JP2003130299A - Flow channel shut-off valve, container shut-off valve unit and method of washing container interior - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a container shut-off valve unit and a container interior washing method capable of efficiently washing the interior of a cylinder and provide a compact flow channel shut-off valve. SOLUTION: A container shut-off valve unit 11 comprises a container coupling portion 54 connected to a container 1, a hanging fitting 14 provided at an opposite end to the coupling portion 54, a container connection port 12a connected to an opening of the coupled container 1, first and second hose coupling portions 23 releasably connected to hoses 92, respectively, first and second hose connection ports 16a for communication with the spaces of the hoses 92, an exhaust flow channel 17 interconnecting the container connection port 12a and the respective hose connection ports 16a, shut-off valves 26 for opening and closing the respective hose connection ports 16a, and operation members 41 for operating the respective shut-off valves 26.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow path opening / closing valve for blocking or connecting a flow path of a fluid. The present invention also relates to a container opening / closing valve unit attached to a container opening for opening and closing a container opening for filling and removing a filling substance such as a fluid or powder into the inside of the container, and particularly, the inside of the container. The present invention relates to a container opening / closing valve unit suitable for use in a container that needs to be washed without impurities. Furthermore, the present invention relates to a method for cleaning the inside of a container using the container opening / closing valve unit.
The flow path opening / closing valve of the present invention is used when blocking or connecting a fluid flow path such as a fluid outlet / inlet of a container or the inside of a tube. Further, the container opening / closing valve unit of the present invention is used to open / close a container opening such as a gas filling port of a gas cylinder (container) filled with a gas for semiconductor manufacturing such as nitrogen, hydrogen or argon. . Further, the container opening / closing valve unit of the present invention is particularly conveniently used when performing the container internal cleaning method of the present invention for cleaning the inside of the container such as the gas cylinder.

[0002]

2. Description of the Related Art Conventionally, at a cylinder manufacturing plant, the inner surface of the cylinder is treated by sandblasting, etc.
The outer surface of the cylinder is baked. FIG. 6 is a cross-sectional view showing a state during coating of the cylinder. In FIG. 6, a cylinder 1 which is a container for storing gas used in a semiconductor manufacturing process or the like.
Has a cylinder body 2 and a neck ring 3. The neck ring 3 is a container opening 2 of the cylinder body 2.
It is attached by caulking and fixed to the outer surface of the portion (container opening) forming a. A male screw is formed on the outer peripheral surface of the neck ring 3. At the time of coating, a cap 4 shown by a chain double-dashed line is screwed onto the neck ring 3 of the cylinder 1, and the cap 4 covers the container opening 2a of the cylinder body 2. Further, an eyebolt 6 as a suspending tool is provided on the top of the cap 4. By suspending the eyebolt 6 on a suspending tool such as a hook that is transported by a transport device (for example, a chain conveyor) (not shown), the cylinder 1 is suspended, a coating process for applying a baking coating, and a heat drying for heating and drying the coating. It is conveyed continuously to the process. And, while attaching the valve to the container opening 2a of the cylinder 1 after painting,
The name of the gas to be filled is displayed on the outside of the cylinder using paint etc., and the gas is brought into the gas filling factory.

By the way, as described above, the inner surface of the cylinder is roughened by sandblasting for removing dirt before the outer surface is coated. Particles (impurities) such as are attached. Therefore, in the gas filling factory, the cylinder 1 is heated to, for example, 70 to 90 ° C., and the air inside the cylinder is sucked and cleaned while the temperature rises. Then, after cleaning, a predetermined gas such as nitrogen, hydrogen or argon is filled.

[0004]

In recent years, particularly in the manufacture of semiconductors, a high-purity gas is required, and it is desired to remove impurities such as particles from a cylinder before gas filling as much as possible. . It is known that the temperature at which the efficiency of desorbing water from the inner surface of the cylinder becomes high is about 150 ° C. Therefore, in order to enhance the cleaning effect on the inner surface of the cylinder, the treatment temperature in the gas filling factory is set to 1
It is preferable to carry out at about 50 ° C. However, the heat-resistant temperature of the paint applied to the outer surface of the cylinder at the cylinder manufacturing plant is about 150 ° C., and the heat-resistant temperature of the paint indicating the filling gas name applied from above the paint is lower than that. Moreover, the packing of the valve installed in the cylinder delivered from the cylinder manufacturing factory to the gas filling factory has a low heat resistant temperature. Therefore, the heating temperature of the cylinder at the time of heating and exhausting in the cleaning process of the cylinder in the gas filling factory is lower than that of about 150 ° C., which has a high cleaning efficiency.
~ 90 ° C is adopted. As a result, the efficiency of cleaning the inside of the cylinder at the gas filling plant is low. Also,
In the gas filling factory, it is necessary to purposely provide a cleaning process to clean the inside of the cylinder, and the working time for manufacturing the gas cylinder filled with gas is long, and the cylinder cleaning cost is also high. Furthermore, each cylinder is connected to a vacuum pump via a tube in order to suck the air inside each cylinder. However, since the number of suction ports of the vacuum pump is limited, the number of cylinders connected to the vacuum pump at one time is limited. Therefore,
It is difficult to process many cylinders at one time.

In view of the above problems, the present invention has the following technical contents (1) and (2) as technical problems. (1) To provide a small-sized flow channel opening / closing valve that can reliably open and close a flow channel. (2) To provide a container inside cleaning method capable of efficiently cleaning the inside of a cylinder, and a container opening / closing valve unit and a flow path opening / closing valve usable in the container inside cleaning method.

