JP2003208704A - Magnetic head and its manufacturing method - Google Patents

Magnetic head and its manufacturing method

Info

Publication number
JP2003208704A
JP2003208704A JP2002005593A JP2002005593A JP2003208704A JP 2003208704 A JP2003208704 A JP 2003208704A JP 2002005593 A JP2002005593 A JP 2002005593A JP 2002005593 A JP2002005593 A JP 2002005593A JP 2003208704 A JP2003208704 A JP 2003208704A
Authority
JP
Japan
Prior art keywords
glass
gap
film
core
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002005593A
Other languages
Japanese (ja)
Inventor
Yasushi Inoue
靖 井上
Hiroshi Adachi
博史 足立
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2002005593A priority Critical patent/JP2003208704A/en
Publication of JP2003208704A publication Critical patent/JP2003208704A/en
Pending legal-status Critical Current

Links

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-quality magnetic head wherein there are no bubbles nor cracks in reinforced glass even when high melting point reinforced glass or gap adhesion glass film is used, and a method for manufacturing the same. <P>SOLUTION: By bonding the gap adhesion glass film 3 of a core half 8 having high melting point reinforced glass 7 on a winding wire window to a chrome layer 4 formed on the other core half 9, adhesive strength is improved, and no cavities are generated in a gap portion. Thus, a high-quality magnetic head is manufactured, in which gap length accuracy is good, and no bubbles nor cracks are present in the reinforced glass 7. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、ディジタル記録V
TRやデータストリーマ等の高密度磁気記録装置に用い
られる磁気ヘッド及びその製造方法に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a digital recording V
The present invention relates to a magnetic head used in a high-density magnetic recording device such as a TR and a data streamer, and a manufacturing method thereof.

【0002】[0002]

【従来の技術】近年ディジタル記録化、磁気記録装置の
小型高密度記録化に伴い、磁気ヘッドも金属磁性膜を複
合した磁気ヘッドが多用化し、高精度のギャップ幅精
度、高信頼性の確保、生産品質の向上、低コスト化が要
求されている。
2. Description of the Related Art In recent years, along with digital recording and miniaturization and high density recording of magnetic recording devices, magnetic heads having a composite metal magnetic film have been widely used, and high precision gap width precision and high reliability are ensured. Improvement of production quality and cost reduction are required.

【0003】以下に従来の磁気ヘッドについて説明す
る。
A conventional magnetic head will be described below.

【0004】図3は従来の磁気ヘッドの構成を示す要部
断面図である。図において、50は一対のコア、40は
一対のコア50の間に配され接合時の熱処理温度500
℃でも変化しない軟化点600℃以上のガラス材料より
構成されるガラス膜、41はガラス膜40の接着用のガ
ラスで軟化点445℃の硼珪酸鉛系の材料より構成され
るガラス膜、42は軟化点405℃の低融点ガラスで構
成される補強ガラス、43はガラス膜41及び補強ガラ
ス42に入ったクラックである。
FIG. 3 is a cross-sectional view of an essential part showing the structure of a conventional magnetic head. In the figure, reference numeral 50 denotes a pair of cores, 40 denotes a pair of cores 50, and a heat treatment temperature 500 at the time of joining is set.
A glass film made of a glass material having a softening point of 600 ° C. or higher that does not change even at 40 ° C., a glass film 41 for bonding the glass film 40 and made of a lead borosilicate-based material having a softening point of 445 ° C., and 42 Reinforcing glass composed of low-melting glass having a softening point of 405 ° C., and 43 is a crack entering the glass film 41 and the reinforcing glass.

【0005】以上のように構成された従来の磁気ヘッド
について、以下その動作について説明する。
The operation of the conventional magnetic head having the above structure will be described below.

【0006】金属磁性膜を複合した磁気ヘッドは、磁気
特性劣化を防止するためにコア50の接合時の熱処理温
度は500℃付近を上限にし、ギャップ材は接合時の熱
処理温度500℃でも変化しない軟化点600℃以上の
ガラス膜40をスペーサー材とし、接着用は軟化点40
5℃の硼珪酸鉛系のガラス膜41で接着する。また、補
強ガラス42も軟化点405℃の低融点ガラスで接合補
強を行っていた。
In the magnetic head including the metal magnetic film, the heat treatment temperature at the time of joining the core 50 is set to about 500 ° C. as an upper limit in order to prevent deterioration of the magnetic characteristics, and the gap material does not change even at the heat treatment temperature of 500 ° C. at the time of joining. The glass film 40 having a softening point of 600 ° C. or more is used as a spacer material, and the softening point is 40
Bonding is performed with a lead borosilicate glass film 41 at 5 ° C. Further, the reinforcing glass 42 was also bonded and reinforced with a low melting point glass having a softening point of 405 ° C.

