JP2003051599A5 - - Google Patents
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- Publication number
- JP2003051599A5 JP2003051599A5 JP2002145644A JP2002145644A JP2003051599A5 JP 2003051599 A5 JP2003051599 A5 JP 2003051599A5 JP 2002145644 A JP2002145644 A JP 2002145644A JP 2002145644 A JP2002145644 A JP 2002145644A JP 2003051599 A5 JP2003051599 A5 JP 2003051599A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- channel formation
- regions
- impurity
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010408 film Substances 0.000 claims 68
- 239000012535 impurity Substances 0.000 claims 52
- 230000015572 biosynthetic process Effects 0.000 claims 42
- 239000004065 semiconductor Substances 0.000 claims 38
- 239000010409 thin film Substances 0.000 claims 11
- 238000005498 polishing Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002145644A JP2003051599A (ja) | 2001-05-24 | 2002-05-21 | 半導体装置及び電子機器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001156178 | 2001-05-24 | ||
| JP2001-156178 | 2001-05-24 | ||
| JP2002145644A JP2003051599A (ja) | 2001-05-24 | 2002-05-21 | 半導体装置及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003051599A JP2003051599A (ja) | 2003-02-21 |
| JP2003051599A5 true JP2003051599A5 (enExample) | 2005-09-15 |
Family
ID=26615682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002145644A Withdrawn JP2003051599A (ja) | 2001-05-24 | 2002-05-21 | 半導体装置及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003051599A (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004297048A (ja) * | 2003-03-11 | 2004-10-21 | Semiconductor Energy Lab Co Ltd | 集積回路、該集積回路を有する半導体表示装置及び集積回路の駆動方法 |
| US7541614B2 (en) * | 2003-03-11 | 2009-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Integrated circuit, semiconductor device comprising the same, electronic device having the same, and driving method of the same |
| JP4166783B2 (ja) | 2003-03-26 | 2008-10-15 | 株式会社半導体エネルギー研究所 | 発光装置及び素子基板 |
| JP4689188B2 (ja) * | 2003-04-25 | 2011-05-25 | 株式会社半導体エネルギー研究所 | 表示装置 |
| US7250720B2 (en) | 2003-04-25 | 2007-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| US7898623B2 (en) * | 2005-07-04 | 2011-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device, electronic device and method of driving display device |
| JP4611829B2 (ja) * | 2005-07-19 | 2011-01-12 | 東北パイオニア株式会社 | 自発光パネルの製造方法、および自発光パネル |
| KR101189152B1 (ko) * | 2005-09-16 | 2012-10-10 | 삼성디스플레이 주식회사 | 어레이 기판과, 이를 구비한 액정표시패널 및 액정표시장치 |
| CN101385039B (zh) * | 2006-03-15 | 2012-03-21 | 株式会社半导体能源研究所 | 半导体器件 |
| US7746444B2 (en) * | 2006-06-26 | 2010-06-29 | Lg Display Co., Ltd. | Array substrate, liquid crystal display device having the same, and manufacturing method thereof |
| CN102509736B (zh) | 2008-10-24 | 2015-08-19 | 株式会社半导体能源研究所 | 半导体器件和用于制造该半导体器件的方法 |
| KR102181301B1 (ko) * | 2009-07-18 | 2020-11-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치 제조 방법 |
| WO2011027656A1 (en) * | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Transistor and display device |
| KR101399610B1 (ko) | 2010-02-05 | 2014-05-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 및 반도체 장치의 제조 방법 |
| TWI627751B (zh) * | 2013-05-16 | 2018-06-21 | 半導體能源研究所股份有限公司 | 半導體裝置 |
| TWI624936B (zh) * | 2013-06-05 | 2018-05-21 | 半導體能源研究所股份有限公司 | 顯示裝置 |
| US9818763B2 (en) | 2013-07-12 | 2017-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing display device |
| US9461126B2 (en) * | 2013-09-13 | 2016-10-04 | Semiconductor Energy Laboratory Co., Ltd. | Transistor, clocked inverter circuit, sequential circuit, and semiconductor device including sequential circuit |
| KR102481037B1 (ko) | 2014-10-01 | 2022-12-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 배선층 및 그 제작 방법 |
| US20160155759A1 (en) * | 2014-11-28 | 2016-06-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the same |
| US10186618B2 (en) * | 2015-03-18 | 2019-01-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| US10170528B2 (en) * | 2015-08-07 | 2019-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Display panel and manufacturing method thereof |
| KR102799414B1 (ko) * | 2015-12-28 | 2025-04-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치를 포함하는 표시 장치 |
| CN112271216B (zh) * | 2020-09-18 | 2023-04-07 | 宁波大学 | 一种具有串联操作功能的三输入FinFET |
| CN116530233A (zh) * | 2020-12-07 | 2023-08-01 | 株式会社半导体能源研究所 | 显示装置的制造方法 |
-
2002
- 2002-05-21 JP JP2002145644A patent/JP2003051599A/ja not_active Withdrawn
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