KR102706681B1 - Substrate Deposition System - Google Patents

Abstract

The present invention relates to a substrate deposition system, and more particularly, to a substrate deposition system which can configure a plurality of deposition process lines through a single substrate deposition system by transporting substrates to a plurality of deposition units with a time difference while maintaining a vacuum and simultaneously performing a deposition process with a time difference, thereby improving the efficiency of the substrate deposition process.
The component forming the substrate deposition system of the present invention is characterized in that it comprises, in the substrate deposition system, a loading magazine for loading substrates that are deposition targets, an unloading magazine for loading substrates on which deposition has been completed, at least one deposition unit for receiving the substrates that are deposition targets and performing a deposition process, and a transfer unit for performing an operation of transferring the substrates loaded in the loading magazine to the at least one deposition unit, and for performing an operation of transferring the substrates on which deposition has been completed in the at least one deposition unit to the unloading magazine.

Description

Substrate Deposition System

The present invention relates to a substrate deposition system, and more particularly, to a substrate deposition system which can configure a plurality of deposition process lines through a single substrate deposition system by transporting substrates to a plurality of deposition units with a time difference while maintaining a vacuum and simultaneously performing a deposition process with a time difference, thereby improving the efficiency of the substrate deposition process.

Substrate deposition systems are known from the prior art. During the production of wafers, solar cells, printed circuit boards or other flat substrates or during the performance of various processes such as deposition processes on the substrates, the substrates are stored in substrate magazines for temporary storage or transport (movement, transfer), and then the substrates stored in the magazines are transferred to a process chamber via a transfer unit and then subjected to the corresponding process such as deposition processes.

In relation to such a substrate transfer and/or deposition process system, Korean Patent No. 10-2398568 (hereinafter referred to as “prior art document”) proposes a substrate transfer system including: a plurality of sub-transfer devices which distribute first substrates from a first magazine containing first substrates on which subsequent processes are to be performed to a plurality of empty second magazines and move the second magazines containing the first substrates to a plurality of corresponding process facilities, respectively; and a main transfer device which moves the first magazine supplied from the outside to a corresponding sub-transfer device among the plurality of sub-transfer devices.

However, the above prior art document suggests a configuration in which a process for substrates is performed using multiple process facilities, but ultimately only one magazine and one process facility correspond one-to-one to perform the process for the substrates. The process efficiency for substrates related to such prior art document has a disadvantage in that the process efficiency is lower than when the substrates are transported to multiple process facilities through one magazine to perform the process for the substrates.

Meanwhile, since a general substrate magazine applied to a substrate transport and/or deposition system adopts a structure capable of loading substrates on only one side, it cannot exert the advantages of a substrate magazine adopting a structure capable of loading substrates on multiple sides. That is, among the four sides corresponding to the periphery of a general magazine applied to an existing substrate deposition system, a substrate can only be loaded on one side, and the substrate cannot be loaded using all four sides. Therefore, the number of substrates that can be loaded into the magazine is inevitably limited to a small number, and there is a disadvantage in that the advantages that can be obtained by loading and/or unloading substrates from various directions cannot be obtained.

Republic of Korea Patent No. 10-2398568 (Publication date: May 17, 2022, Title of invention: Substrate transport system)

The present invention has been created to solve the problems of the prior art as described above, and the purpose of the present invention is to provide a substrate deposition system in which a plurality of deposition process lines can be configured through a single substrate deposition system by transporting substrates to a plurality of deposition units with time differences while maintaining a vacuum and simultaneously performing a deposition process with time differences, thereby improving the efficiency of the substrate deposition process.

In order to solve the above-described problem, the present invention provides a substrate deposition system, comprising: a loading magazine for loading substrates as deposition targets; an unloading magazine for loading substrates on which deposition has been completed; at least one deposition unit for receiving the substrates as deposition targets and performing a deposition process; and a transfer unit for performing an operation of transferring the substrates loaded in the loading magazine to the at least one deposition unit and for performing an operation of transferring the substrates on which deposition has been completed in the at least one deposition unit to the unloading magazine.

Here, the substrates loaded in the loading magazine are characterized in that they are all transferred to one deposition unit by the transfer unit or are distributed and transferred to at least two deposition units.

Here, when the substrates loaded in the loading magazine are all transferred to a specific deposition unit by the transfer unit, the transfer unit is characterized in that it transfers all the substrates that are deposition targets newly loaded in the loading magazine to another deposition unit while the specific deposition unit performs a deposition process.

In addition, when the substrates loaded in the loading magazine are distributed and transferred to at least two deposition units by the transfer unit, the transfer unit is characterized in that it performs an operation of transferring the substrate to a specific deposition unit among the at least two deposition units, and then transferring the substrate to another deposition unit when the specific deposition unit starts performing a deposition process.

