JP2003202290A - Analyzing device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an analyzer and an analyzing method capable of easily performing the quantitative analysis of a harmful substance with high sensitivity. <P>SOLUTION: The laser beam 101a from a laser oscillator 14 is collected to a linear laser beam 101b by a cylindrical convex lens 18 and applied to a sample A, whereby the energy is given to an inorganic harmful substance (mercury and the like) included in contaminated soil to atomize the harmful substance from a ground state to an excitation state. On the other hand, the light 102a of a predetermined wavelength (253.7 nm) from a mercury lamp 19 is applied toward the sample A to allow the atomized mercury atom to absorb a great deal (content) of the light, and the remaining light 102c passing through without being absorbed is collected to determined the quantity of mercury in the sample A in accordance with the magnitude of the light 102c. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an analysis apparatus and method for analyzing the amount of an object contained in an object to be inspected, such as lead, mercury, cadmium contained in soil or groundwater, It is suitable for quantitative analysis of inorganic harmful substances such as heavy metals such as chromium.

[0002]

2. Description of the Related Art For example, when analyzing the amount of inorganic harmful substances such as heavy metals such as lead, mercury, cadmium and chromium in polluted soil, conventionally, the soil is put in an acidic aqueous solution. After extracting the inorganic harmful substances contained in the acid solution and subjecting the acid solution from which the soil has been removed to various treatments (removal of interfering substances, etc.), analyze this acid solution by optical emission spectroscopy etc. The amount of inorganic harmful substances was analyzed.

[0003]

When the inorganic harmful substances in the contaminated soil are analyzed by the above-mentioned method, it takes a long time (about 2 days) for the pretreatment including the extraction work,
Not only does it take a long time to obtain the analysis result, but a large amount of analysis waste liquid is generated (50 to 100 times per time).
Therefore, there was a difficulty in the subsequent treatment. In addition, it is difficult to analyze inorganic harmful substances with high precision by the conventional emission spectroscopy, and work efficiency is not good.

The present invention solves such a problem, and an object of the present invention is to provide an analyzer and a method capable of easily carrying out quantitative analysis of harmful substances with high sensitivity.

[0005]

According to another aspect of the present invention, there is provided an analyzer as set forth in claim 1, wherein a laser beam oscillating means for oscillating a laser beam having a predetermined wavelength and a laser beam oscillating means for transmitting the laser beam. Laser condensing means for converging the laser light linearly and irradiating the object to be inspected, and the linear light emitting portion of the object to be inspected irradiated with the condensed laser light corresponds to the object to be analyzed. Analyzing light irradiating means for irradiating the light of the wavelength of the specified wavelength in the axial direction, and first object amount detecting means for obtaining the amount of the analyzing object in the inspected object based on the intensity of the analyzing light having passed through the light emitting section. It is characterized by having.

In the analyzer of the second aspect of the present invention, the analysis light irradiating means has an irradiation lamp for irradiating the elemental light having a predetermined wavelength, and the first object amount detecting means has the analysis light passing through the light emitting portion. It is characterized in that it has a lighting means for taking in light, and that the irradiation lamp and the lighting means are arranged at positions facing each other with respect to the inspection object.

According to another aspect of the analyzer of the present invention, laser light oscillating means for oscillating laser light selected from a plurality of wavelengths and laser light emitted from the laser light oscillating means are linearly condensed. A laser condensing means for irradiating the object to be inspected, and a method for obtaining the amount of the object to be analyzed in the object to be inspected based on the intensity of a linear light emitting part in the object to be inspected irradiated with the condensed laser beam. It is characterized in that it comprises two object amount detecting means.

In the analyzer of the fourth aspect of the invention, a plurality of daylighting means are arranged in parallel along the linear light emitting portion of the object to be inspected.

In the analyzer of the fifth aspect of the present invention, the second
The object amount detecting means is characterized by having position information taking-in means for taking in positional information in the linear light emitting portion.

In the analyzer of the sixth aspect of the present invention, the laser condensing means is a cylindrical convex lens.

In the analyzer of the seventh aspect of the present invention, the laser condensing means has a concave lens, a convex lens, and a cylindrical convex lens.

In the analyzer of the invention of claim 8, the first and second object amount detecting means are capable of detecting the amount of the inorganic harmful substance as the object to be analyzed.

