JP2003037476A - High-frequency piezoelectric filter - Google Patents
High-frequency piezoelectric filterInfo
- Publication number
- JP2003037476A JP2003037476A JP2001221412A JP2001221412A JP2003037476A JP 2003037476 A JP2003037476 A JP 2003037476A JP 2001221412 A JP2001221412 A JP 2001221412A JP 2001221412 A JP2001221412 A JP 2001221412A JP 2003037476 A JP2003037476 A JP 2003037476A
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- Japan
- Prior art keywords
- electrodes
- filter
- electrode
- piezoelectric filter
- size
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は高周波圧電フィルタ
に関し、特に基板寸法を小型化すると共にスプリアス特
性を改善した高周波圧電フィルタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-frequency piezoelectric filter, and more particularly to a high-frequency piezoelectric filter having a reduced substrate size and improved spurious characteristics.
【０００２】[0002]
【従来の技術】圧電基板にＡＴカット水晶基板を用いた
多重モード圧電フィルタは小型であること、高減衰量が
得られること、及び堅牢性を有すること等の理由から、
移動体通信機のＩＦフィルタとして広く用いられてい
る。図４（ａ）は厚みすべりモードを用いた三重モード
圧電フィルタ（以下、三重モードフィルタと称す）の構
成を示す平面図であって、圧電基板１１の主表面上に電
極１２、１３、１４を近接して配置すると共に、該電極
１２、１３、１４と対向して裏面側に電極１５を付着す
る。そして、電極１２、１４より圧電基板１１の端部向
けてそれぞれリード電極を延在して入力端子ＩＮ、出力
端子ＯＵＴと接続し、電極１３、１５はそれぞれ接地し
て、三重モードフィルタを構成する。図４（ｂ）は三重
モードフィルタのＱ−Ｑにおける断面図である。2. Description of the Related Art A multi-mode piezoelectric filter using an AT-cut quartz substrate as a piezoelectric substrate is small in size, can obtain high attenuation, and has robustness.
It is widely used as an IF filter for mobile communication devices. FIG. 4A is a plan view showing a configuration of a triple mode piezoelectric filter (hereinafter referred to as a triple mode filter) using the thickness shear mode, in which electrodes 12, 13, 14 are provided on the main surface of the piezoelectric substrate 11. The electrodes 15 are arranged close to each other, and the electrode 15 is attached to the back surface side so as to face the electrodes 12, 13, and 14. Then, lead electrodes extend from the electrodes 12 and 14 toward the ends of the piezoelectric substrate 11 and are connected to the input terminal IN and the output terminal OUT, and the electrodes 13 and 15 are grounded to form a triple mode filter. . FIG. 4B is a cross-sectional view taken along the line QQ of the triple mode filter.
【０００３】周知のように、三重モード圧電フィルタは
厚みすべりモードの主振動と、非調和高次モードの２
次、３次モードを用いた多重モード圧電フィルタであっ
て、その中心周波数は圧電基板１１の厚さｔに逆比例す
る。そして、三重モードフィルタの帯域幅は電極１２、
１３、１４、１５の大きさ及びその質量、電極１２、１
３間及び電極１３、１４間の間隙に依存し、フィルタの
インピーダンスは電極の大きさ、即ち電気的等価インダ
クタンスと、帯域幅とによって決まる。As is well known, a triple-mode piezoelectric filter has a main vibration of thickness-shear mode and two modes of anharmonic higher-order mode.
This is a multi-mode piezoelectric filter using the third and third modes, and its center frequency is inversely proportional to the thickness t of the piezoelectric substrate 11. And the bandwidth of the triple mode filter is electrode 12,
Size of 13, 14, 15 and its mass, electrodes 12, 1
Depending on the gap between 3 and the electrodes 13, 14, the impedance of the filter is determined by the size of the electrodes, ie the electrical equivalent inductance and the bandwidth.
