JP2003157973A - Manufacturing method and manufacturing apparatus of organic electroluminescence device, and manufacturing system and manufacturing method of display device using the same - Google Patents

Manufacturing method and manufacturing apparatus of organic electroluminescence device, and manufacturing system and manufacturing method of display device using the same

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JP2003157973A
JP2003157973A JP2002133536A JP2002133536A JP2003157973A JP 2003157973 A JP2003157973 A JP 2003157973A JP 2002133536 A JP2002133536 A JP 2002133536A JP 2002133536 A JP2002133536 A JP 2002133536A JP 2003157973 A JP2003157973 A JP 2003157973A
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deposition
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JP3705237B2 (en
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Isao Kamiyama
Takao Mori
Masaru Yamaguchi
優 山口
敬郎 森
功 紙山
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Sony Corp
ソニー株式会社
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Abstract

PROBLEM TO BE SOLVED: To promptly manufacture an organic EL device at low costs by forming a film with short tact time and low material costs. SOLUTION: For the purpose of manufacturing the organic electroluminescence device formed by successively laminating a plurality of layers on a substrate, the plurality of layers are laminated on the position of the substrate 2 to be deposited, by changing relative position of the substrate 2 to be deposited, against respective evaporation sources 142a-142d, by making the substrate sequentially pass through the position facing a plurality of evaporation sources 142a-142d arranged in a row.

Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】本発明は、有機電界発光素子(有機エレクトロルミネッセンス素子;以下「有機EL BACKGROUND OF THE INVENTION [0001] [Technical Field of the Invention The present invention relates to an organic electroluminescence device (organic electroluminescent device, hereinafter "organic EL
素子」という)の製造方法および製造装置並びに有機E Manufacturing method and a manufacturing apparatus and an organic E of that element ")
L素子を用いた表示装置の製造システムおよび製造方法に関する。 Manufacturing system and a method of manufacturing a display device using the L elements related. 【0002】 【従来の技術】近年、平面型の表示装置として、有機E [0002] Recently, as a flat type display device, an organic E
L素子を発光素子としたもの(以下「有機ELディスプレイ」という)が注目を集めている。 The L elements that form a light emitting element (hereinafter referred to as "organic EL display") has attracted attention. この有機ELディスプレイは、バックライトが不要な自発光型のフラットパネルディスプレイであり、自発光型に特有の視野角の広いディスプレイを実現できるという利点を有する。 The organic EL display includes a backlight is unnecessary emissive flat panel displays has the advantage of realizing a wide display of specific viewing angle to the self-luminous. また、必要な画素のみを点灯させればよいため消費電力の点でバックライト型(液晶ディスプレイ等)に比べて有利であるとともに、今後実用化が期待されている高精細度の高速のビデオ信号に対して十分な応答性能を具備すると考えられている。 Further, the advantageous compared to the backlight type in terms of the necessary pixel only power for it is sufficient to light up the (liquid crystal display), high-speed video signals of high definition which is expected in the future practical use It is believed to include a sufficient response performance for. 【0003】このような有機ELディスプレイに用いられる有機EL素子は、一般に、有機材料を上下から電極(陽極および陰極)で挟み込む構造を持つ。 An organic EL element used in such an organic EL display, generally has a structure sandwiching the organic material from above and below the electrodes (anode and cathode). そして、有機材料からなる有機層に対して、陽極から正孔が、陰極から電子がそれぞれ注入され、その有機層にて正孔と電子が再結合して発光が生じるようになっている。 Then, the organic layer comprising an organic material, a hole from the anode, electrons are injected respectively from cathode, the holes and electrons in the organic layer is adapted to recombine to emit light occurs. このとき、有機EL素子では、10V以下の駆動電圧で数百〜 In this case, the organic EL device, several hundred to the following driving voltage 10V
数万cd/m 2の輝度が得られる。 Luminance tens of thousands cd / m 2 is obtained. また、有機材料(蛍光物質)を適宜選択することによって、所望する色彩の発光も得ることができる。 Further, by appropriately selecting the organic material (phosphor) can also be obtained emission of desired color. これらのことから、有機EL From these facts, the organic EL
素子は、マルチカラーまたはフルカラーの表示装置を構成するための発光素子として、非常に有望視されている。 Elements as light emitting elements for constituting the display device of the multi-color or full color, has been very promising. 【0004】ところで、有機EL素子における有機層は、通常、正孔(ホール)注入層、正孔輸送層、発光層、電荷注入層等といった三〜五層が積層されてなる。 Meanwhile, the organic layer in the organic EL device, usually, hole-injection layer, a hole transport layer, luminescent layer, three to five layers such as the charge injection layer are laminated.
ただし、各層を形成する有機材料は、耐水性が低く、ウエットプロセスを利用できない。 However, the organic material forming each layer has low water resistance, can not be used wet process. そのため、有機層を形成する際には、真空薄膜成膜技術を利用した真空蒸着によって各層を順に成膜して積層構造とするのが一般的である。 Therefore, in forming the organic layer, it is common to the laminated structure by sequentially depositing each layer by vacuum deposition using a vacuum thin film forming technique. また、例えばフルカラーの画像表示を行う場合であれば、R(赤),G(緑),B(青)の各色成分に対応した3種類の有機材料からなる有機層を、それぞれ異なる画素位置に成膜しなければならない。 Also, Tatoeba full-color field image display wo do when out any field, R (red), G (green), B (blue) field each color component similar to the corresponding other three field organic material scolded become organic layer wo, each different pixel position two It must be deposited. そのため、カラー対応の有機層を形成する際には、それぞれの色成分に対応した開孔パターンのマスクを逐一交換したり、あるいは同一パターンのマスクをその都度位置合わせしつつ、各色成分毎に各層を順にパターニング成膜する、といった手法が用いられている。 Therefore, when forming the organic layer of color correspondence, or one by one exchange mask opening pattern corresponding to the respective color components, or each time while aligning the mask with the same pattern, each layer for each color component sequentially patterning deposited, methods have been used, such as. 【0005】 【発明が解決しようとする課題】しかしながら、従来の手法では、有機EL素子の有機層を成膜するのにあたって、以下に述べるような難点が生じてしまうことが考えられる。 [0005] The present invention is, however, in the conventional method, when the forming the organic layer of the organic EL element, it is considered that a drawback as described below occurs. 【0006】例えば、従来は、積層構造の有機層を形成するのにあたり、真空チャンバ内の蒸着源(有機材料の種類)を、各層を成膜する度に変更するといった手法を用いることがあるが、この場合には、各色成分毎に三〜 [0006] For example, conventional, when forming the organic layer of the laminated structure, the deposition source in the vacuum chamber (the kind of the organic material), it is possible to use techniques such change every time of forming each layer in this case, the three-for each color component
五回分だけ有機材料の温度上昇を行うための時間が余分にかかるとともに、蒸発レートの安定化を行うための時間も必要となってしまう。 With time for temperature rise of the organic material only five times takes extra, becomes necessary time to do to stabilize the evaporation rate. そのため、有機層の迅速な成膜が困難になってしまい、結果として有機EL素子を製造する上でのタクトタイムに難が生じることが懸念される。 Therefore, rapid formation of the organic layer becomes difficult, results tact time in manufacturing an organic EL element that flame occurs is feared as. 【0007】また、従来は、例えば、同一の真空チャンバ内に複数の蒸着源を配設するとともに、各蒸着源を開閉自在なシャッタ等で覆うことにより、各層の選択的な成膜を迅速に行い得るようにするといった手法を用いることもある。 [0007] Conventionally, for example, with arranging a plurality of evaporation sources in the same vacuum chamber by covering the respective evaporation sources with openable shutter, etc., quickly selective deposition of each layer sometimes used techniques such so as to obtain performed. ところが、この場合には、各層の有機材料の温度を安定に維持するのに数十分の時間を要するため、シャッタ等で覆われ成膜に用いない有機材料であっても、蒸発レートを安定させるまでの間に多くを消費してしまう。 However, in this case, since it takes several tens of minutes to maintain the temperature of the organic material layers stably, even organic material is not used for film formation is covered by the shutter or the like, a stable evaporation rate It consumes a lot between up to. つまり、選択的な成膜を行う場合には、有機材料の無駄が生じてしまい、材料消費量の増加に起因する有機EL素子のコスト上昇を招いてしまうおそれがある。 