JP2003139717A - Method and device for inspecting defect - Google Patents

Abstract

PROBLEM TO BE SOLVED: To speedily carry out inspections on a plurality of inspection items for the surface condition of an object to be inspected. SOLUTION: Every time a group of inspection stations comprising a plurality of inspection means and a plurality of jigs to supply an object to be inspected to each inspection means and to position it are indexed, an inspection by each inspection means is successively carried out. Thereby, a plurality of inspections can be simultaneously carried out.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a defect inspection apparatus for inspecting a cylindrical object such as a photosensitive drum used in a copying machine, a printer or the like.

[0002]

2. Description of the Related Art Conventionally, a photosensitive drum is often inspected visually by a human, but there have been problems such as variations in the determination by the human and a decrease in detection sensitivity due to fatigue.

Therefore, in recent years, as an alternative to visual inspection, some proposals have been made for an inspection apparatus to which an image processing technique is applied. However, the larger the size of the inspection object and the smaller the defect size of the object. Indeed, the load on the inspection machine increased, and it was difficult to shorten the inspection tact.

There are a wide variety of items to be inspected, and inspecting all of these items also causes an increase in the inspection tact, making it difficult to perform high-speed and stable defect inspection. In order to solve the problem of speeding up of such defect inspection, a defect inspection apparatus as disclosed in JP-A-6-44612 has been proposed.

[0005]

According to the above conventional example,
It is said that the tact can be shortened by a configuration that can simultaneously and continuously inspect different defect items such as an inspection using transmitted illumination and an inspection using reflected illumination.

However, according to the above-mentioned conventional method, if an additional inspection unit is to be added,
Due to the complexity of the mechanism that uses the cam, it is difficult to add it, and different inspection units must be arranged in a plane, and there are layout problems such as restrictions on the size of the inspection unit itself and the adjacent units. It was

[0007]

In order to solve the above-mentioned problems, the defect inspection apparatus of the present invention has the following structure. That is, it has a plurality of different inspection means and an inspection station group consisting of a plurality of jigs for supplying and positioning an object to be inspected to each inspection means, and the inspection station group consisting of the plurality of jigs is indexed. It is characterized in that a plurality of inspections can be performed at the same time by sequentially performing the inspections by each inspection means each time the inspection is performed.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a view best showing the features of the present invention. In FIG. 1, reference numeral 1 is a host computer for controlling the entire inspection machine, judging inspection results, and setting judgment standard values. 2 is a computer for simulation,
Numerals 3, 4, 5, and 6 are defect signal processing units for detecting defective portions of signals from the inspection units 9, 16, 17, and 18, 19 is a defect signal processing unit for simulation, and 7 is obtained by the host computer 1. A result collecting unit for collecting detailed data of inspection results, and 15 is a storage medium capable of storing detailed data of inspection results for each work.

Reference numeral 13 denotes an inspection station group consisting of a rotary type rotary table. In this figure, the work 14 can be mounted on six inspection stations. Of course, the number of inspection stations is not limited to six, and a large number of inspection stations are prepared in advance in order to cope with the addition of new inspection units due to an increase in inspection items.

Reference numeral 10 is an intermediate loading section capable of loading a work in the middle, 11 is an intermediate discharging section capable of picking up a work in the middle, and 12 is a conveyor for transporting an inspection work 14. . A mechanism control unit 8 controls the inspection station group 13, the conveyor 14, the intermediate feeding unit 10, the intermediate discharging unit 11, and the like.

Here, the work 14 is conveyed on the conveyor 12 in the direction of the arrow in the figure, is put into the inspection station group 13, and is sequentially sent to the positions of the inspection units 9, 16, 17, and 18 to be inspected. After being inspected, the sheet is discharged and conveyed to the next step by the conveyor 12.

FIG. 2 shows the inspection units 9 and 1 shown in FIG.
It is an example showing the configurations of 6, 17, and 18.

Reference numeral 20 denotes an image pickup means including a line sensor,
Reference numeral 21 is an illuminating unit that illuminates the imaging range of the line sensor. In this configuration example, the work 14 is in the direction of the arrow in the figure-is designed to rotate at a constant speed.
An image of the entire surface of the work 14 can be input by capturing an image of the work surface with the line sensor 20 while rotating.

Here, an example of the inspection unit for detecting the surface condition of the work 14, especially the change in the contrast of the surface such as unevenness, stains, foreign matter, etc. is shown, but it is disclosed in JP-A-9-304029.
It may be configured by a surface state detecting unit as disclosed in Japanese Patent Publication No. 2-40440 or a potential detecting unit as disclosed in Japanese Patent Publication No. 2-44020. These inspection units are respectively arranged on the inspection station group 13 as shown in FIG.
It is also possible to adopt a configuration in which the above inspections are performed simultaneously. As a different configuration example, a plurality of units such as the example shown in FIG. 2 may be arranged in the inspection station group 13 and each unit may inspect a different region of the work 14.

Next, the operation of the present invention will be described in detail with reference to FIG. FIG. 3 is a flowchart showing the configuration of the operation of the inspection system of the present invention.

When the power is turned on in S1, the system is initialized in S2. Examples of the contents to be initialized here include resetting the defect signal processing units 3, 4, 5, and 6, setting the light amount of the illuminating unit 21, setting the initial state of the I / O port for the mechanism control unit 8, and the like. When initialization is completed, S3
The model code indicating the model that should be inspected at present is read, and the parameter corresponding to the model code is stored in the storage means 1.
5, the read defect signal processing units 3, 4, 5, and 6 are set. After that, an operation menu is displayed in S4, and some operation modes can be selected.

Here, some examples of the operation modes will be described.

S5 is an automatic mode, and this mode is selected during normal line operation, and automatic inspection can be continuously performed on the total number of workpieces to be loaded. S6 is a manual mode, and the inspection function is the same as that of the S5 automatic mode, but operations such as work input and inspection can be performed in a single shot. This mode is normally selected when the line is stopped. S
7 is a judgment standard value setting mode, in which the size and number of defects,
In this mode, parameters such as density level and density amplitude, which are used to discriminate non-defective / defective products, can be set and saved. S8 is a system condition setting mode in which conditions necessary for controlling the inspection system, for example, conditions such as a target value of light quantity and a limit value of calculation time can be set and saved. Here, the various parameters in S7 and S8 are stored in the storage means 15 for each model code read in S3. If S9 is selected, all the operations are completed.

Next, the operation contents of each mode just described will be described in detail.

FIG. 4 is a flow chart for explaining the operation in the automatic mode for continuously inspecting all the works during the line operation.

In FIG. 4, when the automatic mode is selected in S100, the jig number is read in S101.

Here, the jig number is an identification number given to each station (jig) of the inspection station group consisting of the rotary type rotary table in FIG. 1, and in the case of the example in FIG. Since it is composed of a jig, it has consecutive numbers of 1 to 6, for example. Of course, the number of jigs is not limited to six, and it is possible to increase it as the number of inspection units increases. In that case, the value of the jig number may be increased according to the number of jigs.

After identifying the jig number, in S102, the start signal for inspecting is waited for. If the start signal does not come here, it is possible that the line is stopped.
At 3, it is determined whether or not the vehicle is stopped for a certain period of time or longer. If it has been stopped for a certain period of time or more, in S114, setting is made so as to reduce the amount of light irradiating the work.

The reason for lowering the light quantity is as follows. In the inspection of the photoconductor as an example of the present invention, if the photoconductor is irradiated with a certain light quantity for a certain time or longer, the work may be exposed. When the work is stopped for a predetermined exposure time or longer, the exposure of the work can be prevented by reducing the irradiation light amount.

If it is still within the fixed time in S113, the jig number is read again in S101 and the start signal is waited in S102. When the activation signal is input (ON) in S102, the light amount value is read in S103. This is to check whether or not the light quantity during the inspection is continuously changing. If there is an abnormality, it is determined in S104 whether or not there is an abnormality, and in S115, the fact that there is an abnormality is displayed, and then the process returns to the activation signal waiting loop in S101 and S102.

