JP2003166853A - Scale manufacturing method and its device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scale manufacturing method capable of manufacturing a lengthy scale simply and highly accurately. <P>SOLUTION: This manufacturing method of the scale 110 used for an electromagnetic induction type displacement detection device for detecting the relative moving quantity between a reception module and the scale by detecting the change of a magnetic pattern modulated by a coupling coil by driving a driving coil by electromagnetic coupling by a reception coil, is characterized by having an adhesive layer-attached conductor sheet sticking process (S112) for sticking continuously an adhesive layer-attached conductor sheet 132 on an insulating substrate 112, and a conductor pattern forming process (S114, S116, S118) for utilizing an adhesive layer-attached conductor sheet conductor part 132b as a pattern 168 of the coupling coil after the process (S112). <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scale manufacturing method and apparatus, and more particularly to a method suitable for manufacturing a long scale.

[0002]

2. Description of the Related Art Conventionally, various displacement detectors have been used to detect the displacement amount of two members that move relative to each other, such as various measuring instruments, machine tools, and more recently various information machines. The electromagnetic induction type displacement detection device is widely used because the displacement amount can be detected by.

This electromagnetic induction type displacement detecting device includes a receiving module having a driving coil and a receiving coil,
A coupling coil such as a closed loop coil that modulates the magnetic flux generated from the drive coil is formed, and the scale includes a scale arranged in parallel so as to be movable relative to the receiving module.

The fluctuating magnetic flux generated when the drive coil of the receiving module is AC-driven is modulated by the coupling coil of the scale to form a magnetic pattern of a predetermined period. This magnetic pattern is electromagnetically coupled to the receiving coil of the receiving module, and an induced voltage that changes according to the relative movement with the scale is generated in the receiving coil. Therefore, the relative movement amount between the receiving module and the scale can be detected by detecting the change in the induced voltage generated in the receiving coil.

By the way, the scale of the electromagnetic induction type displacement detection device is required to have electrical characteristics such as high conductivity of the coupling coil and high insulation of the substrate material. Therefore, the scale has the structure shown in FIG.

The scale 10 shown in FIG.
2, a conductor pattern 14 such as a closed loop coil formed on the insulating substrate 12 to form the coupling coil, and a protective film 16 formed on the conductor pattern 14.

The insulating substrate 12 has a high insulating property,
A glass epoxy resin having a thickness of 0.5 mm or more is often used because it is short and easily available. Conductor pattern 1
In No. 4, since a metal foil such as a copper foil having a thickness of about 18 μm sufficiently satisfies the electric characteristics, in the electromagnetic induction type displacement detection device,
It is used a lot.

Scale 1 of this electromagnetic induction type displacement detection device
As a manufacturing method of No. 0, a printing method or the like used for forming a scale of a photoelectric displacement detection device on the insulating substrate 12 made of glass epoxy resin has been adopted. That is, conventionally,
By applying the conductor pattern 14 to the roller surface of the printing machine and transferring the conductor pattern 14 onto the insulating substrate 12,
The conductor pattern 14 was formed on the insulating substrate 12.

[0009]

However, as a method of manufacturing a scale used in an electromagnetic induction type displacement detection device,
If the conventional method is used as it is, it is very difficult to lengthen the scale and improve the accuracy in a wide range.

That is, since the same pattern is repeatedly formed on the scale in the photoelectric displacement detection device and the like, it is possible to adopt a printing method in which a part of the pattern is applied to the roll and transferred to the substrate. On the other hand, in the scale used for the electromagnetic induction type displacement detection device, the positions of the patterns are individually determined, and there is no same pattern.

Therefore, in order to manufacture a long scale for use in the electromagnetic induction type displacement detection device, it is necessary to collectively create a long conductor pattern on an insulating substrate. Therefore, if the conventional method is used as it is, there is a limitation on the pattern length depending on the length of the circumference of the roller.
It was very difficult to lengthen the scale and improve the accuracy of a wide range.

The present invention has been made in view of the above problems of the prior art, and an object thereof is to provide a scale manufacturing method and a scale manufacturing apparatus capable of easily manufacturing a long scale with high accuracy.