[0006]

(Invention) The flow path opening / closing valve (16, 12) of the present invention has the following structural requirements (A01).
(A04) are provided. (A01) Channels (20a, 50) formed by through holes
A tubular flow path forming member (20; 50) having a), wherein a valve body housing hole (20b, 50b) is formed at one end of the flow path (20a, 50a). The flow path forming member (20; 50) having a valve seat (24, 64) formed at the inner end of the accommodation hole (20b, 50b), (A02) accommodated in the valve body accommodation hole (20b, 50b). At the same time, it contacts the valve seat (24, 64) and
a, 50a) and the valve seat (24, 6)
4) a valve element (26; 66) movable away from the communication position for communicating the flow paths (20a, 50a),
(A03) A ring-shaped operating member (41; 8) rotatably mounted on the outer peripheral surface of the flow path forming member (20; 50).
1), (A04) An interlocking mechanism (31, 36; 71, 76) for moving the valve element (26; 66) between the shut-off position and the communication position when the operation member (41; 81) rotates.

In the flow path opening / closing valve (16, 12) of the present invention having the above-mentioned structural requirements (A01) to (A04), the flow path (2
0a, 50a) having a tubular flow path forming member (20;
When the ring-shaped operation member (41; 81) rotatably mounted on the outer peripheral surface of the valve body (50) is rotationally operated, the interlocking mechanism (31, 36; 71, 76) causes the valve body accommodation hole (20).
The valve element (26; 66) housed in (b, 50b) moves between the shut-off position and the communication position. The valve body (2
6; 66) comes into contact with the valve seats (24, 64) when moved to the shutoff position, and the flow paths (20a, 50a).
Shut off and move to the communication position, the valve seat (24, 6
4) The flow paths (20a, 50a) are communicated apart from each other. Therefore, by rotating the operating member (41; 81), the flow paths (20a, 50a) can be easily blocked and communicated. The operation member (4
1; 81) is rotatably mounted on the outer peripheral surface of the tubular flow path forming member (20; 50), the operation member (4;
1; 81) is compact and space can be reduced. Therefore, the flow path opening / closing valves (16, 12) can be downsized.

The flow path opening / closing valve (16, 12) of the present invention having the above-mentioned structural requirements (A01) to (A04) can have the following structural requirement (A05). (A05) The flow path forming member (20; 50) having the valve body accommodating hole (20b, 50b) having an enlarged inner diameter formed at one end of the flow path (20a, 50a), and the above-mentioned constituent features. In the flow path opening / closing valve (16, 12) of the present invention, the flow path (20a, 50a) of the flow path forming member (20; 50) is used.
The valve body accommodating hole (20b, 5
0b) is formed. Therefore, the valve body (26; 66)
Is housed in the flow paths (20a, 50a), the flow path opening / closing valves (16, 12) can be made compact.

Further, the flow path opening / closing valve (16, 12) of the present invention having the above-mentioned structural requirements (A01) to (A04) or (A01) to (A05) has the following structural requirements (A06) to (A0).
8) can be provided. (A06) Male screw (44,
84), the tubular flow path forming member (20; 50) having an outer peripheral surface, (A07) the male screw (44, 8)
4) which is screwed to the ring-shaped operation member (4) which is rotatable and moves in the moving direction of the valve body (26; 66) when rotated.
1; 81), (A08) The axial movement of the operating member (41; 81) is transmitted to the valve body (26; 66) so that the valve body (26; 66) communicates with the shut-off position. An interlocking mechanism (31, 36; 71, 76) for moving between and.

In the flow channel opening / closing valve (16, 12) of the present invention having the above-mentioned structural requirements (A06) to (A08), the male screw (4) on the outer peripheral surface of the tubular flow channel forming member (20; 50) is used.
A ring-shaped operating member (41; 81) is screwed into the shaft 4, 84). Therefore, since the operating member (41; 81) is arranged along the outer peripheral surface of the flow path forming member (20; 50), it may project outward from the outer surface of the flow path forming member (20; 50). Absent. Therefore, the flow path opening / closing valve (1
6, 12) can be made compact. Also,
When the operating member (41; 81) rotates, it moves in a direction along the flow path of the tubular flow path forming member (20; 50) (moving direction of the valve body (26; 66)). Interlocking mechanism (3
1, 36; 71, 76) are the operation members (41; 8).
The axial movement of 1) is transmitted to the valve body (26; 66) to move the valve body (26; 66) between the shut-off position and the communication position. Therefore, it is possible to provide the channel opening / closing valves (16, 12) that can open and close the channels (20a, 50a) reliably with a compact structure.

Further, the flow path opening / closing valves (16, 1) of the present invention are
2) is characterized by having the following constituent requirements (B01) to (B06). (B01) Cylindrical flow path forming member (20), (B02) Tube (9) provided at the end of the flow path forming member (20).
2) a tube connecting part (23) to which the tube is detachably connected,
(B03) A tube communication channel (20a) that is formed in the flow channel forming member (20) and communicates with the space inside the connected tube (92), (B04) the flow channel forming member (B04) 20) a valve element (26, 66) that moves in the axial direction to open and close the tube communication channel (20a),
(B05) A ring-shaped operation member (41) screwed to the outside of the flow path forming member (20) and moved in the axial direction of the flow path forming member (20) when rotated, (B06) the operation member (4
The interlocking mechanism (31, 3) that transmits the axial movement of 1) to the valve body (26) to move the valve body (26) in the axial direction.
6).

The tube (92) is made of metal,
A tube made of resin or rubber can be used.

In the flow path opening / closing valve (16, 12) of the present invention having the above-mentioned structural requirements (B01) to (B06), the tube (92) is connected to the tube connecting portion (23). Then, when the ring-shaped operating member (41) is rotated, the operating member (41) moves in the axial direction of the flow path forming member (20), and this movement is transmitted through the interlocking mechanism (31, 36) to the valve body. (26) and the valve body (26) is opened and closed.

