JP2003194742A - Fluorescent x-ray analyzer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analyzer that can map a large-sized, heavy, and hardly movable sample. <P>SOLUTION: This fluorescent X-ray analyzer is provided with a unit 1 into which an X-ray generator 2, an X-ray converging means 3, and an X-ray detector 4 are integrally incorporated; a moving means M which moves the unit 1 in two- or three-dimensional directions; and a control section 1' which controls the moving means M. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescent X-ray analyzer.

[0002]

2. Description of the Related Art As one of the analysis methods using fluorescent X-rays, a primary X-ray emitted from an X-ray tube is squeezed by a collimator or the like to irradiate a sample and the generated fluorescent X-rays are detected by an X-ray detector. There is a method in which the element information of the point irradiated with the X-ray is obtained by performing the collection in (1) to measure the distribution (mapping) of the element. A fluorescent X-ray analyzer used for mapping is conventionally configured to collect the fluorescent X-rays at each point of the sample by placing the sample on an XY stage and moving the XY stage in the XY directions. Was there.

[0003]

However, in the above configuration, the size of the sample that can be placed on the XY stage,
A sample that has a limited weight and that is difficult to move cannot be placed on the XY stage, so that it is impossible to perform mapping of a large size, large weight, and a sample that is difficult to move.

The present invention has been made in view of the above matters, and an object thereof is to provide a fluorescent X-ray analyzer capable of mapping a large sample, a large weight, and a sample which is difficult to move. That is.

[0005]

In order to achieve the above object, a fluorescent X-ray analyzer according to the present invention comprises a unit in which an X-ray generator, an X-ray focusing means and an X-ray detector are integrally incorporated, A moving unit for moving the unit in two-dimensional or three-dimensional directions and a control unit for controlling the moving unit are provided (claim 1).

With the above arrangement, it is possible to provide a fluorescent X-ray analyzer capable of mapping a large sample, a large weight, and a sample that is difficult to move.

Further, when the carrying means for carrying the moving means is provided (Claim 2), the unit can be more easily arranged at an appropriate position.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram schematically showing the configuration of a fluorescent X-ray analyzer D which is an embodiment of the present invention. The fluorescence X-ray analyzer D includes a unit 1 in which an X-ray generator such as an X-ray tube 2, an X-ray focusing means 3 such as a collimator, and an X-ray detector 4 are integrally incorporated, and the unit 1 described above.
A moving means M for moving the moving means M in a two-dimensional or three-dimensional direction, and a controller 1'which is a control unit for controlling the moving means M are provided. As the X-ray focusing means 3, for example, an XGT (X-ray guide tube) may be used instead of the collimator.

The X-ray generator 2 has an X-ray controller 2 '.
In addition, the X-ray detector 4 is connected to the X-ray signal processing unit 4 ′, and the unit 1 is connected to the controller 1 ′ via the moving means M such as a crane that moves the unit 1 in the vertical and front-rear and left-right directions. Connected to the X-ray controller 2 ',
The X-ray signal processing unit 4 ′ and the controller 1 ′ are a CPU
Connected to 5.

Next, an analysis method using the fluorescent X-ray analyzer D will be described. First, the unit 1 of the fluorescence X-ray analyzer D is moved to an appropriate position so that the sample S can be analyzed, and then the primary X-rays 11 emitted from the X-ray generator 2 are converged by X-rays. The sample S is squeezed by the means 3 and the sample S is irradiated. Then, the generated fluorescent X-rays 12 are transferred to the X-ray detector 4
If the information is collected in, it is possible to obtain the elemental information of the point irradiated with the X-ray.

Here, the unit 1 incorporating the X-ray generator 2, the X-ray converging means 3 and the X-ray detector 4 is operated by the moving means M connected to the unit 1 so as to be XY.
Since it is configured to be movable in the Z direction, it is possible to know the distribution of elements by using the XYZ coordinates of the sample S and the fluorescent X-ray data by moving the unit 1 without moving the sample S. You can

FIG. 2 is a perspective view schematically showing the structure of the fluorescent X-ray analyzer D. The moving means M includes a holding portion 9 for holding the unit 1, and a support arm portion 14 to which the holding portion 9 is connected at one end side for moving the holding portion 9, and the support arm portion is provided. The other end of 14 is
The controller 1'and the CPU 5 are connected to the back side of the operation section 6 having the built-in CPU. By appropriately bending / rotating the support arm portion 14, the unit 1 can be arbitrarily moved to some extent without moving the operation portion 6. Further, a caster 13 serving as a transporting means for transporting the operating section 6 (moving means M) and further the whole fluorescence X-ray analysis apparatus D is provided at the lower part of the operating section 6, whereby the above It is possible to easily move (transport) the operation unit 6 (moving means M) and the entire fluorescent X-ray analyzer D to an arbitrary place.