[0013]

In order to achieve the above-mentioned object, a method of manufacturing a scale according to the present invention comprises a receiving module having a driving coil and a receiving coil formed therein, and a coupling coil formed therein, and the receiving module being opposed to the receiving module. A scale arranged in parallel so as to be movable, and by driving the driving coil to detect a change in the magnetic pattern modulated by the coupling coil by electromagnetically coupling the receiving coil, the relative position of the receiving module and the scale. A method for manufacturing a scale used in an electromagnetic induction displacement detection device that detects a movement amount is characterized by including a step of attaching a conductor sheet with an adhesive layer and a step of forming a conductor pattern. Here, in the step of attaching the conductor sheet with the adhesive layer, the conductor sheet with the adhesive layer is continuously attached to the insulating substrate.

In the step of forming the conductor pattern, the conductor portion of the conductor sheet with the adhesive layer is used as the pattern of the coupling coil after the step of attaching the conductor sheet with the adhesive layer.

Further, in order to achieve the above-mentioned object, a scale manufacturing method according to the present invention is the same as the scale manufacturing method used in the electromagnetic induction type displacement detection apparatus, and includes an adhesive sheet laminating step and a conductor sheet laminating step. And a conductor pattern forming step. Here, in the adhesive sheet attaching step, the adhesive sheet is continuously attached to the insulating substrate.

Further, in the conductor sheet attaching step, the conductor sheet is continuously attached to the adhesive sheet after the adhesive sheet attaching step. In the conductor pattern forming step, the conductor portion after the conductor sheet is attached is used as the pattern of the coupling coil.

In the present invention, it is preferable that the pattern forming step includes a resist forming step, a resist pattern forming step, and an etching step.

Here, in the resist forming step, a photosensitive resist layer is formed on the conductor sheet after the attachment.

In the resist pattern forming step, a portion of the resist formed in the resist forming step other than the portion covering the planned conductor pattern portion is removed to form a resist pattern.

In the etching step, the resist pattern formed in the resist pattern forming step is used as a mask to remove a portion other than the planned conductor pattern portion of the conductor sheet to form the coupling coil pattern.

Further, in the present invention, it is preferable that the insulating substrate is made of a glass material such as soda lime glass which does not expand or contract due to environmental changes such as temperature and humidity, has high surface accuracy, and is inexpensive. .

Further, in order to achieve the above object, the scale manufacturing apparatus according to the present invention is the scale manufacturing apparatus used in the electromagnetic induction type displacement detecting apparatus, wherein: a conveying means; And a conductor pattern forming means. Here, the carrying means carries the insulating substrate.

The conductor sheet attaching means with the adhesive layer is
A conductor sheet with an adhesive layer is continuously attached to the insulating substrate conveyed by the conveying means.

The conductor pattern forming means sets the conductor portion of the conductor sheet with the adhesive layer as the pattern of the coupling coil after the conductor sheet with the adhesive layer is attached.

Further, in order to achieve the above object, the scale manufacturing apparatus according to the present invention is the scale manufacturing apparatus used in the electromagnetic induction type displacement detection apparatus, wherein the conveying means, the adhesive sheet sticking means, and the conductor sheet sticking means. It is characterized in that it comprises an arranging means and a conductor pattern forming means. Here, the carrying means carries the insulating substrate.

The adhesive sheet sticking means continuously sticks the adhesive sheet to the insulating substrate conveyed by the conveying means.

The conductor sheet crimping means continuously attaches the conductor sheet to the adhesive sheet of the insulating substrate conveyed by the conveying means.

In the conductor pattern forming means, the conductor portion after the conductor sheet is attached is used as the pattern of the coupling coil.

In the present invention, it is also preferable that the pattern forming means includes a resist forming portion, a resist pattern forming portion, and an etching portion. Here, the resist forming part forms a photosensitive resist layer on the conductor sheet after the attachment.

Further, the resist pattern forming portion removes a portion of the resist formed by the resist forming portion other than the portion covering the planned conductor pattern portion to form a resist pattern.

The etching section forms a pattern of the coupling coil by removing a portion of the conductor sheet other than the planned conductor pattern portion using the resist pattern formed by the resist pattern forming section as a mask.

Further, in the present invention, it is preferable that the insulating substrate is made of a glass material such as soda lime glass which does not expand or contract due to a change in environment such as temperature and humidity, has a high surface accuracy, and is inexpensive. .

The continuous sticking of the sheets here does not mean that the sheets are laminated in a plurality of layers in the thickness direction, but one continuous sheet is stuck in sequence from the end thereof. It means to do.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to the drawings.

[0035]First embodiment FIG. 2 shows a scale manufacturing apparatus according to the first embodiment of the present invention.
The schematic configuration of the device is shown. In this embodiment, the electromagnetic induction
Conductor with adhesive layer for scale used in conductive displacement detector
An example of manufacturing using a sheet will be described. In Figure 3
A characteristic of the present embodiment is to attach a conductor sheet with an adhesive layer.
A perspective view of the steps is shown. Parts corresponding to the above conventional technology
The minute will be described with reference numeral 100 added.

The scale manufacturing apparatus 120 shown in FIG. 2 comprises a conveying means 122, a copper foil sheet attaching means with an adhesive layer (conductor sheet attaching means with an adhesive layer) 124, and a conductor pattern forming means 126. Here, the conveying means 120 includes, for example, rollers 128 and 130.

The rollers 128 and 130 are vertically opposed to each other with the glass substrate (insulating substrate) 112 interposed therebetween. The rollers 128 and 130 convey a long glass substrate 112 of, for example, 3 m to the right in the figure at a predetermined feeding speed.

The copper foil sheet attaching means 12 with the adhesive layer is also provided.
4 includes, for example, a copper foil sheet roller 134 with an adhesive layer, laminators 136 and 138, and the like.

The roller 134 is arranged above the surface of the glass substrate 112 on which the conductor pattern is to be formed, and a long copper foil sheet 132 with an adhesive layer (conductor sheet with an adhesive layer) 132 is wound in a roll shape. This copper foil sheet 132 with an adhesive layer
Is provided with an adhesive layer 132a below the adhesive layer 1a.
A copper foil (conductor portion) 132b is attached to the upper portion of 32a.

The laminators 136 and 138 are opposed to each other with the glass substrate 112 interposed therebetween. Then, the laminator 136 is rotated counterclockwise in the drawing by feeding the glass substrate 112 to the right in the drawing by the transport means 122.
Thus, the copper foil sheet 132 with the adhesive layer of the roller 134 is attached.
According to the feeding of the glass substrate 112, the glass substrate 1
12 upper surface (planned pattern formation surface) and laminator 1
It will be pulled in between 36 in sequence.

In the laminator 136, the glass substrate 1
Since the copper foil sheet with the adhesive layer sandwiched between the layers 12 is always heated and pressure-bonded, the copper foil sheet 132 with the adhesive layer is sequentially attached onto the glass substrate. This is continuously performed for, for example, 3 m.

The conductor pattern forming means 126 is the copper foil sheet 1 with an adhesive layer stuck by the sticking means 124.
32 copper foils 132b are used as the pattern of the coupling coil. The conductor pattern forming means 126 includes a resist forming section 140 and an exposing section (resist pattern forming section) 142.
A developing unit (resist pattern forming unit) 144 and an etching unit 146.

Here, the resist forming section 140 provides a photosensitive resist such as a liquid or dry film on the copper foil 132b of the copper foil sheet 132 with an adhesive layer adhered by the adhering means 124, and the photosensitive resist layer To form.

Further, the exposing section 142 exposes the portion of the resist layer covering the planned conductor pattern portion.

The developing section 144 removes the resist in the unexposed section in the exposure to complete the resist pattern.

The etching section 146 uses the resist pattern after the development as a mask to remove a portion other than the planned conductor pattern portion of the copper foil 132b, thereby leaving the remaining copper foil pattern as a coupling coil pattern.

Further, in this embodiment, the resist stripping section 148 is used.
And a protective layer forming unit 150. The resist stripping unit 148 strips the resist after the etching. The protective layer forming part 150 forms a protective layer by providing a protective film such as a liquid or a dry film on the conductor pattern forming surface after the resist is peeled off.

In this embodiment, the computer 152 controls the feeding speed of the conveying means 122 and the operations of the laminators 136 and 138 of the copper foil sheet laminating means 124 with the adhesive layer. As a result, the copper foil sheet 1 with the adhesive layer is attached to the upper surface of the glass substrate 112, which is conveyed by the conveying means 122.
It is configured such that the 32 can be successively and uniformly and firmly adhered to each other continuously.

