JP2003202574A - Substrate for liquid crystal device and method of manufacturing the same, liquid crystal device and projection type display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal device having highly durable polarizers. <P>SOLUTION: The liquid crystal device has a TFT array substrate 10 and an opposite substrate 20 both of which are provided with structural birefringent bodies 16 and 22 having a plurality of light reflectors 16a and 22a arrayed in a stripe form at a pitch smaller than the wavelength of the light incident on a liquid crystal layer 50 and buried layers 16b and 22b consisting of an organic material having the refractive index smaller than the refractive index of the liquid crystal material constituting the liquid crystal layer 50 and capable of exhibiting alignment regulating power to liquid crystal molecules by itself. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate for a liquid crystal device, a method for manufacturing the same, a liquid crystal device and a projection type display device,
In particular, the present invention relates to the configuration of a liquid crystal device having a structural birefringent body that functions as a reflective polarizer having a high extinction ratio and at the same time functions as an alignment film.

[0002]

2. Description of the Related Art A liquid crystal device used as a light modulating means mounted on a projection type display device such as a liquid crystal projector is arranged so as to face each other with a liquid crystal layer interposed therebetween, and has electrodes for applying a voltage to the liquid crystal layer. The liquid crystal cell is composed of a pair of substrates. For example, as a liquid crystal light valve used for the light modulation means of a projection type display device, light incident from one substrate side, transmitted through a liquid crystal layer, and then emitted from the other substrate side is introduced into a projection optical system. Transmissive liquid crystal devices are known. In a transmissive liquid crystal device, a polarizer (analyzer) that transmits only polarized light having a vibration direction in one direction is provided on the outside of a pair of substrates, so that the liquid crystal layer inside the liquid crystal layer when no voltage is applied and when a voltage is applied is provided. The arrangement is such that the alignment of liquid crystal molecules is optically identified and displayed.

[0003]

In a conventional transmissive liquid crystal device, a polarizer transmits only a specific polarized light while
Light absorbing polarizers that absorb other polarized light are widely used. However, when a high-brightness light source is used as the light source, the amount of light absorbed by the polarizer increases and the temperature of the polarizer rises. As a result, the polarizer deteriorates and the durability of the liquid crystal device decreases. There was a problem. This problem has been a significant problem when the liquid crystal device is mounted on a projection display device that uses a particularly strong light source. In addition, the problem of deterioration of the polarizer is that when black (dark) is displayed, it is necessary to absorb almost all of the light that has passed through the liquid crystal layer, which is a significant problem in the polarizer on the light emitting side that functions as an analyzer. there were.

Further, when the light emitting side polarizer is constituted by a light reflection type polarizer which transmits only a specific polarized light and reflects other polarized light, light absorption by the polarizer does not occur. Therefore, although the above problem can be avoided, in an active matrix liquid crystal device using a transistor element, the light reflected by the polarizer on the light emitting side enters the semiconductor layer of the transistor element and causes a light leakage current. And the switching characteristics of the device may deteriorate.

The present invention has been made to solve the above problems, and is for a liquid crystal device provided with a polarizer having excellent durability, which is suitable for use in, for example, a liquid crystal light valve of a projection type display device. An object is to provide a substrate and a liquid crystal device including the substrate.

[0006]

In order to achieve the above-mentioned object, a liquid crystal device substrate of the present invention is used in a liquid crystal device in which a liquid crystal layer is sandwiched between a pair of substrates arranged opposite to each other. And a plurality of light reflectors arranged in stripes at a pitch smaller than the wavelength of the light incident on the liquid crystal layer, which are adjacent to each other. Embedded between the two light reflectors, having an index of refraction smaller than that of the liquid crystal material forming the liquid crystal layer and capable of exerting an alignment regulating force on the liquid crystal molecules of the liquid crystal layer. And a structural birefringent body having a layer. Here, the “structural birefringent body” is a “structure having a different effective refractive index depending on the polarization direction of incident light”, and the effective refractive index depends on the polarization direction of light incident on the structural birefringent body. By utilizing the difference, only specific polarized light can be transmitted and only specific polarized light can be reflected.

The present applicant has proposed a liquid crystal device having a structure in which a structural birefringent body having a plurality of light reflectors arranged in stripes at a pitch smaller than the wavelength of light incident on the liquid crystal layer is formed on a substrate. I have already applied. As described above, since the structural birefringent body has a function of transmitting only specific polarized light and reflecting only specific polarized light due to the difference in effective refractive index depending on the polarization direction of incident light, it functions as a reflective polarizer. By using the substrate on which the structural birefringent body is formed, as at least one of the pair of substrates constituting the liquid crystal device, it is possible to realize a liquid crystal device having a built-in polarizer. The reflective polarizer made of structural birefringent material
The amount of light absorbed is far smaller than that of the conventional light-absorbing polarizer, and the durability is excellent.

However, in the above-mentioned liquid crystal device which has already been filed, when the polarizer composed of the structural birefringent body is formed on the substrate, there are the following problems. For example, in the case of incorporating a polarizer composed of a structural birefringent body, for example, when the structural birefringent body is formed on the outermost surface side of the substrate, that is, on the surface in contact with the liquid crystal layer, the polyimide sandwiched between adjacent light reflectors is formed. There will be an alignment film and a liquid crystal layer made of, for example.
In this case, since the difference in refractive index between the metal such as aluminum and the polyimide or the liquid crystal forming the light reflector is not so large, a sufficient extinction ratio as a polarizer cannot be obtained.
As a result, in the end, it was not possible to extend the service life of the conventional light-absorbing polarizer attached to the outside of the liquid crystal cell to a satisfactory level.

In order to explain the reason why the above problems occur, the action of the structural birefringent body will be specifically described here. As the structural birefringent body included in the liquid crystal device of the present invention, a structural birefringent body having a plurality of light reflectors arranged in stripes at a pitch smaller than the wavelength of light incident on the liquid crystal layer is preferable. Based on FIG. 8, the reason why the structural birefringent body having such a structure can transmit only specific polarized light and reflect only specific polarized light will be described.

As shown in FIG. 8, in a structural birefringent body 100 having a plurality of mediums A101 arranged in stripes at a pitch smaller than the wavelength of incident light, a gap between adjacent mediums A101 is formed. In the medium A101
It is necessary that the medium B102 having a different refractive index from is filled. The medium B102 may be solid, liquid or gas.

[0011] In structural birefringence body 100 having such a structure, the refractive index n ₂ of the refractive index n ₁ and the medium B102 medium A101 is different, valid by the polarization direction of light incident on the structural birefringence body 100 refraction The rates are different. For example, when the refractive index n ₁ of the medium A101 is larger than the refractive index n _{2 of the} medium B102, the effective refractive index of the polarized light A vibrating in a direction substantially parallel to the extending direction of each medium A101 is It becomes larger than the effective refractive index for the polarized light B that oscillates in a direction substantially perpendicular to the extending direction of the medium A101.

