TW200827273A - Web transfer device and method thereof - Google Patents

Web transfer device and method thereof Download PDF

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Publication number
TW200827273A
TW200827273A TW096135260A TW96135260A TW200827273A TW 200827273 A TW200827273 A TW 200827273A TW 096135260 A TW096135260 A TW 096135260A TW 96135260 A TW96135260 A TW 96135260A TW 200827273 A TW200827273 A TW 200827273A
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TW
Taiwan
Prior art keywords
film
air
roller
conveying
windshield
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TW096135260A
Other languages
Chinese (zh)
Inventor
Masataka Hasegawa
Souichi Kohashi
Hiroshi Kikuchi
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Fujifilm Corp
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Priority to JP2006261382A priority Critical patent/JP2008081230A/en
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of TW200827273A publication Critical patent/TW200827273A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00Registering, tensioning, smoothing or guiding webs
    • B65H23/04Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/24Registering, tensioning, smoothing or guiding webs longitudinally by fluid action, e.g. to retard the running web
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00Registering, tensioning, smoothing or guiding webs
    • B65H23/04Registering, tensioning, smoothing or guiding webs longitudinally
    • B65H23/32Arrangements for turning or reversing webs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00Advancing webs
    • B65H20/10Advancing webs by a feed band against which web is held by fluid pressure, e.g. suction or air blast
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00Advancing webs
    • B65H20/14Advancing webs by direct action on web of moving fluid

Abstract

A web transfer device is provides in a clean room to protect web from dust adhering. The web transfer device can blow air via jet orifices or jet slits provided transferring on the surface of cylinderical roll to float and transfer the web, and is characterized by the fact that a wind shield is provided opposite to the side where a roll net is wrapped on the transfer roll when transferring the web, and a part of transfer surface of the transfer roll is provided vertically against the direction of air flow in the clean room. So, the present invention can solve the problem of dust adhering.

Description

200827273 九、發明說明: 【發明所屬之技術領域 本發明係有關於薄 有關使用氣壓而以非接 搬送方法。 【先前技術】 使用氣壓以非接觸 如專利文獻1至6所揭 式全都是以完全非接觸 1所揭示之裝置,係在 面上,形成多數個空氣 壓縮空氣而讓薄膜浮起 空氣噴出孔所噴出之空 之前後位置上,設置與 2所揭示之裝置,係於 設置可堵塞由空氣噴出 3所揭示之裝置,係於 氣噴出口所噴出之氣流 專利文獻4所揭示之裝 設置搬送板。再者,專 空氣噴出孔噴出之空氣 數空氣噴出口之搬送面 置有多個開縫,又,專 狀態支撐薄膜。 膜搬送裝置及搬送方法者,特別係 觸方式搬送薄膜之薄膜搬送裝置及 方式搬送薄膜之薄膜搬送裝置,係 示般,已提出有各種方式,該等方 狀態而搬送薄膜者。譬如專利文獻 變換薄膜移動方向之圓弧狀的搬送 噴出孔,且藉由此空氣噴出孔噴出 並加以搬送。並且,此裝置爲讓由 氣的壓力分佈均等化,係於搬送面 搬送面相連之導板。又,專利文獻 前述構成之搬送面的前後位置上, 孔所噴出之空氣的構件,專利文獻 搬送面的前後位置上,設置可對空 的流動進行整流之整流板。進而, 置,係於上述搬送面之兩側位置上 利文獻5所揭示之裝置,爲了讓由 的壓力分佈均等化,係在形成有多 的表面上,沿薄膜寬度方向並列設 利文獻6所揭示之裝置,係以彎曲 200827273 惟,前述專利文獻1至6所記載之以完全非接觸狀態 搬送薄膜之裝置,係具有容易受到氣壓變動及薄膜之搬送 張力變動影響’使得薄膜之浮起量易產生變化之缺點。並 且,具有所謂的薄膜產生蛇行及歪斜、搬送速度不均,薄 月旲碰觸到搬送面而損傷薄膜表面之缺點。又,此等方法也 具有所謂無法於精密塗佈程序之前後等加以使用等之可使 用之場所受到限制的缺點。因此,爲解決以上問題,專利 文獻7中,係揭示一種薄膜搬送方法及裝置,其特徵在於 由形成於搬送面上之噴出孔或噴出縫噴出空氣而讓薄膜浮 起,且一邊以邊輥支撐已浮起並加以搬送之薄膜的兩緣 部,一邊進行搬送。又,作爲可防止薄膜翹曲,並使薄膜 穩定地浮起及搬送之裝置,專利文獻8中,揭示一種於氣 體吹出面之寬度方向端部的上部,設置氣體吹出箱之無接 觸式浮起搬送裝置。 【專利文獻1】日本專利公開公報特開昭60-9 3 05 6號 【專利文獻2】日本專利公開公報特開昭61-203 05 5號 【專利文獻3】日本專利公開公報特開昭62- 1 67 1 62號 【專利文獻4】日本專利公開公報特開昭63-225 05 8號 【專利文獻5】日本專利公開公報特開平2- 1 6 3 252號 【專利文獻6】日本專利公開公報特開平8 -245028號 【專利文獻7】日本專利公開公報特開200 1 - 1 06402號 【專利文獻8】日本專利公開公報特開平5 - 3 1 7 7 9 2號 【發明內容】 〔發明所欲解決之課題〕 200827273 惟’專利文獻7及8所揭示之搬送裝置,並無法解決 因搬送張力之變動及浮起氣壓之變動,而讓薄膜接觸到搬 送面所產生之塵埃附著於薄膜上之問題,特別是將該搬送 裝置設置於無塵室內時,由於用以讓薄膜浮起之空氣係由 搬送裝置下部漏出,故有無塵室之氣流紊亂,而使無塵室 內之無塵度降低的問題。 第1圖係顯示前述專利文獻7所揭示之於圓筒狀的搬 送面上,設置有空氣噴出孔之氣流懸浮式輥之立體圖。薄 膜搬送裝置之氣流懸浮式輥,係藉由於表面上設置有空氣 噴出孔之外筒11、內筒12及未予圖式之邊輥所構成,且由 內筒1 2供給之壓縮空氣,藉由設於外筒1丨上之空氣噴出 孔而噴出,讓輥捲入於氣流懸浮式輥之外筒1 1上,即未予 圖式之薄膜浮起並加以搬送。又,亦可在氣流懸浮式輥上, 近接地設有鄰近式輥1 3,而可順暢地進行薄膜搬送之構成 者。 第2圖係顯示此氣流懸浮式輥之截面中的氣流流動狀 態之說明圖。薄膜1 5係隔著氣流懸浮式輥之邊輥1 4而相 接觸或倚近,並藉由氣流懸浮式輥之內筒1 2所供給,且由 設置於外筒1 1上之噴出孔所噴出之空氣而浮起並被搬 送。外筒11係遍及整個圓筒形之表面而設置有噴出孔,圖 式中,上方因存在有薄膜15,故空氣在圖式中係在下方流 動。於此下方流動之空氣會讓無塵室內之氣流產生紊亂, 使得塵埃附著於薄膜1 5上。又,因薄膜1 5亦存在與圖面 平行之面上,故流出之空氣在圖面中,係於下方成爲強烈 200827273 的氣流而流出。如第2圖所示,由於如此產生之氣流會讓 周圍的空氣受到吸引(噴射效果)而產生誘導風,薄膜與搬 送裝置中之接觸面所產生之塵埃將因搬送風而移動,附著 於薄膜15之塗佈面側(薄膜的浮起面側)上。 又’一般的下沈氣流式之無塵室中,由上往下流動之 氣流的風量及風速係一定,不會產生氣流之渦流等,但如 前述’若僅特定區域產生強烈之氣流時,係會產生氣流之 渦流等,因此塵埃將滯留於特定之區域內,或所滯留之塵 埃上揚’而降低無塵室內之無塵度,且塵埃附著於薄膜15 表面上而造成污染。 