JP2003205611A - Ink-jet head, production method therefor, and ink-jet recording apparatus - Google Patents
Ink-jet head, production method therefor, and ink-jet recording apparatusInfo
- Publication number
- JP2003205611A JP2003205611A JP2002006905A JP2002006905A JP2003205611A JP 2003205611 A JP2003205611 A JP 2003205611A JP 2002006905 A JP2002006905 A JP 2002006905A JP 2002006905 A JP2002006905 A JP 2002006905A JP 2003205611 A JP2003205611 A JP 2003205611A
- Authority
- JP
- Japan
- Prior art keywords
- bonding material
- pressure chamber
- diaphragm
- electrode
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、インクジェットヘ
ッドおよびその製造方法ならびにインクジェット式記録
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inkjet head, a method for manufacturing the same, and an inkjet recording apparatus.
【０００２】[0002]
【従来の技術】インクジェット式記録装置のインクジェ
ットヘッドは、インク液を収容する圧力室を持つ圧力室
部品と、この圧力室からインク滴を吐出させるためのア
クチュエータ部である強誘電体素子とを備えている。強
誘電体素子には、強誘電体膜と、この強誘電体膜に電圧
を印加して収縮及び伸張させる個別電極及び共通電極と
を備えており、強誘電体膜の圧電効果により圧力室の容
積を変化させてインク滴をノズル孔から吐出させるよう
に構成されている。2. Description of the Related Art An ink jet head of an ink jet type recording apparatus comprises a pressure chamber component having a pressure chamber for containing an ink liquid, and a ferroelectric element which is an actuator portion for ejecting an ink droplet from this pressure chamber. ing. The ferroelectric element includes a ferroelectric film and individual electrodes and a common electrode that contract and expand by applying a voltage to the ferroelectric film. The volume is changed so that the ink droplets are ejected from the nozzle holes.
【０００３】そして、多数のノズル孔から吐出されるイ
ンク滴の吐出特性を安定化させるには、強誘電体素子の
変位特性、共振特性のバラツキを抑制する必要がある。In order to stabilize the ejection characteristics of ink droplets ejected from a large number of nozzle holes, it is necessary to suppress variations in the displacement characteristics and resonance characteristics of the ferroelectric element.
【０００４】ここで、特開２０００−３０１７１５号公
報には、ヘッド本体部とアクチュエータ部とが接着され
てなるインクジェットにおいて、振動板の変位部に接合
材が付着することを防止する技術が開示されている。そ
の構成は、振動板のヘッド本体部側の面に振動板の変位
部を圧力室に晒す窓部が設けられた中間層を形成し、中
間層と本体部との区画壁とを電着層からなる接合材によ
り接着したもので、中間層は銅より形成され、接合材の
はみ出し部が振動板の変位部に付着しないよう、その厚
みは５μｍに設定されている。[0004] Here, Japanese Patent Laid-Open No. 2000-301715 discloses a technique for preventing the bonding material from adhering to the displacement portion of the diaphragm in an ink jet in which the head main body portion and the actuator portion are adhered. ing. The structure is such that an intermediate layer is formed on the surface of the diaphragm on the side of the head main body, which has a window for exposing the displacement portion of the diaphragm to the pressure chamber, and the partition wall between the intermediate layer and the main body is an electrodeposition layer. The intermediate layer is made of copper, and its thickness is set to 5 μm so that the protruding portion of the bonding material does not adhere to the displacement portion of the diaphragm.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、前述し
た技術によれば、中間層を新たに設ける必要があるの
で、製造時の工数が増加し、生産性の低下や製造コスト
の増大を招く。However, according to the above-mentioned technique, it is necessary to newly provide the intermediate layer, so that the number of man-hours at the time of manufacturing is increased, and the productivity is lowered and the manufacturing cost is increased.
【０００６】また、このような中間層を設けずに、直接
振動板と圧力室の区画壁を接合する場合には、塗布され
た接合材が圧力室を構成する区画壁の接着面より少なく
なってその端面が接着されなかったり、端面まで接着さ
れたりする。すると、変位特性や共振特性がばらついて
インク吐出効率が悪化し、信頼性の高いインクジェット
ヘッドを得ることができない。Further, in the case where the diaphragm and the partition wall of the pressure chamber are directly bonded without providing such an intermediate layer, the applied bonding material is less than the bonding surface of the partition wall forming the pressure chamber. The end face may not be adhered, or even the end face may be adhered. Then, the displacement characteristics and the resonance characteristics vary, the ink ejection efficiency deteriorates, and it is not possible to obtain a highly reliable inkjet head.
【０００７】そこで、本発明は、インク吐出効率の優れ
たインクジェットヘッドに関する技術を提供することを
目的とする。Therefore, an object of the present invention is to provide a technique relating to an ink jet head having excellent ink ejection efficiency.
【０００８】[0008]
【課題を解決するための手段】この課題を解決するため
に、本発明のインクジェットヘッドは、圧力室を形成す
る複数の区画壁と、圧力室を覆うようにして接合材を介
して区画壁上に固定された振動板と、振動板の上に形成
された第１の電極と、第１の電極上に形成された強誘電
体膜と、強誘電体膜上に形成され、第１の電極と協働し
て圧力室の容積を変化させる方向に強誘電体膜を変位さ
せる第２の電極とを有し、接合材が圧力室内にはみ出し
た構成としたものである。In order to solve this problem, the ink jet head of the present invention has a plurality of partition walls forming pressure chambers and a partition wall over the partition walls so as to cover the pressure chambers. A diaphragm fixed to the diaphragm, a first electrode formed on the diaphragm, a ferroelectric film formed on the first electrode, and a first electrode formed on the ferroelectric film. And a second electrode for displacing the ferroelectric film in the direction of changing the volume of the pressure chamber in cooperation with the above, and the bonding material is projected into the pressure chamber.
【０００９】これにより、複数の強誘電体素子の相互間
における変位特性や共振特性が均一化されてインク吐出
効率の優れたインクジェットヘッドを得ることが可能に
なる。As a result, it becomes possible to obtain an ink jet head having a uniform displacement characteristic and resonance characteristic among a plurality of ferroelectric elements and excellent ink ejection efficiency.
