JP2003172684A - Scanning probe microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scanning probe microscope which prevents a probe from being separated from a face of a sample due to the thermal expansion, the thermal shrinkage or the like by the heating operation and the cooling operation of the sample and which controls the probe so as not to be separated from the surface of the sample due to the thermal expansion, the thermal shrinkage or the like by the heating operation and the cooling operation of the sample. <P>SOLUTION: The scanning probe microscope is composed of a cantilever which has a very small probe at its tip, a means which detects the displacement of the cantilever or the sample at a definite cycle in a desired amplitude amount, a means which heats and cools the sample and a sample movement means which moves the sample, and the surface shape or the surface physical property of the sample is measured. A follow-up means by which the sample movement means is moved wholly up and down is installed. Thereby, the probe is controlled so as not to be separated from the face of the sample due to the thermal expansion, the thermal shrinkage or the like of a constituent element by the heating operation and the cooling operation of the sample, and the probe is controlled so as to be pressed desirably with reference to the face of the sample even while a temperature is being changed. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cantilever having a fine probe at its tip, a means for detecting the displacement of the cantilever, a means for vibrating the cantilever or the sample at a desired amplitude in a constant cycle, and heating and cooling the sample. The present invention relates to a scanning probe microscope which comprises a means and a sample moving means for moving the sample, and measures the surface shape or surface physical properties of the sample.

[0002]

2. Description of the Related Art A conventional scanning probe microscope heats a cantilever having a minute probe at its tip, a means for detecting displacement of the cantilever, a means for vibrating the cantilever or the sample at a desired amplitude in a constant cycle, and a sample. In a scanning probe microscope that measures the surface shape or surface physical properties of the sample, which consists of a cooling means and a sample moving means that moves the sample, when changing the sample temperature, move the probe away from the sample surface to stabilize the temperature. Then, the probe was brought into contact with the sample surface to measure the surface shape or surface physical properties of the sample. When the temperature is changed to another temperature, the probe is once removed from the sample surface, and after it becomes stable at another temperature, the probe is brought into contact with the sample surface again to measure the surface shape or surface physical properties of the sample. It was done.

[0003]

In the conventional scanning probe microscope, if the probe is kept in contact with the sample surface when the sample temperature is not stable, the structure of the sample, sample stage, sample moving means, etc. The element has a defect that the probe is separated from the sample surface due to a change in the amount of thermal expansion or, conversely, is pressed too much against the sample surface. When changing the temperature, move the probe away from the sample surface once, and after the temperature stabilizes, contact the probe again with the sample surface and measure the surface shape or surface physical properties of the sample. Since the probe is repeatedly separated from the sample surface again, there is a drawback that the measurement takes time.

[0004]

In order to solve the above problems, in the present invention, a cantilever having a minute probe at its tip, a displacement detecting means for detecting displacement of the cantilever, and a cantilever or a sample are periodically arranged. In a scanning probe microscope that measures the surface shape or surface physical properties of a sample, it consists of a vibrating means that vibrates with a desired amplitude, a heating and cooling means that heats and cools the sample, and a sample moving means that moves the sample. By providing a follow-up device for moving up and down, the probe is controlled so as not to separate from the sample surface due to thermal expansion, thermal contraction, etc. accompanying heating and cooling of the sample.
Further, the probe is pressed against the surface of the sample at a desired pressure so as to be constantly controlled even during temperature change due to thermal expansion and contraction due to heating and cooling of the sample.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention is, as shown in the figure, a cantilever having a minute probe at its tip, a means for detecting displacement of the cantilever, and a means for vibrating the cantilever or the sample at a desired amplitude in a constant cycle. And a sample moving means for moving the sample and a means for moving the sample, and in the scanning probe microscope for measuring the surface shape or surface physical properties of the sample, by providing a follow-up means for vertically moving the entire sample moving means, The probe is controlled so as not to separate from the sample surface due to thermal expansion and thermal contraction of the constituent elements accompanying heating and cooling. In addition, the probe is pressed against the surface of the sample so as to be constantly controlled by thermal expansion and contraction of the constituent elements accompanying the heating and cooling of the sample. The probe facilitates temperature-dependent measurement of changes in physical properties of the sample surface while the probe remains in contact with the sample surface even during temperature changes. It also facilitates accurate measurement of physical properties obtained by keeping the probe pressed against the sample surface. In addition, the measurement is not stopped until the temperature becomes stable, and the measurement time can be shortened.

[0006]

EXAMPLES Examples will be described with reference to the drawings.
1, 2, and 3 are schematic diagrams of the measuring method in the scanning probe microscope of the present invention. As an example of measuring the viscoelasticity in the surface physical property measurement by vibrating the sample by using the vertical movement built in the sample moving means as the modulation input as a means for vibrating the cantilever or the sample with a desired amplitude amount in a constant cycle. It will be explained in 1. Cantilever 1
Has a probe 2 at the tip thereof and is in contact with the sample 3. The sample 3 is installed on the heating / cooling means 4. The heating / cooling means 4 is installed in the sample moving means 5. The sample moving means 5 is capable of vertical movement and plane movement. By operating in the vertical direction, it is possible to apply repeated vibrations of pressing and releasing the needle tip against the sample surface. In the operation in the plane direction, the contact position between the probe and the sample surface can be moved relatively. The sample moving means 5 is installed on the following means 11. The sample moving means 5 is capable of vertical movement, but since a piezoelectric element or the like is used, the vertical movement amount is as small as several microns. The follow-up means 11 is composed of an actuator such as a motor and a feed screw mechanism, and the vertical movement amount can be several millimeters or more.
The follow-up means 11 may be a laminated type piezoelectric element in order to increase the movement amount.

The vibration of the sample is given as a modulation input 6 by the vertical movement built in the sample moving means 5. The cantilever 1 is irradiated with the laser 7, and the reflected light reaches the displacement detecting means 8. The output signal 9 indicates the displacement of the cantilever 1 depending on the arrival position of the displacement detection means 8 of the reflected light
Obtained as.

A sine wave is generally used for the modulation input 6, and the waveform of the output signal 9 has a characteristic of being delayed in time with respect to the input waveform. The magnitude of the time delay is a value that represents the viscoelastic properties of the sample. When the amplitude of the modulation input 6 is A0, the amplitude of the output signal is A1. If the sample is soft, the output amplitude A1 is the input amplitude A0
It gets smaller. The viscoelastic property of the sample can be measured even with the magnitude of the value of the output amplitude A1. As the modulation input, instead of the sample moving means 5, another vibrating means 10 installed on the cantilever side 1 may be used.

The case of heating by the heating / cooling means will be described with reference to FIG. When heated as shown in FIG. 2A, the constituent elements such as the sample 3, the heating / cooling means 4, the sample moving means 5 expand due to thermal expansion of themselves. The contact surface between the probe 2 and the sample 3 extends upward, and the upper surface of the cantilever 1 is deformed into a concave state in an attempt to lift the probe 2 upward as well. Laser 7
The reflected light of is the original state when it is not heated to the reflected light 12. When the constituent element thermally expands by heating, the position of the reflected light 13 at the time of thermal expansion and reaching the displacement detecting means 8 changes. In this case, the probe 2 is excessively pressed against the sample surface. Therefore, as shown in FIG. 2B, the follower 11 is operated downward so that the concave surface deformation of the cantilever 1 is returned to the original state, and the reflected light 12 is obtained. In this case, the degree of pressing the probe 2 against the sample surface is the same as in the original state. If the heating temperature is further raised, the amount of thermal expansion of the constituent element also increases. However, by controlling the downward direction by the follow-up means 11 so that the reflected light 12 is always present, the probe 2 is pressed against the sample surface to a constant extent. It becomes possible to measure the physical properties according to the condition.

Next, the case of cooling by the heating / cooling means 4 will be described with reference to FIG. As shown in FIG. 3A, the heating / cooling means 4 is connected to the relay cooling means 16 and the heat conduction means 15. The relay cooling means 16 is cooled with liquid nitrogen or the like. The medium for cooling the relay cooling means 16 may be something other than liquid nitrogen. Alternatively, a Peltier element or the like may be used. For the heat conduction means 15, for example, copper foil or the like is used. The foil is flexible so as not to restrict the operation of the sample moving means 5. Besides copper foil, silver foil, gold foil, metal foil, etc. may be used. When cooled, the constituent elements such as the sample 3, the heating / cooling means 4, the sample moving means 5 contract due to thermal expansion of themselves. The contact surface between the probe 2 and the sample 3 extends downward, and the probe 2 separates from the sample surface. The reflected light of the laser 7 is the reflected light 12 when the probe 2 is in contact with the sample 3, and presses the sample surface with an appropriate force. When the probe 2 contracts due to thermal contraction of the constituent elements, the position of the reflected light 14 when the probe 2 is separated and reaching the displacement detecting means 8 changes. In this case, the probe 2 is completely separated from the sample surface. Therefore, as shown in FIG. 3B, the follow-up means 11 is operated in the upward direction to bring the probe 2 into contact with the sample surface and control and follow the reflected light 12. In this case, the degree to which the probe 2 is pressed against the sample surface is the same as in the original state. If the cooling temperature is further lowered, the amount of thermal contraction of the constituent element also increases, but if the follow-up means 11 is controlled upward so that the reflected light 12 is always reflected, the probe 2 is pressed to the surface of the sample at a constant degree. All physical properties can be measured.

