JP2003037256A - Package type solid-state image pickup element - Google Patents
Package type solid-state image pickup elementInfo
- Publication number
- JP2003037256A JP2003037256A JP2001224203A JP2001224203A JP2003037256A JP 2003037256 A JP2003037256 A JP 2003037256A JP 2001224203 A JP2001224203 A JP 2001224203A JP 2001224203 A JP2001224203 A JP 2001224203A JP 2003037256 A JP2003037256 A JP 2003037256A
- Authority
- JP
- Japan
- Prior art keywords
- solid
- state image
- image pickup
- package
- internal space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85909—Post-treatment of the connector or wire bonding area
- H01L2224/8592—Applying permanent coating, e.g. protective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、固体撮像素子に係
わり、その中でも特に、固体撮像素子チップをパッケー
ジ内に封入したパッケージ型の固体撮像素子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image sensor, and more particularly to a package type solid-state image sensor in which a solid-state image sensor chip is enclosed in a package.
【0002】[0002]
【従来の技術】近年、ビデオカメラやデジタルカメラな
ど用い、希望する風景、人物などの被写体を撮影、電気
信号化し、得られた電気信号を画像化してCRT、液晶
表示装置などのモニター画面上にモニター表示すること
は容易となっている。また、パーソナルコンピュータ、
携帯電話を用いた電子メールのやり取りにデジタル画像
データを添付する機会も多くなっているといえ、ビデオ
カメラやデジタルカメラに代表される電子的な撮像機器
への関心が高まっているといえる。2. Description of the Related Art In recent years, using a video camera or a digital camera, an object such as a desired landscape or a person is photographed, converted into an electric signal, and the obtained electric signal is imaged and displayed on a monitor screen such as a CRT or a liquid crystal display device. It is easy to display on the monitor. Also, a personal computer,
It can be said that there are many opportunities to attach digital image data to the exchange of e-mail using a mobile phone, and it can be said that interest in electronic imaging devices represented by video cameras and digital cameras is increasing.
【0003】ここで図7は、電子的撮像機器に組み込ま
れる固体撮像装置702を摸式的に表わしたものであ
る。図7に示すように、固体撮像装置702は、固体撮
像素子71を有する収納容器703と、入射光を集光す
るレンズ704、レンズを保持する鏡筒705などから
なる光学系機構706とを主な構成要素としている。な
お、固体撮像装置の構成要素として他に、電気信号を変
換する各種電子部品やシャッターなどの機械的駆動機構
等もあげられるが説明の都合上図示を省略している。FIG. 7 is a schematic diagram showing a solid-state image pickup device 702 incorporated in an electronic image pickup device. As shown in FIG. 7, the solid-state imaging device 702 mainly includes a storage container 703 having a solid-state imaging device 71, an optical system mechanism 706 including a lens 704 that collects incident light, a lens barrel 705 that holds the lens, and the like. As a component. Other components of the solid-state imaging device include various electronic components for converting electric signals, mechanical driving mechanisms such as shutters, etc., but they are not shown for convenience of description.
【0004】図7に示すように、固体撮像装置を構成す
る主要部品の一つに固体撮像素子71があげられる。固
体撮像素子は、CCD、CMOSに代表される固体撮像
素子チップを有するもので、光学系機構を通して固体撮
像装置内部に入射する光を電気信号に変換する機能を有
する。As shown in FIG. 7, a solid-state image pickup element 71 is one of the main components of the solid-state image pickup device. The solid-state image pickup device has a solid-state image pickup device chip represented by CCD and CMOS, and has a function of converting light entering the inside of the solid-state image pickup device through an optical system mechanism into an electric signal.
【0005】ここで、固体撮像素子として、パッケージ
型の固体撮像素子が知られている。図5および図6に示
すように、パッケージ型の固体撮像素子51は、プラス
チックやセラミックまたはガラスなどを材質とするパッ
ケージ52内にCCD、CMOSなどの固体撮像素子チ
ップ53を搭載している。すなわち、パッケージ52は
固体撮像素子チップ53を内部に格納するための内部空
間54を有するもので、内部空間54内に固体撮像素子
チップ53が配置される。なお、図6はパッケージ型の
固体撮像素子51の斜視説明図であり、図5は図6のX
−Y線における断面図を表わす。固体撮像装置内に入射
した光は固体撮像素子51にて電気信号に変換される。
そのため、光が入射するよう内部空間54には開口部5
5が形成されている。開口部55より光が固体撮像素子
51内に入り、その光は固体撮像素子チップ53に形成
された受光部56に入射後電気信号に変換される。A package type solid-state image pickup device is known as a solid-state image pickup device. As shown in FIGS. 5 and 6, the package type solid-state image pickup device 51 has a solid-state image pickup device chip 53 such as CCD or CMOS mounted in a package 52 made of plastic, ceramic, glass or the like. That is, the package 52 has an internal space 54 for storing the solid-state image sensor chip 53 therein, and the solid-state image sensor chip 53 is arranged in the internal space 54. 6 is a perspective explanatory view of the package type solid-state imaging device 51, and FIG.
