JP2003188227A5 - - Google Patents
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- JP2003188227A5 JP2003188227A5 JP2002315860A JP2002315860A JP2003188227A5 JP 2003188227 A5 JP2003188227 A5 JP 2003188227A5 JP 2002315860 A JP2002315860 A JP 2002315860A JP 2002315860 A JP2002315860 A JP 2002315860A JP 2003188227 A5 JP2003188227 A5 JP 2003188227A5
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- JP
- Japan
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/016610 | 2001-10-30 | ||
US10/016,610 US6821082B2 (en) | 2001-10-30 | 2001-10-30 | Wafer management system and methods for managing wafers |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003188227A JP2003188227A (ja) | 2003-07-04 |
JP2003188227A5 true JP2003188227A5 (ja) | 2005-12-15 |
JP4370086B2 JP4370086B2 (ja) | 2009-11-25 |
Family
ID=21778026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002315860A Expired - Fee Related JP4370086B2 (ja) | 2001-10-30 | 2002-10-30 | ウェーハ管理システムおよびウェーハ管理方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US6821082B2 (ja) |
JP (1) | JP4370086B2 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6761085B1 (en) * | 2002-02-06 | 2004-07-13 | Novellus Systems Incorporated | Method and apparatus for damping vibrations in a semiconductor wafer handling arm |
JP4096359B2 (ja) * | 2003-03-10 | 2008-06-04 | セイコーエプソン株式会社 | 製造対象物の製造装置 |
US6990721B2 (en) * | 2003-03-21 | 2006-01-31 | Brooks Automation, Inc. | Growth model automated material handling system |
US6931303B2 (en) * | 2003-10-02 | 2005-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated transport system |
JP4490124B2 (ja) * | 2004-01-23 | 2010-06-23 | セイコーエプソン株式会社 | 搬送状況提示システムおよび方法、プログラム並びに情報記憶媒体 |
DE102004057754B4 (de) * | 2004-11-30 | 2007-08-09 | Steag Hama Tech Ag | Verfahren und Vorrichtung zum Behandeln von ein Innenloch aufweisenden Substratscheiben |
JP4666213B2 (ja) * | 2005-07-05 | 2011-04-06 | 株式会社ダイフク | 物品収納設備 |
US20070201967A1 (en) * | 2005-11-07 | 2007-08-30 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
KR20140091768A (ko) | 2005-11-07 | 2014-07-22 | 브룩스 오토메이션 인코퍼레이티드 | 반도체 작업대상물 공정처리 시스템 |
US8267634B2 (en) * | 2005-11-07 | 2012-09-18 | Brooks Automation, Inc. | Reduced capacity carrier, transport, load port, buffer system |
US20080107507A1 (en) * | 2005-11-07 | 2008-05-08 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
WO2007114293A1 (ja) * | 2006-03-31 | 2007-10-11 | Youthengineering Co., Ltd. | ウエハー用保管庫及びその保管制御方法 |
JP2007317944A (ja) * | 2006-05-26 | 2007-12-06 | Toshiba Corp | 局所クリーン化ロボット搬送工場及びロボット搬送式製造方法 |
CN101578700B (zh) | 2006-08-18 | 2012-11-14 | 布鲁克斯自动化公司 | 容量减少的载物台,传送,装载端口,缓冲系统 |
JP4670808B2 (ja) * | 2006-12-22 | 2011-04-13 | ムラテックオートメーション株式会社 | コンテナの搬送システム及び測定用コンテナ |
DE102007035836B4 (de) * | 2007-07-31 | 2017-01-26 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Zweidimensionale Transferstation, die als Schnittstelle zwischen einer Prozessanlage und einem Transportsystem dient, und Verfahren zum Betreiben der Station |
CN104979232B (zh) * | 2014-04-02 | 2017-09-22 | 中芯国际集成电路制造(上海)有限公司 | 晶圆传送盒的存储方法及实现晶圆传送盒存储的系统 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4178113A (en) * | 1977-12-05 | 1979-12-11 | Macronetics, Inc. | Buffer storage apparatus for semiconductor wafer processing |
US4293249A (en) * | 1980-03-03 | 1981-10-06 | Texas Instruments Incorporated | Material handling system and method for manufacturing line |
US5536128A (en) * | 1988-10-21 | 1996-07-16 | Hitachi, Ltd. | Method and apparatus for carrying a variety of products |
US5668056A (en) * | 1990-12-17 | 1997-09-16 | United Microelectronics Corporation | Single semiconductor wafer transfer method and manufacturing system |
ES2078718T3 (es) * | 1992-08-04 | 1995-12-16 | Ibm | Estructuras de cadenas de fabricacion a base de transportadores totalmente automatizados e informatizados adaptados a recipientes transportables estancos a presion. |
US6157866A (en) * | 1997-06-19 | 2000-12-05 | Advanced Micro Devices, Inc. | Automated material handling system for a manufacturing facility divided into separate fabrication areas |
DE59706043D1 (de) * | 1997-07-28 | 2002-02-21 | Infineon Technologies Ag | Transportsystem und Verfahren zur Steuerung des Transportsystems |
JPH11121582A (ja) * | 1997-10-15 | 1999-04-30 | Mitsubishi Electric Corp | 半導体ウェハ製造設備制御方法および半導体ウェハ製造設備 |
US6223886B1 (en) * | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
US6016611A (en) * | 1998-07-13 | 2000-01-25 | Applied Komatsu Technology, Inc. | Gas flow control in a substrate processing system |
DE19922936B4 (de) * | 1999-05-19 | 2004-04-29 | Infineon Technologies Ag | Anlage zur Bearbeitung von Wafern |
US6354781B1 (en) * | 1999-11-01 | 2002-03-12 | Chartered Semiconductor Manufacturing Company | Semiconductor manufacturing system |
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2001
- 2001-10-30 US US10/016,610 patent/US6821082B2/en not_active Expired - Fee Related
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2002
- 2002-10-30 JP JP2002315860A patent/JP4370086B2/ja not_active Expired - Fee Related