JP2003106469A - Direction control valve and adsorption/separation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To temporarily feed a large quantity of product gas from an adsorption side adsorption vessel to a regeneration side adsorption vessel when changing over between the adsorption and the regeneration without using a solenoid valve requiring a control from the outside. SOLUTION: A rapid filling valve 19 is provided on a pipe communicating between air outlets of a pair of desiccant cylinders and autonomously opens/ closes by a pressure difference between an adsorption-side dry air pressure and a regeneration-side dry air pressure. When the pressure difference exceeds some boundary value by executing the adsorption and regeneration, the valve autonomously closes, an interval between the both desiccant cylinders are communicated by an orifice 43 alone, and the dry air is fed from the adsorption side to the regeneration side by controlling the flow rate. When the regeneration is completed and the pressure difference becomes the boundary value or less, the valve autonomously opens, the interval between the both desiccant cylinders is communicated via respective feed passages 44 as well as the orifice 43, and the large quantity of dry air is temporarily fed from the adsorption side to the regeneration side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adsorption / separation device such as a dehumidifier for adsorbing moisture of raw material air to a desiccant to produce dry air, and a directional control valve that can be used in this adsorption / separation device. It is about.

[0002]

2. Description of the Related Art Conventionally, for example, in order to obtain oxygen-enriched air in which nitrogen is removed from air, an adsorption separation apparatus using a pressure swing adsorption method for adsorbing and separating nitrogen from an adsorbent contained in an adsorption container has been proposed. It has been put to practical use. As such a device, for example, there is a device disclosed in Japanese Patent Laid-Open No. 4-11919.

As shown in FIG. 7, this adsorption separation device 70
Is equipped with a pair of adsorption towers 71a, 71b containing an adsorbent, and allows the adsorption towers 71a, 71b to alternately adsorb, while the adsorption towers 71a, 71b not adsorbed.
By regenerating the adsorbent of b, oxygen-enriched air is continuously produced.

For example, in order to make the adsorption in the adsorption tower 71a,
Raw material air is supplied to the adsorption tower 71a from an air supply source at a high pressure, and nitrogen in the raw material air is adsorbed by the adsorbent to generate oxygen-rich product air and supply the product air to the outside.
On the other hand, a part of the product air generated in the adsorption tower 71a that is adsorbing is supplied to the adsorption tower 71b that is not adsorbing and is released into the atmosphere, so that it is adsorbed by the adsorbent in the adsorption tower 71b. Remove the nitrogen that is being stored.

When the regeneration of the adsorbent in the adsorption tower 71b is completed, the supply of the raw material air to the adsorption tower 71a which has been adsorbing until then is stopped, and the regeneration of the adsorption tower 71b is completed instead.
Supply raw material air to b. On the other hand, the adsorbent is regenerated by supplying a part of the product air generated in the adsorption tower 71b to the adsorption tower 71a which has been adsorbing until then.

In order to carry out such a process, the adsorption / separation device has a pair of electromagnetic two-way valves (hereinafter referred to as electromagnetic valves) 72a and 72b, a three-way check valve 73, an orifice 74, and a three-way type. A check valve 75 is provided. The electromagnetic two-way valves 72a and 72b are controlled as follows, and the check valves 73 and 75 and the orifice 7 are controlled.
4 operates as follows.

For example, in order to cause adsorption to the adsorption tower 71a, the electromagnetic valve 7a is left closed and the electromagnetic valve 7a is closed.
2b is opened. Then, the check valve 73 is operated by the raw material air supplied from the air supply source, and this raw material air is introduced into the adsorption tower 71a to be product air, which is supplied to the outside. Check valve 75 by this product air
Operates to supply product air to the outside, while preventing product air from being supplied to the adsorption tower 71b side. At this time, a part of the product air generated in the adsorption tower 71a is supplied to the air outlet side of the adsorption tower 71b through the orifice 74. Then, it passes through the adsorption tower 71b in the opposite direction and is discharged to the atmosphere.

When the electromagnetic valve 72b is closed when the regeneration of the adsorption tower 71b is completed, the product air introduced from the adsorption tower 71b increases the pressure of the product air in the adsorption tower 71b. When the electromagnetic valve 72a is opened when the pressure in the adsorption tower 71b is sufficiently increased, the check valve 73 is switched, and the raw material air is supplied to the regenerated adsorption tower 71b in place of the adsorption tower 71a which has been adsorbing until now. Supplied. At this time, since the pressure inside the adsorption tower 71b is sufficiently high, the adsorption tower 71b for the raw material air supplied at high pressure is
The internal pressure does not drop temporarily. For this reason,
Nitrogen is efficiently adsorbed from the raw material air by the regenerated adsorbent in the adsorption tower 71b, and oxygen-enriched product air is continuously supplied to the outside.

Further, in the adsorption / separation device 70, a pressure equalizing control valve 76 composed of an electromagnetic two-way valve is provided in parallel with the orifice 74. This pressure equalizing control valve 76 is opened only when the electromagnetic valve 72b is closed and the electromagnetic valve 72a is opened when the adsorption side adsorption tower and the regeneration side adsorption tower are switched in the above process. Then, a part of the product air is primarily supplied from the adsorption tower 71a side to the adsorption tower 71b side in a large amount. As a result, the pressure in the adsorption tower 71b where the regeneration is completed is quickly increased, and the adsorption efficiency is gradually decreasing due to the adsorption up to that point, so that the adsorption period in the adsorption tower 71a is shortened. To Then, the oxygen concentration in the product air is made difficult to decrease, and a good quality product air is stably supplied. The solenoid valves 72a, 72b and the pressure equalizing control valve 76 are switched using a timer according to a preset adsorption time.

[0010]

However, when the electromagnetic type pressure equalizing control valve 76 which is externally controlled in this way is provided, the number of solenoid valves increases, and each solenoid valve 72a, 72b is increased.
In addition, there is a problem that the cost of the entire apparatus including the control apparatus that controls the pressure equalizing control valve 76 increases, and the reliability of the entire apparatus decreases.

The present invention has been made to solve the above problems, and a first object thereof is to provide a pair of adsorption containers for alternately performing adsorption and regeneration, and to perform adsorption and regeneration. At the time of switching, the pressure inside the adsorption container on the regeneration side was rapidly increased by temporarily supplying a large amount of a part of the product gas generated in the adsorption container on the adsorption side to the adsorption container on the regeneration side. In an adsorption / separation device that switches the adsorption container to perform adsorption and regeneration depending on the state, the adsorption side from the adsorption side on the adsorption side to the adsorption side on the regeneration side can be used when switching between adsorption and regeneration without using an electromagnetic valve that requires external control. An object of the present invention is to provide an adsorption / separation device capable of temporarily supplying a large amount of a part of the product gas to the container side.

A second object is to provide a directional control valve suitable for achieving the first object.

[0013]

In order to achieve the second object, the invention according to claim 1 is provided with a first port and a second port to which a fluid is respectively supplied, and is supplied to the first port. When the pressure difference between the first pressure of the fluid to be supplied and the second pressure of the fluid supplied to the second port is within a predetermined boundary value, the two ports are made to communicate with each other, and when the pressure difference exceeds the boundary value. It is characterized by blocking communication between both ports.

According to the first aspect of the invention, the pressure difference between the first pressure of the gas supplied to the first port and the second pressure of the gas supplied to the second port is within a predetermined boundary value. In this case, the ports are communicated with each other, and gas is supplied from the port having the higher pressure to the port having the lower pressure. On the other hand, when the pressure difference exceeds the boundary value, the communication between both ports is cut off, and gas is not supplied from the port having the higher pressure to the port having the lower pressure.

According to a second aspect of the invention, in the first aspect of the invention, the valve chamber provided on the flow path communicating between the two ports and the valve chambers on the first port side and the second port side are provided. And a valve element that is displaceable between a first position that blocks communication between the first port and the valve chamber and a second position that blocks communication between the second port and the valve chamber, and a valve Body is the first
When the intermediate position between the position and the second position, the two ports are communicated with each other via the valve chamber, and when the valve body is in the first position, the communication between the first port and the valve chamber is blocked by the valve body,
When the valve body is in the second position, the communication between the second port and the valve chamber is blocked by the valve body; and when the pressure difference is within a certain boundary value, the first position and the second position When the first pressure is larger than the second pressure by a pressure difference exceeding the boundary value, the valve body is held at the second position and the second pressure is higher than the second pressure. And a valve position control means for holding the valve element at the first position when the pressure difference exceeds the boundary value by more than one pressure.

According to the invention of claim 2, claim 1
In addition to the operation of the invention described in (1), when the pressure difference between the first pressure and the second pressure is within the boundary value, the valve position control means holds the valve element in the middle between the first position and the second position. . Therefore, the ports are communicated with each other via the supply passage. on the other hand,
When the first pressure is larger than the second pressure by the pressure difference exceeding the boundary value, the valve position control means holds the valve body in the second position. Therefore, the communication between the two ports via the supply flow path is blocked by the valve body. Similarly, when the second pressure is larger than the first pressure by the pressure difference exceeding the boundary value, the valve position control means holds the valve element in the first position. For this reason,
The valve body blocks communication between both ports via the supply flow path. Therefore, the valve opens and closes autonomously due to the pressure difference between the two pressure regions that supply gas to each port, and opens when the pressure difference is within a predetermined boundary value, starting from the pressure region with the higher pressure. Gas is supplied to the lower pressure region. On the other hand, when the pressure difference exceeds the boundary value, the valve is closed so that the gas is not supplied from the pressure region having the higher pressure to the pressure region having the lower pressure.

According to a third aspect of the present invention, in the second aspect of the invention, the valve position control means elastically holds the valve body between the first position and the second position. The elastic holding means changes the position for holding the valve body according to the pressure difference.

According to the invention of claim 3, claim 2
In addition to the effect of the invention described in (1), the elastic holding means elastically holds the valve element between the first position and the second position and displaces the valve element to a position according to the pressure difference. Therefore, since the position of the valve body can be controlled by a simple mechanism, higher reliability can be obtained.

According to a fourth aspect of the present invention, in the third aspect of the present invention, the elastic holding means is a pair of coil springs that bias the valve body so as to oppose each other in the displacement direction. Characterize.

According to the invention of claim 4, claim 3
In addition to the operation of the invention described in (1), the pair of coil springs elastically holds the valve body between the first position and the second position, and the pair of coil springs contracts and expands each other in accordance with the pressure difference, thereby reducing the pressure. The valve body is displaced to a position according to the difference. Therefore, the position of the valve body can be controlled by a simpler mechanism including a pair of coil springs, and thus higher reliability can be obtained.

According to a fifth aspect of the present invention, in the invention according to any one of the second to fourth aspects, the valve body communicates between the two ports regardless of the position of the valve body. It is characterized in that an orifice is provided.

According to the invention of claim 5, claim 2
~ In addition to the action of the invention described in any one of claims 4 to 4, regardless of the magnitude of the pressure difference between the first pressure and the second pressure and the boundary value, Gas whose flow rate is restricted by the orifice is supplied to the pressure region. Therefore, when it is desired to constantly supply the gas whose flow rate is restricted from the pressure region with the higher pressure to the pressure region with the lower pressure, another flow passage is provided in parallel with the flow passage provided with the directional control valve between both gas outlets. It is not necessary to provide an orifice on this channel.

In order to achieve the first object mentioned above, claim 6
The invention described in (1) is provided with a pair of adsorption containers each containing an adsorbent and having a gas inlet and a gas outlet, and a throttling is provided on a communication channel that communicates between the gas outlets of both adsorption containers. While supplying the raw material gas to the gas inlet of one of the adsorption side adsorption vessels and supplying the product fluid discharged from the gas outlet to the outside, a part of this product fluid is passed through the communication channel to the other side. Of the regenerated fluid discharged from the gas inlet of the regeneration side adsorption container to the outside, and discharged to the outside of the regenerated fluid discharged from the gas inlet of the regeneration side adsorption vessel. In the adsorption separation device that switches the adsorption side adsorption vessel and the regeneration side adsorption vessel after stopping, it is provided in parallel with the throttle on the flow path communicating between the gas outlets of the both adsorption vessels, and the pressure difference between the both gas outlets. In response And a communication state control means for controlling a communication state between both gas outlets, and the communication state control means is provided between both gas outlets when the regenerated fluid is discharged to the outside from the gas inlet of the regeneration side adsorption container. Due to the pressure difference, the communication between both gas outlets is blocked, and the pressure difference between both gas outlets when the release of the regenerated fluid discharged from the gas outlet of the regeneration side adsorption container to the outside is stopped The feature is that the outlets communicate with each other. In addition, "a pair of adsorption containers"
The "adsorption container" in is not limited to one container containing an adsorbent, but a plurality of containers each containing an adsorbent are connected in parallel, and each gas inlet and gas outlet are common. Also includes.