本發明係有鑑於上述情事而創作完成者,特別係提供 一種能夠儘可能地降低對無塵室內之氣流流動造成影響, 且能夠儘可能地防止附著於薄膜上之塵埃,並預防無塵室 內之無塵度降低之薄膜搬送裝置及搬送方法。 〔用以解決問題之手段〕 本發明第1態樣係一種薄膜搬送裝置,係由形成於圓 筒形搬送輥的搬送面上之噴出孔或噴出縫噴出空氣,而邊 讓薄膜浮起邊進行搬送者,其特徵在於:於搬送薄膜時, 在與前述搬送輥之捲繞輥網側之相反側上設置遮風板。 本發明第2態樣係如第1態樣所載之薄膜搬送裝置, 其中前述薄膜搬送裝置係設置於無塵室內。 本發明第3態樣係如第1或2態樣所載之薄膜搬送裝 置’其中前述搬送輥之搬送面的一部分,係相對於前述無 塵室中之空氣流動的方向呈略垂直地設置。 200827273 本發明第4態樣係如第1至3態樣中任一態樣所載之 薄膜搬送裝置,其中前述遮風板所設置之位置,係距離前 述搬送輥10mm以上、i〇〇mm以下之位置。 本發明第5態樣係如第!至4態樣中任一態樣所載之 晶圓搬送裝置,其中由形成於前述搬送輥之搬送面上的噴 出孔或噴出縫所噴出之空氣,係藉由前述遮風板而往朝向 薄膜寬度兩端之方向流動。 本發明第6態樣係如第1至5態樣中任一態樣所載之 薄膜搬送裝置,其中前述遮風板之薄膜寬度方向的長度, 係比前述薄膜之寬度還狹窄。 本發明第7態樣係一種薄膜搬送方法,係由形成於圓 筒形搬送輥的搬送面上之噴出孔或噴出縫噴出空氣,而邊 讓薄膜浮起邊進行搬送者,其特徵在於:於搬送晶圓時, 在與前述搬送輥之輥網捲繞側之相反側上設置遮風板,且 邊由噴出孔或噴出縫噴出空氣一邊進行搬送。 本發明第8態樣係如第7態樣所載之薄膜搬送方法, 其中前述搬送輥係設置於無塵室內,且前述搬送輥之搬送 面的一部分,係相對於前述無塵室中之空氣流動的方向呈 略垂直地設置。 本發明第9態樣係如第7或8態樣所載之薄膜搬送方 法,其中由形成於前述搬送I昆之搬送面上的噴出孔或噴出 縫所噴出之空氣,係藉由前述遮風板而往朝向晶圓寬度兩 端之方向流動。 本發明第1 0態樣係如第7至9態樣中任一態樣所載之 200827273 薄膜搬送方法,其中前述遮風板之薄膜寬度方向的長度, 係比前述薄膜之寬度還狹窄。 〔發明之功效〕 以上,依本發明之薄膜搬送裝置及搬送方法,縱使將 本發明之裝置設置於無塵室內,對無塵室內之氣流流動所 造成的影響亦少,且能儘可能地防止附著於薄膜上之塵 埃,具有防止無塵室內之無塵度降低之效果。又,即便是 將本發明之裝置設置於無塵室以外之場所,亦可降低附著 ί 於薄膜上之塵埃。 【實施形態】 〔薄膜搬送裝置〕 茲依附上的圖式來說明本發明之薄膜搬送裝置及搬送 方法。 第3圖係顯示本發明薄膜搬送裝置之氣流懸浮式輥的 截面中之氣流流動狀態的說明圖。 具體言之,係將遮風板2 6設置於與氣流懸浮式輥之捲 ν 繞薄膜2 5之側的相反側上的構造,此氣流懸浮式輥係由圓 筒狀表面上設置有用以噴出空氣之噴出孔的外筒2 1、供給 空氣之內筒22及邊輥24所構成。藉由此構成,圖式中於 下方流出的氣流,係沿薄膜25之寬度方向流動且流向左 右。如此,流向左右之氣流在下沈氣流式的無塵室中’係 與由上而下流動的氣流一同流動。藉此,可極力降低因氣 流而產生之渦流等,並可減少塵埃附著於薄膜25之表面 上0 -10- 200827273 茲依第4圖、第5圖作更詳細地說明。第4圖係顯 本發明之薄膜搬送裝置的立體圖,第5圖係顯示剖面圖 氣流懸浮式輥係由內筒2 2、外筒2 1及未圖示之邊輥所 成。內筒22爲中空狀,其周圍形成有多數噴出孔。此內 22之兩端部係藉由未圖示之軸支撐部而予以固定支撐, 其兩端部分別連結未圖示之空氣供給配管。又,外筒2 1 爲圓筒形的中空狀,且內部收納有內筒22。該外筒2 1之 筒形搬送面(薄膜搬送時以薄膜加以覆蓋之面)的表面上 ^ 形成有多數空氣噴出孔。 遮風板26係藉由未圖示之支撐體而固定於此氣流 浮式輥之下部。此遮風板26係形成薄膜25寬度方向之 度較薄膜25之寬度還狹窄,又,薄膜25行進方向的長虔 係形成與設置於氣流懸浮式輥之前段與後段的二個鄰近 2 3之間隔略相同的長度。再者,氣流懸浮式輥與遮風板 之距離Η,宜爲1 0至1 0 0 m m,依發明者所做之實驗,確 只要是此距離之範圍內,遮風板26不與薄膜25接觸且 I 抑制塵埃附著於薄膜上。又,鄰近輥23係與氣流懸浮式 爲略相同形狀者,其兩端軸部係藉由未圖示之軸承支撐 可自由旋轉,且接觸並支撐薄膜25之上面。 以上構成之薄膜搬送裝置中,當由氣流懸浮式輥之 筒22兩端供給壓縮空氣時,此壓縮空氣係由形成於內筒 上之未圖示的空氣噴出孔讓空氣噴出於內筒22之外部。 經噴出的空氣係進而由設置於外筒2 1上之空氣噴出孔 噴出於外部,並藉由此噴出的空氣而讓薄膜25浮起並進 示 〇 構 筒 且 亦 圓 懸 長 輥 26 認 可 輥 成 內 22 此 而 行 -11- 200827273 搬送。 又’在搬送薄膜25時,薄膜25的上面係由 流懸浮式輥之前段與後段之鄰近式輥2 3所支撐, 讓氣流懸浮式輥之外筒2 1的搬送面中之薄膜25 穩定。 以上構成中,由氣流懸浮式輥之外筒2 1上的 噴出的空氣,在薄膜25存在之方向中雖可讓薄膜 但空氣會形成流動於未存在有薄膜2 5的方向上之 一方面,從未存在有薄膜25之外筒21上的噴出 之空氣,則直接流出。 因此,由設置於氣流懸浮式輥之外筒2 1上的 噴出之空氣,會成爲在未存有薄膜25之方向上 流。本發明之薄膜搬送裝置中,此氣流係依設於 式輥下部之遮風板2 6而改變氣流的流動方向,在 式輥之軸向,亦即成爲在薄膜25寬度方向上流動 / 之後’此氣流係由氣流懸浮式輥之周圍流出於外 在無塵室內流動的氣流合流,而懸浮在氣流中的 與氣流一起運送至離開薄膜25之場所,可防止附 25上。 以上,本發明之薄膜搬送裝置之構成,係不 室內之氣流造成紊亂,並能以簡單之構成來防止 於薄膜2 5上。 在此’除了以上說明之設置有遮風板2 6單體 薄膜搬送裝置外,亦可藉由下述構成而將氣流之 設置於氣 因此,可 的浮起量 噴出孔所 2 5浮起, .氣流。另 孔所噴出 噴出孔所 流動的氣 氣流懸浮 氣流懸浮 t之氣流。 部,且與 塵埃,則 著於薄膜 會對無塵 塵埃附著 之構成的 流向調整 -12-200827273 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method of non-transportation relating to the use of air pressure. [Prior Art] Using Air Pressure to Non-Contact As disclosed in Patent Documents 1 to 6, all of the devices disclosed in the completely non-contact 1, are formed on the surface, and a plurality of air-compressed air are formed to allow the film to float up the air ejection hole. In the position before and after the ejection, the device disclosed in the second aspect is provided with a device for clogging the air ejection 3, and is attached to the gas jet outlet. Furthermore, the air jetted from the special air ejection hole is provided with a plurality of slits on the conveying surface of the air ejection port, and the film is supported by the special state. In the case of the film transporting device and the transporting method, the film transporting device of the film transporting film and the film transporting device for transporting the film are generally described. Various methods have been proposed, and the film is transported in such a state. For example, in the patent document, the arc-shaped transfer discharge holes in the moving direction of the film are transferred, and are ejected by the air ejection holes and transported. Further, this device is a guide plate which is connected to the conveying surface of the conveying surface so that the pressure distribution of the gas is equalized. Further, in the front and rear positions of the conveying surface of the above-described configuration, the member for the air ejected from the hole is provided with a rectifying plate capable of rectifying the flow of the air in the front and rear positions of the transfer surface of the patent document. Further, the apparatus disclosed in the literature 5 is placed on both sides of the transport surface, and in order to equalize the pressure distribution, the surface of