JP2003124150A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting device capable of adjusting the exhaust airflow to be appropriate in pressure irrespective of its installation surroundings when mist generated during a cutting process in a working section is to be guided out of the section. SOLUTION: Mist generated in the working section 20 is exhausted aboard an airflow through a mist outlet 31 when a mist fan is rotated in the mist fan box 22. An exhaust air throat block 28 is attached to the mist outlet 31 for adjusting the exhaust airflow rate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting device, and more particularly to a cutting device for grooving or cutting a work such as a semiconductor or an electronic component material.

[0002]

2. Description of the Related Art In a cutting apparatus for grooving or cutting a work such as a semiconductor or an electronic component material, a work is processed by applying cutting water with a thin grindstone called a blade which rotates at a high speed. Since the work is cut by a rotating blade (blade) that rotates at high speed, the processing section is filled with mist. If the mist remains filled in the machining area, it will interfere with the machining of workpieces that require high precision.Therefore, during cutting, the air inside the machining area is constantly turned by turning the mist fan installed outside the machining area. By forcibly exhausting, this mist is discharged to the outside of the processing part.

However, this forced exhaust is performed with a constant air volume and pressure, and there is no means for adjusting these air volumes and pressures. Therefore, at the time of cutting, the tape for fixing the work placed on the work table so as not to move was peeled off by the exhaust air pressure, the bellows covering the oil pan were floated, and the small chips were peeled off.

Further, when the exhaust pressure uniformly applied to each device in the factory is used as the exhaust wind pressure, the exhaust pressure may change or the specifications of the mist fan to be used may be different from each other. There was a situation in which the air volume changed each time.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and a cutting device capable of adjusting the exhaust air volume so as to obtain an appropriate exhaust air pressure in any installation environment. The purpose is to provide.

[0006]

The present invention according to claim 1 is a cutting equipped with a forced evacuation device for exhausting the mist generated during cutting of a work in a predetermined closed space by air to the outside of the predetermined closed space. The device is characterized in that the forced exhaust device is provided with an air volume adjusting means for adjusting an exhaust air volume.

According to the first aspect of the present invention, the mist generated during the cutting of the work in the predetermined closed space can be discharged to the outside of the predetermined closed space by the air by the forced exhaust device. Since the exhaust air volume can be adjusted by the air volume adjusting means, the exhaust air pressure can be adjusted, and the exhaust air can be exhausted at the air pressure suitable for the installation conditions of the cutting device.

According to the second aspect of the present invention, the exhaust air volume can be adjusted according to the detected exhaust air pressure.

The present invention according to claim 1 can apply a semiconductor wafer as a work, and can also be applied to a dicing apparatus for dicing this semiconductor wafer.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of a cutting apparatus according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is an external perspective view of a cutting device according to the present invention. The cutting device 10 includes a processing unit 20, an operation / display unit 14, an imaging unit 12, a monitor TV 16, a controller 18, a display tower 19, and the like. Figure 2
[Fig. 2] is a perspective view showing a state in which an outer wall of the cutting device 10 of Fig. 1 is removed.

The processing portion 20 is a portion for performing groove processing and cutting processing on a work. A cutting device 10 is provided on the operation / display unit 14.
A switch and a display unit for operating each unit are provided. The imaging unit 12 is a part that images the surface of the work in order to evaluate the alignment and the processing state of the work, and the microscope 1
2A, an illuminating device, a CCD camera and the like.
The captured image is displayed on the monitor television 16.
The controller 18 is a part that controls each operation of the cutting device 10, is configured by a microprocessor, a memory, an input / output circuit, and the like, and is stored inside the pedestal of the cutting device 10. The display tower 19 is provided while the cutting device 10 is in operation.
It displays a standby status, an alarm, etc., and is mounted at a high position so that the operator can see it from a distance.

In the processing section 20, a rotary blade 21 for grooving and cutting the work W is attached to an air bearing spindle 38 with a built-in high frequency motor, and has a 30,000 rp.
While rotating at a high speed of m ~ 60,000 rpm,
By a feeding mechanism (not shown), index feeding is performed in the Y direction orthogonal to the X direction shown in the figure. The rotary blade 21 has a thin disk shape, and an electrodeposition blade in which diamond abrasive grains or CBN abrasive grains are electrodeposited with nickel or a resin blade bonded with resin is used. The rotary blade 21 is surrounded by a flange cover (not shown) whose front side and lower side are open, and cutting water is supplied to a processing point from a cutting nozzle (not shown) provided in the flange cover. The work table 23 on which the work W is sucked and placed is rotated by θ by a θ table (not shown), and is driven by an arrow X in the figure by a drive mechanism (not shown).
It is designed to be cut and fed in the direction. The work W may be fixedly mounted on the work table 23 with a tape. An oil pan 36 for receiving waste water of cutting water and cleaning water is fixed to the machine base.
6 and a table cover 29 surrounding the work table 23, bellows 27, 27 are provided so as to cover an opening portion of a central portion of the oil pan 36.

In the processing section 20, since a large amount of cutting water and cleaning water are used from a water curtain forming nozzle (not shown), sprays and mists are generated, but mist must be prevented from reaching the outside of the processing section. The cover 30 is provided so as to cover the processed portion 20. Next to the processing section 20, there is a microscope 12A for observing the surface of the work W.

As shown in FIG. 2, a flat plate-shaped oil pan partition wall 26 is erected on the root side of the air bearing spindle 38 of the oil pan 36 so as to form a lateral wall of the processed portion 20. As shown in FIGS. 2 and 3, a circular mist exhaust port 31 is formed near the center of the wall surface of the oil pan partition wall 26. As shown in FIG. 4, the mist exhaust port 31
From the duct hose 24 in the direction opposite to the oil pan 36
Are connected and extended. The tip of the duct hose 24 is connected to the mist fan box 22 arranged at the upper corner of the cutting device 10. The mist fan box 22 has a built-in mist fan, and when the mist fan rotates, the processing section 2 is provided via the duct hose 24.
Zero air is sucked. An air volume adjusting plate 28 is mounted on the oil pan partition wall 26 on the processing unit 20 side so as to cover the mist exhaust port 31 and can be opened and closed around a fulcrum 33 as a rotation center. The air volume adjusting plate 28 has a long hexagonal shape, and the mist exhaust port 31 is rotated as the fulcrum 33 is rotated.
The area that covers the area changes. That is, when the air volume adjusting plate 28 rotates, the opening area of the mist exhaust port 31 changes. The air volume adjusting plate 28 is driven by a rotary actuator 34 attached to the surface of the oil pan partition wall 26 on the side opposite to the processed portion 20. A pressure sensor 32 is attached diagonally above the mist exhaust port 31 on the surface on which the rotary actuator 34 is attached. Pressure sensor 3
In No. 2, the sensor surface is on the oil pan partition wall 26 on the processing unit 20 side and detects the exhaust air pressure in the processing unit 20.

FIG. 5 is a block diagram showing the control relationship between the pressure sensor 32 and the rotary actuator 34. As shown in FIG. 5, the pressure sensor 32 is connected to the CPU 40, and the CPU 40 is connected to the rotary actuator 34.

The operation of the cutting device 10 having the above structure will be described.

First, the operator rotates the mist cover 30 upward to open it, sets the rotary blade 21 on the spindle 38 of the processing section 20, and rotates the mist cover 30 downward to close it. At this time, the work table 23 does not interfere with the attachment of the rotary blade 21, so that the microscope 1 of the image pickup unit 12 is not disturbed.
It is located below 2A. Next, the work W is placed on the work table 23 and is vacuum-sucked. As mentioned above,
The work W may be fixedly mounted on the work table 23 with a tape. Then, the pattern formed on the surface of the work W is imaged under the microscope 12A, and the image is displayed on the monitor television 16. Here, the operator operates the switch of the operation / display unit 14 while watching the image displayed on the monitor TV 16 to align the work W. The work W for which alignment has been completed
When the work table 23 is moved, the work table 23 is carried into the processing section 20, and the rotary blade 21 rotating at high speed and the cutting movement by the work table 23 perform groove processing and cutting processing. During processing, cutting water is supplied from the cutting nozzle to the processing point,
Cleaning water is supplied from the cleaning nozzle. During cutting, the processing section 20 is filled with water spray and mist,
Since the mist is blocked by the mist cover 30, these mists and the like do not flow out of the processed portion 20.

On the other hand, for the mist in the processing section 20,
During cutting, the mist fan is rotated to forcibly exhaust the air in the processing section 20 from the mist exhaust port 31 via the duct hose 24, and the mist in the processing section 20 is discharged to the outside of the processing section 20.

The exhaust air pressure in the processing section 20 can be set to a predetermined value. In that case, set the desired value to CPU4.
Enter 0. The pressure sensor 32 constantly detects the exhaust pressure in the processing section 20. Exhaust pressure detection signal is CPU
40, the CPU 40 calculates an amount to drive the rotary actuator 34, that is, an amount to open the air volume adjusting plate 28, and outputs a signal indicating the amount to open to the rotary actuator 34. The rotary actuator 34 opens and closes the air volume adjusting plate 28 by an amount corresponding to the signal from the CPU 40. Thus, if the pressure value of the exhaust pressure is set to a desired value, the pressure sensor 32 constantly detects the exhaust pressure in the processing unit 20, and if the set value and the current value are different, the rotary The actuator 34 rotates and the air volume adjusting plate 28 opens and closes, and the exhaust pressure in the processing unit 20 reaches a set value.

The exhaust pressure in the processing section 20 changes depending on the exhaust air volume. The exhaust air volume is represented by the following formula.

[0022]

[Equation 1] Air volume Q (m ³ / min) = wind speed (m / min)
× Opening area (m ² ) However, wind speed: constant.

Therefore, if the opening area of the mist exhaust port 31 is increased, the air velocity is constant and the air volume Q increases. On the contrary, if the opening area of the mist exhaust port 31 is made small, the wind speed is constant, so that the air volume Q becomes small. If the air volume increases, the exhaust pressure in the processing unit 20 increases,
The exhaust pressure in the processing unit 20 decreases as the air volume decreases.

According to the present embodiment, since the air pressure can be exhausted in accordance with the installation conditions of the cutting device, the tape for fixing the work W to the work table 23 is peeled off by the exhaust air pressure or the bellows 27. , 27 can be prevented from floating and the small chips can be prevented from coming off.

When the exhaust pressure that is uniformly applied to each device in the factory is used as the exhaust air pressure, the exhaust pressure may change. Therefore, the exhaust air volume changes each time. However, by applying the above-described function of automatic adjustment using the pressure sensor, the exhaust pressure in the processing unit 20 can be always kept at a desired value. This automatic adjustment function is also effective when the specifications of the mist fan used differ individually.

In the present embodiment, the case where the present invention is applied to the cutting device has been described, but a semiconductor wafer can be applied as a work, and the present invention can also be applied to a dicing device for dicing a semiconductor wafer.

[0027]

According to the present invention as set forth in claim 1, since the air can be exhausted with a wind pressure that matches the installation conditions of the cutting device, the tape for fixing the work to the work table is peeled off by the exhaust air pressure. Can be prevented.

According to the second aspect of the present invention, the exhaust air volume can be adjusted according to the detected exhaust air pressure, so that the exhaust air pressure can be automatically kept constant at a predetermined value.

[Brief description of drawings]

FIG. 1 is an external perspective view of a cutting device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a state in which an outer wall is removed by the cutting device according to the embodiment of the present invention.

FIG. 3 is a front view of the vicinity of the mist exhaust port of the oil pan of the cutting device according to the embodiment of the present invention as viewed from the processing section side.

FIG. 4 is a side view of the vicinity of the mist exhaust port of the oil pan of the cutting device according to the embodiment of the present invention.

FIG. 5 is a block diagram showing a control relationship between a pressure sensor and a rotary actuator according to an embodiment of the present invention.

[Explanation of symbols]

W ... Work, 10 ... Cutting device, 20 ... Processing part, 22 ... Mist fan box, 24 ... Duct hose, 28 ... Air volume adjusting plate, 31 ... Mist exhaust port, 32 ... Pressure sensor, 34
… Rotary actuator

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kazuya Fukuoka             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu (72) Inventor Takayuki Asano             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu F-term (reference) 3C011 EE09

Claims (3)

[Claims] 1. A cutting device comprising a forced exhaust device for exhausting a mist generated during cutting of a work in a predetermined closed space to the outside of the predetermined closed space by an exhaust air volume to the forced exhaust device. A cutting device provided with an air volume adjusting means for adjusting 2. The air volume adjusting means comprises an air pressure detecting means for detecting exhaust air pressure, and the air volume adjusting means adjusts the exhaust air volume according to the exhaust air pressure detected by the air pressure detecting means. Cutting equipment. 3. A dicing device equipped with a forced exhaust device for exhausting mist generated during cutting of a semiconductor wafer in a predetermined closed space by air to the outside of the predetermined closed space. A dicing device comprising an air volume adjusting means for adjusting an air volume.