【0007】しかしながら低融点のギャップ接着用のガ
ラス膜41や低融点の補強ガラス42は、ガラス自身の
強度が低く、クラック43が発生し易い。また熱膨張係
数の範囲が狭く、金属磁性膜を用いた複合磁気ヘッドに
整合させる事が困難であった。
However, the glass film 41 for gap bonding having a low melting point and the reinforcing glass 42 having a low melting point are low in strength of the glass themselves, and cracks 43 are likely to occur. Further, the range of the coefficient of thermal expansion is narrow, and it is difficult to match it with the composite magnetic head using the metal magnetic film.

【0008】そのため、軟化点が435℃以上の高融点
のギャップ接着ガラス膜を使用し、ギャップ接合時のコ
ア50の加圧力を増大する方法や、コア50への加圧力
を均一にする方法がとられている。また、低温度の熱処
理温度でも融点の高いガラスを圧入充填する方法によ
り、ガラス強度やコア50との整合の良い補強ガラスを
使用する方法がとられている。
Therefore, a method of increasing the pressure applied to the core 50 at the time of gap bonding and a method of making the pressure applied to the core 50 uniform by using a high melting point gap bonding glass film having a softening point of 435 ° C. or higher are available. It is taken. Further, there is adopted a method of using a reinforced glass having good glass strength and good matching with the core 50 by a method of press-fitting and filling a glass having a high melting point even at a low heat treatment temperature.

【0009】[0009]

【発明が解決しようとする課題】しかしながら上記従来
の磁気ヘッドでは、図4に示す軟化点の高い補強ガラス
44を使用すると、一対のコア50接合時に熱処理時の
昇温過程で補強ガラス44に収縮、膨張が生じ、補強ガ
ラス44のギャップ面の平面性がなくなる。そのため接
着面における接着が不完全となり、空洞45が発生す
る。熱処理温度が更に上昇し規定温度に達するに従い、
前述のようにできた空洞45に基づきガラス膜40がう
ねり、図5のように補強ガラス44中にも気泡46がで
きてしまう。その結果、気泡46が要因となり補強ガラ
ス44にクラック47が発生したり、コア50のギャッ
プ部の機械的強度が得られない等の課題点を有してい
た。
However, in the above-described conventional magnetic head, when the reinforcing glass 44 having a high softening point shown in FIG. 4 is used, the reinforcing glass 44 shrinks in the temperature rising process during heat treatment when the pair of cores 50 are joined. , Expansion occurs, and the flatness of the gap surface of the reinforcing glass 44 is lost. Therefore, the bonding on the bonding surface becomes incomplete, and the cavity 45 is generated. As the heat treatment temperature further rises and reaches the specified temperature,
The glass film 40 undulates due to the cavities 45 formed as described above, and bubbles 46 are also formed in the reinforcing glass 44 as shown in FIG. As a result, there are problems that cracks 47 occur in the reinforcing glass 44 due to the bubbles 46, and the mechanical strength of the gap portion of the core 50 cannot be obtained.

【0010】本発明は上記問題点に鑑み、高融点の補強
ガラスやギャップ接着ガラス膜を使用しても補強ガラス
中の気泡やクラックがなく、且つギャップ接着強度が大
きい品質の高い磁気ヘッド及び磁気ヘッドの製造方法を
提供するものである。
In view of the above problems, the present invention is a high-quality magnetic head and a magnetic head having a large gap adhesion strength without bubbles or cracks in the reinforcement glass even when a high melting point reinforcement glass or a gap adhesion glass film is used. A method for manufacturing a head is provided.

【0011】[0011]

【課題を解決するための手段】上記課題を解決するため
に本発明の磁気ヘッドは、一方のコア半体に巻線窓を有
し、前記巻線窓の一部に補強ガラスを有する一対のコア
半体が、ギャップ材を介して接合して成る磁気ヘッドで
あって、前記巻線窓を有するコア半体のギャップ面に、
非磁性膜、接着用ガラス膜の順で積層構成された第1の
ギャップ材と、一方のコア半体のギャップ面に、非磁性
膜、クロム層の順で積層構成された第2のギャップ材と
を備え、前記接着用ガラス膜と前記クロム層とを接合し
て、前記一対のコア半体が接合されるものである。
In order to solve the above problems, the magnetic head of the present invention has a pair of winding windows in one half of the core, and a pair of reinforcing glass members in a part of the winding windows. A core half is a magnetic head formed by joining via a gap material, and on the gap surface of the core half having the winding window,
A first gap material in which a non-magnetic film and an adhesive glass film are laminated in this order, and a second gap material in which a non-magnetic film and a chromium layer are laminated in this order on the gap surface of one core half body. And the pair of core halves are joined together by joining the bonding glass film and the chrome layer.