That is, when performing selective deposition, will be wasted resulting organic materials, which may resulting in an increase in cost of the organic EL element due to an increase in material consumption. 【0008】さらには、各層をそれぞれ異なる真空チャンバ内で成膜すること、すなわち一つの真空チャンバと一つの有機材料とを対応させることも考えられるが、この場合には、有機層の多層化に伴って多くの真空チャンバが必要になってしまうため、設備コストや設置スペース等の点で難が生じてしまう。 [0008] Furthermore, by depositing each layer at a different vacuum chamber, respectively, that it is conceivable to adapt the one vacuum chamber and one of the organic material, in this case, a multilayer of organic layer because becomes requires more vacuum chambers with flame occurs at a point such as equipment cost and installation space. 【0009】そこで、本発明は、短いタクトタイムおよび少ない材料消費量での成膜を可能にすることで、迅速かつ低コストで有機EL素子を製造することのできる有機EL素子の製造方法および製造装置、並びにその有機EL素子を用いた表示装置の製造システムおよび製造方法を提供することを目的とする。 [0009] Therefore, the present invention is that it allows the formation of a short tact time and less material consumption, manufacturing method and an organic EL device capable of producing an organic EL device quickly and cost apparatus, Narabini the organic EL element wo using other display device Roh manufacturing system and method for manufacturing wo provide to the ancient capital wo purpose door to. 【0010】 【課題を解決するための手段】本発明は、上記目的を達成するために案出された有機EL素子の製造方法で、基板上に複数層が順次積層されてなる有機EL素子を製造する方法であって、並列配置された複数の蒸着源と対向する位置を順に通過するように、前記基板と前記複数の蒸着源との相対位置を可変させて、当該基板上の被成膜箇所に前記複数層を積層させることを特徴とする。 [0010] According to an aspect of the present invention is a method of manufacturing an organic EL element which is devised in order to achieve the above object, the organic EL element in which a plurality layers on a substrate, which are sequentially stacked a method of manufacturing, so as to pass the position facing the plurality of evaporation sources arranged in parallel in this order, by varying the relative positions of the plurality of deposition source and the substrate, the deposition on the substrate and wherein said plurality of layers to be laminated to the location. 【0011】また、本発明は、上記目的を達成するために案出された有機EL素子の製造装置で、基板上に複数層が順次積層されてなる有機EL素子を製造するためのものであって、前記複数層に対応する複数の蒸着源が並べて配設されているとともに、前記基板上の被成膜箇所が前記複数の蒸着源と対向する位置を順に通過するように当該基板と前記複数の蒸着源との相対位置を可変させる搬送手段が設けられていることを特徴とするものである。 Further, the present invention is a manufacturing apparatus of an organic EL element which is devised in order to achieve the above object, provided for the purpose of producing an organic EL device in which a plurality layers on a substrate, which are sequentially stacked Te, a plurality of deposition sources are arranged side by side corresponding to said plurality of layers, wherein with the substrate to pass through a position where the deposition target point on the substrate is opposed to the plurality of evaporation sources in order more conveying means for varying the relative position of the evaporation source is characterized in that is provided. 【0012】また、本発明は、上記目的を達成するために案出された有機EL素子を用いた表示装置の製造システムで、基板上に複数層が順次積層されてなる有機EL [0012] also, the present invention leaves, the object wo achieve the reservoir two devised by other organic EL element wo using other display device field production system out, board above two multiple layers moth sequentially stacked hand-made organic EL
素子を用いた表示装置を製造するためのものであって、 It is for manufacturing a display device using the element,
前記複数層に対応する複数の蒸着源が並べて配設されているとともに、前記基板上の被成膜箇所が前記複数の蒸着源と対向する位置を順に通過するように当該基板と前記複数の蒸着源との相対位置を可変させる搬送手段が設けられている有機EL素子の製造装置を複数備え、各製造装置がそれぞれ異なる色成分に対応した有機EL素子を形成するように構成されたことを特徴とするものである。 Together are arranged side by side a plurality of deposition sources corresponding to the plurality of layers, deposited deposition target locations on the substrate of the with the substrate more to pass through a position opposed to the plurality of deposition source in order a plurality of manufacturing apparatuses of an organic EL device is conveying means for varying the relative position of the source is provided, characterized in that each of the manufacturing apparatus is configured to form an organic EL element corresponding to different color components, respectively it is an. 【0013】また、本発明は、上記目的を達成するために案出された有機EL素子を用いた表示装置の製造方法で、基板上に複数層が順次積層されてなる有機EL素子を用いた表示装置を製造する方法であって、並列配置された複数の蒸着源と対向する位置を順に通過するように、前記基板と前記複数の蒸着源との相対位置を可変させ、当該基板上の被成膜箇所に前記複数層を積層させて一つの色成分に対応する有機EL素子を形成し、これを前記基板上の被成膜箇所を相違させて複数回繰り返すことにより、前記基板上に複数の色成分に対応する各有機EL素子が配設されてなる表示装置を構成することを特徴とする。 Further, the present invention is a method of manufacturing a display device using an organic EL element which is devised in order to achieve the above object, an organic EL element in which a plurality layers on a substrate, which are sequentially stacked a method of manufacturing a display device, so as to pass through the position facing the plurality of evaporation sources arranged in parallel in this order, the substrate and by varying the relative positions of the plurality of deposition source, the on the substrate of the by a laminate of the plurality of layers deposited point organic EL elements corresponding to one color component is formed by repeated a plurality of times this is different from the deposition target point on the substrate, a plurality on the substrate each organic EL elements corresponding to the color components, characterized in that a display device which arranged therein. 【0014】上記手順の有機EL素子の製造方法および上記構成の有機EL素子の製造装置によれば、基板上の被成膜箇所には、その基板が各蒸着源と対向する位置を順に通過する度に、各蒸着源からの蒸着材料による成膜が行われる。 According to the manufacturing apparatus of an organic EL element manufacturing method and the structure of the organic EL device of the above procedure, the deposition target locations on the substrate, passes through a position where the substrate is opposed to the evaporation source in order every time, the film formation by vapor deposition material from each deposition source is performed. つまり、基板が各蒸着源と対向する位置を通過した後には、その基板上の被成膜箇所に複数層が順次積層されることになる。 In other words, after passing through the position where the substrate is opposed to the evaporation source, a plurality layers are sequentially stacked on the deposition target locations on the substrate. したがって、基板上への複数層の成膜にあたり、各蒸着源に対する処理準備(温度上昇や蒸着レートの安定化等)を略同時に行え、またその場合であっても各蒸着源からの蒸着材料が無駄なく成膜に用いられることになる。 Therefore, when forming the plurality of layers on a substrate, the process prepared for each deposition source (stabilization of the temperature rise and the evaporation rate or the like) substantially performed simultaneously and the vapor deposition material from each deposition source even when the It will be used to without waste deposition. 【0015】また、上記構成の表示装置の製造システムおよび上記手順の表示装置の製造方法によれば、上述した有機EL素子の製造方法および上記構成の有機EL素子の製造装置の場合と同様に、複数層が順次積層されてなる有機EL素子を形成するとともに、これを複数の色成分に対応する分だけ繰り返す。 Further, according to the manufacturing method of a display device manufacturing system and the procedure of the display device having the above structure, as in the case of the manufacturing apparatus of an organic EL element manufacturing method and the structure of the organic EL element described above, to form the organic EL element in which a plurality layer are sequentially stacked, repeated by the amount corresponding to this plurality of color components. したがって、基板上に複数の有機EL素子が配設されてなる表示装置を構成する場合であっても、各有機EL素子の形成を連続的に行うことが可能となり、しかも各有機EL素子について成膜処理準備や蒸着材料消費量の効率化等が実現可能となる。 Therefore, even when constituting a display device in which a plurality of organic EL elements arranged therein on the substrate, it is possible to perform the formation of the organic EL elements sequentially, moreover formed for each organic EL element increasing efficiency in membrane treatment preparation and deposition material consumption can be realized. 【0016】 【発明の実施の形態】以下、図面に基づき本発明に係る有機EL素子の成膜方法および製造装置並びに有機電界発光素子を用いた表示装置の製造システムおよび製造方法について説明する。 DETAILED DESCRIPTION OF THE INVENTION Hereinafter, description will be given of a manufacturing system and a method of manufacturing a display device using the film formation method and a manufacturing apparatus and an organic electroluminescence device of the organic EL element according to the present invention based on the drawings. 図1は本発明に係る製造装置の概略構成例を示す模式図、図2はその要部の構成例を示す模式図、図3はその製造装置によって製造される有機E Figure 1 is a schematic diagram showing an exemplary configuration of a manufacturing apparatus according to the present invention, FIG. 2 is a schematic diagram showing a configuration example of a main portion thereof, an organic E produced by 3 manufacturing apparatus
