JP2003063636A - Substrate conveying device - Google Patents

Substrate conveying device

Info

Publication number
JP2003063636A
JP2003063636A JP2001256385A JP2001256385A JP2003063636A JP 2003063636 A JP2003063636 A JP 2003063636A JP 2001256385 A JP2001256385 A JP 2001256385A JP 2001256385 A JP2001256385 A JP 2001256385A JP 2003063636 A JP2003063636 A JP 2003063636A
Authority
JP
Japan
Prior art keywords
substrate
width
side edge
detecting means
shifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2001256385A
Other languages
Japanese (ja)
Inventor
Katsuyoshi Watanabe
勝義 渡辺
Tatsuto Kunihiro
立人 國弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Plant Technologies Ltd
Original Assignee
Hitachi Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Industries Co Ltd filed Critical Hitachi Industries Co Ltd
Priority to JP2001256385A priority Critical patent/JP2003063636A/en
Publication of JP2003063636A publication Critical patent/JP2003063636A/en
Abandoned legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To align substrates widthwise even at a high conveying speed. SOLUTION: When a tip of first one of the plurality of substrates of the same size conveyed over conveyor rollers 1 is detected by a tip detecting means, side edge truing-up means 8a, 8b and side edge detecting means 9a, 9b, 10a, 10b are moved along the width of the substrate from an original position X0. The side edge detecting means detect a side edge of the substrate one after another, and when the side edge truing-up means each perform truing-up of the side edge, widthwise positions of the side edge truing-up means or the side edge detecting means are stored. The side edge truing-up means and the side edge detecting means are returned to respective arbitrary positions inward of the original position along the width of the substrate. When a tip of the second substrate is detected by the tip detecting means, the side edge truing-up means and the side edge detecting means are moved from the respective arbitrary positions along the width of the substrate for truing-up of the side edge of the second substrate.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、搬送路上での基板
搬送中に基板の幅寄せと整列を行う基板搬送装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device for aligning and aligning substrates during the transfer of substrates on a transfer path.

【0002】[0002]

【従来の技術】基板搬送装置は、例えば、レジストフィ
ルムなどをプリント基板(以下、基板と略記する)の両
面あるいは片面に貼り付けるフィルム貼付装置の上流側
に設置される。
2. Description of the Related Art A substrate transfer device is installed, for example, on the upstream side of a film sticking device for sticking a resist film or the like on both sides or one side of a printed circuit board (hereinafter abbreviated as a board).

【0003】従来の特公平8−8432号公報などに記
載された基板搬送装置では、基板の反りや基板側端部で
の破損を防止させるために回転自由な幅寄せポールを二
段階に分けて動作させることによって幅寄せと整列を行
うようになっており、第一段階の幅寄せ動作では所望の
速度で幅寄せポールを搬送方向と直交する基板の幅方向
に基板の幅より少し広い位置まで移動させ、次の第二段
階では幅寄せポールをそれまでよりゆっくりと移動させ
て幅寄せセンタリングと整列を行う。
In the conventional substrate transfer apparatus described in Japanese Patent Publication No. 8-8432, the rotatable width-adjusting pole is divided into two stages in order to prevent the warp of the substrate and the damage at the end portion on the substrate side. It is designed to perform width adjustment and alignment by operating it.In the first stage width adjustment operation, the width adjustment pole is moved at a desired speed to a position slightly wider than the width of the substrate in the width direction of the substrate orthogonal to the transport direction. Then, in the second step, the width-adjusting pole is moved more slowly to align and align the width-adjusting center.

【0004】[0004]

【発明が解決しようとする課題】上記従来技術では、第
二段階の幅寄せ動作で基板の幅方向の整列が終了した
ら、幅寄せ駆動モータは幅寄せ時とは反対の回転をして
幅寄せポールは原点位置まで戻るようになっている。従
って、搬送されてくる基板の幅が搬走路の幅より狭いも
のである程、幅寄せポールの無駄な移動距離が長くな
り、幅寄せに時間が掛ってしまう。そのため、基板搬送
速度が早い場合、幅寄せを完了しないうちに基板は幅寄
せ機構部を通過し整列されないまま下流のフィルム貼付
装置に基板が搬送されてしまう。また、整列をさせるべ
く搬送速度を下げれば処理枚数は低下し、生産性の低下
を招く。
In the above prior art, when the alignment of the substrates in the width direction is completed in the second-stage width-shifting operation, the width-shifting drive motor rotates in the opposite direction to that of the width-shifting operation. The pole is designed to return to the origin position. Therefore, the narrower the width of the conveyed substrate is than the width of the carrying path, the longer the wasteful movement distance of the width-adjusting pole becomes, and the longer the width-adjusting takes. Therefore, when the substrate transport speed is high, the substrate passes through the width aligning mechanism unit before the width aligning is completed, and the substrate is transported to the downstream film sticking apparatus without being aligned. Further, if the conveying speed is lowered to align the sheets, the number of processed sheets is reduced, which causes a decrease in productivity.

