JP2003072920A - Conveying system, conveying station and conveying method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveying system and a conveying method capable of carrying out a conveying of industrial products not depending on a collective management of a server and easily coping with an obstacle. SOLUTION: In the conveying system, a manufacturing method for industrial products manufactured is registered. The conveying system is constituted of an IC card 5 attached to a lot 7 of a semiconductor product; a conveying station for conveying the lot 7; and a stocker station 3 for storing the lot 7. The conveying station 1 is moved along a conveying route 8 having a route circulating the stocker station 3. The conveying route 8 is a rail, a belt conveyor or the like and is a means capable of moving the conveying station to a predetermined position. A conveying station stopping point 9 is provided on the conveying route 8 and is a point of stopping the conveying station 1 in the case where it conveys in/out the stocker station 3 and the lot.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrying system, a carrying station and a carrying method for managing and carrying industrial products such as semiconductor products.

[0002]

2. Description of the Related Art For example, when a semiconductor product is manufactured in a manufacturing factory, a handwritten work sheet is attached when an operator conveys a lot of industrial products between respective manufacturing apparatuses. In this case, the worker confirms the work sheet, operates each manufacturing apparatus, processes the lot of the industrial product, and records the result by handwriting on the work sheet. Although this work slip shows that the work was performed smoothly, it cannot know the detailed work record.

A method of centrally managing information on lots of industrial products by a server is adopted, but in this case, the server down has a great influence. For example, in the conventional centralized management system, if the server goes down, all lot information is affected and work cannot be performed. Therefore, in order to smoothly operate the manufacturing line, it is necessary to manage the progress by handwriting, which causes the work efficiency to deteriorate.

In order to overcome this problem, the inventors of the present invention have disclosed in Japanese Patent Application No. 2001-138991 that a first storage device for recording conditions of a manufacturing method of an industrial product and a first storage device. An IC card including manufacturing condition creating means for creating usage conditions of a manufacturing apparatus used for manufacturing an industrial product with reference to the registered manufacturing method conditions, and manufacturing instruction transmitting means for sending the manufacturing conditions to a control unit of the manufacturing apparatus. Applied for.
This IC card stores the information conventionally written on the work slip as an electronic medium. Therefore, according to this IC card, the work efficiency is improved, and it is possible to easily cope with a failure without the collective management of the server. A control system and a production control method can be realized.

[0005]

However, since the lots are transported manually by the worker, there are problems that human error occurs and it takes time to recover. The loss due to this is also large. In addition, Japanese Patent Application No. 2001-13899
It is desired to propose a transport system that uses the IC card filed in No. 1 and that can easily cope with failures without relying on the collective management of servers.

In view of the above problems, the present invention provides a transport system, a transport station and a transport method for industrial products.

An object of the present invention is to provide a transfer system, a transfer station, and a transfer method which can easily cope with a system failure without depending on the collective management of servers.

[0008]

In order to achieve the above object, the first feature of the present invention is to register a manufacturing method of an industrial product to be manufactured, and to carry the industrial product at the destination according to the manufacturing method. It is a transport system including an IC card for determining a stocker station for storing industrial products and instructing the transport station, and a transport station for transporting the industrial product to the stocker station according to the instruction of the IC card.

A second feature of the present invention is that it can be individually identified from an IC card interface that transmits an inquiry to an IC card in which a manufacturing method of an industrial product to be manufactured is registered and receives a response from the IC card. A stocker station that stores an industrial product with an identifier and that has a stocker station detection sensor that receives a signal from the stocker station, and that can transport a industrial product transport station from a stocker station that can be loaded via the detection sensor. Receiving the identifier of, and sending an inquiry to the IC card via the IC card interface as to whether or not there is an industrial product to be transported to the stocker station that can be carried in.
If there is an industrial product that receives a response from the IC card via the IC card interface and conveys it to a stocker station that can carry it in, it is a conveyance station that conveys the industrial product to the stocker station that can carry in.

A third feature of the present invention is that an IC card interface for receiving an identifier of a stocker station of a transfer destination from an IC card in which a manufacturing method of an industrial product to be manufactured is registered, and an individually identifiable identifier are attached. Stocker station detection sensor that receives a signal from a stocker station that stores industrial products, and a destination storage device that records the identifier of the stocker station that is the destination of the industrial product that is being transported by the transport station that transports the industrial product Equipped with the
The identifier of the stocker station of the transport destination is received from the card, the identifier of the stocker station of the transport destination is recorded in the transport destination storage device, and the stocker station of the transporter station that can load the transport station from the transportable station This is a transport station that transports an industrial product to a stocker station that can carry in an industrial product when the identifier of the stocker station of the transporting destination recorded in the transporting destination storage device matches the identifier of the stocker station that can carry in the identifier. That is.

