JP2003188225A - Apparatus and method for raising and lowering work, semiconductor-manufacturing apparatus, and semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a work-raising/lowering apparatus that prevents deviation in a pitch, and further has a wide range of operating temperatures. <P>SOLUTION: A support nib 3, where a catch tool 2 for retaining a work 1 is mounted, is rotatably composed. Additionally, a feed nib 4, where the catch tool 2 is mounted similarly is composed so that the feed nib 4 can be rotated and at the same time, can be moved vertically. Cams 5a to 5d are used for synchronizing the support nib 3 with the feed nib 4, and at the same time, the work 1 is conveyed sequentially. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work lifting device used in a buffer mechanism or the like.

[0002]

2. Description of the Related Art FIG. 27 is a front view showing a work lifting device used in a conventional buffer mechanism or the like. In the drawing, 21 is a work to be conveyed and 22 is a work 21.
Is a work receiver for holding the work, and 23 is an infinite circulation mechanism including a pair of chains and the like to which the work 21 is fixed and which is rotated by a drive source (not shown).

Next, the operation will be described. The work 21 is normally moved up and down in the Y direction in the figure by the infinite circulation mechanism 23 that is rotated by a drive source (not shown).

[0004]

Since the conventional work lifting device has the above-described structure, as shown in FIG. 28, the pitch shift occurs due to the infinite circulation mechanism 23 extending in an abnormal state. There was a problem. There is also a problem that the operating temperature range of the chain or the like used in the infinite circulation mechanism 23 becomes narrow.

The present invention has been made in order to solve the above-mentioned problems. It does not cause pitch deviation, has a wide applicable temperature range, can be manufactured at low cost, and does not require a large space. An object is to provide a lifting device.

[0006]

According to a first aspect of the present invention, there is provided a work lifting device including a support for holding a work, a support pawl rotatably supported, and a support for holding the work. It is provided with a feed claw that is attached and is movable in the rotation direction and the vertical direction, and a cam unit that rotates and vertically moves the support claw and the feed claw.

A semiconductor manufacturing apparatus according to a second aspect of the present invention uses the work lifting device according to the first aspect.

A semiconductor device according to claim 3 of the present invention is
It is manufactured by the semiconductor manufacturing apparatus according to claim 2.

According to a fourth aspect of the present invention, there is provided a method for raising and lowering a work by the work raising and lowering device according to the first aspect, in which the feed claw is raised and the work is held by a receiver attached to the feed claw. And the supporting claw 90 °
The process comprises the steps of rotating and lowering the feed claw, and rotating the support claw again to return it to its original state and holding the work in a receiving tool attached to the support claw.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1. An embodiment of the present invention will be described below with reference to the drawings. 1 is a perspective view showing a work lifting device in a buffer mechanism or the like according to a first embodiment of the present invention. In the drawing, 1 is a work to be lifted, 2 is a holder for holding the work 1, 3 Is provided with a plurality of receivers 2 for holding the work 1, four support claws rotatably supported in the θ direction in the drawing, and 4 is provided with a plurality of the receivers 2 for holding the work 1. Of the four feed pawls 5 that can be moved up and down in the Y direction while being rotated in the θ direction, 5 is a cam unit for driving the support pawls 3 and the feed pawls 4 in synchronization, and 5a is a feed pawl 4 For moving the feed claw 4 up and down, 5b for rotating the feed claw 4, 5c for rotating the support claw 3, 5d
Is a cam for moving the feed claw 4 up and down. or,
Reference numeral 6 is a drive motor for driving the cam unit 5.

FIG. 2 is a perspective view for explaining the cam drive, and 7 is a rail on which the work 1 is placed. The work lifting device according to the present invention is composed of a link mechanism as shown in FIG. 2, but the illustrated one is an example, and the invention is not limited to such a structure, and any conventional device can be used. It may be something like this. The operation is also similar to the operation of the conventional link mechanism.

Next, the operation will be described. 3 to 13
Shows the process until the second work 1 is loaded.
Further, FIG. 14 is a diagram showing a time chart of the cam unit 5, in which the horizontal axis represents the rotation angle of each cam and the vertical axis represents the displacement amount. Figure 3 shows the initial state,
It shows a state before the work 1 is loaded. Next in FIG.
Shows the state where the first work 1 is loaded and the work 1 is placed on the rail 7. Next, in FIG.
With the rail 7 receiving the work 1, the feed claw 4 rotates 90 degrees, and the work 1 is not received.

