JP2003159697A - Matrix type actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostriction actuator which gains a large displacement at a low voltage, has high speed of response, excellence in mountability, capability of being integrated in high density, and is favorably applicable to an optical modulator, an optical switch, an electrical switch, a micro valve, a transfer device, a pump, a liquid discharge device, an image display device or the like. <P>SOLUTION: The matrix type actuator 1 comprises a thick ceramics substrate 2 and a plurality of piezoelectric/electrostriction elements 31 arranged on the substrate 2, each of which comprises a piezoelectric/electrostriction body 4 and at least a pair of electrodes 18, 19. The plurality of piezoelectric/ electrostriction elements 31, which are driven by a displacement of the piezoelectric/electrostriction body 4, are integrally joined to the ceramics substrate 2, and are separately arranged in two-dimension. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a matrix type actuator. More specifically, an optical modulator, an optical switch, an electric switch, a micro relay, a micro valve, a carrier device, an image display device such as a display and a projector, an image drawing device, a micro pump, a droplet discharge device, and further a minute mixture. Used in a device, a micro-stirring device, a micro-reactor, etc., having both a high generating force and a large displacement, and preferably the piezoelectric / electrostrictive body is a ceramic substrate main surface due to the lateral effect of the electric field induced strain of the piezoelectric / electrostrictive body. Develops vertical expansion or contraction displacement or expansion vibration, and pushes, distorts, moves, strikes (impacts) the object of action,
The present invention relates to a matrix type piezoelectric / electrostrictive actuator that performs operations such as mixing, and a method for manufacturing the same.

[0002]

2. Description of the Related Art In recent years, displacement control elements for adjusting the optical path length and position on the order of submicrons have been desired in fields such as optics, precision machinery, and semiconductor manufacturing. In response to this, the development of a piezoelectric / electrostrictive actuator utilizing strain, which is based on an inverse piezoelectric effect, an electrostrictive effect, or the like that occurs when an electric field is applied to a ferroelectric substance or an antiferroelectric substance, is being advanced. These displacement control elements that utilize electric field-induced strain are easier to control micro-displacement, have higher mechanical / electrical energy conversion efficiency, and save power compared to conventional electromagnetic systems such as servo motors and pulse motors. It has features such as ultra-precision mounting and contribution to size and weight reduction of products, and it is considered that the application fields will continue to expand.

For example, in an optical switch, such a piezoelectric / electrostrictive actuator is used for switching the transmission path of input light. An example of the optical switch is shown in FIGS. 2 (a) and 2 (b). 2 (a) and FIG.
The optical switch 200 shown in FIG.
And an optical path changing unit 208 and an actuator unit 211. More specifically, the light transmitting unit 201 includes the light reflecting surface 101 provided on a part of the surface facing the optical path changing unit 208, and
It has light transmission paths 202, 204, 205 provided in three directions starting from the light reflection surface 101, and the optical path changing unit 208 is movably close to the light reflection surface 101 of the light transmission unit 201. The light introducing member 2 made of a translucent material
09 and a light reflection member 210 that totally reflects light,
Further, the actuator unit 211 has a mechanism that is displaced by an external signal and transmits the displacement to the optical path changing unit 208.

In the optical switch 200, as shown in FIG. 2A, the actuator section 211 is actuated by an external signal such as application of a voltage, and the displacement of the actuator section 211 causes the optical path changing section 208 to separate from the light transmitting section 201. The light 221 that has been input to the light transmission path 202 of the light transmission unit 201
However, the light is totally reflected on the light reflecting surface 101 of the light transmitting unit 201 whose refractive index is adjusted to a predetermined value without being transmitted, and is transmitted to the one light transmitting path 204 on the output side.

On the other hand, when the actuator section 211 is deactivated from this state, the displacement of the actuator section 211 is restored and the light introducing member of the optical path changing section 208 is restored, as shown in FIG. 2B. 209 is the light transmission unit 201.
The light transmission path 20
The light 221 input to light 2 is extracted from the light transmitting unit 201 to the light introducing member 209 by the light introducing member 209 and is transmitted through the light introducing member 209. The light 221 transmitted through the light introducing member 209 reaches the light reflecting member 210, but is reflected by the reflecting surface 102 of the light reflecting member 210 and is reflected by the light reflecting surface 101 of the light transmitting portion 201. The light is transmitted to another light transmission path 205 on the output side different from the light.

A piezoelectric / electrostrictive actuator is preferably used for the actuator portion of the optical switch having such an optical path changing function. Among them, in constructing a matrix switch for switching between a plurality of channels, the applicant's earlier invention, Japanese Patent No. 269329.
Unimorph-to-bimorph-type piezoelectric elements (hereinafter also referred to as bending displacement elements) as disclosed in Japanese Patent No.
A piezoelectric / electrostrictive actuator having a plurality of electrostrictive elements arranged therein is preferably adopted. The bending displacement element is composed of
It is composed of an electrostrictive element, and a slight expansion / contraction strain of the piezoelectric / electrostrictive element itself when an electric field is applied is converted into a bending mode to be a bending displacement. Therefore, a large displacement proportional to the element length of the piezoelectric / electrostrictive element Is easy to get. However, since the strain is converted, the generated stress directly applied to the piezoelectric / electrostrictive element cannot be used as it is, and it is very difficult to increase the generated force at the same time.
In addition, since the resonance frequency inevitably decreases as the element length increases, it is difficult to satisfy the response speed at the same time.

By the way, in order to improve the performance of the optical switch, firstly, there is a demand to increase the ON / OFF ratio (contrast). In this case, in the above-described optical switch 200, it is important to surely perform the contact / separation operation of the optical path changing unit 208 and the light transmitting unit 201, and for that purpose, the actuator unit is displaced by a large stroke, that is, largely displaced. It is preferably one. Secondly, there is a demand to reduce the switching loss. In this case, it is important to increase the substantial contact area with the light transmitting section 201 while increasing the area of the optical path changing section 208, but such an increase in the contact area reduces the certainty of separation. Since this is a factor, the actuator unit needs to be capable of generating a large force. That is, in order to improve the performance of such an optical switch, a piezoelectric / electrostrictive actuator capable of simultaneously generating displacement and force is desired as an actuator section.

It is preferable that the individual piezoelectric / electrostrictive elements are formed independently of each other. Independent of each other means that they do not interfere with each other, that is, the generated displacement and the generated force are not constrained to each other. For example, the piezoelectric / electrostrictive actuator 1 shown in FIG.
45 is the piezoelectric / electrostrictive element 1 as shown in the sectional view of FIG.
It is bent and displaced by the operation of 78. Due to the rigidity of the partition wall 143, the piezoelectric / electrostrictive elements 178 are mechanically independent of the adjacent piezoelectric / electrostrictive elements. However, the base 144 is integrated as a structure, and the diaphragm on which the piezoelectric / electrostrictive element 178 acts is also a continuous body.
Therefore, although the adjacent piezoelectric / electrostrictive elements are independent by the partition wall 143, it can be denied that the tensile or compressive stress of the diaphragm generated by the operation of the piezoelectric / electrostrictive element 178 exerts some influence on each other. Absent. On the other hand, FIG.
In the piezoelectric / electrostrictive actuator 155 whose sectional view is shown in FIG.
The side wall 219 supporting the diaphragm 218 is adjacent to the side wall 21.
Since it is independent of 9, the adjacent elements are not affected.

In yet another embodiment, Japanese Patent Laid-Open No. 60-90
FIG. 2 of Japanese Patent Publication No. 770 shows an actuator used for an inkjet head, which is a pressurizing chamber 2 arranged in a line.
Accordingly, actuators arranged in a line are disclosed. This actuator is not a bending displacement element described above, but a piezoelectric / electrostrictive element of a type that directly uses the strain of the piezoelectric / electrostrictive body. Since it is formed, the piezoelectric strain constant d33, which is the vertical effect of the electric field-induced strain, is larger than the piezoelectric strain constant d31 of the lateral effect of the electric field-induced strain, but the distance between the electrodes is large, and it is large at a substantially low voltage. It was difficult to get the displacement. On the other hand, FIG. 5 also discloses a piezoelectric element which is used by applying a voltage in the thickness direction thereof. This is a simple piezoelectric element in which electrodes are simply formed on a piezoelectric plate. I'm just there. Also, JP-A-60-907
The piezoelectric element disclosed in Japanese Unexamined Patent Publication No. 70 is manufactured by cutting using a diamond saw, and has a problem that damage due to the processing is inherent.

In any case, as described above, a plurality of independent piezoelectric / electrostrictive elements, which are extremely small in damage received during manufacturing and have both generated displacement and generated force, are two-dimensional without using an adhesive. A piezoelectric / electrostrictive actuator that is arranged in a matrix and is formed integrally with a substrate has not been proposed in the past.

[0011]

The present invention has been made in view of such circumstances, and the problem to be solved is that a large displacement is obtained at a low voltage and a response speed is high. Image display of optical modulator, optical switch, electric switch, micro relay, micro valve, carrier device, display, projector, etc. apparatus,
It can be preferably applied to an image drawing device, a micro pump, a droplet discharge device, and further, a micro mixing device, a micro stirring device, a micro reaction device, and the like. It is to provide a piezoelectric / electrostrictive actuator that performs actions such as (impacting), mixing, and a manufacturing method thereof. As a result of repeated studies on the piezoelectric / electrostrictive actuator, it was found that these problems can be solved by the matrix type actuator shown below.

[0012]

Means for Solving the Problems That is, a plurality of piezoelectric / electrostrictive elements including a piezoelectric / electrostrictive body and at least a pair of electrodes are formed on a thick ceramic substrate, and a piezoelectric / electrostrictive element is formed.
A piezoelectric / electrostrictive actuator driven by displacement of an electrostrictive body, wherein a plurality of piezoelectric / electrostrictive elements are integrally joined to a ceramic base, respectively, and are two-dimensionally arranged independently of each other. A matrix-type actuator is provided.

More specifically, the matrix type actuator of the present invention is composed of two types of actuators. The first matrix type actuator of the present invention is
The piezoelectric / electrostrictive element is an actuator in which electrodes are formed on the side surfaces of a piezoelectric / electrostrictive body erected on a ceramic substrate. More preferably, in the electrode, the cross section of the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element is a parallelogram in a cross section parallel to the ceramic substrate, and includes the long side of the cross section of the piezoelectric / electrostrictive body. It is preferably formed on the side surface. First
In the matrix type actuator, it is preferable that the piezoelectric / electrostrictive element expands and contracts in the direction perpendicular to the main surface of the ceramic substrate based on the displacement of the piezoelectric / electrostrictive body due to the lateral effect of the electric field-induced strain. In the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element, the crystal grain state on the wall surface on which the electrode is formed is preferably 1% or less of crystal grains undergoing intragranular fracture. The contour of the surface of the piezoelectric / electrostrictive body of the strain element is preferably about 8 μm or less, and the surface roughness Rt of the wall surface of the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element is about 10 μm or less. Is preferred.

A second matrix-type actuator of the present invention is an actuator in which a piezoelectric / electrostrictive element is formed by alternately laminating a plurality of layered piezoelectric / electrostrictive bodies and layered electrodes on a ceramic substrate. In the second matrix type actuator, it is preferable that the piezoelectric / electrostrictive element expands and contracts in the direction perpendicular to the main surface of the ceramic substrate based on the displacement of the piezoelectric / electrostrictive body due to the vertical effect of the electric field-induced strain. Further, the thickness of each layer formed of the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element is preferably 100 μm or less.
The piezoelectric / electrostrictive layer of the electrostrictive element has a thickness of 10 to 200.
It is preferred to have layers.

In the first and second matrix type actuators of the present invention, it is preferable that a wall portion is formed between adjacent piezoelectric / electrostrictive elements. In the first and second matrix type actuators of the present invention, the piezoelectric / electrostrictive body is made of any one of piezoelectric ceramics, electrostrictive ceramics, and antiferroelectric ceramics,
Alternatively, it is preferable that the ceramic base and the piezoelectric / electrostrictive body forming the piezoelectric / electrostrictive element are made of the same material. Furthermore, an electrode terminal is formed on the surface of the ceramic base opposite to the surface on which the piezoelectric / electrostrictive element is arranged. It is preferably wired via.

