JP2003083916A - X-ray imaging apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an image due to the backscattering of extremely feeble X-rays. SOLUTION: An X-ray detector 52 at the X-ray imaging apparatus 50 is arranged on the same side as an X-ray source 38 with reference to an inspection object 34, and scattered X-rays by the inspection object 34 are detected. In a detection unit at the detector 52, detection transmitters are arranged in a matrix shape, and they are driven by an operation control unit 56 on the basis of two-dimensional Hadamard matrixes. A data readout part 62 at a signal processing part 60 reads out an output signal of the detector 52 in synchronization with a transistor drive signal of the part 56 so as to be output to an image computing part 68 at an image creation part 66. The part 68 writes input data into a memory 70 together with information on the scanning angle of the detector 52 from the part 56. The data written into the memory 70 is processed to inverse Hadamard transform, and an image due to the scattered X-rays of the inspection object 34 is found so as to be displayed on a display device 80.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for detecting and imaging X-rays, and more particularly, as in Compton scattering, etc.
The present invention relates to an X-ray imaging device suitable for obtaining an image based on extremely weak X-rays.

[0002]

2. Description of the Related Art X-rays are widely used in fields such as medical care and industrial measurement. Since X-rays have high penetrability for substances and scattered X-rays are extremely weak and difficult to detect, generally, transmitted X-rays are used, and the internal structure of the inspection object (inspection target) is used. And internal defects are detected. FIG. 9 is a schematic diagram showing a main part of a conventional X-ray imaging apparatus for inspecting electronic components using X-rays.

In FIG. 9, an X-ray imaging apparatus 10 is provided with an inspection table 14 for arranging an inspection object 12 which is an electronic component in an inspection room (not shown).
The inspection object 12 can be arranged on the inspection table 14 by the reference numeral 6. Below the inspection table 14,
Micro-focus type X-ray source 18 is installed,
The inspection target 12 can be irradiated with X-rays 22 through the inspection table 14.

An image sensor 20 called an X-ray image intensifier is provided above the inspection table 14 so as to face the X-ray source 18, and the inspection target 1
The X-ray 22 that has passed through 2 enters. The image sensor 20 is configured to convert the difference in X-ray dose transmitted through the inspection object 12 into visible light.
The visible light output by is captured by an imaging device such as the CCD camera 24, and an image (video) is displayed on a monitor screen (not shown).
Is displayed as.

Further, the X-ray source 18 and the image sensor 20 can be moved up and down as indicated by arrows 26 and 28, and a clear image can be obtained by moving them up and down. Further, by operating the manipulator 16, the direction of the inspection target 12 can be changed and the inspection target 12 can be inspected from all directions.

[0006]

As described above, the conventional general X-ray inspection apparatus or X-ray imaging apparatus is the inspection target 1
2, the X-ray source 18 is arranged on one side, and the image sensor 20 serving as an X detection section is arranged on the other side of the inspection object 12. Therefore, when the inspection target is a large structure, such as an airplane wing, a device for sandwiching the large structure between the X-ray source and the X-ray detection unit or for moving the two in synchronization is required. Need a special factory for. In addition, for the wings of airplanes, inspection of the parts near the surface of the wing, such as the bonding state of the duralumin covering the surface of the wing and the beam with the honeycomb structure that supports it, and the detection of cracks due to metal fatigue of the duralumin. Is the main and X
Defects may not be detected in the structure in which the blade is sandwiched between the radiation source and the X-ray detection unit. For this reason, an X-ray inspection apparatus and an X-ray imaging apparatus in which the X-ray source and the X-ray detection unit are arranged on one side of the inspection target and which can detect extremely weak backscattering (Compton scattering) of X-rays are desired. .

The present invention has been made in view of the above demands, and an object thereof is to obtain an image due to extremely weak backscattering of X-rays. Further, the present invention is
The purpose is to make it possible to easily inspect even large structures. Then, the present invention aims to obtain a three-dimensional image.

