JP2003124630A - Method for manufacturing laminated ceramic component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing electronic component which enables sufficient packing of electrode material and stable connection of a small diameter via by eliminating spherical deposit on a wall surface of a laser-worked green sheet. SOLUTION: In a ceramic green sheet formed on a polyethylene terephthalate film, a plurality of penetrating vias are formed by using a converged beam of carbon oxide laser, from above the polyethylene terephthalate film. From the film side, powder is sprayed with high pressure on the ceramic green sheet having the polyethylene terephthalate film in which a plurality of penetrating vias are formed. The ceramic green sheets which have passed the spraying process are laminated and a green laminate is formed, which is baked at a prescribed baking temperature.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a laminated ceramic component in which a surface layer and an internal layer are connected by electrodes and a plurality of internal vias.

[0002]

2. Description of the Related Art In recent years, with the miniaturization and higher frequency of electronic parts used in the field of communication such as mobile phones, monolithic ceramic parts in which capacitors and coils are integrated in one part have come to be used. ing. In these laminated ceramic parts, capacitors and coils formed by internal electrodes in a low dielectric constant insulating layer are connected to each other, and surface layer electrodes and internal electrodes or internal electrodes and internal electrodes are connected by vias. More specifically, the circuit as shown in FIG. 1 is provided inside the laminated ceramic component as shown in FIGS. 2, 3 and 4, and a chip component such as a capacitor is mounted on the surface layer. 1 to 4 is a two-stage low-pass filter, in which capacitors C1 to C2 and coils L1 and L2 are formed on an insulator layer 1 by internal electrodes 2 to 5.
The circuit is constructed as shown in. In addition, 6 to 9 are external electrodes, 10 to 13 are surface layer electrodes, 14 to 17 are rear surface electrodes, and 18 is a via electrode.

The above-mentioned general method for producing a laminated ceramic component having electrodes formed on the front and back surfaces is such that each electrode pattern is printed on a plurality of ceramic green sheets using an internal electrode paste, After laminated at a predetermined position, cut into individual pieces and fired, electrodes are formed on the front and back surfaces and fired again to form external electrodes to produce a laminated ceramic component.

Further, each electrode pattern is printed on a plurality of ceramic green sheets by using an internal electrode paste and laminated at predetermined positions, and electrodes are first formed on the front and back surfaces to simplify the process. Form with paste,
There is also a method of manufacturing a laminated ceramic component by forming external electrodes after cutting into individual pieces and firing.

Further, in the case of a laminated ceramic component including a via for connection inside, a step of punching a hole in the ceramic green sheet by using punching and a step of filling the electrode material therewith are added before forming the electrode pattern. To be done.

Further, there is a method of forming a hole in a green sheet by using a laser in order to form a via having a small diameter at high speed. However, when a hole is formed in the green sheet using a laser, the glass component in the ceramic green sheet has a size of several μm to about 30 μm due to the heat of the laser on the wall surface of the hole, as shown in FIG. There was a problem of spherical precipitation.

[0007]

The glass component in the ceramic green sheet has a size of several μm to about 3 on the wall surface of the hole.
Since the particles are deposited in a spherical shape of 0 μm, the spherical precipitate becomes an obstacle, and it becomes difficult to sufficiently fill the electrode material as shown in FIG. 7. As shown in FIG. 8, in the sintered body obtained by firing this, cavities are generated at the interface between the via electrode of the sintered body and the ceramic, resulting in deterioration of characteristics and reliability of connection.

Further, in the method of suppressing the contraction of XY in order to form the dimension of the electrode with high accuracy, the X of the via is further reduced.
Since the shrinkage of Y is also limited, it is necessary to sufficiently fill the via with the electrode material. However, the spherical precipitate hinders this and becomes a problem for stable connection.

Therefore, in order to solve the above-mentioned conventional problems, the present invention removes spherical precipitates on the wall surface of the green sheet by laser processing, can sufficiently fill the electrode material, and can stably connect vias having a small diameter. An object of the present invention is to provide a method of manufacturing an electronic component that can be performed.

[0010]

In order to achieve the above object, a method of manufacturing an electronic component including a via for internal connection of the present invention is formed on a polyethylene terephthalate (hereinafter abbreviated as PET) film. A plurality of through vias are formed from a PET film on a ceramic green sheet by a beam focused with a carbon dioxide gas laser, and a ceramic green sheet with PET in which the plurality of through vias are formed,
Powder is sprayed from the PET side at high pressure, and the ceramic green sheets are laminated to produce a green laminate, which is then fired at a predetermined firing temperature.

