JP2003202208A - Image measuring device and program for measuring image - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To speedily and simply carry out an alignment adjustment implemented before measurement. <P>SOLUTION: An image picked up by a CCD camera is displayed on a video window 51. A movement target and the image of its vicinity are displayed on a navigation window 52A and a complete image of an object to be measured is displayed on a navigation window 52B. When a 'move' icon is clicked, the CCD camera is driven by an XYZ driving mechanism in accordance with a position data of the movement target in CAD data and the image of the vicinity of the movement target is displayed on the video window 51. When the movement target is moved to the screen center by using a joystick or the like and a 'measure' icon is clicked, the position of the movement target is detected with detection of gravity center. Accordingly the conversion of a coordinate system is carried out. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image measuring device such as a measuring microscope or a non-contact three-dimensional measuring machine, and more particularly to an image measuring device having an alignment adjusting function for an object to be measured.

[0002]

2. Description of the Related Art In conventional coordinate measuring machines, microscopes and projectors, an object to be measured (workpiece) is placed at a predetermined position before starting measurement even if an automatic measuring function by a part program is added. It is necessary to align the work coordinate system with the design coordinate system. Further, when the object to be measured is one that requires strict accuracy not only in the XY directions (horizontal plane direction) but also in the height direction (Z direction), the height reference plane is strictly determined by the focusing mechanism. It is necessary to start the measurement later. For this work, the operator must make a manual adjustment such as moving the stage based on the work image displayed on the monitor screen.

When such a stage movement is performed, conventionally, for example, only a character display such as "Please move the camera to the XY origin" is displayed. For this reason, it is difficult for the operator to know which point is the origin, and it is necessary to perform work such as searching for the origin position while collating the CAD drawings, which requires a great deal of labor for alignment.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and provides an image measuring apparatus which can simplify the operation of moving the stage to greatly improve the efficiency of the measuring work. With the goal.

[0005]

An image measuring apparatus according to a first invention of the present application includes a stage on which an object to be measured is placed,
An image pickup means for picking up an image of the object to be measured; a measurement display section for displaying the object to be measured picked up by the image pickup means; a moving means for moving the image pickup means relative to the stage; A moving target position storage unit that stores the position of the moving target to be moved, a navigation display unit that displays the entire image of the measured object and that particularly highlights the position of the moving target, and the navigation unit for the stage. Position detection means for detecting the position of the imaging means and outputting position information; automatic control means for controlling the movement means based on the stored contents of the movement target storage means and the detection result of the position detection means; And a manual adjusting means for manually adjusting the means.

According to the image measuring apparatus of the first aspect of the present invention, the entire image of the object to be measured is displayed and the position of the moving target is particularly highlighted, so that the contents stored in the moving target storing means and the position detection can be performed. The moving means is controlled by the automatic control means based on the detection result of the means. Further, the deviation which could not be adjusted only by the automatic control means due to the processing error of the object to be measured is adjusted by the manual adjustment means while looking at the measurement display section. That is, the rough movement to the movement target is made by the automatic control means or the like, and the final fine adjustment is made by the manual adjustment means. At this time, since the position of the moving target can be confirmed by the navigation display unit, the adjustment becomes very easy.

In the first aspect of the invention, the navigation display means displays a low-magnification display section for displaying an overall image of the object to be measured, and the image of the moving target and its surroundings at a magnification higher than that of the low-magnification display section. It is also possible to have a medium-magnification display section for displaying with. Further, in the first invention, a movement command input unit for inputting a movement command to the movement target is further provided, and the automatic control means waits for an input of the movement command and is being displayed on the navigation display unit. It may be configured to start control of movement to the movement target. By doing so, the operator can confirm where the position moved by the automatic control means is, and information useful for the adjustment work is provided. In addition, the navigation display unit displays the moving target and its surroundings, and may display the moving target in a display form that can be distinguished from others.

Further, in the first invention, a specific position measuring means for measuring a specific position of the captured image, a specific position by the specific position measuring means and a position stored in the movement target storing means. It is also possible to further include coordinate system changing means for changing the coordinate system expressing the position information from the position detecting means on the basis of the difference. In this case, the specific position is measured by the specific position measuring means after the adjustment by the manual adjusting means. The specific position mentioned here includes the center position of the image, the position of the center of gravity, and the like, which are obtained by detecting the center of gravity and the edge. Then, the coordinate system is changed based on the difference between the specific position measured by the specific position measuring means and the position stored in the movement target storage means, whereby the alignment is completed.

