JP2003112188A - Substance treatment method and substance treatment apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid treatment method which can properly adjust the driving conditions of a high-voltage pulse according to the content of inclusion contained in a substance and can properly and maneuverably carry out the electrification, agglomeration, or the like, of the inclusion according to the content of the inclusion; and a liquid treatment apparatus used therefor. SOLUTION: In the liquid treatment method, at least the pulse period and pulse width of a high-voltage pulse are varied according to the content of inclusion in a substance; and electrodes (4A, 7A, 9A, 4B,...) each prepared by forming at least an intermediate layer and a coating layer on the surface of a titanium substrate are used.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substance treatment method and a substance treatment apparatus, and more particularly to various liquids such as livestock wastewater and industrial wastewater, sewage and dirty oil, cleaning liquids and tap water, and substances such as clods. The present invention relates to a substance treatment method and a substance treatment apparatus suitable for purifying gas.

[0002]

2. Description of the Related Art The inventors of the present invention have disclosed a method for purifying a liquid by removing colloidal particles such as water-soluble organic substances and microorganisms contained in the liquid as an example of the substance from the liquid. Japanese Patent No. 90420 and Japanese Unexamined Patent Publication No. 200
The invention regarding the liquid processing method, the liquid processing apparatus, and the liquid processing system described in JP-A-0-263056 has already been made.

According to these inventions, an electric field generated by a high-frequency high-voltage pulse is applied to a liquid to be treated for purification, so that the colloidal particles in the liquid are electrically charged and water of the colloidal particles is charged. The Japanese stable state and the hydrophobic colloid metastable state can be destroyed to make them hydrophobic and aggregate, and at the same time, the cells of microorganisms such as water-bloom and Escherichia coli can be destroyed and killed.

[0004]

By the way, the above-mentioned 2
According to the liquid treatment method described in one publication, there is disclosed a method of separating and removing nitrogen molecules in a liquid by applying a high voltage to the liquid to be treated at different cycles using a high-voltage pulse treatment means. However, for the method of applying the optimum high voltage pulse for charging / aggregating colloidal particles contained in the liquid or cell destruction depending on the degree of contamination of the liquid such as the concentration of organic substances in the liquid, I didn't touch anything.

The present invention has been made in view of the above problems, and it is possible to optimize the driving condition of the high-voltage pulse according to the mixing ratio of the mixture to the substance, and the mixture contained in the substance It is an object of the present invention to provide a liquid treatment method and a liquid treatment apparatus used for the same, which can appropriately and flexibly perform the charging, the agglomeration, and the like according to the mixing ratio of the mixture to the substance.

[0006]

In order to achieve the above object, the method of treating a substance according to claim 1 of the present invention is characterized in that at least the pulse period of the high voltage pulse is determined according to the mixture ratio of the substance to the substance. The pulse width is varied, and the electrode is formed by forming at least an intermediate layer and a coating layer on the surface of a titanium base material.

By adopting such a method, it is possible to apply a high-voltage pulse under optimum conditions to the substance according to the mixture ratio of the substance to the substance, and to apply the high-voltage pulse to the substance. By adopting an electrode structure suitable for the application of electricity, it is possible to promote the aggregation of the inclusions and appropriately perform the charging / aggregation.

A feature of the substance processing method according to the present invention is that at least the pulse period and the pulse width of the high voltage pulse are changed according to the degree of contamination of the liquid, and the electrode is made of a titanium base material. The point is to use a layer formed by forming at least an intermediate layer and a coating layer on the surface.

By adopting such a method, it is possible to apply a high voltage pulse to the liquid under optimum conditions according to the degree of contamination of the liquid, and to apply the high voltage pulse to the liquid. By adopting an electrode structure suitable for, it is possible to promote the formation of agglomerates and to properly perform charging and agglomeration.

A feature of the substance processing apparatus according to claim 3 is that the measuring means for measuring the mixing ratio of the mixed substances contained in the substance and the frequency and pulse width of the high voltage pulse based on the measuring means. A control unit for adjustment is provided, and the electrode is formed by forming at least an intermediate layer and a coating layer on the surface of the titanium base material.

By adopting such a constitution, it is possible to apply a high voltage pulse of an optimum condition to the substance according to the mixture ratio of the substance to the substance, and to apply the high voltage pulse to the substance. By adopting an electrode structure suitable for the application of electricity, it is possible to promote the aggregation of the inclusions and appropriately perform the charging / aggregation.

A feature of the substance processing apparatus according to claim 4 is that it comprises a measuring unit for measuring the degree of contamination of the liquid, and a control unit for adjusting the frequency and pulse width of the high voltage pulse based on the measuring unit. The electrode is provided by forming at least an intermediate layer and a coating layer on the surface of the titanium base material.

By adopting such a configuration, it is possible to apply a high-voltage pulse under optimum conditions to the liquid according to the degree of contamination of the liquid, and to apply the high-voltage pulse to the liquid. By adopting an electrode structure suitable for, it is possible to promote the formation of agglomerates and to properly perform charging and agglomeration.

According to a fifth aspect of the present invention, there is provided the feature of the substance processing apparatus according to the third or fourth aspect, in which the high voltage pulse generating means outputs at least an original signal generator and a source signal generator. This is because it has a high voltage amplifier that amplifies the signal of 1 to a high voltage signal and outputs it, and a high voltage power supply that drives this high voltage amplifier.

By adopting such a structure, the ratio of the mixture of the substance to the substance in the processing tank or the liquid in the liquid tank or the degree of contamination of the liquid can be adjusted with a simple structure. A proper high voltage pulse can be applied.

According to a sixth aspect of the present invention, there is provided the substance processing apparatus according to the third or fourth aspect, wherein the high voltage pulse generating means stores at least a high voltage power source and an electric charge generated from the high voltage power source. It has a high-voltage capacitor and a spark generation means for causing the charge accumulated in the high-voltage capacitor to flow to the electrode through spark discharge.

By adopting such a structure, the ratio of the mixture of the substance to the substance in the processing tank or the liquid in the liquid tank or the degree of contamination of the liquid can be adjusted with a simple structure. A proper high voltage pulse can be applied.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of a liquid processing apparatus as an example of a material processing apparatus according to the present invention will be described below.
This will be described with reference to FIGS. 1 to 24.

The liquid processing apparatus according to the first embodiment is
For the sake of convenience, as an aggregating device 72 for separating water-soluble organic matter and colloidal particles of microorganisms that are mixed in the treated water as a substance from water molecules to agglomerate and remove, and to perform sterilization, deodorization, and decolorization, FIG. The liquid treatment system shown in FIG. However,
The present invention is not limited to this case, and the present invention is not limited to this.
It is also applicable to 3.

As shown in FIGS. 1 to 6, this liquid treatment system mainly comprises a floating substance removing device 71 for removing suspended substances in the treated water, and water-soluble organic substances and microorganisms mixed in the treated water. The colloidal particles are separated from water molecules to coagulate and remove, and at the same time, the coagulation device 72 as the liquid processing device in the present embodiment for performing sterilization, deodorization and decolorization, and further accelerating the coagulation removal of the colloidal particles and sterilizing A flocculation accelerating device 73 for accelerating deodorizing treatment, etc., and a first settling device 74a and a second settling device 74a for forcibly precipitating and removing flocculates remaining in the treated water.
A settling device 74b, a concentrating device 75 that removes water from the coagulated and removed agglomerates and concentrates it, and a centralized control device 76 that controls various processing operations in these tanks.
It consists of and.

When the raw water to be treated contains solid matter having a large weight ratio such as manure, a centrifugal separator or a screen (which is a pretreatment means) is provided before the suspended matter removing device 71. (Not shown) may be arbitrarily provided, and solid matter having a large weight ratio may be removed by centrifugation from raw water containing feces and urine.

Next, the configuration and operation of each of the above-mentioned devices will be described more specifically.

The floating substance removing device 71 is provided with a floating substance removing tank 78 for storing the raw water from which the solid substances have been removed. The floating substance removing tank 78 is shown in FIGS. 2 to 4. As described above, the raw water inflow pipe 79 for inflowing the raw water from which the solid matter has been removed is connected to the side surface on the front side, and the treated water after the suspended matter is removed to the side surface on the left side of FIG. The first transfer pipe 80a for transferring to the process is connected. A raw water pump 81, which is a power source for inflowing raw water, is connected to the raw water inflow pipe 79, and an air suction pipe 82 is connected to the inside of the raw water inflow pipe 79 below the suspended matter removal tank 78. A plurality of rotating blades (not shown) are arranged above the rotor so as to rotate eccentrically.

Further, the air suction pipe 82 is
An air compressor 83 is attached, and from this air compressor 83, an air suction pipe 82
Air having a diameter of several tens of μm is blown into the floating substance removal tank 78 through the air bubbles, and the bubbles of the air adsorb floating substances in the raw water and float together. . Then, the floating material that has floated to the water surface is scraped by the rotary blades, sequentially discharged from a discharge port (not shown), and conveyed to a compost plant (not shown).

The treated water which has been subjected to the floating substance removal processing in the floating substance removal processing device is transferred to the flocculation device 72 through the first transfer pipe 80a.

As shown in FIGS. 1 to 3, the flocculation device 72 is provided with a flocculation tank 84 as a liquid tank for storing the treated water after the suspended matter removal treatment. The electrodes (4A, 4B, 7) for applying a high voltage pulse to the treated water in the coagulation tank 84.
A, 7B, 9A, 9B) are arranged. Each electrode (4
A, 4B, 7A, 7B, 9A, 9B) each have the same rectangular shape and are arranged parallel to each other.

These electrodes (4A, 4B, 7A, 7B,
9A, 9B), the respective electrodes (4A, 4B, 7A, 7B, 9A, 9B) are shown in FIG.
As shown in FIG. 3 or FIG. 14, a depletion layer 3 of micron order is formed on a titanium base material that is surface-treated to prevent peeling.
00 and vanadium or the like, and then a coating layer made of platinum or the like is further formed on the intermediate layer.

The electrode (4A,
4B, 7A, 7B, 9A, 9B), it is possible to reduce the outflow of hydrogen ions, and since the intermediate layer exhibits a charging function, the electrodes (4A, 4B, 7A,
Electric charges can be temporarily stored in 7B, 9A, 9B) and then discharged at once. This allows the electrodes (4
A, 4B, 7A, 7B, 9A, 9B) surface voltage can be temporarily set to the order of several hundreds of volts.

Although FIG. 13 shows a case where both sides are coated with platinum, the use of such an electrode is particularly convenient for decomposition of inorganic wastewater such as industrial wastewater.

On the other hand, FIG. 14 shows one side coated with platinum. When such an electrode is adopted, it is particularly suitable for coagulation separation of organic wastewater such as human waste. These double-sided coating and single-sided coating electrodes may be provided together in the aggregation tank 84.

Further, the frequency and pulse width of the high voltage pulse may be appropriately switched depending on the double-sided coating or the single-sided coating.

Next, the arrangement of the electrodes (4A, 4B, 7A, 7B, 9A, 9B) having the above-mentioned internal structure will be described in more detail. The electrodes (4A, 4B, 7A, 7) will be described in detail.
B, 9A, 9B), a pair of electrodes 4A, 4B facing each other at a line symmetry position about the virtual symmetry axis IS extending in the vertical direction in FIG. Connected to the high-voltage power supply 2 of. The one electrode 4A is the anode electrode 4A, and the other electrode 4B is the cathode electrode 4B.
4B constitutes the first electrode pair 3.

The high voltage power supply 2 constitutes a high voltage pulse generating means 200 which will be described later.

The electrodes (4A, 4B, 7A, 7)
B, 9A, 9B) above the first electrode pair 3,
A pair of electrodes 7A and 7B facing each other at a line symmetrical position with the virtual symmetry axis IS as a center, are connected to a low voltage power source 5 of about 60V. And
One electrode 7A is used as an anode electrode 7A and the other electrode 7B
Is the cathode electrode 7B, and both electrodes 7A and 7B
The second electrode pair 6 is constituted by.

The electrodes 7A and 7B are arranged at positions different from the electrodes 4B and 4B of the first electrode pair 3 by 90 °.

The low-voltage power supply 5 is composed of the high-voltage power supply 2 and has a high-voltage pulse generating means 2 which will be described later.
Other high voltage pulse generation means (not shown) different from 00 is configured.

Further, each of the electrodes (4A, 4B, 7A,
7B, 9A, 9B), below the one electrode pair 3,
A pair of electrodes 9A and 9B facing each other at a line-symmetrical position with the virtual symmetry axis IS as a center at a distance from each other are connected to the low-voltage power supply 5, respectively. Then, one electrode 9A is an anode electrode 9A and the other electrode 9B is a cathode electrode 9B, and these two electrodes 9A and 9B form a third electrode pair 8.

The electrodes 9A, 9B are arranged at positions different from the electrodes 4A, 4B of the first electrode pair 3 by 90 °.

Further, between the electrodes 4A and 4B, 7A and 7B, 9A and 9B in each of the electrode pairs 3, 6 and 8, the control electrode 4 for further promoting the action of the electric field is provided.
C, 7C and 9C are installed. Each control electrode 4C, 7
C and 9C are the electrodes 4A, 4B, 7A and 7 respectively.
B, 9A, 9B have the same shape and the same internal structure, and each electrode 4A, 4B, 7A, 7B, 9A, 9 is located at the central position of both electrodes 4A and 4B, 7A and 7B, 9A and 9B.
It is arranged parallel to B.

Of these, the control electrode 4 of the first electrode pair 3
C is connected to the high voltage power supply 2, and the second electrode pair 6
The control electrodes 7C and 9C of the third electrode pair 8 are connected to the low voltage power source 2, respectively.

The voltage and current values applied to the electrodes 4, 7, 9 from the high-voltage power source 2 or the low-voltage power source 5 differ depending on the properties of the liquid to be treated. Need to be balanced.

To this end, the high-voltage power supply 2 is set by either a constant voltage system or a constant current system, and the current value of the low-voltage power supply 5 is changed, so that the change in the output of the high-voltage power supply 2 is maximized. It may be set to a current value that occurs in In this state, the first electrode pair 2 and the second electrode pair 6
And the currents with the third electrode pair 8 cancel each other,
The situation appears where the current is low and the voltage is higher.

Further, the high voltage power source 2 and the low voltage power source 5
Applies only a voltage to each electrode 4, 7, 9 and does not positively apply a current. The application of the voltage described above is intermittently performed by pulses.

Further, in the above-mentioned electrode pair 3, 6 and 8, when the control electrode 4C is connected without voltage as shown in FIG. 8, the control electrode 4C is a cathode on the side facing the anode, The side facing the cathode functions as an anode. In this case, the reaction surface of the electrode is doubled,
The reaction efficiency can be improved.

As shown in FIG. 9, the control electrode 4 is
When C is connected to the anode, a current does not flow between the control electrode and the anode, so that the liquid between the counter electrode and the anode has the same potential as the anode. Therefore, this portion has a high potential with respect to the cathode and acts to deprive electrons from negative ions,
It becomes a reducing atmosphere. Therefore, it is convenient to perform the reduction of the liquid.

Further, as shown in FIG. 10, the control electrode 4
When C is connected to the cathode, contrary to the connection to the anode, the oxidizing power in the container can be improved.

When such an electrode structure is adopted, wear of the electrode pairs 3, 6, 8 is prevented and the aggregating tank 8 is used.
The range of charge treatment and cell destruction within 4 can be expanded.

Further, the above-mentioned electrodes (4A, 4B, 7)
A, 7B, 9A, 9B) can further promote the redox reaction of the treated water more effectively, can promote the electrostatic charge, and decompose the carbon component to increase the dielectric constant. Since they can be equalized, it becomes easy to apply a high voltage pulse described later.

In the aggregating device 72, the high voltage pulse generating means 200 as the high voltage power supply 2 for applying a predetermined high voltage pulse to the liquid in the aggregating tank 84 via the electrode structure. It is connected.

As shown in FIG. 11, the high voltage pulse generating means 200 has an original signal generator 201, and this original signal generator 201 outputs a square signal having a predetermined voltage value. It has become.

A high voltage amplifier 202 is connected to the original signal generator 201. The high voltage amplifier 202 is connected to the original signal generator 201.
Is configured to amplify the rectangular signal output from the original signal generator 201 into a predetermined high voltage signal. As shown in FIG. 11, the high voltage amplifier 202 is driven by two high voltage power sources 207.

The low voltage power source 5 is the high voltage power source 2
Are insulated from each other and have a circuit configuration similar to that of the high voltage pulse generating means 200.

The high voltage amplifier 202 has about 30 KΩ.
A high voltage resistor 203 and a high voltage capacitor 204 having a capacitance of 0.012 μF are connected, and the high voltage signal from the high voltage amplifier receives these high voltage resistors 203.
And the high voltage capacitor 204 and the electrode pair 3,
It is adapted to be applied to the treated water in the coagulation tank 84 via 6 and 9.

Further, the aggregating device 72 uses the mixture ratio of the substances to the substances, that is, the frequency and pulse width of the high voltage pulse applied to the treated water according to the degree of contamination of the treated water in the aggregating tank 84. A control unit 205 for adjusting the is provided. A sensor 206 is connected to the control unit 205 as a measuring means for measuring the degree of contamination of the treated water based on the concentration of foreign matter such as colloidal particles present in the treated water.
Adjusts the high-voltage pulse applied to the treated water based on the measurement result of the sensor 206.

Therefore, it is possible to apply a high-voltage pulse under the optimum conditions to the treated water according to the degree of contamination of the treated water, and to connect the first electrode pair on the high potential side and the low potential side. By applying a high-voltage pulse to the liquid by the electrode composed of the above-mentioned second and third electrode pairs, the formation of aggregates can be promoted, and charging / aggregation can be appropriately carried out. It is also possible to destroy microorganism cells to kill Escherichia coli and the like.

The sensor 206, for example, brings a pair of electrode plates into contact with the treated water in the aggregating tank 84, and measures the concentration of foreign matter in the treated water based on the current value and the electric conductivity flowing between the electrodes. It may be something like this.

Further, for example, a pair of electrodes are brought into contact with a liquid, and a reference signal for measurement, which is an AC signal in an audible sound band, is oscillated from one electrode to the other electrode through the liquid, and this oscillation is performed. A signal is received by the other electrode through the liquid, and the received signal is
By performing synchronous detection based on the same signal as the measurement reference signal, the phase change of the signal received through the liquid is detected, and the ion concentration of the suspended molecule in the liquid is detected based on the detection result. You may make it measure. In addition,
In this case, the impedance of the liquid may be obtained from the phase change of the signal received by the electrode on the receiving side via the liquid, and the ion concentration may be calculated based on this impedance. In such a case, since the electric signal applied between the electrodes is an alternating current, it is possible to prevent deposits from accumulating on the electrodes and reduce the number of times of maintenance.

The adjustment width of the high voltage pulse by the control unit 205 is preferably 25 to 80 KhZ in frequency.
And the pulse width (cycle) is 1 μ to 10 ms.

The first to third electrode pairs 3, 6, 8
In this case, only one set may be provided, or a plurality of sets may be provided.

Here, the mechanism for aggregating the colloidal particles such as the water-soluble organic matter in the present embodiment will be explained. Colloidal particles mean particles other than the water-soluble organic matter fine particles dispersed in the liquid or liquid molecules such as microorganisms and microalgae. As shown in FIG. 12, these substances are in a hydration stable state or a hydrophobic colloid metastable state in a liquid. Therefore, in order to separate and remove colloidal particles such as water-soluble organic matter from treated water, the hydrophilic colloid is made hydrophobic by applying energy equal to or higher than the binding energy of the hydrophilic group of water molecule to make the hydrophilic colloid hydrophobic, and further The stable state may be disintegrated and the colloidal particles may be hydrophobized to aggregate them. Therefore, in the present embodiment, as shown in the chemical formula of FIG. 24, the anodes 4A, 7 are driven by the energy of the high voltage pulse.
The OH radicals generated in A and 9A cleave the hydrophilic group, and the electric field generated by the high voltage pulse charges the colloid particles to collapse the hydrophobic colloid metastable state to make it hydrophobic and aggregate. Further, the colloidal particles are aggregated and separated from the water molecules, so that the water molecules are deodorized and decolorized.

The agglomerated colloidal particles float with the gases such as nitrogen, carbon dioxide, oxygen and hydrogen generated by the treatment, and these gases diffuse and settle. For this reason, as shown in FIG. 1, a permanent magnet 89 such as neodymium as the aggregate discharge processing means 88 is laid on the bottom of the aggregating tank 84, and the magnetic force of the permanent magnet 89 causes the aggregates in the charged state to be collected. It is designed to be aspirated and allowed to settle.

The sediment collected at the bottom of the coagulation tank 84 is discharged to the bottom of the discharge pipe 93.
Is discharged to the concentrating device 75.

On the other hand, cells such as water-bloom and fungi such as Escherichia coli are destroyed and killed by OH radicals generated by high voltage pulses.

Further, a DC high-voltage electrode 92 serving as an oxidation-reduction processing means 91 is arranged in the aggregating tank 84, and the DC high-voltage electrode 92 is composed of the first to third electrode pairs 3, 6 , 8 in the same manner as the electrode structure of FIG.

This DC high-voltage electrode 92 is about 18-55.
V and a DC voltage of about 80 to 160 V are applied at about 3 to 50 A. In the second embodiment, from the viewpoint of more effectively promoting the redox reaction, a DC voltage of about 55 V and about 100 V is applied. Is applied at about 7 to 13 A. Further, this DC high-voltage electrode 92 is operated by alternately switching the polarities of the anode and the cathode 92b at a predetermined cycle from the viewpoint of preventing wear of the electrode and performing a redox treatment in the aggregating tank 84 over a wide range. Has become.

By applying this direct current high voltage, the oxidation-reduction reaction of the treated water is promoted and the electrostatic charge advances, and the carbon component is decomposed to make the dielectric constant equal, and the higher voltage is applied. Is easy to apply.

As for the internal structure of the DC high-voltage electrode 92, as shown in FIG. 13 or 14, a micron-order depletion layer and vanadium are formed on a titanium substrate which has been subjected to surface treatment for preventing peeling. Alternatively, the intermediate layer may be formed, and a platinum coating layer may be further formed on the intermediate layer.

In such a case, the generation of radicals can be promoted to more effectively promote the electrostatic charge, and a state in which a high voltage can be more effectively applied to the liquid can be formed.

A second transfer pipe 80b is connected to the agglomeration tank 84 on the right side of FIG. 2, and the treated water after the agglomeration treatment is passed to the next agglomeration accelerator 73 through the second transfer pipe 80b. It is supposed to be transferred.

Next, the aggregation accelerator 73 will be described.

This coagulation accelerating device 73 has a structure shown in FIGS.
As shown in FIG. 5 and FIG. 5, a flocculation acceleration tank 95 for storing the treated water after the flocculation treatment in the flocculation device 72 is provided. Inside the flocculation acceleration tank 95, inside the flocculation tank 84 described above, Similarly, the AC high-voltage electrode 86 serving as the charge / cell destruction processing means 85 and the DC high-voltage electrode 92 serving as the redox processing means 91 have the above-described first to third portions.
It is arranged in the same three-electrode system as the electrode pairs 3, 6, 9 and is designed to continuously perform separation and aggregation treatment, and further separates and aggregates fine colloid particles mixed in the treated water, Moreover, various processing means are provided for deodorizing the colloidal particles themselves.

First, in the aggregation acceleration tank 95, a microwave separation processing means 9 is provided via a transfer pipe (not shown).
Six barrels 97 are connected. From this waveguide 97, microwaves having a frequency of 300 M to 16 GHz depending on the concentration of the treated water, microwaves having a frequency of 2.4 G to 10.5 GHz, and more effectively separating the colloidal particles, More effectively, microwaves of electromagnetic waves having a frequency of 10.5 GHz are oscillated,
By this microwave, colloidal particles mixed in a finer state in the treated water are separated from water molecules.

Next, the microwave separation processing means 96
In the barrel waveguide 97, an ultrasonic box 100 serving as a first ultrasonic aggregating unit 99 is provided via a transfer pipe (not shown).
Is connected to this ultrasonic box 100 at 40k.
~ 1200kHz frequency ultrasound, more preferably 9
A vibrator (not shown) that oscillates an ultrasonic wave of 50 kHz is provided, and the colloidal particles separated in the treated water are aggregated by the cavitation action of the ultrasonic waves oscillated from the vibrator and the water molecules are separated from each other. It is designed to disperse.

Further, the ultrasonic wave box 100 which is the first ultrasonic aggregating means 99 is connected with a fine charge charge processing pipe 30 such as a mixing tube which constitutes the fine charge charge processing means 4 and is shown in FIG. As described above, the neodymium plates 31a are disposed on the upper and lower portions of the subdivided charge processing pipe 30, and the neodymium element 31b having a magnetic force of about 11,000 Gauss is embedded in the subdivided charge processing pipe 30. A neodymium element blade 32 made of a ceramic material is arranged. The neodymium element blade 32 is formed of a flat plate twisted in a spiral shape. For example, as shown in FIG. 15, the neodymium element 31b is provided at the widthwise end of the blade 32 along the direction in which the treated water passes. They are buried alternately in the order of “NNSSNNSS ...”. Due to the action of the magnetic fields of the neodymium plate 31a, the neodymium element 31b and the mixing of the neodymium element blades 32, the water molecules in the treated water are subdivided to be negatively charged (ionized) and the colloidal particles are subdivided into positive electrons. It is designed to be charged and charged to be aligned. For this reason, in the fine band charge processing means 4, it becomes possible to strongly adsorb molecules of the same potential and facilitate separation and aggregation treatment of finer water-soluble organic substances that could not be completely removed in the separation and aggregation treatment by microwaves. ing. The neo-jum board 31
Alternatively, a may be formed by an electromagnet.

Further, as shown in FIG. 16, a deodorizing treatment pipe 38, which is a deodorizing treatment means 6, is connected to the subdivided charge treating pipe 30, and the deodorizing treatment pipe 38 is connected.
A deodorization processing box 37 is arranged so as to surround the outside of the. External magnets 39a having polarities of N-pole and S-pole are provided at upper and lower positions outside the deodorization processing pipe 38, respectively.
In addition, a rod-shaped inner magnet 39b is arranged at the axial center position of the deodorization treatment pipe 38 so that the polarity opposite to that of the outer magnet 39a is opposite. In the first embodiment, the outer magnet 39a is formed of an electromagnet, and the inner magnet 39b is formed of a permanent magnet. Furthermore, depending on the concentration of the treated water, 3 M to 300 MH is provided on the left and right side surfaces of the deodorizing treatment pipe 38.
z, and more effectively, a high frequency ultrasonic oscillator 40 that oscillates ultrasonic waves having a frequency of 100 MHz is provided.

The treated water is the deodorizing treatment pipe 38.
In the first embodiment, the vibrating plate (not shown) is ejected from a nozzle (not shown) provided in the deodorization processing pipe 38, and the vibrating plate (not shown) is provided near the outlet of the nozzle. Is arranged, and the vibrating plate vibrates violently when the treated water collides with the vibrating plate. The external magnet 39a, the internal magnet 39b, and the high frequency ultrasonic oscillator 40
As a result, a so-called electromagnetic ultrasonic wave is generated by the combined effect of the magnetic field and the electric field, and this electromagnetic ultrasonic wave produces a malodor from the treated water, mainly the colloid particles themselves by crushing the amino acids of the colloid particles. It is designed to remove odors.

In order to increase the effect of such electromagnetic ultrasonic waves, the electric field in the magnetic field is alternately applied to the sub-band charge processing pipe 30 of the sub-band charge processing means 4 to generate a high frequency with an output of 1 kW. You may make it oscillate the ultrasonic wave of a range.

Further, the deodorization processing pipe 38 serving as the deodorization processing means 6 is connected to a high-frequency generation tube 103 serving as the complete separation processing means 102, and 100 M to 500 MHz,
More preferably, electromagnetic waves having a frequency of 270 MHz are applied to generate induced plasma by a high-frequency electric field to optimally resonate the treated water, thereby promoting adsorption of water-soluble organic substances. Due to the induction plasma generated by the high-frequency electric field, the water-soluble organic substance does not dissolve again in the water molecule and is completely separated.

Further, the high-frequency generating tube 103, which is the complete separation processing means 102, has a water molecule subdivision processing means 105.
The barrel subdivision processing pipe 106 is connected. Each of the upper and lower parts of the subdivision processing pipe 106 has about 1
A permanent magnet such as 0000 Gauss neodymium is embedded as a magnetic field forming body to form a strong magnetic field. Due to this strong magnetic force, when the treated water passes through the subdivision processing pipe 106, the water clusters are subdivided and activated, so-called activated water is generated.

Then, the water molecule subdivision processing means 105
The coagulation accelerating tank 95 is connected to the barrel subdivision processing pipe 106 via a transfer pipe (not shown), and the treated water after each of the above-mentioned treatments flows into the coagulation accelerating tank 95 again. It is like this.

In the aggregating and accelerating tank 95, in addition to the AC high-voltage electrode 86 and the DC high-voltage electrode 92 described above, a second ultrasonic aggregating means 108 of 100 kHz.
A plurality of ultrasonic oscillators 109 that oscillate the following ultrasonic waves are provided. The ultrasonic oscillator 109 of the second embodiment
28 kHz, 40 kHz and 48 kHz respectively
The ultrasonic wave is generated by a longitudinal wave having a frequency of 100 kHz and the ultrasonic wave is generated by a transverse wave having a frequency of 100 kHz. These ultrasonic waves are used properly depending on the concentration of the treated water, and have the role of aggregating the water-soluble organic matter and dispersing these agglomerates and water molecules.

At the bottom of the flocculation accelerating tank 95, a permanent magnet 89, such as neodymium, which is a flocculate discharge treatment means 88, is laid, and the flocculated flocs of the inflowing treated water are treated as described above. It is attracted by the magnetic force of the permanent magnet 89 and settles to the bottom.

After that, the precipitate collected at the bottom of the flocculation acceleration tank 95 is discharged to the concentrating device 75 from the discharge pipe 93 connected to the bottom.

In the second embodiment, the microwave separation processing means 96, the ultrasonic aggregating processing means, the fine band charge processing means, the deodorization processing means, the complete separation processing means 102 and the water molecule subdivision are used for the sake of commercialization. Although the chemical conversion treatment means 105 are arranged outside the aggregation acceleration tank 95, they may be arranged inside the aggregation acceleration tank 95, and the same effect can be obtained. it can.
Further, in the coagulation acceleration tank 95, the treated water is circulated sequentially by a pump or the like, and when the amount of treated water is large, the circulation speed is increased to circulate the treated water a plurality of times.

Next, the first settling device 74a and the second settling device 74b will be described.

The first settling device 74a includes a third transfer pipe 8
Is connected to the aggregation accelerator 73 via 0c,
Further, the second precipitation device 74b is connected to the first precipitation device 74a via a fourth transfer pipe 80d. The first settling device 74a and the second settling device 74b have the same configuration to more reliably remove contaminants such as water-soluble organic substances from the treated water when treating raw water that is heavily contaminated. , 74b are provided, and even one settling device 74 is sufficiently effective.

As shown in FIGS. 1, 3, 5, 6, 17, and 18, these first precipitation device 74a and second precipitation device 74b are treated by the coagulation accelerator 73. A first settling tank 111a and a second settling tank 111b, in which water is stored, are arranged respectively, and a plurality of grid-like electrical separation membranes 114 serving as agglomerate settling processing means 113 are vertically arranged inside these. One sheet is arranged. The grid of the electrical isolation film 114 has a side of approximately 1 to 5 mm, and the high voltage pulse generator 11
5, the current of 5 mA to 30 mA flows in each square,
A high voltage of 10 k to 60 kV, more preferably 20 kV is applied. These electrical separation membranes 1
Numeral 14 prevents adsorption of charged-charged aggregates of the treated water flowing in from the bottom of each sedimentation tank 111a, 111b to pass upward, and when discharging these aggregates,
The polarity of the electrode is switched to drop the agglomerates downward so that the agglomerates are rapidly precipitated.

Further, a permanent magnet 89 such as neodymium is laid at the bottom of the first settling tank 111a and the second settling tank 111b to surely attract the electrostatically charged aggregates that are forcibly settled. Then, it is discharged to the compost plant through the discharge pipe 93.

Further, as shown in FIG. 1, a dilution transfer pipe 116 communicating with the suspended matter removal tank 78 is connected to the second settling tank 111b, and the processing performed in the second embodiment is performed. A part of the water is made to flow into the front suspended matter removal tank 78. The water after this treatment is called so-called active water, and since water molecules are in a charged state, it has a property of causing an oxidation-reduction reaction to decompose stains when mixed in raw water. In the second embodiment,
The treated water after being treated by the second settling device 74b is mixed in the suspended matter removal tank 78, but the treated water immediately after being treated by the flocculating device 72 is more charged with water molecules. Therefore, it is possible to effectively promote the decomposition of the stain due to the redox reaction. Therefore, for example, if the water in the river is treated by the coagulation device 72 and mixed in the raw water in advance to perform the primary treatment, the subsequent treatment becomes simpler and the treatment capacity can be improved. .

Next, the concentrating device 75 will be described.

As shown in FIG. 1, the concentrating device 75 is provided with a concentrating tank 75a, which is connected to each of the above-mentioned tanks by a discharge pipe 93. The concentrating tank 75a is designed to collect the aggregates generated by the processing of each tank to remove the water content and facilitate the composting process in the compost plant. As means for removing water from the aggregate, known means such as a dehydrator is used.

Next, the centralized control device 76 will be described.

As shown in the block diagram of FIG. 19, the centralized control device 76 has a flotation device control unit 117 for controlling the blowing of air and rotation of the rotary blades in the flotation device 71, and a flocculation device 72. AC high voltage electrode 8
6 and the aggregating apparatus control unit 118 that controls the magnitude and the application frequency of the voltage applied by the DC high-voltage electrode 92, and the magnitude of the voltage applied by the AC high-voltage electrode 86 and the DC high-voltage electrode 92 in the aggregating accelerator 73. 300M to 16G oscillated by the microwave separation processing means 96
Control of microwave output of Hz, control of output of ultrasonic waves having a frequency of 40 kHz to 1200 kHz oscillated by the first ultrasonic aggregating treatment unit 99, and oscillation of deodorizing treatment unit 3.
Control of the output of ultrasonic waves having a frequency of M to 300 MHz, and 100 M to 500 M oscillated by the complete separation processing unit 102.
Output of high frequency electromagnetic waves of Hz, 28 kHz, 40 kHz, 4 oscillated by the second ultrasonic aggregating processing unit 108, 4
Agglomeration accelerator control unit 119 for controlling output of ultrasonic waves having frequencies of 8 kHz and 100 kHz, control of migration speed of treated water, etc., and voltage of 10 k to 60 kV in the first settling device 74a and the second settling device 74b. It has a first settling device control unit 120 and a second settling device control unit 121 that control the application and switching of water, and a concentrating device control unit 122 that controls the dehydration process in the concentrating device 75 and the like. Each of these control units can be easily controlled by each switch (not shown) of the centralized control panel 123, and is normally automatically controlled.

Next, an embodiment of the substance processing method according to the present invention, to which the liquid processing apparatus of the first embodiment having the above-mentioned structure is applied, will be described.

Since the liquid processing apparatus in the first embodiment functions as the aggregating apparatus 72 as described above, the liquid processing method in the present embodiment will be focused on the operation of the aggregating apparatus 72 for the sake of convenience. explain.

First, the treated water from which the suspended matter has been removed to some extent by the suspended matter removing apparatus 71 is sent to the aggregating apparatus 72.

In the flocculation device 72, the high voltage pulse generating means 200 applies a predetermined high voltage pulse to the treated water in the flocculation tank 84 under the control of the control unit 105 based on the measurement result of the sensor 106. In contrast, the voltage is applied via the electrode pairs 3, 6 and 8.

As a result, an electric current flows in the liquid in the aggregation tank 84, and the cations in the liquid are converted into the cathode electrodes 4B, 7B,
While being sucked by 9B, anions in the liquid are sucked by anode electrodes 4A, 7A, 9A.

As a result, the organic substances contained in the liquid in the flocculation tank 84 are converted into the second electrode pair 6 and the third electrode pair 8.
The electrodes 7A, 7B, 9A and 9B on the low voltage side are charged. Here, radicals are involved and some organic substances are changed to inorganic substances.

At this time, each electrode (4A, 4B, 7A, 7
As shown in FIGS. 13 and 14, the internal structure of (B, 9A, 9B) is formed by a titanium base material, an intermediate layer, a coating layer, and a vanadium layer. Can be promoted and the charge of an organic substance can be efficiently performed.

Then, the charged organic substances are directly attracted to the electrodes 4A and 4B of the first electrode pair 3. In the vicinity of the electrodes 4A and 4B of the first electrode pair 3, the uncharged organic matter and the charged organic matter collide with each other to cause a reaction, and a new organic salt, that is, an organic salt is generated. The generated organic matter is charged by the electrodes 4A and 4B of the first electrode pair 3 and is separated from the electrodes 4A and 4B.

By the way, each electrode 4A, 4 of the first electrode pair 3 is
Since the organic substances charged by B are charged to have charges of ± opposite to each other, when they collide with each other, they are attracted to each other and change into a large lump.

By repeating the above-mentioned phenomenon, flocs as aggregates are formed, and some of the flocs lose their charge and precipitate. On the other hand, the flocs of the charged organic matter will float up.

The precipitate collected at the bottom of the flocculation tank 84 is discharged to the concentrating device 75 from the discharge pipe 93 connected to the bottom.

On the other hand, cells such as blue-green algae and fungi such as Escherichia coli are destroyed and killed by the action of the OH radical generated by the high voltage pulse and the action of the high voltage pulse between the electrodes. That is, when microbial cells are placed between the electrodes, the biological membrane has a resistance 1000 times higher than that of the liquid inside and outside the cells, and can be regarded as a kind of capacitor.
When a pulse voltage that exceeds the critical value of the mechanical resistance of the biological membrane is applied, a part of the membrane is reversibly destroyed during discharge, and cells are instantly punctured. This phenomenon is known as electroporation.

Next, a second embodiment of the liquid processing apparatus as an example of the substance processing apparatus according to the present invention will be described with reference to FIG.

In the second embodiment, the flocculation tank 8 is used.
4 and electrodes (4A, 4B, 7A, 7B, 9A, which apply a high voltage pulse to the treated water in the flocculation tank 84).
9B) Further, the configurations of the control unit 205 and the sensor 206 are basically the same as those in the first embodiment described above.

However, in the second embodiment, the high voltage pulse generating means 210 for applying a high voltage pulse to the treated water in the coagulation treatment tank 84 is the same as the high voltage pulse generating means 200 in the first embodiment. Differently, the voltage is applied by using the spark gap pulser method.

As shown in FIG. 20, the high voltage pulse generating means 210 has a high voltage power source 211, which is generated by the high voltage power source 211 via a high voltage resistor 212. A high voltage capacitor 213 for charging electric charges is connected, and both ends of the high voltage capacitor 213 are held at the same potential as the high voltage power supply 211.

The high-voltage condenser 213 has
Spark generating means for connecting the electric charges accumulated in the high-voltage capacitor 213 to the first to third electrode pairs 3, 6, 8 in the aggregating tank 84 via the spark discharge is connected.

This spark generating means has a trigger spark generator 215, the negative electrode side of the trigger spark generator 215 is grounded, and the electrode pairs 3, 6 and 8 are the treated water in the flocculation tank 84. It is similar to the state of being grounded via.

Then, in order to apply a high voltage pulse using such a high voltage pulse generating means 210, first,
When the high-voltage power supply 211 supplies electric charges to the high-voltage capacitor 213, the high-voltage capacitor 213 charges the electric charges.

Then, the spark generator for trigger 215
When a pulse discharge is generated between the spark gap 216 for trigger and the spark gap 217 by the pulse discharge, this pulse discharge causes the electrodes 218 a, 218 a of the spark gap 217,
The space between 218b is ionized, and the main discharge (spark discharge) is easily generated.

Subsequently, when the spark gap 217 causes a spark discharge, the electric charge charged in the high voltage capacitor 213 flows as a current through the discharge fireworks to the electrode pairs 3, 6, 8 of the aggregating tank 84.

The current at this time is determined by the conductivity of the treated water, the charge charged in the high voltage capacitor 213, the resistance of the wiring, etc., but the current of several tens A is several μ.
~ It will flow in a few milliseconds.

Therefore, similar to the first embodiment, it is possible to properly apply the high voltage pulse to the treated water according to the degree of contamination of the treated water.

Therefore, according to the present invention, it is possible to apply a high voltage pulse under the optimum condition to the liquid according to the degree of contamination of the liquid, and the first electrode pair 3 on the high potential side.
By applying a high voltage pulse to the liquid by means of the electrode composed of the second electrode pair 6 and the third electrode pair 8 on the low potential side, formation of aggregates can be promoted and charging / aggregation can be performed properly. it can.

Further, the high voltage pulse generating means 200, 21
By configuring 0 as described above, it is possible to apply an appropriate high voltage pulse according to the degree of contamination of the treated water to the liquid of the treated water in the aggregation tank 84 with a simple configuration.

The present invention is not limited to the above-mentioned structure, but can be variously modified as necessary.

For example, the electrode 4 having the above-mentioned internal structure
As shown in FIG. 21, a plurality of sets of A and 4B may be arranged side by side along the flow direction of the treated water in the aggregation tank 84.

In this case, when the treated water having a high degree of contamination is repeatedly circulated in the aggregating device 72 a plurality of times to repeat the charging and aggregating treatment, the circulating speed of the treated water can be maintained at a high speed. High-concentration treated water coagulation tank 84
It is possible to prevent the charging and aggregating treatment from being adversely affected by keeping it for a long time. For this reason, the charging and aggregating process of the treated water having a high degree of contamination can be properly performed by using the plural times.

Further, the electrodes (4A, 4A,
4B, 7A, 7B, 9A, 9B) is not limited to the electrode arrangement consisting of the above-mentioned first to third electrode pairs 3, 6, 8 and, for example, as shown in FIG. A plurality of sets may be arranged in parallel so as to face the electrodes 4B.

Further, a plurality of sets of electrodes 4A and 4B may be arranged side by side so as to prevent the flow of treated water in the aggregation tank 84 as shown in FIG.

In this case, when the treated water having a low degree of contamination is repeatedly subjected to the charging and aggregating treatment, the circulation speed of the treated water can be kept low. It is possible to effectively carry out the charging and aggregating treatment of the treated water having a low water content.

Further, the agglomeration tank 84 is shown in FIG.
The electrode 4 is formed in a substantially cylindrical shape as shown in
A and 4B may be formed in a concentric cylindrical shape as shown in the figure. In this case, the energy loss of the high-voltage pulse can be reduced, and the device can be made compact when the installation space cannot be taken very much, for example, in a vehicle-mounted liquid treatment system, and the efficiency can be improved. Charging and agglomeration can be performed.

[0126]

As described above, according to the substance treatment method and the substance treatment apparatus of the present invention, the high-voltage pulse of the optimum condition for the substance in the treatment bath according to the mixture ratio of the substance to the substance. Can be applied, and since it is possible to use an electrode structure suitable for charging and aggregating the mixture by applying such a high voltage pulse, it is possible to charge the mixture
Agglomeration can be effectively performed, and the substance can be effectively purified.

[Brief description of drawings]

FIG. 1 is a flowchart showing a liquid processing system in which a first embodiment of a liquid processing apparatus as an example of a material processing apparatus according to the present invention is incorporated.

FIG. 2 is a front view showing a main part of the liquid processing system of FIG.

FIG. 3 is a plan view of FIG.

FIG. 4 is a left side view of FIG.

5 is a right side view of FIG.

6 is a rear view of FIG.

FIG. 7 is a view showing a coagulation tank as a liquid tank and an electrode structure in the first embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

FIG. 8 is a diagram showing an operation when the control electrode having the electrode structure shown in FIG. 7 is connected to a non-voltage connection in the first embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

FIG. 9 is a diagram showing an operation when the control electrode having the electrode structure shown in FIG. 7 is connected to the anode in the first embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

FIG. 10 is a diagram showing the operation when the control electrode having the electrode structure shown in FIG. 7 is connected to the cathode in the first embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

FIG. 11 is a block diagram showing the configuration of high voltage pulse generating means in the first embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

FIG. 12 is an explanatory view showing a mechanism of separating and aggregating colloidal particles by the aggregating apparatus and the aggregating accelerator in the first embodiment.

13 is a diagram showing a liquid processing apparatus according to a first embodiment of the present invention as a material processing apparatus according to the present invention, in which double-side coating with platinum is applied as an example of a specific configuration of each electrode of the electrode structure shown in FIG. Diagram showing the configuration

FIG. 14 is a diagram showing a first embodiment of a liquid processing apparatus as an example of a material processing apparatus according to the present invention, in which one side coating with platinum is applied as an example of a specific configuration of each electrode of the electrode structure shown in FIG. Diagram showing the configuration

FIG. 15 is an explanatory view showing a main part of the sub-band charge processing means in the first embodiment.

FIG. 16 is an explanatory diagram showing a main part of a deodorization processing unit according to the first embodiment.

FIG. 17 is an explanatory view showing the main parts of the first settling device and the second settling device in the first embodiment.

FIG. 18 is an explanatory view showing an electric separation membrane of the first precipitation device and the second precipitation device in the first embodiment.

FIG. 19 is a block diagram showing a centralized control device according to the first embodiment.

FIG. 20 is a block diagram showing the configuration of a high voltage pulse generating means in a second embodiment of a liquid processing apparatus as an example of a material processing apparatus according to the present invention.

FIG. 21 is a view showing another embodiment in which the electrode structure is different from that of the first embodiment in the embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

22 is a view showing another embodiment in which the electrode structure is different from that of the first embodiment and FIG. 21 in the embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

FIG. 23 is a view showing another embodiment in which the electrode structure is different from that of the first embodiment in the embodiment of the liquid processing apparatus as an example of the material processing apparatus according to the present invention.

FIG. 24 is a chemical formula showing the generation of OH radicals generated by the treatment of the aggregating apparatus and the aggregating accelerator in the first embodiment.

FIG. 25 is a view showing another embodiment different from FIG. 7 in the embodiment of the substance processing apparatus according to the present invention.

[Explanation of symbols]

72 Aggregator 200,210 High voltage pulse generation means 201 Original signal generator 202 High voltage amplifier 203 High voltage resistance 204,213 High voltage capacitors 205 control unit 206 sensor 207,211 High voltage power supply 215 Trigger Spark Generator 216 Spark gap for trigger 217 Spark Gap 218a, 218b electrodes

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 4D061 DA08 DB16 DC08 EA13 EB07                       EB30 ED15 FA13 FA14 FA20                 4G075 AA02 AA22 BB08 CA14 EC21

Claims (6)

[Claims] 1. A substance treatment method for aggregating and separating the inclusions from the substance by applying a high-frequency high-voltage pulse to the substance containing the inclusions stored in the processing bath through an electrode. In, at least the pulse period and the pulse width of the high-voltage pulse is changed according to the mixing ratio of the mixture with respect to the substance, and the electrode is at least the intermediate layer and the coating layer on the surface of the titanium base material. A method for treating a substance, characterized in that a material formed by forming a material is used. 2. A high-frequency high-voltage pulse is applied to a liquid, which is a substance containing colloidal particles such as microorganisms and water-soluble organic substances, stored in a liquid tank through an electrode, so that the liquid is removed from the liquid. In a method for treating substances in which colloidal particles are separated and aggregated and cells are destroyed, at least the pulse period and pulse width of the high-voltage pulse are changed according to the degree of contamination of the liquid, and the electrode is a titanium-based material. A method for treating a substance, which comprises using at least an intermediate layer and a coating layer formed on the surface of a material. 3. A high-voltage pulse generating means for applying a high-frequency high-voltage pulse to a substance containing a contaminant stored in a processing bath through an electrode, and the high-voltage pulse generating means comprises: By applying a high-voltage pulse to the substance, in the substance processing apparatus for separating and aggregating the inclusions from the substance, a measuring unit for measuring the mixing ratio of the inclusions contained in the substance, and the measuring unit based on the measuring unit. A substance processing apparatus, comprising: a controller for adjusting a frequency and a pulse width of a high-voltage pulse, wherein the electrode is formed by forming at least an intermediate layer and a coating layer on a surface of a titanium base material. 4. A high-voltage pulse generating means for applying a high-frequency high-voltage pulse to a liquid, which is a substance containing colloidal particles such as microorganisms and water-soluble organic substances, stored in a liquid tank through electrodes, In the substance processing apparatus for separating and aggregating the colloidal particles from the liquid and destroying cells by applying a high voltage pulse to the liquid by the high voltage pulse generating means, a measuring means for measuring the degree of contamination of the liquid, A control unit that adjusts the frequency and pulse width of the high-voltage pulse based on the measuring means, and the electrode is formed by forming at least an intermediate layer and a coating layer on the surface of a titanium base material. Material processing equipment. 5. The high-voltage pulse generating means includes at least an original signal generator that outputs a square signal, a high-voltage amplifier that amplifies the signal of the original signal generator into a high-voltage signal, and outputs the high-voltage signal. The high-voltage power supply which drives a voltage amplifier, The substance processing apparatus of Claim 3 or Claim 4 characterized by the above-mentioned. 6. The high-voltage pulse generating means includes at least a high-voltage power supply, a high-voltage capacitor that stores electric charges generated from the high-voltage power supply, and the electric charges stored in the high-voltage capacitor via spark discharge. 5. The substance processing apparatus according to claim 3 or 4, further comprising a spark generating unit that flows to the electrode.