the film is arranged in parallel along the width direction of the film. The apparatus disclosed in the above-mentioned Patent Documents 1 to 6 is a device for transporting a film in a completely non-contact state, which is susceptible to fluctuations in air pressure and variations in transport tension of the film, so that the floating amount of the film is easy. The shortcomings of change. Further, there is a so-called film which causes meandering and skewing, uneven conveyance speed, and the thin moon smashes the conveying surface to damage the surface of the film. Moreover, these methods also have the disadvantage that the place where they can be used before and after the precision coating process is limited. Therefore, in order to solve the above problems, Patent Document 7 discloses a film transfer method and apparatus characterized in that a film is floated by a discharge hole or a discharge slit formed on a transfer surface, and is supported by a side roller. Both edges of the film that has been floated and transported are transported. Moreover, as an apparatus which can prevent the film from being warped and to stably float and transport the film, Patent Document 8 discloses a contactless floating device in which an air blowing box is provided at an upper portion of the end portion in the width direction of the gas blowing surface. Transfer device. [Patent Document 1] Japanese Laid-Open Patent Publication No. JP-A No. 61-203 05 No. Japanese Patent Laid-Open Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Patent Document 7] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. In order to solve the problem, the transfer device disclosed in Patent Documents 7 and 8 cannot solve the problem that the dust generated by the film contacting the transfer surface adheres to the film due to the change in the conveyance tension and the fluctuation of the floating air pressure. In particular, when the conveying device is installed in the clean room, since the air for floating the film is leaked from the lower portion of the conveying device, the airflow in the clean room is disturbed, and the dust-freeness in the clean room is lowered. of question. Fig. 1 is a perspective view showing the air suspension type roll in which the air ejection hole is provided on the cylindrical conveying surface disclosed in the above Patent Document 7. The air-floating roller of the film conveying device is constituted by a cylinder 11 provided with an air ejection hole on the surface, an inner cylinder 12, and a side roller which is not patterned, and the compressed air supplied from the inner cylinder 12 is borrowed. The air is ejected from the air ejection hole provided in the outer cylinder 1 and the roller is wound around the outer cylinder 11 of the air suspension type roller, that is, the film of the unillustrated type is floated and transported. Further, it is also possible to smoothly form the film transporting member by providing the adjacent roller 13 in the vicinity of the air suspension roller. Fig. 2 is an explanatory view showing the flow state of the airflow in the cross section of the air suspension roller. The film 15 is in contact or close to each other via the side roller 14 of the air suspension roller, and is supplied by the inner cylinder 12 of the air suspension roller, and is provided by the discharge hole provided on the outer cylinder 1 The air that is ejected floats and is transported. The outer cylinder 11 is provided with a discharge hole over the entire surface of the cylindrical shape. In the drawing, since the film 15 is present on the upper side, the air flows downward in the drawing. The air flowing underneath will cause the airflow in the clean room to be disordered, so that the dust adheres to the film 15. Further, since the film 15 also has a surface parallel to the plane of the drawing, the air which flows out flows out in the drawing surface and becomes a strong airflow of 200827273. As shown in Fig. 2, the air generated in this way causes the surrounding air to be attracted (spraying effect) to generate induced wind, and the dust generated by the contact surface between the film and the conveying device moves due to the conveying wind, and adheres to the film. 15 on the coated side (the floating side of the film). In the general clean airflow type clean room, the airflow and wind speed of the airflow flowing from the top to the bottom are constant, and the eddy current of the airflow does not occur, but as described above, if only a