According to the sixth aspect of the invention, when the raw material gas is supplied to the gas inlet of one of the pair of adsorption containers, the product fluid discharged from the gas outlet is supplied to the outside. To be done. A part of the product fluid is supplied to the gas outlet of the regeneration side adsorption container via the communication channel, discharged from the gas inlet, and then discharged to the outside. At this time, since the pressure on the gas outlet side of the regeneration side adsorption container becomes relatively low, the pressure difference between the gas outlets of both adsorption containers becomes large. Then, the communication state control means operates due to this large pressure difference to cut off the communication between both gas outlets, so that only the product gas whose flow rate is limited by the throttle is supplied to the regeneration side adsorption container. Therefore, when the product gas is generated from the raw material gas supplied to the adsorption side adsorption container, and when the regeneration side adsorption container is regenerated by the product gas supplied through the communication channel, the flow rate required for regeneration is Only the product gas is supplied to the regeneration side adsorption container. When the release of the regenerated gas discharged from the gas inlet of the regeneration-side adsorption container to the outside is switched in order to switch between the adsorption container for adsorbing and the regeneration container, the adsorption-side adsorption container passes through the throttle. The product gas supplied to the gas outlet of the regeneration side adsorption container raises the pressure in the regeneration side adsorption container. Then, the pressure difference between the gas outlets of both adsorption vessels becomes relatively small,
Due to this pressure difference, the communication state control means operates to establish communication between both gas outlets. Therefore, before switching the adsorption side and the regeneration side adsorption vessel, the regeneration of the regeneration side adsorption vessel is stopped while the product gas is continuously generated in the adsorption side adsorption vessel,
The product gas supplied by the supply communication state control means rapidly increases the pressure in the regeneration side adsorption container. Then, the raw material gas is supplied to the gas inlet of the adsorption container which has been the regenerating side in place of the adsorption container which has been the adsorption side until then, and the adsorption container which has been the adsorption side is newly regenerated. At this time,
Since the pressure inside the new adsorption side adsorption container is increased,
Good quality product gas is produced from the raw material gas.

According to a seventh aspect of the invention, in the invention of the sixth aspect, the communication state control means is the directional control valve according to any one of the first to fourth aspects. Characterize.

According to the invention of claim 7, claim 6
In addition to the operation of the invention described in (1), the directional control valve according to any one of (1) to (4) is autonomously opened / closed by a pressure difference between gas outlets of both adsorption vessels. The gas outlets are connected or disconnected so that the product gas is supplied from the supply side adsorption container side to the regeneration side adsorption container side when the pressure difference is within the boundary value.

According to an eighth aspect of the invention, in the invention of the sixth aspect, the communication state control means is the directional control valve according to the fifth aspect, and the directional control valve is on the communication flow path. And the aperture is the orifice.

According to the invention described in claim 8, claim 6
In addition to the function of the invention described in claim 5, the directional control valve according to claim 5 autonomously opens and closes by a pressure difference between the gas outlets of both adsorption vessels to communicate or cut off communication between both gas outlets. Then, when the pressure difference is within the boundary value, the product gas is supplied from the supply side adsorption container side to the regeneration side adsorption container side. Further, regardless of the pressure difference, the product gas of which the flow rate is limited is supplied from the adsorption side adsorption container to the gas outlet of the regeneration side adsorption container through the orifice provided in the valve body. Therefore, it is not necessary to provide a flow path for providing the direction control valve between the gas outlets of both adsorption vessels separately from the communication flow path. As a result, the structure of the adsorption separation device is simplified.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment in which the adsorption / separation device of the present invention is embodied in a dehumidifying device will be described below with reference to FIGS.

The dehumidifying device 10 of the present embodiment adsorbs moisture from the raw material air supplied from the air supply source S1 to generate dry air, and supplies this dry air to the dry air supply region S2. The air supply source S1 supplies the raw material air at a certain first pressure P1 higher than the atmospheric pressure, and the dry air supply region S2 becomes a certain second pressure P2 lower than the first pressure P1. That is,
In this embodiment, the raw material air is the raw material gas and the dry air is the product gas.

The dehumidifying device 10 comprises a pair of desiccant cylinders 11, 1.
2, a pair of supply electromagnetic two-way valves 13 and 14, a pair of discharge electromagnetic two-way valves 15 and 16, a pair of check valves 17 and 18, a quick filling valve 19 and the like. In the present embodiment, the desiccant cylinders 11 and 12 are adsorption containers.
Further, the quick filling valve 19 is a direction control valve and a communication state control means. In the dehumidifying device 10 of the present embodiment, the configuration excluding the rapid filling valve 19 is the same as the conventional one, and the configuration in which the rapid filling valve 19 having a new configuration is provided is new.

A desiccant such as activated alumina is contained in each of the desiccant cylinders 11 and 12. Each desiccant tube 11,
12, air inlets 11a and 12a (gas inlets) for introducing the raw material air supplied from the air supply source S1,
Air outlets 11b and 12b (gas outlets) for discharging the product air, in which the moisture is adsorbed by the desiccant, to the outside are provided. Each of the drying agent cylinders 11 and 12 has an air supply source S.
1 and one on the pair of pipelines 20a, 20b provided in parallel between 1 and the dry air supply region S2.

Each of the supply two-way valves 13 and 14 is provided between the air supply source S1 and the air inlets 11a and 12a of the desiccant cylinders 11 and 12 on the conduits 20a and 20b, respectively. There is. Each of the supply two-way valves 13 and 14 has the same configuration and includes two ports (not shown), and switches between a valve open state and a valve closed state by a drive signal supplied from a controller (not shown). When the valve is open, the ports are connected to each other to connect the air supply source S1 and the desiccant cylinder 11,
Alternatively, the air supply source S1 and the desiccant cylinder 12 are communicated with each other. On the contrary, in the valve closed state, the communication between both ports is cut off to cut off the air supply source S1 and the desiccant cylinder 11, or the air supply source S1 and the desiccant cylinder 12.