When the medium A and the medium B are made of a dielectric material, and the width of the medium A101 is a and the width of the medium B102 is b,
Of the light incident on the structural birefringent body 100, the effective refractive index Na for polarized light A and the effective refractive index Nb for polarized light B are
Are known to be respectively represented by the following formulas (1) and (2) (for example, M. Born and E. Wolf: Princi
ples of Optics, 1st ed. (Pergamon Press, New York,
1959) p.705-708). As can be seen from the following equations (1) and (2), the thickness a of the medium A101 and the thickness b of the medium B102 are
The effective refractive index can be changed in the range of n _{1 to} n ₂ by the ratio of.

[0013]

[Equation 1]

It has been described above that the structural birefringent body exhibits different optical properties depending on the polarization state of light. Here, when a light reflector such as a metal or a semiconductor is used as the medium A,
By treating the permittivity as a complex number, it can be treated in the same manner as when obtaining the effective refractive index for the dielectric. However, the effective refractive index is a complex number. Effective Medium The
ory (eg Dominique Lemercier−lalanne: Journal
of Modern Optics, 1996, vol43, no.10,2063-2085), or more strictly, Rigorous Coupled-Wave Analysis (MGMohar
am: J.Opt.Soc.Am.A, 12 (1995) 1077), the imaginary part of the effective refractive index of the structural birefringent body for polarized light A is large when a metal is used as the medium A. Becomes the value,
As a result, it is known that the incident polarized light A is reflected by the structural birefringent body. On the other hand, it is known that the imaginary part of the effective refractive index for the polarized light B has a small value, and the polarized light B transmits through the structural birefringent body.

As described above, by forming a periodic structure having a wavelength smaller than the wavelength with two kinds of media, the same action as that of the light reflection type polarizer, that is, the optical axis (transmission axis) of the structural birefringent body
A polarized light parallel to the polarized light can be transmitted, and a polarized light perpendicular to the polarized light can be reflected.

Further, the larger the difference between the refractive index of the medium A (light reflector) and the refractive index of the medium B, and the smaller the pitch of the medium A, the more preferable. By doing so, the effective refraction for the polarized light A and the polarized light B is performed. The difference in rates can be increased. As a result, the reflectance of the polarized light A can be increased, the transmittance of the polarized light B can be increased, and the extinction ratio can be increased, so that a liquid crystal device having excellent contrast can be provided.
The extinction ratio is defined as "transmittance of polarized light parallel to the optical axis (transmission axis) / transmittance of polarized light perpendicular to the optical axis (transmission axis)". However, since there is a limit to reducing the pitch of the light reflectors in the manufacturing process, it is desirable to maximize the difference in refractive index between the medium A and the medium B in order to increase the extinction ratio.

However, as described above, when an attempt is made to realize a liquid crystal device provided with a polarizer composed of a structural birefringent body, the metal (medium A) constituting the light reflector, for example, aluminum has a refractive index of 1.8. The refractive index of the alignment film material (medium B), for example, polyimide interposed between them is 1.5 to 1.6, or the refractive index of the liquid crystal material (medium B) is about 1.5. Since the refractive index difference between the medium A and the medium B is not so large, a sufficient extinction ratio cannot be obtained.

Therefore, the present inventors have paid attention to the fact that some organic materials have a refractive index smaller than the refractive index (about 1.5) of the above-mentioned polyimide or liquid crystal material and are adjacent to each other. It has been found that a high extinction ratio can be obtained by filling the space between the light reflectors with such an organic material. That is, even if the metal material (the above-mentioned medium A) forming the light reflector is the same, by interposing the organic material (the above-mentioned medium B) having a refractive index smaller than at least the refractive index of the liquid crystal material, It is possible to increase the difference in the refractive index between the two media forming the structural birefringent body and increase the extinction ratio.

Further, when selecting the organic material, the structural birefringent body itself has a function of aligning the liquid crystal molecules by selecting a material capable of exerting an alignment regulating force on the liquid crystal molecules. You can Therefore,
By forming the structural birefringent body having such a structure on the substrate, the structural birefringent body can also function as an alignment film. Because the light reflectors are formed with an extremely fine pitch (pitch smaller than the wavelength of incident light), even if the organic material does not exist on the upper surface of the light reflector, the adjacent light reflectors This is because if the organic material exists in the portion between and the alignment of the liquid crystal molecules is regulated in this portion, the alignment birefringence body as a whole can sufficiently exert the alignment regulating force.

As the organic material, for example, a material mainly composed of a crystalline fluorine-containing polymer can be used. The crystalline fluorine-containing polymer is chemically stable and has high crystallinity, and by forming it on a plurality of light reflectors constituting the structural birefringent, a fine portion between adjacent light reflectors ( Since the liquid crystal molecules themselves are aligned along the following description (referred to as a groove), it is possible to control the alignment of liquid crystal molecules.

Further, as the organic material, a material mainly composed of polyolefin can be adopted. Polyolefin can also be formed along the fine grooves of the structural birefringent body with a high orientation regulating force. As the polyolefin, for example, polyethylene having a high orientation regulating force can be exemplified.

Further, as the organic material, a material mainly composed of a liquid crystal monomer-derived polymer obtained by polymerizing a liquid crystal monomer can be adopted. In this case, the "liquid crystalline monomer" means a substance which can take a liquid crystal phase by itself, or a liquid crystal monomer which does not itself take a liquid crystal phase but loses the liquid crystal state of the mixture when mixed in the liquid crystal phase. Means nothing. Since such a polymer derived from a liquid crystalline monomer can also orient itself along the fine grooves of the structural birefringent body, when such an organic material is formed on the structural birefringent body, the liquid crystal molecules can be aligned and regulated. Is possible.

Specifically, the liquid crystalline monomer is mainly composed of one or more compounds represented by any one of the following general formulas (1), (2) and (3). can do.

[0024]

[Chemical 4]

[0025]

[Chemical 5]

[0026]

[Chemical 6]

The compounds represented by the above general formulas (1), (2) and (3) all have a rod-shaped molecular structure and are similar to liquid crystal monomers or liquid crystal molecules which themselves form a liquid crystal phase. It is a monomer having properties. When these monomers are vapor-deposited on the structural birefringent body by an ion vapor deposition method, a polymerization reaction proceeds, and the polymer is formed while being oriented along the fine grooves of the structural birefringent body. Moreover, since the compounds represented by the above general formulas (1), (2), and (3) are acrylate-based or methacrylate-based monomers, they have excellent polymerization reactivity, and ion-deposited on the structural birefringent body. When these monomers are vapor-deposited by the method, the monomers spontaneously polymerize and polymerize.