【０００４】図５（ａ）〜（ｅ）は三重モードフィルタ
の設計手順を示す図である。はじめに所望の特性を実現
する３次のローパスフィルタを選定する。３次ローパス
フィルタは対称回路で構成されるので、図５（ａ）に示
すように入出力抵抗は共に１Ωであり、インダクタンス
Ｌ３はＬ３＝Ｌ１となる。つぎに、図５（ｂ）に示すよ
うに２個のジャイレイター（−ｊＫ）を直列腕Ｌ１と並
列腕ｃ２との間に挿入する。ここで、ジャイレイター
（−ｊＫ）は図５（ｃ）に示す正負の容量からなる回路
で表すことができる。そして、１個のジャイレイター
（−ｊＫ）を図中並列腕ｃ２の右側に移動させることに
より、並列腕の容量ｃ２は直列腕のインダクタンスに変
換され、ジャイレイター（−ｊＫ）の値を適当に選ぶこ
とにより直列腕のインダクタンスを、図５（ｄ）に示す
ように全て等しく設定することができる。なお、回路は
中央に対して対称であるので、左半分のみを示してい
る。さらに、図５（ｄ）の回路にバンドパス変換とイン
ピーダンス変換とを行うことにより、図５（ｅ）の回路
が得られる。３つの直列腕のインダクタンスは等しく
Ｌ’１となるが、両端の直列腕の共振周波数はＦ１、中
央の直列腕の共振周波数はＦ２となる。FIGS. 5 (a) to 5 (e) are diagrams showing a design procedure of a triple mode filter. First, a third-order low-pass filter that achieves the desired characteristics is selected. Since the third-order low-pass filter is composed of a symmetrical circuit, both the input and output resistances are 1Ω and the inductance L3 is L3 = L1 as shown in FIG. 5 (a). Next, as shown in FIG. 5B, two gyrators (-jK) are inserted between the series arm L1 and the parallel arm c2. Here, the gyrator (-jK) can be represented by the circuit including positive and negative capacitors shown in FIG. Then, by moving one gyrator (-jK) to the right side of the parallel arm c2 in the figure, the capacitance c2 of the parallel arm is converted into the inductance of the series arm, and the value of the gyrator (-jK) is appropriately set. By selecting them, the inductances of the series arms can be set to be equal as shown in FIG. Since the circuit is symmetrical with respect to the center, only the left half is shown. Further, the circuit of FIG. 5D is obtained by performing bandpass conversion and impedance conversion on the circuit of FIG. The inductances of the three series arms are equal to L′ 1, but the resonance frequency of the series arms at both ends is F1 and the resonance frequency of the central series arm is F2.
【０００５】高周波圧電フィルタを実現するには基板の
厚さｔを薄くしなければならないが、機械加工では厚さ
ｔにも限界があり、いまのところ多量生産が可能な周波
数は５０ＭＨｚ程度が限界である。そこで、フィルタの
高周波化を図るために、図６に示すような圧電基板の一
方の主面の中央部をエッチング等によって薄く加工して
振動部とした、高周波圧電基板が提案され、高周波圧電
フィルタが実用化されるようになった。この手法により
数百ＭＨｚといった高周波のフィルタが可能となった。
図７は中心周波数を２２５ＭＨｚ、３ｄＢ帯域幅を±１
２４ｋＨｚとした場合、基本波三重モード圧電フィルタ
の特性をシミュレーションにより求めたものである。共
振周波数Ｆ１、Ｆ２はそれぞれ２２５．０７９８ＭＨ
ｚ、２２５．１６６８ＭＨｚ、インダクタンスＬ’１は
０．７６８ｍＨ、共振回路のＱ値は４万、両端の抵抗は
８５０Ωである。In order to realize a high frequency piezoelectric filter, the thickness t of the substrate must be made thin. However, there is a limit to the thickness t in machining, and the frequency at which mass production is possible is currently limited to about 50 MHz. Is. Therefore, in order to increase the frequency of the filter, a high-frequency piezoelectric substrate has been proposed in which the central portion of one main surface of the piezoelectric substrate is thinly processed by etching or the like to form a vibrating portion as shown in FIG. Came to be put to practical use. With this method, a high frequency filter of several hundred MHz can be achieved.
FIG. 7 shows a center frequency of 225 MHz and a 3 dB bandwidth of ± 1.
When the frequency is set to 24 kHz, the characteristics of the fundamental wave triple mode piezoelectric filter are obtained by simulation. Resonance frequencies F1 and F2 are 225.0798MH respectively
z, 225.1668 MHz, the inductance L'1 is 0.768 mH, the Q value of the resonance circuit is 40,000, and the resistance at both ends is 850 Ω.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、例えば
基本波で２００ＭＨｚ程度の三重モードフィルタを構成
しようとすると薄肉の振動部の厚さｔは１０μｍ以下と
なり、薄肉部の平行度、平面度のわずかの加工誤差でも
フィルタ特性に影響を及ぼすという問題があった。例え
ば、図８（ａ）に示すように薄肉の振動部の平行度が良
くない場合の共振特性は、同図（ｂ）に示すように周波
数ｆ１は強勢に励振されるが他の２つの励振は極めて小
さくなり、測定が極めて困難となる。また、蒸着等の手
段にて電極２３、２４の膜厚を厚くして周波数を調整し
たとしても、帯域幅がバラツキ、スプリアスが大きくな
るという問題があった。そこで、電極２２、２３、２４
の大きさを小さくして、電極全体の寸法Ｌをできるだけ
小さくすることで前記の平行度の影響を少なくすること
が考えられる。しかしながら、電極２２、２３、２４を
小さくすると入出力インピーダンスが大きくなり、該フ
ィルタを接続する無線機器の前後の回路のインピーダン
スと整合がとれないという新たな問題が生ずることにな
る。本発明は上記問題を解決するためになされたもので
あって、三重モード圧電フィルタを小型化すると共に、
フィルタのインピーダンスを維持したまま、帯域幅のバ
ラツキを抑え、スプリアスを低減したフィルタを提供す
ることを目的とする。However, for example, when it is attempted to construct a triple mode filter having a fundamental wave of about 200 MHz, the thickness t of the thin vibrating portion becomes 10 μm or less, and the parallelism and flatness of the thin portion are small. There is a problem that even a processing error affects the filter characteristics. For example, as shown in FIG. 8A, the resonance characteristic when the parallelism of the thin-walled vibrating portion is not good is as shown in FIG. Becomes extremely small, which makes measurement extremely difficult. Even if the frequency is adjusted by increasing the film thickness of the electrodes 23 and 24 by means of vapor deposition or the like, there is a problem that the band width varies and the spurious becomes large. Therefore, the electrodes 22, 23, 24
It is conceivable to reduce the influence of the parallelism by reducing the size of the electrode and making the dimension L of the entire electrode as small as possible. However, if the electrodes 22, 23, 24 are made small, the input / output impedance becomes large, which causes a new problem that the impedance cannot be matched with the impedance of the circuit before and after the wireless device connecting the filter. The present invention has been made to solve the above problems, and downsizes the triple mode piezoelectric filter,
An object of the present invention is to provide a filter in which variations in bandwidth are suppressed and spurious is reduced while maintaining the impedance of the filter.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に本発明に係る高周波圧電フィルタの請求項１記載の発
明は、一方の主表面の中央部に凹陥部を形成した圧電基
板の平坦側に３つの電極を近接して配置すると共に該電
極を対向して凹陥側に全面電極を付着して構成した三重
モード圧電フィルタにおいて、前記３つの電極の中央の
電極の大きさを他の２つの電極の大きさより小さくした
ことを特徴とする高周波圧電フィルタである。請求項２
記載の発明は、前記凹陥側の全面電極を部分電極とした
ことを特徴とする請求項１に記載の高周波圧電フィルタ
である。請求項３記載の発明は、前記３つの電極の両端
の電極の大きさを等しくすると共に中央の電極の大きさ
を他の２つの電極の１／２としたことを特徴とする請求
項１又は２に記載の高周波圧電フィルタである。In order to achieve the above object, the invention of claim 1 of the high-frequency piezoelectric filter according to the present invention is a flat side of a piezoelectric substrate having a concave portion formed in the central portion of one main surface. In a triple-mode piezoelectric filter in which three electrodes are arranged close to each other, and the electrodes are opposed to each other and a full surface electrode is attached to the concave side, the size of the center electrode of the three electrodes is set to the other two. A high-frequency piezoelectric filter characterized by being made smaller than the size of the electrodes. Claim 2
The described invention is the high-frequency piezoelectric filter according to claim 1, wherein the entire surface electrode on the concave side is a partial electrode. The invention according to claim 3 is characterized in that the size of the electrodes at both ends of the three electrodes is made equal and the size of the central electrode is made 1/2 of the other two electrodes. 2 is a high frequency piezoelectric filter.