-Shows a sectional view taken along the line Y. Light that has entered the solid-state imaging device is converted into an electric signal by the solid-state imaging device 51.
Therefore, the opening 5 is provided in the internal space 54 so that light may enter.
5 is formed. Light enters the solid-state image sensor 51 through the opening 55, and the light is converted into an electric signal after being incident on the light-receiving section 56 formed in the solid-state image sensor chip 53.
【0006】通常、パッケージ52に形成された開口部
55にはガラス、プラスチックなど透光可能な部材が蓋
として接着剤などで固定されている(以下、パッケージ
52の開口部55に蓋をする部材を透光部材57と記
す)。すなわち、透光部材57で蓋をすることにより、
固体撮像素子51の内部空間54内にゴミなどの異物が
進入することを防止するとともに、固体撮像素子51の
内部空間54を密閉空間とすることで周辺雰囲気からの
湿気が素子内に進入するのを防ぎ、素子の耐久性を向上
させている。なお、一般的なパッケージ型固体撮像素子
51では外部機器との電気的接続を行うことを主要目的
として、図に示すように、外周に外部接続端子58が配
設されている。外部接続端子58の一方の端は内部空間
54に延在しインナーリード59となり、固体撮像素子
チップ53に形成された各電極パッド(図示せず)と各
インナーリード59とは金属ワイヤー60でボンディン
グされ電気的接続が行われる。なお図示しないが、電極
パッドとインナーリードとの接続は金バンプで行われる
場合もある。固体撮像素子チップ53により光から変換
された電気信号は外部接続端子58を経由して固体撮像
素子51の外部に配置された各種の機器や素子などに送
られる。Usually, a translucent member such as glass or plastic is fixed to the opening 55 formed in the package 52 with an adhesive or the like as a lid (hereinafter, a member for covering the opening 55 of the package 52). Is referred to as a transparent member 57). That is, by covering with the translucent member 57,
Foreign matter such as dust is prevented from entering the internal space 54 of the solid-state imaging device 51, and moisture from the surrounding atmosphere enters the device by making the internal space 54 of the solid-state imaging device 51 a closed space. To improve the durability of the device. In the general package type solid-state imaging device 51, an external connection terminal 58 is provided on the outer periphery as shown in the figure, mainly for the purpose of electrically connecting to an external device. One end of the external connection terminal 58 extends into the internal space 54 to become an inner lead 59, and each electrode pad (not shown) formed on the solid-state imaging device chip 53 and each inner lead 59 are bonded with a metal wire 60. And electrical connection is made. Although not shown, gold bumps may be used to connect the electrode pads to the inner leads. The electric signal converted from light by the solid-state image sensor chip 53 is sent to various devices and elements arranged outside the solid-state image sensor 51 via the external connection terminal 58.
【0007】ここで固体撮像素子51において、固体撮
像素子チップ53の受光部56上にゴミなどの異物が付
着した場合、その異物付着部位は入射光が遮断されるた
め影となり、入射光の電気信号化が妨げられる。その結
果、モニター画面上では異物付着部位にあたかもキズが
有るかのように映し出される、いわゆるキズ表示が発生
する。以下、受光部への異物付着によりニター表示の際
に異物付着部位があたかもキズのように表示されること
を、キズ表示と記す。Here, in the solid-state image pickup device 51, when foreign matter such as dust adheres to the light receiving portion 56 of the solid-state image pickup device chip 53, the foreign matter-attached portion becomes a shadow because the incident light is blocked, and the electric power of the incident light is reduced. Signaling is hindered. As a result, what is called a flaw display is displayed on the monitor screen as if there were flaws on the foreign matter-attached portion. Hereinafter, the fact that the foreign matter-attached portion is displayed as if it were a flaw during the nitter display due to the foreign matter attached to the light receiving unit is referred to as a flaw indication.