The organic material can be composed mainly of polyalkyl acrylate or polyalkyl methacrylate. Specifically, a poly long-chain alkyl acrylate or a poly long-chain alkyl methacrylate whose carbon number of the alkyl chain is 5 or more can be mainly composed. In this case, since the polyalkyl acrylate or polyalkyl methacrylate is aligned along the fine grooves of the structural birefringent body, it is possible to control the alignment of the liquid crystal molecules.

The alkyl acrylate or acrylic methacrylate is represented by the following general formula (1).

[0030]

[Chemical 7]

The method for manufacturing a substrate for a liquid crystal device according to the present invention comprises the step of forming a plurality of light reflectors arranged in a stripe pattern at a pitch smaller than the wavelength of light incident on the liquid crystal layer on the substrate, By vapor-depositing an organic material having a smaller refractive index than the liquid crystal material forming the liquid crystal layer and capable of exerting an alignment regulating force on the liquid crystal molecules of the liquid crystal layer, a space between two adjacent light reflectors is formed. And a step of forming a buried layer buried with the organic material.

Among the organic materials, the organic materials such as the above-mentioned polyolefins and liquid crystalline monomers which are particularly suitable for the structural birefringent body of the present invention can be formed into a film by a vapor deposition method. Therefore, the vapor deposition method can be used to realize a structure, which is peculiar to the present invention, in which the portion between the adjacent light reflectors is filled with the organic material. This method is particularly preferable for the present invention, for example, when an organic film is formed by a spin coating method or the like, the step difference between where the light reflector is and where it is not is reflected on the surface. In the case of using, the organic material molecules move on the substrate surface (light reflector surface) by the surface migration effect of the organic material molecules reaching the substrate, and are vapor-deposited while being oriented so as to fall into the groove. In this process, vapor deposition preferentially proceeds inside the groove rather than on the upper surface of the light reflector, so that a structure in which the groove is filled with an organic material can be realized. Further, since the width of the groove is fine, the long chain direction of the organic material molecules is aligned along the extending direction of the groove, so that the alignment function can be better exhibited.

The above-mentioned liquid crystal monomer-derived polymer can be formed on the structural birefringent body by ion vapor deposition of the liquid crystal monomer. Specifically, the liquid crystal monomer is ionized and vapor-deposited. It can be formed by proceeding a polymerization reaction on the birefringent body. Therefore, such a liquid crystalline monomer-derived polymer can be aligned along the groove of the structural birefringent body, and a high alignment regulating force can be imparted to the liquid crystal molecules based on the alignment. Polyalkyl acrylate and polyalkyl methacrylate can be similarly formed by ion vapor deposition.

In the liquid crystal device of the present invention, the liquid crystal device substrate of the present invention is used as a first substrate, and the surface of the first substrate on which the structural birefringence body is formed is the second substrate side. The first substrate and the second substrate are arranged so as to face each other, and a liquid crystal layer is sandwiched between these substrates.

As described above, when a liquid crystal device is constructed using the substrate for liquid crystal device provided with the structural birefringent material peculiar to the present invention, the structural birefringent material functions as a reflection type polarizer,
Since a higher extinction ratio can be obtained as compared with the conventional one, it is possible to significantly reduce the amount of light absorbed by the external light absorption type polarizer which has been conventionally used. Further, since the structural birefringent body also functions as an alignment film, the conventional alignment film using polyimide or the like can be omitted. As a result, a liquid crystal device having excellent durability can be obtained.

Furthermore, the liquid crystal device substrate of the present invention is also used on the second substrate side so that the surface of the second substrate on which the structural birefringence body is formed faces the first substrate side. A second substrate may be placed.

That is, not only one of the pair of substrates constituting the liquid crystal device, but also the substrate for liquid crystal device of the present invention provided with the structural birefringent body may be used for both substrates. With this configuration, an external polarizing plate and an alignment film are not required on both sides of the liquid crystal cell, and the device configuration can be further simplified.

The projection type display device of the present invention comprises a light source, a light modulation means comprising the liquid crystal device of the present invention for modulating the light from the light source, and a projection means for projecting the light modulated by the light modulation means. It is characterized by having and. With this configuration, it is possible to realize a projection type display device having excellent durability and high reliability even when a light source that emits high-intensity light is used.

[0039]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIGS. The liquid crystal device of the present embodiment has a thin film transistor (ThinFi
lm Transistor, abbreviated as TFT hereinafter) is an example of an active matrix type liquid crystal device. And
In this embodiment mode, an example in which the substrate for a liquid crystal device of the present invention including a structural birefringent body is applied to both of a pair of substrates constituting the liquid crystal device is shown.

The structure of the liquid crystal device according to the present embodiment will be described below with reference to FIGS. FIG. 1 is an equivalent circuit diagram of a plurality of pixels arranged in a matrix which constitutes an image display area of the liquid crystal device of the present embodiment, and FIG. 2 is a plan view showing a structure of a plurality of adjacent pixels on a TFT array substrate. ,
FIG. 3 is a sectional view showing the structure of the liquid crystal device of FIG.
4 is a cross-sectional view taken along the line AA ′ of FIG. 4, FIG. 4 is a perspective view showing only the structural birefringent body, FIG. 5 is the same as the process cross-sectional view for explaining the manufacturing method of the liquid crystal device, and FIG. It is a schematic block diagram of the ion vapor deposition apparatus used in the manufacturing process of a liquid crystal device.
In each of these drawings, the scale is made different for each layer and each member in order to make each layer and each member recognizable in the drawings.

In the liquid crystal device according to the present embodiment, as shown in FIG. 1, the pixel electrode 9 and the pixel electrode 9 are provided in a plurality of pixels arranged in a matrix forming an image display area.
TFTs 30 which are switching elements for controlling the TFTs are formed respectively, and the data line 6a to which the image signal is supplied is electrically connected to the source of the TFT 30. Image signals S1, S2 to be written to the data line 6a,
, Sn are supplied line-sequentially in this order, or are supplied for each group to a plurality of adjacent data lines 6a. Further, the scanning line 3a is electrically connected to the gate of the TFT 30, and the scanning signals G1, G2, ..., Gm are pulse-wise line-sequentially applied to the plurality of scanning lines 3a at a predetermined timing. The pixel electrode 9 is the TFT 3
The image signals S1, S2 supplied from the data line 6a are electrically connected to the drain of 0, and by turning on the TFT 30 which is a switching element for a certain period.
..., Sn is written at a predetermined timing.