L素子の概略構成例を示す模式図、図4はその有機EL Schematic diagram showing an outline configuration example L element, FIG 4 is the organic EL
素子を製造する際に用いられる搬送治具の概略構成例を示す模式図、図5は本発明に係る製造装置を用いた製造システムの構成例を示す模式図である。 Schematic diagram showing a schematic configuration example of a conveying jig used in manufacturing the device, FIG 5 is a schematic diagram showing an exemplary configuration of a manufacturing system using the manufacturing apparatus according to the present invention. 【0017】先ず、はじめに、有機EL素子の概略構成について簡単に説明する。 [0017] First, at the beginning, it will be briefly described a schematic configuration of an organic EL device. 図3に示すように、本実施形態において製造される有機EL素子1は、有機ELディスプレイを構成するためのガラス基板2上に形成されたもので、それぞれ異なる材料からなる複数の有機層1a As shown in FIG. 3, the organic EL device 1 produced in this embodiment has been formed on the glass substrate 2 for constituting the organic EL display, a plurality of organic layers 1a made of different materials
〜1dが順次積層されてなるものである。 ~1d is made are successively stacked. なお、ここでは、積層される層数が四つである場合を例に挙げているが、これに限定されないことは勿論である。 Here, although an example in number of layers to be stacked is four that it is of course not limited thereto. 【0018】ところで、ガラス基板2上には、図示はしていないが、例えばR,G,Bの各色成分に対応した複数の有機EL素子1が、所定パターンに従ってマトリクス状に縦横に配列されている。 By the way, on the glass substrate 2, though not shown, for example, R, G, and a plurality of organic EL elements 1 corresponding to each color component of B is, are arranged vertically and horizontally in a matrix according to a predetermined pattern there. 各有機EL素子1の間の相違は、有機層1a〜1dを構成する有機材料(蛍光物質)にある。 The difference between the organic EL element 1 is in the organic material constituting the organic layer 1 a to 1 d (fluorescent substance). これにより、これらガラス基板2および各有機EL素子1を備えて構成された有機ELディスプレイでは、各有機EL素子に所定波長の光を選択的に発生させて、カラー画像の表示を行うことが可能になるのである。 Accordingly, in the organic EL display that is configured with the glass substrates 2 and the organic EL element 1, by selectively generate light of a predetermined wavelength to each of the organic EL element, it can be displayed in the color image it is to become. 【0019】このようなカラー画像を表示するための各有機EL素子1の配列は、例えばR,G,Bの各色成分に対応したパターニング成膜によって各有機EL素子1 [0019] Such color image sequence of each organic EL device 1 for displaying, for example R, G, each of the organic EL element 1 by patterning deposition corresponding to each color component of B
を形成することで実現可能となる。 It can be realized by forming a. ここで、パターニング成膜のために用いられる搬送治具の概略構成について説明する。 Here will be described a schematic configuration of a conveying jig used for patterning the film formation. パターニング成膜は、図4に示すように、平板状に形成され、鉄(Fe)やニッケル(Ni)等の強磁性体からなるメタルマスク3を用いて行われる。 Patterning deposition, as shown in FIG. 4, is formed in a plate shape is performed by using a metal mask 3 made of a ferromagnetic material such as iron (Fe) or nickel (Ni). メタルマスク3には、所定の成膜パターンに対応した複数の開孔3aが穿設されている。 The metal mask 3, a plurality of apertures 3a corresponding to the predetermined deposition pattern are drilled. そして、被成膜物であるガラス基板2の一面側を覆うようにそのガラス基板2と密着した状態で、ガラス基板2の他面側に配された電磁石4が発生させる磁力によって固定されるようになっている。 Then, in close contact with a glass substrate 2 so as to cover one surface of the glass substrate 2 is deposition material, such that the electromagnets 4 disposed on the other side of the glass substrate 2 is fixed by the magnetic force generated It has become. このように構成される一体型の搬送治具によって、 The integral transport jig thus configured,
ガラス基板2上には、所定パターンの成膜を行うことができ、また複数種類のメタルマスク3を用意すれば異なるパターンの多層成膜を行うこともでき、結果として複数の有機EL素子1を縦横に配列することが可能となるのである。 On the glass substrate 2 can form a film having a predetermined pattern, and by preparing a plurality of types of metal mask 3 can also make multilayer deposition of different patterns, a plurality of organic EL elements 1 as a result From becoming possible to arranged in a matrix. 【0020】次に、以上のような搬送治具を用いてガラス基板2上に有機EL素子1を形成して有機ELディスプレイを構成するための製造システムについて説明する。 Next, description will be given of a manufacturing system for forming the organic EL display and an organic EL element 1 on the glass substrate 2 by using the above-described conveying jig. 本実施形態で説明する製造システムは、カラー画像の表示が可能な有機ELディスプレイを構成すべく、 Production system described in the present embodiment, in order to constitute the organic EL display capable of displaying color images,
R,G,Bの各色成分に対応したパターニング成膜を行って、ガラス基板2上に複数の有機EL素子1を縦横に配列するためのものである。 Go R, G, and patterned deposition corresponding to each color component of B, and one for arranging a plurality of organic EL element 1 in a matrix on the glass substrate 2. 【0021】そのために、図5に示すように、本実施形態で説明する製造システムは、大別すると、外部からガラス基板2が供給される基板供給部11と、そのガラス基板2に対してクリーニングや活性化等の前処理を行う前処理部12と、R色に対応したアライメント(ガラス基板2とメタルマスク3との位置合わせおよび固定)を行うR色アライメント部13rと、R色に対応したパターニング成膜を行うR色成膜部14rと、G色に対応したアライメントを行うG色アライメント部13gと、G [0021] Cleaning Therefore, as shown in FIG. 5, the manufacturing system described in this embodiment is roughly composed of a substrate supply portion 11 of the glass substrate 2 is supplied from the outside, for the glass substrate 2 a preprocessing unit 12 that performs preprocessing such or activation, and R color alignment unit 13r for aligning corresponding to R color (alignment and fixation of the glass substrate 2 and the metal mask 3), corresponding to the R color and R IroNarumaku portion 14r of patterning film formation, a G color alignment unit 13g for aligning corresponding to the G color, G
色に対応したパターニング成膜を行うG色成膜部14g G IroNarumaku part 14g of patterning film formation corresponding to the color
と、B色に対応したアライメントを行うB色アライメント部13bと、B色に対応したパターニング成膜を行うB色成膜部14bと、ガラス基板2とメタルマスク3との分離等の後処理を行う後処理部15と、ガラス基板2 When the B-color alignment unit 13b for performing an alignment corresponding to the B color, and B IroNarumaku portion 14b of patterning film formation corresponding to the B color, the post-separation or the like of the glass substrate 2 and the metal mask 3 a post-processing unit 15 that performs, the glass substrate 2
から分離されたメタルマスク3等をR色アライメント部13rへ供給するリターン部16と、パターニング成膜により各色に対応する有機EL素子1が形成された後のガラス基板2を排出する基板排出部17と、から構成されている。 Substrate discharging portion 17 for discharging the return portion 16 supplies the separated metal mask 3 or the like to the R color alignment unit 13r, the glass substrate 2 after the organic EL element 1 corresponding to the respective colors by patterning deposition is formed from and it is configured from. 【0022】これらの各部11〜17のうち、R色成膜部14r、G色成膜部14gおよびB色成膜部14b [0022] Among these units 11 to 17, R IroNarumaku unit 14r, G IroNarumaku portion 14g and the B IroNarumaku portion 14b
が、本実施形態で説明する有機EL素子の製造装置に該当する。 But it corresponds to the manufacturing apparatus of an organic EL element described in this embodiment. すなわち、R色成膜部14r、G色成膜部14 Ie, R IroNarumaku unit 14r, G IroNarumaku 14
gおよびB色成膜部14bが、それぞれR,G,Bの各色成分に対応した有機EL素子1を形成するように構成されている。 g and B IroNarumaku portion 14b is configured so as to form R, G, and organic EL elements 1 corresponding to the B color components, respectively. 【0023】なお、R色アライメント部13rから後処理部15までの間では、ガラス基板2は、メタルマスク3および電磁石4と一体型の搬送治具を構成した状態で取り扱われるものとする。 [0023] In addition, between the R color alignment unit 13r to the post-processing section 15, the glass substrate 2 shall be handled in a state of constituting the metal mask 3 and electromagnet 4 and integrated transport jig. したがって、ガラス基板2、 Therefore, the glass substrate 2,
メタルマスク3および電磁石4からなる搬送治具は、R Conveying jig made of metal mask 3 and the electromagnet 4, R
色成膜部14r、G色成膜部14gおよびB色成膜部1 IroNarumaku part 14r, G IroNarumaku part 14g and B IroNarumaku Part 1
4bを順に通過することになる。 It will pass through the 4b sequentially. 【0024】また、R色成膜部14r、G色成膜部14 [0024] In addition, R IroNarumaku part 14r, G IroNarumaku unit 14
