JP2003197705A5 - - Google Patents

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Publication number
JP2003197705A5
JP2003197705A5 JP2001392316A JP2001392316A JP2003197705A5 JP 2003197705 A5 JP2003197705 A5 JP 2003197705A5 JP 2001392316 A JP2001392316 A JP 2001392316A JP 2001392316 A JP2001392316 A JP 2001392316A JP 2003197705 A5 JP2003197705 A5 JP 2003197705A5
Authority
JP
Japan
Prior art keywords
lid
opening
detaching device
cassette
optical sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001392316A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003197705A (ja
JP4139591B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001392316A priority Critical patent/JP4139591B2/ja
Priority claimed from JP2001392316A external-priority patent/JP4139591B2/ja
Publication of JP2003197705A publication Critical patent/JP2003197705A/ja
Publication of JP2003197705A5 publication Critical patent/JP2003197705A5/ja
Application granted granted Critical
Publication of JP4139591B2 publication Critical patent/JP4139591B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001392316A 2001-12-25 2001-12-25 カセット蓋着脱装置 Expired - Fee Related JP4139591B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001392316A JP4139591B2 (ja) 2001-12-25 2001-12-25 カセット蓋着脱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001392316A JP4139591B2 (ja) 2001-12-25 2001-12-25 カセット蓋着脱装置

Publications (3)

Publication Number Publication Date
JP2003197705A JP2003197705A (ja) 2003-07-11
JP2003197705A5 true JP2003197705A5 (OSRAM) 2005-07-07
JP4139591B2 JP4139591B2 (ja) 2008-08-27

Family

ID=27599674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001392316A Expired - Fee Related JP4139591B2 (ja) 2001-12-25 2001-12-25 カセット蓋着脱装置

Country Status (1)

Country Link
JP (1) JP4139591B2 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7497414B2 (en) 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
JP4012189B2 (ja) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 ウエハ検出装置
JP5270953B2 (ja) * 2008-04-18 2013-08-21 川崎重工業株式会社 ロボットハンド装置
CN116759349B (zh) * 2023-08-22 2023-12-12 宁波润华全芯微电子设备有限公司 一种晶圆刻蚀清洗装置
CN117878032B (zh) * 2023-10-08 2025-11-21 上海广川科技有限公司 一种紧凑型晶圆传输设备机械手与上料端口互锁系统

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