JP2003042973A - Image processing method in pattern inspection, and pattern inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect a defect with high accuracy, by avoiding influence of wow and flutter caused by driving of an inspection camera, when detecting the defect caused by a continuous pattern, in a pattern inspection device used for electrode defect detection in a plasma display or the like. SOLUTION: A cycle of wow and flutter of a drive shaft is measured beforehand, and an inspection line of a line sensor camera is driven in the direction of the continuous pattern on a panel to be inspected 101. Image processing is conducted, by using a pattern detected at a position separated by a cycle unit of wow and flutter, relative to each individual processing object pattern constituting the taken continuous pattern 101a on the panel 101 to be inspected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image processing method in a pattern inspection for detecting a pattern abnormality or foreign matter of an inspected object having a continuous pattern such as a liquid crystal or PDP (plasma display panel) panel. The present invention relates to a pattern inspection device.

[0002]

2. Description of the Related Art In recent years, the resolution of display panels such as liquid crystals and PDPs has been improved, and electrodes for forming the panels and other patterns have been miniaturized. Along with this, the yield of the panel is lowered due to pattern abnormalities and adhesion of foreign matter in the manufacturing process, and the loss cost due to these defects hinders the cost reduction of the panel.

Therefore, in recent years, a pattern inspection apparatus for detecting pattern defects and foreign matters of these electrodes and the like by image processing has been introduced, and a panel judged to be defective in the inspection is sent to a repair process and reworked to be a good panel. However, efforts are being made to reduce loss costs.

FIG. 2 is a diagram showing an example of the structure of a pattern inspection apparatus used for defect inspection of an electrode terminal portion of a PDP panel, as an example of such a pattern inspection apparatus.

In FIG. 2, 201 is a panel to be inspected, 2
02 is a work table holding the panel 201 to be inspected,
Reference numeral 203 denotes an inspection camera that captures images, 204 denotes an X drive axis that drives the inspection camera 203 in the X axis direction at a constant speed to continuously capture images, 205 denotes a Y drive axis that positions in the Y direction, 206 Is an autofocus axis for adjusting the distance between the inspection camera 203 and the panel 201 to be inspected to be constant within the depth of focus of the inspection camera 203.
Reference numeral 07 is a review camera for enlarging and displaying an arbitrary position of the panel 201 to be inspected.

Inspection camera (line sensor camera) 203
The CCD elements are arranged in a line in the lateral direction, and images are captured by scanning at constant intervals. FIG. 3 is a diagram showing the principle of image capturing by the inspection camera 203. In FIG. 3, reference numeral 301 denotes individual pixels arranged in a line in the direction perpendicular to the camera driving direction and taken in by the CCD element of the inspection camera.

The resolution of the line sensor is 5 μm × 5 μm,
When the number of pixels is 6000, it is possible to capture an image of a region of 5 μm × 30 mm with the camera fixed.
If the scan cycle of the camera is 20 kHz, an image can be captured in 120,000 seconds for 6000 pixels in the scan direction. Therefore, the inspection camera 20
If 3 is continuously driven at 100 mm / sec in the direction perpendicular to the scanning direction (camera driving direction), the amount of movement in the driving direction will be 5 μm at 120,000 seconds, and continuous image formation will be achieved without pixel breaks. It becomes possible to import. That is, an image of 30 mm × 100 mm can be captured in 1 second.

An example of detecting a defect in the electrode terminal portion on the back plate of the plasma display panel using such a pattern inspection apparatus will be described. FIG. 4 is a schematic view of a back plate electrode of the plasma display panel, and FIG. 4 (a) is an electrode configuration diagram of the whole back plate, FIG.
(B) is an electrode detailed view showing an enlarged terminal portion.

Although it is necessary to capture the image of the terminal portion to detect the defective portion, the width of the terminal portion is about 10 mm, and the scanning width of the inspection camera 203 is generally about 30 mm, although it depends on the detection resolution. Yes, and Fig. 4 (b)
If the inspection camera 203 is scanned in the camera feeding direction shown in (1), it is possible to capture images of all the terminal portions on one side by one scanning.

