JP2003114208A - Electrode of resistivity meter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrode of a resistivity meter capable of suppressing its cost increase. SOLUTION: This electrode of the resistivity meter is equipped with an inner electrode 2, an outer electrode 3 and a support part. The support part supports base ends 2f, 3b of the inner and outer electrodes 2, 3. The inner electrode 2 is equipped with a large-diameter member 2b and a small-diameter member 2a. The large-diameter member 2b has a circular pipe shape having a blocked tip part 2g. The small-diameter member 2a has a circular pipe shape. The outer diameter of the small-diameter member 2a is smaller than the outer diameter of the large-diameter member 2b. The large- diameter member 2b and the small-diameter member 2a are connected together by a first screw thread 41, a second screw thread 42 and a projection. The outer electrode 3 is equipped with a large-diameter member 3e and a small-diameter member 3d. The large-diameter member 3e has a circular pipe shape. The small-diameter member 3d is equipped with a circular pipe-shaped circular pipe part 50a. The outer diameter of the circular pipe part 50a is smaller than the outer diameter of the large-diameter member 3e. The large-diameter member 3e and the small-diameter member 3d are connected together by a first screw thread 51, a second screw thread 52 and a projection.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to water quality control in fields such as semiconductor cleaning equipment, industrial machinery, agriculture, food, and medical fields, insulation of cooling water for nuclear power plants, and concentration control of various chemicals. The present invention relates to an electrode of a resistivity meter used in.

[0002]

2. Description of the Related Art Ultrapure water is used in semiconductor cleaning equipment, industrial machinery, agriculture, food, medical treatment, etc. for water quality control, cooling water insulation of nuclear power plants, and concentration control of various chemicals. A resistivity meter for measuring the resistivity of the ultrapure water or the electrolyte solution is used to measure the purity and the concentration of the electrolyte solution.

For example, in a semiconductor manufacturing process, a semiconductor wafer as an object to be cleaned is inserted into a cleaning tank and cleaned with a cleaning liquid such as ammonia (cleaning process). Then, while discharging the ammonia, ultrapure water (water with intentionally extremely reduced impurities: also referred to as ultrahigh-purity water) is put in a cleaning tank to rinse the semiconductor wafer (rinsing step). In the rinsing step, when measuring the purity of ultrapure water replaced with ammonia, for example, as shown in FIG.
A resistivity meter including the electrode 101 shown in 2 is used.

The electrode 101 of the resistivity meter illustrated in FIG.
Is the inner electrode 102, the outer electrode 103, and the inner electrode 10
2 and the support portion 104 that supports the outer electrode 103. The inner electrode 102 is made of a conductive metal. The inner electrode 102 is formed in a circular tube shape with one end (hereinafter referred to as a tip) 102b closed. The inner electrode 102 integrally includes a large diameter portion 105 and a small diameter portion 106. The outer diameter of the small diameter portion 106 is smaller than the outer diameter of the large diameter portion 105.
The large diameter portion 105 and the small diameter portion 106 are coaxial with each other and arranged in series with each other.

The outer electrode 103 is made of a conductive metal.
The outer electrode 103 is formed in a tubular shape. Outer electrode 10
The inner diameter of 3 is larger than the outer diameter of the inner electrode 102. Outer electrode 1
The inner electrode 102 is inserted into the inner ring 03, and the inner and outer electrodes 102 and 103 are coaxially arranged. The support portion 104 is the base end portion 10 of the small diameter portion 106 of the inner electrode 102.
2a and the base end portion 103a of the outer electrode 103 are supported.

With the above-described structure, the electrode 1 of the resistivity meter
01 arrange | positions at least the front-end | tip part 102b, 103b of each of the said inner electrode 102 and the outer electrode 103 in the flow path of the electrolyte solution of a measuring object, and these electrodes 102, 103
The resistivity of the electrolyte solution is measured by measuring the electrical resistance between them. Then, the purity of the electrolyte solution such as ultrapure water is determined based on the measured resistivity.

[0007]

The inner electrode 102 as an electrode member of the electrode 101 of the resistivity meter described above is made of a conductive metal and has a large diameter portion 105 and a small diameter portion 106 having different outer diameters. Be prepared for one. Therefore, the inner electrode 102 has been manufactured, for example, by subjecting a cylindrical member made of the metal to cutting processing. For this reason, there are a large number of wasted portions of the member (the material yield is extremely deteriorated).

Further, it is necessary to make a hole 107 between the large diameter portion 105 and the small diameter portion 106, which is very difficult to manufacture. Therefore, the number of man-hours required for manufacturing tends to increase. Therefore, the cost of the electrode 101 of the resistivity meter tends to increase.

Therefore, an object of the present invention is to provide an electrode of a resistivity meter which can suppress the cost increase.

[0010]

In order to solve the above problems and achieve the object, the electrode of the resistivity meter of the present invention according to claim 1 comprises a plurality of electrodes in a flow path of an electrolyte solution to be measured. Members are arranged at a predetermined interval, in the electrode of a resistivity meter for measuring the resistivity of the electrolyte solution based on the electrical resistance between the electrode members, at least one electrode member of the plurality of electrode members, It is characterized in that it has a large-diameter member and a small-diameter member that are formed in a cylindrical shape and have different outer diameters, and that the large-diameter member and the small-diameter member are coaxially connected to each other.

The electrode of the resistivity meter of the present invention according to claim 2 is the electrode of the resistivity meter according to claim 1, wherein a first screw thread is formed on the outer peripheral surface of the small diameter member, and the electrode having the large diameter is formed. A second screw thread with which the first screw thread is screwed is formed on the inner peripheral surface of the member, and the second screw thread is formed on either one of the large diameter member and the small diameter member, and the first screw thread and When the second screw thread is screwed, a press-fitting portion that press-fits into the other is provided.

According to a third aspect of the present invention, there is provided the electrode of the resistivity meter according to the second aspect of the present invention, wherein the large diameter member and the small diameter member have surfaces facing each other when connected to each other. Each of the press-fitting portions is a protrusion protruding from one of the surface of the large-diameter member and the surface of the small-diameter member toward the other, and the first screw thread and the second screw thread are provided. When and are screwed together, the protrusion is difficult to be inserted into the other.

The electrode of the resistivity meter of the present invention according to claim 4 is the electrode of the resistivity meter according to claim 2, wherein the press-fitting portion is provided on the small-diameter member and is larger than the first screw thread. It is characterized in that it is provided closer to the diameter member and has an outer diameter larger than the inner diameter of the large diameter member.

According to a fifth aspect of the present invention, there is provided an electrode of the resistivity meter according to the second aspect of the present invention, wherein the press-fitting portion is provided on the large diameter member and has a second screw thread. It is characterized in that it is provided closer to the small diameter member and has an inner diameter smaller than the outer diameter of the small diameter member.

According to a sixth aspect of the electrode of the resistivity meter of the present invention, in the electrode of the resistivity meter of the first aspect, one end of the small diameter member is inserted inside the large diameter member, A large-diameter member and a small-diameter member are connected to each other, and a concave recess is formed from one of the inner peripheral surface of the large-diameter member and the outer peripheral surface of the small-diameter member, and the other is convex from the other. A portion is formed, and when one end of the small diameter member is inserted inside the large diameter member, the convex portion is engaged in the concave portion.

The electrode of the resistivity meter of the present invention according to claim 7 is the electrode of the resistivity meter according to any one of claims 1 to 6, wherein the electrode member has a circular tubular shape. An electrode and a circular tubular outer electrode are provided, the inner electrode is inserted inside the outer electrode, and the inner and outer electrodes are arranged coaxially with each other, and the inner electrode is the large-diameter member and the It is characterized by having a small diameter member.

The electrode of the resistivity meter of the present invention according to claim 8 is the electrode of the resistivity meter according to any one of claims 1 to 6, wherein the electrode member has a circular tubular shape. An electrode and a circular tubular outer electrode are provided, the inner electrode is inserted inside the outer electrode, and the inner and outer electrodes are arranged coaxially with each other, and the outer electrode is the large-diameter member and the It is characterized by having a small diameter member.

The electrode of the resistivity meter of the present invention according to claim 9 is the electrode of the resistivity meter according to any one of claims 1 to 6, wherein the electrode member has a circular tubular shape. An electrode and a circular tubular outer electrode are provided, the inner electrode is inserted inside the outer electrode, and the inner and outer electrodes are arranged coaxially with each other, and both the inner electrode and the outer electrode are provided. It is characterized by having the large diameter member and the small diameter member.

According to the electrode of the resistivity meter of the present invention described in claim 1, at least one electrode member includes a large diameter member and a small diameter member. The large diameter member and the small diameter member are connected. Therefore, the electrode member can be manufactured by separately manufacturing the large diameter member and the small diameter member and connecting them.