【0005】それゆえ本発明の目的は、搬送速度が速く
ても基板の幅方向の整列をすることができる基板搬送装
置を提供することにある。
Therefore, it is an object of the present invention to provide a substrate transfer device capable of aligning substrates in the width direction even when the transfer speed is high.

【0006】[0006]

【課題を解決するための手段】上記目的を達成する本発
明基板搬送装置の特徴とするところは、基板をコンベア
ローラで搬送しつつ該基板をその搬送方向の所望の位置
に幅寄せを行い整列させるものにおいて、該搬送方向に
おける基板の先端位置を検出する先端検出手段と、該搬
送方向と直交する基板の幅方向に移動し基板の側端に当
接して基板の幅寄せを行う幅寄せ手段と、該幅寄せ手段
とともに基板の幅方向に移動し基板の側端を検出するた
めに該搬送方向において該先端検出手段よりも上流位置
で基板の幅方向において該幅寄せ手段よりも基板側に配
置された内側および外側の側端検出手段と、該各基板の
幅寄せの制御を行う制御手段とを有し、該制御手段は、
該コンベアローラ上を搬送されてくる同じ寸法の複数の
基板のうち先頭の基板が該先端検出手段でその先端位置
を検出されたところで、該幅寄せ手段と該両側端検出手
段を原点位置から基板の幅方向に移動させ両側端検出手
段はそれぞれ該基板の側端を順次検出して該幅寄せ手段
で幅寄せをしたところでの該幅寄せ手段あるいは該両側
端検出手段の該幅方向の位置を記憶し、該幅寄せ手段と
両側端検出手段を該基板の幅方向において原点位置より
も内側の任意の位置まで戻し、後続の各基板に対しては
該先端検出手段で該各基板の先端位置を検出したところ
で該任意の位置から該幅寄せ手段と両側端検出手段を該
基板の幅方向に移動させ該各基板の幅寄せを行うことに
ある。
To achieve the above object, the present invention is characterized in that a substrate transfer device is arranged such that while the substrate is being transferred by a conveyor roller, the substrate is width-aligned to a desired position in the transfer direction. In the apparatus, a front end detecting unit that detects a front end position of the substrate in the carrying direction, and a width adjusting unit that moves in a width direction of the substrate orthogonal to the carrying direction and abuts against a side end of the substrate to perform the width adjustment of the substrate. And, in order to detect the side edge of the substrate by moving in the width direction of the substrate together with the width-shifting means, at a position upstream of the leading edge detecting means in the transport direction and closer to the substrate than the width-shifting means in the substrate width direction. It has inner and outer side edge detection means arranged and control means for controlling the width adjustment of the respective substrates, and the control means
When the leading edge position of the leading edge substrate of the plurality of substrates of the same size conveyed on the conveyor roller is detected by the leading edge detecting means, the width adjusting means and the both side edge detecting means are moved from the origin position to the substrate. In the width direction, the side edge detecting means sequentially detects the side edges of the substrate, respectively, and the width aligning means or the both side edge detecting means when the width aligning means detects the position in the width direction. The width adjusting means and the both side edge detecting means are returned to an arbitrary position inside the origin position in the width direction of the substrate, and the leading edge position of each substrate is detected by the leading edge detecting means for each subsequent substrate. When the position is detected, the width adjusting means and the both side edge detecting means are moved in the width direction of the substrate from the arbitrary position to perform the width adjustment of the respective substrates.

【0007】本発明によれば、基板搬送において、2枚
目以降の基板の幅寄せ開始位置が基板側端検出位置であ
り幅寄せ手段の移動に要する時間を短縮できる。また、
次の基板に備えるために幅寄せ手段が戻る位置は移動距
離に基づく位置であり復帰に要する時間を短縮できる。
そのため、搬送速度が速くても、基板の搬送速度を高め
ることができ、処理枚数は増加し生産性が向上する。
According to the present invention, the width-shifting start position of the second and subsequent substrates is the substrate-side edge detection position in the substrate transportation, and the time required to move the width-shifting means can be shortened. Also,
The position where the width adjusting means returns to prepare for the next substrate is a position based on the moving distance, and the time required for the return can be shortened.
Therefore, even if the transfer speed is high, the transfer speed of the substrate can be increased, the number of processed substrates is increased, and the productivity is improved.

【0008】[0008]

【発明の実施の形態】以下、本発明の一実施形態を図に
基いて説明する。図1は、本発明になる基板搬送装置の
概略斜視図であり、図2は、図1のイ部に示す幅寄せ機
構部の詳細図で、図1と図2の互いに対応する部分には
同一符号をつけている。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view of a substrate transfer apparatus according to the present invention, and FIG. 2 is a detailed view of a width-shifting mechanism portion shown in a part of FIG. 1, and parts corresponding to each other in FIGS. The same code is attached.