The inspection camera 203 scans the X drive shaft 2
This is performed by the operation of 04. Therefore, 100 mm / s
If scanning is performed at a constant speed at a speed of ec, taking a 50-inch panel as an example, the substrate size is 1200 mm × 700 mm, and thus the image capturing time of the terminal portion on one side is completed in about 12 seconds.

FIG. 5A shows an example of the image of the terminal portion in which the image is taken. In this example, the defect to be detected by the inspection device has a shape other than the regular pattern such as an island or a protrusion. Therefore, preprocessing is performed on the captured image to erase the regular pattern, and then defect detection is performed on the remaining image.

As an example of a method of erasing a regular pattern, there is used a method of deriving a difference in gradation of pixels between adjacent patterns in a continuous pattern and erasing only the continuous pattern. An example in which a continuous pattern is erased by this method is shown in FIG. In this way, defect detection is performed using the image in which the continuous pattern is erased.

[0013]

When a defect of the terminal portion of the plasma display panel is detected using the pattern inspection apparatus as described above, it is necessary to drive the inspection camera 203 at a constant speed. However, the X drive shaft 204 is
Strictly speaking, the driving is performed with uneven speed at different frequencies depending on the configuration of the drive shaft.

Generally, factors that determine the frequency include a ball screw, a motor, a mechanical rigidity, etc. that constitute a drive portion. In many cases, the frequency is several tens Hz and the amplitude of speed unevenness is relative to the drive speed. ± several percent. For example, when the driving speed is 100 mm / sec, the amplitude of the speed unevenness is ± 2
%, If the frequency is 40 Hz, 98-102 mm / s
The velocity fluctuation of ec will occur at 40 Hz, that is, at a cycle of 2.5 mm.

FIG. 6 is a diagram showing the relationship between the cycle of such speed unevenness and the continuous pattern of the terminal portion. When the width of the terminal portion is 250 μm and the terminal pitch is 500 μm, the cycle of speed unevenness of the inspection camera 203 is 5 times the cycle of the terminal pitch.
Doubled. The inspection camera 203 has a fixed frequency (for example, 20
Since the image is captured at (kHz), if an error occurs between the regular capture position and the actual capture position of the inspection camera due to speed unevenness, the captured image is distorted (volume change).

If the period of the speed unevenness is equal to or more than the period of the terminal pitch, the deviation of the capturing position due to the speed unevenness has almost no effect, but if the period of the speed unevenness becomes large, the position shift due to the speed unevenness between the terminals will occur. Occurs, causing distortion (volume change) in the image. When pattern erasing is performed on an image with distortion as described above at an adjacent terminal, the pattern erasing corresponding to the volume change cannot be accurately performed, and this portion becomes a factor of being erroneously detected as a defect.

The present invention solves the above-mentioned conventional problems, and in a pattern inspection apparatus used for detecting electrode defects in a plasma display or the like, it is necessary to drive an inspection camera when detecting defects associated with a continuous pattern. An object of the present invention is to provide an image processing method and a pattern inspection apparatus in a pattern inspection which can avoid the influence of accompanying speed unevenness and detect defects with high accuracy.

[0018]

According to a first aspect of the present invention, there is provided an image processing method in a pattern inspection, wherein a line sensor camera above or below an object to be inspected or a work table on which an object to be inspected is placed. In the image processing method in the pattern inspection to detect the abnormal pattern and the foreign matter of the captured pattern by driving the drive shaft to be moved to, the continuous pattern of the inspected object, the period of speed unevenness of the drive shaft is measured in advance, The drive shaft is driven in the direction of a continuous pattern of the object to be inspected, the detection line of the line sensor camera is relatively moved in a direction orthogonal to the direction of the drive shaft, and the line sensor camera captures the line. For each individual processing target pattern that constitutes a continuous pattern of the inspection object, it was detected at positions separated by the cycle unit of the speed unevenness. And performing image processing using the turn.

According to a fourth aspect of the present invention, there is provided a pattern inspection apparatus in which a work table on which an object to be inspected is placed, a line sensor camera above or below the object to be inspected, and the line sensor camera or work table are relatively moved. At least one drive shaft and the drive shaft are driven in a continuous pattern direction of the object to be inspected, and a detection line of the line sensor camera is relatively moved in a direction orthogonal to the drive shaft direction. By doing so, for each individual processing target pattern forming a continuous pattern of the inspected object captured by the line sensor camera, a pattern detected at a position separated by a cycle unit of the speed unevenness of the drive shaft measured in advance, And a pattern inspection unit that performs image processing using the pattern inspection unit.

