JP2003162957A - Manufacturing method of plasma display panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a plasma display panel which is capable of realizing superior display quality and suppressing coloring of a glass substrate and a dielectric layer at a low cost. <P>SOLUTION: In this manufacturing method of a plasma display panel, at first an electrode consisting of a transparent electrode 5 and a bus electrode 6 is formed on a front substrate 1 with a prescribed pattern, then a metal tin layer 15 with a prescribed pattern is formed by plating method so as to cover the electrode, and after that, an oxidation second tin layer 16 of an electrode- coating layer is formed by oxidizing the metal tin layer 15. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a plasma display panel.

[0002]

2. Description of the Related Art In recent years, a plasma display panel, which has been attracting attention as a thin display device, includes a front substrate 1 and a rear substrate 2 made of glass and arranged to face each other, as shown in FIG. There is. A plurality of display electrode pairs including display electrodes 3 and 4 are formed on the front substrate 1, and the display electrodes 3 and 4 are composed of a transparent electrode 5 and a bus electrode 6, respectively. Then, the dielectric layer 7 is formed on the front substrate 1 so as to cover the display electrodes 3 and 4, and the protective layer 8 is formed on the dielectric layer 7.

A plurality of address electrodes 9 are provided on the rear substrate 2, and the dielectric layer 10 covers the address electrodes 9.
Is formed. Address electrode 9 on this dielectric layer 10
A partition wall 11 is arranged between them, and a phosphor layer 12 is formed on the side surface of the partition wall 11 and the surface of the dielectric layer 10.

In the actual panel, the address electrode 9
The front substrate 1 and the rear substrate 2 are arranged so as to face each other so that the longitudinal direction of the display electrodes 3 and 4 is orthogonal to each other.
In FIG. 1, for convenience, front side members (front substrate 1, display electrodes 3, 4, dielectric layer 7 and protective layer 8) are replaced with back side members (back substrate 2, address electrodes 9, dielectric layer 10, The partition wall 11 and the phosphor layer 12) are shown rotated by 90 ° in a plane parallel to the back substrate 2.

A discharge space is formed between the front substrate 1 and the rear substrate 2, and the discharge space is filled with a discharge gas composed of a mixed gas of neon (Ne) and xenon (Xe), for example. The phosphor layer 12 is excited to emit light by ultraviolet rays generated when a discharge is generated between the display electrode 3 and the display electrode 4 forming the display electrode pair, thereby displaying a color image.

The glass substrate used for the plasma display panel is manufactured by the float method, which is suitable for manufacturing glass with a large area and a high flatness. The float method is a method in which a molten glass is floated on molten tin in a reducing atmosphere and conveyed to form the glass into a plate shape. Further, as the bus electrode 6 formed on the front substrate 1, a silver electrode that can be formed by a simple and low-cost printing method is used.

The silver electrode as the bus electrode 6 is obtained by applying a silver paste composed of silver particles, an organic solvent, a resin and the like on a transparent electrode 5 having a predetermined pattern formed on a glass substrate (front substrate 1). And patterned into a predetermined shape, and then baked at 500 to 600 ° C.

[0008]

By the way, the bus electrode is fired also when the dielectric layer 7 is formed in the next step, and the silver electrode receives heat during the firing. Then, due to the heat energy applied at the time of firing, silver ions are generated from the silver electrode by the glass substrate or the dielectric layer 7
And the diffused silver ions are reduced by reducing species such as Sn ²⁺ and Fe ²⁺ and aggregate to generate a silver colloid having a particle size of several to several tens nm. Since this silver colloid absorbs light in the wavelength range of 380 to 480 nm, there is a problem that the glass substrate and the dielectric layer 7 are colored yellow. In such a case, there is a problem that the brightness of blue decreases when displaying a color image, and the color temperature decreases when displaying white, for example.

The present invention has been made to solve the above problems, and provides a plasma display panel which can suppress coloring of a glass substrate or a dielectric layer at low cost and has excellent display quality. The purpose is to do.

[0010]

In order to achieve this object, a method of manufacturing a plasma display panel according to the present invention comprises the steps of forming electrodes of a predetermined pattern on a substrate,
A metal layer having a predetermined pattern is formed by plating so as to cover the electrode, and then the metal layer is oxidized to form an electrode coating layer made of a metal oxide. By this method, it is possible to prevent diffusion of metal ions, which are the material of the electrodes.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIGS. The same parts as those shown in FIG. 3 are designated by the same reference numerals.