Further, the flow path opening / closing valve (16, 1) of the present invention is
2) is characterized by having the following constituent requirements (C01) to (C06). (C01) Cylindrical flow path forming member (50), (C02) A container provided at an end of the flow path forming member (50) and having an opening (2a) of the container (1) detachably connected thereto Connection part (5
4), (C03) Container communication flow paths (50a), (C04) which are formed in the flow path formation member (50) and communicate with the space inside the connected container (1). A valve body (66) that moves in the axial direction of the forming member (50) to open and close the container communication flow path (50a), (C05) is screwed onto the outside of the flow path forming member (50) and flows when rotated. A ring-shaped operating member (81) that moves in the axial direction of the passage forming member (50), (C06) The axial movement of the operating member (81) is transmitted to the valve body (66), so that the valve body ( Interlocking mechanism (71, 76) for moving 66) in the axial direction.

In the flow path opening / closing valve (16, 12) of the present invention having the above-mentioned structural requirements (C01) to (C06), the container (1) is connected to the container connecting portion (54). When the ring-shaped operating member (81) is rotated, the operating member (81) is rotated.
Moves in the axial direction of the flow path forming member (50), and this movement is transmitted to the valve body (66) via the interlocking mechanism (71, 76) to open and close the valve body (66).

Further, the container opening / closing valve unit (11) of the present invention is characterized by having the following constituent requirements (D01) to (D010). (D01) Container connecting part (54) removably connected to the opening (2a) of the container (1), (D02) Hanging device provided at the end opposite to the container connecting part (54). (1
4), (D03) Container communication channel (50a) connected to the opening of the connected container (1), (D04) tube (9)
2) The first tube connecting part (23) and the second tube connecting part (23), (D05) to which each of them is detachably connected
A first tube communication channel (20a) and a second tube communication channel (20a), (D06) communicating with the space inside the connected tubes (92), and the container communication channel (50).
a) with the first tube communication channel (20a) and the second tube
An exhaust flow path (17) for communicating with the tube communication flow path (20a), (D07) the first tube communication flow path (20)
a) a first valve body (26) for opening and closing, (D08) a first operating member (41) for operating the first valve body (26), (D0)
9) A second valve body (26) for opening and closing the second tube communication channel (20a), (D010) A second operating member (41) for operating the second valve body (26).

In the container opening / closing valve unit (11) of the present invention having the above-mentioned structural requirements (D01) to (D010), the container opening / closing valve is provided for each container (1) when the air in the container (1) is evacuated. Install the unit (11). Then, a gas suction device is connected to the tube communication channel (20a) of one container opening / closing valve unit (11), and the tube communication channel (20a) of the adjacent container opening / closing valve unit (11) is connected to the tube (92). ) Via.
Then, the valve body (26) of each tube communication flow path (20a) is opened, and the air of the plurality of containers (1) is extracted at once by the gas suction device.

Further, the method for cleaning the inside of the container of the present invention is characterized by having the following constitutional requirements (E01) to (E03). (E01) A container connecting portion (54) having a container communication channel (50a) formed at one end, a suspending tool (14) provided at the other end, and a suspending member (14) provided between the one end and the other end. The first tube communication channel (20a) and the second tube communication channel (20a), the container communication channel (50a), the first tube communication channel (20a), and the second tube communication channel (20a). An exhaust flow path (17) connecting the
The first valve body (2) for opening and closing the tube communication channel (20a)
6), a second valve body (26) for opening and closing the second tube communication channel (20a), a first operating member (41) for operating the first valve body (26), and the second valve A container opening / closing valve unit (11) including a second operation member (41) for operating the body (26) is provided in the container communication flow path (50a).
Attaching step for detachably attaching to the container (1) while being connected to the opening of the container (1), (E02) closing the first valve body (26) and the second valve body (26), and In the state in which the suspending member (14) is suspended by a suspending member, baking paint is sequentially applied to the outer surfaces of the plurality of containers (1), and the coated containers (1) are opened / closed in the container opening / closing valve unit (11). A baking coating step in which the container (1) and the container opening / closing valve unit (11) are sequentially carried out of the heating furnace by being carried into a heating furnace and sequentially heated and dried in the heating furnace; Unit (1
The first tube communication channel (20a) of 1) is connected to an exhaust tube communicating with a vacuum source, and the first valve body (2) is connected.
6) is opened to exhaust the gas in the container (1) to clean the inside of the container (1), and at the same time, the second tube communication channel (20a) of the container opening / closing valve unit (11).
To the container opening / closing valve unit (1) of another subsequent container (1)
1) The second tube body (26) of the preceding container opening / closing valve unit (11) and the subsequent container opening / closing valve unit, which are connected to the first tube communication channel (20a) via a connecting tube (92). A washing step of washing the inside of the subsequent container (1) by opening the first valve body (26) of (11) and exhausting the gas in the following container (1).

In the method for cleaning an inside of a container according to the present invention having the above-mentioned structural requirements (E01) to (E03), the container opening / closing valve unit (11) is mounted on the container (1) in the mounting step. Then, in the baking coating process, the baking paint is sequentially applied to the outer surface of each container (1), and the painted container (1) is carried into the heating furnace together with the container opening / closing valve unit (11) and sequentially heated and dried in the heating furnace. Let Then, in the cleaning step, the container opening / closing valve unit (11) is connected to a vacuum source to wash the container (1) immediately after being successively carried out from the heating furnace, and the subsequent container opening / closing valve unit (11) is also cleaned.
Is connected to the preceding container opening / closing valve unit (11) via a connecting tube (92) to successively wash the succeeding container (1).