【0012】このような磁気ヘッドによれば、高融点の
補強ガラスやギャップ接着ガラス膜を使用しても補強ガ
ラス中に気泡やクラックがなく、且つギャップ長精度が
良く、ギャップ接着強度が大きい品質の高い磁気ヘッド
を提供するものである。
According to such a magnetic head, even if a high melting point reinforcing glass or a gap bonding glass film is used, there are no bubbles or cracks in the reinforcing glass, the gap length accuracy is good, and the gap bonding strength is high. To provide a high magnetic head.

【0013】[0013]

【発明の実施の形態】本発明の請求項1〜4に記載の発
明は、一方のコア半体に巻線窓を有し、前記巻線窓の一
部に補強ガラスを有する一対のコア半体が、ギャップ材
を介して接合して成る磁気ヘッドであって、前記巻線窓
を有するコア半体のギャップ面に、非磁性膜、接着用ガ
ラス膜の順で積層構成された第1のギャップ材と、一方
のコア半体のギャップ面に、非磁性膜、クロム層の順で
積層構成された第2のギャップ材とを備え、前記接着用
ガラス膜と前記クロム層とを接合して、前記一対のコア
半体が接合されるものであり、このような構成により、
補強ガラスに高融点のガラスを用いても、巻線窓部に補
強ガラスを有するコア半体のギャップ接着用ガラス膜
と、もう一方のコア半体に設けたクロム膜もしくはクロ
ム合金膜との良好な接着性により接着強度が高く、且つ
ギャップ部に発生する空洞がなくなるため、補強ガラス
中に気泡やクラックの無い品質の高い磁気ヘッドが得ら
れる。
BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claims 1 to 4 of the present invention has a pair of core halves each having a winding window in one core half body and a reinforcing glass in a part of the winding window. A magnetic head comprising a body joined via a gap material, wherein a nonmagnetic film and an adhesive glass film are laminated in this order on the gap surface of the core half having the winding window. A gap material and a second gap material having a nonmagnetic film and a chrome layer laminated in this order on the gap surface of one core half are provided, and the bonding glass film and the chrome layer are joined together. , The pair of core halves are joined, and by such a configuration,
Even if a high-melting glass is used as the reinforcing glass, the glass film for gap bonding of the core half having the reinforcing glass in the winding window part and the chromium film or the chromium alloy film provided on the other core half are good. Since the adhesive strength is high and the voids generated in the gap are eliminated, it is possible to obtain a high quality magnetic head having no bubbles or cracks in the reinforcing glass.

【0014】以下、本発明の実施の形態について図面を
用いて説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0015】(実施の形態1)図1は、本発明の磁気ヘ
ッドの実施の形態の要部斜視図を示す。図において、8
は第1のコア半体であるC型コア、9は第2のコア半体
であるI型コアで、それぞれC型コア8及びI型コア9
で一対のコア半体を構成している。6はC型コア8及び
I型9に配されたセラミックス基板、5はC型コア8及
びI型コア9の上面に配された金属磁性薄膜で、金属磁
性薄膜5の両側にセラミックス基板6が配されている。
7はC型コア8の巻線窓の一部に配した軟化点465℃
の補強ガラスで、Pb酸化物を含まないB2O3−Zn
O−SiO2−Al2O3−Bi2O3−Na2O組成
の補強ガラスでも良い。2はC型コア8及びI型コア9
のギャップ面に形成される非磁性膜であるガラス膜、4
はクロム膜またはクロム合金膜で構成されるクロム層
で、C型コア8とI型コア9の接合はこのクロム層4を
介して行われる。3はクロム層4とガラス膜2とを接着
する接着用ガラス膜で、ガラス膜2と接着用ガラス膜3
はC型コア8とI型コア9との接合部分に配されるギャ
ップ材であり、ガラス膜2と接着用ガラス膜3とクロム
層4とでギャップ材層1を構成している。また、C型コ
ア8側のガラス膜2と接着用ガラス膜3とで第1のギャ
ップ材を構成し、I型コア9側のガラス膜2とクロム層
4とで第2のギャップ材を構成している。
(Embodiment 1) FIG. 1 is a perspective view showing a main part of an embodiment of a magnetic head according to the present invention. In the figure, 8
Is a first core half C-type core, 9 is a second core half I-type core, and is a C-type core 8 and an I-type core 9, respectively.
And constitute a pair of core halves. Reference numeral 6 denotes a ceramic substrate provided on the C-shaped core 8 and I-type 9. Reference numeral 5 denotes a metal magnetic thin film disposed on the upper surfaces of the C-shaped core 8 and the I-shaped core 9. It is distributed.
7 is a softening point of 465 ° C. arranged in a part of the winding window of the C-shaped core 8.
Reinforced glass of B2O3-Zn containing no Pb oxide
Reinforced glass having a composition of O-SiO2-Al2O3-Bi2O3-Na2O may be used. 2 is a C-type core 8 and an I-type core 9
Glass film which is a non-magnetic film formed on the gap surface of
Is a chrome layer composed of a chrome film or a chrome alloy film, and the C-type core 8 and the I-type core 9 are joined via the chrome layer 4. 3 is an adhesive glass film for adhering the chrome layer 4 and the glass film 2 to each other.
Is a gap material arranged at the joint between the C-shaped core 8 and the I-shaped core 9, and the glass film 2, the bonding glass film 3 and the chromium layer 4 constitute the gap material layer 1. Further, the glass film 2 on the C-shaped core 8 side and the bonding glass film 3 constitute a first gap material, and the glass film 2 on the I-shaped core 9 side and the chrome layer 4 constitute a second gap material. is doing.