According to the electrode of the resistivity meter of the present invention as defined in claim 2, when the first screw thread and the second screw thread are screwed together, one of the large diameter member and the small diameter member is The press-fitting part presses into the other. Therefore, even when applying an adhesive to the large-diameter member and the small-diameter member to fix these members to each other,
The base material of the large diameter member and the base material of the small diameter member surely come into contact with each other.

According to the electrode of the resistivity meter of the present invention as defined in claim 3, since the press-fitting portion bites into the other, an adhesive is applied to the large diameter member and the small diameter member to fix these members to each other. Also when performing, the base material of the large diameter member and the base material of the small diameter member surely come into contact with each other.

According to the electrode of the resistivity meter of the fourth aspect of the present invention, the outer diameter of the press-fitting portion closer to the large diameter member than the first screw thread is larger than the inner diameter of the large diameter member. Therefore, these members can be fixed to each other without applying an adhesive to the large diameter member and the small diameter member.

According to the electrode of the resistivity meter of the present invention described in claim 5, the inner diameter of the press-fitting portion arranged closer to the small diameter member than the second screw thread is smaller than the outer diameter of the small diameter member. For this reason,
These members can be fixed to each other without applying an adhesive to the large diameter member and the small diameter member.

According to the electrode of the resistivity meter of the present invention described in claim 6, one of the inner peripheral surface of the large-diameter member and the outer peripheral surface of the small-diameter member is engaged with the concave recess, and the other is engaged with the convex. To do. Therefore, these members can be fixed to each other without applying an adhesive to the large diameter member and the small diameter member.

According to the electrode of the resistivity meter of the present invention described in claim 7, the inner electrode includes a large diameter member and a small diameter member. Therefore, the inner electrode can be manufactured by separately manufacturing the large diameter member and the small diameter member and connecting them.

According to the electrode of the resistivity meter of the present invention described in claim 8, the outer electrode includes a large diameter member and a small diameter member. Therefore, the outer electrode can be manufactured by separately manufacturing the large-diameter member and the small-diameter member and connecting them.

According to the electrode of the resistivity meter of the present invention described in claim 9, the inner and outer electrodes are provided with a large diameter member and a small diameter member. Therefore, the large-diameter member and the small-diameter member can be manufactured separately, and they can be connected to each other to manufacture the inner and outer electrodes.

[0028]

BEST MODE FOR CARRYING OUT THE INVENTION An electrode 1 of a resistivity meter according to an embodiment of the present invention will be described with reference to FIGS.
The electrode 1 of the resistivity meter shown in FIG. 1 and the like is used to control the quality of water such as ultrapure water in various fields such as semiconductor cleaning equipment, industrial machinery, agriculture, food and medical fields, and to insulate the cooling water of nuclear power plants It is used for controlling the concentration of various chemical solutions as electrolyte solution.

The electrode 1 is, for example, ultrapure water (corresponding to the electrolyte solution described in the claims, etc.) as a cleaning liquid in a rinse step in a semiconductor manufacturing process for cleaning an object to be cleaned such as a semiconductor wafer. Used to measure the purity of The resistivity meter using the electrode 1 is a device for measuring the resistivity of the electrolyte solution in order to measure the purity of the electrolyte solution such as the ultrapure water as the measurement target.

The electrode 1 is arranged in a channel such as the ultrapure water and is attached to a T-shaped pipe joint 60 which constitutes the channel as shown in FIG. As shown in FIG. 1, the T-shaped pipe joint 60 includes pipe portions 61a, 61b,
61c is provided.

A cleaning tank for accommodating a semiconductor wafer and for performing the cleaning step and the rinsing step is connected to one tube portion 61a. The other one pipe part 61b is connected to a discharge pipe for discharging the treatment liquid used in the cleaning process and the rinsing process described above. The electrode 1 is attached to the other one tube portion 61c. A taper screw 62 as a screw thread is formed on the outer peripheral surface of the tube portion 61c.

The electrode 1 of the resistivity meter is, as shown in FIG.
An inner electrode 2 as an electrode member, an outer electrode 3 as an electrode member, a seal member 8, a supporting portion 4 for supporting the inner electrode 2 and the outer electrode 3, a temperature detecting portion 5, and the inner electrode 2. An inner electrode lead wire 6 as an electrically connected electric wire, an outer electrode lead wire 7 as an electric wire electrically connected to the outer electrode 3, a cap nut 71 as a mounting means, and a coil as a biasing means. The spring 72 and the seal protrusion 33 are provided.

The inner electrode 2 is made of a conductive metal or the like. The inner electrode 2 is formed in a circular tube shape having one end (hereinafter referred to as a tip) 2g closed. Inner electrode 2
As shown in FIGS. 2 and 3, the small diameter member 2a having a relatively small outer diameter and the large diameter member 2b having a relatively large outer diameter.
And are equipped with. These small diameter member 2a and large diameter member 2
b is coaxial with each other and connected in series.

The large-diameter member 2b is made of, for example, titanium (Titani).
um) and other high-strength and corrosion-resistant metals. The large-diameter member 2b is formed in a tubular shape in which the tip portion 2g is closed, and has an outer diameter that is substantially constant over the entire length. The small diameter member 2a is made of a metal such as stainless steel. The small diameter member 2a is formed in a tubular shape. The outer diameter of the small diameter member 2a is formed to be substantially constant over the entire length. The small-diameter member 2a has a groove 2 formed to be concave from the outer surface.
equipped with h. The concave groove 2h is formed along the circumferential direction of the small diameter member 2a.

As shown in FIG. 3, the large-diameter member 2b and the small-diameter member 2a are mutually connected by a first screw thread 41, a second screw thread 42, and a projection 43 (shown in FIG. 4) as a press-fitting portion. They are connected in series. The first screw thread 41 has a small diameter member 2a.
Is formed on the outer peripheral surface of one end portion (hereinafter, referred to as a front end portion) 44 of. Therefore, the small diameter member 2a is a so-called male screw.

The second thread 42 is formed on the inner peripheral surface of the other end portion (hereinafter referred to as the base end portion) 45 of the large diameter member 2b. Therefore, the large diameter member 2b is a so-called female screw. The first screw thread 41 is screwed into the second screw thread 42. That is, the first screw thread 41 and the second screw thread 42 are screwed together.

In the small diameter member 2a and the large diameter member 2b, when the first screw thread 41 and the second screw thread 42 are screwed with each other,
Surfaces 46 and 47 facing each other and overlapping each other are provided. These surfaces 46 and 47 are annular and are flat along the direction orthogonal to the axis of the small diameter member 2a and the large diameter member 2b, that is, the axis of the inner electrode 2.

The protrusion 43 projects from one of the surface 46 of the small diameter member 2a and the surface 47 of the large diameter member 2b toward the other. In the illustrated example, as shown in FIG. 4, the protrusion 43 is formed to be convex from the surface 46 of the small diameter member 2a toward the surface 47 of the large diameter member 2b. The protrusion 43 has an annular shape. The cross-sectional shape of the protrusion 43 is formed in a mountain shape with a point.

The inner electrode 2 is obtained by screwing the first screw thread 41 and the second screw thread 42 to each other and connecting the small diameter member 2a and the large diameter member 2b in series. When the first screw thread 41 and the second screw thread 42 are screwed together, an adhesive is applied to these screw threads 41, 42. further,
When the threads 41 and 42 are screwed with each other, the projections 43 are sharp, and thus the projection 43 is hard to fit into the base material of the large-diameter member 2b, as shown in FIG.

When assembling the inner electrode 2 having the above-described structure, first, an adhesive is applied to the first screw thread 41 and the second screw thread 42. As shown in FIG. 5A, the first screw thread 41 is gradually screwed into the second screw thread 42 and gradually inserted into the large diameter member 2b from the tip portion 44 of the small diameter member 2a.

Then, as shown in FIG.
3 contacts the surface 47 of the large diameter member 2b. Furthermore, the first
5 is screwed into the second thread 42 of FIG.
As shown in (c), the protrusion 43 gradually bites into the base material of the large diameter member 2b. Then, as shown in FIG.
The small diameter member 2a
The large-diameter member 2b is fixed to the inner electrode 2 having the above-described structure.

The inner electrode 2 is arranged such that the large diameter member 2b is located on the tip side of the electrode 1 of the resistivity meter and the small diameter member 2a is located on the base end side. Small diameter member 2a of the inner electrode 2
The inside of the large diameter member 2b forms a temperature detecting portion insertion hole 2d.

The temperature detecting portion insertion hole 2d is arranged coaxially with each of the small diameter member 2a and the large diameter member 2b. The temperature detecting portion insertion hole 2d is formed across the end surface 2c of the inner electrode 2 on the base end portion 2f side and the tip portion 2g of the inner electrode 2. The temperature detecting portion insertion hole 2d is, of course, open on the end face 2c on the base end 2f side, but is not opened on the end face 2e on the tip 2g side of the inner electrode 2.

The outer electrode 3 is made of a conductive metal or the like. The outer electrode 3 is formed in a tubular shape. As shown in FIGS. 2 and 3, the outer electrode 3 includes a small diameter member 3d having a relatively small inner and outer diameter and a large diameter member 3e having a relatively large inner and outer diameter.

The large diameter member 3e is formed so that the inner and outer diameters thereof are substantially constant over the entire length. The inner diameter of the large diameter member 3e is larger than the outer diameter of the large diameter member 2b of the inner electrode 2. The large diameter member 3e is
The base end portion 55 is provided with a plurality of through holes 48 through which the electrolyte solution described above passes. The through hole 48 penetrates the large diameter member 3e. Further, a step 49 is formed in which the inner diameter of the large-diameter member 3e gradually increases from the base end 55 toward the tip 3c. The step 49 is provided near the tip 3c of the through hole 48.

As shown in FIGS. 2 and 3, the small-diameter member 3d has an annular tubular portion 50a and an annular annular portion 50b.
And are integrated into one. The inner and outer diameters of the circular pipe portion 50a are formed to be substantially constant over the entire length. The inner diameter of the circular tube portion 50a is larger than the outer diameter of the small diameter member 2a of the inner electrode 2.

The annular portion 50b is connected to one end portion (hereinafter referred to as the tip portion) of the circular pipe portion 50a. Ring part 50b
Is coaxial with the circular pipe portion 50a. Therefore, the annular portion 5
0b projects in the outer peripheral direction of the circular pipe portion 50a from the tip end portion of the circular pipe portion 50a over the entire circumference of the circular pipe portion 50a.
The outer diameter of the annular portion 50b is substantially equal to the inner diameter of the large diameter member 3e. Further, the annular portion 50b is integrally formed with a flange portion 50c which further projects from the outer peripheral surface in the outer peripheral direction.
Further, the annular portion 50b constitutes one end of the small diameter member 3d described in the present specification.

As shown in FIG. 3, the small-diameter member 3d and the large-diameter member 3e are formed by a first screw thread 51, a second screw thread 52, and a projection 53 (shown in FIG. 6) as a press-fitting portion. , Coaxial with each other and connected in series. In addition, when the first screw thread 51 and the second screw thread 52 are screwed together as described later, the annular portion 50b connecting the small diameter member 3d and the large diameter member 3e to each other forms the inner and outer electrodes as described later. Two
When 3 is arranged coaxially with each other, it becomes parallel to the step portion 2i of the inner electrode 2.

The first screw thread 51 is formed on the outer peripheral surface of the annular portion 50b of the small diameter member 3d. Therefore, the small diameter member 3d is a so-called male screw. Second thread 52
Is formed on the inner peripheral surface of the base end portion 55 of the large diameter member 3e. Therefore, the large diameter member 3e is a so-called female screw. The first screw thread 51 is screwed into the second screw thread 52. That is, the first screw thread 51 and the second screw thread 52 are screwed together.

In the small diameter member 3d and the large diameter member 3e, when the first screw thread 51 and the second screw thread 52 are screwed with each other,
Surfaces 56 and 57 that face each other and overlap each other are provided. These surfaces 56, 57 are annular and are flat along the direction orthogonal to the axis of the small diameter member 2a and the large diameter member 2b, that is, the axis of the inner electrode 2.

The surface 56 of the small diameter member 3d has a flange portion 50.
It is the surface of c. The surface 57 of the large diameter member 3e is an end surface on the base end portion 55 side of the large diameter member 3e. The protrusion 53 projects from one of the surface 56 of the small diameter member 3d and the surface 57 of the large diameter member 3e toward the other. In the illustrated example, the protrusion 53
6, is formed to be convex from the surface 57 of the large diameter member 3e toward the surface 56 of the small diameter member 3d. The protrusion 53 has an annular shape. The cross-sectional shape of the protrusion 53 is formed in a mountain shape with a point.

The outer electrode 3 is obtained by screwing the first screw thread 51 and the second screw thread 52 to each other and connecting the small diameter member 3d and the large diameter member 3e in series. When the first screw thread 51 and the second screw thread 52 are screwed together, an adhesive is applied to these screw threads 51, 52. further,
When the threads 51 and 52 are screwed with each other, the projections 53 are sharp, so that the protrusion 53 is hard to fit into the base material of the small diameter member 3d, as shown in FIG.

When assembling the outer electrode 3 having the above-described structure, first, the through hole 48 is formed in the peripheral wall of the cylindrical member having the constant inner and outer diameters which constitutes the large diameter member 3e. Thereafter, the inner peripheral surface is subjected to cutting work or the like to form the step 49. Then, the second screw thread 52 is formed on the inner peripheral surface of the large diameter member 3e, and the first screw thread 51 is formed on the outer peripheral surface of the annular portion 50b of the small diameter member 3d.

Adhesive is applied to the first threads 51 and the second threads 52. As shown in FIG. 7A, the first screw thread 51 is gradually screwed into the second screw thread 52, and the small diameter member 3d is gradually inserted into the large diameter member 3e.

Then, as shown in FIG. 7B, the protrusion 5
3 contacts the surface 56 of the small diameter member 3d. Furthermore, the first
7 is screwed into the second thread 52 of FIG.
As shown in (c), the protrusion 53 gradually bites into the base material of the small diameter member 3d. Then, as shown in FIG.
57 face each other and overlap each other, so that the small diameter member 3d
And the large-diameter member 3e are fixed, and the outer electrode 3 having the above-described configuration is obtained.

As for the inner electrode 2 and the outer electrode 3, as shown in FIG. 3, the small diameter member 2a is arranged in the small diameter member 3d, and the large diameter member 2 is formed.
b is arranged in the large-diameter member 3e. That is,
The inner electrode 2 and the outer electrode 3 are arranged coaxially with each other by inserting the inner electrode 2 inside the outer electrode 3. Inner electrode 2
Is arranged such that the end surface 2e of the large-diameter member 2b is positioned slightly behind the outer electrode 3 from the end surface 3a located on the tip 3c side of the outer electrode 3.

The seal member 8 is made of a synthetic resin having a plastomer property, that is, no elastomer property. That is, the seal member 8 is hardly elastically deformed. The seal member 8 is
It is made of high-polymer material with high plasticity. In this embodiment,
The seal member 8 is made of a non-eluting fluororesin or the like that hardly elutes the electrolyte solution described above. That is,
The seal member 8 is non-eluting.

As shown in FIGS. 1 to 3, the seal member 8 integrally includes a disc portion 8a and a tubular portion 8b. The disc portion 8a is formed in a disc shape having a circular planar shape and a substantially constant thickness. Both surfaces of the disc portion 8a are formed flat. The outer diameter of the disk portion 8a is formed to be substantially equal to the inner diameter of the large diameter member 3e of the outer electrode 3.

The disk portion 8a has a hole 8c in the center. The hole 8c penetrates the disc portion 8a. The hole 8c is
The planar shape is circular. The hole 8c is formed so that its inner diameter is substantially equal to the outer diameter of the small diameter member 2a of the inner electrode 2.

The tubular portion 8b is connected to the edge of the hole 8c.
The tubular portion 8b is formed in a cylindrical shape. The cylindrical portion 8b is erected on the disc portion 8a. The inner diameter of the cylindrical portion 8b is formed to be substantially equal to the outer diameter of the small diameter member 2a of the inner electrode 2. The cylindrical portion 8b has a circular tube portion 50 of the small-diameter member 3d of the outer electrode 3 having an outer diameter.
It is formed to be approximately equal to the inner diameter of a. The tubular portion 8b is fitted to both the outer circumference of the small diameter member 2a and the inner circumference of the small diameter member 3d to keep the distance between the electrodes 2 and 3 at a predetermined distance t.

The seal member 8 having the above-mentioned structure is provided in the support portion 4
When the base portions 2f and 3b of the electrodes 2 and 3 are supported by the disk portion 8a, as shown in FIGS.
i and the annular portion 50b, and the tubular portion 8b is the small diameter member 2
It is arranged between a and 3d.

At this time, since the seal member 8 is hardly elastically deformed and both surfaces of the disk portion 8a are formed flat, the both surfaces have no gap between the step portion 2i and the annular portion 50b. The tubular portion 8b is in contact with the small diameter members 2a, 3
d Touch both without any gap. The seal member 8 keeps the inner and outer electrodes 2 and 3 liquid-tight, and prevents the electrolyte solution from entering the space 16 described later from between the inner and outer electrodes 2 and 3.

The supporting portion 4 is a small-diameter member 2a of the inner electrode 2.
It supports both the end portion 2f (referred to as a base end portion) near the end and the end portion 3b (referred to as a base end portion) near the small diameter member 3d of the outer electrode 3. The support part 4 includes an outer electrode holder 11 as a support part body, a base end cap 12, and the like.

The outer electrode holder 11 is made of a synthetic resin that has an insulating property and has a small amount of a substance eluted into the above-mentioned electrolyte solution, that is, a non-eluting substance. As a synthetic resin forming the outer electrode holder 11, polyphenylene sulfide (Polyphenene sulfide) is used.
ylene sulfide: hereinafter referred to as PPS), polyetheretherketone (hereinafter referred to as PEEK), polytetrafluoroe
Fluorine resin such as thylene: hereinafter referred to as PTFE) can be used.

The outer electrode holder 11 is formed into a bottomed cylinder having a disk portion 11c and a cylinder portion 11d. Disc part 1
1c has a circular planar shape. Disk part 11
The surface of c is formed to be substantially flat. The outer diameter of the disc portion 11c is formed to be substantially equal to the outer diameter of the end surface 61d of the pipe portion 61c.

A hole 11e is provided at the center of the disc portion 11c. The hole 11e penetrates the disc portion 11c. The hole 11e has a circular planar shape. Hole 11e
The inner diameters of the disk portions 11c are formed to be substantially equal from one surface of the disk portion 11c to the other surface. The hole 11e is
The inner diameter is formed to be substantially equal to the outer diameter of the circular pipe portion 50a of the small diameter member 3d of the outer electrode 3.

The cylindrical portion 11d has a small diameter portion 11a and a large diameter portion 11b which are formed in a cylindrical shape and have the same inner diameter, and are coaxially arranged in series. The outer diameter of the large diameter portion 11b is larger than that of the small diameter portion 11a. The large diameter portion 11b is arranged closer to the disc portion 11c than the small diameter portion 11a. The large diameter portion 11b is
It is connected to the outer edge of the disc portion 11c. The cylindrical portion 11d is erected on the disc portion 11c.

The outer electrode holder 11 is arranged with the small-diameter member 3d of the outer electrode 3 inserted in the hole 11e. At this time, the outer diameter of the circular pipe portion 50a of the small-diameter member 3d is substantially constant along the longitudinal direction, and the inner diameter of the hole 11e is substantially constant.
Moreover, since the outer electrode holder 11 is made of the synthetic resin described above, the inner surface of the hole 11e and the outer surface of the small diameter member 3d are in close contact with each other without a gap.

Therefore, the outer electrode holder 11, that is, the support portion 4
And the outer electrode 3 are kept liquid-tight, and the electrolyte solution is prevented from entering the space 16 from between the outer electrode holder 11 and the outer electrode 3. Further, the concave groove 2h has the disc portion 11
It is located closer to the base end 2f than c, and the space 16
It is located inside.

The base end cap 12 is formed in a bottomed cylindrical shape having a disk portion 12a and a cylindrical portion 12b. Disc part 1
2a is formed in a disc shape. The tubular portion 12b is formed in a tubular shape and is continuous with the peripheral edge of the disc portion 12a.

The base end cap 12 is made of a well-known synthetic resin such as polyamide resin (nylon). The proximal end cap 12 is arranged such that the cylindrical portion 12b is fitted to the outer circumference of the small diameter portion 11a of the outer electrode holder 11. In the proximal end cap 12, the cylindrical portion 12b is the small diameter portion 11a.
Are fixed by being adhered by a well-known epoxy adhesive.

The base end cap 12 has a round hole 12c penetrating the disk portion 12a. The circular hole 12c is formed in a substantially circular plane shape. The round hole 12c is arranged coaxially with the disk portion 12a. The round hole 12c is
A wire bundle 26 of the temperature detecting unit 5 which will be described later passes inside thereof.

Further, the support portion 4 has a space 16 formed therein, which is surrounded by the disc portion 11c of the outer electrode holder 11, the cylindrical portion 11d, the disc portion 12a of the base end cap 12, and the like. There is.

The support portion 4 further includes an insulating washer 20 arranged in the space 16, a retaining ring 19, and a disc portion 21.
Conductive holder 27 in which the circular tube portion 22 and the circular tube portion 22 are integrally formed
And a coil spring 9 as a second urging means.

The insulating washer 20 is made of insulating synthetic resin and is formed in an annular shape. The insulating washer 20 has an inner diameter substantially equal to the outer diameter of the small diameter member 2a, and an outer diameter substantially equal to or slightly smaller than the inner diameter of the conductive holder 27. The insulating washer 20 is fitted on the outer periphery of the small diameter member 2a. The insulating washer 20 is arranged between the end of the small diameter member 3d and the groove 2h.

The retaining ring 19 is made of a well-known electrically conductive steel such as stainless steel, and is formed in an annular shape. The snap ring 19 has a small-diameter member 2 of the inner electrode 2 on the inner side thereof.
It is accommodated in the cylindrical portion 11d of the outer electrode holder 11 in a state in which a passes.

The inner edge of the retaining ring 19 has a small diameter member 2a.
It is fitted in the concave groove 2h. The retaining ring 19 is in close contact with the surface of the insulating washer 20 near the end surface 2c. Retaining ring 1
9 prevents the insulating washer 20 from slipping out from the base end portion 2f of the small diameter member 2a by fitting the inner edge into the concave groove 2h.

The disk portion 21 of the conductive holder 27 is made of a conductive metal or the like and has a disk shape. The disk portion 21 of the conductive holder 27 is formed so that its inner diameter is substantially equal to the outer diameter of the small diameter member 3d of the outer electrode 3. The outer diameter of the disk portion 21 of the conductive holder 27 is formed to be substantially equal to the inner diameter of the cylindrical portion 11d. Disk part 21 of conductive holder 27
Is fitted to the outer periphery of the small-diameter member 3d and is also included in the outer electrode holder 11
It is laid on the disc portion 11c in a state of being fitted to the inner circumference of the disc.

The circular tube portion 22 of the conductive holder 27 is made of a conductive metal or the like and is formed in a circular tube shape. The inner diameter of the circular tube portion 22 of the conductive holder 27 is formed to be sufficiently larger than the outer diameter of the small diameter member 3d. Conductive holder 2
The outer diameter of the circular tube portion 22 of No. 7 is substantially equal to the inner diameter of the tubular portion 11d. The end portion of the circular tube portion 22 of the conductive holder 27 is integrally formed with the disc portion 21 of the conductive holder 27 and is inserted into the cylindrical portion 11d.

The coil spring 9 has a relatively small spring constant. The coil spring 9 is made of well-known steel such as stainless steel. The coil spring 9 is provided inside the circular pipe portion 22 of the conductive holder 27 and between the insulating washer 20 and the circular plate portion 21 of the conductive holder 27.
The coil spring 9 is arranged so that the small-diameter members 2a and 3d of the inner and outer electrodes 2 and 3 pass through the inside thereof.

The coil spring 9 urges the insulating washer 20 and the disk portion 21 of the conductive holder 27 toward each other in a direction away from each other. The coil spring 9 has an insulating washer 20.
And the disk portion 21 of the conductive holder 27 are urged in directions away from each other, and the insulating washer 20 is prevented from coming off the proximal end portion 2f by the retaining ring 19.
The base end portion 2f of the inner electrode 2 is biased to be housed in the support portion 4.

Disc portion 11c, annular portion 50b and disc portion 8a
The inner and outer electrodes 2, 3 such that the step and the step portion 2i come close to each other.
The seal member 8 and the outer electrode holder 11 are urged. In this way, the coil spring 9 biases the inner electrode 2 and the support portion 4 in the direction in which the distance between the base end portion 2f of the inner electrode 2 and the support portion 4 becomes narrow.

Further, since both the inner electrode 2 and the supporting portion 4 are biased by the coil spring 9 so that the distance between them becomes narrower, both surfaces of the seal member 8 are stepped portions 2i.
And the annular portion 50b are in close contact with each other without a gap. That is, the seal member 8 comes into close contact with the inner and outer electrodes 2 and 3 without a gap. The sealing member 8 keeps the inner and outer electrodes 2 and 3 liquid-tight to prevent the above-mentioned ultrapure water from entering the space 16.

Further, since both the inner electrode 2 and the supporting portion 4 are biased by the coil spring 9 so that the distance between them is narrowed, the disc portion 11c and the annular portion 50b are surely secured. Close contact without any gaps. The space between the disk portion 11c and the annular portion 50b is kept liquid-tight, and the above-mentioned ultrapure water is prevented from entering the space 16.

Further, the temperature detecting portion insertion hole 2d is opened in the space 16. Further, the space 16 accommodates a conductive ring 23, a conductive wire 24, and a ring 17 attached to the inner peripheral surface of the circular pipe portion 22 of the conductive holder 27 by fitting the ring 17 therein. .

The conductive ring 23 is made of a conductive metal or the like and is formed in a tubular shape. Conductive ring 2
The inner diameter of 3 is substantially equal to the outer diameter of the small diameter member 3d. The outer diameter of the conductive ring 23 is formed sufficiently smaller than the inner diameter of the circular tube portion 22. The conductive ring 23 is fitted on the outer circumference of the end of the small diameter member 3d near the base end 3b.

The conductive wire 24 has one end fixed to the conductive ring 23 by brazing using solder or the like, and the other end sandwiched between the disk portion 21 of the conductive holder 27 and the coil spring 9 (or the wire is It is fixed directly or by brazing using a solder etc. to the washer of another part).
The conductive line 24 electrically connects the conductive ring 23 and the conductive holder 27 to each other.

In the illustrated example, the ring 17 is provided with an annular ring body 17a and a claw 17b protruding from the outer edge of the ring body 17a toward the outer peripheral direction. A plurality of claws 17b are provided. The claws 17b are arranged at substantially equal intervals along the circumferential direction of the ring body 17a.

In the ring 17, the claw 17b is fitted to the inner peripheral surface of the circular pipe portion 22 of the conductive holder 27, and the conductive holder 2
It is fixed to the circular pipe portion 22 of 7. The ring 17 is made of well-known steel such as stainless steel. further,
In the ring 17, the claw 17b is the circular tube portion 2 of the conductive holder 27.
You may fit in the groove | channel provided in the inner peripheral surface of 2.

The temperature detecting section 5 includes a temperature sensor element (not shown), a circular tube spring member 25, and the like. The temperature detector 5 is arranged in the temperature detector insertion hole 2d. The temperature sensor element is arranged in the temperature detecting portion insertion hole 2d and at the tip portion 2g of the inner electrode 2. The temperature sensor element includes a temperature sensing unit that measures temperature.

The temperature sensor element has a disk-shaped temperature sensing portion,
It is composed of a thermistor having a pellet shape or a shape having a surface portion similar thereto and a thin film platinum temperature sensor. The temperature sensor element is arranged such that the surface portion of the temperature sensing portion is substantially parallel to the flow path of the electrolyte solution in the temperature detection portion insertion hole 2d. An electric wire (not shown) is attached to the temperature sensor element.

The electric wire extends from the tip portion 2g of the inner electrode 2 toward the base portion 2f of the inner electrode 2 and is arranged in the temperature detecting portion insertion hole 2d. Each of these electric wires is electrically connected to a computing device (not shown) or the like.

A portion of the electric wire (not shown) from the central portion to the other end along the longitudinal direction, the inner electrode lead wire 6,
The outer electrode lead wire 7 and the outer electrode lead wire 7 are bundled together to form an electric wire bundle 26. The wire bundle 26 has a round hole 12c in the base end cap 12 located on the base end portions 2f and 3b side of the inner electrode 2 and the outer electrode 3 when the temperature detection portion 5 is housed in the temperature detection portion insertion hole 2d. Is led to the outside through.

The circular tube spring member 25 is made of well-known steel having conductivity. The circular tube spring member 25 is formed in a circular tube shape. The circular tube spring member 25 is partially
It is cut along the longitudinal direction. Circular pipe spring member 25
Has a C-shaped cross section that crosses the longitudinal direction. The circular tube spring member 25 has elasticity such that the outer diameter thereof can expand and contract. The circular tube spring member 25 is
In the initial state, the outer diameter is larger than the inner diameter of the small diameter member 2a of the inner electrode 2.

The circular tube spring member 25 is arranged near the temperature sensor element of the wire bundle 26. Circular pipe spring member 25
Binds the above-mentioned electric wires (not shown) to each other.
The circular tube spring member 25 is inserted into the small diameter member 2a against the elastic restoring force. When the circular tube spring member 25 is inserted into the small diameter member 2a, an elastic restoring force is generated to bring the circular pipe spring member 25 into close contact with the inner peripheral surface of the small diameter member 2a.

The inner electrode lead wire 6 is housed in the space 16 and has one end electrically connected to the circular tube spring member 25. The inner electrode lead wire 6 is electrically connected to the inner electrode 2 by electrically connecting to the circular tube spring member 25.
The inner electrode lead wire 6 is guided to the base end cap 12 as a wire bundle 26 together with the above-described electric wire (not shown), and is guided to the outside through the inside of the round hole 12c. Inner electrode lead wire 6
Is electrically connected to the above-described arithmetic device (not shown).

The outer electrode lead wire 7 is housed in the space 16 and has one end electrically connected to the ring 17. The outer electrode lead wire 7 is electrically connected to the ring 17 so that the circular tube portion 22 and the circular plate portion 2 of the conductive holder 27 are connected.
1, electrically connected to the conductive ring 23 and the outer electrode 3.
The outer electrode lead wire 7 is guided to the base end cap 12 as a wire bundle 26 together with the above-mentioned electric wire (not shown) and the like, and is guided to the outside through the inside of the round hole 12c. The outer electrode lead wire 7 is electrically connected to the above-mentioned arithmetic device (not shown).

An O-ring 30 made of an elastic material such as silicone rubber is provided in the base end cap 12. The O-ring 30 is formed in an annular shape.
In the initial state, the O-ring 30 has an inner diameter smaller than the outer diameter of the wire bundle 26 and an outer diameter larger than the inner diameter of the small-diameter portion 11 a of the outer electrode holder 11.

The O-ring 30 passes the wire bundle 26 inside and is arranged inside the small diameter portion 11 a of the outer electrode holder 11, that is, inside the cylindrical portion 12 b of the base end cap 12. O-ring 3
0, when provided in the proximal end cap 12, the wire bundle 26
And the inner peripheral surface of the small diameter portion 11a of the outer electrode holder 11 are kept liquid-tight.

The O-ring 30 is condensed in the space 16 even when condensed water is attached to the vicinity of the round hole 12c of the base end cap 12 when the temperature of the electrolyte solution is relatively low. Prevent water from entering.

Further, the temperature detecting section 5 is provided in the temperature detecting section insertion hole 2d, and the ring 17 is provided in the space 16.
The non-elastic layer 31 and the elastic layer 32 are filled and laminated in the space 16 with the retaining ring 19 and the like accommodated therein.

The non-elastic layer 31 is filled in the small diameter portion 11a and on the outer circumference of the wire bundle 26. The inelastic layer 31 is arranged between the O-ring 30 and the ring 17 along the longitudinal direction of the inner and outer electrodes 2, 3. The inelastic layer 31 is formed of a synthetic resin made of an inelastic material such as an epoxy resin having no elasticity.

The elastic layer 32 is filled between the inelastic layer 31 and the ring 17 along the longitudinal direction of the electrodes 2 and 3. The elastic layer 32 is made of synthetic resin such as sponge rubber. The non-elastic layer 31 and the elastic layer 32 prevent dew condensation water adhering to the vicinity of the round hole 12c from entering the space 16.

The cap nut 71 is made of the above-mentioned PPS or PEE.
It is made of a synthetic resin such as K, PTFE or the like, such as a fluororesin, and integrally includes a circular disk portion 73 having a circular planar shape and a cylindrical tubular portion 74. The outer diameter of the disc portion 73 is formed larger than the outer diameters of the outer electrode holder 11 and the tube portion 61c.

A through hole 75 is provided in the center of the disc portion 73. The through hole 75 is formed such that its inner diameter is substantially equal to the outer diameter of the small diameter portion 11 a of the outer electrode holder 11.
The tubular portion 74 is connected to the outer edge of the disc portion 73. Tube 7
A parallel screw 76 is formed on the inner peripheral surface of No. 4.

The cap nut 71 has a small diameter portion 1 in the through hole 75.
The parallel screw 76 is screwed into the taper screw 62 and attached to the pipe portion 61c in a state of passing through 1a, that is, the support portion 4. At this time, the edge portion of the tubular portion 74, which is separated from the disc portion 73, is tapered along the axial direction of the pipe portion 61c.
Located near the center of. Further, the cap nut 71 surrounds the outer electrode holder 11, that is, the outer periphery of both the support portion 4 and the tube portion 61c. The cap nut 71 is attached to the tube portion 61c to press the outer electrode holder 11 or the support portion 4 toward the end surface 61d of the tube portion 61c.

The coil spring 72 has a relatively small spring constant. The coil spring 72 is made of well-known steel such as stainless steel, and has a rectangular cross section.
When the parallel screw 76 of the cap nut 71 is screwed into the taper screw 62 of the pipe portion 61c, the coil spring 72 allows the small diameter portion 11a to pass inside and the small diameter portion 11a and the large diameter portion 11b.
It is arranged between the stepped surface 11f that connects with and the disc portion 73.

The coil spring 72 biases the outer electrode holder 11, that is, the support portion 4 toward the end surface 61d of the tube portion 61c. The coil spring 72 brings the seal projection 33 into close contact with the end surface 61d of the tube portion 61c.

The seal projection 33 is provided on the surface 1 of the disk portion 11c facing the end surface 61d of the tube portion 61c of the outer electrode holder 11.
It projects from 1g. The surface 11g is an end face that is close to the pipe portion 61c of the T-shaped joint 60. The seal projection 33 projects toward the end surface 61d of the tube portion 61c. The seal protrusion 33 includes the hole 11e and the disc portion 1.
It extends in an annular shape coaxial with 1c.

The seal protrusions 33 are arranged along the circumferential direction of the disc portion 11c. The seal protrusion 33 is made of the same synthetic resin as the outer electrode holder 11, such as PPS, PEEK, and PTFE. In the illustrated example, the seal projection 33 is formed integrally with the outer electrode holder 11 and has a U-shaped cross-sectional shape that gradually narrows as it goes away from the disk portion 11c.

According to the above-mentioned structure, the electrode 1 of the resistivity meter is
The inner and outer electrodes 2 and 3 are inserted through the opening of the pipe portion 61c, and the parallel screw 76 is screwed into the taper screw 62 to be attached to the pipe portion 61c or the T-shaped pipe joint 60. At least the tip portions 2g and 3c of the inner electrode 2 and the outer electrode 3, respectively, are arranged in a flow path of ultrapure water as an electrolyte solution flowing in the T-shaped pipe joint 60.

Then, the resistivity meter using the electrode 1 measures the electrical resistance between the electrodes 2 and 3 transmitted to the arithmetic unit or the like via the lead wires 6 and 7 to obtain the resistivity of the electrolyte solution. To measure.

At this time, the temperature-sensitive portion of the temperature sensor element transmits information according to the temperature of the electrolyte solution to the arithmetic unit via the electric wire or the like. Then, this arithmetic unit or the like compensates the temperature of the electrolyte solution and calculates the resistivity of the electrolyte solution at a predetermined temperature. Then, the arithmetic unit or the like calculates the purity of the electrolyte solution based on the resistivity.

According to the electrode 1 of the resistivity meter of this embodiment,
The inner electrode 2 and the outer electrode 3 include large diameter members 2b and 3e and small diameter members 2a and 3d. The large diameter members 2b and 3e and the small diameter members 2a and 3d are connected. Therefore, the large diameter members 2b and 3e and the small diameter members 2a and 3d are manufactured separately,
The inner electrode 2 and the outer electrode 3 can be manufactured by connecting these.

The large diameter members 2b and 3e and the small diameter member 2
Since a and 3d can be manufactured separately, in particular, the large-diameter member 2
The depth of the hole formed in b can be made shallow. Furthermore, the small-diameter member 2a of the inner electrode 2 and the large-diameter member 3e of the outer electrode 3 can be formed of a tubular member. After forming the through hole 48 in the large diameter member 3e, the inner surface of the large diameter member 3e is cut. Therefore, it is possible to reliably remove the burr generated at the edge of the through hole 48, and it is possible to suppress the number of steps required to remove the burr.

Therefore, since the large diameter members 2b and 3e and the small diameter members 2a and 3d can be manufactured separately, the inner and outer electrodes 2,
The deterioration of the material yield of No. 3 and the time required for processing can be suppressed. Therefore, the cost increase of the inner and outer electrodes 2 and 3 can be suppressed, and the cost increase of the electrode 1 of the resistivity meter can be suppressed. The small diameter member 2a of the inner electrode 2 is made of stainless steel. Therefore, the material cost can be suppressed. Therefore, it is possible to more reliably suppress the cost increase.

When the first screw threads 41, 51 and the second screw threads 42, 52 are screwed together, the large-diameter members 2b, 3e.
And the projections 43, 53 of either one of the small diameter members 2a, 3d
Is pressed into the other. The projections 43 and 53 are pushed into the other base material. For this reason, an adhesive is applied to the first screw threads 41, 51 and the second screw threads 42, 52, and the large diameter member 2
Also when fixing b, 3e and small diameter members 2a, 3d to each other, the base material of the large diameter members 2b, 3e and the small diameter members 2a, 3
The base material of d surely contacts. Therefore, the large diameter member 2
b, 3e and the small diameter members 2a, 3d are surely electrically connected. Therefore, the resistivity of the electrolyte solution can be reliably measured.

In the above-described embodiment, the small diameter member 2a of the inner electrode 2 is provided with the projection 43, and the large diameter member 3e of the outer electrode 3 is provided with the projection 53. However, in the present invention, the protrusion 43 may be provided on the large diameter member 2b of the inner electrode 2 and the protrusion 53 may be provided on the small diameter member 3d of the outer electrode 3. In addition, both the inner electrode 2 and the outer electrode 3 have a small diameter member 2a, 3d and a large diameter member 2
It is configured by connecting b and 3e. However, in the present invention, at least one of the inner and outer electrodes 2 and 3 may be configured by connecting the small diameter members 2a and 3d and the large diameter members 2b and 3e.

Large diameter member 2b and small diameter member 2 of the inner electrode 2
a is a first screw thread 41, a second screw thread 42, and a tip portion 44 of the small-diameter member 2a as a press-fitting portion, as shown in FIG.
You may connect using and. The 1st screw thread 41 is formed in the outer peripheral surface of the small diameter member 2a. First screw thread 41
Is provided at the center of the small diameter member 2a.

The second screw thread 42 is formed on the inner peripheral surface of the large-diameter member 2b. The first thread 41 and the second thread 42 are screwed together. The tip portion 44 is, of course, provided on the small-diameter member 2a and is arranged closer to the large-diameter member 2b than the first screw thread 41. The outer diameter D1 of the tip portion 44 is slightly larger than the inner diameter d1 of the large diameter member 2b. Outer diameter D1 of the tip 44
And the inner diameter d1 of the large-diameter member 2b is preferably 0.01 mm or more and 0.05 mm or less.

In this case, when connecting the large diameter member 2b and the small diameter member 2a, the first screw thread 41 and the second screw thread 42 are connected.
And screw together. Then, since the outer diameter D1 of the tip portion 44 is slightly larger than the inner diameter d1 of the large diameter member 2b, the tip portion 44 is press-fitted into the large diameter member 2b. And the inner electrode 2
Is assembled.

Similar to the above-described embodiment, the large diameter member 2b.
Since the small-diameter member 2a and the small-diameter member 2a can be separately manufactured, the material yield of the inner electrode 2 is deteriorated and the time required for processing can be suppressed. Therefore, the cost increase of the inner electrode 2 can be suppressed, and the cost increase of the electrode 1 of the resistivity meter can be suppressed. The outer diameter D1 of the tip portion 44 is slightly larger than the inner diameter d1 of the large diameter member 2b. Therefore, the large-diameter member 2b does not need to be coated with an adhesive agent on the first screw thread 41 and the second screw thread 42.
And the small diameter member 2a can be fixed. Therefore, since it is not necessary to use an adhesive, the large diameter member 2b and the small diameter member 2a can be reliably electrically connected, and the resistivity of the electrolyte solution can be reliably measured.

Further, as shown in FIG. 9, the large diameter member 2b and the small diameter member 2a of the inner electrode 2 are provided with a convex portion 58a and a convex portion 5a.
You may connect using the recessed part 59a with which 8a engages.
The convex portion 58a is formed to be convex from the outer peripheral surface of the tip end portion 44 of the small diameter member 2a. The recess 59a is formed to be recessed from the inner peripheral surface of the large diameter member 2b.

Further, in this case, the tip portion 4 of the small diameter member 2a is
It is desirable that the outer diameter D1 of 4 is slightly larger than the inner diameter d1 of the large diameter member 2b. Outer diameter D1 of the tip portion 44 of the small diameter member 2a
And the inner diameter d1 of the large diameter member 2b is preferably 0.01 mm or more and 0.03 mm or less. Further, the amount of protrusion from the outer peripheral surface of the convex portion 58a and the concave portion 59
The depth from the inner peripheral surface of a is 0.005 which is half of the above dimension.
It is desirable that it is about mm to 0.015 mm.

In this case, when connecting the large-diameter member 2b and the small-diameter member 2a, the tip portion 44 of the small-diameter member 2a is inserted inside the large-diameter member 2b. Then, since the outer diameter D1 of the tip portion 44 is slightly larger than the inner diameter d1 of the large diameter member 2b, the tip portion 44 is press-fitted into the large diameter member 2b. Then, the convex portion 58a engages with the concave portion 59a, and the inner electrode 2 is assembled.

Similar to the above-described embodiment, the large diameter member 2b.
Since the small-diameter member 2a and the small-diameter member 2a can be separately manufactured, the material yield of the inner electrode 2 is deteriorated and the time required for processing can be suppressed. Therefore, the cost increase of the inner electrode 2 can be suppressed, and the cost increase of the electrode 1 of the resistivity meter can be suppressed. Further, the outer diameter D1 of the tip portion 44 is slightly larger than the inner diameter d1 of the large diameter member 2b, and the convex portion 58a and the concave portion 59a are engaged with each other. Therefore, the large diameter member 2b and the small diameter member 2a can be fixed without applying an adhesive. Therefore, since it is not necessary to use an adhesive, the large diameter member 2b and the small diameter member 2a can be reliably electrically connected, and the resistivity of the electrolyte solution can be reliably measured.

Further, as shown in FIG. 9, when the large diameter member 2b and the small diameter member 2a are fixed by using the convex portion 58a and the concave portion 59a, the convex portion 58a is formed on the inner peripheral surface of the large diameter member 2b. Alternatively, the concave portion 59a may be concave from the outer peripheral surface of the small diameter member 2a.

Large-diameter member 3e and small-diameter member 3 of the outer electrode 3
d and the first thread 51 and the second thread 51 as shown in FIG.
Screw thread 52 and the base end portion 5 of the large-diameter member 3e as the press-fitting portion
5 and may be used for connection. The first screw thread 51 is formed on the outer peripheral surface of the annular portion 50b of the small diameter member 3d.

The second thread 52 is formed on the inner peripheral surface of the large diameter member 3e. The first thread 51 and the second thread 52 are screwed together. The base end portion 55 is, of course, provided on the large-diameter member 3e and is arranged closer to the small-diameter member 3d than the second screw thread 52. The inner diameter D2 of the base end portion 55 is slightly smaller than the outer diameter d2 of the annular portion 50b of the small diameter member 3d. Inner diameter D2 of the base end portion 55 and outer diameter d of the annular portion 50b of the small diameter member 3d.
The difference from 2 is preferably 0.01 mm or more and 0.05 mm or less. The outer diameter d2 of the annular portion 50b of the small diameter member 3d is the outer diameter d2 of the small diameter member 3d.

In this case, when connecting the large diameter member 3e and the small diameter member 3d, the first screw thread 51 and the second screw thread 52 are connected.
And screw together. Then, since the inner diameter D2 of the base end portion 55 is slightly smaller than the outer diameter d2 of the annular portion 50b of the small diameter member 3d, the small diameter member 3d is press-fitted into the base end portion 55. Then, the outer electrode 3 is assembled.

Similar to the above-described embodiment, the large diameter member 2b.
Since the small diameter member 2a and the small diameter member 2a can be separately manufactured, the material yield of the outer electrode 3 is deteriorated and the time required for processing can be suppressed. Therefore, the cost increase of the outer electrode 3 can be suppressed, and the cost increase of the electrode 1 of the resistivity meter can be suppressed. Further, the inner diameter D2 of the base end portion 55 is the annular portion 50 of the small diameter member 3d.
It is slightly smaller than the outer diameter d2 of b. Therefore, the large-diameter member 3e and the small-diameter member 3d can be fixed without applying an adhesive to the first screw thread 51 and the second screw thread 52. Therefore, since it is not necessary to use an adhesive, the large diameter member 3e
And the small diameter member 3d can be reliably electrically connected, and the resistivity of the electrolyte solution can be reliably measured.

Also, as shown in FIG. 11, the large diameter member 3e and the small diameter member 3d of the outer electrode 3 may be connected by using the convex portion 58b and the concave portion 59b with which the convex portion 58b engages. good. The convex portion 58b is formed to be convex from the inner peripheral surface of the base end portion 55 of the large diameter member 3e. The recess 59b has a small diameter member 3d.
Is formed to be concave from the outer peripheral surface of the annular portion 50b.

In this case, the base end portion 5 of the large diameter member 3e is
The inner diameter D2 of 5 is the outer diameter d of the annular portion 50b of the small diameter member 3d.
It is desirable to be slightly smaller than 2. The inner diameter D2 of the base end portion 55 of the large diameter member 3e and the outer diameter d of the annular portion 50b of the small diameter member 3d.
The difference from 2 is preferably 0.01 mm or more and 0.03 mm or less. Further, the protrusion amount from the inner peripheral surface of the convex portion 58b and the depth from the outer peripheral surface of the concave portion 59b are 0.005 mm to 0.015 mm, which is a half of the above dimension.
It is desirable that it is a degree.

In this case, when connecting the large diameter member 3e and the small diameter member 3d, the annular portion 50b of the small diameter member 3d is inserted inside the base end portion 55 of the large diameter member 3e. Then, since the inner diameter D2 of the base end portion 55 is slightly smaller than the outer diameter d2 of the annular portion 50b of the small diameter member 3d, the small diameter member 3d is press-fitted into the base end portion 55. Then, the convex portion 58b engages with the concave portion 59b, and the outer electrode 3 is assembled.

Similar to the above-described embodiment, the large diameter member 3e.
Since the small diameter member 3d and the small diameter member 3d can be manufactured separately, the material yield of the outer electrode 3 is deteriorated and the time required for processing can be suppressed. Therefore, the cost increase of the outer electrode 3 can be suppressed, and the cost increase of the electrode 1 of the resistivity meter can be suppressed. Further, the inner diameter D2 of the base end portion 55 is the annular portion 50 of the small diameter member 3d.
slightly smaller than the outer diameter d2 of b and the convex portion 58b and the concave portion 59
and b engage with each other. Therefore, the large-diameter member 3e and the small-diameter member 3d can be fixed without applying an adhesive.
Therefore, since it is not necessary to use an adhesive, the large diameter member 3e and the small diameter member 3d can be reliably electrically connected, and the resistivity of the electrolyte solution can be reliably measured.

Further, as shown in FIG. 11, when the large diameter member 3e and the small diameter member 3d are fixed by using the convex portion 58b and the concave portion 59b, the convex portion 58b is formed in the annular portion of the small diameter member 3d. The outer peripheral surface of 50b may be formed to be convex, and the concave portion 59b may be formed to be concave from the inner peripheral surface of the base end portion 55 of the large diameter member 3e.

Furthermore, in the above-described embodiment, the case where it is used to measure the purity of ultrapure water as the cleaning liquid in the rinse step is shown. However, the electrode 1 of the present invention is pure water for producing ultrapure water. It can also be used in manufacturing equipment.
In this case, for example, the pipe portion 61a is connected to a source of pure water (a water with less impurities intentionally reduced as the above-mentioned ultra pure water: also referred to as high purity water) which is a raw material of ultra pure water. ing. The pipe portion 61b is connected to the pure water producing device.

Even when the electrode 1 is used in a pure water producing apparatus, the pipe 1 can be attached without ingress of dust (particles) made of metal or resin into the pipe joint 60. Therefore, it is possible to suppress deterioration of the ion exchange resin and the filter of the pure water producing apparatus, and it is possible to quickly obtain the desired pure water. Therefore, the purity of the pure water can be accurately measured, and the cost increase for producing the ultrapure water can be suppressed.

[0139]

As described above, according to the present invention as set forth in claim 1, at least one electrode member includes a large diameter member and a small diameter member. These are linked. Therefore, the electrode member can be manufactured by separately manufacturing the large diameter member and the small diameter member and connecting them. Since the large-diameter member and the small-diameter member can be manufactured separately, deterioration of the material yield of the electrode member can be suppressed. Therefore, it is possible to suppress the cost increase of the electrode member and the cost increase of the electrode of the resistivity meter.

According to the second aspect of the present invention, when the first screw thread and the second screw thread are screwed together, one of the large diameter member and the small diameter member is press-fitted into the other. To be done. Therefore, even when the large-diameter member and the small-diameter member are coated with the adhesive and these members are fixed to each other, the base material of the large-diameter member and the base material of the small-diameter member are surely brought into contact with each other. Therefore, the large diameter member and the small diameter member are surely electrically connected. Therefore, in addition to the fact that the material yield of the electrode member is suppressed from deteriorating and the cost rise is suppressed, the resistivity of the electrolyte solution can be reliably measured.