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION (Embodiment) Next, a specific example (embodiment) of an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a cylinder to which the container opening / closing valve unit of the present invention is attached. FIG. 2 is a sectional view of the container opening / closing valve unit. Figure 3 is an explanatory view of the tube connection valve,
3A is a partially cutaway front view, FIG. 3B is a IIIB arrow view of FIG. 3A, and FIG. 3C is a IIIC arrow view of FIG. 3A. FIG. 4 is an explanatory view of a cylinder connecting valve, and FIG. 4A is a partially cutaway front view,
4B is a view on arrow IVB in FIG. 4A, and FIG. 4C is a view on arrow IVC in FIG. 4A. FIG. 5 is a partially cutaway front view of the connecting tube. Since the cylinder 1 itself is the same as the conventional cylinder shown in FIG. 6, its detailed description is omitted.

The container opening / closing valve unit 11 detachably attached to the cylinder 1 has a cylindrical cylinder connecting valve 12 to which the cylinder 1 is detachably attached, and a cylinder connecting valve (flow passage opening / closing valve) 12 attached to the lower end. A container opening / closing valve unit main body 13, an eyebolt 14 as a suspending tool provided on the top of the container opening / closing valve unit main body 13, a tubular shape attached to the left and right side portions of the container opening / closing valve unit main body 13. It is formed on the left and right tube connecting valves (flow path opening / closing valves) 20, and the container opening / closing valve unit main body 13 that allows the internal space of the cylinder connecting valve 12 and the internal space of the tube connecting valve 16 to communicate with each other. The exhaust passage 17 is provided.

The tubular passage forming member 20 of the tube connecting valve 16 has a container opening / closing valve unit body 1 at one end.
A small-diameter small-diameter connecting portion 21 to be attached to 3 is formed. A connecting male screw 21a is formed on the outer peripheral surface of the small-diameter connecting portion 21, and the connecting male screw 21a is screwed into a female screw formed at the end of the exhaust passage 17 of the container opening / closing valve unit body 13. In addition, the O-ring 22 is provided in the flow path forming member 20 so that gas does not leak from the gap between the container opening / closing valve unit body 13 and the small diameter connecting portion 21.
Is attached to. When the connecting male screw 21a is screwed into the end portion of the exhaust passage 17 as described above, the O-ring 22 is compressed by the container opening / closing valve unit body 13 and the passage forming member 20. Therefore, the tube connecting valve 16 is connected to the container opening / closing valve unit body 1
3 can be attached in an airtight state.

At the other end of the flow path forming member 20 of the tube connecting valve 16, a flange 23 as a tube connecting portion for clamping is formed. Further, the flow path (tube communication flow path) 20a formed by the through hole inside the flow path forming member 20 of the tube connecting valve 16 has a substantially circular cross section, and the other end side (that is, the flange 23 side).
Has a valve body accommodating hole 20b having a larger diameter than one end side (that is, the small diameter connecting portion 21 side), and a valve seat 24 is formed on an inner end surface of the large diameter valve body accommodating hole 20b. There is.
A blocking plate 26 serving as a valve body is attached to the valve seat 24 so as to be movable in the axial direction of the tube connecting valve 16 (movable in the flow path direction). The blocking plate 26 has a substantially triangular shape, and a gap is formed between the outer peripheral surface of the blocking plate 26 and the inner peripheral surface of the tube communication channel 20a. An O-ring 28 is provided on the end surface of the blocking plate 26 on the valve seat 24 side. And the blocking plate 26
Moves to the valve seat 24 side, and the valve seat 2 is moved through the O-ring 28.
4, the tube communication channel 20a is closed and the fluid flow in the tube communication channel 20a is blocked. On the other hand, when the blocking plate 26 separates from the valve seat 24, the fluid can flow through the gap between the outer peripheral surface of the blocking plate 26 and the inner peripheral surface of the tube communication channel 20a. As described above, since the blocking plate 26 has a triangular shape,
The gap between the outer peripheral surface of the blocking plate 26 and the inner peripheral surface of the tube communication channel 20a becomes large. Therefore, the resistance when the fluid flows becomes small, and the fluid easily flows.

In the flow path forming member 20 of the tube connecting valve 16, three shaft holes 20c are formed outside the tube communication flow path 20a. The shaft holes 20c are arranged substantially parallel to the axis of the tube connecting valve 16, and a shaft 31 with a sealing material is slidably inserted into each shaft hole 20c. The shaft 31 can slide in the axial direction of the tube connecting valve 16. The above-mentioned blocking plate 26 is attached to the three shafts 31 with screws 33. On the other hand, a ring-shaped plate 36 is attached to the other end of the shaft 31 with a nut 37. An operation ring 41 and a pressing ring 42 as operation members are arranged with the outer peripheral portion of the ring-shaped plate 36 interposed therebetween. The presser ring 42 is screwed onto the operation ring 41.
The operation ring 41 and the pressing ring 42 are attached to each other by the ring-shaped plate 36.
It is slidable in the circumferential direction. The operation ring 41 and the pressing ring 42 are used for the tube connecting valve 1.
When moved in the axial direction of 6, the operation ring 41 or the pressing ring 42 pushes the ring-shaped plate 36, and the ring-shaped plate 36 moves in the axial direction of the tube connecting valve 16. Further, a female screw is formed on the inner surface of the operation ring 41, and the female screw is screwed into the male screw 44 formed on the outer peripheral surface of the flow path forming member 20. Since the operation ring 41 is screwed in this manner, when the operation ring 41 is rotated, the operation ring 41 moves in the axial direction of the tube connecting valve 16 with this rotation. The axial movement of the operation ring 41 causes the ring-shaped plate 3 as an interlocking mechanism.
6 is transmitted to the blocking plate 26 via the shaft 31, etc.,
The blocking plate 26 moves in the axial direction of the tube connecting valve 16 to open and close the tube communication channel 20a.

