JP2003121492A - Spherical bump and contact structure - Google Patents

Spherical bump and contact structure

Info

Publication number
JP2003121492A
JP2003121492A JP2001316402A JP2001316402A JP2003121492A JP 2003121492 A JP2003121492 A JP 2003121492A JP 2001316402 A JP2001316402 A JP 2001316402A JP 2001316402 A JP2001316402 A JP 2001316402A JP 2003121492 A JP2003121492 A JP 2003121492A
Authority
JP
Japan
Prior art keywords
contact
terminal
spherical bump
terminals
spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001316402A
Other languages
Japanese (ja)
Inventor
Toshimasa Mimori
敏正 三森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2001316402A priority Critical patent/JP2003121492A/en
Publication of JP2003121492A publication Critical patent/JP2003121492A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To confirm a contact state of each spherical bump located at a position invisible from the outside in relation to the contact of the bump in mounting it on a socket or an electronic board, in spherical bumps of two-dimensional array used for an LSI of a small package. SOLUTION: Regarding one spherical bump 10, plural electrically separated contact terminals A11 and B12 are formed, external connection terminals A13 and B14 are electrically connected to the contact terminals A11 and B12, respectively, and electric resistance between the connection terminals A13 and B14 is measured by an electric resistance tester or the like, so that the contact states between the spherical bump 10, and the contact terminal A11 and the contact terminal B12 can be determined, and the contact state can be measured without needing a special device even if the spherical bump 10 is located at an invisible position.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、例えばコンタクト
ピンおよびそれを備えたLSIを実装するための構造に
関し、特に、ボール状の電極端子が二次元的に配列され
ている半導体パッケージのLSIを実装する場合に用い
られる球面バンプとの接触構造に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure for mounting, for example, a contact pin and an LSI having the contact pin, and more particularly to mounting a semiconductor package LSI having ball-shaped electrode terminals arranged two-dimensionally. The present invention relates to a contact structure with a spherical bump used in the case of

【0002】[0002]

【従来の技術】以下、従来の接触構造について説明す
る。従来のコンタクトピンと球面形バンプとの接触構造
としては、コンタクトピンの弾性支片に支持された接触
部を球面形バンプの下死点部を除く球面と対向して配置
し、上記接触部に球面形バンプの球面に喰い込む突起を
設けると共に、この突起の喰い込み量を設定する受圧面
を設けた接触構造があった(例えば、特許登録第262
0525号)。
2. Description of the Related Art A conventional contact structure will be described below. As the conventional contact structure between the contact pin and the spherical bump, the contact portion supported by the elastic support piece of the contact pin is arranged so as to face the spherical surface excluding the bottom dead center of the spherical bump, and the spherical surface is provided on the contact portion. There is a contact structure in which a protrusion that bites into the spherical surface of the shaped bump is provided and a pressure receiving surface that sets the amount of protrusion of this protrusion is provided (for example, Patent Registration No. 262).
0525).

【0003】一方、特開平10−12344号公報に
は、1つの接触端子を4分割し電気的に分離させ、4つの
球面バンプに接触させる構成が開示されている。
On the other hand, Japanese Unexamined Patent Publication No. 10-12344 discloses a structure in which one contact terminal is divided into four parts and electrically separated to make contact with four spherical bumps.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記従
来の構成では、接触部の形状を如何に工夫しても、球面
形バンプと接触部が接触しているかどうかを見極める事
が不可能である。したがって、球面形バンプを用いたL
SIの評価を行う時、前記球面バンプとソケットとの間
の接触部の接触不良なのか、デバイスの機能不良なのか
を判断することができない。特に、球面バンプを二次元
的に配列しているデバイスにおいては、デバイスの中心
近傍の端子は目視することができない。
However, in the above-mentioned conventional structure, it is impossible to determine whether or not the spherical bump and the contact portion are in contact with each other no matter how the shape of the contact portion is devised. Therefore, L using spherical bumps
When the SI is evaluated, it is not possible to judge whether the contact between the spherical bump and the socket is poor or the device is defective. In particular, in a device in which spherical bumps are arranged two-dimensionally, the terminals near the center of the device cannot be visually observed.