certain area generates a strong airflow, A vortex or the like of the airflow is generated, so that the dust stays in a specific area, or the retained dust rises, and the dust-freeness in the clean room is lowered, and the dust adheres to the surface of the film 15 to cause contamination. The present invention has been made in view of the above circumstances, and in particular, provides a method capable of reducing the influence of airflow in a clean room as much as possible, and preventing dust adhering to the film as much as possible, and preventing the dust-free room. A film transfer device and a transfer method with reduced dustiness. [Means for Solving the Problem] The first aspect of the present invention is a film transporting apparatus which ejects air from a discharge hole or a discharge slit formed on a conveying surface of a cylindrical conveying roller while allowing the film to float. The conveyer is characterized in that a windshield is provided on the side opposite to the winding roller side of the conveying roller when the film is conveyed. According to a second aspect of the present invention, there is provided a film conveying apparatus according to the first aspect, wherein the film conveying apparatus is installed in a clean room. According to a third aspect of the present invention, in the film conveying apparatus of the first or second aspect, a part of the conveying surface of the conveying roller is disposed slightly perpendicular to a direction in which the air in the clean room flows. The film conveying device according to any one of the first to third aspects of the present invention, wherein the position of the windshield is set to be 10 mm or more and i〇〇 mm or less from the conveying roller. The location. The fifth aspect of the present invention is as in the first! The wafer transfer device according to any one of the four aspects, wherein the air ejected from the ejection holes or the ejection slits formed on the transfer surface of the transfer roller is directed toward the film by the wind shield Flow in the direction of both ends of the width. According to a sixth aspect of the invention, the film conveying device of any one of the first aspect to the fifth aspect, wherein the length of the windshield in the film width direction is narrower than the width of the film. According to a seventh aspect of the present invention, in a film transporting method, a film is formed by ejecting air from a discharge hole or a discharge slit formed on a conveying surface of a cylindrical conveying roller, and the film is conveyed while being floated. When the wafer is conveyed, a windshield is provided on the side opposite to the winding side of the roll of the transfer roller, and the air is ejected while ejecting air from the discharge hole or the discharge slit. According to a ninth aspect of the present invention, in the film transport method of the seventh aspect, the transport roller is disposed in the clean room, and a part of the transport surface of the transport roller is opposed to the air in the clean room The direction of flow is set slightly vertically. According to a ninth aspect of the present invention, there is provided a film transporting method according to the seventh or eighth aspect, wherein the air ejected from the ejecting hole or the ejecting slit formed on the conveying surface of the transporting conveyance is caused by the wind The plates flow toward both ends of the width of the wafer. The tenth aspect of the present invention is the method of transporting the film according to any one of the seventh to ninth aspects, wherein the length of the windshield in the film width direction is narrower than the width of the film. [Effects of the Invention] According to the film transporting apparatus and the transporting method of the present invention, even if the apparatus of the present invention is installed in the clean room, the influence on the flow of the airflow in the clean room is small, and it can be prevented as much as possible. The dust adhering to the film has the effect of preventing the dust-freeness in the clean room from being lowered. Further, even if the apparatus of the present invention is installed in a place other than the clean room, the dust adhering to the film can be reduced. [Embodiment] [Film Transfer Apparatus] The film transport apparatus and transport method of the present invention will be described with reference to the drawings. Fig. 3 is an explanatory view showing a flow state of