【００１０】[0010]
【発明の実施の形態】本発明の請求項１に記載の発明
は、圧力室を形成する複数の区画壁と、圧力室を覆うよ
うにして接合材を介して区画壁上に固定された振動板
と、振動板の上に形成された第１の電極と、第１の電極
上に形成された強誘電体膜と、強誘電体膜上に形成さ
れ、第１の電極と協働して圧力室の容積を変化させる方
向に強誘電体膜を変位させる第２の電極とを有し、接合
材が圧力室内にはみ出しているインクジェットヘッドで
あり、複数の強誘電体素子の相互間における変位特性や
共振特性が均一化されてインク吐出効率の優れたインク
ジェットヘッドを得ることが可能になるという作用を有
する。BEST MODE FOR CARRYING OUT THE INVENTION According to the first aspect of the present invention, a plurality of partition walls forming pressure chambers and a vibration fixed to the partition walls via a bonding material so as to cover the pressure chambers are vibrated. A plate, a first electrode formed on the diaphragm, a ferroelectric film formed on the first electrode, and a ferroelectric film formed on the ferroelectric film in cooperation with the first electrode An inkjet head having a second electrode for displacing the ferroelectric film in a direction that changes the volume of the pressure chamber, and a bonding material protruding into the pressure chamber, and a displacement between a plurality of ferroelectric elements. This has the effect of making it possible to obtain an inkjet head having excellent ink ejection efficiency because the characteristics and resonance characteristics are made uniform.
【００１１】本発明の請求項２に記載の発明は、請求項
１記載の発明において、接合材における振動板の平面に
沿った方向へのはみ出し幅が５μｍ以上であるインクジ
ェットヘッドであり、複数の強誘電体素子の相互間にお
ける変位特性や共振特性が均一化されてインク吐出効率
の優れたインクジェットヘッドを得ることが可能になる
という作用を有する。The invention according to claim 2 of the present invention is the inkjet head according to claim 1, wherein the protrusion width of the bonding material in the direction along the plane of the diaphragm is 5 μm or more. This has the effect of making it possible to obtain an inkjet head with excellent ink ejection efficiency by making the displacement characteristics and resonance characteristics between the ferroelectric elements uniform.
【００１２】本発明の請求項３に記載の発明は、請求項
１または２記載の発明において、接合材のヤング率が
１．０×Ｅ＋８〜１．０×Ｅ＋１０Ｎ／ｍ2であるイン
クジェットヘッドであり、この範囲内にあることによ
り、接合材のはみ出し量の変動に伴う振動板の変位量の
ばらつきを最小限に抑制することができるので、複数の
強誘電体素子の相互間における変位特性や共振特性が均
一化されてインク吐出効率の優れたインクジェットヘッ
ドを得ることが可能になるという作用を有する。The invention according to claim 3 of the present invention is the ink jet head according to claim 1 or 2, wherein the Young's modulus of the bonding material is 1.0 × E + 8 to 1.0 × E + 10 N / m 2. If it is within this range, it is possible to minimize the variation of the displacement amount of the diaphragm due to the variation of the protruding amount of the bonding material. This has the effect of making it possible to obtain an inkjet head having excellent resonance efficiency by uniforming the resonance characteristics.
【００１３】本発明の請求項４に記載の発明は、請求項
１〜３の何れか一項に記載の発明において、接合材はア
クリル樹脂またはエポキシ樹脂であるインクジェットヘ
ッドであり、これらの樹脂材料を用いることにより、振
動板の変位量のばらつきを比較的小さくすることができ
るので、複数の強誘電体素子の相互間における変位特性
や共振特性が均一化されてインク吐出効率の優れたイン
クジェットヘッドを得ることが可能になるという作用を
有する。According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, the joining material is an ink jet head made of acrylic resin or epoxy resin, and these resin materials are used. Since the variation of the displacement amount of the vibration plate can be made relatively small by using, the ink jet head excellent in ink ejection efficiency by making the displacement characteristics and the resonance characteristics between the plurality of ferroelectric elements uniform. It is possible to obtain
【００１４】本発明の請求項５に記載の発明は、請求項
１〜４の何れか一項に記載の発明において、振動板が第
１の電極を兼ねているインクジェットヘッドであり、複
数の強誘電体素子の相互間における変位特性や共振特性
が均一化されてインク吐出効率の優れたインクジェット
ヘッドを得ることが可能になるという作用を有する。A fifth aspect of the present invention is the ink jet head according to any one of the first to fourth aspects, in which the diaphragm also serves as the first electrode, and a plurality of strong ink jet heads are provided. This has the effect of making it possible to obtain an inkjet head with excellent ink ejection efficiency by making the displacement characteristics and resonance characteristics between the dielectric elements uniform.
【００１５】本発明の請求項６に記載の発明は、請求項
１〜５の何れか一項に記載のインクジェットヘッドを備
えたインクジェット式記録装置であり、安定したインク
吐出により高画質の印字を行うことが可能になるという
作用を有する。The invention according to claim 6 of the present invention is an ink jet recording apparatus provided with the ink jet head according to any one of claims 1 to 5, which enables high quality printing by stable ink ejection. It has the effect that it can be performed.
【００１６】本発明の請求項７に記載の発明は、圧力室
を形成する複数の区画壁に、圧力室を覆うようにして接
合材を介して振動板を接着し、区画壁と振動板とを相互
に圧接する方向の押圧力を付加して接合材を圧力室内に
はみ出させ、押圧力を付加したまま、接合材の粘度が低
下するとともに当該接合材の硬化が発生しない温度で加
熱する第１の加熱処理を行い、第１の加熱処理後、常温
で冷却し、冷却後、押圧力を除去した状態で接合材が硬
化する温度で加熱する第２の加熱処理を行うインクジェ
ットヘッドの製造方法であり、確実な接合材のはみ出し
と、ヘッドの接合・固定を行うことができるので、複数
の強誘電体素子の相互間における変位特性や共振特性が
均一化されてインク吐出効率の優れたインクジェットヘ
ッドを得ることが可能になるという作用を有する。According to a seventh aspect of the present invention, the diaphragm is adhered to a plurality of partition walls forming the pressure chamber via a bonding material so as to cover the pressure chamber, and the partition wall and the diaphragm are formed. A pressing force in the direction of pressing each other is applied so that the bonding material protrudes into the pressure chamber, and while the pressing force is applied, the bonding material is heated at a temperature at which the viscosity of the bonding material decreases and the hardening of the bonding material does not occur. A method for manufacturing an inkjet head, in which the first heat treatment is performed, the second heat treatment is performed after the first heat treatment, the temperature is cooled at room temperature, and the second heat treatment is performed at a temperature at which the bonding material is hardened in a state where the pressing force is removed. In addition, since it is possible to reliably squeeze out the bonding material and to bond and fix the head, it is possible to make the displacement characteristics and resonance characteristics between a plurality of ferroelectric elements uniform and to provide an ink jet with excellent ink ejection efficiency. To get the head It has the effect of becoming a performance.