According to the first and fourth aspects of the invention, the cycle of the speed unevenness of the drive shaft is measured in advance, and the speed unevenness is separated by the cycle unit for each individual processing target pattern. By performing image processing such as pattern erasing using the detected pattern, the influence of speed unevenness in driving the line sensor camera is offset, and defect detection can be performed with high accuracy.

In the image processing method in the pattern inspection according to the second aspect of the present invention, the line sensor camera above or below the inspected object or the drive shaft for relatively moving the work table on which the inspected object is placed. In an image processing method in a pattern inspection for driving to capture a continuous pattern of an object to be inspected and detecting abnormalities in the captured pattern and foreign matter, driving the drive shaft in the direction of the continuous pattern of the object to be inspected, Image processing is performed using a pattern captured by the line sensor camera by relatively moving a detection line of the line sensor camera in a direction parallel to the drive axis with respect to a continuous pattern of the inspection object. It is characterized by

According to a fifth aspect of the pattern inspection apparatus, a work table on which an object to be inspected is placed, a line sensor camera above or below the object to be inspected, and the line sensor camera or work table are relatively moved. At least one drive shaft and the drive shaft with respect to the continuous pattern of the inspection object captured by the line sensor camera by driving the drive shaft in the direction of the continuous pattern of the inspection object And a pattern inspection unit that performs image processing using the pattern captured by the line sensor camera by relatively moving the detection line of the line sensor camera in a direction parallel to the direction.

According to the second and fifth aspects of the invention, for each individual pattern to be processed, the line sensor camera is moved in the direction parallel to the driving direction and the pattern taken in again is used to erase the pattern. By performing image processing, it is possible to eliminate the influence of periodic speed unevenness of the drive axis of the line sensor camera.

In the image processing method in the pattern inspection according to the third aspect of the present invention, the line sensor camera above or below the inspected object or the drive shaft for relatively moving the work table on which the inspected object is placed. In an image processing method in a pattern inspection for driving to capture a continuous pattern of an object to be inspected and detecting an abnormality or foreign matter in the captured pattern, driving the drive shaft in a direction orthogonal to the direction of the continuous pattern, Image processing is performed using a pattern captured after a detection line of the line sensor camera is relatively moved with respect to a continuous pattern of the inspection object in a direction orthogonal to the direction of the drive axis. .

According to a sixth aspect of the pattern inspection apparatus, a work table on which an object to be inspected is placed, a line sensor camera above or below the object to be inspected, and the line sensor camera or work table are relatively moved. At least one drive shaft and a continuous pattern of the inspected object captured by the line sensor camera by driving the drive shaft in a direction orthogonal to the direction of the continuous pattern of the inspected object A pattern inspection unit that performs image processing using a pattern captured after the detection line of the line sensor camera is relatively moved in a direction orthogonal to the drive axis direction.

According to the third and sixth aspects of the invention, the detection line of the line sensor camera is relatively driven with respect to each individual pattern to be processed in the direction orthogonal to the direction of the continuous pattern of the inspection object. By capturing the pattern with, it is possible to eliminate the influence of the periodic speed unevenness of the drive axis of the line sensor camera with respect to the captured pattern, by moving the position of the line sensor camera in the direction orthogonal to the driving direction, Image processing such as pattern erasing can be performed using the pattern captured again, and defect detection can be performed with high accuracy.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing an image processing method in a pattern inspection apparatus according to an embodiment of the present invention.

In FIG. 1, 101 is a panel to be inspected, 1
01a is a continuous pattern to be inspected by the inspected panel 101, 102 is a work table holding the inspected panel 101, 103 is an inspection camera (line sensor camera) for capturing an image, and 104 is an inspection position of the inspected panel. An X drive shaft that drives the inspection camera 103 in the X axis direction at a constant speed to continuously capture images, and 105 is a position measurement sensor attached in parallel to the X drive shaft 104.

Although not shown in FIG. 1, in the pattern inspection apparatus of FIG. 1, the distance between the inspection camera 103 and the inspection camera 103 and the Y drive axis for positioning in the Y direction is set in the inspection camera 103 as in FIG. It also has an autofocus axis for adjusting so as to keep it constant within the depth of focus, a review camera for enlarging and displaying an arbitrary position of the panel 101 to be inspected, and the like.

Inspection camera (line sensor camera) 103
The CCD elements are arranged in a line in the lateral direction, and images are captured by scanning at constant intervals. The principle of image capturing by the inspection camera 103 is shown in FIG. 3 as in the conventional example. That is, the individual pixels arranged in a line in the direction perpendicular to the camera driving direction are
03 CCD device.

The resolution of the line sensor is 5 μm × 5 μm,
When the number of pixels is 6000, it is possible to capture an image of a region of 5 μm × 30 mm with the camera fixed.
If the scan cycle of the camera is 20 kHz, an image can be captured in 120,000 seconds for 6000 pixels in the scan direction. Therefore, the inspection camera 10
If 3 is continuously driven at 100 mm / sec in the direction perpendicular to the scanning direction (camera driving direction), the amount of movement in the driving direction will be 5 μm at 120,000 seconds, and continuous image formation will be achieved without pixel breaks. It becomes possible to import. That is, an image of 30 mm × 100 mm can be captured in 1 second.

In order to capture the image, the inspection camera 103 is driven by the X drive shaft 104. However, as described in the conventional example, the X drive shaft 104 is not strictly driven at a constant speed and the drive shaft is not driven. Depending on the configuration, the driving is performed with uneven speed at different frequencies.

Generally, factors that determine the frequency include a ball screw, a motor, a mechanical rigidity, etc., which constitute a driving portion. In many cases, the frequency is several tens Hz and the amplitude of speed unevenness is relative to the driving speed. ± several percent. For example, when the driving speed is 100 mm / sec, the amplitude of the speed unevenness is ± 2
%, If the frequency is 40 Hz, 98-102 mm / s
The velocity fluctuation of ec will occur at 40 Hz, that is, at a cycle of 2.5 mm.

The position measurement sensor 105 mounted parallel to the X drive shaft 104 measures the cycle of the speed unevenness of the X drive shaft.
To be measured in advance. That is, by driving the X drive axis and obtaining the position information of the inspection camera 103 from the position measurement sensor 105 at each time, the period information of the speed unevenness of the X drive axis can be obtained. FIG. 6B shows the measurement results of the speed unevenness thus obtained, which has a driving speed of 100 mm / sec and a frequency of 40 Hz, that is, a cycle of 2.5 mm.

The period of speed unevenness is measured when the pattern inspection apparatus is turned on, when the inspection function is switched, or at regular intervals, and is prepared in advance as data used for preprocessing for pattern defect detection. .

FIG. 5 shows an example of the result of capturing an image of the electrode terminal portion on the back plate of the plasma display panel using such a pattern inspection apparatus.
It is an example of an image of the terminal portion shown in (a). In this example,
The defect to be detected by the inspection device has a shape other than the regular pattern such as an island or a protrusion. Therefore, the pattern inspection unit of the pattern inspection apparatus performs preprocessing on the captured image, erases the regular pattern, and then detects defects in the remaining image.

Here, in order to erase the regular pattern,
A regular calculation pattern for performing calculation processing between patterns on a pattern to be processed is selected. In the example of the image of the terminal portion shown in FIG. 5A, the calculation pattern for the processing target pattern is selected as follows.

The feeding speed of the inspection camera is v, and X is previously set.
When the frequency obtained by the period measurement of the speed unevenness of the drive shaft is f and the pitch of the continuous regular pattern is p, i × p is closest to the speed unevenness period v / f, where i is a positive integer. Thus, i is determined, and the pattern located at the i-th position from the pattern to be processed is selected as the calculation pattern.

By obtaining the gradation difference of the pixel between the pattern to be processed and the selected calculation pattern, the continuous patterns can be erased by the regular patterns at the positions separated by the cycle unit of the speed unevenness. Since it is possible to cancel out the positional deviation of, it is possible to prevent erroneous detection of defects due to inaccurate pattern erasure.