Further, according to the present invention, a matrix in which a plurality of piezoelectric / electrostrictive elements including a piezoelectric / electrostrictive body and at least a pair of electrodes are two-dimensionally arranged on a thick ceramic substrate. A method for manufacturing a die actuator, comprising:
Prepare a plurality of ceramic green sheets whose main component is a piezoelectric / electrostrictive material, and punch and stack holes at predetermined positions in the plurality of ceramic green sheets with a punch and a die to stack them.
Step A of obtaining a ceramic green laminated body in which through holes having overlapping holes are formed, step B of preparing a ceramic green substrate that will later form a ceramic substrate, and after laminating the ceramic green laminated body and the ceramic green substrate The method includes a step C of firing and integration to obtain a laminated fired body, and a step D of making a cut in at least the ceramic green laminated body portion obtained in step A of the laminated fired body, which are independent of each other on the ceramic substrate. Multiple piezoelectrics /
There is provided a method of manufacturing a matrix type actuator, which includes the step of forming an electrostrictive body.

In the method for manufacturing a matrix type actuator of the present invention, step A is, more specifically, a first step of punching a first hole in the first ceramic green sheet with a punch, and a first hole. The second step of bringing the first ceramic green sheet into close contact with the stripper without pulling the punch out of the punch, and pulling the punch slightly so that the tip of the punch pulls in slightly from the bottom of the pulled first green sheet. The third step of pulling up
A fourth step of punching a second hole in the second ceramic green sheet by punching, and a fifth step of pulling up the second green sheet together with the first ceramic green sheet without removing the punch from the second hole. Process of
The sixth step of pulling up the punch to the extent that the tip of the punch is slightly pulled in from the lowermost part of the second ceramic green sheet that has been pulled up, and thereafter, the multiple steps of the ceramic green sheets from the fourth step to the sixth step are performed. It is preferable that the step is a step of repeatedly laminating to obtain a ceramic green laminated body in which a through hole having overlapping holes is formed.

In addition, after the step C and before the step D,
It is preferable to have a step of filling the through hole in the portion corresponding to the ceramic green laminated body of the laminated fired body with the filler.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the matrix-type actuator of the present invention will be specifically described, but the present invention is not construed as being limited to these, and the scope of the present invention is not limited thereto. Various changes, modifications, and improvements can be made based on the knowledge of those skilled in the art without departing from the scope. Although the matrix type actuator of the present invention is a piezoelectric / electrostrictive actuator, it is an actuator that utilizes strain induced by an electric field, and in a narrow sense, a piezoelectric element that generates a strain amount approximately proportional to an applied electric field. The effect is not limited to actuators that utilize the electrostrictive effect that generates a strain amount that is approximately proportional to the square of the applied electric field, and polarization reversal found in ferroelectric materials in general,
Antiferroelectric phase-ferroelectric phase transition found in antiferroelectric materials,
Actuators that utilize such phenomena are also included. Further, it is also free as to whether or not the polarization process is performed. Piezoelectric /
Piezoelectric / Electrostrictive Element Piezoelectric / Comprising Electrostrictive Actuator
It is appropriately determined based on the properties of the material used for the electrostrictive body. Therefore, in the present specification, it should be understood that the case where the polarization treatment is performed is based on the premise that the material requiring the polarization treatment is the target.

A description will be given below with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of a first matrix type actuator according to the present invention. The matrix type actuator 1 includes a piezoelectric / electrostrictive body 4 on a ceramic substrate 2.
A plurality of piezoelectric / electrostrictive elements 31 including a pair of electrodes 18 and 19 are formed, and the piezoelectric / electrostrictive body 4 is a piezoelectric / electrostrictive actuator that is driven by causing displacement on the ceramic substrate 2. . The matrix type actuator 1 of the present invention has the following features common to the first matrix type actuator.

1) Two-Dimensional Alignment Arrangement Element The conventional piezoelectric / electrostrictive actuator 1 shown in FIG. 3 described above.
As in 45, unimorph-type or bimorph-type piezoelectric / electrostrictive elements are not formed side by side on the substrate, but 1
A plurality of piezoelectric / electrostrictive elements 31 are arranged in a two-dimensional matrix on one thick and substantially solid ceramic base 2 independently of each other and integrally with the ceramic base 2. Since a structure in which an adhesive or the like is not present in a portion related to such an element array and a portion serving as a base point of displacement manifestation of the piezoelectric / electrostrictive element, it is needless to say that the accuracy of initial element dimensions, element pitch, etc. is high. In addition, since the phenomenon of deterioration of inclusions cannot occur, high dimensional accuracy and piezoelectric / electrostrictive element characteristics can be maintained for a long period of time. When it is used as an actuator for an optical switch, a microvalve, or an image display device, it can be mounted with higher accuracy, and since it has an integrated structure, it has excellent strength. The mounting work itself becomes easy. Here, the term “thick” is used to mean that the base does not function as a diaphragm.

2) Mutually Independent Element In the matrix type actuator 1 of the present invention, it is only the piezoelectric / electrostrictive element 31 portion exposed on the ceramic base 2 that causes displacement, and the piezoelectric / electrostrictive element 31 is a piezoelectric / electrostrictive structure. Even if each piezoelectric / electrostrictive element 31 has a structure in which it is integrated with the ceramic base, there is no portion that is deformed due to the electric field-induced strain generated by the electrostrictive body 4, and the adjacent piezoelectric / electrostrictive element 31 is Are completely independent and do not interfere with each other's displacement. Therefore, a larger displacement can be stably obtained with a lower voltage.

3) The electrode terminal forming matrix type actuator 1 includes the piezoelectric / electrostrictive element 31.
Is erected on the ceramic base 2, and the electrode 18,
19 is formed. In other words, the electrodes 18, 19
Are formed on the cross-sectional shape of the piezoelectric / electrostrictive element 4 of the piezoelectric / electrostrictive element 31 in the direction parallel to the ceramic base body 2, that is, on the side surface including the long side of a rectangle which is one aspect of the parallelogram. Then, the electrode terminal 2 is formed on the surface opposite to the surface on which the piezoelectric / electrostrictive element 31 is arranged with the ceramic base 2 interposed therebetween.
0 and 21 are formed, the electrode 18 and the electrode terminal 20,
In addition, the electrode 19 and the electrode terminal 21 are the ceramic base 2
Wiring is performed by a via hole 22 formed inside the and filled with a conductive material. Of course, the via hole 22
Alternatively, a through hole having an inner surface coated with a conductive material may be used. By thus forming the electrode terminals on the side opposite to the piezoelectric / electrostrictive element 31 which is the driving unit, the power source connection work for applying an electric field later becomes easy, and the reduction in yield due to the manufacturing process is prevented. You can

4) Parallelism of Polarization and Driving Electric Field In the matrix type actuator 1, the piezoelectric / electrostrictive body 4 constituting the piezoelectric / electrostrictive element 31 is P parallel to the main surface of the ceramic substrate 2 in FIG. It is polarized in the direction. Then, a driving electric field is formed in the direction E by connecting a power source to the electrode terminals 20 and 21 and applying a voltage with the electrode 18 side being a positive electrode and the electrode 19 side being a negative electrode. That is, the polarization electric field and the driving electric field of the piezoelectric / electrostrictive body 4 are in the same direction. As a result, the piezoelectric / electrostrictive element 31 contracts in the S direction perpendicular to the main surface of the ceramic substrate 2 based on the lateral effect of the electric field-induced strain of the piezoelectric / electrostrictive body 4, and conversely, polarization occurs. It extends with an electric field 180 degrees opposite to the direction of P (however, the electric field strength at which polarization reversal does not occur). Since the polarization electric field and the driving electric field of the piezoelectric / electrostrictive body 4 constituting the piezoelectric / electrostrictive element 31 are parallel to each other, the polarization direction and the driving electric field are parallel to each other in the manufacturing process, such as shear mode (d15). It is not necessary to fabricate a temporary polarization electrode and apply an electric field, which is necessary when the non-use mode is used, so that the throughput can be improved. Further, it is possible to apply a manufacturing process involving heating at a high temperature not lower than the Curie temperature regardless of the polarization treatment. Therefore, when fixing / connecting the piezoelectric / electrostrictive actuator to the circuit board, for example, soldering by solder reflow or thermosetting adhesion can be performed.
Throughput is further improved, including manufacturing processes of products to which actuators are applied, leading to a reduction in manufacturing costs. The polarization state does not change even if it is driven with a high electric field strength, rather, a more preferable polarization state can be obtained, and a high strain amount can be stably obtained. Therefore, it can be made more compact and is preferable as an actuator.

5) Expansion / contraction displacement Furthermore, the expansion / contraction electric field-induced strain of the piezoelectric / electrostrictive body 4 is not converted into the displacement in the bending mode for use, but the expansion / contraction is used as the displacement as it is. The design value for gaining the rank does not cause a decrease in the generated force. The individual piezoelectric / electrostrictive elements that make up this first matrix actuator are generally

[Equation 1] Generates a displacement according to the formula represented by

[Equation 2] A stress F _B is generated according to the mathematical formula expressed by That is, as described above, the displacement and the generated force can be designed separately. Here, T is the thickness of the piezoelectric / electrostrictive body, L is its height, W is width,

[Equation 3] Is elastic compliance. Therefore, as can be seen from these mathematical formulas, as the shape, the thickness T of the piezoelectric / electrostrictive body is
It is advantageous to make the thickness thin and the height L high in order to achieve both the displacement and the generated force, but it is usually very difficult to handle a plate-like body having such a large aspect ratio (L / T). In addition, it was impossible to arrange them accurately. The matrix-type actuator of the present invention can be integrally formed by the manufacturing method described later without handling them individually or arranging them individually, and maximizes the advantages of this piezoelectric / electrostrictive element. It has the feature that it can be pulled out to the limit. The aspect ratio is preferably 20 to 200 so that large displacement and generated force can be obtained with a low driving voltage.

Hereinafter, the embodiment of the first matrix type actuator according to the present invention will be described below with reference to the drawings. The matrix type actuator shown below also has at least the features 1) and 2) described above, and preferably has the features 3) to 5) described above. FIG. 9 is a perspective view showing another embodiment of the first matrix type actuator according to the present invention. In the matrix type actuator 90, a plurality of piezoelectric / electrostrictive elements 33 including a piezoelectric / electrostrictive body 4 and a pair of electrodes 18 and 19 are formed adjacent to each other on a ceramic substrate 2.
A cell 3 is formed by closing a surface of the pair of adjacent piezoelectric / electrostrictive elements 33 opposite to the ceramic base 2 with a flat plate 7. The piezoelectric / electrostrictive body 4 develops strain on the ceramic substrate 2 by the applied electric field, and the piezoelectric / electrostrictive element 33 expands and drives.

Both of the pair of piezoelectric / electrostrictive elements 33 may be simultaneously expanded or contracted, only one may be expanded or contracted, and it is also preferable to perform opposite operations such as expanding one and contracting the other. For example, when the flat plate 7, which is the working surface, is pressed against the object to be pressed, the piezoelectric / electrostrictive element 33 is simultaneously expanded, as compared with the case where the piezoelectric / electrostrictive element 33 is expanded. , Flat plate 7
Through, it is possible to press the object to be pressed with a larger driving force. This is because the width W of the piezoelectric / electrostrictive element is set to 2 W, as can be seen from the above formula. In addition, this cell structure has a thickness T of the piezoelectric / electrostrictive body.
Since the flat plate 7 is present even if it is made smaller, the mechanical strength is higher and the displacement and the generated force can be made larger than those constituted by a single body, which is preferable. Further, it is possible to incline at an angle from the horizontal plane of the flat plate 7 by performing an opposite operation such that one is extended and the other is contracted, or only one is driven. For example, the application to optical systems used in projectors and the like, such as changing the reflection angle of light incident on a mirror, spreads.

FIG. 26 is a perspective view showing still another embodiment of the first matrix type actuator according to the present invention. The matrix type actuator 260 includes a pair of piezoelectric / electrostrictive bodies 4 and electrodes 18, 69 on the ceramic base 2.
A plurality of piezoelectric / electrostrictive elements 44 composed of and are formed adjacent to each other. Then, through holes 128, 129 penetrating through the ceramic base 2 and coated with a conductive material are formed toward the surface opposite to the surface on which the piezoelectric / electrostrictive element 44 is arranged with the ceramic base 2 interposed therebetween. And is connected to an electrode terminal (not shown). A highly flexible conductor, for example, a conductive resin having adhesiveness, is inserted between the pair of piezoelectric / electrostrictive bodies 4, and this conductor functions as one electrode 69. The electrode 69 may be flexible enough not to disturb the strain generated by the piezoelectric / electrostrictive body 4. Further, on the surfaces of the pair of piezoelectric / electrostrictive bodies 4 opposite to the electrodes 69,
Electrodes 18 are formed on each. That is, the piezoelectric / electrostrictive element 44 includes the piezoelectric / electrostrictive body 4 and the electrodes 18 and 69.
The two piezoelectric / electrostrictive elements are integrated by sharing the electrode 69.

