JP2003173751A - Display device and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a display device in which the reinforcing spacer can be arranged by positioning in good precision when manufacturing, and it manufacturing method. <P>SOLUTION: In the display device, an airtight space that is surrounded by a face plate 30, a rear plate 20, and a rectangular shape frame interposed between both plates 30, 20 is kept in a vacuum, and it comprises many reinforcing spacers 41 that are arranged inside the frame and keep the distance between the face plate 30 and the rear plate 20. The reinforcing spacers 41 are formed in a thin plate shape and are arranged so as not to overlap a fluorescent substance 32 but to overlap a black stripe 33 in order not to be seen from the outside of the face plate 30. Positioning ribs 34 that position the reinforcing spacers 41 by clipping from both sides in the thickness direction are provided on the opposed face side of the face plate 30 to the rear plate 20. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display device such as an image display device (display device) or a flat light emitting device using an electron source element.

[0002]

2. Description of the Related Art As a display device of this type, a display device having a panel body having a structure shown in FIG. 9 has been proposed. This panel body includes a rear plate 20 made of a flat glass substrate on the one surface side of which a large number of electron source elements 10 are arranged at lattice points of a matrix, and a flat glass plate arranged to face the rear plate 20. A rectangular frame-shaped frame (not shown) is interposed between the face plate 30 made of a substrate and a space surrounded by the rear plate 20, the face plate 30 and the frame is maintained in vacuum.

A transparent conductive film (for example, ITO) is formed on the surface of the face plate 30 facing the rear plate 20.
An anode electrode 9 made of a film is formed. Also,
On the surface of the anode electrode 9 facing the rear plate 20, the fluorescent substance 32 and the fluorescent substance 32 formed for each pixel are formed.
Black stripe 3 made of black material formed between
3 are provided (the fluorescent substance 32 and the black stripe 33 are provided in the display area of the face plate 30). The fluorescent substance 32 is applied to the surface of the collector electrode 9 facing the rear plate 20, and emits visible light by the electron beam emitted from the electron source element 10. It should be noted that high-energy electrons emitted from the electron source element 10 and accelerated by the voltage applied to the anode electrode 9 collide with the fluorescent substance 32. R (red), G (green), and B (blue) emission colors are used as the fluorescent substance 32. The R emission color is the fluorescent substance 32a, and the G emission color is the fluorescent substance. If the phosphors 32b and B having the emission colors are used as the fluorescent substance 32c (see FIG. 9), the fluorescent substance 32 from left to right in FIG.
a, fluorescent substance 32b, fluorescent substance 32c, fluorescent substance 32
a, fluorescent substance 32b, fluorescent substance 32c, fluorescent substance 32a
The black stripes 33 are interposed between the fluorescent substances 32 which are arranged in this order and are adjacent to each other in the left-right direction of FIG.

Further, in the above-mentioned display device, the airtight space surrounded by the face plate 30, the rear plate 20 and the frame is kept in a vacuum state, so even if the area of the display area is increased, the face plate is exposed to the atmospheric pressure. Three
0 and the rear plate 20 are provided with a large number of reinforcing spacers 41 arranged inside the frame to keep the distance between the face plate 30 and the rear plate 20 so as not to be deformed and damaged. Here, the reinforcing spacer 41 needs to be disposed so as not to overlap the fluorescent substance 32 so as to be invisible from the outside of the face plate 30, and is formed in a thin plate shape (a strip shape) to form a black stripe 33. They are arranged so that they overlap. The gap length between the rear plate 20 and the face plate 30 is usually several mm or more, while the width between the fluorescent substances 32 (that is, the width of the black stripe 33) is about several tens to several hundreds μm. Since it is very narrow, the aspect ratio, which is the ratio between the height and the width (thickness) of the reinforcing spacer 41, is a very large value of 10 to several hundreds.

[0005]

By the way, in the above-described conventional display device, the plate-like reinforcing spacer 41 is used.
However, since the reinforcing spacer 41 is very thin and has a large aspect ratio, even if many reinforcing spacers 41 are arranged at once, There is a problem that it is easy to fall and it is difficult to position and position the reinforcing spacer 41 with high accuracy.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a display device in which reinforcing spacers can be accurately positioned and arranged during manufacturing, and a manufacturing method thereof.

[0007]

In order to achieve the above object, the invention of claim 1 has a rear plate on which an electron source element for emitting an electron beam is disposed on one surface side, and a rear plate facing the rear plate. And a frame provided between the rear plate and the face plate, a face plate provided with a fluorescent material that emits light when excited by an electron beam emitted from the electron source element, and a face disposed inside the frame. A plate-shaped reinforcing spacer for keeping a distance between the plate and the rear plate is provided so that a space surrounded by the rear plate, the face plate and the frame is maintained in a vacuum, and the face plate faces the rear plate. Positioning ribs are provided on the surface side for sandwiching the reinforcing spacers from both sides in the thickness direction, and positioning ribs are provided. Since the positioning ribs are provided on the surface of the splate facing the rear plate to sandwich the reinforcing spacers from both sides in the thickness direction, the reinforcing spacers can be accurately and easily positioned and arranged during manufacturing. it can. Therefore, manufacturing is facilitated, the yield can be improved, and the area can be easily increased.

According to a second aspect of the present invention, in the first aspect, the positioning ribs are arranged in the display area of the face plate, so that the reinforcing spacer is located at a desired position in the display area. It is possible to easily and accurately arrange them.

According to a third aspect of the invention, in the second aspect of the invention, a black stripe for partitioning the fluorescent material into a plurality of regions in the display region is interposed between the positioning rib and the face plate. It is not necessary to separately provide a region for disposing the positioning rib in the display region, and it is possible to display a high-definition image when an image is displayed in the display region.

According to a fourth aspect of the invention, in the first aspect of the invention, the positioning ribs are arranged so as to avoid the display area of the face plate, so that there are restrictions on the shape of the positioning ribs and the manufacturing process. The number of the positioning ribs can be easily made.