The discharge two-way valve 15 is provided in the pipe line 21a which connects the air inlet 11a of the desiccant cylinder 11 and the atmospheric region S3 of the third pressure P3 lower than the first pressure P1. Similarly, the discharge two-way valve 16 is provided on the pipe line 21b that connects the air inlet 12a of the desiccant cylinder 12 and the atmosphere region S3. The discharge two-way valves 15 and 16 have the same configuration and have two ports (not shown), and are switched between a valve open state and a valve close state by a drive signal supplied from the control device. Then, in the valve open state, the ports are communicated with each other so that the desiccant cylinder 11 and the atmospheric region S3 or the desiccant cylinder 12 and the atmospheric region S3 are communicated with each other. On the contrary, in the valve closed state, the communication between both ports is blocked, and the desiccant cylinder 11 and the atmospheric region S3 or the desiccant cylinder 12 and the atmospheric region S3 are blocked. The two-way valve for each discharge 15,
A silencer 22 is provided between 16 and the atmospheric region S3.

The check valve 17 is provided on the pipe line 20a between the air outlet 11b of the desiccant cylinder 11 and the dry air supply region S2. Also, check valve 18
Is the air outlet 1 of the desiccant cylinder 12 on the conduit 20b.
It is provided between 2b and the dry air supply area S2.
Each of the check valves 17 and 18 is a two-port check valve, which allows gas to pass in one direction and does not allow gas to pass in the opposite direction. Then, the supply of air from the desiccant cylinder 11 to the dry air supply area S2 or from the desiccant cylinder 12 to the dry air supply area S2 is allowed, and conversely, from the dry air supply area S2 to the desiccant cylinder 11 or Inflow of dry air from the dry air supply region S2 to the desiccant cylinder 12 side is prohibited.

The rapid filling valve 19 is provided for both desiccant cylinders 11 and 12.
Is provided on a conduit 23 (communication flow path) that communicates the air outlets 11b and 12b with each other. The quick filling valve 19 is a directional control valve that operates to open and close autonomously without being controlled by the outside, and is the pressure of the dry air between the air outlet 11b of the desiccant cylinder 11 and the check valve 17. Pressure Pa (first
Pressure) and the pressure Pb (second pressure) which is the pressure of the dry air between the air outlet 12b of the desiccant cylinder 12 and the check valve 18.
The opening / closing valve operates according to the pressure difference ΔP = Pa−Pb. When the magnitude | ΔP | of the pressure difference ΔP exceeds a preset boundary value PT, the valve is closed, and the air outlets 11b, 12 of the two desiccant cylinders 11, 12 are closed.
The communication between b is cut off. Then, the dry air is prevented from being supplied from the higher pressure side to the lower pressure side. On the other hand, when the magnitude | ΔP | of the pressure difference ΔP is less than or equal to the boundary value PT, the valve is opened, and the air outlets 11b and 12b of both desiccant cylinders 11 and 12 are communicated with each other. Then, the dry air is supplied from the higher pressure side to the lower pressure side.

Next, the structure of the quick fill valve 19 will be described in detail. As shown in FIGS. 1 and 2, the quick fill valve 19 includes a block-shaped housing 30, and a single flow passage 31 is provided in the housing 30, and both ends of the flow passage 31 are connected to the outside. There is. The housing 30 is formed by assembling a first block 32 and a second block 33, each of which has a part of a flow path 31 formed therein, with a packing 34 interposed therebetween. The flow channel 31 is formed so as to extend in a cylindrical shape,
Both ends in the central axis direction are opened on the outer surface of the housing 30, respectively. The housing 30 is provided with a first port 35 and a second port 36 for communicating with the flow path 31 from the outside.

Inside the housing 30, a flow passage 31 is provided with a first flow passage 37 on the side of the first port 35 and a second flow passage 37 on the side of the second port.
A valve chamber 39 that is divided into a flow path 38 is provided. The valve chamber 39 is formed in a columnar shape, and is arranged so that its central axis coincides with the central axis of the flow path 31. The valve chamber 39 is formed with annular valve seats 40a and 40b on each end wall in the direction of the central axis thereof. The first flow path 3
7 and half of the valve chamber 39 is formed in the first block 32, and the other half of the second flow path 38 and valve chamber 39 is in the second block 33.
Is formed in. The valve chamber 39 is sealed by the packing 34 provided between the blocks 32 and 33.

The valve chamber 39 is provided in the first flow path 37.
A valve element 41 that divides the side into the second flow path 38 side is provided. The valve body 41 is composed of a disc-shaped base portion 41a and a cylindrical fitting portion 41b extending in the coaxial line direction from the center portion of both surfaces in the central axis direction, and the central axis line of the flow passages 3a and 3b.
It is arranged so as to coincide with the central axes of 7, 38.
An annular packing 42 is fixed to each end surface of the base 41a of the valve body 41.

As shown in FIG. 4, when the packing 42 provided on the first flow path 37 side is in the first position where the packing 42 provided in the first flow path 37 abuts the valve seat 40a in an annular shape, the valve body 41 and the valve are closed. The communication with the chamber 39 is cut off. On the other hand, as shown in FIG.
The packing 42 provided on the second flow path 38 side is the valve seat 4
0b in the second position in which the second flow path 38
And the communication with the valve chamber 39 is cut off. The valve body 41 is displaceable between the first position and the second position.

Further, as shown in FIGS.
Is an orifice 43 that allows the first flow path 37 and the second flow path 38 to communicate with each other regardless of the displacement position of the valve body 41 in the valve chamber 39.
Are formed so as to penetrate the valve body 41 in the direction of the central axis thereof. The orifice 43 is provided with both desiccant cylinders 11 and 12.
The air outlets 11b and 12b are constantly communicated with each other via the pipe line 23. Then, between the air outlets 11b and 12b, the air is moved from the higher pressure side to the lower pressure side via the pipe line 23 and the flow rate thereof is limited.

Further, as shown in FIGS. 1 and 2, four supply passages 44 extending in the direction of the central axis of the valve chamber 39 are formed on the peripheral wall of the valve chamber 39 in a substantially semicircular cross section around the central axis. At equal angular intervals. Each supply channel 44 has a valve body 4
When 1 is at an intermediate position between the first position and the second position, the flow paths 37 and 38 are communicated with each other via the valve chamber 39. Each supply flow channel 44 is formed so as to communicate between the flow channels 37 and 38 with a flow channel cross-sectional area sufficiently larger than the flow channel cross-sectional area of only the orifice 43. On the other hand, when the valve body 41 is in the first position, the supply passages 44 are blocked by the valve body 41 so that the passages 37 and 38 communicate with each other. Further, when the valve body 41 is in the second position, the state in which the flow paths 37 and 38 are communicated with each other is blocked by the valve body 41.

In the first channel 37, the valve body 4 is provided in the valve chamber 39.
A first coil spring 45 for holding 1 is provided. The first coil spring 45 has the first flow path 37.
Of the valve body 41 between the fitting portion 37a provided on the first port 35 side and the fitting portion 41b of the valve body 41.
It is supported so as to urge it to the side.