A fourth feature of the present invention is that the IC card in which the manufacturing method of the industrial product to be manufactured is registered determines the stocker station for storing the industrial product, which is the transfer destination of the industrial product, according to the manufacturing method. And a step of transporting the industrial product to the stocker station according to the instruction of the IC card, and a step of storing the transported industrial product by the stocker station. There is.

A fifth feature of the present invention is a stocker station in which a transport station for transporting an industrial product can be carried in from a stocker station for storing an industrial product to which an individually identifiable identifier is attached via a detection sensor. Through an IC card interface that mediates the process of receiving the identifier and whether or not there is an industrial product to be transported to a stocker station that can be carried in, and data transmission / reception with an IC card in which the manufacturing method of the industrial product to be manufactured is registered. A step of sending an inquiry to the IC card, a step of receiving a response from the IC card via the IC card interface, and, if there is an industrial product to be transported to the portable stocker station, a stocker station that can carry the industrial product. That is, it is a carrying method including a step of carrying to.

A sixth feature of the present invention is that an identifier that can be individually identified from the IC card is transmitted through the IC card interface that mediates transmission and reception of data with the IC card in which the manufacturing method of the manufactured industrial product is registered. The step of receiving the attached stocker station identifier for storing the industrial product attached, and the stocker destination stocker of the industrial product being conveyed by the transport destination stocker station identifier for the industrial product. A step of recording in the transport destination storage device in which the identifier of the station is recorded, and a step of receiving the identifier of the stocker station that can be carried in via the detection sensor from the stocker station that the carrying station that carries the industrial product can carry in, The stocker station identifier of the transport destination recorded in the transport destination storage device and the transportable If the identifier of the stacker station coincide, is that it is transporting method comprising the step of conveying the industrial products in carry-capable stocker station.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Next, a best mode for carrying out the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. Here, an example of an embodiment of a production management system and a production management method for a semiconductor product (semiconductor integrated circuit) is shown as an example of an industrial product.

(First Embodiment) In the first embodiment of the present invention, an embodiment in which the transfer station 1 and the stocker station 3 do not manage the information of the IC card 5 will be described.

FIG. 1 shows a system configuration diagram of a production management system according to the first embodiment of the present invention. The transportation system is registered with the manufacturing method of the industrial product to be manufactured, and the IC card 5 attached to the semiconductor product lot 7 and the lot 7
And a stocker station 3 for storing the lot 7. The transfer station 1 moves along a transfer route 8 having a route that goes around the stocker station 3. The transfer path 8 is a means such as a rail or a belt conveyor that can move the transfer station 1 to a predetermined position. A transfer station stop point 9 is provided on the transfer path 8. The transfer station stop point 9 is a point at which the transfer station 1 stops when the transfer station 1 loads and unloads the stocker station 3 and the lot 7.
Although not shown in FIG. 1, a transport station detection sensor 37 for detecting the position of the transport station 1 and transmitting / receiving information to / from the transport station 1 is provided.

The IC card 5 is attached to each industrial product,
It manages information on industrial products and sends manufacturing conditions to devices. In the case of semiconductor products, it is preferable that an IC card 5 is attached to each lot 7 of semiconductor wafers. In this case, since the processing is controlled for each lot 7, it is possible to change the conditions for each lot 7 and perform delicate adjustments to perform the optimum processing.

FIG. 2 is a view showing the outer appearance of the transfer station 1. FIG. 2A is a view seen from the front (or the rear) with respect to the traveling direction of the transfer station 1. The lot 7 is placed on the transfer station 1 and is transferred. In the part facing the transport path 8 of the transport station 1,
A stocker station detection sensor 17 is provided. FIG. 2B is a side view of the transfer station 1 in the traveling direction. FIG. 2C is a diagram showing a state where the lot 7 is loaded from the transfer station 1 to the stocker station 3. The transfer station 1 recognizes the transfer station detection sensor 37 provided on the transfer path 8 through the stocker station detection sensor 37 and grasps the position of the stocker station 3.

FIG. 3 is a side view of the transfer station 1. The lot 7 is placed on the transfer station 1 and moved. The IC card 5 is attached to each of the lots 7 to manage the manufacturing information of the lot 7. IC card 5
Information is transmitted to the processing control device 15 via the IC card interface 16 of the transfer station 1.
Further, the information obtained from the stocker station detection sensor 37 is transmitted to the processing control device 15.