In the analysis method of the ninth aspect of the present invention, laser light having a predetermined wavelength is oscillated, the emitted laser light is linearly condensed and irradiated onto an object to be inspected. While irradiating the linear light emitting portion of the irradiated inspection object with light having a wavelength corresponding to the analysis target in the axial direction, the analysis light that has passed through the light emitting portion is collected and the intensity of this light is increased. It is characterized in that the amount of the analysis object in the inspection object is obtained based on the above.

In the analysis method of the tenth aspect of the invention, in the light emitting section, the elements constituting the analyte are atomized by obtaining energy from the laser beam, and each atom changes from the ground state to the excited state. When passing through the process of returning to the atom in the ground state again, the atom in the ground state absorbs a corresponding amount of analytical light, and the amount of the analyte is determined based on the remaining analytical light. .

The analysis method of the invention of claim 11 is characterized in that the analysis method of claim 9 is applied to an element having a large emission energy or a low excitation probability.

In the analysis method of the twelfth aspect of the present invention, laser light selected from a plurality of wavelengths is oscillated, the emitted laser light is linearly condensed, and the object to be inspected is irradiated with the condensed light. It is characterized in that light is collected along a linear light emitting part of the inspection object irradiated with the laser light, and the amount of the analysis object in the inspection object is obtained based on the intensity of this light.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a schematic configuration of an analyzer according to a first embodiment of the present invention, FIG. 2 is a schematic description of a laser atomic absorption method, FIG. 3 is a schematic description of an irradiation method of a focused laser with a cylindrical convex lens, and FIG. FIG. 4 shows a IV-IV cross section of FIG. 3, and FIG. 5 shows a graph showing the density of elements that are plasmatized and atomized by laser light irradiation.

Laser-Induced Breakdown Spectroscopy (LIBS) which is generally applied
The method is based on the intensity of light emitted when the element corresponding to the heavy metal-based harmful substance obtains energy when the soil is irradiated with laser light, returns from the ground state to the excited state, and then returns to the ground state again. The content is analyzed. However, among heavy metal-based harmful substances, there are elements such as mercury, arsenic, and selenium that require a large amount of energy to emit light, and elements that have a low probability of being excited from the ground state. Insufficient sensitivity.

However, with respect to some heavy metal type harmful substances (mercury, arsenic, selenium, etc.) which are difficult to be changed from the ground state to the excited state by irradiation with laser light, these substances are actually atomized. That is, when the soil is irradiated with the pulsed laser, the heavy metal substance obtains energy to change from the ground state to the excited state, and returns to the ground state again, and emits light at this time. As shown in FIG. 5, this emission state can be represented by the atomic density of the plasma state, and the emission is extinguished early. On the other hand, since the element is atomized for a long time even if the light emission disappears, the atomized element can be detected as the atomic density of the ground state.

As described above, the applicant, by irradiating the soil with laser light, detects not the emission intensity but the atomic density of the ground state when the element of the heavy metal type harmful substance is changed from the ground state to the excited state. As a result, even with elements such as mercury, arsenic, and selenium that require a large amount of energy to emit light, or elements that have a low probability of becoming excited from the ground state, quantitative analysis can be performed with high sensitivity. I discovered that I can do it.

Therefore, when the applicant irradiates the soil with a laser beam, the ground state element obtains energy from the laser beam to be in an excited state and is atomized in the irradiated portion. When irradiated with light having a wavelength corresponding to, the atomized analyte absorbs a corresponding amount of analysis light, and the remaining analysis light that has passed through this light emitting portion is collected, and the intensity of this light is changed. Based on this, it was decided to determine the content of heavy metal-based harmful substances.

Atomic Absorptio (Atomic Absorptio) is used as a quantification of the intensity of light passing through and the absorption of the light.
n Spectrometry (AAS) method, which is for heating heavy metal harmful substances in a flame by a burner to atomize them and to atomize refractory elements such as titanium, tungsten, and zirconia. I can't.

The analyzing apparatus and the analyzing method will be described in detail below. In the analyzer of the first embodiment, as shown in FIG. 1 to FIG. 4, the object to be inspected is a sample A formed by putting contaminated soil in a press die or the like and compacting it, and on the analysis table 11. The analysis table 11 is movably supported by a guide rail 12 and reciprocally movable by a drive device 13.