[0008]

In order to achieve the above object, an X-ray imaging apparatus according to the present invention is arranged toward an object to be inspected and has a plurality of X-ray transmitting portions and is substantially perpendicular to the surface. A collimator portion that transmits X-rays that are incident on, a scintillator portion that is provided on the back side of the collimator portion and that generates electrons by the incidence of X-rays, and that is provided corresponding to the X-ray transparent portion of the collimator portion, An amplification unit including a plurality of electronic amplification units for amplifying electrons generated by the scintillator unit, and a plurality of electrons provided corresponding to the electronic amplification unit of the amplification unit and detecting electrons amplified by the electronic amplification unit A detection unit including a detection unit, an operation control unit that operates the plurality of electronic detection units of the detection unit based on a quadrature modulation pattern, a control signal of the operation control unit, and an output signal of the electronic detection unit. Based on the bets, it is characterized by having, a video operation unit for obtaining an image of a different portion of transmittance for the X-ray of said object.

It is desirable that the collimator portion, the scintillator portion, the amplification unit and the detection unit are integrally formed and are rotatable about two axes which are orthogonal to each other. Further, the X-ray source that irradiates the inspection target with X-rays is preferably formed so as to be capable of emitting linear X-rays.

[0010]

According to the X-ray imaging apparatus of the present invention having the above-mentioned structure, a plurality of electronic detectors constituting the detecting unit are
By operating with a quadrature modulation pattern (for example, modulation based on a Hadamard matrix), incoming electrons based on scattered X-rays can be detected more efficiently than when detection signals are obtained from individual electron detection units, and detection efficiency is significantly improved. It is possible to easily obtain an image based on X-rays due to weak backscattering. Moreover, since an image based on the backscattering of X-rays can be obtained, the X-ray source and the X-ray detection units such as the collimator unit, the scintillator unit, the amplification unit, and the detection unit for detecting the X-rays are to be inspected. On the other hand, they can be arranged on the same side, and it becomes possible to easily inspect large structures such as airplane wings.

If the collimator section, the scintillator section, the amplification unit, and the detection unit are integrated and are rotatable about two orthogonal axes, a three-dimensional image can be easily obtained from the two-dimensionally obtained data. it can. In addition, if the X-ray source that irradiates the inspection target with X-rays is made to be able to emit linear X-rays, when a user wants to view an image of a cross-section of the inspection target, by irradiating a linear X-ray, The process of obtaining an image becomes easy.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of an X-ray imaging apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic block diagram of an X-ray imaging apparatus according to an embodiment of the present invention. In FIG. 1, an X-ray imaging device 30
Has an X-ray detection unit 50 and a signal processing unit 60, and the X-ray detection unit 50 detects X-rays scattered by the inspection target 34 arranged on the stage 32.

The X-ray detector 50 includes an X-ray detector 52, the details of which will be described later, a drive unit 54 for rotating (rotating) the X-ray detector 52 around two axes orthogonal to each other, and an X-ray detector. An operation control unit 56 that controls 52 and the drive unit 54 is provided. Then, in the case of this embodiment, the X-ray detector 52 is
The internal defect 40, which is arranged on the same side as the X-ray source 38 that irradiates the inspection target 34 with the X-rays 36 and is directed to the inspection target 34 (see FIG. 2), exists inside the inspection target 34.
X-rays (scattered X-rays) 42 scattered by, for example, enter. Further, the X-ray detector 52 is formed so as to be rotatable about two orthogonal axes, the X axis and the Y axis, as shown by arrows 57 and 59 in FIG. The drive unit 54, which receives the control signal, causes the drive unit 54 to rotate about the X axis and the Y axis. That is, the X-ray detector 52 is capable of scanning around the X axis and the Y axis.

The reference numeral 38a shown in FIG. 2 indicates that the X-ray source 38 emits a narrow line-shaped (or band-shaped) X-ray when it is desired to see only a cross section of the inspection object 34. It is an adapter that is attached to the X-ray emitting unit. This X-ray source 38
In the case of the embodiment, is of a micro focus type so that an enlarged image can be obtained.

The signal processing section 60 receives a data reading section 62 to which an output signal of the X-ray detector 52 is input, and an analog / digital converting section (A / D converting section) 64 provided on the output side of the data reading section 62. And an image creation unit 66 to which the output of the A / D conversion unit 64 is input. Output reading unit 62
Is designed so that an operation control signal given to the X detector 52 by the operation control unit 56 of the X-ray detector 50 is input, and the output signal of the X-ray detector 52 is read in synchronization with this operation control signal. It has become.