【００１７】本発明の請求項８に記載の発明は、圧力室
を形成する複数の区画壁に、圧力室を覆うようにして接
合材を介して振動板を接着し、区画壁と振動板とを相互
に圧接する方向の押圧力を付加して接合材を圧力室内に
はみ出させ、押圧力を付加したまま、接合材の粘度が低
下するとともに当該接合材の硬化が発生しない温度で加
熱する第１の加熱処理を行い、第１の加熱処理後、押圧
力を除去した状態で接合材が硬化する温度で加熱する第
２の加熱処理を行うインクジェットヘッドの製造方法で
あり、確実な接合材のはみ出しと、ヘッドの接合・固定
を行うことができるので、複数の強誘電体素子の相互間
における変位特性や共振特性が均一化されてインク吐出
効率の優れたインクジェットヘッドを得ることが可能に
なるという作用を有する。According to an eighth aspect of the present invention, a diaphragm is adhered to a plurality of partition walls forming the pressure chamber via a bonding material so as to cover the pressure chamber, and the partition wall and the diaphragm. A pressing force in the direction of pressing each other is applied so that the bonding material protrudes into the pressure chamber, and while the pressing force is applied, the bonding material is heated at a temperature at which the viscosity of the bonding material decreases and the hardening of the bonding material does not occur. A method for manufacturing an inkjet head, in which the first heat treatment is performed, and after the first heat treatment, the second heat treatment is performed at a temperature at which the bonding material is cured in a state where the pressing force is removed. Since the protrusion and the joining / fixing of the heads can be performed, it is possible to obtain an inkjet head having excellent ink ejection efficiency by making the displacement characteristics and resonance characteristics between a plurality of ferroelectric elements uniform. The action To.
【００１８】本発明の請求項９に記載の発明は、圧力室
を形成する複数の区画壁に、圧力室を覆うようにして接
合材を介して振動板を接着し、区画壁と振動板とを相互
に圧接する方向の押圧力を付加して接合材を圧力室内に
はみ出させるインクジェットヘッドの製造方法であっ
て、接合材は、その塗布端部が隆起した状態で区画壁ま
たは振動板に塗布されるインクジェットヘッドの製造方
法であり、確実な接合材のはみ出しと、ヘッドの接合・
固定を行うことができるので、複数の強誘電体素子の相
互間における変位特性や共振特性が均一化されてインク
吐出効率の優れたインクジェットヘッドを得ることが可
能になるという作用を有する。According to a ninth aspect of the present invention, a diaphragm is adhered to a plurality of partition walls forming the pressure chamber via a bonding material so as to cover the pressure chamber, and the partition wall and the diaphragm are formed. A method for manufacturing an inkjet head in which a pressing force in the direction of pressing each other is applied to cause the bonding material to protrude into the pressure chamber, wherein the bonding material is applied to the partition wall or the diaphragm with the application end portion raised. This is a method for manufacturing inkjet heads, which involves reliable extrusion of the bonding material,
Since the fixing can be performed, there is an effect that the displacement characteristics and the resonance characteristics between the plurality of ferroelectric elements are made uniform, and it becomes possible to obtain an inkjet head having excellent ink ejection efficiency.
【００１９】以下、本発明の実施の形態について、図１
から図１０を用いて説明する。なお、これらの図面にお
いて同一の部材には同一の符号を付しており、また、重
複した説明は省略されている。FIG. 1 shows an embodiment of the present invention.
Starting from FIG. In addition, in these drawings, the same members are denoted by the same reference numerals, and duplicate description is omitted.
【００２０】図１は本発明の一実施の形態である強誘電
体素子が用いられたインクジェット式記録装置の全体概
略構成を示す斜視図、図２は図１のインクジェット式記
録装置におけるインクジェットヘッドの全体構成を示す
断面図、図３は図２の要部を示す斜視図、図４は図２の
インクジェットヘッドを示す断面図、図５は接合材のは
み出し幅と強誘電体素子の変位量との関係を示すグラ
フ、図６は接合材のヤング率が１．０×Ｅ＋７Ｎ／ｍ2
で振動板兼共通電極の平面に沿った方向へのはみ出し幅
が＋１０μｍのときの共振特性と、接合材のヤング率が
１．０×Ｅ＋８Ｎ／ｍ2で振動板兼共通電極の平面に沿
った方向へのはみ出し幅が＋１０μｍのときの共振特性
とを示すグラフ、図７は本発明の一実施の形態であるイ
ンクジェットヘッドの製造方法を連続的に示す断面図、
図８は本発明の一実施の形態であるインクジェットヘッ
ドの製造過程における接合材の塗布形状を示す断面図、
図９は図８における接合材の隆起部分の寸法の一例を示
す説明図、図１０は本発明の一実施の形態であるインク
ジェットヘッドの製造過程における接合材の塗布形状を
示す断面図である。FIG. 1 is a perspective view showing an overall schematic structure of an ink jet recording apparatus using a ferroelectric element according to an embodiment of the present invention, and FIG. 2 is an ink jet head in the ink jet recording apparatus of FIG. 2 is a perspective view showing a main part of FIG. 2, FIG. 4 is a cross-sectional view showing the inkjet head of FIG. 2, and FIG. 5 is a protrusion width of a bonding material and a displacement amount of a ferroelectric element. 6 is a graph showing the relationship between the Young's modulus of the bonding material and 1.0 × E + 7 N / m 2
And the resonance characteristics when the protrusion width in the direction along the plane of the diaphragm / common electrode is +10 μm, and the Young's modulus of the bonding material is 1.0 × E + 8 N / m 2 along the plane of the diaphragm / common electrode FIG. 7 is a graph showing a resonance characteristic when the protrusion width in the direction is +10 μm, and FIG. 7 is a cross-sectional view showing continuously the method of manufacturing an inkjet head according to an embodiment of the present invention.