According to a fifth aspect of the invention, in the first to fourth aspects of the invention, since the positioning ribs or the reinforcing spacers are made of ceramic, when the positioning ribs or the reinforcing spacers are made of glass. In comparison, mechanical strength and heat resistance can be increased.

According to a sixth aspect of the present invention, in the first to fifth aspects of the invention, an anode electrode made of a transparent conductive film is provided in the display area of the face plate farther from the rear plate than the positioning ribs. Since the positioning ribs or the reinforcing spacers have conductivity, it is possible to prevent the positioning ribs or the reinforcing spacers from being charged by the electron beam emitted from the electron source element. It is possible to prevent the trajectory of the electron beam emitted from the element from bending. Therefore, when the fluorescent substance is provided for each pixel and the fluorescent substance and the electron source element have a one-to-one correspondence for each pixel, crosstalk between pixels can be prevented.

According to a seventh aspect of the present invention, in the first to fifth aspects, an anode electrode made of a transparent conductive film is provided in the display area of the face plate, and the anode electrode is the positioning rib. Since the positioning rib is disposed farther from the rear plate, the positioning rib has an insulating property, and the reinforcing spacer has a conductive property, the reinforcing spacer has a conductive property. The reinforcing spacer can be prevented from being charged by the electron beam emitted from the source element, the trajectory of the electron beam emitted from the electron source element can be prevented from bending, and the positioning rib is insulated. Since the reinforcing spacer has conductivity, the reinforcing spacer is provided between the electron source element and the anode electrode even though the reinforcing spacer has conductivity. Or shorted via a spacer, that is the leakage current or flow can be prevented.

The invention of claim 8 is the method of manufacturing a display device according to claim 3, wherein after the black stripe is formed in the display area of the face plate, the positioning rib is overlapped with the black stripe. After that, the fluorescent material is formed in a region of the display area of the face plate excluding the black stripes, and then the reinforcing spacers are positioned and fixed to the face plate by the positioning ribs. Since the black stripes can be formed before the positioning ribs are formed, the black stripes can be easily formed, and the fluorescent substance is formed after the positioning ribs are formed. It is necessary to consider the effect of the rib forming process on the fluorescent material. In addition, there are few restrictions on the step of forming the positioning ribs, the positioning ribs can be easily formed, and since the fluorescent substance is formed before the reinforcing spacers are arranged, it is easy to form the pattern of the fluorescent substance. Also, since the reinforcing spacers can be positioned by the positioning ribs, the reinforcing spacers can be accurately and easily positioned.

According to a ninth aspect of the present invention, there is provided the method of manufacturing a display device according to the third aspect, wherein the positioning rib integrally provided with the black stripe is provided in the display area of the face plate. Characterized in that the fluorescent substance is formed in the display area of the face plate, and then the reinforcing spacers are positioned and fixed to the face plate by the positioning ribs. Since the positioning rib integrally provided with the black stripe is arranged in the display region of the face plate with the black stripe interposed, the step of forming the black stripe on the face plate can be omitted. And forming the fluorescent material after forming the positioning ribs. Therefore, it is not necessary to consider the influence of the forming process of the positioning rib on the fluorescent substance, the restriction of the forming process of the positioning rib is small, and the forming of the positioning rib is easy, and the reinforcing spacer is arranged. Since the fluorescent material is formed before, the pattern formation of the fluorescent material is easy, and the reinforcing spacers can be positioned by the positioning ribs,
The reinforcing spacer can be positioned accurately and easily.

The invention of claim 10 is the method of manufacturing a display device according to claim 4, wherein after the black stripe is formed in the display region of the face plate, the black in the display region of the face plate is formed. The fluorescent material is formed in a region excluding the stripes, and then the positioning ribs are arranged so as to avoid the display region of the face plate, and then the reinforcing spacers are positioned with respect to the face plate by the positioning ribs. The black stripes and the fluorescent substance can be sequentially formed before the positioning ribs and the reinforcing spacers are provided, so that the pattern formation of the black stripes and the fluorescent substance is easy, and , Position the reinforcing spacers by the positioning ribs Since it Mel, the reinforcing spacer can be precisely positioned easily.

The invention of claim 11 is the method of manufacturing a display device according to claim 4, wherein after the positioning rib is provided in a region of the face plate excluding the display region,
The black stripe is formed in the display area of the face plate, and then the fluorescent material is formed in the area of the display area of the face plate excluding the black stripe, and then the reinforcing spacer is formed on the face plate. On the other hand, the positioning rib is positioned and fixed by the positioning rib. Since the positioning rib is formed before the black stripe and the fluorescent material are formed, the step of forming the positioning rib includes the black stripe and the fluorescent material. Since it is not necessary to consider the influence on the positioning ribs, the positioning ribs can be easily formed, and the reinforcing ribs can be positioned by the positioning ribs. The above supplement without affecting The use spacers can be precisely positioned easily.

[0018]

(First Embodiment) In the present embodiment,
A display device including the panel body having the configuration shown in FIG. 1 will be exemplified. The panel body includes a rear plate 20 made of a flat glass substrate having a large number of electron source elements 10 arranged at lattice points of a matrix on one surface side, and a flat glass substrate arranged to face the rear plate 20. A rectangular frame-shaped frame (not shown) as a spacer is interposed between the rear plate 20, the face plate 30, and the frame to maintain a vacuum in the space. .