Further, in the present embodiment, the pretreatment unit 1 is provided before the glass substrate 112 is provided with the copper foil sheet 132 having the adhesive layer, that is, before the conveying means 122.
54 is provided. As the pretreatment by the pretreatment unit 154, for example, the surface of the glass substrate 112 on which the conductor pattern is to be formed is washed.

Scale manufacturing apparatus 12 according to the present embodiment
0 is configured as described above, and its operation will be described below with reference to FIG.

As shown in FIG. 4, first, the pretreatment step (S11
0) is performed. That is, in the pretreatment step (S110),
The pretreatment unit cleans the surface of the glass substrate on which the conductor pattern is to be formed.

In this embodiment, a glass substrate is used as the insulating substrate. This is a glass material such as soda lime glass which has high surface accuracy and does not expand or contract due to changes in environment such as temperature and humidity. It is composed of.

Therefore, in this embodiment, the copper foil sheet with the adhesive layer can be more firmly and uniformly adhered onto the insulating substrate, as compared with the case where the insulating substrate made of other material is used. The conductor pattern can be formed on the insulating substrate with higher accuracy. After the pretreatment, a pattern of coupling coils is formed on the insulating substrate.

Here, as a method of manufacturing a scale of an electromagnetic induction type displacement detection device, conventionally, a conductor pattern is applied to the roller surface of a printing machine and transferred onto an insulating substrate to form a conductor on the insulating substrate. The method of forming the pattern 14 is common. However, in the scale used for the electromagnetic induction displacement detection device, the positions of the patterns are individually determined and there is no same pattern. Therefore, in order to manufacture a long scale, a long conductor pattern is collectively used as an insulating substrate. Must be created above. Therefore, if the conventional method is used as it is, it is very difficult to make the scale longer and improve the wide range accuracy because the pattern length is limited depending on the length of the circumference of the roller.

Therefore, a characteristic of the present invention is that
In order to easily manufacture a long scale used for an electromagnetic induction type displacement detection device with high accuracy, a conductive sheet with an adhesive layer is continuously attached to an insulating substrate. Therefore, in the present embodiment, after the pretreatment, the pressure bonding step (S112),
That is, the step of attaching the conductor sheet with the adhesive layer is performed.

That is, in the pressure bonding step (S112), the long copper foil sheet 132 with an adhesive layer is sequentially heated and pressure bonded onto the long glass substrate 112 as shown in FIG. As shown in FIG. 3B, a copper foil sheet 132 with an adhesive layer is attached on the glass substrate 112.

As described above, in this embodiment, the surface on which the conductor pattern is to be formed is smooth, and the copper foil sheet 132 with an adhesive layer is continuously attached onto the glass substrate 112 made of an insulating material. After the attachment, the copper foil 132b of the copper foil sheet 132 with an adhesive layer
Is formed into a pattern of a closed loop coil or the like.

That is, in the conductor pattern forming step,
A resist forming step (S114), a resist pattern forming step (S116), and an etching step (S118) are provided. Here, the resist forming step (S114)
Is a copper foil sheet 132 with an adhesive layer as shown in FIG.
A photosensitive resist layer 160 is formed on the copper foil 132b.

Further, the resist pattern forming step (S1
16) includes an exposure process and a development process. Here, in the exposure step, the exposed portion 162 of the planned conductor pattern portion of the resist layer 160 formed in the resist formation step is exposed.

In the developing step, the resist layer 160 in the unexposed portion 164 is removed in the exposing step. As a result, as shown in FIG. 3D, the copper foil sheet 132 with an adhesive layer is attached.
A resist pattern 166 is formed on the copper foil 132b.

In the etching step (S118), the resist pattern 166 after the development is used as a mask to remove a portion of the copper foil 132b other than the planned conductor pattern portion.
As a result, a copper foil (conductor) pattern 168 as shown in FIG.

In this embodiment, the resist stripping step (S
120) and a protective layer forming step (S122). In the resist stripping step (S120), the resist is stripped after the etching.

In the protective layer forming step (S122), after the resist is peeled off, the entire conductor pattern forming surface, that is, the copper foil pattern 168 and the adhesive layer 13 are removed as shown in FIG.
A protective layer 170 is formed on 2a to complete the scale 110 of the electromagnetic induction type displacement detector.