As described above, the follow-up means 11 keeps the probe 2 in contact with the sample surface even when the temperature is changed by heating and cooling, and keeps the probe 2 pressed against the sample surface at a constant level.
This enables continuous measurement of physical properties.

FIG. 4 shows an embodiment in which the temperature is changed while the probe 2 is kept in contact with the sample surface. As shown in FIG. 4A, the temperature is raised at a constant rate, for example. Probe 2
Is kept in contact with the sample surface, or the temperature is raised while controlling the follower 11 so that the pressing of the probe 2 against the sample surface is constant, and at the same time, the change in amplitude is measured.
As shown in FIG. 4B, a graph is displayed in which the sample 3 becomes softer and the amplitude becomes smaller as the temperature rises, for example. Similarly, the temperature of the probe 2 is kept in contact with the sample surface, or the temperature of the output signal 9 is changed by controlling the temperature of the probe 2 so that the pressing force of the probe 2 against the sample surface is kept constant while controlling the temperature rise. Measure. Figure 4
As shown in (C), for example, as the temperature rises, the sample 3 becomes softer at a certain temperature and the time delay increases,
On the other hand, if the temperature exceeds the appropriate temperature, the change in the sample composition will make the sample harder and the time delay will decrease. The graph may be displayed in real time during the temperature rise, or may be stored after the display ends. The method of changing the temperature is not limited to the temperature increase (heating) but may be the temperature decrease (cooling). Further, the temperature may be raised and lowered in a stepwise manner instead of the constant rate of temperature raising and lowering. In either case, the change in the viscoelastic property of the sample surface can be continuously measured while the probe 2 is kept in contact with the sample surface or while the probe 2 is kept pressed against the sample surface.

It is also possible to continuously measure at one point (measurement point) on the sample without moving the probe 2 horizontally with respect to the sample surface. Alternatively, the sample moving means 5 may repeatedly move and return the probe 2 with respect to the sample 3 in the horizontal direction, and the average value of one line (measurement line) on the sample surface may be measured and continuously measured and displayed. Alternatively, the probe 2 may be moved in a certain area on the sample surface, and the average value in the area may be measured for continuous measurement and display.

Up to this point, the example of viscoelasticity has been described as the physical property obtained by pressing the probe 2 against the sample surface. On the other hand, the surface physical properties obtained by focusing on separating the probe 2 from the sample surface include the adsorption property of the sample surface. FIG. 3 shows an embodiment in which the probe 2 is repeatedly brought into contact with and separated from the sample surface. In FIG. 5A, the probe is in contact with the portion 31 on the sample surface where the adsorption is small. When the sample 3 is moved downward in FIG. 5B, the cantilever 1 is in a fishing rod state. The extent to which the probe 2 is pulled toward the sample can be known by detecting the reflected light of the laser 7 applied to the cantilever 1 with the displacement detecting means 8. If the sample 3 is moved further downward in FIG. 5C, the probe 2 is separated from the sample surface. Next, referring to FIG.
Is in contact with the portion 32 on the sample surface where the adsorption is large.
When the sample 3 is moved downward in FIG. 5 (E), the cantilever 1 is in a fishing rod state. The extent to which the probe 2 is pulled toward the sample can be known by detecting the reflected light of the laser 7 applied to the cantilever 1 with the displacement detecting means 8. If the sample 3 is moved further downward in FIG. 5 (F), the probe 2 separates from the sample surface. In the part 32 where the adsorption is large, the suspended rod state of the cantilever 1 is remarkable, and the probe 2
The displacement of the probe 2 is small in the portion 31 where the adsorption is small, and the degree of the rod shape of the cantilever 1 is small. Thus, by measuring the amount of displacement of the probe 2 when it is separated from the sample surface, it is possible to measure the magnitude of the suction force at the point on the sample surface, that is, the suction characteristic.