The laser oscillator (laser light oscillation means) 14 is a laser light 101a having a predetermined wavelength (for example, 1064 nm).
Laser light 101a of this wavelength.
Is condensed by a laser condensing system (laser condensing means) 15 and can be irradiated toward the sample A as a linear laser beam 101b. The laser focusing system 15 includes a concave lens 16 arranged on the optical axis of the laser beam 101a, a convex (focusing) lens 17, and a cylindrical convex lens (cylindrical convex lens) 1
8 and. The concave lens 16 pre-expands the beam diameter of the laser light 101a so that the laser light 101a has a sufficient beam diameter even if the laser light 101a passes through the downstream convex lens 17. Further, the cylindrical convex lens 18 has a semi-cylindrical shape obtained by dividing a cylinder into two, and focuses a laser beam 101a having a predetermined beam diameter in only one radial direction to collect it as a linear laser beam 101b.

For example, a mercury lamp 19 is provided on one side of the sample A. The mercury lamp 19 can oscillate a light 102a having a predetermined wavelength (253.7 nm), and the light 102a is emitted. It is possible to irradiate the sample A as the light 102b after being condensed by the first condensing lens 20. In this case, the mercury lamp 19 and the first condensing lens 20 constitute an analysis light irradiation unit that irradiates the light emitting portion of the sample A with the laser light to emit light having a wavelength corresponding to the analyte (mercury). It

On the other side of the sample A, a second condensing lens 21 and a light collecting lens (light collecting means) 22 are provided, which are oscillated by the mercury lamp 19 and condensed by the first condensing lens 20. The light 102c that has passed through the light emitting portion of the sample A can be collected by the second condenser lens 21 and collected by the collecting lens 22. The mercury lamp 19 and the daylighting lens 22 are arranged at positions facing the sample A. An optical fiber 23 for guiding the collected light 102c is connected to the light collecting lens 22, and the light 102c is connected to the optical fiber 23.
Wavelength separator 2 that transmits only the target wavelength range from
4, a photomultiplier tube (Photo-Mu) which has a gate function of receiving the light passing through the wavelength demultiplexer 24 for a predetermined time and converting the intensity of the light into an electric signal.
lti Tube: PMT) 25 is connected.

The PMT 25 is connected to an integrator 26 which integrates the magnitude of the light 102c for each time based on the electric signal converted into the light intensity.
A control unit 27 is connected to the control unit 27, and the control unit 27 can determine the amount of the inorganic harmful substance in the sample A based on the integrated signal.

The wavelength separator 24 allows only the light 102c of the mercury lamp 22 (the wavelength region of 253.7 nm due to mercury as an example of an inorganic harmful substance) that has passed through the light emitting portion of the sample A to pass therethrough, and the PMT 25 controls it. Based on the signal from the section 27, the laser oscillator 14 oscillates the laser light 101a, and the gate operates so as to receive the light 102a from the mercury lamp 19 for a predetermined time. Convert to electrical signal. In addition, the integrator 26 uses the PMT2
Based on the signal from 5, the intensity of the light 102c is integrated for each time to obtain the total intensity. On the other hand, the control unit 27
Calculates the amount of the inorganic harmful substance in the sample A based on the signal from the integrator 26.

The control unit 27 also uses the analysis table 1
Drive control of a driving device 13 that moves 1; laser oscillator 1
It is possible to control the oscillation operation of the laser light 101a of No. 4 (oscillation start, pulse width, etc.), the gate operation of the PMT 25 (opening timing, opening time, etc.), and the like.

Here, a method of analyzing harmful substances in contaminated soil using the above-described analyzer of this embodiment will be described. Here, a method for analyzing the amount of mercury contained in the contaminated soil using the laser atomic absorption method will be described.

First, the contaminated soil to be analyzed is put into a mold of a press and pressed to form a pellet-shaped sample A, which is placed on an analysis table. Control unit 27
Laser light 10 from the laser oscillator 14 based on the signal from
When 1a is oscillated in a pulse shape, the laser light 101a is condensed on the concave lens 16, the condensing lens 17, and the cylindrical convex lens 18 in the laser condensing system 15, and is irradiated onto the sample A as the linear laser light 101b. Further, based on a signal from the control unit 27, the mercury lamp 19 outputs a predetermined wavelength (2
When the light 102a of 53.7 nm) is oscillated, the light 102a is condensed by the first condensing lens 20 and becomes the light 102b as the sample A.
It is irradiated toward.

On the surface irradiated with the laser beam in the sample A, the inorganic harmful substance (mercury etc.) contained in the contaminated soil is irradiated with the laser beam 101a to obtain energy from the laser beam to be excited from the ground state and atomized. Things also occur,
When it returns to the ground state again, some emit light and are atomized. The light of the mercury lamp 22
When 102a is irradiated in the axial direction of the linear laser beam 101b,
Among the atomized heavy metal-based harmful substances, the contained mercury atoms absorb the light 102a having the same wavelength by a corresponding amount (content). Then, the remaining light 102c that is not absorbed by the light emitting portion and passes therethrough enters the second condenser lens 21, the light collection lens 22, and the optical fiber 23, respectively.