As described above, according to the scale manufacturing apparatus 120 of the present embodiment, the copper foil sheet 132 with the adhesive layer, which is successively supplied, is heated on the glass substrate 112 having the smooth conductor pattern formation scheduled surface. The laminators 136 and 138 are provided to sequentially bond the adhesive layer-attached copper foil sheet 132 onto the glass substrate 112 by pressure bonding. Then, the conductor pattern forming means 126 forms the copper foil pattern 168 by using the copper foil 132b of the copper foil sheet 132 with an adhesive layer stuck by the sticking means 124 as the pattern of the coupling coil. ing.

As a result, the scale manufacturing apparatus 120 according to this embodiment can easily manufacture the long scale 110 with high accuracy. As a result, the scale used in the electromagnetic induction type displacement detection device, which has been extremely difficult in the past, can be made longer and the accuracy of a wide range can be improved.

Further, in this embodiment, a glass substrate 112 such as soda lime glass is used as the insulating substrate, which does not expand and contract due to changes in environment such as temperature and humidity, has high surface accuracy, and is inexpensive.

Therefore, in the present embodiment, the copper foil sheet 132 with an adhesive layer can be more firmly and uniformly adhered onto the substrate 112, so that the pattern 132 of the coupling coil is formed on the substrate 112 with higher accuracy. Can be formed. Moreover, in the present embodiment, the smoothing of the planned surface of the insulating substrate can be omitted, so that the scale can be manufactured more easily.

By constructing the electromagnetic induction type displacement detecting device with the scale thus manufactured and the separately prepared receiving module, the present embodiment is capable of accurately adjusting the receiving module and the scale over a wide range in the longitudinal direction. The relative movement amount can be detected.

In the above structure, any insulating material, such as an insulating metal tape, can be used as the insulating substrate as long as the insulating substrate does not expand and contract due to changes in the environment such as temperature and humidity and has high surface accuracy and is inexpensive. A material containing glass fiber or the like can be adopted, but it is particularly preferable to be composed of a glass material such as blue plate which is very excellent in the above properties.

In the above construction, an example in which a laminator is used as the copper foil sheet laminating means 124 with an adhesive layer has been described. However, instead of this, a pair of heating / heating means as shown in FIG.
Crimping pieces 172, 174 and the like can also be adopted.

The heating and pressure bonding pieces 172 and 174 are
The copper foil sheet 132 with an adhesive layer is provided so as to be vertically movable with respect to the glass substrate 112, and is heated and pressure-bonded on the glass substrate 112.

Then, the heating / compression bonding piece 172 is positioned above, and every time the copper foil sheet 132 with the adhesive layer from the roller 134 is pulled in a predetermined length in accordance with the feeding of the glass substrate 112 by the conveying means, the heating / compression bonding piece 172 is heated. 172 is lowered, and heating / compression bonding of the copper foil sheet 132 with an adhesive layer on the glass substrate 112 by the heating / compression bonding pieces 172, 174 is performed.
By repeating the step and repeat by the computer 152, it is possible to obtain the same operation and effect as the laminator.

[0073]Second embodiment FIG. 6 shows a scale manufacturing apparatus according to the second embodiment of the present invention.
The schematic configuration of the device is shown. In this embodiment, the contact
Adhesive sheet and copper foil sheet instead of copper foil sheet with coating layer
An example of separately using will be described. The first embodiment
The reference numeral 100 is added to the portion corresponding to
To do.

The scale producing apparatus 220 shown in the figure includes an adhesive sheet pasting means 276 for performing the adhesive sheet pasting step which constitutes the above-mentioned pressure-bonding step, and an adhesive sheet pasting step before the resist forming means 226. A conductor sheet laminating means 278 is provided which constitutes the crimping step and carries out the conductor sheet laminating step after the adhesive sheet laminating step.

The adhesive sheet sticking means 276 heats and pressure-bonds the sequentially supplied adhesive sheets 280 to the glass substrate 212 conveyed by the conveying means 222, so that the adhesive sheet 280 is adhered onto the glass substrate 212. Are continuously attached.

FIG. 7 shows a perspective view of the adhesive sheet sticking means 276 which is characteristic of this embodiment. The adhesive sheet sticking means 276 shown in the figure includes an adhesive sheet roller 282 and a pair of laminators 284 and 286.