Next, the cylinder connecting valve 12 will be described. Cylindrical flow path forming member 50 of the cylinder connecting valve 12
A small-diameter connecting portion 51 attached to the container opening / closing valve unit body 13 is formed at the upper end thereof. A screw portion 51a is formed on the outer peripheral surface of the small diameter connecting portion 51, and the screw portion 51a is screwed into a female screw formed at the end of the exhaust passage 17 of the container opening / closing valve unit body 13. In addition, the O-ring 5 is provided so that gas does not leak from the gap between the container opening / closing valve unit body 13 and the small diameter connecting portion 51.
2 is attached to the flow path forming member 50. And
When the screw portion 51a is screwed into the end portion of the exhaust passage 17 as described above, the O-ring 52 is compressed by the container opening / closing valve unit body 13 of the container opening / closing valve unit 11 and the passage forming member 50. Therefore, the cylinder connecting valve 12 can be attached to the container opening / closing valve unit body 13 in an airtight state.

At the lower end of the cylinder connecting valve 12, there is rotatably provided a cylinder mounting ring 54 as a container connecting portion which is screwed into the male screw portion of the neck ring 3 of the cylinder 1. That is, a flange 55 is formed on the outer peripheral surface at the lower end of the flow path forming member 50 of the cylinder connecting valve 12, and the flange 55 rotatably engages with the flange 54a at the upper end of the cylinder mounting ring 54 to form the cylinder mounting ring. 54 is prevented from coming off from the flow path forming member 50 downward.

A ring-shaped cylinder contact plate 56 is attached to the lower surface of the flange 55 with screws 57.
An O-ring 58 is attached to the lower surface of the cylinder contact plate 56. Then, when the cylinder 1 is attached to the cylinder connecting valve 12, the tip of the cylinder 1 has an O-ring 5
It contacts the cylinder contact plate 56 via 8 and is sealed by the O-ring 58.

Flow path forming member 5 of the cylinder connecting valve 12
The flow passage 50a inside 0 has a substantially circular cross section, and the lower end side (that is, the flange 55 side) has a larger diameter than the upper end side (that is, the small diameter connecting portion 51 side) that is the valve body accommodating hole 50b.
And a valve seat 64 is formed on the inner end surface of the large-diameter valve body accommodation hole 50b. A shut-off plate 66 as a valve body is provided to face the valve seat 64, and
It is attached so as to be movable in the axial direction of 2 (movable in the direction of the flow path). The blocking plate 66 has a substantially triangular shape, and a gap is formed between the outer peripheral surface of the blocking plate 66 and the inner peripheral surface of the flow path 50a. An O-ring 68 is provided on the end surface of the blocking plate 66 on the valve seat 64 side.
Then, when the blocking plate 66 moves to the valve seat 64 side and comes into contact with the valve seat 64 via the O-ring 68, the flow path (container communication flow path) 50a communicating with the container is closed and the flow path 50a is closed. The fluid flow is shut off. On the other hand, the shutoff plate 66 makes the valve seat 6
4, the fluid can flow through the gap between the outer peripheral surface of the blocking plate 66 and the inner peripheral surface of the flow path 50a. Then, when the cylinder 1 is not attached to the cylinder connecting valve 12, the blocking plate 66 is closed to pass through the flow path 50a of the cylinder connecting valve 12 and the exhaust flow path 17 of the container opening / closing valve unit body 13. It is possible to prevent dust and outside air from entering.

Flow path forming member 5 of the cylinder connecting valve 12
0 has three shaft holes 50c outside the flow path 50a.
Are formed. The shaft holes 50c are arranged substantially parallel to the axis of the cylinder connecting valve 12, and a shaft 71 with a sealing material is slidably inserted into the shaft holes 50c. The shaft 71 can slide in the axial direction of the cylinder connecting valve 12. The above-mentioned blocking plate 66 is attached to the three shafts 71 with screws 73. on the other hand,
A ring-shaped plate 76 is attached to the other end of the shaft 71 with a nut 77. This ring-shaped plate 7
An operation ring 81 and a pressing ring 82 as operation members are arranged with the outer peripheral portion of 6 interposed therebetween. The pressing ring 82 is attached to the operation ring 81 with a screw 83 to be integrated, and the operation ring 81 and the pressing ring 82 are slidable in the circumferential direction with respect to the ring-shaped plate 76. When the operating ring 81 and the pressing ring 82 move in the axial direction of the cylinder connecting valve 12, the operating ring 81 or the pressing ring 82 pushes the ring-shaped plate 76, and the ring-shaped plate 76 moves in the axial direction of the cylinder connecting valve 12. Moving. Also, the operation ring 8
A female screw is formed on the inner surface of 1, and this female screw is screwed into the male screw 84 formed on the outer peripheral surface of the flow path forming member 50. Since the screw is engaged in this way, when the operation ring 81 is rotated, the operation ring 81 moves in the axial direction of the cylinder connecting valve 12 with this rotation. The movement of the operating ring 81 in the axial direction is transmitted to the blocking plate 66 via the ring-shaped plate 76, the shaft 71, and the like as the interlocking mechanism, and the blocking plate 66 moves in the axial direction of the cylinder connecting valve 12 to move the flow. Open and close the path 50a.