The image signals S1, S2, ..., Sn having a predetermined level written in the liquid crystal via the pixel electrode 9 are held for a certain period between the common electrodes described later. The liquid crystal modulates light by changing the orientation and order of the molecular assembly depending on the applied voltage level, and enables gradation display. Here, in order to prevent the held image signal from leaking, a storage capacitor 70 is added in parallel with the liquid crystal capacitor formed between the pixel electrode 9 and the common electrode. Reference numeral 3b is a capacitance line.

Next, the planar structure of the TFT array substrate that constitutes the liquid crystal device of this embodiment will be described with reference to FIG. As shown in FIG. 2, on the TFT array substrate,
A plurality of rectangular pixel electrodes 9 (outlined by a dotted line portion 9A) are provided in a matrix, and data lines 6a, scanning lines 3a, and capacitance lines 3b are provided along the vertical and horizontal boundaries of the pixel electrodes 9, respectively. Has been. In the present embodiment,
Each pixel arranged in a matrix is a pixel inside a region where each pixel electrode 9 and the data line 6a, the scanning line 3a, the capacitance line 3b, etc. arranged so as to surround the pixel electrode 9 are formed. It has a structure that can be displayed.

The data line 6a constitutes the TFT 30,
For example, in the semiconductor layer 1a made of a polysilicon film, it is electrically connected to a source region described later through a contact hole 5, and the pixel electrode 9 is
It is electrically connected to a drain region described later via a contact hole 8. Further, in the semiconductor layer 1a, a scanning line 3a is arranged so as to oppose a channel region (a diagonally upward-sloped region in the drawing) described later, and the scanning line 3a serves as a gate electrode at a portion facing the channel region. Function.

The capacitance line 3b is a main line portion extending in a substantially straight line along the scanning line 3a (that is, the scanning line 3 in plan view).
a first region formed along a) and a protruding portion (that is, the data line when seen in a plan view) protruding from the intersection with the data line 6a to the front side (upward in the figure) along the data line 6a. 6a and the 2nd area | region extended along). Then, in FIG. 2, a plurality of first light-shielding films 11a are provided in the region shown by the diagonal lines rising to the right.

More specifically, each of the first light-shielding films 11a forms a TFT 30 including the channel region of the semiconductor layer 1a.
It is provided in a position to cover when viewed from the FT array substrate side,
Further, the main line portion that extends linearly along the scanning line 3a so as to face the main line portion of the capacitance line 3b, and the rear side adjacent to the main line portion that intersects the data line 6a along the data line 6a (that is, downward in the figure). ) Has a protruding portion. The tip of the downward projecting portion in each stage (pixel row) of the first light-shielding film 11a has the capacitance line 3 in the next stage below the data line 6a.
It overlaps with the tip of the upward protrusion of b. A contact hole 13 for electrically connecting the first light-shielding film 11a and the capacitance line 3b to each other is provided in this overlapping portion. That is, in the present embodiment, the first light shielding film 11a
Are electrically connected to the capacitance line 3b at the front stage or the rear stage by the contact hole 13.

Next, the sectional structure of the liquid crystal device of the present embodiment will be described with reference to FIG. As shown in FIG.
In the liquid crystal device according to the present embodiment, the T array is provided between the TFT array substrate 10 and the counter substrate 20 arranged to face the TFT array substrate 10.
A liquid crystal layer 50 made of N (Twisted Nematic) liquid crystal is sandwiched. The TFT array substrate 10 includes a substrate body 10A made of a translucent material such as quartz or glass and its liquid crystal layer 50.
Indium tin oxide formed on the side surface
xide (hereinafter, abbreviated as ITO)) is mainly composed of a pixel electrode 9 made of a transparent conductive film such as ITO, a TFT 30, etc., and a counter substrate 20 is a substrate body 20A made of a translucent material such as glass or quartz. The second light shielding film 23 and the common electrode 31 formed on the surface of the liquid crystal layer 50 side are mainly configured.

More specifically, in the TFT array substrate 10, the pixel electrode 9 is provided on the surface of the substrate body 10A on the liquid crystal layer 50 side, and the TFT 3 is provided at a position adjacent to each pixel electrode 9.
0 is provided. The TFT 30 is an LDD (Lightly
The scanning line 3a, a channel region 1a 'of the semiconductor layer 1a in which a channel is formed by an electric field from the scanning line 3a, the scanning line 3a and the semiconductor layer 1
The gate insulating film 2 for insulating a from the data line 6a, the low concentration source region 1b and the low concentration drain region 1c of the semiconductor layer 1a, the high concentration source region 1d and the high concentration drain region 1e of the semiconductor layer 1a are provided.

The gate insulating film 2 is formed on the scanning line 3a.
The high-concentration source region 1d is formed on the substrate body 10A including the upper part.
A second interlayer insulating film 4 having a contact hole 5 leading to and a contact hole 8 leading to the high-concentration drain region 1e is formed. That is, the data line 6a is
It is electrically connected to the high concentration source region 1d through a contact hole 5 penetrating the second interlayer insulating film 4. Further, on the data line 6a and the second interlayer insulating film 4,
A third interlayer insulating film 7 is formed in which a contact hole 8 leading to the high concentration drain region 1e is opened. That is,
The high-concentration drain region 1e is electrically connected to the pixel electrode 9 via a contact hole 8 penetrating the second interlayer insulating film 4 and the third interlayer insulating film 7.

In the present embodiment, the gate insulating film 2
Is extended from a position facing the scanning line 3a and is used as a dielectric film, and the semiconductor film 1a is extended to be the first storage capacitor electrode 1f.
And a part of the capacitance line 3b facing the
The storage capacitor 70 is configured by using the storage capacitor electrode.

Further, the substrate body 1 of the TFT array substrate 10
In the area where each TFT 30 is formed on the surface of the liquid crystal layer 50 side of 0A, the TFT array substrate 10 is transmitted,
Return light reflected by the lower surface of the T array substrate 10 (an interface between the TFT array substrate 10 and air) and returning to the liquid crystal layer 50 side is at least the channel region 1a ′ of the semiconductor layer 1a and the low-concentration source and drain regions ( LDD region) 1b,
First light-shielding film 11a for preventing light from entering 1c
Is provided. In addition, the first light shielding film 11a and the TFT 3
A first interlayer insulating film 12 for electrically insulating the semiconductor layer 1a constituting the TFT 30 from the first light-shielding film 11a is formed between the first interlayer insulating film 12 and 0.

The structural birefringent body 16, which is the greatest feature of the present invention, is provided on the outermost surface of the TFT array substrate 10 on the liquid crystal layer side so as to cover the pixel electrode 9 and the third interlayer insulating film 7. ing. The structural birefringent body 16 has a plurality of light reflectors 16a made of a conductive material having high light reflectivity, such as aluminum, silver, or a silver alloy. Further, as shown in FIG. 4, an organic material is embedded between the adjacent light reflectors 16a arranged in stripes, and the embedded layer 1
6b is formed. This organic material has a smaller refractive index than the liquid crystal material forming the liquid crystal layer 50, and can exhibit an alignment regulating force for liquid crystal molecules. In addition,
Although the width and pitch of the light reflectors 16a are illustrated to be large in the drawing, a large number of light reflectors 16a are arranged at a pitch smaller than the wavelength of the light incident on the liquid crystal layer 50. Width is about 80 nm, pitch is 70
The thickness of the light reflector 16a is set to about 100 nm.

As the material of the buried layer 16b, for example, a polymer film in which an acrylic monomer (including a methacrylic monomer) is formed into a thin film by an ion vapor deposition method can be mentioned. Specifically, the following general formulas (1), (2),
(3) A monomer capable of forming a liquid crystal phase shown in (4), a monomer which does not lose its liquid crystal state by adding itself to the liquid crystal layer 50, or a long-chain alkyl acrylic monomer (long-chain alkyl methacrylic monomer) It is mainly composed of a polymer film obtained by ion-depositing a polymer.

[0054]

[Chemical 8]

[0055]

[Chemical 9]

[0056]

[Chemical 10]

[0057]

[Chemical 11]

As described above, the structural birefringent body 16 has a large number of light reflectors 16a arranged in stripes at a pitch smaller than the wavelength of the light incident on the liquid crystal layer 50, and adjacent light reflectors 16a. With the configuration in which the embedded layer 16b made of an organic material is interposed between the light incident on the pixel electrode 9, the polarized light vibrating in a direction substantially parallel to the extending direction of the light reflector 16a is Light reflector 16
The polarized light vibrating in a direction substantially perpendicular to the extending direction of a can be transmitted, and the pixel electrode 9 can function as a reflective polarizer. Moreover, the buried layer 16b
By selecting an organic material having a refractive index smaller than that of a general liquid crystal material, a reflective polarizer having a high extinction ratio can be realized.

Furthermore, the structural birefringent body 16 itself has a function of orienting liquid crystal molecules by selecting an organic material for the burying layer 16b, which can exert an alignment regulating force on the liquid crystal molecules. You can For example, the liquid crystal molecules can be oriented so that the long axis direction of the liquid crystal molecules is oriented in the extending direction of the light reflector 16a. Therefore, by forming this birefringent body 16 on the outermost surface of the TFT array substrate 10, the structural birefringent body 16 can also function as an alignment film. Since the light reflectors 16a are formed with a pitch smaller than the wavelength of the incident light, even if no organic material is present on the upper surface of the light reflectors 16a, organic light is generated in the portion between the adjacent light reflectors 16a. If a material exists and the orientation of the liquid crystal molecules is regulated at this portion, the structural birefringent body 16 as a whole can sufficiently exert the orientation regulating force.

On the other hand, in the counter substrate 20, the second light-shielding film 23 is formed on the surface of the substrate body 20A on the liquid crystal layer 50 side, and the common electrode 31 made of a transparent conductive film such as ITO is formed over the entire surface of the second light-shielding film 23. ing. Then, on the liquid crystal layer 50 side, as with the TFT array substrate 10 side, a structural birefringent body 22 that functions as a reflective polarizer and also as an alignment film is formed. Regarding the specific configuration of the structural birefringent body 22, the TFT array substrate 1
It is exactly the same as the structural birefringent body 16 on the 0 side, and has a plurality of light reflectors 22a arranged in stripes and an embedding layer 22b made of an organic material and embedded between them. However, in FIG. 3, both structural birefringent bodies 1
In order to show that both 6 and 22 have a plurality of light reflectors 16a and 22a, both structural birefringents 16 and 2 are shown.
Although the two light reflectors 16a and 22a are illustrated as extending in a direction penetrating the plane of the drawing, the light reflector 16a on the TFT array substrate 10 side and the light reflector 22a on the counter substrate 20 side are actually shown. Must be arranged so that their extending directions are orthogonal to each other, and by doing so, the orientation directions of both substrates are 90 °, and the TN mode liquid crystal layer 50 can be realized.

Next, an example of a method of manufacturing the liquid crystal device of the present embodiment having the above structure will be described with reference to FIGS. 5 and 6 by taking the manufacturing process of the TFT array substrate 10 as an example.
However, the process up to forming the pixel electrode 9 on the TFT array substrate 10 is not different from the conventional process, and thus the description thereof is omitted.

As shown in FIG. 5A, the first light-shielding film 11a, the first interlayer insulating film 12, and the first interlayer insulating film 12 are formed on the transparent substrate made of quartz or the like.
Semiconductor layer 1a, channel region 1a ', low concentration source region 1b, low concentration drain region 1c, high concentration source region 1
d, high-concentration drain region 1e, storage capacitance electrode 1f, gate insulating film 2, scanning line 3a, capacitance line 3b, second interlayer insulating film 4, data line 6a, third interlayer insulating film 7, contact holes 5, 8, A TFT array substrate 10 on which the pixel electrodes 9 and the pixel electrodes 9 and the like are formed by a method similar to the conventional method is prepared, and the structural birefringent body 16 is formed on the substrate.

Specifically, as shown in FIG. 5B, a metal having light reflectivity such as aluminum, silver or silver alloy is formed on the pixel electrode 9 and the third interlayer insulating film 7 by a sputtering method or the like. After depositing the material to a thickness of about 50 to 200 nm to form a metal thin film, the metal thin film is patterned by using a photolithography method to form a stripe-shaped light reflector 16a.

Next, as shown in FIG. 5C, in the present embodiment, an organic material is vapor-deposited by the ion vapor deposition method to form a buried layer between the adjacent light reflectors. FIG. 6 schematically shows the structure of the ion deposition apparatus 100. The ion vapor deposition apparatus 100 is provided with a vapor deposition chamber 101 that is connected to a vacuum pump and whose internal space can be decompressed. Below the interior of the vapor deposition chamber 101, the general chemical formulas [Chem. A vapor deposition material container 102 containing a vapor deposition material 201 such as an acrylic monomer represented by the formulas (1) to (4) is provided, and the above-mentioned light reflector is formed above the container 102 to be vapor-deposited. Substrate 200 (TFT array substrate 1
0) can be installed. The TFT array substrate 10 is arranged so that the side on which the light reflector 16a is formed faces the container 102 side.