【0009】両図において、1はコンベアローラ、2は
コンベアローラ駆動モータ、3は駆動軸、4はタイミン
グプーリ、5はタイミングベルト、6a,6bは基板先
端検出センサ、7a,7bはポール取付部材、8a,8
bは幅寄せポールである。9a,9bは幅寄せ外側セン
サ、10a,10bは幅寄せ内側センサであり、これら
の各センサの検出値が制御装置(図4の制御装置20参
照)に送られ、幅寄せ駆動モータ11を制御して基板1
9の幅寄せ動作が行われる。
In both figures, 1 is a conveyor roller, 2 is a conveyor roller drive motor, 3 is a drive shaft, 4 is a timing pulley, 5 is a timing belt, 6a and 6b are substrate edge detecting sensors, and 7a and 7b are pole mounting members. , 8a, 8
b is a width-adjusting pole. Reference numerals 9a and 9b are width-shifting outer sensors, and 10a and 10b are width-shifting inner sensors. Detection values of these sensors are sent to a control device (see control device 20 in FIG. 4) to control the width-shifting drive motor 11. Then substrate 1
The width adjusting operation of 9 is performed.

【0010】12はタイミングベルト、13a,13b
はタイミングプーリ、14はレール、15a,15bは
移動ブロック、16は幅寄せ原点センサ、17は遮光
板、18は幅寄せリミットセンサ、21はフィルム貼付
装置、Fは基板19に貼り付けるフィルム、Pvは幅寄
せ機構部が後述する制御装置(図4参照)で幅寄せ動作
を実行する際にフィルムFを保持している吸着板、23
は圧着ロールである。フィルム貼付装置21は一定間隔
で搬送される基板19に対し、基板の搬送速度に併せて
フィルムFを供給するようになっているが、幅寄せ機構
部との関連性は薄いので詳細説明は省略する。
12 is a timing belt, 13a, 13b
Is a timing pulley, 14 is a rail, 15a and 15b are moving blocks, 16 is a width-shifting origin sensor, 17 is a light-shielding plate, 18 is a width-shifting limit sensor, 21 is a film sticking device, F is a film sticking on the substrate 19, Pv 23 is a suction plate that holds the film F when the width-shifting mechanism unit performs the width-shifting operation by the control device (see FIG. 4) described later, 23
Is a pressure roll. The film sticking device 21 is adapted to supply the film F to the substrate 19 conveyed at a constant interval in accordance with the conveying speed of the substrate, but its detailed relation to the width-shifting mechanism part is omitted because it is less relevant. To do.

【0011】本基板搬送装置の架台(図示せず)上方に
は、基板19をフィルム貼付装置21へ搬送させるコン
ベアローラ1、その駆動手段であるコンベアローラ駆動
モータ2、駆動軸3が基板19の搬送方向に間隔をとっ
て数ヶ所設けられている。各コンベアローラ1の回転の
同期は、駆動軸3に設けたタイミングプーリ4とタイミ
ングプーリ4間に設けたタイムングベルト5で取ってい
る。基板19の搬送方向の下流側(フィルム貼付装置2
1側)には、基板19の有無を検出し幅寄せ動作開始の
トリガー信号を出す基板先端検出センサ6a,6bがあ
る。基板19の搬送方向左右両側にポール取付部材7
a,7bがあり、ポール取付部材7a,7bには搬送さ
れてくる基板19の幅方向(搬送方向に直交した水平方
向)の左右側端に幅方向での基板19の整列を行う幅寄
せポール8a,8bが搬送方向に間隔をとって数個設け
てある。また、基板19の幅寄せ動作時に基板19の側
端を検出する幅寄せ外側センサ9a,9bや幅寄せ内側
センサ10a,10bも設けてある。
Above the pedestal (not shown) of the substrate transfer device, a conveyor roller 1 for transferring the substrate 19 to the film sticking device 21, a conveyor roller drive motor 2 for driving the same, and a drive shaft 3 of the substrate 19 are provided. Several places are provided at intervals in the transport direction. The rotation of each conveyor roller 1 is synchronized by a timing pulley 4 provided on the drive shaft 3 and a timing belt 5 provided between the timing pulley 4. Downstream of the substrate 19 in the transport direction (the film sticking device 2
On the first side), there are substrate front end detection sensors 6a and 6b which detect the presence or absence of the substrate 19 and output a trigger signal for starting the width-shifting operation. Pole mounting members 7 are provided on both left and right sides of the board 19 in the carrying direction.
a and 7b, and the pole mounting members 7a and 7b are arranged on the left and right ends of the board 19 being conveyed in the width direction (horizontal direction orthogonal to the conveying direction) to align the board 19 in the width direction. Several 8a and 8b are provided at intervals in the carrying direction. Further, there are provided width-shifting outer sensors 9a and 9b and width-shifting inner sensors 10a and 10b which detect the side edges of the substrate 19 during the width-shifting operation of the substrate 19.

【0012】幅寄せ駆動モータ11の動作によって、そ
の軸端に設けてあるタイミングプーリ13aを回転させ
て、タイミングベルト12を介してタイミングプーリ1
3bを回転させる。タイミングベルト12に取り付けて
あるポール取付部材7a,7bは、その下部の移動ブロ
ック15a,15bを介してレール14上を基板19の
幅方向に移動して幅寄せを行う。幅方向での移動距離は
幅寄せ駆動モータ11の正逆回転量で調整され、基板1
9は幅寄せポール8a,8bによりコンベアローラ1の
幅方向における中央位置に幅寄せされる。
The timing pulley 13a provided at the shaft end of the timing pulley 13 is rotated by the operation of the width-shifting drive motor 11, and the timing pulley 1 is passed through the timing belt 12.
Rotate 3b. The pole attachment members 7a and 7b attached to the timing belt 12 move on the rail 14 in the width direction of the board 19 via the lower moving blocks 15a and 15b to perform width adjustment. The moving distance in the width direction is adjusted by the forward / reverse rotation amount of the width-shifting drive motor 11,
9 is moved to the center position in the width direction of the conveyor roller 1 by the width adjusting poles 8a and 8b.

【0013】幅寄せの原点は幅寄せ原点センサ16とポ
ール取付部材7aの下部に取り付けられた遮光板17に
よって検出され、幅寄せ動作時に基板搬送方向の左右両
側にある幅寄せ機構部の干渉を防止するための検出は遮
光板17と幅寄せリミットセンサ18によって行う。
The origin of the width-shifting is detected by the width-shifting origin sensor 16 and the light-shielding plate 17 attached to the lower portion of the pole mounting member 7a, so that the interference of the width-shifting mechanism portions on the left and right sides in the substrate transport direction during the width-shifting operation is detected. The detection for prevention is performed by the light shielding plate 17 and the width adjustment limit sensor 18.

【0014】図3は、制御装置20による幅寄せ開始か
ら終了までの一連の動作を示すフロー図であり、図4
(a)〜(c)及び図5(a)〜(c)は、制御装置20
による幅寄せ開始から終了までの動作状況を示す図であ
る。
FIG. 3 is a flow chart showing a series of operations from the start of the width adjustment to the end by the control device 20, and FIG.
(A)-(c) and FIG. 5 (a)-(c) show the control device 20.
FIG. 6 is a diagram showing an operation state from the start of the width adjustment to the end thereof.

【0015】制御装置20には、図4(a)に示すよう
に、基板先端検出センサ6a,6b、幅寄せ外側センサ
9a,9b、幅寄せ内側センサ10a,10bの各セン
サの検出値が入力され、制御装置20はこれらの情報を
基に、幅寄せ駆動モータ11を制御して基板19の幅寄
せ動作を行う。以下、この幅寄せ動作を説明する。
As shown in FIG. 4 (a), the control device 20 receives the detection values of the substrate front end detection sensors 6a and 6b, the width-shifting outer sensors 9a and 9b, and the width-shifting inner sensors 10a and 10b. Then, the control device 20 controls the width-shifting drive motor 11 based on these pieces of information to perform the width-shifting operation of the substrate 19. The width-shifting operation will be described below.

【0016】図3において、ステップ(以下、Sと略記
する)1で、幅寄せ原点センサ16と遮光板17により
幅寄せポール8a,8bが原点位置X0にあることを確
認する。幅寄せポール8a,8bの原点位置X0は図2
に示すように、幅寄せ原点センサ16が遮光板17によ
り遮られた位置である。S2で基板19がコンベアロー
ラ1により幅寄せ機構部に搬入される。この場合、基板
19はその幅方向の中心がコンベアローラ1の幅方向の
中心に一致した状態で搬送させる。
In step (hereinafter abbreviated as S) 1 in FIG. 3, it is confirmed by the width-shifting origin sensor 16 and the light shielding plate 17 that the width-shifting poles 8a and 8b are at the origin position X0. The origin position X0 of the width-adjusting poles 8a and 8b is shown in FIG.
As shown in, the width-shifting origin sensor 16 is at a position blocked by the light shielding plate 17. In S2, the substrate 19 is carried into the width-shifting mechanism section by the conveyor roller 1. In this case, the substrate 19 is conveyed with its center in the width direction being aligned with the center of the conveyor roller 1 in the width direction.

【0017】S3で図4(a)に示すように基板19の
先端を基板先端検出センサ6a,6bにより検出する
と、S4で基板有りの旨の信号が制御装置20に送ら
れ、制御装置20は幅寄せ開始信号を出して、幅寄せ駆
動モータ11が駆動される。S5で幅寄せ駆動モータ1
1により幅寄せポール8a,8bは原点位置X0から内
側に向って移動を継続する。
When the tip of the substrate 19 is detected by the substrate tip detection sensors 6a and 6b in S3 as shown in FIG. 4A, a signal indicating that the substrate is present is sent to the controller 20 in S4, and the controller 20 A width-shift start signal is output to drive the width-shift drive motor 11. Width adjustment drive motor 1 in S5
By 1, the width-adjusting poles 8a and 8b continue to move inward from the origin position X0.

【0018】幅寄せ内側センサ10a,10bが図4
(b)に示すように、基板19の幅方向における左右側
端を順次検出したら(S6)、両幅寄せポール8a,8
bは同距離移動しており基板19の幅方向の中心がコン
ベアローラ1の幅方向の中心に一致した状態で搬送され
ているので、幅寄せ内側センサ10a,10bの一方の
検出結果を利用することとして、幅寄せポール8bが移
動した原点位置X0から基板検出位置X2までの幅寄せ
移動量をH2とし、両位置X0−X2間の動作を第一幅
寄せ動作とする。この時の位置X2を制御装置20に記
憶させる(S7)。
The width-shifting inside sensors 10a and 10b are shown in FIG.
As shown in (b), when the left and right edges of the board 19 in the width direction are sequentially detected (S6), the width-adjusting poles 8a, 8
Since b is moved by the same distance and the widthwise center of the substrate 19 is aligned with the widthwise center of the conveyor roller 1, the detection result of one of the width-shifting inside sensors 10a and 10b is used. By the way, the width-shifting movement amount from the origin position X0 to which the width-shifting pole 8b has moved to the substrate detection position X2 is H2, and the operation between both positions X0-X2 is the first width-shifting operation. The position X2 at this time is stored in the control device 20 (S7).

【0019】制御装置20への記憶は、幅寄せ駆動モー
タ11がパルスモータであれば、制御装置20内にパル
スカウンタを設けて移動開始から幅寄せ内側センサ10
a,10bが基板側端を検出するまでの動作パルス数を
パルスカウンタから読み取ることによって行う。1パル
スに対する幅寄せポール8a,8bの移動距離は装置毎
に固有であるから、動作パルス数が分かれば、基板側端
検出位置X2と移動距離H2は簡単に算出される。
When the width-shift drive motor 11 is a pulse motor, a pulse counter is provided in the control unit 20 to store the width-shift inner sensor 10 from the start of movement.
This is performed by reading the number of operation pulses until a and 10b detect the substrate side edge from the pulse counter. Since the moving distance of the width-adjusting poles 8a and 8b for one pulse is unique to each device, if the number of operation pulses is known, the substrate side edge detection position X2 and the moving distance H2 can be easily calculated.

【0020】また、幅寄せ駆動モータ11がサーボモー
タの場合は、サーボモータ内蔵のエンコーダより得られ
る位置情報をサーボモータコントローラに入力し、その
位置情報から基板側端検出位置X2と移動距離H2は簡
単に算出される。
When the width-shift drive motor 11 is a servo motor, position information obtained from an encoder built in the servo motor is input to the servo motor controller, and the board side edge detection position X2 and the moving distance H2 are calculated from the position information. Easily calculated.

【0021】幅寄せ内側センサ10a,10bで基板1
9の側端を検出したら、S8で幅寄せポール8a,8b
の動作速度を低速に切替え、S9で幅寄せポール8a,
8bの移動を継続させ、図4(c)に示すように幅寄せ
外側センサ、9a,9bが基板19の側端を検出したら
(S10),S11で幅寄せ駆動モータ11を停止させ
る。
The width-adjusting inner side sensors 10a and 10b are used for the substrate 1
When the side edge of 9 is detected, the width adjusting poles 8a and 8b are detected in S8.
Operation speed is switched to a low speed, and the width adjustment pole 8a,
8b is continued to move, and as shown in FIG. 4 (c), when the lateral shift outer sensors 9a and 9b detect the side edge of the substrate 19 (S10), the lateral shift drive motor 11 is stopped in S11.

【0022】幅寄せ外側センサ、9a,9bが基板19
の側端を検出した位置をX1とし、位置X2から位置X
1までの幅寄せ移動量をH1とし、この間の動作を第二
幅寄せ動作とし、位置X1と移動量H1も制御装置20
に記憶させる。
The width-shift outer sensor 9a, 9b is the substrate 19
X1 is the position where the side edge of is detected, and position X2 to position X
The width-shifting movement amount up to 1 is set to H1, the operation during this time is set to the second width-shifting operation, and the position X1 and the movement amount H1 are also set to the control device 20.
To memorize.

【0023】これで幅寄せは終了であり、基板19の整
列は完了したとして、基板19は下流に搬送させる(S
12)。基板が幅寄せ機構部を通過した後、S13で図
5(a)に示すように幅寄せ駆動モータ11で幅寄せポ
ール8a,8bを位置X2まで戻させる。移動距離H1
はS14で制御装置20の記憶データから逆算して求
め、位置X2に至ったなら、S15で幅寄せ駆動モータ
11を停止させる。
This is the end of the width adjustment, and it is assumed that the alignment of the substrates 19 is completed, and the substrates 19 are transported downstream (S
12). After the substrate has passed through the width-shifting mechanism portion, the width-shifting drive motor 11 returns the width-shifting poles 8a and 8b to the position X2 in S13 as shown in FIG. Moving distance H1
Is calculated by performing back calculation from the data stored in the control device 20 in S14, and when the position X2 is reached, the width-shift drive motor 11 is stopped in S15.

【0024】続くS16で、搬送されてくる基板の幅寸
法に変更があるかどうかをロットの変更で確認し、同じ
基板が搬送されてくるようであれば(ロット変更な
し)、S17で図5(b)に示すように後続基板の先端
を基板先端検出センサ6a,6bで検出したところでS
9に戻る。
In subsequent S16, it is confirmed whether or not the width dimension of the conveyed substrate is changed by changing the lot, and if the same substrate is conveyed (no change in the lot), S17 in FIG. As shown in (b), when the leading edge of the succeeding substrate is detected by the substrate leading edge detection sensors 6a and 6b, S
Return to 9.

【0025】S9に戻ったら、S16までを行い、ロッ
ト変更があるまで以上の動作を繰り返す。最初の基板1
9は正確に搬送させたが、2枚目以降搬走路上を適宜に
流されてくるので、S12で図5(c)に示すように基
板は整列され、フィルム貼付装置21におけるフィルム
Fに対し正確に位置付けされたことになる。
After returning to S9, the process up to S16 is repeated and the above operation is repeated until the lot is changed. First board 1
9 was accurately conveyed, but since the second and subsequent sheets are appropriately flowed on the transport path, the substrates are aligned in S12 as shown in FIG. It has been positioned accurately.

【0026】S16でロット変更入力があることを確認
すると、S18に進み、基板搬送が継続するかどうか確
認し、継続する(終了でない)場合、S19で基板幅な
どのロット情報を入力し、S20でコンベアローラ1上
を搬送されている前ロットの基板排出を待って、S21
で制御装置20から基板幅変更指令を出し、S22で幅
寄せポール8a,8bを原点位置X0に移動させ,S1
に戻って新たな幅を持つ基板19に対して同様な処理を
行う。S21での基板幅変更指令は、基板の加工精度な
どの相違に基いた基板毎の位置X2に対する移動量H1
を設定する(S14)場合の情報として利用しても良
い。
When it is confirmed in S16 that there is a lot change input, the process proceeds to S18, and it is confirmed whether the substrate transfer is continued. If it is continued (not finished), lot information such as the substrate width is input in S19, and S20 is entered. Wait for the substrate of the previous lot being conveyed on the conveyor roller 1 to be discharged at S21.
In step S22, the board width change command is issued from the controller 20, and the width adjusting poles 8a and 8b are moved to the origin position X0 in step S22.
Then, the same processing is performed on the substrate 19 having a new width. The board width change command in S21 is the movement amount H1 with respect to the position X2 for each board based on the difference in the board processing accuracy.
May be used as information for setting (S14).

【0027】S18において、搬送される基板がないと
判断されると、最後の基板がフィルム貼付装置21でフ
ィルムFが貼り付けられ、下流の装置に向けて排出され
たことを確認して、幅寄せポール8a,8bを原点位置
X0に戻して、装置の動作は終了する。
When it is determined in S18 that there is no substrate to be transported, it is confirmed that the film F has been attached to the last substrate by the film attaching device 21 and the film has been discharged toward the downstream device. The approach poles 8a and 8b are returned to the origin position X0, and the operation of the apparatus is completed.

【0028】以上、本実施形態で説明したように、2枚
目以降の基板については、幅寄せポール8a,8bの幅
寄せ開始位置は位置X2であって、従来の原点位置X0
ではないので、移動量X1は短く、その分早く幅寄せが
完了する。次の基板に備えるために戻る位置はH1であ
り、距離もX2であるので、復帰に要する時間も短縮で
き、基板の搬送速度を高めることができ、処理枚数は増
加し生産性が向上する。
As described above in the present embodiment, with respect to the second and subsequent substrates, the width-shifting start positions of the width-shifting poles 8a and 8b are the position X2 and the conventional origin position X0.
Therefore, the movement amount X1 is short, and the width adjustment is completed earlier accordingly. Since the position to return to prepare for the next substrate is H1 and the distance is X2, the time required for restoration can be shortened, the substrate transfer speed can be increased, the number of processed substrates can be increased, and the productivity can be improved.

【0029】位置X2や移動距離H1は、基板に応じて
設定変更可能であるから、上流や下流の装置での処理速
度変更に対応することができる。
Since the position X2 and the moving distance H1 can be set and changed according to the substrate, the processing speed can be changed in the upstream and downstream devices.

【0030】上記実施形態では下流の装置としてフィル
ム貼付装置で説明したが、はんだ印刷機、基板上に電子
部品を搭載する表面実装装置など基板の位置合わせを必
要とする各種装置に利用できる。
In the above embodiment, the film sticking device was described as the downstream device, but it can be used for various devices that require the alignment of the substrate, such as a solder printer and a surface mounting device for mounting electronic components on the substrate.

【0031】[0031]

【発明の効果】以上説明したように、本発明によれば、
搬送速度が速くても基板の幅方向の整列をすることがで
きる基板搬送装置を得ることができる。
As described above, according to the present invention,
It is possible to obtain a substrate transfer device capable of aligning substrates in the width direction even if the transfer speed is high.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明における基板搬送装置の一実施形態を
示す概略斜視図である。
FIG. 1 is a schematic perspective view showing an embodiment of a substrate transfer device according to the present invention.

【図2】 図1のイ部に示す幅寄せ機構部の詳細図であ
る。
FIG. 2 is a detailed view of a width-shifting mechanism portion shown in a portion A of FIG.

【図3】 本発明の制御装置による、基板搬送時の幅寄
せ開始から終了までの一連の動作を示すフロー図であ
る。
FIG. 3 is a flow chart showing a series of operations from the start to the end of width adjustment at the time of substrate transfer by the control device of the present invention.

【図4】 本発明の制御装置による幅寄せ開始から終了
までの基板搬送装置の動作状況を示す図である。
FIG. 4 is a diagram showing an operating state of the substrate transfer device from the start of the width adjustment to the end by the control device of the present invention.

【図5】 本発明の制御装置による幅寄せ開始から終了
までの基板搬送装置の動作状況を示す図である。
FIG. 5 is a view showing an operation state of the substrate transfer device from the start of the width adjustment to the end by the control device of the present invention.

【符号の説明】[Explanation of symbols]

1…コンベアローラ 2…コンベアローラ駆動モータ 3…駆動軸 4,13a,13b…タイミングプーリ 5,12…タイミングベルト 6a,6b…基板先端検出センサ 7a,7b…ポール取付部材 8a,8b…幅寄せポール 9a,9b…幅寄せ外側センサ 10a,10b…幅寄せ内側センサ 11…幅寄せ駆動モータ 14…レール 16…幅寄せ原点センサ 17…遮光板 18…幅寄せリミットセンサ 19…基板 20…制御装置 21…フィルム貼付装置 F…フィルム 1 ... Conveyor roller 2 ... Conveyor roller drive motor 3 ... Drive shaft 4, 13a, 13b ... Timing pulley 5, 12 ... Timing belt 6a, 6b ... Substrate tip detection sensor 7a, 7b ... Pole mounting member 8a, 8b ... Width-adjusting pole 9a, 9b ... width-shifting outer sensor 10a, 10b ... width-shifting inner sensor 11 ... Width drive motor 14 ... Rail 16 ... Alignment origin sensor 17 ... Shading plate 18 ... Width limit sensor 19 ... Substrate 20 ... Control device 21 ... Film sticking device F ... film

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 3F081 AA10 AA22 BC04 BC05 BF23 CC12 CE07 CE14 DA02 EA03 EA04 EA09 EA10 FA02 FA03 FB02 FB03 3F102 AA20 AB09 BA02 BA09 CA03 CB01 DA08 DA14 EA14    ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3F081 AA10 AA22 BC04 BC05 BF23                       CC12 CE07 CE14 DA02 EA03                       EA04 EA09 EA10 FA02 FA03                       FB02 FB03                 3F102 AA20 AB09 BA02 BA09 CA03                       CB01 DA08 DA14 EA14