【０００８】[0008]
【発明の実施の形態】以下本発明を図面に示した実施の
形態に基づいて詳細に説明する。図１（ａ）は本発明に
係る高周波三重モード圧電フィルタの構成を示す平面
図、同図（ｂ）はＱ−Ｑにおける断面図である。一方の
主面の中央部に凹陥部１ｃを形成した圧電基板１の平坦
側に電極２、３、４を近接して配置すると共に、凹陥側
には全面に電極５を付着する。そして、電極２、３から
それぞれ圧電基板１の端部に向けてリード電極を延在
し、入出力端子ＩＮ、ＯＵＴと接続すると共に、電極
３、５は接地して高周波三重モードを構成する。なお、
凹陥側の全面に電極５を施すのは、環状囲繞部と振動部
である薄肉部との境界部における電極の接続不良を無く
すためである。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below in detail based on the embodiments shown in the drawings. FIG. 1A is a plan view showing the structure of a high frequency triple mode piezoelectric filter according to the present invention, and FIG. 1B is a sectional view taken along line QQ. The electrodes 2, 3 and 4 are arranged close to each other on the flat side of the piezoelectric substrate 1 having the concave portion 1c formed in the central portion of one main surface, and the electrode 5 is attached to the entire concave side. Then, lead electrodes extend from the electrodes 2 and 3 respectively toward the ends of the piezoelectric substrate 1 and are connected to the input / output terminals IN and OUT, and the electrodes 3 and 5 are grounded to form a high frequency triple mode. In addition,
The reason why the electrode 5 is provided on the entire surface on the recessed side is to eliminate poor connection of the electrode at the boundary between the annular surrounding portion and the thin portion which is the vibrating portion.
【０００９】本発明の特徴は電極３の大きさを電極２、
４の大きさと異ならせて、小さくすることにより電極全
体の寸法Ｌを小さくしながら、電極２、４の大きさで決
まる入出力インピーダンスを使用する無線機器の前後の
回路のインピーダンスと整合可能としているところであ
る。The feature of the present invention is that the size of the electrode 3 is set to the electrode 2,
The size L of the entire electrode can be reduced by making the size different from that of No. 4 to reduce the size L of the electrode, and the input / output impedance determined by the size of the electrodes 2 and 4 can be matched with the impedance of the circuit before and after the wireless device using the input / output impedance. By the way.