Similarly, a second coil spring 46 for holding the valve body 41 in cooperation with the first coil spring 45 is provided in the second flow path 38. The second coil spring 46 has the same configuration as the first coil spring 45, and includes a fitting portion 38a provided on the second port 36 side of the second flow path 38, and a fitting portion 41b of the valve body 41. In between, the valve body 41 is supported so as to urge the valve body 41 toward the first flow path 37. That is, the coil springs 45 and 46 are provided so as to bias the valve body 41 so as to oppose each other in the displacement direction. In this embodiment, the first coil spring 45 and the second coil spring 46 form a valve position control means and an elastic holding means.

Each of the coil springs 45 and 46 has a pressure difference between the pressure of air in the first flow path 37 (that is, pressure Pa) and the pressure of air in the second flow path 38 (that is, pressure Pb). (In other words, elastically stretch and compress and deform alternately according to the pressure difference ΔP). When the pressure difference ΔP is within the preset boundary value PT, the valve element 41 is elastically held in the middle between the first position and the second position. On the other hand, the pressure difference Δ
When P exceeds the boundary value PT and the pressure Pa is larger than the pressure Pb, the pressure difference ΔP causes the second coil spring 46 to be compressed and deformed, and the first coil spring 45 to be expanded and deformed so that the valve element 41 is moved to the second position. Move to position and hold. On the contrary, when the pressure difference ΔP exceeds the boundary value PT and the pressure Pa is smaller than the pressure Pb, the pressure difference ΔP causes the first coil spring 45 to expand and deform, and the second coil spring 46 to compress and deform.
The valve body 41 is moved to and held at the first position. The boundary value PT is preset by the spring constants of the coil springs 45 and 46, the pressure receiving area of the valve body 41, and the like.

The rapid filling valve 19 thus constructed is
Pressure Pa of the dry air on the air outlet 11b side of the desiccant cylinder 11
And the pressure difference ΔP between the pressure Pb of the dry air on the air outlet 12b side of the desiccant cylinder 12 and the valve opening / closing operation autonomously. The rapid filling valve 19 connects the flow paths 37 and 38 through the orifice 43 regardless of the magnitude relationship between the pressure difference ΔP and the boundary value PT. Further, when the pressure difference ΔP exceeds the boundary value PT, as shown in FIG. 4 or 5, regardless of the magnitude relationship between the pressure Pa and the pressure Pb, both the flow passages 37, 38 via the respective supply flow passages 44. Cut off communication between them. On the other hand, when the pressure difference ΔP is less than or equal to the boundary value PT, as shown in FIG.
The two flow paths 37 and 38 are communicated with each other via the line 4.

Next, the dehumidifying device 1 configured as described above
The operation of 0 will be described. The control device supplies the raw material air to the desiccant cylinder 11 (or 12), which is one of the desiccant cylinders 11 and 12 on the adsorbing side, at every preset adsorption time T to generate dry air. The two-way valves 13 and 14 for supplying and the two-way valve 15 for discharging so as to regenerate the desiccant by releasing a part of the dry air through the other desiccant cylinder 12 (or 11) on the regenerating side. , 16 are controlled. Furthermore, the control device, at the time when the adsorption time T ends, the drying agent cylinder 11 (or 1) to which the raw material air is supplied.
2) is newly regenerated, and the regenerated desiccant tube 12 (or 1)
It is newly adsorbed to 1).

The details of this control will be described. As shown in FIG. 6, at one adsorption time T, the start time t
From 1 to time t2 when a certain adsorption / regeneration time Ta has elapsed, for example, the first supply control is performed in which the supply two-way valve is opened and the discharge two-way valve 16 is opened. By this first supply control, the air inlet 11a of the desiccant cylinder 11 on the adsorption side is communicated with the air supply source S1, and the air inlet 12a of the desiccant cylinder 12 on the regeneration side is communicated with the atmosphere region S3. In addition, in detail, a time T slightly shorter than the start time t1
At the time t3 delayed by b, the discharge two-way valve 16 is opened.

By the first supply control as described above, the dehumidifying device 10 causes the raw material air to be supplied from the air supply source S1 to the desiccant cylinder 11 on the adsorption side during the adsorption / regeneration time Ta, and the supplied raw material air The moisture is absorbed by the desiccant to generate dry air and the dry air is supplied to the dry air supply region S2.

On the other hand, the air outlet 1 of the desiccant cylinder 11 on the adsorption side
A part of the dry air discharged from 1b is charged with the quick filling valve 19
The desiccant is introduced from the air outlet 12b into the desiccant cylinder 12 on the regeneration side through the orifice 43 provided in the above, and the desiccant is regenerated and discharged from the air inlet 12a to the atmosphere region S3.

At this time, the pressure Pa (pressure on the adsorption side) of the dry air discharged from the air outlet 11b of the desiccant cylinder 11 on the adsorption side and the dry air introduced from the air outlet 12b of the desiccant cylinder 12 on the regeneration side. The pressure difference .DELTA.P (= Pa-Pb) from the pressure Pb (regeneration side pressure) exceeds the boundary value PT, and the quick filling valve 19 is closed as shown in FIG. The air outlets 11b and 12b of the desiccant cylinders 11 and 12 are communicated with each other only through the orifice 43.

More specifically, as shown in FIG. 6, during the adsorption / regeneration time Ta, the pressure Pa on the adsorption side is substantially the first pressure P.
The pressure Pb on the regeneration side becomes almost atmospheric pressure P0.
Therefore, the pressure difference ΔP exceeds the boundary value PT, and as shown in FIG.
It moves from the intermediate position to the second position against the elastic holding force of. Then, the communication between the flow paths 37 and 38 is cut off, and the quick filling valve 19 is closed. As a result, the air outlets 11 of both desiccant cylinders 11 and 12 via the respective supply flow paths 44.
The communication between b and 12b is cut off.

Therefore, during the adsorption / regeneration time Ta, the raw material air supplied from the air supply source S1 is made into dry air by the desiccant cylinder 11 on the adsorption side at this time and is supplied to the dry air supply region S2. On the other hand, from the air outlet 11b of the desiccant cylinder 11 to the air outlet 12b of the regeneration-side desiccant cylinder 12,
The dry air whose flow rate is restricted by the orifice 43 is supplied, and the desiccant in the desiccant cylinder 12 is regenerated.

Next, the controller controls the supply two-way valve 1 during the adsorption / switching time Tc set between the end time t2 of the adsorption / regeneration time Ta and the end time t4 of the adsorption time T.
The second supply control is performed in which the discharge two-way valve 16 is closed while the valve 3 is left open. By this second supply control, the air inlet 11a of the adsorption side desiccant cylinder 11 is communicated with the air supply source S1, and the air outlet 11b is also communicated with the dry air supply region S2, while the regeneration side desiccant cylinder 12 is kept.
The communication of the air inlet 12a with the atmosphere region S3 is blocked.

By such a second supply control, the dehumidifying device 10 supplies the raw material air from the air supply source S1 to the adsorbing-side desiccant cylinder 11 and generates the desiccant cylinder 11 during the adsorption / switching time Tc. The dry air to be supplied to the dry air supply region S
2 is still supplied, and the release of air from the regenerating side desiccant cylinder 12 to the atmosphere region S3 is stopped. Therefore, the pressure in the desiccant cylinder 12 on the regeneration side (which is substantially equal to the pressure Pb) is increased by the dry air supplied from the desiccant cylinder 11 on the adsorption side through the orifice 43.

At this time, the pressure Pa of the dry air discharged from the adsorption side desiccant cylinder 11 and the air outlet 12b side of the regeneration side desiccant cylinder 12 increased by the dry air supplied through the orifice 43. The pressure difference ΔP from the pressure Pb becomes the boundary value PT or less, and as shown in FIG.
9 is opened. Then, between the air outlets 11b and 12b of both desiccant cylinders 11 and 12, in addition to the orifice 43,
It communicates via each supply channel 44.

More specifically, as shown in FIG. 6, the pressure Pb on the side of the desiccant cylinder 12 rises from the time t2 when the adsorption / regeneration time Ta ends, and at a time t5 after a short delay, the desiccant cylinder 11
The pressure difference ΔP between the side pressure Pa and the pressure Pb becomes equal to or less than the boundary value Pb. For this reason, the valve body 41 becomes
The elastic holding force of 5, 46 gradually moves from the second position to the first position side, and the first flow path 37 and the second flow path 38 communicate with each other via the supply flow paths 44. As a result, the rapid filling valve 19 gradually changes from the closed state to the open state, and the two desiccant cylinders 11 and 12 are communicated with each other via the supply flow paths 44.

Therefore, during the adsorption / switching time Tc, the raw material air supplied from the air supply source S1 is made into dry air by the desiccant cylinder 11 on the adsorption side at this time and supplied to the dry air supply region S2. . On the other hand, from the air outlet 11b side of the desiccant tube 11 to the air outlet 12b of the regeneration side desiccant tube 12
In addition to the dry air whose flow rate is restricted to the side by the orifice 43, a large amount of dry air is supplied through each supply channel 44. As a result, the pressure in the regeneration-side desiccant cylinder 12 rapidly rises to the pressure in the adsorption-side desiccant cylinder 11.

Next, at the end time t4 of the adsorption time T, the control device newly sets the desiccant cylinder 12 on the regeneration side at the adsorption time T to the adsorption side, and the desiccant on the adsorption side as well. The third supply control is performed in which the cylinder 11 is newly set as the reproduction side and the first supply control is performed again. That is, the supply two-way valve 13 is closed and the supply two-way valve 14 is opened. Then, the desiccant cylinder 12 regenerated during the adsorption time T performs adsorption, while the adsorbent desiccant in the desiccant cylinder 11 is regenerated.

Next, the effects obtained by this embodiment described in detail above will be listed. (1) Air outlets 11b, 12 of both desiccant cylinders 11, 12
The rapid filling valve 19 provided on the pipe line 23 communicating between b
The opening / closing valve operates autonomously according to the pressure difference ΔP of the dry air in both the desiccant cylinders 11 and 12. Then, when the communication of the air outlet 12b of the desiccant cylinder 12 on the regeneration side to the atmosphere region S3 is cut off, the valve opens due to the pressure difference ΔP rising above the boundary value PT, and the desiccant cylinder 11 on the adsorption side is dried. A large amount of air is primarily supplied to the desiccant cylinder 12 side on the regeneration side.

Therefore, when switching between adsorption and regeneration without using a solenoid valve that requires external control,
A large amount of dry air can be temporarily supplied from the adsorption side desiccant cylinder 12 (12) side to the regeneration side desiccant cylinder 12 (11) side. As a result, the desiccant cylinder 12 on the regeneration side
Dry air is generated in the desiccant cylinder 11 (12) on the adsorption side where the time required from the completion of the regeneration of (11) until the internal pressure rises sufficiently is shortened and the adsorption efficiency decreases. It is possible to reduce the drying time of the generated dry air and suppress a state in which the dryness of the generated dry air is reduced. as a result,
It is possible to stably supply high-quality dry air without increasing the cost of the entire device including the control device for controlling the solenoid valves 13 to 16 and without lowering the reliability of the entire device. .

(2) The orifice 43 provided in the valve body 41 of the quick filling valve 19 communicates between the air outlets 11b and 12b of both desiccant cylinders 11 and 12. Therefore, it is necessary to provide a conduit (communication conduit) for communicating between the air outlets 11b, 12b of both desiccant cylinders 11, 12 via the orifice, separately from the conduit 23 provided with the quick filling valve 19. Absent. As a result, the configuration of the dehumidifying device 10 can be simplified.

In addition, bypassing the valve chamber 39, both flow paths 37, 3
The size of the housing is not increased as compared with the configuration in which the flow path is provided in the housing so as to communicate 8 and the orifice is provided in the flow path.

(3) A pair of coil springs 45, 4
6 is the pressure difference Δ between the pressure Pa on the adsorption side and the pressure Pb on the regeneration side.
The valve element 41 is elastically deformed according to P and holds the valve element 41 at a position corresponding to the pressure difference ΔP. As a result, the quick filling valve 19
Operates in the valve closed state or the valve open state depending on the pressure difference ΔP. Therefore, the quick filling valve 19 can be a simple mechanism, and its reliability can be further enhanced.

