JP2003106834A - Thickness meter - Google Patents
Thickness meterInfo
- Publication number
- JP2003106834A JP2003106834A JP2001303519A JP2001303519A JP2003106834A JP 2003106834 A JP2003106834 A JP 2003106834A JP 2001303519 A JP2001303519 A JP 2001303519A JP 2001303519 A JP2001303519 A JP 2001303519A JP 2003106834 A JP2003106834 A JP 2003106834A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- measured
- distance
- strain gauge
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、被測定物までの距
離を非接触で測定する距離計を用いた厚み計に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thickness meter using a distance meter for measuring a distance to an object to be measured without contact.
【０００２】[0002]
【従来の技術】従来、この種の被測定物までの距離を非
接触で測定する距離計には、レーザを使用して三角測量
方式および光波方式等を採用している方法や、超音波を
使用した方法などが知られている。2. Description of the Related Art Conventionally, as a range finder for measuring the distance to an object to be measured in a non-contact manner, a method using a triangulation method and a light wave method using a laser, or an ultrasonic wave is used. The method used is known.
【０００３】図４には、この従来の距離計を使用した厚
み計の原理が示されていて、水平に配置された板状の被
測定物１の板厚方向上部には上側距離計２が、また、下
部には下側距離計３がそれぞれ対向してある距離Ｄをお
いてＣ型フレーム４の一対の保持アーム４−１、４−２
に配置されている。FIG. 4 shows the principle of a thickness meter using this conventional range finder. An upper range finder 2 is provided above a plate-like object 1 to be measured horizontally arranged in the plate thickness direction. Also, a pair of holding arms 4-1 and 4-2 of the C-shaped frame 4 are provided at the lower part at a distance D where the lower range finder 3 faces each other.
It is located in.
【０００４】この上側距離計２と下側距離計３との間の
距離Ｄは予め測定されて既知であるが、上側距離計２か
ら被測定物１の上面までの距離ｄ１、および下側距離計
３から被測定物１の下面までの距離ｄ２のそれぞれは測
定し、被測定物１の板厚ｔを次式（１）によって求めて
いる。The distance D between the upper range finder 2 and the lower range finder 3 is measured in advance and known, but the distance d1 from the upper range finder 2 to the upper surface of the DUT 1 and the lower range metric Each of the distances d2 from the total 3 to the lower surface of the DUT 1 is measured, and the plate thickness t of the DUT 1 is calculated by the following equation (1).
【０００５】ｔ＝Ｄ−（ｄ１＋ｄ２）…………（１）T = D- (d1 + d2) ... (1)
【０００６】[0006]
【発明が解決しようとする課題】ところが、この従来の
測定の仕方では距離そのものを測定し、その測定結果に
基づいて厚みｔを算出するため、測定中に生じるＣ型フ
レーム４の歪みが距離Ｄに直接影響して、それがそのま
ま板厚の誤差として現れてしまう。However, in this conventional measuring method, since the distance itself is measured and the thickness t is calculated based on the measurement result, the distortion of the C-shaped frame 4 generated during the measurement is caused by the distance D. Directly affects the plate thickness, and it appears as an error in the plate thickness.
【０００７】通常、この種の被測定物１の厚みは、図５
に示すように、被測定物１のエッジ１Ａから所定の距離
Ｅｄのポイントで測定しなければならないため、エッジ
１Ａに追従してＣ型フレーム４が板幅方向に稼動して、
Ｃ型フレーム４に歪みを起こす。Normally, the thickness of the DUT 1 of this type is as shown in FIG.
As shown in, since it is necessary to measure at a point of a predetermined distance Ed from the edge 1A of the DUT 1, the C-shaped frame 4 moves in the plate width direction following the edge 1A,
The C-shaped frame 4 is distorted.
【０００８】そのため、被測定物１の側面エッジ位置を
測定するエッジ位置測定装置５をＣ型フレーム４の上部
に取付け、同時にＣ型フレーム４を被測定物１の幅方向
に移動し得る距離計移動装置６を設け、距離計２、３が
所定の測定位置をとるように、エッジ位置測定装置５に
よって測定された測定エッジ位置に追従してＣ型フレー
ム４を被測定物１の板幅方向に移動させる。Therefore, an edge position measuring device 5 for measuring the side edge position of the object to be measured 1 is attached to the upper portion of the C-shaped frame 4, and at the same time, the distance meter capable of moving the C-shaped frame 4 in the width direction of the object to be measured 1. A moving device 6 is provided, and the C-shaped frame 4 is moved in the plate width direction of the DUT 1 so as to follow the measurement edge position measured by the edge position measuring device 5 so that the distance meters 2 and 3 take predetermined measurement positions. Move to.
【０００９】問題は、Ｃ型フレーム４を測定エッジ位置
に追従動作させることにより、その加速度に依存してＣ
型フレーム４が歪みを起こすことであり、この歪みを起
こした状態で位置決めされ、かつ厚み測定が行われてい
る。The problem is that by making the C-shaped frame 4 follow the measured edge position, the C
The mold frame 4 is distorted, and the mold frame 4 is positioned in the distorted state and the thickness is measured.
【００１０】また、Ｃ型フレーム４の歪みは周囲温度の
変化によっても起きることが知られている。Further, it is known that the distortion of the C-shaped frame 4 also occurs due to a change in ambient temperature.
【００１１】そこで、このエッジの追従動作による歪み
を抑えるために、一般にはＣ型フレーム４の剛性を高め
る処置がとられているが、μｍオーダーの精度で歪みを
抑えるのは容易ではない。Therefore, in order to suppress the distortion caused by the edge following operation, generally, the rigidity of the C-shaped frame 4 is increased, but it is not easy to suppress the distortion with an accuracy of the order of μm.
【００１２】また、周囲温度を一定にコントロールする
のも、コスト面や方式の面から現実的ではない。Further, it is not realistic to control the ambient temperature at a constant level in terms of cost and method.
【００１３】そこで、現在は、さらに、改良が加えられ
て、特開２００１−８２９５０で公開されている方法が
知られている。Therefore, the method disclosed in Japanese Patent Laid-Open No. 2001-82950 is now known, which is further improved.
【００１４】この方法は、Ｃ型フレーム４の変形による
測定誤差の原因となる事象の物理量と、その物理量に対
する補正量とを関係テーブルとして予め用意し、変形誤
差の原因となる事象の物理量に応じて厚み測定量に補正
を加えることにより、より正確な厚みを測定する方法で
ある。According to this method, a physical quantity of an event causing a measurement error due to the deformation of the C-shaped frame 4 and a correction amount for the physical quantity are prepared in advance as a relation table, and the physical quantity of the event causing the deformation error is prepared according to the relationship table. This is a method of measuring the thickness more accurately by correcting the thickness measurement amount.
【００１５】しかしながら、この方法も、Ｃ型フレーム
４の幅方向追従動作を行なって複数箇所での測定を行な
う必要があり、その際、図６に示すように、Ｃ型フレー
ム４が点線４Ａのように歪み、上側距離計２の変形誤差
ｅ１（図６）、下側距離計３の変形誤差ｅ２（図６）が
発生し、その結果、ｅ１＋ｅ２ が厚みの誤差として測
定値に重畳されてしまう。However, also in this method, it is necessary to perform the width-direction follow-up operation of the C-shaped frame 4 to perform measurement at a plurality of points. At that time, as shown in FIG. 6, the C-shaped frame 4 is indicated by a dotted line 4A. As described above, the deformation error e1 of the upper range finder 2 (FIG. 6) and the deformation error e2 of the lower range finder 3 (FIG. 6) occur, and as a result, e1 + e2 is superimposed on the measurement value as a thickness error. .
【００１６】また、関係テーブルを作成するために複数
箇所で測定し、さらに、その測定結果をグラフ化するな
どの煩雑さが伴うという問題もある。In addition, there is a problem that measurement is performed at a plurality of points in order to create the relation table and the measurement results are graphed.
【００１７】そこで、本発明の目的は、エッジの追従動
作および周囲温度の変化に起因する誤差を簡単な方法で
補正して真に正確な厚みが測定される厚み計を提供する
ことにある。Therefore, an object of the present invention is to provide a thickness gauge capable of measuring a true accurate thickness by correcting an error caused by an edge following operation and a change in ambient temperature by a simple method.
【００１８】[0018]
【課題を解決するための手段】本発明の厚み計は、被測
定物の表面までの距離を測定する一対の距離計と、これ
らの距離計を前記被測定物の両面に対向して配置させる
ように前記一対の距離計を保持するフレームと、このフ
レームに固定され、フレームの変形量を測定するセンサ
ーとからなることを特徴とするものである。The thickness meter of the present invention comprises a pair of distance meters for measuring the distance to the surface of an object to be measured, and these distance meters arranged opposite to each other on both sides of the object to be measured. Thus, it is characterized by comprising a frame for holding the pair of distance meters and a sensor fixed to the frame for measuring the amount of deformation of the frame.
【００１９】また、本発明の厚み計においては、前記セ
ンサーは外気温度を遮断する断熱ケース内に収容されて
いることを特徴とするものである。Further, the thickness gauge of the present invention is characterized in that the sensor is housed in an adiabatic case that shuts off the outside air temperature.
【００２０】さらに、本発明の厚み計においては、前記
断熱ケースに温度制御機能を持たせたことを特徴とする
ものである。Furthermore, the thickness gauge of the present invention is characterized in that the heat insulating case is provided with a temperature control function.
【００２１】さらに、本発明の厚み計においては、前記
フレームは被測定物の両面に延長された一対の保持アー
ムを供えたほぼＣ字型に構成され、前記センサーは前記
一対の保持アームのそれぞれに固定されていることを特
徴とするものである。Further, in the thickness gauge of the present invention, the frame is formed in a substantially C-shape with a pair of holding arms extending on both sides of the object to be measured, and the sensor is provided with each of the pair of holding arms. It is characterized by being fixed to.
【００２２】[0022]
【発明の実施の形態】以下、本発明の実施形態を図１乃
至図３について説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIGS.
【００２３】図１は、本発明による実施形態の構成を側
面から見た構成説明図で、図４乃至図５と同一構成部分
には同一符号を付して示し、その部分の詳細な説明は省
略し、以下では図４乃至図５と相違する部分についての
み主として説明する。FIG. 1 is a configuration explanatory view of the configuration of an embodiment according to the present invention seen from the side. The same components as those in FIGS. 4 to 5 are designated by the same reference numerals, and detailed description thereof will be given. It is omitted, and only the parts different from those in FIGS. 4 to 5 will be mainly described below.
【００２４】同図において、Ｃ型フレーム１の上側保持
アーム４−１には上側歪みゲージ７が、また、下側保持
アーム４−２には下側歪みゲージ８がそれぞれ設置され
ている。In the figure, an upper strain gauge 7 is installed on the upper holding arm 4-1 of the C-shaped frame 1, and a lower strain gauge 8 is installed on the lower holding arm 4-2.
【００２５】そして、Ｃ型フレーム４の上側保持アーム
４−１における歪みは上側歪みゲージ７によって、ま
た、下側保持アーム４−２における歪みは下側歪みゲー
ジ８によってそれぞれ検出されるようになっている。The strain in the upper holding arm 4-1 of the C-shaped frame 4 is detected by the upper strain gauge 7, and the strain in the lower holding arm 4-2 is detected by the lower strain gauge 8. ing.
【００２６】本発明は、この上側および下側の各歪みゲ
ージ７、８で検出される値と、Ｃ型フレーム４の変形量
とが材料力学的な相関関係にあることに着目し、この関
係から、上側歪みゲージ７および下側歪みゲージ８によ
る検出量が判れば、変形誤差、すなわち、上側距離計２
の変形誤差ｅ１（図６）、および上側距離計３の変形誤
差ｅ２（図６）が演算されるので、真の板厚ｔは、この
歪みゲージ７および８による検出量に基づいて算出され
た変形量ｅ１、ｅ２により、正確に求められることにな
る。The present invention pays attention to the fact that the values detected by the upper and lower strain gauges 7 and 8 and the deformation amount of the C-shaped frame 4 have a material-mechanical correlation, and this relation is obtained. From the above, if the amount of detection by the upper strain gauge 7 and the lower strain gauge 8 is known, the deformation error, that is, the upper distance meter 2
Since the deformation error e1 of FIG. 6 and the deformation error e2 of the upper range finder 3 (FIG. 6) are calculated, the true plate thickness t is calculated based on the amount detected by the strain gauges 7 and 8. The deformation amounts e1 and e2 enable accurate determination.
【００２７】図２乃至図３は、本発明による他の実施形
態の構成を示す側面図で、この図２乃至図３において
も、図５と同一構成部分には同一符号を付して示してあ
る。2 to 3 are side views showing the configuration of another embodiment according to the present invention. In FIGS. 2 to 3 as well, the same components as those in FIG. 5 are designated by the same reference numerals. is there.
【００２８】図２においては、上側歪みゲージ７は上側
断熱ケース９の中に、また、下側歪みゲージ８は下側断
熱ケース１０の中に、それぞれ収納されている。In FIG. 2, the upper strain gauge 7 is housed in the upper heat insulating case 9, and the lower strain gauge 8 is housed in the lower heat insulating case 10.
【００２９】そのために、上側歪みゲージ７および下側
歪みゲージ８それぞれは外気温度の変化に影響されず、
したがって、上側および下側の各歪みゲージ７、８の温
度ドリフトを最小にすることが出来るので、補正量の誤
差を極めて小さく出来ることになる。Therefore, the upper strain gauge 7 and the lower strain gauge 8 are not affected by changes in the outside air temperature,
Therefore, the temperature drift of the upper and lower strain gauges 7 and 8 can be minimized, and the error in the correction amount can be made extremely small.
【００３０】図３は、上側および下側の各断熱ケース
９、１０の中に、ヒーターおよびクーラー線１１および
１２がそれぞれ設置されている。In FIG. 3, heater and cooler wires 11 and 12 are installed in the upper and lower heat insulating cases 9 and 10, respectively.
【００３１】断熱ケース９および１０だけでは外気温の
変化を完全に遮断することが出来ないので、断熱ケース
９および１０に対して、能動的にヒーターおよびクーラ
ー線１１および１２を介して加熱または冷却を行なうこ
とにより断熱ケース９および１０の中を一定温度に保
ち、上側歪みゲージ７および下側歪みゲージ８それぞれ
の温度ドリフトを、さらに、小さくさせることが可能と
なって補正量の誤差を限りなくゼロに近づけることが出
来る。Since it is not possible to completely block the change of the outside air temperature by only the heat insulating cases 9 and 10, the heat insulating cases 9 and 10 are actively heated or cooled through the heater and cooler wires 11 and 12. By carrying out the above, it is possible to keep the insides of the heat insulating cases 9 and 10 at a constant temperature and further reduce the temperature drifts of the upper strain gauge 7 and the lower strain gauge 8, respectively, so that the error of the correction amount is infinite. It can approach zero.
【００３２】[0032]
【発明の効果】上記した本発明によれば、Ｃ型フレーム
の変形量を歪みゲージ等のセンサーでリアルタイムに求
め、その求めた値に対して補正もリアルタイムでかけら
れるので、それだけ、真に正確な厚みを算出できる。According to the present invention described above, the amount of deformation of the C-shaped frame is obtained in real time by a sensor such as a strain gauge, and the obtained value can be corrected in real time, so that it is truly accurate. The thickness can be calculated.
【００３３】また、本発明によれば、歪みゲージを断熱
ケースの中に入れることによって、外気温の変化にも影
響されず、さらに、この断熱ケースにヒーターおよびク
ーラー機能を付加さえて、その外気温の影響を完全に遮
断させているので、歪みゲージの温度ドリフトが、さら
に、小さくなり、したがって、真に正確な被測定物の厚
みを得ることが可能となる。Further, according to the present invention, by placing the strain gauge in the heat insulating case, the strain gauge is not affected by the change of the outside temperature, and the heat insulating case is provided with a heater and a cooler function. Since the influence of the air temperature is completely cut off, the temperature drift of the strain gauge is further reduced, and thus it is possible to obtain a truly accurate thickness of the object to be measured.
【図１】本発明による実施形態の構成説明図である。FIG. 1 is a configuration explanatory diagram of an embodiment according to the present invention.
【図２】本発明による他の実施形態の構成説明図であ
る。FIG. 2 is a configuration explanatory diagram of another embodiment according to the present invention.
【図３】本発明による他の実施形態の構成説明図であ
る。FIG. 3 is a configuration explanatory diagram of another embodiment according to the present invention.
【図４】従来の距離計を使用した厚み計の原理説明図で
ある。FIG. 4 is an explanatory view of the principle of a thickness meter using a conventional distance meter.
【図５】従来のエッジ追従機能を持った厚み計の原理説
明図である。FIG. 5 is a diagram illustrating the principle of a conventional thickness gauge having an edge following function.
【図６】従来のエッジ追従動作時に発生する誤差の説明
図である。FIG. 6 is an explanatory diagram of an error that occurs during a conventional edge following operation.
１ 被測定物 ２ 上側距離計 ３ 下側距離計 ４ Ｃ型フレーム ５ エッジ位置測定装置 ６ 距離計移動装置 ７ 上側歪みゲージ ８ 下側歪みゲージ ９ 上側断熱ケース １０ 下側断熱ケース １１，１２ ヒーターおよびクーラー線 1 DUT 2 Upper range finder 3 Lower range finder 4 C type frame 5 Edge position measuring device 6 Distance meter moving device 7 Upper strain gauge 8 Lower strain gauge 9 Upper insulation case 10 Lower insulation case 11,12 Heater and cooler wire
Claims (4)
対の距離計と、これらの距離計を前記被測定物の両面に
対向して配置させるように前記一対の距離計を保持する
フレームと、このフレームに固定され、フレームの変形
量を測定するセンサーとからなることを特徴とする厚み
計。1. A pair of rangefinders for measuring the distance to the surface of an object to be measured, and a frame for holding the pair of rangefinders so that the rangefinders are arranged on both sides of the object to be measured. And a sensor fixed to the frame and configured to measure the amount of deformation of the frame.
ケース内に収容されていることを特徴とする請求項１記
載の厚み計。2. The thickness gauge according to claim 1, wherein the sensor is housed in a heat insulating case that shuts off the outside air temperature.
たことを特徴とする請求項２記載の厚み計。3. The thickness gauge according to claim 2, wherein the heat insulating case has a temperature control function.
れた一対の保持アームを供えたほぼＣ字型に構成され、
前記センサーは前記一対の保持アームのそれぞれに固定
されていることを特徴とする請求項２記載の厚み計。4. The frame is substantially C-shaped with a pair of holding arms extending on both sides of the object to be measured,
The thickness gauge according to claim 2, wherein the sensor is fixed to each of the pair of holding arms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001303519A JP2003106834A (en) | 2001-09-28 | 2001-09-28 | Thickness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001303519A JP2003106834A (en) | 2001-09-28 | 2001-09-28 | Thickness meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003106834A true JP2003106834A (en) | 2003-04-09 |
Family
ID=19123593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001303519A Pending JP2003106834A (en) | 2001-09-28 | 2001-09-28 | Thickness meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003106834A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006510024A (en) * | 2002-12-13 | 2006-03-23 | アプライド マテリアルズ インコーポレイテッド | Method and apparatus for measuring the thickness of a test object between two eddy current sensor heads |
| JP2009128322A (en) * | 2007-11-27 | 2009-06-11 | Toshiba Corp | Thickness measuring device |
| KR20210039137A (en) * | 2019-10-01 | 2021-04-09 | 문상호 | Contactless type thickness measuring apparatus with function to correct errors |
-
2001
- 2001-09-28 JP JP2001303519A patent/JP2003106834A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006510024A (en) * | 2002-12-13 | 2006-03-23 | アプライド マテリアルズ インコーポレイテッド | Method and apparatus for measuring the thickness of a test object between two eddy current sensor heads |
| US7777483B2 (en) | 2002-12-13 | 2010-08-17 | Applied Materials, Inc. | Method and apparatus for measuring a thickness of a layer of a wafer |
| JP2009128322A (en) * | 2007-11-27 | 2009-06-11 | Toshiba Corp | Thickness measuring device |
| KR20210039137A (en) * | 2019-10-01 | 2021-04-09 | 문상호 | Contactless type thickness measuring apparatus with function to correct errors |
| KR102261188B1 (en) | 2019-10-01 | 2021-06-03 | 문상호 | Contactless type thickness measuring apparatus with function to correct errors |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9074865B2 (en) | Contour and surface texture measuring instrument and contour and surface texture measuring method | |
| CN101373134B (en) | Method for measuring thickness of wire-shaped narrowband filtering PSD thermal radiation plate | |
| JP2003106834A (en) | Thickness meter | |
| AU768410B2 (en) | Method for improving measurements by laser interferometer | |
| CN102878939B (en) | Method for measuring non-contact gaps | |
| JP2746511B2 (en) | Method for measuring orientation flat width of single crystal ingot | |
| JP4677810B2 (en) | Dimensional measurement method for section steel | |
| CN108871243A (en) | A kind of scaling method and system of the installation parameter of rut detection device | |
| KR101679339B1 (en) | Linear positioning apparatus and method for compensating error thereof | |
| JPH05223526A (en) | Plate thickness measuring apparatus | |
| JPH07116737A (en) | Instrument for measuring bending angle | |
| JPH01221605A (en) | Thickness measuring instrument | |
| JP2000124232A (en) | Parallelism measuring apparatus | |
| JP3202183B2 (en) | Scale and length measurement method using laser light | |
| CN110715795A (en) | Calibration and measurement method for fast reflector in photoelectric tracking system | |
| JPH06167327A (en) | Measuring method for camber | |
| JPH11183106A (en) | Knife edge inspection device for seal plate of furnace cover | |
| JP2001082950A (en) | Thickness gauge | |
| JP2003121131A (en) | Measuring method for straightness by scanning gap amount detection | |
| JPH04364410A (en) | Method for measuring non-contact type plate thickness | |
| CN103528509B (en) | Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath | |
| JPH11237236A (en) | Thickness gage | |
| FI110209B (en) | A method for improving the accuracy of laser interferometer measurements | |
| JPH08178643A (en) | Method and device for measuring thickness of steel plate | |
| CN103528503B (en) | Double-optical axis compensation and air bath type angular displacement laser interferometer calibration method and device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060907 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20060911 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090205 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090210 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090714 |