The vapor deposition material 201 in the vapor deposition material container 102 is heated to evaporate (volatilize), the vaporized vapor deposition material 201 is guided to the upper side in the figure, and when passing through the ionization section 103, a part of the vapor deposition material 201 is ionized. To be done. An electric field is applied between the ionization section 103 and the deposition target substrate 200, and the ionized deposition material 201 is accelerated by the electric field and deposited on the deposition target substrate 200. In the ionization unit 103, the vapor deposition material 201
The vapor deposition material 201 can be ionized by applying a voltage to.

That is, the ion deposition method uses the deposition material 20.
1 is vaporized and then ionized, and the ionized vapor deposition material 201 is accelerated to be vapor-deposited on the vapor deposition target substrate 200. According to this method, the deposition target substrate 2 of the vapor deposition material 201 is controlled by controlling the ionization conditions in the ionization unit 103 and the acceleration conditions of the ionized vapor deposition material 201.
00 (specifically, a light reflector on the TFT array substrate 200)
Since it is possible to control the vapor deposition on the substrate, it is easier to control the vapor deposition conditions of the vapor deposition material 201 on the substrate 200 to be vapor-deposited as compared with other vapor deposition methods.

At this time, due to the surface migration effect of the vapor deposition material molecules that have reached the vapor deposition target substrate 200, the vapor deposition material molecules move on the substrate surface (the surface of the light reflector 16a) and inside the groove between the adjacent light reflectors 16a. It is vapor-deposited while orienting. In this process, the vapor deposition preferentially proceeds inside the groove rather than on the upper surface of the light reflector 16a, so that the groove between the adjacent light reflectors 16a is filled with the organic material as shown in FIG. 5C. Accordingly, it is possible to realize a structure in which the buried layer 16b is formed.

Here, as the vapor deposition material, the above [Chemical formula 8] to
The acrylic monomers represented by the general formulas (1) to (4) shown in [Chemical Formula 11] are used. After the acrylic monomer is evaporated, it is ionized and the ionized monomer is vapor-deposited. Since the ionized monomer has a high activity, the polymerization reaction of the deposited monomer spontaneously proceeds to polymerize, and is mainly composed of a polymer obtained by polymerizing the monomers represented by the above general formulas (1) to (4). Buried layer 16b is formed.

The acrylic monomers represented by the general formulas (1) to (3) shown in the above [Chemical formula 8] to [Chemical formula 10] are
It is a liquid crystalline monomer that exhibits a liquid crystal phase or does not lose its liquid crystal state when added to the liquid crystal phase. These liquid crystalline monomers are polymerized by vapor deposition while aligning along the shape of the light reflector 16a, so that the embedded layer 16b having a high alignment regulating force can be formed. Therefore, the intermolecular interaction between the organic polymer that constitutes the embedded layer 16b and the liquid crystal molecule can be further enhanced, and the structural birefringent body 16 having an excellent liquid crystal alignment control function can be formed.

The general formula (1) shown in the above [Chemical formula 8]
Specific examples of the compound represented by are compounds M1 to M25 (UV curable liquid crystal of Dainippon Ink and Chemicals, Inc.) shown in [Table 1] or [Table 2]. In addition, the general formula (2) shown in [Chemical Formula 9] above
Specific examples of the compound represented by are compounds M26 to M33 and M38 to M4 shown in [Table 3] or [Table 5].
5 etc. can be illustrated. Specific examples of the compound represented by the general formula (3) shown in [Chemical Formula 10] include:
Compounds M34 to M37 shown in [Table 4] or [Table 6],
M46-M51 etc. can be illustrated.

[0071]

[Table 1]

[0072]

[Table 2]

[0073]

[Table 3]

[0074]

[Table 4]

[0075]

[Table 5]

[0076]

[Table 6]

On the other hand, for the counter substrate 20, a substrate body 20A made of glass or the like is prepared and a light-shielding material is formed into a film.
After forming the second light-shielding film 23 by patterning, a transparent conductive material such as ITO is deposited on the entire surface of the substrate body 20A by a sputtering method or the like, and is patterned by using a photolithography method. The common electrode 31 is formed on almost the entire surface of 20A. Further, the structural birefringent body 22 is formed on the entire surface of the common electrode 31 by using the same method as described above, and the counter substrate 20 is completed.

Next, the TFT array substrate 10 and the counter substrate 20 manufactured as described above are connected to the structural birefringent bodies 16 and 2.
The two are opposed to each other via a sealing material (not shown), and liquid crystal is injected into the space between the substrates by a method such as a vacuum injection method to form a liquid crystal layer 50. In this way, the liquid crystal device of the present embodiment is completed.

In the liquid crystal device of this embodiment, TF
The structural birefringent bodies 16 and 22 formed on both the T array substrate 20 and the counter substrate 10 not only function as reflective polarizers, but also have a refractive index higher than that of the liquid crystal material between the adjacent light reflectors 16a and 22a. Buried layer 1 made of organic material with small size
By forming 6b and 22b, a higher extinction ratio than that of the conventional one can be obtained, so that it is possible to perform a sufficient polarizing function without the need for an external light-absorbing polarizer that has been conventionally used. can do. In addition, the buried layer 16b,
22b has an alignment regulating force for the liquid crystal molecules, and the structural birefringent bodies 16 and 22 also function as alignment films.
A conventional alignment film using polyimide or the like can be eliminated. As a result, a liquid crystal device having excellent durability can be obtained, the structure of the liquid crystal device can be simplified, and the number of parts can be reduced.

In this embodiment, the structural birefringent bodies 16 and 22 are provided on both the TFT array substrate 10 and the counter substrate 20.
However, the present invention is not limited to this,
By providing the above-described structural birefringent body on at least one of the substrates, it is possible to provide a liquid crystal device that is more durable than conventional ones. However, it goes without saying that a liquid crystal device having more excellent durability can be provided by making both substrates have the above-described configurations.

Further, in the present embodiment, only the active matrix type liquid crystal device using the TFT element has been described, but the present invention is not limited to this, and TF is used.
It is also applicable to an active matrix type liquid crystal device using a D (Thin-Film Diode) element, a passive matrix type liquid crystal device, and the like. Further, although only the transmissive liquid crystal device has been described in the present embodiment, the present invention is not limited to this, and can be applied to a reflective liquid crystal device or a transflective liquid crystal device. As described above, the present invention can be applied to a liquid crystal device having any structure.