Further, when the movement target position storage means stores an alignment reference point, the coordinate system changing means uses the alignment reference point measured first among the plurality of alignment reference points as a temporary origin. After performing the change as described above, another alignment reference point may be measured, and the origin of the coordinate and the direction of the coordinate axis may be changed based on the result.

The coordinate system further comprises height measuring means for measuring the height of the object to be measured and inclination calculating means for calculating the inclination of the object to be measured based on the measurement result of the height measuring means. The changing means may make the change based on the calculation result of the inclination calculating means.

A second image measuring program according to the present invention is a stage on which an object to be measured is mounted, an image pickup means for picking up an image of the object to be measured, and an image of the object to be measured picked up by the image pickup means. Means for displaying, a moving target position storing means for storing the position of a moving target for moving the image pickup means, a moving means for moving the image pickup means relative to the stage, and the image pickup for the stage. In an image measuring program for causing an image measuring device having position detecting means for detecting the position of the means to output position information, data of the position of a moving target to move the image pickup means in an image measuring program for executing image measurement. A step of acquiring the moving target position data to be acquired, and a display step for displaying the whole image of the measured object and displaying the position of the moving target with particular emphasis. A position detection step for causing the position detection means to perform position detection, a control step for controlling the movement means based on the position data of the movement target and the detection result of the position detection step, and the movement means. And a manual adjustment step of manually adjusting.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view showing the overall configuration of an image measuring system according to an embodiment of the present invention. [Overall Configuration] This system is a non-contact type image measuring device 1.
And a computer system 2 for driving and controlling the image measuring machine 1 and executing necessary data processing, and a printer 3 for printing out measurement results.

The image measuring machine 1 is constructed as follows. That is, a measurement table 13 on which an object to be measured (hereinafter, referred to as a work) 12 is placed is mounted on the pedestal 11, and the measurement table 13 is driven in the Y-axis direction by a Y-axis drive mechanism (not shown). To be done. Support arms 14 and 15 extending upward are fixed to central portions of both side edges of the gantry 11, and an X-axis guide 16 is fixed to connect both upper end portions of the support arms 14 and 15. An imaging unit 17 is supported by the X-axis guide 16. The image pickup unit 17 is moved by an X-axis drive mechanism (not shown) to
It is driven along the shaft guide 16. A CCD camera 18 is attached to the lower end of the imaging unit 17 so as to face the measurement table 13. In addition, the imaging unit 17
In addition to a lighting device (not shown) and a focusing mechanism (not shown), a Z-axis drive mechanism for moving the position of the CCD camera 18 in the Z-axis direction is built in. In addition, an X-axis encoder 42A, a Y-axis encoder 42B, and a Z-axis encoder 42C, which are not shown in FIG. 1, are arranged in the image pickup unit 17 and the stage 13, and the movement amounts in the XYZ three-axis directions can be detected.

The computer system 2 comprises a computer main body 21, a keyboard 22, a joystick box (hereinafter referred to as J / S) 23, a mouse 24 and a CRT screen 25. [Configuration of Computer 21] The computer main body 21 is
For example, it is configured as shown in FIG. That is, CCD
The image information input from the camera 18 is stored in the image memory 32 via an interface (hereinafter referred to as I / F) 31.

The CAD data of the work 12 is created by a CAD system (not shown), is input to the CPU 35 via the I / F 33, is expanded by the CPU 35 into bitmap image information, and is stored in the image memory 32. It The CAD data is once stored in a hard disk drive (hereinafter referred to as HDD) 38, and the CAD data output from the HDD 38 is similarly expanded into bit map image information by the CPU 35 and then stored in the image memory 32. It The image information stored in the image memory 32 is
As will be described later, the CRT screen 25 is displayed via the display control unit 36.
Is displayed in.