The roller 282 is arranged above the glass substrate 212 and has a length of 3 m or the like.
Is wound in a roll.

The laminators 284 and 286 are the glass substrate 212 and the adhesive sheet 280 from the roller 282.
The adhesive sheets 280 are arranged so as to face each other with the adhesive sheet 280 sandwiched therebetween, and the adhesive sheet 280 is successively laminated on the glass substrate 212 by sequentially heating and pressure bonding the adhesive sheet 280.

The conductor sheet sticking means 278 is arranged at the subsequent stage of the adhesive sheet sticking means 276, and is sequentially supplied onto the adhesive sheet 280 of the glass substrate 212 carried by the carrying means 222, for example. A long copper foil sheet (conductor sheet) 288 having a length of 3 m or the like is heated and pressure-bonded to continuously bond the copper foil sheet 288 on the adhesive sheet 280 of the glass substrate 212.

FIG. 8 shows a perspective view of the conductor sheet sticking means 278 which is characteristic of this embodiment. The conductor sheet sticking means 278 shown in the figure includes a copper foil sheet roller 290 and a pair of laminators 292 and 294.

The roller 282 is arranged above the surface of the glass substrate 212 on which the conductor pattern is to be formed.
A copper foil sheet 288 of m or the like is wound in a roll shape.

The laminators 292 and 294 are arranged so as to face each other with the adhesive sheet 280 on the glass substrate 212 and the conductor sheet 288 from the roller 290 interposed therebetween, and are sequentially supplied onto the adhesive sheet 280 on the glass substrate 212 being conveyed. By heating and crimping the copper foil sheet 288
The copper foil sheet 2 on the adhesive sheet 280 of the glass substrate 212
88 is continuously attached.

As described above, the adhesive sheet attaching means 276 is used.
In this method, the adhesive sheets that are sequentially supplied are heated and pressure-bonded to the glass substrate that is being conveyed, so that they are continuously attached.

The conductor sheet sticking means 278 heats the copper foil sheets sequentially supplied onto the adhesive sheet of the glass substrate after the step of sticking the adhesive sheet (S224).
Crimping and sticking continuously.

As a result, in the scale manufacturing apparatus 220 according to this embodiment, the copper foil sheets 288 sequentially supplied are heated and pressure-bonded to the adhesive sheet 280 of the glass substrate 212 being conveyed, and are continuously attached. ing.

Therefore, in the present embodiment, the long scale used in the electromagnetic induction type displacement detection device can be easily manufactured with high accuracy, similarly to the first embodiment. As a result, the scale used in the electromagnetic induction type displacement detection device, which has been extremely difficult in the past, can be made longer and the accuracy of a wide range can be improved.

In the above configuration, an example in which a laminator is used as the adhesive sheet attaching means 276 has been described, but instead of this, a pair of heating / compression bonding pieces 296, 298 as shown in FIG. 9 is adopted. You can also

The heating / compression bonding pieces 296, 298 are
The adhesive sheet 280 is provided so as to be vertically movable with respect to the glass substrate 212, and the adhesive sheet 280 is heated and pressure-bonded on the glass substrate 212.

Then, the heating / pressure bonding piece 298 is positioned above, and the adhesive sheet 280 from the roller 282 is moved to a predetermined length in accordance with the feeding of the glass substrate 212 by the conveying means.
Each time it is retracted, the heating / compression bonding piece 298 is lowered, and heating / compression bonding of the adhesive sheet 280 on the glass substrate 212 by heating / compression bonding 296, 298 is repeated by a computer (not shown), thereby performing step-and-repeat. It is possible to obtain the same effect as that of the laminator.

In the above structure, the adhesive sheet sticking means 278 is used.
Although the example using the laminator has been described as the above, a pair of heating / compression bonding pieces 300, 302 and the like as shown in FIG. 10 may be adopted instead.

The heating / pressure bonding pieces 300, 302 are
The copper foil sheet 288 is provided so as to be vertically movable with respect to the glass substrate 212, and the copper foil sheet 288 is heated and pressure-bonded on the adhesive sheet 280 of the glass substrate 212.