【0016】以上のように構成された本実施の形態の磁
気ヘッドについて、以下その動作について説明する。
The operation of the magnetic head of the present embodiment configured as described above will be described below.

【0017】金属磁性薄膜5の両側に、非磁性材である
セラミックス基板6で補強した積層型のヘッドコアに、
C型コア8となる一方のコアに巻線窓の一部に軟化点4
65℃の補強ガラス7を備えたが、PbやPb酸化物を
含まないB2O3−ZnO−SiO2−Al2O3−B
i2O3−Na2O組成の補強ガラスでも良い。このC
型コア8はもう一方のI型コア9と、ギャップ材層1を
介して一体化される。
On both sides of the metal magnetic thin film 5, a laminated head core reinforced by a ceramic substrate 6 which is a non-magnetic material,
One of the C-shaped cores 8 has a softening point 4 on a part of the winding window.
B 2 O 3 —ZnO—SiO 2 —Al 2 O 3 -B, which was provided with a reinforcing glass 7 at 65 ° C. but did not contain Pb or Pb oxide.
Reinforced glass of i2O3-Na2O composition may be used. This C
The mold core 8 is integrated with the other I-shaped core 9 via the gap material layer 1.

【0018】ギャップ材層1は、C型コア8にスペーサ
ー材として、非磁性膜である軟化点820℃/厚み45
nmのガラス膜2と、軟化点445℃/厚み30nmの
接着用ガラス膜3とにより構成されるが、これらのガラ
ス材料は、Pb酸化物を含まないB203−ZnO−S
iO2−Al2O3−Bi2O3−Na2O組成のガラ
ス膜を使用しても良い。I型コア9はC型コア8と同じ
厚み45nmのスペーサー材と厚み30nmのクロム層
4で構成される。両コア8及び9は接着用ガラス膜3と
クロム層4により接合され、磁気ヘッドコアが形成され
る。
The gap material layer 1 is a non-magnetic film having a softening point of 820 ° C./thickness of 45 as a spacer material on the C-shaped core 8.
nm glass film 2 and an adhesive glass film 3 having a softening point of 445 ° C./thickness of 30 nm, and these glass materials are B203-ZnO-S containing no Pb oxide.
A glass film having a composition of iO2-Al2O3-Bi2O3-Na2O may be used. The I-shaped core 9 is composed of the same spacer material having a thickness of 45 nm as the C-shaped core 8 and the chromium layer 4 having a thickness of 30 nm. The two cores 8 and 9 are bonded to each other by the bonding glass film 3 and the chromium layer 4 to form a magnetic head core.

【0019】ここで、本実施の形態ではI型コア9にク
ロム層4を形成したが、C型コア8側のギャップ面に形
成してもよい。
Although the chrome layer 4 is formed on the I-shaped core 9 in this embodiment, it may be formed on the gap surface on the C-shaped core 8 side.

【0020】以上のように構成することで、補強ガラス
7として従来技術の低融点ガラス(軟化点405℃)よ
りも高融点のガラスを用いても、巻線窓部に補強ガラス
7を有するコア半体8のギャップ接着用ガラス膜3と、
もう一方のコア半体9に設けたクロム層4もしくはクロ
ム合金膜との良好な接着性により接着強度が高く、且つ
ギャップ部に発生する空洞がなくなるため、補強ガラス
7中に気泡やクラックの無い品質の高い磁気ヘッドが得
られる。
With the above structure, even if a glass having a melting point higher than that of the conventional low melting point glass (softening point 405 ° C.) is used as the reinforcing glass 7, the core having the reinforcing glass 7 in the winding window portion is used. A gap bonding glass film 3 of the half body 8;
Due to the good adhesiveness with the chromium layer 4 or the chromium alloy film provided on the other half core 9, the adhesive strength is high, and the voids generated in the gap are eliminated, so that there are no bubbles or cracks in the reinforcing glass 7. A high quality magnetic head can be obtained.