The image creating section 66 includes an image calculating section 68 and a memory 70. Then, the video calculation unit 68
The output signal of the A / D converter 64 and the X-ray detector 50
The scanning angle signal of the X-ray detector 52 output from the operation control unit 56 is input. In addition, the video calculation unit 6
As will be described later in detail, reference numeral 8 writes the output signal of the A / D conversion unit 64 in the memory 70 in association with the scanning angle signal from the operation control unit 56, and the X-ray is generated based on the data written in the memory 70. Scattered X-rays 4 by the inspection object 34 of 36
The image by 2 is obtained and output to the display device 80, the printer 82, the external storage device 84 such as a hard disk.

The X-ray detector 52 of the X-ray detector 50 is shown in FIG.
As shown in FIG. 5, it comprises an X-ray collimator section 90, a scintillator section 92, an amplification unit 94, and a detection unit 96. Then, these X-ray collimator 9
0, the scintillator section 92, the amplification unit 94, and the detection unit 96 are integrated in a laminated state as shown in FIG. 4, and are enclosed in a vacuum container 97.

The X-ray collimating portion 90 is formed of a metal capable of blocking X-rays and has a plurality of fine holes 90a arranged in a matrix which serves as an X-ray transmitting portion.
That is, in the case of the embodiment, the X-ray collimator 90 is
The metal foil is etched to provide a plurality of fine holes 90a having a diameter of about 5 to 15 μm, and a plurality of metal foils having the fine holes 90a are laminated so as to shield X-rays and have a thickness of 1 to 1.
It is formed as a laminated body 90b of about 2 cm. Then, the X-ray collimator 90 has its incident side (the upper side in FIG. 3) directed toward the inspection target 34 and receives the scattered X-rays 42. Of the scattered X-rays 42 that enter the X-ray collimator 90, only those that enter the X-ray collimator 90 almost perpendicularly to the surface are the fine holes 90.
The X-ray collimator 90 is transmitted through a.

The scintillator section 92 is disposed on the back side of the X-ray collimator section 90 (lower side in FIG. 3) and emits fluorescence when the scattered X-rays 42 that have passed through the X-ray collimator section 90 enter. 92a and this scintillator 9
It has a structure in which a photoelectric conversion unit 92b that generates electrons (photoelectrons) 100 when the fluorescence emitted by 2a enters is laminated.

The amplifying unit 94 is a so-called microchannel plate, and is an integrated unit of a plurality of microcapillaries (microchannels) 94a provided corresponding to the fine holes 90a provided in the X-ray collimating section 90. As shown in FIG. 5, the microcapillary 94a includes, for example, an accelerating tube 102 having a diameter of 6 μm and a length of about 1 cm, and a cathode 104 and an anode 106 provided at both ends of the accelerating tube 102. In the microcapillary 94a, the cathode 104 and the anode 106 are connected to the DC power supply 108, and 1000 to 10
A high DC voltage of 000 V is applied to the cathode 104 and the anode 10.
And 6 are applied. Therefore, the electrons 100 that have entered the accelerating tube 102 from the cathode 104 side are accelerated by the high voltage applied between the cathode 104 and the anode 106, and generate secondary electrons each time they collide with the inner wall of the accelerating tube 102. As a result, the numbers are amplified like an avalanche, and the amplified electrons 110
Is emitted from the anode 106 side.

The detection unit 96 is as shown in FIG. That is, in the embodiment, the detection unit 96 includes a plurality of detection transistors 112 (112 _ij ) formed of MOS transistors and a plurality of read transistors 114 (114 a, 1 a formed of MOS transistors).
14b, 114c ......... ) And. Detection transistor 112 _ij (i = 1, 2, 3, ..., N, j =
.. n) are arranged in a matrix in a number of n × n corresponding to the microcapillaries 94a forming the amplification unit 94. Further, n read transistors 114 are provided corresponding to each column of the detection transistors 112 arranged in a matrix.

