JP2003146667A - Method of producing die for molding, and production apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that, in a glass substrate of an information recording medium, as for the surface precision of a die for molding thereof, hyperfine foreign matters of several 10 nm height cause troubles to the high recording densification of current information recording medium. SOLUTION: With a die base material 10 after surface polishing as an object, in a first stage, the die base material 10 is immersed into an organic solvent 12, and is cleaned. In a second stage, an oily/aqueous surface substitution agent flowing system 15 is started to the die base material 10. In a third stage, a scrub cleaning system 20 is started to the die base material 10, and scrub cleaning using a surfactant-containing cleaning agent is performed. If required, its immersion in a surfactant-containing cleaning agent 24 is performed before or after the scrub cleaning.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a molding die, and more particularly to a technique for cleaning a die base material by washing. INDUSTRIAL APPLICABILITY The method for manufacturing a molding die according to the present invention is suitably applied to a molding die used for molding a substrate (particularly a glass substrate) of an information recording medium such as a magnetic disk by press molding. However, the present invention is not limited to this, and can be widely applied to molding dies of any mode.

[0002]

2. Description of the Related Art The press molding method is a method of heating and pressurizing a lump that has been finished in high quality with a desired surface accuracy in advance. Has an advantage in Therefore, in recent years,
Glass substrates for magnetic disks are being manufactured by press molding.

A glass substrate for a magnetic disk is required to have a very high surface precision on its substrate surface, and it is promising to form it by a press forming method. The following three points are typically required for a press-molding die used for molding a glass substrate for a magnetic disk.

The first is the surface flatness of the molding surface represented by surface roughness and waviness. When the disk substrate is molded by the press molding method, the surface flatness of the mold is important because the surface of the molding surface of the mold used is transferred to the surface of the disk substrate.

The second is cleanliness. The presence of foreign matter on the molding surface of the die directly leads to defects on the surface of the disk substrate and further deteriorates the performance of the information recording medium. Therefore, a high degree of cleanliness without foreign matter is required.

The third is a large area. Disk substrate
Currently, 2.5-inch type and 3.5-inch type are the mainstream.
The diameter of the molding surface for molding the disk substrate of this size is as large as φ65 to 120 mm, which is considerably larger than that of a mold used for molding an ordinary optical component.

That is, the requirements for the molding surface of the mold used for molding the disk substrate are a large area, and the surface flatness and cleanliness are extremely high, which is a very severe condition.

By the way, the die for press molding is stable under high temperature and high pressure, and is excellent in oxidation resistance, heat resistance and thermal shock resistance, and the shape accuracy of the molding surface is not deteriorated during press molding. It is necessary to have excellent mechanical strength. Therefore, as a die base material, for example, Japanese Patent Publication Sho 62
The thing using the cemented carbide and the ceramics which make tungsten carbide (WC) the main component described in 28091 gazette is used.

FIG. 10 is a perspective view showing a base material in a die for press-molding a glass substrate for a magnetic disk. In order to finish the die base material 50 into a die for press molding, grinding and polishing are usually performed. Since the hardness of the material is high, the whetstone used for the grinding process and the abrasive grains used for the polishing often include a diamond material. In this case, there is a high possibility that a large amount of diamond material deposits will remain on the processed surface.

The grindstone for grinding holds diamond in a resin binder. The polishing agent for precision polishing is a diamond material dispersed in oil. Therefore, there is a high possibility that the organic component including oil adheres and remains on the surface of the die base material 50 after polishing.

In removing the organic components remaining on the die base material, conventionally, the die base material is immersed in an organic solvent,
Cleaning is performed by applying ultrasonic waves (see Japanese Patent Laid-Open No. 6-298538).

Scrub cleaning is also performed while applying an organic solvent.

By the way, as a measure for preventing the mold surface from deteriorating even when the disk substrate is repeatedly molded, a protective film which does not react with the glass substrate may be formed on the surface of the mold base material. A schematic view of the mold at this time is shown in FIG.
Shown in 1. A protective film 51 is formed on the molding surface of the mold base material 50.
On the molding surface of the mold in which the film is formed, foreign matter and mist attached during the formation of the protective film remain, which also causes defects in the disk substrate.

In addition, the mold actually used for molding is
Glass materials, foreign substances, dust, etc. adhere to the protective film. Regarding the cleaning of the molding surface in that case, there is a method of wiping off the deposit with a soft material such as a cotton swab which is water-retaining and impregnated with acid or alkali and does not damage the molding surface (Japanese Patent Publication No. 6-99158). See the bulletin).

Alternatively, after the mold is dipped in hydrofluoric acid or nitric acid, the mold is rinsed with pure water, and then the molding surface of the mold is washed with a mixed solution of cerium oxide and pure water. As the cleaning method, cotton or the like is impregnated with the above mixed solution to polish the molding surface, or a mold is immersed in the mixed solution for ultrasonic cleaning, or the mixed solution is molded onto the molding surface. (See Japanese Patent Laid-Open No. 6-40729).

[0016]

For example, in a substrate used for a magnetic disk mounted in a hard disk drive, a protrusion such as a foreign substance having a height of several tens nm is a problem on the surface thereof. This is because the flying height of the magnetic head is reduced in order to improve the areal recording density.

In order to achieve this level of surface flatness, it is required to remove extraneous foreign matter of a size of several μm or less and a height of several nm or less from the surface of the press-molding die. To be done. This corresponds to a minute defect that cannot be detected by an optical microscope.

In the method for cleaning a molding die described in Japanese Patent Publication No. 6-99158, the molding surface is wiped with a soft material impregnated with an acid or an alkali, but in order to remove fine foreign matters of the above level. Must sufficiently increase the wiping strength or sufficiently increase the number of times of wiping. However, in that case, a cleaning mark may be generated due to the wiping, or an adhered substance may be redeposited, and the defect cannot be reduced.

Further, in the cleaning method described in Japanese Patent Application Laid-Open No. 6-40729, a mixed solution of cerium oxide and pure water is used. It is not possible to remove the organic components and abrasive grains adhered during grinding and polishing at the above level.

[0020]

[Means for Solving the Problems] (1) Regarding the method for manufacturing a molding die, the present invention solves the above problems by taking the following means.

In the first step, the mold base material whose surface has been polished is immersed in an organic solvent for cleaning in the first step. Next, in the second step, the oil / water surface replacement is performed on the mold base material after being immersed in the organic solvent. Then, in a third step, scrub cleaning is performed on the mold base material after the surface replacement, using a surfactant-containing cleaning agent which is a cleaning agent containing a surfactant.