In the matrix-type actuator 260, the pair of piezoelectric / electrostrictive bodies 4 constituting the piezoelectric / electrostrictive element 44 are made thinner and higher, and displacement is likely to occur. On the other hand, since the piezoelectric / electrostrictive element 44 is composed of a pair of piezoelectric / electrostrictive bodies 4 opposed to each other with a flexible conductor (electrode 69) interposed therebetween, mechanical strength is ensured. Therefore, large displacement and large stress can be obtained with a low driving voltage,
It can function as a high-performance piezoelectric / electrostrictive element. Compared with the matrix type actuator 90 described above, the shape effect of the piezoelectric / electrostrictive element can be advantageously applied.

Although not shown, the ceramic base 2 of the piezoelectric / electrostrictive element 33 includes three or more piezoelectric / electrostrictive elements as one set.
The surface on the side opposite to may be connected so as to be closed by the flat plate 7. It is also possible to form the closed cell 3 by forming the piezoelectric / electrostrictive element 33 on four sides.

FIG. 10 is a perspective view showing still another embodiment of the first matrix type actuator according to the present invention. The matrix type actuator 100 is formed by a plurality of piezoelectric / electrostrictive elements 34, which are composed of a piezoelectric / electrostrictive body 4 having a cross-shaped horizontal cross section and a pair of electrodes 18 and 19, which are adjacent to each other, formed on a ceramic substrate 2. . The piezoelectric / electrostrictive body 4 develops strain on the ceramic substrate 2 by the applied electric field,
The electrostrictive element 34 expands and contracts and is driven.

By using the cross-shaped piezoelectric / electrostrictive body 4, since the rigidity of the structure increases and the displacement axis is determined,
The displacement direction is more stable than that of the matrix type actuator 1 shown in FIG. Further, the displacement generation force also becomes large.

FIG. 11 shows the matrix type actuator 110 shown in FIG. 10 in which the flat plate 7 is provided on the surface of the piezoelectric / electrostrictive element 34 opposite to the ceramic substrate 2. Similar to the matrix type actuator 100, a plurality of piezoelectric / electrostrictive elements 35 are formed adjacently on the ceramic substrate 2, and the piezoelectric / electrostrictive body 4 is applied to the ceramic substrate 2 by an applied electric field.
The strain is generated above, and the piezoelectric / electrostrictive element 35 expands and contracts to be driven.

Compared with the matrix type actuator 100, since the piezoelectric / electrostrictive body 4 in a cross shape is additionally provided with the flat plate 7, the rigidity as a structure is further increased,
The displacement axis is extremely fixed, and thus the direction of displacement is more stable. In addition, while taking advantage of the fact that the generated force becomes large, in addition, for example, when performing an operation of pressing against a pressurized object,
A wider area can be pressed by the flat plate 7.

FIG. 24 is a perspective view showing still another embodiment of the first matrix type actuator according to the present invention. In the matrix type actuator 240,
Instead of the highly flexible conductor (electrode 69) in the matrix type actuator 260 described above, the relay member 6 is used.
Piezoelectric / electrostrictive element 4 in which a pair of piezoelectric / electrostrictive bodies 4 are connected by 8
Have two. That is, the matrix type actuator 240
On the ceramic substrate 2, a plurality of piezoelectric / electrostrictive elements 42 each composed of a pair of piezoelectric / electrostrictive bodies 4 and electrodes 18 and 19 connected by a relay member 68 are formed adjacent to each other.

In the piezoelectric / electrostrictive element 42, the relay member 68 itself is also composed of the piezoelectric / electrostrictive body 4, and the electrodes 19 are formed on both main surfaces of the relay member 68. Can be expressed. According to such a matrix type actuator 240, the piezoelectric / electrostrictive element 42 becomes excellent in strength, and like the matrix type actuator 260, the shape effect of the piezoelectric / electrostrictive element can be advantageously applied. The relay member may relay any portion of the piezoelectric / electrostrictive body 4 facing each other, and has a U-shaped or Z-shaped horizontal cross section as shown in FIG. It may be.

FIG. 12 shows an actuator substantially the same as the matrix type actuator 1 shown in FIG. 1, in which the electrodes 18 and 19 are not spread horizontally on the substrate,
Directly below 19 is a matrix type actuator 120 which is electrically connected to an electrode terminal (not shown) on the back surface of the substrate through a via hole or a through hole (not shown). Similarly, a plurality of piezoelectric / electrostrictive elements 36 are formed adjacent to each other on the ceramic substrate 2, and the piezoelectric / electrostrictive body 4 develops strain on the ceramic substrate 2 by an applied electric field, and
The electrostrictive element 36 expands and contracts and is driven.

FIG. 21 is a perspective view showing still another embodiment of the first matrix type actuator according to the present invention. The matrix type actuator 210 is provided with the wall portion 8 between the piezoelectric / electrostrictive elements 39 which are uniaxially adjacent to each other. According to this structure, electrical interference between the adjacent piezoelectric / electrostrictive elements 39 can be prevented, and the wall portion 8 can be used as a joint portion with the operation target of the matrix type actuator. It is possible to effectively suppress the action propagation from the neighboring parts of the subject. The matrix-type actuator of the present invention is characterized by extremely small motion interference between the respective piezoelectric / electrostrictive elements, and in addition, the generated displacement or force can be concentratedly applied near a predetermined portion. Therefore, an actuator with high working efficiency is realized.

In the state where no voltage is applied, the wall portion and the piezoelectric / electrostrictive element do not have to be at the same height as in the matrix type actuator 210 shown in FIG. 21, and, for example, shown in FIG. The wall portion may be lower than the piezoelectric / electrostrictive element as in the matrix type actuator 220 shown in FIG. 23. Furthermore, the wall portion may be piezoelectric / electrostrictive as in the matrix type actuator 230 shown in FIG. It may be higher than the electrostrictive element, and can be appropriately selected according to the object of action.

Further, the wall portion is a piezoelectric / adjacent
It is, of course, preferable not only to be provided between the electrostrictive elements but also to be provided between the piezoelectric / electrostrictive elements adjacent in the biaxial direction. The matrix type actuator 270 shown in FIG. 27 is one embodiment thereof. In the matrix type actuator 270, since the wall portion 8 is biaxially adjacent to the piezoelectric / electrostrictive element 45, the action received from the piezoelectric / electrostrictive element 45 is the matrix type actuator 210, 220, 230. More difficult to escape compared to.

Since the wall portion is made of the same material as the piezoelectric / electrostrictive element, it can have the following configuration. Firstly, the actuator is formed in advance for the purpose of a wall portion and the wiring portion such as the via hole and the through hole is not provided. Second, although it has wiring etc. as a piezoelectric / electrostrictive element, it is not actually used as an element,
You may make it function only as a wall part.

FIG. 25 is a perspective view showing still another embodiment of the first matrix type actuator according to the present invention. The matrix type actuator 250 has grooves 9 formed on the surface of the ceramic base 2 between the adjacent piezoelectric / electrostrictive elements 43. According to this structure, it is possible to easily make the opposite electrode surfaces of the piezoelectric / electrostrictive elements 43 adjacent to each other by the grooves 9 different polarities. Further, since the electrode distance between the piezoelectric / electrostrictive elements 43 can be increased by forming the groove portions 9, even if the pitch between the piezoelectric / electrostrictive elements 43 is reduced, the possibility of causing a short circuit or the like can be reduced. Note that the above-described aspects of FIG. 21, FIG. 22, FIG. 23, FIG. 25, and FIG. 27 apply not only to the first matrix type actuator according to the present invention but also to the second matrix type actuator described later. It is possible to apply.

The matrix type actuator 280 shown in FIG. 28 is formed by arranging the piezoelectric / electrostrictive elements 46 having a high aspect ratio at a high pitch (high density). According to the present invention, even with such a piezoelectric / electrostrictive element 46 having a large dimension in one direction, the individual piezoelectric / electrostrictive elements are handled, that is, the substrate 2 and the piezoelectric / electrostrictive element 46 are handled. It is not necessary to attach and to attach the bases 2 to each other,
It is possible to arrange in a two-dimensional manner at a desired predetermined pitch with a good yield.

In actual use, each piezoelectric /
In order to prevent the deterioration of insulation due to the entry of foreign matter between the electrostrictive elements 46 and to improve the handling property, the piezoelectric / electrostrictive elements 46 are flexible enough to prevent displacement and generated force. It is preferable to fill with some insulator. The pitch advantageously adopted in the present invention is 3 mm or less, preferably 2 mm or less, more preferably 0.1 to 1 mm. As will be described later, in the present invention, a part of the surface of the piezoelectric / electrostrictive element is formed by mechanical processing into a fired body, and most of it is formed on the fired surface as it is. It is necessary to suppress the compositional variation on the surface of the piezoelectric / electrostrictive element by baking in a state that the firing atmosphere is uniform among the individual piezoelectric / electrostrictive elements.

When the pitch of the piezoelectric / electrostrictive elements is larger than 3 mm, the atmosphere during firing tends to be nonuniform among the elements, which causes variations in piezoelectric characteristics. On the other hand, when the pitch is smaller than 0.1 mm, the size of the piezoelectric / electrostrictive element is inevitably small, and the surface occupies a large proportion of the volume of the piezoelectric / electrostrictive element. It becomes a factor that causes the variation of.

The matrix type actuator 370 shown in FIG. 37 is similar to the matrix type actuator 280 in that piezoelectric / electrostrictive elements having a high aspect ratio are arranged in a high density, and a ceramic base 472.
A via hole (not shown) that penetrates through the ceramic base 4
The electrode terminals 321 are arranged on the front surface of the actuator by a wiring board 371 mounted on the surface of the piezoelectric element 72 opposite to the surface on which the piezoelectric / electrostrictive element is arranged. With such a configuration, the electrode terminal 321 and the power source can be easily joined, and the wiring board 371 can be used for handling.

Next, the second matrix type actuator according to the present invention will be described. FIG. 8 is a perspective view showing an embodiment of the second matrix type actuator according to the present invention. The matrix type actuator 80 is
On the ceramic substrate 2, the piezoelectric / electrostrictive body 14, a pair of electrodes, specifically, a pair of common electrodes 28, 29 and an internal electrode 4.
A piezoelectric / electrostrictive actuator in which a plurality of piezoelectric / electrostrictive elements 32 composed of 8 and 49 are formed, and the piezoelectric / electrostrictive body 14 is driven by expressing strain on the ceramic substrate 2 by an applied electric field. is there. The second matrix type actuator 80 of the present invention has at least the features of 1) a two-dimensional aligned arrangement element and 2) a completely independent element, similarly to the first matrix type actuator, and preferably 3). ) The formation of electrode terminals, 4) parallelism of polarization and driving electric field, and 5) expansion and contraction displacement.

However, in the following two points, the first
The matrix type actuator of First, 3)
A piezoelectric / electrostrictive device in which a substantially rectangular parallelepiped piezoelectric / electrostrictive device is erected on a ceramic substrate and a pair of electrodes is simply formed on the side surface of the piezoelectric / electrostrictive device as described in the section of forming electrode terminals. The piezoelectric / electrostrictive element, not the element, is that a plurality of layered piezoelectric / electrostrictive bodies and layered internal electrodes are alternately laminated on a ceramic substrate. In the second matrix type actuator shown in FIG. 8, electrodes are also formed on the side surfaces of the piezoelectric / electrostrictive element. However, as will be described later, these are joined to the inner layer electrodes every other layer. It functions as a common electrode for applying the same signal to every other inner layer electrode. The common electrode is not limited to being formed on the side surface of the piezoelectric / electrostrictive element as long as it has the same function.

Next, based on the displacement due to the lateral effect of the electric field-induced strain of the piezoelectric / electrostrictive body described in the section 4) Polarization and parallelism of driving electric field, the piezoelectric / electrostrictive element is displaced from the main surface of the ceramic substrate. The point is that the piezoelectric / electrostrictive element does not expand and contract in the vertical direction but expands and contracts in the vertical direction with respect to the main surface of the ceramic base body based on the displacement due to the vertical effect of the electric field-induced strain of the piezoelectric / electrostrictive body.

FIG. 13A is a view of the piezoelectric / electrostrictive element 32 of the matrix type actuator 80 shown in FIG. 8 as viewed from the side of a vertical cross section passing through the common electrodes 28 and 29 and the internal electrodes 48 and 49. In the matrix type actuator 80, the piezoelectric / electrostrictive element 32 is a layered piezoelectric / electrostrictive element 32.
The electrostrictive body 14 and the layered internal electrodes 48, 49 are alternately laminated, and the piezoelectric / electrostrictive body 14 has ten layers.
The number of piezoelectric / electrostrictive layers to be laminated is preferably 10 to 200 in view of stable actuator characteristics and easiness of production, although it may be appropriately determined depending on use and purpose.