【0008】固体撮像素子の製造にあたっては、クリー
ンルーム内で製造を行うなど、受光部56上にゴミなど
の異物が付着しないよう十分な注意が払われてはいる。
しかし、現実においては、固体撮像素子51内の内部空
間54に異物が進入することを防止することは困難であ
り、その異物が受光部56上に付着することは防げない
のが実状といえる。In the manufacture of the solid-state image pickup element, sufficient care is taken to prevent foreign matter such as dust from adhering to the light receiving section 56, for example, in a clean room.
However, in reality, it is difficult to prevent foreign matter from entering the internal space 54 in the solid-state imaging device 51, and it can be said that it is impossible to prevent the foreign matter from adhering to the light receiving unit 56.
【0009】すなわち、いかにクリーンルーム内で固体
撮像素子の製造を行ったとしても、製造工程を構成する
装置からは金属屑、ミスト状のオイルなどが異物として
発生し、また、作業者からも衣服屑、皮膚片などが異物
として発生するのは避けられない。かかる装置や作業者
などから発生した異物は、製造工程上にある固体撮像素
子の周辺雰囲気中に浮遊しているといえる。That is, no matter how the solid-state image pickup device is manufactured in a clean room, metal scraps, mist-like oil, etc. are generated as foreign matters from the apparatus constituting the manufacturing process, and the worker also wears clothes. However, it is inevitable that skin pieces will be generated as foreign matter. It can be said that the foreign matter generated from such an apparatus or an operator is floating in the atmosphere around the solid-state image sensor in the manufacturing process.
【0010】そのため、図5、図6の固体撮像素子51
においては、固体撮像素子チップ53をパッケージ52
内に納める際、周辺雰囲気中に浮遊する異物を内部空間
54内に取り込んでしまうものである。また、パッケー
ジ52の開口部55を透光部材57で蓋をする場合で
も、蓋をする前に開口部55から内部空間54内に異物
が進入するものである。Therefore, the solid-state image pickup device 51 shown in FIGS.
In the package 52
When it is stored inside, foreign matter floating in the surrounding atmosphere is taken into the internal space 54. Even when the opening 55 of the package 52 is covered with the translucent member 57, foreign matter enters the internal space 54 through the opening 55 before covering.
【0011】図4に示すように、パッケージ型固体撮像
素子51の内部空間54内に進入し空間中を浮遊する異
物は、時間がたつにつれて固体撮像素子チップ53の受
光部56上に落下するもので、モニター表示の際のキズ
表示の原因となっていた。As shown in FIG. 4, foreign matter that has entered the internal space 54 of the package type solid-state image pickup device 51 and is floating in the space falls on the light receiving portion 56 of the solid-state image pickup device chip 53 with the passage of time. Therefore, it was a cause of scratches on the monitor display.
【0012】近年、デジタルカメラに代表されるよう
に、画素数は数百万画素と多くなっており、固体撮像素
子チップ53に形成される画素は微細化している。この
ため、受光部56上に極めて微細な異物が付着すること
であっても画像表示に影響が出るようになってきてい
る。In recent years, as represented by digital cameras, the number of pixels has increased to several millions, and the pixels formed on the solid-state image pickup element chip 53 have become finer. For this reason, even if an extremely fine foreign substance adheres to the light receiving unit 56, the image display is affected.
【0013】[0013]
【発明が解決しようとする課題】本発明は、上記の問題
点に鑑みなされたものである。すなわち本発明は、受光
部を有する固体撮像素子チップをパッケージ内に搭載
し、前記受光部と対向したパッケージの開口部を透光部
材で蓋をしたパッケージ型固体撮像素子において、受光
部への異物付着を防止できる固体撮像素子を提供し、異
物付着を原因とするキズ表示のないモニター表示を行お
うとするものである。The present invention has been made in view of the above problems. That is, the present invention is a package type solid-state imaging device in which a solid-state imaging device chip having a light-receiving part is mounted in a package, and an opening of the package facing the light-receiving part is covered with a translucent member. It is intended to provide a solid-state image sensor capable of preventing adhesion, and to provide a monitor display without a scratch display due to adhesion of foreign matter.