According to the present invention as set forth in claim 3, since the press-fitting portion bites into the other, even when the adhesive is applied to the large-diameter member and the small-diameter member to fix these members to each other, The base material of the diameter member and the base material of the small diameter member surely come into contact with each other. Therefore, the large diameter member and the small diameter member are surely electrically connected. Therefore, in addition to the fact that the material yield of the electrode member is suppressed from deteriorating and the cost rise is suppressed, the resistivity of the electrolyte solution can be reliably measured.

According to the fourth aspect of the present invention, the outer diameter of the press-fitting portion arranged closer to the large diameter member than the first screw thread is larger than the inner diameter of the large diameter member. Therefore, these members can be fixed to each other without applying an adhesive to the large diameter member and the small diameter member. Therefore, the large diameter member and the small diameter member are surely electrically connected. Therefore, in addition to the fact that the material yield of the electrode member is suppressed from deteriorating and the cost rise is suppressed, the resistivity of the electrolyte solution can be reliably measured.

According to the fifth aspect of the present invention, the inner diameter of the press-fitting portion arranged closer to the small diameter member than the second screw thread is smaller than the outer diameter of the small diameter member. Therefore, these members can be fixed to each other without applying an adhesive to the large diameter member and the small diameter member. Therefore, the large diameter member and the small diameter member are surely electrically connected. Therefore, in addition to the fact that the material yield of the electrode member is suppressed from deteriorating and the cost rise is suppressed, the resistivity of the electrolyte solution can be reliably measured.

According to the present invention of claim 6, one of the inner peripheral surface of the large-diameter member and the outer peripheral surface of the small-diameter member engages with the concave recess, and the other engages with the convex projection. Therefore, these members can be fixed to each other without applying an adhesive to the large diameter member and the small diameter member. Therefore, the large diameter member and the small diameter member are surely electrically connected. Therefore, in addition to the fact that the material yield of the electrode member is suppressed from deteriorating and the cost rise is suppressed, the resistivity of the electrolyte solution can be reliably measured.

According to the present invention of claim 7, the inner electrode includes a large diameter member and a small diameter member. Therefore, the inner electrode can be manufactured by separately manufacturing the large diameter member and the small diameter member and connecting them. Since the large diameter member and the small diameter member can be manufactured separately, it is possible to suppress deterioration of the material yield of the inner electrode. Therefore, the cost increase of the inner electrode can be suppressed, and the cost increase of the electrode of the resistivity meter can be suppressed.

According to the eighth aspect of the present invention, the outer electrode includes the large diameter member and the small diameter member. Therefore, the outer electrode can be manufactured by separately manufacturing the large-diameter member and the small-diameter member and connecting them. Since the large-diameter member and the small-diameter member can be manufactured separately, deterioration of the material yield of the outer electrode can be suppressed. Therefore, the cost increase of the outer electrode can be suppressed, and the cost increase of the electrode of the resistivity meter can be suppressed.

According to the present invention of claim 9, the inner and outer electrodes are provided with a large diameter member and a small diameter member. Therefore, the large-diameter member and the small-diameter member can be manufactured separately, and they can be connected to each other to manufacture the inner and outer electrodes. Since the large diameter member and the small diameter member can be manufactured separately, it is possible to suppress deterioration of the material yield of the inner and outer electrodes. Therefore, the cost increase of the inner and outer electrodes can be suppressed, and the cost increase of the electrodes of the resistivity meter can be suppressed.

[Brief description of drawings]

FIG. 1 is a sectional view showing an overall configuration of electrodes of a resistivity meter according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing an enlarged main part of the electrode shown in FIG.

3 is a cross-sectional view of inner and outer electrodes of the electrode shown in FIG.

FIG. 4 is an enlarged cross-sectional view showing a connection portion between a large diameter member and a small diameter member of the inner electrode shown in FIG.

5 is a cross-sectional view showing a step of connecting a large diameter member and a small diameter member of the inner electrode shown in FIG.

6 is an enlarged cross-sectional view showing a connecting portion between a large diameter member and a small diameter member of the outer electrode shown in FIG.

7 is a cross-sectional view showing a step of connecting the large diameter member and the small diameter member of the outer electrode shown in FIG.

8 is an enlarged cross-sectional view showing a modified example of the connection portion between the large diameter member and the small diameter member of the inner electrode shown in FIG.

9 is an enlarged cross-sectional view showing another modification of the connecting portion between the large diameter member and the small diameter member of the inner electrode shown in FIG.

10 is an enlarged cross-sectional view showing a modified example of the connecting portion between the large diameter member and the small diameter member of the outer electrode shown in FIG.

FIG. 11 is an enlarged cross-sectional view showing another modification of the connecting portion between the large diameter member and the small diameter member of the outer electrode shown in FIG.

FIG. 12 is a cross-sectional view showing an overall configuration of electrodes of a conventional resistivity meter.

[Explanation of symbols]

1 Resistivity meter electrodes 2 Inner electrode (electrode member) 2a small diameter member 2b Large diameter member 3 Outer electrode (electrode member) 3d small diameter member 3e Large diameter member 41 First Thread 42 Second Thread 43 Protrusion (press-fitting part) 44 Tip of small diameter member (press fit part, one end) 46,47 sides 50b Ring part (one end) 51 first screw thread 52 Second Thread 53 Protrusion (press-fitting part) 55 Base end of large diameter member (press fit part) 56,57 sides 58a, 58b convex portion 59a, 59b Recess D1 tip outer diameter D2 inner diameter of the base end d1 Inner diameter of large diameter member d2 Outer diameter of annular part of small diameter member (outer diameter of small diameter member) t predetermined interval

Claims (9)

[Claims] 1. A resistivity meter in which a plurality of electrode members are arranged at predetermined intervals in a flow path of an electrolyte solution to be measured, and the resistivity of the electrolyte solution is measured based on the electric resistance between the electrode members. In the electrode, at least one electrode member of the plurality of electrode members has a large-diameter member and a small-diameter member formed in a tubular shape and having different outer diameters, and these large-diameter member and small-diameter member Electrodes of a resistivity meter, wherein the electrodes are coaxially connected to each other. 2. A first screw thread is formed on the outer peripheral surface of the small diameter member, and a second screw thread is formed on the inner peripheral surface of the large diameter member, with which the first screw thread is screwed. It is formed on either one of a large diameter member and a small diameter member, and when the first screw thread and the second screw thread are screwed together, a press-fitting portion is press-fitted into the other. The electrode of the resistivity meter according to claim 1. 3. The large-diameter member and the small-diameter member each have surfaces facing each other when they are connected to each other, and the press-fitting portion has one of a surface of the large-diameter member and a surface of the small-diameter member. 3. The resistivity meter according to claim 2, wherein the protrusion protrudes toward the other side from the other side, and when the first screw thread and the second screw thread are screwed together, the protrusion is hard to be pushed into the other side. electrode. 4. The press-fitting portion is provided on the small-diameter member, is provided closer to the large-diameter member than the first screw thread, and has an outer diameter larger than the inner diameter of the large-diameter member. The electrode of the resistivity meter according to claim 2. 5. The press-fitting portion is provided on the large-diameter member and closer to the small-diameter member than the second screw thread, and has an inner diameter smaller than an outer diameter of the small-diameter member. The electrode of the resistivity meter according to claim 2. 6. The one end of the small diameter member is inserted inside the large diameter member to connect the large diameter member and the small diameter member, and the inner peripheral surface of the large diameter member and the outer peripheral surface of the small diameter member. In one of the above, a concave concave portion is formed from the one, and a convex convex portion is formed on the other from the other, and when one end of the small diameter member is inserted inside the large diameter member, The electrode of the resistivity meter according to claim 1, wherein the convex portion is engaged in the concave portion. 7. The electrode member includes a circular tubular inner electrode and a circular tubular outer electrode, wherein the inner electrode is inserted inside the outer electrode, and the inner and outer electrodes are arranged coaxially with each other. In addition, the inner electrode has the large-diameter member and the small-diameter member, and the electrode of the resistivity meter according to any one of claims 1 to 6. 8. An inner electrode having a tubular shape and an outer electrode having a tubular shape are provided as the electrode member, the inner electrode is inserted inside the outer electrode, and the inner and outer electrodes are coaxially arranged with each other. In addition, the outer electrode has the large-diameter member and the small-diameter member, and the electrode of the resistivity meter according to any one of claims 1 to 6. 9. The electrode member includes a circular tubular inner electrode and a circular tubular outer electrode, wherein the inner electrode is inserted inside the outer electrode, and the inner and outer electrodes are arranged coaxially with each other. In addition, both the inner electrode and the outer electrode have the large-diameter member and the small-diameter member, and the resistivity according to any one of claims 1 to 6. Meter electrode.