Further, the image pickup unit 17 and the stage 13
X installed in the image measuring machine 1 to detect the movement amount of
The outputs from the axis encoder 42A, the Y axis encoder 42B, and the Z axis encoder 42C are I / Fs 42A 'and 42B.
', 42C', is sent to the display control unit 36 via the CPU 35, and the XYZ coordinate values are displayed on the CRT 25. On the other hand, the code information and the position information input from the keyboard 22, the J / S 23, and the mouse 24 are C through the I / F 34.
It is input to the PU 35. The CPU 35 receives the I / F from the microprogram stored in the ROM 37 and the HDD 38.
A measurement execution process, a measurement result display process, and the like are executed according to a measurement execution program, a measurement result display program, and the like stored in the RAM 40 via 39. CPU35
By the measurement execution process, the image measuring device 1 is controlled via the I / F 41.

In addition to storing various programs, the HDD 38 stores the data of the target position for moving the stage according to the type of the object to be measured. The target position referred to here is the alignment reference position during alignment adjustment,
The position stored as a measurement position in the part program. The target position data is appropriately read when the measurement execution program is executed, and the drive signal corresponding to the read value and the outputs of the encoders 42A-42C is I / F.
It is transmitted to the XYZ drive mechanism (not shown) via 43, and X
The YZ drive mechanism is controlled to move to the target position. Further, the HDD 38 stores and appropriately reads a reference coordinate system setting file PCS for providing a detection signal from the encoders 42A-C as coordinate system data in a format along a coordinate system based on CAD data. The contents of this file will be described later. The RAM 40 stores various programs and also provides a work area for various processes.

[Display Screen Example] FIG. 3 is a view showing a display screen of the CRT 25 at the time of measurement by the image measuring device. The display screen includes a video window 51, navigation windows 52A and 52B, a counter window 53, a function window 54, and an illumination / stage window 55. The video window 51 has a CCD
The image captured by the camera 16 is displayed. The navigation window 52 is a portion for displaying CAD data stored in the HDD 38, and a navigation window 52A for enlarging and displaying a part thereof and a navigation window 52B for displaying the entire image of the work 12 or a wider range corresponding thereto. It has and. As a result, the operator can grasp at which position of the work 12 the portion to be measured or the portion currently moved to the video window is located.

The navigation window 52A is for the work 1
This is a window for enlarging and displaying a position to be a movement target among the positions above 2. The enlargement ratio is lower than that in the video window 51 and higher than that in the navigation window 52B, so that it is possible to know which part of the entire work 12 is the position to be moved. The position to be the movement target is, for example, a pin P1 (hereinafter, referred to as an alignment pin P1) that is an alignment reference position when performing alignment. Further, the position of the alignment pin P1 that is the movement target is displayed in black to distinguish it from other pins, and a name such as "measurement location: alignment pin P1" is displayed in the upper right of the window.

The navigation window 52B displays an overall image of the work 12. For example, when the alignment pin P1-4 is set as the alignment reference position, the position corresponding to that position is displayed in black to distinguish it from other pins. Counter window 53
Includes an X-axis encoder 42A, a Y-axis encoder 42B,
The output from the Z-axis encoder 42C displays the center coordinates (X, Y, Z) of the imaging range of the CCD camera 16 calculated based on the program set by the reference coordinate system setting file PCS. In the function window 54, icons for activating micro programs for various measurement processes and calculation of measured values are arranged.

The illumination / stage window 55 is a window for various setting operations relating to the illumination device 17 and the stage. The measurement window 56 executes the measurement procedure,
It is a window that displays a group of icons for proceeding, a "move" icon that instructs movement to a moving target, a "measurement" icon that instructs measurement of an image displayed in the center of the reticle of the video window 51, and It includes a "previous" icon for returning to the moving target measuring procedure, a "next" icon for moving to the next moving target measuring procedure, and the like.

In the present embodiment, the work 1
2 is a plurality of pins 61 which require strict dimensional accuracy not only in the position in the horizontal direction (XY direction) but also in the height direction (Z direction) as shown in FIG. It is assumed that the pins at the four corners are alignment pins P1-P4 as alignment reference points.

Next, alignment adjustment of the work 12 (a plurality of pins 61) in the image measuring system of the present embodiment will be described with reference to the flowchart shown in FIG. In the alignment adjusting step of the present embodiment, as shown in FIG. 5A, provisional origin setting (S1) and height reference plane setting (S) are performed.
2) consists of three steps of determining the origin and adjusting the coordinate system (S3). After the completion of the alignment adjusting step, the measuring step is performed. Since the execution contents in the measurement step are the same as the conventional image measuring machine,
The description is omitted.