【００１０】本発明に係る高周波三重モード圧電フィル
タを設計する手順を説明する。はじめに、図２（ａ）に
示すように所望の特性を実現する３次のローパスフィル
タを選定する。奇数次のローパスフィルタは対称回路で
構成されるために回路のいずれか半分を検討すればよ
い。図２（ｂ）に示すようにジャイレーター（−ｊ
Ｋ’）を挿入して並列回路素子ｃ２を直列回路素子Ｌ２
に変換する手段は従来の通りである。中央の直列回路の
インダクタンスＬ２を両端の直列回路のＬ１と異なるよ
うにジャイレーター（−ｊＫ’）の設定することに本発
明の特徴がある。そして、図２（ｂ）の回路にバンドパ
ス変換とインピーダンス変換とを行うことにより、図２
（ｃ）に示す三重モードフィルタの回路が得られる。同
図（ｃ）に示した例は中央の直列共振回路のインダクタ
ンスＬ’２を両端の直列共振回路のインダクタンスＬ’
１の２倍、即ち電極３の面積を電極２（４）の面積の１
／２に設定した例で、このように設定すると３個の直列
回路の共振周波数は全て等しくＦ１となる。このように
全ての直列共振回路の周波数を同一に設定することによ
り、高周波三重モード圧電フィルタを製作する際に周波
数調整が容易となる。A procedure for designing a high frequency triple mode piezoelectric filter according to the present invention will be described. First, as shown in FIG. 2A, a third-order low-pass filter that realizes a desired characteristic is selected. Since the odd-order low-pass filter is composed of a symmetrical circuit, either half of the circuit may be considered. As shown in FIG. 2B, the gyrator (-j
K ') is inserted to connect the parallel circuit element c2 to the series circuit element L2.
The means for converting to is conventional. The present invention is characterized in that the gyrator (-jK ') is set so that the inductance L2 of the central series circuit is different from the inductance L1 of the series circuits at both ends. Then, by performing bandpass conversion and impedance conversion on the circuit of FIG.
The circuit of the triple mode filter shown in (c) is obtained. In the example shown in FIG. 6C, the inductance L'2 of the central series resonance circuit is changed to the inductance L'of the series resonance circuit at both ends.
2 times 1, that is, the area of electrode 3 is 1 of the area of electrode 2 (4)
In the example set to / 2, when set in this way, the resonance frequencies of the three series circuits are all equal to F1. By setting the frequencies of all the series resonance circuits to be the same in this way, it becomes easy to adjust the frequency when manufacturing a high frequency triple mode piezoelectric filter.
【００１１】図３は中心周波数を２２５ＭＨｚ、３ｄＢ
帯域幅を±１２４ｋＨｚとした場合、基本波の高周波三
重モード圧電フィルタのフィルタ特性をシミュレーショ
ンにより求めたものである。直列共振回路の共振周波数
は全て等しく２２５．１１６８ＭＨｚ、インダクタンス
Ｌ’１、Ｌ’２はそれぞれ０．７６８ｍＨ、１．５３６
ｍＨ、共振回路のＱ値は４万、両端の抵抗は８５０Ωで
ある。FIG. 3 shows that the center frequency is 225 MHz, 3 dB.
When the bandwidth is ± 124 kHz, the filter characteristics of the high frequency triple mode piezoelectric filter of the fundamental wave are obtained by simulation. The resonance frequencies of the series resonance circuits are all equal to 225.1168 MHz, and the inductances L'1 and L'2 are 0.768 mH and 1.536, respectively.
mH, the Q value of the resonance circuit is 40,000, and the resistance at both ends is 850Ω.
【００１２】このように中央の電極の寸法を小さくする
ことにより、電極パターンの寸法Ｌが小さくなり高周波
三重モード圧電フィルタが小型化されるのみならず、圧
電基板の平行度、平面度の影響を少なくできるので、フ
ィルタ特性、例えばリップル、スプリアス等が改善でき
るという利点がある。By thus reducing the size of the central electrode, the size L of the electrode pattern is reduced and the high frequency triple mode piezoelectric filter is not only downsized, but also the influence of the parallelism and flatness of the piezoelectric substrate is exerted. Since it can be reduced, there is an advantage that the filter characteristics such as ripple and spurious can be improved.
【００１３】以上の説明では凹陥側の電極５を全面電極
とした例を説明したが、部分電極としてもよいことは説
明するまでもない。また、凹陥側の電極５を接地した不
平衡型フィルタの例を説明したが、平衡型フィルタとし
てもよいことは当然である。In the above description, the example in which the electrode 5 on the concave side is a full-surface electrode has been described, but it goes without saying that it may be a partial electrode. Further, the example of the unbalanced filter in which the electrode 5 on the concave side is grounded has been described, but it goes without saying that a balanced filter may be used.