At S104, another abnormality is checked. For example, it is checked whether or not the inspection station group 13 has been indexed to a normal position, whether or not the work piece 14 is rotating normally, and whether or not the conditions necessary for the inspection are satisfied. . If any abnormality is recognized, the display is made on the host computer 1 in S115, and the process returns to the activation signal waiting loop in S101 and S102. If no abnormality is found in S104, S
At 105, based on the predetermined light amount value read at S103, if a difference is recognized, the predetermined light amount is set.

Since the condition necessary for the inspection is satisfied in S105, the defect signal processing units 3, 4, 5, 6 are processed in S106.
The inspection start signal for is turned on. When the inspection start signal is turned on, the inspection units 9, 16, 17, 1
The signal from 8 is input to the defect signal processing units 3, 4, 5, and 6. When the input of the defect signal is started, it is determined in S107 whether or not the processes of the defect signal processing units 3, 4, 5, and 6 are completed.

If the processing is not completed, S11
It is checked at 6 whether the predetermined time has passed. If the processing is not completed even if the predetermined time is exceeded, S1
Display the error on the host computer 1 at 15.
The next loop for waiting for a start signal is entered. When the processing is completed within the predetermined time in S107, the processing results from the respective defect signal processing units are totaled in S108, and the individual results totaled in S109 are good (OK) level or defective. (N
G) Determine whether it is a level.

Next, in S110, S108 and S1 are set at predetermined jig number positions in the result table described later with reference to FIG.
Write the result obtained in 09. Since the series of inspection operations is completed up to this point, the measurement end flag is turned ON in S11.
The upper system (not shown) in charge of the line is notified that the inspections of one time are completed. Here, it is judged from S112 whether or not the inspection in the automatic mode is further ended, and if the inspection is to be continued, the inspection can be continuously continued by returning to the series of operations from S101 jig number reading.

In the above description, the stop time in S113, the abnormal light level in S104, the time-over value in S116, etc. are set for each model by the above-mentioned S8 system condition setting mode, and the setting data for each model is It is stored in the storage unit 15.

Next, the determination standard value setting operation described in S7 of FIG. 3 will be described in detail with reference to FIG.

FIG. 5 is a flow chart for explaining the operation of setting the judgment standard value.
It is possible to set and save the parameters such as the number, the density level, and the density amplitude, which are used to discriminate the nondefective / defective product.

When the standard value setting is selected in S200 of FIG. 5, various standard values used for defect determination are selected in the next step. In S201, the size of the defect to be detected can be designated and changed. In S202, the number of detected defect candidates is determined to be good and the number of defective defects is determined, and the number of allowable defect candidates is designated and changed. In step S203, if the density of the defect candidate is higher or lower, the defect is designated and changed. In S204, the difference between the maximum value and the minimum value of the density values of the defect candidates, that is, how many or more amplitudes there are, is designated and changed. S205 is a spare, and is reserved as a spare parameter so that it can be expanded in the future when a new defect needs to be identified.

When the standard value as shown in S201 to S205 is selected, the selected standard value is edited in S206. Editing the standard value means correcting or changing the currently set value. When the editing of the standard value designated in S206 ends, the standard value is saved in S207. The standard value to be stored is stored in the storage medium 15 of FIG. Further, the standard value stored in the storage medium 15 has a structure capable of being saved for each of a plurality of models.

Next, the system condition setting operation described in S8 of FIG. 3 will be described in detail with reference to FIG.

FIG. 6 is a flow chart for explaining the operation of system condition setting. This operation is necessary for controlling the inspection system, for example, setting and saving conditions such as a target value of light quantity and a limit value of calculation time. Can be done. When the system condition setting is selected in S301 of FIG. 6, various system condition items are selected in the next step. In S302, in the example of the inspection unit shown in FIG. 2, control is performed such that the light quantity of the illumination unit 21 is kept constant so that the light quantity reaches the light quantity target value set here. S303 is the setting of the limit value. For example, the time taken for one inspection is monitored, and if it takes more than a certain time, the inspection time limit value for notifying an abnormality as cycle time over, or the setting at S302. There is a light amount limit value for notifying a light amount abnormality when the target light amount is not reached.