Next, embodiments other than the above embodiment will be listed. In the above-described embodiment, the valve body holding means of the quick filling valve 19 is one coil spring which is a spring member instead of the coil springs 45 and 46, and the coil spring is the first flow path 37. Fitting portion 37a and valve body 41 of
The respective end portions are fixed to the fitting portion 41b of FIG. And this coil spring is
When the pressure difference ΔP is less than or equal to the boundary value PT, the valve element 41 is elastically held at the intermediate position. When the pressure Pa on the adsorption side is higher than the pressure Pb on the regeneration side and the pressure difference ΔP exceeds the boundary value PT, the valve body 41 is elastically stretched and deformed to the second position.
Place in position. On the other hand, when the pressure Pb is larger than the pressure Pa and the pressure difference ΔP exceeds the boundary value PT, the valve body 41 is placed in the first position by elastically compressively deforming. In the case of such a configuration, (1) and (2) of the above-mentioned one embodiment
In addition to the effect described in (1), the quick filling valve 19 can have an even simpler configuration.

In the above-described embodiment, the pair of coil springs that bias the valve body so as to oppose each other in the displacement direction thereof is such that the valve body is placed on the side of the first flow path 37 instead of the coil springs 45 and 46. A first tension coil spring that pulls and urges,
Similarly, a second tension coil spring that pulls and urges the second flow path 38 may be used. Also in this case, the effects described in (1) to (3) of the above-described embodiment can be obtained.

In the above-described embodiment, the throttle bypasses the valve chamber 39 inside the housing 30 of the quick fill valve 19 instead of the orifice 43, and bypasses the first flow path 37 and the second flow path 3.
8 is a throttle channel provided so as to communicate with 8. Also in this case, (1) and (3) of the above-described embodiment
In addition to the effect described in (1), since it is not necessary to provide a conduit provided with an orifice, the dehumidifying device 10 can be simplified in configuration.

In the above-described embodiment, the throttle is a leakage flow passage provided so as to connect the flow passages 37 and 38 between the valve chamber 39 and the valve body 41 instead of the orifice 43. And Also in this case, (1),
In addition to the effect described in (3), since it is not necessary to provide a pipeline provided with an orifice, the configuration of the dehumidifying device 10 can be simplified.

In the above-described embodiment, the quick fill valve 19 is not provided with an orifice, and the orifice is provided on the supply pipeline provided in parallel with the pipeline where the quick fill valve 19 is provided. With this configuration, the effects described in (1) and (3) of the above-described embodiment can be obtained.

In the above-described embodiment, the configuration including the pair of supply two-way valves 13 and 14 and the pair of discharge electromagnetic two-way valves 15 and 16 from the air supply source S1 is different from the conventional one. A three-way check valve for switching the raw material air supplied to the desiccant cylinders 11 and 12, and a pair of electromagnetic two-way valves for communicating the air inlet of the desiccant cylinders 11 and 12 on the regeneration side with the atmosphere. It is configured with a valve. Even with such a configuration, the effects described in (1) to (3) of the embodiment can be obtained.

In the above-described embodiment, the configuration including the pair of two-way check valves 17 and 18 is a three-way check valve as in the conventional case. Even with such a configuration, the effects described in (1) to (3) of the embodiment can be obtained.

In the one embodiment, the communication flow path may be a flow path provided inside the housing of the dehumidification device main body, instead of the conduit line 23. The directional control valve is not limited to the above-described embodiment, as long as the directional control valve autonomously opens and closes by the pressure difference ΔP and connects or disconnects the flow path communicating between the adsorption vessels.

Each of the pair of desiccant cylinders of the dehumidifier may have a plurality of desiccant cylinders connected in parallel. The adsorption / separation device for carrying out the present invention is not limited to the dehumidification device 10, and is a device that adsorbs and separates nitrogen from raw material air to generate oxygen-enriched air, and adsorbs and separates oxygen from raw material air to generate nitrogen-enriched air. It may be implemented in an apparatus for producing, an apparatus for producing purified hydrogen by adsorbing and separating impurities from raw material hydrogen.

Hereinafter, the technical idea understood from each of the above-mentioned embodiments will be described together with its effects. (1) In the invention according to claim 3, the directional control valve is characterized in that the elastic holding means includes a spring member (first coil spring 45, second coil spring 46). With such a configuration, the directional control valve can be made even simpler.

(2) In the invention according to any one of claims 1 to 4, a directional control valve is provided, which is provided with a throttling flow path which constantly connects the both ports. According to such a configuration, in the adsorption separation device,
The flow path provided with the directional control valve can be used as a communication flow path, and it is not necessary to provide a flow path different from the communication flow path, so that the configuration can be simplified.

(3) In the invention according to any one of claims 6 to 8, the raw material gas is raw material air, and the product gas is dry air in which water is adsorbed from the raw material air. An adsorption separation device characterized by being present.

(4) A pair of adsorption containers, each containing an adsorbent and provided with a gas inlet and a gas outlet, and a gas inlet of the adsorption side adsorption container for adsorbing in both adsorption containers Gas supply source (air supply source S
1), and its gas outlet is communicated with a product supply region (dry air supply region S2) having a second pressure lower than the first pressure, and at the same time, a regeneration side adsorption container for performing regeneration in both adsorption containers Of the gas supply port of the first gas supply device is connected to a gas discharge region (atmosphere region S3) having a third pressure lower than the first pressure, and the gas outlet is disconnected from the product supply region; From the control state in 1 supply control, the gas inlet of the adsorption side adsorption container is made to communicate with the gas supply source, the gas outlet thereof is made to communicate with the product supply region, and the gas outlet of the regeneration side adsorption container is made to the product supply region. From the second supply control in which the gas inlet of the regeneration side adsorption container is disconnected from the gas release region while the communication is blocked, and the control state in the second supply control, the regeneration side adsorption container is newly adsorbed on the intake side. As a container, in front Third supply control means for performing the supply control (supplying solenoid two-way valve to again perform the first supply control as a new reproduction side adsorption vessel the adsorption-side adsorbent vessel 1
3,14, electromagnetic two-way valve for discharge 15,16, check valve 1
7 and 18) and a restriction (orifice 43) provided on a communication channel that communicates between the gas outlets of the adsorption vessels, a flow that communicates between the gas outlets of the adsorption vessels. A directional control valve (quick filling valve 19) that is provided in parallel with the throttle on the road and adjusts the communication state between the gas outlets according to the pressure difference between the gas outlets is provided. At the time of the first supply control, the adsorption side pressure (Pa or Pb) of the product gas discharged from the gas outlet of the adsorption side adsorption container and the regeneration side pressure of the product gas introduced into the regeneration side adsorption container from the gas outlet. (Pb or P
Due to the pressure difference from a), the communication between the gas outlets of both adsorption vessels is cut off, and during the second supply control, the regeneration side pressure and adsorption increased by the product gas supplied from the adsorption side adsorption vessel through the throttle. An adsorption separation device, characterized in that the gas outlets of both adsorption vessels are communicated with each other by a pressure difference from the side pressure.