The temperature is changed by repeatedly contacting and separating the probe 2 from the sample surface. The follow-up means 11 controls the pressing condition when the probe 2 comes into contact with the sample surface to be constant. The degree of the fishing rod state immediately before the probe 2 is separated is measured by the displacement detecting means 8. If the measurement is performed during the temperature change, the temperature dependence of the adsorption property on the sample surface can be continuously measured. Instead of moving the probe 2 horizontally with respect to the sample, continuous measurement may be performed at one point (measurement point) on the sample. Further, the probe 2 may be moved and returned in the horizontal direction with respect to the sample 3 repeatedly by the sample moving means 5, and one line (measurement line) on the sample surface may be measured and continuously measured and displayed.
Alternatively, the probe 2 may be moved two-dimensionally over a certain area on the sample, and the average value in the area may be measured for continuous measurement and display. In either case, a temperature dependence graph of adsorption characteristics can be obtained.

FIG. 6 shows an embodiment in which the sample 3 is moved relative to the probe 2 in the horizontal direction by the sample moving means 5 and the cantilever 1 is twisted by friction or the like to measure the frictional characteristics. FIG. 6A shows a case where the longitudinal direction of the cantilever 1 having the probe 2 is perpendicular to the paper surface. The probe 2 is in contact with the sample surface. The sample 3 is moved in a direction orthogonal to the longitudinal direction of the cantilever 1 so that the cantilever 1 is easily twisted. The amount of twist is small in the portion 33 where the friction is small. In FIG. 6 (B), when the probe 2 with the fine particles comes to the portion 34 with large friction, the amount of twist becomes large. Figure 6
In (C), if the probe 2 comes again to the portion 33 where the friction is small, the twist amount becomes small. By measuring the amount of twist of the probe, the magnitude of the frictional force at the point on the sample surface, that is, the frictional characteristic can be measured. The temperature of the probe 3 is changed by repeatedly moving and returning the probe 2 in the horizontal direction with respect to the sample 3. The tracking means 11 controls the probe 2 so that the degree of pressing the probe 2 against the sample surface is constant even during temperature change. The amount of twist of the probe 2 is measured by the displacement detecting means 8. The temperature dependence of the frictional properties of the sample surface can be measured continuously if the measurement is performed during the temperature change. Continuous measurement may be performed at one point (measurement point) on the sample surface by inclining the probe 2 with a movement amount that twists the cantilever 1 without moving the probe 2 largely in the horizontal direction with respect to the sample 3. . Further, the probe 2 may be moved and returned horizontally with respect to the sample 3 by the sample moving means 5 to measure one line (measurement line) on the sample surface for continuous measurement and display. Alternatively, the probe 2 may be moved two-dimensionally over a certain area of the sample surface to measure the inside of the area for continuous measurement and display. In either case, a temperature dependence graph of friction characteristics can be obtained.

For the purpose of measuring the frictional characteristics, instead of vertically vibrating the sample, the horizontal movement of the sample moving means 5 moves the sample 3 horizontally relative to the probe 2 at a desired frequency. Alternatively, the sample surface may be measured while vibrating with the amount of vibration. The amount of twist is large in the high-friction portion 34,
Since the amount of twist is small at the portion 33 having a small friction, the friction characteristics of the sample surface may be continuously measured by changing the temperature while vibrating in the horizontal direction.

Another embodiment in which the probe 2 is kept in contact with the sample or the probe is repeatedly brought into contact with and separated from the sample surface to perform heating and cooling, and the surface unevenness image and the physical property image are measured and recorded as a mapping image. An example is shown in FIG. It displays and stores the surface unevenness image and the physical property image. When the temperature becomes different, the surface unevenness image and the physical property image are displayed and stored. Note that the temperature may be continuously displayed and stored during the temperature change. As the physical property image, a viscoelastic property mapping image may be displayed. Alternatively, a friction characteristic mapping image or a suction characteristic mapping image may be used.

The change of the surface unevenness image due to the temperature may be displayed in real time without vibrating the cantilever 1 or the sample 3, or may be continuously displayed and sequentially stored.