A transparent conductive film (for example, ITO) is formed on the surface of the face plate 30 facing the rear plate 20.
An anode electrode 9 made of a film is formed. Also,
On the surface of the anode electrode 9 facing the rear plate 20, the fluorescent substance 32 and the fluorescent substance 32 formed for each pixel are formed.
Black stripe 3 made of black material formed between
3 are provided (the fluorescent substance 32 and the black stripe 33 are provided in the display area of the face plate 30). The fluorescent substance 32 is applied to the surface of the collector electrode 9 facing the rear plate 20, and emits visible light by the electron beam emitted from the electron source element 10. It should be noted that high-energy electrons emitted from the electron source element 10 and accelerated by the voltage applied to the anode electrode 9 collide with the fluorescent substance 32. R (red), G (green), and B (blue) emission colors are used as the fluorescent substance 32. The R emission color is the fluorescent substance 32a, and the G emission color is the fluorescent substance. If the phosphors 32b and B having the emission colors are used as the fluorescent substance 32c (see FIG. 1), the fluorescent substance 32 from left to right in FIG.
a, fluorescent substance 32b, fluorescent substance 32c, fluorescent substance 32
a, fluorescent substance 32b, fluorescent substance 32c, fluorescent substance 32a
The black stripes 33 are interposed between the fluorescent substances 32 which are arranged in this order and are adjacent to each other in the left-right direction of FIG.

The frame has a function of keeping the distance between the rear plate 20 and the face plate 30, and is adhered to each of the rear plate 20 and the face plate 30 with frit glass or an epoxy type vacuum adhesive. There is. Note that glass, ceramics, or the like may be used as the material of the frame. Further, as the frame, a metal plate whose surface is insulated with enamel or the like may be used.

In the electron source element 10, as shown in FIG. 3, a lower electrode 4 made of a conductive layer (for example, a metal film) is formed on one surface side of an insulating substrate 5 made of a glass substrate. An undoped polycrystalline silicon layer 3 is formed thereon as a semiconductor layer, a strong electric field drift layer 6 made of an oxidized porous polycrystalline silicon layer is formed on the polycrystalline silicon layer 3, and a metal is formed on the strong electric field drift layer 6. A surface electrode 7 made of a thin film (for example, a gold thin film) is formed. That is,
In the electron source element 10, the surface electrode 7 and the lower electrode 4 face each other, and the strong electric field drift layer 6 is interposed between the surface electrode 7 and the lower electrode 4. The thickness of the surface electrode 7 is 10 to 15
It is set to about nm. By the way, in this embodiment,
The above-mentioned rear plate 20 is also used as the insulating substrate 5. Further, in the present embodiment, the polycrystalline silicon layer 3 is interposed between the strong electric field drift layer 6 and the lower electrode 4, but the strong electric field drift is formed on the lower electrode 4 without the polycrystalline silicon layer 3 interposed. A structure in which the layer 6 is formed may be adopted.
The basic configuration of the electron source element 10 having the configuration shown in FIG. 3 is proposed by the inventors of the present application in Japanese Patent No. 2987140.

In order to radiate (emit) electrons from the electron source element 10 having the structure shown in FIG. 3, a collector electrode 9 is arranged so as to face the surface electrode 7, and a vacuum is provided between the surface electrode 7 and the collector electrode 9. In this state, a DC voltage Vps is applied between the surface electrode 7 and the lower electrode 4 so that the surface electrode 7 is on the high potential side with respect to the lower electrode 4, and the collector electrode 9 is applied to the surface electrode 7. A direct current voltage Vc is applied between the collector electrode 9 and the front surface electrode 7 so that it is on the high potential side. If the DC voltages Vps and Vc are set appropriately, the electrons injected from the lower electrode 4 drift in the strong electric field drift layer 6 and are emitted through the surface electrode 7 (the one-dot chain line in FIG. 3 is emitted through the surface electrode 7). shows the flow of) ^- electrons e. The electrons that have reached the surface of the strong electric field drift layer 6 are considered to be hot electrons, and easily tunnel through the surface electrode 7 and are emitted into a vacuum.

In the electron source element 10 of this embodiment, the current flowing between the surface electrode 7 and the lower electrode 4 is called a diode current Ips, and the current flowing between the collector electrode 9 and the surface electrode 7 is an emission current ( If the emission current Ie is referred to (see FIG. 3), the larger the ratio of the emission current Ie to the diode current Ips (= Ie / Ips), the higher the electron emission efficiency (= (Ie / Ips) × 100.
[%]) Is high. Here, in the electron source element 10 of the present embodiment, electrons can be emitted even when the DC voltage Vps applied between the surface electrode 7 and the lower electrode 4 is a low voltage of about 10 to 20V. Further, the electron source element 10 has a feature that the vacuum degree dependence of the electron emission characteristic is small, and the popping phenomenon does not occur during electron emission, and electrons can be stably emitted with high electron emission efficiency. , Rear plate 20 and face plate 30
It is not necessary to set the degree of vacuum in the space surrounded by the above frame to a high vacuum (for example, the degree of vacuum may be about 1 Pa), and the manufacturing is facilitated. Further, the electron source element 10 according to the present embodiment has a small divergence angle of the emitted electron beam, and is a Spindt type electron source element, MIM (Metal-Insulat).
or−Metal) type electron source element, MOS (Metal−Oxide−S)
Since the electron linearity is superior to that of an emiconductor type electron source element, so-called crosstalk in which electrons reach the fluorescent substance 32 corresponding to the adjacent electron source element 10 can be prevented.

By the way, the above-mentioned strong electric field drift layer 6 is
It is formed by oxidizing a porous polycrystalline silicon layer formed by making the polycrystalline silicon layer porous by a rapid thermal oxidation method or an electrochemical method, and as shown in FIG. Columnar polycrystalline silicon grains (semiconductor crystals) 51 arranged on the main surface side of
Thin silicon oxide film 5 formed on the surface of grain 51
2 and a large number of nanometer-order silicon microcrystals (semiconductor microcrystals) 63 interposed between the grains 51, and the silicon microcrystals 63 formed on the surface of each silicon microcrystal 63.
It is considered to be composed of a large number of silicon oxide films 64 which are insulating films having a film thickness smaller than the crystal grain size of That is, in the strong electric field drift layer 6, it is considered that the surface of each grain of the polycrystalline silicon layer is made porous and the crystalline state is maintained in the central portion of each grain. Each grain 51 extends in the thickness direction of the insulating substrate 5 (that is, each grain 51 extends in the thickness direction of the lower electrode 2).