The respective effects of S1-3 will be described with reference to FIG. 6A shows the relationship between the design coordinate system Cd based on the CAD data and the design data 12 'of the work 12, and FIG. 6B shows the work coordinate system Cw and the work 12 before the alignment adjustment. The positional relationship is shown. When the work 12 is installed, it is made to match the position of this design data by using an installation jig or the like, but actually, it is assumed in the design coordinate system Cd as shown in FIG. The position (12 ′ position) is slightly displaced. Further, due to the inclination of the stage 13 itself, the manufacturing error of the workpiece 12, and the like, the stage 13 may be arranged at a slight inclination with respect to the design data 12 '. Further, a tilt may occur due to a processing error or the like.

In order to correct such a deviation or inclination, S
In step 1, one alignment reference position is measured, and the measured point is set as a temporary origin (hereinafter referred to as a temporary origin) of the work coordinate system (FIG. 6C). When measuring a plurality of pins 61 as shown in FIG. 4, four corner pins P1-P4 of the pins 61 arranged on the lattice are set as alignment reference positions, and one of them is measured and provisionally measured. Can be the origin. Then, in S2, the height reference plane is measured, and the coordinate system is converted according to the height reference plane (FIG. 6 (d)). That is, a plurality of height reference positions set in the HDD 38 are measured similarly to the alignment reference position, and the height reference plane is calculated from the result. Further, the alignment pins P1-P4 are measured, and based on the error with the design coordinate system, the coordinate system is further adjusted so as to minimize the error. As a result, as shown in FIG.
A coordinate system Cw ′ that matches the design coordinate system shown in (1), that is, the influence of the installation error of the work 12 is removed is obtained. This completes the alignment.

The detailed procedure for setting the temporary origin (S1) is shown in FIG.
It shows in (b). First, the entire image of the pin 61 is graphically displayed in the navigation window 52B (S1-1).
As described above, the alignment pins P1-4 as the alignment reference position that is the movement target are displayed in black to distinguish them from other pins. Next, a temporary coordinate system is set (S1-2). This setting is performed by reading the reference coordinate system setting file PCS from the HDD 38.
The reference coordinate system setting file PCS is a file for converting the output values of the encoders 42A-42C, which change due to the movement of the measurement table 13 and the image pickup unit 17, into the orthogonal coordinate system representation (the coordinate system Cw in FIG. 6). Is.

The standard setting when reading this file is a coordinate system in which the center of the movable range of the measurement table 13 and the image pickup unit 17 is the origin, and the driving directions of the XYZ driving system are the X-axis, Y-axis, and Z-axis, respectively. It is said that. This reference coordinate system setting file PCS is rewritten when the temporary origin and height reference plane are set later in S1 and S2, and when the coordinate system is finally determined in step 3. It can be rewritten. When the reset operation is performed after the measurement is completed, the reference coordinate system setting file is returned to the original standard setting.

When the setting of the temporary coordinate system is completed, the graphic image near the alignment pin P1 is displayed in the navigation window 52A at the intermediate magnification (S1-3). The screen display is as shown in FIG. That is, in the navigation window 52A, the image of the portion corresponding to the alignment pin P1 is displayed in black, and the name of the black portion is "measurement location: alignment pin P1" in the upper right of the window 52A. Is displayed. The display of the video window 51 shows a position irrelevant to the position of the alignment pin P1 because the CCD camera 18 has not moved from the initial position.

The operator uses this navigation window 5
Check the position of the moving target by looking at the display of 2A, and move
Click the icon with the mouse 24 (S1-4).

When the "move" icon is clicked, C
The PU 35 compares the coordinate value of the alignment pin P1 as the movement target with the current center coordinate of the CCD camera 18 and outputs a drive signal to the XYZ drive mechanism. As a result, the CCD camera 18 moves up to the highest point in the Z direction,
It is driven in the XY directions and moved to the vicinity of the alignment pin P1 (S1-5).

That is, as shown in FIG. 7B, the image of the alignment pin P1 is displayed in the video window 51, but in most cases, the alignment pin P1 does not coincide with the center of the video window 51, and there is a certain value. The position is off the center of the reticle of the video window 51.
This is due to an installation error (horizontal deviation, inclination) when installing the work 12, an error from the design data of the work 12 itself, and the like.

On the screen of the CRT 25, a display prompting the adjustment by the joystick 23 so that the alignment pin P1 is located at the center of the screen is displayed. The operator operates the joystick 23 so that the alignment pin P1 coincides with the center of the reticle while observing the displacement of this position while viewing the video window 52, and brings the display screen of the CRT 25 into the state shown in FIG. 7C (S1). -6). When they can be matched, the "measurement" icon is clicked with the mouse 24 (S1-7). When the "measurement" icon is clicked, the height of the alignment pin P1 is measured by the autofocus function of the CCD camera 18 at that position, and the position of the center of gravity of the image of the alignment pin P1 is detected. The reference coordinate setting file PCS is rewritten so that the position becomes the origin position (S1-8).

That is, the coordinate origin moves from the center of the movable range of the measurement table 13 and the image pickup unit 17 to the center coordinate position of the CCD 18 at the time when the "Measure" icon is clicked, and this position is made the temporary origin.

When the temporary origin is set, the process moves to the measurement of the height reference plane (S2). That is, in order to detect the tilt of the work 12 and adjust the work coordinate system Cw so as to match the direction and amount of this work, a plurality of (three or more points; six points in the following description) height reference positions. Is measured, and thereby the inclination of the work 12 is measured. A specific procedure of measuring the height reference plane will be described with reference to the flowchart shown in FIG.

After the setting of the temporary origin is completed, the measurement window 56
If you click the "Next" icon, you will move to the measurement of the height reference plane. At the upper right of the navigation window 52A, "Measurement point: Height reference position H1" is displayed, and in the navigation window 52A, an image corresponding to the height reference position H1 is displayed graphically (S2-
1). Similar to the alignment pin P1 in step 1, in the navigation windows 52A and 52B, the height reference positions H1 to H6 are displayed in black to distinguish them from other points.

When the "move" icon in the measurement window 56 is clicked (S2-2), the CPU 35 determines the XY coordinate value of the height reference position as the movement target and the XY coordinate of the position where the current CCD camera 18 exists. And the drive signal is output toward the XYZ drive mechanism. With respect to the Z direction, the CCD camera 18 moves to the uppermost position of the movable range. As a result, the CCD camera 18 is moved to the vicinity of the height reference position 1 (S2-3). As in the case of step 1, in most cases, the height reference position 1 does not coincide with the center of the video window 51 only by the operation of the CCD camera in S3-5, and the height reference position 1 deviates to some extent from the reticle center of the video window 51. It will be a move to a position.

The operator operates the joystick 23 so that the height reference position H1 coincides with the center of the reticle while observing the displacement of the position on the video window 52 (S2-4). If you can match, mouse 24
Click the "Measure" icon according to (S2-5).
When the "Measure" icon is clicked, height measurement is executed at that position by the autofocus function of the CCD camera (S2-6). Similarly, the height reference positions H2 to H6 are also measured. At this time, the height reference position H
When moving from 2 to H6, a faster moving operation can be performed by moving in the Z direction based on the result of autofocus at the height reference position 1.

When the measurement of all the height reference positions is completed (S2-7), the surface best matching these measurement results is calculated based on the least squares method based on the measurement results of the height reference positions H1-6. Then, this calculation result is used as the height reference plane (S2-8). The reference coordinate system setting file PCS is rewritten based on this height reference plane.

When the measurement of the height reference plane is completed, next, the origin and the coordinate system are determined (S3). This S3
Then, the position data of the alignment pin P1 measured as the temporary origin position in S1 is used as it is, the remaining alignment pins P2-4 are measured, and the origin position of the coordinate system and the direction of the coordinate axis are determined based on this result. . The specific procedure of S3 will be described with reference to FIG.

First, the graphic image in the vicinity of the alignment pin P2 is displayed in the navigation window 52A at a medium magnification (S3-1). The image of the portion corresponding to the alignment pin P2 is displayed in black, and the name of this black portion is displayed in the upper right of the window 52A as "Measurement location: Alignment pin P2". The operator looks at this display and confirms the position of the moving target,
Click the "move" icon with the mouse 24 (S3-
2).