The detection transistor 112 has a gate control line 116 (116a, 116b, 11) for each row.
6c, .........) and these gate control lines 11
6 is a gate switching circuit 11 which constitutes the operation control unit 56.
It is connected to 8. Further, the detection transistor 112 is
The drain has data lines 120 (120a, 12a) for each column.
0b, 120c, ...), and is connected to the source of the read transistor 114. The drain of each reading transistor 114 is connected to the data reading unit 62 of the signal processing unit 60, and the gate of each reading transistor 122 corresponds to the reading line 122 (122a, 122b, 12).
2c, .........). Further, the source of the detection transistor 112 is connected to the detection electrode 124 provided facing the output side of the microcapillary 94a.

Each read line 122 is connected to a read line switching circuit 126 which constitutes the operation control section 56. The operation control unit 56 includes a gate switching circuit 118, a read line switching circuit 126, a switching control unit 128, and the like. Then, the switching control unit 128 generates a switching control signal based on a binary quadrature modulation pattern (orthogonal modulation pattern), and the switching control signal is generated by the gate switching circuit 118 and the read line switching circuit 126, as will be described in detail later. And each of the detection transistors 112 is switched based on the quadrature modulation pattern.

The operation of the X-ray imaging apparatus 30 according to the embodiment thus configured is as follows. X-ray detector 5
The 0 operation control unit 56 gives a reset signal to the drive unit 54 to set the orientation of the X-ray detector 52 to the initial position. On the other hand, the X-ray source 38 irradiates the inspection target 34 with X-rays 36. Most of the X-rays 36 radiated to the inspection object 34 are transmitted through the inspection object 34, but some of them are scattered by the inspection object 34 and defects 40 inside thereof, and the X-rays 36 are incident as scattered X-rays 42. Reflected to the side. This scattered X-ray 42
Is the X of the X-ray detector 52 that constitutes the X-ray detector 50.
It is incident on the line collimator 90.

The X-ray collimating section 90 functions as an X-ray transmitting section.
Only the scattered X-rays 42 that are substantially parallel to the fine holes 90a
Make it transparent. Scattered X-rays transmitted through the X-ray collimator 90
42 is incident on the scintillator unit 92, and the scintillator 9
2a is caused to generate fluorescence, and this fluorescence is converted into a photoelectron conversion section 92b.
Are converted into electrons 100 by. This electron 100
Microcapillary configuring amplification unit 94
The light enters the amplification tube 102 of 94a. Micro capra
The lead 94a is a high voltage applied to both ends of the amplification tube 102.
The number of injected electrons 100 is accelerated by the piezoelectric DC voltage,
10⁶-10 ⁷Amplify about twice to make amplified electrons 110
Output. This amplification electron 110 is detected by the detection unit 96.
Incident on the detection electrode 124 of the
It Therefore, the detection transistor 112 is sequentially switched.
By operating, which of the detection transistors 112
It is necessary to know whether the amplified electrons 110 have entered the detection electrode 124.
You can

By the way, most of the X-rays 36 applied to the inspection object 34 pass through the inspection object 34. Therefore, the scattered X-rays 42 from the inspection target 34 are very small and extremely weak. Therefore, the electrons 100 rarely enter the respective microcapillaries 94a of the detection unit 94. That is, the amplified electrons 110 rarely enter the respective detection electrodes 124 of the detection unit 96. Therefore, the gate 1 channel (one gate control line 11
6), 1 read channel (1 read line 12
When selecting 2) and reading the data, the pulses are output only sparsely. Moreover, the microcapillary 9
If the number of 4a is, for example, 10,000 to 1,000,000, a great read time is required.

Therefore, in this embodiment, a plurality of gate control lines 116 and a plurality of read lines 122 are selected to drive a plurality of detection transistors 112 at the same time. As a result, more detection pulses (output pulses) can be obtained than when the detection transistors 112 are individually driven. However, as it is, it is not possible to know which detection transistor 112 output is the detection pulse. That is, it is not possible to specify at which position of the X-ray collimator 90 the scattered X-ray 42 has passed through the fine hole 90 a and at which position of the amplification unit 94 the amplified microcapillary 94 a has amplified the scattered X-ray 42. Therefore, in this embodiment, the drive signal based on the quadrature modulation pattern is generated to drive the detection transistor 112.