In the electron source element 10 of this embodiment, it is considered that electron emission occurs in the following model. That is, the DC voltage Vps is applied between the surface electrode 7 and the lower electrode 4 with the surface electrode 7 on the high potential side, and the DC voltage Vps is applied between the collector electrode 9 and the surface electrode 7 on the high potential side. By applying Vc, DC voltage V
When ps reaches a predetermined value (critical value), electrons e ⁻ are injected from the lower electrode 4 into the strong electric field drift layer 6 by thermal excitation. On the other hand, most of the electric field applied to the strong electric field drift layer 6 is applied to the silicon oxide film 64, so the injected electrons e ⁻ are accelerated by the strong electric field applied to the silicon oxide film 64, and the strong electric field drift layer 6 4 drifts toward the surface in the direction of the arrow in FIG. 4 (upward in FIG. 4), tunnels through the surface electrode 7, and is discharged into a vacuum. Then, in the strong electric field drift layer 6, the electrons injected from the lower electrode 4 are generated by the silicon microcrystal 63.
The particles are accelerated by an electric field applied to the silicon oxide film 64 and are drifted by the surface electrode 7 (ballistic electron emission phenomenon), and the heat generated in the strong electric field drift layer 6 passes through the grains 51. It is considered that the heat is dissipated, so that the popping phenomenon does not occur when the electrons are emitted, and the electrons can be stably emitted. Here, the electrons that have reached the surface of the strong electric field drift layer 6 are considered to be hot electrons, and easily tunnel through the surface electrode 7 and are emitted into a vacuum.

In the electron source element 10 described above, the lower electrode 4 is composed of a conductive layer formed on one surface side of the insulating substrate 5 which also serves as the rear plate 20, but as shown in FIG. , The n-type silicon substrate 1 and the ohmic electrode 2 formed on the back surface of the n-type silicon substrate 1 may constitute the lower electrode 4, and in this case, the rear plate 20 may be provided separately. Further, although the strong electric field drift layer 6 is formed of an oxidized porous polycrystalline silicon layer,
It may be formed by a nitrided or oxynitrided porous polycrystalline silicon layer, or may be formed by oxidizing, nitriding, or oxynitriding a porous semiconductor layer other than the porous polycrystalline silicon layer. When the strong electric field drift layer 6 is a nitrided porous polycrystalline silicon layer, each of the silicon oxide films 52 and 64 described in FIG. 4 becomes a silicon nitride film, and the strong electric field drift layer 6 is oxidized. When the nitrided porous polycrystalline silicon layer is used, each of the silicon oxide films 52 and 64 becomes a silicon oxynitride film.

Although not shown, in this embodiment, the lower electrode 4 is formed to extend in the left-right direction in FIG. 1, and the surface electrode 7 is formed to extend in a direction orthogonal to the lower electrode 4. Each electron source element 10 is located at the intersection of the lower electrode 4 and the surface electrode 7. Therefore, if an appropriate set of the lower electrode 4 and the surface electrode 7 is selected by a driving circuit (not shown) and a voltage is applied to the selected lower electrode 4 such that the selected surface electrode 7 is on the high potential side, An electron beam is emitted from the electron source element 10, which is a portion where the lower electrode 4 and the surface electrode 7 intersect. Here, the lower electrode 4 may be formed by burying the one surface of the rear plate 20 such that the surfaces thereof are aligned, or the lower electrode 4 may be formed by forming a non-doped polycrystalline silicon layer on the one surface of the rear plate 20. It may be formed by heavily doping a part of the silicon layer with an n-type impurity (that is,
The lower electrode 4 may be composed of an n ^{+ -type} polycrystalline silicon layer). Instead of extending the surface electrode 7 in the direction orthogonal to the lower electrode 4, low-resistance bus electrodes are extended in the direction orthogonal to the lower electrode 4 and arranged in parallel in the direction orthogonal to the lower electrode 4. The surface electrode 4 may be electrically connected.

By the way, in the display device of this embodiment, the airtight space surrounded by the face plate 30, the rear plate 20, and the frame is kept in a vacuum state, as in the conventional structure shown in FIG. Even if an attempt is made to increase the area of the region, a large number of elements are arranged inside the frame to maintain the distance between the face plate 30 and the rear plate 20 so that the face plate 30 and the rear plate 20 are not deformed and damaged by the atmospheric pressure. Reinforcing spacer 41
Is equipped with. The reinforcing spacer 41 is formed in a thin plate shape (a strip shape), and is arranged so as not to overlap the fluorescent substance 32 and to overlap the black stripe 33 so as to be invisible from the outside of the face plate 30. Here, in the present embodiment, the positioning ribs 34 for positioning the reinforcing spacers 41 on both sides of the face plate 30 facing the rear plate 20 from both sides in the thickness direction.
(See FIG. 2). The positioning rib 34 is
The reinforcing spacer 41 may be provided so as to be sandwiched from both sides in the thickness direction over the entire length in the longitudinal direction of the reinforcing spacer 41, or a set of two positioning ribs 34 sandwiching the reinforcing spacer 41 from both sides may be provided. The reinforcing spacers 41 may be provided so as to be spaced apart from each other in the longitudinal direction, and the reinforcing ribs 41 may be sandwiched by the positioning ribs 34 from both sides in the thickness direction. The reinforcing spacer 41 and the positioning rib 34 may be provided for each fluorescent substance 32 (each pixel), or a plurality of fluorescent substances 32 (a plurality of pixels) may be provided as appropriate.
It may be provided for each.