a gas flow in a section of an air suspension type roll of the film conveying device of the present invention. Specifically, the windshield plate 26 is disposed on the opposite side of the side of the air-suspended roll ν around the film 25, and the air-suspended roll is provided on the cylindrical surface to be ejected. The outer cylinder 21 of the air ejection hole, the inner cylinder 22 for supplying air, and the side roller 24 are formed. By this configuration, the air current flowing downward in the drawing flows in the width direction of the film 25 and flows to the left and right. Thus, the airflow to the left and right flows in the downdraft-type clean room' with the airflow flowing from the top to the bottom. Thereby, the eddy current or the like due to the air flow can be reduced as much as possible, and the dust can be reduced from adhering to the surface of the film 25. 0 -10- 200827273 This will be explained in more detail with reference to Figs. 4 and 5 . Fig. 4 is a perspective view showing a film transporting apparatus of the present invention, and Fig. 5 is a cross-sectional view showing a flow-suspended roller system comprising an inner cylinder 2, an outer cylinder 2, and a side roller (not shown). The inner cylinder 22 has a hollow shape, and a plurality of discharge holes are formed around the inner cylinder 22. Both end portions of the inner portion 22 are fixedly supported by a shaft support portion (not shown), and air supply pipes (not shown) are connected to both end portions thereof. Further, the outer cylinder 2 1 has a hollow hollow shape and houses the inner cylinder 22 therein. A plurality of air ejection holes are formed on the surface of the cylindrical transfer surface of the outer cylinder 2 (the surface covered by the film during film conveyance). The windshield 26 is fixed to the lower portion of the air flow floating roller by a support (not shown). The windshield 26 is formed to have a narrower width in the width direction of the film 25 than the width of the film 25. Further, the long lanthanum formation in the traveling direction of the film 25 is formed in two adjacent portions of the front and rear sections of the air suspension roller. The length is slightly the same. Furthermore, the distance between the air suspension roller and the windshield is preferably from 10 to 100 mm. According to experiments conducted by the inventors, it is true that the windshield 26 does not overlap with the film 25 as long as it is within this distance. Contact and I inhibit dust from adhering to the film. Further, the adjacent roller 23 has a shape similar to that of the air suspension type, and the shaft portions at both ends are rotatably supported by a bearing (not shown) and contact and support the upper surface of the film 25. In the film transfer apparatus configured as described above, when compressed air is supplied from both ends of the air suspension type drum 22, the compressed air is caused to be ejected from the inner cylinder 22 by an air ejection hole (not shown) formed in the inner cylinder. external. The ejected air system is further sprayed to the outside by the air ejection holes provided on the outer cylinder 21, and the film 25 is floated by the air thus ejected and introduced into the crucible cylinder and also the circular suspension roller 26 is recognized as a roller. Inside 22 This is OK-11-200827273. Further, when the film 25 is conveyed, the upper surface of the film 25 is supported by the adjacent rolls 23 of the front and rear stages of the flow-suspended roll, and the film 25 in the transfer surface of the outer tube 2 1 of the air-suspended roll is stabilized. In the above configuration, the air ejected from the outer cylinder 2 1 of the air suspension type roller allows the film to be formed in the direction in which the film 25 is present, but the air is formed to flow in the direction in which the film 25 is not present. The air that has never been ejected from the outer cylinder 21 of the film 25 flows out directly. Therefore, the air ejected from the outer cylinder 2 1 of the air suspension type roller flows upward in the direction in which the film 25 is not present. In the film transporting apparatus of the present invention, the airflow changes the flow direction of the airflow depending on the windshield plate 26 at the lower portion of the roller, and flows in the axial direction of the roller, that is, in the width direction of the film 25. This air flow is merged by the airflow flowing