JP2003192491A5 - - Google Patents
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- JP2003192491A5 JP2003192491A5 JP2001368764A JP2001368764A JP2003192491A5 JP 2003192491 A5 JP2003192491 A5 JP 2003192491A5 JP 2001368764 A JP2001368764 A JP 2001368764A JP 2001368764 A JP2001368764 A JP 2001368764A JP 2003192491 A5 JP2003192491 A5 JP 2003192491A5
- Authority
- JP
- Japan
- Prior art keywords
- rod
- rotating member
- support
- silicon
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (4)
該装置が、
融液を収容するために取り付けられたルツボ、
ルツボ上に位置する引上げ機構、
引上げ機構に吊り下げられた支持体、および
回転部材を含み、
該回転部材が、
シリコンロッドを保持するのに好適な少なくとも一つのロッドホルダーおよびロッドホルダーに関して一定の位置に保持された単結晶種晶を含み、かつ
概ね水平な回転軸の周りを支持部材に関連して動くように支持体上に回転可能に設けられ、
回転部材の重心が、
少なくとも一つのシリコンロッドが回転部材に接続された場合には、ロッドホルダーが下向きに延びるような位置を回転部材が占め、回転部材にシリコンロッドが接続されていない場合には、種晶が下向きに延びるような位置を回転部材が占めるように配置された、単結晶シリコンを成長させる装置。An apparatus for growing single crystal silicon,
The device is
A crucible attached to contain the melt,
A lifting mechanism located on the crucible,
Including a support suspended from a pulling mechanism and a rotating member;
The rotating member is
Including at least one rod holder suitable for holding a silicon rod and a single crystal seed held in a fixed position with respect to the rod holder, and moving relative to the support member about a generally horizontal axis of rotation. Provided rotatably on the support,
The center of gravity of the rotating member
When at least one silicon rod is connected to the rotating member, the rotating member occupies a position where the rod holder extends downward, and when the silicon rod is not connected to the rotating member, the seed crystal faces downward. An apparatus for growing single crystal silicon, which is arranged so that the rotating member occupies the extended position.
支持体、
ロッドを保持するのに好適な少なくとも一つのロッドホルダーおよびロッドホルダーに関して一定の位置に保持された単結晶種晶を含み、概ね水平な回転軸の周りを支持部材に関連して動くように支持体上に回転可能に設けられた回転部材、および
支持体をＣＺ炉の種晶ケーブルまたはシャフトに連結して、支持体がＣＺ炉の種晶ケーブルまたはシャフトに連結された際に、回転軸が概ね水平に延び、種晶ケーブルまたはシャフトを適当に操作することによりロッド補充機構を昇降することができるようにするための取り付け具を含む、ロッド補充機構。A rod replenishment mechanism comprising:
Support,
A support comprising at least one rod holder suitable for holding the rod and a single crystal seed held in a fixed position with respect to the rod holder, and moving relative to the support member about a generally horizontal axis of rotation. The rotating member provided rotatably on the upper side, and the support are connected to the seed crystal cable or shaft of the CZ furnace, and when the support is connected to the seed crystal cable or shaft of the CZ furnace, the rotation axis is generally A rod replenishing mechanism that extends horizontally and includes a fitting to allow the rod replenishing mechanism to be raised and lowered by appropriately manipulating the seed crystal cable or shaft.
該装置が、
融液を収容するために取り付けられたルツボ、
ルツボ上に位置する引上げ機構、
引上げ機構に吊り下げられた支持体、および
回転部材を含み、
該回転部材が、
シリコンロッドを保持するのに好適な少なくとも一つのロッドホルダーおよびロッドホルダーに関して一定の位置にある単結晶種晶を含み、かつ
概ね水平な回転軸の周りを支持部材に関連して動くように支持体上に回転可能に設けられ、
回転部材の重心が、
少なくとも一つのシリコンロッドが回転部材に接続された場合には、ロッドホルダーが下向きに延びるような位置を回転部材が占め、回転部材にシリコンロッドが接続されていない場合には、種晶が下向きに延びるような位置を回転部材が占めるように配置された、単結晶シリコンを成長させる装置。An apparatus for growing single crystal silicon,
The device is
A crucible attached to contain the melt,
A lifting mechanism located on the crucible,
Including a support suspended from a pulling mechanism and a rotating member;
The rotating member is
A support comprising at least one rod holder suitable for holding a silicon rod and a single crystal seed in a fixed position relative to the rod holder and moving relative to the support member about a generally horizontal axis of rotation; Provided on the top to be rotatable,
The center of gravity of the rotating member
When at least one silicon rod is connected to the rotating member, the rotating member occupies a position where the rod holder extends downward, and when the silicon rod is not connected to the rotating member, the seed crystal faces downward. An apparatus for growing single crystal silicon, which is arranged so that the rotating member occupies the extended position.
融液を収容するために取り付けたルツボおよび炉内で物体を降下するために操作することのできる引上げ機構を有する炉を与え、
引上げ機構に吊り下げられた補充機構を与え、この際、該補充機構が支持体および回転部材を含み、該回転部材が、シリコンロッドを保持するのに好適な少なくとも一つのロッドホルダーおよびロッドホルダーに関して一定の位置にある単結晶種晶を含み、概ね水平な回転軸の周りを支持体に関連して動くように回転部材を支持体上に回転可能に設けられ、ロッド補充機構から少なくとも一つのシリコン製のロッドを吊り下げて、ロッドがルツボの上に突き出るようにし、
引上げ機構を操作して前記少なくとも一つのロッドをルツボ内に降下し、および
前記少なくとも一つのロッドが下げられている間加熱して、ロッドの少なくとも最下部を溶融させることを含む方法。A method of growing single crystal silicon, the method comprising:
Providing a furnace having a crucible attached to contain the melt and a pulling mechanism operable to lower the object in the furnace;
A replenishment mechanism suspended from a pulling mechanism, wherein the replenishment mechanism includes a support and a rotating member, the rotating member being suitable for at least one rod holder and rod holder suitable for holding a silicon rod; A rotating member is rotatably mounted on the support, including a single crystal seed crystal in a fixed position, and moves relative to the support about a generally horizontal axis of rotation, and includes at least one silicon from the rod replenishment mechanism. Hang the rod made of metal so that the rod protrudes above the crucible,
Manipulating a pulling mechanism to lower the at least one rod into the crucible and heating while the at least one rod is lowered to melt at least the lowest portion of the rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001368764A JP4046991B2 (en) | 2001-12-03 | 2001-12-03 | Rod replenishment system for the production of single crystal silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001368764A JP4046991B2 (en) | 2001-12-03 | 2001-12-03 | Rod replenishment system for the production of single crystal silicon |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003192491A JP2003192491A (en) | 2003-07-09 |
| JP2003192491A5 true JP2003192491A5 (en) | 2005-06-30 |
| JP4046991B2 JP4046991B2 (en) | 2008-02-13 |
Family
ID=27590741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001368764A Expired - Fee Related JP4046991B2 (en) | 2001-12-03 | 2001-12-03 | Rod replenishment system for the production of single crystal silicon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4046991B2 (en) |
-
2001
- 2001-12-03 JP JP2001368764A patent/JP4046991B2/en not_active Expired - Fee Related
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