Next, as shown in FIG. 6, the feed claw 4 moves up and is stopped at the stationary point 2 (see FIG. 14). Next, as shown in FIG. 7, the feed claw 4 is rotated from 90 degrees to 0 degrees and is in a state of receiving the work 1. Next, as shown in FIG. 8, the feed claw 4 is raised to the upper limit position and is in a state of receiving the work 1. Next, as shown in FIG. 9, with the feed claw 4 receiving the work 1, the rail 7 opens and the support claw 3 moves to 9
It rotates from 0 degree to 0 degree, and the work 1 is not received.

Next, as shown in FIG. 10, the feed claw 4 is lowered to the stationary point 1 (see FIG. 14) while receiving the work 1. Next, as shown in FIG. 11, the rail 7 is closed, the support claw 3 is rotated 90 degrees to return to the original state, and the work 1 can be received. Next, as shown in FIG.
The feed claw 4 descends to the bottom while receiving the work 1,
The work 1 is lowered by one step. Finally, as shown in FIG. 13, the second work 1 is loaded and placed on the rail 7.

15 to 25, the second to tenth sheets are used.
The work input up to the first sheet will be described. First, as shown in FIG. 15, the second work 1 is loaded and the work 1 is placed on the rail 7. Next, as shown in FIG.
With the support claw 3 receiving the first work piece 1, the feed claw 4
Rotates 90 degrees and the work 1 is not received. Next, as shown in FIG. 17, the feed claw 4 moves up and is stopped at the stationary point 2 (see FIG. 14).

Next, as shown in FIG.
It rotates from 0 to 0 degrees and returns to its original state, and is ready to receive the work 1. Next, as shown in FIG. 19, the feed claw 4 is raised to the upper limit position and is in a state of receiving the work 1. Next, as shown in FIG. 20, with the feed claw 4 receiving the work 1, the rail 7 is opened, the support claw 3 rotates from 90 degrees to 0 degree, and the work 1 is not received. Next, as shown in FIG. 21, while the feed claw 4 receives the work 1, the stationary point 1
(See FIG. 14).

Next, as shown in FIG. 22, the rail 7 is closed, the support claw 3 is rotated 90 degrees and returned to the original state, and the work 1 can be received. Next, as shown in FIG. 23, the feed claw 4 is lowered to the lowermost stage while receiving the work 1 and the work 1 is lowered one stage. Next, as shown in FIG. 24, the third work 1 is loaded and placed on the rail 7. After that, by repeating the above operation, the work 1 is sequentially lowered, and finally the work 1 is moved to the position shown in FIG.
The state becomes as shown in.

As described above, the work lifting device is constituted by the support claw 3 which operates only in a plurality of rotation directions and the feed claw 4 which operates in the rotation direction as well as in the vertical direction, and is mounted on a single shaft. Since the work 1 is conveyed while the support claw 3 and the feed claw 4 are synchronized with each other by using the cams 5a to 5d, the conventional pitch deviation or the like does not occur,
The work 1 can be stably conveyed. Also, since it is a cam drive, it can be used in a wider temperature range, and since the direct motion of the box motion used in the feed mechanism is replaced by rotation, the device can be made smaller and lighter in weight.
The device can be constructed at low cost.

Embodiment 2. FIG. 26 is a schematic configuration diagram showing various manufacturing apparatuses according to the second embodiment using the above-described work lifting device. In the figure, 1 is a work, 8 is an inloader for loading the work 1, 9 is an outloader for discharging the work 1, 10 is a magazine for storing the work 1, 11 is a semiconductor test unit, a laser mark unit, Reference numeral 12 denotes the work elevating device shown in the first embodiment, which includes a visual inspection section, various processing sections including a press (die) section, a welding section, and the like.

Next, the operation will be described. Inloader 8
The workpieces 1 loaded in 1 are stored in the magazine 10, and the stored workpieces 1 are conveyed one by one by the workpiece elevating device 12. The workpiece 1 that has been conveyed has various processing units 11
Desired processing is done with, and it is paid out to the outloader 9,
Stored in magazine 10.

As described above, as the work lifting device 12,
By using the work elevating mechanism shown in the first embodiment, the pitch deviation unlike the conventional one is less likely to occur, and the operating temperature range is widened. Further, the size and weight of the device can be reduced, and the device can be inexpensively constructed. Various semiconductor devices can be manufactured by adopting a semiconductor manufacturing apparatus using such a work lifting device 12.