around the air-suspended roller flowing out of the external clean room, and the air suspension suspended in the air flow is carried along with the air flow to the place away from the film 25, and the attachment 25 is prevented. As described above, the film transporting apparatus of the present invention is configured to prevent turbulence caused by airflow in the room, and can be prevented from being formed on the film 25 with a simple configuration. Here, in addition to the above-described single-film conveying device provided with the windshield plate 26, the airflow can be set to the air by the following configuration, and the floating amount of the discharge holes can be floated. .airflow. In addition, the air flow from the hole ejected from the ejection hole suspends the air flow of the air suspension t. Part, and with dust, the flow direction of the film will adhere to the dust-free dust. -12-

200827273 爲最適宜之流向,即,如第6圖所示’由外筒21及 構成之氣流懸浮式輥與遮風板26之間’另設置有平 之構成,或是如第7圖所示’由外筒21及內筒22 氣流懸浮式輥與遮風板26之間,設置有彎曲板28二 抑或如第8圖所示,由外筒2丨及內筒22構成之氣 式輥與遮風板2 6之間,設置有多孔質體所組成之多 2 9之構成。 又,如第9圖所示,上述之氣流懸浮式輥與遮 間之距離Η,之所以宜在1〇至l〇〇mm之理由爲’ ΐ: 爲1 0 0 m m以上時,當氣流碰觸到遮風板2 6時’粲 與遮風板2 6之面垂直的方向上改變流向’因此有麈 於薄膜25之情形。相反地,距離Η爲10mm以下_ 壓及搬送張力之變動使得薄膜25產生振動時,會因 碰觸到遮風板26而導致薄膜25不良之情形。根搨 氣流懸浮式輥與遮風板2 6間之距離Η,宜在1 0至 再者,本發明之薄膜搬送裝置設置於氣流下: 塵室內時,遮風板26之薄膜25之寬度方向的寬 薄膜25之寬度Ρ還狹窄,且宜較設置於氣流懸浮 之邊輥24的間隔還寬廣。若在此範圍之寬度時, 浮式輥之外筒2 1所噴出的空氣,不會直接以強烈 下方流動,可減少氣流之渦流產生,且不會對在 流動之氣流造成妨礙。 【實施例】 兹說明本實施形態中之薄膜搬送裝置的實施 內筒22 面板27 構成之 之構成, ,流懸浮 ,孔質板 風板26 Ξ距離Η ,流會在 丨埃附著 Ρ,因氣 薄膜25 〖上述, 10 0mmo ;式之無 ί,宜較 :輥兩側 [氣流懸 J風量在 ;塵室內 。此薄 200827273 膜搬送裝置係可使用於,在無塵室內欲避免與薄膜相碰觸 而進行搬送之印刷或照片感光材料、光學補償膜、防止反 射膜等各種功能性之光學膜的製造上。 具體而言,薄膜搬送裝置中之氣流懸浮式輥之外形係 4 7 5mm,供給於氣流懸浮式輥之供給空氣的壓力’係5至 20kPa。薄膜25之寬度爲1〇〇〇至1 5 00mm,厚度爲50至1〇〇 // m。此薄膜25之搬送速度爲20至50m/分,且薄膜25之 搬送張力爲100至5 00N/m。 ίχ 有關此薄膜搬送裝置之氣流懸浮式輥之下部設置有遮 風板26以及將之取下之情形,係藉由微塵粒子計數器來測 量無塵室內之塵埃數而進行。將此結果顯示於第1 〇圖。具 體而言,係測量0.5 // m以下之塵埃在每1立方英尺的個 數。由一開始至3點40分左右,係設置有遮風板26之構 成的本發明薄膜搬送裝置之情形的數値。此場合中’塵埃 之數量極少且無塵室內幾乎未存有塵埃。故,此狀態中, 幾乎無塵埃附著於薄膜25上而污染薄膜25表面之可能 I 性。之後,藉由去除遮風板26,而作成習知之薄膜搬送裝 置相同構造的場合中,塵埃之數量上升,無塵室內漂浮有 許多塵埃。因此,塵埃附著於薄膜25上而造成污染之可能 性提高。其後,7點左右之後,再度爲設置有遮風板2 6之 構成的本發明薄膜搬送裝置的場合中,塵埃之數量再次變 得極少,幾乎沒有塵埃附著於薄膜25上而污染表面之可能 性。 以上,於氣流懸浮式輥之下部設置有遮風板2 6之構成 -14- 200827273 的本發明之薄膜搬送裝置,係可不降低無塵室內之無塵 度,且能盡可能地防止塵埃附著於薄膜2 5表面上。 以上,詳細說明了本發明之薄膜搬送裝置及搬送方 法,但本發明並不限於以上的例子,於不脫離本發明要旨 之範圍內,可做各種改良及變形。 •【圖式簡單說明】 第1圖係習知薄膜搬送裝置之氣流懸浮式輥的立體 圖。 ί I 第2圖係習知薄膜搬送裝置中之氣流懸浮式輥與薄膜 平行的剖面圖。 第3圖係本發明之薄膜搬送裝置中之氣流懸浮式輥與 薄膜平行的剖面圖。 第4圖係本發明薄膜搬送裝置之氣流懸浮式輥之立體 圖。 第5圖係本發明薄膜搬送裝置中之氣流懸浮式輥與薄 膜垂直的剖面圖。 ί.; 第6圖係本發明另一薄膜搬送裝置中之氣流懸浮式輥 與薄膜垂直的剖面圖。 第7圖係本發明另一薄膜搬送裝置中之氣流懸浮式輥 與薄膜垂直的剖面圖。 第8圖係本發明另一薄膜搬送裝置中之氣流懸浮式輥 與薄膜垂直的剖面圖。 第9圖係說明氣流懸浮式輥與遮風板間之距離的說明 圖0 200827273 構造之薄膜搬送裝置與習知構造之 數的無塵度測量結果。 第10圖係本發 薄膜搬送裝置中之塵 【主要元件符號說明 11 外筒 12 內筒 13 鄰近式輥 14 邊輥 15 薄膜 21 外筒(氣流懸 22 內筒(氣流懸 23 鄰近式輥 24 邊輥 25 薄膜 , 26 遮風板 27 平面板 28 彎曲板 29 多孔質板 Η 距離 S 間隔 Ρ 寬度 浮式輥) 浮式輥)200827273 is the most suitable flow direction, that is, as shown in Fig. 6, 'between the outer cylinder 21 and the air suspension roller and the air shielding plate 26, which are formed with a flat structure, or as shown in Fig. 7 'Between the outer cylinder 21 and the inner cylinder 22, the air suspension roller and the wind shield 26 are provided with a curved plate 28 or as shown in Fig. 8, the air roller composed of the outer cylinder 2 and the inner cylinder 22 Between the windshield plates 26, a plurality of porous bodies are formed. Further, as shown in Fig. 9, the distance between the above-mentioned air-suspended roller and the cover Η is preferably 1 〇 to l 〇〇 mm for the reason ': when it is more than 100 mm, when the airflow is encountered When the windshield is touched, the flow direction is changed in the direction perpendicular to the surface of the windshield plate 6 6 and thus is in contact with the film 25. On the other hand, when the distance Η is 10 mm or less _ the pressure and the change in the conveyance tension cause the film 25 to vibrate, the film 25 may be inferior due to the contact with the wind shield 26 . The distance between the airflow suspension roller and the windshield 26 is preferably 10 or more. The film transporting device of the present invention is disposed under the airflow: in the dust chamber, the width direction of the film 25 of the windshield 26 The width Ρ of the wide film 25 is also narrow, and it is preferable to have a wider interval than the roller 24 disposed on the side of the air suspension. If it is within the width of this range, the air ejected from the outer cylinder 2 of the floating roller does not directly flow downward strongly, and