FIG. 8 is a cross-sectional view showing the application shape of the bonding material in the manufacturing process of the inkjet head according to the embodiment of the present invention,
FIG. 9 is an explanatory view showing an example of dimensions of a raised portion of the bonding material in FIG. 8, and FIG. 10 is a cross-sectional view showing a coating shape of the bonding material in the manufacturing process of the inkjet head according to the embodiment of the present invention.
【００２１】図１に示すインクジェット式記録装置４０
は、強誘電体素子の圧電効果を利用して記録を行う本発
明のインクジェットヘッド４１を備え、このインクジェ
ットヘッド４１から吐出したインク滴を紙等の記録媒体
４２に着弾させて、記録媒体４２に記録を行うものであ
る。インクジェットヘッド４１は、主走査方向Ｘに配置
したキャリッジ軸４３に設けられたキャリッジ４４に搭
載されていて、キャリッジ４４がキャリッジ軸４３に沿
って往復動するのに応じて、主走査方向Ｘに往復動す
る。さらに、インクジェット式記録装置４０は、記録媒
体４２をインクジェットヘッド４１の幅方向（すなわ
ち、主走査方向Ｘ）と略垂直方向の副走査方向Ｙに移動
させる複数個のローラ（移動手段）４５を備える。The ink jet type recording apparatus 40 shown in FIG.
Is equipped with an inkjet head 41 of the present invention for recording by utilizing the piezoelectric effect of a ferroelectric element, and ink droplets ejected from this inkjet head 41 are made to land on a recording medium 42 such as paper to form a recording medium 42. It is to record. The inkjet head 41 is mounted on a carriage 44 provided on a carriage shaft 43 arranged in the main scanning direction X, and reciprocates in the main scanning direction X as the carriage 44 reciprocates along the carriage shaft 43. Move. Further, the inkjet recording apparatus 40 includes a plurality of rollers (moving means) 45 for moving the recording medium 42 in the sub-scanning direction Y which is substantially perpendicular to the width direction of the inkjet head 41 (that is, the main scanning direction X). .
【００２２】図２は本発明の実施の形態のインクジェッ
トヘッド４１の全体構成を示し、図３はその要部の構成
を示す。図２および図３において、Ａは圧力室部品であ
って、圧力室用開口部１が形成される。Ｂは圧力室用開
口部１の上端開口面を覆うように配置されるアクチュエ
ータ部、Ｃは圧力室用開口部１の下端開口面を覆うよう
に配置されるインク液流路部品である。圧力室部品Ａの
圧力室用開口部１は、その上下に位置するアクチュエー
タ部Ｂおよびインク液流路部品Ｃにより区画されて圧力
室２となる。アクチュエータ部Ｂには、圧力室２の上方
に位置する個別電極（第２の電極）３が配置されてい
る。これ等圧力室２および個別電極３は、図２から判る
ように、千鳥状に多数配列されている。インク液流路部
品Ｃには、インク液供給方向に並ぶ圧力室２間で共用す
る共通液室５と、この共通液室５を圧力室２に連通する
供給口６と、圧力室２内のインク液が流出するインク流
路７とが形成される。Ｄはノズル板であって、インク流
路７に連通するノズル孔８が形成されている。また、図
２において、ＥはＩＣチップであって、ボンディングワ
イヤーＢＷを介して多数の個別電極３に対して電圧を供
給する。FIG. 2 shows the overall construction of the ink jet head 41 according to the embodiment of the present invention, and FIG. 3 shows the construction of the essential parts thereof. 2 and 3, A is a pressure chamber component, and the pressure chamber opening 1 is formed therein. B is an actuator portion arranged so as to cover the upper end opening surface of the pressure chamber opening portion 1, and C is an ink liquid flow path component arranged so as to cover the lower end opening surface of the pressure chamber opening portion 1. The pressure chamber opening 1 of the pressure chamber component A is partitioned by the actuator unit B and the ink liquid flow channel component C located above and below to form a pressure chamber 2. In the actuator section B, an individual electrode (second electrode) 3 located above the pressure chamber 2 is arranged. These pressure chambers 2 and individual electrodes 3 are arranged in a zigzag pattern, as can be seen from FIG. In the ink liquid flow path component C, a common liquid chamber 5 that is shared between the pressure chambers 2 arranged in the ink liquid supply direction, a supply port 6 that connects the common liquid chamber 5 to the pressure chamber 2, and a pressure chamber 2 An ink flow path 7 through which the ink liquid flows is formed. D is a nozzle plate having nozzle holes 8 communicating with the ink flow paths 7. Further, in FIG. 2, E is an IC chip, which supplies a voltage to a large number of individual electrodes 3 via the bonding wires BW.
【００２３】次に、アクチュエータ部Ｂの構成を図４に
基づいて説明する。Next, the structure of the actuator section B will be described with reference to FIG.
【００２４】図４では、直交方向に並ぶ圧力室２を持つ
圧力室部品Ａが参照的に描かれている。In FIG. 4, the pressure chamber component A having the pressure chambers 2 arranged in the orthogonal direction is drawn for reference.
【００２５】このアクチュエータ部は、圧力室２を形成
する複数の区画壁２ａ、圧力室２を覆うようにして区画
壁２ａ上に固定された振動板兼共通電極（振動板あるい
は第１の電極）１１、振動板兼共通電極１１上に形成さ
れた強誘電体膜１０、強誘電体膜１０上に形成された個
別電極（第２の電極）３とを有している。そして、個別
電極３と振動板兼共通電極１１とは、圧力室２の容積を
変化させる方向に強誘電体膜１０を相互に協働して変位
させる。The actuator section includes a plurality of partition walls 2a forming the pressure chamber 2, and a diaphragm / common electrode (vibrating plate or first electrode) fixed on the partition wall 2a so as to cover the pressure chamber 2. 11, a ferroelectric film 10 formed on the diaphragm / common electrode 11, and an individual electrode (second electrode) 3 formed on the ferroelectric film 10. Then, the individual electrode 3 and the diaphragm / common electrode 11 mutually displace the ferroelectric film 10 in the direction of changing the volume of the pressure chamber 2.