【0021】以下、実験結果を(表1)に示す。The experimental results are shown in Table 1 below.

【0022】[0022]

【表1】 [Table 1]

【0023】(表1)の検討No.10〜12に示すよ
うに、被接着ギャップ膜としてクロムを用い、ギャップ
接合時の熱処理温度が485℃の時に、補強ガラス7の
軟化点は435℃以上で465℃以下のガラス、ギャッ
プ接着用ガラス膜3の軟化点は445℃のガラス膜で構
成すれば、補強ガラス7中の気泡やクラックを防止し、
ギャップ接合強度が更に向上する。なお、(表1)にお
いて、ギャップ接合強度が従来技術よりも高いものを○
で示した。
Examination No. of (Table 1) As shown in 10 to 12, when chromium is used as the adhered gap film and the heat treatment temperature at the time of gap bonding is 485 ° C., the softening point of the reinforcing glass 7 is 435 ° C. or more and 465 ° C. or less, the glass for gap bonding. If the softening point of the film 3 is composed of a glass film having a temperature of 445 ° C., bubbles and cracks in the reinforcing glass 7 can be prevented,
The gap junction strength is further improved. In Table 1, those having a gap junction strength higher than that of the conventional technology are indicated by ○.
Indicated by.

【0024】一方、被接着ギャップ膜としてガラス膜を
用いたもの(検討No.1〜8)では、補強ガラス及び
ガラス膜の軟化点やギャップ接合温度の条件が、上記条
件または下記数式の条件に合致するものであったとして
も、ギャップ接合強度は従来技術と同等か、それ以下に
なる。なお、(表1)において、ギャップ接合強度が従
来技術と同等のものを△、従来技術より強度が低いもの
を×で示した。
On the other hand, in the case where the glass film is used as the adhered gap film (Study Nos. 1 to 8), the softening point of the reinforcing glass and the glass film and the conditions of the gap bonding temperature are the same as the above conditions or the following mathematical formulas. Even if they match, the gap junction strength is equal to or lower than that of the conventional technique. In (Table 1), the gap junction strength equivalent to that of the prior art is indicated by Δ, and the strength lower than that of the prior art is indicated by x.

【0025】また、被接着ギャップ膜としてクロムを用
いても、温度条件が合致しないもの(検討No.9、1
3、14)は、ギャップ接合強度が弱くなる。
Even if chromium is used as the adhered gap film, the temperature conditions do not match (Study Nos. 1 and 1).
3, 14), the gap junction strength is weakened.

【0026】ここで、接着用ガラス膜3の軟化点がT1
℃、コア接合時の熱処理温度(表1中のギャップ接合温
度)がT2℃である時、 (T2−60)<T1<(T2+30) の範囲であり、且つ補強ガラス7の軟化点がT3℃であ
る時、 (T3−20)<T1<(T3+35) となるような条件を満たすように設定することで、補強
ガラス7中の気泡やクラックの発生を防止し、ギャップ
接合強度を向上できることが実験により明確となった。
Here, the softening point of the bonding glass film 3 is T1.
C., when the heat treatment temperature during core joining (gap joining temperature in Table 1) is T2.degree. C., it is in the range of (T2-60) <T1 <(T2 + 30), and the softening point of the reinforcing glass 7 is T3.degree. By setting so as to satisfy the condition of (T3-20) <T1 <(T3 + 35), it is possible to prevent the occurrence of bubbles and cracks in the reinforcing glass 7 and improve the gap bonding strength. It became clear by the experiment.