the vortex flow of the airflow can be reduced without impeding the flow of the air. [Embodiment] The configuration of the inner tube 22 panel 27 of the film transfer device according to the present embodiment will be described. The flow suspension and the perforated plate wind plate 26 are separated by a distance Η, and the flow is adhered to the 丨, due to the gas. Film 25 〖above, 10 0mmo; no ί, should be compared: on both sides of the roller [airflow J air volume in; dust room. This thin film 200827273 film transport apparatus can be used for the manufacture of various functional optical films, such as printing, photo-sensitive materials, optical compensation films, and anti-reflection films, which are transported in a clean room to avoid contact with the film. Specifically, the shape of the air suspension roller in the film conveying device is 475 mm, and the pressure of the supply air supplied to the air suspension roller is 5 to 20 kPa. The film 25 has a width of 1 〇〇〇 to 1 500 mm and a thickness of 50 to 1 〇〇 // m. The film 25 has a conveying speed of 20 to 50 m/min, and the film 25 has a conveying tension of 100 to 500 N/m. χ The case where the windshield 26 is provided under the air suspension roller of the film transporting device and is removed is measured by the dust particle counter to measure the dust number in the clean room. This result is shown in the first map. Specifically, it measures the number of dust below 0.5 // m per 1 cubic foot. From the beginning to about 3:40, the number of cases in which the film transporting device of the present invention is constituted by the windshield 26 is provided. In this case, the amount of dust is extremely small and there is almost no dust in the clean room. Therefore, in this state, almost no dust adheres to the film 25 to contaminate the surface of the film 25. Thereafter, when the windshield 26 is removed to form the same structure as the conventional film transporting device, the amount of dust rises, and a lot of dust floats in the clean room. Therefore, dust is attached to the film 25 to increase the possibility of contamination. Then, in the case of the film transporting apparatus of the present invention having the configuration of the windshield 26, after about 7 o'clock, the amount of dust is again extremely small, and there is almost no dust adhering to the film 25 to contaminate the surface. Sex. In the above, the film conveying device of the present invention having the windshield plate 26 is disposed under the air suspension plate, and the film conveying device of the present invention can prevent the dust from adhering to the dust-free chamber and prevent the dust from adhering as much as possible. The film 2 5 is on the surface. Although the film conveying apparatus and the conveying method of the present invention have been described in detail above, the present invention is not limited to the above examples, and various modifications and changes can be made without departing from the scope of the invention. • [Simplified Schematic Description] Fig. 1 is a perspective view of a conventional air-floating roller of a film transport device. ί I Fig. 2 is a cross-sectional view of the air suspension roller in the conventional film transport apparatus in parallel with the film. Fig. 3 is a cross-sectional view showing the air suspension roller in the film conveying device of the present invention in parallel with the film. Fig. 4 is a perspective view showing the air suspension type roller of the film conveying device of the present invention. Fig. 5 is a cross-sectional view showing the air suspension roller and the film in the film conveying device of the present invention. Fig. 6 is a cross-sectional view of the air suspension roller in the film transporting apparatus of the present invention perpendicular to the film. Fig. 7 is a cross-sectional view showing the air suspension roller in the film transporting apparatus of the present invention perpendicular to the film. Fig. 8 is a cross-sectional view showing the air suspension roller in the film transporting apparatus of the present invention perpendicular to the film. Fig. 9 is a view showing the distance between the air suspension roller and the windshield. Fig. 0 The dustlessness measurement result of the number of the film conveying device and the conventional structure of the structure 200827273. Figure 10 is the dust in the film conveying device [Main component symbol description 11 Outer cylinder 12 Inner cylinder 13 Adjacent roller 14 Side roller 15 Film 21 Outer cylinder (Air suspension 22 Inner cylinder (Air suspension 23 Adjacent roller 24 side) Roller 25 film, 26 windshield 27 flat plate 28 curved plate 29 porous plate Η distance S interval 宽度 width floating roll) floating roll)