The above-mentioned oil / water surface replacement in the second step is for reasonably and reasonably performing the transition from the first step to the third step. Hereinafter, this point will be described.

In the first step, the die base material is immersed in an organic solvent to dissolve the foreign matter adhering to the molding surface of the die base material and remove the foreign matter from the molding surface. However, not all foreign substances are completely removed. Fine foreign matter remains attached. Scrub cleaning using a detergent containing a surfactant is performed to remove the foreign matter remaining on the surface.

However, the detergent-containing detergent is water-based. The organic solvent used in the first step is oil-based. Affinity between water and oil is poor. When the scrub cleaning using the detergent containing the surfactant is carried out after the die base material is dipped in the organic solvent, the action of the water system is directly applied to the oil system. This is because the affinity is poor, and it is difficult to satisfactorily remove the foreign matter that remains attached.

Therefore, in order to overcome the above-mentioned problem of affinity, the above-mentioned second step is provided. That is, the oil / water surface replacement is performed on the die base material after being immersed in the organic solvent. Now, from the situation where the surface state of the die base material is the oil type of the organic solvent, the surface state of the die base material is replaced with the water type corresponding to the detergent-containing detergent.

Next, in the third step, scrub cleaning is performed using a detergent containing a surfactant. The surfactant-containing detergent penetrates into the interface between the molding surface of the die base material and the foreign matter remaining on the molding surface, reduces the adhesion of the foreign matter to the molding surface, and separates the foreign matter from the molding surface. Since the molding surface is previously replaced with the water-based surface by the oil / water surface replacement, it is possible to effectively permeate the detergent-containing detergent into the interface between the molding surface and the foreign matter. Therefore, the foreign matter can be efficiently separated from the molding surface. Since the foreign matter is cleaned and removed after ensuring the peeling,
Foreign matter can be removed effectively and reliably.

As an invention of a molding die manufacturing apparatus corresponding to the molding die manufacturing method of (1), an organic solvent dipping tank for dipping the surface-polished die base material, With respect to the mold base material after the surface replacement, a surface displacing agent fluid system for performing oil / water surface replacement on the mold base material after being immersed in the organic solvent immersion tank. And a scrub cleaning system for performing scrub cleaning using a surfactant-containing cleaning agent.

(2) Another aspect of the present invention, which relates to a method of manufacturing a molding die, solves the above-mentioned problems by taking the following means.

In the first step, the mold base material whose surface has been polished is immersed in an organic solvent for cleaning in the first step. Next, in the second step, the oil / water surface replacement is performed on the mold base material after being immersed in the organic solvent. Then, as a third step, the mold base material after the surface replacement is immersed in a surfactant-containing cleaning agent for cleaning. Further, in the fourth step, scrub cleaning using the detergent-containing detergent is performed on the die base material after being immersed in the detergent-containing detergent.

This is obtained by further adding cleaning by immersion in a detergent-containing cleaning agent before scrub cleaning using the detergent-containing cleaning agent in the invention of (1) described above. Equivalent to.

As compared with scrub cleaning using a detergent-containing detergent, the immersion in the detergent-containing detergent results in an interface for the interface between the molding surface of the die base material and foreign matter remaining on the molding surface. Permeability of the detergent containing the active agent is further improved. This is because the osmotic pressure due to the pressure of the cleaning agent liquid has a large effect. Since the molding surface is previously replaced with the water surface by the oil / water surface replacement, it is possible to effectively permeate the surfactant-containing detergent into the interface between the molding surface and the foreign matter during immersion.

By dipping in the detergent containing the surfactant, the adhesion of the foreign matter to the molding surface is reduced and the foreign matter is peeled off from the molding surface. This peeling action becomes stronger than that of the above-mentioned invention (1). Therefore, the foreign matter can be more effectively and reliably peeled from the molding surface.

As an invention of a molding die manufacturing apparatus corresponding to the method (2) of manufacturing a molding die, an organic solvent dipping tank for dipping a surface-polished die base material, A surface displacing agent fluid system for performing oil / water surface replacement on the mold base material after being immersed in the organic solvent, and for immersing the mold base material after the surface replacement Immersion bath of surfactant-containing cleaning agent, and scrub for performing scrub cleaning using the surfactant-containing cleaning agent on the mold base material after being immersed in the immersion bath of the surfactant-containing cleaning agent A cleaning system may be included.

(3) Further, the present invention concerning a method of manufacturing a molding die of another aspect solves the above-mentioned problems by taking the following means.

In the first step, the mold base material whose surface has been polished is cleaned by immersing the mold base material in a detergent-containing detergent. Next, in the second step, the surface of the mold base material after being immersed in the detergent containing a surfactant is subjected to water-based / oil-based surface replacement. Then, as a third step, the mold base material after the surface replacement is immersed in an organic solvent for cleaning. Further, in the fourth step, oil-based / water-based surface replacement is performed on the die base material after being immersed in the organic solvent. Finally, in a fifth step, scrub cleaning using a surfactant-containing cleaning agent is performed on the mold base material after the surface replacement.

This is the same as the above-mentioned invention (1), in which cleaning by immersion in a detergent-containing cleaning agent is added, but before cleaning by immersion in the above-mentioned organic solvent. It is equivalent to the one added to.

Prior to cleaning by immersion in an organic solvent,
Since cleaning is performed by immersion in a detergent containing surfactant,
The adhesive force at the interface between the molding surface of the mold base material and the foreign matter remaining on the molding surface can be weakened in advance. After weakening the adhesion, cleaning by immersion in an organic solvent is performed.

However, the organic solvent is oil-based. The surfactant-containing detergent used in the first step is aqueous. Oil and water have poor affinity. When the mold base material is dipped in a detergent-containing cleaning agent and then washed by immersion in an organic solvent, a direct oil-based action with respect to an aqueous system is obtained. This is because the affinity is poor and it is difficult to satisfactorily remove the remaining foreign matter even if the remaining foreign matter has its adhesive force weakened.

Therefore, the second step is provided in order to overcome the above-mentioned problem of affinity. That is, the water-based /
Perform oil-based surface replacement. With this, the surface condition of the mold base material is changed to an oil system corresponding to the organic solvent from the condition that the surface condition of the detergent-containing detergent is water-based.