In this embodiment, however, the positioning ribs 34 are provided on the surface of the face plate 30 facing the rear plate 20 so as to sandwich the reinforcing spacers 41 from both sides in the thickness direction. The large number of reinforcing spacers 41 having a large aspect ratio can be accurately and easily positioned and arranged at a time without collapsing. Therefore, there are advantages that the manufacturing is facilitated, the yield is improved, and the area is easily increased. Further, the positioning rib 34 is provided on the face plate 3
Since it is arranged in the display area of 0, the reinforcing spacer 41 can be arranged accurately and easily at a desired position in the display area. Moreover, since the black stripes 33 partitioning the fluorescent substance 32 into a plurality of areas in the display area are interposed between the positioning ribs 34 and the face plate 30, the positioning ribs 34 are arranged in the display area. A high-definition image can be displayed without providing a separate area.

By the way, in order to manufacture the above-mentioned panel body, after the black stripes 33 are formed in the display area of the face plate 30, the positioning ribs 34 are arranged so as to overlap the black stripes 33, and then the face plate 30 is formed. After forming the fluorescent material 32 in the area of the display area 30 except the black stripe 33,
The reinforcing spacer 34 may be positioned and fixed to the face plate 30 by the positioning rib 34 (positioned by inserting the reinforcing spacer 41 between the pair of positioning ribs 34).

Here, when forming the black stripes 33 in the display area of the face plate 30, for example, first, a photoresist layer is formed on one surface of the face plate 30 (the surface facing the rear plate 20). Then, using a shadow mask, a portion of the photoresist layer where the fluorescent material 32 is to be formed is exposed to ultraviolet rays to be cured, and is developed with water to leave only the exposed portion as a resist pattern.
After that, a slurry containing a black substance such as graphite is applied to the entire surface on the one surface side and dried to form a black film, and then the resist pattern and the resist pattern which are hardened by dipping in a H ₂ O ₂ solution are formed. By removing the black film, the part of the black film remaining on the one surface of the face plate 30 becomes the black stripe 33.

In forming the fluorescent substance 32, for example, a slurry in which the fluorescent substance is mixed with a photosensitizer is applied to the entire surface on one surface side of the face plate 30 and the shadow mask is used to form the fluorescent substance 32. The pattern formation of the fluorescent substance 32 can be performed by exposing the portion to be formed to ultraviolet rays to be cured, and developing it to leave only the exposed portion as the fluorescent substance 32.

When the positioning rib 34 is arranged so as to overlap the black stripe 33, it may be fixed by using frit glass, or the positioning rib 34 may be fixed.
The surfaces of the black stripes 33 and the black stripes 33 facing each other may be metalized to form a metal thin film and then bonded. Since the positioning rib 34 can have a sufficiently smaller aspect ratio than the reinforcing spacer 41, the positioning rib 34 can be easily arranged.

According to the manufacturing method described above, the positioning rib 3
Since the black stripes 33 can be formed before forming No. 4, the black stripes 33 can be easily formed. Further, since the fluorescent material 32 is formed after the positioning ribs 34 are formed, the step of forming the positioning ribs 34 is performed by the fluorescent material 32. Since it is not necessary to consider the effect on the positioning ribs 34, the positioning ribs 34 are not limited in the forming process, the positioning ribs 34 can be easily formed, and the fluorescent substance 32 is formed before the reinforcing spacers 41 are arranged. Since the pattern of the substance 32 can be easily formed and the reinforcing spacer 41 can be positioned by the positioning rib 34, the reinforcing spacer 41 can be accurately and easily positioned.

In the present embodiment, glass is used as the material of the positioning rib 34. However, if ceramic is used as the material of the positioning rib 34, it is more mechanical than in the case where the positioning rib 34 is made of glass. Strength and heat resistance can be improved. Although glass is also used as the material of the reinforcing spacer 41,
If ceramic is adopted, mechanical strength and heat resistance can be increased as compared with the case where the reinforcing spacer 41 is formed of glass.

On the other hand, when the positioning rib 34 and the reinforcing spacer 41 are made of an insulating material such as insulating glass or insulating ceramic, the electron source element 10
The positioning ribs 34 and the reinforcing spacers 41 are charged by the electron beam emitted from the electron beam and affect the electric field between the collector electrode 9 and the surface electrode 7 (see FIG. 3) of the electron source element 10, and the trajectory of the electron beam. May bend. In order to prevent the occurrence of this kind of problem, the positioning rib 34 or the reinforcing spacer 41 may be made conductive. If the positioning ribs 34 or the reinforcing spacers 41 are made conductive in this way, it is possible to prevent the positioning ribs 34 and the reinforcing spacers 41 from being charged by the electron beam emitted from the electron source element 10. The trajectory of the electron beam emitted from the source element 10 can be prevented from bending. Therefore,
In a configuration in which the fluorescent substance 32 is provided for each pixel and the fluorescent substance 32 and the electron source element 10 correspond to each other on a pixel-by-pixel basis, the electron beam reaches the fluorescent substance 32 corresponding to the adjacent electron source element 10. Crosstalk can be prevented. In order to make the positioning ribs 34 or the reinforcing spacers 41 conductive, for example, the surface of an insulating material may be coated with a conductive material.

For example, when the positioning rib 34 has an insulating property and the reinforcing spacer 41 has a conductive property, the reinforcing spacer 41 has a conductive property so that the electron source element 10 emits radiation. Since the reinforcing spacer 41 can be prevented from being charged by the generated electron beam, it is possible to prevent the trajectory of the electron beam emitted from the electron source element 10 from being bent, and the positioning rib 34 has an insulating property. By doing so, even though the reinforcing spacer 41 has conductivity, a short circuit may occur between the electron source element 10 and the anode electrode 9 via the reinforcing spacer 41,
It is possible to prevent a leak current from flowing.