gおよびB色成膜部14bの前段には、それぞれR色アライメント部13r、G色アライメント部13gおよびB色アライメント部13bが配設されていることから、 The front of g and B IroNarumaku portion 14b, since the R color alignment unit 13r, the G color alignment unit 13g and the B color alignment unit 13b are disposed respectively,
互いに異なる状態のアライメント(パターニング成膜) Each other of different states alignment (patterned film formation)
に対応することが可能である。 It is possible to correspond to. これらの各部11〜17 These units 11 to 17
の間でのガラス基板2または搬送治具の移載やアライメント調整等は、ここではその説明を省略するが、周知のハンドリングロボットや搬送コンベア等を用いて行うものとする。 The transfer and alignment adjustment of the glass substrate 2 or the conveying jig between, here is omitted, it is assumed that conducted by using conventional handling robot or conveyor or the like. 【0025】さらに、これらの各部11〜17は、リターン部16の存在によって閉ループ構造を構築している。 Furthermore, these units 11 to 17 are developing a closed-loop structure by the presence of the return portion 16. これにより、搬送治具を構成するメタルマスク3および電磁石4は、R色成膜部14r、G色成膜部14 Thus, the metal mask 3 and the electromagnet 4 constituting the conveying jig, R IroNarumaku unit 14r, G IroNarumaku 14
g、B色成膜部14bおよびリターン部16からなる閉ループ内を循環することになる。 g, will be circulated in a closed loop consisting of B IroNarumaku portion 14b and a return portion 16. 具体的には、R色成膜部14r、G色成膜部14g、B色成膜部14bおよびリターン部16が、R色アライメント部13r、G色アライメント部13g、B色アライメント部13bおよび後処理部15を頂点とする方形状に配されている。 Specifically, R IroNarumaku unit 14r, G IroNarumaku portion 14 g, B IroNarumaku portion 14b and a return portion 16, R color alignment unit 13r, G color alignment unit 13 g, B color alignment unit 13b and after It is arranged the processor 15 to the rectangular shape having vertices. ただし、閉ループ構造は、必ずしも方形状である必要はない。 However, the closed-loop structure does not necessarily have to be the way shape. 例えば、直線状に配されたR色アライメント部13 Tatoeba, straight line Jo two arranged are other R color alignment part 13
r、G色アライメント部13gおよびB色アライメント部13bに沿うようにしてリターン部16を配設することで、閉ループ構造を構築することも考えられる。 r, so as to follow the G color alignment portion 13g and the B color alignment portion 13b by disposing the return portion 16, it is conceivable to construct a closed-loop structure. 【0026】次に、以上のような製造システムにて用いられる有機EL素子の製造装置、すなわちR色成膜部1 Next, above-described apparatus for producing an organic EL element used in the manufacturing system, i.e. R IroNarumaku section 1
4r、G色成膜部14gおよびB色成膜部14bの詳細について、図1および図2を参照しながら説明する。 4r, details of the G IroNarumaku portion 14g and the B IroNarumaku unit 14b, described with reference to FIGS. 【0027】図1に示すように、R色成膜部14r、G As shown in FIG. 1, R IroNarumaku unit 14r, G
色成膜部14gおよびB色成膜部14b(以下、これらを単に「素子製造装置」という)は、いずれも、真空チャンバ141と、その真空チャンバ141内に並列配置された複数の蒸着源142a〜142dと、ガラス基板2と各蒸着源142a〜142dとの相対位置を可変させるための搬送手段143と、真空チャンバ141内への一体型の搬送治具の搬入口および排出口(ただし、いずれも不図示)と、を備えている。 IroNarumaku portion 14g and the B IroNarumaku portion 14b (hereinafter, simply referred to as "device manufacturing apparatus") are both a vacuum chamber 141, a plurality of deposition sources 142a arranged in parallel to the vacuum chamber 141 and ~142D, and the transfer mechanism 143 for varying the relative position between the glass substrate 2 and the evaporation source 142a to 142d, integrated transport jig into the vacuum chamber 141 entrance and outlet (However, any also it includes a not shown), a. 【0028】このうち、各蒸着源142a〜142d [0028] Of these, each vapor deposition source 142a~142d
は、それぞれがガラス基板2上に成膜する複数の有機層1a〜1dに対応している。 Leaves, each moth glass substrate 2 on the two-film-forming a plurality of mounting the organic layer 1a~1d two corresponding hand there. 例えば、上述したように有機層1a〜1dの層数が四つの場合には、図2(a)に示すように、搬送手段143による相対位置可変方向に沿って一列に並んだ四つの蒸着源142a〜142dを設け、それぞれに異なる有機材料を蒸発させるようにすることが考えられる。 For example, when the number of layers of the organic layer 1a~1d of quadruplicate as described above, as shown in FIG. 2 (a), four evaporation sources arranged in a row along the relative position varying direction by the conveying means 143 the provided 142a to 142d, it is conceivable to vaporize the different organic materials, respectively. ただし、ここでは、並設された蒸着源142a〜142dの数が四つである場合を例に挙げているが、上述した有機層1a〜1dの層数と同様に、これに限定されないことは勿論である。 However, here, the number of juxtaposed deposition source 142a~142d is an example in which the four that as with the number of layers of the organic layer 1a~1d described above, is not limited to this as a matter of course. しかも、必ずしも有機層1a〜1dの層数と蒸着源142a〜14 Moreover, not necessarily the number of layers of the organic layer 1a~1d the deposition source 142a~14
2dの数とが一致している必要はない。 It is not necessary that the number of the 2d match. 例えば、同じ有機材料を蒸発させる蒸着源を隣り合って二つ以上設けるようにしてもよく、この場合には、有機層1a〜1dの層数が四つであっても、蒸着源142a〜142dの数は五つ以上となる。 For example, may be provided two or more adjacent deposition source for evaporating the same organic material, in this case, the number of layers of the organic layer 1a~1d are even four that evaporation source 142a~142d the number will be five or more. つまり、ここでいう有機層1a〜1 In other words, the organic layer referred to here 1a~1
dに対応する数には、有機層1a〜1dと同一の数の他に、有機層1a〜1dよりも多い数も含む。 The number corresponding to d, the other organic layers 1 a to 1 d same number and also includes the number larger than the organic layers 1 a to 1 d. 【0029】また、各蒸着源142a〜142dは、図2(b)に示すように、いずれも、搬送手段143による相対位置可変方向と略直交する方向に延びる線状に構成されている。 Further, the evaporation source 142a~142d, as shown in FIG. 2 (b), both, are configured in a line shape extending in a direction substantially perpendicular to the relative position changing direction by the conveying means 143. つまり、各蒸着源142a〜142d In other words, each vapor deposition source 142a~142d
は、ガラス基板2の進行方向と略直交する辺の長さを充分にカバーするだけの蒸着幅を有しており、かつ、その蒸着幅の全域にわたって均一な有機材料の分布が得られるようになっている。 Has a deposition width of only enough to cover the length of the side substantially orthogonal to the traveling direction of the glass substrate 2, and, as uniform distribution of the organic material is obtained over the entire area of ​​the deposition width going on. 【0030】さらに、各蒸着源142a〜142dは、 [0030] In addition, each of the deposition source 142a~142d is,
例えばヒータ144の加熱によって有機材料を蒸発させるが、それぞれに独立した温度コントローラ145が接続しているとともに、各温度コントローラ145が成膜の厚さを膜厚センサ146によってモニタしているので、任意の蒸着レートが安定して保たれるようになっている。 For example, evaporating the organic material by heating of the heater 144, the temperature controller 145 is connected to separate each, each temperature controller 145 is monitoring the thickness sensor 146 and the thickness of the film formation, any rate of deposition is adapted to be kept stable. つまり、温度コントローラ145および膜厚センサ146によって、各蒸着源142a〜142dは、それぞれ個別に蒸着レートがコントロールされるようになっている。 In other words, the temperature controller 145 and the thickness sensor 146, the deposition source 142a~142d are each individually evaporation rate is adapted to be controlled. ただし、蒸着レートのコントロールは、温度コントローラ145等によるものに限定されることはなく、これとは別に、あるいはこれに追加して、例えば各蒸着源142a〜142dとガラス基板2との距離を個別に調整するための機構を設けることも考えられる。 However, control of the rate of deposition is not limited to those caused by the temperature controller 145 and the like, Alternatively, or in addition thereto, for example, the distance between each deposition source 142a~142d and the glass substrate 2 separate it is conceivable to provide a mechanism for adjusting the. 【0031】なお、各蒸着源142a〜142dの周囲には、将来的な有機層の増加にも容易に対応可能とすべく、予備の蒸発源設置スペースを設けておくことが望ましい。 It should be noted, around each deposition source 142a to 142d, in order to easily adaptable to an increase in the future organic layer, it is desirable to provide the evaporation source installation space for the spare. 【0032】また図1において、搬送手段143は、ガラス基板2を含む一体型の搬送治具を移動させることで、そのガラス基板2と各蒸着源142a〜142dとの相対位置を可変させるようになっている。 [0032] In FIG. 1, the transport means 143, by moving the integrated transport jig comprising a glass substrate 2, and its glass substrate 2 the relative position between the deposition source 142a~142d so as to variably going on. このとき、 At this time,
搬送手段143では、搬送治具の移動を真空中で行う必要があることや、蒸着によるゴミの問題等を考慮して、 The conveying means 143, and it is necessary to perform the movement of the conveying jig in a vacuum, in view of the problems such as the waste by evaporation,