[0022]

According to the work elevating apparatus of the first aspect of the present invention, the receiving tool for holding the work is attached, and the supporting claw rotatably supported and the receiving tool for holding the work are attached. At the same time, since the feed claw that can move in the rotation direction and the vertical direction and the cam unit that rotates and vertically moves the support claw and the feed claw are provided, the usable temperature range is widened, and the overall size of the apparatus is reduced. The weight can be reduced and the device can be constructed at low cost.

According to the semiconductor manufacturing apparatus of the second aspect of the present invention, since the work lifting apparatus of the first aspect is used, the semiconductor can be stably manufactured.

According to the semiconductor device of the third aspect of the present invention, since it is manufactured by the semiconductor manufacturing apparatus of the second aspect, a semiconductor device of excellent quality can be obtained.

According to a fourth aspect of the present invention, there is provided a work raising / lowering method using the work raising / lowering device according to the first aspect of the present invention, wherein the feed claw is raised and the work is mounted on a receiver attached to the feed claw. And a step of rotating the support claw 90 ° and lowering the feed claw,
Since the supporting claw is rotated again to return it to the original state and the work is held by the receiving tool attached to the supporting claw, a pitch deviation as in the conventional case does not occur and stable work transfer is possible. .

[Brief description of drawings]

FIG. 1 is a perspective view showing a work lifting device according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a cam unit portion.

FIG. 3 is a perspective view showing a work lifting method using a work lifting device.

FIG. 4 is a perspective view showing a method of raising and lowering a work by a work raising and lowering device.

FIG. 5 is a perspective view showing a work lifting method by the work lifting device.

FIG. 6 is a perspective view showing a work lifting method by the work lifting device.

FIG. 7 is a perspective view showing a work lifting method by the work lifting device.

FIG. 8 is a perspective view showing a work lifting method by the work lifting device.

FIG. 9 is a perspective view showing a work lifting method by the work lifting device.

FIG. 10 is a perspective view showing a work lifting method by the work lifting device.

FIG. 11 is a perspective view showing a work lifting method by the work lifting device.

FIG. 12 is a perspective view showing a work lifting method by the work lifting device.

FIG. 13 is a perspective view showing a work lifting method by the work lifting device.

FIG. 14 is a diagram showing a time chart of the cam unit.

FIG. 15 is a perspective view showing a work lifting method by the work lifting device.

FIG. 16 is a perspective view showing a work lifting method by the work lifting device.

FIG. 17 is a perspective view showing a work lifting method by the work lifting device.

FIG. 18 is a perspective view showing a work lifting method by the work lifting device.

FIG. 19 is a perspective view showing a work lifting method by the work lifting device.

FIG. 20 is a perspective view showing a work lifting method by the work lifting device.

FIG. 21 is a perspective view showing a work lifting method by the work lifting device.

FIG. 22 is a perspective view showing a work lifting method by the work lifting device.

FIG. 23 is a perspective view showing a work lifting method by the work lifting device.

FIG. 24 is a perspective view showing a method of raising and lowering a work by the work raising and lowering device.

FIG. 25 is a perspective view showing a work lifting method by the work lifting device.

FIG. 26 is a schematic configuration diagram showing a semiconductor manufacturing apparatus according to a second embodiment of the present invention.

FIG. 27 is a front view showing a conventional work lifting device.

FIG. 28 is a front view showing a conventional work lifting device.

[Explanation of symbols]

1 work, 2 receiving tool, 3 supporting claw, 4 feeding claw, 5
Cam unit.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shinji Senba             2-3 2-3 Marunouchi, Chiyoda-ku, Tokyo             Inside Ryo Electric Co., Ltd. F-term (reference) 5F031 CA04 DA01 FA02 FA07 FA11                       FA14 GA60 LA11

Claims (4)

[Claims] 1. A work elevating device for elevating and lowering a work, wherein a receiver for holding the work is attached, and a support claw rotatably supported and a receiver for holding the work are attached. At the same time, a work lifting device is provided, which is provided with a feed claw that can move in a rotation direction and a vertical direction, and a cam unit that rotates and vertically moves the support claw and the feed claw. 2. A semiconductor manufacturing apparatus using the work lifting device according to claim 1. 3. A semiconductor device manufactured by the semiconductor manufacturing apparatus according to claim 2. 4. A method of raising and lowering a work by the work raising and lowering device according to claim 1, wherein the step of raising the feed claw and holding the work in a receiver attached to the feed claw,
A step of rotating the support claw 90 ° and lowering the feed claw, and a step of rotating the support claw again to return it to its original state and holding the work in a receiver attached to the support claw. Work lifting method characterized by.