(Embodiment 2) The basic structure of the display device of this embodiment is substantially the same as that of Embodiment 1 shown in FIGS. 1 and 2, and as shown in FIG. The side opposite to 30 is formed to have a concave cross-section that is open (that is, the rear plate 20 side is formed to have a concave cross-section), and the reinforcing spacer 41 is sandwiched between both side walls 34a and 34a. The points are different.
Other configurations are similar to those of the first embodiment, and therefore illustration and description thereof are omitted.

In the present embodiment, however, one reinforcing spacer 41 can be sandwiched by one positioning rib 34 from both sides in the thickness direction, so that one pair of positioning ribs 34 is used as in the first embodiment. The number of the positioning ribs 34 can be reduced as compared with the case where the reinforcing spacer 41 is sandwiched from both sides, and the panel body is easily manufactured. Further, in the configuration of the first embodiment, it is necessary to dispose the pair of positioning ribs 34 with a predetermined distance set according to the thickness of the reinforcing spacer 41, but in the present embodiment, the positioning ribs 34 are formed. Since the opening width of the positioning rib 34 (distance between the side walls 34a) may be set at any time according to the thickness of the reinforcing spacer 41, the panel body can be manufactured more easily.

Further, in the present embodiment, the positioning rib 34
Is formed to have a concave cross section, the reinforcing spacer 41
In order to prevent short circuit between the electron source element 10 and the anode electrode 9 via the reinforcing spacer 41 and leakage current from flowing, when compared with the first embodiment. Is advantageous.

(Third Embodiment) The basic structure of the display device of this embodiment is substantially the same as that of the second embodiment. As shown in FIG. 7, the black stripe 33 is provided only between the positioning rib 34 and the anode electrode 9. Is only formed. That is, in this embodiment, the black stripes 33 are formed along the positioning ribs 34.
Other configurations are similar to those of the second embodiment, and therefore illustration and description thereof are omitted.

In the present embodiment, however, as in the second embodiment, one reinforcing spacer 41 can be sandwiched by one positioning rib 34 from both sides in the thickness direction. The number of positioning ribs 34 can be reduced as compared with the case where one reinforcing spacer 41 is sandwiched from both sides by the positioning ribs 34, and the panel body is easily manufactured. Since the opening width of the rib 34 (distance between the side walls 34a) may be set according to the thickness of the reinforcing spacer 41, the panel body can be manufactured more easily.

By the way, in order to manufacture the above-mentioned panel body, after the positioning rib 34 integrally provided with the black stripe 33 is arranged in the display area of the face plate 30 with the black stripe 33 interposed, the The fluorescent substance 32 may be formed in the display area of the plate 30, and then the reinforcing spacer 41 may be positioned and fixed to the face plate 30 by the positioning rib 34. When forming the fluorescent substance 32, for example, a slurry in which the fluorescent substance is mixed with a photosensitizer is applied to the entire surface on one surface side of the face plate 30 and a portion where the fluorescent substance 32 is to be formed is irradiated with ultraviolet rays using a shadow mask. It is possible to form a pattern of the fluorescent substance 32 by leaving only the exposed portion as the fluorescent substance 32 by exposing and curing by, and developing.

According to the above-described manufacturing method, the positioning rib 34 integrally provided with the black stripe 33 is provided on the display area of the face plate 30 to form the black stripe 3.
Since the black stripes 33 are arranged with the interposing 3, the step of forming the black stripes 33 on the face plate 30 can be omitted, and since the fluorescent substance 32 is formed after the formation of the positioning ribs 34, the positioning ribs 34 are formed. Since it is not necessary to consider the influence of the process on the fluorescent substance 32, there are few restrictions on the process of forming the positioning rib 34 and the positioning rib 3
4 is easy to form, and since the fluorescent substance 32 is formed before the reinforcing spacer 41 is arranged, the fluorescent substance 32
Pattern formation is easy, and the positioning rib 34
Since the reinforcing spacer 41 can be positioned by
The reinforcing spacer 41 can be accurately and easily positioned.

(Embodiment 4) The basic structure of the display device of this embodiment is the same as that of Embodiment 1 shown in FIGS. 1 and 2, and as shown in FIG. The difference is that they are arranged avoiding the display area. The positioning ribs 34 are preferably arranged so that the reinforcing spacer 41 can be sandwiched at both ends in the longitudinal direction of the reinforcing spacer 41 from both sides in the thickness direction. Since other configurations are the same as those of the first embodiment, the same components as those of the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

In this embodiment, however, there are few restrictions on the shape of the positioning rib 34 and the manufacturing process, and the positioning rib 34 can be easily manufactured.

To manufacture the panel body described above, for example, after forming the black stripes 33 in the display area of the face plate 30, the face plate 3 is formed.
The fluorescent substance 32 is formed in a region excluding the black stripe 33 in the display region of 0, and then the positioning ribs 34 are arranged so as to avoid the display region of the face plate 30, and then the reinforcing spacer 41 is provided in the face plate 3.
The positioning rib 34 may be positioned with respect to 0 and fixed. The black stripe 33
The fluorescent substance 32 may be formed by a method similar to that of the first embodiment. According to this manufacturing method, the black stripe 33 and the fluorescent substance 32 can be sequentially formed before the positioning rib 34 and the reinforcing spacer 41 are provided. Since the patterns of the stripes 33 and the fluorescent substance 32 can be easily formed, and the reinforcing spacers 41 can be positioned by the positioning ribs 34, the reinforcing spacers 41 can be accurately and easily positioned.

By the way, as a method of manufacturing the above-mentioned panel body, the following method may be adopted.

For example, after the positioning rib 34 is provided in the area of the face plate 30 excluding the display area, the black stripe 33 is formed in the display area of the face plate 30, and then in the display area of the face plate 30. After forming the fluorescent substance 32 in the region excluding the black stripes 33, the reinforcing spacer 41 may be positioned and fixed to the face plate 30 by the positioning ribs 34.