Claims (1)

200827273 十、申請專利範圍: 1. 一種薄膜搬送裝置,係由形成於圓筒形搬送輥的搬送面 上之噴出孔或噴出縫噴出空氣,而邊讓薄膜浮起邊進行 搬送者’其特徵在於: 於搬送薄膜時,在與前述搬送輥之捲繞有輥網那側之 相反側上設置遮風板。 2. 如申請專利範圍第1項之薄膜搬送裝置,其中前述薄膜 搬送裝置係設置於無塵室內。 r 〜 3.如申請專利範圍第1或2項之薄膜搬送裝置,其中前述 搬送輥之搬送面的一部分,係相對於前述無塵室中之空 氣流動的方向呈略垂直地設置。 4.如申請專利範圍第1至3項中任一項之薄膜搬送裝置, 其中前述遮風板係設置在距離前述搬送輥1 〇mm以上、 100mm以下的位置。 5 ·如申請專利範圍第1至4項中任一項之薄膜搬送裝置, 其中由形成於前述搬送輥之搬送面上的噴出孔或噴出縫 ί ι 所噴出之空氣,係藉由前述遮風板而往朝向薄膜寬度兩 端之方向流動。 6 ·如申請專利範圍第1至5項中任〜項之薄膜搬送裝置, 其中前述遮風扳之薄膜寬度方向的長度,係比前述薄膜 之寬度還狹窄。 7 · —種薄膜搬送方法’係由形成於圓筒形搬送輥的搬送面 上之噴出孔或噴出縫噴出空氣’而邊讓薄膜浮起邊進行 搬送者,其特徵在於: -17- 200827273 於搬送薄膜時,在與前述搬送輥之捲繞有輥網那側之 相反側上設置遮風板,且邊由噴出孔或噴出縫噴出空氣 一邊進行搬送。 8 .如申請專利範圍第7項之薄膜搬送方法,其中前述搬送 輥係設置於無塵室內, 且前述搬送輥之搬送面的一部分,係相對於前述無塵 室中之空氣流動的方向呈略垂直地設置。 r 9 ·如申請專利範圍第7或8項之薄膜搬送方法,其中由形 \ S … \ 成於前述搬送輕之搬送面上的噴出孔或噴出縫所噴出之 空氣,係藉由前述遮風板而往朝向薄膜寬度兩端之方向 流動。 1 0.如申請專利範圍第7至9項中任一項之薄膜搬送方法, 其中前述遮風板之薄膜寬度方向的長度,係比前述薄膜 之寬度還狹窄。200827273 X. Patent application scope: 1. A film conveying device which is characterized in that a film is formed by ejecting air from a discharge hole or a discharge slit formed on a conveying surface of a cylindrical conveying roller, and allowing the film to float while being transported. When the film is conveyed, a windshield is provided on the side opposite to the side of the conveying roller on which the roll net is wound. 2. The film transfer device of claim 1, wherein the film transfer device is disposed in a clean room. The film conveying apparatus according to claim 1 or 2, wherein a part of the conveying surface of the conveying roller is disposed slightly perpendicular to a direction in which the air flows in the clean room. 4. The film conveying device according to any one of claims 1 to 3, wherein the windshield plate is provided at a position of 〇mm or more and 100 mm or less from the conveying roller. The film transporting apparatus according to any one of claims 1 to 4, wherein the air ejected by the ejecting hole or the ejecting slit ί formed on the conveying surface of the conveying roller is occluded by the aforementioned wind The plates flow in the direction toward both ends of the width of the film. The film transporting apparatus according to any one of claims 1 to 5, wherein the length of the windshield in the width direction of the film is narrower than the width of the film. (7) The film transport method is a method in which a film is formed by ejecting air from a discharge hole or a discharge slit formed on a conveyance surface of a cylindrical conveyance roller, and the film is floated while being conveyed, and is characterized in that: -17- 200827273 When the film is conveyed, a windshield is provided on the side opposite to the side on which the roll web is wound around the transport roller, and the air is ejected while ejecting air from the discharge hole or the discharge slit. 8. The film transfer method according to claim 7, wherein the transfer roller is disposed in the clean room, and a part of the transfer surface of the transfer roller is slightly inclined with respect to a direction in which the air flows in the clean room. Set vertically. r 9 The method of film transport according to claim 7 or 8, wherein the air ejected from the ejection hole or the ejection slit of the transporting surface on the transporting surface is formed by the aforementioned wind The plates flow in the direction toward both ends of the width of the film. The film transporting method according to any one of claims 7 to 9, wherein the length of the windshield in the film width direction is narrower than the width of the film. -18--18-
TW096135260A 2006-09-26 2007-09-21 Web transfer device and method thereof TW200827273A (en)

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JP2009179427A (en) * 2008-01-30 2009-08-13 Fujifilm Corp Conveying device and vacuum film deposition device
JP5467905B2 (en) * 2010-03-25 2014-04-09 富士フイルム株式会社 Film conveying apparatus and method, film manufacturing apparatus and method
JP5759033B2 (en) * 2014-02-07 2015-08-05 帝人株式会社 Curing agent, adhesive using the same, and paint
JP5883538B1 (en) * 2015-12-14 2016-03-15 株式会社大栄製作所 Levitation device and transfer device provided with the levitating device
JP6626158B2 (en) * 2018-06-11 2019-12-25 日東電工株式会社 Laminating device with shielding member

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