【0027】(実施の形態2)図2は、実施の形態1構
成の磁気ヘッドの製造方法を示す。図において、10は
金属磁性薄膜、11は非磁性基板、12は金属磁性薄膜
10と非磁性基板11とから構成されるコアブロック、
21はコアブロック12から各工程を経て作製される第
1のコア半体であるC型コアブロック、22はC型コア
ブロック21と接合される第2のコア半体であるI型の
コアブロック、13はガラス充填用の溝、14は溝13
に充填される補強ガラス、15は巻線窓用の溝、16は
コア接合面、17はI型コアブロック22におけるC型
コアブロック21と接合する面であるコア接合面、18
はC型コアブロック21及びI型コアブロック22のギ
ャップ面に形成されるガラス膜、19はC型コアブロッ
ク21のガラス膜18上に形成される接着ガラス膜、2
0はI型コアブロック22のガラス膜18上に形成され
るクロム層であり、クロム膜またはクロム合金膜により
構成される。
(Embodiment 2) FIG. 2 shows a method of manufacturing a magnetic head having the structure of Embodiment 1. In the figure, 10 is a metal magnetic thin film, 11 is a non-magnetic substrate, 12 is a core block composed of the metal magnetic thin film 10 and the non-magnetic substrate 11,
Reference numeral 21 denotes a C-shaped core block which is a first core half body manufactured through the respective steps from the core block 12, and 22 denotes an I-shaped core block which is a second core half body joined to the C-shaped core block 21. , 13 is a groove for filling glass, 14 is a groove 13
Reinforced glass to be filled in, 15 is a groove for a winding window, 16 is a core joint surface, 17 is a core joint surface which is a surface of the I-shaped core block 22 to be joined to the C-shaped core block 21, 18
Is a glass film formed on the gap surface of the C-shaped core block 21 and the I-shaped core block 22, 19 is an adhesive glass film formed on the glass film 18 of the C-shaped core block 21, 2
Reference numeral 0 denotes a chrome layer formed on the glass film 18 of the I-shaped core block 22, which is made of a chrome film or a chrome alloy film.

【0028】以上のように構成された本実施の形態の磁
気ヘッドの製造方法について、以下その動作について説
明する。
The operation of the method of manufacturing the magnetic head having the above structure according to this embodiment will be described below.

【0029】まず、C型コアブロック21の製造方法に
ついて説明する。
First, a method of manufacturing the C-shaped core block 21 will be described.

【0030】図2(a)に示す第1の工程で、Fe−T
a合金系の金属磁性薄膜10とTiO2−MgO−Ni
O系の非磁性基板11を交互に積層構成し、コアブロッ
ク12を作成する。金属磁性薄膜10はFe−Si系や
Co−Nb合金系でも良い。非磁性基板11はFe2O
3−MnO−ZnO系焼結体や単結晶体でも良い。
In the first step shown in FIG. 2A, Fe-T
a alloy metal magnetic thin film 10 and TiO2-MgO-Ni
O-based non-magnetic substrates 11 are alternately laminated to form a core block 12. The metal magnetic thin film 10 may be Fe-Si type or Co-Nb alloy type. The non-magnetic substrate 11 is Fe2O
A 3-MnO-ZnO-based sintered body or a single crystal body may be used.

【0031】次に図2(b)に示す第2の工程で、前述
の工程(a)で作製されたのコアブロック12にガラス
充填用の溝13を作成し、軟化点465℃の補強ガラス
14を熱処理温度485℃で溶融充填する。補強ガラス
14はB2O3−ZnO−SiO2−Al2O3−Bi
2O3−Na2O系ガラスでも良い。
Next, in a second step shown in FIG. 2 (b), a glass filling groove 13 is formed in the core block 12 produced in the above-mentioned step (a), and a reinforced glass having a softening point of 465 ° C. 14 is melt-filled at a heat treatment temperature of 485 ° C. The reinforcing glass 14 is B2O3-ZnO-SiO2-Al2O3-Bi.
2O3-Na2O type glass may be used.

【0032】次に図2(c)に示す第3の工程で、前述
の工程(b)により補強ガラス14が充填された溝13
の一部に、巻線窓用の溝15を作成し、その後、コア接
合面16をダイヤモンドラッピング法等で鏡面研磨する
ことでギャップ面を作成し、C型コアブロック21の完
成となる。
Next, in a third step shown in FIG. 2C, the groove 13 filled with the reinforcing glass 14 in the above step (b).
The groove 15 for the winding window is formed in a part of the above, and then the core joint surface 16 is mirror-polished by the diamond lapping method or the like to form the gap surface, and the C-shaped core block 21 is completed.

【0033】次に図2(e)に示す第4の工程で、C型
コアブロック21のギャップ面に軟化点820℃ガラス
膜18をスパッタリング法により厚み45nm形成し、
更に軟化点445℃の接着ガラス膜19をスパッタリン
グ法により厚み30nm形成する。接着ガラス膜はB2
O3−ZnO−SiO2−Al2O3−Bi2O3−N
a2O系のガラス膜でも良い。
Next, in a fourth step shown in FIG. 2E, a glass film 18 having a softening point of 820 ° C. and a thickness of 45 nm is formed on the gap surface of the C-shaped core block 21 by a sputtering method.
Further, an adhesive glass film 19 having a softening point of 445 ° C. is formed with a thickness of 30 nm by a sputtering method. Adhesive glass film is B2
O3-ZnO-SiO2-Al2O3-Bi2O3-N
An a2O type glass film may also be used.