Even when the period v / f of the speed unevenness is not an integral multiple of the pitch p of the continuous regular pattern, the ratio A / B of the size A of the defective pattern to the blur B of the resulting pattern is sufficient. If it is large, there is little risk of erroneous detection of defects, and this method is sufficiently useful for detecting defects in the pattern of the inspection object.

In the example shown in FIG. 6, a driving speed of 100
With respect to mm / sec, the frequency is 40 Hz, that is, the period of speed unevenness is 2.5 mm, and the pitch of the continuous pattern is 0.5 mm. Therefore, i = 2.5 / 0.5 =
Therefore, the pattern is erased between the terminals separated by 5 pitches. It should be noted that, in addition to erasing the pattern between the terminals separated by one cycle based on the cycle of speed unevenness, the pattern may be erased by the terminals separated by two cycles or three cycles. The pattern may be erased between terminals separated by 5 cycles.

By this method, the positional deviation due to the speed unevenness is canceled out, and precise pattern erasing becomes possible. In this way, the defect of the pattern of the inspection object is detected by the image having a shape other than the regular pattern remaining in FIG. 5B as a result of erasing the continuous pattern.

As described above, instead of measuring the period of speed unevenness of the drive shaft in advance and using this information to perform image processing of the pattern to be inspected, the pattern obtained from the direction parallel to the driving direction of the inspection camera. It is also possible to detect the defect by removing the influence of the periodic speed unevenness of the drive shaft by performing the image processing using.

As such a method, after the image of the inspection object is captured by using the conventional pattern inspection apparatus shown in FIG. 2, the inspection camera is moved in the direction parallel to the driving direction of the inspection camera (see FIG. 7). (a direction) or move the inspection object in a direction parallel to the driving direction of the inspection camera, capture the images of the inspection object again, calculate the difference between these images, and perform the necessary image processing appropriately. Thus, it is possible to detect the defect by removing the influence of the periodic speed unevenness of the drive shaft.

As a method of applying the same principle,
The inspection camera is driven in the direction orthogonal to the continuous pattern of the inspection object to capture the image of the inspection object, and the inspection camera is moved in the direction orthogonal to the driving direction of the inspection camera (see FIG. 7).
(B direction), or moving the inspected object in a direction orthogonal to the driving direction of the inspection camera, capturing images of the inspected object as many times as necessary, taking the difference between these images, and performing the necessary image processing. By appropriately performing the defect detection, it is possible to eliminate the influence of the periodic speed unevenness of the drive shaft.

[0046]

As described above, according to the present invention,
Rather than erasing the pattern between adjacent patterns, by measuring the cycle of speed unevenness of the drive axis in advance and erasing the pattern using the pattern detected at the position separated by the cycle unit of speed unevenness Positional deviation due to uneven speed in the pattern erasing process is canceled out, and precise pattern erasing becomes possible.

Further, according to the present invention, the pattern erasing of the continuous pattern is performed by using the pattern obtained from the direction orthogonal to the driving direction of the inspection camera, thereby eliminating the influence of the periodic speed unevenness of the driving shaft. Therefore, it becomes possible to detect defects.

As described above, according to the present invention, it is possible to eliminate the influence of the speed unevenness of the drive shaft of the inspection camera, and to increase the pattern defects of the repetitive patterns such as the electrode pattern of the liquid crystal or plasma display panel. An image processing method in pattern inspection that can be accurately detected is obtained.

[Brief description of drawings]

FIG. 1 is a diagram showing an image processing method in a pattern inspection according to an embodiment of the present invention.

FIG. 2 is a diagram showing a structural example of a conventional pattern inspection apparatus.

FIG. 3 is a diagram showing a principle of image capturing by a line sensor camera.

FIG. 4 is a schematic view of a back plate electrode of a plasma display panel.

FIG. 5 is a schematic view showing the principle of pattern erasing of electrodes.

FIG. 6 is a schematic diagram showing an electrode pattern and a period of speed unevenness.

FIG. 7 is a diagram showing a relationship between an electrode pattern and a line sensor camera.

[Explanation of symbols]

101,201 Panel to be inspected 101a Continuous pattern to be inspected 102, 202 Work table 103, 203 Inspection camera (line sensor camera) 104, 204 X drive axis 105 Position measuring sensor 205 Y drive axis 206 auto focus axis 207 Review camera 301 pixels

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) // G01M 11/00 G01M 11/00 T 5C012 (72) Inventor Hiroki Fukumoto 1006 Kadoma, Kadoma, Osaka Prefecture Matsushita Electric industrial Co., Ltd. in the F-term (reference) 2F065 AA49 AA56 BB02 CC21 EE08 FF04 FF61 FF64 FF67 JJ02 JJ25 MM03 PP02 QQ24 QQ25 QQ31 RR08 RR09 2G051 AA65 AA90 AB11 AC15 CA03 CD04 DA06 EA23 ED04 2G086 EE10 EE12 5B047 AA11 BB02 CB07 5B057 AA01 BA02 CA12 CA16 CB12 CB16 CD12 DA03 DB02 5C012 AA09 BE03

Claims (6)

[Claims] 1. A continuous pattern of an object to be inspected is taken in by driving a line sensor camera above or below the object to be inspected or a drive shaft for relatively moving a work table on which the object to be inspected is mounted. In an image processing method in a pattern inspection for detecting a pattern abnormality or foreign matter, a period of speed unevenness of the drive shaft is measured in advance, and the drive shaft is driven in a continuous pattern direction of the inspection object, Relative movement of the detection line of the line sensor camera in a direction orthogonal to the direction, for each individual processing target pattern constituting a continuous pattern of the inspection object captured by the line sensor camera, An image in a pattern inspection characterized by performing image processing using a pattern detected at positions separated by a cycle unit of speed unevenness Management method. 2. A line sensor camera above or below an object to be inspected or a drive shaft for relatively moving a work table on which the object to be inspected is driven to capture and capture a continuous pattern of the object to be inspected. In an image processing method in a pattern inspection for detecting a pattern abnormality or foreign matter, the drive shaft is driven in the direction of a continuous pattern of the inspection object, and the drive shaft of the drive shaft is moved with respect to a continuous pattern of the inspection object. An image processing method in a pattern inspection, characterized in that a detection line of the line sensor camera is relatively moved in a direction parallel to the direction and image processing is performed using a pattern captured by the line sensor camera. 3. A continuous pattern of the inspected object is taken in by driving a line sensor camera above or below the inspected object or a drive shaft for relatively moving a work table on which the inspected object is placed. In an image processing method in a pattern inspection for detecting a pattern abnormality or foreign matter, the drive shaft is driven in a direction orthogonal to the direction of the continuous pattern, and a continuous pattern of the drive shaft is provided for a continuous pattern of the inspection object. An image processing method in a pattern inspection, wherein image processing is performed using a pattern captured after moving a detection line of the line sensor camera relatively in a direction orthogonal to the direction. 4. A work table on which an object to be inspected is placed,
A line sensor camera above or below the inspection object, at least one drive shaft for relatively moving the line sensor camera or the work table, and driving the drive shaft in a continuous pattern direction of the inspection object. Then, each individual processing target that forms a continuous pattern of the inspection object captured by the line sensor camera by relatively moving the detection line of the line sensor camera in a direction orthogonal to the direction of the drive axis A pattern inspection device comprising: a pattern inspection unit that performs image processing using a pattern detected at a position separated by a cycle unit of the speed unevenness of the drive shaft, which is measured in advance, with respect to the pattern. 5. A work table on which an object to be inspected is placed,
A line sensor camera above or below the inspection object, at least one drive shaft for relatively moving the line sensor camera or the work table, and driving the drive shaft in a continuous pattern direction of the inspection object. By doing so, the detection line of the line sensor camera is relatively moved in the direction parallel to the direction of the drive axis with respect to the continuous pattern of the inspection object captured by the line sensor camera. A pattern inspecting device comprising: a pattern inspecting unit that performs image processing using the pattern captured in. 6. A work table on which an object to be inspected is placed,
A line sensor camera above or below the object to be inspected, at least one drive shaft for relatively moving the line sensor camera or the work table, and the drive axis orthogonal to the direction of a continuous pattern of the object to be inspected. After moving the detection line of the line sensor camera in a direction orthogonal to the direction of the drive axis with respect to the continuous pattern of the inspection object captured by the line sensor camera by driving in the direction A pattern inspection apparatus comprising: a pattern inspection unit that performs image processing using a captured pattern.