The support arm portion 14 is connected to the rear surface of the operation portion 6, and an arm rotating portion 15 is formed so that its axis a extends in the rear direction, and is connected to the arm rotating portion 15. A first boom rotating portion 16 formed so that its axis b extends in a direction perpendicular to the arm rotating portion 15;
A first boom 17 having the first boom rotating portion 16 provided at one end, and an axis c of the first boom 17 provided at the other end of the first boom 17 and an axis b of the first boom rotating portion 16. The second boom rotating portion 18 that is parallel to the second boom rotating portion 18
A second boom 19 provided at one end thereof, and a holding portion rotation portion provided at the other end of the second boom 19 and having an axis d thereof parallel to the axis c of the second boom rotation portion 18. 20 and 20.

The transmission mechanism (not shown) provided inside the arm rotating portion 15 includes an arm rotating motor 1
5'is connected, and by operating the arm rotation motor 15 ', the first boom rotation part 16 and the first boom 17 and the second boom 19 connected thereto are
The arm rotating unit 15 can be integrally rotated around the axis a of the arm rotating unit 15.

A first boom rotation motor 16 'is connected to a transmission mechanism (not shown) provided inside the first boom rotation portion 16, and the first boom rotation motor 1 is connected to the first boom rotation motor 1'.
By operating 6 ′, the first boom 17 is moved relative to the first boom rotating portion 16 by the axis b of the first boom rotating portion 16.
It can be rotated around.

Further, a second boom rotation motor 18 'is connected to a transmission mechanism (not shown) provided inside the second boom rotation portion 18, and the second boom rotation motor 18' is connected. The second boom 19 can be rotated about the axis c of the second boom rotating portion 18 with respect to the second boom rotating portion 18 by operating.

A holding unit rotating motor 20 'is connected to a transmission mechanism (not shown) provided inside the holding unit rotating unit 20, and the holding unit rotating motor 20' can be operated. Thus, the holding unit 9 can be rotated with respect to the holding unit rotating unit 20 about the axis d of the holding unit rotating unit 20.

With the above structure, the unit 1 and the holding portion 9 can be moved in the three-dimensional direction by the moving mechanism M, the controller 1'for controlling the moving mechanism M, and the operating portion 6 having the CPU 5 built therein. , Operation unit 6
Since the caster 13, which is a transportation means, is also provided in itself, the unit 1 can be more easily arranged at an appropriate position with respect to the sample S.

FIG. 3 is a vertical sectional view schematically showing the construction of the unit 1 and the holding portion 9 of the fluorescent X-ray analysis apparatus D. The holding portion 9 that holds the unit 1 is a screw mechanism x that slides the unit 1 in the left-right direction (X direction) in FIG. 3.
And a screw mechanism y for sliding the unit 1 in the front-back direction (Y direction) of FIG. 3, and the unit 1 in the vertical direction (Z direction) of FIG.
And a screw mechanism z sliding direction), these three screws mechanisms x, y, motor m ₁ coupled to each screw shaft of z, m _2, m ₃ (provided that the motor m ₂ are not shown. Further, the unit 1 can be freely moved up and down and front and back and left and right by driving three motors m ₃ .

With the above structure, as shown in FIG. 4 (A), mapping is not performed only in the horizontal direction of the sample S by X-ray irradiation from above, but as shown in FIG. 4 (B), vertical mapping is performed. It can also be done in the direction. Furthermore, FIG.
As shown in (C), if the unit 1 is turned upside down,
It is also possible to perform analysis with X-ray irradiation from below.
Of course, the present invention is not limited to these, and the moving means M including the holding portion 9 and the support arm portion 14 can perform mapping corresponding to any angle.

In order to keep the distance between the sample S and the unit 1 constant, the holding unit 9 is provided with a sensor 10 for detecting the distance between the sample S and the unit 1, and three motors m ₃ , m _3, may be configured to work with m _3, also three motors m _3, m _3, m ₃ and by adjusting the respective up and down direction (Z-direction) as well, the units 1 The angle may be adjusted appropriately.

[0022]

As described above, in the fluorescent X-ray analysis apparatus of the present invention, at least a unit in which the X-ray generator, the X-ray focusing means and the X-ray detector are integrally assembled is attached to the sample. Since it can move freely in two dimensions,
It is possible to perform mapping of a sample having a large weight and difficult to move.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing the configuration of a fluorescent X-ray analysis apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view schematically showing a configuration of the fluorescent X-ray analysis apparatus.

FIG. 3 is a vertical cross-sectional view schematically showing a configuration of a unit and a holding section of the fluorescent X-ray analysis apparatus.

FIG. 4 is a diagram schematically showing a usage state of a unit of the fluorescent X-ray analysis apparatus, (A) showing a state where the unit is used downward, (B) showing a state where the unit is used sideways, C) shows the state in which the unit is used upward.

[Explanation of symbols]

1 ... Unit, 1 '... Controller, 2 ... X-ray generator,
3 ... X-ray focusing means, 4 ... X-ray detector, D ... Fluorescent X-ray analyzer, M ... moving means, S ... sample.

Claims (2)

[Claims] 1. A unit in which an X-ray generator, an X-ray focusing means, and an X-ray detector are integrally incorporated, a moving means for moving the unit in two-dimensional or three-dimensional directions, and the moving means. A fluorescent X-ray analysis apparatus comprising: a control unit for controlling. 2. The fluorescent X-ray analysis apparatus according to claim 1, further comprising a carrying means for carrying the moving means.