【0034】次に、I型コアブロック22の製造方法に
ついて説明する。
Next, a method of manufacturing the I-shaped core block 22 will be described.

【0035】まず図2(d)に示す第5の工程で、コア
接合面17のみ鏡面研磨することでギャップ面を作成
し、図2(f)に示す第6の工程で、ギャップ面に軟化
点820℃のガラス膜18をスパッタリング法により厚
み45nmで形成し、更にクロム層20をスパッタリン
グ法により厚み30nm形成する。このようにしてI型
コアブロック22が完成する。
First, in the fifth step shown in FIG. 2D, only the core joint surface 17 is mirror-polished to form a gap surface, and in the sixth step shown in FIG. 2F, the gap surface is softened. A glass film 18 at a temperature of 820 ° C. is formed with a thickness of 45 nm by a sputtering method, and a chromium layer 20 is further formed with a thickness of 30 nm by a sputtering method. In this way, the I-shaped core block 22 is completed.

【0036】上記各工程で作製されたC型コアブロック
21とI型コアブロック22を、図2(g)に示す第7
の工程で、ギャップ材が形成されたC型コアブロック2
1、およびI型コアブロック22をギャップ面で突合さ
れ、規定の加圧力で加圧保持しながら485℃で熱処理
し、一対のコアブロックを接合する。この後、コアブロ
ックの外形を整え、コアブロックより金属磁性膜部10
をトラック幅とする規定の厚みに切断し、磁気ヘッドコ
ア30が完成する。
The C-shaped core block 21 and the I-shaped core block 22 produced in the above respective steps are shown in FIG.
C-shaped core block 2 in which the gap material is formed in the step of
The 1 and I-shaped core blocks 22 are butted against each other at the gap surface, and heat-treated at 485 ° C. while pressurizing and holding at a prescribed pressure to bond the pair of core blocks. After that, the outer shape of the core block is adjusted, and the metal magnetic film portion 10 is removed from the core block.
The magnetic head core 30 is completed by cutting into a specified thickness having a track width of.

【0037】以上のように本実施の形態によれば、C型
コアブロック21及びI型コアブロック22の接合をク
ロム層20を介して行うため、接合時における熱処理の
昇温過程で、補強ガラス14に気泡やクラックなどが発
生せず、ギャップ接合強度が向上した磁気ヘッドを製造
することができる。
As described above, according to the present embodiment, since the C-type core block 21 and the I-type core block 22 are joined via the chrome layer 20, the tempered glass during the heat treatment during the joining is strengthened. It is possible to manufacture a magnetic head in which bubbles and cracks are not generated in 14 and the gap junction strength is improved.

【0038】なお、本実施の形態において、クロム層2
0をI型コアブロック22側に形成したが、C型コアブ
ロック21のギャップ面に形成してもよい。
In the present embodiment, the chrome layer 2
Although 0 is formed on the I-shaped core block 22 side, it may be formed on the gap surface of the C-shaped core block 21.

【0039】[0039]

【発明の効果】以上説明したように本発明によれば、補
強ガラスに高融点ガラスを用いても、巻線窓部に補強ガ
ラスを有するコア半対のギャップ接着用ガラス膜と、も
う一方のコア半対に設けたクロム層との良好な接着性に
より、接着強度が高く、且つギャップ部に発生する空洞
がなくなるため、補強ガラス中に気泡やクラックの無い
品質の高い磁気ヘッドが作成できる。
As described above, according to the present invention, even if a high-melting glass is used as the reinforcing glass, the half-pair gap bonding glass film having the reinforcing glass in the winding window portion and the other glass Good adhesiveness with the chrome layer provided in the core half pair has high adhesive strength and eliminates voids generated in the gap portion, so that a high-quality magnetic head having no bubbles or cracks in the reinforcing glass can be produced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の形態の磁気ヘッドの構成を示す
要部斜視図
FIG. 1 is a perspective view of a main part showing a configuration of a magnetic head according to an embodiment of the present invention.

【図2】同実施の形態の磁気ヘッドの製造方法の工程を
示す要部斜視図
FIG. 2 is a perspective view of essential parts showing steps of the method of manufacturing the magnetic head of the embodiment.

【図3】従来の磁気ヘッドのギャップ、補強ガラス部の
構成を示す要部断面図
FIG. 3 is a cross-sectional view of a main part showing a configuration of a gap and a reinforcing glass portion of a conventional magnetic head.

【図4】従来の磁気ヘッドのギャップ接合の構成を示す
要部断面図
FIG. 4 is a cross-sectional view of an essential part showing the configuration of a gap junction of a conventional magnetic head.