【0014】[0014]
【課題を解決するための手段】本発明はかかる課題に鑑
みなされたもので、請求項1においては、内部空間を有
するパッケージと、前記パッケージの内部空間内に搭載
される受光部を有する固体撮像素子チップと、前記受光
部と対向するパッケージの開口部に配置され前記内部空
間を密閉空間とする透光部材とを少なくとも有するパッ
ケージ型固体撮像素子において、内部空間を形成するパ
ッケージの内壁面に粘着剤層を形成したことを特徴とす
るパッケージ型固体撮像素子としたものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and in claim 1, a solid-state image pickup having a package having an internal space and a light receiving section mounted in the internal space of the package. In a package type solid-state imaging device having at least an element chip and a light-transmissive member which is arranged in an opening of a package facing the light-receiving section and has the internal space as a closed space, an adhesive is applied to an inner wall surface of a package forming the internal space. This is a package type solid-state image pickup device characterized in that an agent layer is formed.
【0015】次いで、請求項2においては、受光部を除
く、前記内部空間に露出した固体撮像素子チップ面にも
粘着剤層を形成したことを特徴とする請求項1に記載の
パッケージ型固体撮像素子としたものである。Next, in claim 2, an adhesive layer is also formed on the surface of the solid-state image pickup device chip exposed to the internal space except the light receiving portion, and the package type solid-state image pickup according to claim 1. It is an element.
【0016】[0016]
【発明の実施の形態】以下に、本発明に係わる固体撮像
素子の実施形態の一例につき、図面を基に説明を行う。BEST MODE FOR CARRYING OUT THE INVENTION An example of an embodiment of a solid-state image pickup device according to the present invention will be described below with reference to the drawings.
【0017】図1は、本発明に係わる固体撮像素子11
の一例の要部を模式的に示す断面図である。図1に示す
本実施例に係わる固体撮像素子11は、前述した(従来
の技術)の項の図5、図6で述べた従来の固体撮像素子
51と同様の構成としている。FIG. 1 shows a solid-state image pickup device 11 according to the present invention.
It is sectional drawing which shows the principal part of an example typically. The solid-state image pickup device 11 according to the present embodiment shown in FIG. 1 has the same configuration as the conventional solid-state image pickup device 51 described with reference to FIGS.
【0018】すなわち、プラスチックやセラミックまた
はガラスなどを材質とするパッケージ12の内部空間1
4内にCCD、CMOSなどの固体撮像素子チップ13
を搭載している。内部空間14には光入射用の開口部1
5が形成され、開口部15より入射した光は固体撮像素
子チップ13に形成された受光部16に入射し電気信号
に変換される。That is, the internal space 1 of the package 12 made of plastic, ceramic, glass or the like.
Solid-state image sensor chip 13 such as CCD or CMOS in 4
It is equipped with. The internal space 14 has a light entrance opening 1
5 is formed, and the light incident through the opening 15 is incident on the light receiving portion 16 formed in the solid-state image sensor chip 13 and converted into an electric signal.
【0019】また、開口部15にはガラス、プラスチッ
クなど透光可能な透光部材17が蓋として接着剤などで
固定されている。さらに、外部機器との電気的接続を行
うことを主要目的として、外周に外部接続端子18を配
設している。外部接続端子18の一方の端は内部空間1
4に延在しインナーリード19となり、固体撮像素子チ
ップ13に形成された各電極パッド(図示せず)と各イ
ンナーリード19とは金属ワイヤー20でボンディング
し電気的接続を行っている。In addition, a transparent member 17 such as glass or plastic that can transmit light is fixed to the opening 15 as a lid with an adhesive or the like. Further, the external connection terminals 18 are provided on the outer periphery for the main purpose of electrically connecting with an external device. One end of the external connection terminal 18 has an internal space 1
4 to form inner leads 19, each electrode pad (not shown) formed on the solid-state image pickup device chip 13 and each inner lead 19 are bonded by a metal wire 20 for electrical connection.
【0020】ここで、本発明の個体撮像素子11の特徴
は、図1に示すように、固体撮像素子チップ13を収納
する内部空間14を形成するパッケージ12の内壁面に
粘着剤層1を形成するものである。Here, as shown in FIG. 1, the solid-state image pickup device 11 of the present invention is characterized in that the adhesive layer 1 is formed on the inner wall surface of the package 12 forming the internal space 14 for housing the solid-state image pickup device chip 13. To do.