【0005】即ち、特許登録第2620525号におい
ては、1つの球面バンプについて2つの接触部を持つ構
成となっているが、その経路において電気的に接続する
接合部を介して端子に接続する構成となっているため、
電気抵抗を測定することにより接触状況を判別すること
ができない。
That is, in Japanese Patent Registration No. 2620525, one spherical bump has two contact portions, but in the route, it is connected to a terminal through a joint portion electrically connected. Because,
The contact situation cannot be determined by measuring the electric resistance.

【0006】一方、特開平10−12344号公報に記
載の発明では、1つのバンプについて複数の接触部を持
ち、かつ別々に信号を取出すという記述はなく、球面バ
ンプと接触端子の接触確認が出来る構成となっていない
ため、電気抵抗を測定することにより接触状況を判別す
ることができない。
On the other hand, in the invention described in Japanese Unexamined Patent Publication No. 10-12344, there is no description that one bump has a plurality of contact portions and the signals are separately taken out, and the contact between the spherical bump and the contact terminal can be confirmed. Since it is not configured, the contact situation cannot be determined by measuring the electric resistance.

【0007】本発明は、かかる点に鑑み、小型パッケー
ジのLSIに用いられる2次元配列の球面バンプにおい
て、ソケットや電子基板に実装する際に球面バンプとの
接触について、外から目視できない位置に存在する球面
バンプの接触状況を確認する接触構造を提供することを
目的とする。
In view of the above point, the present invention exists in a two-dimensional array of spherical bumps used in a small package LSI at a position where contact with the spherical bumps when mounted on a socket or an electronic substrate cannot be visually observed from the outside. It is an object of the present invention to provide a contact structure for confirming the contact status of a spherical bump.

【0008】[0008]

【課題を解決するための手段】本発明は、1つの球面バ
ンプに接触する複数の接触部において、各接触部を電気
的に分離したままの構造にする。また前記接触部をそれ
ぞれ分離したまま外部と接続する外部接続端子に電気的
に接続する構造とする。
According to the present invention, in a plurality of contact portions that contact one spherical bump, each contact portion is electrically separated. Further, the contact portion is electrically connected to an external connection terminal which is connected to the outside while being separated from each other.

【0009】上記構成をもつ球面バンプとの接触構造に
より、1つの球面バンプに接触する複数の接触部間の電
気抵抗を測定することで球面バンプと接触部の間の接触
状況や電気的な接続状態を測ることが可能となる。
The contact structure between the spherical bump and the contact portion is measured by measuring the electric resistance between the plurality of contact portions contacting one spherical bump by the contact structure with the spherical bump having the above-mentioned configuration. It is possible to measure the condition.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施の形態につい
て、図面を用いて説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

【0011】(実施の形態1)図1は本発明の実施の形
態1における球面バンプとの接触構造を示す断面図であ
る。
(Embodiment 1) FIG. 1 is a sectional view showing a contact structure with a spherical bump according to Embodiment 1 of the present invention.

【0012】図1において、15は球面バンプ10を接
触対象とした電極端子である。11は接触端子A、12
は接触端子Bであり、接触端子A11、接触端子B12
とも球面バンプ10を対象とした接触端子である。接触
端子A11と接触端子B12は電気的に分離しており、
図1における位置関係では、球面バンプ10が接触端子
A11および接触端子B12に接触していないため、接
触端子A11と接触端子B12の間は電気的にオープン
状態となる。
In FIG. 1, reference numeral 15 is an electrode terminal with which the spherical bump 10 is contacted. 11 is a contact terminal A, 12
Are contact terminals B, and contact terminals A11 and B12
Both are contact terminals intended for the spherical bump 10. The contact terminal A11 and the contact terminal B12 are electrically separated,
In the positional relationship in FIG. 1, the spherical bumps 10 are not in contact with the contact terminals A11 and B12, so that the contact terminals A11 and B12 are electrically open.

【0013】13は外部接続端子Aであり、接触端子A
11と外部接続端子A13は電気的に接続されている。
14は外部接続端子Bであり、接触端子B12と電気的
に接続されている。球面バンプ10と接触端子A11、
接触端子B12はそれぞれが電気的に分離しているた
め、外部接続端子A13と外部接続端子B14の間につ
いても接触端子A11と接触端子B12がオープン状態
となり、抵抗値は無限大となり、電気的に接続されてい
ないことが解る。
Reference numeral 13 is an external connection terminal A, which is a contact terminal A.
11 and the external connection terminal A13 are electrically connected.
Reference numeral 14 denotes an external connection terminal B, which is electrically connected to the contact terminal B12. Spherical bump 10 and contact terminal A11,
Since the contact terminals B12 are electrically separated from each other, the contact terminals A11 and B12 are in an open state even between the external connection terminal A13 and the external connection terminal B14, the resistance value becomes infinite, and the electrical You can see that they are not connected.