FIG. 4 is a functional block diagram of the transfer station 1 according to the first embodiment. The transfer station 1 includes an input device 11, an output device 12, a temporary storage device 13, a communication control device 14, a processing control device 15, and an IC.
A card interface 16, a stocker station detection sensor 17, a loading / unloading control device 18, and a transport order storage device 20 are provided.

The input device 11 is composed of a keyboard and buttons, and the output device 12 is composed of a liquid crystal display and a CRT display. Temporary storage device 1
ROM 3 and RAM 3 are incorporated. ROM
Functions as a program memory that stores programs executed in the processing control device 15, and the RAM stores data that is used during execution of the programs in the processing control device 15 and data that is used as a work area. Functions as memory. The communication control device 14 is L
A control device for connecting to a network such as an AN by wire or wirelessly.

The IC card interface 16 is an interface for transmitting / receiving information to / from the IC card 7, and is preferably an interface for wireless communication such as IrDA or BlueTooth. The stocker station detection sensor 17 recognizes the position of the stocker station 3. The loading / unloading control device 18 controls means for loading the lot 7 into the stocker station 3 and unloading the lot 7 from the stocker station 3. The transfer order storage device 20 records the order of the stocker stations 3 transferred by the transfer station 1.

The processing control device 15 comprises a moving means 15a, a transfer order determining means 15c, a stocker station detecting means 15d, a loading / unloading control means 15e and an IC card inquiry means 15f. The moving means 15a is a means for moving the transfer station 1, and stops the transfer station 1 at the target stocker station 3 and moves the transfer station 1 when the purpose is completed. The transport order determining unit 15c is a unit that determines the transport order based on the information received from the IC card 5, the information input via the input device 11, or the like. The transfer order of the lot 7 may be determined based on the information obtained from all the IC cards 5 and recorded in the transfer order storage device 20, or the IC card 5 attached to the lot 7 in which priority transfer is desired is attached. Only the lot 7 to be preferentially transported may be recorded in the transport order storage device 20 based on the information obtained from the above. The stocker station detection means 15d detects the presence of the stocker station 3 via the stocker station detection sensor 17. At this time, it is preferable to receive an identification number that can identify the stocker station 3. The carry-in / carry-out control means 15e is a control device for carrying the lot 7 placed on the transfer station 1 into the stocker station 3 or carrying out the stocker station 3 to the transfer station 1. The IC card inquiry means 15 f is a means for making an inquiry to the IC card 5 via the IC card interface 16. For example, when the transfer station 1 recognizes the stocker station 3, the IC card inquiry means 1
The IC card 7 is inquired by 5f as to whether or not there is a lot to be carried into the stocker station 3.

FIG. 5 is a diagram showing a functional block diagram of the stocker station 3 according to the first embodiment. The stocker station 3 includes an input device 31, an output device 32,
Temporary storage device 33, communication control device 34, processing control device 3
5, an IC card interface 36, a transfer station detection sensor 37, a loading / unloading control device 38, and a stocker status storage device 41.

The input device 31 is composed of a keyboard and buttons, and the output device 32 is composed of a liquid crystal display and a CRT display. Temporary storage device 3
ROM 3 and RAM 3 are incorporated. ROM
Functions as a program memory that stores a program executed in the processing control device 35, and the RAM stores data that is used during execution of the program in the processing control device 35 and data that is used as a work area. Functions as memory. The communication control device 34 is L
A control device for connecting to a network such as an AN by wire or wirelessly.

The IC card interface 36 is an interface for transmitting / receiving information to / from the IC card 5, and is preferably a wireless communication interface such as IrDA or BlueTooth. Transport station detection sensor 3
7 is for recognizing the position of the transfer station 1. The carry-in / carry-out control device 38 controls means for carrying out the lot 7 to the carrying station 1 and carrying in the lot 7 from the carrying station 1. The stocker status storage device 20 is a storage device that records whether or not the lot 7 is stored in the storage location of the lot 7 provided in the stocker station 3. Here, whether or not the lot 7 is stored may be recorded in a plurality of storage locations.

The processing control device 35 includes a transfer station detection means 35a, a loading / unloading control means 35d, an IC card inquiry means 35e, and a stocker status updating means 35f. The presence of the transport station 1 is detected via the transport station detection sensor 37. At this time,
It is preferable to send an identification number that can identify the stocker station 3. The carry-in / carry-out control means 35d is a control means for carrying out the lot 7 stored in the stocker station 3 to the carrying station 1 or carrying the lot 7 from the carrying station 1 into the stocker station 3. The IC card inquiry means 35 e is means for making an inquiry to the IC card 5 via the IC card interface 36. For example, when the transfer station 1 is recognized, the IC card inquiry means 35e inquires of the IC card 5 whether there is a lot 7 to be carried out to the transfer station 1.

FIG. 6 is a diagram showing a functional block diagram of the IC card 5 according to the first embodiment. IC card 5
Is an input device 51, an output device 52, an LED 53, a temporary storage device 54, a communication control device 55, a processing control device 56, a station interface 57, a work management storage device 5.
8. A storage device 59 for use is provided.

The input device 51 is composed of a keyboard and buttons, and the output device 52 is composed of a liquid crystal display, a CRT display, an LED 53, a speaker and the like. The LED 53 and the speaker notify the operator when the IC card 5 is loaded or unloaded, or when an abnormality occurs in the IC card 5. It is preferable to change the blinking pattern of the LED 53 and the generated sound according to the content of notification to the operator. The temporary storage device 54 is a ROM and a RAM.
Is built in. The ROM functions as a program memory that stores a program executed by the process control device 56, and the RAM stores data that is used during the program execution in the process control device 56,
It functions as a data memory used as a work area. The communication control device 55 is a control device for connecting to a network such as a LAN by wire or wirelessly.

The station interface 57 is an interface for transmitting / receiving information to / from the transfer station 1 or the stocker station 3, preferably IrD.
It is an interface for wireless communication such as A and BlueTooth. The work management storage device 58 includes a unique number of the lot 7 to which the IC card 5 is attached, a product name, a work process to be performed on the lot 7, conditions of the process, a device to be used, a quantity to be manufactured, a delivery date, a current process, and an existing process. The processing result of the process in which the work is completed is recorded. The used device storage device 59 is I
The unique number, name, etc. of the device used by the lot 7 to which the C card 5 is attached are registered. Used device storage device 59
May be information extracted only from the work management storage device 58 regarding the device to be used.

The processing control device 56 includes the manufacturing information acquisition means 5
6a, processing result acquisition means 56c, inquiry response means 56d
Equipped with. The manufacturing information acquisition means 56 a acquires a work instruction to be given to the lot 7 via the station interface 57 or the communication control device 55, and the work management storage device 58.
Also, the used device storage device 59 is updated. The processing result acquisition unit 56c is a unit that acquires the processing result after the work is completed in the apparatus, records that the processing is completed, and records the processing result in the work management storage device 58 and updates the result. The inquiry response means 56d is a means for making a response to the contents inquired from the carrier station 1 or the stocker station 3 via the station interface 57. Specifically, it is determined whether or not the lot 7 to which the IC card 5 is attached is in operation, the operation is completed, and the stocker station 3 is requested to transfer to the next device or transferred at the transfer station 1. Lot 7 in
Regarding the above, when the transfer station 1 desires to be carried into the stocker station 3 which can be carried in, the transfer station 1 is requested to carry in.

The IC card 5 may have the identifiers of a plurality of transfer destination stocker stations 3. In this case, if the identifiers match any one of the identifiers of the plurality of transfer destination stocker stations, the product is transferred to the loadable stocker station.

FIG. 7 is a diagram showing a flow chart of the transfer station 1 in the first embodiment.

First, the transfer station 1 performs step S
At 101, the transfer path 8 is moved by the moving means 15a.
To move. While moving on the transport route 8, step S102
In stocker, stocker station detection sensor 1
When the stocker station detecting means 15d detects the stocker station 3 by using 7, it is recognized that it is the transfer station stop point 9 on the transfer path. Here, the transport station 1 receives a signal for identifying the stocker station 3 which can be loaded and unloaded.

Next, in step S103, the IC card 5 is inquired about the lot 7 desired to be carried out to the stocker station 3 which can be carried out by the carrier station 1 through the IC card inquiry means 15f. Step S104
In step S105, if there is a lot 7 desired to be carried out, the relevant lot is carried out to the stocker station 3 in step S105.

Further, in step S106, if there is a lot 7 desired to be loaded from the stocker station 3 to the transfer station 1, the relevant lot is transferred to the transfer station 1 in step S107.
Here, the IC card 5 is inquired via the IC card inquiry means 15f, and if there is a lot to be preferentially transferred, the transfer order determination means 15c determines the transfer order, and the transfer order storage device 20. May be updated.

In step S109, steps S101 to S10 are carried out until the conveyance end instruction is issued.
The process of 8 is repeated.

FIG. 8 is a diagram showing a flowchart of the stocker station 3 in the first embodiment.