【0021】すなわち、本発明の固体撮像素子11の特
徴は、図1に示すように内部空間14に露出した部位に
粘着剤層1を形成した構成としたものである。これによ
り、図3に示すように、透光部材37で蓋をし密閉空間
とする前に内部空間34に進入し空間中を浮遊する異物
は、粘着剤層1にて捕らえられる。一旦粘着剤層1に捕
らえられた異物は、そのまま粘着剤層1に付着すること
になり、受光部36上に落下することがなくなる。ま
た、仮に異物が受光部36上に落下したとしても、揺す
るなどの振動を固体撮像素子31に与える、または、固
体撮像素子31を反転させるなどで、異物は容易に受光
部36上から離脱し、その離脱した異物は粘着剤層1に
より捕らえられることになり、再度受光部36上に落下
することはなくなる。That is, the feature of the solid-state image pickup device 11 of the present invention is that the pressure-sensitive adhesive layer 1 is formed on the portion exposed to the internal space 14 as shown in FIG. As a result, as shown in FIG. 3, foreign substances that enter the internal space 34 and float in the space before being covered with the translucent member 37 to form a closed space are caught by the adhesive layer 1. The foreign matter once trapped in the pressure-sensitive adhesive layer 1 will be attached to the pressure-sensitive adhesive layer 1 as it is, and will not fall onto the light receiving portion 36. Further, even if the foreign matter falls on the light receiving section 36, the foreign matter is easily detached from the light receiving section 36 by giving vibrations such as shaking to the solid-state imaging element 31 or reversing the solid-state imaging element 31. The detached foreign matter is caught by the adhesive layer 1 and does not fall onto the light receiving unit 36 again.
【0022】次いで図2は、本発明に係わる他の固体撮
像素子21の例を模式的に示す断面図である。図2の固
体撮像素子21においても、前述した(従来の技術)の
項の図5、図6で述べた固体撮像素子51と同様の構造
としている。Next, FIG. 2 is a sectional view schematically showing an example of another solid-state image pickup device 21 according to the present invention. The solid-state image pickup device 21 of FIG. 2 also has the same structure as the solid-state image pickup device 51 described in FIG. 5 and FIG.
【0023】ここで、本発明の個体撮像装置21の特徴
として、受光部26を除く固体撮像素子チップ23面に
も粘着剤層1を形成している。Here, as a feature of the solid-state image pickup device 21 of the present invention, the adhesive layer 1 is also formed on the surface of the solid-state image pickup element chip 23 excluding the light receiving portion 26.
【0024】これにより、異物を付着させる粘着剤層部
位を多くする事が出来、異物付着効率を上げることが可
能となる。なお、受光部26上に粘着剤層を形成する
と、受光部26上に落ちた異物がそのまま受光部26上
に付着することになってしまうため好ましくない。As a result, it is possible to increase the number of areas of the pressure-sensitive adhesive layer to which foreign matter is attached, and it is possible to improve the efficiency of foreign matter attachment. It should be noted that if the adhesive layer is formed on the light receiving portion 26, the foreign matter that has fallen onto the light receiving portion 26 will adhere to the light receiving portion 26 as it is, which is not preferable.
【0025】ここで、粘着剤層1を構成する粘着剤は特
に限定しないが、気化して固体撮像素子チップに影響を
及ぼさないものが望ましい。また、固体撮像素子の使用
環境における温度で流動化、劣化しないものが望まし
く、さらには、内部空間に進入した入射光を乱反射させ
ない材質、屈折率とすることが望ましいといえる。粘着
剤は、固体撮像素子の使用環境などを考慮し適宜材質を
選択して構わないが、例えばアクリル系粘着剤、SEB
S系粘着剤は好適に用いられるものである。また、屈折
率の観点からは、内部空間内が空気であれば空気の屈折
率(n=1)に近い低屈折率の材質(例えば、フッ素系
樹脂からなる粘着剤)を用いることが望ましく、また、
内部空間内に窒素などの気体を充填することであれば、
その充填気体の屈折率に近い屈折率を有する材質を選択
することが望ましい。Here, the pressure-sensitive adhesive forming the pressure-sensitive adhesive layer 1 is not particularly limited, but it is desirable that it does not vaporize and affects the solid-state image pickup device chip. Further, it is preferable that the solid-state image sensor does not fluidize or deteriorate at the temperature in the usage environment, and further, it is preferable that the material and the refractive index do not diffusely reflect the incident light entering the internal space. The pressure-sensitive adhesive may be appropriately selected in consideration of the usage environment of the solid-state image pickup device. For example, acrylic pressure-sensitive adhesive, SEB
The S-based pressure-sensitive adhesive is preferably used. From the viewpoint of the refractive index, if the inner space is air, it is desirable to use a material having a low refractive index close to the refractive index (n = 1) of air (for example, a pressure-sensitive adhesive made of a fluorine-based resin), Also,
If filling the interior space with a gas such as nitrogen,
It is desirable to select a material having a refractive index close to that of the filling gas.
【0026】次いで、粘着剤層の形成手段としては、塗
布、スプレーコーティング等があげられるが、固体撮像
素子の構成などを考慮し、粘着剤層の形成時に受光面や
透光部材などに粘着剤が付着しないよう、適宜形成手段
を選択して構わない。Next, as the means for forming the pressure-sensitive adhesive layer, coating, spray coating and the like can be mentioned. Considering the constitution of the solid-state image pickup element, etc., the pressure-sensitive adhesive is formed on the light-receiving surface or the light transmitting member when forming the pressure-sensitive adhesive layer. The forming means may be appropriately selected so as not to adhere.
【0027】以上、本発明の固体撮像素子の実施形態の
例につき説明したが、本発明の実施形態は上述した説明
および図面に限定されるものではなく、本発明の主旨に
基き種々の変形を行っても構わないことは言うまでもな
い。Although the example of the embodiment of the solid-state image pickup device of the present invention has been described above, the embodiment of the present invention is not limited to the above description and drawings, and various modifications can be made based on the gist of the present invention. It goes without saying that you can go.
【0028】例えば、受光部と対向する部位を除いた透
光部材部位にも粘着剤層を形成して構わない。また、上
述した説明では、電極パッドとインナーリードとの電気
的接続をワイヤーボンディングにて行っているが、金バ
ンプで電気的接続を行うことであっても構わない。For example, the pressure-sensitive adhesive layer may be formed on the transparent member portion except the portion facing the light receiving portion. Further, in the above description, the electrical connection between the electrode pad and the inner lead is made by wire bonding, but the electrical connection may be made by a gold bump.
【0029】[0029]
【発明の効果】本発明の固体撮像素子においては、固体
撮像素子チップを搭載するパッケージの内壁面に粘着剤
層を形成している。内部空間を浮遊する異物は粘着剤層
にて捕らえ、粘着剤層にそのまま付着することになる。
また、受光部上に異物が落ちた場合であっても、固体撮
像素子への振動、反転により受光部上からの異物除去が
可能であり、その除去された異物は粘着剤層に捕らえら
れ、受光部上に再付着することがなくなる。In the solid-state image sensor of the present invention, the adhesive layer is formed on the inner wall surface of the package on which the solid-state image sensor chip is mounted. The foreign matter floating in the internal space is caught by the adhesive layer and adheres to the adhesive layer as it is.
Further, even when a foreign substance falls on the light receiving unit, it is possible to remove the foreign substance from the light receiving unit by vibrating and reversing the solid-state image sensor, and the removed foreign substance is captured by the adhesive layer, It does not re-deposit on the light receiving part.
【0030】すなわち、本発明の固体撮像素子は、内部
空間内に進入した異物が受光部に付着して生じるモニタ
ー表示の際のキズ表示を防止でき、優れたモニター表示
が可能となる。In other words, the solid-state image pickup device of the present invention can prevent the scratch display at the time of the monitor display caused by the foreign matter that has entered the internal space and is attached to the light receiving portion, and can realize the excellent monitor display.
【0031】また従来は、製造工程中に内部空間内に進
入した異物が受光部に落ちモニター表示の際にキズ表示
を生じる固体撮像素子は、製品を市場に出荷する前の検
査で不良品としてはねられ、市場に出荷できない場合が
多かった。すなわち、受光部上に落下した異物を、固体
撮像素子への振動、反転などで受光部上から除去して仮
に検査を通過させても、その除去された異物は密閉され
た内部空間内に存在することになり、いずれ受光部上に
再付着する恐れがあるため、市場には出荷できないもの
であった。そのため、不良品数に応じて固体撮像素子の
再生産を行わねばなず、製造効率の低下、製造コストの
上昇などの問題をもたらしていた。Conventionally, a solid-state image pickup device in which foreign matter that has entered the internal space during the manufacturing process falls on the light receiving portion and causes a scratch display during monitor display is a defective product in an inspection before shipping the product to the market. It was often hit and unable to ship to the market. That is, even if a foreign substance that has fallen onto the light receiving unit is removed from the light receiving unit by vibration or reversal of the solid-state image sensor and the inspection is passed, the removed foreign substance exists in the sealed internal space. Therefore, it may not be shipped to the market because it may adhere to the light receiving unit again. Therefore, the solid-state imaging device must be re-produced according to the number of defective products, which causes problems such as a decrease in manufacturing efficiency and an increase in manufacturing cost.
【0032】しかるに本発明の固体撮像素子において
は、製造工程中に空間内に進入した異物は粘着剤層に付
着するもので、受光部に付着してキズ表示となることを
防止できる。しかも、検査の際に受光部上に異物が付着
しているのが見つかり一旦不良品となった場合であって
も、固体撮像素子への振動、反転などで受光部上から異
物を除去することが可能であり、その除去された異物は
粘着剤層にて捕らえられ受光部上への再付着が防止され
る。すなわち、一旦不良となったものでも良品として出
荷することが可能となる。以上述べたように、本発明の
固体撮像素子の構造とすることで不良品を大幅に減らす
ことが可能となり、再生産による製造効率の低下を防止
でき、また、資材の節約を行うことが可能になるという
効果も奏するものである。In the solid-state image pickup device of the present invention, however, foreign matter that has entered the space during the manufacturing process adheres to the adhesive layer, and can prevent the display of scratches by adhering to the light receiving portion. Moreover, even if foreign matter is found to have adhered to the light receiving part during inspection and once it becomes a defective product, it should be removed from the light receiving part by vibration or reversal of the solid-state image sensor. The removed foreign matter is captured by the pressure-sensitive adhesive layer and prevented from re-adhering on the light receiving portion. In other words, even a defective product can be shipped as a good product. As described above, by adopting the structure of the solid-state image pickup device of the present invention, it is possible to significantly reduce the number of defective products, prevent a decrease in manufacturing efficiency due to remanufacturing, and save material. It also has the effect of becoming.
【0033】[0033]
【図1】本発明の固体撮像素子の一実施例の要部を模式
的に示す断面説明図。FIG. 1 is a sectional explanatory view schematically showing a main part of an embodiment of a solid-state image pickup device of the present invention.
【図2】本発明の固体撮像素子の他の実施例の要部を模
式的に示す断面説明図。FIG. 2 is a sectional explanatory view schematically showing a main part of another embodiment of the solid-state imaging device of the present invention.
【図3】粘着剤層への異物付着の例を示す説明図。FIG. 3 is an explanatory view showing an example of adhesion of foreign matter to an adhesive layer.
【図4】受光面への異物落下の例を示す説明図。FIG. 4 is an explanatory view showing an example of foreign matter falling on a light receiving surface.
【図5】従来の固体撮像素子の一例の要部を模式的に示
す断面説明図。FIG. 5 is a cross-sectional explanatory view schematically showing a main part of an example of a conventional solid-state imaging device.
【図6】従来の固体撮像素子の一例の要部を模式的に示
す斜視説明図。FIG. 6 is a perspective explanatory view schematically showing a main part of an example of a conventional solid-state imaging device.
【図7】固体撮像装置の要部を模式的に示す説明図。FIG. 7 is an explanatory diagram schematically showing a main part of a solid-state imaging device.
1 ・・・
・粘着剤層
11、21、31、51、71 ・・
・・固体撮像素子
12、22、32、52 ・・・・
パッケージ
13、23、33、53 ・・
・・固体撮像素子チップ
14、24、34、54 ・・・
・内部空間
15、25、35、55 ・・・・
開口部
16、26、36、56 ・・・・受
光部
17、27、37、57 ・・・・透光
部材
18、28、58 ・・
・・接続端子
19、29、59 ・・・
・インナーリード
20、30、60 ・
・・・ワイヤー
702 ・
・・・固体撮像装置
703 ・
・・・収納容器
704 ・
・・・レンズ
705 ・
・・・鏡筒
706 ・
・・・光学系機構
707 ・
・・・透明基板1 ...
・ Adhesive layers 11, 21, 31, 51, 71 ・ ・
..Solid-state image pickup devices 12, 22, 32, 52 ...