【0014】一方、図2においては球面バンプ10が接
触端子A11および接触端子B12と接触する位置にあ
ることを示している。球面バンプ10は導電性のため、
図2の接触状態になることにより、接触端子A11と接
触端子B12は球面バンプ10を介して電気的に接続さ
れた状態となり、外部接続端子A13と14の間の抵抗
を測定するとショートしていることを判別することがで
きる。
On the other hand, FIG. 2 shows that the spherical bump 10 is in a position in contact with the contact terminals A11 and B12. Since the spherical bump 10 is conductive,
When the contact state of FIG. 2 is established, the contact terminal A11 and the contact terminal B12 are electrically connected via the spherical bumps 10, and the resistance between the external connection terminals A13 and 14 is short-circuited. It can be determined.

【0015】これにより、外部接続端子A13と外部接
続端子B14の間が電気的に接続されていることは、即
ち球面バンプ10と接触端子A11および接触端子B1
2が接触していることを示している。
As a result, the electrical connection between the external connection terminals A13 and B14 means that the spherical bumps 10, the contact terminals A11 and the contact terminals B1 are connected.
2 is in contact.

【0016】従って、球面バンプ10、接触端子A1
1,接触端子B12が外部から見えない位置に有ったと
しても、外部接続端子A13と外部接続端子B14が測
定可能であれば、球面バンプ10と接触端子A11、接
触端子B12の接触状態を測定することが可能となる。
Therefore, the spherical bump 10 and the contact terminal A1
1. Even if the contact terminal B12 is not visible from the outside, if the external connection terminal A13 and the external connection terminal B14 can be measured, the contact state of the spherical bump 10 with the contact terminal A11 and the contact terminal B12 is measured. It becomes possible to do.

【0017】尚、本実施の形態において、接触端子A1
1および接触端子B12の2つの接触端子に分けている
が、2つ以上の接触端子を球面バンプ10に接触する構
造であれば良いものである。
In the present embodiment, the contact terminal A1
1 and contact terminal B12 are divided into two contact terminals, but any structure may be used as long as two or more contact terminals are in contact with the spherical bump 10.

【0018】また、図1においては接触端子A11およ
び接触端子B12の向き合った側の上部角にて球面バン
プ10が接触する構造としているが、球面バンプ10に
複数の接触端子が接触する形状であればよく、接触端子
の形状について限定するものではない。
In FIG. 1, the spherical bumps 10 are in contact with each other at the upper corners of the contact terminals A11 and B12 facing each other. However, the spherical bumps 10 may be in contact with a plurality of contact terminals. However, the shape of the contact terminal is not limited.

【0019】(実施の形態2)図3は本発明の実施の形
態2における球面バンプと接触する接触構造体を示す断
面図である。
(Second Embodiment) FIG. 3 is a sectional view showing a contact structure in contact with a spherical bump according to a second embodiment of the present invention.

【0020】図3において、31は基板配線33に接続
する基板接続端子であり、接触端子A11と電気的に接
続されており、電子基板34内部に構成された基板配線
33と電気的に接続される。基板配線33は基板面に平
行に形成され、接触端子A11は基板面に垂直に形成さ
れている。
In FIG. 3, reference numeral 31 denotes a board connecting terminal connected to the board wiring 33, which is electrically connected to the contact terminal A11 and is electrically connected to the board wiring 33 formed inside the electronic board 34. It The board wiring 33 is formed parallel to the board surface, and the contact terminal A11 is formed perpendicular to the board surface.

【0021】一方、32は測定端子であり、接触端子B
12と電気的に接続されており、基板配線33から離れ
た位置に設置される。測定端子32は、接触端子B12
との電気的な接続が確保されていればよいため、測定時
以外においては接触端子B12から取り外す事により球
面バンプ10に対する付加容量を削減することも可能で
ある。
On the other hand, 32 is a measuring terminal, which is a contact terminal B
It is electrically connected to the wiring 12, and is installed at a position away from the board wiring 33. The measurement terminal 32 is a contact terminal B12.
Since it suffices to secure the electrical connection with the contact point, it is possible to reduce the additional capacitance to the spherical bump 10 by removing it from the contact terminal B12 except during measurement.