When the "move" icon is clicked, C
The PU 35 compares the coordinate value of the alignment pin P2 as the movement target with the current center coordinate of the CCD camera 18 and outputs a drive signal to the XYZ drive mechanism. As a result, the CCD camera 18 is moved to the vicinity of the alignment pin P2 (S3-3). As in the case of S1, in most cases, the alignment pin P2 does not coincide with the center of the video window 51, and the alignment pin P2 moves to a position that is off the reticle center of the video window 51 to some extent.

The operator operates the joystick 23 so that the alignment pin P2 coincides with the center of the reticle while observing the displacement of the position on the video window 52 (S3-4). If you can match, mouse 2
Click the "Measure" icon according to step 4 (S3-
5). When the "Measurement" icon is clicked, height measurement is performed by the autofocus function of the CCD camera 18 at that position, the barycentric position of the image is detected, and position measurement in the XY directions is performed (S3-6). ).

Similarly, the alignment pins P3, P4
Also measure. Thus all alignment pins P1-4
When the data in the XYZ directions are obtained (S3-7), the XY origin and the coordinate axis directions are determined so that the error between the barycentric position and the design value based on the design coordinate system is minimized (S3-7).
3-8). The position where the error is minimum can be obtained by the so-called least square method. The coordinate system adjustment is completed as described above. After that, the work 12 is measured by the same method as that of a known image measuring machine.

Although the embodiment of the present invention has been described above, the present invention is not limited to this. For example, in the above-described embodiment, the navigation window 52A is provided to particularly indicate the moving target, but the navigation window 52A is omitted while leaving only the navigation window 52B showing the overall image of the work 12, and the window 52A is omitted.
In B, the next measurement point may be displayed in a conspicuous form (for example, indicated by an arrow as shown in FIG. 10).

[0045]

As described above, according to the present invention, the alignment of the work can be easily adjusted, and the measurement efficiency can be greatly improved.

[Brief description of drawings]

FIG. 1 is a diagram showing an appearance of an image measuring device according to an embodiment.

FIG. 2 is a diagram showing a configuration of a computer 2.

FIG. 3 shows an example of a screen display of a CRT 25.

FIG. 4 illustrates a plurality of pins 61 as objects to be measured.

FIG. 5 is a flowchart showing a procedure of alignment adjustment according to the present embodiment.

FIG. 6 shows an example of a CRT screen display.

FIG. 7 is a conceptual diagram for explaining an effect when the procedure shown in the flowchart of FIG. 5 is performed.

FIG. 8 is a flowchart showing a procedure of alignment adjustment according to the present embodiment.

FIG. 9 is a flowchart showing a procedure of alignment adjustment according to the present embodiment.

FIG. 10 shows a modification of this embodiment.

[Explanation of symbols]

1 ... Image measuring machine, 2 ... Computer system, 3 ...
Printer 3, 11 ... Stand 12 ... Work, 13 ... Measurement table, 17 ... Imaging unit, 18 ... CCD camera, 23 ... Joystick box, 24 ... Mouse, 25 ... ..CRT, 31, 33, 34, 43 ... Interface, 32 ... Image memory 32, 35 ... CPU, 3
6 ... Display control unit, 37 ... RAM, 38 ... Hard disk drive, 40 ... ROM, 42 ... Encoder, 5
1 ... video window, 52 ... navigation window, 53 ... counter window, 54 ... function window, 55 ... illumination / stage window

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Ryoichi Yoshiki             1-20-1 Sakado, Takatsu-ku, Kawasaki City, Kanagawa Prefecture               Mitutoyo Co., Ltd. (72) Inventor Sadayuki Matsumiya             1-20-1 Sakado, Takatsu-ku, Kawasaki City, Kanagawa Prefecture               Mitutoyo Co., Ltd. F term (reference) 2F065 AA01 AA06 AA07 AA17 AA20                       AA24 AA37 BB05 DD06 DD19                       FF04 FF10 FF16 FF21 FF61                       FF67 JJ03 JJ26 NN20 PP02                       PP12 PP24 QQ18 QQ24 QQ25                       QQ28 QQ31 RR05 RR10 SS02                       SS13 TT08

Claims (16)

