JP2003161894A - Telescope, apparatus and method for adjusting telescope and recording medium with process program implemented by the adjustment method recorded thereon - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make higher levels of function and performance than a conventional telescope obtainable with a telescope by less adjustment work than before even in a case where errors occur in parameters of optical elements due to a problem on assembling accuracy of the telescope and a vibration generated by transfer and transport. <P>SOLUTION: In the telescope provided with a plurality of the optical elements including a transformable mirror capable of changing a shape of a reflection surface, is characterized in that the parameters of a plurality of specific optical elements 2 in the optical elements are changed by a control signal CS outputted from an adjustment apparatus, the adjustment apparatus changes the parameters of the plurality of the specific optical elements according to probabilistic search technique, and a function of an optical apparatus satisfies the predetermined specification. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a telescope including a plurality of optical elements in which adjustment of one optical element influences the adjustment result of another optical element, and a telescope having an adjusting device for adjusting the optical element. The present invention relates to an adjusting device, an adjusting method thereof, and a recording medium recording a processing program for causing an electronic computer of the adjusting device to execute the adjusting method.

[0002]

2. Description of the Related Art As a method for increasing the state of a function realized by an optical device to a predetermined target value, there are conventionally (1) adjustment of an optical element by an expert and (2) accuracy adjustment. Higher optical elements have been adopted.

However, in the method (1) in which an expert adjusts the optical element, the adjustment is required at the place where the optical device is installed, and the adjustment time is long. Further, even a skilled person may not be able to obtain a sufficient adjustment result, and it has not been possible to objectively judge whether or not the adjustment result of the optical device is optimum.
Further, there is a problem that the adjustment cost is high because a skilled person is required.

In order to reduce the burden of the adjustment of the optical element by the skilled person of the above (1), the highly accurate optical element of (2) has been adopted. However, a highly accurate optical element is generally expensive, and there is a problem that it cannot be stably obtained, which makes it difficult to manufacture an optical device.

Therefore, the conventional method has the drawbacks that the manufacturing cost of the optical device is high, and that adjustment is required by a skilled person and the adjustment time is long. In the above adjusting method, if automatic adjustment is possible, it is considered to be effective without requiring a skilled person, but in the adjustment of the adjustment point of (1), generally, the adjustment point as shown in FIG. Since the effect on the function of the optical device is not independent for each adjustment location, automatic adjustment is extremely difficult, and the adjustment requires an expert.

That is, when the optical device has a plurality of adjustment points, these adjustment points often have a dependency relationship with each other. FIG. 2 is an explanatory diagram exemplifying a case where the adjustment location and the adjustment result (adjustment amount) have a dependency relationship (correlation) across the adjustment locations. For example, assume that the first adjustment location is adjusted to optimize the function of the optical device, and then the second adjustment location is adjusted to optimize the function of the optical device. At this time, the adjustment result of the first adjustment point is no longer optimal because the adjustment of the second adjustment point is performed, and when the adjustment is performed again, another adjustment result different from the previous adjustment result is obtained. Has become.

The dependence will be described by taking the resonator of the laser device as an example. The resonator of the wavefront controller is generally composed of three or more mirrors and prisms, and has an optical path looped. Here, if the position or the direction of a certain one mirror is changed, the entire optical path changes. As a result, the optimum position and orientation of any other mirror will change. This means that if one of the positions and directions of the mirror and the prism, which are the adjustment points, is changed, the optimum adjustment result of any other adjustment points is also changed.

When the adjustments of the plurality of adjustment points are not independent as described above, since the size of the adjustment range has the same number of dimensions as the number of adjustment points to be linked, the adjustment search is performed in proportion to the power of the adjustment points. The space expands and the combination explosion may take unrealistic time to adjust or may not be adjustable. As an example, considering that there are 10 adjustment points that are adjusted by an 8-bit setting signal and all of them are linked, the adjustment search space is as large as 2 ^ 80≈10 ^ 24 (10 to the 24th power). However, the conventional method cannot be adjusted in a realistic time.

A conventional industrial wavefront controller is a mirror.
-It is composed of optical parts such as laser crystal (optical crystal) and dispersive element (prism) and their holding parts. In a laser resonator composed of these components, the optical components are required to be installed with an accuracy of micrometer. Regarding the mirror, it is necessary to adjust the vertical direction, the horizontal direction, the height direction, the horizontal reflection direction, and the height direction reflection direction in five directions. Inside the laser resonator, two or more mirrors and their holding mechanism are installed. When the laser device is improved in functions such as increased output and shortened pulse, the number of optical components such as mirrors and dispersive elements becomes 6 or more. The number of adjustment points for these holding parts is 30 or more.

On the other hand, since the light intensity is strong inside the laser resonator, the Kerr lens effect induces a non-linear phenomenon,
The output, wavelength, transverse mode, etc. of the laser output light are subject to fluctuations. Therefore, the optimum arrangement condition of the optical components also changes due to the non-linear phenomenon. In the case of a pulse laser device, the optimal placement of optical components differs depending on the shortest pulse condition and the maximum output condition.

The search for optimum layout conditions is generally performed by a skilled engineer. When the number of optical components is about 6, typically a skilled person needs about one week, and an unskilled person needs one month or more. Further, in the above adjustment, since the position of the holding component of the optical component shifts with time, the optical output of the laser device fluctuates with time, which makes further adjustment difficult.

The laser device has been optimized by feeding back information on the optical output from the laser device to the laser device. The optical output information includes power (output light intensity), position / direction of optical path, wavelength, phase, wavefront, pulse width, and the like. When the laser beam is spatially divided and each of these pieces of information is evaluated, a large number of evaluation values are obtained. These evaluation values are dependent on each other, and their correlation depends on the operating conditions of the laser device. It is very common that there are two or more such evaluation values.

However, in the prior art, generally, only the pumping light intensity is controlled with respect to the power of the information of the optical output, and the position / direction of the optical path of the information of the optical output is controlled by position / direction. Only the position / direction of the mirror that can be controlled in direction is controlled.

A feature of these methods is that a single optical element having a strong influence on the evaluation value is found and feedback control is performed on the single optical element. These methods do not optimize the entire laser device because only a single element is optimized.

Furthermore, there are many cases where those evaluation values have a strong non-linear correlation, and in this case, it becomes difficult to optimize the adjustment points of the entire optical device, and the adjustment efficiency becomes very poor. There is a point.

In the wavefront controller, it is difficult to make the function of the wavefront controller good because the calculation of the phase value at each point of the wavefront takes unrealistic time. .

In the telescope, when the observation target is imaged on the image forming surface with a large concave mirror, the position of the reflecting surface of the concave mirror /
Since the shape deviates from the ideal position / shape, the resolution of the image decreases.

In addition, the arrangement of the components of the optical device changes due to vibration or shock during movement or transportation, which causes a problem of deterioration of the performance of the device. As described above, in the optical device, it is necessary to comprehensively adjust the positions, directions, optical characteristics, and the like (hereinafter, referred to as parameters) of the plurality of optical elements.

Therefore, in view of the above points, the present invention has been made by a person skilled in the art conventionally required even when the parameters of the optical element to be adjusted have a non-linear correlation depending on each other in a plurality of optical elements. The purpose of the present invention is to provide an optical device and an adjusting method therefor, which automatically obtains higher functions and higher performances than those of the prior art by using an optical element having the following precision or less. It is also an object of the present invention to provide a method for improving the deterioration of the function / performance of an optical device due to movement / transportation of the device, aging, or the like.

[0020]

In order to achieve the above object, the present invention includes a plurality of optical elements including a deformable mirror capable of changing the shape of a reflecting surface according to the present invention. The telescope, parameters of a plurality of optical elements of the specific optical element is changed by a control signal output by the adjusting device, the adjusting device, regarding the parameters of the specific plurality of optical elements, according to a probabilistic search method,
It is characterized in that a control signal is output so that the function of the telescope satisfies a predetermined specification.

According to a fifth aspect of the present invention, there is provided a telescope adjusting method which controls a plurality of optical elements in a telescope having a plurality of optical elements including a deformable mirror capable of changing a shape of a reflecting surface. Of the adjustment method, the control signal is sequentially output according to the stochastic search method, and among the plurality of optical elements, the parameters of a plurality of specific optical elements are changed, and the optimum value of the function of the telescope that satisfies a predetermined specification. It is characterized by searching for.

According to the telescope and the adjusting method thereof, a plurality of specific optical elements among the plurality of optical elements of the telescope having a predetermined function change the element parameter according to the value indicated by the control signal. The adjustment device follows a stochastic search method to adjust the values of a plurality of control signals, which are composed of elements and are given to the specific plurality of optical elements via a driving mechanism, so that the function of the telescope satisfies a predetermined specification. Since it is changed, when it is necessary to adjust the parameters of the telescope that performs the above-mentioned predetermined functions, it is possible to automatically obtain higher functions and higher performances than those of the related art with respect to the functions, without requiring an expert. it can. Moreover, it is possible to improve movement and transportation of the telescope, and further, deterioration of the function and performance of the telescope due to aging.

Here, the performance of the telescope can be generally expressed by a function F which takes as arguments the parameters of each of the plurality of adjustable optical elements included in the telescope. Making the function of the telescope satisfy a predetermined specification is equivalent to obtaining an optimum solution of the function F. The present inventor paid attention to this point and discovered that a stochastic search method such as a genetic algorithm can be applied to the adjustment of the telescope.

The genetic algorithm is one of the probabilistic search methods, and (1) works effectively in wide area search,
(2) Other than the evaluation function F, derivative information such as a differential value is not required, and (3) the algorithm has easy mountability. Therefore, in the present invention, as described in claims 2 and 6, a genetic algorithm may be used for changing the values of the plurality of control signals by the adjusting device.

When the evaluation function F satisfies a special condition, the search efficiency can be improved by using an annealing method, which is also a probabilistic search method, instead of the genetic algorithm. It is possible. Therefore,
In the present invention, as described in claims 3 and 7, the annealing method may be used for changing the values of the plurality of control signals by the adjusting device. In this way, the performance obtained by the adjustment is lower than that of the genetic algorithm, but the adjustment time can be shortened.

In the present invention, as described in claims 4 and 8, when the adjusting device searches for an optimum value, an evaluation function for weighting and integrating a plurality of evaluation values of the telescope is used. Good as a matter.

The adjusting device in the above-described telescope and the adjusting method of the telescope may be constituted by an electronic computer as set forth in claim 9, and in this case, a plurality of element parameters are set in the optical device. It is possible to easily and surely perform the process of searching in accordance with the probabilistic search method so that the above function satisfies a predetermined specification in a short time.

Further, the recording medium of the present invention according to claim 10 searches a plurality of element parameters executed by the electronic computer according to claim 9 in accordance with a probabilistic search method so that the function of the telescope satisfies a predetermined specification. It is characterized in that the processing program is recorded.

According to such a recording medium, the processing program executed by the electronic computer for the telescope of the present invention and the method of adjusting the telescope of the present invention can be recorded and saved, and the telescope can be adjusted at any place. It can be carried out.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will now be described in detail with reference to the drawings by way of examples.

The present invention can be applied to various optical devices. That is, it is possible to provide a plurality of adjustment points on the optical device to be adjusted and adjust the adjustment points by the method according to the present invention. In the following optical device example, a case where the present invention is applied to an optical device in general will be described.

The optical device usually has a plurality of optical elements such as mirrors, lenses and prisms as constituent elements. In addition, in an optical device, generally, the position and direction of the optical element, which is a component thereof, in the optical device largely deviates from the design specification due to a manufacturing error, or vibration or impact applied to the optical device. Coordination is essential to meet.

FIG. 1 shows an example of the configuration of the optical device. Figure 1
Among them, 1 is an optical unit that performs a predetermined function, 2 is an adjustable optical element that can change the parameter of the element according to the value of a control signal (adjustment signal) CS, and 3 is an optical element that does not perform adjustment. is there. The optical element 2 and the optical element 3 are
It is a component of the optical unit 1. Reference numeral 4 denotes a drive mechanism connected to the adjustable optical element 2 for changing the parameter of the adjustable optical element 2 according to the value indicated by the control signal CS. 5 is an adjusting device for adjusting the optical unit 1 according to the method of the present invention, and 6 is an observing device for observing the state of the optical output of the optical unit 1 (optical device). In this example, the adjustment device 5 and the observation device 6 are external devices of the optical unit 1.