【００２６】振動板兼共通電極１１は、たとえばアクリ
ル樹脂またはエポキシ樹脂からなる接合材１４を介して
区画壁２ａに固定されており、図示するように、この接
合材１４は圧力室２内にはみ出している。そして、接合
材１４のはみ出し幅は、振動板兼共通電極１１の平面に
沿った方向へ５μｍ以上となっている。また、ヤング率
が１．０×Ｅ＋８〜１．０×Ｅ＋１０Ｎ／ｍ2となって
いる。The diaphragm / common electrode 11 is fixed to the partition wall 2a via a bonding material 14 made of, for example, an acrylic resin or an epoxy resin. As shown in the drawing, the bonding material 14 protrudes into the pressure chamber 2. ing. The protruding width of the joining material 14 is 5 μm or more in the direction along the plane of the diaphragm / common electrode 11. The Young's modulus is 1.0 × E + 8 to 1.0 × E + 10 N / m 2 .
【００２７】ここで、接合材１４のはみ出し幅と強誘電
体素子の変位量との関係を図５に示す。FIG. 5 shows the relationship between the protruding width of the bonding material 14 and the displacement amount of the ferroelectric element.
【００２８】図５に示すように、ヤング率の小さな接合
材を用いた場合で、且つはみ出し幅が５μｍ以上であれ
ば、変位量が安定しているのが分かる。そして、接合材
のヤング率が大きくなればなるほど変位の変動が大きく
なり、またはみ出し幅が５μｍ以下、特にはみ出し幅が
−（マイナス）になると、変位の変動が大きくなる。よ
って、図５から、接合材１４の振動板兼共通電極１１の
平面に沿った方向へのはみ出し幅が５μｍ以上で、接合
材１４のヤング率が１．０×Ｅ＋１０Ｎ／ｍ2以下のと
きに強誘電体素子の変位が安定することが読み取れる。As shown in FIG. 5, it is understood that the displacement amount is stable when the bonding material having a small Young's modulus is used and the protrusion width is 5 μm or more. The greater the Young's modulus of the bonding material, the greater the variation in displacement, or the greater the protrusion width is 5 μm or less, particularly the protrusion width − (minus), the greater the variation in displacement. Therefore, from FIG. 5, when the protruding width of the bonding material 14 in the direction along the plane of the diaphragm / common electrode 11 is 5 μm or more and the Young's modulus of the bonding material 14 is 1.0 × E + 10 N / m 2 or less, It can be read that the displacement of the ferroelectric element is stable.
【００２９】図６に、接合材のヤング率が１．０×Ｅ＋
７Ｎ／ｍ2で振動板兼共通電極の平面に沿った方向への
はみ出し幅が＋１０μｍのときの共振特性（図６
（ａ））と、接合材のヤング率が１．０×Ｅ＋８Ｎ／ｍ
2で振動板兼共通電極の平面に沿った方向へのはみ出し
幅が＋１０μｍのときの共振特性（図６（ｂ））とを示
す。In FIG. 6, the Young's modulus of the bonding material is 1.0 × E +
Resonance characteristics at a protrusion width of +10 μm in the direction along the plane of the diaphragm / common electrode at 7 N / m 2 (see FIG. 6).
(A)) and the Young's modulus of the bonding material is 1.0 × E + 8 N / m
2 shows a resonance characteristic (FIG. 6B) when the protrusion width in the direction along the plane of the diaphragm / common electrode is +10 μm.
【００３０】図６（ａ）に示す場合つまり接合材のヤン
グ率が小さい場合には共振がばらつき、図６（ｂ）に示
す場合つまり接合材のヤング率が大きい場合には共振が
ばらつかないことが分かる。したがって、共振特性の点
からは、接合材のヤング率は１．０×Ｅ＋８Ｎ／ｍ2以
上であることが望ましいことが読み取れる。In the case shown in FIG. 6A, that is, when the Young's modulus of the bonding material is small, the resonance varies, and in the case shown in FIG. 6B, that is, when the Young's modulus of the bonding material is large, the resonance does not vary. I understand. Therefore, from the viewpoint of resonance characteristics, it can be read that the Young's modulus of the bonding material is preferably 1.0 × E + 8 N / m 2 or more.
【００３１】以上説明した図５および図６から、本実施
の形態では、前述したように、接合材１４のはみ出し幅
が、振動板兼共通電極１１の平面に沿った方向へ５μｍ
以上で、そのヤング率が１．０×Ｅ＋８〜１．０×Ｅ＋
１０Ｎ／ｍ2となっているものである。From FIGS. 5 and 6 described above, in this embodiment, as described above, the protruding width of the bonding material 14 is 5 μm in the direction along the plane of the diaphragm / common electrode 11.
With the above, the Young's modulus is 1.0 × E + 8 to 1.0 × E +
It is 10 N / m 2 .
【００３２】なお、本実施の形態では第１の電極と振動
板とを一体とした構造（振動板が第１の電極を兼ねてい
る）となっているが、両者は別々に形成されていても良
い。その場合には、区画壁２ａの上に振動板を固定し、
その上に第１の電極が形成されていれば良い。In this embodiment, the first electrode and the vibrating plate are integrated (the vibrating plate also serves as the first electrode), but both are formed separately. Is also good. In that case, fix the diaphragm on the partition wall 2a,
It is sufficient that the first electrode is formed thereon.
【００３３】本実施の形態において、個別電極３は例え
ばＰｔ（白金）で、強誘電体膜１０は例えばチタン酸ジ
ルコン酸鉛（ＰＺＴ）で、振動板兼共通電極１１は例え
ばＣｕ（銅）で、それぞれ形成されている。また、個別
電極３は例えば厚さ０．２μｍに、強誘電体膜１０は例
えば厚さ３μｍに、振動板兼共通電極１１は例えば厚さ
５．５μｍに、各々成膜されている。In this embodiment, the individual electrode 3 is, for example, Pt (platinum), the ferroelectric film 10 is, for example, lead zirconate titanate (PZT), and the diaphragm / common electrode 11 is, for example, Cu (copper). , Respectively formed. The individual electrode 3 is formed to have a thickness of 0.2 μm, the ferroelectric film 10 is formed to have a thickness of 3 μm, and the diaphragm / common electrode 11 is formed to have a thickness of 5.5 μm.