According to this manufacturing method, the positioning rib 34 is formed before the black stripe 33 and the fluorescent substance 32 are formed. Therefore, the influence of the forming process of the positioning rib 34 on the black stripe 33 and the fluorescent substance 32 is considered. Since the positioning rib 34 can be easily formed because there are few restrictions on the process of forming the positioning rib 34, and the reinforcing rib 41 can be positioned by the positioning rib 34, the reinforcing rib 41 can be reinforced without affecting the fluorescent substance 32. The spacer 41 can be accurately and easily positioned.

Further, in this embodiment, the positioning rib 34
Is provided so as to avoid the display area, the positioning rib 34 can be formed integrally with the rear plate 20 by using ceramic or glass as the material of the positioning rib 34.

In each of the above embodiments, the electron source element 1
As the electron source element 10, a Spindt-type electron source element, a MIM (Metal-Insulator-Metal) -type electron source is used as the electron source element 10. Element, MOS (Metal-Oxide-Semiconducto
Various structures such as r) type electron source elements can be adopted.

[0053]

According to the first aspect of the present invention, a rear plate having an electron source element for radiating an electron beam disposed on one surface side thereof, and an electron beam emitted from the electron source element disposed so as to face the rear plate are excited. A face plate provided with a fluorescent substance that emits light in a display area, a frame interposed between the rear plate and the face plate, and a plate disposed inside the frame for maintaining a distance between the face plate and the rear plate -Like reinforcing spacers so that the space surrounded by the rear plate, the face plate, and the frame is maintained in a vacuum, and the reinforcing spacers are provided on both sides of the face plate facing the rear plate from both sides in the thickness direction. It is provided with positioning ribs for sandwiching and positioning, and a reinforcing spacer is provided on the side of the face plate facing the rear plate. The positioning rib for positioning across both sides of the viewing direction is provided, there is an effect that the reinforcement spacers at the time of manufacture can be disposed accurately easily positioned. Therefore, there are advantages that the manufacturing is facilitated, the yield is improved, and the area is easily increased.

According to a second aspect of the invention, in the first aspect of the invention, the positioning rib is arranged in the display area of the face plate, so that the reinforcing spacer is placed at a desired position in the display area. Therefore, there is an effect that it is possible to dispose with high accuracy and easily.

According to a third aspect of the present invention, in the second aspect of the present invention, the black stripe for partitioning the fluorescent material into a plurality of areas in the display area is interposed between the positioning rib and the face plate. It is not necessary to separately provide a region for disposing the positioning rib in the display region, and it is possible to display a high-definition image when an image is displayed in the display region.

According to a fourth aspect of the present invention, in the first aspect, the positioning ribs are arranged so as to avoid the display area of the face plate, so that there are restrictions on the shape of the positioning ribs and the manufacturing process. There is an effect that the number of the positioning ribs is small and the positioning ribs can be easily formed.

According to a fifth aspect of the invention, in the first to fourth aspects of the invention, since the positioning ribs or the reinforcing spacers are made of ceramic, when the positioning ribs or the reinforcing spacers are made of glass, Compared with this, there is an effect that mechanical strength and heat resistance can be increased.

According to a sixth aspect of the present invention, in the first to fifth aspects of the invention, an anode electrode made of a transparent conductive film is provided in the display area of the face plate farther from the rear plate than the positioning ribs. Since the positioning ribs or the reinforcing spacers have conductivity, it is possible to prevent the positioning ribs or the reinforcing spacers from being charged by the electron beam emitted from the electron source element. There is an effect that it is possible to prevent the trajectory of the electron beam emitted from the element from bending. Therefore, when the fluorescent substance is provided for each pixel and the fluorescent substance and the electron source element have a one-to-one correspondence for each pixel, crosstalk between pixels can be prevented.

According to a seventh aspect of the present invention, in the first to fifth aspects of the invention, an anode electrode made of a transparent conductive film is provided in the display area of the face plate, and the anode electrode is the positioning rib. Since the positioning rib is disposed farther from the rear plate, the positioning rib has an insulating property, and the reinforcing spacer has a conductive property, the reinforcing spacer has a conductive property. The reinforcing spacer can be prevented from being charged by the electron beam emitted from the source element, the trajectory of the electron beam emitted from the electron source element can be prevented from bending, and the positioning rib is insulated. Since the reinforcing spacer has conductivity, the reinforcing spacer is provided between the electron source element and the anode electrode even though the reinforcing spacer has conductivity. Or shorted via a spacer, there is an effect that can be prevented or the leakage current flows.

The invention of claim 8 is the method of manufacturing a display device according to claim 3, wherein after the black stripe is formed in the display area of the face plate, the positioning rib is overlapped with the black stripe. After that, the fluorescent material is formed in a region of the display area of the face plate excluding the black stripes, and then the reinforcing spacers are positioned and fixed to the face plate by the positioning ribs. Since the black stripes can be formed before the positioning ribs are formed, the black stripes can be easily formed, and the fluorescent substance is formed after the positioning ribs are formed. It is necessary to consider the effect of the rib forming process on the fluorescent material. In addition, there are few restrictions on the step of forming the positioning ribs, the positioning ribs can be easily formed, and since the fluorescent substance is formed before the reinforcing spacers are arranged, it is easy to form the pattern of the fluorescent substance. Also, since the reinforcing spacers can be positioned by the positioning ribs, there is an effect that the reinforcing spacers can be accurately and easily positioned.

The invention of claim 9 is the method of manufacturing a display device according to claim 3, wherein the positioning rib integrally provided with the black stripe is provided in the display area of the face plate with the black stripe interposed. Characterized in that the fluorescent substance is formed in the display area of the face plate, and then the reinforcing spacers are positioned and fixed to the face plate by the positioning ribs. Since the positioning rib integrally provided with the black stripe is arranged in the display region of the face plate with the black stripe interposed, the step of forming the black stripe on the face plate can be omitted. And forming the fluorescent material after forming the positioning ribs. Therefore, it is not necessary to consider the influence of the forming process of the positioning rib on the fluorescent substance, the restriction of the forming process of the positioning rib is small, and the forming of the positioning rib is easy, and the reinforcing spacer is arranged. Since the fluorescent material is formed before, the pattern formation of the fluorescent material is easy, and the reinforcing spacers can be positioned by the positioning ribs,
There is an effect that the reinforcing spacer can be accurately and easily positioned.