In the matrix type actuator 80, the piezoelectric / electrostrictive body 14 that constitutes the piezoelectric / electrostrictive element 32.
Are polarized in the P direction in the figure, for example. Then, a power source is connected to the electrode terminals 20 and 21, and a voltage is applied between the common electrodes 28 and 29 with the common electrode 28 side being positive and the common electrode 29 side being negative, thereby forming an electric field in the E direction. . That is, layered piezoelectric / electrostrictive bodies 14 whose polarizations are opposite to each other are laminated with the internal electrodes 48 and 49 sandwiched therebetween. In each piezoelectric / electrostrictive body 14, the polarization and the driving electric field are in the same direction. It has become. As a result, an electric field induced strain appears in the piezoelectric / electrostrictive body 14, and based on the displacement due to the longitudinal effect,
The piezoelectric / electrostrictive element 32 expands and contracts with respect to the main surface of the ceramic substrate 2 in the S direction which is the stacking direction thereof. Since it is not a bending displacement like the conventional unimorph or bimorph, but an expansion / contraction displacement that directly utilizes electric field induced strain, the generated force is large,
Moreover, the response speed is also high. Further, this type of piezoelectric / electrostrictive element is superior in terms of generating force and response speed, even when compared with the one disclosed in FIG. 1 and the like which utilizes the lateral effect of electric field induced strain. Although the amount of displacement expressed by each layer is small, the displacement is proportional to the number of piezoelectric / electrostrictive layers, or more accurately, the number of pairs of piezoelectric / electrostrictive layers and a pair of electrodes. To get, increase the total number. However, with the increase in the number of layers, the reliability of conduction between the common electrode and the internal electrode is reduced, and the electrostatic capacitance is increased, resulting in poor power consumption, and the number of manufacturing steps is also high. Become.

Further, in the matrix type actuator 80 as shown in FIG. 8, the thickness of each layer of the piezoelectric / electrostrictive body 14 is 1 so that it can be driven at a low voltage.
The thickness is preferably 00 μm or less, and more preferably 10 to 80 μm.

In FIG. 13A, the common electrodes 28,
Although 29 was exposed to the outside of the piezoelectric / electrostrictive element,
It is also possible to configure the common electrode inside the piezoelectric / electrostrictive element as shown in (b). In this case, since the electrodes of the individual piezoelectric / electrostrictive elements are insulated from the outside, the adjacent element The pitch between them can be made small, which is suitable for a high-density actuator.

Next, application examples of the first and second matrix type actuators of the present invention will be given and described with reference to the drawings. In the following description, the first and second matrix type actuators are also simply referred to as matrix type actuators. Further, any of the first and second matrix type actuators can be adopted in the actuator section of the application example described below.

FIGS. 6A and 6B are views showing an example in which the matrix type actuator of the present invention is applied to a microvalve, and FIG. 6A is a perspective view of an actuator part of the microvalve. Yes, FIG. 6B is a vertical cross-sectional view of the microvalve. The micro valve 65 is a micro valve that includes a valve seat portion 64 and an actuator portion 61, and uses a matrix type actuator as the actuator portion 61.

The valve seat portion 64 has an opening portion 63 that makes a pair with the plurality of piezoelectric / electrostrictive elements 37 of the actuator portion 61. In the actuator portion 61, the piezoelectric / electrostrictive element 37 is displaced by an external signal, A valve body 66 is provided on the surface of the piezoelectric / electrostrictive element 37 opposite to the ceramic base 2. Then, through displacement of the piezoelectric / electrostrictive element 37 of the actuator portion 61, the valve body portion 66 can be moved toward and away from the opening portion 63 of the valve seat portion 64 to change the passage cross-sectional area of the opening portion 63. Through this operation, the flow rate of the fluid 67 or the like passing through the opening 63 can be adjusted.

The microvalve 65 can freely adjust the passage cross-sectional area of the opening 63 by changing the displacement amount of the piezoelectric / electrostrictive element 37. Piezoelectric /
The state of the electrostrictive element 37 is schematically shown. If the piezoelectric / electrostrictive element is an element of the type shown in FIG.
The piezoelectric / electrostrictive element 37a on the left side in (b) is in a state of being contracted by a predetermined applied voltage. At this time, the valve body portion 66 fully opens the opening portion 63 and the fluid 67 passing through the opening portion 63.
Maximize the flow rate of. The piezoelectric / electrostrictive element 37c on the right side in FIG. 6B is in a non-actuated state, and at this time, the valve body portion 66 completely closes the opening portion 63, and the opening portion 63 is filled with the fluid 67.
Cannot pass. The displacement amount of the piezoelectric / electrostrictive element 37 can be changed so that the piezoelectric / electrostrictive element 37a to the piezoelectric / electrostrictive element 37c can be set in any state, and as a result, the passage cross-sectional area of the opening 63 can be freely set. The flow rate of the fluid 67 or the like passing through the opening 63 is also adjusted. The state of the middle piezoelectric / electrostrictive element 37b in FIG. 6B is an example thereof. Therefore, the micro valve 65 can function not only as an ON-OFF valve but also as a control valve.

The shapes of the opening 63 and the valve body 66 are not limited to this example, and the relationship between the displacement amount of the piezoelectric / electrostrictive element 37 and the passage flow rate of the fluid 67 or the like may be linear. The shape of the opening 63 and the valve body portion 66 can be determined in the same manner as a general valve by examining whether or not the shape is a quadratic curve.

Since the flow rate of the fluid or the like passing through the opening is freely changed in the microvalve, it is also possible to freely change the pressure when the fluid, for example, air is blown out from the opening. Therefore, the microvalve uses the pressure to change the pressure on the upper surface of the opening so as to make the pressure on the upper surface of the opening undulate. It can be used as a transfer device for transferring while positioning to.
As long as it is a light-weight transported object such as paper, it can be transported in a non-contact manner while floating, and such a transporting device is suitable for transporting printed matter or the like in which it is not preferable to use the printing surface as a grip margin. .

FIGS. 7A and 7B are views showing an example in which the matrix actuator of the present invention is combined with an optical interferometer to form an optical modulator. FIG. 7A is an optical interferometer. 7B is a top view of FIG. 7B, and FIG. 7B is a view showing the AA cross section of FIG. 7A. The optical interferometer 74 includes two directional couplers 7
3 and two arm optical waveguide core parts 77a, 7
The optical modulator 75 includes an actuator section 71 for applying a stress to at least a part of one of the optical waveguide core sections 77a and 77b in the optical interferometer 74.

Specifically, as shown in FIG. 7B, for example, the clad portion 77c on the substrate 72 (for example, silicon).
And an optical waveguide 77 including optical waveguide core portions 77a and 77b
(For example, quartz waveguide, polymer waveguide such as polyimide)
On the other hand, the actuator portion 71 is arranged so as to face the optical waveguide core portion 77a on one side. Even if the actuator 71 and the optical waveguide 77 are provided with an air gap and are in contact with each other when a stress is applied when necessary, the stress is applied from that state in the state of being in constant contact without any air gap. It may be configured to apply. In the former case, even if the voids are eliminated and stress is applied by voltage application, on the contrary, the stress is applied in the initial state, and the stress is reduced by voltage application to form voids. It may be one that does.

Then, the light modulation is performed by the optical waveguide core portion 77.
When a stress is applied to a, the refractive index of the core changes, and as a result, a phase difference occurs between the lights transmitted through the two arm optical waveguide core portions 77a and 77b, and the intensity of light corresponding to the phase difference is increased. Can be output. With a specific phase difference, it is possible to output two values, that is, the light to be transmitted is turned off (OFF) and is turned on (ON).

Therefore, if this optical modulator is two-dimensionally arranged, the transmission path can be switched by utilizing the above-mentioned ON-OFF function. Since the matrix type actuator according to the present invention has the base portion and is configured as a surface, it is suitable to be arranged so as to face such a two-dimensionally arranged optical interferometer. With such a large displacement generated in the matrix type actuator, the air gap accuracy in the case of facing each other is not so required. Further, a relatively large stress is required to change the refractive index of the optical waveguide core, and this can be easily realized by using the high generating force of the matrix type actuator according to the present invention.

In general, the thermo-optical effect of the optical waveguide material is generally used for such a change in the refractive index, but the one using such heat reduces the crosstalk and the response. In order to prevent malfunction due to temperature rise of the switch itself, there is a case where a constraint such as use under air conditioning such as cooling is imposed. If the refractive index control based on stress is used, such a restriction can be eliminated, and since a heat source is not required, a switch advantageous in terms of power consumption can be realized.

The matrix type actuator of the present invention is the optical switch 2 shown in FIGS. 2 (a) and 2 (b).
Also in 00, it can be adopted as an actuator section instead of the illustrated actuator section 211. The optical switch 20 shown in FIGS. 2A and 2B.
Reference numeral 0 denotes a light transmitting unit 201, an optical path changing unit 208, and an actuator unit 211.
1 and light transmission paths 202, 204, 205 provided in three directions starting from the light reflecting surface 101, and
The optical path changing unit 208 includes the light reflecting surface 101 of the light transmitting unit 201.
A light introducing member 209 made of a translucent material and a light reflecting member 21 for totally reflecting the light.
0, and the actuator unit 211 has a mechanism that is displaced by an external signal and transmits the displacement to the optical path changing unit 208. The light path changing unit 208 is brought into contact with or separated from 101, and the light 221 input to the light transmission path 202 is totally reflected by the light reflection surface 101 of the light transmission unit 201 and transmitted to the specific light transmission path 204 on the output side. And the light introducing member 209 takes out the light reflecting member 210
Can be totally reflected by the light reflecting surface 102 and transmitted to the specific light transmitting path 205 on the output side. In such an optical switch 200, by adopting the matrix-type actuator of the present invention in place of the actuator section 211 that causes bending displacement, an optical switch with high contrast and low loss can be obtained.

Next, another embodiment of the optical switch to which the matrix type actuator according to the present invention is applied as an actuator section will be described. The optical switch 290 shown in FIG. 29 has been published in P182 of the 2001 Institute of Electronics, Information and Communication Engineers Society Conference. The optical switch 290 is formed by forming optical waveguide core portions 177a to 177d in an optical waveguide member 177 so as to intersect each other, and forming cuts in the optical path changing portions 298a to 298d at the intersecting portions. The optical switch 290 forms an optically discontinuous portion by deforming the cut by using the operation of a driving mechanism such as an actuator portion, and is input to any of the optical waveguide core portions 177a to 177d. It is a matrix switch that can change the transmission path of light in the optical path changing units 298a to 298d. Note that in FIG. 29, the transmission path of the light 223 input to the optical waveguide core portion 177a is changed to the optical waveguide core portion 17 in the optical path changing portion 298b.
It shows how to change to 7b.

In the optical switch 290, in order to reduce crosstalk, it is important to open the cuts in the optical path changing units 298a to 298d larger. For that purpose, a large displacement is required for the actuator section (driving mechanism). In addition, it is important that the optical path changing units 298a to 298d are capable of satisfactorily reproducing the optically discontinuous state and the continuous state. For that purpose, a material having a relatively high Young's modulus is applied as the material of the optical waveguide member 177, and the optical path changing unit 2
It is preferable that the restoration operation of the notches of 98a to 298d be advantageously performed. Therefore, in order to distort a material having a high Young's modulus, a large generative force is required for the actuator section. Further, normally, the optical waveguide core portion 17
Since 7a to 177d are formed by a photolithography method capable of forming a highly precise and highly integrated pattern, the actuator portion is required to have high positional accuracy and high density.

Since the matrix type actuator according to the present invention directly utilizes the electric field induced strain of the piezoelectric / electrostrictive body, the generated force is large. In addition, in the matrix type actuator according to the present invention, since it is easy to make the piezoelectric / electrostrictive element have a high aspect ratio, the generated displacement can be increased. In addition, since each piezoelectric / electrostrictive element is not attached to the ceramic substrate, but is integrally configured in a matrix form, the dimensional deviation and inclination related to the adhesion are small, A high-density structure can be easily realized. Therefore, the matrix type actuator according to the present invention is suitable as the actuator unit of the optical switch 290.

FIG. 30 shows the optical switch 29 shown in FIG.
9 is a cross-sectional view showing a CC cross section of 0 and showing a light transmission section 281 having an optical waveguide core section 177a and an actuator section 291 having a piezoelectric / electrostrictive element 292. FIG. As the actuator unit 291, for example, the matrix type actuator 1 shown in FIG. 1 is adopted, and the optical path changing unit 2
It is arranged corresponding to 98a to 298d (cuts). It should be noted that, although a mode of the matrix type actuator applied to the actuator unit 291 of the optical switch 290 will be described below as an example, any mode of the matrix type actuator according to the present invention can be applied to the actuator unit 291.
Is applicable.

In the state shown in FIG. 30, in the optical switch 290, the piezoelectric / electrostrictive element 292 of the actuator section 291 in the optical path changing section 298a is in a non-operating state, and there is no action on the optical waveguide core section 177a. Therefore,
The cut of the optical path changing portion 298a is closed, and the optical waveguide core portion 177a optically maintains a continuous state. At this time, the introduced light 223 goes straight through the optical path changing unit 298a.

The piezoelectric / electrostrictive element 292 of the actuator section 291 in the optical path changing section 298b is in an operating state, and displacement and stress are applied to the optical waveguide core section 177a to open the cut of the optical path changing section 298b. That is,
The optical waveguide core portion 177a becomes optically discontinuous in the optical path changing portion 298b, and the introduced light 223 is totally reflected by the optical path changing portion 298b and transmitted to the optical waveguide core portion 177b.

The operating state or non-operating state of the actuator portion (piezoelectric / electrostrictive element) and the presence / absence of the action on the optical waveguide core portion may of course be opposite to those described above. That is, the operating state of the actuator section is not in operation (state of the optical path changing section 298a in FIG. 30), while the inactive state is in operation (state of the optical path changing section 298b in FIG. 30).
May be the case. Further, the size M (shown in FIG. 30) of the piezoelectric / electrostrictive element acting on the optical path changing portion is smaller in the range that does not hinder the opening / closing operation of the cut of the optical path changing portion, the piezoelectric / electrostrictive element is smaller. This is preferable because the amount of displacement required for the element is also small.

FIG. 31 shows an example in which the matrix type actuator 210 shown in FIG. 21 is applied as the actuator section of the optical switch. By using the wall portion 8 of the matrix type actuator 210 as the optical waveguide support portion 294, it is possible to reduce the amount of displacement required to open and close the cuts in the optical path changing portions 298a to 298d.
That is, by providing the optical waveguide support portion 294, the radius of curvature for opening the cuts in the optical path changing portions 298a to 298d becomes small, so that even if the displacement of the piezoelectric / electrostrictive element 292 of the actuator portion 291 is small, Can be opened. Further, due to this advantage, there is a margin in the opening operation of the notch, so that the leakage and loss of the signal related to the switching can be reduced, which is more preferable.

FIG. 32 shows both sides (upper and lower) of the optical waveguide member.
This is an example in which an actuator section is provided in the. As described above, the aspect of the matrix type actuator applicable to the actuator unit 291 corresponds to all the aspects of the matrix type actuator according to the present invention. For example, preferably, the matrix type actuator 21 shown in FIG.
0 can be used. In this way, the optical waveguide member 17
By providing the actuator portions 291 above and below 7, it is possible to improve the closing accuracy of the cut of the optical path changing portion, and it is possible to increase the response speed for switching.

When the actuator portion is provided only on one surface of the optical waveguide member as shown in FIGS. 30 and 31, the change in the state of the cut of the optical path changing portion from the opening to the closed state is used for the optical waveguide member. Because of the elastic restoring force of the material, when a soft material is used as the optical waveguide member, this restoration (the above state change) requires a relatively long time. Since this affects the time until the next switch operation is started, the faster the restoration, the better. In addition, restoration means returning to an optically continuous state, but due to material deterioration, etc., there is a risk that restoration accuracy will decrease, especially if it is operated for a long period of time, leading to signal leakage and increased loss. There is.

However, as shown in FIG. 32, when the actuator portions are provided on both sides of the optical waveguide member, the piezoelectric / electrostrictive portions of the actuator portions 291 arranged in both up and down directions with respect to the cut of the optical path changing portion. Such a problem can be solved by forcibly sandwiching the cut of the optical path changing portion by the action of the element 292. That is, by pressing the optical waveguide member 177 from both sides, the closing accuracy can be maintained, and the state change from the opening to the closing can be performed by the response speed of the actuator portion 291 (piezoelectric / electrostrictive element 292). Therefore, the configuration in which the actuator portions are provided on both surfaces of the optical waveguide member is advantageous in realizing a high-speed switch with low loss and low leakage.

The optical switch shown in FIG. 33 is substantially the same as the example shown in FIG. 32, except that when the actuator part 291 and the optical waveguide member 177 are joined, the wall part 8 that constitutes the actuator part 291 and An optical waveguide fixing plate 286 having higher rigidity between the optical waveguide member 177 and the optical waveguide member 177.
It is a different example where they are joined via. According to this structure, the flatness of the optical waveguide core portion is improved, and the distance between the upper surface (working surface) of the piezoelectric / electrostrictive element 292 of the actuator portion 291 and the optical waveguide member 177 can be maintained with high accuracy. The accuracy of switch operation can be improved.
32 and 33, the actuator portions 291 arranged above and below the optical waveguide member 177 do not have to have the same aspect. For example, it is possible to arrange the matrix type actuator 1 shown in FIG. 1 on the upper side and the matrix type actuator 210 shown in FIG. 21 on the lower side.

Next, a light reflection mechanism to which the matrix actuator of the present invention is applied will be described. FIG. 34
3 is a perspective view showing an embodiment of a light reflection mechanism, and FIG.
5 and 36 are DD of the light reflection mechanism 340 shown in FIG.
It is a figure showing a part of section, and each shows a certain operation state. The light reflection mechanism 340 is used in a projector, an optical switch, etc., and the matrix type actuator according to the present invention can be preferably used as the actuator section 291 thereof.

The light reflection mechanism 340 includes a light reflection section 313 in which light reflection plates 311 such as micromirrors are arranged in a matrix.
And an actuator unit 391, and each light reflection plate 31
A piezoelectric / electrostrictive element 392 is arranged at a position facing 1. For example, the matrix type actuator according to the present invention having a wall portion having a matrix type actuator 210 shown in FIG.
1, and one end of the light reflecting plate 311 is supported by the light reflecting plate supporting portion 312 which is the wall thereof. Then, by the operation of the actuator portion 391 (piezoelectric / electrostrictive element 392), the light reflection plate 311 forms an inclination angle with the light reflection plate support portion 312, and changes the reflection angle of the incoming light 224. Depending on the presence / absence of this reflection angle, a projector forms a color of each pixel, and an optical switch switches a signal transmission path.

As shown in the embodiments shown in FIGS. 34 to 36, the actuator section that employs the matrix type actuator according to the present invention has the pitch between adjacent piezoelectric / electrostrictive elements 392 and the light reflection plate support section 312. The pitches of the constituent wall portions are the same, but the piezoelectric / electrostrictive element 39
The wall portions adjacent to 2 may be arranged at different pitches as illustrated. Of course, the piezoelectric / electrostrictive elements 392 do not necessarily have to be arranged at the same pitch.

Since the matrix type actuator of the present invention applied to the actuator section can generate a large generated force, a light reflecting plate having high rigidity can be applied to form a light reflecting surface having excellent flatness, and as a light reflecting mechanism, It can be more preferable. Further, the advantage of this generating force is that since the distance between the wall portion (light reflecting plate supporting portion) and the piezoelectric / electrostrictive element can be reduced, a reflecting mechanism having a large reflecting angle can be easily realized.

The light reflection mechanism is not limited to the mode of the light reflection mechanism 340 shown in FIGS. 34 to 36. Instead of joining the actuator portion and the light reflecting portion, a part of the light reflecting plate may be displaced by the operation of the piezoelectric / electrostrictive element to change the reflection angle. In addition, as the type of the piezoelectric / electrostrictive element, it is possible to use one that contracts or expands when a voltage is applied.

The matrix type actuator of the present invention, in addition to the above specific example, uses the action based on its displacement and vibration to perform mixing, stirring and reaction of liquid and liquid, liquid and solid, liquid and gas, etc. It can also be used for an apparatus that performs an extremely small area and a minute amount.

Next, a method of manufacturing the matrix type actuator of the present invention will be described. In manufacturing, ceramic green sheet lamination method, wire saw,
Although it is possible to employ various methods such as a machining method such as dicing, a ceramic green sheet laminating method described below and a punching process using a die including a die and a punch, It is preferable to use it together. An example of the schematic steps of the method for manufacturing a first matrix type actuator of the present invention will be described with reference to FIGS.
4 (f). Here, a method for manufacturing the matrix type actuator 120 shown in FIG. 12, for example, will be described. First, a predetermined number of ceramic green sheets 16 (hereinafter, also simply referred to as sheets) whose main component is a piezoelectric / electrostrictive material described later are prepared. The sheet 16 can be manufactured by a conventionally known ceramic manufacturing method. For example, a piezoelectric / electrostrictive material powder described below is prepared, and a binder,
A ceramic green sheet may be formed by preparing a slurry by mixing a solvent, a dispersant, a plasticizer, and the like into a desired composition, defoaming the slurry, and then performing a sheet forming method such as a doctor blade method or a reverse roll coater method. I can.

In FIG. 14A, the ceramic green sheet 16 is punched by a punch and a die,
Slit holes 15 are formed in each green sheet 16, a predetermined number of these are laminated and pressure-bonded, and a piezoelectric / electrostrictive material having slits 5 having a predetermined thickness shown in FIG. A ceramic green laminate 301 is formed. On the other hand, for the portion to be the ceramic base, prepare a flat ceramic green sheet containing the same piezoelectric / electrostrictive material whose outer shape is processed to a predetermined size. , A ceramic green substrate 302. Then, the ceramic green laminate 301 and the ceramic green substrate 302
And are aligned, laminated and pressure-bonded, and then integrated by firing to obtain a laminated fired body 303 (FIG. 14C).

Next, as shown in FIG. 14D, electrodes 18 and 19 are formed. Then, along the cutting line 350 and the cutting line 351 shown in FIG. 14 (e), unnecessary parts are cut by means such as dicing processing, slicing processing, and wire saw processing, and as shown in FIG. The piezoelectric / electrostrictive body 4 is obtained. Among the above processing methods,
It is preferable to use the wire saw processing method in terms of processing quality (presence or absence of grain breakage, cracks, etc.). The same applies to the examples described below. Then, polarization processing is performed as needed, and the matrix type actuator 120 is completed. In addition, before cutting and cutting, slit 5
Further, it is preferable to fill a resin that can be removed later to prevent damage during processing.

The positioning method at the time of stacking the ceramic green sheets 16 is, for example, sequentially stacking the ceramic green sheets 16 in a frame having an inner shape that is substantially the same as the outer shape of the ceramic green sheets 16, or
The guide pins are erected and sequentially passed through the guide holes previously formed in the ceramic green sheet 16, or a predetermined number of guide pins having the same shape as the slits are arranged at a predetermined pitch, and the slit holes themselves are used as the guide holes. Position by aligning by passing through the guide pin,
After that, it is heated and pressure-bonded to form a ceramic green laminate 301.
Can be formed. At this time, in FIG.
The flat plate shown in (1) may be formed of the same material, laminated, pressure-bonded, and integrated by firing. In the above method, the ceramic green laminate 301 and the ceramic green substrate 302 are separately formed and then further laminated, but the respective ceramic green sheets 16 may be laminated together. . These can also be applied as modifications of the manufacturing method described later.

Furthermore, the ceramic green sheet 16
It is more preferable to perform simultaneous punching and laminating as the laminating and aligning method. Simultaneous punching and stacking is shown in Fig. 14.
In (a), the slit holes 15 are formed in the ceramic green sheet 16, and the lamination is simultaneously performed by the method described below to laminate the sheets 16 to form the slit holes 15, and the lamination is completed at the end of punching. Is a method of forming a ceramic green laminate 301 containing a piezoelectric / electrostrictive material in which the slits 5 having a thickness of 1 are formed.

18 (a) to 18 (e) are views showing a specific method of simultaneous punching and stacking, and the sheet 16 is provided around the periphery.
Punch 10 having a stripper 11 for stacking
And a die 12 is used. Figure 18 (a)
Shows a state before punching in which the first sheet 16a is placed on the die 12, and in FIG. 18B, the punch 10 and the stripper 11 are lowered to punch a slit hole in the sheet 16 (first step). .

Next, preparation for punching out the second sheet 16b is started. At this time, as shown in FIG. 18C, the first sheet 16a is brought into close contact with the stripper 11 and moved upward to move the die 12 Away from (second step). The method of bringing the sheet 16 into close contact with the stripper 11 can be carried out, for example, by forming suction holes in the stripper 11 and performing vacuum suction.

Further, in order to prepare for punching the second sheet 16b, the punch 10 and the stripper 11 are pulled up from the die 12. During this pulling up, the leading end of the punch 10 is first pulled up together. Sheet 1
It is desirable not to return it into the slit hole of 6a,
Also, when stopping, the first seat 16 pulled up together
It is important to stop when it is pulled in slightly from the bottom of a (third step). When the punch 10 is returned to the first hole of the sheet 16a or completely stored in the stripper 11, the hole formed is deformed because the sheet 16 is soft, and the sheet 16 is obtained by stacking the sheets. When the slit 5 is formed, the flatness of the side surface is deteriorated.