In FIG. 1, reference numerals 8 and 9 respectively denote light input to the optical device (input light) and light output from the optical device (output light). In FIG. 1, reference numeral 7 denotes an adjusting light generator, which generates adjusting light for adjusting the optical unit 1. The adjustment light generator 7 is stopped when the adjustment is not performed, and the normal input light is input as the input light 8. This adjustment light is generated according to the signal 5T from the adjustment device 5, and is input to the optical device 1 as the input light 8 of the optical device 1. The adjustment light is continuous light or pulsed light having a constant wavelength distribution and spatial distribution of light intensity, and serves as a reference when adjusting the optical device 1. This adjustment light can also switch between multiple types of light. In this case,
It is switched according to the signal 5T.

The adjusting light generating device 7 may be a device for generating the adjusting light in accordance with the signal 5T from the adjusting device 5 or a device for independently generating the adjusting light without depending on the adjusting device 5. Furthermore, it is possible to omit the adjustment light generator 7 and regard the input light that is normally input to the optical device as the adjustment light instead of the adjustment light. Furthermore, the light source of the input light can be built in the optical device.

In FIG. 1, the arrangement of the optical element 2 and the optical element 3 and the optical path relating to such an optical element are examples showing the concept thereof, and are actually determined by the design of the optical device. Similarly, a control signal C input to the drive mechanism 4
The number of S is determined according to the number of parameters required for adjusting the optical element.

The adjustable optical element 2 and the non-adjustable optical element 3 include mirrors, lenses, optical filters, prisms, diffraction gratings, polarizing elements, electro-optical elements, acousto-optical elements, optical crystals (laser crystals), and slits. , And an optical element composed of a composite of those optical elements, and the like, and functions as a constituent element of the optical unit 1. That is, in the optical device, the adjustable optical element 2 and the non-adjustable optical element 3 are installed in the optical path of the light handled by the optical unit 1, and reflect the light in different directions, condense, and divide the optical path. It performs composition, selection by wavelength, attenuation, separation of optical path by wavelength, selection of light by polarization, modulation, wavelength conversion, etc.

In the above, the adjustable optical element 2 is an optical element which is adjusted by the method of the present invention, and the optical element 3 which is not adjusted is an optical element which is not adjusted by the method of the present invention. Alternatively, another method, for example, rough adjustment immediately after assembling the optical device, such as rough adjustment, may be used.

The element parameters (parameters) of the optical element 2 are the position, direction, and optical characteristics of the optical element 2 in the optical unit 1. At the position, for example, the X-axis, Y-axis, and Z-axis of the Cartesian coordinate system. Displacement x in each direction,
In the directions y and z, for example, the amount of rotation θx about the X axis, the amount of rotation θy about the Y axis, and the amount of rotation θz about the Z axis. Such optical characteristics include, for example, reflectance, transmittance, absorption coefficient, amplification coefficient,
Wavelength conversion efficiency, refractive index, polarization characteristics (retardation), transfer characteristics (phase, light intensity, transverse mode, etc.), distribution ratio, modulation rate, and those wavelength characteristics, focusing conditions (focal shape, aberration) , Coherence and optical path conditions.

The optical unit 1 to be adjusted includes the optical element 2 adjusted as described above and the optical element 3 not adjusted.
In this example, by finely adjusting the parameters of the optical element 2 to be adjusted after manufacturing or after vibration or shock is given by movement of the optical device, the characteristics of the optical device meet the required specifications. Try to meet. However, this optical device is an optical device in which the adjustment of one parameter of an optical element 2 affects the adjustment results of almost all other parameters, as illustrated in FIG. , The adjustment search space causes a combination explosion. Therefore, the adjustment method described later using the genetic algorithm based on the present invention is very effective.

In this example, the parameters of the optical element 2 are adjusted so that the function of the optical device satisfies a predetermined specification. One configuration example of the adjusting device 5 is shown in FIG. In the figure, 5R is a register for holding data, and 5RG is a register group including a register 5R for the number of adjustment points. 5A is an adjustment algorithm execution device for executing an adjustment procedure according to the method of the present invention, and 5F is an evaluation function unit for calculating an evaluation value of the function of the optical device. In the figure, 4 is a drive mechanism, 4C is a comparison circuit,
Reference numeral 4D is a motor drive circuit that drives the drive mechanism 4 that changes the parameters of the optical element (described later).

In the adjustment in this example, the drive mechanism 4 is used.
Changes the parameter of the adjusting element 2 to be adjusted according to the control signal CS corresponding to the digital value held in the register 5R in the adjusting device 5 shown in FIG. The control signal CS is an analog signal or a digital signal that corresponds to the data in the register 5R one-to-one. The registers 5R here are provided in the same number as the total number of adjustment points of the optical element 2. The register 5R outputs the held digital value to the drive mechanism, and the held value can be changed by the adjustment algorithm execution device 5A in the adjustment device 5.

The above adjustment algorithm execution device 5A is
According to a genetic algorithm, an optimum value is searched for as a holding value of the plurality of registers 5R. The adjusting device 5 is
It can be configured by an electronic computer equipped with a readable recording medium / recording medium reading device such as a personal computer or a microcomputer, and a programmable LSI disclosed in Japanese Patent Laid-Open No. 9-294069. Alternatively, Kajitani et al., “Realization of Structure Learning Circuit of Neural Network by GA” (Journal of the Neural Network Society, vol. 5, No. 4,
pp. 145-153, 1998).

In the above electronic computer, the programs for realizing the functions of the adjustment algorithm execution unit 5A and the evaluation function unit 5F are hard disk, ROM (read-only memory), optical disk, magneto-optical disk, flexible disk, magnetic disk. , A flash memory, a memory using a ferroelectric substance, an MRAM using a magnetic substance, a semiconductor memory having a backup function, and the like. Similarly, the function of the drive mechanism control device 5C, which will be described later, can also be realized on an electronic computer, and a program relating to an adjusting method therefor (a program for adjusting) is also stored in the recording medium.

Further, the above adjustment program may be transmitted / distributed via a network. The observation device 6 receives the output light of the optical device (optical unit 1), analyzes the input light, converts the input light into an electrical signal, and then delivers the electrical signal to the adjustment device 5. The adjusting device 5 is
The evaluation function unit 5F calculates an evaluation value of how ideal the output of the optical device 1 corresponding to the adjusted light is. The evaluation value is delivered to the adjustment algorithm execution device 5A in the adjustment device 5. Adjustment algorithm execution device 5A
Searches for the optimum adjustment result by the method of the present invention as described later.

In the present example, the number of optical paths of the input light and the output light is one, but in the present invention, the number of the optical paths of the input light 8 and the output light 9 of the optical device 1 is arbitrary. It is also possible even if the input light 8 is not provided as in a laser having a built-in excitation light source. It is also possible in the case of an optical device that handles light in both directions. In this case, since the input light 8 and the output light 9 change according to the direction of the signal, the adjustment light generator 7 and the observation device 6 are switched to perform the adjustment of the present invention.

Further, the output light 9 used for the adjustment of the present invention is
May be taken out not only from the original output light of the optical device 1 but also from the inside of the optical device (optical unit 1). The total number of adjustment points of the optical element 2 in the optical unit 1 is plural, and as illustrated in FIG. 2, in the adjustment points of the optical element 2, the adjustment of a certain adjustment point affects the adjustment results of all the other adjustment points. The present invention is particularly effective in the case of causing a combined explosion of the adjustment search space.

The optical unit 1 of this example comprises an optical element 2 adjusted by a drive mechanism 4 in accordance with an adjustment signal of an electric signal.
A major feature is that the adjustment is performed by the adjustment device 5 having the register group 5RG. The operation of the optical device of this example will be described below.

The optical element 2 includes a mirror, a lens, an optical filter, a prism, a waveguide type optical element (optical fiber,
Waveguide modulator, optical fiber grating), semiconductor optical component (semiconductor mirror, semiconductor absorption modulator), diffraction grating, polarizing element, electro-optical element, acousto-optical element, optical crystal (laser crystal), slit, and those mentioned above. An optical element composed of a composite of optical elements, etc., and an optical element whose position, direction, and optical characteristic parameters can be changed by the drive mechanism 4 in response to a control signal CS output from the adjusting device 5. .

This example is characterized in that the optical element 2 has a plurality of adjustment points. When there are a plurality of adjustment points, the number of optical elements 2 may be one. When there are a plurality of optical elements 2, it does not matter whether they are the same type or not. Also, normally, the drive mechanism 4
Are the same as the number of adjustment points of the optical element 2. However, a part of the drive mechanism, for example, a circuit for supplying a current to the motor may be integrated.

The optical element 2 changes its parameters by the driving mechanism 4. As described above, the variable parameters are the position, direction, and optical characteristics in an arbitrary coordinate system, and the number of parameters that change by changing one adjustment point, that is, the operation of one drive mechanism 4, is 1. Not necessarily. A configuration example of the drive device 4 is shown below.

FIG. 4 shows an example of the structure of the driving mechanism 4 for the optical element 2 which is capable of translational movement in one direction. 40 in FIG.
Reference numeral 1 is a base of the drive mechanism. Reference numeral 402 denotes a stage which is driven and moves in translation, and rails are provided so as to be able to move on the base 401 in one direction (not shown). The optical element 2 is attached to the stage 402. 403 is a male screw, 404 is a base 401
It is a female screw fixed to. Reference numeral 405 is a motor for rotating the male screw 403, and 406 is a potentiometer for detecting the amount of rotation (rotation angle) of the male screw 403. 407 is a spring, which is a male screw 403 and a female screw 404.
To prevent position uncertainty due to the gap between
It also functions so that the moving amount of the male screw 403 and the moving amount of the stage 402 are the same.

In the drive mechanism, the male screw 403 is rotated by the motor 405 and the female screw 404 is fixed to the base 401, so that the male screw 403 moves in the direction of its central axis. The amount of movement is proportional to the rotation angle of the male screw 403. When the male screw 403 makes one rotation (the rotation angle is 360 degrees), the moving amount becomes equal to the pitch of the thread of the male screw 403. The stage 402 has a male screw 40
Perform the same movement as 2.

Reference numeral 4C is a comparison circuit for receiving the control signal CS and the rotation angle signal (PS) indicated by the potentiometer and comparing the rotation angle corresponding to the control signal CS with the rotation angle indicated by the potentiometer. 4D is a comparison circuit 4
The motor drive circuit outputs a current (MD) for rotating the motor 405 in accordance with the output of C, and the motor rotates in a direction in which the rotation angle corresponding to the control signal CS output from the comparison circuit and the rotation angle indicated by the potentiometer become smaller. Outputs the current that rotates the.

By the above operation, the drive mechanism translates the optical element 2 attached to the drive mechanism to the position corresponding to the value indicated by the control signal CS. That is, the drive mechanism changes the parameter of the optical element 2 in the optical unit 1 according to the value indicated by the control signal CS.

It is also possible to incorporate the comparison circuit 4C and the motor drive circuit 4D of the configuration example of FIG. 4 in the adjusting device 5. FIG. 5 shows an example of this configuration. 5C in FIG.
Is a drive mechanism control device, which receives a signal from the potentiometer 406 and performs the same function as the comparison circuit 4C and the motor drive circuit 4D of FIG. Here, the same reference numerals as those in FIG. 3 indicate the same or corresponding ones.

The motor 405 may be a DC motor or a piezo motor utilizing the piezoelectric effect. Further, when the motor 405 is a stepping motor, the rotation angle of the motor can be controlled in accordance with the state of the current passed through the stepping motor, so that the potentiometer 406 and the comparison circuit 4C can be omitted. in this case,
The control signal CS is input to the motor drive circuit 4D.

In the optical element 2, in order to perform translation in two directions, the drive mechanism 4 having the above-mentioned configuration shown in FIG. 4 may be used by stacking it in two stages. That is, in the two-tiered driving mechanism, the lower stage 402 and the upper stage base 401 may be fixed to each other or may be integrated. At this time, the lower stage 402 and the upper stage base 401
The relationship of the directions of may be parallel or vertical.
Further, it may be an arbitrary constant angle.

In order to perform the translational movements in the three directions in the optical element 2, the drive mechanism 4 having the above-mentioned configuration of FIG. 4 is used by stacking in three stages, as in the case of the translational movements in the two directions. do it. That is, of the drive mechanisms 4 stacked in three stages, the lower stage 402 and the central stage base 401 may be fixed to each other, or may be integrated.
The central stage 402 and the upper stage base 401 may be fixed to each other or may be integrated. At this time, the relationship between the orientations of the base 401 and the stage 402 of each stage may be parallel or vertical, or may be an arbitrary fixed angle.