S304 is the setting of the mechanism parameter value, for example, the static state of the mechanical unit from the time when the inspection station group 13 consisting of the rotary type rotary table in FIG. 1 is positioned at the position of each inspection unit until the inspection is started. There are set values such as the stop time and the rotation speed of the work 14 shown in FIG. In S305, it is possible to set whether each of the plurality of inspection units 9, 16, 17, and 18 shown in FIG. 1 is valid or invalid (whether to use). Even if any one of the inspection units fails, the inspection unit is invalidated, so that the inspection in another inspection unit can be temporarily continued without stopping the entire inspection system.

When a new inspection unit is added, it may be registered in this part. S306 is reserved as a preliminary parameter in case a new system condition setting becomes necessary in the future.

When the system condition set value as shown in S302 to S306 is selected, the selected condition value is edited in S3.
It will take place at 07. Editing the condition value is to modify or change the currently set value. S3
When the editing of the condition value specified in 07 is completed, S30
At 8, the condition value is saved. The saved condition value is stored in the storage medium 15 of FIG. Storage medium 15
The condition value stored in is structured so that it can be saved for multiple models.

Next, the result table required for realizing the present invention will be described. FIG. 7 is a conceptual diagram showing the configuration of the result table, which is an inspection system including the six inspection station groups 13 described in FIG. 1, and each of the plurality of inspection units 9, 16, 17, 18 is An example of a configuration in which four types of inspections, inspection 1, inspection 2, inspection 3, and inspection 4 are performed will be described.

As shown in FIG. 4, the result table has a unique jig number assigned to each station of the inspection station group 13 and the inspection 1, inspection 2, and inspection 1, which the inspection units 9, 16, 17, 18 are in charge of. It has a matrix structure of inspection 3 and inspection 4.

As shown in FIG. 4, detailed data such as data 1 to data N is written in the contents of each matrix. Here, as an example of the detailed data, defect information such as the area, size, XY coordinates, density, amplitude, and defect classification of the detected defect, and the inspection result is finally determined by using the defect information. The judgment result of whether it was OK or NG, the environmental condition at the time of performing the inspection, for example,
The amount of light, temperature, applied voltage, and the like.

Next, with reference to FIG. 8, how the results are actually written in the result table shown in FIG. 7 will be specifically described.

In FIG. 8, FIG. 8 (g) shows an example of a state where the inspection work is put into the inspection station group 13,
This is an example when the work is input from the top in the order of existence, existence, existence, existence, existence, existence. The state of the result table in the case where the work is input and the inspection is performed in the order of this example will be described below.

FIG. 8A shows the state of the result table when the head of the input inspection work reaches the station of inspection 1. The jig number is 1 when this inspection 1 is performed, and the result is written in the matrix position of inspection 1-jig number 1 in the result table. In the figure, "○" indicates that the data that the inspection result was OK is written, and of course, the area of the detected defect like the example described in FIG. It goes without saying that defect information such as size, XY coordinates, density, amplitude, and defect classification, and environmental conditions at the time of the inspection, such as detailed data such as light intensity, temperature, and applied voltage, are written in this matrix position. Yes. In the drawing, "-" indicates that there is no inspection work at the matrix position of the corresponding inspection unit-jig number.

Next, FIG. 8B shows a state in which the inspection work is advanced by one in the inspection station group. The first work is in inspection 2-jig number 1, and the next work is in inspection 1-jig number 6. Inspection 2-In the matrix position of jig number 1, "○" indicating that the inspection is OK,
At the matrix position of inspection 1-jig number 6, "x" is newly written to indicate that the inspection is NG. "-" Is written in inspection 3-jig number 2 and inspection 4-jig number 3 because there is no inspection work.

FIG. 8C shows a state in which the inspection work is advanced by one in the inspection station group. Since there is no inspection work at inspection 1, there is "-" at inspection 1-jig number 5, at "○" at inspection 2-jig number 6, and at inspection 3-jig number 1 "X", inspection 4
-A result such as "-" is written in place of jig number 2.