搬送治具を搭載した台車を閉じたワイヤに接続し、そのワイヤを外部からサーボモータ等によって定速駆動して引っ張る、といったシンプルな方式を採用し、これによりその搬送治具の移動を実現することが考えられる。 Connect the closed wires equipped with trolley the conveying jig, pulling and constant speed driving the wire from the outside by a servo motor or the like, a simple method is adopted such, thereby realizing the movement of the conveying jig it is conceivable. ただし、脱ガスの対策等がなされていれば、周知技術であるボールネジやベルトコンベア等による搬送方式を用いても構わないことは勿論である。 However, if measures such as the degassing is performed, it is needless to say that may be using the transfer method using a ball screw or belt conveyor or the like are well known in the art. 【0033】次に、以上のように構成された素子製造装置における処理動作例、すなわち本発明に係る有機EL Next, the process operation example in configured device manufacturing apparatus as described above, i.e., the organic EL according to the present invention
素子の製造方法について説明する。 A method for manufacturing the device. 【0034】ガラス基板2上に有機EL素子1を形成するのにあたっては、先ず、素子製造装置の前工程、具体的にはR色アライメント部13r、G色アライメント部13gまたはB色アライメント部13bにて、ガラス基板2とメタルマスク3との精密アライメントが行われる。 [0034] In forming the organic EL element 1 on the glass substrate 2, first, prior to the step of device manufacturing apparatus, in particular R color alignment unit 13r, the G color alignment portion 13g or B color alignment unit 13b Te, precision alignment between the glass substrate 2 and the metal mask 3 is performed. この精密アライメントは、例えば、予め付されたアライメントマークを画像処理等によって検出認識することによって行われる。 This precise alignment is performed, for example, by detecting recognizing alignment mark provided in advance by the image processing and the like. そして、精密アライメントの後、 Then, after the precision alignment,
ガラス基板2とメタルマスク3とは、電磁石4による磁力を介して一体型の搬送治具を構成し、ハンドリングロボットや搬送コンベア等によって搬入口から素子製造装置の真空チャンバ141内に搬送される。 The glass substrate 2 and the metal mask 3 constitute a conveying jig integrated via a magnetic force by the electromagnet 4, is conveyed from entrance by the handling robot or conveyor or the like in the vacuum chamber 141 of the device manufacturing apparatus. 【0035】真空チャンバ141内では、例えばガラス基板2上に材料A,B,C,Dの各有機層1a〜1dを成膜する場合、これらに対応する各蒸着源142a〜1 [0035] When the inside vacuum chamber 141, which is deposited e.g. material on the glass substrate 2 A, B, C, each organic layer 1a~1d and D, each evaporation source corresponding to these 142a~1
42dが、搬送手段143による相対位置可変方向に沿って材料A,B,C,Dの順に配置されている。 42d is material A along a relative position varying direction by the conveying unit 143, B, C, are arranged in the order of D. そして、各蒸着源142a〜142dは、既に説明したように、ガラス基板2の横幅を充分にカバーする蒸着幅を持ち、かつ、均一な分布を持っている。 Each deposition source 142a~142d, as already described, having a deposition width which adequately cover the width of the glass substrate 2, and has a uniform distribution. 【0036】したがって、真空チャンバ141内に搬送された一体型の搬送治具を搬送手段143が移動させ、 [0036] Thus, by moving the carrying means 143 integral conveying jig which is conveyed into the vacuum chamber 141,
その搬送治具を構成するガラス基板2の被成膜箇所、すなわちメタルマスク3の開孔3aが穿設された部分が、 Film-forming portion of the glass substrate 2 constituting the conveying jig, i.e. the portion opening 3a of the metal mask 3 is bored,
材料A,B,C,Dの順に配置された各蒸着源142a Materials A, B, C, each evaporation source 142a disposed in the order of D
〜142dと対向する位置を順に通過すると、そのガラス基板2の被成膜箇所には、材料A,B,C,Dの順に各有機層1a〜1dが積層された状態に成膜されることになる。 ~142d door opposite position wo order two passes through the door, the glass substrate 2 Roh deposition target point second tooth, material A, B, C, D Roh order two each organic layer 1a~1d moth laminated other state two deposited the ancient city become. つまり、各有機層1a〜1dの成膜は、一体型の搬送治具が各蒸着源142a〜142d上を通過することによって、連続して行われる。 That is, the deposition of the organic layer 1a~1d, by the integral conveying jig passes over each deposition source 142a to 142d, are performed continuously. 【0037】このとき、各蒸着源142a〜142d [0037] In this case, each of the deposition source 142a~142d
は、予めの設定に従いつつ、それぞれ個別に温度コントローラ145等によって蒸着レートがコントロールされるようになっている。 , While follow the advance of the setting, so that the deposition rate is controlled by a respective individual temperature controller 145 or the like. 蒸着レートの設定は、各有機層1 Setting of the deposition rate, the organic layer 1
a〜1dの膜厚比とこれらに対応する各蒸着源142a Film thickness ratio of a~1d each deposition source 142a corresponding to these
〜142dの蒸着レートとの間の比が等しくなり、かつ、設定後の蒸着レートの値が最大になるようにする。 The ratio between the deposition rate of ~142d are equal, and the value of the deposition rate after setting is set to be maximized.
このようにするためには、有機材料の耐熱特性上最も厳しいものに蒸着レートを合わせればよい。 To do so may, combined the evaporation rate to what the most severe heat resistance of organic materials. 【0038】具体的には、以下の述べるように各蒸着源142a〜142dの蒸着レートを設定することが考えられる。 [0038] Specifically, it is considered to set the deposition rate of each deposition source 142a~142d as described below. 例えば、必要となる各有機層1a〜1dの膜厚を成膜するのに、各蒸着源142a〜142dが設定可能な最大蒸着レートで成膜を行うと、それぞれ10分、 For example, for depositing a film thickness of each organic layer 1a~1d required, when performing film formation at a maximum deposition rate can be set by each deposition source 142a to 142d, 10 minutes, respectively,
8分、12分、5分といった時間を要する場合を例に挙げる。 8 minutes, 12 minutes, given as an example the case where time-consuming, such 5 minutes. この場合、それぞれを最大蒸着レートとすると、 In this case, the respective maximum evaporation rate,
一体型の搬送治具が各蒸着源142a〜142dを一定速度で通過するため、各有機層1a〜1dが所望する膜厚とはならない。 Since the integral conveying jig passes each evaporation source 142a~142d at a constant rate, not a thickness of the organic layer 1a~1d desires. したがって、この場合に、各蒸着源1 Therefore, in this case, the deposition source 1
42a〜142dの蒸着レートは、最も時間が掛かり1 Deposition rate of 42a~142d is, we take the most time 1
2分を要する蒸着源142cに合わせ、その時間内で各有機層1a〜1dが所望する膜厚となるように設定する。 The combined deposition source 142c requiring 2 minutes, set to a thickness of each organic layer 1a~1d within that time is desired. このとき、必要ならば、ある有機層に対応する蒸着源を隣り合って2つ以上設け、全体の蒸着レートを最適効率化するようにしてもよい。 At this time, if necessary, adjacent the deposition source corresponding to a certain organic layer provided two or more, may be optimum efficiency of the whole of the evaporation rate. 【0039】なお、必要となる各有機層1a〜1dの成膜にどの程度の時間を要するかは、各蒸着源142a〜 [0039] Note that either requires how long to form each organic layer 1a~1d required, each deposition source 142a~
142dの蒸着レートと一体型の搬送治具の移動速度とから特定することができる。 It can be identified from the 142d of the vapor deposition rate and integrated travel speed of the transfer jig. このことから、搬送治具の移動速度のコントロールによって、各有機層1a〜1d Therefore, the control of the moving speed of the conveying jig, the organic layer 1a~1d
の膜厚を制御することも考えられる。 It is conceivable to control the film thickness. 【0040】このようにして、各蒸着源142a〜14 [0040] In this way, each vapor deposition source 142a~14
2d上における一体型の搬送治具の通過、すなわち各有機層1a〜1dの成膜が連続して行われると、成膜の終わった搬送治具は、ハンドリングロボットや搬送コンベア等によって、搬出口から素子製造装置の真空チャンバ141外へ搬出される。 Passing the integral transport jig on 2d, i.e. formation of each organic layer 1a~1d is continuously performed, the conveyance jig finished the film deposition, the handling robot or conveyor or the like, out opening It is carried out to the vacuum chamber 141 outside of the device manufacturing apparatus from. そして、次の色成分に対応した素子製造装置へ送られて、再び上述した場合と同様の精密アライメントおよび成膜処理が行われる。 Then, sent to the next device manufacturing apparatus corresponding to the color components is performed precise alignment and deposition process similar to the case described above again. これを繰り返すことによって、ガラス基板2上には、R,G,Bの各色成分に対応した有機EL素子1が縦横に配列されるのである。 By repeating this, on the glass substrate 2 is the R, G, organic EL elements 1 corresponding to each color component of B is arranged vertically and horizontally. 【0041】以上のように、本実施形態で説明した有機EL素子1の製造方法およびこれを実行する素子製造装置によれば、並列配置された複数の蒸着源142a〜1 [0041] As described above, according to the manufacturing method and the device manufacturing apparatus for executing this organic EL device 1 described in this embodiment, a plurality of evaporation sources arranged in parallel 142a~1