Package 13, 23, 33, 53 ...
.... Solid-state image pickup device chips 14, 24, 34, 54
・ Internal spaces 15, 25, 35, 55 ・ ・ ・ ・
Openings 16, 26, 36, 56 ..... Light receiving parts 17, 27, 37, 57 ..... Translucent members 18, 28, 58 ..
..Connecting terminals 19, 29, 59 ...
・ Inner leads 20, 30, 60 ・
... Wire 702
... Solid-state imaging device 703
... Storage container 704
... Lens 705
... Lens 706
... Optical system mechanism 707
... Transparent substrate
───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4M118 AA10 BA10 BA14 HA02 HA30 HA31 HA40 ─────────────────────────────────────────────────── ─── Continued front page F-term (reference) 4M118 AA10 BA10 BA14 HA02 HA30 HA31 HA40
Claims (2)
ケージの内部空間内に搭置される受光部を有する固体撮
像素子チップと、前記受光部と対向するパッケージの開
口部に配置され前記内部空間を密閉空間とする透光部材
とを少なくとも有するパッケージ型固体撮像素子におい
て、内部空間を形成するパッケージの内壁面に粘着剤層
を形成したことを特徴とするパッケージ型固体撮像素
子。1. A package having an internal space, a solid-state image sensor chip having a light receiving section mounted in the internal space of the package, and an internal space disposed in an opening of the package facing the light receiving section. What is claimed is: 1. A packaged solid-state imaging device comprising at least a light-transmitting member as a closed space, wherein an adhesive layer is formed on an inner wall surface of a package forming an internal space.
体撮像素子チップ面にも粘着剤層を形成したことを特徴
とする請求項1に記載のパッケージ型固体撮像素子。2. The package type solid-state image pickup device according to claim 1, wherein an adhesive layer is also formed on the surface of the solid-state image pickup device chip exposed in the internal space except for the light receiving portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001224203A JP2003037256A (en) | 2001-07-25 | 2001-07-25 | Package type solid-state image pickup element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001224203A JP2003037256A (en) | 2001-07-25 | 2001-07-25 | Package type solid-state image pickup element |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2003037256A true JP2003037256A (en) | 2003-02-07 |
Family
ID=19057411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008084812A1 (en) * | 2007-01-09 | 2008-07-17 | Panasonic Corporation | Imaging device, method for manufacturing the imaging device, and portable terminal device |
JP2008251712A (en) * | 2007-03-29 | 2008-10-16 | Sony Corp | Solid-state imaging device |
JP2010109815A (en) * | 2008-10-31 | 2010-05-13 | Weistech Technology Co Ltd | Multi-lens image sensor module |
KR101046120B1 (en) * | 2009-08-27 | 2011-07-01 | 삼성전기주식회사 | Camera module |
KR101070918B1 (en) | 2006-08-14 | 2011-10-06 | 삼성테크윈 주식회사 | Camera module and method of manufacturing the same |
US8717470B2 (en) | 2009-09-09 | 2014-05-06 | Canon Kabushiki Kaisha | Solid-state imaging apparatus and digital camera |
CN106612620A (en) * | 2015-08-21 | 2017-05-03 | 株式会社藤仓 | Optical element module and method for manufacturing optical element module |
-
2001
- 2001-07-25 JP JP2001224203A patent/JP2003037256A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101070918B1 (en) | 2006-08-14 | 2011-10-06 | 삼성테크윈 주식회사 | Camera module and method of manufacturing the same |
WO2008084812A1 (en) * | 2007-01-09 | 2008-07-17 | Panasonic Corporation | Imaging device, method for manufacturing the imaging device, and portable terminal device |
JP2008251712A (en) * | 2007-03-29 | 2008-10-16 | Sony Corp | Solid-state imaging device |
JP2010109815A (en) * | 2008-10-31 | 2010-05-13 | Weistech Technology Co Ltd | Multi-lens image sensor module |
KR101046120B1 (en) * | 2009-08-27 | 2011-07-01 | 삼성전기주식회사 | Camera module |
US8717470B2 (en) | 2009-09-09 | 2014-05-06 | Canon Kabushiki Kaisha | Solid-state imaging apparatus and digital camera |
CN106612620A (en) * | 2015-08-21 | 2017-05-03 | 株式会社藤仓 | Optical element module and method for manufacturing optical element module |
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