Next, in the third step, the mold base material after the surface replacement is immersed in an organic solvent for cleaning. Since the adhesion of foreign matter to the molding surface has already been weakened,
Foreign matter is peeled off from the molding surface. Since the molding surface is previously replaced with the oil system by the water / oil system surface replacement, the permeation of the organic solvent into the interface between the molding surface and the foreign matter can be made effective. Therefore, the foreign matter can be efficiently separated from the molding surface. Since the foreign matter is cleaned and removed after ensuring the peeling, the foreign matter can be effectively and reliably removed.

As an invention of a molding die manufacturing apparatus corresponding to the molding die manufacturing method of (3), a surfactant-containing detergent for dipping the surface-polished mold base material A dipping tank, a surface displacing agent fluid system for performing a surface substitution of an aqueous / oil system on the mold base material after dipping in the detergent-containing cleaning agent dipping tank, and the surface displacing agent after the surface substitution. An organic solvent immersion tank for immersing the mold base material, and a surface displacing agent fluid system for performing oil / water surface replacement on the mold base material after immersing in the organic solvent immersion tank , A scrub cleaning system for performing scrub cleaning using a detergent-containing cleaning agent on the mold base material after the surface replacement.

In each of the above inventions (1) to (3), a preferred embodiment is to use isopropyl alcohol for the surface substitution. Isopropyl alcohol has both oil-based properties and water-based properties. Therefore,
The transfer from the oil system to the water system or the transfer from the water system to the oil system can be performed accurately.

Particularly for the above-mentioned oil-based / water-based surface replacement, it is preferable to perform surface replacement by rinsing using isopropyl alcohol and subsequent overflow replacement with pure water. By using overflow substitution with pure water together, the transfer from the oil system to the water system can be further improved.

Further, it is preferable that the above-mentioned water-based / oil-based surface replacement is performed by rinsing with pure water and subsequent rinsing with isopropyl alcohol. By performing the surface replacement in this order, the transfer from the water system to the oil system can be further improved.

In addition, in the above, as a preferred embodiment, in the cleaning by immersion in the above organic solvent, application of ultrasonic waves to the organic solvent can be mentioned. While vibrating the organic solvent, the die base material is also vibrated through the vibration of the organic solvent. The foreign matter can be more effectively peeled from the molding surface, and the reactivity of the organic solvent with respect to the foreign matter can be enhanced.

As an apparatus for manufacturing a molding die corresponding to this, there can be mentioned a structure in which an organic solvent dipping tank is provided with an ultrasonic wave generating means for applying an ultrasonic wave to the contained organic solvent.

In the above, as a preferred embodiment, ultrasonic waves can be applied to the detergent-containing detergent in the washing by immersion in the detergent-containing detergent. While vibrating the detergent-containing detergent, the mold base material is also vibrated through the vibration of the detergent-containing detergent. The permeability of the detergent-containing detergent to the interface between the molding surface and the foreign matter can be further enhanced, and the reactivity of the surfactant-containing detergent with respect to the foreign matter can be enhanced.

As a molding die manufacturing apparatus corresponding to this, a dipping bath of a detergent-containing detergent is provided with an ultrasonic wave generating means for applying ultrasonic waves to the contained detergent-containing detergent. Can be mentioned.

In the above, a preferred embodiment is to use, as the organic solvent, at least one selected from the group consisting of methyl ethyl ketone, methanol, methyl isobutyl ketone, acetone and xylene. It is possible to effectively dissolve and remove the slurry attached to the molding surface during precision polishing of the die base material.

Further, in the above, in a preferred embodiment, the detergent containing a surfactant is weakly acidic to strongly alkaline, and preferably has a hydrogen ion concentration of pH 5 or less.
In the range of -12, more preferably pH 5.5-
It is to use the one in the range of 11.5. If the pH is less than 5, the acidity is too strong and the mold base material may be damaged. When the pH exceeds 12, the alkalinity is too strong and the burden of ensuring safety increases. If the pH is in the range of 5 to 12, these disadvantages can be avoided. pH 5.5
In the range of up to 11.5, inconvenience avoidance becomes more effective, and the effect of removing foreign matter from the molding surface is large,
It is possible to remove fine foreign matter.

Further, in the above, a preferred embodiment is the scrub cleaning using the above-mentioned detergent-containing cleaning agent: scrub cleaning on the side surface of the mold base material, scrub cleaning on the back surface, scrub cleaning on the molding surface. To do it in order. The order of required cleanliness is in the order of molding surface, back surface, and side surface, but scrub cleaning can be reasonably addressed by targeting the molding surface with the highest required cleanness last.

By reliably removing foreign matter from the surface of the die base material as described above, the surface of the die base material can be made highly clean. Therefore, in the molding die produced by forming the protective film on the surface of the mold base material having the high surface cleanability, the surface cleanliness of the protective film can be made high.

The above is intended for the die base material, but the invention for the die having the protective film formed on the molding surface side of the die base material is also applicable. That is, by applying one of the above inventions to a mold with a protective film,
Clean the mold with the protective film.

A substrate molded with a mold having a protective film having a high degree of surface cleansing as a molding surface as described above has excellent surface cleanability. Since the surface cleanliness is sufficiently excellent, the information recording medium manufactured using the substrate can advantageously develop a sufficiently high recording density.

[0055]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a method of manufacturing a molding die according to the present invention will be described below in detail with reference to the drawings.

(Embodiment 1) A method of manufacturing a molding die according to Embodiment 1 of the present invention will be described with reference to FIGS. 1 and 2.

First, a die base material 10 made of a cemented carbide material containing tungsten carbide (WC) as a main component.
Roughing is performed on the molding surface by grinding. Next, precision polishing is performed on the molding surface of the die base material using ultrafine diamond slurry. The surface roughness Ra of the molding surface in this case is 5 nm or less.

A large amount of diamond slurry adheres to the molding surface immediately after polishing. Therefore, it is necessary to perform cleaning, but before cleaning, as shown in FIG. 1A, a mold wiper (wiping tool) 11 made of a soft material impregnated with isopropyl alcohol (IPA) is used. Forming surface 1 of material 10
Wiping (wiping) 0a. In this case, the wiping is performed until there is no foreign matter visually. Since the wiper 11 made of a soft material is used, wiping can be performed without damaging the molding surface 10a.

Next, as shown in FIG. 1B, cleaning with an organic solvent is performed. Immersion tank 13 for containing organic solvent 12
Then, the die base material 10 subjected to the above wiping is immersed. Methyl ethyl ketone is used as the organic solvent 12. In addition, you may use methanol, methyl isobutyl ketone, acetone, xylene etc. as an organic solvent.
After immersing the mold base material 10 in the organic solvent 12, the ultrasonic wave generating means 14 is activated to start the organic solvent 12 and the mold base material 10.
Apply ultrasonic waves to. The frequency of ultrasonic waves is 20-100
It is in the range of kHz. Foreign matter such as diamond slurry remaining on the surface of the mold base material 10 is dissolved by the organic solvent 12. In the melting of the foreign matter, the vibration of the mold base material 10 and the organic solvent 12 due to the application of ultrasonic waves promotes the melting of the foreign matter and the peeling of the foreign matter.

The organic solvent 12 in the dipping tank 13 gradually becomes dirty due to the dissolution of the foreign matter. The greater the degree of fouling, the greater the effect of bringing the fouled organic solvent to the next step. Therefore, in order to prevent dirt from being brought into the next process, three similar dipping tanks 13 are provided, and dipping tanks 13 with a high degree of dirt are sequentially transferred to dipping tanks 13 with a low degree of dirt. repeat. This ensures thorough removal of foreign matter and minimizes the effect of bringing dirty organic solvent into the next process.

In order to prevent the carry-in of the organic solvent more sufficiently and to favorably transfer from the oil system to the water system,
Next, the surface of the die base material 10 is replaced. That is, before proceeding to the scrub cleaning step using the detergent-containing cleaning agent shown in FIG. 2B, the oil / water surface replacement is performed. This surface replacement consists of two steps.

First, as shown in FIG. 1 (c), the surface displacement agent flow system 15 of isopropyl alcohol is activated to the mold base material 10 taken out from the organic solvent dipping tank 13 to start the mold base material. Oil / water surface replacement on the surface of 10 is performed. This surface replacement is repeated an appropriate number of times.

Isopropyl alcohol is an organic solvent and at the same time has high water solubility.
It is a very effective solvent for oil / water surface replacement prior to replacement with pure water in the next step.

By this surface replacement with isopropyl alcohol, the surface properties of the die base material 10 are made more hydrophilic.

Next, as shown in FIG. 2A, the mold base material 10 is put in the overflow tank 16 and the pure water supply pipe 16 is provided.
Pure water 17 is caused to flow from a into the overflow tank 16 to further overflow. The specific resistance of the pure water that overflows is measured, and the overflow process is continued until it becomes 10 MΩ or more. As a result, the surface properties of the die base material 10 are further shifted to an aqueous system. At this time, it is possible to use ultrasonic waves in the overflow tank, but it is premised that the specific resistance of the liquid is 10 MΩ or more when the ultrasonic waves are cut off when moving to the next tank.

Then, the process proceeds to the scrub cleaning step using the surfactant-containing cleaning agent shown in FIG. 2 (b). At the time of this transition, it is important that the surface of the die base material 10 is not dried. If drying occurs, reattachment of the remaining foreign matter will proceed.

In the step of scrubbing using the detergent-containing detergent shown in FIG. 2B, the die base material 10 is placed and fixed on the turntable 18 and impregnated with the detergent-containing detergent. Scrub cleaning is performed using the roll brush 19 thus prepared. The turntable 18 and the roll brush 19 constitute a scrub cleaning system 20. As the surfactant-containing detergent, any detergent can be applied.

The turntable 18 is driven to drive the die base material 1
While rotating 0, the roll brush 19 is brought into contact with the surface of the mold base material 10, and the roll brush 19 is also rotated to perform scrub cleaning. Side surface 10b of mold base material 10 and back surface 10
The scrubbing is performed in the order of c and the molding surface 10a. Here, the surface of the step portion between the large diameter portion and the small diameter portion of the die base material 10 is also included in the side surface 10b.

The roll brush 19 made of PVA (polyvinyl alcohol) was used. As the detergent-containing detergent, one having a hydrogen ion concentration of approximately pH 6 and neutrality was used.

By this scrub cleaning, the surfactant-containing cleaning agent is permeated into the interface between the surface of the die base material 10 and the foreign matter remaining adhering to weaken the adhesive force of the foreign matter, and the roll brush 19 Wipe with rotation to remove foreign matter.

Then, as shown in FIG. 2C, pure water 2
While supplying 1 to the roll brush 19 and the mold base material 10, scrub cleaning is performed. This ensures that the removed foreign matter is thoroughly washed away.

Then, as shown in FIG. 2D, the mold base material 10 is removed from the scrub cleaning system 20, and the rinse agent flow system 22 of pure water is activated to remove the mold base material 10. Perform a pure water rinse on the surface. As a result, the removed foreign matter is thoroughly washed away.

Next, as shown in FIG. 2E, the mold base material 10 is placed and fixed on the turntable 23, and the turntable 23 is rotated at a high speed to spin-dry the mold base material 10. Run to remove residual pure water and dry. This spin drying may be either a rotation type or a revolution type.

After this step, it is desirable to perform heat treatment to thoroughly remove the water adsorbed on the surface.

In the die base material 10 cleaned as described above through the series of steps shown in FIGS. 1 and 2, the number of foreign matters remaining on the molding surface 10a was measured. As shown in FIG. The molding surface 10a has a diameter of 12
It was measured in the range of 0 mm. In FIG. 3, the result of the conventional technique is shown by a white bar graph, and the result of the first embodiment of the present invention is shown by a hatched bar graph. Figure 3
(A) is a histogram of the detected number of foreign matters having a diameter of 10 μm or more with the height of the foreign matters as a parameter. FIG. 3B is a histogram of the number of detected foreign matters having a diameter of less than 10 μm with the height of the foreign matters as a parameter. The height of the foreign matter is 10
It measured about 4 types, 0 nm, 75 nm, 50 nm, and 25 nm.

As shown in FIG. 3A, the number of foreign matters having a size of φ10 μm or more was as follows. The number of foreign matters whose heights are about 100 nm and about 75 nm is almost zero. The number of foreign particles with a height of about 50 nm is
Compared to the conventional technology, it is reduced to one third. Foreign object height 25n
The number of ultra-fine foreign particles of about m was reduced by one digit as compared with the prior art.

Further, as shown in FIG. 3B, φ10 μ
The number of ultrafine foreign matters of less than m was as follows. The number of foreign matters having a foreign matter height of 50 nm or more became almost zero. The number of ultrafine foreign matters having a foreign matter height of about 25 nm was reduced by two digits as compared with the prior art.

As described above, by performing the above-mentioned cleaning step in the method for manufacturing the molding die of the present embodiment,
The ability to remove foreign matter on the molding surface of the die base material can be greatly improved. As a result, the number of defects on the disk substrate can be significantly reduced.

In the above description, the die base material 10 is made of cemented carbide containing tungsten carbide (WC) as a main component, but TiC (titanium carbide) or TiN (titanium nitride) is used. Cermet as the main component (composite material consisting of ceramics and sintered metal) or W
The above-described cleaning method can be applied to a die base material having a C sintered body as a base material, and the same effect was obtained.

(Embodiment 2) Embodiment 2 of the present invention
In the above-described Embodiment 1, the cleaning by immersion in the surfactant-containing cleaning agent is performed between the cleaning step by immersion in the organic solvent and the scrub cleaning step using the surfactant-containing cleaning agent. It corresponds to the one with the addition of the step.

A method of manufacturing the molding die of the second embodiment will be described with reference to FIGS. 4 and 5.

The steps shown in FIGS. 4A to 4D are the same as the steps shown in FIGS. 1A to 2A in the first embodiment. That is, the molding surface of the die base material 10 is roughly processed by grinding, and the molding surface of the die base material is precision-polished using ultrafine diamond slurry to impregnate isopropyl alcohol. The molding surface 10a of the mold base material 10 is wiped using the soft material wiper 11 (FIG. 4A), and then the mold base material 10 is immersed in the immersion tank 13 containing the organic solvent 12. Then, the ultrasonic wave generation means 14 is activated to dissolve the foreign matter such as diamond slurry remaining on the surface of the die base material 10 with the organic solvent 12 (FIG. 4B). This 3
Repeat the operation repeatedly to thoroughly remove foreign substances and minimize the influence of bringing dirty organic solvent to the next process.
Further, the surface displacement agent flow system 15 of isopropyl alcohol is activated for the mold base material 10 to perform oil / water surface replacement on the surface of the mold base material 10, and the mold base material 1
The surface properties of 0 are shifted more to the water system (Fig. 4
(C)). Next, the mold base material 1 is placed in the overflow tank 16.
0 is added, and the pure water 17 introduced from the pure water supply pipe 16a is overflowed to further thoroughly shift the surface properties of the die base material 10 to an aqueous system (FIG. 4 (d)). At this time, it is possible to use ultrasonic waves in the overflow tank,
When transferring to the next tank, it is premised that the specific resistance of the liquid is 10 MΩ with the ultrasonic wave turned off.

In the case of the first embodiment, the process of scrubbing using the detergent containing the surfactant is next carried out. In the present embodiment, as shown in FIG. Cleaning with the agent-containing cleaning agent is performed. The mold base material 10 thus wiped is immersed in a dipping bath 25 containing the detergent 24 containing the surfactant. As the detergent-containing detergent 24, one having a hydrogen ion concentration of pH 6 is used. After the mold base material 10 is dipped in the detergent-containing detergent 24, the ultrasonic wave generating means 26 is activated to activate the detergent-containing detergent 24.
Then, ultrasonic waves are applied to the mold base material 10. The frequency of ultrasonic waves is in the range of 20 to 100 kHz. Mold base material 10
The surfactant-containing cleaning agent 24 is allowed to permeate between the molding surface 10a and foreign matter such as diamond slurry remaining on the surface of the foreign matter to promote the peeling of the foreign matter. When the foreign matter is peeled off, the vibration of the mold base material 10 and the surfactant-containing cleaning agent 24 due to the application of ultrasonic waves promotes the foreign matter peeling.

Due to the foreign matter peeling, the detergent-containing detergent 24 in the dipping tank 25 is gradually soiled. The greater the degree of soiling, the greater the effect of bringing the soiled detergent-containing detergent to the next step. Therefore, in order to prevent dirt from being brought into the next step, three similar dipping tanks 25 are provided, and dipping tanks 25 with a high degree of dirt are sequentially transferred to dipping tanks 25 with a low degree of dirt. repeat. This ensures thorough removal of foreign matters and minimizes the effect of bringing dirty detergent-containing detergent to the next step.

In order to more sufficiently prevent the detergent containing the surfactant from being brought in, the surface of the die base material 10 is rinsed. That is, a pure water rinse is performed before proceeding to the scrub cleaning step using the surfactant-containing cleaning agent shown in FIG. This pure water rinse consists of two steps.

First, as shown in FIG. 5 (a), the mold base material 10 taken out of the immersion bath 25 for the detergent-containing detergent.
On the other hand, the pure water rinsing system 27 is activated, and the surface of the die base material 10 is rinsed with pure water. This pure water rinse is repeated an appropriate number of times.

Next, as shown in FIG. 5B, the mold base material 10 is put into the overflow tank 28, and the pure water supply pipe 28
Pure water 29 is caused to flow from a into the overflow tank 28 to further overflow. The specific resistance of the pure water that overflows is measured, and the overflow process is continued until it becomes 10 MΩ or more. As a result, the surface of the mold base material 10 is further thoroughly cleaned. At this time, it is possible to use ultrasonic waves in the overflow tank, but when moving to the next tank, the specific resistance of the liquid is 10 M with the ultrasonic waves cut off.
It is assumed that it is Ω or more.

Then, as in the case of the first embodiment, the surface of the die base material 10 is not dried, and the process proceeds to the scrub cleaning step using the surfactant-containing cleaning agent shown in FIG. 5 (c). Then, the process is executed. Then, a scrub cleaning step using pure water shown in FIG. Furthermore, after performing a pure water rinse shown in FIG.
The spin drying shown in (f) is performed. Specifically, it is as follows.

As shown in FIG. 5 (c), the mold base material 10 is placed and fixed on the turntable 18, and scrub cleaning is performed using the roll brush 19 impregnated with the surfactant-containing cleaning agent. . Drive the turntable 18 and mold base material 1
While rotating 0, the roll brush 19 is brought into contact with the surface of the mold base material 10, and the roll brush 19 is also rotated to perform scrub cleaning. The roll brush 19 made of PVA (polyvinyl alcohol) was used. As the detergent-containing detergent, one having a hydrogen ion concentration of approximately pH 6 and neutrality was used.

By this scrub cleaning, the surfactant-containing cleaning agent is permeated into the interface between the surface of the mold base material 10 and the foreign matter remaining on the roll base 19 to weaken the adhesive force of the foreign matter. Wipe with rotation to remove foreign matter.

Next, as shown in FIG. 5D, pure water 2
Scrub cleaning while supplying 1. As a result, the foreign substances are removed more thoroughly and the removed foreign substances are washed away.

Next, as shown in FIG. 5 (e), a rinse agent flow system 22 of pure water is activated on the surface of the mold base material 10 removed from the scrub cleaning system 20 to perform a pure water rinse. . As a result, the removed foreign matter is thoroughly washed away.

Next, as shown in FIG. 5F, the die base material 10 is placed and fixed on the turntable 23, and the turntable 23 is rotated at a high speed to spin-dry the die base material 10. Run to remove residual pure water and dry. After this step, it is desirable to perform heat treatment to thoroughly remove the water adsorbed on the surface.

In the die base material 10 which has been cleaned through the series of steps shown in FIGS. 4 and 5 as described above, the result of measuring the number of foreign matters remaining on the molding surface 10a is shown. As shown in FIG. Molding surface 10a, diameter 10
It was measured in the range of 0 mm. The white-filled bar graph shows the conventional technique, and the hatched bar graph shows the present embodiment. FIG. 6A is a histogram of the detected number of foreign matters having a diameter of 10 μm or more with the height of the foreign matters as a parameter. FIG. 6B is a histogram of the detected number of foreign matters having a diameter of less than 10 μm, using the height of the foreign matters as a parameter.

As shown in FIG. 6A, the number of foreign matters having a size of φ10 μm or more is as follows. The number of foreign matters whose heights are about 100 nm and about 75 nm is almost zero. The number of foreign particles with a height of about 50 nm is
Compared with the conventional technology, it is reduced to 1/8. Foreign object height 25n
The number of ultra-fine foreign particles of about m was reduced by one digit as compared with the prior art.

Further, as shown in FIG. 6B, φ10 μ
The number of ultrafine foreign matters of less than m was as follows. The number of foreign matters having a foreign matter height of 50 nm or more became almost zero. The number of ultrafine foreign matters having a foreign matter height of about 25 nm was reduced by two digits as compared with the prior art.

As described above, by performing the above-mentioned cleaning step in the method for manufacturing the molding die of the present embodiment,
The ability to remove foreign matter on the molding surface of the die base material can be greatly improved. As a result, the number of defects on the disk substrate can be significantly reduced.

(Embodiment 3) Embodiment 3 of the present invention
Is equivalent to the one obtained by adding the step of cleaning by immersion in a detergent-containing cleaning agent before the step of cleaning by immersion in an organic solvent in the above first embodiment.

A method of manufacturing the molding die of the third embodiment will be described with reference to FIGS. 7 and 8.

The process of FIG. 7A is the same as the process of FIG. 1C in the case of the first embodiment. That is, the molding surface of the die base material 10 is roughly processed by grinding, and the molding surface of the die base material is precision-polished using ultrafine diamond slurry to impregnate isopropyl alcohol. The molding surface 10a of the die base material 10 is wiped using the soft material wiper 11 (FIG. 7A).

In the case of the first embodiment, the process of scrubbing using an organic solvent is next carried out. In the present embodiment, however, as shown in FIG. Wash with. The mold base material 10 which has been wiped in the immersion tank 25 containing the detergent 24 containing the surfactant.
Soak. As the detergent-containing detergent 24, one having a hydrogen ion concentration of pH 6 is used. After immersing the mold base material 10 in the surfactant-containing cleaning agent 24, the ultrasonic wave generation means 26 is activated to apply ultrasonic waves to the surfactant-containing cleaning agent 24 and the mold base material 10. The frequency of ultrasonic waves is 20 to
It is in the range of 100 kHz. The surfactant-containing cleaning agent 24 is permeated between the molding surface 10a and foreign matter such as diamond slurry remaining on the surface of the mold base material 10 to promote the peeling of the foreign matter. In peeling this foreign substance,
Vibration of the mold base material 10 and the surfactant-containing cleaning agent 24 due to the application of ultrasonic waves promotes foreign matter peeling.

The surface-active agent-containing cleaning agent 24 in the dipping tank 25 gradually becomes dirty due to the foreign matter peeling. The greater the degree of soiling, the greater the effect of bringing the soiled detergent-containing detergent to the next step. Therefore, in order to prevent dirt from being brought into the next step, three similar dipping tanks 25 are provided, and dipping tanks 25 with a high degree of dirt are sequentially transferred to dipping tanks 25 with a low degree of dirt. repeat. This ensures thorough removal of foreign matters and minimizes the effect of bringing dirty detergent-containing detergent to the next step.

Next, in order to prevent the carry-in of the surfactant-containing detergent more sufficiently and to favorably transfer from the water system to the oil system, the surface of the die base material 10 is replaced. That is, before proceeding to the cleaning step using the organic solvent shown in FIG. 8A, water / oil surface replacement is performed.
This surface replacement consists of two steps.

First, as shown in FIG. 7C, the mold base material 10 taken out from the immersion bath 25 for the detergent containing surfactant.
On the other hand, the pure water rinsing system 30 is activated, and the surface of the die base material 10 is rinsed with pure water. This pure water rinse is repeated an appropriate number of times.

Next, as shown in FIG. 7 (d), the surface displacement agent flow system 31 of isopropyl alcohol is activated to perform water / oil system surface replacement on the surface of the mold base material 10. This surface replacement is repeated an appropriate number of times.

Isopropyl alcohol is an organic solvent and at the same time has high water solubility.
Improves the transfer to cleaning by immersion in an organic solvent in the next step.

Next, as in the case of the first embodiment, as shown in FIG. 8A, the mold base material 10 is immersed in the immersion tank 13 containing the organic solvent 12, and then the ultrasonic wave generating means is used. 1
4 is activated, and the foreign matter remaining on the surface of the die base material 10 is dissolved by the organic solvent 12. This process is repeated three times to ensure thorough removal of foreign substances and minimize the effect of bringing dirty organic solvent into the next process. further,
As shown in FIG. 8 (b), the surface displacement agent flow system 15 of isopropyl alcohol is activated for the mold base material 10 to perform oil / water surface replacement on the surface of the mold base material 10, The surface properties of the mold base material 10 are shifted to a water system. Next, as shown in FIG. 8C, the mold base material 10 is put into the overflow tank 16 and the pure water 17 flowing from the pure water supply pipe 16a is allowed to overflow. Further shift to.

Then, while the surface of the die base material 10 is not dried, the step proceeds to a scrub cleaning step using a detergent-containing cleaning agent shown in FIG. 8D, and the step is executed. Then, the scrub cleaning step using pure water shown in FIG. Further, after rinsing with pure water shown in FIG. 8F, spin drying shown in FIG. 8G is performed.
Specifically, it is as follows.

As shown in FIG. 8 (d), the mold base material 10 is placed and fixed on the turntable 18, and scrub cleaning is performed using the roll brush 19 impregnated with the detergent-containing cleaning agent. . Drive the turntable 18 and mold base material 1
While rotating 0, the roll brush 19 is brought into contact with the surface of the mold base material 10, and the roll brush 19 is also rotated to perform scrub cleaning. The roll brush 19 made of PVA (polyvinyl alcohol) was used. As the detergent-containing detergent, one having a hydrogen ion concentration of approximately pH 6 and neutrality was used.

By this scrub cleaning, the surfactant-containing cleaning agent is permeated into the interface between the surface of the die base material 10 and the foreign matter remaining adhering to weaken the adhesive force of the foreign matter, and the roll brush 19 Wipe with rotation to remove foreign matter.

Then, as shown in FIG. 8E, pure water 2
Scrub cleaning while supplying 1. As a result, the foreign substances are removed more thoroughly and the removed foreign substances are washed away.

Next, as shown in FIG. 8 (f), a rinse agent flow system 22 of pure water is activated on the surface of the mold base material 10 removed from the scrub cleaning system 20 to perform a pure water rinse. . As a result, the removed foreign matter is thoroughly washed away.

Next, as shown in FIG. 8G, the die base material 10 is placed and fixed on the turntable 23, and the turntable 23 is rotated at a high speed to spin-dry the die base material 10. Run to remove residual pure water and dry. After this step, it is desirable to perform heat treatment to thoroughly remove the water adsorbed on the surface.

In the mold base material 10 which has been cleaned through the series of steps shown in FIGS. 7 and 8 as described above, the number of foreign matters remaining on the molding surface 10a is measured and the result is shown. It shows in FIG. Molding surface 10a, diameter 10
It was measured in the range of 0 mm. The white-filled bar graph shows the conventional technique, and the hatched bar graph shows the present embodiment. FIG. 9A is a histogram of the detected number of foreign matters having a diameter of 10 μm or more with the height of the foreign matters as a parameter. FIG. 9B is a histogram of the number of detected foreign matters having a diameter of less than 10 μm, with the height of the foreign matters as a parameter.

As shown in FIG. 9A, the number of foreign matters having a size of φ10 μm or more was as follows. The number of foreign matters whose heights are about 100 nm and about 75 nm is almost zero. The number of ultrafine foreign matters having a foreign matter height of about 50 nm and about 25 nm was reduced by one digit as compared with the conventional technique.

Further, as shown in FIG. 9B, φ10 μ
The number of ultrafine foreign matters of less than m was as follows. The number of foreign matters having a foreign matter height of 50 nm or more became almost zero. The number of ultrafine foreign matters having a foreign matter height of about 25 nm was reduced by two digits as compared with the prior art.

As described above, by performing the above-mentioned cleaning step in the method for manufacturing the molding die of the present embodiment,
The ability to remove foreign matter on the molding surface of the die base material can be greatly improved. As a result, the number of defects on the disk substrate can be significantly reduced.

In the above description of the first to third embodiments, the die base material 10 is made of a cemented carbide containing tungsten carbide (WC) as a main component, but TiC or TiN is mainly used. The above cleaning method can be applied to the cermet (composite material composed of ceramics and sintered metal) or WC sintered body as a base material, and the same effect can be obtained. Was given.

Further, in the description of the above-mentioned first to third embodiments, the mold base material 10 is targeted, but a protective film is formed on the surface of the mold base material on the molding surface side as shown in FIG. The first to third embodiments can be applied to the above-mentioned mold, and the same effect can be obtained.

Further, in the above description of the first to third embodiments, the roll brush is used for the scrub cleaning of the die base material, but a brush of another form or another cleaning tool is used instead of the roll brush. May be.

[0121]

According to the present invention, the mold base material or the mold with the protective film is washed by being immersed in an organic solvent to obtain an oil-based /
The surface of the water system is replaced, and the scrub cleaning is performed using the detergent containing the surfactant, so the foreign matter is cleaned and removed after ensuring that the foreign matter is separated from the molding surface. Can be done accurately and reliably.

Further, by adding cleaning by immersion in a detergent-containing cleaning agent before or after scrub cleaning, foreign matter can be more effectively peeled off and ultrafine foreign matter can be thoroughly removed.

When the present invention is applied to a glass substrate of an information recording medium, a glass substrate having extremely excellent surface flatness and cleanliness can be obtained, which contributes to increase the recording density of the information recording medium.

[Brief description of drawings]

FIG. 1 is a process explanatory view showing each cleaning process in a molding die manufacturing method according to a first embodiment of the present invention.

FIG. 2 is a process explanatory view showing each cleaning process in the method of manufacturing a molding die according to the first embodiment of the present invention (continuation of FIG. 1).

FIG. 3 is a histogram showing a cleaning result in the first embodiment of the present invention in comparison with a conventional technique.

FIG. 4 is a process explanatory view showing each cleaning process in the molding die manufacturing method according to the second embodiment of the present invention.

FIG. 5 is a process explanatory view showing each cleaning process in the method for manufacturing a molding die according to the second embodiment of the present invention (continuation of FIG. 4).

FIG. 6 is a histogram showing the cleaning result in Embodiment 2 of the present invention in comparison with the conventional technique.

FIG. 7 is a process explanatory view showing each cleaning process in the method for manufacturing a molding die according to the third embodiment of the present invention.

FIG. 8 is a process explanatory view showing each cleaning process in the method of manufacturing a molding die according to the third embodiment of the present invention (continuation of FIG. 7).

FIG. 9 is a histogram showing a cleaning result in Embodiment 3 of the present invention in comparison with a conventional technique.

FIG. 10 is a perspective view showing a base material in a mold for press-molding a glass substrate for a magnetic disk.

FIG. 11 is a perspective view showing a mold with a protective film formed on the mold base material.

[Explanation of symbols]

10 Mold base material 10a molding surface 11 wiper 12 Organic solvent 13 Organic solvent immersion tank 14 Ultrasonic generator 15 Oil-based / water-based surface displacement agent flow system 16 overflow tank 17 Pure water 18 turntable 19 roll brush 20 scrub cleaning system 21 Pure water 22 Rinse agent flow system 23 turntable 24 Detergent containing surfactant 25 immersion tank 26 Ultrasonic generator 27 Pure water rinse system 28 Overflow tank 29 Pure water 30 Pure water rinse system 31 Water-based / Oil-based Surface Displacement Agent Flow System

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kenta Ito             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Hiroyasu Tsuji             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Norihiko Nakajima             1-1 Tanabe Nitta, Kawasaki-ku, Kawasaki-shi, Kanagawa             Within Fuji Electric Co., Ltd. (72) Inventor Akihiko Okabe             1-1 Tanabe Nitta, Kawasaki-ku, Kawasaki-shi, Kanagawa             Within Fuji Electric Co., Ltd. F-term (reference) 5D112 AA02 AA24 BA03 BA10

Claims (17)

[Claims] 1. A first step of immersing a mold base material after surface polishing in an organic solvent for cleaning, and an oil-based / water-based method for immersing the mold base material in the organic solvent. Molding comprising a second step of performing surface replacement, and a third step of scrub cleaning the surface of the mold base material with a surfactant-containing cleaning agent. Method for manufacturing metal mold. 2. A first step of immersing the mold base material after surface polishing in an organic solvent for cleaning, and an oil / water system for the mold base material after being immersed in the organic solvent. A second step of performing surface replacement, a third step of immersing the mold base material after the surface replacement in a surfactant-containing cleaning agent for cleaning, and immersing in the surfactant-containing cleaning agent And a fourth step of performing scrub cleaning using a surfactant-containing cleaning agent on the mold base material after the cleaning. 3. A first step in which the mold base material after surface polishing is immersed in a detergent-containing cleaning agent for cleaning, and the mold base material after being immersed in the surfactant-containing cleaning agent. A second step of performing water / oil surface replacement on the substrate, a third step of immersing the mold base material after the surface replacement in an organic solvent for cleaning, and immersing in the organic solvent A fourth step of performing an oil-based / water-based surface replacement on the mold base material after the cleaning, and a scrub using a surfactant-containing cleaning agent on the mold base material after the surface replacement. And a fifth step of performing cleaning, a method of manufacturing a molding die. 4. The method of manufacturing a molding die according to claim 1, wherein isopropyl alcohol is used for the surface replacement. 5. The method of manufacturing a molding die according to claim 1, wherein the oil-based / water-based surface replacement is performed by a rinse using isopropyl alcohol and a rinsing using the rinse. A method for manufacturing a molding die, which is performed by subsequent overflow replacement with pure water. 6. The method for manufacturing a molding die according to claim 3, wherein the water-based / oil-based surface replacement is a rinse using pure water and a rinse using isopropyl alcohol subsequent to the rinse. A method for manufacturing a molding die, the method comprising: 7. The method of manufacturing a molding die according to claim 1, wherein the cleaning by immersion in the organic solvent is performed with application of ultrasonic waves. A method for manufacturing a molding die. 8. The method of manufacturing a molding die according to claim 2 or 3, wherein the cleaning by immersion in the detergent-containing cleaning agent is performed with application of ultrasonic waves. A method for manufacturing a molding die. 9. The method of manufacturing a molding die according to claim 1, wherein the organic solvent is selected from the group consisting of methyl ethyl ketone, methanol, methyl isobutyl ketone, acetone and xylene. A method for producing a molding die, which comprises using at least one kind. 10. The method of manufacturing a molding die according to claim 1, wherein the surfactant-containing detergent is weakly acidic to strongly alkaline, preferably hydrogen. A method for producing a molding die, wherein an ion concentration in the range of pH 5 to 12, more preferably in the range of pH 5.5 to 11.5 is used. 11. The method of manufacturing a molding die according to claim 1, wherein the scrub cleaning using the surfactant-containing cleaning agent is performed on the side surface of the mold base material. A method for manufacturing a molding die, which comprises performing the back surface and the molding surface in this order. 12. Applying the manufacturing method according to any one of claims 1 to 11 to a mold having a protective film formed on the surface of the mold base material on the molding surface side, A method of manufacturing a molding die, which comprises cleaning the die with a protective film. 13. An organic solvent immersion tank for immersing a mold base material after surface polishing, and an oil-based / water-based surface for the mold base material after being immersed in the organic solvent immersion tank And a scrub cleaning system for performing scrub cleaning using a surfactant-containing cleaning agent on the mold base material after the surface replacement. Equipment for manufacturing molding dies. 14. A dipping bath of an organic solvent for dipping the die base material after surface polishing, and an oil / water surface replacement for the die base material after soaking in the organic solvent. A surface displacing agent flow system for, and a dipping tank of a surfactant-containing cleaning agent for immersing the mold base material after the surface replacement, and after immersing in a dipping tank of the surfactant-containing cleaning agent And a scrub cleaning system for performing scrub cleaning on the mold base material using a detergent-containing cleaning agent. 15. A dipping bath of a surfactant-containing cleaning agent for dipping the mold base material after surface polishing, and the mold preform after being immersed in the surfactant-containing cleaning agent dipping bath. On the other hand, a surface displacing agent fluid system for performing water / oil surface replacement, an organic solvent immersion tank for immersing the mold base material after the surface replacement, and an organic solvent immersion tank for immersion. A surface displacing agent fluid system for performing an oil-based / water-based surface displacement on the die base material afterwards, and a scrub using a detergent-containing detergent for the die base material after the surface displacement. An apparatus for manufacturing a molding die, including a scrub cleaning system for cleaning. 16. The apparatus for manufacturing a molding die according to claim 13, wherein the immersion tank for the organic solvent applies ultrasonic waves to the organic solvent contained therein. An apparatus for manufacturing a molding die, comprising: a generating unit. 17. The apparatus for manufacturing a molding die according to claim 14 or 15, wherein the immersion bath of the surfactant-containing cleaning agent applies ultrasonic waves to the contained surfactant-containing cleaning agent. An apparatus for producing a molding die, which is provided with an ultrasonic wave generating means for applying the ultrasonic wave.