[Claims] 1. A stage on which an object to be measured is placed, an image pickup means for picking up an image of the object to be measured, a measurement display section for displaying the object to be measured picked up by the image pickup means, and the image pickup means for the stage. Relative to the moving means, a moving target position storing means for storing the position of the moving target to move the image pickup means, and to display the entire image of the measured object and to particularly the position of the moving target. A navigation display unit that emphasizes and displays, a position detection unit that detects the position of the imaging unit with respect to the stage and outputs position information, a storage content of the movement target storage unit, and a detection result of the position detection unit. An image measuring apparatus comprising: an automatic control unit that controls the moving unit based on the above; and a manual adjusting unit that manually adjusts the moving unit. 2. The navigation display unit displays a low-magnification display unit that displays an overall image of the object to be measured, an image of the moving target and its surroundings at a magnification larger than that of the low-magnification display unit. The image measuring device according to claim 1, comprising a magnification display unit. 3. A move command input unit for inputting a move command to the move target, wherein the automatic control means waits for the input of the move command to move to the move target being displayed on the navigation display unit. The image measuring device according to claim 1, wherein the image measuring device is configured to start control of movement. 4. The image measuring device according to claim 1, wherein the navigation display unit is configured to display the moving target in a display form that can be distinguished from others. 5. The image measuring device according to claim 1, wherein the movement target position storage means stores an alignment reference point. 6. A specific position measuring means for measuring a specific position of the captured image, and the position detection based on a difference between the specific position by the specific position measuring means and the position stored in the movement target storage means. The image measuring device according to claim 1, further comprising a coordinate system changing unit that changes a coordinate system expressing the position information from the unit. 7. The coordinate system changing means measures another alignment reference point after making the change so that the first alignment reference point measured among the plurality of alignment reference points becomes a temporary origin. Then, the image measuring device according to claim 6, wherein the origin of the coordinate and the direction of the coordinate axis are changed based on the result. 8. The coordinate system comprises: height measuring means for measuring the height of the object to be measured; and inclination calculating means for calculating the inclination of the object to be measured based on the measurement result of the height measuring means. The image measuring device according to claim 6, wherein the changing unit makes the change based on a calculation result of the inclination calculating unit. 9. A stage on which an object to be measured is placed, an image pickup means for picking up an image of the object to be measured, a display means for displaying an image of the object to be measured picked up by the image pickup means, and the image pickup means. A moving target position storage unit that stores the position of a moving target to be moved, a moving unit that relatively moves the image pickup unit with respect to the stage, and a position of the image pickup unit with respect to the stage, and position information is output. An image measuring program for causing an image measuring apparatus having a position detecting means to perform image measurement, a moving target position data acquiring step of acquiring data of a position of a moving target to move the image pickup means, A display step of displaying the entire image of the object to be measured and displaying the position of the moving target with particular emphasis, and performing position detection on the position detecting means. A position detecting step for controlling the moving means based on the position data of the moving target and the detection result of the position detecting step; and a manual adjusting step for manually adjusting the moving means. A program for image measurement characterized in that 10. The image measuring program according to claim 9, wherein the display step separately and enlargedly displays the image of the moving target and its surroundings. 11. A movement command input step of inputting a movement command to the movement target,
The image measurement program according to claim 9, wherein the control step is configured to start control of movement to the movement target displayed in the display step after inputting the movement instruction. 12. The image measuring program according to claim 9, wherein the display step is configured to display the moving target in a display form that can be distinguished from others. 13. The image measuring program according to claim 9, wherein the movement target position data acquisition step acquires position data of an alignment reference point. 14. A specific position measuring means for measuring a specific position of the captured image, a measurement instructing step for instructing measurement by the specific position measuring means after manual adjustment by the manual adjusting step, and the specific position measurement. 10. A coordinate system changing step for changing a coordinate system expressing a position detection result in the position detecting step based on a difference between a specific position by the means and a position acquired in the moving target position data acquiring step. The image measurement program described in 1. 15. The coordinate system changing step sets, as a temporary origin, the alignment reference point measured first among a plurality of the alignment reference points, then measures another alignment reference point, and based on the result, 15. The image measuring program according to claim 14, wherein the origin and the direction of the coordinate axis are changed. 16. A height measuring step of measuring the height of the object to be measured, and a tilt calculating step of calculating the tilt of the object to be measured based on the measurement result of the height measuring step. The image measuring program according to claim 14, wherein the coordinate system changing step changes the coordinate system based on a calculation result of the tilt calculating step.