In addition, the present invention is characterized by further comprising a loading buffer unit for loading a substrate to be deposited from the outside into the loading magazine, and an unloading buffer unit for unloading a substrate on which deposition has been completed from the unloading magazine to the outside.

In addition, the loading magazine and the unloading magazine are configured to include a fixed plate arranged flatly, a cassette arranged to be able to be lifted and rotated on the upper side of the fixed plate, an elevating means arranged on the lower side of the fixed plate to lift the cassette, and a rotating means arranged on the lower side of the fixed plate to rotate the cassette, and the cassette is characterized in that it is configured to be able to load substrates on at least two sides out of four sides.

According to the substrate deposition system of the present invention having the above-mentioned tasks and solutions, since the substrates are transferred to a plurality of deposition units with a time difference while maintaining a vacuum and the deposition process is performed with a time difference, a plurality of deposition process lines can be configured through a single substrate deposition system, and thereby, the advantage of improving the efficiency of the substrate deposition process is generated.

FIG. 1 is a first configuration diagram of a substrate deposition system according to an embodiment of the present invention.
FIG. 2 is a second configuration diagram of a substrate deposition system according to an embodiment of the present invention.
FIGS. 3 and 4 are perspective and plan views of a third configuration arrangement of a substrate deposition system according to an embodiment of the present invention.
FIG. 5 is a perspective view of a loading magazine constituting a substrate deposition system according to an embodiment of the present invention.
FIGS. 6 and 7 are perspective views viewed from different directions with the side plates, etc. of the loading magazine constituting the substrate deposition system according to an embodiment of the present invention removed.
FIG. 8 is a cross-sectional view of a loading magazine constituting a substrate deposition system according to an embodiment of the present invention with the side plate, etc., removed.
FIG. 9 is a cross-sectional view of a loading magazine constituting a substrate deposition system according to an embodiment of the present invention.
Figure 10 is an enlarged view of a portion of Figure 9.
FIG. 11 is a perspective view of a cassette raised in a loading magazine constituting a substrate deposition system according to an embodiment of the present invention.
FIG. 12 is a cross-sectional view of a cassette raised in a loading magazine constituting a substrate deposition system according to an embodiment of the present invention.

Hereinafter, with reference to the attached drawings, a preferred embodiment of a substrate deposition system according to the present invention having the above-described tasks, solutions, and effects will be described in detail.

The present invention can be modified in various ways and has various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention and the methods for achieving them will become clear with reference to the embodiments described in detail below together with the drawings. However, the present invention is not limited to the embodiments disclosed below, and can be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same drawing reference numerals and redundant descriptions thereof are omitted.

In the examples below, terms such as “include” or “have” mean that a feature or component described in the specification is present, and do not exclude in advance the possibility that one or more other features or components may be added.

In the drawings, the sizes of components may be exaggerated or reduced for convenience of explanation. For example, the sizes and thicknesses of each component shown in the drawings are arbitrarily shown for convenience of explanation, and therefore the present invention is not necessarily limited to what is shown.

In some embodiments, where the implementation is otherwise feasible, a particular order of operations may be performed in a different order than the order described. For example, two operations described in succession may be performed substantially simultaneously, or in a reverse order from the order described.

FIG. 1 is a first configuration layout diagram of a substrate deposition system according to an embodiment of the present invention, FIG. 2 is a second configuration layout diagram of a substrate deposition system according to an embodiment of the present invention, and FIGS. 3 and 4 are a perspective view and a plan view of a third configuration layout of a substrate deposition system according to an embodiment of the present invention.

As illustrated in FIGS. 1 to 4, a substrate deposition system (200) according to an embodiment of the present invention relates to a system for various processes for a substrate, particularly a deposition process, and comprises a loading magazine (100) for loading substrates as deposition targets, an unloading magazine (110) for loading substrates on which deposition has been completed, at least one deposition unit (190) for receiving the substrates as deposition targets and performing a deposition process, and a transfer unit (170) for performing an operation of transferring the substrates loaded in the loading magazine (100) to the at least one deposition unit (190), and performing an operation of transferring the substrates on which deposition has been completed in the at least one deposition unit (190) to the unloading magazine (110).

Meanwhile, the substrate deposition system (200) according to an embodiment of the present invention may further include a loading buffer unit (130) for loading a substrate to be deposited from the outside into the loading magazine (100) and an unloading buffer unit (150) for unloading a substrate whose deposition has been completed from the unloading magazine (110) to the outside.

The loading magazine (100) and the unloading magazine (110) have the same configuration and the same operation. However, the loading magazine (100) is provided in front of the transfer unit (170) on the substrate movement path to receive and load substrates to be deposited, and the unloading magazine (110) is provided in the rear of the transfer unit (170) on the substrate movement path to receive and load substrates on which deposition has been completed from the deposition unit (190).

Specifically, the loading magazine (100) performs an operation of receiving and loading substrates that are deposition targets from the outside or from a loading buffer unit (130). The loading magazine (100) performs an operation of loading substrates that are delivered in various ways. For example, a worker may directly load a substrate into the loading magazine (100), or the loading buffer unit (130) may bring a substrate from the outside and load the substrate into the loading magazine (100).

The loading magazine (100) above has a structure capable of loading substrates not only on one side but also on at least two sides. That is, the loading magazine (100) has a structure capable of loading substrates on at least two sides, and thus, compared to a magazine capable of loading substrates on only one side, it can load relatively more substrates, thereby improving substrate process efficiency. The configuration and operation of such a loading magazine (100) will be described later.

The substrates loaded in the loading magazine (100) are transferred to at least one deposition unit (190) by the transfer unit (170). It is preferable that a vacuum state be maintained during the process of transferring the substrates from the loading magazine (100) to the at least one deposition unit (190) by the transfer unit (170). Therefore, when all the substrates are loaded into the loading magazine (100), a process of switching the inside of the loading magazine (100) to a vacuum state is performed, and also, while the inside of the transfer unit (170) and the corresponding deposition unit (190), which is a transfer target, are also maintained in a vacuum state, the transfer unit (170) performs an operation of transferring the substrates, which are deposition targets, loaded in the loading magazine (100) to the corresponding deposition unit (190), which is a transfer target.

Meanwhile, the unloading magazine (110) performs an operation of receiving and loading substrates on which deposition has been completed. The substrates on which deposition has been completed loaded into the unloading magazine (110) are removed in various ways. For example, a worker may directly remove the substrates on which deposition has been completed loaded into the unloading magazine (110), or the unloading buffer unit (150) may sequentially bring the substrates on which deposition has been completed loaded into the unloading magazine (110) and remove them to the outside.

The above unloading magazine (110) has a structure that can load substrates not only on one side but also on at least two sides, similar to the loading magazine (100). That is, the unloading magazine (110) has a structure that can load substrates on at least two sides, and thus, can load relatively more substrates compared to a magazine that can load substrates on only one side, thereby improving substrate process efficiency. The configuration and operation of the unloading magazine (110) are the same as those of the loading magazine (100) described below.

The substrates on which deposition is completed in the at least one deposition unit (190) are transferred to the unloading magazine (110) by the transfer unit (170). It is preferable that a vacuum state be maintained during the process of transferring the substrates from the at least one deposition unit (190) to the unloading magazine (110) by the transfer unit (170). Therefore, before taking out the substrates on which deposition is completed in the at least one deposition unit (190), a process of maintaining a vacuum state or switching the inside of the unloading magazine (110) to a vacuum state is performed, and also, while the inside of the transfer unit (170) and the deposition unit (190) that has completed the deposition process for the substrate is also maintained in a vacuum state, the transfer unit (170) performs an operation of transferring the substrates on which deposition is completed from the deposition unit (190) that has completed the deposition process to the unloading magazine (110).

The above at least one deposition unit (190) receives the substrates that are deposition targets and performs a deposition process. The deposition unit (190) applied to the present invention is not composed of one, but is composed of at least one, particularly a plurality of units. However, it is preferable that the deposition units (190) composed of a plurality of units perform the deposition process with a time difference from each other.

The at least one deposition unit (190) receives substrates to be deposited from one loading magazine (100) with a time difference by the transfer unit (170) and performs a deposition process with a time difference. In addition, the substrates that have been deposited with a time difference in the at least one deposition unit (190) are transferred to one unloading magazine (110) with a time difference by the transfer unit (170). Therefore, a plurality of substrate deposition process lines can be configured through one substrate deposition system, and through this, the deposition process efficiency for the substrate can be improved.

The above transfer unit (170) performs an operation of transferring substrates loaded in the loading magazine (100) to at least one deposition unit (190), and performs an operation of transferring substrates on which deposition has been completed in the at least one deposition unit (190) to the unloading magazine (110).

Specifically, the transfer unit (170) performs an operation of transferring substrates loaded in one loading magazine (100) to at least one deposition unit (190) with a time difference, and performs an operation of transferring substrates on which deposition has been completed in at least one deposition unit (190) to one unloading magazine (110) with a time difference.

In the process of transferring a substrate to be deposited from the loading magazine (100) to the at least one deposition unit (190) by the transfer unit (170), the internal spaces of each of the loading magazine (100), the transfer unit (170), and the deposition unit (190) can be maintained in a vacuum state. In addition, in the process of transferring a substrate on which deposition has been completed from the at least one deposition unit (190) to the unloading magazine (110), the internal spaces of each of the unloading magazine (110), the transfer unit (170), and the deposition unit (190) can be maintained in a vacuum state.

Even if each deposition unit (190) performs a deposition process on a large number of substrates, since the loading magazine (100) can load a large number of substrates, the substrates to be deposited loaded in the loading magazine (100) by the transfer unit (170) can be transferred to one deposition unit (190) so that the deposition process can be performed. In addition, since the loading magazine (100) can load a large number of substrates, in some cases, the substrates to be deposited loaded in the loading magazine (100) by the transfer unit (170) can be distributed and transferred to at least two or more deposition units (190) so that the deposition process can be performed in each deposition unit (190).

That is, the substrates loaded in the loading magazine (100) are all transferred to one deposition unit (190) by the transfer unit (170) or are distributed and transferred to at least two deposition units (190).

In the case where the substrates loaded in the loading magazine (100) are all transferred to one deposition unit (190) by the transfer unit (170), the loading magazine (100) performs an operation of newly loading the substrates to be transferred to another deposition unit (190) when all of the loaded deposition target substrates are transferred, and the substrates to be transferred to the loading magazine (100) are all transferred to the other deposition unit (190) by the transfer unit (170). This transfer process is sequentially performed for a plurality of deposition units (190).

That is, when the substrates loaded in the loading magazine (100) are all transferred to a specific deposition unit (190) by the transfer unit (170), the transfer unit (170) performs an operation of transferring all the substrates that are deposition targets newly loaded in the loading magazine (100) to another deposition unit (190) while the specific deposition unit (190) performs a deposition process.

Specifically, when the substrates to be deposited loaded in the loading magazine (100) are all transferred to a specific deposition unit (190) by the transfer unit (170) and the deposition process starts, the substrates to be deposited are newly loaded in the loading magazine (100), and the substrates to be deposited newly loaded in the loading magazine (100) are all transferred to another deposition unit (190) by the transfer unit (170) to perform the deposition process. This process is repeatedly performed when it is desired to perform the deposition process on the substrate through another deposition unit (190) or a deposition unit (190) that has completed the deposition process.

Meanwhile, when the substrates loaded in the loading magazine (100) are not all transferred to one specific deposition unit (190) by the transfer unit (170), but are distributed and transferred to at least two or more deposition units (190), the transfer unit (170) performs an operation of transferring the substrate to a specific deposition unit (190) among the at least two deposition units (190), and then transferring the substrate to another deposition unit (190) when the specific deposition unit (190) starts performing the deposition process.

That is, since the loading magazine (100) can load a large amount of substrates to be deposited at a time, the substrates loaded in the loading magazine (100) can be distributed to a plurality of deposition units (190) by the transfer unit (170) to perform a deposition process. In this case, the transfer unit (170) transfers some of the substrates to be deposited loaded in the loading magazine (100) to a specific deposition unit (190) among the plurality of deposition units (190), and then, when the deposition process starts in the specific deposition unit (190), it performs an operation of transferring some or all of the substrates to be deposited remaining in the loading magazine (100) to other deposition units (190). Through this process, the deposition processes performed in each deposition unit (190) can be performed without mutual interference and without adversely affecting the deposition efficiency.

Meanwhile, since the substrate deposition system (100) according to the present invention is configured with one unloading magazine (110) corresponding to the loading magazine (100), the unloading magazine (110) receives substrates on which deposition has been completed from one deposition unit (190) by the transfer unit (170), loads them, and then unloads them, or sequentially receives substrates on which deposition has been completed from a plurality of deposition units (190), loads them, and then unloads them. That is, the substrates loaded into the unloading magazine (100) are transferred from one deposition unit (190) by the transfer unit (170), loaded, and then unloaded, or transferred from at least two deposition units (190), gathered, and then unloaded.

Meanwhile, it is preferable that the substrate deposition system (100) according to the present invention further includes a loading buffer unit (130) for loading a substrate to be deposited from the outside into the loading magazine (100), as described above, and an unloading buffer unit (150) for unloading a substrate on which deposition has been completed from the unloading magazine (110) to the outside.

Specifically, a worker may load substrates to be deposited into the loading magazine (100) and remove substrates that have been deposited and loaded into the unloading magazine (110). However, in order to achieve automation of the substrate deposition system and improve process efficiency, it is preferable to further include a loading buffer unit (130) and an unloading buffer unit (150) equipped with a robot hand.

Meanwhile, it is preferable that the arrangement of the loading buffer unit (130), the loading magazine (100), the transfer unit (170), the at least one deposition unit (190), the unloading magazine (110), and the unloading buffer unit (150) constituting the substrate deposition system (100) according to the present invention be configured so as to minimize the required area and optimize the layout. Accordingly, rather than all of the components constituting the substrate deposition system (100) according to the present invention being arranged in a row, the components may be arranged in a lateral direction or in an opposite direction with respect to a specific direction.

Hereinafter, the configuration and operation of the loading magazine (100) constituting the substrate deposition system according to an embodiment of the present invention will be described in detail. Meanwhile, since the unloading magazine (110) has the same configuration and operation as the loading magazine (100), the configuration and operation of the loading magazine (100) described below are applied identically.

FIG. 5 is a perspective view of a loading magazine constituting a substrate deposition system according to an embodiment of the present invention, FIGS. 6 and 7 are perspective views of the loading magazine constituting the substrate deposition system according to an embodiment of the present invention when viewed from different directions with side plates, etc. removed, FIG. 8 is a cross-sectional view of the loading magazine constituting the substrate deposition system according to an embodiment of the present invention with side plates, etc. removed, FIG. 9 is a perspective cross-sectional view of the loading magazine constituting the substrate deposition system according to an embodiment of the present invention, FIG. 10 is an enlarged view of a part of FIG. 9, FIG. 11 is a perspective view of a state in which a cassette is raised in a loading magazine constituting the substrate deposition system according to an embodiment of the present invention, and FIG. 12 is a cross-sectional view of a state in which a cassette is raised in a loading magazine constituting the substrate deposition system according to an embodiment of the present invention.

As illustrated in FIGS. 5 to 12, a loading magazine according to an embodiment of the present invention relates to a substrate magazine capable of loading a substrate into a cassette (30), and comprises a fixed plate (10) that is arranged flatly, a cassette (30) that is arranged to be able to be lifted and rotated above the fixed plate (10), an elevating means (60) that is arranged below the fixed plate (10) to elevate the cassette (30), and a rotating means (70) that is arranged below the fixed plate (10) to rotate the cassette (30).

The loading magazine (100) according to the present invention basically forms a basic skeleton by connecting frames (1) to each other. The fixed plate (10) is fixedly mounted to the frame (1) and is arranged horizontally and flatly.

The cassette (30) is placed on the upper side of the fixed plate (10), and the cassette (30) is placed so as to be able to rise and fall and rotate. That is, the cassette (30) is placed so as to rise and fall on the upper side of the fixed plate (10), and further, is placed so as to be able to rotate. In this way, the cassette (30) applied to the present invention is placed so as to be able to rise and fall as well as rotate.

In order to elevate the cassette (30), the elevating means (60) is placed on the lower side of the fixed plate (10). That is, the elevating means (60) is placed on the lower side of the fixed plate (10) and performs an operation of elevating and/or lowering the cassette (30). Accordingly, substrates can be sequentially loaded and loaded in the height direction of the cassette (30), or the loaded substrates can be sequentially unloaded.

Meanwhile, the rotation means (70) is arranged on the lower side of the fixed plate (10) for the rotation of the cassette (30). That is, the rotation means (70) is arranged on the lower side of the fixed plate (10) and performs an operation of rotating the cassette (30). Accordingly, substrates can be loaded and loaded on at least two sides among the four sides of the cassette (30), and substrates loaded on a plurality of sides can be sequentially unloaded.

The above cassette (30) is configured to include a lower plate (31), an upper plate (32) positioned so as to face the upper side of the lower plate (31), and a mounting plate (33) positioned between the lower plate (31) and the upper plate (32) to load a substrate.

The above mounting member (33) is formed in a square frame shape and is positioned to be supported by the edge portions of the lower plate (31) and the upper plate (32). The cassette (30) applied to the present invention is configured to be able to load a substrate on at least two of the four sides. Accordingly, the mounting member (33) is positioned to be supported by the edge portions of the lower plate (31) and the upper plate (32), and at least two of them are positioned adjacent to each other.

Since the cassette (30) according to the present invention is arranged rotatably and has an important purpose of loading a large amount of substrates, it is preferable that at least two of the mounting stands (33) are arranged adjacent to each other, and it is most preferable that four mounting stands (33) are arranged adjacent to each other at right angles to form four sides overall.

The mounting stand (33) applied to the present invention has a square frame shape, and mounting slots (34) are formed on the inner surfaces facing each other and spaced apart at a certain height direction. The mounting slots (34) formed correspondingly to each other on the inner surfaces of the mounting stand (33) allow the substrate jig (7) on which the substrate is mounted to be inserted and mounted. For example, each of the substrate jigs (7) mounting two substrates can be mounted by inserting both edge portions into the mounting slots (34) formed on both inner surfaces of the mounting stand (33).

The cassette (30) configured in this manner may be maintained in an exposed state, but may also be maintained in a closed state. For this purpose, the cassette (30) may be maintained in a closed state by the side plates (3) and the cover plate (4). In this case, in order to load a substrate onto the mounting base (33) of the cassette (30) or to unload the loaded substrate, it is preferable that an opening (5) is formed in two side plates (3) facing each other among the four side plates (3).

An opening (5) formed in a specific side plate (3) is formed for loading a substrate onto a mounting base (33) of the cassette (30) by a robot hand, and an opening (5) formed in another side plate is formed for unloading a substrate mounted on the mounting base (33) of the cassette (30) by a robot hand. It is preferable that the opening (5) be formed so as to be opened and closed by a shutter.

Meanwhile, the substrate loaded into the cassette (30) of the present invention may correspond to various substrates such as semiconductor wafers and display substrates, and as a result, the loading magazine applied to the present invention can be applied to various processes such as semiconductor processes and display processes such as LCD.

The lifting means (60) applied to the present invention is composed of a lifting bar (61) and a lifting drive module (62) to lift the cassette (30). Specifically, the lifting means (60) includes a lifting bar (61) that is arranged to penetrate the fixed plate (10), the upper part of the lifting bar (61) is fixedly connected to the lower part of the cassette (30), and the lower part of the lifting bar (61) is connected and arranged to be lifted by the lifting drive module (62).

The above-mentioned lift bar (61) is vertically arranged so as to be able to be raised and lowered by penetrating the above-mentioned fixed plate (10), and the upper part is fixedly connected to the lower part of the cassette (30), specifically the lower plate (31), and the lower part is connected and arranged to the lift drive module (62). Therefore, the above-mentioned lift bar (61) can be raised and lowered by the above-mentioned lift drive module (62), and as a result, the above-mentioned cassette (30), which is fixedly connected to be supported on the upper part of the above-mentioned lift bar (61), can be raised and lowered.

The above-described lifting drive module (62) is configured to include a rack structure (63), a mounting plate (64), a pinion structure (65) that is fixedly mounted on the mounting plate (64) and arranged to engage with the rack structure (63), a rotating shaft (66) that transmits rotating force to the pinion structure (65), a driving body (67) that is fixedly mounted on the mounting plate (64) and provides rotating force to the rotating shaft (66), and a fixed body (68) that is fixedly mounted on the mounting plate (64) and fixedly connected to the lower portion of the lifting bar (61).

The above rack structure (63) is fixedly connected on the third rotating plate (50). It is preferable that the above rack structures (63) are arranged in pairs with a predetermined distance between them. Each of the above rack structures (63) includes a rack gear that is formed to be arranged vertically.

The above mounting plate (64) is horizontally placed on the third rotating plate (50) so that the pinion structure (65), driving body (67) and fixed body (68) are fixedly mounted. The above mounting plate (64) is placed so as to be raised and lowered according to the driving of the lifting driving module (62).

The pinion structure (65) is fixedly mounted to the mounting plate (64) and is arranged so as to be meshed with the rack structure (63). It is also preferable that the pinion structures (65) are arranged as a pair so as to be meshed with the pair of rack structures (63). Each pinion structure (65) includes a pinion gear that can be meshed with the rack gear of the corresponding rack structure (63).

Each of the above pinion structures (65) is connected to a rotating shaft (66), and the pinion gear rotates according to the rotating force of the rotating shaft. As a result, the pinion structure (65) can be raised and lowered while being engaged with the rack structure (63) that is fixedly connected on the third rotating plate (50).

The rotational force for the above-described rotating shaft (66) is provided by the driving body (67). The driving body (67) may be configured in various ways as long as it can provide rotational force to the above-described rotating shaft (66). For example, the driving body (67) may be configured to include a driving motor and a bevel gear assembly that transmits the rotational force of the driving motor to the above-described rotating shaft (66). It is also preferable that the driving body (67) configured in this manner be fixedly connected to the mounting plate (64).

The above fixed body (68) is fixedly mounted on the mounting plate (64) and fixedly connected to the lower part of the lifting bar (61). Therefore, when the above fixed body (68) is raised and lowered, the lifting bar (61) can also be raised and lowered.

The process of elevating the elevating bar (61) and thereby elevating the cassette (30) according to the operation of the elevating drive module (62) configured in this manner is described as follows.

When the driving body (67) generates driving force and provides rotational force to the rotating shaft (66), the pinion gear of the pinion structure (65) is raised and lowered along the rack gear of the rack structure (63), and thereby the pinion structure (65) can be raised and lowered. The pinion structure (65) is fixedly connected to the mounting plate (64), and as a result, the mounting plate (64) is also raised and lowered, and thereby the fixed body (68) fixedly connected to the mounting plate (64) can also be raised and lowered. As a result, the lifting rod (61) coupled to the fixed body (68) can be raised and lowered, and thereby the cassette (30) supported and fixedly connected to the lifting rod (61) can be raised and lowered.

FIG. 11 and FIG. 12 show a state in which the cassette (30) is raised as the pinion structure (65) is raised along the rack structure (63) in accordance with the upward driving of the driving body (67), and the lifting bar (61) coupled to the fixed body (68) fixedly coupled to the mounting plate (64) is raised through this process. Conversely, as the pinion structure (65) is lowered along the rack structure (63) in accordance with the downward driving of the driving body (67), and the lifting bar (61) coupled to the fixed body (68) fixedly coupled to the mounting plate (64) is lowered through this process, the cassette (30) can be lowered.

Meanwhile, the lifting drive module (62) is arranged on the third rotating plate (50), and the third rotating plate (50) is rotated by the rotating means (70), and the lifting bar (61) coupled to the lifting drive module (62) is configured to rotate according to the rotation of the third rotating plate (50).

The above-mentioned elevator shaft (61) is rotated by receiving the rotational power of the third rotary plate (50) that is rotated by the rotation means (70) through the elevator drive module (62) placed on the third rotary plate (50), and the cassette (30) can be rotated according to the rotation of the elevator shaft (61).

Specifically, the rack structure (63) constituting the lifting drive module (62) is fixedly connected to the third rotating plate (50). Therefore, when the third rotating plate (50) is rotated by the rotating means (70), the rack structure (63) also rotates. Since the pinion structure (65) is meshed and connected to the rack structure (63), the pinion structure (65) also rotates, and since the pinion structure (65) is fixedly connected to the mounting plate (64), the fixed body (68) is fixedly connected to the mounting plate (64), and the lifting rod (61) is connected to the fixed body (68), the lifting rod (61) also rotates. As a result, the cassette (30) supported and fixedly connected to the lifting rod (61) can rotate.

In this way, the cassette (30) can rotate while being supported on the lifting bar (61), and it is preferable to adopt and apply a structurally reinforcing configuration to transmit more stable rotational force to the cassette (30).

To this end, the loading magazine (100) according to the present invention includes a second rotation plate (40) that is rotatably coupled to the lower portion of the fixed plate (10), and the second rotation plate (40) is connected to the lifting drive module (62) and configured to rotate together in conjunction with the rotation of the third rotation plate (50).

Specifically, the second rotation plate (40) is rotatably coupled to the lower portion of the fixed plate (10). That is, a second rail (12) is formed at the lower portion of the fixed plate (10), and the second rotation plate (40) is arranged so as to be engaged with the second rail (12) and rotated. The second rail (12) is preferably arranged in a circular shape for rotation, and may be arranged on either the fixed plate (10) or the second rotation plate (40).

The second rotation plate (40) is fixedly connected to the upper portion of the lifting drive module (62), specifically, the rack structure (63), in order to rotate in conjunction with the rotation of the third rotation plate (50). Therefore, when the third rotation plate (50) rotates by the rotation means (70), the second rotation plate (40), which is fixedly connected to the upper portion of the rack structure (63) that is fixedly connected to the third rotation plate (50), can also rotate in conjunction.

Since the second rotation plate (40) can rotate while supporting the fixed plate (10) and is fixedly connected to the rack structure (63) that is fixedly connected on the third rotation plate (50), the rotation of the third rotation plate (50) can be more stably performed, and as a result, the cassette (30) that is rotated while being supported on the lifting bar (61) can also be more stably performed.

Meanwhile, it is desirable to configure the cassette (30) to be elevated in a more stable posture during the process of being elevated. To this end, it is desirable to configure the loading magazine (100) according to the present invention to include a guide rod (25) that is positioned penetrating the cassette (30) and guides the elevation movement of the cassette (30).

The above guide rod (25) is preferably configured as four pieces by being arranged to penetrate the lower plate (31) and the upper plate (32) of the cassette (30) and being formed at each of the four corners. In this way, since the guide rod (25) is arranged to penetrate the four corners of the lower plate (31) and the upper plate (32) of the cassette (30), the cassette (30) can maintain a stable posture when rising or descending by being guided by the guide rod (25).

It is also desirable to adopt and apply a reinforcing structure for stable rotation of the cassette (30) on the upper side of the fixed plate (10). To this end, the loading magazine (100) according to the present invention includes a first rotation plate (20) that is rotatably coupled to the upper side of the fixed plate (10), and the lower part of the guide rod (25) is coupled to the upper side of the first rotation plate (20).

Specifically, a first rotation plate (20) is rotatably arranged on the upper portion of the fixed plate (10). That is, a first rail (11) is arranged and formed on the upper portion of the fixed plate (10), and the first rotation plate (20) is rotatably arranged by engaging with the first rail (11). It is preferable that the first rail (11) be arranged in a circular shape for the rotation of the first rotation plate (20), and may be arranged on either the upper portion of the fixed plate (10) or the lower portion of the first rotation plate (20).

Since the above cassette (30) must also perform an up-and-down motion, it cannot be configured to be fixedly mounted on the first rotation plate (20) and rotated. That is, the cassette (30) is positioned to be raised and lowered on the first rotation plate (20) while being supported by the up-and-down bar (61), and when the cassette (30) rotates, the first rotation plate (20) rotates via the guide bar (25).

More specifically, the guide rod (25) is positioned so as to penetrate the four corners of the lower plate (31) and the upper plate (32) of the cassette (30) while the lower part is fixedly connected to the upper part of the first rotation plate (20). Therefore, when the cassette (30) rotates according to the rotational drive of the rotation means (70), the rotational power of the cassette (30) is transmitted to the first rotation plate (20) through the guide rod (25). As a result, the cassette (30) can rotate in a more stable state because the first rotation plate (20) rotates in conjunction with the guide rod (25) mediated by the first rotation plate.

Meanwhile, the above-mentioned rotation means (70) may be configured to include a base plate (71), a support body (72), a third rail (73), and a rotation drive module (74).

The above base plate (71) may be fixedly arranged on the floor or configured to be movable. A support body (72) is arranged and formed on the upper portion of the base plate (71), and the support body (72) supports the third rotation plate (50) so that the third rotation plate (50) can rotate on the upper portion thereof. To this end, the third rail (73) is arranged and formed on either the lower portion of the third rotation plate (50) or the upper portion of the support body (72). In addition, the rotation drive module (74) is arranged and fixedly arranged on the base plate (71), so as to be able to rotate the third rotation plate (50).

Although the present invention has been described above by means of limited embodiments and drawings, the present invention is not limited thereto, and various modifications and variations are possible by those skilled in the art within the scope of the technical idea of the present invention and the equivalent scope of the patent claims to be described below.

1: Frame 3: Side Plate
4: Cover plate 5: Opening
7: Substrate Jig
10: Fixed plate 11: 1st rail
12: 2nd rail
20: 1st rotation plate 25: Guide rod
30 : Cassette 31 : Lower plate
32: Top plate 33: Mounting bracket
34 : Mounting slot
40: 2nd rotation plate 50: 3rd rotation plate
60: Elevator means 61: Elevator bar
62: Elevator drive module 63: Rack structure
64: Mounting plate 65: Pinion structure
66: Rotating shaft 67: Drive body
68 : Fixed body
70: Rotating means 71: Base plate
72: Support body 73: Third rail
74 : Rotation drive module
100 : Loading Magazine 110 : Unloading Magazine
130: Loading Buffer Unit 150: Unloading Buffer Unit
170: Transfer unit 190: Deposition unit
200 : Substrate Deposition System

Claims (6)

In the substrate deposition system,
A deposition apparatus comprising: a loading magazine for loading substrates to be deposited; an unloading magazine for loading substrates on which deposition has been completed; at least one deposition unit for receiving the substrates to be deposited and performing a deposition process; and a transfer unit for performing an operation of transferring substrates loaded in the loading magazine to the at least one deposition unit and performing an operation of transferring substrates on which deposition has been completed in the at least one deposition unit to the unloading magazine.
The above loading magazine and unloading magazine are,
A flatly arranged fixed plate; a cassette arranged to be lifted and rotatably positioned on the upper side of the fixed plate; an elevating means arranged on the lower side of the fixed plate to lift the cassette; and a rotating means arranged on the lower side of the fixed plate to rotate the cassette, wherein the cassette is configured to be able to load a substrate on at least two sides out of four sides.
The above lifting means includes a lifting bar arranged to penetrate the above fixed plate, the upper part of the lifting bar is fixedly connected to the lower part of the cassette, and the lower part of the lifting bar is arranged to be raised by the lifting drive module.
A substrate deposition system characterized in that the above-described lifting drive module is arranged on a third rotating plate, the third rotating plate is rotated by the rotating means, the lifting bar coupled to the lifting drive module is configured to rotate according to the rotation of the third rotating plate, and includes a second rotating plate rotatably coupled to the lower portion of the fixed plate, the second rotating plate is connected to the lifting drive module and rotates together in conjunction with the rotation of the third rotating plate, and includes a guide bar penetrating the cassette to guide the lifting operation of the cassette.
In claim 1,
A substrate deposition system, characterized in that the substrates loaded in the loading magazine are all transferred to one deposition unit by the transfer unit or are distributed and transferred to at least two deposition units.
In claim 2,
A substrate deposition system, characterized in that when the substrates loaded in the loading magazine are all transferred to a specific deposition unit by the transfer unit, the transfer unit transfers all the substrates that are deposition targets newly loaded in the loading magazine to another deposition unit while the specific deposition unit performs a deposition process.
In claim 2,
When the substrates loaded in the loading magazine are distributed and transferred to at least two deposition units by the transfer unit,
A substrate deposition system, characterized in that the transfer unit performs an operation of transferring the substrate to a specific deposition unit among the at least two deposition units, and then transferring the substrate to another deposition unit when the specific deposition unit starts performing a deposition process.
In claim 1,
A substrate deposition system characterized by further comprising a loading buffer unit for loading a substrate to be deposited from the outside into the loading magazine, and an unloading buffer unit for unloading a substrate on which deposition has been completed from the unloading magazine to the outside.
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