Then, the heating / pressure bonding piece 302 is positioned above, and the copper foil sheet 288 from the roller 290 is moved to a predetermined length in accordance with the feeding of the glass substrate 212 by the conveying means.
Each time it is pulled in, the heating / press bonding piece 302 is lowered, and the heating / press bonding of the copper foil sheet 288 on the adhesive sheet 280 of the glass substrate 212 by the heating / press bonding 300, 302 is repeated by a computer (not shown). By carrying out, it is possible to obtain the same effect as that of the laminator.

Further, the scale manufactured by the scale manufacturing method according to the present embodiment can be used for various purposes in the electromagnetic induction type displacement detection device, so that high versatility is achieved. For example, an electromagnetic induction depth microchecker:
General calipers with electromagnetic induction type encoder, Micrometer: All models that are required to be environmentally friendly, Linear scale: General linear scale, Thin separate type linear scale, Others: Electromagnetic induction such as all models with electromagnetic induction type encoder Any type of encoder can be suitably used.

Further, the technology, materials, etc. other than the continuous sticking of the copper foil sheet with the adhesive layer to the glass substrate or the continuous sticking of the adhesive sheet and the copper foil sheet, which are characteristic of the present embodiment, are existing. By utilizing the technology, a simple structure can be obtained, and the high reliability from the past can be obtained as it is. Also, by adopting multi-purpose use, general-purpose materials, simple structure, simple process, etc., the present invention can easily manufacture a long scale with high accuracy and obtain low cost.

[0095]

As described above, according to the scale manufacturing method and apparatus of the present invention, the conductive layer-attached conductor sheet attaching step (means) for continuously attaching the adhesive layer-attached conductor sheet to the insulating substrate is provided. After the attachment, a conductor pattern forming step (means) for forming the conductor portion of the adhesive layer-attached conductor sheet as the pattern of the coupling coil is provided. As a result, the scale manufacturing method and apparatus according to the present invention can easily manufacture a long scale with high accuracy. Further, according to the scale manufacturing method and apparatus of the present invention, an adhesive sheet pasting step (means) for continuously pasting an adhesive sheet on an insulating substrate.
And a conductor sheet laminating step (means) for continuously laminating a conductor sheet onto the adhesive sheet after the laminating, and a conductor pattern forming step (means) for using the conductor after laminating as a coil. did. As a result, the scale manufacturing method and apparatus according to the present invention can easily manufacture a long scale with high accuracy. Further, in the present invention, the insulating substrate, the surface accuracy is high even without expansion and contraction due to changes in the environment such as temperature and humidity, and by being composed of inexpensive glass,
Long scales can be manufactured with higher accuracy and more easily.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a schematic configuration of a scale used in an electromagnetic induction type displacement detection device.

FIG. 2 is an explanatory diagram of a schematic configuration of a scale manufacturing apparatus according to the first embodiment of the present invention.

FIG. 3 is an explanatory view of a schematic configuration of a conductor sheet attaching means with an adhesive layer, which is characteristic of the present invention.

FIG. 4 is a flow chart showing a processing procedure of a scale manufacturing method according to an embodiment of the present invention, and an explanatory diagram of a state of a scale manufactured according to this embodiment.

5 is a modification of the conductor sheet attaching means with an adhesive layer shown in FIG.

FIG. 6 is an explanatory diagram of a schematic configuration of a scale manufacturing apparatus according to a second embodiment of the present invention.

FIG. 7 is an explanatory diagram of a schematic configuration of an adhesive sheet pasting unit characteristic of the scale manufacturing apparatus shown in FIG.

FIG. 8 is an explanatory diagram of a schematic configuration of a conductor sheet sticking means characteristic of the scale manufacturing apparatus shown in FIG.

9 is an explanatory view of a modified example of the adhesive sheet sticking means shown in FIG.

FIG. 10 is an explanatory view of a modification of the conductor sheet sticking means shown in FIG.