As shown in FIG. 5, a connecting tube 92 is connected to the flange 23 of the tube connecting valve 16 by a clamp 91. The tube 92 includes a flexible bellows-shaped tube body 93 and a connection port portion 94 provided at an end of the tube body 93.
A collar portion 95 is formed at the end of the connecting port portion 94. Further, between the tube connecting valve 16 and the tube 92, a sealing ring 97 having an O-ring 96 fitted on its outer periphery is arranged. And the clamp 91
When the flange 23 of the tube connecting valve 16 and the flange portion 95 of the tube 92 are fixed close to each other, the O-ring 96 between the flanges 23 and 95 is compressed, and the connecting portion between the tube connecting valve 16 and the tube 92 is compressed. Is hermetically sealed.

Cylinder 1 of the embodiment having such a configuration
The process of painting and cleaning the will be described below. In order to remove rust and the like, the inner surface and the outer surface of the cylinder 1 are surface-treated by sandblasting or polishing (surface treatment step). Next, attach the container opening / closing valve unit 11 to the cylinder 1
Attach to (container open / close valve unit installation process). That is, the cylinder mounting ring 54 of the container opening / closing valve unit 11 is screwed onto the neck ring 3 of the cylinder 1 to attach the container opening / closing valve unit 11 to the cylinder 1. At this time, the shutoff plate 26 of the tube connecting valve 16 and the shutoff plate 66 of the cylinder connecting valve 12 have the valve seats 24, 64.
Abutting against and closing the flow path. In this way, the container opening / closing valve units 11 are attached to the plurality of cylinders 1, respectively.

Then, one container opening / closing valve unit 1
A vacuum pump (not shown), which is a gas suction device, is connected to the first first tube connecting valve 16 via an exhaust tube (not shown), and the second tube connecting valve of the container opening / closing valve unit 11 is connected. 16,
Another container opening / closing valve unit 1 via the tube 92.
The first tube connecting valve 16 of No. 1 is connected. In this way, a plurality (for example, several to several tens) of the container opening / closing valve units 11 are sequentially connected. Then, the operation rings 41, 81 of each container opening / closing valve unit 11 are rotated to separate the blocking plates 26, 66 from the valve seats 24, 64,
Open the flow path. The shut-off plate 26 of the second tube connecting valve 16 of the rearmost container opening / closing valve unit 11 is kept in contact with the valve seat 24 to maintain the closed state.
Then, the vacuum pump is operated to exhaust the air in the plurality of cylinders 1 (pre-vacuum exhaust step). That is, in the pre-vacuum exhaust process, the air in the plurality of cylinders 1 is exhausted to the exhaust passage 17 of the container opening / closing valve unit 11 and the tube 9.
2 and other exhaust valves 17 of the container opening / closing valve unit 11 and the like, and are sequentially exhausted to a vacuum pump. By this pre-vacuum exhaust process, the processing time in the high vacuum exhaust process of the subsequent process is shortened and oxidation of the inner surface of the cylinder 1 is prevented.

Then, the operating ring 41 of the tube connecting valve 16 of each container opening / closing valve unit 11 is rotated to bring the shut-off plate 26 into contact with the valve seat 24 to close the flow passage, and the exhaust tube and the connecting tube. Remove 92 from the tube connecting valve 16. Then, a hook (not shown) or the like is hooked on the eyebolt 14 of the container opening / closing valve unit 11 to suspend the cylinder 1, and baking coating is performed (baking coating step). In this baking coating process, the coated cylinder 1 is passed through a heating furnace.

When the cylinder 1 comes out of the heating furnace, a vacuum pump (not shown) is promptly connected to the first tube connecting valve 16 of the container opening / closing valve unit 11 via the exhaust tube, and The operation ring 41 of the tube connecting valve 16 is rotated to separate the shut-off plate (valve body) 26 from the valve seat 24 to open the flow path, and the vacuum pump is operated to exhaust the air in the cylinder 1. Then,
A container opening / closing valve unit (that is, a preceding container opening / closing valve unit) in which the air in the cylinder 1 is exhausted 11
The second tube connecting valve 16 of the preceding container opening / closing valve unit 11 is connected to the second tube connecting valve 16 of the preceding container opening / closing valve unit 11 via the tube 92. 1
6 and the operation ring 41 of the first tube connecting valve 16 of the subsequent container opening / closing valve unit 11 are rotated to separate the shutoff plate 26 from the valve seat 24 to open the flow path, Is sequentially exhausted through the preceding container opening / closing valve unit 11. In this way
While sequentially connecting a plurality of container opening / closing valve units 11,
The air in the cylinders 1 is exhausted. (High vacuum evacuation process which is a gas suction process). This high vacuum evacuation step is performed on the cylinder 1 which has a high temperature (for example, about 150 ° C.) due to heating during baking coating, and a heat source during baking coating can be used. In the process after the high vacuum evacuation process, about 30 cylinders 1 at a time are continuously
The eyebolt 14 of the container opening / closing valve unit 11 is carried by a chain while being suspended by a hook. The transport speed is set so as to move the interval (about 300 to 350 mm) between the preceding cylinder 1 and the following cylinder 1 in 60 to 90 seconds.

Next, the cylinder 1 whose internal pressure is low
The cylinder 1 is filled with an inert gas such as high-purity nitrogen gas so that the outside air does not enter (inert gas filling step). Further, by filling with this inert gas, the inside of the cylinder 1 can be maintained in a clean and clean state.
After that, the container opening / closing valve unit 11 is removed, and a commercially available valve (that is, a normal one that is attached when the cylinder is sold) (not shown) is attached to the cylinder 1, and the name of the gas to be filled is displayed with paint or the like ( Valve mounting process). After that, fill the gas filling plant with a cylinder 1
And the cylinder 1 is filled with a predetermined gas such as nitrogen, hydrogen or argon at a gas filling factory.