First, corresponding to step S102 of FIG. 7, the transport station 1 is detected by the transport station detecting means 35a in step S121.

Corresponding to step S103, step S
If there is a lot 7 carried in from the transfer station 1 in 122, the corresponding lot 7 is carried in in step S123 corresponding to step S104, and the current lot 7 is stored with reference to the stocker status storage device 41. Obtain a position that is not filled, and store the relevant lot 7 at that position.

Further, in step S124, the IC card 5 attached to the lot 7 stored in the stocker station 3 is processed by the IC card inquiry means 35e.
Is inquired to the transfer station 1 whether there is a lot 7 to be carried out. Corresponding to step S106, if there is a lot 7 desired to be carried out in step S125, the corresponding lot is carried out to the transfer station 1 in step S126.

Further, in step S127, when there is a newly loaded / unloaded lot 7, the stocker status updating means 35f causes the stocker status storage device 41 to operate.
To update.

In step S128, the processes of steps S121 to S127 are repeated until the end instruction is issued.

In the first embodiment, the transfer station 1 is described as recording the transfer order in the transfer order storage device 20, but the transfer order storage device 20 is not always necessary. In that case, the transfer is determined by inquiring from the transfer station 1 and the stocker station 3 to the IC card 5.

Further, when the transfer station recognizes the stocker station 3 that can be loaded and unloaded, the IC card interface 16 is used to make an inquiry to the lot 7 transferred to the transfer station 1, and the IC card interface 36 is used. Then, the lot 7 stored in the stocker station 3 is inquired, and the IC card 5
By responding to this, it is possible to carry and carry out. As a result, the transfer station 1 and the stocker station 3 do not need to manage detailed information of the IC card 5, so that it is possible to provide a transfer system that can easily cope with a failure in the production system.

(Second Embodiment) In the second embodiment, as a modification of the first embodiment, a case where the transfer station 1 and the stocker station 3 manage the information of the IC card 5 will be described. An embodiment will be described.

FIG. 9 is a diagram showing a functional block diagram of the transfer station 1 according to the second embodiment. Compared with FIG. 4 which is a functional block diagram of the transfer station 1 according to the first embodiment, a lot transfer destination storage device 19 is provided,
In the processing control device 15, lot transfer destination acquisition means 15
b is provided and the IC card inquiry means 15f is not provided.

In the lot transfer destination storage device 19, the stocker station 3 of the transfer destination of the lot 7 being transferred by the transfer station 1 is registered. The lot transfer destination acquisition means 15b in the processing control device 15 is a means for acquiring the transfer destination of the lot 7 via the IC card interface 16 and recording it in the lot transfer destination storage device 19. The transfer order determination unit 15c is a unit that refers to the lot transfer destination storage device 19 and updates the transfer order storage device 20.

In the transfer station 1 according to the second embodiment, when the lot 7 is loaded into the transfer station 1, the lot transfer destination is stored in the lot transfer destination storage device 19 via the lot transfer destination acquisition means 15b. Then, the transfer order is determined by the transfer order determination unit 15c, and is recorded in the transfer order storage device 20.

FIG. 10 is a functional block diagram of the stocker station 3 according to the second embodiment. Compared to FIG. 5, which is a functional block diagram of the stocker station 3 according to the first embodiment, the carry-in lot storage device 39.
And a carry-out lot storage device 40, and a processing control device 35
2 is different in that it is provided with the carry-in lot acquisition means 35b and the carry-out lot acquisition means 35c but not the IC card inquiry means 35e.

The carry-in lot storage device 39 is a storage device for recording information of the lot 7 in which the stocker station 3 is stored, and the carry-out lot storage device 40 records information of the lot 7 carried out from the stocker station 3. Storage device. The carry-in lot acquisition means 35b acquires information about the lot 7 newly carried into the stocker station 3 via the IC card interface 36 and records it in the carry-in lot storage device 39. For example, the carry-out lot acquisition unit 35c acquires information about the lot 7 desired to be transported to the next stocker station 3 after the work in the apparatus 10 is completed, and updates the carry-out lot storage device 40.

In the stocker station 3 according to the second embodiment, when the lot 7 is carried into the stocker station 3, the information of the lot 7 to be carried in is acquired by the carry-in lot acquisition means 35b and stored in the stocker station 3. When the existing lot 7 is ready to be carried out, the carry-out lot acquisition means 35c acquires information about the carried-out lot 7.

FIG. 11 is a diagram showing a functional block diagram of the IC card 5 according to the second embodiment. Compared with FIG. 6, which is a functional block diagram of the IC card 5 according to the first embodiment, the processing control device 56 is different in that it includes a lot loading / unloading instruction means 56b and does not include an inquiry response means 56d. . Lot loading / unloading instruction means 56b
When the lot 7 to which the IC card 5 is attached desires to be carried in or carried out, the station interface 57 is added to the carry-out station 1 or the stocker station 3.
It is a means for instructing loading or unloading of the lot 7 via the.

FIG. 12 is a view showing a flow chart of the transfer station 1 in the second embodiment.

First, the transfer station 1 performs step S
In 201, the transport path 8 is moved by the moving means 15a.
To move. While moving on the transport route 8, step S202
When the stocker station detection means 15d detects the stocker station 3 using the stocker station detection sensor 17, the transfer station stop point 9 on the transfer path 8 is recognized. Here, the transport station 1 receives a signal for identifying the stocker station 3 which can be loaded and unloaded.

Next, in step S203, referring to the lot transport destination storage device 19, if there is a carry-out lot 7, the corresponding lot 7 is carried out in step S204.

Further, in step S205, when there is a lot 7 to be loaded from the stocker station 3,
In step S206, the relevant lot 7 is carried into the transfer station 1, and in step S207, the lot transfer destination acquisition unit 15b acquires the lot transfer destination,
In step S208, the lot transfer destination storage device 19
To update. In step 209, the transfer order determination unit 15c determines the transfer order and updates the transfer order storage device 20.

In step S210, steps S201 to S20 are carried out until the conveyance end instruction is issued.
The process of 9 is repeated.

FIG. 13 is a diagram showing a flow chart of the stocker station 3 in the second embodiment.

First, corresponding to step S202 of FIG. 12, the transport station 1 is detected by the transport station detecting means 35a in step S221.

Corresponding to step S203, step S
In 222, if there is a lot 7 carried in from the transfer station 1, the corresponding lot 7 is carried in in step S223 corresponding to step S204, and the current lot 7 is stored by referring to the stocker status storage device 41. Obtain a position that is not filled, and store the relevant lot 7 at that position. Further, in step S224, information on the carried-in lot 7 is acquired, and the carried-in lot acquisition unit 35b updates the carried-in lot storage device 39.

Further, corresponding to step S205, if there is a lot 7 to be carried out from the stocker station 3 in step S225, the corresponding lot 7 is carried out in step S226, corresponding to step S206.

Further, in step S227, if there is a newly loaded / unloaded lot 7, the stocker status updating means 35f causes the stocker status storage device 41 to operate.
To update.

In step S228, the processing of steps S221 to S227 is repeated until the end instruction is issued.

In the second embodiment, when there is a lot 7 loaded or unloaded in the transfer station 1, or when there is a lot 7 loaded or unloaded in the stocker station 3, the transfer station 1 or Information on the lot 7 is recorded in the storage device of the stocker station 3. Therefore, transmission / reception data between the IC card 5 and the transfer station 1 or the stocker station 3 can be reduced.

(Other Embodiments) As described above, the present invention has been described by the first and second embodiments.
The discussion and drawings forming a part of this disclosure should not be understood as limiting the invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

In the embodiments of the present invention, the product development of semiconductor products has been described, but foods, clothing (textile products), chemicals, precision machines, machine tools, robots, automobiles, aircraft, ships, etc. It can also be applied to various industrial products.

Further, in the embodiment of the present invention, the transfer station detection sensor is installed in the transfer path, and the stocker station detection sensor is installed in a position facing the transfer path of the transfer station, but it is not installed in this location. May be. For example, they may be installed on the side surfaces of the transfer station and the stocker station. If a sensor having no directivity is used, it may be installed at any position. If the positions of the transfer station and the stocker station can be recognized from each other, they may be installed at any positions. The stocker station identifier can also be a bar code, and a bar code reader is attached to the transfer station. In that case, it is preferable that the stocker station is provided with means for knowing whether there is a product that can be carried in or carried out.

Further, the carrying-in / carrying-out control means is provided in the carrying station and the stocker station, but it is sufficient if the lot can be carried in and carried out between the carrying station and the stocker station, and only one of them may be provided. Absent.

Further, the transport system of the present invention may have no stocker station. In that case,
Preferably, the transfer station is provided with a means for calling an operator. Signal towers and buzzer music boxes are possible. Then, the worker may directly carry the industrial product into and out of the device.

It goes without saying that the present invention includes various embodiments and the like not described here. Therefore, the technical scope of the present invention is defined only by the matters specifying the invention according to the scope of claims reasonable from the above description.

[0072]

As described above, according to the present invention, it is possible to provide an IC card, a production management system and a production management method that improve work efficiency by the system managing.

Further, according to the present invention, it is possible to provide an IC card, a production management system and a production management method which can easily cope with a failure of the production system without depending on the collective management of the servers.

[Brief description of drawings]

FIG. 1 is a system configuration diagram of a production management system according to a first embodiment.

FIG. 2 is a diagram showing an appearance of a transfer station according to the first embodiment.

FIG. 3 is a side view of the transfer station according to the first embodiment.

FIG. 4 is a diagram showing a functional block diagram of a transfer station according to the first embodiment.

FIG. 5 is a diagram showing a functional block diagram of a stocker station according to the first embodiment.

FIG. 6 is a diagram showing a functional block diagram of the IC card according to the first embodiment.

FIG. 7 is a diagram showing a flowchart of a transfer station in the first embodiment.

FIG. 8 is a diagram showing a flowchart of a stocker station in the first embodiment.

FIG. 9 is a diagram showing a functional block diagram of a transfer station according to a second embodiment.

FIG. 10 is a diagram showing a functional block diagram of a stocker station according to a second embodiment.

FIG. 11 is a diagram showing a functional block diagram of an IC card according to a second embodiment.

FIG. 12 is a diagram showing a flowchart of a transfer station in the second embodiment.

FIG. 13 is a diagram showing a flowchart of a stocker station in the second embodiment.

[Explanation of symbols]

1 transfer station 3 Stocker station 5 IC card 7 lots 8 transport routes 9 Transfer station stop points 10 devices 11, 31, 51 Input device 12, 32, 52 Output device 13, 33, 54 Temporary storage device 14, 34, 55 Communication control device 15, 35, 56 Processing control device 15a means of transportation 15b Lot carrier acquisition means 15c Transfer order determining means 15d Stocker station detection means 15e Loading / unloading control means 15f IC card inquiry means 16, 36 IC card interface 17 Stocker station detection sensor 18 Carry-in / carry-out control device 19 Lot transport destination storage device 20 Transport order storage device 35a Conveying station detecting means 35b Import lot acquisition means 35c Delivery lot acquisition means 35d loading / unloading control means 35e IC card inquiry means 35f Stocker status updating means 37 Transport station detection sensor 38 Transport / unload control device 39 Carry-in lot storage device 40 Export lot storage device 41 Stocker status storage device 53 LED 56a Manufacturing information acquisition means 56b Lot loading / unloading instruction means 56c Processing result acquisition means 56d inquiry response means 57 Station Interface 58 work management storage device 59 Storage device used

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 3F022 FF00 JJ00 LL11 LL32 MM07                       MM11 MM21 MM26 MM35 MM42                       MM55 NN02 PP06 QQ01 QQ11                 5B035 BB09 BC03

Claims (17)