FIG. 6 shows an example of the structure of the drive mechanism 4 for rotating the optical element 2 about one axis. In FIG. 6, reference numeral 401 is a base of the drive mechanism. A stage 402 is driven and moves in translation, and rotates about a fulcrum 410. The optical element 2 is attached to the stage 402.
Reference numeral 403 is a male screw, and 404 is a female screw fixed to the base 401. Reference numeral 405 is a motor for rotating the male screw 403, and 406 is a potentiometer for detecting the amount of rotation (rotation angle) of the male screw 403. Reference numeral 407 denotes a spring, which prevents the position uncertainty from being caused by the gap between the male screw 403 and the female screw 404.
Functioning to obtain a rotation amount of the stage 402 that has a one-to-one correspondence with the movement amount.

In the drive mechanism, since the male screw 403 is rotated by the motor 405 and the female screw 404 is fixed to the base 401, the male screw 403 moves in the direction of its central axis. The amount of movement is proportional to the rotation angle of the male screw 403. When the male screw 403 makes one rotation (the rotation angle is 360 degrees), the moving amount becomes equal to the pitch of the thread of the male screw 403. 4C is a comparison circuit for comparing the rotation angle corresponding to the control signal CS and the rotation angle indicated by the potentiometer.

Reference numeral 4D is a motor drive circuit for outputting a current for rotating the motor 405 in accordance with the output of the comparison circuit 4C. The rotation angle corresponding to the control signal CS output from the comparison circuit and the rotation angle indicated by the potentiometer are shown. Outputs the current that rotates the motor in the direction of decreasing. Male screw 403
The movement of the stage causes the stage 402 to rotate about the fulcrum 410. By the above operation, the drive mechanism rotates the optical element 2 attached to the drive mechanism so as to be in the direction corresponding to the value indicated by the control signal CS. That is,
The drive mechanism changes the parameter of the optical device 2 according to the value indicated by the control signal CS.

The motor 405 may be a DC motor or a piezo motor utilizing the piezoelectric effect. Further, when the motor 405 is a stepping motor, the rotation angle of the motor can be controlled in accordance with the state of the current passed through the stepping motor, so the potentiometer 406 and the comparison circuit 4C can be omitted. In this case, the control signal CS is input to the motor drive circuit 4D.

In order to perform biaxial rotation in the optical element 2, it is sufficient to use two sets of the driving mechanism having the above-mentioned configuration of FIG. Furthermore, the fulcrum 410 and the spring 407 are made common,
The configuration shown in FIG. 7 is also possible. In FIG. 7, 403a and 403b are male screws for obtaining rotations corresponding to two axes, 410 is a common fulcrum, and 407 is a common spring. In FIG. 7, male screws 403a, 4
Description of other components necessary for moving 03b is omitted. The male screws 403a and 403b independently move to positions corresponding to the control signal CS, and independent rotation of two axes is obtained.

In the optical element 2, in order to rotate about three axes, three sets of the driving mechanism having the above-mentioned configuration shown in FIG. 6 may be used as in the case of rotating about two axes. One optical element 2
In the case where the parameter that can change is a combination of translational movement and rotation, it can be configured by combining the configuration example in the case of translational movement and the configuration example in the case of rotation.

When the optical element 2 is a deformable mirror, it is possible to control the wavefront of the light to be handled. An example of the configuration of the optical element 2 of the deformable mirror and its drive mechanism 4 is shown in FIGS. 8 and 9. FIG. 8 is a diagram showing a cross section of a configuration example of this deformable mirror, and FIG. 9 is a plan view showing an electrode arrangement of this configuration example of the deformable mirror.

In FIG. 8, 201 is a mirror that deforms according to the value indicated by the control signal CS, 202 is a mirror support structure, and 203 is a plurality of electrodes. 4AM is an amplifier that outputs a voltage according to the value of the control signal CS. In this configuration example, the optical element 2 which is one deformable mirror and the plurality of drive mechanisms 4 are integrated.

It is assumed that the deformable mirror 201 is made of a conductive material and has a ground potential for convenience. The plurality of electrodes 203 face the mirror 201, and are arranged in close proximity to each other at equal distances. At this time, when a voltage is applied to the electrode 203, the portion of the mirror 201 close to the electrode 203 is attracted by the electrostatic attraction. As a result, the mirror 201 is deformed. Here, the electrode 203 and the amplifier 4AM function as the drive mechanism 4.

Since there are a plurality of electrodes 203, the mirrors in the vicinity of the respective electrodes are attracted according to the voltage applied to each electrode. At this time, the degree of freedom of deformation of the mirror 201 is the same as the number of electrodes 203.
The electrode 203 is arranged as shown in FIG. In the above configuration example, the number of electrodes of one deformable mirror, the mirror 201
The degree of freedom of deformation and the number of adjustment points are 37.

That is, the mirror 201 has the same number of parameters as the input control signal CS and is deformed with the same number of degrees of freedom. Here, the amount of deformation of the mirror 201 at a position corresponding to a certain electrode 203 is greatly influenced by the voltage of the electrode 203 adjacent to the electrode 203. Therefore, the plurality of adjusted parameters mutually influence the adjustment result of the parameters as shown in FIG.

FIG. 1 shows another example of the configuration of the deformable mirror.
The cross section shows 0. In FIG. 10, 4PZ is a piezo element,
Reference numeral 204 is an insulator support structure. In addition, the same components as those in FIG. 8 are designated by the same reference numerals. The arrangement of the electrodes 203 is similar to that of the configuration example shown in FIG.

That is, the input control signal CS is amplified by the amplifier 4AM, and the voltage corresponding to the control signal CS is applied to the piezo element. As a result, the piezo element mechanically deforms, and the mirror 201 deforms. Therefore, similarly to the above configuration example, the shape of the mirror can be changed according to the value indicated by the control signal CS. In this configuration example, the mirror 201
Is a piezo element 4PZ, an electrode 203, and a support structure 20.
Since it is mechanically fixed by 4, it is effective when it is desired to reduce the influence of external vibration.

Furthermore, as another configuration example of the deformable mirror, the piezo element 4PZ in FIG. 10 may be a composite of a piezo element and a drive mechanism for mechanically displacing it.
As the drive mechanism, for example, the drive mechanism shown in FIG. 4 can be used. In this case, a large displacement of the shape of the mirror is generated by the drive mechanism, and the displacement is finely adjusted by the piezo element, whereby a large displacement can be obtained with high accuracy.

FIG. 1 shows a configuration example of an optical element in which the variable element parameter is the transmittance or the absorption coefficient.
Shown in 1. In FIG. 11, 210 is a semiconductor junction element, 211
Is an input light, 212 is an output light, 213 is an electrode, 4AM is an amplifier, and corresponds to the driving mechanism 4 in the present invention. The control signal CS is input to the amplifier 4AM and its control signal C
A voltage corresponding to S is applied from the electrode 213 to the semiconductor junction element 210 as a reverse bias voltage of the semiconductor junction element 210. At this time, the physical property value inside the semiconductor junction element 210 changes, and the light transmittance or absorption coefficient changes.

When the variable element parameter is the reflectance, the structure shown in FIG. 11 can be used in which a reflective film is formed on one of the surfaces perpendicular to the optical path of the semiconductor junction element 210. In this case, the optical paths of the incident light and the reflected light are the same, and the reflectance changes depending on the value indicated by the control signal CS.

FIG. 12 shows a structural example of an optical element in which the variable element parameter is the birefringence. 12
220 is a liquid crystal, 221 is a polarizer, and 222 is a phase adjuster. In addition, the same components as those in FIG. 11 are denoted by the same reference numerals. The birefringence of the liquid crystal 220 changes when a voltage is applied. The liquid crystal 220 may be an electro-optic crystal having birefringence instead of the liquid crystal. Phase adjuster 222
Is, for example, a half-wave plate or a quarter-wave plate. In this configuration example as well, in the same manner as in the case where the transmittance is varied, a voltage corresponding to the control signal CS is applied to the liquid crystal 220, the birefringence of the liquid crystal changes, and the polarization of light transmitted through the optical element is changed. The characteristic (retardation) changes.

FIG. 13 shows an example of the configuration of an optical element when the variable element parameter is the transfer characteristic (phase / light intensity).
Shown in. In FIG. 13, 230 is an electro-optic crystal, 231 is a demultiplexer, 232 is a multiplexer, 233 is a mirror, and 221 is a polarizer. In addition, the same components as those in FIG. 11 are denoted by the same reference numerals. The electro-optic crystal 230 may be liquid crystal or the like. The demultiplexer and the multiplexer are, for example, polarization beam splitters. The input light 211 is split into two by the demultiplexer 231, and the phase of one light is changed by the electro-optic crystal 230 according to the value indicated by the control voltage. This light and the light from the demultiplexer 231 are combined by the multiplexer 232. At this time, the control signal CS
The light intensity of the output light of the optical element changes corresponding to.

FIG. 14 shows a structural example of an optical element in which the variable element parameter is the distribution ratio. In FIG.
Reference numeral 230 is an electro-optic crystal for controlling polarization, and 231 is a demultiplexer, for example, a polarization beam splitter. 22
1 is a polarizer. Reference numerals 212a and 212b denote output lights that are split into two. In addition, the same components as those in FIG. 11 are designated by the same reference numerals. Similar to the above optical element,
The polarization state of the input light 211 changes according to the value indicated by the control voltage by the electro-optic crystal 230. This light is distributed by the demultiplexer 231 according to the state of polarization. As a result, the distribution ratio of the optical element changes according to the control signal CS.

FIG. 15 shows an example of the configuration of an optical element when the variable element parameter is the modulation rate. In FIG.
4VA is a variable gain amplifier for electric signals, and 230 is an electro-optic crystal. In addition, the same components as those in FIG. 11 are denoted by the same reference numerals. The input light 211 is the electro-optic crystal 23.
At 0, it is modulated by the modulation signal. At this time, by varying the gain of the variable gain amplifier 4VA with the control signal CS, the modulation factor of the optical element changes corresponding to the control signal CS.

FIG. 16 shows an example of the configuration of an optical element when the variable element parameter is the wavelength dependence of the amplitude / phase characteristic (wavelength characteristic). In FIG. 16, reference numeral 250 denotes a liquid crystal panel whose transmission characteristics are controlled by a plurality of control signals CS,
251 is a diffraction element, and 252 is a lens. Diffractive element 2
Reference numeral 51 is, for example, a diffraction grating or a prism. The optical path of the input light 211 is divided according to the wavelength by the diffraction element 251 and the lens 252. Then, in the liquid crystal panel 250, the amplitude / phase characteristics of the plurality of optical paths change according to the values indicated by the plurality of control signals CS. As a result, the amplitude and phase of light change for each wavelength. Then, the lens 252 and the diffractive element 251 combine the optical paths for each wavelength into one optical path. As a result, the wavelength dependence of the amplitude / phase characteristics of the optical element changes corresponding to the plurality of control signals CS.

The above-mentioned optical element for changing the optical characteristic is an element for electrically changing the optical characteristic exclusively.
It is also possible for the optical element 2 to optically change its optical characteristics.

The optical element 2 that optically changes the optical characteristics of the optical element includes a wavelength conversion crystal, an optical amplification medium, an optical modulator, and an optical switching element. The wavelength conversion crystal is
It is an optical crystal that utilizes a nonlinear optical phenomenon based on the nonlinearity of polarization oscillation. Optical amplification media include laser crystals, organic dyes, semiconductors, and optical amplification waveguides.

The laser crystal forms a population inversion of laser levels (energy levels capable of causing laser transition), and amplifies light by utilizing stimulated emission. The organic dye forms a population inversion of the laser level in the organic dye and amplifies light by utilizing stimulated emission. The optical amplification waveguide is obtained by adding an element having a laser level such as erbium to the waveguide, and is, for example, an erbium-doped optical fiber.

The optical element 2 that acoustically changes the optical characteristics of the optical element is an acousto-optical element.
By applying ultrasonic waves to the medium installed in the optical path of the optical element,
The optical characteristic of the optical element is changed by changing the physical property value of the medium due to the standing wave of the ultrasonic wave.

Furthermore, the optical element 2 may be a composite of the above optical elements 2. Next, an example of an adjusting method for adjusting the optical device will be described.

After the optical device is manufactured, in the adjusting process, as shown in FIG. 1, the optical unit 1, the adjusting device 5,
The observing device 6 and the adjusting light generating device 7 are respectively arranged in the optical device. The adjusting light generator 7 inputs the adjusting light 8a to the optical device, and the adjusting device 5 sets the register value of the register group 5RG according to the processing procedure shown in FIG.

In this processing procedure, first in step S1,
Rough adjustment is manually performed to operate the optical device, the element parameter value of each optical element at that time is measured, and the value is written to the register 5R as an initial setting value and held as the register value. In the next step S2, the adjustment is performed. The light generating device 7 outputs the adjusting light and operates the optical device with respect to the adjusting light. In the next step S3, the observing device 6 observes the optical output of the optical device, and the result is sent to the adjusting device 5. Then, in the next step S4, the adjusting device 5 determines whether or not the performance of the optical device is within an allowable range satisfying a predetermined specification by using the sent observation value.

If it is not within the allowable range, the adjusting device 5 changes the register value held by the register group 5RG in step S5, and the value is kept constant until the driving mechanism 4 is stopped in step S6. Wait for the time, then the next step S7
Then, it is determined whether or not an end condition (specifically described later) is satisfied, and if the end condition is satisfied, the defective product process is performed in step S8 and then the process is ended. If not satisfied, a series of processing of returning to step S2 is repeatedly executed. And the above step S
When it is determined in 4 that the performance of the optical device satisfies the predetermined specifications, the process ends.

Regarding the method of changing the register value from the above-mentioned initial setting value, several methods can be used, and an example thereof will be shown below. That is, the first method is
This is a method of sequentially switching the set values in an appropriate order for all combinations within the range of assumed register values, and the second method is a method of randomly generating the set values. And the third method uses the result of manual coarse adjustment as an initial setting value, and from the initial setting value, the + direction and the − direction.
This is a method of changing the set value in the direction.

When the number of optical elements 2 to be adjusted in the optical unit 1 to be adjusted is small and the combination explosion of register values does not occur, the first and second methods can be used. However, in this example, since the number of the optical elements 2 to be adjusted is large and a combination explosion is expected to occur in the adjustment search space of the element parameters to be adjusted, the third method is used. At this time, a method called a genetic algorithm is used. Hereinafter, a method for adjusting an optical device using a genetic algorithm will be described.

As a reference for the above-mentioned genetic algorithm, for example, the publisher ADDISON-WESLEYPUBLISHING COMPAN
"Genetic Algorithms in Search, Optimization, and M" by David E. Goldberg, published by Y, INC. In 1989.
achine Learning ”. The genetic algorithm referred to in the present invention refers to an evolutionary calculation method and also includes an evolutionary tactic (ES) method. References for evolutionary tactics include, for example, publishers.
HP Sc, published by John Wiley & Sons in 1995
There is "Evolution and Optimum Seeking" by hwefel.

The performance of the optical device can be represented by an evaluation function F having a plurality of element parameter values as arguments. Making the performance of the optical device satisfy a predetermined specification is equivalent to obtaining a parameter value that optimizes the evaluation function F. The present inventor has paid attention to this point and discovered that the above genetic algorithm can be applied to the adjustment of the optical device.
The adjusting device 5 changes the register value of the register group 5RG according to this genetic algorithm.

In the genetic algorithm, first, a group of virtual organisms having genes is set, and there is a probability that individuals adapting to a predetermined environment will survive according to their fitness and leave their offspring. To increase. Then, the gene of the parent is passed on to the child by a procedure called genetic manipulation.
By carrying out such generational change and evolving genes and populations of organisms, individuals with high fitness become dominant in the population of organisms. As the genetic manipulation at that time, gene crossover, mutation, etc., which occur even in reproduction of an actual organism, are used.

FIG. 18 is a flowchart showing the general procedure of such a genetic algorithm. Here, first, in step S11, the chromosome of an individual is determined. That is, what kind of content and what format data is transmitted from a parent individual to a descendant individual at the time of generational change. FIG. 19 illustrates the chromosome. Here, the variable vector x of the target optimization problem is converted into M symbols Ai (i =
1, 2, ... M), and regard this as a chromosome consisting of M loci. Each symbol Ai is a gene, and the possible values of these are alleles. Figure 1
In 9, Ch is a chromosome, Gs is a locus, and the number M of loci is 5. As alleles, a set of certain integers, a range of real numbers, a sequence of simple symbols, etc. are determined according to the problem. In the example of FIG. 19, the alphabets a to e are alleles. The set of genes coded in this way is the chromosome of an individual.

In step S11, next, a method of calculating the fitness indicating how much each individual is adapted to the environment is determined. At that time, the higher or lower the value of the evaluation function of the target optimization problem is, the higher the fitness of the corresponding individual is designed. Further, in the subsequent generational change, the higher the fitness of the individual, the higher the probability of survival or the probability of producing offspring than the other low fitness individuals. Conversely, individuals with low fitness are considered to be individuals that have not adapted well to the environment and eliminated. This reflects the principle of natural selection in evolution. That is, fitness is a measure of how good each individual is in terms of survival potential.

In the genetic algorithm, at the start of the search, the target problem is generally a completely black box, and it is completely unknown what kind of individual is desirable. For this reason, the initial population of organisms is usually generated randomly using random numbers. Therefore, even in the procedure here, step S1 after the processing is started in step S12
In 3, the initial population of organisms is randomly generated using random numbers. Note that if there is some prior knowledge about the search space, processing such as generation of a biological group may be performed centering on the part where the evaluation value seems to be high. Here, the total number of individuals to be generated is called the number of individuals in the population.

Next, in step S14, the fitness of each individual in the organism population is calculated based on the calculation method previously determined in step S11. After the fitness of each individual is obtained, next, in step S15, the individual serving as the basis of the individual of the next generation is selected and selected from the group. However, if only selective selection is performed, the proportion of individuals with the highest fitness at the present time in the biological population will increase, and no new search points will occur. Therefore, the operation called crossover and mutation described below is performed.

That is, in the next step S16, a pair of two individuals is randomly selected at a predetermined occurrence frequency from among the next-generation individuals generated by selection and selection, and the chromosomes are recombined to set the child chromosome. Make (crossover). Here, the probability that crossover will occur is called the crossover rate. The offspring individuals generated by crossover are individuals that inherit the trait from each of the parents. This process of crossover increases the diversity of the individual's chromosomes and causes evolution.

After the crossover processing, in the next step S17, the gene of the individual is changed (mutated) with a certain probability. Here, the probability that a mutation will occur is called the mutation rate. The phenomenon that the contents of genes are rewritten with a low probability is
This is a phenomenon that can be seen in the genes of actual organisms. However, if the mutation rate is set too high, the inheritance characteristics of the parental trait due to crossover will be lost, and it will be similar to a random search in the search space, so be careful.

The next-generation population is determined by the above processing. Here, in step S18, it is checked whether or not the generated next-generation biological population satisfies the evaluation criteria for ending the search. This evaluation standard depends on the problem, but the following are typical ones. -The maximum fitness in a population has risen above a certain threshold. -The average fitness of the entire population has exceeded a certain threshold. -The number of generations whose fitness population increase rate is below a certain threshold has continued for a certain period or longer.・ The number of generation changes has reached a predetermined number.

If any one of the above-mentioned termination conditions (evaluation criteria) is satisfied, the process proceeds to step S19, the search is terminated, and the individual having the highest fitness in the biological population at that time is determined optimally. The solution of the problem If the termination condition is not satisfied, the process returns to the calculation of the fitness of each individual in step S14 and the search is continued. By repeating such generational changes, it is possible to increase the fitness of individuals while keeping the number of individuals in the population constant. The above is the outline of the genetic algorithm.

The framework of the genetic algorithm described above is a gradual one that does not specify the details of actual programming, and does not specify the detailed algorithm for each problem. Therefore, in order to use the genetic algorithm for adjusting the optical device of this example, the following items need to be realized for adjusting the optical device. (a) Chromosome expression method (b) Individual evaluation function (c) Selection method (d) Crossover method (e) Mutation method (f) Search termination condition Figure 20 shows the genetic algorithm used in this example. It is a flow chart which shows a processing procedure of adjustment device 5. The process of FIG. 20 specifically shows the process of steps S3 to S5 of FIG. This example is characterized by directly using the register value of the register 5 as the chromosome of the genetic algorithm, which makes it possible to eliminate the process for converting the chromosome information into the register value.

This will be specifically described with reference to FIG. 21 as an example. This figure is an example in the case of adjusting the driving device shown in FIGS. 4 and 6, and the register 5R is +4.32, −.
It holds values such as 15.67, +3.47, and -9.71. A chromosome is formed by connecting these values in series. In this example, each gene in the chromosome is +4.32,
Values such as -15.67, +3.47, and -9.71 will be taken. Since the value of the register 5R corresponds to the value of the potentiometer 406 in the drive mechanism 4, the optical element 2 is controlled so that the value of the potentiometer 406 becomes the value instructed by the register 5R. Potentiometer 406
Since the value of 1 corresponds to the value of the element parameter on a one-to-one basis, the value of the gene of the genetic algorithm corresponds to the value of the element parameter on a one-to-one basis.

As the evaluation function F of the individual of the genetic algorithm used in the processing of FIG. 20, the optical unit set after the optical unit is set by the register value represented by the chromosome of the individual is operated, and the optical output observed by the observation device 6 is obtained. Use a function that describes how close is to the ideal output.

For use in the processing shown in FIG. 20, first, in step S1 of FIG. 17, a plurality of individuals are created using uniform random numbers as an initial population of the genetic algorithm. That is, in this case, it means that the value of each gene of each chromosome of the initial population takes a random real value between the upper limit value and the lower limit value. However, if there is some prior knowledge about the tendency of the error in the element parameter, individuals that are considered to have higher fitness can be created as the initial population.

From the observation result sent from the observing device 6, the evaluation function unit 5F calculates the fitness using the above evaluation function. After that, the adjustment algorithm execution device 5A determines in step S23 whether or not the performance of the optical device 1 is within an allowable range that satisfies a predetermined specification. If the performance is not within the allowable range, selection selection in step S24, step S25.
Crossover, mutation in step S26 and step 2
7. The local learning process (to be described later) in step S28 is performed to create a group of next-generation individuals (group of solution candidates).

When the performance of the optical device satisfies the predetermined specifications in the determination in step S23, the adjustment processing ends, but even if the adjustment processing is repeated for a certain number of generations, the chromosome (register 1) is not obtained, it is determined that the optical device to be adjusted is defective, and
In step S8 of 7, processing as a defective product is performed. In addition,
If there is an instruction in the specified specifications to increase or decrease the evaluation value such as output light intensity as much as possible,
As the condition for ending the adjustment process in step S23, the condition that the number of generations exceeds a certain number is used, and the defective product process is not performed.

In the selection and selection process of step S24, the method shown in the flowchart of FIG. 22 is used. This method starts with steps S31 and S32.
Then, randomly select two individuals A and B from the group,
Next, in steps S33 to S35, of the two individuals A and B, the individual with the larger fitness value is set as the individual that will survive in the next generation. Then, until the number of surviving individuals reaches the number of individuals in the group, step S3
The procedure returns from step 6 to step S31 and the operation is repeated. In this method, individuals with a high fitness are likely to be selected as the next generation individuals, but individuals A and B are randomly selected, so individuals with a low fitness can be selected as the next generation individuals. The sex will be left. This is because if only individuals with a high degree of fitness are left, the convergence of the group is increased and the adjustment tends to fail due to being trapped in the local optimum solution.

In the crossover processing of the step S25, as shown in FIG.
The method shown in the explanatory diagram of No. 3 is used. This is an operation of partially replacing chromosomes at random positions, which is a technique called one-point crossover. In FIG. 23, Ch1 and Ch2
Are the chromosomes of parents A and B that survived as a result of selective selection,
In the crossover process here, these chromosomes are cut at the randomly selected crossover position CP. In the example of FIG. 23,
The crossover position is between the second gene and the third gene from the left. Then, by exchanging the cut partial genotypes, offspring A ′ and offspring B ′ having chromosomes Ch3 and Ch4, respectively, are generated, and these are replaced with the original individuals A and B.

The mutation in step S26, which is executed following the crossover in step S25, is an operation of adding a normal random number generated according to the Gaussian distribution N (0, σ) to the gene of each chromosome. FIG. 24 shows an example of mutation. In this figure, a normal random number N generated according to a Gaussian distribution is added to the chromosome Ch5 to obtain the chromosome Ch6.
Has been changed to.

After the mutation in step S26 is completed, the obtained chromosome value is written in the register group 5RG. After that, the drive mechanism controller 5C controls the drive mechanism 4 so that the element parameter value becomes a value corresponding to the register value.
To control. When the drive mechanism control device 5C is not provided, the comparator 4C and the motor drive circuit 4D in the drive device perform control so that the element parameter becomes a value corresponding to the register value. This control generally requires 10 to 100 times as long as the time required for the observation device 6 to observe the state of the output light.

Therefore, an adjusting method has been invented in which the observation device 6 is operated even while this control is being performed, and the observation value is used to efficiently perform the search. The method is called local learning and is executed in steps S27 and S28. When performing local learning, the adjusting device 5 shown in FIG. 5 is used. If the time required for the observation device 6 to observe the state of the output light is longer than the time required to control the element parameters, this local learning is not performed and only step S27 is performed.

The method shown in the explanatory view of FIG. 25 is used for the local learning processing in step S28. In this method, first, step S4 of FIG. 25 corresponding to step S27 of FIG.
The register value is changed by 1, and the drive mechanism control device 5C of FIG.
Is operated, the output light of the optical device is observed by the observation device 6 in step S42, and at the same time, the drive mechanism control device 5
C measures the element parameter value in step S43.
In step S44, the drive mechanism control device 5C and the evaluation function unit 5F send the observation values of the output light and the element parameter values obtained in steps S42 and S43 to the adjustment algorithm execution device 5A, and the adjustment algorithm execution device 5
A saves them as a set in the memory 5M.

Then, in step S45, the drive mechanism control device 5C determines that the element parameter value has become a value corresponding to the register value, until the above step S42.
~ Repeat step S44. In step S46, after it is determined that the value of the element parameter has become the value corresponding to the register value, in the adjustment algorithm execution device 5A, among the set of the observed value of the output light and the element parameter value stored in the memory 5M. , A set in which the value of the evaluation function F is the largest, that is, a local optimum solution is selected. Finally, in step S47, the register value corresponding to the element parameter value selected in step S46 is used to rewrite the chromosome with the value.

In the above local learning processing, an operation example when the number of element parameters to be adjusted is two will be described with reference to FIG. First, it is assumed that the element parameter value before the register value is changed in step S41 is (XS, YS). Then, it is assumed that the element parameter value corresponding to the register value changed in step S41 is (XE, YE). At this time, steps S42 to S4
In the loop of 5, the element parameter values are (XS,
It is gradually changed from YS) to (XE, YE) by the drive mechanism control device 5C. At that time, step S
By 44, a plurality of sets of element parameter values that are being changed and observation results corresponding to the values are stored in the memory.

Next, in step S46, of the set of the element parameter value and the observed value stored in the memory,
A group having the largest value (fitness) of the evaluation function F calculated from the observation result is selected. In the case of this example, since the evaluation function value takes the maximum FM when the element parameter is (XM, YM), the set (XM, YM) is selected in step S46. Finally, in step S47, the value of the chromosome is rewritten to the value corresponding to the element parameter (XM, YM).

In the case of the example in FIG. 26, when the local learning is not performed, the element parameters are (XS, YS) and (X
Since the search (observation) is performed only in two ways when E, YE), the element parameter (XM,
YM) cannot be found. However, in the case of performing local learning, since the observation is performed even while changing the element parameters, a search is performed at a plurality of element parameter values (generally about 10 to 100) other than (XS, YS) (XM, YM). Therefore, (XM, YM) can be found. Furthermore, since the chromosome is rewritten with the register value corresponding to this (XM, YM), the search efficiency is greatly improved.

As described above, in the optical device of this example, the element 2 whose element parameters can be changed is used for a plurality of optical elements, and the element parameters of these optical elements 2 are suitable for the performance of the optical device. To explore. Therefore, it is possible to automatically adjust an optical device to meet a predetermined specification without requiring manual adjustment by a skilled person and a highly accurate optical element, and without requiring a highly accurate drive device. You can This means that higher performance can be obtained with less effort than with the prior art.

Next, a modification of the example of the optical device shown in FIG. 1 will be described. In the example of the optical device shown in FIG. 1, the optical element 2 to be adjusted is mounted in the optical device, while the adjusting device 5 and the observation device 6 are detachably connected to the optical unit 1 as external devices. However, in the present invention, the device corresponding to the adjusting device 5 or the observing device 6 may be incorporated in the optical unit 1 as adjusting means.

FIG. 27 shows a modified example having such a configuration. Here, functions corresponding to the optical unit 1, the adjusting device 5, and the observation device 6 are incorporated in the optical device 1A. That is, the example of the optical device of FIG.
A change-over switch 13 using a mirror is installed in the optical path portion of the input light 8 and the output light 9 of. The changeover switch 13 may be provided inside the optical device 1A as in the illustrated example, but may be provided outside the optical device 1A. Here, when the changeover switch 13 is operated, the output light of the optical unit 1 is input to the observation device 6, and the adjustment device 5 and the adjustment light generation device 7 start operating to adjust the set value. When the setting is completed, operate the selector switch 13
The output light of the optical unit 1 is switched to the original output light path side. In this example, the solution that meets the specifications (register value)
A display 14 is provided to give a warning display when the above is not obtained.

According to this modification, not only the adjustment of the optical device 1A after assembling, but also the user himself / herself purchases the optical device 1A-installed product,
The adjustment of can be performed at any time. As a result, even if the performance characteristics of the optical device change, such as when the optical device 1A is moved and transported, or when the temperature of the environment in which the optical device 1A is placed or the like changes, the change can be compensated. You can
As a result, there is a merit that the deterioration of the function and performance of the optical device due to the deviation of the element parameters of the optical element can be improved. The changeover switch 13 is not limited to manual operation, but may be configured to automatically change over when the optical device 1A is started.

This modification is also suitable for downsizing by using the genetic algorithm execution circuit described in the above-mentioned article by Kajitani et al. As the adjusting device 5. Furthermore, according to this modification, since the user can adjust it at any time, the rigidity of the holder of the optical element or the base (optical surface plate) of the optical unit 1 may be lower than the conventional one. As a result, it is possible to obtain the further effects of drastically reducing the weight and size of the optical unit 1 and reducing the cost.

Next, a structural example of an ultrashort pulse laser device (a laser device in which the width of a light pulse to be generated is in the femtosecond region to 10 picoseconds) is shown as a reference example of the optical device of the present invention. FIG. 28 is a configuration diagram illustrating an ultrashort pulse laser device as a reference example of the optical device of the present invention.

The ultrashort pulse laser device has a very short pulse width in the femtosecond range of the generated optical pulse, and
It has the characteristic that the peak value of the intensity of the optical pulse is very large. Therefore, not only in the measurement technology typified by ultra-high-speed sampling measurement technology, but also in optical communication technology, medical technology, and processing technology. The ultrashort pulse laser device has high utility.

The ultrashort pulse laser device has optical elements such as an excitation light source, an optical crystal, a plurality of mirrors and a prism constituting a resonator (cavity) as main constituent elements of the laser device. The function of the ultrashort pulse laser is that the intensity of the generated optical pulse is as high as possible, the pulse width is as short as possible, the peak value of the intensity of the optical pulse is as large as possible, and the required intensity of the excitation light is as small as possible. That characteristic is desired.

In the ultra-short pulse laser device actually manufactured, the limit of processing / assembly accuracy in the manufacturing process, movement / movement
The action of the optical element is not complete due to the error in the position and direction (parameter) of the optical element caused by the vibration and shock during transportation, the design error, etc., and as a result, the intensity of the optical pulse is reduced. As a result, the pulse width becomes longer, the peak value of the intensity of the optical pulse is reduced, and the required intensity of the excitation light is increased, which results in deterioration of the function.

Therefore, in this reference example, the parameters of a plurality of optical elements of the optical elements constituting the ultrashort pulse laser device are made variable, and adjustment is performed using a genetic algorithm so that the function of the laser is enhanced. To do. FIG. 28
Shows the configuration of the ultra-short pulse laser device of this reference example, and this ultra-short pulse laser device (hereinafter referred to as “laser device”) 1L corresponds to the optical unit 1 in the example of the optical device of FIG. . The same components as those used in FIG. 1 are designated by the same reference numerals.

FIG. 28 is a structural example of an ultrashort pulse laser device to which the optical unit of the present invention is applied. In this reference example, the adjusting device 5 and the observing device 6 are external devices. 2M1 to 2M4 in laser device 1L
Is a mirror that can change the parameter as an optical element that changes the parameter according to the value indicated by the control signal CS, and the mirrors 2P1 and 2P2 that are also optical elements that change the parameter according to the value indicated by the control signal CS. of,
It is a prism whose parameters can be changed. 3M1 and 3M2 are mirrors as optical elements not adjusted by the method according to the present invention, and 3C are optical crystals (laser crystals) as optical elements not adjusted by the method according to the present invention.

Reference numeral 7PB is a light source (excitation light source) for generating excitation light of the laser device, and the excitation light source 7PB corresponds to the adjustment light generation device in FIG. 1 and is built in the optical device to be adjusted, that is, the laser device 1L. It has a different structure. The optical crystal 3C and the portions of the mirrors 2M1 to 2M4 form a resonator (cavity) because light reciprocates between 2M1 and 2M4. Let this resonator be 2R. This resonator 2R is adjusted by the method of the present invention as described later.

Further, in FIG. 28, 4 is a drive mechanism, and this drive mechanism 4 uses an optical element as an electric signal corresponding to a digital value held in a register 5R as a holding circuit as an optical element. 2M1 to 2M4, and 2P1, 2P2. Here, the drive mechanism 4 and the register 5R have the same number of adjustment points (1 in the configuration of FIG. 28).
Only 4) is provided.

The drive mechanism 4 can use the structures shown in FIGS. 4 to 7 used in the example of the optical device of FIG. As for the parameter at each adjustment point, the motor 405 rotates according to the 32-bit data of the register 5R so that the value indicated by the potentiometer 406 becomes a value corresponding to the data, and the position or direction of the optical element 2 changes. .

In FIG. 28, 8 is the excitation light generated by the excitation light source, and 9 is the output light of the laser device 1L. 6
Is a light intensity, a pulse intensity, or an amount related to the pulse intensity (for example, a current value induced by two-photon absorption in the compound semiconductor by the laser pulse light), etc. Alternatively, it outputs the result of computing the combination thereof.

Reference numeral 5 denotes an adjusting device, which searches for an optimum value as a holding value for the plurality of registers 5R according to a genetic algorithm in the same manner as described in detail in the optical device example of FIG.

The mirror 2M1 is a plane mirror,
A part of the light incident on the mirror is reflected, and the rest of the reflected light is transmitted. The mirror 2M2 is a concave mirror, and reflects and collects a part of the light incident on the concave side. Moreover, a part of the light incident from the back surface is transmitted. The mirror 2M3 is a concave mirror, and reflects and condenses the light incident on the concave side. The mirror 2M4 is a plane mirror and reflects a part of the light incident on the mirror. The prisms 2P1 and 2P2 bend the optical path at an angle depending on the wavelength of light due to the refraction of light. Mirrors 2M1 to 2M2 and prisms 2P1, 2P2
The position and direction can be controlled by the drive mechanism 4 in FIG.
7 to the stage 402 of FIG.

The mirrors 3M1 and 3M2 are plane mirrors and reflect the light incident on the mirrors. The optical crystal 3C is a sapphire crystal to which titanium is added,
The energy of incident light is absorbed and stored, and the light is amplified by the stimulated emission phenomenon. Such a mirror and an optical crystal may be adjusted in position and direction so as to obtain an appropriate optical path when assembling the laser 1. However, in this reference example, adjustment is not performed by the adjustment method of the present invention. Good.

The mirrors 2M1 to 2M4 and the prisms 2P1 and 2P2 are optical elements adjusted by the method of the present invention, and the parameters of the optical elements, that is, the position and the direction, or the direction, depend on the value indicated by the control signal CS. Changes. As a result, the characteristics of the resonator 2R change and the characteristics of the laser change.

The position and direction of the adjusted optical element will be described with reference to the drawings. FIG. 29 shows the optical element as a flat plate for the sake of convenience, and reference numeral 21 denotes such an adjusted optical element. Here, the reference axis of the optical element 21 is defined as the X axis for convenience, and is defined as follows. That is, when the optical element 21 is a mirror, a line passing through the center of the mirror and perpendicular to the surface, when the optical element 21 is a concave mirror, a line connecting the center and the focus of the concave mirror, and the optical element 21 is a prism. In some cases, the line that is the center of the average optical path in the prism is the X axis. Further, another axis of the optical element 21 is defined as the Y axis for convenience, and is defined as follows. That is, when the optical element 21 is a prism, a line perpendicular to the X axis on the plane formed by the optical path of the incident light and the optical path of the emitted light, and perpendicular to the X axis when the optical element 21 is a mirror or a concave mirror. Let an arbitrary one line be the Y-axis. Furthermore, a line perpendicular to the X axis and the Y axis is defined as the Z axis. The definitions of the sign directions (positive direction) of the X-axis, the Y-axis, and the Z-axis are arbitrary. Here, when the position of the optical element 21 is changed by the drive mechanism 4, the amount of movement in the X-axis direction is x, the amount of movement in the Y-axis direction is y, and the amount of movement in the Z-axis direction is z.

Regarding the direction of the optical element 21, when the optical element 21 is rotated by the drive mechanism 4 by an angle θy about a straight line parallel to the Y-axis, it is called rotation in the Y-axis direction for convenience. Similarly, when a certain straight line parallel to the Z-axis is rotated by an angle θz, it is called rotation in the Z-axis direction for convenience.

Also in this reference example, the position and / or direction of the optical element 21 can be changed by the drive mechanism 4 by applying the method shown in FIGS. 4 to 7. Table 1 shows the adjusted contents and parameters for each of the adjusted optical elements.

[0140]

[Table 1]

The constructions of the drive mechanism 4 and the optical device applied to the above-mentioned optical element are specifically as follows. The mirrors 2M1 and 2M4 are attached to the stage 402 of the drive mechanism having the configuration shown in FIG. 7, respectively. The mirrors 2M2 and 2M3 are respectively shown in FIG.
7 and the combination of the configurations shown in FIG. 7 are applied, and the stage in FIG. 4 is the configuration of the drive mechanism with the base not shown in FIG. 7, and the mirror is attached to the stage 402 in FIG. Is. Prism 2P1 and 2P2
4 is a combination of the configuration shown in FIG. 4 and the configuration shown in FIG. 6, respectively, and the stage in FIG. 4 is the configuration of the drive mechanism using the base 401 in FIG. This is a configuration attached to the stage 402.

The excitation light source 7PB is, for example, a laser device which uses a crystal of yttrium vanadium tetroxide (YVO4) and generates continuous light having a wavelength of 530 nm. The light generated by the excitation light source 7PB passes through the mirrors 3M1 and 3M2, and a part of the light passes through the mirror 2M2 and is applied to the optical crystal 3C. In the optical crystal 3C, the energy of the irradiated light is absorbed and accumulated, and the light RL having a wavelength different from that of the irradiated light is reflected by the mirror 2
Emit in the direction of M2 and the direction of mirror 2M3. In the resonator 2R including the mirrors M1 to M4, the prisms P1 and P2, and the optical crystal 3C, the light RL is arranged at both ends of the resonator in the time period determined by the length of the optical path.
Travel back and forth between M4s. Laser oscillation is obtained by the reciprocation of this light. Since the mirror 2M1 transmits a part of the light, the output light 9 is obtained.

Ideally, the position and direction of the above-mentioned optical element should be completely the same as the designed position and direction of the laser device, and at this time, the characteristics of the laser device are good (for example, The output light intensity is high,
The pulse width is short, the pulse peak intensity is high, and the required excitation light intensity is low).

However, in the ultra-short pulse laser device actually manufactured, the position and the position of the optical element due to the limit of the processing / assembly accuracy in the manufacturing process, the vibration or the shock during the movement / transportation, the design error, etc. Due to the directional (parameter) error, the action of the optical element is not perfect, and as a result the performance of the laser device is degraded.

Therefore, in the laser device 1L of this reference example, the mirrors 2M1 to 2M which are the constituent elements of the resonator 2R.
4 and the positions and directions (parameters) of the prisms 2P1 and 2P2 are adjusted so that the performance of the laser device is high, that is, the intensity of the optical pulse is high, the pulse width is short, and the peak value of intensity is high. Make the intensity of the excitation light low.

The adjustment method of the reference example of the present invention applied to the laser apparatus 1L of the present reference example shown in FIG. 28 will be described below. Here, for the sake of convenience, description will be given by taking as an example that the performance desired for the laser device is that the intensity of the optical pulse is high.

An example of the required specifications of the laser device 1L is as follows. (1) The average power of the output light is 250 mW or more when the power of the pumping light is 3 W. (2) The average power of the output light is as large as possible.
˜2M4 and 2P1, 2P2 can be represented by an evaluation function F with the element parameters as arguments. Laser device 1
In order to make the performance of L as high as possible, the evaluation function F
Is equivalent to finding a parameter value that optimizes.

In this reference example, the number of optical elements 2 to be adjusted is as large as 6, and the number of element parameters to be adjusted is 14, so that it is expected that a combination explosion will occur. , The evaluation function F is used to change the value of the register group 5RG according to the genetic algorithm.

Adjustment of the optical element in the optical resonator is performed according to the flow charts shown in FIGS. 17 and 20, as in the case of the example of the optical device shown in FIG. This reference example is characterized by directly using the value of the register group 5RG as the chromosome of the genetic algorithm. This eliminates the need for processing for converting the chromosome information into register values.

That is, as shown in FIG. 21, the chromosome in this reference example is composed of the register values of 14 registers 5R corresponding to 14 element parameter values. And each register 5R corresponding to each element parameter
Is a 32-bit floating point value. Therefore, the register length (= chromosome length) is 448 bits. Therefore, the size of the adjustment search space of the optical apparatus 1 in the above example is 2 ^ 448≈10 ^ 135 (10 to the 135th power), and it goes without saying that adjustment by the full search is impossible.

The upper limit value and the lower limit value of each register value depend on the accuracy of the rough adjustment manually performed at the time of initial setting, and the movement range determined according to the movement amount and the rotation amount of the optical element 2 required after the rough adjustment. , Determined according to the rotation range. The upper limit value and the lower limit value of the register value may be narrowed in width between the lower limit value and the upper limit value as the adjustment by the adjusting device 5 progresses. If the register value obtained in the adjustment process by the adjusting device 5 often becomes equal to the upper limit value or the lower limit value, the lower limit value and the upper limit value may be widened even during the adjustment. In this reference example, the upper limit value of each register value is +32.0 from the initial setting value, and the lower limit value is −32.0.
It was set to 32.0.

As the evaluation function F of the individual of the genetic algorithm used in the processing of FIG. 20, the laser device 1L is set with the register value expressed by the chromosome of the individual and then operated, and the optical output observed by the observation device is set. Use a function that describes how close is to the ideal output. Specifically, in the experimental example of this reference example, a power meter was used as the observation device, and the average value of the observed power was taken as the fitness of the individual.

The above evaluation function F is determined to be ideal as the laser device 1L outputs a larger average power. For example, the optical output power of the optical device set by the register value represented by a certain chromosome is 6.8 m.
If W, then the value of the evaluation function F in that case is
It will be 6.8.

For use in the process shown in FIG. 20, first, in step S1 of FIG. 17, a plurality of individuals are created using uniform random numbers as the initial population of the genetic algorithm. That is, in this case, it means that the value of each gene of each chromosome of the initial population takes a random real value between the upper limit value and the lower limit value. In this reference example, the number of individuals in the population was 50.

After that, the laser device 1L is operated with the register value expressed by each individual, and the observation result of the observation device 6 in step S3 is used. To calculate. After that, the selection process is sequentially performed in step S24, the crossover process is performed in step S25, the mutation process is performed in step S26, and the local learning process is performed in step S28 to generate a next-generation group of individuals (a group of solution candidates). In the present reference example, the crossover rate, which is the ratio of the number of individuals performing crossover in the total number of individuals, was set to 0.5, and σ of the Gaussian distribution of the normal random numbers added during mutation was 3.2.

In step S4, it is determined whether or not the performance of the laser apparatus 1L satisfies the above-described predetermined specifications. When the predetermined specifications are satisfied, the adjustment process ends. If a chromosome (register value) that meets the specifications is not obtained even after performing the adjustment process repeatedly for a certain number of generations, the laser device 1L to be adjusted is determined to be a defective product, and the process as a defective product is performed in step S8. I do. In addition,
In this reference example, the number of generations at which the repetition is stopped was 30.

The laser device 1L shown in FIG. 28 will be described below.
The experimental results when the adjusting method using the genetic algorithm of this reference example is applied to (specifically, the optical resonator 2R in the optical device 1) will be shown. In this experiment, YVO4 laser light having a power of 3.0 W and a wavelength of 530 nm is used as the adjustment light, and the output light transmitted through the planar coupler having a transmittance of 2.0% is observed with a power meter. This power meter corresponds to the observation device 6, and the observation result is proportional to the average intensity of the output light of the laser device 1L, and this value was used as the evaluation function value.

As a result of the above experiment, the power in the power meter, which was only 4.37 mW by the rough adjustment by hand, was adjusted by the method using the genetic algorithm of this reference example for the laser device. .96 m
W (Actual light output is 9.96 / 2.0% = 498mW)
Since I got the power of, I was able to meet the above specifications. FIG. 30 shows the relationship between the evaluation function value F of the best individual in the generation under experiment and the generation. It can be seen that the power value of the laser output light increases and the evaluation value improves as the generation of the genetic algorithm advances. For example, 9.96m
According to the prior art, in order to obtain the power of W, even an expert requires a long time of one week or more, or such performance cannot be finally obtained, but according to the method of the present invention, , Automatically, in a short time (about 3 hours in this experiment), much better results than before were obtained. Therefore, this experiment confirmed the effectiveness of the adjustment method of this reference example.

As described above, in the laser apparatus 1L of this reference example, the elements 2M1 to 2P1, 2P2 whose element parameters can be changed are used as a plurality of optical elements, and the element parameters of those optical elements are set to the laser. A search is performed so that the performance of the device 1L is suitable. Therefore, the laser device 1L is automatically adjusted to meet the predetermined specifications without requiring manual adjustment by a skilled person and a highly accurate optical element, and without requiring a driving device having a high driving accuracy. can do. This means that higher performance can be obtained than with the prior art with less cost and effort than with the prior art.

Furthermore, according to the present invention, even when the laser device 1L is moved or transported, or the value of the element parameter deviates from the optimum value due to a change with time or a change in temperature, the value is automatically smaller than that in the prior art. It can be tuned for higher performance than with the prior art at cost and labor.

This reference example is particularly preferable when the resonator 2R of the laser 1L has a prism, because the non-linear correlation between element parameters is stronger than when it does not have a prism.

The following modifications can be implemented with respect to this reference example. (1) The measurement item of the output light of the laser device 1L measured by the observation device 6 when performing the adjustment is not only one type of the intensity of the optical pulse, but also the pulse width of the optical pulse, the peak value of the intensity of the optical pulse, Furthermore, several kinds of measurement items are used according to the required specifications by using some of the width of the spectrum of the optical pulse, the symmetry of the spectrum of the optical pulse, the stability of the optical pulse, the amount of the noise component of the optical pulse, etc. By doing so, it is possible to meet various required specifications and further improve the adjustment accuracy.

(2) In the above reference example, the parameters of the mirrors M1 to M4 and the prisms P1 and P2 are variable, but the parameters of the mirrors 3M1 and 3M2 may be variable.

(3) A wavefront controller using a deformable mirror whose parameters can be changed is provided on the optical path of the output light of the laser device 1L, and the wavefront controller is also adjusted by the method of the reference example described later. Can obtain higher characteristics.

When there are many kinds of measurement items in (1) above, an evaluation function such as the following equation (1) can be used. F = Σwi | Xi-Ai | (1) fitness = 1 / (1 + F) where i is a measurement item.

Here, F is an evaluation function value, wi is a weighting coefficient for the measurement item i, Xi is an observation result value for the measurement item i, and Ai is an ideal value for the measurement item i. fitness is the fitness in the genetic algorithm. The measurement items include, for example, average intensity of output light, pulse width of optical pulse, peak value of intensity of optical pulse, width of spectrum of optical pulse, symmetry of spectrum of optical pulse, stability of optical pulse, The amount of the noise component of the pulse, etc., and the measurement items are the functions of the optical device (functions / operations of the optical device required for the optical device, which are determined by the design) and have predetermined specifications (the optical device is required). It is a list of functions, operations, characteristics, etc. for each item,
It is preferable that the item is a necessary and sufficient item for evaluating whether or not the item is indicated by a numerical value, and may be an item as large / small as possible or as high / low as possible.

In the above-described optical device example and laser device reference example of FIG. 1, a genetic algorithm is used as a method of changing the register value from the initial setting value of the register group 5RG. However, in the fitness function in the genetic algorithm, that is, in the evaluation function F that represents how close the register setting value is to the ideal solution, when the number of local optimum solutions is small (approximately one digit number), An algorithm called the annealing method can be used instead of the genetic algorithm. Further, even when the number of local optimum solutions is large, the performance obtained as a result of the adjustment is lower than that of the genetic algorithm, but the search can be performed at high speed.

Details of the annealing method can be found in, for example, JOHN WIL
E. Aarts and J. Korst, published in 1989 by EY & SONS
`` Simulated Annealing and Boltzmann Machine
See s ”. The annealing method is a kind of hill climbing method, and is devised so that the search is not caught in the local optimum solution by the control parameter called temperature.

In the laser device and its adjusting method of the reference example of the present invention to be described below, as shown in FIG. 28, the register group 5RG is adjusted by the adjusting device 5 according to this annealing method in the same configuration as the previous reference example. Change the value of.
This reference example is particularly characterized in that the value of the register group 5RG is directly used as a candidate for the solution in the annealing method. By doing so, similarly to the reference example, it is possible to eliminate the processing for converting the information of the solution candidate into the register value. Here, an evaluation function F representing how close the solution candidate is to the ideal solution is also prepared.

That is, in the method of this reference example, the laser device 1L is operated, and as shown in FIG. 31, step S5 is performed.
Using the observation result of the observation device 5 in 1, the adjustment device 5 calculates the evaluation function value of the solution candidate by the evaluation function F in step S52. Then, step S5
At 4, the evaluation function value is compared with the evaluation function value in the previous loop to determine whether the value is improved.

If it is improved, the register value at that time is set as the next register candidate value, and the step S57 is performed.
Then, the procedure proceeds to and the operation for changing a part of the candidate value is performed on the register candidate value. This operation is called a transition. In this reference example, the transition of the annealing method is shown in FIG.
Use the same method as the mutation method in the genetic algorithm described in.

If the value is not improved in step S54, the value of a function, which is called a receptive function and has a range of 0 to 1 inclusive, which will be described later, is calculated in step S55. This function value is compared with the real value of the uniform random number generated between 0 and 1, and if the random number value is smaller, the transition result is accepted and the process proceeds to step S57. In this case, the search is temporarily performed in the direction of deterioration of the evaluation function. If the random number value is larger than the acceptance function value, the register candidate value is returned to the register value in the previous loop in step S56, and then step S5.
Proceed to 7.

The receptive function value in the loop k is described by the following equation (2).

[0174]

[Equation 1]

Here, F (k-1) is the evaluation function value in the previous loop, and F (k) is the evaluation function value in the current loop. Further, T (k) is a parameter called temperature, and the receptive function value approaches 1 as the temperature increases. That is,
The higher the temperature, the more the search proceeds in the direction of deterioration of the evaluation function. This is done in order to avoid trapping the search in local optimal solutions. Therefore, it is expected that the true optimal solution will be finally reached by setting the temperature high in the initial stage of the search and gradually lowering the temperature as the search progresses. Such an operation is called annealing or annealing.

In the annealing method, the relationship between the performance of the laser device 1L and the optical element 2 is relatively simple, and the laser device 1
When the evaluation function F of L does not have many local optimum solutions, an efficient search can be performed as compared with the genetic algorithm. However, when the evaluation function F has a large number of local optimum solutions, it is caught in the local optimum solutions in a realistic time, and the performance as high as that of the genetic algorithm cannot be obtained. However, there is an advantage that the time required for convergence can be short.

After that, in step S58, the register value is changed so that the register candidate value becomes the register value, and in step S59, the local learning process used in the genetic algorithm described in FIG. 25 is performed. The laser device 1L is adjusted by repeating the above operation until the evaluation function value is high and a satisfactory solution is obtained (the characteristics of the laser device 1L satisfy the predetermined specifications).

If all combinations of possible set values are searched, or if a satisfactory solution is not obtained even after repeating the process a certain number of times or for a certain period of time, the laser device 1L to be adjusted is a defective product. Is judged,
Process as a defective product.

The laser device 1L shown in FIG. 28 will be described below.
The experimental results when the adjustment method using the annealing method of the present reference example is applied to (specifically, the optical resonator 2R in the optical device 1) will be shown. In this experiment, similarly to the experimental conditions of the previous reference example, the adjusted light had a power of 3.0 W and a wavelength of 53
Using a 0 nm YVO4 laser beam, output light transmitted through a planar coupler having a transmittance of 2.0% is observed with a power meter.

The temperature is changed according to the following equation (3). T (k) = 0.1 / (k + 1) ··· (3) As a result of the above experiment, the power indicated by the power meter, which was only 4.14 mW by the manual coarse adjustment, was referred to the laser device. When the adjustment was performed by the method using the example annealing method, it was 6.01 mW (actual light output was 6.
A power of 01 / 2.0% = 301 mW) was obtained. Figure 32
The relationship between the evaluation function value F and the number of transitions during the experiment is shown in FIG. It can be seen that as the transition progresses, the power value of the laser output light increases and the evaluation value improves. Compared with the result of the genetic algorithm, 4.14 ÷ 9.97 × 1
The performance is 00 = 60.3%. On the other hand, regarding the search time, it converges in a time that is not seen in one generation of the genetic algorithm. This experiment confirmed the effectiveness of the adjustment method of this reference example.

By the above-mentioned annealing method, although the performance obtained as compared with the genetic algorithm is low, the laser device 1L can be adjusted at high speed. In this reference example, the case where the optical unit is used in the laser device shown in the above reference example has been described as an example, but it goes without saying that the optical unit is a general one as shown in the example of the optical device of FIG. In the same manner, although the performance obtained by comparing with the genetic algorithm is low, the optical unit 1 can be adjusted at high speed.

Next, a structural example of main components of a wavefront controller as a reference example of the optical device of the present invention will be shown. The wavefront controller controls the spatial phase of the input light, and has the function of removing the spatial nonuniformity of the phase to obtain output light with a uniform wavefront (equal phase surface). This wavefront controller is used for exposure equipment (lithography equipment) in semiconductor manufacturing, wavelength converters, interferometers, spectroscopic measurement, optical amplifiers, etc.
Used as a component of equipment where precise control of the wavefront is required.

FIG. 33 shows an example of main components of the wavefront controller of this reference example. In FIG. 33, 1C is a wavefront controller, and this wavefront controller 1C is an optical device in the example of the optical device of FIG. A wavefront controller 1C is used instead of the unit. That is, the configuration of FIG. 1 is obtained by using the optical device of FIG. 1 as the wavefront controller shown in FIG. In this reference example, the adjustment device 5 and the observation device 6 are external devices.
In the wavefront controller 1C, 2DM is a deformable mirror (deformable mirror) capable of changing the shape of the mirror surface, which is a parameter, by changing the input electric signal, and the parameter is adjusted by the control signal CS in the figure. It 8,
Reference numerals 9 are input light and output light, respectively, and their wavefronts (equal phase surfaces) are indicated by dotted lines.

The deformable mirror 2DM is constructed as shown in FIG. 8 and has a mirror surface 2 corresponding to the value indicated by the control signal CS.
The shape of 01 changes. In this reference example, there are 37 adjustment points. Therefore, in this reference example, 37 control signals CS and a register 5R that holds the control signals are stored.
, But 37 sets are used. The wavefront controller 1C changes the wavefront (phase characteristic) of the output light 9 by changing the shape of the mirror surface 201 of the deformable mirror 2DM. Since a specific method of constructing such a wavefront controller is well known, detailed description thereof will be omitted, and the operation of the wavefront controller according to this reference example will be described below.

That is, here, the characteristics of the spatial mode of the wavefront of the output light 9 can be changed to the Gaussian state by adjusting the voltage applied to the electrodes 203 at 37 places of the deformable mirror 2DM. Next mode can be reduced. However, if the voltage applied to a certain electrode 203 is changed, the optimum value of the adjustment related to the spatial mode of the wavefront also changes. Therefore, the wavefront controller 1
In order to adjust C to a suitable state in which the characteristics satisfy a predetermined specification, it is necessary to comprehensively adjust the adjustment points of 37 of the deformable mirror 2DM.

A reference example of the adjusting method of the present invention for adjusting the wavefront controller 1C will be described. The adjusting method of this reference example is basically the same as the adjusting method of the optical device example of FIG.

After the wavefront controller 1C is mounted in a place requiring its function, in the inspection process, the adjusting device 5, the observing device 6 and the adjusting light generating device 7 are connected to the wavefront controller 1C, respectively, and are adjusted. The light generator 7 inputs the adjustment light as the input light 8 of the wavefront controller 1C. The observation device 6 gives, for example, the characteristics of the spatial mode of the wavefront of the output light and the observation result of the higher-order modes in the spatial mode of the wavefront to the adjustment device 5 as values for the evaluation function. Evaluation is performed using an evaluation function that weights multiple observation results. The adjusting device 5 sets the adjustment value of the deformable mirror 2DM of the wavefront controller 1C according to the same processing procedure as shown in FIG.

According to the method of this reference example, the wavefront controller 1C is used.
An optical element 2DM having a variable parameter is used as an optical element in (optical device), and the characteristics of the optical element are searched for so that the function of the optical device is suitable. Therefore, the wavefront controller 1C is automatically adjusted to meet predetermined specifications without requiring manual adjustment by a skilled person and a highly accurate optical element, and without requiring a highly accurate drive device. can do. This means that higher performance can be obtained with less effort than with the prior art.

Although the number of adjustment points of the deformable mirror is set to 37 in this reference example, it goes without saying that the number of adjustment points is not limited in the present invention. Further, the present reference example is particularly suitable when the wavefront controller 1C is configured by a deformable mirror having a large number of adjustment points. It is effective that the maximum amount of deformation possible by adjusting the deformable mirror is as long as the wavelength of the light to be handled.

In this reference example, it is assumed that the output light 9 is not condensed as shown in FIG.
As shown in FIG. 4, it is also effective for the modification example in which the output light is condensed. FIG. 34 shows a case where the output light of FIG. 33 is condensed, and the same components as those in FIG. 33 are designated by the same reference numerals.

Even when the output light from the wavefront controller 1C is collected, the wavefront controller 1C is performed in exactly the same manner as in the above reference example.
C is adjusted. This modification is particularly effective when the output light 9 is focused on the wavelength conversion crystal or the optical amplification medium.

This reference example has a further effect that the shape of the mirror can be freely controlled, and is effective for adjustment for obtaining an ideal mirror shape. An example of this case is shown in the next embodiment.

FIG. 35 shows a configuration example of a telescope as an embodiment of the optical device of the present invention. In FIG. 35, 1T indicates a telescope as an optical device (unit), and this telescope 1T includes a concave deformable mirror 2DM2 as an optical element to be adjusted. In addition, in FIG.
The same parts as those shown in are denoted by the same reference numerals.
Reference numeral 8 is the incident light on the telescope, that is, the light from the object observed by the telescope 1T. The CCD is an image pickup device installed on the image plane of the telescope. Here, it is assumed that the resolution specific to the image pickup device CCD is sufficiently high. The electric signal (video signal) output from the imaging device is the output from the telescope. The observation device 6 for adjustment and the adjustment device 5 are internal devices incorporated in the telescope 1T.

The telescope 1T reflects and collects the incident light 8 which is the light from the observation target by the deformable mirror 2DM2 which functions as a concave mirror, and the collected light is converted into an electric image signal by the image pickup device CCD. To be converted. In the present embodiment, an electric image signal is used instead of the optical output in the example of the optical device of FIG. 1 for evaluation and adjustment. in this way,
The output 9 of the optical device of the present invention may be not only light but also light other than light such as an electric signal.

A desired characteristic of the telescope 1T is that the observation target is imaged with the highest possible resolution. In order to obtain such characteristics, the focal point of the mirror 2DM2 is concentrated at one point as much as possible, and the image plane and the image pickup device CCD are
It is necessary to adjust so that the positions of are the same. By the way, due to the manufacturing error of the telescope, the movement of the telescope, the temperature change, etc., the position of the designed image pickup device CCD, which is an ideal image plane, does not completely match the actual position of the image pickup device CCD.
Therefore, it is necessary to adjust the characteristics of the deformable mirror 2DM2 in accordance with the characteristics of the telescope 1C, and specifically, the deformation amount at each adjustment point of the deformable mirror 2DM2 is adjusted.

The mirror 2DM2 can have the same structure as in the case of FIG. 10 and FIG. Similar to the example of the optical device and the reference example of the wavefront controller in FIG. 1, the parameter, that is, the shape of the mirror 2DM2 also changes according to the value indicated by the control signal CS in this embodiment.

The control signal CS from the adjusting device 5 is shown in FIG.
The voltage of the electrode 203 of the deformable mirror shown in is changed to change the shape of the deformable mirror 2DM2. This allows
The image formation state of the telescope changes, and the resolution changes. As a result, the resolution of the telescope can be changed and improved according to the register value of the register group 5RG.

An embodiment of the adjusting method of the present invention for adjusting the telescope 1T will be described. The method of this embodiment is also basically the same as the adjusting method of the optical device example shown in FIG.