42dと対向する位置を順に通過するように、ガラス基板2を含む一体型の搬送治具を移動させて、そのガラス基板2上の被成膜箇所に各有機層1a〜1dを順次積層させるようになっている。 So as to pass 42d a position opposed to the order, so that by moving the integrated transport jig comprising a glass substrate 2, sequentially to stack the organic layer 1a~1d deposition target locations on a glass substrate 2 It has become. すなわち、ガラス基板2上の被成膜箇所には、そのガラス基板2が各蒸着源142a That is, the deposition target locations on the glass substrate 2, the glass substrate 2 each deposition source 142a
〜142dと対向する位置を順に通過する度に、各蒸着源142a〜142dからの蒸着材料による成膜が行われることになる。 Each time it passes through the position facing the ~142d sequentially, so that the film formation by vapor deposition material from each deposition source 142a~142d is performed. 【0042】したがって、本実施形態の有機EL素子1 [0042] Thus, the present embodiment the organic EL element 1
の製造方法および素子製造装置によれば、ガラス基板2 According to the method of manufacturing and device manufacturing apparatus, a glass substrate 2
上への各有機層1a〜1dの成膜にあたり、各蒸着源1 On the fart Roh each organic layer 1a~1d Roh deposition Niatari, each vapor deposition source 1
42a〜142dに対する処理準備(温度上昇や蒸着レートの安定化等)を略同時に行うことができる。 Processing preparation for 42a~142d the (stabilization of the temperature rise and the evaporation rate or the like) substantially can be carried out simultaneously. そのため、各有機材料毎に温度上昇を行ったり蒸発レートの安定化を行ったりする時間が余分に必要となることがないので、各有機層1a〜1dの迅速な成膜が実現可能となり、結果として有機EL素子1を製造する上でのタクトタイム向上が期待できる。 Therefore, since no time or perform a stabilization of the evaporation rate or the temperature was increased for each organic material is additionally required, rapid formation of the organic layer 1a~1d becomes feasible, result tact time increase in manufacturing an organic EL element 1 as can be expected. 【0043】具体的には、上述した場合と同様、例えば四層構造の各有機層1a〜1dの膜厚を成膜するのに、 [0043] Specifically, as in the case described above, for example, for depositing a film thickness of each organic layer 1a~1d of four-layer structure,
各蒸着源142a〜142dが設定可能な最大蒸着レートで成膜を行うと、それぞれ10分、8分、12分、5 When each deposition source 142a~142d performs film formation at a maximum evaporation rate settable, 10 min each, 8 minutes, 12 minutes, 5
分といった時間を要する場合を例に挙げる。 Minute Toitta time wo required if wo example two listed. この場合、 in this case,
従来の手法であると、10分+8分+12分+5分=合計35分を要することが考えられるが、本実施形態の製造方法および素子製造装置によれば、最も時間の掛かる蒸着レートに合わせるため、12分+蒸着源142a〜 If it is a conventional technique, it is conceivable to take a 10-minute +8 min +12 min + 5 min = total of 35 minutes, according to the manufacturing method and the device manufacturing apparatus of this embodiment, to match the evaporation rate consuming most time , 12 minutes + deposition source 142a~
142d全体の通過時間8分=合計20分となり、結果として約40%のタクトタイム短縮を実現することができる。 Becomes 142d overall transit time 8 min = a total of 20 minutes, it is possible to realize about 40% tact time as a result. 【0044】しかも、本実施形態の有機EL素子1の製造方法および素子製造装置によれば、各蒸着源142a [0044] Moreover, according to the manufacturing method and the device manufacturing apparatus of an organic EL device 1 of the present embodiment, the deposition sources 142a
〜142dと対向する位置をガラス基板2が順に通過することによって、各有機層1a〜1dの成膜が連続して行われるので、各蒸着源142a〜142dからの蒸着材料が無駄なく成膜に用いられることになる。 By the position facing the ~142d glass substrate 2 passes sequentially, the deposition of the organic layer 1a~1d is continuously performed, the deposition without waste evaporation material from each deposition source 142a~142d It is to be used. 各蒸着源142a〜142dにおける材料消費量の効率向上化が図れ、タクトタイムの短縮と同様の材料消費率の削減が見込まれるので、従来よりも有機EL素子1のコスト削減を実現し得ることが期待できる。 Each vapor deposition source 142a~142d Niokeru material consumption amount field efficiency improvement mosquito moth Hakare, tact time Roh shortening door same field material consumption rate Roh reduction moth expected to be Node, conventional more mourning the organic EL element 1 mounting cost reduction Wo realized to get ancient city moth It can be expected. 【0045】さらに、本実施形態の有機EL素子1の製造方法および素子製造装置では、一つの真空チャンバ1 [0045] Further, in the manufacturing method and device manufacturing apparatus of an organic EL element 1 of this embodiment, one of the vacuum chamber 1
41内で複数の有機層1a〜1dの成膜を連続して行うようになっているので、有機層1a〜1dが多層化する場合であっても一つの真空チャンバ141があれば済む。 Since has a deposition of a plurality of organic layers 1a~1d to perform continuously in the 41, it suffices to any one of the vacuum chamber 141 even when the organic layer 1a~1d is multilayered. すなわち、多くの真空チャンバを必要としなくても、成膜処理の迅速化や材料消費量の効率向上化等が図れる。 That is, without requiring more vacuum chamber, faster and improved efficiency of material consumption in the film forming process can be achieved. したがって、設備コストや設置スペース等の増加を招くことなく、有機EL素子1の製造タクトタイム向上やコスト削減等を実現することが可能となる。 Accordingly, without increasing the other equipment cost and installation space, it is possible to realize the production tact time improvement and cost reduction of the organic EL element 1. 【0046】また、本実施形態の素子製造装置では、各蒸着源142a〜142dが搬送手段143による相対位置可変方向と略直交する方向に延びる線状に構成されている。 [0046] Furthermore, in device manufacturing apparatus of this embodiment, the deposition source 142a~142d is configured linearly extending in a direction substantially orthogonal to the relative position changing direction by the conveying means 143. したがって、当該直交方向において各有機層1 Accordingly, each organic layer in the orthogonal direction 1
a〜1dの膜厚が均一化するので、各有機層1a〜1d Since the thickness of a~1d becomes uniform, the organic layer 1a~1d
を連続して成膜する場合であっても、それぞれの膜厚精度等を確保するのが非常に容易となる。 Even when a film is formed continuously, it is to ensure the film thickness accuracy and the like becomes very easy. ただし、各蒸着源142a〜142dは、上述したような線状に構成することが望ましいが、必ずしも線状である必要はなく、 However, the deposition source 142a~142d, it is desirable to configure a line shape as described above, need not necessarily be linear,
例えば点状に構成されたものであっても、それらを並設すれば、製造タクトタイム向上やコスト削減等が実現可能となる。 For example, even those that are configured point-like, if they juxtaposed production tact time improvement and cost reduction, etc. can be achieved. 【0047】また、本実施形態の素子製造装置では、搬送手段143が一体型の搬送治具を移動させることで、 Further, in the device manufacturing apparatus of this embodiment has a carry unit 143 by moving the conveying jig integral,
ガラス基板2と各蒸着源142a〜142dとの相対位置を可変させるようになっている。 A glass substrate 2 the relative position between the deposition source 142a~142d adapted to vary. したがって、その相対位置可変を、シンプルな方式で、かつ、高精度に行うことが、非常に容易となる。 Therefore, the relative position varying, in a simple manner, and to perform with high accuracy, is very easy. ただし、ガラス基板2ではなく、各蒸着源142a〜142dを移動させても構わないことはいうまでもない。 However, the glass substrate 2 without, of course, may be moved each deposition source 142a to 142d. 【0048】また、本実施形態の素子製造装置では、各蒸着源142a〜142dに対応して温度コントローラ145等を設けることによって、各蒸着源142a〜1 [0048] Furthermore, in device manufacturing apparatus of this embodiment, by providing the temperature controller 145 or the like corresponding to each deposition source 142a to 142d, each evaporation source 142a~1
42d毎に個別に蒸着レートをコントロールし得るようになっている。 And it is able to control the individual deposition rates per 42d. したがって、一体型の搬送治具が各蒸着源142a〜142d上を一定速度で通過しても、各有機層1a〜1dの膜厚を所望値に成膜することが可能となる。 Therefore, it is possible to form even through integral conveying jig of the above each evaporation source 142a~142d at a constant speed, the thickness of each organic layer 1a~1d to the desired value. さらには、各蒸着源142a〜142d毎に膜厚のモニタ結果を基にしたフィードバック制御等を行うことも可能となるので、より一層成膜の高精度化を実現し得るようにもなる。 Further, since it is possible to perform feedback control or the like based on the thickness of the monitoring results for each deposition source 142a to 142d, it becomes also adapted to achieve a further high accuracy of film deposition. 【0049】また、本実施形態で説明した有機ELディスプレイの製造システムおよびその製造システムを用いた製造方法によれば、ガラス基板2、メタルマスク3および電磁石4からなる搬送治具が、それぞれ異なる色成分に対応したR色成膜部14r、G色成膜部14gおよびB色成膜部14bを順に通過するようになっている。 [0049] According to the manufacturing method using the organic EL display manufacturing system and the manufacturing system described in the present embodiment, the glass substrate 2, the conveying jig made of metal mask 3 and the electromagnet 4, different colors R IroNarumaku portion 14r corresponding to the component, so as to pass through the G IroNarumaku portion 14g and the B IroNarumaku portion 14b in this order.