【００３４】また、個別電極３、強誘電体膜１０、振動
板兼共通電極１１などの形成方法は、公知の各種の膜形
成法、例えばスクリーン印刷の如き厚膜法やディッピン
グ等の塗布法、スパッタリング法、ＣＶＤ法、真空蒸着
法、ゾルゲル法、メッキ等の薄膜形成法等が適宜採用さ
れ得るが、それらに何等限定されるものではない。The individual electrodes 3, the ferroelectric film 10, the diaphragm / common electrode 11 and the like are formed by various known film forming methods, for example, a thick film method such as screen printing or a coating method such as dipping. A sputtering method, a CVD method, a vacuum deposition method, a sol-gel method, a thin film forming method such as plating, and the like can be appropriately adopted, but the method is not limited thereto.
【００３５】なお、本実施の形態に示す、振動板兼共通
電極１１、強誘電体膜１０、個別電極３のそれぞれの膜
間には、例えばそれぞれの膜の接合を良くするなどの目
的で、これら以外の層を介在させても構わない。In addition, between the respective films of the diaphragm / common electrode 11, the ferroelectric film 10 and the individual electrode 3 shown in the present embodiment, for example, for the purpose of improving the bonding of the respective films, Layers other than these may be interposed.
【００３６】ここで、以上説明した構成を有するインク
ジェットヘッドの製造方法について図７を用いて説明す
る。Here, a method of manufacturing the ink jet head having the above-described structure will be described with reference to FIG.
【００３７】図７において、先ず、例えばＭｇＯ基板１
５上に個別電極３をエピタキシャル成長により成膜し
（図７（ａ））、個別電極３上にペロブスカイト構造の
強誘電体膜１０を成膜し（図７（ｂ））、強誘電体膜１
０上に振動板兼共通電極１１を成膜する（図７
（ｃ））。なお、振動板を第１の電極とは別に設ける場
合には、さらに第１の電極上に振動板を成膜する。In FIG. 7, first, for example, the MgO substrate 1
The individual electrode 3 is formed on the individual electrode 5 by epitaxial growth (FIG. 7A), the ferroelectric film 10 having a perovskite structure is formed on the individual electrode 3 (FIG. 7B), and the ferroelectric film 1 is formed.
The common electrode 11 also serving as the diaphragm is formed on the surface of the substrate (FIG. 7).
(C)). Note that when the vibration plate is provided separately from the first electrode, the vibration plate is further formed on the first electrode.
【００３８】その後、振動板兼共通電極１１を接合材１
４がはみ出すようにして区画壁２ａに固定し（図７
（ｄ））、例えばリン酸を用いたウエットエッチングに
よりＭｇＯ基板１５を除去する（図７（ｅ））。最後
に、個別電極３および強誘電体膜１０を所定の形状にパ
ターニングすると（図７（ｆ））、図４に示したインク
ジェットヘッドが得られる。Then, the diaphragm / common electrode 11 is attached to the bonding material 1
4 is fixed to the partition wall 2a so as to protrude (see FIG.
(D)), for example, the MgO substrate 15 is removed by wet etching using phosphoric acid (FIG. 7E). Finally, the individual electrode 3 and the ferroelectric film 10 are patterned into a predetermined shape (FIG. 7F), and the inkjet head shown in FIG. 4 is obtained.
【００３９】ここで、接合材１４は、図８に示すよう
に、その塗布端部が隆起した状態となるように電着技術
で区画壁２ａに塗布すれば（図８（ａ））、振動板兼共
通電極１１と区画壁２ａとを接合した際に接合材１４の
隆起部分が圧力室内にはみ出すようになるので（図８
（ｂ））、接合材１４のはみ出しを容易に形成すること
ができる。なお、接合材１４は、たとえば印加電圧８．
５Ｖ、電圧印加時間６０ＳＥＣ、なじみ時間２０ＳＥＣ
の形成条件の下、図９に示すように、全体の塗布厚を３
μｍ、隆起部分の隆起量を１μｍ、隆起幅を３０μｍ程
度とすることができる。但し、このように塗布端部が隆
起した接合材１４は振動板兼共通電極１１側に塗布する
ことも可能である。Here, as shown in FIG. 8, if the bonding material 14 is applied to the partition wall 2a by the electrodeposition technique so that its application end portion is raised (FIG. 8 (a)), vibration will occur. When the plate / common electrode 11 and the partition wall 2a are joined, the raised portion of the joining material 14 comes to protrude into the pressure chamber (FIG. 8).
(B)) The protrusion of the bonding material 14 can be easily formed. The bonding material 14 is applied voltage 8.
5V, voltage application time 60SEC, familiar time 20SEC
As shown in FIG. 9, under the conditions for forming, the total coating thickness is 3
μm, the amount of protrusion of the raised portion can be 1 μm, and the width of the protrusion can be about 30 μm. However, it is also possible to apply the bonding material 14 having the application end raised in this way to the side of the diaphragm / common electrode 11 side.
【００４０】そして、塗布端部が隆起するように接合材
１４を塗布（図８（ａ））したならば（図８（ａ））、
図１０に示すように、区画壁２ａと振動板兼共通電極１
１とを相互に圧接する方向の押圧力たとえば７ｋｇ／ｃ
ｍ2程度付加して接合材１４を圧力室２内にはみ出さ
せ、押圧力を付加したまま、接合材１４の粘度が低下す
るとともにこの接合材１４の硬化が発生しない温度（た
とえば８０℃）で６０分〜１２０分程度にわたって加熱
する第１の加熱処理を行う。この第１の加熱処理後に
は、常温でたとえば３０分間冷却する。冷却後、押圧力
を除去した状態で接合材が硬化する温度（たとえば１８
０℃）で１２０分程度にわたって加熱する第２の加熱処
理を行い、インクジェットヘッドを形成する。第２の加
熱処理における昇温時間はたとえば２４０分、降温時間
はたとえば６０分とする。Then, if the bonding material 14 is applied (FIG. 8A) so that the application end portion is raised (FIG. 8A),
As shown in FIG. 10, the partition wall 2 a and the diaphragm / common electrode 1
Pressing force in the direction in which 1 and 1 are pressed against each other, for example, 7 kg / c
At a temperature (for example, 80 ° C.) at which the bonding material 14 is extruded into the pressure chamber 2 by adding about m 2 and the viscosity of the bonding material 14 is reduced and the hardening of the bonding material 14 does not occur while the pressing force is applied. The first heat treatment of heating for about 60 to 120 minutes is performed. After this first heat treatment, it is cooled at room temperature for, for example, 30 minutes. After cooling, the temperature at which the bonding material hardens with the pressing force removed (for example, 18
A second heat treatment of heating at 0 ° C. for about 120 minutes is performed to form an inkjet head. The temperature raising time in the second heat treatment is, eg, 240 minutes, and the temperature lowering time is, eg, 60 minutes.