[0078]

According to the invention described in claims 1 to 5, the gas pressure region operates by a pressure difference between two gas pressure regions which can communicate with each other, and when the pressure difference exceeds a certain boundary value. Direction control that allows the gas to move from the higher pressure side to the lower pressure side by blocking the communication between them and prohibiting the movement of gas, and when the pressure difference is below the boundary value A valve can be provided.

According to the sixth to eighth aspects of the invention, in the adsorption / separation device equipped with a pair of adsorption vessels for alternately performing adsorption and regeneration, a solenoid valve that requires external control. It is possible to temporarily supply a large amount of a part of the product gas from the adsorption container side on the adsorption side to the adsorption container side on the regeneration side at the time of switching between adsorption and regeneration without using.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing a rapid filling valve of the present embodiment.

2A is a schematic cross-sectional view taken along the line AA in FIG.
(B) is a similar BB line schematic sectional drawing.

FIG. 3 is a schematic configuration diagram showing a dehumidifying device.

FIG. 4 is a schematic cross-sectional view showing a quick-fill valve in which a valve body is arranged in a first position.

FIG. 5 is a schematic cross-sectional view showing a quick-fill valve in which a valve body is arranged in a second position.

FIG. 6 is a time chart showing the operation timing of each electromagnetic two-way valve and the quick filling valve.

FIG. 7 is a schematic configuration diagram showing a conventional adsorption separation device.

[Explanation of symbols]

Reference numeral 10 ... Dehumidifying device as adsorption separation device, 11 ... Desiccant container as adsorption container, 12 ... Desiccant container, 11a, 1
2a ... Air inlet as gas inlet, 11b, 12b ... Air outlet as gas outlet, 13, 14 ... Supply two-way valve constituting supply control means, 15, 16 ... Release same two-way valve, 17 , 18 ... Similarly, a check valve, 19 ... A directional control valve and a quick filling valve as a communication state control means, 2
3 ... Pipe as a communication flow path, 31 ... Flow path, 35 ... First port, 36 ... Second port, 39 ... Valve chamber, 41 ... Valve body, 4
3 ... Orifice as throttle, 44 ... Supply channel, 45 ...
A first coil spring as a spring member constituting the valve position control means and the elastic holding means, 46 ... Similarly a second coil spring, Pa ... First pressure, adsorption side or regeneration side pressure,
Pb ... second pressure, adsorption side or regeneration side pressure, PT ... boundary value, S1 ... air supply source as gas supply source, S2 ... dry air supply area as product supply area, S3 ... atmosphere area as gas release area , ΔP ... pressure difference.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3H060 AA04 BB08 CC06 CC22 DC05                       DD02 DD13 HH06 HH20                 4D012 CA01 CA05 CB16 CD07 CE01                       CF03 CG01 CJ03                 4D052 AA01 CD01 DA02 DB01 GA01                       GB04 GB08 HA02

Claims (8)

[Claims] 1. A pressure, comprising a first port and a second port, respectively, to which a fluid is supplied, and a first pressure of the fluid supplied to the first port and a second pressure of the fluid supplied to the second port. A directional control valve characterized in that when the difference is within a predetermined boundary value, the ports are communicated with each other, and when the pressure difference exceeds the boundary value, communication between the ports is blocked. 2. A valve chamber provided on a flow path communicating between the both ports, and dividing the valve chamber into a first port side and a second port side, and connecting the first port and the valve chamber to each other. A valve body displaceable between a first position for shutting off and a second position for shutting off communication between the second port and the valve chamber; and the valve body is at an intermediate position between the first position and the second position. Occasionally, the two ports communicate with each other via the valve chamber, the communication between the first port and the valve chamber is blocked by the valve body when the valve body is in the first position, and the second port when the valve body is in the second position. And a supply passage in which communication between the valve chamber and the valve chamber is blocked by the valve body, and when the pressure difference is within a certain boundary value, the valve body is held at an intermediate position between the first position and the second position, First
When the pressure is larger than the second pressure by the pressure difference exceeding the boundary value, the valve body is held in the second position, and when the second pressure is larger than the first pressure by the pressure difference exceeding the boundary value. The directional control valve according to claim 1, further comprising: a valve position control unit that holds the valve element in the first position. 3. The valve position control means elastically holds the valve body between the first position and the second position, and changes the position holding the valve body according to the pressure difference. The directional control valve according to claim 2, wherein the directional control valve is an elastic holding means. 4. The directional control valve according to claim 3, wherein the elastic holding means is a pair of coil springs that bias the valve body so as to face each other in the displacement direction. 5. The valve body according to claim 2, wherein the valve body is provided with an orifice that communicates between the two ports regardless of the position of the valve body. Directional control valve. 6. A pair of adsorption containers each containing an adsorbent and having a gas inlet and a gas outlet are provided, and a throttle is provided on a communication flow path that communicates between the gas outlets of both adsorption containers. The raw material gas is supplied to the gas inlet of either one of the adsorption side adsorption containers and the product fluid discharged from the gas outlet is supplied to the outside, and a part of the product fluid is supplied to the other through the communication flow path. The regenerated fluid discharged from the gas inlet of the regeneration side adsorption container and discharged from the gas inlet is discharged to the outside, and the regeneration fluid discharged from the gas inlet of the regeneration side adsorption container is stopped to the outside. After that, in the adsorption separation device that switches the adsorption side adsorption vessel and the regeneration side adsorption vessel, it is provided in parallel with the throttle on the flow path that communicates between the gas outlets of the both adsorption vessels, and the pressure difference between the both gas outlets is According to The communication state control means for controlling the communication state between both gas outlets is provided, and the communication state control means is a pressure between both gas outlets when the regenerated fluid is discharged from the gas inlet of the regeneration side adsorption container to the outside. The communication between the two gas outlets is blocked by the difference,
Further, the adsorption separation device is characterized in that the two gas outlets are communicated with each other by the pressure difference between the two gas outlets in a state where the release of the regenerated fluid discharged from the gas outlet of the regeneration side adsorption container is stopped. . 7. The adsorption separation apparatus according to claim 6, wherein the communication state control means is the directional control valve according to any one of claims 1 to 4. 8. The communication state control means is the directional control valve according to claim 5, wherein the directional control valve is provided on the communication flow path, and the throttle is the orifice. The adsorption / separation device according to claim 6.