In the above-described embodiment, the vacuum pump is connected to the container opening / closing valve unit 11 of the cylinder 1 immediately after the baking coating is finished, and the air in the cylinder 1 is exhausted for cleaning. Therefore, the high temperature (for example, 150
Exhaust, that is, cleaning is performed in the state of (° C.). In this way, the treatment temperature can be raised above the conventional temperature of 70 to 90 ° C., and particles such as water are efficiently released from the inner surface of the cylinder 1. As a result, the inside of the cylinder 1 can be efficiently cleaned. Note that the valve is attached and the name is displayed by paint after cleaning, and is not adversely affected by an increase in processing temperature. As a sealing member such as an O-ring attached to the container opening / closing valve unit 11, a member having heat resistance that can withstand about 150 ° C. is used.

Further, since the succeeding container opening / closing valve unit 11 is connected to the preceding container opening / closing valve unit 11 connected to the vacuum pump via the tube 92, a plurality of cylinders can be simultaneously charged by one vacuum pump. The air in 1 can be exhausted.

The embodiment of the present invention has been described in detail above.
The present invention is not limited to the above embodiment,
Within the scope of the present invention as set forth in the claims,
Various changes can be made. Modifications of the present invention are exemplified below. (1) As the flow path forming members 20 and 50 of the present invention, not only a linear tubular member but also an L-shaped tubular member that is bent in the middle portion can be used. (2) It is not always necessary to perform all the steps performed in the embodiment. (3) In the embodiment, the suspending tool is the eyebolt 1
However, if the cylinder 1 can be suspended, the structure of the suspending tool can be appropriately changed. For example, it could be a hook. (4) It is preferable to perform the gas suction step immediately after the baking coating step. At least, it is performed before returning to the normal temperature. Particularly, it is preferably 100 ° C. or higher, more preferably about 140 ° C. or higher. (5) In the embodiment, the tube connecting valve 16 and the cylinder connecting valve 12 are formed separately from the container opening / closing valve unit main body 13, but they may be integrally formed. (6) In the embodiment, the neck ring 3 is formed separately from the cylinder 1, but it may be integrally formed.

[0039]

The present invention has the following operational effects. (1) By rotating the operation member, the flow path can be easily blocked and communicated. Further, since the operating member is rotatably mounted on the outer peripheral surface of the tubular flow path forming member, the operating member has a compact structure and requires a small space. Therefore, a small flow path opening / closing valve can be provided. (2) In the container opening / closing valve unit, a suspendable member for the container opening / closing valve unit is hung by a transportable hanging member so that the container opening / closing valve unit and the container are hung by the hanging member. The baking and painting process and the container inside cleaning process of exhausting and cleaning the inside of the container can be sequentially and continuously carried. In addition, the inside of the container can be sealed or exhausted in each work process. (3) Since each container opening / closing valve unit has two tube connecting valves, the container opening / closing valve units can be connected to each other by a tube. Therefore, the air of a plurality of cylinders can be exhausted at one time with one gas suction device. (4) A gas suction device is connected to the exhaust port of the container opening / closing valve unit immediately after the baking coating process (during a high temperature condition after being discharged from the heating furnace until it returns to normal temperature), and Since the gas in the cylinder can be sucked and cleaned by using the heating, the heating during the baking coating can be effectively used. (5) After the cleaning process is completed, the container opening / closing valve unit can be removed, the shipping valve can be attached, and the name can be displayed by paint. Therefore, the name display paint and the shipping valve are not heated to a high temperature. . For this reason,
The display of the name on the valve sticker or paint will not be adversely affected by the temperature rise. (6) Since the operation member for operating the valve body has a ring shape and is screwed onto the flow path forming member and the outside of the flow path forming member,
The container opening / closing valve unit is prevented from significantly protruding. Therefore, the container opening / closing valve unit becomes compact and the operation member is less likely to be accidentally caught by another member or the like.

[Brief description of drawings]

FIG. 1 is a sectional view of a cylinder to which a container opening / closing valve unit of the present invention is attached.

FIG. 2 is a sectional view of a container opening / closing valve unit.

FIG. 3 is an explanatory view of a tube connecting valve.
A is a partially cutaway front view, FIG. 3B is a view taken along the line IIIB in FIG. 3A,
FIG. 3C is a view on arrow IIIC of FIG. 3A.

FIG. 4 is an explanatory view of a cylinder connecting valve, and FIG.
4C is a partially cutaway front view, FIG. 4B is a IVB arrow view of FIG. 4A, and FIG. 4C is a IVC arrow view of FIG. 4A.

FIG. 5 is a partially cutaway front view of the connecting tube.

FIG. 6 is a cross-sectional view showing a state during coating of the cylinder.