【００１４】[0014]
【発明の効果】本発明は、以上説明したように構成した
ので、請求項１に記載の発明は三重モード圧電フィルタ
を小型化できると共に、通過域内のリップルと、通過域
近傍のスプリアスを低減できるという優れた効果を表
す。請求項２に記載の発明は、上記の効果に加えて、三
重モード圧電フィルタの容量比を改善し、より広いパス
バンドができるという優れた効果を表す。請求項３に記
載の発明は上記の効果に加えて、フィルタの調整が容易
になるという効果がある。Since the present invention is configured as described above, the invention according to claim 1 can miniaturize the triple mode piezoelectric filter and can reduce ripples in the pass band and spurious near the pass band. Represents the excellent effect. In addition to the above effects, the invention according to claim 2 has an excellent effect that the capacitance ratio of the triple mode piezoelectric filter is improved and a wider pass band can be obtained. In addition to the above effects, the invention according to claim 3 has an effect of facilitating the adjustment of the filter.
【図１】（ａ）は本発明に係る高周波三重モード圧電フ
ィルタの構成を示す平面図、（ｂ）はその断面図であ
る。1A is a plan view showing the configuration of a high frequency triple mode piezoelectric filter according to the present invention, and FIG. 1B is a sectional view thereof.
【図２】（ａ）、（ｂ）、（ｃ）は本発明係る三重モー
ドフィルタを設計する手順を説明する図である。2 (a), (b) and (c) are diagrams for explaining a procedure for designing a triple mode filter according to the present invention.
【図３】シミュレーションにより求めた本発明の高周波
三重モード圧電フィルタのフィルタ特性を示す図であ
る。FIG. 3 is a diagram showing filter characteristics of a high frequency triple mode piezoelectric filter of the present invention obtained by simulation.
【図４】（ａ）は従来の三重モード圧電フィルタの構成
を示す平面図、（ｂ）はその断面図である。FIG. 4A is a plan view showing a configuration of a conventional triple mode piezoelectric filter, and FIG. 4B is a sectional view thereof.
【図５】（ａ）〜（ｅ）は三重モードフィルタを設計す
る手順を説明する図である。5A to 5E are diagrams illustrating a procedure for designing a triple mode filter.
【図６】従来の高周波三重モード圧電フィルタの構成を
示す断面図である。FIG. 6 is a cross-sectional view showing a configuration of a conventional high frequency triple mode piezoelectric filter.
【図７】従来の高周波三重モード圧電フィルタのフィル
タ特性である。FIG. 7 is a filter characteristic of a conventional high frequency triple mode piezoelectric filter.
【図８】（ａ）は高周波三重モード圧電フィルタの薄肉
部（振動部）の平行度を示す断面図、（ｂ）は（ａ）の
ように電極を接続した場合の共振特性である。8A is a cross-sectional view showing the parallelism of a thin portion (vibrating portion) of a high frequency triple mode piezoelectric filter, and FIG. 8B is a resonance characteristic when electrodes are connected as shown in FIG. 8A.
１・・圧電基板 １ｃ・・凹陥部 ２、３、４、５・・電極 Ｌ・・電極の寸法 1 ... Piezoelectric substrate 1c ... Recessed part 2, 3, 4, 5 ... Electrode L · · Electrode dimensions
Claims (3)
た圧電基板の平坦側に３つの電極を近接して配置すると
共に該電極を対向して凹陥側に全面電極を付着して構成
した三重モード圧電フィルタにおいて、 前記３つの電極のうち中央の電極の大きさを他の２つの
電極の大きさより小さくしたことを特徴とする高周波圧
電フィルタ。1. A structure in which three electrodes are arranged close to each other on a flat side of a piezoelectric substrate having a recess formed in the central portion of one main surface, and the electrodes are opposed to each other and a full surface electrode is attached to the recess side. In the triple mode piezoelectric filter described above, the size of the central electrode of the three electrodes is smaller than the sizes of the other two electrodes.
ことを特徴とする請求項１に記載の高周波圧電フィル
タ。2. The high frequency piezoelectric filter according to claim 1, wherein the entire surface electrode on the concave side is a partial electrode.
等しくすると共に中央の電極の大きさを他の２つの電極
の１／２としたことを特徴とする請求項１又は２に記載
の高周波圧電フィルタ。3. The size of the electrodes at both ends of the three electrodes is made equal, and the size of the central electrode is made 1/2 of that of the other two electrodes. High frequency piezoelectric filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001221412A JP2003037476A (en) | 2001-07-23 | 2001-07-23 | High-frequency piezoelectric filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001221412A JP2003037476A (en) | 2001-07-23 | 2001-07-23 | High-frequency piezoelectric filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003037476A true JP2003037476A (en) | 2003-02-07 |
Family
ID=19055086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001221412A Pending JP2003037476A (en) | 2001-07-23 | 2001-07-23 | High-frequency piezoelectric filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003037476A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004100368A1 (en) * | 2003-05-08 | 2004-11-18 | Murata Manufacturing Co., Ltd. | Piezoelectric filter |
| JP2009188484A (en) * | 2008-02-04 | 2009-08-20 | Epson Toyocom Corp | Piezoelectric filter |
| US9136793B2 (en) | 2012-06-06 | 2015-09-15 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element |
| US9325046B2 (en) | 2012-10-25 | 2016-04-26 | Mesaplexx Pty Ltd | Multi-mode filter |
| US9401537B2 (en) | 2011-08-23 | 2016-07-26 | Mesaplexx Pty Ltd. | Multi-mode filter |
| US9406988B2 (en) | 2011-08-23 | 2016-08-02 | Mesaplexx Pty Ltd | Multi-mode filter |
| US9614264B2 (en) | 2013-12-19 | 2017-04-04 | Mesaplexxpty Ltd | Filter |
| US9843083B2 (en) | 2012-10-09 | 2017-12-12 | Mesaplexx Pty Ltd | Multi-mode filter having a dielectric resonator mounted on a carrier and surrounded by a trench |
-
2001
- 2001-07-23 JP JP2001221412A patent/JP2003037476A/en active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004100368A1 (en) * | 2003-05-08 | 2004-11-18 | Murata Manufacturing Co., Ltd. | Piezoelectric filter |
| JP2009188484A (en) * | 2008-02-04 | 2009-08-20 | Epson Toyocom Corp | Piezoelectric filter |
| US9559398B2 (en) | 2011-08-23 | 2017-01-31 | Mesaplex Pty Ltd. | Multi-mode filter |
| US9401537B2 (en) | 2011-08-23 | 2016-07-26 | Mesaplexx Pty Ltd. | Multi-mode filter |
| US9406993B2 (en) | 2011-08-23 | 2016-08-02 | Mesaplexx Pty Ltd | Filter |
| US9406988B2 (en) | 2011-08-23 | 2016-08-02 | Mesaplexx Pty Ltd | Multi-mode filter |
| US9437916B2 (en) | 2011-08-23 | 2016-09-06 | Mesaplexx Pty Ltd | Filter |
| US9437910B2 (en) | 2011-08-23 | 2016-09-06 | Mesaplexx Pty Ltd | Multi-mode filter |
| US9698455B2 (en) | 2011-08-23 | 2017-07-04 | Mesaplex Pty Ltd. | Multi-mode filter having at least one feed line and a phase array of coupling elements |
| US9136793B2 (en) | 2012-06-06 | 2015-09-15 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and method of manufacturing resonator element |
| US9843083B2 (en) | 2012-10-09 | 2017-12-12 | Mesaplexx Pty Ltd | Multi-mode filter having a dielectric resonator mounted on a carrier and surrounded by a trench |
| US9325046B2 (en) | 2012-10-25 | 2016-04-26 | Mesaplexx Pty Ltd | Multi-mode filter |
| US9614264B2 (en) | 2013-12-19 | 2017-04-04 | Mesaplexxpty Ltd | Filter |
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