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】基板をコンベアローラで搬送しつつ該基板
をその搬送方向の所望の位置に幅寄せを行い整列させる
ものにおいて、 該搬送方向における基板の先端位置を検出する先端検出
手段と、 該搬送方向と直交する基板の幅方向に移動し基板の側端
に当接して基板の幅寄せを行う幅寄せ手段と、 該幅寄せ手段とともに基板の幅方向に移動し基板の側端
を検出するために該搬送方向において該先端検出手段よ
りも上流位置で基板の幅方向において該幅寄せ手段より
も基板側に配置された内側および外側の側端検出手段
と、 該各基板の幅寄せの制御を行う制御手段とを有し、 該制御手段は、該コンベアローラ上を搬送されてくる同
じ寸法の複数の基板のうち先頭の基板が該先端検出手段
でその先端位置を検出されたところで、該幅寄せ手段と
該両側端検出手段を原点位置から基板の幅方向に移動さ
せ両側端検出手段はそれぞれ該基板の側端を順次検出し
て該幅寄せ手段で幅寄せをしたところでの該幅寄せ手段
あるいは該両側端検出手段の該幅方向の位置を記憶し、
該幅寄せ手段と両側端検出手段を該基板の幅方向におい
て原点位置よりも内側の任意の位置まで戻し、後続の各
基板に対しては該先端検出手段で該各基板の先端位置を
検出したところで該任意の位置から該幅寄せ手段と両側
端検出手段を該基板の幅方向に移動させ該各基板の幅寄
せを行う、ことを特徴とする基板搬送装置。
1. A method for aligning a substrate by moving the substrate to a desired position in the carrying direction while the substrate is being carried by a conveyor roller, and a tip detecting means for detecting a tip position of the substrate in the carrying direction. Width-shifting means that moves in the width direction of the substrate orthogonal to the transport direction and contacts the side edge of the substrate to shift the width of the substrate, and moves in the width direction of the substrate together with the width-shifting means to detect the side edge of the substrate. In order to control the width adjustment of the respective substrates, inner and outer side edge detection means arranged at a position upstream of the front end detection means in the carrying direction and closer to the substrate than the width adjustment means in the board width direction. And a control means for performing the operation, wherein the control means is configured to detect the leading end position of the leading substrate among the plurality of substrates of the same size conveyed on the conveyor roller when the leading end position is detected by the leading end detection means. Width adjustment means The side edge detecting means is moved in the width direction of the substrate from the origin position, and the side edge detecting means sequentially detects the side edges of the substrate, respectively, and the width aligning means or the both side edges when the width aligning means performs the width aligning. Storing the position of the detection means in the width direction,
The width aligning means and both side edge detecting means are returned to an arbitrary position inside the origin position in the width direction of the substrate, and the leading edge position of each substrate is detected by the leading edge detecting means for each subsequent substrate. By the way, the substrate transfer apparatus is characterized in that the width adjusting means and the both side edge detecting means are moved in the width direction of the substrate from the arbitrary position to perform the width adjustment of the respective substrates.
【請求項2】上記請求項1に記載のものにおいて、前記
幅寄せの制御における該任意の位置は、外側の側端検出
手段が該基板の側端を検出した位置に該内側の側端検出
手段を移動させた位置あるいはその位置と該原点位置の
間の位置であることを特徴とする基板搬送装置。
2. The apparatus according to claim 1, wherein the arbitrary position in the width adjustment control is the inner side edge detection at a position where the outer side edge detection means detects the side edge of the substrate. A substrate transfer apparatus, which is a position where the means is moved or a position between the position and the origin position.
【請求項3】上記請求項1に記載のものにおいて、該幅
寄せ手段と両側端検出手段は、該基板の幅方向における
両側に設置させ、コンベアローラの幅方向における中央
に基板を幅寄せすることを特徴とする基板搬送装置。
3. The apparatus according to claim 1, wherein the width aligning means and the both side edge detecting means are installed on both sides of the board in the width direction, and the board is aligned to the center of the conveyor roller in the width direction. A substrate transfer device characterized by the above.
JP2001256385A 2001-08-27 2001-08-27 Substrate conveying device Abandoned JP2003063636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001256385A JP2003063636A (en) 2001-08-27 2001-08-27 Substrate conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001256385A JP2003063636A (en) 2001-08-27 2001-08-27 Substrate conveying device

Publications (1)

Publication Number Publication Date
JP2003063636A true JP2003063636A (en) 2003-03-05

Family

ID=19084204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001256385A Abandoned JP2003063636A (en) 2001-08-27 2001-08-27 Substrate conveying device

Country Status (1)

Country Link
JP (1) JP2003063636A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7513716B2 (en) 2006-03-09 2009-04-07 Seiko Epson Corporation Workpiece conveyor and method of conveying workpiece
KR101353322B1 (en) * 2012-05-24 2014-01-17 이승범 Cleaning and suction equipment of line of warhead

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7513716B2 (en) 2006-03-09 2009-04-07 Seiko Epson Corporation Workpiece conveyor and method of conveying workpiece
KR101353322B1 (en) * 2012-05-24 2014-01-17 이승범 Cleaning and suction equipment of line of warhead

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