したがって、R,G,Bの各色成分に対応した有機EL Thus, R, G, organic EL corresponding to each color component of B
素子1からなる有機ELディスプレイを連続的に構成することが可能となり、しかもその際に各有機EL素子1 It is possible to continuously forming the organic EL display comprising a device 1, moreover the organic EL element 1 at that time
について上述したように成膜処理準備や蒸着材料消費量の効率化等が実現可能となる。 Efficiency in the film forming process preparation and deposition material consumption as described above can be realized for. 【0050】さらに、本実施形態の製造システムによれば、R色アライメント部13r、G色アライメント部1 [0050] Further, according to the manufacturing system of this embodiment, R color alignment unit 13r, G color alignment unit 1
3gおよびB色アライメント部13bが各色に対応したアライメントを個別に行うので、R色成膜部14r、G Since the alignment 3g and B color alignment portion 13b corresponding to each color individually, R IroNarumaku unit 14r, G
色成膜部14gおよびB色成膜部14bが連続的に各色の有機EL素子1を形成する場合であっても、各色に対応したパターニング成膜を適切に行うことが可能となる。 Even when the IroNarumaku portion 14g and the B IroNarumaku portion 14b forms a continuous organic EL element 1 of each color, it is possible to appropriately perform patterning deposition corresponding to each color. 【0051】また、本実施形態の製造システムによれば、リターン部16の存在によって閉ループ構造を構築されていることから、搬送治具が当該閉ループ内を循環することになる。 [0051] Further, according to the manufacturing system of the present embodiment, because it is constructed a closed loop structure by the presence of the return portion 16, so that the conveying jig is circulated within the closed loop. したがって、各色成分に対応した有機EL素子1を連続的に形成する場合であっても、その一連の流れの完全自動化が実現可能となり、有機ELディスプレイの製造の効率化を図る上で非常に好適なものとなる。 Therefore, even when the organic EL element 1 corresponding to each color component formed continuously, the full automation of the series of flow becomes feasible, very suitable in achieving the efficiency of manufacturing an organic EL display become a thing. 【0052】特に、本実施形態で説明したように、閉ループ構造を方形状とした場合には、リターン部16による搬送治具の移動距離を最も短くすることができ、しかも製造システムの設置面積も省スペース化が可能となることから、結果としてシステム構成の小型化や低コスト化等が実現容易となる。 [0052] In particular, as described in the present embodiment, when the closed-loop structure and rectangular shape can be the shortest movement distance of the transfer jig by the return portion 16, moreover also footprint of the manufacturing system since the space saving is made possible, the result size and cost and the like of the system configuration is facilitated implemented as. 【0053】なお、本実施形態では、本発明の実施の好適な具体例を挙げて説明したが、本発明はこれに限定されるものではなく、種々変形することが可能である。 [0053] In the present embodiment has been described using a preferred embodiment of the present invention, the present invention is not limited thereto and may be variously modified. すなわち、本実施形態で説明した素子製造装置を構成する一連の構成要素の材質、形状、動作機構等は、必ずしもこれらに限られるものではなく、各構成要素の機能を同様に確保することが可能な限り、自由に変更可能である。 That is, the material of the set of components constituting the device manufacturing apparatus described in the present embodiment, the shape, operation mechanism, etc. is not necessarily limited thereto, can be similarly ensured function of each component as long as such, it can be freely changed. この場合においても、本実施形態の場合と同様の効果を得ることができる。 In this case, it is possible to obtain the same effects as the present embodiment. 例えば、本実施形態では、板状のガラス基板2上に有機EL素子1を形成する場合を例に挙げて説明したが、樹脂材料からなるフィルム素材等のようなロール状の基板であっても、全く同様に対応することができる。 For example, in the present embodiment has been described taking a case of forming the organic EL element 1 on the plate-like glass substrate 2 as an example, be a roll-shaped substrate such as a film material such as made of a resin material It may correspond quite similarly. 【0054】 【発明の効果】以上に説明したように、本発明に係る有機EL素子の製造方法および製造装置並びに有機EL素子を用いた表示装置の製造システムおよび製造方法では、並列配置された複数の蒸着源と対向する位置を順に通過するように、有機EL素子が成膜される基板と各蒸着源との相対位置を可変させて、その基板上の被成膜箇所に複数層を順次積層させるようになっているので、従来に比べて短いタクトタイムおよび少ない材料消費量での成膜が可能となり、結果として迅速かつ低コストで有機EL素子を製造することができるようになる。 [0054] As described above, according to the present invention, a plurality in the manufacturing system and manufacturing process of a manufacturing method and a manufacturing apparatus and a display apparatus using the organic EL element of the organic EL element according to the present invention, arranged in parallel the position of the evaporation source of the facing so as to pass sequentially, the relative position between the substrate and the deposition source organic EL element is formed by a variable, sequentially stacking a plurality of layers to be deposited position of the substrate since adapted to, film formation becomes possible in a short tact time and less material consumption compared to the conventional, it is possible to manufacture an organic EL device quickly and cost as a result.

【図面の簡単な説明】 【図1】本発明に係る製造装置の概略構成例を示す模式図である。 It is a schematic diagram showing a schematic configuration example of the drawings: Figure 1 manufacturing apparatus according to the present invention. 【図2】本発明に係る製造装置の要部の構成例を示す模式図であり、(a)はその要部を正面から見た図、 Figure 2 is a schematic diagram showing an example of a configuration of part of the manufacturing apparatus according to the present invention, (a) is a view of the main portion thereof from the front,
(b)はその要部を側面からみた図である。 (B) is a view of the main portion from the side. 【図3】本発明に係る製造装置によって製造される有機EL素子の概略構成例を示す模式図である。 3 is a schematic diagram showing a schematic configuration example of the organic EL device manufactured by the manufacturing apparatus according to the present invention. 【図4】有機EL素子を製造する際に用いられる搬送治具の概略構成例を示す模式図である。 4 is a schematic diagram showing a schematic configuration example of a conveying jig used for manufacturing the organic EL element. 【図5】本発明に係る有機EL素子を用いた表示装置の製造システムの構成例を示す模式図である。 5 is a schematic view showing a configuration example of a manufacturing system of a display device using an organic EL element according to the present invention. 【符号の説明】 1…有機EL素子、1a,1b,1c,1d…有機層、 [Description of Reference Numerals] 1 ... organic EL element, 1a, 1b, 1c, 1d ... organic layer,
2…ガラス基板、3…メタルマスク、14r…R色成膜部、14g…G色成膜部、14b…B色成膜部、141 2 ... glass substrate, 3 ... metal mask, 14r ... R IroNarumaku portion, 14 g ... G IroNarumaku portion, 14b ... B IroNarumaku unit, 141
…真空チャンバ、142a,142b,142c,14 ... vacuum chamber, 142a, 142b, 142c, 14
2d…蒸着源、143…搬送手段、144…ヒータ、1 2d ... vapor deposition source, 143 ... transfer means, 144 ... heater, 1
45…温度コントローラ、146…膜厚センサ 45 ... temperature controller, 146 ... the film thickness sensor

───────────────────────────────────────────────────── フロントページの続き (72)発明者 山口 優 東京都品川区北品川6丁目7番35号 ソニ ー株式会社内Fターム(参考) 3K007 AB18 DB03 FA01 4K029 AA09 BA62 BB02 BB03 BC07 CA01 DA12 DB14 HA03 KA01 ────────────────────────────────────────────────── ─── front page of the continuation (72) inventor Suguru Yamaguchi, Shinagawa-ku, Tokyo Kita 6-chome No. 7 No. 35 Sony over Co., Ltd. in the F-term (reference) 3K007 AB18 DB03 FA01 4K029 AA09 BA62 BB02 BB03 BC07 CA01 DA12 DB14 HA03 KA01

Claims (1)

  1. 【特許請求の範囲】 【請求項1】 基板上に複数層が順次積層されてなる有機電界発光素子の製造方法であって、 並列配置された複数の蒸着源と対向する位置を順に通過するように、前記基板と前記複数の蒸着源との相対位置を可変させて、当該基板上の被成膜箇所に前記複数層を積層させることを特徴とする有機電界発光素子の製造方法。 [Claims field range is claimed is: 1. A board above two multiple layers moth sequentially stacked hand-made organic light emitting element mounting method for manufacturing out a hand, arranged in parallel other multiple field evaporation source door opposite position wo order two-pass to Yo to the relative positions of the plurality of deposition source and the substrate by varying, a method of manufacturing an organic electroluminescent device, characterized in that for stacking the plurality of layers to be deposited position on the substrate. 【請求項2】 基板上に複数層が順次積層されてなる有機電界発光素子の製造装置であって、 前記複数層に対応する複数の蒸着源が並べて配設されているとともに、 前記基板上の被成膜箇所が前記複数の蒸着源と対向する位置を順に通過するように当該基板と前記複数の蒸着源との相対位置を可変させる搬送手段が設けられていることを特徴とする有機電界発光素子の製造装置。 2. A manufacturing apparatus of an organic electroluminescent device multiple layers on a substrate, which are sequentially laminated, with being arranged side by side a plurality of deposition sources corresponding to the plurality of layers, on the substrate the organic electroluminescent the deposition portion, characterized in that the conveying means for varying the relative position between the substrate and the plurality of deposition source so as to pass the position facing the plurality of deposition source is sequentially provided apparatus for manufacturing a device. 【請求項3】 前記複数の蒸着源は、いずれも前記搬送手段による相対位置可変方向と略直交する方向に延びる線状に構成されたものであることを特徴とする請求項2 Wherein the plurality of deposition sources claim 2, characterized in that the both are configured relative position varying direction substantially orthogonal linear shape extending in a direction by the conveying unit
    記載の有機電界発光素子の製造装置。 Apparatus for producing an organic electroluminescent device according. 【請求項4】 前記搬送手段は、前記基板を移動させることで当該基板と前記複数の蒸着源との相対位置を可変させるものであることを特徴とする請求項2記載の有機電界発光素子の製造装置。 Wherein said conveying means, of the organic electroluminescent device of claim 2, wherein a by moving the substrate is intended to vary the relative position between the between the substrate a plurality of deposition sources manufacturing device. 【請求項5】 前記複数の蒸着源毎に個別に蒸着レートをコントロールする制御手段が設けられていることを特徴とする請求項2記載の有機電界発光素子の製造装置。 According to claim 5, wherein the plurality field evaporation source every two individual two-deposition rate wo control control means moth provided hands are ancient city wo feature door to claim 2, wherein Roh organic light emitting element mounting production equipment. 【請求項6】 基板上に複数層が順次積層されてなる有機電界発光素子を用いた表示装置の製造システムであって、 前記複数層に対応する複数の蒸着源が並べて配設されているとともに、前記基板上の被成膜箇所が前記複数の蒸着源と対向する位置を順に通過するように当該基板と前記複数の蒸着源との相対位置を可変させる搬送手段が設けられている有機電界発光素子の製造装置を複数備え、 各製造装置がそれぞれ異なる色成分に対応した有機電界発光素子を形成するように構成されたことを特徴とする有機電界発光素子を用いた表示装置の製造システム。 Multiple layers wherein the substrate is a manufacturing system of a display device using an organic electroluminescent device formed by sequentially stacking, together are disposed a plurality of deposition source is arranged corresponding to the plurality of layers the organic electroluminescent the conveying means which the deposition point on the substrate to vary the relative position between the substrate and the plurality of deposition source so as to pass the position facing the plurality of deposition source is sequentially provided a plurality of manufacturing devices of the device manufacturing system of a display device each manufacturing apparatus using an organic electroluminescence device characterized by being configured to form an organic electroluminescent elements corresponding to different color components, respectively. 【請求項7】 前記基板および当該基板上の被成膜箇所のパターニングに用いられるマスクが各製造装置を順に通過するように構成されたことを特徴とする請求項6記載の有機電界発光素子を用いた表示装置の製造システム。 7. The organic electroluminescent device of claim 6, wherein a mask used to pattern the deposition target portion of the substrate and the substrate is configured to pass through each manufacturing apparatus in order manufacturing system of a display device using. 【請求項8】 各製造装置それぞれの前段に前記基板と前記マスクとの位置合わせを行うアライメント装置が配設されていることを特徴とする請求項7記載の有機電界発光素子を用いた表示装置の製造システム。 8. A display device using an organic electroluminescent device of claim 7, wherein the alignment alignment apparatus for performing the substrate and the mask in front of each respective manufacturing device is arranged manufacturing system. 【請求項9】 複数の製造装置および各製造装置に対応して配設されたアライメント装置に加えて、最後段の製造装置を通過したマスクを最前段のアライメント装置へ供給するリターン装置を備え、各製造装置、各アライメント装置およびリターン装置によって閉ループ構造が構築されていることを特徴とする請求項8記載の有機電界発光素子を用いた表示装置の製造システム。 9. In addition to the plurality of manufacturing apparatuses and alignment device disposed corresponding to each production unit, provided with a return device for supplying a mask that has passed through the apparatus for manufacturing a final stage to the foremost stage of the alignment device, manufacturing system of the manufacturing apparatus, the alignment device and a display device closed loop structure using the organic electroluminescent element according to claim 8, characterized in that it is constructed by a return device. 【請求項10】 前記閉ループ構造は、各製造装置およびリターン装置が各アライメント装置を頂点とする方形状に配されることで構築されていることを特徴とする請求項9記載の有機電界発光素子を用いた表示装置の製造システム。 Wherein said closed loop structure, the organic electroluminescent device of claim 9, wherein each piece of manufacturing equipment and the return device is characterized in that it is constructed by being placed in rectangular shape having vertices each alignment device manufacturing system of a display device using the. 【請求項11】 基板上に複数層が順次積層されてなる有機電界発光素子を用いた表示装置の製造方法であって、 並列配置された複数の蒸着源と対向する位置を順に通過するように、前記基板と前記複数の蒸着源との相対位置を可変させ、当該基板上の被成膜箇所に前記複数層を積層させて一つの色成分に対応する有機電界発光素子を形成し、 これを前記基板上の被成膜箇所を相違させて複数回繰り返すことにより、前記基板上に複数の色成分に対応する各有機電界発光素子が配設されてなる表示装置を構成することを特徴とする有機電界発光素子を用いた表示装置の製造方法。 11. Multiple layers on a substrate A method of manufacturing a display device using an organic electroluminescent device formed by sequentially stacking, so as to pass through the position facing the plurality of evaporation sources arranged in parallel in this order , the substrate and by varying the relative positions of the plurality of deposition source to form an organic light emitting elements corresponding to the plurality of layers one color component by stacking deposition target locations on the substrate, it by repeating a plurality of times by different the deposition target point on the substrate, characterized in that each organic electroluminescent elements corresponding to the plurality of color components on said substrate constituting a display device arranged therein method of manufacturing a display device using an organic electroluminescent device.
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