Then, the light 10 entering the optical fiber 23
2c is a component (253.7 nm) in the wavelength region due to the inorganic harmful substance (mercury) in the sample A by the wavelength separator 24.
Only pass. Then, the PMT 25 operates based on the signal from the control unit 27 so that the gate operates so as to receive the light 102c in the region corresponding to the mercury extracted by the wavelength separator 24 for a predetermined time, and the magnitude of the light 102c is electrically changed. It is converted into a signal and transmitted to the integrator 26. Based on the signal from the PMT 25, the integrator 26 integrates the size of the light 102c for each time to obtain the total intensity thereof, and then transmits the result to the control unit 27. The controller 27 determines the amount of mercury in the sample A based on the signal from the integrator 26. That is, the size of the light 102a oscillated from the mercury lamp 19 (electrical signal) is compared with the size of the light 102c (electrical signal) collected through the light emitting portion, and the difference between the two causes The amount of mercury in can be determined.

As described above, in the analyzing apparatus and method of the present embodiment, the laser light 101a from the laser oscillator 14 is converted into the linear laser light 101b by the cylindrical convex lens 18.
By concentrating on and irradiating the sample A, energy is given to the inorganic harmful substance (mercury etc.) contained in the contaminated soil to be excited from the ground state and atomized, while the mercury lamp 19
By irradiating the sample A with light 102a having a predetermined wavelength (253.7 nm), the atomized mercury atom absorbs a considerable amount (content) of light, and the rest of the light passes through without being absorbed. The light 102c is sampled and the amount of mercury in the sample A is determined according to the magnitude of the light 102c.

Therefore, it is possible to easily quantitatively analyze, among the inorganic harmful substances, the elements that require a large amount of energy to emit light and the elements (mercury, arsenic, selenium, etc.) having a low probability of being excited from the ground state. It can be performed with high sensitivity. In this case, the linear laser light 10 at this light emitting portion
The light 102a of the mercury lamp 22 is irradiated to 1b in the axial direction, and the light 102a of the mercury lamp 22 passes through the thick light emitting portion of the layer, and the atom of mercury atomized from the sample A is The light 102a having the same wavelength can be appropriately absorbed by a corresponding amount (content), and high detection accuracy can be secured.

In the above-described embodiment, the mercury lamp 22 is provided as the analysis light irradiating means to perform the analysis. However, not limited to this mercury lamp 22, arsenic or selenium can be used as a wavelength corresponding to the element. The content in these soils can be detected by using an irradiation lamp. In addition, the soil was compacted to form a sample A, and the sample A was analyzed. However, by making the device itself portable, the soil was directly irradiated with laser light for analysis. You may go.

Further, in the above embodiment, the wavelength demultiplexer 2 is used.
Although No. 4 was used, a spectroscope can be used instead of this. Furthermore, although the PMT 25 and the integrator 26 are used, an ICCD can be used instead of this. Also,
Examples of the wavelength of the laser light 101a include 1064 nm (when using a YAG laser) and 1047 nm (when using a YLF laser).

FIG. 6 is a schematic configuration of the analyzer according to the second embodiment of the present invention, FIG. 7 is a schematic description of the laser emission spectroscopy, FIG. 8 is a graph showing the detection result in the radial direction of the sample, and FIG.
FIG. 10 shows a schematic configuration of the analyzer according to the third embodiment of the present invention, FIG. 10 shows a schematic explanation of the laser emission spectroscopy, and FIG. 11 shows a graph showing the detection result in the radial direction of the sample. It should be noted that members having the same functions as those described in the above-described embodiment are designated by the same reference numerals, and redundant description will be omitted.

In the above-described first embodiment, the analysis apparatus and method of the present invention is a laser atomic absorption method, whereby an element or ground state that requires a large amount of energy to emit light in a heavy metal-based harmful substance. Although the quantitative analysis of mercury, arsenic, selenium, etc., which are elements having a low probability of becoming an excited state, is applied to the second embodiment, a laser induced optical emission analysis method suitable for quantitative analysis of other elements is applied. is doing.

The analyzing apparatus and the analyzing method will be described in detail below. In the analyzer of the second embodiment, as shown in FIGS. 6 and 7, the laser oscillator 14 can oscillate the laser light 101a of a predetermined wavelength (for example, 1064 nm) in a pulsed manner, and the laser light 101a of this wavelength. Laser focusing system 1
It is possible to irradiate the sample A onto the sample A as a linear laser beam 101b by condensing the beam. This laser focusing system 15
Is a concave lens 16 arranged on the optical axis of the laser beam 101a.
And a convex (condensing) lens 17 and a cylindrical convex lens 18.

A plurality of lighting lenses 31 are provided on the side of the sample A.
a, 31b, 31c ... And optical fibers 32a, 32
b, 32c ... Are arranged in parallel. This each lighting lens 3
1a, 31b, 31c ... And optical fibers 32a, 32
.. are arranged in parallel along the linear laser beam 101b with which the sample A is irradiated, and emit light 103 from the sample A by the irradiation of the laser beam 101b.
It can be illuminated by 1b, 31c. Each of the light collecting lenses 31a, 31b, 31c, ... Has an optical fiber 32a, 32b for guiding the collected light 103,
32c ... are connected to each optical fiber 32a, 3
2b, 32c, ... Wavelength separators 33a, 33b, 33c ..
Are connected, and these wavelength demultiplexers 33a, 33
The photomultiplier tubes (Photo-Multi Tube: PMT) 34a, 3 which have a gate function of receiving the light passing through b, 33c, ... For a predetermined time and convert the intensity of the light into an electric signal.
45, 34c ... Are connected.

Then, the PMTs 34a, 34b, 34
c ... Are integrators 35a, 3a for integrating the magnitude of each light on the basis of the electric signal converted into the light intensity.
.. are connected to the integrators 35a, 35c.
A control unit 36 is connected to b, 35c ..., And this control unit 37 can determine the amount of the inorganic harmful substance in the sample A based on the integrated signal.

The control unit 36 also controls the analysis table 1
Drive control of a driving device 13 that moves 1; laser oscillator 1
It is possible to control the oscillation operation of the laser beam 101a of No. 4 (oscillation start, pulse width, etc.), the gate operation of the PMTs 34a, 34, 34c ,.

Now, a method of analyzing harmful substances in contaminated soil using the above-described analyzer of this embodiment will be described. Based on a signal from the control unit 27, the laser oscillator 1
When the laser light 101a is oscillated in a pulse form from 4, the laser light 101a is condensed by the concave lens 16, the condenser lens 17, and the cylindrical convex lens 18 in the laser condensing system 15, and irradiated on the sample A as the linear laser light 101b. To be done.
Then, on the laser light irradiation surface of the sample A, the inorganic harmful substance contained in the contaminated soil by the irradiation of the laser light 101b obtains energy from the laser light to change from the ground state to the excited state, and emits light when returning to the ground state again. . Then, the light 103 emitted from the sample A is reflected by the respective light collecting lenses 31a, 31
b, 31c ..., Optical fibers 32a, 32b, 32c.
・ Light enters each.

The optical fibers 32a, 32b, 32
The light 103 entering the inside of c ...
b, 33c ... Passes only the component (200 to 800 nm) in the wavelength region due to the inorganic harmful substance in the sample A. The PMTs 34a, 34b, 34c ...
The wavelength demultiplexers 33a, 33b, 3 based on the signal from 6
Of the light 103 in the predetermined wavelength range extracted by 3c ...
When the laser beam 101a is oscillated from the laser oscillator 14 (t
From 0) to the light emission life (about 5 ms) of the light 103 from the inorganic harmful substance, the gate operates to convert the magnitude of only the light 103 at this time into an electric signal. It is transmitted to the integrators 35a, 35b, 35c ... The integrators 35a, 35b, 35c ... Are PMTs 34a, 34.
Based on the signals from b, 34c, ..., The magnitude of the light 103 is integrated every time to obtain the total intensity, and the result is transmitted to the control unit 36. The control unit 36 uses the integrator 3
Based on the signals from 5a, 35b, 35c ..., The amount of the inorganic harmful substance in the sample A is obtained.

At this time, if the water content in the sample A is large, the emission intensity from the inorganic harmful substance in the sample A is remarkably reduced, and the amount of the inorganic harmful substance in the sample A can be accurately determined. Although it disappears, by heating the surface of the sample A, the surface irradiated with the laser beam 101a is dried, and the emission intensity due to the inorganic harmful substance is increased so as to show a certain size. Here, when the emission intensity due to the inorganic harmful substance maintains a constant magnitude for the predetermined time t, the control unit 36 determines that the sample A is dried, and based on the emission intensity at that time, Then, the amount of the inorganic harmful substance in the sample A is obtained. That is, at least the laser light 10 of the sample A is
By drying the irradiated surface of 1a, it is possible to accurately and quantitatively analyze the inorganic harmful substance in the sample A without depending on the amount of water in the sampled soil.

