JP2007298603A - Drawing device and drawing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing method and a drawing device for carrying out a direct drawing process with high drawing accuracy and no shift in drawn figures by using a plurality of drawing heads arranged to be capable of directly drawing over the entire area of a drawing object while the drawing object continuously and relatively moves. <P>SOLUTION: The drawing device 1 is equipped with drawing heads 11A, 11B, 11C and 11D assigned to the respective specified scanning regions along the conveying direction of a drawing object S and with sensors 12A, 12B, 12C and 12D disposed to give the same distance along the conveying direction of the drawing object S from the drawing heads 11A, 11B, 11C and 11D, respectively. When the sensors 12A, 12b, 12C and 12D detect marks arranged in an approximately constant pitch on the surface of the drawing object S along the conveying direction, the drawing heads 11A, 11B, 11C and 11D corresponding to the respective sensors carry out the drawing process. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a drawing method for performing a direct drawing process using a plurality of drawing heads arranged so that the drawing object is directly drawn over the entire surface while the drawing object is continuously relatively moved. The present invention relates to a drawing apparatus.

  In a drawing apparatus that exposes using an image output element (light modulation element) such as a digital micromirror device (DMD), that is, an exposure apparatus, in order to continuously expose a sheet-like drawing target substrate (drawing target), Exposure processing is performed by moving the drawing target substrate relative to the drawing apparatus at a constant conveyance speed (see, for example, Patent Document 1).

  FIG. 5 is a perspective view schematically showing a conventional example of a drawing apparatus that continuously exposes a sheet-like drawing target substrate. Hereinafter, components having the same reference numerals in different drawings mean components having the same functions.

  The drawing apparatus 101 directly exposes the sheet-like drawing target substrate S. The drawing target substrate S has a length of, for example, several hundred meters, is installed in a rolled state, and is continuously transported by the transport roller 21 in the direction of the arrow in the drawing at a substantially constant transport speed.

  In general, since the drawing apparatus 101 has a limited area in which one drawing head can draw at a time, the drawing heads 11A, 11A, 11B, and 11D can be drawn evenly in the direction orthogonal to the transport direction of the drawing target substrate S. 11B, 11C, and 11D are arranged in a direction orthogonal to the conveyance direction of the drawing target substrate S. Each of the drawing heads 11A, 11B, 11C, and 11D is connected to a control unit 10 for controlling drawing processing of these drawing heads. A rotary encoder 22 is connected to the transport roller 21, detects the rotational speed of the transport roller 21, and sends this signal to the control unit 10. Further, the sensor 12 detects a reference position for drawing processing provided on the drawing target substrate S. In the illustrated conventional example, the number of drawing heads is four as an example, but other numbers may be used.

  As described above, in the drawing apparatus, an area where one drawing head can draw at a time is limited, so that a plurality of drawing heads can be drawn evenly in the direction orthogonal to the conveyance direction of the drawing target substrate. Is provided. Since the size of the main body of the drawing head is larger than the area that the drawing head can draw at once, in order to be able to draw even in the direction orthogonal to the conveyance direction of the drawing target substrate, a plurality of drawing heads Are not arranged in a single line in a direction orthogonal to the conveyance direction of the drawing target substrate, but are arranged so as to be shifted from each other when viewed along the conveyance direction of the drawing target substrate.

  FIG. 6 is a diagram for explaining continuous exposure processing for a sheet-like drawing target substrate by a conventional drawing apparatus. In this figure, an example of the positional relationship among the sheet-like drawing target substrate S, the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2, and the sensor 12 is shown. In the drawing, the conveyance direction of the drawing target substrate S is indicated by an arrow, and the area on the drawing target substrate surface on which drawing by each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 has been completed is hatched. Show. In addition, the area | region shown with the dotted-line frame in a figure is demonstrated in relation to FIG. 7 mentioned later.

  White circles in the drawing represent sprocket holes regularly arranged along the transport direction on the surface of the drawing target substrate S in order to transport the sheet-like drawing target substrate S. The sprocket hole is used not only for transporting the drawing target substrate S but also for a reference position when the drawing target substrate S is continuously exposed. The sensor 12 detects the sprocket hole as the reference position.

  The drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 are arranged so as to be shifted from each other when viewed in the transport direction of the drawing target substrate S as shown in the figure. That is, in the example of FIG. 6, in the drawing apparatus, the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 and the sensor 12 are always fixed in the positional relationship as shown.

  Each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 is assigned for each scanning region defined along the conveyance direction of the drawing target substrate S. The width W of each scanning region corresponds to the length in the direction orthogonal to the conveyance direction of the drawing target substrate S that can be drawn by the drawing head.

  Since the drawing target substrate S is transported at a constant transport speed, each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 executes a drawing process in synchronization with the transport speed of the drawing target substrate S. Thus, a graphic pattern is drawn on the drawing target substrate S. As described above, the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 are displaced from each other when viewed along the transport direction of the drawing target substrate S. The drawing process executed by ˜11D-1 and 11A-2 to 11D-2 is shifted in timing according to the distance of each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 with respect to the reference position. Need to run.

  More specifically, it is as follows. Here, a case is considered where a graphic pattern (hereinafter referred to as “target graphic pattern”) in a certain region along a direction orthogonal to the conveyance direction of the drawing target substrate S is to be drawn.

  T0 seconds after the sensor 12 detects a sprocket hole (hereinafter referred to as “reference mark”) serving as a reference position, the drawing heads 11A-1 and 11A-2 draw the drawing head 11A among the target graphic patterns. -1 and 11A-2 perform a drawing process for a region that can be drawn at once (that is, a region having a width W in a direction orthogonal to the transport direction of the drawing target substrate S).

  On the other hand, with respect to the drawing heads 11B-1 and 11B-2, the drawing heads 11B-1 and 11B out of the target graphic pattern are similarly T0 seconds after the sensor 12 detects the reference mark 32 (not shown). -2 executes a drawing process for an area that can be drawn at once (similarly, an area having a width W in a direction orthogonal to the conveyance direction of the drawing target substrate S). That is, the drawing process by the drawing heads 11B-1 and 11B-2 is executed after T1 seconds have elapsed since the sensor 12 detected the reference mark 31.

  For the drawing heads 11C-1 and 11C-2, the drawing process for the target graphic pattern is similarly executed after T0 seconds (not shown) after the sensor 12 detects the reference mark 33. . That is, the drawing processing by the drawing heads 11C-1 and 11C-2 is executed after T2 seconds have elapsed since the sensor 12 detected the reference mark 31.

  For the drawing heads 11D-1 and 11D-2, similarly, the drawing process for the target graphic pattern is similarly performed T0 seconds after the sensor 12 detects the reference mark 34 (not shown). . That is, the drawing process by the drawing heads 11D-1 and 11D-2 is executed after T3 seconds have elapsed since the sensor 12 detected the reference mark 31.

  In other words, the above drawing process is as follows. For example, as shown in FIG. 6, the graphic pattern in, for example, the region P along the direction orthogonal to the conveyance direction of the drawing target substrate S is the time T3 shown in FIG. 6 (that is, after the sensor 12 detects the reference mark). After the second), the drawing heads 11D-1 and 11D-2 are executing the drawing process for the region P. For this area P, the drawing heads 11C-1 and 11C-2 are "T3-T1" seconds before the "T3-T2" seconds before the drawing processing by the drawing heads 11D-1 and 11D-2. The drawing heads 11B-1 and 11B-2 have completed the drawing processing by the drawing heads 11A-1 and 11A-2, respectively, before "T3-T0" seconds.

  As described above, in the conventional drawing apparatus, the graphic pattern in the region along the direction orthogonal to the conveyance direction of the drawing target substrate is formed by each drawing head performing drawing processing using different reference positions. To do. The drawing target substrates that are continuously conveyed are sequentially exposed under the respective drawing heads, so that they are directly exposed sequentially as described above and exposed over the entire surface.

JP 2005-300805 A

  The sprocket hole used for transporting the drawing target substrate is also used as a reference position for drawing processing by the drawing apparatus as described above. The sprocket holes are regularly arranged on the surface of the drawing target substrate along the transport direction, that is, at a predetermined pitch. However, in actuality, variations in the arrangement pitch of the sprocket holes occur due to the influence of errors and the like that occur when forming the sprocket holes. This variation is distributed almost in a normal manner.

  FIG. 7 is a schematic diagram for explaining a problem that occurs when the drawing process is executed using a different reference position for each drawing head in the drawing apparatus of FIG. 6. In the conventional drawing apparatus, due to the variation in the arrangement pitch of the sprocket holes, the conveyance speed of the drawing target substrate is not completely constant, and each drawing head executes drawing processing using different reference positions. Therefore, a large deviation tends to occur in the formed graphic pattern. The displacement of the graphic pattern is the largest among the drawing figures formed by the drawing heads that are the most distant from each other. In the example shown in FIG. 7, the deviation near the graphic pattern drawn by the drawing head 11D-1 and the drawing head 11A-2 in FIG. 6 (indicated by a dotted frame in FIG. 6) becomes the largest. Such a graphic pattern shift causes a serious defect such as a short circuit pattern or poor contact in a completed exposure product.

  Accordingly, in view of the above problems, an object of the present invention is to draw using a plurality of drawing heads arranged so that the drawing object is directly drawn over the entire surface while the drawing object continuously moves relative to each other. An object of the present invention is to provide a drawing method and a drawing apparatus that execute a direct drawing process having a high drawing accuracy without causing a shift in a figure.

  In order to achieve the above object, in the present invention, each drawing head assigned to each scanning area defined along the conveyance direction of the drawing object (that is, the drawing object substrate) is continuously conveyed. When drawing directly over the entire surface of the object, it should be the reference position for drawing processing by the drawing head selected from marks arranged at a substantially constant pitch along the transport direction on the surface of the object to be drawn. The mark is the same for all drawing heads. In this way, the drawing process of each drawing head is executed with the same mark as a position reference, and the marks arranged on the surface of the drawing object at a substantially constant pitch along the conveyance direction correspond to each drawing head. The time from detection by each sensor to the start of drawing processing by the drawing head is equivalent to substantially the same for all the drawing heads.

  That is, in the drawing method according to the present invention, each sensor corresponding to each drawing head detects a mark arranged on the surface of the drawing object at a substantially constant pitch along the transport direction, and each sensor includes: When the mark is detected, each drawing head corresponding to each sensor includes a drawing step for executing a drawing process.

  FIG. 1 is a schematic perspective view of a drawing apparatus according to the present invention. The drawing apparatus 1 according to the present invention includes drawing heads 11A, 11B, 11C, and 11D assigned for each scanning region defined along the conveyance direction (indicated by an arrow in the drawing) of the drawing object S, and the drawing head. Sensors 12A, 12B, 12C, and 12D that are installed so that the distance along the conveyance direction of the drawing object S between 11A, 11B, 11C, and 11D is substantially the same for all the drawing heads. . In the drawing apparatus 1 according to the present invention, when the sensors 12A, 12B, 12C, and 12D detect marks arranged on the surface of the drawing object S at a substantially constant pitch along the conveyance direction, The drawing heads 11A, 11B, 11C, and 11D corresponding to 12A, 12B, 12C, and 12D execute the drawing process.

  The respective drawing heads 11A, 11B, 11C and 11D are installed at positions shifted from each other in the conveyance direction of the drawing object S. Each sensor 12A, 12B, 12C, and 12D is a sensor provided for each of the drawing heads 11A, 11B, 11C, and 11D, and is along the transport direction between the drawing head and the sensor corresponding to the drawing head. The distances are set so as to be the same for all the drawing heads 11A, 11B, 11C, and 11D. In the illustrated example, the number of drawing heads and sensors is four as an example. However, the number of drawing heads and sensors is not limited to the present invention, and other numbers may be used.

  The other constituent elements are the same as the circuit constituent elements shown in FIG. 5, and thus the same constituent elements are denoted by the same reference numerals and detailed description thereof will be omitted. The drawing heads 11A, 11B, 11C and 11D and the sensors 12A, 12B, 12C and 12D are connected to the control unit 10 for controlling. In addition, a rotary encoder 22 is connected to the transport roller 21 for transporting the drawing object S, and the rotation speed of the transport roller 21 (that is, the transport speed of the drawing object S) is detected and this detection signal is controlled. Send to unit 10.

  According to the present invention, the drawing process of each drawing head is executed using the same mark as a position reference among the marks arranged at a substantially constant pitch along the conveyance direction on the surface of the drawing object. The time from the detection of marks arranged at a substantially constant pitch along the transport direction on the surface of the drawing object by each sensor corresponding to each drawing head until the drawing processing by the drawing head is started Since all the heads are substantially the same, there is no deviation in the drawn graphic pattern, and no serious defect such as a short circuit pattern or poor contact occurs in the finished drawing product.

  FIG. 2 is a diagram illustrating a continuous exposure process for a sheet-like drawing target substrate by the drawing apparatus according to the first embodiment of the present invention. Here, as an example, the number of drawing heads is eight and the number of sensors is four, but the number of drawing heads and sensors is not limited to the present invention, and other numbers may be used. .

  In this figure, an example of the positional relationship among the sheet-like drawing target substrate S, the respective drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2, and the sensors 12A, 12B, 12C and 12D is shown. . In the drawing, the conveyance direction of the drawing target substrate S is indicated by an arrow, and the area on the drawing target substrate surface on which drawing by each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 has been completed is hatched. Show. Further, white circles in the drawing represent sprocket holes regularly arranged on the surface of the drawing target substrate S along the transport direction in order to transport the sheet-like drawing target substrate S.

  When viewed in a positional relationship along a direction orthogonal to the conveyance direction of the drawing target substrate S, each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 follows the conveyance direction of the drawing target substrate S. Assigned to each defined scanning area. The width W of each scanning region corresponds to the length in the direction orthogonal to the conveyance direction of the drawing target substrate S that can be drawn by the drawing head.

  On the other hand, in view of the positional relationship along the transport direction of the drawing target substrate S, the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 are transported of the drawing target substrate S as illustrated. It is installed so as to be shifted from each other in the direction.

  The sensors 12A, 12B, 12C, and 12D are provided for the drawing heads 11A-1 and 11A-2, 11B-1 and 11B-2, 11C-1 and 11C-2, and 11D-1 and 11D-2, respectively. Each of the drawing heads 11A, 11B, 11C, and 11D has the same distance along the transport direction between the drawing head and the sensor corresponding to the drawing head. That is, in the transport direction of the drawing target base S, the distance between the drawing head 11A-1 or 11A-2 and the sensor 12A, the distance between the drawing head 11B-1 or 11B-2 and the sensor 12B, and the drawing The distance between the head 11C-1 or 11C-2 and the sensor 12C and the distance between the drawing head 11D-1 or 11D-2 and the sensor 12D are all the same.

  Thus, in the drawing apparatus according to the first embodiment of the present invention, the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 and the sensors 12A, 12B, 12C, and 12D are shown in FIG. The positional relationship as shown is always fixed, but the drawing process under such a positional relationship will be described with a specific example as follows.

  As described with reference to FIG. 1, in the present invention, a reference for drawing processing by a drawing head selected from marks arranged at a substantially constant pitch along the transport direction on the surface of the drawing target substrate S. The mark to be the position is the same for all drawing heads. In the first embodiment of the present invention shown in FIG. 2, the drawing process by the drawing head selected from sprocket holes arranged at a substantially constant pitch along the transport direction on the surface of the drawing target substrate S is performed. A mark to be a reference position (hereinafter referred to as “reference mark”) is set in the sprocket hole 31, for example. That is, each drawing process by each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 is executed with the reference mark 31 as a reference position.

  In the drawing apparatus according to the first embodiment of the present invention, after each sensor 12A, 12B, 12C and 12D detects the reference mark 31 on the drawing target substrate S which is continuously conveyed in the direction of the arrow, Drawing heads 11A-1 and 11A-2, drawing heads 11B-1 and 11B-2, drawing heads 11C-1 and 11C-2, and drawing heads 11D-1 and 11D-2 corresponding to the sensors 12A, 12B, 12C, and 12D, respectively. The time until 11D-2 starts each drawing process is made substantially the same. That is, the time T0 from when the sensor 12A detects the reference mark 31 to when the drawing heads 11A-1 and 11A-2 start the drawing process and the drawing head 11B-1 after the sensor 12B detects the reference mark 31 are detected. And the time T1 until the drawing heads 11C-1 and 11C-2 start the drawing process after the sensor 12C detects the reference mark 31 and the time T2 until the drawing process is started by the sensor 12D. The time T3 from when the reference mark 31 is detected until the drawing heads 11D-1 and 11D-2 start the drawing process is made substantially the same.

  According to the present invention, since the same reference mark is used for the drawing process by each drawing head, even when the sprocket holes are used as the reference mark, even if there is a variation in the arrangement pitch of the sprocket holes, the drawing figure is shifted. Absent. In addition, the time from the detection of the reference mark to the start of the drawing process by each drawing head is also the same for each drawing head, so that it is less susceptible to variations in the conveyance speed of the drawing target substrate.

  A large number of sprocket holes for transporting the sheet-like drawing target substrate S are formed on the surface of the drawing target substrate S at a predetermined pitch along the transport direction. When each of the sensors 12A, 12B, 12C, and 12D detects the sprocket hole, a sensor signal is sent to the control unit (corresponding to the control unit 10 in FIG. 1) of the drawing apparatus.

  In the drawing apparatus according to the first embodiment of the present invention, not all sprocket holes formed on the surface of the drawing target substrate S are used as reference positions, that is, reference marks, necessary for the drawing process. This is because if a drawing process is executed based on sprocket holes other than the reference mark, an incorrect figure pattern different from the figure pattern to be drawn would be drawn.

  Each sensor 12A, 12B, 12C and 12D outputs a sensor signal only if it detects a sprocket hole, regardless of whether it is a reference mark. A sensor signal that is output when a non-sprocket hole is detected is also included. Therefore, in the present invention, among the sensor signals output when each sensor 12A, 12B, 12C and 12D detects the sprocket hole, the sensor signal output at a predetermined timing is the signal when the reference mark is detected. And this signal is used as a drawing start signal. Based on this drawing start signal, appropriate graphic data is loaded into the drawing head corresponding to the drawing start signal. Each drawing head executes drawing processing based on the received graphic data.

  In the first embodiment of the present invention, the drawing start signal is generated as follows. For example, as shown in FIG. 2, after T1 milliseconds have elapsed after the sensor 12A corresponding to the drawing heads 11A-1 and 11A-2 detects the reference mark 31, the sensor corresponding to the drawing heads 11B-1 and 11B-2. 12B detects the reference mark 31. The time T1m can be calculated by multiplying the conveyance speed of the drawing target substrate S by the distance between the drawing head 11A-1 and the drawing head 11B-1 in the conveyance direction of the drawing target substrate S. That is, since the sprocket hole detected by the sensor 12B after the elapse of T1 msec from the detection of the reference mark 31 by the sensor 12A is the reference mark 31, the sensor signal output thereby is used as the drawing start signal.

  In the first embodiment of the present invention, the drawing start signal is determined by a signal called a “window & mask signal”. As an example, determination of a drawing start signal for the drawing heads 11B-1 and 11B-2 will be described. As shown in FIG. 2, the window & mask signal WB rises from “low” to “high” after a lapse of T1 msec after the sensor 12A detects the reference mark 31, and maintains “high” for a time ΔT. This signal falls to “low”. The time ΔT should have a time width longer than the time T1 from when the sensor 12B detects the reference mark 31 to when the drawing heads 11B-1 and 11B-2 start the drawing process. In the first embodiment of the present invention, a time period in which “high” is maintained in the window and mask signal, that is, ΔT is referred to as a “window period”, and a time period in which “low” is maintained is referred to as a “mask period”. . When such a window & mask signal WB and the sensor signal output from the sensor 12B are ANDed, the sensor signal detected during the mask period is discarded and only the sensor signal detected during the window period is extracted. . In the first embodiment of the present invention, the sensor signal detected during the window period is determined as the drawing start signal.

  Similarly, the drawing start signals for the drawing heads 11C-1 and 11C-2 rise from “low” to “high” after a lapse of T2 milliseconds after the sensor 12A detects the reference mark 31, and are “high” for the time ΔT. ”Is maintained, and then determined by AND operation of the window & mask signal WC falling to“ low ”and the sensor signal output from the sensor 12C. Similarly, the drawing start signal for the drawing heads 11D-1 and 11D-2 rises from “low” to “high” after a lapse of T3 msec from the time when the sensor 12A detects the reference mark 31, and is “high” for the time ΔT. ”Is maintained and then determined by an AND operation of the window & mask signal WD falling to“ low ”and the sensor signal output from the sensor 12D.

  The control unit (corresponding to the control unit 10 in FIG. 1) has a rotary encoder (see FIG. 1) for detecting the number of rotations of a transport roller (corresponding to the transport roller 21 in FIG. 1) for transporting the drawing target substrate S. Corresponding to one rotary encoder 22). Based on the drawing start signal determined as described above, the control unit of the drawing apparatus obtains graphic data used for drawing processing corresponding to the drawing start signal reception time of the drawing head corresponding to the drawing start signal, The image is loaded into the drawing head corresponding to the drawing start signal.

  FIG. 3 is a block diagram for explaining the control of the drawing head in the drawing apparatus according to the first embodiment of the present invention. Here, the control of the drawing heads 11B-1 and 11B-2 shown in FIG. 2 will be described as an example. The sensor signal output when the sensor 12B detects the sprocket hole is input to the drawing start signal extraction block 41. The drawing start signal extraction block 41 performs an AND operation on the window & mask signal WB and the sensor signal output from the sensor 12B described with reference to FIG. To do.

  The graphic shift block 42 converts graphic data used for the drawing processing into drawing heads 11B-1 and 11B-2 based on the drawing start signal and the clock signal that is the rotation speed of the transport roller detected by the rotary encoder 22. To load. That is, graphic data used for drawing processing corresponding to the drawing start signal reception time is loaded into the drawing heads 11B-1 and 11B-2. The drawing heads 11B-1 and 11B-2 execute drawing processing based on the received graphic data.

  As described above, since the same reference mark is used for the drawing process by each drawing head, when the sprocket holes are used as the reference marks, even if there is a variation in the arrangement pitch of the sprocket holes, the drawing figure is not displaced. Does not occur.

  FIG. 4 is a view for explaining continuous exposure processing for a sheet-like drawing target substrate by the drawing apparatus according to the second embodiment of the present invention. Here, as an example, the number of drawing heads is eight and the number of sensors is four, but the number of drawing heads and sensors is not limited to the present invention, and other numbers may be used. . In the drawing, the conveyance direction of the drawing target substrate S is indicated by an arrow, and the area on the drawing target substrate surface on which drawing by each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 has been completed is hatched. Show. Further, white circles in the drawing represent sprocket holes regularly arranged on the surface of the drawing target substrate S along the transport direction in order to transport the sheet-like drawing target substrate S.

  In this figure, an example of the positional relationship among the sheet-like drawing target substrate S, the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2, and the sensor 12 is shown. The positional relationship between the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 is the same as that in the first embodiment shown in FIG.

  The drawing process performed by the drawing apparatus according to the second embodiment of the present invention will be described with a specific example as follows.

  The time from when the sensor 12 detects the reference mark 31 to when the drawing heads 11A-1 and 11A-2 start the drawing process is T0. The time T1 from when the sensor 12 detects the reference mark 31 to when the drawing heads 11B-1 and 11B-2 start drawing processing is the sensor 12 with respect to the drawing direction of the drawing target substrate S, the drawing head 11A-1, and The distance to 11A-2 is known, and the conveyance speed can also be calculated because it can be detected by the rotary encoder. Therefore, when the time from when the sensor 12 detects the reference mark 31 to when the reference mark 32 is detected is subtracted from this time T1, the drawing heads 11B-1 and 11B after the sensor 12 detects the reference mark 32 are subtracted. -2 can calculate the time T1 ′ until the drawing process starts. Similarly, the time T21 ′ from when the sensor 12 detects the reference mark 33 to when the drawing heads 11C-1 and 11C-2 start the drawing process and the drawing after the sensor 12 detects the reference mark 34 are drawn. The time T3 ′ until the head heads 11D-1 and 11D-2 start the drawing process can also be calculated. In this embodiment, based on the calculated times T1 ′, T2 ′, and T3 ′, the timing for loading image data to each of the drawing heads 11A-1 to 11D-1 and 11A-2 to 11D-2 is corrected. .

  As described above, in the first and second embodiments of the present invention, in order to transport the sheet-like drawing target substrate, from among the sprocket holes regularly arranged along the transport direction on the surface of the drawing target substrate. Although an appropriate reference mark is extracted and the drawing process is executed using this as a reference position, an independent reference mark may be provided on the drawing target substrate separately from the sprocket hole and used.

  The present invention can be applied to a drawing apparatus that executes a direct drawing process in which sheet-like drawing target substrates such as a metal plate, a metal hoop material, a wiring substrate, and a flexible substrate are sequentially conveyed.

  According to the present invention, the drawing process of each drawing head is executed using the same mark as a position reference among the marks arranged at a substantially constant pitch along the conveyance direction on the surface of the drawing object. The time from the detection of marks arranged at a substantially constant pitch along the transport direction on the surface of the drawing object by each sensor corresponding to each drawing head until the drawing processing by the drawing head is started Since all the heads are substantially the same, there is no deviation in the drawn graphic pattern, and no serious defect such as a short circuit pattern or poor contact occurs in the finished drawing product.

It is a typical perspective view of the drawing apparatus by this invention. It is a figure explaining the continuous exposure process with respect to the sheet-like drawing object board | substrate by the drawing apparatus of 1st Example of this invention. It is a block diagram explaining control of the drawing head in the drawing apparatus by the 1st Example of this invention. It is a figure explaining the continuous exposure process with respect to the sheet-like drawing object board | substrate by the drawing apparatus of the 2nd Example of this invention. It is a perspective view which shows typically a prior art example of the drawing apparatus which continuously exposes a sheet-like drawing object board | substrate. It is a figure explaining the continuous exposure process with respect to the sheet-like drawing object board | substrate by the conventional drawing apparatus. FIG. 7 is a schematic diagram for explaining problems that occur when a drawing process is executed using a different reference position for each drawing head in the drawing apparatus of FIG. 6.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Drawing apparatus 10 Control part 11A-1, 11B-1, 11C-1, 11D-1, 11A-2, 11B-2, 11C-2, 11D-2 Drawing head 12A, 12B, 12C, 12D Sensor 21 Conveyance roller 22 Rotary encoder S Drawing target board

Claims (10)

Each drawing head assigned to each scanning area defined along the conveyance direction of the drawing object continuously executes the drawing process with the mark provided on the drawing object as a reference position. A drawing method for drawing directly over the entire surface of the drawing object to be conveyed,
From detection of the marks arranged at a substantially constant pitch along the transport direction on the surface of the drawing object by each sensor corresponding to each drawing head, until the drawing processing by the drawing head is started The drawing method is characterized in that the time is substantially the same for all the drawing heads. Each drawing head assigned to each scanning area defined along the conveyance direction of the drawing object continuously executes the drawing process with the mark provided on the drawing object as a reference position. A drawing method for drawing directly over the entire surface of the drawing object to be conveyed,
A detection step of detecting the marks arranged at a substantially constant pitch along the transport direction on the surface of the drawing object by each sensor corresponding to each drawing head;
When each of the sensors detects the mark, each of the drawing heads corresponding to each of the sensors performs a drawing step of executing a drawing process;
A drawing method comprising:   Each of the sensors is a sensor installed such that a distance along the transport direction between the drawing head and the sensor corresponding to the drawing head is substantially the same for all the drawing heads. The drawing method according to 1 or 2. Each drawing head assigned to each scanning area defined along the conveyance direction of the drawing object continuously executes the drawing process with the mark provided on the drawing object as a reference position. A drawing method for drawing directly over the entire surface of the drawing object to be conveyed,
Marks serving as a reference for drawing processing by each of the drawing heads selected from the marks arranged at a substantially constant pitch along the transport direction on the surface of the drawing target are the same for all the drawing heads. A drawing method characterized by that. A drawing apparatus that draws directly on a drawing object continuously conveyed with a mark provided on the drawing object as a reference position,
A drawing head assigned to each scanning region defined along the conveyance direction of the drawing object;
Sensors installed so that the distance along the transport direction between the drawing heads is substantially the same for all the drawing heads,
With
When each sensor detects the marks arranged at a substantially constant pitch along the transport direction on the surface of the drawing object, each drawing head corresponding to each sensor performs a drawing process. A drawing apparatus characterized by executing.   The drawing apparatus according to claim 5, wherein the drawing heads are installed at positions shifted from each other in the transport direction.   Each of the sensors is a sensor provided for each drawing head, and the distance along the transport direction between the drawing head and the sensor corresponding to the drawing head is the same for all the drawing heads. The drawing apparatus according to claim 5, wherein the drawing apparatus is installed respectively.   The drawing apparatus according to claim 5, wherein the mark is a mark extracted from sprocket holes regularly arranged along the transport direction on the surface of the drawing object.   Of the sensor signals output when the sensor detects the sprocket hole, a sensor signal output at a predetermined timing is extracted as a signal when the mark is detected and is used as a drawing start signal The drawing apparatus according to claim 8, further comprising arithmetic means for executing processing for each of the sensors.   The loader for loading the drawing data corresponding to the drawing start signal received by the drawing head corresponding to the drawing start signal into the drawing head corresponding to the drawing start signal. 9. The drawing apparatus according to 9.

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