Similarly, FIG. 8 (d) and FIG.
The state of the result table when the inspection work progresses as shown in (e) and (f) of FIG. 8 is as shown in the figure.

Here, in the state of FIG. 8 (e), the leading end of the introduced inspection work reaches the ejection position of the inspection station group. The jig number at this discharge position is No. 1, and referring to the data at the jig number No. 1 in the result table, inspection 1 is “◯”, inspection 2 is “◯”, inspection 3 is “x”, In the inspection 4, the result of each inspection unit is determined as “◯”, and at this time, the determination result of the inspection work of the jig number 1 is notified to the upper system (not shown).

FIG. 8 (f) shows the case where the second inspection work from the top reaches the ejection position. The jig number at this discharge position is number 6, and referring to the data at the jig number 6 in the result table, inspection 1 is "x", inspection 2 is "○", inspection 3 is "○", In the inspection 4, the result of each inspection unit is fixed as “◯”. This result is the determination result of the inspection work put in the jig number 6, and is notified to the upper system (not shown).

As described above, the relationship between each inspection unit and the jig number is formed into a matrix structure, and the determination result and the detailed data described above are written in the corresponding locations, so that a plurality of inspections can be performed simultaneously. It is possible to build an inspection system consisting of multiple inspection units.

Here, the result table is written in a storage area such as a memory on the host computer in FIG. The storage area including the memory and the like is shared with the storage area including the memory and the like on the result collecting unit 7 in FIG. 1, and is specifically configured as a shared memory (dual port memory).

The data amount of the result table described with reference to FIG. 7 is one matrix position consisting of the inspection unit and the jig number, and in the case of the present invention, the area, size, and X of the detected defect.
Defect information such as Y-coordinate, density, amplitude, defect classification, etc., and the judgment result of whether the inspection result is finally OK or NG using these defect information, the environmental condition at the time of performing the inspection, for example, Since the amount of light, temperature, applied voltage, etc. are written, it goes up to about 10 Kbytes. With the inspection unit and jig configuration shown in FIG. 7, one inspection work is inspected by four inspection units, so about 10K. * 4
= A data amount of about 40 Kbytes. If all these data are notified to a higher-level system (not shown) by some communication means, the communication time alone will take up a considerable amount of time.

For example, when serial communication (RS232C), which is a general communication means, is used, the standard data transfer rate is 9600 bps, and when trying to transfer data up to 40 Kbytes, (40 * 1024 * 8)
It takes a bit / 9600 = 34 seconds. Further, the host computer 1 includes the defect signal processing units 3, 4, 5,
Since the processing results obtained from No. 6 are totaled and it is necessary to judge whether the inspection work is OK or NG, the processing load becomes considerably large, and the host computer 1 itself interrupts the judgment processing operation at 1 o'clock. Then, it is impossible to write the detailed data of up to 40 Kbytes to the storage medium 15 for each inspection work within the allowable inspection time.

Therefore, as described above, the result table formed in the storage area including the memory on the host computer 1 and the storage area including the memory on the result collecting section 7 are shared. Then, the host computer 1 with a large judgment processing load is OK / N for each inspection unit.
The result collecting unit 7 reads the shared result table for enormous amount of detailed data, and concentrates on notifying the host system (not shown) of the inspection result of G or the like.
By sequentially writing to 5, all data up to 40 Kbytes can be stored within the allowable inspection time. Detailed data for each inspection work is stored in the storage medium 15
It is stored as a database in and can be arbitrarily read by a process management system (not shown).

Next, the operation of the result collecting section 7 will be described with reference to FIG.

FIG. 9 is a flowchart describing the operation of the result collecting unit 7. In FIG. 9, in S900, FIG.
The start-up signal from the mechanism control unit 8 is read. The same start signal is sent to the host computer 1 at the same timing.