[Claims] 1. A method of manufacturing the industrial product to be manufactured is registered, and according to the manufacturing method, a stocker station for storing the transported industrial product, which is a destination of the industrial product, is determined and an instruction is given to the transport station. A carrier system comprising an IC card and a carrier station for carrying the industrial product to the stocker station according to an instruction of the IC card. 2. The IC card indicates a second stocker station, which is a transport destination different from the stocker station in which the industrial product is stored, and the transport station follows an instruction of the IC card. The transport system according to claim 1, wherein the industrial product is transported from the stocker station to the second stocker station. 3. The stocker station transmits a signal for identification, and the transfer station includes a detection sensor for receiving the signal, and identifies the stocker station. Transport system. 4. An IC card interface for transmitting an inquiry to an IC card in which a manufacturing method of an industrial product to be manufactured is registered and for receiving a response from the IC card, and an identifier that can be individually identified, A stocker station detection sensor that stores a product and receives a signal from a stocker station, and an identifier of the stocker station that can be carried in from the stocker station that can be carried in by the transportation station that conveys the industrial product via the detection sensor And sends an inquiry to the IC card via the IC card interface as to whether or not there is the industrial product to be transported to the carry-in stocker station, and sends the inquiry from the IC card via the IC card interface. A response is received and the carry-in stocker station If there is the industrial product for conveying to the down, the transfer station, characterized in that transporting the manufactured products to the carry can stocker station. 5. A transport destination storage device for recording a transport destination of the industrial product transported at the transport station, wherein when there is an industrial product to be preferentially transported, the priority is stored in the transport sequence storage device. The transport station according to claim 4, wherein the industrial product to be transported is recorded, and the delivery order is determined so that the industrial product recorded in the transport sequence storage device can be delivered preferentially. 6. An IC card interface for receiving an identifier of a stocker station of a transfer destination from an IC card in which a manufacturing method of an industrial product to be manufactured is registered, and an identifier that can be individually identified is attached to store the industrial product. A stocker station detection sensor that receives a signal from a stocker station, and a transport destination storage device that records the identifier of the stocker station of the transport destination of the industrial product, which is transported by the transport station that transports the industrial product, wherein The identifier of the stocker station of the transfer destination is received from the IC card via the IC card interface, the identifier of the stocker station of the transfer destination is recorded in the transfer destination storage device, and from the stocker station into which the transfer station can be loaded. , Through the detection sensor When the identifier of the stocker station that can be loaded is received, and the identifier of the stocker station of the transport destination recorded in the transport destination storage device and the identifier of the transportable stocker station match, the industrial product is loaded. A transfer station characterized by transferring to a possible stocker station. 7. A transportation sequence storage device for recording the transportation sequence of the industrial products, wherein an efficient transportation sequence is obtained by referring to the transportation destination storage device and taking into account the position of the stocker station of the transportation destination. The transfer station according to claim 6, wherein the transfer station is determined. 8. The transport destination storage device is further referred to, further comprising:
The transport station according to claim 7, wherein an efficient transport sequence is determined in consideration of the priority of transporting the industrial products. 9. An IC card in which a manufacturing method of an industrial product to be manufactured is registered determines a stocker station for storing the industrial product to which the industrial product is transported according to the manufacturing method, and instructs the transport station. And a transfer station for transferring the industrial product,
A transport method comprising: a step of transporting the industrial product to the stocker station according to an instruction of a card; and a step of storing the transported industrial product in the stocker station. 10. The step of causing the IC card to instruct a second stocker station, which is a transfer destination different from the stocker station in which the industrial product is stored, and the transfer station according to the instruction of the IC card. The transport method according to claim 9, further comprising the step of transporting the industrial product from the stocker station to the second stocker station. 11. The storage station further comprises the steps of transmitting a signal for identifying, and the transport station receiving the signal by a detection sensor and identifying the stocker station. The transportation method according to 9 or 10. 12. A step of receiving, via a detection sensor, a stocker station to which a transport station for transporting the industrial product can carry in an identifier of a stocker station to which the transport station for transporting the industrial product can be received from a stocker station to which the industrial product is individually attached and which stores the industrial product. , The IC card via an IC card interface that mediates transmission / reception of data to / from an IC card in which a manufacturing method of the industrial product to be manufactured is registered, whether or not there is the industrial product to be transported to the carry-in stocker station A step of sending an inquiry to the customer, a step of receiving a response from the IC card via the IC card interface, and a step of receiving the industrial product to the carry-in stocker station when the industrial product is carried in. Transporting characterized by including a step of transporting to a possible stocker station Method. 13. When there is an industrial product to be preferentially transported, a step of recording the industrial product to be preferentially transported in a transport sequence storage device, and the industrial product recorded in the transport sequence storage device is prioritized. 13. The transport method according to claim 12, further comprising a step of determining a delivery order so that the delivery can be performed in a targeted manner. 14. The industrial product to which an individually identifiable identifier is attached from the IC card via an IC card interface that mediates transmission and reception of data with an IC card in which a manufacturing method of an industrial product to be manufactured is registered. To store,
A step of receiving the identifier of the stocker station of the transport destination, the identifier of the stocker station of the transport destination, is transported by a transport station that transports the industrial product,
A step of recording the identifier of the stocker station of the transport destination of the industrial product in a transport destination storage device, and a transporting station from which the transport station for transporting the industrial product can be loaded, through the detection sensor When the step of receiving the stocker station identifier, the identifier of the stocker station of the transport destination recorded in the transport destination storage device, and the identifier of the transportable stocker station match, the industrial product can be loaded. Transporting to another stocker station. 15. The IC card may have a plurality of transporter stocker station identifiers, and the product can be loaded if any one of the plurality of transporter stocker station identifiers matches. 2. The carrier is transported to a different stocker station.
The transportation method according to item 4. 16. The method further comprising the step of determining an efficient transport order in consideration of the position of the stocker station of the transport destination by referring to a transport destination storage device in which the transport sequence of the industrial products is recorded. The transport method according to claim 14 or 15, characterized in that. 17. The method according to claim 14, further comprising the step of referring to the transfer destination storage device and determining an efficient transfer order in consideration of the transfer priority of the industrial products. The transportation method according to any one of 1.