Further, in the present embodiment, the buried layer 16b,
In the step of forming 22b, an ion deposition method is used, and since the above acrylic monomer is used as a deposition material to cause polymerization to proceed on the light reflectors 16a and 22a, a high level for forming the embedded layers 16b and 22b to be formed. Higher molecular weight is possible. The higher the molecular weight of a polymer, the higher the orientation, and the higher the molecular weight, the more stable it is to heat and light. Therefore, the ion deposition method using the above acrylic monomer as a vapor deposition material is recommended. By adopting it, it is possible to form the structural birefringent bodies 16 and 22 which are excellent in the alignment regulating force and excellent in stability against light and heat.

As a method of forming the buried layers 16b and 22b, for example, an organic polymer can be directly vapor-deposited in addition to the ion vapor deposition method of the acrylic monomer. In this case, vapor deposition becomes difficult when the molecular weight of the organic polymer becomes large, and therefore the molecular weight of the polymer used is preferably about several thousand, specifically about 2000 to 10,000. Examples of such organic polymers include polyolefins such as polystyrene and polyethylene, and fluoropolymers such as polytetrafluoroethylene (hereinafter abbreviated as PTFE). Fluorine-based polymers are particularly preferable because they have high crystallinity.

[Projection Display Device] Next, the configuration of the projection display device provided with the liquid crystal device of the above-mentioned embodiment as the light modulating means will be described with reference to FIG. FIG. 7 is a schematic configuration diagram showing a main part of a projection type display device using the liquid crystal device of the above embodiment as a liquid crystal light valve (light modulation means). In FIG. 7, reference numeral 810 is a light source, 813,
814 is a dichroic mirror, 815, 816, 81
7 is a reflection mirror, 818 is an entrance lens, 819 is a relay lens, 820 is an exit lens, and 822, 823 and 824.
Is a liquid crystal light valve, 825 is a cross dichroic prism, and 826 is a projection lens.

The light source 810 is a lamp 8 such as a metal halide.
11 and a reflector 812 that reflects the light of the lamp. Dichroic mirror 813 that reflects blue light and green light
Transmits the red light of the light flux from the light source 810 and reflects the blue light and the green light. The transmitted red light is reflected by the reflection mirror 817 and is incident on the red light liquid crystal light valve 822 equipped with the liquid crystal device of the above embodiment. On the other hand, of the color light reflected by the dichroic mirror 813, green light is reflected by the green light reflecting dichroic mirror 814 and enters the liquid crystal light valve for green light 823 including the liquid crystal device of the above-described embodiment.
The blue light also passes through the second dichroic mirror 814. For blue light, a light guide unit 821 including a relay lens system including an entrance lens 818, a relay lens 819, and an exit lens 820 is provided in order to compensate for the difference in optical path length between green light and red light. Blue light is incident on the blue light liquid crystal light valve 824 provided with the liquid crystal device of the above embodiment. Further, polarizing plates 832a, 832b, 833a, 833b, are provided on the incident side and the emitting side of the liquid crystal light valves 822, 823, 824 for each color light.
834a and 834b are provided, respectively.

The three color lights modulated by the respective liquid crystal light valves enter the cross dichroic prism 825. This prism is formed by laminating four right-angled prisms, and a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are formed in a cross shape on the inner surface thereof. Three color lights are combined by these dielectric multilayer films to form light representing a color image. The combined light is projected onto a screen 82 by a projection lens 826 which is a projection optical system.
7, and the image is enlarged and displayed.

Since the projection type display device having the above-mentioned structure is provided with the liquid crystal device of the above-mentioned embodiment, the projection type display device has excellent durability and high reliability even when a light source which emits high intensity light is used. A type display device can be realized.

[0088]

EXAMPLES The present inventor actually produced a prototype of the structural birefringent body of the present invention and verified the effect of improving the reliability (durability) of liquid crystal alignment. The results will be reported below. The following four types of liquid crystal cells were prototyped.

(Liquid Crystal Cell of Prior Art Example 1) A glass substrate having a plurality of light reflectors made of aluminum having the width, pitch, and film thickness illustrated in the above embodiment formed in a stripe pattern is coated with polyimide dissolved in a solvent. It was applied by spin coating and the solvent was volatilized by prebaking at 80 ° C. for 10 minutes. Then, the polyimide film is baked at 180 ° C. for 1 hour to form a polyimide film having a thickness of about 50 nm (preferably 10 to 1).
00 nm, more preferably 30 to 60 nm) to be applied, and rubbing treatment (rubbing density: 45
0) was performed. The two substrates with an alignment film thus produced were bonded to each other with a cell gap of 5 μm with the alignment directions of the upper and lower substrates shifted by 90 °, and a fluorine-based liquid crystal was injected between them to seal the substrates.

(Liquid Crystal Cell of Conventional Example 2) Two glass substrates, each having a plurality of light reflectors made of aluminum having the width, pitch, and film thickness illustrated in the above embodiment, formed in a stripe shape, are formed in the stripe direction. Were shifted by 90 ° and bonded with a cell gap of 5 μm, and a fluorine-based liquid crystal was injected between them to seal.

(Liquid Crystal Cell of Example 1) A glass substrate on which a plurality of light reflectors made of aluminum having the width, pitch, and film thickness illustrated in the above-mentioned embodiment are formed in a stripe shape, has a molecular weight of 2000 to 10000 and PTFE. (Refractive index:
1.38) was evaporated until the groove between adjacent light reflectors was filled. The two substrates with structural birefringent bodies produced in this manner were bonded together with the cell gap of 5 μm with the stripe direction shifted by 90 °, and a fluorine-based liquid crystal was injected between them to seal them.

(Liquid Crystal Cell of Example 2) A UV curable liquid crystal (trade name) is formed on a glass substrate on which a plurality of light reflectors made of aluminum having the width, pitch, and film thickness illustrated in the above embodiment are formed in a stripe shape. Liquid crystal monoacrylate manufactured by Dainippon Ink and Chemicals, Inc. was deposited by an ion deposition method until the grooves between adjacent light reflectors were filled. In this method, an acrylate monomer is polymerized at the time of vapor deposition and is vapor-deposited on the substrate as an acrylate polymer. The two substrates with structural birefringent bodies produced in this manner were bonded together with the cell gap of 5 μm with the stripe direction shifted by 90 °, and a fluorine-based liquid crystal was injected between them to seal them.