In S901, it is determined whether or not the activation signal is input, and the process waits until it is input. When the activation signal is input, the currently fixed jig number is read in S902. Next, it is determined whether or not the jig number read in S903 is updated from the previously read jig number. If the jig has not been updated, the jig is the same as the jig that was activated last time, so the activation signal is read again in S900. If the jig number has been updated, S90
The jig number updated in 4 is set as the jig number of the result table to be read.

Next, in S905, it is determined whether or not the inspection work input is present or empty. In the case of color, since the data on the result table is not fixed (the inspection result with the same jig number may remain 1 cycle before), all the detailed data are treated as zero, and S907
The data is written in the storage means 15 at. If there is an inspection work in S905, the data in the result table area corresponding to the jig number confirmed in S904 is read.
The read detailed data is written and stored in the storage unit 15 in S907. Finally, in S908, it is determined whether or not the result collection is to be continued.
At 900, the start signal is read again. If not continuing, the result collecting operation is ended.

By carrying out the operation of the result collecting section 7 as described above, a huge amount of detailed data can be stored in the storage medium 15 within the allowable inspection time without imposing a load on the host computer 1.
It is possible to write and save on top.

Next, the simulation function, which is another feature of the present invention, will be described in detail with reference to FIG.

FIG. 10 is a flow chart showing the configuration of the simulation operation of the present invention. This operation is realized on the simulation computer 2 in FIG. When the simulation computer 2 is started up, an operation menu is first displayed in S401, and several operation modes can be selected. Here, some examples of the operation modes will be described.

S402 is a sampling mode, which is a mode in which image data of an inspection work obtained from the designated inspection units 9, 16, 17, and 18 is collected at the same time when the automatic continuous inspection is performed. S403 is a recalculation mode in which the same processing as a normal inspection is performed on the image data sampled in S402. S4
Reference numeral 04 is a standard value setting mode in which parameters such as defect size, number, density level, density amplitude, etc. used for discriminating between non-defective products and defective products can be set and saved.

S405 is the standard value transfer mode, and S4
The various standard values set and changed in 04 can be replaced with the standard values of the host computer 1 that is actually inspecting, or the standard values currently set on the host computer 1 can be read. Mode. If S406 is selected, all the operations are completed. Here, the simulation computer 2 and the host computer 1 have exactly the same signal group from the mechanism control unit 8 shown in FIG. 1, for example, an activation signal which is the start timing of the inspection, and a jig at the loading position of the inspection station group 13. A jig number or a work input signal indicating whether or not there is a work at the input position of the inspection station group 13 is connected. These signal groups are realized by contact signals such as I / O.

Next, the operation contents of each mode just described will be described in detail.

FIG. 11 is a flowchart describing the operation in the sampling mode. When the sampling mode is designated, one of the inspection units 9, 16, 17, and 18 for sampling is selected in S500. Then, in S501, a destination to save the sampled image data is designated.

Next, in S502, a sampling mode is selected. Here, the online mode is to sample the image data of the inspection work when the inspection work comes to the position of the inspection unit designated in S500 while the inspection system is fully automatic and continuously operating. , The inspection work desired to be sampled is introduced from the intermediate introduction part in FIG.
When the inspection work arrives at the position of the inspection unit designated by 00, the image data of the inspection work is sampled, and the inspection work introduced in the middle is automatically discharged from the line by the intermediate discharge part 11 in FIG. .

Which of the above two modes is to be used is selected in S502. When the intermediate feed is selected in S502, the S503 intermediate feed sampling mode is set,
In S504, the activation signal is awaited. When the activation signal is input, the jig number is read in S505 and S506 is read.
At, it is checked whether both the work input signal indicating whether or not the inspection work is input and the intermediate input flag indicating the intermediate input work are both ON. If both these two signals are not ON, it is judged that the start signal applied this time is not the start for the intermediate input work,
In step S504 again, the input of the next activation signal is awaited.