【００４１】なお、第１の加熱処理後、冷却を行うこと
なく、第２の加熱処理を行ってもよい。Note that after the first heat treatment, the second heat treatment may be performed without cooling.
【００４２】以上説明したように、本実施の形態によれ
ば、インクを吐出するすべての圧力室において接合材を
振動板の少なくとも面内方向の圧力室内にはみ出させる
ことにより複数の強誘電体素子の相互間における変位特
性や共振特性が均一化されるので、インク吐出効率の優
れたインクジェットヘッドを得ることが可能になる。As described above, according to the present embodiment, a plurality of ferroelectric elements are provided by causing the bonding material to protrude into at least the in-plane pressure chambers of the vibration plate in all the pressure chambers that eject ink. Since the displacement characteristics and the resonance characteristics are uniform between the two, it is possible to obtain an inkjet head with excellent ink ejection efficiency.
【００４３】そして、このようなインクジェットヘッド
を備えたインクジェット式記録装置によれば、安定した
インク吐出により高画質の印字を行うことが可能にな
る。According to the ink jet recording apparatus having such an ink jet head, it is possible to perform high quality printing by stable ink ejection.
【００４４】[0044]
【発明の効果】以上のように、本発明によれば、接合材
を圧力室内にはみ出させることによって、複数の強誘電
体素子の相互間における変位特性や共振特性が均一化さ
れるので、インク吐出効率の優れたインクジェットヘッ
ドを得ることが可能になるという有効な効果が得られ
る。As described above, according to the present invention, the displacement characteristics and the resonance characteristics of a plurality of ferroelectric elements are made uniform by causing the bonding material to protrude into the pressure chamber. An effective effect is obtained in that it is possible to obtain an inkjet head with excellent ejection efficiency.
【図１】本発明の一実施の形態である強誘電体素子が用
いられたインクジェット式記録装置の全体概略構成を示
す斜視図FIG. 1 is a perspective view showing an overall schematic configuration of an ink jet recording apparatus using a ferroelectric element according to an embodiment of the present invention.
【図２】図１のインクジェット式記録装置におけるイン
クジェットヘッドの全体構成を示す断面図FIG. 2 is a sectional view showing the overall configuration of an inkjet head in the inkjet recording apparatus of FIG.
【図３】図２の要部を示す斜視図FIG. 3 is a perspective view showing a main part of FIG.
【図４】図２のインクジェットヘッドを示す断面図FIG. 4 is a sectional view showing the inkjet head of FIG.
【図５】接合材のはみ出し幅と強誘電体素子の変位量と
の関係を示すグラフFIG. 5 is a graph showing the relationship between the protruding width of the bonding material and the displacement amount of the ferroelectric element.
【図６】接合材のヤング率が１．０×Ｅ＋７Ｎ／ｍ2で
振動板兼共通電極の平面に沿った方向へのはみ出し幅が
＋１０μｍのときの共振特性と、接合材のヤング率が
１．０×Ｅ＋８Ｎ／ｍ2で振動板兼共通電極の平面に沿
った方向へのはみ出し幅が＋１０μｍのときの共振特性
とを示すグラフFIG. 6 shows resonance characteristics when the Young's modulus of the bonding material is 1.0 × E + 7 N / m 2 and the protrusion width in the direction along the plane of the diaphragm / common electrode is +10 μm, and the Young's modulus of the bonding material is 1 A graph showing resonance characteristics when the protrusion width in the direction along the plane of the diaphragm / common electrode is +10 μm at 0.0 × E + 8 N / m 2.
【図７】本発明の一実施の形態であるインクジェットヘ
ッドの製造方法を連続的に示す断面図FIG. 7 is a sectional view continuously showing a method for manufacturing an inkjet head according to an embodiment of the present invention.
【図８】本発明の一実施の形態であるインクジェットヘ
ッドの製造過程における接合材の塗布形状を示す断面図FIG. 8 is a cross-sectional view showing the coating shape of the bonding material in the manufacturing process of the inkjet head according to the embodiment of the present invention.
【図９】図８における接合材の隆起部分の寸法の一例を
示す説明図9 is an explanatory view showing an example of dimensions of a raised portion of the bonding material in FIG.
【図１０】本発明の一実施の形態であるインクジェット
ヘッドの製造過程における接合材の塗布形状を示す断面
図FIG. 10 is a cross-sectional view showing a coating shape of the bonding material in the manufacturing process of the inkjet head according to the embodiment of the present invention.
２ 圧力室 ２ａ 区画壁 ３ 個別電極（第２の電極） １０ 強誘電体膜 １１ 振動板兼共通電極（振動板、第１の電極） １４ 接合材 ４１ インクジェットヘッド ４０ インクジェット式記録装置 2 Pressure chamber 2a division wall 3 Individual electrodes (second electrode) 10 Ferroelectric film 11 Vibration plate and common electrode (vibration plate, first electrode) 14 Bonding material 41 inkjet head 40 Inkjet recording device
───────────────────────────────────────────────────── フロントページの続き (72)発明者 池田 武士 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Ｆターム(参考） 2C057 AF93 AG85 AG93 AP02 AP25 AP33 AP37 AP57 BA03 BA14 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Takeshi Ikeda 1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric Sangyo Co., Ltd. F-term (reference) 2C057 AF93 AG85 AG93 AP02 AP25 AP33 AP37 AP57 BA03 BA14
Claims (9)
上に固定された振動板と、 前記振動板の上に形成された第１の電極と、 前記第１の電極上に形成された強誘電体膜と、 前記強誘電体膜上に形成され、前記第１の電極と協働し
て前記圧力室の容積を変化させる方向に前記強誘電体膜
を変位させる第２の電極とを有し、 前記接合材が前記圧力室内にはみ出していることを特徴
とするインクジェットヘッド。1. A plurality of partition walls forming pressure chambers, a diaphragm fixed to the partition walls via a bonding material so as to cover the pressure chambers, and a diaphragm formed on the diaphragm. A first electrode, a ferroelectric film formed on the first electrode, and a ferroelectric film formed on the ferroelectric film and changing the volume of the pressure chamber in cooperation with the first electrode. And a second electrode for displacing the ferroelectric film in a direction, wherein the bonding material protrudes into the pressure chamber.