【図5】従来の磁気ヘッドにおいて気泡やクラックが入
った状態を示す要部断面図
FIG. 5 is a cross-sectional view of an essential part showing a state in which bubbles and cracks are formed in a conventional magnetic head.

【符号の説明】[Explanation of symbols]

3 ギャップ接着用ガラス膜 4 クロム層 5 金属磁性膜 7 補強ガラス 3 Gap adhesive glass film 4 chrome layer 5 Metal magnetic film 7 Reinforced glass

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 5D111 AA23 BB27 BB37 BB48 CC22 CC47 FF02 FF21 FF46 GG03 GG14 JJ14 JJ33 KK11    ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 5D111 AA23 BB27 BB37 BB48 CC22                       CC47 FF02 FF21 FF46 GG03                       GG14 JJ14 JJ33 KK11

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 巻線窓を有し前記巻線窓の一部に補強ガ
ラスを有する第1のコア半体と、前記第1のコア半体と
ギャップ材を介して接合される第2のコア半体とから成
る磁気ヘッドであって、 前記第1のコア半体のギャップ面に、非磁性膜、接着用
ガラス膜の順で積層構成された第1のギャップ材と、 前記第2のコア半体のギャップ面に、非磁性膜、クロム
層の順で積層構成された第2のギャップ材とを備え、 前記接着用ガラス膜と前記クロム層とを接合して、前記
第1及び第2のコア半体が接合されることを特徴とする
磁気ヘッド。
1. A first core half body having a winding window and a reinforcing glass in a part of the winding window, and a second core half body joined to the first core half body via a gap member. A magnetic head including a core half body, wherein a first gap member in which a nonmagnetic film and an adhesive glass film are laminated in this order on a gap surface of the first core half body, and the second gap member A non-magnetic film and a second gap material laminated in the order of a chrome layer are provided on the gap surface of the core half, and the adhesion glass film and the chrome layer are bonded to each other to form the first and the first gaps. A magnetic head comprising two core halves joined together.
【請求項2】 接着用ガラス膜の軟化点がT1℃、コア
接合時の熱処理温度がT2℃である時、 (T2−60)<T1<(T2+30) の範囲であり、且つ補強ガラスの軟化点がT3℃である
時、 (T3−20)<T1<(T3+35) であることを特徴とする請求項1記載の磁気ヘッド。
2. When the softening point of the bonding glass film is T1 ° C. and the heat treatment temperature at the time of core bonding is T2 ° C., the range of (T2-60) <T1 <(T2 + 30) is satisfied, and the softening of the reinforcing glass is performed. 2. The magnetic head according to claim 1, wherein when the point is T3 [deg.] C., (T3-20) <T1 <(T3 + 35).
【請求項3】 接着用ガラス膜の組成がPbを含まない
ガラス膜であり、且つ補強ガラスの組成がPbを含まな
いガラスであることを特徴とする請求項1及び2記載の
磁気ヘッド。
3. The magnetic head according to claim 1, wherein the composition of the adhesive glass film is a glass film containing no Pb, and the composition of the reinforcing glass is a glass containing no Pb.
【請求項4】 第1のコア半体に巻線窓を作製し、前記
巻線窓の少なくとも一部に補強ガラスを充填した後、第
2のコア半対と共にギャップ面を作製し、前記第1のコ
ア半体のギャップ面に非磁性膜、接着用ガラス膜の順に
積層形成し、前記第2のコア半体のギャップ面に非磁性
膜、クロム層の順に積層形成し、前記第1及び第2のコ
ア半体が前記接着用ガラス膜とクロム層とを介して熱処
理により接合されることを特徴とする磁気ヘッドの製造
方法。
4. A winding window is formed in the first core half, at least a part of the winding window is filled with reinforcing glass, and then a gap surface is formed together with the second core half pair. A nonmagnetic film and an adhesive glass film are laminated in this order on the gap surface of one core half body, and a nonmagnetic film and a chromium layer are laminated in this order on the gap surface of the second core half body. A method of manufacturing a magnetic head, wherein the second core half body is bonded by heat treatment through the bonding glass film and the chromium layer.
JP2002005593A 2002-01-15 2002-01-15 Magnetic head and its manufacturing method Pending JP2003208704A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002005593A JP2003208704A (en) 2002-01-15 2002-01-15 Magnetic head and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002005593A JP2003208704A (en) 2002-01-15 2002-01-15 Magnetic head and its manufacturing method

Publications (1)

Publication Number Publication Date
JP2003208704A true JP2003208704A (en) 2003-07-25

Family

ID=27644591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002005593A Pending JP2003208704A (en) 2002-01-15 2002-01-15 Magnetic head and its manufacturing method

Country Status (1)

Country Link
JP (1) JP2003208704A (en)

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