[0020]

The present invention is carried out in the form as described above, and has the following effects. It consists of a cantilever with a minute tip at the tip, a means for detecting displacement of the cantilever, a means for vibrating the cantilever or the sample at a desired amplitude in a fixed cycle, a means for heating and cooling the sample, and a sample moving means for moving the sample. In a scanning probe microscope that measures the surface shape or surface physical properties of a sample, by providing a follow-up unit that moves the sample moving unit up and down, the probe can be expanded and contracted due to thermal expansion and contraction of the components accompanying heating and cooling of the sample. Control was performed so that the sample surface was not separated. Further, even if there is thermal expansion or thermal contraction of the constituent elements due to heating and cooling of the sample, the probe is controlled so as to be constant with a desired pressing force against the sample.
Since the probe can be kept in contact with the sample during the temperature change, there is an effect of facilitating the temperature-dependent measurement of the property change of the sample surface. In addition, there is also an effect of facilitating accurate measurement of physical property values obtained by making the degree of pressing the probe against the sample surface constant. Further, there is also an effect that the measurement is not stopped until the temperature becomes stable and the measurement time can be shortened.

[Brief description of drawings]

FIG. 1 is a schematic diagram of the present invention when measuring viscoelastic properties with a scanning probe microscope.

2A to 2B are schematic diagrams for explaining thermal expansion and follow-up control of constituent elements during heating with a scanning probe microscope.

FIGS. 3A to 3B are schematic views for explaining thermal contraction and follow-up control of constituent elements during cooling with a scanning probe microscope.

4 (A) to 4 (C) are schematic diagrams showing the amplitude and time delay obtained as a change in physical properties while the probe is in contact with the sample surface during temperature change in the scanning probe microscope.

5 (A) to 5 (F) are schematic diagrams showing an example in which an adsorption characteristic is obtained by a scanning probe microscope.

FIGS. 6A to 6C are schematic views showing an example in the case of obtaining a friction characteristic with a scanning probe microscope.

FIG. 7 is a schematic diagram showing an example in which a surface unevenness image and a physical property image are measured and recorded even during temperature change by a scanning probe microscope.

[Explanation of symbols]

1 cantilever 2 probe 3 samples 4 Heating / cooling means 5 Sample moving means 6 Modulation input 7 laser 8 Displacement detection means 9 signal output 10 Alternative vibration means 11 Tracking means 12 reflected light 13 Reflected light during thermal expansion 14 Reflected light at a distance 15 Heat transfer means 16 Relay cooling means A0 input amplitude A1 output amplitude 31 Small adsorption area 32 Large adsorption area 33 Small friction 34 High friction area

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) G01N 19/04 G01N 19/04 D 25/16 25/16 C (72) Inventor Yoshiaki Kakura Chiba City, Chiba Prefecture 1-8 Nakase, Mihama-ku Seiko Instruments Co., Ltd. F-term (reference) 2F069 AA60 GG02 HH04 MM34 RR09 2G040 AB07 BA25 CA23 EB02 ZA01

Claims (24)

[Claims] 1. A cantilever having a minute probe at its tip, and displacement detecting means for detecting displacement of the cantilever,
A scanning type which comprises a vibrating means for vibrating the cantilever or the sample with a desired amplitude amount in a constant cycle, a heating / cooling means for heating / cooling the sample, and a sample moving means for moving the sample. A scanning probe microscope, wherein the probe microscope is provided with follow-up means for moving the entire sample moving means up and down. 2. The scanning probe microscope according to claim 1, wherein when the probe is brought into contact with a sample, the displacement or pressing force of the cantilever is constant. 3. A series of heating / cooling operations are performed while the probe is kept in contact with the sample so that the probe does not separate from the sample or the displacement or pressing force of the cantilever becomes constant. The scanning probe microscope according to claim 1 or 2, wherein the temperature dependence of the surface physical properties is continuously measured at one point on the sample surface. 4. The scanning probe microscope according to claim 3, wherein the cantilever displacement detection means obtains the cantilever amplitude amount, and the viscoelastic property is measured as the physical property of the sample surface from the magnitude of the amplitude amount. 5. The scanning according to claim 3, wherein the viscoelastic property is measured as the physical property of the sample surface from the time delay of the output waveform of the means for detecting the displacement of the cantilever with respect to the input waveform of the vibrating means. Type probe microscope. 6. The friction characteristic of the sample surface is obtained by moving the sample in the horizontal direction relatively by the sample moving means with the probe in contact with the sample and measuring the twist amount of the cantilever. The scanning probe microscope according to claim 3. 7. The scanning probe microscope according to claim 6, wherein the displacement detection means of the cantilever measures the displacement of the cantilever while vibrating the sample horizontally with respect to the probe. 8. The probe is repeatedly brought into and out of contact with the surface of the sample by a vertical movement built in the sample moving means, and in particular, when contacting, the displacement or pressing force of the cantilever is controlled to be constant and released. The heating / cooling operation of the sample is performed by the superheat cooling means while obtaining the required displacement of the cantilever, and the adsorption property as a surface physical property at one point on the sample is continuously measured. Alternatively, the scanning probe microscope according to the item 2. 9. The sample is heated and cooled while the probe is kept in contact with the sample so that the probe is not separated from the sample, or the displacement or pressing force of the cantilever is constant. One line (measurement line) on the sample is controlled and heated and cooled by the superheat cooling means.
The scanning probe microscope according to claim 1 or 2, wherein the temperature dependence of the surface physical properties is continuously measured. 10. The scanning probe microscope according to claim 9, wherein an amplitude amount of the cantilever is obtained by the displacement detecting means, and a viscoelastic property is measured as a physical property of the sample surface from the magnitude of the amplitude amount. 11. The viscoelastic property as the physical property of the sample surface is measured from the time delay of the output waveform obtained by the means for detecting the displacement of the cantilever with respect to the input waveform of the vibrating means. The scanning probe microscope described. 12. The friction characteristic of the sample surface is obtained by moving the sample relatively in the horizontal direction by the sample moving means in a state where the probe is in contact with the sample and measuring the twist amount of the cantilever. The scanning probe microscope according to claim 9. 13. The cantilever displacement detection means measures the sample while vibrating the sample in a horizontal direction at a constant amplitude with respect to the probe with a desired amplitude amount.
2. The scanning probe microscope according to 2. 14. The vertical movement built into the sample moving means repeatedly contacts and separates the probe with respect to the sample surface, and in particular, at the time of contact, the displacement or pressing force of the cantilever is controlled to be constant, 3. The heating / cooling is performed while obtaining the displacement amount of the cantilever necessary for the separation, and the adsorption property of the surface physical property on one line (measurement line) on the sample is continuously measured. Scanning probe microscope. 15. Heating and cooling is performed while the probe is kept in contact with the sample so that the probe does not separate from the sample surface or the displacement or pressing force of the cantilever is constant. The scanning probe microscope according to claim 1, wherein the temperature dependence of the surface physical properties in the measurement region on the sample is continuously measured. 16. The scanning probe microscope according to claim 15, wherein the viscoelastic property is measured as the physical property of the sample surface from the magnitude of the amplitude amount by obtaining the amplitude amount of the output waveform of the displacement detecting means of the cantilever. . 17. The scanning according to claim 15, wherein the viscoelastic property is measured as the physical property of the sample surface from the time delay of the output waveform of the means for detecting the displacement of the cantilever with respect to the input waveform of the vibrating means. Type probe microscope. 18. The friction characteristic of the sample surface is obtained by moving the sample relatively in the horizontal direction by the sample moving means in a state where the probe is in contact with the sample and measuring the amount of twist of the cantilever. 16. The scanning probe microscope according to claim 15. 19. The scanning according to claim 18, wherein the sample moving means measures displacement of the cantilever while vibrating the sample in a horizontal direction with respect to the probe in a predetermined cycle while vibrating at a desired amplitude amount. Type probe microscope. 20. The probe is repeatedly brought into and out of contact with the sample by a vertical movement built in the sample moving means. Particularly, when the probe is contacted, the displacement or pressing force of the cantilever is controlled so as to be constant, and the probe is released. The scanning probe microscope according to claim 1 or 2, wherein heating and cooling are performed while obtaining the required displacement amount of the cantilever, and adsorption properties of surface physical properties in a measurement region on a sample are continuously measured. 21. The heating and cooling are performed while the probe is kept in contact with the sample, and the graph of the temperature-dependent change of the obtained physical property values is displayed and recorded at the same time. The scanning probe microscope according to any one of 16 to 19. 22. The heating and cooling is performed while the probe is in contact with the sample, and the obtained surface unevenness image and the physical property image are measured and recorded as a mapping image.
9. The scanning probe microscope according to any one of 9. 23. The sample is heated and cooled while repeating contact and separation of the probe, and the graph of the temperature-dependent change of the obtained physical property values is displayed and recorded at the same time. Or the scanning probe microscope according to any one of 20. 24. The sample is heated and cooled while repeating contact and separation of the probe to measure and record a surface unevenness image and a physical property image as a mapping image.
The scanning probe microscope according to 0.