According to a tenth aspect of the present invention, in the method of manufacturing a display device according to the fourth aspect, after the black stripe is formed in the display area of the face plate, the black in the display area of the face plate is formed. The fluorescent material is formed in a region excluding the stripes, and then the positioning ribs are arranged so as to avoid the display region of the face plate, and then the reinforcing spacers are positioned with respect to the face plate by the positioning ribs. The black stripes and the fluorescent substance can be sequentially formed before the positioning ribs and the reinforcing spacers are provided, so that the pattern formation of the black stripes and the fluorescent substance is easy, and , Position the reinforcing spacers by the positioning ribs Since it Mel, the reinforcing spacer there is an effect that it is possible to accurately easily position.

The invention of claim 11 is the method of manufacturing a display device according to claim 4, wherein after the positioning rib is provided in a region of the face plate excluding the display region,
The black stripe is formed in the display area of the face plate, and then the fluorescent material is formed in the area of the display area of the face plate excluding the black stripe, and then the reinforcing spacer is formed on the face plate. On the other hand, the positioning rib is positioned and fixed by the positioning rib. Since the positioning rib is formed before the black stripe and the fluorescent material are formed, the step of forming the positioning rib includes the black stripe and the fluorescent material. Since it is not necessary to consider the influence on the positioning ribs, the positioning ribs can be easily formed, and the reinforcing ribs can be positioned by the positioning ribs. The above supplement without affecting The use spacers there is an effect that accuracy can be easily positioned.

[Brief description of drawings]

FIG. 1 is a partially cutaway schematic perspective view showing the first embodiment.

FIG. 2 is a sectional view of relevant parts of the same.

FIG. 3 is an operation explanatory view of the electron source element used in the above.

FIG. 4 is an operation explanatory view of the electron source element used in the above.

FIG. 5 is an operation explanatory view of the electron source element used in the above.

FIG. 6 is a cross-sectional view of essential parts showing a second embodiment.

FIG. 7 is a main-portion cross-sectional view showing a third embodiment.

FIG. 8 is a schematic perspective view showing a fourth embodiment and a part of which is cut away.

FIG. 9 is a schematic perspective view showing a conventional example and partially broken.

[Explanation of symbols] 9 Anode electrode 10 Electron source element 20 Rear plate 30 face plate 32 Fluorescent substance 33 black stripes 34 Positioning rib 41 Reinforcing spacer

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yoshiaki Honda             1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd.             Inside the company F-term (reference) 5C012 AA05 BB07                 5C032 CC10                 5C036 CC14 EE09 EE14 EE15 EF01                       EF06 EF09 EG02 EG24 EG36                       EH09 EH10

Claims (11)

[Claims] 1. A rear plate having an electron source element for radiating an electron beam on one surface side, and a fluorescent substance which is arranged so as to face the rear plate and emits light when excited by an electron beam emitted from the electron source element. A face plate provided in the display area, a frame interposed between the rear plate and the face plate, and a plate-shaped reinforcing spacer arranged inside the frame for maintaining a distance between the face plate and the rear plate. A space surrounded by the rear plate, the face plate, and the frame is maintained in a vacuum, and a positioning rib for sandwiching the reinforcing spacer from both sides in the thickness direction is provided on the side of the face plate facing the rear plate. A display device characterized by being provided. 2. The display device according to claim 1, wherein the positioning rib is provided in a display area of the face plate. 3. The display device according to claim 2, wherein a black stripe partitioning the fluorescent material into a plurality of areas in the display area is interposed between the positioning rib and the face plate. 4. The display device according to claim 1, wherein the positioning ribs are arranged so as to avoid the display area of the face plate. 5. The positioning ribs or the reinforcing spacers are made of ceramic.
The display device according to claim 4. 6. The display device according to claim 1, wherein the positioning rib or the reinforcing spacer has conductivity. 7. An anode electrode made of a transparent conductive film, which is arranged in the display region of the face plate,
The anode electrode is arranged at a position farther from the rear plate than the positioning rib, the positioning rib has an insulating property, and the reinforcing spacer has a conductive property. The display device according to any one of 1. 8. The method for manufacturing a display device according to claim 3, wherein after the black stripe is formed in the display area of the face plate, the positioning rib is arranged so as to overlap the black stripe, After that, after forming the fluorescent material in a region of the display region of the face plate excluding the black stripes, the reinforcing spacers are positioned and fixed to the face plate by the positioning ribs. Method for manufacturing display device. 9. The method of manufacturing a display device according to claim 3, wherein the positioning rib integrally provided with the black stripe is arranged in the display region of the face plate with the black stripe interposed. After doing
A method of manufacturing a display device, comprising forming the fluorescent material in the display region of the face plate, and then positioning and fixing the reinforcing spacers to the face plate by the positioning ribs. 10. The method of manufacturing a display device according to claim 4, wherein after forming the black stripes in the display region of the face plate, a region of the display region of the face plate excluding the black stripes. Forming the fluorescent material on the face plate, arranging the positioning ribs so as to avoid the display area of the face plate, and then positioning and fixing the reinforcing spacers to the face plate by the positioning ribs. And a method of manufacturing a display device. 11. The method of manufacturing a display device according to claim 4, wherein the positioning rib is provided in a region of the face plate excluding the display region, and then the black stripe is provided in the display region of the face plate. After that, the fluorescent material is formed in a region other than the black stripes in the display region of the face plate, and then the reinforcing spacer is positioned and fixed to the face plate by the positioning rib. A method of manufacturing a display device, comprising: