031]

The tensioning device of the present invention is characterized in that the side plate in the width direction of the band-shaped work of the box body is constituted by the plate material on which the embossing process is applied, and it is ensured between the band-shaped work and the side plate. Since the air passage can be formed in the side wall, the strip-shaped work is not brought into close contact with the side plate of the box body, and no meandering occurs.

Further, the strip-shaped workpiece machining or inspection apparatus of the present invention includes a strip-shaped workpiece unwinding device, a machining or inspection unit, a grip feed device, and a strip-shaped workpiece winding device along the conveyance direction of the strip-shaped workpiece. In addition to being provided in this order, the band-shaped workpiece tensioning device of the present invention is arranged between the unwinding device and the processing or inspection unit, and between the grip feed device and the winding device, respectively.
Unlike the conventional example, since air is not blown to the strip-shaped work, there is no problem of dust generation and it is possible to perform processing or inspection in a dust-free state, which is extremely effective.

[Brief description of drawings]

FIG. 1 is a perspective view showing an outline of a tension device for a belt-shaped work according to the present invention.

FIG. 2 is a schematic view of a side plate in the width direction of the strip-shaped workpiece of the strip-shaped workpiece tensioning device of the present invention.

FIG. 3 is an enlarged view of part A of FIG.

FIG. 4 is a front view showing an outline of an exposure apparatus that is an example of a belt-shaped workpiece processing or inspection apparatus of the present invention.

[Explanation of symbols]

1 box 2, 2'guide roller 3 band work 6,6 'side plate 7 Suction blower 11 Unwinding device 12 Exposure unit 13 Grip feed device 14 Winding device

Claims (3)

[Claims] 1. A box body having an upper opening formed to accommodate a hanging portion of a belt-like work disposed between a pair of guide rollers, and a hanging portion of the belt-like work provided at the bottom of the box body. A band-shaped work tensioning device comprising a negative pressure generating means for effecting, wherein the side plate in the width direction of the band-shaped work of the box body is made of a plate material that is embossed. 2. The tension device for a belt-shaped work according to claim 1, wherein the side plate is entirely embossed in a hemispherical shape. 3. A strip-shaped workpiece unwinding device, a machining or inspection unit, a grip feed device, and a strip-shaped workpiece winding device are provided in this order along the conveyance direction of the strip-shaped workpiece, and the unwinding device and the machining device are also provided. Or between inspection units,
A strip-shaped workpiece processing or inspection apparatus, wherein the strip-shaped workpiece tensioning device according to claim 1 is arranged between the grip feed device and the winding device, respectively.