JP2003145396A5 - - Google Patents
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- Publication number
- JP2003145396A5 JP2003145396A5 JP2001345718A JP2001345718A JP2003145396A5 JP 2003145396 A5 JP2003145396 A5 JP 2003145396A5 JP 2001345718 A JP2001345718 A JP 2001345718A JP 2001345718 A JP2001345718 A JP 2001345718A JP 2003145396 A5 JP2003145396 A5 JP 2003145396A5
- Authority
- JP
- Japan
- Prior art keywords
- grinding wheel
- grinding
- wheel
- wheels
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001345718A JP2003145396A (ja) | 2001-11-12 | 2001-11-12 | 平面研削方法およびその装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001345718A JP2003145396A (ja) | 2001-11-12 | 2001-11-12 | 平面研削方法およびその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2003145396A JP2003145396A (ja) | 2003-05-20 |
JP2003145396A5 true JP2003145396A5 (fr) | 2004-10-28 |
Family
ID=19159014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001345718A Pending JP2003145396A (ja) | 2001-11-12 | 2001-11-12 | 平面研削方法およびその装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2003145396A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4106043B2 (ja) * | 2004-05-07 | 2008-06-25 | 光洋機械工業株式会社 | 平面研削方法およびその装置 |
JP2006247754A (ja) * | 2005-03-08 | 2006-09-21 | Tdk Corp | 研磨装置、研磨部材、磁石の研磨方法 |
JP4901428B2 (ja) * | 2006-11-09 | 2012-03-21 | 株式会社ディスコ | ウエーハの砥石工具、研削加工方法および研削加工装置 |
-
2001
- 2001-11-12 JP JP2001345718A patent/JP2003145396A/ja active Pending
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