After the telescope 1T is manufactured or moved, or after the conditions such as the temperature at which the telescope is used are changed, the adjustment light is input to the telescope 1T as the input light 8.
This adjusted light may be an actual observation target with little change in the image with time, instead of the light from the adjusted light generator. The adjustment light is preferably an image with high contrast and is preferably light generated from a distance equivalent to the observation target of the telescope. Therefore, as the adjustment light, a known minute image, for example, a minute checkered pattern placed at a distance, or light from the moon surface is used.

When the shape of the deformable mirror 2DM2 deviates from the ideal shape, the output from the image pickup device CCD has a reduced resolution. Therefore, the adjusting device 5 may use the resolution of the image on the image pickup device CCD output by the observation device 6, specifically, the ratio of high frequency components in the frequency spectrum of the video signal, for example, in the evaluation function.

In the method of this embodiment, the adjustment is executed by using the resolution obtained by the telescope as described above for the evaluation function. The adjusting device 5 sets the parameters of the deformable mirror 2DM2 according to the same processing procedure as in the case of the method of the optical device example of FIG.

That is, in this embodiment, an optical element (deformable mirror 2DM2) having a variable mirror shape is used, and the mirror shape (parameter of the optical element 2DM2) is used.
Is searched so that the function (characteristics) of the telescope, which is an optical device, becomes suitable. Therefore, according to the present embodiment, the telescope 1T
By absorbing the non-uniformity of the process in the manufacturing process, the non-uniformity of the quality of the members, the design error, the error of the characteristics of the optical element caused by the vibration due to the movement / transportation, the temperature change, the change over time, etc. It can be adjusted so that the telescope 1T has a function of satisfying a predetermined specification.

As described above, according to the present invention, the other optical element (deformable mirror 2DM2) to be directly adjusted cooperates with its circuit to constitute another optical device (image pickup element CCD).
It is also effective when adjusting so as to compensate the characteristic (position) of.

In the present embodiment, needless to say, the number of adjusting points of the deformable mirror 2DM2 does not matter. Also,
This embodiment is more suitable when the dimensions of the mirrors forming the telescope are very large.

In the present invention, when there are a plurality of conditions for operating the optical device and the optimum adjustment result of the optical device is different for each condition, the register group 5R is provided for each optical element.
It is also possible to prepare a plurality of groups of G and switch the register group 5RG for each condition.

Since the operating characteristics of the optical device may change depending on the temperature of the device, the optimum adjustment result may change with temperature. Further, it may be necessary to change the specifications of the optical device (for example, the shape of the spectrum of the laser output pulse) from the original one.

FIG. 36 shows an example of the configuration for switching the register group 5RG for each condition. Where k is the number of conditions
And SEL is a register group 5 corresponding to the condition.
The selectors for switching RGs, 5RG-1 to 5RG-k,
It is a k register group 5RG. Here, for convenience, 5RG-
i in i is called a register number.

The adjusting method using such a configuration can be performed as follows, for example. When it is desired to keep the characteristics of the optical device constant even when the temperature of the optical device changes, the method and the method of the present invention are made to correspond to the temperature and the register number, and at the temperature corresponding to each register number in the inspection process. Adjustment is performed and the adjustment result is displayed in the register group 5RG-
It is stored in 1 to 5RG-k. When using the optical device, the selector SEL detects the temperature of the circuit and selects the corresponding register number.

In the above adjusting method, it is possible to omit the adjustment at the temperatures corresponding to some register numbers, and in that case, it is estimated from other adjusted register values by interpolation. The register value may be stored in the register. A linear approximation, a spline function, or the like can be used as the interpolation method.

It is also possible to switch the characteristics of the optical device in accordance with a plurality of specification conditions. In this case, the specification condition and the register number are associated with each other, and
The adjustment according to the method of the present invention is performed under the specification condition corresponding to each register number, and the adjustment result is displayed in the register group 5RG-.
It is stored in 1 to 5RG-k. When using the optical device, the selector SEL is used to select the register number corresponding to the specification condition.

In the adjusting method described above, similarly,
It is also possible to omit the adjustment under the specification condition corresponding to some register numbers, and the register value estimated by interpolation from the value of another adjusted register may be stored in the register.

On the other hand, the drive mechanism 4 in the optical device of the present invention can be constructed such that a part thereof can be attached and detached. In this case, a part of the drive mechanism 4 can be reused for another optical device after the optical device has been adjusted by the method according to the invention. That is, after adjustment,
The stage 402, which is the movable part of the drive mechanism 4, and the base 401, which is the fixed part, can be fixed with an adhesive or screws, and the other parts of the drive mechanism can be detached.

According to this configuration example, a part of the drive mechanism 4 is detached, so that part of the drive mechanism 4 can be omitted in the optical device 1 which has been adjusted, and the weight and cost of the optical device 1 can be reduced. It can be reduced.

Needless to say, the present invention can be applied to the whole, a part, or a plurality of parts of the optical device using the optical unit, and the scale of the optical unit is not limited. Although the present invention has been described above based on the illustrated example, the present invention is not limited to the above example, and includes other configurations that can be easily modified by those skilled in the art within the scope of the claims.

[Brief description of drawings]

FIG. 1 is a conceptual diagram illustrating an optical device and a method of adjusting the optical device.

FIG. 2 is a diagram illustrating a problem caused by a dependency relationship regarding an adjustment location.

FIG. 3 is a configuration diagram showing an adjusting device of the present invention.

FIG. 4 is a configuration diagram showing an example of a drive mechanism for translational movement used in the present invention.

FIG. 5 is a configuration diagram showing an adjusting device of the present invention.

FIG. 6 is a configuration diagram showing an example of a drive mechanism for uniaxial rotation used in the present invention.

FIG. 7 is a configuration diagram showing an example of a drive mechanism for rotating two axes used in the present invention.

FIG. 8 is a configuration diagram showing an example of a deformable mirror used in an optical element and a driving mechanism of the present invention.

FIG. 9 is a configuration diagram showing an example of an arrangement of electrodes of the deformable mirror.

FIG. 10 is a configuration diagram showing another configuration example of the deformable mirror used in the optical element and the driving mechanism of the present invention.

FIG. 11 is a configuration diagram showing an example of an optical element and a drive mechanism in which a variable element parameter is a transmittance or an absorption coefficient.

FIG. 12 is a configuration diagram showing an example of an optical element and a drive mechanism in which a variable element parameter is polarization.

FIG. 13 is a configuration diagram showing an example of an optical element and a drive mechanism in which variable element parameters are a phase and a light intensity.

FIG. 14 is a configuration diagram showing an example of an optical element and a drive mechanism in which a variable element parameter is a distribution ratio.

FIG. 15 is a configuration diagram showing an example of an optical element and a drive mechanism in which a variable element parameter is a modulation rate.

FIG. 16 is a configuration diagram showing an example of an optical element and a driving mechanism in which a variable element parameter is a wavelength characteristic.

FIG. 17 is a flowchart showing an outline of a processing procedure of the adjusting method of the present invention.

FIG. 18 is a flowchart showing an outline of the procedure of a general genetic algorithm.

FIG. 19 is an explanatory diagram illustrating a chromosome used in a genetic algorithm.

FIG. 20 is a flowchart showing a processing procedure using a genetic algorithm in the method of the present invention.

FIG. 21 is an explanatory diagram showing chromosomes used in a genetic algorithm and register values and element parameter values determined from the chromosomes.

FIG. 22 is a flowchart showing a procedure of selective selection processing performed by a genetic algorithm.

FIG. 23 is an explanatory diagram showing a procedure of crossover processing performed by a genetic algorithm.

FIG. 24 is an explanatory diagram showing a procedure of mutation processing performed by a genetic algorithm.

FIG. 25 is a flowchart showing a procedure of local learning performed by a genetic algorithm.

FIG. 26 is an explanatory diagram illustrating the operation of the local learning method.

FIG. 27 is a configuration diagram showing a modification of the adjustment of the optical element.

FIG. 28 is an explanatory diagram illustrating a laser device and a method for adjusting the same.

FIG. 29 is an explanatory diagram illustrating positions and directions of optical elements used in the optical device.

FIG. 30 is a characteristic diagram showing a relationship between an evaluation function value as a result of a laser device adjustment experiment and the number of generations in a genetic algorithm.

FIG. 31 is a flowchart showing a processing procedure using an annealing method for the optical unit and its adjusting method.

FIG. 32 is a characteristic diagram showing the relationship between the evaluation function value, which is the result of the adjustment experiment by the adjustment method of the laser device, and the number of transitions in the annealing method.

FIG. 33 is a configuration diagram illustrating the configuration of a wavefront controller.

FIG. 34 is a configuration diagram illustrating another configuration of the wavefront controller.

FIG. 35 is a configuration diagram illustrating the configuration of a telescope of the present invention.

FIG. 36 is an explanatory diagram showing another configuration of a register that can be used in the adjusting device and the adjusting method of the present invention.

[Explanation of symbols]

1 Optical unit 2 Adjusted optical element 3 Optical element not adjusted 4 drive mechanism 5 Adjustment device 6 Observation equipment 7 Adjusting light generator 8 input light 8a Adjusting light 9 Output light 1A Optical device 1L laser device 1C wavefront controller 1T telescope 2DM deformable mirror 2DM2 deformable mirror CS control signal 5T adjustment light switching signal 5R register 5RG register group 5A Adjustment algorithm execution device 5F Evaluation function unit 5C drive mechanism controller 401 base 402 stage 403 male screw 404 female screw 405 motor 406 Potentiometer 4C comparison circuit 4D motor drive circuit

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Masahiro Murakawa             1-1-1 Higashi 1-1-1 Tsukuba City, Ibaraki Prefecture             Inside the Tsukuba Center, National Institute of Advanced Industrial Science and Technology (72) Inventor Taro Itaya             1-1-1 Higashi 1-1-1 Tsukuba City, Ibaraki Prefecture             Inside the Tsukuba Center, National Institute of Advanced Industrial Science and Technology (72) Inventor Tetsuya Higuchi             1-1-1 Higashi 1-1-1 Tsukuba City, Ibaraki Prefecture             Inside the Tsukuba Center, National Institute of Advanced Industrial Science and Technology F-term (reference) 2H039 AA01 AB12 AB24 AC00                 2H043 AA00 AA27

Claims (10)

[Claims] 1. A telescope having a plurality of optical elements including a deformable mirror capable of changing the shape of a reflecting surface, wherein parameters of a plurality of specific optical elements among the optical elements are output by an adjusting device. Can be changed by the control signal,
The telescope according to claim 1, wherein the adjusting device outputs a control signal so that a function of the telescope satisfies a predetermined specification in accordance with a stochastic search method regarding parameters of the specific plurality of optical elements. 2. The adjusting device according to claim 1, sequentially changing and searching the value of the control signal according to a genetic algorithm,
2. The telescope according to claim 1, wherein the parameters of the plurality of specific optical elements are changed to an optimum value in which the function of the telescope satisfies a predetermined specification. 3. The telescope function according to claim 1, wherein the adjusting device according to claim 1 sequentially changes and searches the value of the control signal according to the annealing method to change the parameters of the specific plural optical elements. The telescope according to claim 1, wherein the optimum value is a value that satisfies the condition. 4. The evaluation device according to claim 1, wherein the adjusting device uses an evaluation function for weighting and integrating a plurality of evaluation values as a function for evaluating the state of the function of the telescope. Telescope. 5. A telescope adjusting method for controlling a plurality of optical elements in a telescope comprising a plurality of optical elements including a deformable mirror capable of changing the shape of a reflecting surface, the control signal according to a stochastic search method. Is sequentially output to change the parameters of a plurality of specific optical elements among the plurality of optical elements, and an optimum value for which the function of the telescope satisfies a predetermined specification is searched for. 6. The method for adjusting a telescope according to claim 5, wherein the optimum value is searched by sequentially changing the value of the control signal according to a genetic algorithm. 7. The method of adjusting a telescope according to claim 5, wherein the optimum value is searched by sequentially changing the value of the control signal according to the annealing method. 8. The telescope according to claim 5, wherein an evaluation function for weighting and integrating a plurality of evaluation values is used as a function for evaluating the state of function of the telescope. Adjustment method. 9. An electronic computer and a recording medium having a processing program for executing the adjustment of the method according to any one of claims 5 to 8 which is readable by the electronic computer recorded therein. The adjusting device according to claim 5,
9. An adjusting device for adjusting the method according to claim 8. 10. A recording medium on which a processing program for executing the adjustment of the method according to claim 5 by an electronic computer of an adjusting device is recorded.