FIG. 18D shows the second sheet 16b.
Showing the punching process, the second sheet 16b can be easily placed on the die 12 by bringing the first sheet 16a into close contact with the stripper 11, and punching can be performed as in the step of FIG. 18 (b). At the same time, they are superposed on the first sheet 16a (fourth step).

Then, the steps of FIG. 18C and FIG. 18D are repeated to superimpose the first punched sheet 16a and the second punched sheet 16b, and the stripper 1
Pulled up by 1 (fifth step), 3rd sheet 16
Preparation for punching out c. However, also at this time, it is important to stop the sheet 16 when it is pulled in a little from the lowermost part of the sheet 16 (sixth step). Then, the fourth step to the sixth step are repeated, and punching and stacking of the required number of sheets 16 are repeated.

FIG. 18E shows a state in which punching has been completed. After punching and stacking the required number of sheets 16 are completed, the stripper 11 uses the sheets 16
Is released, and the punched and laminated sheet 16 can be separated from the stripper 11 and taken out. The separation from the stripper 11 can be reliably performed by providing a separation jig 17 on the lower surface of the stripper 11 as illustrated. The above-mentioned operation is performed in Japanese Patent Application No. 2000-28.
The production method described in 0573 is applied, and by this operation, a ceramic green laminate having a predetermined thickness and having slits can be obtained.

FIG. 19A shows a case where a laminated body is manufactured by applying simultaneous punching and stacking using a punch and a die.
The laminated fired body 303 formed in the step of FIG.
FIG. 19B shows a vertical cross-sectional view seen from a point, and FIG.
It shows a cross-sectional enlarged schematic diagram in which the M portion of the wall surface of the slit 5 shown in (a) is enlarged. FIG. 20A shows a case where a ceramic green laminate containing a piezoelectric / electrostrictive material as a main component is fired and integrated, and then slit processing is performed with a dicer.
FIG. 20B is a vertical cross-sectional view of the processed laminated fired body 172 viewed from the side surface direction, and FIG. 20B is an enlarged schematic cross-sectional view of the N portion of FIG. 20A.

When the laminated body containing a piezoelectric / electrostrictive material as a main component is fired and then slitted by a dicer, for example, microcracks or intragranular fracture on the wall surface of the slit as shown in FIG. Occurs (the microcracks 191 and the intragranular fracture ceramic crystal grains 192 are shown in FIG. 20 (b)), but punching simultaneous lamination is applied, and slits are formed before firing the laminated body to manufacture a matrix type actuator. By doing so, the wall surface of the slit 5 which will be the side wall surface of the piezoelectric / electrostrictive body 4 later is formed by a fired surface, as shown in FIG.
As shown in Fig. 3, the state of the ceramic crystal particles 193 on the surface of the side wall 6 which is a side wall surface which is a functional surface which later forms an electrode of the piezoelectric / electrostrictive body 4 without causing microcracks or intragranular fracture is The number of crystal grains that have been destroyed is 1% or less, which is virtually equal to nothing, and the characteristics are not deteriorated.
The reliability can be improved.

In the present invention, in order to obtain the individual piezoelectric / electrostrictive bodies 4, for example, cutting may be performed after firing, but the actual surface to be cut is not the surface on which the electrode is formed. As can be seen from the first matrix type actuator, its processed surface is not the main surface for making the piezoelectric / electrostrictive element function, and therefore, even if such a cut surface is present, it is hardly affected. Absent. If the cutting process is performed before firing, there is no such concern.

Further, when the matrix actuator is manufactured by applying the simultaneous punching and stacking, the stacking deviation does not occur, so that the contour of the surface of the piezoelectric / electrostrictive body 4 can be set to about 8 μm or less. Therefore, it is easy to make the displacement and the generated force act in the intended direction in the intended amount.
There is an advantage that the characteristics of the electrostrictive element can be efficiently used. In addition, because of the high contour, the piezoelectric / electrostrictive element is actuated, and it has high resistance to the reaction from the action of pushing or hitting a certain object, and it has a high aspect ratio and is thin and tall. Even if it is an electrostrictive element, it has a feature that breakage, breakage, or other damage is unlikely to occur. Furthermore, the surface roughness Rt of the wall surface of the piezoelectric / electrostrictive body 4 can be set to approximately 10 μm or less. Since the wall surface of the piezoelectric / electrostrictive body 4, which is the driving portion, is smooth, it is difficult for electric field concentration and stress concentration to occur during driving,
It becomes possible to realize more stable driving operation for a long period of time.

The contour of the surface is determined by Japanese Industrial Standard B06.
21 "Definition and Display of Geometric Deviation". The surface contour is the surface specified to have a functionally defined shape, and the surface contour degree is the deviation of the surface contour from the geometrical contour defined by theoretically accurate dimensions. Says the size.

As an example of the stacking accuracy of the ceramic green sheets by simultaneous punching and laminating, a ceramic green sheet having a sheet thickness of 50 μm and Young's modulus of 39 N / mm ² is formed with a slit width of 50 μm and a piezoelectric / electrostrictive body. It is punched out so that the thickness (T in FIG. 1) is 30 μm and 10
When the sheets are laminated, the amount of misalignment between the layers after firing is 4 μm at the maximum and the surface roughness Rt is approximately 7 μm, and the side surface of the piezoelectric / electrostrictive body can be made smooth without unevenness. The slit width after firing was about 40 μm due to firing shrinkage.

As described above, when punching and laminating are performed simultaneously, slit holes are formed in the ceramic green sheet by using the punch and the die, the ceramic green sheets are laminated at the same time, and the punch itself is positioned at the laminating position of the ceramic green sheets. It is used as a mating shaft to prevent the deformation of the slit holes punched by the punch, so that the deformation of the slit holes does not occur, the deviation amount between the ceramic green sheets can be suppressed to less than 5 μm, and they are laminated with high accuracy. It is possible to obtain a body, and it is possible to form slit wall surfaces with few irregularities on the obtained laminate. Since the main side surface of the piezoelectric / electrostrictive body is substantially free of microcracks and intragranular fractured particles, characteristic deterioration due to compressive residual stress does not occur. Therefore, it is possible to obtain an actuator having excellent characteristics while arranging many piezoelectric / electrostrictive bodies in a matrix on one substrate.

When a piezoelectric / electrostrictive element having a large aspect ratio as shown in FIG. 28 is formed, the wall between the slits (finally the piezoelectric It is preferable to devise so that the / electrostrictive element or the portion which becomes the wall portion) is not deformed or damaged. For example, FIG.
In (c), although only one slit opening is closed with respect to the ceramic green laminate 301, the ceramic green base 302 is formed so as to close the slit.
It is also preferable to stack a ceramic green sheet on the side opposite to the side on which is laminated and fire it.

At this time, it is necessary to take care so that the closed slit does not become a closed state. This is because when the firing is performed in a closed state, the organic components in the green sheet are not decomposed or the gas accompanying the combustion is not discharged from the slits, and cracks or the like are likely to occur in the ceramic green laminate. Therefore, it is preferable that the ceramic green sheet for closing the slit has a hole for venting gas. When a wiring for driving the piezoelectric / electrostrictive element is formed, if a through hole is formed in the ceramic green substrate, degassing can be performed through the through hole, so that the above-mentioned slit is closed. It is not always necessary to make holes in the ceramic green sheet. Then, after firing, the closed portion (the portion corresponding to the ceramic green sheet for closing the slit) may be removed by polishing or the like to open the slit.

Another example of the schematic steps of the method for manufacturing the matrix type actuator will be described with reference to FIGS. 15 (a) to 15 (f).
Shown in. Here, a method for manufacturing the matrix type actuator 100 shown in FIG. 10, for example, will be described. First, a predetermined number of ceramic green sheets 16 whose main component is a piezoelectric / electrostrictive material are prepared. In FIG. 15 (a), the ceramic green sheet 16 is punched by a punch and a die respectively to form a square hole 25 in each ceramic green sheet 16, and these are laminated and pressure-bonded.
A ceramic green laminate 401 containing a piezoelectric / electrostrictive material as a main component, in which a rectangular opening 156 having a predetermined thickness shown in (b) is formed, is formed. On the other hand, for the portion to be the ceramic base, a flat plate-shaped ceramic green sheet containing the same piezoelectric / electrostrictive material whose outer shape is processed to a predetermined size is prepared, and this is also laminated and pressure-bonded by a predetermined number. It is formed as a ceramic green substrate 402.

Then, the ceramic green laminated body 401 and the ceramic green base body 402 are aligned, laminated and pressure-bonded, and then integrated by firing to obtain a laminated fired body 403 (FIG. 15C). Then, in FIG.
As shown in (d), electrodes 18 and 19 are formed. Then, the cutting line 350 and the cutting line 3 shown in FIG.
The unnecessary portion is cut off along a line 51 by means of dicing, slicing, wire sawing, etc.
The individual piezoelectric / electrostrictive bodies 4 shown in FIG. 4 (f) are obtained. Then, polarization processing is performed as needed, and the matrix type actuator 100 is completed. At the time of cutting and cutting, the rectangular opening 156 is filled with a resin or the like that can be removed later,
It is preferable to prevent damage during processing. Needless to say, it is preferable to use the above-mentioned simultaneous punching and laminating method as the positioning and laminating method for the ceramic green sheets 16.

Next, an example of the schematic steps of the method of manufacturing the second matrix type actuator will be described with reference to FIGS.
It shows in 6 (g). First, as shown in FIG. 16A, a predetermined number of ceramic green sheets 16 containing a piezoelectric / electrostrictive material as a main component are prepared. Then, except for one serving as a top plate, the remaining half is coated with a conductor material serving as the internal electrode 48 by screen printing or the like to obtain a ceramic green sheet 116 on which layered electrodes are formed. A conductive material to be the internal electrodes 49 is applied to the substrate by screen printing or the like to obtain a ceramic green sheet 117 having layered electrodes. In FIG. 16B, the ceramic green sheets 16, 116, 117 are punched by a punch and a die to obtain the green sheets 16, 116, 1 respectively.
Slit holes 15 are formed in each of the ceramic green sheets 17, and as shown in FIG.
17 are alternately laminated and pressure-bonded to form a ceramic green laminate 501 in which the slits 5 having a predetermined thickness are formed. On the other hand, for the portion to be the ceramic substrate, a flat ceramic green sheet whose main component is a similar piezoelectric / electrostrictive material whose outer shape is processed to a predetermined size is prepared. Crimping is performed to form a ceramic green substrate 502.

Then, the ceramic green laminated body 501 and the ceramic green base 502 are aligned, laminated and pressure-bonded, and then integrated by firing to obtain a laminated fired body 503 (FIG. 16D). Then, in FIG.
As shown in (e), common electrodes 28 and 29 are formed.
Then, a dicing process, a slicing process, and a cutting line 350 and a cutting line 351 shown in FIG.
Remove unnecessary parts by means such as wire saw processing,
The individual piezoelectric / electrostrictive bodies 4 shown in FIG. 16G are obtained.
After that, polarization processing is performed as necessary to complete the matrix type actuator. When cutting and cutting,
It is preferable to fill the slit 5 with a resin or the like that can be removed later to prevent damage during processing. It goes without saying that it is preferable to use the above-mentioned simultaneous punching and laminating method as the positioning and laminating method for the ceramic green sheets 16, 116 and 117.

Subsequently, another example of the schematic steps of the method of manufacturing the second matrix type actuator will be described with reference to FIG.
~ Fig. 17 (g). First, as shown in FIG. 17A, a predetermined number of ceramic green sheets 16 containing a piezoelectric / electrostrictive material as a main component are prepared. Then, a desired number of ceramic green sheets 113 in which the via holes 112 are formed in the remaining green sheets 16 at predetermined intervals, except for one top plate, are obtained. Then, in FIG. 17B, half of the ceramic green sheets 113 are coated with a conductor material to be the internal electrodes 48 by a method such as screen printing, and the via holes 112 are filled with the conductor material to obtain the ceramic green sheets 114. Further, a conductive material to be the internal electrodes 49 is applied to the remaining half by screen printing or the like, and the via holes 112 are filled with the conductive material to obtain a ceramic green sheet 115. FIG. 17
In (c), the ceramic green sheets 16, 114, 1
15 is punched by a punch and a die to form slit holes 15 in each of the green sheets 16, 114 and 115, and in FIG. 17D, the ceramic green sheet 16 and the ceramic green sheets 116 and 117 are formed.
Are alternately laminated and pressure-bonded to form a ceramic green laminated body 601 in which the slits 5 having a predetermined thickness are formed.

