DE60134536D1 - MATRIX AKTOR - Google Patents

MATRIX AKTOR

Info

Publication number
DE60134536D1
DE60134536D1 DE60134536T DE60134536T DE60134536D1 DE 60134536 D1 DE60134536 D1 DE 60134536D1 DE 60134536 T DE60134536 T DE 60134536T DE 60134536 T DE60134536 T DE 60134536T DE 60134536 D1 DE60134536 D1 DE 60134536D1
Authority
DE
Germany
Prior art keywords
aktor
matrix
matrix aktor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60134536T
Other languages
German (de)
Inventor
Yukihisa Takeuchi
Hiroyuki Tsuji
Kazumasa Kitamura
Nobuo Takahashi
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/900,742 external-priority patent/US6699018B2/en
Priority claimed from JP2001370940A external-priority patent/JP3964193B2/en
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority claimed from PCT/JP2001/010968 external-priority patent/WO2002052657A1/en
Application granted granted Critical
Publication of DE60134536D1 publication Critical patent/DE60134536D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE60134536T 2000-12-22 2001-12-14 MATRIX AKTOR Expired - Lifetime DE60134536D1 (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2000391715 2000-12-22
JP2001056740 2001-03-01
JP2001059281 2001-03-02
JP2001108986 2001-04-06
JP2001189718 2001-06-22
US09/900,742 US6699018B2 (en) 2001-04-06 2001-07-06 Cell driving type micropump member and method for manufacturing the same
JP2001277206 2001-09-12
JP2001370940A JP3964193B2 (en) 2000-12-22 2001-12-05 Matrix type actuator
PCT/JP2001/010968 WO2002052657A1 (en) 2000-12-22 2001-12-14 Matrix actuator

Publications (1)

Publication Number Publication Date
DE60134536D1 true DE60134536D1 (en) 2008-08-07

Family

ID=39587598

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60134536T Expired - Lifetime DE60134536D1 (en) 2000-12-22 2001-12-14 MATRIX AKTOR

Country Status (1)

Country Link
DE (1) DE60134536D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition