JP2003147509A - Crucible for vapor deposition, and method for using it - Google Patents
Crucible for vapor deposition, and method for using itInfo
- Publication number
- JP2003147509A JP2003147509A JP2002251646A JP2002251646A JP2003147509A JP 2003147509 A JP2003147509 A JP 2003147509A JP 2002251646 A JP2002251646 A JP 2002251646A JP 2002251646 A JP2002251646 A JP 2002251646A JP 2003147509 A JP2003147509 A JP 2003147509A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vapor deposition
- cavity
- sintered
- stepped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、焼結ペレットとし
て形成された蒸着材料を収容するための蒸着用るつぼお
よびその使用方法に関する。FIELD OF THE INVENTION The present invention relates to a vapor deposition crucible for containing a vapor deposition material formed as sintered pellets and a method of using the same.
【０００２】[0002]
【従来の技術】電子ビームを熱源として蒸着材料を溶
融、蒸発させ、基板、眼鏡用レンズ等の蒸着対象物に蒸
着材料を蒸着する蒸着装置は、水冷銅ハース内に上部が
開放した蒸着用るつぼを設置し、これに焼結ペレットと
して形成された蒸着材料を装填し、真空雰囲気中で電子
ビームを焼結ペレットの上方から照射して焼結ペレット
を溶融、蒸発させることにより、蒸着対象物の蒸着を行
うようにしている。2. Description of the Related Art An evaporation apparatus for melting and evaporating an evaporation material by using an electron beam as a heat source to evaporate the evaporation material on an object to be evaporated such as a substrate and a lens for eyeglasses is a water-cooled copper hearth with an upper opening for the evaporation crucible. Is installed, and the vapor deposition material formed as a sintered pellet is loaded into this, and the electron beam is irradiated from above the sintered pellet in a vacuum atmosphere to melt and evaporate the sintered pellet. I try to vapor deposition.
【０００３】蒸着が終了すると、蒸着材料は冷えて固ま
るが、焼結ペレットの溶融部分がるつぼ内壁に接触した
状態で冷えて固まると、その部分はるつぼ内壁に固着す
る。この固着部分のるつぼに対する接合強度は強固であ
るため、るつぼを再利用するには適宜な工具で焼結ペレ
ットの溶融固化した部分を叩いて破砕し、るつぼから焼
結ペレットを離脱させ、さらに、るつぼの内壁面に残っ
ている小片についても適宜な工具で叩いたり、掻き落と
す等して取り除く必要がある。しかし、この作業は大変
困難であり、しかも強引に破砕して離脱させようとする
と、るつぼが変形したり破損するという問題がある。し
たがって、蒸着用るつぼは、蒸着後に焼結ペレットを離
脱させ易い形状、構造であることが要求される。When vapor deposition is completed, the vapor deposition material cools and solidifies, but when the molten portion of the sintered pellet cools and solidifies in contact with the inner wall of the crucible, that portion adheres to the inner wall of the crucible. Since the bonding strength of this fixed portion to the crucible is strong, in order to reuse the crucible, the molten and solidified portion of the sintered pellet is crushed by beating with an appropriate tool, and the sintered pellet is separated from the crucible, and further, Small pieces left on the inner wall surface of the crucible also need to be removed by tapping or scraping with an appropriate tool. However, this work is extremely difficult, and there is a problem in that the crucible is deformed or damaged when it is forcibly crushed and then separated. Therefore, the vapor deposition crucible is required to have a shape and structure that allow the sintered pellets to be easily separated after vapor deposition.
【０００４】そこで、この種の蒸着用るつぼとしては従
来から種々提案されている。例えば、実開平３−１８１
６２号公報に記載された蒸着用るつぼは、るつぼの上部
および下部を開放し、焼結ペレットを収容する空洞を実
質的に断面円形の空洞としてその内径を焼結ペレットの
外径と略同一にしている。Therefore, various kinds of vapor deposition crucibles have heretofore been proposed. For example, 3-181
In the crucible for vapor deposition described in Japanese Patent Laid-Open No. 62, the upper part and the lower part of the crucible are opened, and the cavity for accommodating the sintered pellets is made a cavity having a substantially circular cross section so that its inner diameter is substantially the same as the outer diameter of the sintered pellets. ing.
【０００５】また、実公平６−９０１１号公報に記載さ
れた蒸着用るつぼは、るつぼの上部および下部を開放
し、焼結ペレットを収容するるつぼの内部空間を、上部
から下部に向かって先細になるようにその側壁を傾斜さ
せている。Further, in the crucible for vapor deposition described in Japanese Utility Model Publication No. 6-9011, the upper and lower parts of the crucible are opened, and the inner space of the crucible for containing the sintered pellets is tapered from the upper part to the lower part. The side wall is inclined so that
【０００６】[0006]
【発明が解決しようとする課題】上記した実開平３−１
８１６２号公報に記載されている蒸着用るつぼは、るつ
ぼの上部および下部が開放しているため、上下どちら側
からでも工具を挿入でき、しかもストレートな孔なので
開口側から内壁に対し平行な方向に力を加える場合はそ
の方向にるつぼ内壁がないためるつぼが変形し難く、蒸
着物質の取り除き作業がし易くなる。なお、この取り除
き作業には適宜な径の金属製の棒（突出し棒）等適宜な
工具が使用される。しかし、加熱溶融後、冷えて固化し
た部分はるつぼの内壁面に対する接触面積が広くて接合
強度が大きく、突出し棒を使用しても冷却固化した部分
を破砕することが難しい場合があり、強引に破砕して離
脱させようとするとるつぼが変形してしまい、るつぼの
寿命を短くするという問題があった。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
The vapor deposition crucible described in Japanese Patent No. 8162 has an open upper and lower portion of the crucible, so that a tool can be inserted from either the upper side or the lower side, and since it is a straight hole, it is parallel to the inner wall from the opening side. When a force is applied, the crucible does not have an inner wall in that direction, so that the crucible is unlikely to be deformed, and the work of removing the vapor deposition substance is facilitated. An appropriate tool such as a metal rod (protruding rod) having an appropriate diameter is used for this removing work. However, after heating and melting, the cooled and solidified part has a large contact area with the inner wall surface of the crucible and has a large joining strength, and it may be difficult to crush the cooled and solidified part even if a protruding rod is used. There is a problem that the crucible is deformed when it is crushed and then separated, and the life of the crucible is shortened.
【０００７】上記した実公平６−９０１１号公報に記載
された蒸着用るつぼは、内壁が下方に向かって先細とな
るように傾斜しているため、柱状の焼結ペレットを挿入
すると、焼結ペレット側面とるつぼ内壁面との間に隙間
が生じる。溶融した蒸着材料がペレットの側面をつたっ
て下方に流れ落ちない場合は容易に焼結ペレットを取り
除けるが、下方に流れ落ちた場合には、ペレット側面と
るつぼ内壁面との間の隙間に溜まるため、前記実開平３
−１８１６２号公報の場合と同様接触面積が広く接合強
度が大きくなり、蒸着物質を破砕することが難しい。Since the inner wall of the crucible for vapor deposition described in Japanese Utility Model Publication No. 6-9011 is inclined so that the inner wall is tapered downward, when a columnar sintered pellet is inserted, the sintered pellet is A gap is created between the side surface and the inner wall surface of the crucible. If the molten vapor deposition material does not flow down to the side surface of the pellet, the sintered pellet can be easily removed, but if it flows down, it accumulates in the gap between the side surface of the pellet and the inner wall surface of the crucible. Actual Kaihei 3
As in the case of Japanese Patent No. 18162, the contact area is wide and the bonding strength is large, and it is difficult to crush the vapor deposition material.
【０００８】また、柱状焼結ペレットの下端縁のみが内
壁面に接触する状態で支承されているに過ぎないため
に、焼結ペレット自体が傾き易く、加熱によって溶融し
た蒸着材料がるつぼの内壁面と焼結ペレット下端縁との
隙間を通って下方に流れ落ちて損失が多くなる場合があ
った。この場合、蒸着材料が足りなくなったり、焼結ペ
レットの溶融面が下がり過ぎてしまい、これにより電子
線の当たる位置も中央からずれてしまうことも加わり、
蒸着膜が均一に成膜されないという問題がおきる。ま
た、水冷銅ハース内に流れ落ちた蒸着物質を取り除く作
業も必要になる。なお、このような内壁が傾斜している
るつぼから焼結ペレットを取り除く時に、るつぼ上部の
開口部から突出し棒を押し込むと、焼結ペレットを内壁
に押し付けることになり、無理に力を加えるとるつぼを
変形させてしまうため、下部開放部から押し込む必要が
ある。Further, since only the lower end of the columnar sintered pellet is supported in contact with the inner wall surface, the sintered pellet itself is prone to tilt, and the vapor deposition material melted by heating is deposited on the inner wall surface of the crucible. In some cases, the loss flowed downward through the gap between the lower edge of the sintered pellet and the loss. In this case, the vapor deposition material is insufficient, or the melting surface of the sintered pellet is lowered too much, which also causes the position of the electron beam to be displaced from the center,
There is a problem that the vapor deposition film is not formed uniformly. In addition, it is necessary to remove the deposition material that has flowed down into the water-cooled copper hearth. In addition, when removing the sintered pellets from the crucible whose inner wall is inclined, if you push the rod protruding from the opening in the upper part of the crucible, the sintered pellets will be pressed against the inner wall, and force will be applied to the crucible. Since it deforms, it is necessary to push in from the lower opening.
【０００９】上記したようなるつぼ内壁と蒸着物質との
接合の程度は、蒸着物質の組成、るつぼの材質、加熱条
件等により変わるが、一般に蒸着物質の熱伝導率が高い
と電子線が当たった部分の周りに熱が伝わり易く、るつ
ぼ内壁付近の溶融量が増え、接合面積が大きくなり、よ
り一層結合強度が増す。このため、このような熱伝導率
の高い蒸着物質を使う場合には従来のるつぼではさらに
取り除くのが困難であった。なお、熱伝導率の高い蒸着
物質の例としては酸化ニオブがある。The degree of bonding between the inner wall of the crucible and the vapor deposition material as described above varies depending on the composition of the vapor deposition material, the material of the crucible, the heating conditions, etc. Generally, when the thermal conductivity of the vapor deposition material is high, the electron beam hits. Heat is easily transmitted around the portion, the amount of melting near the inner wall of the crucible increases, the joint area increases, and the bond strength further increases. For this reason, when using such a vapor deposition material having a high thermal conductivity, it is difficult to further remove it with a conventional crucible. Note that niobium oxide is an example of an evaporation material having high thermal conductivity.
【００１０】本発明は上記した従来の問題を解決するた
めになされたもので、その目的とするところは、蒸着後
の焼結ペレットの溶融固化した部分を容易に破砕するこ
とができ、焼結ペレットを容易にるつぼから取り除くこ
とができるようにした蒸着用るつぼおよびその使用方法
を提供することにある。The present invention has been made in order to solve the above-mentioned conventional problems, and an object thereof is to make it possible to easily crush the melted and solidified portion of the sintered pellet after vapor deposition and It is an object of the present invention to provide a crucible for vapor deposition, in which pellets can be easily removed from the crucible, and a method of using the crucible.
【００１１】[0011]
【課題を解決するための手段】上記目的を達成するため
に第１の発明は、上方および下方に開放し、蒸着材料か
らなる焼結ペレットを収容する空洞を有する蒸着用るつ
ぼにおいて、前記空洞を前記焼結ペレットが嵌合する第
１の空洞部と、この第１の空洞部の上側に設けられ前記
焼結ペレットとの間に隙間を形成する第２の空洞部とで
構成し、第１、第２の空洞部の接続部に段状部を設けた
ものである。In order to achieve the above object, the first invention is a vapor deposition crucible which is opened upward and downward and has a cavity for containing a sintered pellet made of a vapor deposition material. A first hollow portion into which the sintered pellet fits; and a second hollow portion provided above the first hollow portion and forming a gap between the first hollow portion and the first hollow portion. A stepped portion is provided at the connecting portion of the second hollow portion.
【００１２】第１の発明において、第２の空洞部と焼結
ペレットとの間の隙間は、焼結ペレットの加熱によって
溶けた蒸着材料の溜まり部となり、溶融した蒸着材料を
径方向に拡径し厚さを薄くする。溶けた蒸着材料が隙間
に溜まる前に蒸着が終了すると、段状部より上側では、
溶融固化した部分がるつぼの内壁面と接触しないか、接
触していたとしてもその接合面積は小さく、また焼結ペ
レットが段状部の上側にはみ出している分だけ、段状部
より下側の溶融固化部分の内壁面に対する接合面積が小
さくてすむため、焼結ペレットを離脱させ易い。また、
溶融した蒸着材料が隙間に流れ込んで溜まると、半径方
向外方に広がって厚さが薄くなり、残存する焼結ペレッ
トに力を加えたときに、段状部の角部付近に対応する溶
融固化した部分が応力の集中箇所となる。したがって、
この部分が最も破砕され易く、一部でも破砕した場合に
は、接合強度が急激に低下するため取り除き易くなる。
第１の空洞部と焼結ペレットとの隙間は極力小さい方が
溶融した蒸着材料がその隙間に流れ込まないという点で
好ましいが、るつぼは通常熱伝導率の高い金属（例え
ば、銅）からなり、しかも水冷銅ハースと部分的に接触
して冷やされているので、多少の隙間であればあまり流
れ込まずに固まるので問題ない。「段状部」とは、断面
形状が第１、第２の空洞部の間で段状になっている部分
を意味し、段の数は１つに限らず２つ以上であってもよ
い。In the first invention, the gap between the second hollow portion and the sintered pellet becomes a pool of the vapor deposition material melted by heating the sintered pellet, and the molten vapor deposition material is expanded in the radial direction. And reduce the thickness. If vapor deposition is completed before the molten vapor deposition material collects in the gap, above the step,
The melted and solidified part does not come into contact with the inner wall surface of the crucible, or the contact area is small even if it comes into contact, and the sintered pellet is located above the stepped part, so that Since the bonding area of the melted and solidified portion to the inner wall surface is small, the sintered pellets are easily separated. Also,
When the molten vapor deposition material flows into the gap and collects, it spreads radially outward and becomes thinner, and when a force is applied to the remaining sintered pellets, it melts and solidifies corresponding to the corners of the stepped portion. The part where the stress is applied becomes the stress concentration point. Therefore,
This portion is most easily crushed, and if even a portion is crushed, the bonding strength sharply decreases, and it is easy to remove.
The gap between the first cavity and the sintered pellet is preferably as small as possible in that the molten vapor deposition material does not flow into the gap, but the crucible is usually made of a metal having a high thermal conductivity (for example, copper), Moreover, since it is cooled by being partially in contact with the water-cooled copper hearth, there is no problem as it solidifies without flowing too much if there is a small gap. The “stepped portion” means a portion having a stepped shape in cross section between the first and second hollow portions, and the number of steps is not limited to one and may be two or more. .
【００１３】第２の発明は上記第１の発明において、焼
結ペレットが柱状で、るつぼの第１の空洞部を前記焼結
ペレットと実質的に同形状の断面形状を有する空洞とし
たものである。A second invention is the same as the first invention, wherein the sintered pellet has a columnar shape, and the first cavity of the crucible is a cavity having a sectional shape substantially the same as that of the sintered pellet. is there.
【００１４】第２の発明において、第１の空洞部は焼結
ペレットと実質的に同形状の断面形状を有する空洞であ
るため、上下どちら側から工具を挿入しても第１の空洞
部の開口側から内壁と平行に力を加える場合、その力を
加えた方向に第１の空洞部の内壁がないためるつぼが変
形し難い。また、柱状に成形されたペレットとの接触面
積を広く取れるため、蒸着材料が隙間から流れ出し難
い。「柱状」とは、断面が円形のものに限らず、角形、
楕円形等の適宜な形状を含むものである。第１と第２の
空洞部は、必ずしも相似形の断面形状からなる空洞であ
る必要はない。In the second aspect of the present invention, the first hollow portion has a cross-sectional shape substantially the same as that of the sintered pellet. When a force is applied parallel to the inner wall from the opening side, the crucible is unlikely to be deformed because there is no inner wall of the first cavity in the direction in which the force is applied. Further, since the contact area with the columnar shaped pellets can be widened, the vapor deposition material does not easily flow out from the gap. "Column" is not limited to a circular cross section, but a prismatic shape,
It includes an appropriate shape such as an ellipse. The first and second cavities do not necessarily have to be cavities having similar cross-sectional shapes.
【００１５】第３の発明は、上記第１または第２の発明
に係る蒸着用るつぼにおいて、段状部をるつぼの周方向
において連続した段状部としたものである。A third aspect of the invention is the vapor deposition crucible according to the first or second aspect of the invention, wherein the stepped portion is a stepped portion which is continuous in the circumferential direction of the crucible.
【００１６】第３の発明においては、段状部が連続して
いるため、段状部全体の角部が対応する溶融固化部分に
応力集中箇所を生じさせることが可能なため、ペレット
の破壊、離脱、剥離を一層容易にする。In the third aspect of the invention, since the stepped portions are continuous, it is possible to cause stress concentration points in the melted and solidified portions corresponding to the corners of the entire stepped portion. Makes detachment and peeling easier.
【００１７】第４の発明は、上記第１または第２の発明
に係る蒸着用るつぼにおいて、段状部をるつぼの周方向
において不連続な段状部としたものである。A fourth invention is the vapor deposition crucible according to the first or second invention, wherein the stepped portion is a stepped portion which is discontinuous in the circumferential direction of the crucible.
【００１８】第４の発明においては、不連続な段状部は
第２の空洞部の内壁に突条体を突設し当該空洞部を周方
向において分断することにより形成することができ、こ
の突条体の角部付近に対応する溶融固化した部分も応力
集中箇所となるので、ペレットのるつぼ内壁面に固着し
ている部分が周方向において分断されやすくなり除去が
容易になる。また前記突条体はペレットの第１の空洞部
への挿入時のガイドにもなる。In the fourth invention, the discontinuous stepped portion can be formed by projecting a ridge on the inner wall of the second cavity and dividing the cavity in the circumferential direction. The melted and solidified portion corresponding to the vicinity of the corner portion of the ridge also serves as the stress concentration portion, so that the portion of the pellet fixed to the inner wall surface of the crucible is likely to be divided in the circumferential direction, which facilitates removal. The ridge body also serves as a guide when the pellet is inserted into the first cavity.
【００１９】第５の発明は、上記第１、第２、第３また
は第４の発明に係る蒸着用るつぼの使用方法であって、
焼結ペレットの溶融した部分の少なくとも一部が段状部
表面上または段状部より上方に位置する状態で蒸着を終
了し、前記溶融した部分を固化させるものである。A fifth invention is a method of using the crucible for vapor deposition according to the first, second, third or fourth invention,
The vapor deposition is completed in a state where at least a part of the melted portion of the sintered pellet is located on the surface of the stepped portion or above the stepped portion, and the melted portion is solidified.
【００２０】第５の発明において、焼結ペレットの溶融
固化した部分のうち段状部表面上または段状部より上方
に位置する部分がるつぼ内壁面と接触しないか、接触し
ていたとしてもその接合面積が小さい場合には、溶融固
化部分のるつぼ内壁面に対する接合面積が小さくてすむ
ため焼結ペレットを離脱させ易く、接合面積が大きい場
合には、溶融した蒸着材料が環状隙間に流れ込んで半径
方向外方に広がって厚さが薄くなっている上に、段状部
の角部付近に対応する溶融固化した部分が応力の集中箇
所となるため粉砕され易く、一部でも破砕した場合には
接合強度が急激に低下するため焼結ペレットを取り除き
易くなる。In the fifth aspect of the present invention, a portion of the melted and solidified portion of the sintered pellet, which is located on the surface of the stepped portion or above the stepped portion, does not contact the inner wall surface of the crucible, or even if it does contact the same. When the joining area is small, the joining area of the melt-solidified part to the inner wall surface of the crucible can be small, so that the sintered pellets can be easily separated.When the joining area is large, the molten vapor deposition material flows into the annular gap and the radius becomes larger. In addition to widening outward in the direction, the thickness becomes thinner, and the melted and solidified portion corresponding to the corner of the stepped portion becomes the stress concentration point, so it is easily crushed, and even if it is crushed even partially Since the bonding strength sharply decreases, it becomes easy to remove the sintered pellet.
【００２１】[0021]
【発明の実施の形態】以下、本発明を図面に示す実施の
形態に基づいて詳細に説明する。図１は本発明に係る蒸
着用るつぼを冷却銅ハースに装着した状態を示す平面
図、図２は本発明に係る蒸着用るつぼの第１の実施の形
態を示す外観斜視図、図３は図１のIII −III 線で破断
したるつぼの蒸着前の焼結ペレットを収容した状態を示
す断面図、図４は蒸着後の焼結ペレットの状態を示す断
面図である。これらの図において、全体を符号１で示す
ものは、蒸着用るつぼ（以下、単につるぼという）、２
はるつぼ１に装着される焼結ペレット、３は水冷銅ハー
スである。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below in detail based on the embodiments shown in the drawings. 1 is a plan view showing a state in which a vapor deposition crucible according to the present invention is attached to a cooling copper hearth, FIG. 2 is an external perspective view showing a first embodiment of a vapor deposition crucible according to the present invention, and FIG. 1 is a sectional view showing a state in which a sintered pellet before vapor deposition of a crucible broken along line III-III is housed, and FIG. 4 is a sectional view showing a state of the sintered pellet after vapor deposition. In these figures, reference numeral 1 indicates the whole of a crucible for vapor deposition (hereinafter simply referred to as a crucible),
Sintered pellets 3 mounted on the crucible 1 are water-cooled copper hearths.
【００２２】前記るつぼ１は、焼結ペレット２を装填す
る空洞４を有する角筒状に形成されている。この空洞４
をるつぼ１の上方および下方に開放する異径の貫通孔と
することにより、前記焼結ペレット２の下端部が嵌合し
得る孔径を有する第１の空洞部４Ａと、第１の空洞部４
Ａの上方に位置しこれより大きい孔径を有する第２の空
洞部４Ｂとからなり、第１、第２の空洞部４Ａ，４Ｂの
接続部に段状部５が設けられている。段状部５は、断面
形状が段状であって第１の空洞部４Ａの内壁面と段状面
５Ａとの接続部に角部５ａができるものをいう。段状面
５Ａは、るつぼ１の軸線に対して直交する面に限らず、
若干傾斜した面であってもよい。また、るつぼ１の互い
に対向する２つの辺には、水冷銅ハース３によって支持
される鍔部６が一体に突設されている。鍔部６の下面と
前記水冷銅ハース３との接触部は、摺動摩擦を小さくす
るために点接触または線接触とすることが望ましい。ま
た、鍔部６は、るつぼ１と冷却銅ハース３の収納凹部９
との間にできる隙間から収納凹部９の内部に蒸着材料が
入り込むのを防止し、るつぼ１の摺動が阻害されるのを
防ぐ機能をも有している。The crucible 1 is formed in a rectangular tube shape having a cavity 4 for loading the sintered pellets 2. This cavity 4
By making the through holes of different diameters open above and below the crucible 1, the first hollow portion 4A having a hole diameter with which the lower end portion of the sintered pellet 2 can fit and the first hollow portion 4 are formed.
A second cavity portion 4B located above A and having a larger hole diameter is provided, and a stepped portion 5 is provided at a connection portion between the first and second cavity portions 4A and 4B. The stepped portion 5 has a stepwise cross-sectional shape and has a corner 5a at the connecting portion between the inner wall surface of the first hollow portion 4A and the stepped surface 5A. The stepped surface 5A is not limited to the surface orthogonal to the axis of the crucible 1,
The surface may be slightly inclined. Further, a collar portion 6 supported by a water-cooled copper hearth 3 is integrally projected on two sides of the crucible 1 facing each other. The contact portion between the lower surface of the collar portion 6 and the water-cooled copper hearth 3 is preferably point contact or line contact in order to reduce sliding friction. Further, the collar portion 6 has a recess 9 for accommodating the crucible 1 and the cooling copper hearth 3.
It also has a function of preventing the vapor deposition material from entering the inside of the storage concave portion 9 through a gap formed between and, and preventing the sliding of the crucible 1 from being obstructed.
【００２３】るつぼ１の材質としては、通常熱伝導率の
高い材料、例えば銅、アルミニウム、黒鉛、タングステ
ン等が用いられる。因みに、るつぼ１の大きさは、３１
（長さ）×３１（幅）×１２（高さ）ｍｍのブロック状
で、第１の空洞部４Ａは横断面円形の空洞で孔径が２
２．６ｍｍ、第２の空洞部４Ｂも同じく横断面円形の空
洞で孔径が２５ｍｍであり、上面から段状部５までの距
離は５ｍｍである。As the material of the crucible 1, a material having a high thermal conductivity, such as copper, aluminum, graphite or tungsten, is usually used. By the way, the size of the crucible 1 is 31
It has a block shape of (length) × 31 (width) × 12 (height) mm, and the first hollow portion 4A has a circular cross section and a hole diameter of 2
The second cavity 4B has a circular cross section with a hole diameter of 25 mm, and the distance from the upper surface to the step 5 is 5 mm.
【００２４】第１、第２の空洞部４Ａ，４Ｂを横断面円
形の空洞にした場合、各空洞部の内壁面が周方向におい
て曲率一定の連続した曲面を形成して折れ曲がった面や
隅角部がないため、細い棒状の工具であれば、これら空
洞部の内壁面のどの部分にも確実に接触させることがで
き、蒸着物質の取り除きが容易である。When the first and second cavities 4A and 4B are cavities each having a circular cross section, the inner wall surface of each cavity forms a curved surface having a constant curvature in the circumferential direction and a bent surface or corner angle. Since there is no portion, a thin rod-shaped tool can surely contact any portion of the inner wall surfaces of these hollow portions, and the vapor deposition substance can be easily removed.
【００２５】前記焼結ペレット２は、蒸着材料の粉末を
加圧プレスで成形し、常圧中で電気炉により１０００〜
１４００℃に加熱して焼成処理したもので、前記第１の
空洞部４Ａより若干小さい外径を有する円柱状に形成さ
れている。蒸着材料としては、眼鏡用レンズに反射防止
膜を蒸着する場合、酸化ニオブ、酸化タンタル、酸化チ
タン、酸化ジルコニウム、酸化イットリウム等が用いら
れる。例えば、酸化ニオブ（Ｎｂ2Ｏ5）と酸化ジルコニ
ウム（ＺｒＯ2 ）の粉末を、重量比９５：５の割合で混
合し、３００ｋｇ／ｃｍ2 で加圧プレスした後、１３０
０℃で２４時間加熱して、直径２１．８〜２２．５ｍ
ｍ、高さ１５．５〜１６．０ｍｍの円柱状の焼結ペレッ
トを製作する。The sintered pellets 2 are formed by molding a powder of a vapor deposition material with a pressure press, and the pressure of 1000 to 1000 is obtained by an electric furnace under normal pressure.
It is heated to 1400 ° C. and fired, and is formed in a cylindrical shape having an outer diameter slightly smaller than that of the first hollow portion 4A. As the vapor deposition material, niobium oxide, tantalum oxide, titanium oxide, zirconium oxide, yttrium oxide, or the like is used when depositing an antireflection film on an eyeglass lens. For example, powders of niobium oxide (Nb 2 O 5 ) and zirconium oxide (ZrO 2 ) are mixed at a weight ratio of 95: 5, and the mixture is pressed under pressure of 300 kg / cm 2.
Heating at 0 ° C for 24 hours, diameter 21.8 ~ 22.5m
A cylindrical sintered pellet having a height of m and a height of 15.5 to 16.0 mm is manufactured.
【００２６】焼結ペレット２は、るつぼ１に装填された
状態において、上端部が段状部５より上方に位置して第
２の空洞部４Ｂとの間に環状の隙間７を形成している。
一方、下端部は第１の空洞部４Ａに嵌合してその内壁に
密接し、るつぼ１の下方に突出している。るつぼ１の下
方側の開口８は、第１の空洞部４Ａと同一の大きさで底
部全体に開放し、上方側の開口１６は第２の空洞部４Ｂ
と同一の大きさで上部全体に開放している。In the state where the sintered pellet 2 is loaded in the crucible 1, the upper end portion is located above the stepped portion 5 and an annular gap 7 is formed between the sintered pellet 2 and the second hollow portion 4B. .
On the other hand, the lower end portion fits into the first hollow portion 4A, is in close contact with the inner wall thereof, and projects below the crucible 1. The opening 8 on the lower side of the crucible 1 has the same size as the first cavity 4A and is opened to the entire bottom, and the opening 16 on the upper side is the second cavity 4B.
It is the same size as and is open to the whole upper part.
【００２７】第１の空洞部４Ａと焼結ペレット２との隙
間は極力小さい方が溶融した蒸着材料がその隙間に流れ
込まないという点で好ましいが、るつぼ１は通常熱伝導
率の高い金属（例えば、銅）からなり、しかも水冷銅ハ
ースと部分的に接触して冷却されているので、多少の隙
間であればあまり流れ込まずに固まるので問題ない。It is preferable that the gap between the first hollow portion 4A and the sintered pellet 2 is as small as possible in that molten vapor deposition material does not flow into the gap, but the crucible 1 is usually made of a metal having a high thermal conductivity (eg, a metal having a high thermal conductivity). , Copper) and is partially in contact with the water-cooled copper hearth for cooling, so if there is a small gap, it hardens without flowing too much, so there is no problem.
【００２８】前記水冷銅ハース３は、銅板によって円板
状に形成され、その上面には前記るつぼ１を収納する８
個の収納凹部９が周方向に等配されて放射状に形成され
ており、また肉厚内には冷却水通路１０が設けられてい
る。このような水冷銅ハース３は、真空装置内に回転自
在に設置されており、電子ビーム１１を焼結ペレット２
の上面中央に照射し、同ペレットの表層部分を加熱溶融
して蒸発させることにより、眼鏡用レンズ等の蒸着対象
物に蒸着する。そして、水冷銅ハース３の外周には、使
用済みのるつぼ１を収納する収納容器１２が設置されて
いる。水冷銅ハース３の構造としては、例えば実開平５
−７２９６４号公報、実公平７−４５５６０号公報等に
記載されたものが知られている。The water-cooled copper hearth 3 is formed of a copper plate in a disk shape, and the upper surface thereof houses the crucible 1 8
The individual storage recesses 9 are equally arranged in the circumferential direction and are radially formed, and a cooling water passage 10 is provided within the wall thickness. Such a water-cooled copper hearth 3 is rotatably installed in a vacuum device, and the electron beam 11 is used to sinter the pellets 2.
Is irradiated to the center of the upper surface of the pellet, and the surface layer portion of the pellet is heated, melted, and evaporated to deposit on a vapor deposition object such as a lens for spectacles. A storage container 12 for storing the used crucible 1 is installed on the outer periphery of the water-cooled copper hearth 3. The structure of the water-cooled copper hearth 3 is, for example, an actual Kaihei 5
The ones described in Japanese Patent Publication No. 72964 and Japanese Utility Model Publication No. 7-45560 are known.
【００２９】さらに、水冷銅ハース３について詳述する
と図１では、前記るつぼ１を上記した実開平５−７２９
６４号公報に記載されている蒸着装置に適用した状態を
示している。各収納凹部９には３個のるつぼ１が半径方
向に整列して摺動可能にそれぞれ収納されており、外周
縁に近い最も外側のるつぼ１による蒸着処理が終わる
と、その蒸着処理の終わったるつぼ１は、水冷銅ハース
３の外周縁から前記収納容器１２に摺動落下して収納さ
れるとともに、次のるつぼ１が蒸着位置に移動され、次
の蒸着処理が行われる。この収納凹部９は、るつぼ１の
幅より若干大きい寸法となっており、これによって鍔部
６による収納凹部９の縁に懸架された状態でるつぼ１が
水冷銅ハース３の収納凹部９に沿って移動できるように
構成されている。なお、この例では平面視形状が矩形で
鍔部６が図１に示すように収納凹部９に整列配置されて
いるため、摺動方向の隣接したるつぼ１間に隙間は存在
せず、るつぼ１の摺動動作に支障を来すことがない。な
お、符号１１０は電子ビーム１１の照射源である。Further, the water-cooled copper hearth 3 will be described in detail. In FIG. 1, the crucible 1 is the above-mentioned actual open flat plate 5-729.
The state applied to the vapor deposition apparatus described in Japanese Patent No. 64 is shown. The three crucibles 1 are slidably housed in the respective storage recesses 9 so as to be aligned in the radial direction. When the vapor deposition process by the outermost crucible 1 near the outer peripheral edge is finished, the vapor deposition process is finished. The crucible 1 is slidably dropped from the outer peripheral edge of the water-cooled copper hearth 3 into the storage container 12 and stored therein, and the next crucible 1 is moved to the vapor deposition position to perform the next vapor deposition process. The storage recess 9 has a size slightly larger than the width of the crucible 1, so that the crucible 1 is suspended along the edge of the storage recess 9 by the collar portion 6 along the storage recess 9 of the water-cooled copper hearth 3. It is configured to be mobile. In this example, the shape of the plan view is rectangular and the collar portion 6 is aligned in the accommodating recess 9 as shown in FIG. 1. Therefore, there is no gap between the adjacent crucibles 1 in the sliding direction. Does not interfere with the sliding operation of the. Reference numeral 110 is an irradiation source of the electron beam 11.
【００３０】電子ビーム１１の照射により焼結ペレット
２からなる蒸着材料の表層部が加熱溶融して蒸発する
と、焼結ペレット２の高さは当然のことながら徐々に減
少し、上面に図３に示すように中央ほど深くなる凹部１
３が形成される。また、加熱溶融した蒸着材料は、環状
隙間７に流れ出し、第２の空洞部４Ｂの内壁および段状
部５の段状面５Ａに接触すると冷やされて固化し固着す
る。When the surface layer portion of the vapor deposition material composed of the sintered pellets 2 is heated and melted and evaporated by the irradiation of the electron beam 11, the height of the sintered pellets 2 naturally decreases gradually, and as shown in FIG. As shown in the figure, the recess 1 becomes deeper toward the center.
3 is formed. The vaporized material that has been heated and melted flows out into the annular gap 7, and when it contacts the inner wall of the second cavity 4B and the stepped surface 5A of the stepped portion 5, it is cooled and solidified and fixed.
【００３１】図４は蒸着終了時の焼結ペレットの状態を
示す図で、２Ａは溶融した後、冷えて固化した部分、２
Ｂは溶融されない部分である。FIG. 4 is a view showing the state of the sintered pellets at the end of vapor deposition. 2A is a portion which is melted and then cooled and solidified.
B is a part which is not melted.
【００３２】蒸着が終了すると、るつぼ１を真空装置か
ら取り出し、るつぼ１を再利用するため残った焼結ペレ
ットをるつぼ１から離脱させる。この具体的な方法とし
ては、例えばるつぼ１を上下反転させて焼結ペレット２
をハンマーや金属製の棒（突出し棒）等の適宜な工具で
叩き、溶融固化した部分２Ａの外周部を破砕することで
焼結ペレット２をるつぼ１から離脱させる。この場合、
図４に示すように溶融固化した部分２Ａの外周部が段状
部５を挟んでその上方および下方に跨っていると、段状
部５の角部５ａに接触している部分１５に加えられた力
による応力が集中する。しかも、この応力の集中箇所１
５は、焼結ペレット２の上面の凹み１３が中央に行くほ
ど深くなることから厚さが比較的薄く、溶融固化した部
分２Ａのうちでは最も破砕され易い箇所のため、従来の
蒸着用るつぼ（実開平３−１８１６２号公報）に比べて
焼結ペレット２の離脱作業が容易で、酸化ニオブなどの
ように熱伝導率が高く、るつぼ１の内壁面との接合強度
が大きい蒸着材料を主成分とした焼結ペレット２を用い
た場合であっても容易に離脱させることができ、るつぼ
１が変形したりすることがない。なお、るつぼ１の下側
から叩く例を説明したが、るつぼ１の上側から焼結ペレ
ット２の表面を叩いても段状部５の角部５ａが焼結ペレ
ットの当該角部に対応する部分１５に応力を集中させる
ので、同様に容易に離脱させることができる。When the vapor deposition is completed, the crucible 1 is taken out of the vacuum apparatus, and the remaining sintered pellets are detached from the crucible 1 in order to reuse the crucible 1. As a concrete method, for example, the crucible 1 is turned upside down and the sintered pellets 2 are
Is struck with an appropriate tool such as a hammer or a metal rod (protruding rod) to crush the outer peripheral portion of the melted and solidified portion 2A, thereby separating the sintered pellet 2 from the crucible 1. in this case,
As shown in FIG. 4, when the outer peripheral portion of the melted and solidified portion 2A straddles the step portion 5 above and below it, it is added to the portion 15 in contact with the corner portion 5a of the step portion 5. The stress due to the force is concentrated. Moreover, this stress concentration point 1
5 has a relatively thin thickness because the recess 13 on the upper surface of the sintered pellet 2 becomes deeper toward the center, and is the most easily crushed portion of the melted and solidified portion 2A, so that a conventional crucible for vapor deposition ( As compared with (Japanese Utility Model Laid-Open No. 3-18162), the work of removing the sintered pellet 2 is easier, the thermal conductivity such as niobium oxide is high, and the vapor deposition material having a large bonding strength with the inner wall surface of the crucible 1 is a main component. Even if the sintered pellet 2 is used, it can be easily removed, and the crucible 1 is not deformed. Although the example of hitting from the lower side of the crucible 1 has been described, even if the surface of the sintered pellet 2 is hit from the upper side of the crucible 1, the corner portion 5a of the stepped portion 5 corresponds to the corner portion of the sintered pellet. Since the stress is concentrated on 15, it can be easily released similarly.
【００３３】溶融固化した部分２Ａを破砕して焼結ペレ
ット２をるつぼ１から離脱させたとき、溶融固化した部
分２Ａの一部は、るつぼ１の内壁面から離脱せず小片と
して残存する。この小片を取り除くには、例えば突出し
棒をるつぼ１の上部または下部から挿入し、その小片を
叩くなどして力を加え、破砕したり剥がしたりして取り
除く。この残存する小片は、焼結ペレット２を離脱させ
た時に段状部５付近で破砕するため分断され、接合面積
が小さくなっており、容易に取り除くことができる。な
お、図３Ａ部に示すように段状部５の段状面５Ａと第２
の空洞部４Ｂの内壁面との接合部である隅角部５ｃを曲
面に形成してもよい。このようにすると突き出し棒など
の工具を隅角部に接触させ易くなるため、隅角部に残存
した小片を取り除き易くなる。When the melted and solidified portion 2A is crushed and the sintered pellet 2 is separated from the crucible 1, a part of the melted and solidified portion 2A does not separate from the inner wall surface of the crucible 1 and remains as a small piece. In order to remove this small piece, for example, a projecting rod is inserted from the upper or lower part of the crucible 1, and the small piece is crushed or peeled off by applying force by hitting the small piece. The remaining small pieces are crushed in the vicinity of the stepped portion 5 when the sintered pellet 2 is released, so that the small pieces are divided, and the bonding area is reduced, so that the small pieces can be easily removed. As shown in FIG. 3A, the stepped surface 5A of the stepped portion 5 and the second
The corner portion 5c which is a joint portion with the inner wall surface of the hollow portion 4B may be formed into a curved surface. This makes it easier to bring a tool such as a stick out into contact with the corner portion, so that it is easy to remove the small pieces remaining in the corner portion.
【００３４】図５（ａ）〜（ｃ）は溶融固化した部分の
形態を示す図である。同図（ａ）は、上面側の溶けて固
まった部分２Ａが第２の空洞部４Ｂの壁面にまで到達し
ないで蒸着を終了したときの状態を示す。この場合は第
２の空洞部４Ｂでは内壁に接していないため、接合部は
第１の空洞部４Ａの内壁だけなので、接合面積が小さ
く、溶融固化した部分２Ａを破砕するだけで焼結ペレッ
ト２をるつぼ１から容易に離脱させることができる。FIGS. 5 (a) to 5 (c) are views showing the form of the melted and solidified portion. FIG. 6A shows a state in which the vapor deposition is completed without the melted and solidified portion 2A on the upper surface side reaching the wall surface of the second cavity portion 4B. In this case, since the second hollow portion 4B is not in contact with the inner wall, the joining portion is only the inner wall of the first hollow portion 4A. Therefore, the joining area is small, and the sintered pellet 2 can be obtained by crushing the melted and solidified portion 2A. Can be easily separated from the crucible 1.
【００３５】同図（ｂ）は溶融固化した部分２Ａの一部
が段状部５の上面および第２の空洞部４Ｂの壁面にまで
到達した状態で蒸着を終了したときの状態を示す。この
場合は、第２の空洞部４Ｂでは内壁に一部しか接してい
ないため接合面積は小さい上に、この一部接合した部分
は段状部５の角部５ａにより応力の集中箇所ができ、溶
融固化した部分２Ａを容易に破砕することができる。内
壁面に残存する小片は、段状部５の付近で分断され接合
面積が小さいため、容易に除去することができる。FIG. 3B shows a state in which vapor deposition is completed in a state where a part of the melted and solidified portion 2A reaches the upper surface of the stepped portion 5 and the wall surface of the second hollow portion 4B. In this case, since the second cavity 4B is only partially in contact with the inner wall, the joint area is small, and the partially jointed portion has a stress concentration portion due to the corner 5a of the stepped portion 5, The melted and solidified portion 2A can be easily crushed. The small piece remaining on the inner wall surface is divided near the stepped portion 5 and has a small bonding area, so that it can be easily removed.
【００３６】同図（ｃ）は溶融固化した部分２Ａが段状
部５の上面および第２の空洞部４Ｂの壁面の略全周にわ
たって到達した状態で蒸着を終了したときの状態を示
す。この場合は、これら３つの形態の中で最も接合面積
が大きいが、同図（ｂ）と同様に段状部５の角部５ａに
より応力の集中箇所ができるため、溶融固化した部分２
Ａを容易に破砕することができる。また、内壁面に残存
する小片は、（ｂ）と同様の理由で接合面積が小さいた
め、容易に除去することができる。FIG. 3C shows a state in which the vapor deposition is completed in a state where the melted and solidified portion 2A reaches the upper surface of the stepped portion 5 and substantially the entire circumference of the wall surface of the second hollow portion 4B. In this case, the joint area is the largest of these three forms, but since the corners 5a of the stepped portion 5 have stress concentration points as in FIG.
A can be easily crushed. Further, the small pieces remaining on the inner wall surface can be easily removed because the bonding area is small for the same reason as in (b).
【００３７】次に、本発明の段状部のるつぼ軸線方向の
位置を検討する。段状部を設けていないるつぼを使用
し、それ以外は同じ条件で蒸着を行い、良好に蒸着がで
きたときの蒸着後のるつぼ１を多数観察したところ、る
つぼ１の上面から約０〜３ｍｍ下がった位置から下側へ
約５〜１０ｍｍの幅で溶融固化した部分２Ａの外周部が
固着しているものが多かった。このときの焼結ペレット
２の上面の中心高さは、るつぼ１の上面から約８〜１０
ｍｍ下がった所であった。段状部５は、溶融固化した部
分２Ａの中間くらいの高さに設けた方がより効果的であ
るから、るつぼ１の上面から５ｍｍ程度下がった位置に
段状部５を設けた。中間位の高さが効果的な理由は、中
間からずれる程段状部５の上下のいずれか一方の固着面
積が大きくなり、取り除き難くなるためである。勿論、
この段状部５を設ける位置は、焼結ペレット２の蒸発量
によって異なるので、条件としては、図３に示すように
るつぼ１の高さをＹ、蒸着終了時に溶融固化し内壁に固
着した部分の厚さをＸとすると、段状部５の形成位置
を、るつぼ１の上面からＸ／２だけ下がった位置Ｐ1 か
ら、下面よりもＸ／２だけ上がった位置Ｐ2 までの範囲
内とすることが好ましい。この範囲外では段状部を溶融
固化した部分の中間位にもってくることは難しくなる。
つまり、Ｐ1 位置より上で中間位にしようとすると、溶
融した蒸着物質が上からはみ出す可能性が高くなり、Ｐ
2 位置より下で中間位にしようとすると溶融した蒸着物
質がるつぼ１の下側から流れ出す可能性が高くなる。な
お、Ｘの値は変動幅が大きいため、平均値を使用した
り、安全を見て最大値を使ってもよい。また、蒸着終了
時に溶融固化した部分２Ａの外周部は、図４に示すよう
に段状部５を挟んでその上方と下方に跨がっていること
が望ましい。また、Ｘの値は蒸着材料や蒸着条件などに
より変わるので、それらに合わせて段状部５の高さ（形
成位置）を適宜設定することが望ましい。Next, the position of the stepped portion of the present invention in the crucible axis direction will be examined. Using a crucible with no stepped portion, vapor deposition was performed under the same conditions other than that, and when observing a large number of the crucibles 1 after vapor deposition when good vapor deposition was possible, it was about 0 to 3 mm from the upper surface of the crucible 1. In many cases, the outer peripheral portion of the melted and solidified portion 2A having a width of about 5 to 10 mm was fixed from the lowered position to the lower side. The center height of the upper surface of the sintered pellet 2 at this time is about 8 to 10 from the upper surface of the crucible 1.
It was the place where it went down by mm. Since it is more effective to provide the step portion 5 at a height about the middle of the melted and solidified portion 2A, the step portion 5 is provided at a position about 5 mm lower than the upper surface of the crucible 1. The reason why the height of the intermediate position is effective is that the more it is displaced from the intermediate position, the larger the fixing area on one of the upper and lower sides of the stepped portion 5 becomes, and it becomes difficult to remove it. Of course,
The position where the stepped portion 5 is provided depends on the amount of evaporation of the sintered pellets 2. Therefore, as shown in FIG. 3, the height of the crucible 1 is Y, and the portion melted and solidified at the end of vapor deposition and fixed to the inner wall. The thickness of the step is defined as X, and the stepped portion 5 is formed within a range from a position P1 which is X / 2 lower than the upper surface of the crucible 1 to a position P2 which is X / 2 higher than the lower surface. Is preferred. Outside this range, it is difficult to bring the stepped portion to the middle position of the melted and solidified portion.
In other words, if an attempt is made to reach an intermediate position above the P1 position, there is a high possibility that the molten vapor deposition material will protrude from above,
If it is attempted to move to an intermediate position below the 2 position, the molten vapor deposition material is more likely to flow out from the lower side of the crucible 1. Since the value of X has a large fluctuation range, an average value may be used or the maximum value may be used for safety. Further, it is desirable that the outer peripheral portion of the portion 2A that has been melted and solidified at the end of vapor deposition straddles above and below the stepped portion 5 as shown in FIG. Further, since the value of X changes depending on the vapor deposition material, vapor deposition conditions, etc., it is desirable to appropriately set the height (formation position) of the stepped portion 5 in accordance with them.
【００３８】図６は本発明の第２の実施の形態を示す一
部破断斜視図である。この実施の形態は、焼結ペレット
２２を角柱状に形成し、るつぼ２０に前記角柱状の焼結
ペレット２２を装填可能な横断面矩形の段付き空洞２１
を設けたものである。空洞２１は、焼結ペレット２２と
略同形状の横断面角形からなる第１の空洞部２１Ａと、
これより大きい横断面角形の第２の空洞部２１Ｂとから
なり、これら両空洞部の境部に段状部２３を設けてい
る。また、この実施の形態はるつぼ２０の下側の開口を
部分的に開放するようにしたものである。このため、る
つぼ２０は底板２４を有し、この底板２４の中央に焼結
ペレット２２を押し出すための突出し棒が差し込まれる
孔２５を設けている。FIG. 6 is a partially cutaway perspective view showing a second embodiment of the present invention. In this embodiment, the sintered pellets 22 are formed in a prismatic shape, and the crucible 20 can be loaded with the prismatic sintered pellets 22. The stepped cavity 21 has a rectangular cross section.
Is provided. The cavity 21 has a first cavity portion 21A having a substantially rectangular cross section and having substantially the same shape as the sintered pellet 22, and
A second hollow portion 21B having a rectangular cross section larger than this is provided, and a stepped portion 23 is provided at a boundary portion between these hollow portions. Further, in this embodiment, the opening on the lower side of the crucible 20 is partially opened. Therefore, the crucible 20 has a bottom plate 24, and a hole 25 into which a projecting rod for pushing out the sintered pellet 22 is inserted is provided at the center of the bottom plate 24.
【００３９】このような構造においても、上記した実施
の形態と同様に段状部２３を備えているので、蒸着後の
焼結ペレット２２を容易に離脱させることができること
は明らかであろう。しかし、この場合、焼結ペレット２
２を上から叩くと底板２４を押し付けるため、るつぼ２
０が変形する可能性があるので、焼結ペレット２２を離
脱させるには下側の孔２５から工具で叩く必要がある。Even in such a structure, since the stepped portion 23 is provided as in the above-described embodiment, it is apparent that the sintered pellet 22 after vapor deposition can be easily separated. However, in this case, the sintered pellet 2
When you hit 2 from above, the bottom plate 24 is pressed, so that
Since 0 may deform, it is necessary to tap with a tool from the lower hole 25 to separate the sintered pellet 22.
【００４０】図７および図８は本発明の第３の実施の形
態を示す斜視図および断面図である。この実施の形態
は、水冷銅ハース３に丸いテーパ状の凹部３０を設け、
るつぼ３１を前記凹部３０に嵌合し得るように外形状を
下端側が上端側より小径となる逆截頭円錐形に形成した
ものである。その他の構造は図１に示した実施の形態と
略同一であるため、同一構成部分については同一符号を
もって示す。FIGS. 7 and 8 are a perspective view and a sectional view showing a third embodiment of the present invention. In this embodiment, the water-cooled copper hearth 3 is provided with a round tapered recess 30.
In order to fit the crucible 31 into the recess 30, the outer shape is formed into an inverted truncated cone shape whose lower end side has a smaller diameter than its upper end side. Since the other structure is substantially the same as that of the embodiment shown in FIG. 1, the same components are designated by the same reference numerals.
【００４１】このような構造においても、上記した実施
の形態と同様に段状部５を備えているので、蒸着後の焼
結ペレット２を容易に離脱させることができる。Even in such a structure, since the stepped portion 5 is provided as in the above-described embodiment, the sintered pellet 2 after vapor deposition can be easily separated.
【００４２】ここで、上記した実施の形態においては、
いずれも段状部５，２３の角部（５ａ）が略直角の場合
の例を示したが、本発明はこれに何ら限定されるもので
はない。段状部５，２３は角部５ａの角度が小さいほど
段状部５，２３の角部５ａにより発生する応力がより集
中し易いので、るつぼ１，２０の内壁面に固着している
溶融固化した部分の破砕が容易になるという利点があ
り、段状部５の角部５ａの角度が大きいほど第２の空洞
部の内壁と段状面５Ａよりなる隅角部５ｃの角度が大き
くなるため、この隅角部５ｃに残存する小片を取り除き
易いという利点がある。これらの両方の利点を併せ持つ
という点では、段状部の角部の角度は直角に近いとより
好ましい。Here, in the above-mentioned embodiment,
In each of the examples, the corner portions (5a) of the stepped portions 5, 23 are substantially right angles, but the present invention is not limited to this. As the angle of the corners 5a of the stepped portions 5, 23 is smaller, the stress generated by the corners 5a of the stepped portions 5, 23 is more likely to be concentrated. Since there is an advantage that the crushed portion can be easily crushed, the larger the angle of the corner 5a of the stepped portion 5, the larger the angle of the corner 5c formed by the stepped surface 5A and the inner wall of the second cavity. There is an advantage that it is easy to remove the small pieces remaining in the corner portions 5c. From the viewpoint of having both of these advantages, it is more preferable that the angle of the corner of the step is close to a right angle.
【００４３】図９は本発明の第４の実施の形態を示す断
面図である。この実施の形態は段状部５の角部５ａの角
度を９０°より大きくした例を示す。すなわち、段状部
５の段状面５Ａをるつぼ１の中心に向かって傾斜するテ
ーパ面に形成したものである。このような構造において
も溶融固化した焼結ペレットに外力を加えたとき、角部
５ａに対応する部分に応力を集中させることができるた
め、上記した実施の形態と同様な効果が得られることは
明らかであろう。FIG. 9 is a sectional view showing a fourth embodiment of the present invention. This embodiment shows an example in which the angle of the corner portion 5a of the stepped portion 5 is larger than 90 °. That is, the stepped surface 5A of the stepped portion 5 is formed as a tapered surface that is inclined toward the center of the crucible 1. Even in such a structure, when an external force is applied to the melted and solidified sintered pellet, the stress can be concentrated on the portion corresponding to the corner 5a, so that the same effect as that of the above-described embodiment can be obtained. Would be obvious.
【００４４】図１０は本発明の第５の実施の形態を示す
断面図である。るつぼ１は、上方および下方に開放した
貫通孔からなる空洞４を有し、この空洞４を焼結ペレッ
ト２の下端部が嵌合し得る穴径を有する第１の空洞部４
Ａと、この第１の空洞部４Ａの上方に位置しこれより大
きな穴径を有する第２の空洞部４Ｂとで構成し、これら
の空洞部の接続部に段状部５を２段に設けている。この
ため、段状部５は２つの段状面５Ａ，５Ａと、２つの角
部５ａ，５ａを有している。なお、段状部５は２段に限
らず３段以上であってもよい。FIG. 10 is a sectional view showing the fifth embodiment of the present invention. The crucible 1 has a cavity 4 formed of a through hole opened upward and downward, and a first cavity portion 4 having a hole diameter into which the lower end of the sintered pellet 2 can fit.
A and a second cavity portion 4B located above the first cavity portion 4A and having a hole diameter larger than this, and the step portion 5 is provided in two stages at the connection portion of these cavity portions. ing. Therefore, the stepped portion 5 has two stepped surfaces 5A, 5A and two corner portions 5a, 5a. The stepped portion 5 is not limited to two steps and may be three steps or more.
【００４５】このように２段の段状部５を設けた場合
は、焼結ペレット２の蒸着終了時に溶融固化した部分の
外周部の高さは、少なくとも１つの段状部５を挟んでそ
の上方と下方に跨っていることが望ましい。これにより
少なくとも１つの段状部の角部５ａ付近に対応する溶融
固化した部分に応力集中箇所ができるので、蒸着後の焼
結ペレットを容易に離脱させることができる。また、２
段の段状部５に跨って溶融固化部分が固着している場合
はそれぞれの角部５ａに応力集中箇所ができるので、内
壁面に残存する小片はそれぞれの段状部５付近で分断さ
れ易くなり容易に除去することができるという利点があ
る。また、段状部５を複数段にすることにより溶融固化
した部分の高さ位置や高さ幅が変動した場合でも、溶融
固化した部分に段状部５が位置している可能性が高くな
るという利点もある。When the two step portions 5 are provided in this manner, the height of the outer peripheral portion of the portion of the sintered pellet 2 that has been melted and solidified at the end of vapor deposition is such that at least one step portion 5 is sandwiched between them. It is desirable to straddle above and below. As a result, a stress concentration point is formed in the melted and solidified portion corresponding to the vicinity of the corner portion 5a of at least one stepped portion, so that the sintered pellet after vapor deposition can be easily separated. Also, 2
When the melted and solidified portion is fixed over the stepped portion 5 of the step, stress concentration points are formed at the respective corners 5a, so that the small pieces remaining on the inner wall surface are likely to be divided near each stepped portion 5. There is an advantage that it can be easily removed. Further, even if the height position and the height width of the melted and solidified portion are changed by forming the stepped portion 5 in a plurality of stages, the possibility that the stepped portion 5 is located in the melted and solidified portion becomes high. There is also an advantage.
【００４６】図１１は本発明の第６の実施の形態を示す
外観斜視図である。るつぼ１は、上方および下方に開放
した貫通孔からなる空洞４を有し、この空洞４を焼結ペ
レット２の下端部が嵌合し得る穴径を有する第１の空洞
部４Ａと、この第１の空洞部４Ａの上方に位置しこれよ
り大きな穴径を有する第２の空洞部４Ｂとで構成し、こ
れらの空洞部の接続部に段状部５を設けている。また、
第２の空洞部４Ｂを４つの突条部４０によって周方向に
おいて４分割している。突条部４０は、段状部５の段状
面５Ａ上に第２の空洞部４Ｂの内壁面に沿って周方向の
等間隔をおいて一体に突設されている。突条部４０のる
つぼ径方向の寸法は、焼結ペレット２の第１の空洞部４
Ａへの嵌挿を阻害しないように段状面５Ａの幅（るつぼ
径方向の寸法）と同一で、上面内側角部４０ａが焼結ペ
レット２の嵌挿を容易にするため円弧状に面取りされて
いる。したがって、突条部４０の空洞部径方向中心側に
向いた面４０ｂは、第１の空洞部４Ａの内壁面と同一面
を形成している。突条部４０の高さは、るつぼ１の上面
にまで達する高さとしたが、これに限らず諸条件に応じ
て適宜な高さとすることができる。FIG. 11 is an external perspective view showing a sixth embodiment of the present invention. The crucible 1 has a cavity 4 formed of a through hole opened upward and downward, and the cavity 4 has a first cavity portion 4A having a hole diameter with which the lower end portion of the sintered pellet 2 can be fitted, and the first cavity portion 4A. The second hollow portion 4B is located above the first hollow portion 4A and has a hole diameter larger than that of the first hollow portion 4A, and the stepped portion 5 is provided at the connecting portion of these hollow portions. Also,
The second hollow portion 4B is divided into four in the circumferential direction by the four ridges 40. The protruding portions 40 are integrally provided on the stepped surface 5A of the stepped portion 5 along the inner wall surface of the second cavity portion 4B at equal intervals in the circumferential direction. The dimension of the protrusion 40 in the radial direction of the crucible is the same as that of the first hollow portion 4 of the sintered pellet 2.
In order not to obstruct the insertion into A, the width is the same as the width of the stepped surface 5A (dimension in the radial direction of the crucible), and the upper inside corner 40a is chamfered in an arc shape to facilitate the insertion of the sintered pellet 2. ing. Therefore, the surface 40b of the protruding portion 40 facing the center of the cavity in the radial direction forms the same plane as the inner wall surface of the first cavity 4A. Although the height of the protruding portion 40 is set to reach the upper surface of the crucible 1, the height is not limited to this and may be set to an appropriate height according to various conditions.
【００４７】このような構造からなるるつぼ１において
は、段状部５の角部５ａに加えて突条部４０の角部も焼
結ペレット２に対して応力集中箇所となるので、第２の
空洞部４Ｂの内壁面に溶融固化したペレットを内壁面の
周方向において分断し易くなるという利点がある。な
お、第１の空洞部４Ａと第２の空洞部４Ｂとの間の段状
部５が存在する領域は、突条部４の存在する領域よりも
大きいほど蒸着後の焼結ペレット２を容易に離脱でき
る。また、このような突条体を設けることにより焼結ペ
レット２を第２の空洞部４Ｂ側から挿入するときに段状
部５で引っ掛かることがないので、焼結ペレット２のる
つぼ１への装着も容易になる。In the crucible 1 having such a structure, not only the corner 5a of the stepped portion 5 but also the corner of the ridge 40 serves as a stress concentration point for the sintered pellet 2. There is an advantage that the pellets melted and solidified on the inner wall surface of the hollow portion 4B can be easily divided in the circumferential direction of the inner wall surface. It should be noted that the larger the area where the stepped portion 5 between the first hollow portion 4A and the second hollow portion 4B exists is larger than the area where the protruding portion 4 exists, the easier the sintered pellet 2 after vapor deposition becomes. You can leave. Further, by providing such a ridge, since the sintered pellet 2 is not caught by the step portion 5 when the sintered pellet 2 is inserted from the second cavity portion 4B side, the mounting of the sintered pellet 2 in the crucible 1 Will also be easier.
【００４８】[0048]
【発明の効果】以上説明したように本発明に係る蒸着用
るつぼおよびその使用方法によれば、溶融固化した蒸着
材料が第２の空洞部に接触していない場合には接触面積
が小さく焼結ペレットの離脱作業が容易であり、また段
状部に接合している場合にはその角部が溶融固化した蒸
着材料に対して応力を集中させる箇所となり容易に破砕
することができるため、この場合も焼結ペレットの離脱
作業が容易である。したがって、離脱作業時にるつぼを
変形させるおそれがなく、るつぼの長寿命化を図ること
ができ、また、るつぼの空洞部内に段状部を設けるだけ
でよいので構造も簡単で、容易に製作することができ
る。As described above, according to the crucible for vapor deposition and the method of using the same according to the present invention, when the molten and solidified vapor deposition material is not in contact with the second cavity, the contact area is small and sintered. In this case, the pellets can be easily removed, and if they are joined to the stepped portion, the corners can be easily crushed because they become the points where stress is concentrated on the melted and solidified vapor deposition material. Also, it is easy to remove the sintered pellets. Therefore, there is no risk of deforming the crucible at the time of detaching work, the life of the crucible can be extended, and only the stepped portion needs to be provided in the cavity of the crucible, so the structure is simple and easy to manufacture. You can
【図１】 本発明に係る蒸着用るつぼを冷却銅ハースに
装着した状態を示す平面図である。FIG. 1 is a plan view showing a state in which a vapor deposition crucible according to the present invention is mounted on a cooling copper hearth.
【図２】 本発明に係る蒸着用るつぼの第１の実施の形
態を示す外観斜視図である。FIG. 2 is an external perspective view showing a first embodiment of a vapor deposition crucible according to the present invention.
【図３】 図１のIII −III 線で破断したるつぼの蒸着
前の焼結ペレットを収容した状態を示す断面図である。FIG. 3 is a cross-sectional view showing a state in which a sintered pellet before vapor deposition of a crucible broken along line III-III in FIG. 1 is accommodated.
【図４】 蒸着後の焼結ペレットの状態を示す断面図で
ある。FIG. 4 is a cross-sectional view showing a state of sintered pellets after vapor deposition.
【図５】 （ａ）〜（ｃ）は段状部部付近に溶融固着し
た部分の形態を示す図である。5 (a) to 5 (c) are views showing a form of a portion melted and fixed near a step portion.
【図６】 本発明の第２の実施の形態を示す一部破断斜
視図である。FIG. 6 is a partially cutaway perspective view showing a second embodiment of the present invention.
【図７】 本発明の第３の実施の形態を示す斜視図であ
る。FIG. 7 is a perspective view showing a third embodiment of the present invention.
【図８】 断面図である。FIG. 8 is a sectional view.
【図９】 本発明の第４の実施の形態を示す断面図であ
る。FIG. 9 is a cross-sectional view showing a fourth embodiment of the present invention.
【図１０】 本発明の第５の実施の形態を示す断面図で
ある。FIG. 10 is a sectional view showing a fifth embodiment of the present invention.
【図１１】 本発明の第６の実施の形態を示す外観斜視
図である。FIG. 11 is an external perspective view showing a sixth embodiment of the present invention.
１…蒸着用るつぼ、２…焼結ペレット、３…水冷銅ハー
ス、４…空洞、４Ａ…第１の空洞部、４Ｂ…第２の空洞
部、５…段状部、５Ａ…段状面、５ａ…角部、５ｃ…隅
角部、７…環状の隙間、８…下面側の開口、１６…上面
側の開口、２０…るつぼ、２１…空洞、２１Ａ…第１の
空洞部、２１Ｂ…第２の空洞部、２３…段状部、３１…
るつぼ。DESCRIPTION OF SYMBOLS 1 ... Crucible for vapor deposition, 2 ... Sintered pellets, 3 ... Water-cooled copper hearth, 4 ... Cavity, 4A ... 1st cavity part, 4B ... 2nd cavity part, 5 ... Step part, 5A ... Step surface, 5a ... Corners, 5c ... Corner corners, 7 ... annular gap, 8 ... opening on the lower surface side, 16 ... opening on the upper surface side, 20 ... crucible, 21 ... cavity, 21A ... first hollow portion, 21B ... 2 cavity part, 23 ... stepped part, 31 ...
Crucible.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 射水 健志 東京都新宿区中落合二丁目７番５号 ホー ヤ株式会社内 (72)発明者 三石 剛史 東京都新宿区中落合二丁目７番５号 ホー ヤ株式会社内 Ｆターム(参考） 4K029 DA09 DB08 DB11 DB12 DB15 DC09 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Takeshi Imizu 2-7-5 Nakaochiai, Shinjuku-ku, Tokyo Ho Within Ya Co., Ltd. (72) Inventor Takeshi Mitsuishi 2-7-5 Nakaochiai, Shinjuku-ku, Tokyo Ho Within Ya Co., Ltd. F term (reference) 4K029 DA09 DB08 DB11 DB12 DB15 DC09
Claims (5)
なる焼結ペレットを収容する空洞を有する蒸着用るつぼ
において、 前記空洞を前記焼結ペレットが嵌合する第１の空洞部
と、この第１の空洞部の上側に設けられ前記焼結ペレッ
トとの間に隙間を形成する第２の空洞部とで構成し、第
１、第２の空洞部の接続部に段状部を設けたことを特徴
とする蒸着用るつぼ。1. A vapor deposition crucible having upper and lower open cavities for accommodating sintered pellets made of an evaporation material, wherein a first cavity portion into which the sintered pellets are fitted, A second hollow portion provided on the upper side of the first hollow portion and forming a gap with the sintered pellet, and a stepped portion is provided at a connecting portion of the first and second hollow portions. Crucible for vapor deposition.
結ペレットと実質的に同形状の断面形状を有する空洞で
あることを特徴とする蒸着用るつぼ。2. The vapor deposition crucible according to claim 1, wherein the sintered pellet is columnar, and the first cavity of the crucible is a cavity having a cross-sectional shape substantially the same as that of the sintered pellet. Characteristic vapor deposition crucible.
おいて、 段状部がるつぼの周方向において連続していることを特
徴とする蒸着用るつぼ。3. The vapor deposition crucible according to claim 1 or 2, wherein the stepped portion is continuous in the circumferential direction of the crucible.
おいて、 段状部がるつぼの周方向において不連続であることを特
徴とする蒸着用るつぼ。4. The vapor deposition crucible according to claim 1, wherein the stepped portion is discontinuous in the circumferential direction of the crucible.
るつぼの使用方法であって、 焼結ペレットの溶融した部分の少なくとも一部が段状部
表面上または段状部より上方に位置する状態で蒸着を終
了し、前記溶融した部分を固化させることを特徴とする
蒸着用るつぼの使用方法。5. The method of using the crucible for vapor deposition according to claim 1, 2, 3 or 4, wherein at least a part of the molten portion of the sintered pellet is on the surface of the stepped portion or above the stepped portion. A method of using a crucible for vapor deposition, characterized in that vapor deposition is finished in a state of being positioned and the melted portion is solidified.
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|---|---|---|---|
| JP2002251646A JP4205915B2 (en) | 2001-09-03 | 2002-08-29 | Vapor deposition apparatus and vapor deposition method |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001265628 | 2001-09-03 | ||
| JP2001-265628 | 2001-09-03 | ||
| JP2002251646A JP4205915B2 (en) | 2001-09-03 | 2002-08-29 | Vapor deposition apparatus and vapor deposition method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003147509A true JP2003147509A (en) | 2003-05-21 |
| JP4205915B2 JP4205915B2 (en) | 2009-01-07 |
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ID=26621524
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002251646A Expired - Fee Related JP4205915B2 (en) | 2001-09-03 | 2002-08-29 | Vapor deposition apparatus and vapor deposition method |
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| JP (1) | JP4205915B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008100299A (en) * | 2006-10-17 | 2008-05-01 | Hoya Corp | Apparatus and method for removing vapor deposition material |
| KR101680258B1 (en) | 2015-08-10 | 2016-11-29 | 한국에너지기술연구원 | Crucible for e-beam evaporator |
-
2002
- 2002-08-29 JP JP2002251646A patent/JP4205915B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008100299A (en) * | 2006-10-17 | 2008-05-01 | Hoya Corp | Apparatus and method for removing vapor deposition material |
| KR101680258B1 (en) | 2015-08-10 | 2016-11-29 | 한국에너지기술연구원 | Crucible for e-beam evaporator |
| US10415134B2 (en) | 2015-08-10 | 2019-09-17 | Korea Institute Of Energy Research | Crucible for electron-beam evaporator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4205915B2 (en) | 2009-01-07 |
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