[Explanation of symbols]

1 ... Container (cylinder), 2a ... Opening (container opening), 11
... Vessel opening / closing valve unit, 12 ... Flow path opening / closing valve, 1
4 ... Suspended tool (eye bolt), 16 ... Flow path opening / closing valve, 17 ... Exhaust flow path, 20 ... Flow path forming member, 20a ... Flow path (tube communication flow path), 20b ... Valve body accommodating hole, 23 ...
Collar part (tube connecting part), 24 ... Valve seat, 26 ... Valve body (blocking plate), 31 ... Shaft, 36 ... Ring plate, 4
1 ... Operating member, 44 ... Male screw, 50 ... Flow path forming member,
50a ... flow path (container communication flow path), 50b ... valve body accommodating hole,
54 ... Container connecting part (cylinder mounting ring), 64 ... Valve seat,
66 ... Valve body (blocking plate), 71 ... Shaft, 76 ... Ring plate, 81 ... Operating member, 84 ... Male screw, 92 ...
Tubes (connecting tubes) (31, 36), (71, 7)
6) ... interlocking mechanism.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3B116 AA23 AB53 BB72 BB82 CD11                 3E072 AA01                 3H052 AA01 BA25 BA35 CA01 CA24                       EA01 EA06 EA16                 3H063 AA01 BB01 BB32 DA01 DB06                       GG03 GG11

Claims (7)

[Claims] 1. A flow channel opening / closing valve having the following structural requirements (A01) to (A04), and a tubular flow channel forming member having a flow channel formed by (A01) through holes, wherein: A flow path forming member having a valve body accommodating hole formed at one end of the passage and a valve seat formed at an inner end of the valve body accommodating hole; and (A02) accommodating in the valve body accommodating hole. A valve element movable between a shut-off position that abuts the valve seat and shuts off the flow passage, and a communication position that communicates the flow passage away from the valve seat, (A03) of the flow passage forming member A ring-shaped operation member rotatably mounted on the outer peripheral surface, and (A04) an interlocking mechanism for moving the valve element between the shut-off position and the communication position when the operation member is rotated. 2. A flow path opening / closing valve according to claim 1, wherein the flow path opening / closing valve according to claim 1 has the following constitutional requirement (A05), wherein the valve body accommodating hole having an enlarged inner diameter is formed at one end of the flow path. Flow path forming member, 3. The flow path opening / closing valve according to claim 1 or 2, comprising the following constituent requirements (A06) to (A08):
A tubular flow path forming member having an outer peripheral surface on which a male screw is formed, (A07) a ring-shaped operation member that is screwed into the male screw and moves in the moving direction of the valve body during rotation, ( A08) An interlocking mechanism that transmits the axial movement of the operating member to the valve body to move the valve body between the shutoff position and the communication position. 4. A flow path opening / closing valve having the following structural requirements (B01) to (B06), (B01) a tubular flow path forming member,
(B02) A tube connecting portion which is provided at an end of the flow path forming member and in which a tube is detachably connected. (B03) A tube connecting portion which is formed in the flow path forming member and is connected to the inside of the tube. Tube communication flow path that communicates with the space,
(B04) A valve element that moves in the axial direction of the flow path forming member to open and close the tube communication flow path, (B05) Screws on the outside of the flow path forming member and rotates to cause the axial direction of the flow path forming member. A ring-shaped operation member that moves to (1), (B06) an interlocking mechanism that transmits the movement of the operation member in the axial direction to the valve body to move the valve body in the axial direction. 5. A flow channel opening / closing valve having the following structural requirements (C01) to (C06), (C01) a tubular flow channel forming member,
(C02) A container connecting portion which is provided at an end of the flow path forming member and in which a container is detachably connected, (C03) is formed in the flow path forming member, and inside the connected container A container connecting portion that communicates with a space, (C04) a valve body that moves in the axial direction of the flow passage forming member to open and close the container connecting portion, and (C05) screw on the outside of the flow passage forming member and rotate. A ring-shaped operating member that moves in the axial direction of the flow path forming member, (C06) an interlocking mechanism that transmits the axial movement of the operating member to the valve body and moves the valve body in the axial direction. 6. A container opening / closing valve unit having the following constituent features (D01) to (D010), (D01) a container connecting part detachably connected to an opening of the container, and (D02) the container connecting part. Suspended tool provided at the opposite end, (D03)
A container connecting part connected to the opening of the connected container, (D
04) A first tube connecting part and a second tube connecting part to which the tubes are respectively detachably connected, and (D05) a first tube connecting flow path and a second tube connecting flow path communicating with the space inside the connected tube. , (D06) an exhaust flow path for communicating the container connecting part with the first tube communication flow path and the second tube communication flow path, (D07) a first valve body for opening and closing the first tube communication flow path, ( D08) A first operating member that operates the first valve body, (D09) a second valve body that opens and closes the second tube communication flow path, and (D010) a second operating member that operates the second valve body. 7. A method for cleaning an inside of a container, which comprises the following steps (E01) to (E03): (E01) A container connecting portion having a container communication channel formed at one end, and a suspended member provided at the other end. A lowering tool, a first tube communication channel and a second tube communication channel provided between the one end and the other end, the container coupling section, the first tube communication channel and the second tube communication channel. An exhaust flow path to be connected, a first valve body that opens and closes the first tube communication flow path, a second valve body that opens and closes the second tube communication flow path, and a first operation that operates the first valve body. A mounting step of removably mounting the container opening / closing valve unit including a member and a second operating member for operating the second valve body to the container in a state where the container connecting portion is connected to the opening of the container; E02) The first valve body and the second valve body are closed, and the suspending tool is suspended. Bake coating process in which the outer surface of a plurality of the containers is sequentially coated in a state of being suspended by a barb member, and the coated containers are carried into a heating furnace together with the container opening / closing valve unit and sequentially heated and dried in the heating furnace. (E03) The first tube communication passage of the container opening / closing valve unit is connected to an exhaust tube communicating with a vacuum source immediately after the container and the container opening / closing valve unit are successively carried out from the heating furnace, and The valve body is opened to exhaust the gas in the container to clean the inside of the container, and the second tube communication channel of the container opening / closing valve unit is connected to the first container opening / closing valve unit of another container. A second valve body of the preceding container opening / closing valve unit and a first valve of the following container opening / closing valve unit, which is connected to the tube communication channel via a connecting tube A washing step of washing the inside of the subsequent container by opening the body and exhausting the gas in the following container.