On the other hand, the portion to be the ceramic base is a via hole 11 which is separately prepared, preferably made of the same material as the ceramic green sheet 16 and filled with a conductor material.
A desired number of ceramic green sheets having No. 8 formed thereon are prepared, and these are sequentially laminated and pressure-bonded to form a ceramic green substrate 602. Then, the ceramic green laminated body 601 and the ceramic green base body 602 are aligned, laminated, pressure-bonded, and fired and integrated to obtain a fired laminated body 603 (FIG. 17E). Then, in FIG.
An unnecessary portion is cut off along the cutting line 350 and the cutting line 351 shown in (f) by means such as dicing, slicing, and wire sawing.
The individual piezoelectric / electrostrictive bodies 4 shown in are obtained. After that, polarization processing is performed as necessary to complete the matrix type actuator. At the time of cutting and cutting, it is preferable to fill the slit 5 with a resin or the like that can be removed later to prevent damage during processing. Ceramic green sheet 16,1
It goes without saying that the above-mentioned simultaneous punching and laminating method is preferably used as the positioning and laminating method for 14, 115 and the like.

In the manufacturing method shown in FIGS. 14, 15, and 16 described above, as a method of forming electrodes on the side surface of the piezoelectric / electrostrictive body, sputtering, vacuum deposition, CVD, plating, coating, spraying, etc. In this case, after masking so that the pair of electrodes does not short-circuit,
It is good practice. Furthermore, when the initial height of each piezoelectric / electrostrictive element is made strictly constant, the flatness of the working surface is increased so that it can effectively act on the object. Of course, the working surface is a mirror surface. For the purposes such as the above, it is also preferable to carry out polishing before or after the illustrated cutting step. When this polishing step is carried out, the masking treatment at the time of forming the electrodes may not always be necessary. For example, by forming electrodes on the entire surface and breaking them by polishing, a pair of electrodes is completed. Therefore, masking is not necessary, and the working surface and the pair of electrodes can be formed at the same time, which is preferable.

In the polishing, in addition to the purpose of forming the pair of electrodes, a mode in which the heights of the wall portion and the piezoelectric / electrostrictive element are different, as in the matrix type actuator shown in FIGS. 22 and 23. Can also be used to form
That is, after forming a pair of electrodes, a voltage is applied to the pair of electrodes and polishing is performed while the piezoelectric / electrostrictive element is operated, so that, for example, a first matrix that is a type that contracts in the operating state. If applied to the type actuator,
A mode such as the matrix type actuator shown in FIG. 2 can be realized, and when applied to the second matrix type actuator which is a type that expands in the operating state, FIG.
A mode such as the matrix type actuator shown in FIG.

In addition, in the first matrix type actuator according to FIGS. 14 and 15, unlike the second matrix type actuator, since the thickness of the ceramic green sheet and the applied voltage are irrelevant, workability and punching A thick ceramic green sheet can be used as long as the cross-sectional shape is satisfied. Therefore, the number of laminated layers can be reduced, and the actuator structure is advantageous in terms of manufacturing man-hours.

Although the embodiment and the manufacturing method of the matrix type actuator have been described above, the two-dimensional array is not limited to the orthogonal arrays, and the intersection angle thereof is 45 ° even if it is 30 °. It may be determined depending on the purpose and application. The thickness of the ceramic substrate may be such that it does not deform even when subjected to the stress generated by the piezoelectric / electrostrictive element formed thereon. In addition, it is also preferable to bond other members to the ceramic substrate for the purpose of improving the strength of the ceramic substrate, the handling property of the actuator, and the like. The surface of the piezoelectric / electrostrictive element may be the surface of the piezoelectric / electrostrictive body as it is. May be In addition, although it has been mainly described that the electrode terminals for driving each piezoelectric / electrostrictive element are formed on the back surface of the ceramic substrate, of course,
You may provide on the piezoelectric / electrostrictive element formation surface. Further, when the electrode terminals are formed on the back surface of the ceramic substrate, the piezoelectric /
It is also preferable that a printed board on which a driver IC for driving the electrostrictive element or the like is mounted is mounted on its electrode terminal.

Materials used for the matrix type actuator of the present invention will be described below. First, the material of the piezoelectric / electrostrictive body that is the driving unit, that is, the piezoelectric / electrostrictive material will be described.

As the piezoelectric / electrostrictive material, if a material that causes an electric field-induced strain such as a piezoelectric effect or an electrostrictive effect,
It is not a question. It may be crystalline or amorphous,
It is also possible to use semiconductor ceramics, ferroelectric ceramics, or antiferroelectric ceramics. It may be appropriately selected and adopted according to the application. Further, the material may or may not require polarization treatment. Furthermore, it is not limited to ceramics, but PVDF
It may be a piezoelectric material made of a polymer such as (polyvinylidene fluoride), or a composite of these polymers and ceramics. However, in this case, from the viewpoint of the heat resistance of the polymer material, the element is not formed by firing, but the element is formed by subjecting the polymer material to a heat treatment to the extent of thermosetting. However, by using ceramics having excellent material strength, the structure having a high aspect ratio, which is a feature of the present invention, can be advantageously implemented, and generated displacement and generated stress can be effectively applied. Furthermore,
Ceramics, which are excellent in material characteristics, are preferable in combination with a structure having a high aspect ratio, in order to form a piezoelectric / electrostrictive element that is driven at low voltage and has high characteristics.

Specific ceramic materials include, as piezoelectric ceramics or electrostrictive ceramics, lead zirconate, lead titanate, lead magnesium niobate, lead nickel niobate, lead zinc niobate, lead manganese niobate, and antimony stannate. Lead, lead manganese tungstate,
Lead cobalt niobate, barium titanate, sodium bismuth titanate, bismuth neodymium titanate (BNT
Ceramics, containing potassium sodium niobate, strontium bismuth tantalate, etc., alone or as a mixture or solid solution.

These ceramics are preferably the main components which account for 50% by weight or more in the ceramic components constituting the piezoelectric / electrostrictive body, and in particular, have a high electromechanical coupling coefficient and piezoelectric constant, In terms of easily obtaining a stable material composition even after passing through, a material containing lead zirconate titanate (PZT type) as a main component, a material containing lead magnesium niobate (PMN type) as a main component, and nickel niobate Lead (PNN) -based material, lead zirconate / lead titanate / lead magnesium niobate mixture or solid solution-based material, lead zirconate / lead titanate / lead nickel niobate mixture or A material containing a solid solution as a main component or a material containing sodium bismuth titanate as a main component is preferably used.

Furthermore, lanthanum, calcium, strontium, molybdenum, tungsten, barium, niobium, zinc, nickel, manganese, cerium,
Ceramics to which oxides such as cadmium, chromium, cobalt, antimony, iron, yttrium, tantalum, lithium, bismuth, and tin are added alone or in a mixture may be used. For example, the incorporation of lanthanum or strontium into lead zirconate, lead titanate, and lead magnesium niobate, which are the main components, may provide advantages such as adjustment of coercive electric field and piezoelectric characteristics.

As the antiferroelectric ceramics, a ceramic containing lead zirconate as a main component, a ceramic containing a mixture of lead zirconate and lead stannate or a component consisting of a solid solution as a main component, and an oxide containing lead zirconate as a main component are oxidized. Examples thereof include lanthanum-added ceramics, ceramics containing lead zirconate and lead stannate as a main component or a solid solution, and lead niobate added thereto. The material of the ceramic substrate may be any material that can be integrated with the piezoelectric / electrostrictive body by heat treatment or firing, but preferably has the same composition as the integrated piezoelectric / electrostrictive body, and more preferably the component. Also, it is desirable that the materials have the same composition.

The average grain size of the ceramic crystal grains is
In a design that places importance on the mechanical strength of the piezoelectric / electrostrictive body that is the drive unit, the thickness is preferably 0.05 to 2 μm. This is because the mechanical strength of the piezoelectric / electrostrictive body, which is the drive unit, is enhanced. In the design that emphasizes the expansion / contraction characteristics of the piezoelectric / electrostrictive body that is the drive unit, the average grain size of the crystal grains is preferably 1 to 7 μm. This is because high piezoelectric / electrostrictive characteristics can be obtained.

The material (cover plate, valve body, etc.) of the portion incidental to the piezoelectric / electrostrictive element preferably has a coefficient of thermal expansion close to that of the material of the piezoelectric / electrostrictive element. Therefore, it is preferable to be integrated with the piezoelectric / electrostrictive body, but the same ceramic as the material of the piezoelectric / electrostrictive body may be used, or different materials may be used. Moreover, since the desired properties such as hardness are changed depending on the role, it does not have to be ceramics. For example, rubber, organic resin, organic adhesive film, glass, metal or the like may be used. Further, it is also effective to add a filler to these to suppress curing shrinkage. When ceramics are used, for example, stabilized zirconium oxide, aluminum oxide, magnesium oxide, titanium oxide, spinel, mullite, aluminum nitride, silicon nitride, glass, a mixture thereof, or the like can be used.

The preferable range of the electrode material varies depending on the forming process, but when it is fired at the same time as the piezoelectric / electrostrictive material, it must be a conductor that can withstand a high temperature oxidizing atmosphere. It is not particularly limited as long as it satisfies the condition, and may be, for example, a simple metal or an alloy, and insulating ceramics such as zirconium oxide, hafnium oxide, titanium oxide, and cerium oxide, and a simple metal, or It does not matter even if it is a mixture with the alloy. More preferably, a high melting point noble metal such as platinum, palladium, rhodium, or an electrode material containing an alloy such as silver-palladium, silver-platinum, or platinum-palladium as a main component, or platinum and a base material, for example, piezoelectric / electrostrictive. Mixtures with materials as well as cermet materials thereof are preferably used. In particular, as the material of the conductor that fills the via hole of the ceramic substrate in the present invention, disconnection is unlikely to occur even when fired together with the ceramic substrate, and since a bonding force with the ceramic substrate can be obtained, it is highly compatible with the substrate material. A mixture with a melting point noble metal and its cermet material are preferably used.

On the other hand, the electrodes that can be formed after firing the piezoelectric / electrostrictive body, for example, the electrodes formed on the side surfaces of the piezoelectric / electrostrictive body in the first matrix type actuator, may be solid at room temperature, In addition to the above electrode materials, aluminum, titanium, chromium, iron, cobalt, nickel, copper, zinc, niobium, molybdenum, ruthenium,
A single metal such as silver, tin, tantalum, tungsten, gold and lead, or an alloy thereof can be used.

Then, using these materials, an electrode can be formed by sputtering, vacuum deposition, CVD, plating, or the like. Further, it is also possible to obtain an electrode made of a target material by forming a coating film by coating or spraying using an organometallic compound (resinate) containing the element of the material and then performing heat treatment.

[0125]

As described above in detail, according to the present invention, the conventional problems are solved, large displacement can be obtained at a lower voltage, the response speed is high, and the generated force is large. Matrix-type piezoelectric that has excellent mountability and can be highly integrated
Provided are an electrostrictive actuator and a manufacturing method thereof. The matrix type actuator includes an optical modulator, an optical switch, an electric switch, a micro relay, a micro valve, a carrier device, an image display device such as a display and a projector, an image drawing device, a micro pump,
Droplet ejector, further fine mixing device, fine stirring device,
It can be preferably applied to a minute reaction device and the like.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a matrix type actuator according to the present invention.

FIG. 2 is a vertical cross-sectional view showing an application example of a conventional piezoelectric / electrostrictive actuator, and FIG. 2A shows an actuator part operating state in an optical switch which is an application example.
(B) represents an actuator part non-operation state in the optical switch which is an application example.

FIG. 3 is a perspective view showing an embodiment of a piezoelectric / electrostrictive actuator.

FIG. 4 is a vertical sectional view showing an embodiment of a piezoelectric / electrostrictive actuator.

FIG. 5 is a vertical sectional view showing another embodiment of the piezoelectric / electrostrictive actuator.

6A and 6B are views showing an application example of the matrix type actuator according to the present invention, FIG. 6A shows a perspective view of an actuator portion in a microvalve which is an application example, and FIG. 6B shows an application example. FIG. 6 is a vertical cross-sectional view schematically showing an operating state of a certain microvalve.

7A and 7B are diagrams showing an application example of the matrix type actuator according to the present invention, FIG. 7A is a plan view of an optical switch as an application example, and FIG. 7B is a plan view of FIG. 7A. AA
It is a figure which shows a cross section.

FIG. 8 is a perspective view showing another embodiment of the matrix type actuator according to the present invention.

FIG. 9 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 10 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 11 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 12 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

13 (a) and 13 (b) are vertical sectional views showing an embodiment of a matrix type actuator according to the present invention.