As the quadrature modulation pattern, a modulation pattern corresponding to each row of the Hadamard matrix, which is a binary quadrature modulation pattern, is suitable. The elements of the Hadamard matrix are "+
It is a symmetric matrix composed of "1" and "-1" and having the same elements at symmetrical positions along the diagonal line. For example, if you write concretely the first-order Hadamard matrix H ⁽¹⁾ ,

[Equation 1] become that way. Also, the quadratic and cubic Hadamard matrix H
⁽²⁾ and H ⁽³⁾ can be written as Equations 2 and 3.

[Equation 2]

[Equation 3] That is, the Hadamard matrix can be generally defined by the following recurrence formula.

[Equation 4] However, in Formula 4, k represents an order.

Therefore, in the embodiment, the detection unit 50
The switching control unit 128 that constitutes the operation control unit 56 of
A switching operation signal of the detection transistor 112 is created based on the Hadamard matrix corresponding to “+1” when the switch is turned on and “−1” when the switch is turned off, and the gate switching circuit 118 is used as the switching control signal. And the read line switching circuit 126. For example, when the detection unit 96 is composed of 8 × 8 detection transistors 112, the operation signal of the detection transistor 112 is as shown in FIG.
become that way. In FIG. 7, the shaded portion corresponds to +1 which is turned on when an operating voltage is applied, and the white portion corresponds to -1 which is off.

That is, the switching control unit 128 supplies a switching control signal according to the Hadamard matrix to the gate switching circuit 118, and switches the gate voltage according to the Hadamard matrix to the gate of each detection transistor 112 via the gate control line 116 and applies the gate voltage. Read line switching circuit 12
A switching signal based on the Hadamard matrix is given to 6 and the read transistor 114 is switched and operated according to the Hadamard matrix. For example, if the detection transistor 112 is 8
In the case of × 8, the switching control unit 128 generates the eight modulation modes shown in the lower part of FIG. 7 based on the Hadamard matrix. Then, first, the 0th-order operation signal (switching signal) shown on the lower right side of FIG. 7 is given to the gate switching circuit 118,
All the gate control lines 116 are connected to the gate power supply, the gate voltage is applied to the gates of all the detection transistors 112, and the read line switching circuit 126 is sequentially supplied with 0th to 7th switching signals on the lower left side of FIG. Then, the read transistor 114 is sequentially switched and driven based on the Hadamard matrix.

Then, when the switching from the 0th order to the 7th order to the read transistor 114 is completed, the switching control section 128 gives a primary drive signal to the gate switching circuit 118, and the first row, the third row. A voltage is applied to the gate of the detection transistor 112 connected to the gate control line 116 in each of the rows, the fifth row, and the seventh row, and in this state, the read transistor 1
14 is switched from 0th order to 7th order. In this way
The switching controller 128 switches the read transistor 114 from the 0th order to the 7th order each time the voltage applied to the gate of the detection transistor 112 is sequentially switched from the 0th order to the 7th order.
Switch to next. As a result, the detection transistor 11
With respect to No. 2, the gate voltage is always applied to half of the data lines, and half of the data lines 122 are turned on, and the output signal from the detection transistor 112 of 1/4 of the whole is input to the data reading unit 62 of the signal processing unit 60.

The data reading section 62 reads the output signal of the detection transistor 112 in synchronization with the transistor operation switching signal output from the operation control section 56 of the X-ray detection section 50. Then, the data reading unit 62 converts the current input as the output signal of the detection transistor 112 into a voltage, amplifies it, and outputs an output pulse 130 as shown in the lower portion of FIG. 6 as an analog voltage. This output pulse 130
Is input to the A / D conversion unit 64 of the signal processing unit 60, and is converted into a digital signal by the A / D conversion unit 64, as shown in FIG.

The digital data output from the A / D conversion unit 64 is input to the video calculation unit 68 of the video creation unit 66.
The image calculation unit 68 calculates the A / A based on the orientation information of the X-ray detector 52 output from the operation control unit 56 of the X-ray detection unit 50.
The detection data input from the D conversion unit 64, that is, the incident direction of the scattered X-rays 42 arriving at the collimating unit 90 of the X-ray detector 52 is obtained and written in the memory 70 together with the binary modulation information.

In this way, the image calculation unit 68 is configured to rotate the X-ray detector 52 around the X-axis and the Y-axis, and when the scanning of the predetermined range by the X-ray detector 52 is completed, the memory 70. Read the data written in
The X-ray image of No. 4 is calculated and output to the display device 80 or the like.

That is, when the gate of the detection transistor 112 is sequentially switched based on the Hadamard matrix to apply a voltage and the read transistor 114 is sequentially switched and operated according to the Hadamard matrix, the pulse 130 (hadamard) output from the data reading unit 62 is output. The detection transistor 112 that has output the pulse 130 can be obtained by performing Hadamard inverse transformation and demodulation from (data modulated based on the matrix). That is, when considering a frequency data matrix having the gate control lines 116 as rows and the read lines 122 (data lines 120) as columns, the Hadamard inverse transformation (two-dimensional Hadamard inverse transformation) is performed in the row direction and the column direction.
By performing the above, the detection transistor 112 can be specified by the combination of one gate control line 116 and one read line 122 arbitrarily selected.

Therefore, the image calculation unit 68 can obtain the detection transistor 112 into which the amplified electron 110 is incident by performing the Hadamard inverse transformation on the data stored in the memory 70, and the electron 10 is input. It is possible to specify the position of the microcapillary 94a and the position of the fine hole 90a of the X-ray collimator 90 on which the scattered X-ray 42 is incident. Further, the image calculation unit 68 obtains a three-dimensional position of the internal defect 40 or the like existing in the inspection target 34 based on the scanning angle information of the X-ray detector 52 from the operation control unit 56 of the X-ray detection unit 50. , As a video (image) on the display device 80.

That is, as shown in FIG.
When the line detector 52 is rotated around the Y-axis as indicated by arrow 132, the X-ray direction vector (the output signal of the detection unit 96) changes. Then, move the X-ray detector 52 to the arrow 1
When rotated (rotated) like 32, the X-ray collimator 9
The receiving system consisting of parallel lines formed by 0 rotates,
The scattering position of the X-ray 36 in space can be determined as the intersection of the straight lines. Therefore, as shown in FIG. 2, a three-dimensional image can be synthesized by rotating the X-ray detector 52 around the orthogonal X axis and Y axis.

In the X-ray image obtained by the image calculation unit 68 in this way, for example, when the X-ray scattering coefficient of the internal defect 40 shown in FIG. If the X-ray transmissivity is larger than the inspection target 34 and the scattering coefficient is smaller than the inspection target 34, such as a hollow image, the internal defect 40 is displayed on the display device 80 as a lighter color image than the inspection target 34. It

As described above, in the X-ray imaging apparatus 30 according to the embodiment, the n × n detection transistors 112 are turned on / off according to the two-dimensional Hadamard matrix to perform the quadrature modulation. receiving the scattered X-rays 42 coming from the read output signal efficiently, can be transferred, in principle efficiency can be n ^2/2-fold increase. Therefore, an image based on extremely weak X-ray Compton scattering can be obtained at high speed.

In the embodiment, the three-dimensional image can be obtained from the two-dimensionally obtained data by rotating the X-ray detector 52 around the two orthogonal axes. Moreover, since an image based on backscattering of X-rays is obtained, the X-ray source 38 and the X-ray detector 52 of the X-ray detection unit 50 can be arranged on the same side with respect to the inspection target 34.
It becomes possible to easily inspect large structures such as airplane wings.

When it is desired to see the depth direction of a cross section of the inspection object 34, the adapter 38b shown in FIG. 2 is attached to the X-ray emission part of the X-ray source 38 to inspect a linear X-ray. Target 3
Irradiate 4 Thereby, the calculation for obtaining the image by the image calculation unit 68 can be simplified.

In the above-described embodiment, the case where the X-ray source 38 and the X-ray detector 52 are arranged on the same side with respect to the inspection object 34 has been described. On one side, the X-ray detector 52 may be arranged on the other side of the inspection object 34. By arranging the X-ray source 38 and the X-ray detector 52 on the opposite side of the inspection target 34 in this manner, the intensity of the X-rays that irradiate the inspection target 34 can be made significantly smaller than before, and the inspection by X-rays can be performed. , The safety of analysis can be greatly improved.