In the above four types of liquid crystal cells, the extinction ratio of the structural birefringent body as a polarizer and the reliability of liquid crystal alignment (time until alignment failure occurs when light of constant intensity is irradiated) are determined. It was measured. As a result, the extinction ratio of the liquid crystal cell of Conventional Example 1 was 1:20, whereas the extinction ratio of the liquid crystal cell of Example 1 was improved to 1:40. The reliability is twice as high as that of Conventional Example 1. Further, the extinction ratio of the liquid crystal cell of Conventional Example 1 was 1:20, whereas the extinction ratio of the liquid crystal cell of Example 2 was improved to 1:30. The reliability was improved to 1.5 times that of Conventional Example 1. Further, while the extinction ratio of the liquid crystal cell of Conventional Example 2 was 1:20, the extinction ratio of the liquid crystal cell of Example 1 was 1:40, and the extinction ratio of the liquid crystal cell of Example 2 was 1:30. Improved. As described above, by adopting the configuration of the present invention in which the groove between the adjacent light reflectors is filled with the organic material having a small refractive index, a liquid crystal device having a high extinction ratio (that is, a high polarization function) and a high reliability is obtained. It was confirmed that

[0094]

As described above in detail, according to the present invention, a buried layer in which an organic material having a smaller refractive index than a liquid crystal material is buried between the light reflectors constituting the structural birefringent body. Since the extinction ratio higher than that of the conventional one is obtained by providing the light, the light absorbed by the externally attached polarizer on the emission side is reduced, and the life of the externally attached polarizer can be extended. Further, since the organic material has an alignment regulating force for liquid crystal molecules and the structural birefringent body also functions as an alignment film, the conventional alignment film using polyimide or the like can be eliminated. As a result, a liquid crystal device having excellent durability can be obtained.

[Brief description of drawings]

FIG. 1 is an equivalent circuit diagram of a plurality of pixels arranged in a matrix which form an image display region of a liquid crystal device according to an embodiment of the present invention.

FIG. 2 is a plan view showing a structure of a plurality of pixels adjacent to each other on a TFT array substrate of the liquid crystal device.

FIG. 3 is a sectional view showing the structure of the liquid crystal device,
It is sectional drawing which follows the AA 'line of FIG.

FIG. 4 is a perspective view showing the structural birefringent body of the liquid crystal device in the same manner.

FIG. 5 is a process sectional view for explaining the manufacturing method for the liquid crystal device.

FIG. 6 is a schematic configuration diagram of an ion deposition apparatus used in the same manufacturing process of a liquid crystal device.

FIG. 7 is a schematic configuration diagram of a projection display device according to an embodiment of the present invention.

FIG. 8 is a view for explaining the action of the structural birefringent body.

[Explanation of symbols]

10 TFT array substrate 20 Counter substrate 10A, 20A Substrate body 1a Semiconductor layer 11a First light-shielding film 23 Second light-shielding film 12 First interlayer insulating film 4 Second interlayer insulating film 7 Third interlayer insulating film 30 Pixel switching TFT element ( Transistor element) 9 Pixel electrode 31 Common electrodes 16 and 22 Structural birefringence bodies 16a and 22a Light reflectors 16b and 22b Embedded layer 6a Data line 3a Scan line 50 Liquid crystal layer

─────────────────────────────────────────────────── ─── Continued Front Page (51) Int.Cl. ⁷ Identification Code FI Theme Coat (Reference) G02F 1/1335 510 G02F 1/1335 510 4J100 520 520 1/1368 1/1368 G03B 21/00 G03B 21/00 EF term (reference) 2H049 BA02 BA24 BA43 BC02 BC05 BC09 BC22 2H088 EA14 EA15 GA02 HA03 HA13 HA18 HA24 HA28 JA05 KA05 KA30 MA06 MA20 2H090 HA15 HB15 HC19 KA05 LA09 2H091 FA07 GA14 KA02 HA04 GA06 FC10 FC02 FC18 FC02 FC18 FC02 FC18 FC02 FC18 FC02 FC18 FC02 FC18 FC02 FC18 NA25 PA02 PA11 QA07 RA05 4J100 AL08P AL46P AT08P BA20P BA40P BB01P BB07P BC04P BC43P BC44P BC74P CA01 DA66 JA39

Claims (12)

[Claims] 1. A substrate for a liquid crystal device, which is used for a liquid crystal device in which a liquid crystal layer is sandwiched between a pair of substrates arranged to face each other, and which constitutes one of the pair of substrates. Adjacent to a plurality of light reflectors arranged in stripes at a pitch smaller than the wavelength of light incident on the layer
Embedded between the two light reflectors, having an index of refraction smaller than that of the liquid crystal material forming the liquid crystal layer, and being itself made of an organic material capable of exerting an alignment regulating force on liquid crystal molecules of the liquid crystal layer. A substrate for a liquid crystal device, comprising a structural birefringent body having a layer. 2. The organic material is mainly composed of a crystalline fluorine-containing polymer.
A substrate for a liquid crystal device according to item 1. 3. The substrate for a liquid crystal device according to claim 1, wherein the organic material is mainly composed of polyolefin. 4. The substrate for a liquid crystal device according to claim 1, wherein the organic material is mainly composed of a liquid crystal monomer-derived polymer obtained by polymerizing a liquid crystal monomer. 5. The liquid crystalline monomer is mainly composed of one or more compounds represented by any one of the following general formulas (1), (2) and (3). The substrate for a liquid crystal device according to claim 4. [Chemical 1] [Chemical 2] [Chemical 3] 6. The substrate for a liquid crystal device according to claim 1, wherein the organic material is mainly composed of polyalkyl acrylate or polyalkyl methacrylate. 7. The method for manufacturing a substrate for a liquid crystal device according to claim 1, wherein a plurality of light reflectors arranged in stripes at a pitch smaller than a wavelength of light incident on the liquid crystal layer is provided on the substrate. And a step of forming an organic material having a refractive index smaller than that of the liquid crystal material forming the liquid crystal layer and capable of exerting an alignment regulating force on the liquid crystal molecules of the liquid crystal layer. And a step of forming an embedding layer in which the space between two light reflectors is embedded with the organic material. 8. The method for manufacturing a substrate for a liquid crystal device according to claim 7, wherein an ion deposition method is used when depositing the organic material. 9. The liquid crystal device substrate according to claim 1 is used as a first substrate, and a surface of the first substrate on which the structural birefringence body is formed is a second substrate. The liquid crystal device, wherein the first substrate and the second substrate are arranged so as to face toward the substrate side, and a liquid crystal layer is sandwiched between these substrates. 10. The liquid crystal device substrate according to claim 1 is used on the second substrate side as well.
10. The liquid crystal according to claim 9, wherein the second substrate is arranged such that a surface of the second substrate on which the structural birefringence body is formed faces the first substrate side. apparatus. 11. A liquid crystal device in which a liquid crystal layer is sandwiched between a pair of substrates which are arranged opposite to each other, and which is provided with a structural birefringent body which functions as a polarizer and also as an alignment film. Liquid crystal device. 12. A light source, a light modulating means comprising the liquid crystal device according to any one of claims 9 to 11 for modulating light from the light source, and light projected by the light modulating means. A projection-type display device comprising: a projection unit.