【0022】尚、図3においては基板配線33の設置角
度は接触端子A11と直角の角度にて設置されている
が、本発明において設置位置、設置角度を規定するもの
ではない。
In FIG. 3, the installation angle of the board wiring 33 is set at a right angle to the contact terminal A11, but the installation position and the installation angle are not specified in the present invention.

【0023】(実施の形態3)図4は本発明の実施の形
態3における球面バンプとの接触構造を示し、球面バン
プ形状端子のLSIを実装する基板において、上記実施
の形態1、2の接触構造を持つ実装基板であり、球面バ
ンプを電子基板に実装する際のものである。
(Embodiment 3) FIG. 4 shows a contact structure with a spherical bump according to Embodiment 3 of the present invention. In a substrate on which an LSI having a spherical bump-shaped terminal is mounted, the contact of Embodiments 1 and 2 above. A mounting board having a structure, which is used when mounting a spherical bump on an electronic board.

【0024】図4において、40は電子基板、41,4
2は球面バンプ10に接触する接触端子Cおよび接触端
子Dである。43は基板内配線、44は接触端子C41
と基板内配線43を介して電気的に接続されている部品
実装端子である。
In FIG. 4, 40 is an electronic substrate, 41, 4
Reference numeral 2 denotes a contact terminal C and a contact terminal D that come into contact with the spherical bump 10. 43 is the wiring inside the substrate, 44 is the contact terminal C41
And a component mounting terminal electrically connected to the substrate via the wiring 43 in the board.

【0025】一方、46は接触端子D42と基板内配線
45を介して電気的に接続されている測定端子である。
47は絶縁材料である。48は球面バンプ10と基板内
配線43の電気的接続を実現する半田接続部Aである。
49は球面バンプ10と接触端子D42の電気的接続を
実現する半田接続部Bである。球面バンプ10は導電性
であるため、図4においては部品実装端子44から測定
端子46までの電気的接続が形成されているが、この電
気的な接続状態が維持されたかどうかは、部品実装端子
44と測定端子46の導通を確認することで判別でき
る。
On the other hand, reference numeral 46 is a measuring terminal which is electrically connected to the contact terminal D42 through the wiring 45 in the substrate.
47 is an insulating material. Reference numeral 48 is a solder connection portion A that realizes electrical connection between the spherical bump 10 and the in-board wiring 43.
Reference numeral 49 is a solder connection portion B that realizes electrical connection between the spherical bump 10 and the contact terminal D42. Since the spherical bump 10 is conductive, an electrical connection from the component mounting terminal 44 to the measuring terminal 46 is formed in FIG. 4, but it is determined whether or not this electrical connection state is maintained. It can be determined by confirming the continuity between 44 and the measuring terminal 46.

【0026】図4は球面バンプ10と電子基板40の位
置関係が適切であり、正常に半田接続部A48、半田接
続部B49が形成されている場合を示した図であるが、
図5は球面バンプ10と電子基板40の位置が離れすぎ
ているため、半田接続部B49は球面バンプ10と接触
端子D42の電気的接続を実現しているが、半田接続不
良部51によって、球面バンプ10と接触端子C41の
電気的接続ができていないことを示している。
FIG. 4 is a view showing a case where the positional relationship between the spherical bumps 10 and the electronic substrate 40 is appropriate and the solder connecting portions A48 and B49 are normally formed.
In FIG. 5, since the positions of the spherical bump 10 and the electronic substrate 40 are too far apart, the solder connection portion B49 realizes the electrical connection between the spherical bump 10 and the contact terminal D42. This shows that the bump 10 and the contact terminal C41 are not electrically connected.

【0027】図5に示すように、部品実装端子44と測
定端子46の間は電気的に導通しないことが測定可能で
あり、前記測定より球面バンプ10と電子基板40の実
装に失敗している事が判別できる。
As shown in FIG. 5, it is possible to measure that there is no electrical conduction between the component mounting terminal 44 and the measuring terminal 46, and from the above measurement, the mounting of the spherical bump 10 and the electronic substrate 40 has failed. I can tell things.