When it is confirmed in S506 that both the work input signal and the intermediate input flag are ON, the jig number value read in S505 and the inspection unit specified in S500. Since it is possible to determine how many more times it will be activated from the placement position, the inspection work that has been intermediately input will reach the position of the specified inspection unit, so wait until the intermediate input work reaches the position of the inspection unit specified in S507. . When the intermediate input work comes to the designated position, the defect signal processing unit for simulation 1 in S513.
Image input is performed in 9, and after the image data input in S514 is displayed, in S515, the image data is saved in the save destination specified in S501, and the intermediate input sampling mode is ended.

When online is selected in S502,
S508 Online sampling mode is set, and S50
At 9, the activation signal is awaited. When the activation signal is input, the jig number is read in S510, and it is checked in S511 whether the work input signal indicating whether the inspection work is input is ON. When the work input signal is OFF, it is determined that the inspection work has not been input, that is, it is empty, and again waits for the input of the next start signal in S509.

When it is confirmed in S511 that the work input signal is ON, the remaining number is determined from the jig number value read in S510 and the inspection unit arrangement position designated in S500. Since it is possible to determine whether the inspection work comes to the position of the designated inspection unit if it is activated once, the process waits until the inspection work comes to the position of the designated inspection unit in S512. When the inspection work comes to the designated position, an image is input to the simulation defect signal processing unit 19 in S513, and after the image data input in S514 is displayed, in S515, the image is designated in S501. Save the image data in the save destination and exit the online sampling mode.

By the two sampling modes described above, image data of an arbitrary inspection unit can be sampled without stopping the line even when the inspection work is continuously flowing fully automatically. By using the image data sampled here, by using the recalculation mode described in FIG. 10, it is possible to check the state of the inspection work or the defect appearance state. Next, this recalculation mode operation will be described.

FIG. 12 is a flowchart describing the operation in the recalculation mode.

After selecting the recalculation mode in S600, S6
In 01, the image data to be recalculated is designated. Here, the designated image data is previously stored in the sampling mode described above. S6
When the image data to be recalculated is designated by 01, S
At 602, the image is recalculated. The calculation process here is exactly the same as the calculation process performed on the host computer 1.

When the recalculation is completed, the determination result is displayed in S603, and the image data for which the recalculation has been performed is OK.
You can know whether it is NG or not. As described above, the recalculation performed here is performed not on the actual inspection work on the inspection station group 13 but on the image data stored in advance. It is obvious that the processing can be executed at any timing without being affected by the operation at all. Therefore, even when the inspection work flows continuously in a fully automatic manner, the recalculation can be performed many times without stopping the line and applying an extra load to the host computer 1.

Here, at the time of recalculation, it is possible to variously change the standard value that is currently set to simulate the defect detection situation.
This is performed in the standard value change mode shown in FIG.

FIG. 13 is a flow chart showing the operation of changing the standard value.

When specification value change is designated in S700,
In S701, the standard value change screen is displayed on the simulation computer 2. The content of the standard value to be changed here is the value used for the non-defective product / defective product determination such as the defect size, number, density level, density amplitude, etc., which has already been described with reference to FIG. After changing the value, the value is stored in S703. The standard value stored here can be saved on the host computer side as the standard value used for the actual inspection by the standard value transfer mode described in FIG. Further, the standard value currently used can be loaded on the simulation computer side.

FIG. 14 is a flowchart describing the operation of the standard value transfer mode for saving / loading the standard value described above.

When the standard value transfer mode is selected in S800, it is designated in S801 whether to load or save the standard value. When the load is designated in S801, the standard value currently set on the host computer 1 side is transferred to the simulation computer 2 in S802. When save is designated in S801, the standard value set on the computer for simulation in S803 is transferred to the host computer 1 side, and the value is rewritten.

The operation of the simulation computer 2 has been described above according to its function as the sampling mode, the recalculation mode, the standard value changing mode, and the standard value transfer mode.

As an actual operation, after sampling some images in the sampling mode, recalculation is repeated based on the image data, and the standard value is changed each time in the standard value change mode to detect the defect. After checking the possibility of detection and finally determining that detection is possible, the standard value is fed back to the actual inspection system in the standard value transfer mode. By performing such an operation, even if the inspection work is continuously flowing fully automatically, it is possible to proceed with the examination of the defect detection condition without stopping the line.