った方向へのはみ出し幅が５μｍ以上であることを特徴
とする請求項１記載のインクジェットヘッド。2. The ink jet head according to claim 1, wherein the protrusion width of the bonding material in the direction along the plane of the diaphragm is 5 μm or more.
１．０×Ｅ＋１０Ｎ／ｍ2であることを特徴とする請求
項１または２記載のインクジェットヘッド。3. The Young's modulus of the bonding material is 1.0 × E + 8 to
3. The inkjet head according to claim 1, wherein the ink jet head has a density of 1.0 × E + 10 N / m 2 .
樹脂であることを特徴とする請求項１〜３の何れか一項
に記載のインクジェットヘッド。4. The ink jet head according to claim 1, wherein the bonding material is an acrylic resin or an epoxy resin.
ことを特徴とする請求項１〜４の何れか一項に記載のイ
ンクジェットヘッド。5. The ink jet head according to claim 1, wherein the vibrating plate also serves as the first electrode.
ジェットヘッドを備えたことを特徴とするインクジェッ
ト式記録装置。6. An ink jet recording apparatus comprising the ink jet head according to any one of claims 1 to 5.
力室を覆うようにして接合材を介して振動板を接着し、 前記区画壁と前記振動板とを相互に圧接する方向の押圧
力を付加して前記接合材を前記圧力室内にはみ出させ、 前記押圧力を付加したまま、前記接合材の粘度が低下す
るとともに当該接合材の硬化が発生しない温度で加熱す
る第１の加熱処理を行い、 第１の加熱処理後、常温で冷却し、 冷却後、前記押圧力を除去した状態で前記接合材が硬化
する温度で加熱する第２の加熱処理を行うことを特徴と
するインクジェットヘッドの製造方法。7. A vibrating plate is adhered to a plurality of partition walls forming a pressure chamber via a bonding material so as to cover the pressure chamber, and the partition walls and the vibrating plate are pressed against each other. A first heating in which a pressing force is applied to cause the bonding material to protrude into the pressure chamber, and the bonding material is heated at a temperature at which the viscosity of the bonding material decreases and the hardening of the bonding material does not occur while the pressing force is applied. Inkjet, characterized in that after the first heat treatment, cooling is performed at room temperature, and after the second heat treatment, the second heat treatment is performed at a temperature at which the bonding material is cured with the pressing force removed. Head manufacturing method.
力室を覆うようにして接合材を介して振動板を接着し、 前記区画壁と前記振動板とを相互に圧接する方向の押圧
力を付加して前記接合材を前記圧力室内にはみ出させ、 前記押圧力を付加したまま、前記接合材の粘度が低下す
るとともに当該接合材の硬化が発生しない温度で加熱す
る第１の加熱処理を行い、 第１の加熱処理後、前記押圧力を除去した状態で前記接
合材が硬化する温度で加熱する第２の加熱処理を行うこ
とを特徴とするインクジェットヘッドの製造方法。8. A vibrating plate is adhered to a plurality of partition walls forming a pressure chamber via a bonding material so as to cover the pressure chamber, and the partition walls and the vibrating plate are pressed against each other. A first heating in which a pressing force is applied to cause the bonding material to protrude into the pressure chamber, and the pressing material is heated at a temperature at which the viscosity of the bonding material decreases and the hardening of the bonding material does not occur with the pressing force applied. A method for manufacturing an inkjet head, wherein after the first heat treatment is performed, a second heat treatment is performed after the first heat treatment, in which the bonding material is heated at a temperature at which the bonding material is cured.
力室を覆うようにして接合材を介して振動板を接着し、 前記区画壁と前記振動板とを相互に圧接する方向の押圧
力を付加して前記接合材を前記圧力室内にはみ出させる
インクジェットヘッドの製造方法であって、前記接合材
は、その塗布端部が隆起した状態で前記区画壁または前
記振動板に塗布されること特徴とするインクジェットヘ
ッドの製造方法。9. A vibrating plate is adhered to a plurality of partition walls forming the pressure chamber via a bonding material so as to cover the pressure chamber, and the partition walls and the vibrating plate are pressed against each other. A method of manufacturing an inkjet head, wherein a pressing force is applied to cause the bonding material to protrude into the pressure chamber, wherein the bonding material is applied to the partition wall or the vibration plate in a state where an application end portion thereof is raised. A method of manufacturing an inkjet head, characterized in that
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| JP2002006905A JP4284913B2 (en) | 2002-01-16 | 2002-01-16 | Ink jet head, manufacturing method thereof, and ink jet recording apparatus |
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| JP2002006905A JP4284913B2 (en) | 2002-01-16 | 2002-01-16 | Ink jet head, manufacturing method thereof, and ink jet recording apparatus |
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| JP4284913B2 JP4284913B2 (en) | 2009-06-24 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012143981A (en) * | 2011-01-13 | 2012-08-02 | Seiko Epson Corp | Liquid ejecting head, and liquid ejecting apparatus |
| JP2016027961A (en) * | 2015-10-22 | 2016-02-25 | セイコーエプソン株式会社 | Liquid injection head and liquid injection device |
| JP2019162770A (en) * | 2018-03-19 | 2019-09-26 | 株式会社リコー | Liquid discharge head, liquid discharge unit, and liquid discharge device |
-
2002
- 2002-01-16 JP JP2002006905A patent/JP4284913B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012143981A (en) * | 2011-01-13 | 2012-08-02 | Seiko Epson Corp | Liquid ejecting head, and liquid ejecting apparatus |
| US9050800B2 (en) | 2011-01-13 | 2015-06-09 | Seiko Epson Corporation | Liquid ejecting head and liquid ejecting apparatus |
| JP2016027961A (en) * | 2015-10-22 | 2016-02-25 | セイコーエプソン株式会社 | Liquid injection head and liquid injection device |
| JP2019162770A (en) * | 2018-03-19 | 2019-09-26 | 株式会社リコー | Liquid discharge head, liquid discharge unit, and liquid discharge device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4284913B2 (en) | 2009-06-24 |
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