【0028】[0028]

【発明の効果】本発明は、球面バンプへの接触部を電気
的に分離した複数の接触端子に接触させることにより、
前記球面バンプと接触端子との接触状況や電気的な接続
状態を外部より測定可能となり、デバイスの機能測定に
おけるエラー解析および装置不具合などの原因解析を低
コストでかつ確実に行うことができるという有利な効果
が得られる。
According to the present invention, the contact portion to the spherical bump is brought into contact with a plurality of electrically separated contact terminals,
It is advantageous that the contact state and the electrical connection state between the spherical bump and the contact terminal can be measured from the outside, and error analysis in device function measurement and cause analysis such as device failure can be reliably performed at low cost. Can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の形態1における球面バンプとの
接触構造を示す断面図
FIG. 1 is a sectional view showing a contact structure with a spherical bump according to a first embodiment of the present invention.

【図2】実施の形態1における球面バンプとの接触構造
の接触状態を示す断面図
FIG. 2 is a sectional view showing a contact state of a contact structure with a spherical bump according to the first embodiment.

【図3】本発明の実施の形態2における球面バンプと接
触する接触構造体を示す断面図
FIG. 3 is a cross-sectional view showing a contact structure in contact with a spherical bump according to the second embodiment of the present invention.

【図4】本発明の実施の形態3における球面バンプとの
接触構造の適正な位置に実装された場合を示す断面図
FIG. 4 is a cross-sectional view showing a case where a contact structure with a spherical bump according to Embodiment 3 of the present invention is mounted at an appropriate position.

【図5】本発明の実施の形態3における球面バンプとの
接触構造の不適正な位置に実装された場合を示す断面図
FIG. 5 is a cross-sectional view showing a case where a contact structure with a spherical bump is mounted at an inappropriate position in Embodiment 3 of the present invention.

【符号の説明】[Explanation of symbols]

10 球面バンプ 11 接触端子A 12 接触端子B 13 外部接続端子A 14 外部接続端子B 15 電極端子 31 基板接続端子 32 測定端子 33 基板配線 34 電子基板 40 電子基板 41 接触端子C 42 接触端子D 43 基板内配線 44 部品実装端子 45 基板内配線 46 測定端子 47 絶縁材料 48 半田接続部A 49 半田接続部B 10 Spherical bump 11 Contact terminal A 12 Contact terminal B 13 External connection terminal A 14 External connection terminal B 15 electrode terminals 31 PCB connection terminal 32 measuring terminals 33 board wiring 34 Electronic board 40 electronic board 41 Contact terminal C 42 Contact terminal D 43 In-board wiring 44 Component mounting terminal 45 In-board wiring 46 measuring terminals 47 insulating material 48 Solder connection part A 49 Solder connection part B

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】球面形バンプと接触する接触端子の接触構
造であって、1つの球面形バンプに2つ以上の接触端子
が接触する電極端子について、前記各接触端子が電気的
に分離していることを特徴とする球面バンプとの接触構
造。
1. A contact structure of a contact terminal for contacting a spherical bump, wherein each contact terminal is electrically separated from an electrode terminal in which two or more contact terminals contact one spherical bump. A contact structure with a spherical bump, which is characterized in that
【請求項2】1つの球面形バンプに接触し電気的に分離
した各接触端子と、前記各接触端子を電気的に分離した
ままそれぞれ独立させた位置に外部と電気的に接続する
外部接続端子を備えたことを特徴とする接触構造体。
2. Contact terminals that are in contact with one spherical bump and are electrically separated, and external connection terminals that are electrically connected to the outside at respective independent positions while electrically separating the contact terminals. A contact structure comprising:
【請求項3】上記外部接続端子の一つは、基板に接続す
る端子で、他は測定に用いる端子であることを特徴とす
る請求項2記載の接触構造体。
3. The contact structure according to claim 2, wherein one of the external connection terminals is a terminal connected to a substrate, and the other is a terminal used for measurement.
【請求項4】1つの球面形バンプに接触し、電気的に分
離している各接触端子を電気的に分離したままそれぞれ
独立させた位置に外部と電気的に接続する外部接続端子
について、前記外部接続端子間の抵抗値を測定すること
により、球面バンプと接触端子間の接触確認をすること
を特徴とする球面バンプと接触端子との接触確認方法。
4. An external connection terminal for contacting one spherical bump and electrically connecting each electrically isolated contact terminal to the outside at an electrically isolated position. A contact confirmation method between a spherical bump and a contact terminal, which comprises confirming contact between the spherical bump and the contact terminal by measuring a resistance value between the external connection terminals.
【請求項5】球面バンプ形状端子のLSIを実装する基
板において、請求項1記載の接触構造を持つ実装基板。
5. A mounting substrate having a contact structure according to claim 1, which is a substrate on which an LSI having spherical bump-shaped terminals is mounted.
【請求項6】1つの球面バンプと接触する複数の電気的
に分離した接触端子とそれぞれ電気的に接続させた接続
端子間の電気抵抗を測定することにより、前記球面バン
プと前記各接触端子の電気接続の状態を判定することを
特徴とする接触構造の電気接続状態判定方法。
6. The spherical bump and each of the contact terminals are measured by measuring the electrical resistance between a plurality of electrically separated contact terminals that are in contact with one spherical bump and the connection terminals that are electrically connected to each other. A method for determining an electrical connection state of a contact structure, which comprises determining an electrical connection state.
JP2001316402A 2001-10-15 2001-10-15 Spherical bump and contact structure Pending JP2003121492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001316402A JP2003121492A (en) 2001-10-15 2001-10-15 Spherical bump and contact structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001316402A JP2003121492A (en) 2001-10-15 2001-10-15 Spherical bump and contact structure