FIG. 1 is a sectional view showing an essential part for explaining a method of manufacturing a plasma display panel according to an embodiment of the present invention.

First, as shown in FIG. 1A, indium tin oxide (ITO) is formed on a front substrate 1 which is a glass substrate.
The transparent electrode film 13 made of is formed by a sputtering method or an electron beam evaporation method. As the transparent electrode film 13, stannic oxide containing antimony or fluorine, zinc oxide containing aluminum, or the like may be used.

Next, a resist layer having a predetermined pattern is formed on the transparent electrode film 13 by a photolithography method, and the transparent electrode film 13 is etched to form a front surface as shown in FIG. 1 (b). A transparent electrode 5 having a predetermined pattern is formed on the substrate 1.

Next, as shown in FIG. 1C, the transparent electrode 5
A photosensitive paste containing silver particles is applied thereon by a screen printing method to form an electrode material film 14. After that, the electrode material film 14 is patterned by a photolithography method and baked at about 600 ° C., so that FIG.
A bus electrode 6 having a predetermined pattern is formed on the transparent electrode 5 as shown in FIG. In this way, an electrode having a predetermined pattern including the transparent electrode 5 and the bus electrode 6 is formed on the front substrate 1. Since silver, which is a material of the bus electrode 6, has a white color, a black layer made of ruthenium oxide or the like may be formed between the transparent electrode 5 and the bus electrode 6 so as to increase the contrast.

Next, the transparent electrode 5 and the bus electrode 6 are used as plating electrodes, and an electrolytic plating method using an acidic tin plating bath containing stannous sulfate, sulfuric acid, cresol sulfonic acid and the like is shown in FIG. 1 (e). Thus, a metal tin layer (metal layer) 15 having a predetermined pattern is formed so as to cover the transparent electrode 5 and the bus electrode 6. Since the electroplating method is used, the metal tin layer 15 can be selectively formed only on the transparent electrodes 5 and the bus electrodes 6, and the process is simplified without the need to pattern the metal tin layer 15. The metal tin layer 15 may be formed by an electrolytic plating method using an alkali tin plating bath containing potassium stannate, metal tin, potassium hydroxide, acetic acid, hydrogen peroxide and the like.

After that, the metal tin layer 1 is formed in an atmosphere containing oxygen.
By thermally oxidizing 5, the stannic oxide layer 16 which is an electrode coating layer is formed as shown in FIG. Since stannic oxide is transparent, it hardly causes a decrease in light transmittance. Further, the stannic oxide layer 16 formed by the electrolytic plating method is different from stannic oxide which is used as a transparent electrode and has conductivity. That is, when the electrolytic plating method is used as in the present embodiment, it is difficult to obtain a conductive stannic oxide layer to which antimony or fluorine is added. 16 is made of a metal oxide having an extremely high specific resistance value as compared with the specific resistance value of conductive stannic oxide.

After the stannic oxide layer 16 is formed, the dielectric layer 7 and the protective layer 8 are formed as shown in FIG. 1 (g) by a commonly used method. That is, the front substrate 1
A paste containing a dielectric glass powder is applied on the top by a screen printing method or a die coating method, and baked at about 600 ° C. to form the dielectric layer 7. Next, the protective layer 8 made of magnesium oxide (MgO) is formed on the dielectric layer 7.
Thus, the formation of the display electrodes and the like on the front substrate 1 is completed.
The front substrate 1 on which the predetermined constituent members are formed in this manner
Is used in place of the members (front substrate 1, display electrodes 3, 4, dielectric layer 7 and protective layer 8) on the front side of the conventional plasma display panel shown in FIG. 3 to obtain a plasma display panel.

By forming the stannic oxide layer 16 using the electrolytic plating method as described above, the stannic oxide layer 1 is formed.
The layer 6 can be a dense layer in which silver ions hardly penetrate as compared with the dielectric layer 7. Similarly, since the transparent electrode 5 made of ITO or the like is also a dense layer, silver ions can be retained in the region surrounded by the transparent electrode 5 and the stannic oxide layer 16. Therefore, it is possible to prevent silver ions from diffusing into the front substrate 1 and the dielectric layer 7, and to prevent the front substrate 1 and the dielectric layer 7 from being colored yellow, so that a plasma display with excellent display quality can be obtained. You get a panel.