[Explanation of symbols]

110 scale 112,212 Glass substrate (insulating substrate) 122,222 transport means 124 Conductor sheet attaching means with adhesive layer 126,226 Conductor pattern forming means 132 Copper foil sheet with adhesive layer (conductor sheet with adhesive layer) 168 Copper foil pattern (conductor pattern, coupling coil) 276 Adhesive sheet attachment means 278 Conductor sheet attachment means 280 adhesive sheet 288 Copper foil sheet (conductor sheet)

Claims (8)

[Claims] 1. A receiver module having a drive coil and a receiver coil formed therein, and a scale having a coupling coil formed therein and arranged in parallel so as to be movable relative to the receiver module. In a method of manufacturing a scale used in an electromagnetic induction type displacement detection device that detects a relative movement amount of the reception module and the scale by electromagnetically detecting a change in the magnetic pattern modulated by the coupling coil by the reception coil, An adhesive layer-attached conductor sheet attaching step of continuously attaching an adhesive layer-attached conductor sheet to an insulating substrate; and, after the adhesive layer-attached conductor sheet attaching step, the conductor portion of the adhesive layer-attached conductor sheet is formed into the coupling coil pattern. And a conductor pattern forming step including: 2. A receiving module having a driving coil and a receiving coil formed therein, and a scale having a coupling coil formed therein and arranged in parallel so as to be movable relative to the receiving module. In a method of manufacturing a scale used in an electromagnetic induction type displacement detection device that detects a relative movement amount of the reception module and the scale by electromagnetically detecting a change in the magnetic pattern modulated by the coupling coil by the reception coil, An adhesive sheet pasting step of continuously pasting an adhesive sheet on an insulating substrate; a conductor sheet pasting step of continuously pasting a conductor sheet onto the adhesive sheet after the adhesive sheet pasting step; And a conductor pattern forming step in which a conductor portion after the installation step is used as the pattern of the coupling coil is provided. Method. 3. The scale manufacturing method according to claim 1, wherein the conductor pattern forming step includes a resist forming step of forming a photosensitive resist layer on the conductor sheet after the bonding, and the resist forming step. The resist pattern forming step of forming a resist pattern by removing a portion of the resist other than the conductor pattern planned portion covering portion, and the conductor pattern planned portion of the conductor sheet using the resist pattern formed in the resist pattern forming step as a mask An etching step of forming a pattern of the coupling coil by removing portions other than the above. 4. The scale manufacturing method according to claim 1, wherein at least the conductor pattern formation planned surface of the insulating substrate is made of smooth glass. . 5. A receiver module having a drive coil and a receiver coil formed therein, and a scale having a coupling coil formed therein and arranged in parallel so as to be movable relative to the receiver module. In a scale manufacturing apparatus used in an electromagnetic induction type displacement detection device for detecting a relative movement amount of the receiving module and the scale by electromagnetically detecting a change in the magnetic pattern modulated by the coupling coil by the receiving coil, A conveying means for conveying the insulating substrate, an adhesive layer-containing conductor sheet attaching means for continuously attaching the conductor sheet with an adhesive layer to the insulating substrate conveyed by the conveying means, and after attaching the conductor sheet with an adhesive layer A conductor pattern forming means for forming a conductor portion of the conductor sheet with an adhesive layer into a pattern of the coupling coil. Scale production equipment. 6. A receiver module having a drive coil and a receiver coil formed therein, and a scale having a coupling coil formed therein and arranged in parallel so as to be movable relative to the receiver module. In a scale manufacturing device used in an electromagnetic induction type displacement detection device that detects the relative movement amount of the receiving module and the scale by detecting the change in the magnetic pattern modulated by the coupling coil by electromagnetically coupling it with the receiving coil, Conveying means for conveying the substrate, adhesive sheet attaching means for continuously attaching an adhesive sheet to the insulating substrate conveyed by the conveying means, and adhesion of the insulating substrate conveyed by the conveying means after attaching the adhesive sheet The conductor sheet attaching means for continuously attaching the conductor sheet to the sheet, and the conductor portion after the conductor sheet is attached, Scale manufacturing apparatus characterized by comprising: a conductor pattern forming unit for the pattern of coil. 7. The scale manufacturing apparatus according to claim 5, wherein the conductor pattern forming means is formed by a resist forming section that forms a photosensitive resist layer on the conductor sheet after the bonding, and the resist forming section. A portion of the resist other than the portion covering the planned conductor pattern portion is removed to form a resist pattern, and a conductor pattern scheduled portion of the conductor sheet using the resist pattern formed by the resist pattern forming portion as a mask. A scale manufacturing apparatus, comprising: an etching part that forms a pattern of the coupling coil by removing parts other than the above. 8. The scale manufacturing apparatus according to claim 5, wherein the insulating substrate is made of glass, at least a surface of which a conductor pattern is to be formed on, is smooth.