As described above, according to the analyzing apparatus and method of this embodiment, the laser light 101a from the laser oscillator 14 is converted into the linear laser light 101b by the cylindrical convex lens 18.
On the other hand, the sample A is focused and irradiated on the sample A, and a plurality of light collecting lenses 31a, 31 are arranged in parallel along the linear laser beam 101b.
By collecting the light with b, 31c ..., The amount of the inorganic harmful substance contained is determined based on the emission intensity.

Therefore, among the inorganic harmful substances, quantitative analysis can be easily carried out for elements other than those which require a large amount of energy to emit light and which have a low probability of being excited from the ground state (mercury, arsenic, selenium, etc.). It can be performed with high sensitivity. In this case, the linear laser light in this light emitting part
The emission intensity is collected along 101b, and as shown in FIG. 8, continuous detection is possible along the radial direction of the sample A, and high detection accuracy in a wide range can be secured. Further, by moving the analysis table 11 by a predetermined amount and performing the analysis a plurality of times, the analysis can be performed over the entire surface of the sample A.

In the analyzer of the third embodiment, as shown in FIGS. 9 and 10, a mirror 41 is arranged on the side of the sample A, and a spectroscope 42 for collecting the reflected light 103 by this mirror 41. And ICCD camera (position information capturing means) 4
3, the control unit 44 is connected.

Therefore, when the laser light 101a is oscillated in a pulse form from the laser oscillator 14 based on the signal from the control unit 44, the laser light 101a is generated by the concave lens 16, the condenser lens 17, and the cylindrical convex lens 18 in the laser condenser system 15. And is irradiated onto the sample A as a linear laser beam 101b. Then, on the laser light irradiation surface of the sample A, the inorganic harmful substance contained in the contaminated soil by the irradiation of the laser light 101b obtains energy from the laser light to change from the ground state to the excited state, and emits light when returning to the ground state again. . Then, the light 103 emitted from the sample A is reflected by the mirror 41.
The light is incident on the spectroscope 42 which is reflected by.

Then, the incident light 103 is split into light of each element by the spectroscope 86 and the magnitude of the light is converted into an electric signal, and at the same time, the ICCD camera 43 outputs the detected position information. After being detected, the control unit 44 determines the amount of the inorganic harmful substance in the sample A based on these signals. That is, as shown in FIG. 8, continuous detection is possible along the radial direction of the sample A, and high detection accuracy in a wide range can be secured.

In each of the above-mentioned embodiments, the case where the present invention is applied to the analysis of heavy metal-based harmful substances such as lead, mercury, cadmium and chromium in soil has been described, but the present invention is not limited to this. It can also be applied to the analysis of inorganic substances such as metal oxide films attached to the surface of plant structural materials such as nuclear power plants.

[0054]

As described above in detail in the embodiments, according to the analyzer of the invention of claim 1, the laser light oscillating means for oscillating the laser light of the predetermined wavelength and the laser light oscillating means emit the laser light. Laser condensing means for converging the laser light linearly and irradiating the object to be inspected, and the wavelength corresponding to the object to be analyzed with respect to the linear light emitting part of the object inspected irradiated with the condensed laser light. Since the analysis light irradiating means for irradiating the light in the axial direction and the first object amount detecting means for determining the amount of the analysis object in the inspection object based on the intensity of the analysis light passing through the light emitting portion are provided, When the soil is irradiated with laser light, the ground state element obtains energy from the laser light to be excited and atomized, so that the linear light emitting part is irradiated with light having a wavelength corresponding to the inorganic harmful substance. This atomized analysis by The elephant will surely absorb the corresponding amount of analysis light, and the remaining analysis light that has passed through this light emitting part can be collected, and the content of the inorganic harmful substance can be determined based on the intensity of this light. The quantitative analysis of harmful substances can be easily performed with high sensitivity.

According to the analyzer of the second aspect of the present invention, the analyzing light irradiating means is an irradiation lamp for irradiating the elemental light having a predetermined wavelength, and the object amount detecting means is a collecting lens for taking in the analyzing light passing through the light emitting portion. Since the irradiation lamp and the light-collecting lens are arranged at positions facing each other with respect to the object to be inspected, it is possible to easily carry out quantitative analysis of harmful substances with an inexpensive and simplified device.

According to the analyzer of the third aspect of the invention, the laser light oscillation means for oscillating the laser light selected from a plurality of wavelengths and the laser light emitted from the laser light oscillation means are linearly condensed. Laser focusing means for irradiating the object to be inspected with
Since the second object quantity detecting means for obtaining the quantity of the analysis object in the inspection object based on the intensity of the linear light emitting part in the inspection object irradiated with the focused laser light is provided, the laser light is applied to the soil. When the element is in the ground state, the element in the ground state emits energy when it obtains energy from the laser beam to be in the excited state and is atomized to return to the ground state again. Therefore, in a predetermined region based on the intensity of the linear light emitting portion, The content of the inorganic harmful substance can be determined, and the quantitative analysis of the harmful substance can be easily performed with high sensitivity.

According to the analyzer of the fourth aspect of the present invention, since a plurality of light-collecting means are arranged in parallel along the linear light-emitting portion of the object to be inspected, it is possible to reliably collect light in a predetermined area.

According to the analyzer of the invention of claim 5, the second aspect
Since the object amount detection means has the position information acquisition means for acquiring the position information in the linear light emitting part, quantitative analysis of harmful substances can be performed with high accuracy by performing analysis over the entire surface of the inspection object. .

According to the analyzer of the sixth aspect of the invention, since the laser focusing means is the cylindrical convex lens, the linear light emitting portion can be easily formed with a simple structure.

According to the analyzer of the seventh aspect of the invention, since the laser focusing means is composed of the concave lens, the convex lens and the cylindrical convex lens, the linear light emitting portion can be easily formed with a simple structure.

According to the analyzer of the eighth aspect of the present invention, the first and second object amount detecting means can detect the amount of the inorganic harmful substance as the analysis target. A plurality of detection means can be selected according to the type.

According to the analyzer of the ninth aspect of the present invention, the laser light of a predetermined wavelength is oscillated, the emitted laser light is linearly condensed and irradiated onto the inspection object, and the condensed laser light is generated. While irradiating the linear light emitting part of the irradiated inspection object with the light of the wavelength corresponding to the analysis object in the axial direction, the analysis light passing through the light emitting part is collected and based on the intensity of this light. Since the amount of the analysis target substance in the inspection object is determined, the quantitative analysis of harmful substances can be easily performed with high sensitivity.

According to the analyzing method of the tenth aspect of the invention, in the light emitting section, the elements constituting the object to be analyzed are atomized by obtaining energy from the laser light, and each atom passes from the ground state to the excited state. During the process of returning to the ground state atom again, the ground state atom absorbs the corresponding amount of analytical light, and the amount of the analyte is determined based on the remaining analytical light. Quantitative analysis of substances can be performed with high sensitivity.

According to the analysis method of the eleventh aspect of the present invention, this analysis method is applied to an element having a large emission energy or a low excitation probability. By selecting the detection means by using, the analysis can be performed with high sensitivity and easily.

According to the analysis method of the twelfth aspect of the present invention, the laser light selected from a plurality of wavelengths is oscillated, the emitted laser light is linearly condensed, and the object is irradiated with the condensed light. Since the light is collected along the linear light emitting portion of the inspection object irradiated with the laser light, and the amount of the analyte in the inspection object is obtained based on the intensity of the light, Quantitative analysis can be easily performed with high sensitivity.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an analyzer according to a first embodiment of the present invention.

FIG. 2 is a schematic explanatory diagram of a laser atomic absorption method.

FIG. 3 is a schematic explanatory diagram of a method of irradiating a focused laser with a cylindrical convex lens.

4 is a sectional view taken along line IV-IV in FIG.

FIG. 5 is a graph showing the density of elements that are turned into plasma and atomized by laser light irradiation.

FIG. 6 is a schematic configuration diagram of an analyzer according to a second embodiment of the present invention.

FIG. 7 is a schematic explanatory diagram of laser emission spectroscopy.

FIG. 8 is a graph showing the detection result in the radial direction of the sample.

FIG. 9 is a schematic configuration diagram of an analyzer according to a third embodiment of the present invention.

FIG. 10 is a schematic explanatory diagram of laser emission spectroscopy.

FIG. 11 is a graph showing the detection result in the radial direction of the sample.

[Explanation of symbols] 14 Laser oscillator (laser light irradiation means) 15 Laser focusing system 16 concave lens 17 Convex lens 18 Cylindrical convex lens 19 Mercury lamp (analysis light irradiation means, irradiation lamp) 22 Lighting lens (lighting means) 23 optical fiber 24 wavelength separator 25 Photomultiplier tube (PMT) 26 integrator 27 Control unit (first object amount detecting means) 31a, 31b, 31c ... 32a, 32b, 32c ... Optical fiber 33a, 33b, 33c ... Wavelength separator 34a, 345, 34c ... Photomultiplier tubes 35a, 35b, 35c ... Integrator 36 Control unit 41 mirror 42 Spectrometer 43 ICCD camera 43 44 Control unit

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Makio Atsumi             2-8-19 Niihama, Arai-cho, Takasago-shi, Hyogo             Takaryo Engineering Co., Ltd. F-term (reference) 2G043 AA01 BA01 BA04 BA05 CA05                       DA01 EA10 EA13 FA06 GA01                       GB01 GB03 HA01 HA02 HA05                       JA02 KA01 KA03 KA05 KA08                       KA09 LA02 LA03                 2G059 AA01 BB08 CC02 DD01 EE01                       EE06 EE12 FF10 GG01 GG03                       GG08 GG10 HH01 HH03 HH06                       JJ02 JJ11 JJ13 JJ17 KK02                       KK03 KK04 LL10 PP10

Claims (12)

[Claims] 1. A laser beam oscillating means for oscillating a laser beam of a predetermined wavelength, and a laser beam focusing means for linearly focusing the laser beam emitted from the laser beam oscillating means and irradiating the object to be inspected. , Analysis light irradiating means for irradiating the linear light emitting portion of the inspected object irradiated with the condensed laser light with light of a wavelength corresponding to the analysis object in the axial direction, and passing through the light emitting portion. An analyzing apparatus, comprising: a first object amount detecting means for obtaining the amount of the object to be analyzed in the object to be inspected based on the intensity of the analyzing light. 2. The analysis light irradiating means according to claim 1, wherein the analysis light irradiating means has an irradiation lamp for irradiating element light having a predetermined wavelength, and the first object amount detecting means takes in the analysis light passing through the light emitting section. An analyzer having a lighting means, wherein the irradiation lamp and the lighting means are arranged at positions facing each other with respect to the object to be inspected. 3. A laser light oscillating means for oscillating a laser light selected from a plurality of wavelengths, and a laser light collecting means for linearly focusing the laser light emitted from the laser light oscillating means and irradiating the object to be inspected. And a second object quantity detecting means for obtaining the quantity of the analysis object in the inspection object based on the intensity of the linear light emitting part of the inspection object irradiated with the condensed laser beam. An analysis device characterized by the above. 4. The analyzer according to claim 3, wherein a plurality of daylighting means are arranged in parallel along a linear light emitting portion of the inspection object. 5. The analyzer according to claim 3, wherein the second object amount detection means has position information acquisition means for acquiring position information of the linear light emitting portion. 6. The analyzer according to claim 1, wherein the laser condensing unit is a cylindrical convex lens. 7. The analyzer according to claim 1, wherein the laser condensing unit has a concave lens, a convex lens, and a cylindrical convex lens. 8. The method according to claim 1 or 3,
The second object quantity detecting means is capable of detecting the quantity of the inorganic harmful substance as the object to be analyzed. 9. A laser beam of a predetermined wavelength is oscillated, and the emitted laser beam is linearly condensed to irradiate an object to be inspected,
While irradiating the linear light emitting portion of the inspected object irradiated with the focused laser light with light having a wavelength corresponding to the analysis target in the axial direction, the analysis light passing through the light emitting portion is collected. Then, based on the intensity of the light, the amount of the analysis object in the inspection object is calculated. 10. The light emitting unit according to claim 9,
The element constituting the analyte is atomized by obtaining energy from the laser light, and each atom undergoes a process of returning from the ground state to the excited state and then to the ground state atom again. An analysis method, wherein an atom absorbs a corresponding amount of analysis light, and the amount of the analysis target is obtained based on the remaining analysis light. 11. An analysis method, wherein the analysis method according to claim 9 is applied to an element having a large emission energy or a low excitation probability. 12. A laser beam selected from a plurality of wavelengths is oscillated, the emitted laser beam is linearly focused and irradiated onto an object to be inspected, and the focused laser beam is irradiated onto the target object. An analysis method, characterized in that light is collected along a linear light emitting portion of an inspection object, and the amount of the analysis object in the inspection object is obtained based on the intensity of the light.