Further, according to the method of manufacturing an electronic component including vias for internal connection of the present invention, a plurality of through vias are formed on a ceramic green sheet formed on a PET film by a beam focused by a carbon dioxide gas laser. A ceramic green sheet with PET formed from the film and having a plurality of through vias formed thereon is sprayed with powder from the PET side at high pressure, and the ceramic green sheets are laminated to form a green laminate. Ceramic green sheets made of oxides having a melting point higher than that of the ceramic green body are laminated on the front and back surfaces, and after firing at a predetermined firing temperature, oxides having a melting point higher than that of the front and back ceramic green bodies are removed. It is characterized by removing.

The particle size of the powder of the present invention is
It is preferably 1 μm to 50 μm.

The powder to be sprayed is alumina particles,
Zirconia particles and magnesia particles are preferred.

The material and particle diameter of the powder to be sprayed according to the present invention are preferably ceramic particles of green sheet.

In the method for manufacturing an electronic component including vias for internal connection according to the present invention, a plurality of through vias are formed on a ceramic green sheet formed on a PET film by a beam focused by a carbon dioxide gas laser. A ceramic green sheet with PET formed from a film and having a plurality of through vias formed thereon is sprayed with a slurry of powder and water from the PET side at a pressure of 0.05 MPa to 0.2 MPa to wash the ceramic green sheet, Dried
This ceramic green sheet is laminated to produce a green laminated body, which is fired at a predetermined firing temperature.

In the method of manufacturing an electronic component including vias for internal connection according to the present invention, a plurality of through vias are formed on a ceramic green sheet formed on a PET film by a beam focused by a carbon dioxide gas laser. A ceramic green sheet with PET formed from a film and having a plurality of through vias formed thereon is sprayed with a slurry of powder and water from the PET side at a pressure of 0.05 MPa to 0.2 MPa to wash the ceramic green sheet, Dried
This ceramic green sheet is laminated to produce a green laminated body, and ceramic green sheets made of an oxide having a melting point higher than that of the ceramic green body are laminated on the front and back surfaces of the green laminated body, and at a predetermined firing temperature. After firing, oxides having a melting point higher than that of the ceramic green bodies on the front and back surfaces are removed.

Further, in the method of manufacturing an electronic component including vias for internal connection according to the present invention, a plurality of through vias are formed on a ceramic green sheet formed on a PET film by a beam focused by a carbon dioxide gas laser. A ceramic green sheet with PET, which was formed from above the film and formed with multiple through vias, was treated with a water mist of 1M from the PET side.
It is characterized by spraying at a pressure of Pa to 20 MPa, drying this ceramic green sheet, stacking this ceramic green sheet to produce a green laminate, and firing at a predetermined firing temperature.

Further, in the method of manufacturing an electronic component including vias for internal connection according to the present invention, a plurality of through vias are formed on a ceramic green sheet formed on a PET film by a beam focused with a carbon dioxide gas laser. A ceramic green sheet with PET, which was formed from above the film and formed with multiple through vias, was treated with a water mist of 1M from the PET side.
This ceramic green sheet is dried by spraying at a pressure of Pa to 20 MPa, and the ceramic green sheet is laminated to produce a green laminated body, and the front and back surfaces of this green laminated body have a melting point at a temperature higher than that of the ceramic green body. It is characterized in that ceramic green sheets made of oxides are stacked and fired at a predetermined firing temperature, and then the oxides having a melting point higher than that of the ceramic green bodies on the front and back surfaces are removed.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.

(Embodiment 1) The present invention is a method for producing a laminated ceramic component in which a ceramic green body having a surface layer, an electrode, and upper and lower layers connected to each other by a plurality of internal vias is fired at a predetermined firing temperature. Then, a PET film is laminated on a ceramic green sheet that requires connection of internal vias, and a green sheet with this PET film is formed with a through via with a beam focused from a carbon dioxide gas laser from the PET side. The method is characterized by including the step of spraying powder from the PET side using a sandblasting device to remove the glass spheres deposited on the side surface of the through via.

The powder is an oxide of alumina particles, zirconia particles, and magnesia particles, and the shape thereof is spherical, and the average particle diameter thereof is preferably 1 μm to 50 μm. If the particle size is small, the force to remove the glass spheres deposited on the side surface of the through via is small, and if it is too large, it will not be embedded in the through via or will not enter, and the deposited glass sphere on the side surface of the through via will be removed. It will be difficult.

If the glass spheres deposited on the side surface of the through via are not sufficiently removed, it becomes an obstacle when the through via is filled with the conductive paste, and the conduction becomes difficult.
There is a cavity between the electrode and the ceramic.

(Embodiment 2) According to the present invention, an oxide having a melting point at a temperature higher than that of a ceramic green body is formed on both sides of a ceramic green body having electrodes on its surface layer and upper and lower layers connected by a plurality of internal vias. A method of manufacturing a laminated ceramic component that suppresses shrinkage in the XY directions, which is obtained by laminating a ceramic green sheet that is formed by firing at a predetermined firing temperature, and laminating a PET film on the ceramic green sheet that requires connection of internal vias. , The green sheet with the PET film is formed with a through via with a beam focused from a carbon dioxide gas laser from the PET side.
The method is characterized by including a step of spraying powder from the ET side using a sandblasting device to remove glass spheres deposited on the side surface of the through via.

On the front and back surfaces of this green laminated body, ceramic green sheets made of an oxide having a melting point higher than that of the ceramic green body are laminated and fired at the above predetermined firing temperature. Powders characterized by including a step of removing oxides having a melting point higher than the body, alumina particles, zirconia particles, oxides of magnesia particles, the shape of which is spherical, the average particle size Is preferably 1 μm to 50 μm. If the particle size is small, the force to remove the glass spheres deposited on the side surface of the through via is small, and if it is too large, it will not be embedded in the through via or will not enter, and the deposited glass sphere on the side surface of the through via will be removed. It will be difficult.

If the removal of the glass spheres deposited on the side surface of the through via is insufficient, it becomes an obstacle when the through via is filled with the conductive paste, and conduction becomes difficult.
There is a cavity between the electrode and the ceramic.

(Embodiment 3) The present invention is a method for producing a laminated ceramic component in which a ceramic green body having a surface layer, an electrode, and upper and lower layers connected to each other by a plurality of internal vias is fired at a predetermined firing temperature. Then, a PET film is laminated on a ceramic green sheet that requires connection of internal vias, and a green sheet with this PET film is formed with a through via with a beam focused from a carbon dioxide gas laser from the PET side. It is characterized by including a step of spraying a slurry of powder and water from the PET side to remove the glass spheres deposited on the side surface of the through via, and washing and drying this green sheet.

The powder is an oxide of alumina particles, zirconia particles, and magnesia particles, and the shape thereof is spherical, and the average particle diameter thereof is preferably 1 μm to 50 μm. If the particle size is small, the force to remove the glass spheres deposited on the side surface of the through via is small, and if it is too large, it will not be embedded in the through via or will not enter, and the deposited glass sphere on the side surface of the through via will be removed. It will be difficult.

If the removal of the glass spheres deposited on the side surface of the through via is insufficient, it becomes an obstacle when the through via is filled with the conductive paste, and conduction becomes difficult.
There is a cavity between the electrode and the ceramic.

(Embodiment 4) According to the present invention, an oxide having a melting point at a temperature higher than that of the ceramic green body is formed on both sides of the ceramic green body in which the upper and lower layers are connected to each other by electrodes and a plurality of internal vias in the surface layer. A method of manufacturing a laminated ceramic component that suppresses shrinkage in the XY directions, which is obtained by laminating a ceramic green sheet that is formed by firing at a predetermined firing temperature, and laminating a PET film on the ceramic green sheet that requires connection of internal vias. , The green sheet with the PET film is formed with a through via with a beam focused from a carbon dioxide gas laser from the PET side.
The method comprises spraying a slurry of powder and water from the ET side to remove the glass spheres deposited on the side surface of the through via, and washing and drying this green sheet.

Further, ceramic green sheets made of oxides having a melting point higher than that of the ceramic green body are laminated on the front and back surfaces of this green laminate, and after firing at the above predetermined firing temperature, the ceramic green sheets on the front and back surfaces are laminated. The method is characterized by including a step of removing an oxide having a melting point higher than that of the body.

The powder is an oxide of alumina particles, zirconia particles, and magnesia particles, and the shape thereof is spherical, and the average particle diameter thereof is preferably 1 μm to 50 μm. If the particle size is small, the force to remove the glass spheres deposited on the side surface of the through via is small, and if it is too large, it will not be embedded in the through via or will not enter, and the deposited glass sphere on the side surface of the through via will be removed. It will be difficult.

If the removal of the glass spheres deposited on the side surface of the through via is insufficient, it becomes an obstacle when the through via is filled with the conductive paste, and conduction becomes difficult.
There is a cavity between the electrode and the ceramic.

(Embodiment 5) The present invention is a method for producing a laminated ceramic component in which a ceramic green body having a surface layer, an electrode, and upper and lower layers connected to each other by a plurality of internal vias is fired at a predetermined firing temperature. Then, a PET film is laminated on a ceramic green sheet that requires connection of internal vias, and a green sheet with this PET film is formed with a through via with a beam focused from a carbon dioxide gas laser from the PET side. The method is characterized by including a step of spraying water from the PET side to remove the glass spheres deposited on the side surface of the through via, and drying this green sheet.

The powder is an oxide of alumina particles, zirconia particles, and magnesia particles, and the shape thereof is spherical, and the average particle diameter thereof is preferably 1 μm to 50 μm. If the particle size is small, the force to remove the glass spheres deposited on the side surface of the through via is small, and if it is too large, it will not be embedded in the through via or will not enter, and the deposited glass sphere on the side surface of the through via will be removed. It will be difficult.

If the glass spheres deposited on the side surface of the through via are not sufficiently removed, it becomes an obstacle when the through via is filled with the conductive paste, and the conduction becomes difficult.
There is a cavity between the electrode and the ceramic.

(Embodiment 6) According to the present invention, an oxide having a melting point at a temperature higher than that of a ceramic green body is formed on both sides of a ceramic green body having electrodes on its surface layer and upper and lower layers connected by a plurality of internal vias. A method of manufacturing a laminated ceramic component that suppresses shrinkage in the XY directions, which is obtained by laminating a ceramic green sheet that is formed by firing at a predetermined firing temperature, and laminating a PET film on the ceramic green sheet that requires connection of internal vias. , The green sheet with the PET film is formed with a through via with a beam focused from a carbon dioxide gas laser from the PET side.
The method is characterized by including the step of spraying water from the ET side to remove the glass spheres deposited on the side surface of the through via.

On the front and back surfaces of this green laminated body, ceramic green sheets made of an oxide having a melting point higher than that of the ceramic green body are laminated and fired at the above predetermined firing temperature. The method is characterized by including a step of removing an oxide having a melting point higher than that of the body.

The powder is an oxide of alumina particles, zirconia particles and magnesia particles, and the shape thereof is spherical, and the average particle diameter thereof is preferably 1 μm to 50 μm. If the particle size is small, the force to remove the glass spheres deposited on the side surface of the through via is small, and if it is too large, it will not be embedded in the through via or will not enter, and the deposited glass sphere on the side surface of the through via will be removed. It will be difficult.

If the glass spheres deposited on the side surface of the through via are not sufficiently removed, it becomes an obstacle when the through via is filled with the conductive paste, and conduction becomes difficult.
There is a cavity between the electrode and the ceramic.

Hereinafter, specific examples of the present invention will be described.
explain.

[0041]

(Example 1) Two green sheets (MLS1000) manufactured by Nippon Electric Glass Co., Ltd. having a length of 100 mm and a width of 100 mm and a thickness of 100 μm were laminated, and a ground pattern 5 shown in FIG. Was printed by a known screen printing method using a silver paste (DD1411A-35) manufactured by Kyoto Elex Co., Ltd. and dried. One green sheet was laminated on the upper surface, and the capacitor patterns 3 and 4 in FIG. 5C were screen-printed. Further, 14 green sheets were laminated on the upper surface and the zigzag coil pattern 2 shown in FIG. 5B was screen-printed.

Next, the thickness 100 required to connect the internal vias.
A PET film having a thickness of 75 μm was laminated on a green sheet having a thickness of μm, and the green sheet having the PET film was formed with a through via having a diameter of 100 μm by a beam focused with a carbon dioxide gas laser from the PET side. This is P
From the ET side, # 400 alumina particles were blown while positioning the through vias using a sandblasting device to remove the glass spheres deposited on the side surfaces of the through vias.

It was also possible to move a rectangular nozzle having a sample width to process a plurality of through vias at once. The PET film became a cushion of alumina particles and the green sheet was not damaged, and the glass spheres deposited on the side surface of the through via could be removed. After stacking the green sheets while aligning them, a silver paste was printed through a metal mask so as to expose only the inner via portion of the uppermost layer and dried.

Finally, the surface electrode patterns 10 to 13 shown in FIG. 5A were screen-printed as the surface electrodes by using an electrode paste. Further, back surface electrode patterns 14 to 17 shown in FIG. 5 (e) were screen-printed on the surface on the opposite side as back surface electrodes to prepare a laminated body in which front and back surface electrodes, internal electrodes and internal vias were formed.

Thereafter, this laminated body was heated at 80 ° C. and 300 kg.
Thermocompression bonding was performed at a pressure of / cm ² for 1 minute. After that, the laminate was heat-treated in the air at a temperature of 400 ° C. to remove the binder in the green sheet, and then held at 875 ° C. for 30 minutes for firing. This sintered body was cut using a dicing saw, and cut into pieces each having a length of 5 mm and a width of 7 mm. A silver electrode containing a commercially available glass frit was applied to the side surface in a desired shape as an external electrode, and the electrode was baked at 750 ° C. for 10 minutes.

By using the manufacturing method of the present invention, a laminated ceramic component having no void between the metal electrode of the via and the ceramic as shown in FIGS. 3 and 4 can be manufactured.

By using the manufacturing method of the present invention, a two-stage low-pass filter with internal via connection was obtained.
This is a heat cycle test (-40 ℃, 85 ℃) 100
After cycling, no deterioration in properties was observed.
In the sample which did not remove the glass spheres deposited on the side surface of the through via which was not claimed in the present invention, the via conduction was not obtained after the test.

(Example 2) In the same manner as in Example 1, a green sheet laminate having front and back electrodes, internal electrodes and internal vias was prepared. Alumina powder, which is an oxide having a melting point higher than that of the ceramic green body, was mixed with butyral resin, a plasticizer, and a solvent, and formed into a green sheet by using a doctor blade method.

Thereafter, this laminated body was heated at 80 ° C. and 300 kg.
Thermocompression bonding was performed at a pressure of / cm ² for 1 minute. Then, the laminate was heat-treated in the air at a temperature of 400 ° C. to remove the binder in the green sheet, and then held at 875 ° C. for 30 minutes to be fired while suppressing the shrinkage in the XY directions with the alumina layer, The alumina layer on the surface was removed. This sintered body was cut using a dicing saw, and cut into pieces each having a length of 5 mm and a width of 7 mm. Commercially available silver electrode with glass frit is applied to the side surface as an external electrode in a desired shape, and the temperature is maintained at 750 ° C. for 10 hours.
Hold for minutes and bake.

By using the manufacturing method of the present invention, a laminated ceramic component having no void between the metal electrode of the via and the ceramic could be manufactured.

By using the manufacturing method of the present invention, a two-stage low-pass filter with internal via connection was obtained.
This is a heat cycle test (-40 ℃, 85 ℃) 100
After cycling, no deterioration in properties was observed.

(Embodiment 3) As in the first embodiment, 100
mm, 100 mm in width and 100 μm in thickness, two green sheets (MLS1000) manufactured by Nippon Electric Glass Co., Ltd. are laminated, and a ground pattern 5 shown in FIG. 5D is formed on the surface thereof with a silver paste (DD1411A) manufactured by Kyoto Elec. -3
5) was used for printing by a known screen printing method and dried. One green sheet was laminated on the upper surface, and the capacitor patterns 3 and 4 in FIG. 5C were screen-printed. Further, 14 green sheets were laminated on the upper surface and the zigzag coil pattern 2 shown in FIG. 5B was screen-printed.

Next, the thickness 100 required to connect the internal vias.
A PET film having a thickness of 75 μm was laminated on a green sheet having a thickness of μm, and the green sheet having the PET film was formed with a through via having a diameter of 100 μm by a beam focused with a carbon dioxide gas laser from the PET side. This is P
From the ET side, an aqueous solution having an average particle size of 25 μm and alumina particles of 30 wt% is prepared, and sprayed while positioning the through via at a pressure of 0.1 MPa to remove the glass spheres deposited on the side surface of the through via. did.

It was also possible to move a rectangular nozzle having a sample width to process a plurality of through vias at once. The PET film became a cushion of alumina particles and the green sheet was not damaged, and the glass spheres deposited on the side surface of the through via could be removed. Then, the green sheet was washed with water and dried. After stacking the green sheets while aligning them, a silver paste was printed through a metal mask so as to expose only the inner via portion of the uppermost layer and dried.

Finally, as surface electrodes, the surface electrode patterns 10 to 13 shown in FIG. 5A were screen printed using an electrode paste. Further, back surface electrode patterns 14 to 17 shown in FIG. 5 (e) were screen-printed on the surface on the opposite side as back surface electrodes to prepare a laminated body in which front and back surface electrodes, internal electrodes and internal vias were formed.

Thereafter, this laminated body was heated at 80 ° C. and 300 kg.
Thermocompression bonding was performed at a pressure of / cm ² for 1 minute. After that, the laminate was heat-treated in the air at a temperature of 400 ° C. to remove the binder in the green sheet, and then held at 875 ° C. for 30 minutes for firing. This sintered body was cut using a dicing saw, and cut into pieces each having a length of 5 mm and a width of 7 mm. A silver electrode containing a commercially available glass frit was applied to the side surface in a desired shape as an external electrode, and the electrode was baked at 750 ° C. for 10 minutes.

By using the manufacturing method of the present invention, a laminated ceramic component having no void between the metal electrode of the via and the ceramic as shown in FIGS. 3 and 4 can be manufactured.

By using the manufacturing method of the present invention, a two-stage low-pass filter with internal via connection was obtained.
This is a heat cycle test (-40 ℃, 85 ℃) 100
After cycling, no deterioration in properties was observed.

Example 4 A green sheet laminate having front and back electrodes, internal electrodes and internal vias was prepared in the same manner as in Example 3. Alumina powder, which is an oxide having a melting point higher than that of the ceramic green body, was mixed with butyral resin, a plasticizer, and a solvent, and formed into a green sheet by using a doctor blade method.

Thereafter, this laminated body was heated at 80 ° C. and 300 kg.
Thermocompression bonding was performed at a pressure of / cm ² for 1 minute. Then, the laminate was heat-treated in the air at a temperature of 400 ° C. to remove the binder in the green sheet, and then held at 875 ° C. for 30 minutes to be fired while suppressing the shrinkage in the XY directions with the alumina layer, The alumina layer on the surface was removed. This sintered body was cut using a dicing saw, and cut into pieces each having a length of 5 mm and a width of 7 mm. Commercially available silver electrode with glass frit is applied to the side surface as an external electrode in a desired shape, and the temperature is maintained at 750 ° C. for 10 hours.
Hold for minutes and bake.

By using the manufacturing method of the present invention, a laminated ceramic component having no void between the metal electrode of the via and the ceramic could be manufactured.

By using the manufacturing method of the present invention, a two-stage low-pass filter with internal via connection was obtained.
This is a heat cycle test (-40 ℃, 85 ℃) 100
After cycling, no deterioration in properties was observed.

(Fifth Embodiment) As in the first embodiment, the vertical length is 100 mm.
mm, 100 mm in width and 100 μm in thickness, two green sheets (MLS1000) manufactured by Nippon Electric Glass Co., Ltd. are laminated, and a ground pattern 5 shown in FIG. 5D is formed on the surface thereof with a silver paste (DD1411A) manufactured by Kyoto Elec. -3
5) was used for printing by a known screen printing method and dried. One green sheet was laminated on the upper surface, and the capacitor patterns 3 and 4 in FIG. 5C were screen-printed. Further, 14 green sheets were laminated on the upper surface and the zigzag coil pattern 2 shown in FIG. 5B was screen-printed.

Next, the thickness 100 required to connect the internal vias.
A PET film having a thickness of 75 μm was laminated on a green sheet having a thickness of μm, and the green sheet having the PET film was formed with a through via having a diameter of 100 μm by a beam focused with a carbon dioxide gas laser from the PET side. This is P
From the ET side, mist-like water was sprayed at a pressure of 10 MPa while positioning the through vias to remove the glass spheres deposited on the side surfaces of the through vias.

It was also possible to move a rectangular nozzle having a sample width to process a plurality of through vias at once. The PET film became a cushion of alumina particles and the green sheet was not damaged, and the glass spheres deposited on the side surface of the through via could be removed. Then, the green sheet was dried. After stacking the green sheets while aligning them, a silver paste was printed through a metal mask so as to expose only the inner via portion of the uppermost layer and dried.

Finally, as surface electrodes, the surface electrode patterns 10 to 13 shown in FIG. 5A were screen printed using an electrode paste. Further, back surface electrode patterns 14 to 17 shown in FIG. 5 (e) were screen-printed on the surface on the opposite side as back surface electrodes to prepare a laminated body in which front and back surface electrodes, internal electrodes and internal vias were formed.

Thereafter, this laminated body was heated at 80 ° C. and 300 kg.
Thermocompression bonding was performed at a pressure of / cm ² for 1 minute. After that, the laminate was heat-treated in the air at a temperature of 400 ° C. to remove the binder in the green sheet, and then held at 875 ° C. for 30 minutes for firing. This sintered body was cut using a dicing saw, and cut into pieces each having a length of 5 mm and a width of 7 mm. A silver electrode containing a commercially available glass frit was applied to the side surface in a desired shape as an external electrode, and the electrode was baked at 750 ° C. for 10 minutes.

By using the manufacturing method of the present invention, a laminated ceramic component having no void between the metal electrode of the via and the ceramic as shown in FIGS. 3 and 4 can be manufactured.

By using the manufacturing method of the present invention, a two-stage low-pass filter with internal via connection was obtained.
This is a heat cycle test (-40 ℃, 85 ℃) 100
After cycling, no deterioration in properties was observed.

Example 6 A green sheet laminate having front and back electrodes, internal electrodes and internal vias was prepared in the same manner as in Example 5. Alumina powder, which is an oxide having a melting point higher than that of the ceramic green body, was mixed with butyral resin, a plasticizer, and a solvent, and formed into a green sheet by using a doctor blade method.

Thereafter, this laminated body was heated at 80 ° C. and 300 kg.
Thermocompression bonding was performed at a pressure of / cm ² for 1 minute. Then, the laminate was heat-treated in the air at a temperature of 400 ° C. to remove the binder in the green sheet, and then held at 875 ° C. for 30 minutes to be fired while suppressing the shrinkage in the XY directions with the alumina layer, The alumina layer on the surface was removed. This sintered body was cut using a dicing saw, and cut into pieces each having a length of 5 mm and a width of 7 mm. Commercially available silver electrode with glass frit is applied to the side surface as an external electrode in a desired shape, and the temperature is maintained at 750 ° C. for 10 hours.
Hold for minutes and bake.

By using the manufacturing method of the present invention, a laminated ceramic component having no void between the metal electrode of the via and the ceramic could be manufactured.

By using the manufacturing method of the present invention, a two-stage low-pass filter with internal via connection was obtained.
This is a heat cycle test (-40 ℃, 85 ℃) 100
After cycling, no deterioration in properties was observed.

[Brief description of drawings]

FIG. 1 is a circuit diagram of a conventional laminated ceramic component.

FIG. 2 is a perspective view of a conventional laminated ceramic component.

FIG. 3 is a sectional view taken along line I-I of FIG.

4 is a sectional view taken along line II-II of FIG.

FIG. 5 is a print pattern diagram of a laminated ceramic component according to Examples 1 to 6 of the invention.

FIG. 6 is a sectional view of a green sheet with PET after laser processing.

FIG. 7 is a cross-sectional view of a laminated body filled with via paste.

FIG. 8 is a sectional view of a sintered body in which a cavity is generated.

[Explanation of symbols]

1 Insulator layer 2 Internal electrodes (coil pattern) 3,4 Internal electrode (capacitor pattern) 5 Internal electrodes (ground pattern) 6-9 External electrodes 10 to 13 surface electrode (surface electrode pattern) 14 to 17 back surface electrode (back surface electrode pattern) 20 ceramic green sheets 21 PET film 22 Glass deposits 23 Filled via paste 24 cavities 25 Sintered body 26 Via electrode

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) B28B 11/00 H01G 4/30 311E H01G 4/30 311 H05K 3/00 N H05K 3/00 3/26 B 3/26 3/40 E 3/40 B28B 11/00 ZF Term (reference) 4G055 AA08 AC09 BA22 BA33 BA83 5E082 AB03 BB01 BC38 DD08 FG06 FG26 FG54 JJ15 LL01 LL02 MM05 MM22 PP06 PP07 PP09 5E317 AA24 CC05 CD27 CD32 CD27 CD32 CD27 CD32 CD27 CD32 AA02 AA23 BB72 DD02 EE01 EE08 FF23 GG01 GG20 5E346 AA05 AA12 AA15 AA22 AA32 AA43 AA51 CC16 EE21 EE24 FF01 FF18 FF45 GG05 GG06 GG08 GG09 GG15 HH11 HH33

Claims (12)

[Claims] 1. A method for producing a laminated ceramic component in which a ceramic green body, in which a surface layer and an internal layer are connected to each other by electrodes and a plurality of internal vias, is fired at a predetermined firing temperature, is formed on a polyethylene terephthalate film. Forming a plurality of through vias on the polyethylene terephthalate film with a beam focused with a carbon dioxide laser; and a ceramic green sheet with a polyethylene terephthalate film having the plurality of through vias formed on the polyethylene terephthalate film. A step of spraying powder at a high pressure from the side, a step of stacking the ceramic green sheets that have undergone the spraying step to produce a green laminate, and a step of firing the green laminate at the predetermined firing temperature. Special Method for producing a multilayer ceramic part according to. 2. A ceramic green sheet made of an oxide having a melting point higher than that of the ceramic green body is laminated on both sides of the ceramic green body in which the surface layer and the internal layer are connected by an electrode and a plurality of internal vias. In a method of manufacturing a laminated ceramic component that suppresses shrinkage in the XY directions, which is fired at a firing temperature of, a ceramic green sheet formed on a polyethylene terephthalate film is formed into a plurality of through vias by polyethylene with a beam focused by a carbon dioxide gas laser. A step of forming from above the terephthalate film, a step of spraying a powder of the polyethylene terephthalate film-attached ceramic green sheet having the plurality of through vias from the polyethylene terephthalate film side at a high pressure, and a step of spraying the ceramic green sheet A step of laminating sheets to produce a green laminated body; a step of laminating a ceramic green sheet made of an oxide having a melting point higher than that of the ceramic green body on the front and back surfaces of the green laminated body; A method of manufacturing a laminated ceramic component, comprising: a step of firing the laminated body having undergone the above step at a predetermined firing temperature; and a step of removing an oxide having a melting point higher than that of the ceramic green body on the front and back surfaces. 3. The method for manufacturing a laminated ceramic component according to claim 1, wherein the powder to be sprayed is alumina particles, zirconia particles, or magnesia particles. 4. The particle size of the sprayed powder is 1 μm to 50 μm.
3. The method for producing a laminated ceramic component according to claim 1, wherein the laminated ceramic component has a thickness of μm. 5. The method for producing a laminated ceramic component according to claim 1, wherein the material and the particle size of the powder to be sprayed are the ceramic particles of the green sheet. 6. A method for producing a laminated ceramic component, comprising firing a ceramic green body, in which a surface layer and an inner layer are connected by electrodes and a plurality of internal vias, at a predetermined firing temperature, to produce a laminated ceramic component formed on a polyethylene terephthalate film. Forming a plurality of through vias on the polyethylene terephthalate film with a beam focused with a carbon dioxide laser; and a ceramic green sheet with a polyethylene terephthalate film having the plurality of through vias formed on the polyethylene terephthalate film. From the side, a step of spraying a slurry composed of powder and water at a pressure of 0.05 MPa to 0.2 MPa, a step of washing and drying the ceramic green sheet, and a step of stacking the ceramic green sheets to form a green laminate. Process and method for producing a multilayer ceramic part which comprises a step of firing the green laminate formed through the above manufacturing steps at a predetermined firing temperature, the for. 7. A ceramic green sheet made of an oxide having a melting point higher than that of the ceramic green body is laminated on both sides of the ceramic green body in which the surface layer and the internal layer are connected by an electrode and a plurality of internal vias. In a method of manufacturing a laminated ceramic component that suppresses shrinkage in the XY directions, which is fired at a firing temperature of, a ceramic green sheet formed on a polyethylene terephthalate film is formed into a plurality of through vias by polyethylene with a beam focused by a carbon dioxide gas laser. A step of forming from a terephthalate film, and spraying a ceramic green sheet with a polyethylene terephthalate film in which a plurality of through vias are formed, from the polyethylene terephthalate film side with a slurry of powder and water at a pressure of 0.05 MPa to 0.2 MPa. A step of washing and drying the ceramic green sheet, a step of laminating the ceramic green sheets to produce a green laminate, and a melting point at a temperature higher than that of the ceramic green body on the front and back surfaces of the green laminate. A step of laminating ceramic green sheets made of oxides, a step of firing the laminated body that has undergone the above-mentioned lamination step at the predetermined firing temperature, and an oxide having a melting point higher than that of the front and back ceramic green bodies is removed. The method of manufacturing a laminated ceramic component, comprising: 8. The particle size of the powder to be sprayed is from 1 μm to 50.
The method for manufacturing a laminated ceramic component according to claim 6 or 7, wherein the laminated ceramic component has a thickness of µm. 9. The method for producing a laminated ceramic component according to claim 6, wherein the powder to be sprayed is alumina particles, zirconia particles, or magnesia particles. 10. The method for producing a laminated ceramic component according to claim 6, wherein the material and the particle size of the powder to be sprayed are the ceramic particles of the green sheet. 11. A method for producing a laminated ceramic component, comprising firing a ceramic green body, in which a surface layer and an inner layer are connected to each other by electrodes and a plurality of internal vias, at a predetermined firing temperature in a method for producing a laminated terephthalate film. Forming a plurality of through vias on the polyethylene terephthalate film with a beam focused with a carbon dioxide laser; and a ceramic green sheet with a polyethylene terephthalate film having the plurality of through vias formed on the polyethylene terephthalate film. 1M water mist from the side
Including a step of spraying at a pressure of Pa to 20 MPa, a step of stacking the ceramic green sheets to produce a green laminate, and a step of firing the green laminate having undergone the producing step at a predetermined firing temperature. A method of manufacturing a laminated ceramic component having the characteristics. 12. A ceramic green sheet made of an oxide having a melting point higher than that of the ceramic green body is laminated on both sides of the ceramic green body in which the surface layer and the internal layer are connected by an electrode and a plurality of internal vias. In a method of manufacturing a laminated ceramic component that suppresses shrinkage in the XY directions, which is fired at a firing temperature of, a ceramic green sheet formed on a polyethylene terephthalate film is formed into a plurality of through vias by polyethylene with a beam focused by a carbon dioxide gas laser. The step of forming from the terephthalate film, and the above-mentioned ceramic green sheet with a polyethylene terephthalate film in which a plurality of through vias are formed, a water mist of 1 M is applied from the polyethylene terephthalate film side.
A step of spraying at a pressure of Pa to 20 MPa, a step of drying the ceramic green sheet that has undergone the spraying step, a step of stacking the ceramic green sheets that have undergone the dry step to make a green laminate, and the above-mentioned making steps A step of laminating a ceramic green sheet made of an oxide having a melting point higher than that of the ceramic green body on the front and back surfaces of the green laminated body, and a step of firing the laminated body having undergone the above laminating step at a predetermined firing temperature; And a step of removing an oxide having a melting point higher than that of the ceramic green body on the back surface.