Publications (1)

Publication Number Publication Date
JP2003121492A true JP2003121492A (en) 2003-04-23

Family

ID=19134424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001316402A Pending JP2003121492A (en) 2001-10-15 2001-10-15 Spherical bump and contact structure

Country Status (1)

Country Link
JP (1) JP2003121492A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012049480A (en) * 2010-08-30 2012-03-08 Sharp Corp Semiconductor device, inspection method of the same and electrical equipment
JP2012049418A (en) * 2010-08-30 2012-03-08 Toshiba Corp Electronic apparatus
KR101130425B1 (en) * 2009-05-18 2012-03-28 후지쯔 가부시끼가이샤 Substrate structure
JP2014235159A (en) * 2013-06-05 2014-12-15 富士通セミコンダクター株式会社 Semiconductor device, test system, and test method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101130425B1 (en) * 2009-05-18 2012-03-28 후지쯔 가부시끼가이샤 Substrate structure
JP2012049480A (en) * 2010-08-30 2012-03-08 Sharp Corp Semiconductor device, inspection method of the same and electrical equipment
JP2012049418A (en) * 2010-08-30 2012-03-08 Toshiba Corp Electronic apparatus
US8581616B2 (en) 2010-08-30 2013-11-12 Kabushiki Kaisha Toshiba Electronic device
JP2014235159A (en) * 2013-06-05 2014-12-15 富士通セミコンダクター株式会社 Semiconductor device, test system, and test method

Similar Documents

Publication Publication Date Title
JP6174172B2 (en) Contact probe
JP4695925B2 (en) Shielded integrated circuit probe
US6548827B2 (en) Semiconductor apparatus with misalignment mounting detection
US6062873A (en) Socket for chip package test
JP2006004932A5 (en)
US9476912B2 (en) Kelvin contact probe structure and a Kelvin inspection fixture provided with the same
KR20170066756A (en) Socket pin and Semiconductor package test system
US6210173B1 (en) Electrical connector incorporating an elastic electrically conductive material
US20070202714A1 (en) Test contact system for testing integrated circuits with packages having an array of signal and power contacts
US7484968B2 (en) Socket for an electrical tester
JP2003121492A (en) Spherical bump and contact structure
KR101823119B1 (en) Relay socket, relay socket module, and test board for semiconductor package
JP3878041B2 (en) Contact and electrical connection device using the same
JPH11211749A (en) Semiconductor acceleration sensor
US20060264096A1 (en) Surface mount retention module
JP2005061851A (en) Substrate for probe card
JPH09320715A (en) Semiconductor device package socket
CN111880067B (en) Chip testing assembly and electric connection module thereof
US11751326B2 (en) Electronic apparatus and inspection method
KR20050042563A (en) Probe pin block of probe card
JPH08250620A (en) Semiconductor device
KR200311472Y1 (en) Board connector for testing semiconductor package
JPH09161926A (en) Semiconductor chip socket
JP2024051858A (en) Semiconductor device, base-side semiconductor chip and attachment-side semiconductor chip
JP2001015227A (en) Inspection device for semiconductor device

Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20040406