It should be noted that the above-described embodiment is an explanation of one aspect of the present invention, and the present invention is not limited to this. That is, in the above-described embodiment, the case where the X-ray detector 52 is rotated about two axes orthogonal to each other has been described. However, the X-ray detector 52 may be rotated about one axis as necessary, and the two-dimensional plane is also included. If you want a realistic image,
It is not necessary to rotate the X-ray detector 52. Further, in the above embodiment, the detection unit 9 of the X-ray detector 52 is used.
Although the case where the output signal of 6 (the output signal of the detection transistor 112) is A / D converted has been described, the output signal of the detection unit 96 may be counted by the counter and the coefficient value may be input to the video calculation unit 68. Good.

[0044]

As described above, according to the present invention, a plurality of electron detecting sections constituting the detecting unit are
By operating with a quadrature modulation pattern, incoming electrons based on scattered X-rays can be detected more efficiently than in the case where detection signals are obtained from individual electron detection units, the detection efficiency is greatly improved, and X due to weak backscattering is detected. An image based on the line can be easily obtained. Moreover, since an image based on X-ray backscattering is obtained, an X-ray source, a collimator unit for detecting X-rays, a scintillator unit, an amplification unit,
The X-ray detection unit such as the detection unit can be arranged on the same side with respect to the inspection target, and it becomes possible to easily inspect a large structure such as a wing of an airplane.

Further, according to the present invention, the collimator section, the scintillator section, the amplification unit and the detection unit are integrated, and these can be rotated about two axes orthogonal to each other. You can easily obtain the video of. In addition, X that irradiates the inspection target with X-rays
When the radiation source is made to be capable of emitting linear X rays, when it is desired to view an image of a cross section of an inspection target, the process of obtaining the cross section image is facilitated by irradiating a linear X ray.

[Brief description of drawings]

FIG. 1 is a schematic block diagram of an X-ray imaging apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an arrangement relationship between an X-ray source and an X-ray detector of the X-ray imaging apparatus according to the embodiment.

FIG. 3 is an exploded perspective view of an X-ray detector according to an embodiment.

FIG. 4 is a perspective view in which a vacuum container of the X-ray detector according to the embodiment is partially cut away.

FIG. 5 is a detailed explanatory diagram of a microcapillary according to an embodiment.

FIG. 6 is a detailed explanatory diagram of a detection unit of the X-ray detector according to the exemplary embodiment.

FIG. 7 is a diagram illustrating a method of operating a detection transistor included in the detection unit according to the embodiment.

FIG. 8 is a diagram illustrating a principle of obtaining a three-dimensional image by the X-ray detector according to the embodiment.

FIG. 9 is an explanatory diagram of a conventional X-ray imaging apparatus.

[Explanation of symbols]

30 ... X-ray imaging device, 34 ... Inspection target, 36 ... X
X-ray source, 42 ... Scattered X-ray, 50 ... X-ray detector, 52 ... X-ray detector, 54 ... Drive unit, 56 ...
... operation control unit, 60 ... signal processing unit, 62 ... data reading unit, 66 ... video creating unit, 68 ... video computing unit, 9
0 ... X-ray collimator section, 92 ... Scintillator section, 9
4 ... Amplification unit, 96 ... Detection unit.

Claims (3)

[Claims] 1. A collimator portion which is arranged toward an inspection object and has a plurality of X-ray transmissive portions and which transmits X-rays incident substantially perpendicularly to a surface, and a collimator portion which is provided on the back surface side of the collimator portion, A scintillator unit that generates electrons by the incidence of rays; and an amplification unit that is provided corresponding to the X-ray transmission unit of the collimator unit and that includes a plurality of electron amplification units that amplify the electrons generated by the scintillator unit, A detection unit provided corresponding to the electronic amplification section of the amplification unit, the detection unit including a plurality of electron detection sections for detecting the electrons amplified by the electronic amplification section; and the plurality of electron detection sections of the detection unit, the orthogonal modulation pattern. Based on the control signal of the operation control unit and the output signal of the electronic detection unit, an image of a portion of the inspection target having a different transmittance for the X-ray. X-ray imaging apparatus comprising: the image computing unit, a seeking. 2. The X according to claim 1, wherein the collimator section, the scintillator section, the amplification unit, and the detection unit are integrally formed and are rotatable about two axes orthogonal to each other. Line imaging equipment. 3. The X-ray imaging apparatus according to claim 1, wherein the X-ray source that irradiates the inspection target with X-rays is formed so as to be capable of emitting linear X-rays.