14 (a) to 14 (f) are explanatory views showing an example of a method for manufacturing a matrix type actuator of the present invention.

15 (a) to 15 (f) are explanatory views showing another example of the manufacturing method of the matrix type actuator of the present invention.

16 (a) to 16 (g) are explanatory views showing still another example of the manufacturing method of the matrix type actuator of the present invention.

17 (a) to 17 (g) are explanatory views showing still another example of the manufacturing method of the matrix type actuator of the present invention.

FIG. 18 is a process explanatory view showing an embodiment of a method of simultaneously punching and laminating ceramic green sheets in the manufacturing method of the matrix type actuator of the present invention, and FIG. FIG. 18B shows the first sheet preparation process on which the ceramic green sheet is placed.
Shows the first punching process of the ceramic green sheet, FIG. 18 (c) shows the second preparation process with the second ceramic green sheet, and FIG. 18 (d) shows
FIG. 18E shows a punching process of the second ceramic green sheet, and FIG. 18E is a diagram showing a punching completion process of finishing the punching and stacking of all the sheets and separating the stacked ceramic green sheets by the stripper.

FIG. 19A is a vertical cross-sectional view as seen from the direction of the point B in FIG. 14C in the method of manufacturing the matrix type actuator of the present invention shown in FIGS. 14A to 14F. FIG. 19B is an enlarged schematic cross-sectional view of the M portion of FIG. 19A.

20A and 20B are cross-sectional views of a workpiece when viewed from the side in a conventional method for manufacturing a piezoelectric / electrostrictive actuator in which slit processing is performed after firing, and FIG. FIG. 4B is an enlarged schematic view of the N portion of FIG.

FIG. 21 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 22 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 23 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 24 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 25 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 26 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 27 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 28 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

FIG. 29 is a perspective view showing another embodiment of an optical switch that is an application example of the matrix actuator according to the present invention.

FIG. 30 is a cross-sectional view showing an embodiment of an optical switch that is an application example of the matrix type actuator according to the present invention, and is a view showing a CC cross section of FIG. 29.

FIG. 31 is a cross-sectional view showing still another embodiment of an optical switch that is an application example of the matrix actuator according to the present invention.

FIG. 32 is a cross-sectional view showing still another embodiment of an optical switch which is an application example of the matrix type actuator according to the present invention.

FIG. 33 is a cross-sectional view showing still another embodiment of an optical switch that is an application example of the matrix actuator according to the present invention.

FIG. 34 is a perspective view showing an embodiment of a light reflection mechanism which is an application example of the matrix type actuator according to the present invention.

FIG. 35 is a cross-sectional view showing an embodiment of a light reflection mechanism that is an application example of the matrix actuator according to the present invention, and is a view showing a part of the DD cross section of FIG. 34.

FIG. 36 is a cross-sectional view showing an embodiment of a light reflecting mechanism that is an application example of the matrix actuator according to the present invention, and is a view showing a part of the DD cross section of FIG. 34.

FIG. 37 is a perspective view showing still another embodiment of the matrix type actuator according to the present invention.

[Explanation of symbols]

1,80,90,100,110,120,210,2
20, 230, 240, 250, 260, 270, 28
0,370 ... Matrix type actuator, 2,27
2, 372, 472 ... Ceramic substrate, 3 ... Cell, 4,
14 ... Piezoelectric / electrostrictive body, 5 ... Slit, 6 ... Side wall, 7 ... Flat plate, 8 ... Wall section, 9 ... Groove section, 10 ... Punch, 11 ... Stripper, 12 ... Die, 15 ... Slit hole, 16, 16a,
16b, 16c, 111, 113, 114, 115, 1
16, 117 ... Green sheet, 17 ... Separation jig, 1
8, 19 ... Electrodes, 20, 21, 321 ... Electrode terminals, 2
2, 23, 24, 112 ... via hole, 25 ... square hole,
28, 29 ... Common electrodes, 31, 32, 33, 34, 3
5,36,37,37a, 37b, 37c, 38,3
9, 40, 41, 42, 43, 44, 45, 46, 29
2, 392 ... Piezoelectric / electrostrictive element, 48, 49 ... Internal electrodes,
58, 59 ... Wiring, 61, 71, 211, 291, 39
1 ... Actuator part, 62 ... Valve seat plate, 63 ... Opening part,
64 ... Valve seat portion, 65 ... Micro valve, 66 ... Valve body portion,
67 ... Fluid, 68 ... Relay member, 69 ... Electrode, 72 ... Substrate, 73 ... Directional coupler, 74 ... Optical interferometer, 75 ... Optical modulator, 77 ... Optical waveguide, 77a, 77b, 177a, 1
77b ... Optical waveguide core portion, 77c ... Optical waveguide cladding portion, 101 ... Light reflecting surface, 102 ... Reflecting surface, 118, 11
9 ... Via hole (filled with conductive material), 12
8, 129 ... Through hole, 143 ... Partition wall, 144 ... Substrate, 145, 155 ... Piezoelectric / electrostrictive actuator, 15
6 ... Square opening, 172 ... Laminated fired body, 177 ... Optical waveguide member, 178 ... Piezoelectric / electrostrictive element, 191 ... Microcrack, 192 ... Intragranular fracture ceramic crystal grain, 193 ...
Ceramic crystal particles, 200, 290 ... Optical switch, 2
01, 281 ... Optical transmission section, 202, 204, 205 ... Optical transmission path, 208, 298a, 298b, 298c, 2
98d ... Optical path changing part, 209 ... Light introducing member, 210 ... Light reflecting member, 218 ... Vibrating plate, 219 ... Side wall, 221, 2
22, 223, 224 ... Optical, 276, 286 ... Optical waveguide fixing portion, 294 ... Optical waveguide supporting portion, 301, 401, 5
01,601 ... Ceramic green laminated body, 302,4
02,502,602 ... Ceramic green substrate, 30
3, 403, 503, 603 ... Laminated fired body, 311 ... Light reflecting plate, 312 ... Light reflecting plate supporting portion, 313 ... Light reflecting portion,
340 ... Light reflection mechanism, 350 ... Cutting line, 351 ... Cutting line, 371 ... Wiring board, P ... Polarizing electric field direction, E ... Driving electric field direction, S ... Displacement direction.

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01L 41/09 H02N 2/00 B 41/22 H01L 41/08 J H02N 2/00 41/22 Z (31) Priority Claim number Japanese Patent Application 2001-108986 (P2001-108986) (32) Priority date April 6, 2001 (2001.4.6) (33) Priority claiming country Japan (JP) (31) Priority claim number Special Demand 2001-189718 (P2001-189718) (32) Priority date June 22, 2001 (June 22, 2001) (33) Country of priority claim Japan (JP) (31) Priority claim number Japanese Patent Application 2001- 277206 (P2001-277206) (32) Priority date September 12, 2001 (September 12, 2001) (33) Priority claiming country Japan (JP) (72) Inventor Kazumasa Kitamura Suda, Mizuho-ku, Nagoya City, Aichi Prefecture Town No. 56 No. 56 Nihon Insulators Co., Ltd. (72) Inventor Nobuo Takahashi No. 56 Suda, Mizuho-ku, Nagoya-shi, Aichi Pref. 2-56 Machi Insulators of Nihon Insulator Co., Ltd. ) 2H041 AA16 AA17 AB14 AB19 AB38 AC08 AZ02 AZ08

Claims (18)

[Claims] 1. A plurality of piezoelectric / electrostrictive elements including a piezoelectric / electrostrictive body and at least a pair of electrodes are formed on a thick ceramic substrate, and driven by displacement of the piezoelectric / electrostrictive body. A piezoelectric / electrostrictive actuator, wherein the plurality of piezoelectric / electrostrictive elements are integrally bonded to the ceramic base and are arranged two-dimensionally and independently of each other. Type actuator. 2. The matrix type actuator according to claim 1, wherein the piezoelectric / electrostrictive element has the electrodes formed on the side surfaces of the piezoelectric / electrostrictive body standing on the ceramic substrate. 3. In the piezoelectric / electrostrictive element, a cross section of the piezoelectric / electrostrictive body is a parallelogram in a cross section parallel to the ceramic substrate, and the electrode is a cross section of the piezoelectric / electrostrictive body. The matrix type actuator according to claim 2, wherein the matrix type actuator is formed on a side surface including a long side of the. 4. The piezoelectric / electrostrictive element expands and contracts in a direction perpendicular to the main surface of the ceramic substrate based on the displacement of the piezoelectric / electrostrictive body due to the lateral effect of the electric field-induced strain.
3. The matrix type actuator according to any one of 3 above. 5. In the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element, the crystal grain state of the wall surface on which the electrode is formed is 1% or less of crystal grains that have undergone intragranular fracture. 2 to
4. The matrix type actuator according to any one of 4 above. 6. The matrix type actuator according to claim 1, wherein a contour of the surface of the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element is approximately 8 μm or less. 7. The surface roughness Rt of the wall surface of the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element is about 10 μm or less.
6. The matrix type actuator according to any one of 6 above. 8. The matrix type actuator according to claim 1, wherein the piezoelectric / electrostrictive element is formed by alternately laminating a plurality of layered piezoelectric / electrostrictive bodies and the layered electrodes on the ceramic substrate. 9. The piezoelectric / electrostrictive element expands / contracts in the direction perpendicular to the main surface of the ceramic substrate based on the displacement of the piezoelectric / electrostrictive body due to the vertical effect of the electric field induced strain. Matrix actuator. 10. The matrix type actuator according to claim 8, wherein the thickness of each layer of the piezoelectric / electrostrictive element of the piezoelectric / electrostrictive body is 100 μm or less. 11. A layer comprising the piezoelectric / electrostrictive body of the piezoelectric / electrostrictive element comprises 10 to 200 layers.
0. The matrix type actuator according to any one of 0. 12. The matrix type actuator according to claim 1, wherein a wall portion is formed between the adjacent piezoelectric / electrostrictive elements. 13. The piezoelectric / electrostrictive body is made of any material of piezoelectric ceramics, electrostrictive ceramics, antiferroelectric ceramics, or a composite material of these and a polymeric piezoelectric material. 13. The matrix type actuator according to any one of items 1 to 12. 14. The matrix type actuator according to claim 1, wherein the ceramic substrate and the piezoelectric / electrostrictive body forming the piezoelectric / electrostrictive element are made of the same material. 15. An electrode terminal is formed on a surface of the ceramic base opposite to a surface on which the piezoelectric / electrostrictive element is arranged, and the electrode and the electrode terminal are formed on the ceramic base. The matrix type actuator according to any one of claims 1 to 14, wherein the matrix type actuator is wired via the through hole or the via hole. 16. A method for manufacturing a matrix type actuator, comprising: a plurality of piezoelectric / electrostrictive elements, each of which is composed of a piezoelectric / electrostrictive body and at least a pair of electrodes, arranged two-dimensionally on a thick ceramic substrate. Then, prepare a plurality of ceramic green sheets containing a piezoelectric / electrostrictive material as a main component, and punch and stack holes at predetermined positions of the plurality of ceramic green sheets with a punch and a die to stack the holes. Step A for obtaining a ceramic green laminated body having a through hole formed therein, Step B for preparing a ceramic green substrate that will later constitute a ceramic substrate, and firing and integration after laminating the ceramic green laminated body and the ceramic green substrate. To obtain a laminated fired body, and a ceramic green laminate obtained in at least the step A of the laminated fired body. Step D to put the cuts in a substantial portion
And a step of forming a plurality of piezoelectric / electrostrictive bodies independent of each other on a ceramic substrate. 17. The step A comprises a first step of forming a first hole in the first ceramic green sheet with the punch, and a step of removing the punch from the first hole in the first step. A second step of bringing the ceramic green sheet into close contact with a stripper and pulling it up, and a third step of pulling up the punch to such an extent that the tip of the punch is slightly pulled in from the lowermost portion of the pulled up first green sheet, A fourth step of forming a second hole in the second ceramic green sheet with the punch, and the second green sheet with the first ceramic in a state in which the punch is not pulled out from the second hole. The fifth step of pulling up together with the green sheet, and the tip of the punch is slightly pulled from the bottom of the second ceramic green sheet pulled up. The sixth step of pulling up the punch to such an extent that the punch is inserted, and thereafter, a plurality of ceramic green sheets are repeatedly laminated from the fourth step to the sixth step, and a ceramic having through holes formed by overlapping holes is formed. The method for manufacturing a matrix type actuator according to claim 16, which is a step of obtaining a green laminated body. 18. A step of filling a through hole in a portion of the laminated fired body corresponding to the ceramic green laminate with a filler after the step C and before the step D.
A method for manufacturing the matrix-type actuator according to item 1.