[0083]

As described above, according to the present invention,
It has a plurality of different inspection means and an inspection station group consisting of a plurality of jigs for supplying and positioning an object to be inspected to each inspection means, and each time the inspection station group consisting of the plurality of jigs is indexed. In addition, by sequentially performing the inspection by each inspection means, it is possible to perform a plurality of inspections at the same time, and a special mechanism using a cam such as that shown in the conventional example is not required. It can be realized with a simple configuration, which can reduce the cost and realize high-speed inspection.

Further, according to the present invention, since each inspection unit can be arranged on the rotary type rotary table having a plurality of jigs, if the number of jigs is increased in advance,
It is possible to easily cope with the addition of a new inspection unit.

Further, since each inspection unit is arranged on the circumference of the rotary rotary table, there is little interference with the adjacent unit and the apparatus itself can be made small.

[Brief description of drawings]

FIG. 1 is a block diagram showing a first embodiment of a defect inspection apparatus of the present invention.

FIG. 2 is a diagram showing an example of an inspection unit.

FIG. 3 is a flowchart showing the operation of the defect inspection apparatus of the present invention.

FIG. 4 is a flowchart showing an operation when 100% inspection is performed continuously.

FIG. 5 is a flowchart showing an operation of setting a judgment standard value.

FIG. 6 is a flowchart showing the operation of system condition setting.

FIG. 7 is a conceptual diagram showing the structure of a result table.

FIG. 8 is a diagram for explaining specific contents of a result table.

FIG. 9 is a flowchart describing the operation of the result collection unit.

FIG. 10 is a flowchart showing a configuration of a simulation operation.

FIG. 11 is a flowchart describing the operation of the sampling mode.

FIG. 12 is a flowchart describing the operation in the recalculation mode.

FIG. 13 is a flowchart showing the operation of changing the standard value.

FIG. 14 is a flowchart describing a standard value save / load operation.

[Explanation of symbols]

1 Host computer 2 Computer for simulation 3, 4, 5, 6 Defect signal processing unit 7 Result collection section 8 Mechanism control unit 9, 16, 17, 18 Inspection unit 10 Intermediate input section 11 Intermediate discharge part 12 conveyor 13 inspection stations 14 Inspection work 15 storage media 19 Defect signal processing unit for simulation

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2F065 AA49 BB06 BB08 CC00 FF04                       FF42 GG16 HH02 JJ02 JJ09                       JJ25 MM04 PP13 RR06 SS04                 2F069 AA60 BB40 CC02 CC05 GG04                       GG07 GG52 GG59 GG65 GG72                       JJ17 QQ05                 2G051 AA44 AA90 AB01 AB02 AC04                       BA20 CA03 CA04 CA07 DA01                       DA06 DA08 EA14 EB01 EB02                       EC01 FA10                 2H134 QA02

Claims (6)

[Claims] 1. A defect inspection apparatus for inspecting the surface condition of an object to be inspected, comprising a plurality of different inspection means and a plurality of jigs for supplying and positioning the object to be inspected to each inspection means. A defect inspection characterized in that it has a group of stations, and a plurality of inspections can be performed at the same time by sequentially performing inspections by each inspection means each time an inspection station group consisting of the plurality of jigs is indexed. apparatus. 2. A defect inspection method for inspecting the surface condition of an object to be inspected, comprising a plurality of different inspection means and a plurality of jigs for supplying and positioning the object to be inspected to each inspection means. A defect inspection characterized in that it has a group of stations, and a plurality of inspections can be performed at the same time by sequentially performing inspections by each inspection means each time an inspection station group consisting of the plurality of jigs is indexed. Method. 3. The inspection station group according to claim 1,
A defect inspection device comprising a rotary rotary table. 4. The defect inspection apparatus according to claim 1, wherein the inspection object is a photosensitive drum for a printer. 5. The defect inspection method according to claim 2, wherein the inspection object is a photosensitive drum for a printer. 6. A photosensitive drum for a printer, which is inspected by the defect inspection apparatus according to claim 1.