In the above embodiment, the case where the stannic oxide layer 16 is formed by using the electrolytic plating method has been described, but the electroless plating method may be used. At this time, as shown in FIG. 2, it is possible to form a stannic oxide layer (electrode coating layer) 17 having a predetermined pattern so as to cover only the periphery of the bus electrode 6. Even in this case, the stannic oxide layer 17 becomes a dense layer and can prevent silver ions from diffusing, so that the front substrate 1 and the dielectric layer 7 can be prevented from being colored yellow. Then, the stannic oxide layer 17 formed by the electroless plating method has an extremely high specific resistance value as compared with the specific resistance value of conductive stannic oxide, as in the case of forming by the electrolytic plating method. It consists of a metal oxide. The electrode coating layer formed by using the electroless plating method so as to cover only the periphery of the opaque bus electrode 6 does not block the light emission of the phosphor layer 12 so much. Therefore, the electrode coating layer in this case may be opaque.

In the manufacturing method of the present invention, the plating method, which is a low-cost film forming method, is used when the stannic oxide layers 16 and 17 that are the electrode coating layers are formed. Forming can take place. Furthermore, if the electroplating method is used, the patterning step of the electrode coating layer is unnecessary, and it is possible to suppress an increase in manufacturing steps.

Further, when the transparent electrode 5 is not formed and the metal electrode made of silver is directly formed on the front substrate 1, the diffusion of silver ions is greater than that when the transparent electrode 5 is formed. It is considered that the effect of suppressing silver ions is reduced, but by forming the stannic oxide layer so as to cover the metal electrode formed directly on the front substrate 1, it is possible to suppress the diffusion of silver ions. it can.

Although the case where tin is used as the material of the electrode coating layer has been described in the present embodiment, a metal such as magnesium, aluminum, or nickel which can be formed by a plating method is used as the material of the electrode coating layer. You can

In the above embodiment, the case where the glass substrate manufactured by the float method is used has been described. However, even if the glass substrate manufactured by a method other than the float method is used, the redox reaction with the silver ion is prevented. When a glass substrate containing a reducing substance that causes such a phenomenon is used, applying the present invention can prevent the glass substrate from being colored yellow. Further, the present invention can be applied even when a chromium-copper-chromium laminate or the like is used as the electrode covered with the electrode coating layer instead of the silver electrode.

[0025]

As described above, according to the present invention, an electrode coating layer for preventing coloring of a glass substrate or the like can be formed at low cost, and a plasma display panel with excellent display quality can be realized. .

[Brief description of drawings]

1A to 1G are cross-sectional views showing a main part for explaining a method of manufacturing a plasma display panel according to an embodiment of the present invention.

FIG. 2 is a sectional view showing an example of an electrode coating layer formed by the manufacturing method of the present invention.

FIG. 3 is a cross-sectional view showing a main part of a conventional plasma display panel.

[Explanation of symbols]

1 Front substrate 2 Back substrate 3, 4 display electrodes 5 Transparent electrode 6 bus electrodes 7, 10 Dielectric layer 8 protective layer 9 address electrodes 11 partitions 12 Phosphor layer 13 Transparent electrode film 14 Electrode material film 15 Metal tin layer 16,17 Stannous oxide layer

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Keisuke Sumita             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Hideki Ashida             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Sei Nakagawa             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F-term (reference) 5C027 AA01                 5C040 FA01 GC03 GC05 GC06 GC19                       JA08 JA15 JA21 KA04 LA11                       LA17 MA10

Claims (2)

[Claims] 1. A metal is formed by forming an electrode having a predetermined pattern on a substrate, forming a metal layer having a predetermined pattern by a plating method so as to cover the electrode, and then oxidizing the metal layer. A method of manufacturing a plasma display panel, comprising forming an electrode coating layer made of an oxide. 2. A transparent electrode having a predetermined pattern and a bus electrode are laminated and formed on a substrate, a metal layer having a predetermined pattern is formed by a plating method so as to cover the bus electrode, and thereafter, A method of manufacturing a plasma display panel, comprising forming an electrode coating layer made of a metal oxide by oxidizing the metal layer.